Ultra-low dew point measuring device using cooling mirror

Abstract

The present invention provides an ultra-low dew point measuring device using a cooling mirror, which measures a dew point using a cooling mirror and takes into account air circulation inside a housing, the ultra-low dew point measuring device comprising: a housing unit including a module mounting hole; a dew point measurement unit mounted in the module mounting hole and including a cooling mirror and a Peltier element; a heat dissipation unit disposed inside the housing unit and including a first heat dissipation plate connected to the Peltier element; an air circulation unit that injects air to be measured from the outside of the housing toward the cooling mirror; and a control unit that controls the dew point measurement unit, the heat dissipation unit, and the air circulation unit and acquires dew point data.

Description

Ultra-low dew point measuring device using a cooling mirror

[0001] Embodiments of the present invention relate to an ultra-low dew point measuring device using a chilled mirror, and more specifically, to an ultra-low dew point measuring device that measures an ultra-low dew point using a chilled mirror, improves the efficiency of air circulation inside a housing, and takes long-term usability into consideration.

[0002] Dew point measurement using dew point is a conventional humidity measurement method. Dew point measurement devices and methods using chilled mirrors are also commonly known.

[0003] However, measuring the low dew point of a cooling mirror and maintaining it for an extended period generates significant heat, and conventional dew point measuring instruments are prone to heat accumulation. Therefore, when using ultra-low dew point measuring devices, it can be difficult to establish and maintain low temperatures, making accurate ultra-low dew point measurements difficult.

[0004] Therefore, an ultra-low dew point measuring device is required that can effectively discharge heat generated in the process of forming and maintaining a low temperature of the cooling mirror to the outside of the device and maintain a constant low temperature of the cooling mirror.

[0005] In addition, in order to measure ultra-low dew point precisely and operate the ultra-low dew point measuring device stably for a long period of time, an ultra-low dew point measuring device capable of constantly injecting the target air into the sensor is required.

[0006] The present invention is intended to solve various problems including the above-mentioned problems, and aims to provide an ultra-low dew point measuring device that can replace existing expensive large dew point meters, continuously measure ultra-low dew points for a long period of time, and at the same time drastically reduce the size of the device through efficient internal air circulation.

[0007] In addition, another object of the present invention is to provide an ultra-low dew point measuring device capable of accurately measuring ultra-low dew points by precisely controlling the air being measured passing through a cooling mirror. However, this task is exemplary and the scope of the present invention is not limited thereby.

[0008] In order to solve the above-described problem, an ultra-low dew point measuring device using a cooling mirror according to one embodiment of the present invention may include a housing including a module mounting hole, a dew point measuring unit mounted in the module mounting hole and including a cooling mirror and a Peltier element, a heat dissipation unit including a first heat dissipation plate disposed inside the housing and connected to the Peltier element, an air circulation unit that injects air to be measured from outside the housing toward the cooling mirror, and a control unit that controls the dew point measuring unit, the heat dissipation unit, and the air circulation unit and obtains dew point data.

[0009] In one embodiment, the heat dissipation unit further includes an intake fan that introduces external air of the housing into the first heat dissipation unit, and the intake fan can introduce the external air into the housing through a plurality of intake holes of the housing unit.

[0010] In one embodiment, the housing portion may further include a plurality of exhaust holes through which the outside air is discharged outside the housing through the first heat sink.

[0011] In one embodiment, the plurality of intake holes may be arranged on the lower surface of the housing, and the plurality of exhaust holes may be arranged on the side surface of the housing.

[0012] In one embodiment, the air circulation unit may include an air injection unit and an air discharge unit penetrating one surface of the housing unit, and may include an internal fan that forms a pressure difference in the air injection unit and the air discharge unit.

[0013] In one embodiment, the device may further include a first pressure sensor for measuring the pressure inside the air injection unit and a second pressure sensor for measuring the pressure inside the air discharge unit.

[0014] In one embodiment, the control unit may obtain first air pressure data inside the air injection unit from the first air pressure sensor, obtain second air pressure data inside the air discharge unit from the second air pressure sensor, and control the internal fan based on the first air pressure data and the second air pressure data.

[0015] In one embodiment, the air injection unit may include a filter that filters dust from the air to be measured.

[0016] In one embodiment, the dew point measuring unit may include a main body part that is mounted in the module mounting hole and includes the cooling mirror and the Peltier material, and a head part that is connected to the main body part and includes an optical sensor that measures the degree of scattering of light reflected from the cooling mirror.

[0017] In one embodiment, the head portion includes a magnetic body of a first polarity and the body portion includes a magnetic body of a second polarity, and the head portion can be detached from the body portion using the magnetic body of the first polarity and the magnetic body of the second polarity.

[0018] In one embodiment, when the head portion is removed, the upper surface of the cooling mirror may be exposed to the outside of the main body portion.

[0019] In one embodiment, the optical sensor may include a light emitting unit that irradiates light toward the upper surface of the cooling mirror, and a sensing unit that detects light reflected from the upper surface of the cooling mirror.

[0020] In one embodiment, the main body may further include an internal injection hole disposed around the cooling mirror and injecting target air toward the upper surface of the cooling mirror, and an internal discharge hole disposed to discharge target air. In one embodiment, the main body may further include a protrusion surrounding the cooling mirror and the internal injection hole and the internal discharge hole in a plan view. In one embodiment, the target air moves from the inside of a duct portion disposed outside the ultra-low dew point measuring device toward the upper surface of the cooling mirror, and the target air may be discharged into the inside of the duct portion past the upper surface of the cooling mirror.

[0021] In one embodiment, the device may further include a flange structure connected to the air injection unit and the air discharge unit and connected to the interior of the duct unit.

[0022] According to one embodiment of the present invention, as described above, an ultra-low dew point measuring device utilizing a chilled mirror capable of precisely measuring dew points can be implemented. Of course, the scope of the present invention is not limited by these effects.

[0023] An ultra-low dew point measuring device according to one embodiment of the present invention can effectively discharge heat generated from a Peltier element by a heat dissipation unit.

[0024] An ultra-low dew point measuring device according to one embodiment of the present invention can constantly inject target air to the surface of a cooling mirror using an air circulation unit.

[0025] An ultra-low dew point measuring device according to one embodiment of the present invention can precisely inhale and discharge air inside a desired duct or the like through a flange structure, and as a result, can precisely measure the ultra-low dew point.

[0026] An ultra-low dew point measuring device according to one embodiment of the present invention can be easily installed on a desired wall surface or the like through a bracket structure, and can safely measure the dew point from external impact through a buffer.

[0027] An ultra-low dew point measuring device according to one embodiment of the present invention is manufactured in consideration of smooth circulation of air inside the device in order to precisely measure the dew point. According to the ultra-low dew point measuring device according to one embodiment of the present invention, circulation of external air for heat generation control and circulation of target air for dew point measurement are smoothly performed.

[0028] An ultra-low dew point measuring device according to one embodiment of the present invention can prevent overloading of a cooling mirror in advance, and not only enables more precise and long-term use through constant injection and discharge of the target air, but also enables precise dew point measurement down to -70°C DP.

[0029] Figure 1 is a conceptual diagram of an ultra-low dew point measuring device using a cooling mirror according to one embodiment of the present invention.

[0030] Fig. 2 is a perspective view according to an example of the ultra-low dew point measuring device of Fig. 1.

[0031] Figure 3 is a front view according to an example of the ultra-low dew point measuring device of Figure 1.

[0032] Fig. 4 is a plan view according to an example of the ultra-low dew point measuring device of Fig. 1.

[0033] Fig. 5 is a rear view according to an example of the ultra-low dew point measuring device of Fig. 1.

[0034] Fig. 6 is a perspective view centered on the rear of the ultra-low dew point measuring device of Fig. 1.

[0035] Fig. 7 is a perspective view showing the inside of the ultra-low dew point measuring device of Fig. 1.

[0036] Fig. 8 is a drawing showing the dew point measuring unit and heat dissipation unit of the ultra-low dew point measuring device of Fig. 1.

[0037] Fig. 9 is a drawing showing the main body of the dew point measuring unit of the ultra-low dew point measuring device of Fig. 1.

[0038] Fig. 10 is a drawing showing the head part of the dew point measuring unit of the ultra-low dew point measuring device of Fig. 1.

[0039] Fig. 11 is a schematic diagram showing air circulation using the air circulation unit of the ultra-low dew point measuring device of Fig. 1.

[0040] Figure 12 is a drawing showing the cooling mirror and Peltier element inside the air circulation section of the ultra-low dew point measuring device of Figure 1.

[0041] Figures 13 and 14 are drawings showing the bracket structure of the ultra-low dew point measuring device of Figure 1.

[0042] Fig. 15 is a schematic drawing showing an example in which the ultra-low dew point measuring device of Fig. 1 is installed in an air duct.

[0043] Fig. 16 is a perspective view schematically showing an example of the plunge structure of Fig. 15.

[0044] The present invention is capable of various modifications and embodiments. Specific embodiments are illustrated in the drawings and described in detail in the detailed description. The effects and features of the present invention, as well as the methods for achieving them, will become clearer with reference to the embodiments described in detail below, along with the drawings. However, the present invention is not limited to the embodiments disclosed below and can be implemented in various forms.

[0045] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings. When describing with reference to the drawings, identical or corresponding components are given the same drawing reference numerals, and redundant descriptions thereof will be omitted.

[0046] In the following examples, when various components such as layers, films, regions, and plates are said to be "on" other components, this includes not only cases where they are "directly on" other components, but also cases where other components are interposed between them. Furthermore, for convenience of explanation, the sizes of components in the drawings may be exaggerated or reduced. For example, the sizes and thicknesses of each component shown in the drawings are arbitrarily shown for convenience of explanation, and therefore, the present invention is not necessarily limited to what is shown.

[0047] In the following examples, the x-axis, y-axis, and z-axis are not limited to three axes on an orthogonal coordinate system, and can be interpreted in a broad sense that includes them. For example, the x-axis, y-axis, and z-axis may be orthogonal to each other, but may also refer to different directions that are not orthogonal to each other.

[0048] Hereinafter, based on the above-described contents, a detailed description will be given of an ultra-low dew point measuring device using a cooling mirror according to a preferred embodiment of the present invention.

[0049] Figure 1 is a conceptual diagram of an ultra-low dew point measuring device using a cooling mirror according to one embodiment of the present invention.

[0050] As illustrated in FIG. 1, an ultra-low dew point measuring device (10) (hereinafter, ultra-low dew point measuring device) using a cooling mirror (221) according to one embodiment of the present invention may include a housing unit (100), a dew point measuring unit (200), a heat dissipation unit (300), an air circulation unit (400), and a control unit (500). Specifically, the ultra-low dew point measuring device (10) may further include a display unit (700), an interface unit (IF), and a power supply unit (600).

[0051] The housing (100) is an outer casing of the ultra-low dew point measuring device (10), and includes the necessary components inside and can play a role in protecting the necessary components from external impact or foreign substances. In addition, the housing (100) can be designed considering aesthetic factors. The housing (100) of the present specification is designed considering air circulation inside the housing (100), and has the effect of efficiently controlling the temperature inside the ultra-low dew point measuring device (10), thereby helping to precisely control the cooling mirror (221) and Peltier element (222) described later.

[0052] The dew point measuring unit (200) may be configured to include components for measuring the dew point. The dew point measuring unit (200) is mounted in a module mounting hole (see MH of FIG. 7, the same applies hereinafter) to be described later, and can measure the dew point of the target air flowing into the housing unit (100).

[0053] The dew point measuring unit (200) may include a head unit (210) and a main body unit (220). The dew point measuring unit (200) or the main body unit (220) of the dew point measuring unit (200) may include a cooling mirror (221) and a Peltier element (222). For example, the cooling mirror (221) may be cooled to a desired temperature using the Peltier element (222). As the surface temperature of the cooling mirror (221) decreases, moisture in the air may form on the surface of the cooling mirror (221). When moisture forms or condenses on the surface of the cooling mirror (221), the degree of light scattering or light reflection on the surface of the cooling mirror (221) may change. The dew point measuring unit (200) measures the dew point based on the change in the light scattering degree of the surface of the cooling mirror (221) and the surface temperature of the cooling mirror (221), and can precisely measure the dew point based on the measured dew point.

[0054] The dew point measuring unit (200) or the head unit (210) of the dew point measuring unit (200) may include an optical sensor (211) for measuring a change in the scattering degree of light on the surface of the cooling mirror (221). The optical sensor (211) can detect the degree of scattering by irradiating light of a certain wavelength on the surface of the cooling mirror (221) and detecting the light reflected from the surface of the cooling mirror (221). In order to accurately detect the degree of scattering, the housing unit (100) described in this specification is designed in consideration of the circulation of internal air, and the air circulation unit (400) of this specification is also designed in consideration of the circulation of the target air provided to the cooling mirror (221).

[0055] The heat sink (300) may be disposed inside the housing (100). The heat sink (300) may include a first heat sink (310) and an intake fan (320). For example, the first heat sink (310) may be connected to a Peltier element (222). The first heat sink (310) may exchange thermal energy with the Peltier element (222). The first heat sink (310) may be thermally connected to the Peltier element (222). The first heat sink (310) may be in contact with the Peltier element (222). The first heat sink (310) may include a material having high heat conductivity, such as aluminum, silver, or copper. The first heat sink (310) includes a plurality of heat sinks, and the plurality of heat sinks have a structure in which the heat sinks are spaced apart from each other and can efficiently dissipate the transferred thermal energy.

[0056] The intake fan (320) can reduce the air pressure inside the housing at least temporarily to draw in outside air from the housing into the housing. The intake fan (320) can generate a flow of air inside the housing in a desired direction by rotating the fan blades. For example, one side of the Peltier element (222) can be heated, and the other side of the Peltier element (222) can be cooled. The first heat sink (310) described above is connected to one side of the heated Peltier element (222) to receive the thermal energy of one side of the heated Peltier element (222). The intake fan (320) draws in outside air toward the first heat sink (310), and as a result, the thermal energy of the heated Peltier element (222) can be controlled.

[0057] The air circulation unit (400) can inject target air from the outside of the housing unit (100) toward the cooling mirror (221). The target air may be a concept distinct from the external air circulated by the intake fan (320). The target air may refer to the air that is the target for measuring the dew point.

[0058] The air circulation unit (400) may include an air injection unit (410) and an air discharge unit (420) penetrating the upper surface of the housing unit (100). The air injection unit (410) may be a type of pipe, and may be a passage or a part of a passage for injecting the air to be measured outside the housing unit (100) into the inside of the housing unit (100) or the inside of the dew point measurement unit (200). The air discharge unit (420) may also be a type of pipe, and may be a passage or a part of a passage for discharging the air to be measured inside the housing or the dew point measurement unit (200) to the outside of the housing.

[0059] The air circulation unit (400) may further include an internal fan (430). There may be at least one internal fan (430). When the internal fan (430) is driven, the pressure inside the air injection unit (410) is lowered, and as a result, the air to be measured may be introduced into the air injection unit (410). That is, the internal fan (430) may form a pressure difference between the air injection unit (410) and the air discharge unit (420). The introduced air to be measured may move toward the inside of the dew point measurement unit (200) or the surface of the cooling mirror (221).

[0060] The measured air that has reached the inside of the dew point measuring unit (200) or the surface of the cooling mirror (221) by the kinetic energy of the measured air generated by the internal fan (430) can be discharged to the outside of the housing unit (100) through the air discharge unit (420). For this purpose, a separate fan for discharging the air of the air discharge unit (420) may be additionally provided.

[0061] The control unit (500) may be configured to control components included in the ultra-low dew point measuring device (10) and to store and calculate acquired data. For example, the control unit (500) may control components such as the dew point measuring unit (200), the heat dissipation unit (300), and the air circulation unit (400), and acquire dew point data.

[0062] The control unit (500) may include at least one circuit board. For example, the control unit (500) may include a main circuit board (510) and at least one auxiliary board. For example, the at least one auxiliary board may include a first auxiliary board (520), a second auxiliary board (530), and a third auxiliary board (540).

[0063] The main circuit board (510) controls components included in the ultra-low dew point measuring device (10) and can store and calculate data acquired from a sensor included in the ultra-low dew point measuring device (10). Accordingly, the main circuit board (510) may include a processor for calculation, a memory for data storage, etc.

[0064] For example, the first auxiliary circuit board (520) may be a circuit board for controlling the air circulation unit (400) or a circuit board for controlling the interface unit (IF) to be described later. For example, the air circulation unit (400) may be controlled by the main circuit board (510), and the interface unit (IF) may be controlled by the first auxiliary circuit board (520). For another example, both the air circulation unit (400) and the interface unit (IF) may be controlled by the first auxiliary circuit board (520). For another example, the air circulation unit (400) may be controlled by the first auxiliary circuit board (520), and the interface unit (IF) may be controlled by a separate additional circuit board.

[0065] For example, the second auxiliary substrate (530) may be a circuit board for controlling the power supply unit (600) to be described later. For example, the third auxiliary substrate (540) may be a circuit board for controlling the display unit (700) to be described later.

[0066] For the convenience of explanation and convenience of the city, multiple auxiliary circuit boards are explained separately, but the main circuit board (510) and auxiliary circuit boards may be one integrated circuit board.

[0067] The display unit (700) is a configuration that can display user UI / UX, receive user control commands through touch input, etc., and provide specific information to the user. For example, the display unit (700) can be at least one of various display devices such as LCD, OLED, E-Ink, etc. For example, the display unit (700) can display the temperature of the air to be measured, the pressure of the air to be measured, the surface temperature of the cooling mirror (221), the measured dew point, the measured humidity, or the dew point.

[0068] The interface unit (IF) may be a channel or interface capable of inputting and outputting various data or signals. For example, various data acquired within the ultra-low dew point measuring device (10) may be transmitted to the user's computer or user terminal via a data line of a specific standard connected by the user. Through this, the user of the ultra-low dew point measuring device (10) according to the present invention may connect various equipment to the ultra-low dew point measuring device (10) to code various programs, input data suitable for desired experimental conditions, and receive result data.

[0069] The power supply unit (600) may be configured to supply the power required for the ultra-low dew point measuring device (10). The power supply unit (600) may include an inverter (610) that receives AC power from an external source and converts the input AC power into DC power, and a second heat sink (630) for effectively dissipating heat generated in the power supply unit (600). Alternatively, in some cases, the power supply unit (600) may optionally further include a battery unit (620).

[0070] FIG. 2 is a perspective view according to an example of the ultra-low dew point measuring device of FIG. 1, FIG. 3 is a front view according to an example of the ultra-low dew point measuring device of FIG. 1, FIG. 4 is a plan view according to an example of the ultra-low dew point measuring device of FIG. 1, FIG. 5 is a rear view according to an example of the ultra-low dew point measuring device of FIG. 1, and FIG. 6 is a perspective view centered on the rear of the ultra-low dew point measuring device of FIG. 1.

[0071] For reference, in the description of FIGS. 2 to 5, any content that is identical to or overlapping with the above-described content may be omitted.

[0072] As illustrated in FIGS. 2 and 3, the housing portion (100) may be designed to take internal air circulation into consideration, and may include a plurality of intake holes (IH) and / or a plurality of exhaust holes (OH1, OH2) taking internal air circulation into consideration. In some cases, there may be at least one intake hole and / or exhaust hole.

[0073] The housing portion (100) may include a module mounting hole. For example, a module mounting hole may be formed on the upper surface (110) of the housing portion (100), and a dew point measuring unit (200) may be mounted in the module mounting hole. The module mounting hole may have various shapes, such as a circle, an oval, a square, a rectangle, a polygon, etc., and is not limited to the shape illustrated in the drawing. The module mounting hole may vary depending on the shape of the dew point measuring unit (200) to be mounted.

[0074] The above-described display unit (700) may be arranged on the front surface (120) of the housing unit (100). In addition, a first plurality of exhaust holes (OH1) may be arranged on the front surface (120) of the housing unit (100). Through the first plurality of exhaust holes (OH1), air circulating inside the housing unit (100) may be discharged to the outside. Among the plurality of exhaust holes, the exhaust holes arranged on the front surface (120) of the housing unit (100) as shown in FIG. 2 may be the first plurality of exhaust holes (OH1).

[0075] A second plurality of exhaust holes (see OH2 of FIG. 6, the same applies hereinafter) may be arranged on the rear side of the housing portion (100) (see 150 of FIG. 6, the same applies hereinafter). Through the second plurality of exhaust holes (OH2), air circulating inside the housing portion (100) may be discharged to the outside. Among the plurality of exhaust holes, the exhaust holes arranged on the rear side (150) of the housing portion (100) as shown in FIG. 6 may be the second plurality of exhaust holes (OH2).

[0076] As illustrated in Fig. 2, an opening / closing unit (140) may be arranged on the left side of the housing portion (100). Even without opening or disassembling the entire housing portion (100), only the opening / closing unit (140) may be opened / disassembled, and through this, the opening / closing unit (140) is configured to conveniently connect additional three-phase power and data wiring, etc. to a control portion (500) located within the housing portion (100).

[0077] An air injection unit (410) and an air discharge unit (420) may be arranged on the upper surface (110) of the housing unit (100), and the air injection unit (410) and the air discharge unit (420) may be arranged to penetrate the upper surface (110) of the housing unit (100). The air injection unit (410) and the air discharge unit (420) may inject the air to be measured into the surface of the cooling mirror (221) by means of an internal fan (see 430 of FIG. 11, the same applies hereinafter) of the air circulation unit (400), and discharge the measured internal air to the outside. Although not shown in the drawing, an additional pipe may be further connected to the air injection unit (410) and the air discharge unit (420), so as to inject air at a specific location inside the space and discharge the measured air to another specific location.

[0078] As illustrated in FIGS. 3 and 5, a first data channel (910) and a second data channel (920) disposed on the lower surface of the housing portion (100) of the interface portion (IF) may be initiated. Through the first data channel (910) and the second data channel (920), a user may obtain desired data, perform coding for driving the ultra-low dew point measuring device (10), and transmit other data such as control commands. The first data channel (910) and the second data channel (920) may be connected to other devices such as a separate computing device (not shown), an external terminal (not shown), and user terminals (not shown), and may transmit and receive data with other connected devices.

[0079] Among the dew point measuring units (200), the main body (220) can be mounted in a module mounting hole (see MH of FIG. 7, the same applies hereinafter). The main body (220) can be positioned to penetrate the module mounting hole (MH). A head unit (210) can be fastened to the upper surface of the main body (220). As described below, the main body (220) and the head unit (210) can be fastened using a screw fastening method, a magnetic fastening method, a male-female fastening method, etc.

[0080] As illustrated in FIGS. 2 and 3, a first pressure sensor (S1) may be placed inside the air injection unit (410), and a second pressure sensor (S2) may be placed inside the air discharge unit (420). The first pressure sensor (S1) may measure the pressure inside the air injection unit (410). The second pressure sensor (S2) may measure the pressure inside the air discharge unit (420).

[0081] The first pressure sensor (S1) and the second pressure sensor (S2) can be controlled by the control unit (500). For example, pressure data acquired from the first pressure sensor (S1) can be transmitted to the control unit (500), and pressure data acquired from the second pressure sensor (S2) can be transmitted to the control unit (500).

[0082] The control unit (500) can control the internal fan (430) described later based on the pressure data obtained from the first pressure sensor (S1) and the second pressure sensor (S2). For example, the control unit (500) can obtain the first pressure data inside the air injection unit (410) from the first pressure sensor (S1) and obtain the second pressure data inside the air discharge unit (420) from the second pressure sensor (S2). The control unit (500) can control the internal fan (430) based on the first pressure data and the second pressure data.

[0083] It is necessary to control the amount of air injected into the cooling mirror (221) to be measured at a constant level. This is because if the amount of air injected into the cooling mirror (221) to be measured changes, it may be difficult to measure the dew point accurately.

[0084] Although not illustrated in FIGS. 1 to 3 for convenience of illustration, a filter (not illustrated) for filtering dust from the air to be measured may be installed in the air inlet (410). For example, a HEPA filter or the like may be installed in the air inlet (410). This is because if dust is included in the air to be measured, precise dew point measurement may be difficult.

[0085] As illustrated in FIG. 6, a second plurality of exhaust holes (OH2) may be arranged on the rear surface (150) of the housing portion (100). For example, the second plurality of exhaust holes (OH2) may be arranged between the first fastening bracket (810) and the second fastening bracket (820). Through the second plurality of exhaust holes (OH2), air circulating inside the housing portion (100) may be discharged to the outside.

[0086] Fig. 7 is a perspective view showing the inside of the ultra-low dew point measuring device of Fig. 1.

[0087] For reference, in the description of Fig. 7, any content that is identical or overlapping with the content of Figs. 1 to 6 described above may be omitted.

[0088] As illustrated in Fig. 7, the dew point measuring unit (200) and the heat dissipation unit (300) may be connected. Specifically, a first heat dissipation plate (310) may be connected to the lower portion of the main body (220) of the dew point measuring unit (200). An intake fan (320) may be connected to the lower portion of the first heat dissipation plate (310) to inject external air into the first heat dissipation plate (310). When the blades of the intake fan (320) rotate, external air of the housing portion (00) is introduced into the interior of the housing portion (100) through a plurality of intake holes (IH), and the introduced external air moves to the first heat dissipation plate (310) to cool the first heat dissipation plate (310).

[0089] Specifically, a cooling mirror (221) and a Peltier element (222) may be arranged inside the main body (220). The Peltier element (222) may cool the cooling mirror (221). To this end, the Peltier element (222) may be connected to one side of the first heat sink (310), and an intake fan (320) may be connected to the other side of the first heat sink (310). In order to facilitate the introduction of external air into the housing by the intake fan (320), an air guide may be arranged between the intake fan (320) and a plurality of intake holes (IH) arranged on the lower surface of the housing.

[0090] As illustrated in FIG. 7, the outside air drawn in through the intake fan (320) cools the heat of the first heat sink (310) as it passes through the first heat sink (310), and the air passing through the first heat sink (310) can be discharged to the outside of the housing part (100) through the first plurality of exhaust holes (OH1) and the second plurality of exhaust holes (OH2). Some of the air passing through the first heat sink (310) is not directly discharged to the outside of the housing part (100), but can also move in the left and right directions (±y-axis directions in FIG. 7) of the first heat sink (310). A second heat sink (630) may be arranged in the -y-axis direction of the first heat sink (310). The second heat sink (630) may be configured to discharge heat generated in the second auxiliary circuit (530). Air passing through the second heat sink (630) can be discharged to the outside of the housing part (100) through the first plurality of exhaust holes (OH1) and the second plurality of exhaust holes (OH2) described above.

[0091] As illustrated in FIG. 7, the main circuit board (510) can be arranged around the rear side (150) of the housing part (100), the first auxiliary board (520) can be arranged around the left side of the housing part (100), the second auxiliary board (530) can be arranged around the right side of the housing part (100), and the third auxiliary board (540) can be arranged around the front side (120) of the housing part (100).

[0092] Fig. 8 is a drawing showing a dew point measuring unit and a heat dissipation unit of the ultra-low dew point measuring device of Fig. 1, Fig. 9 is a drawing showing a main body part of the dew point measuring unit of the ultra-low dew point measuring device of Fig. 1, and Fig. 10 is a drawing showing a head part of the dew point measuring unit of the ultra-low dew point measuring device of Fig. 1.

[0093] For reference, in the description of FIGS. 8 to 10, any content that is identical to or overlapping with the content of FIGS. 1 to 7 described above may be omitted.

[0094] As illustrated in Fig. 8, the dew point measurement unit (200) and the heat dissipation unit (300) can be connected. A cooling mirror (221) and a Peltier element (222) can be arranged in the main body (220) of the dew point measurement unit (200). In order to inject the air to be measured toward the cooling mirror (221), the main body (220) can include an inlet unit (221T). For example, the inlet unit (221T) can be arranged to penetrate the main body-housing unit (220H) constituting the outer wall of the main body (220). The inlet unit (221T) can be connected to the air injection unit (410) described above through a first connecting pipe described below. For example, the inlet unit (221T) can have a configuration corresponding to the air injection unit (410) described above.

[0095] In order for the measured target air passing through the cooling mirror (221) to be discharged back to the outside, the main body (220) may further include an outlet portion (222T). For example, the outlet portion (222T) may be arranged to penetrate the main body-housing portion (220H) constituting the outer wall of the main body (220). The outlet portion (222T) may be connected to the air discharge portion (420) described above through a second connecting pipe described later. The outlet portion (222T) may be arranged around the inlet portion (221T). For example, the outlet portion (222T) may have a configuration corresponding to the air discharge portion (420) described above.

[0096] As illustrated in FIG. 9, the main body (220) and the head portion (210) may be detachable. When the head portion (210) is removed, the upper surface of the main body (220) may be exposed to the outside of the main body (220). The upper surface of the main body (220) may include one surface (CM) of a cooling mirror (221) and internal holes (WH) for injecting or discharging the air to be measured into or from the one surface (CM) of the cooling mirror (221). For example, the internal holes (WH) may be two holes. For example, one of the internal holes (WH) may be an internal injection hole for injecting the air to be measured into the one surface (CM) of the cooling mirror (221), and the other of the internal holes (WH) may be an internal discharge hole for discharging the air to be measured.

[0097] The internal injection hole can be connected to the inlet (221T). Therefore, the air to be measured can reach one side (CM) of the cooling mirror (221) through the internal injection hole from the inlet (221T).

[0098] The internal exhaust hole can be connected to the outlet section (222T). Therefore, the air to be measured that has passed through one side (CM) of the cooling mirror (221) can be exhausted to the outside of the main body section (220) through the outlet section (222T).

[0099] The upper surface of the main body (220) may include a sunken area (ST) that is sunken to a certain depth. The sunken area (ST) may have a shape corresponding to a convex area of ​​the head portion (210) to be described later. One surface (CM) of the cooling mirror (221) and internal holes (WH) described above may be arranged on the upper surface of the sunken area (ST). The internal holes (WH) are arranged around the cooling mirror (221), and the internal holes (WH) may be spaced apart from each other in a plan view and may also be spaced apart from one surface (CM) of the cooling mirror (221).

[0100] A protruding ledge (TW) may be arranged on the upper surface of the sunken area (WH). In a plan view, the protruding ledge (TW) may be arranged to surround one surface (CM) of the cooling mirror (221) and the internal holes (WH). By the ledge of the protruding ledge (TW), the air to be measured passing through the one surface (CM) of the cooling mirror (221) may be moved through the internal holes (WH) without leaking out to the outside. For this purpose, the protruding ledge (TW) may be sealed by a groove (RW of FIG. 10) and an elastic member (RR of FIG. 10) to be described later.

[0101] Pogo pin terminals (Pin1) may be arranged on the upper surface of the recessed area (ST). Power may be transmitted to the optical sensor (211) of the head unit (210) through the pogo pin terminals (Pin1). In addition, necessary data may be transmitted and received between the optical sensor (211) of the head unit (210) and the main circuit board (510) through the pogo pin terminals (Pin1).

[0102] As illustrated in FIG. 9, the main body (220) may include various means for fastening to the head portion (210). For convenience of illustration and explanation, various fastening means are illustrated simultaneously, but the main body (220) and the head portion (210) may be fastened using only at least one of these fastening means.

[0103] For example, the main body (220) may include a screw thread (NS) for screw connection with the head part (210). The screw thread (NS) may be arranged on at least a portion of a side surface of the main body (220). The screw thread (NS) may have a shape corresponding to the shape of a screw groove (see NH of FIG. 10 , the same applies hereinafter) of the head part (210), which will be described later. Accordingly, a user may rotate the head part (210) in an appropriate direction to connect the head part (210) and the main body part (220).

[0104] For example, the main body (220) may include at least one magnetic body (MG1 to MG4) for magnetic connection with the head body (210). At least one magnetic body (MG1 to MG4) may be placed in an edge region of the main body (220). For convenience of explanation, four magnetic bodies are illustrated in FIG. 9, but the number of magnetic bodies is only an example and the scope of the present invention is not limited thereto.

[0105] At least one magnetic body (MG1 to MG4) can have a first polarity. The head portion (210) can include a magnetic body having a second polarity opposite to the first polarity, and by adjusting the position of the magnetic body having the opposite polarity, the body portion (220) and the head portion (210) can be fastened at an accurate position or in an accurate direction. By using the magnetic body of the first polarity of the body portion (220) and the magnetic body of the second polarity of the head portion (210), the head portion (210) can be detached from the body portion (220).

[0106] For example, at least one coupling hole (HH) may be arranged in a specific area of ​​the upper surface of the main body (220). At least one coupling hole (HH) may be arranged at a position corresponding to a coupling protrusion of the head part (210) described later (see PP of FIG. 10, the same applies hereinafter). Accordingly, a user can connect the main body part (220) and the head part (210) at an accurate position.

[0107] As illustrated in FIG. 10, the head portion (210) may include a convex region (PT) having a height and shape corresponding to the sunken region (ST) of the main body portion (220) described above. A groove portion (RW) corresponding to the protruding projection (TW) described above may be arranged on an upper surface of the convex region (PT). The shape of the groove portion (RW) may correspond to the shape of the protruding projection (TW). An elastic member (RR), such as rubber, may be arranged on the inside of the groove portion (RW). When the groove portion (RW) and the protruding projection (TW) are fastened, the space between the groove portion (RW) and the protruding projection (TW) may be sealed by the elastic member (RR).

[0108] Pogo pin electrodes (Pin2) corresponding to the above-described pogo pin terminals (Pin1) may be arranged on the upper surface of the convex region (PT). The pogo pin electrodes (Pin2) may be in electrical contact with the pogo pin terminals (Pin1) to supply power or transmit and receive data.

[0109] For example, the head portion (210) may include a screw groove (NH) for screw fastening with the main body portion (220). The screw groove (NH) may be arranged in at least a portion of a side surface of the head portion (210). The screw groove (NH) may have a shape corresponding to the shape of the screw thread (NS) of the main body portion (220). Accordingly, a user may fasten the head portion (210) and the main body portion (220) by rotating the head portion (210) in an appropriate direction.

[0110] For example, the head portion (210) may include at least one additional magnetic body (not shown) corresponding to at least one magnetic body of the main body portion (220). The at least one additional magnetic body (not shown) may be positioned corresponding to at least one magnetic body (MG1 to MG4) of the main body portion (220). At this time, each of the corresponding magnetic bodies may have opposite polarities. By adjusting the positions of the magnetic bodies having opposite polarities, the main body portion (220) and the head portion (210) may be fastened at an accurate position or in an accurate direction.

[0111] For example, at least one coupling protrusion (PP) may be positioned on a specific area of ​​the upper surface of the head portion (210). At least one coupling protrusion (PP) may be positioned at a location corresponding to at least one coupling hole (HH) of the main body portion (220). Accordingly, a user can connect the main body portion (220) and the head portion (210) at an accurate location.

[0112] As illustrated in Fig. 10, the head unit (210) may include an optical sensor (211). The optical sensor (211) may include a light emitting unit (not shown) that irradiates light toward one surface (CM) of the cooling mirror (221), and a sensing unit (not shown) that detects light reflected from one surface (CM) of the cooling mirror (221).

[0113] For example, the optical sensor (211) can irradiate light of a specific wavelength band to the cooling mirror (221) through a light hole (LH) formed in a convex area, and detect light reflected from one surface (CM) of the cooling mirror (221) through the light hole (LH). As a result, the optical sensor (211) can measure or obtain the degree of scattering of light from one surface (CM) of the cooling mirror (221). The light hole (LH) can be arranged at a position corresponding to the position of the cooling mirror (221) of the main body (220).

[0114] In order to allow the measured air passing through one surface (CM) of the cooling mirror (221) of the main body (220) to circulate smoothly through the internal holes (WH), the head part (210) may further include an internal guide groove (WG). Specifically, the internal guide groove (WG) may be arranged on one surface of the head part (210) to correspond to the air circulation path between the internal holes (WH) and one surface (CM) of the cooling mirror (221). The internal guide hole (WG) may be formed to lead to the light hole (LH). When the head part (210) and the main body (220) are fastened, the internal guide hole (WG) may be arranged on the air circulation path between the internal holes (WH) and one surface (CM) of the cooling mirror (221).

[0115] The air to be measured passing through one side (CM) of the cooling mirror (221) by the inner guide groove (WG) can be smoothly circulated through the inner holes (WH). That is, the inner holes (WH) and the inner guide groove (WG) can play a role in creating an air passage through which the air to be measured can smoothly circulate on the upper surface of the head portion (210).

[0116] Fig. 11 is a schematic drawing showing air circulation using the air circulation unit of the ultra-low dew point measuring device of Fig. 1, and Fig. 12 is a drawing showing the cooling mirror and Peltier element inside the air circulation unit of the ultra-low dew point measuring device of Fig. 1.

[0117] For reference, in the description of FIGS. 11 and 12, any content that is identical to or overlapping with the above-described content may be omitted.

[0118] As illustrated in Fig. 11, the main body (220) may include a main body-housing portion (220H) including a cooling mirror (221) and a Peltier element (222). One side (CM) of the above-described cooling mirror (221) may be exposed on the upper surface of the main body-housing portion (220H), and a protruding projection (TW) may be arranged. The above-described inlet portion (221T) and outlet portion (222T) may be arranged on one side of the main body-housing portion (220H), and the inlet portion (221T) and outlet portion (222T) may be arranged to penetrate one side of the main body-housing portion (220H).

[0119] The air circulation unit (400) may include a circulation-housing unit (400H) connected to an air injection unit (410) and an air discharge unit (420). An internal fan (430) for injecting air to be measured may be arranged inside the circulation-housing unit (400H). The air injection unit (410) and the inlet unit (221T) may be connected via a first connection pipe (221C), and the air discharge unit (420) and the outlet unit (222T) may be connected via a second connection pipe (222C).

[0120] The main circuit board (510) may include a processor (511) and memory. The processor (511) may control other components by executing instructions stored in the memory. The processor (511) may execute instructions stored in the memory.

[0121] A processor (511) is a component that can perform calculations and control other devices. It can mainly refer to a central processing unit (CPU), an application processor (AP), a graphics processing unit (GPU), a digital signal processor (DSP), etc. In addition, a CPU, an AP, a GPU, or a DSP may include one or more cores therein, and the CPU, AP, GPU, or DSP may operate using an operating voltage and clock signal. However, while a CPU or an AP may be composed of a few cores optimized for serial processing, a GPU may be composed of thousands of smaller and more efficient cores designed for parallel processing.

[0122] The processor (511) can process signals, data, information, etc. input or output through the components discussed above, or run an application program stored in memory, thereby providing or processing appropriate information or functions to the user.

[0123] As illustrated in Fig. 11, the control unit (500) can control the internal fan (430) to maintain a constant difference between the pressure data acquired from the first pressure sensor (S1) and the second pressure sensor (S2). The pressure data acquired from the first pressure sensor (S1) is the first pressure data, and the pressure data acquired from the second pressure sensor (S2) is the second pressure data. At this time, an optimal value of the difference between the first pressure data and the second pressure data may exist. The optimal value may be a value stored in advance through a number of experiments, etc.

[0124] If the difference between the first atmospheric pressure data and the second atmospheric pressure data is an optimal value or falls within a range including the optimal value, precise measurement of the dew point can be achieved. Accordingly, if the difference between the first atmospheric pressure data and the second atmospheric pressure data is not an optimal value or falls outside a range including the optimal value, the control unit (500) can control the fan rotation speed of the internal fan (430) to adjust the difference between the first atmospheric pressure data and the second atmospheric pressure data. As a result, optimized target air can be injected into the cooling mirror (221), and precise dew point can be measured.

[0125] For example, if the difference between the first atmospheric pressure data and the second atmospheric pressure data is greater than the optimal value, the control unit (500) can lower the fan rotation speed of the internal fan (430) to adjust the difference between the first atmospheric pressure data and the second atmospheric pressure data to the optimal value or within the optimal range.

[0126] For example, if the difference between the first atmospheric pressure data and the second atmospheric pressure data is smaller than the optimal value, the control unit (500) can increase the fan rotation speed of the internal fan (430) to adjust the difference between the first atmospheric pressure data and the second atmospheric pressure data to the optimal value or within the optimal range.

[0127] For example, the control unit (500) can control the fan rotation speed through the mathematical expressions 1 and 2 below.

[0128] [Mathematical Formula 1]

[0129]

[0130] (However, RPM' FAN The changed fan rotation speed (rpm) of the internal fan (430),

[0131] RPM FAN is the current fan rotation speed (rpm) of the internal fan (430),

[0132] DATA S1 is the first atmospheric pressure data (atm) of the first atmospheric pressure sensor,

[0133] DATAS2 is the second pressure data (atm) of the second pressure sensor,

[0134] In this case, ± is minus (-), In this case, ± is plus (+).

[0135] [Equation 2]

[0136]

[0137] (However, TempChilled Mirror is the surface temperature (K) of the cooled mirror (221),

[0138] TempTargetAir is the temperature (K) of the air being measured.)

[0139] However, the data required for mathematical expressions 1 and 2 may be acquired by a separate sensor and transmitted to the control unit (500). For example, the fan rotation speed (rpm) may be acquired by an additional sensor for measuring the rotation speed. For example, the surface temperature (K) of the cooling mirror (221) may be acquired by an additional temperature sensor for measuring the surface temperature of the cooling mirror (221). For example, the temperature (K) of the air to be measured may be acquired by another additional temperature sensor for measuring the temperature (K) of the air to be measured.

[0140] When the control unit (500) controls the speed (rpm) of the internal fan (430) using the above mathematical equations 1 and 2, the accuracy of the measured dew point is improved compared to when the speed of the internal fan (430) is not controlled.

[0141] As illustrated in FIG. 12, the power supply unit (600) may include an inverter (610) and a second heat sink (630). The inverter (610) may supply power required for the Peltier element (222). For this purpose, the Peltier element (222) may be electrically connected to the inverter (610). The second heat sink (630) is for discharging heat generated from the inverter (610), and external air sucked in from the intake fan (320) may pass through the first heat sink (310) and then the second heat sink (630) to be discharged to the outside of the housing unit (100).

[0142] For example, the Peltier element (222) may be connected to the power supply unit (600) described above. The Peltier element (222) may be connected to the power supply unit (600) to receive power required for operation. In addition, the Peltier element (222) may also be connected to a second heat sink (630) to increase heat dissipation efficiency.

[0143] In order for the Peltier element (222) to be connected to the power supply unit (600) and to receive power therefrom, a first electrical wiring (HT1) and a second electrical wiring (HT2) can connect the Peltier element (222) and the power supply unit (600). Through the first electrical wiring (HT1) and the second electrical wiring (HT2), the Peltier element (222) can receive the power required to cool the cooling mirror (221).

[0144] Figures 13 and 14 are drawings showing the bracket structure of the ultra-low dew point measuring device of Figure 1.

[0145] For reference, the same or overlapping contents as those described above in the descriptions of FIGS. 13 and 14 may be omitted. In addition, FIGS. 13 and 14 illustrate a bracket structure (800) as an example of a means for fastening the ultra-low dew point measuring device (10) to an exterior wall, etc., but this is only one example, and various fastening means may replace the bracket structure (800) depending on the case. In addition, if the ultra-low dew point measuring device (10) is used in a place where fastening is not necessary, the bracket structure (800) may be omitted.

[0146] As illustrated in FIGS. 13 and 14, a bracket structure (800) for fastening the ultra-low dew point measuring device (10) to an external wall or the like may be arranged on the rear surface (150) of the housing portion (100). The bracket structure (800) is fixed to the rear surface (150) of the housing portion (100) and fastened to an external wall or the like, thereby allowing the ultra-low dew point measuring device (10) to be fastened or installed at a desired location.

[0147] One or more bracket structures (800) may be fixed to the rear surface (150) of the housing portion (100). For example, the bracket structures (800) may include a first fastening bracket (810) and a second fastening bracket (820). Each of the bracket structures (800) has a hook structure and may be hook-fastened to a wall bracket (not shown) installed on an exterior wall, etc. For convenience of explanation, FIGS. 13 and 14 are illustrated with the first fastening bracket (810) among the bracket structures (800) as the center.

[0148] As illustrated in Fig. 13, the first fastening bracket (810) can be fixed to one surface of the housing portion (100). Specifically, the first fastening bracket (810) can be installed on the rear surface (150) of the housing portion (100). For example, the rear surface (150) of the housing portion (100) includes a screw hole for fixing or installing the first fastening bracket (810), and the first fastening bracket (810) can be installed on the rear surface (150) of the housing portion (100) using a screw fastening method.

[0149] As illustrated in FIGS. 13 and 14, the first fastening bracket (810) may include a connecting bracket (811) that is fastened to one surface of the housing portion (100) (e.g., the rear surface (150) of the housing portion (100)) and includes a hook portion (811k), and a supporting bracket (812) that is fastened to the connecting bracket (811) and includes a supporting structure (812J) that protrudes in a vertical direction from one surface of the housing portion (100).

[0150] The connecting bracket (811) may include a first bottom portion (811B1) that contacts one surface of the housing portion (100) to support the ultra-low dew point measuring device (10), and at least one through hole (811H1) for screw fastening as described above in the first bottom portion (811B1). The first bottom portion (811B1) may be in close contact with one surface of the housing portion (100) to distribute the weight of the ultra-low dew point measuring device (10) to one surface of the housing portion (100). A protruding jaw structure (811T) may be arranged on the lower side (-z-axis direction) of the first bottom portion (811B1). The protruding jaw structure (811T) may support a buffer head (813H) of a buffer portion to be described later.

[0151] The connecting bracket (811) may further include a second bottom portion (811B2) arranged parallel to the first bottom portion (811B1). The second bottom portion (811B2) is structurally connected to the first bottom portion (811B1), but may be spaced apart from the first bottom portion (811B1) by a predetermined distance. The upper (z-axis direction) end of the second bottom portion (811B2) may be a hook portion (811K) having a hook shape. The hook portion (811K) has a hook shape and may be hook-fastened to a wall bracket or the like pre-installed on a wall or the like. The lower (-z-axis direction) end of the second bottom portion (811B2) may have a first protruding structure (811P) extending downward (in the -z-axis direction). The first protruding structure (811P) may be spaced apart from the first bottom portion (811B1) by a predetermined distance. For example, a sunken structure (811U) with a length equal to that of the first protruding structure (811P) may be placed between the first bottom portion (811B1) and the first protruding structure (811P).

[0152] The support bracket (812) may have a second protruding structure (812P) inserted into the recessed structure (811U) of the connecting bracket (811). The second protruding structure (812P) may have a shape corresponding to the shape of the recessed structure (811U). The second protruding structure (812P) may be connected to a retaining structure (812J) supported by the first protruding structure (811P). The retaining structure (812J) may extend approximately vertically to the first bottom portion (811B1). The support structure (812J) may be supported by the first protruding structure (811P) and may protrude further than the second bottom portion (811B2) to contact a wall surface or the like to support and distribute the weight of the ultra-low dew point measuring device (10).

[0153] The support bracket (812) may further include a third protruding structure (812P') extending downward (in the -z-axis direction) from the support structure (812J). The third protruding structure (812P') may be arranged to support the lower surface of the buffer head (813H, 814H) of the buffer part (813, 814) to prevent excessive insertion of the buffer head (813H, 814H), or to cover the buffer part (813, 814), thereby improving the visual aesthetics.

[0154] The buffer portions (813, 814) may include buffer heads (813H, 814H), buffer bodies (813B, 814B), and spring portions (813S, 814S). The buffer portions (813, 814) may be inserted into through holes formed in the support structure (812J) (see 812H1, 812H2 of FIG. 14, the same applies hereinafter). One end of the buffer body (813B, 814B) may be in contact with the first protruding structure (811P) to buffer the weight of the ultra-low dew point measuring device (10). The buffer heads (813H, 814H) may have a larger area than the buffer bodies (813B, 814B), and thus may be fastened to the protruding jaw structure (811T) and the third protruding structure (812P'). The spring part (813S, 814S) can be inserted into the buffer body (813B, 814B), and the weight of the ultra-low dew point measuring device (10) can be buffered using the elasticity of the spring.

[0155] The buffer unit (813, 814) may include a first buffer unit (813) and a second buffer unit (814), and the description of the structure of the first buffer unit (813) and the second buffer unit (814) is the same as the description of the structure of the buffer unit (813, 814) described above, so the description thereof is omitted.

[0156] Fig. 15 is a schematic drawing showing an example of the ultra-low dew point measuring device of Fig. 1 installed in an air duct, and Fig. 16 is a perspective view schematically showing an example of the plunge structure of Fig. 15.

[0157] For reference, any content that is identical or overlapping with the above-described content in the description of FIGS. 15 and 16 may be omitted.

[0158] As illustrated in Fig. 15, the ultra-low dew point measuring device (10) can be connected to a duct section (AD) through which the air to be measured flows. The ultra-low dew point measuring device (10) can suck in the air to be measured inside the duct section (AD) through the air injection section (410) and discharge the measured air back into the duct section (AD) through the air discharge section (420).

[0159] For this purpose, the ultra-low dew point measuring device (10) can be connected to a separate flange structure (900). For example, the flange structure (900) can be installed in a through hole formed on one side of the duct section (AD).

[0160] For example, the flange structure (900) may include a first connection portion (910) and a second connection portion (920). The first connection portion (910) may be connected to an air injection portion (410) through a first pipe (G1). The first pipe (G1) may include a flexible plastic material, and may be manufactured by replacing it with various materials as needed. The second connection portion (9120) may be connected to an air discharge portion (420) through a second pipe (G2). The second pipe (G2) may include a flexible plastic material, and may be manufactured by replacing it with various materials as needed.

[0161] For example, the air to be measured can be sucked into the air injection unit (410) through the first connection unit (910) and the first pipe (G1) inside the duct unit (AD). In addition, the air to be measured can pass through one side (CM) of the cooling mirror (211) inside the ultra-low dew point measuring device (10) and be discharged into the duct unit (AD) through the air discharge unit (420), the second pipe (G2), and the second connection unit (920).

[0162] The first connecting portion (910) is a connecting structure in the form of a tube with an empty interior, and a first tube (G1) can be tightly inserted into or tightly connected to the first connecting portion (910). To this end, the first connecting portion (910) may include a sealing member for tightly connecting to the first tube (G1). The second connecting portion (920) is a connecting structure in the form of a tube with an empty interior, and a second tube (G2) can be tightly inserted into or tightly connected to the second connecting portion (920). To this end, the second connecting portion (920) may include a sealing member for tightly connecting to the second tube (G2).

[0163] As illustrated in FIGS. 15 and 16, the flange structure (900) may further include a first insertion tube (960) connected to the first connection portion (910) and a second insertion tube (970) connected to the second connection portion (920). The first insertion tube (960) and the second insertion tube (970) may be configured to be inserted into the duct portion (AD). For insertion of the first insertion tube (960) and the second insertion tube (970), a through hole corresponding to each insertion tube may be formed on one surface of the duct portion (AD).

[0164] The flange structure (900) may further include a flange portion (940) for installing the connecting portions and insertion tubes in the duct portion (AD), and a body portion (930) for fixing the connecting portions and insertion tubes to the flange portion (940). The body portion (930) may protrude from the flange portion (940) in the extension direction of the connecting portions. The flange portion (940) is configured to be in close contact with one surface of the duct portion (AD) to fasten the flange structure (900), and may have a shape corresponding to the shape of one surface of the duct portion (AD) on which the flange structure (900) is to be installed or fastened. In addition, the flange portion (940) may include at least one through hole, and at least one other through hole corresponding to the at least one through hole included in the flange portion (940) may be formed on one surface of the duct portion (AD).

[0165] A mount portion (940H) may be arranged between one surface of the duct portion (AD) on which the flange structure (900) is installed or fastened and the flange portion (940) described above. The mount portion (940H) may further include through-holes for insertion tubes through which the above-described insertion tubes pass, and at least one other through-hole corresponding to at least one through-hole of the flange portion (940) and at least one other through-hole of the duct portion (AD). In a plan view, the mount portion (940) may overlap the flange portion (940). The mount portion (940H) may be first installed or fastened to one surface of the duct portion (AD), and the flange portion (940) may be installed or fastened on the mount portion (940H). At this time, the first insertion tube (960) and the second insertion tube (970) may be inserted by simultaneously penetrating one surface of the mount portion (940H) and the duct portion (AD).

[0166] Accordingly, the flange structure (900) can be installed or fastened using fastening means such as screw fastening in the above-described through holes formed on one surface of the flange portion (940), the mount portion (940H), and the duct portion (AD).

[0167] While the present invention has been described with reference to the embodiments illustrated in the drawings, these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent alternative embodiments are possible. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

[0168] [Explanation of symbols]

[0169] 10: Ultra-low dew point measuring device

[0170] 100: Housing Department

[0171] 200: Dew point measurement unit

[0172] 210: Head

[0173] 220: Main body

[0174] 300: Heat dissipation part

[0175] 400: Air circulation section

[0176] 410: Air injection unit

[0177] 420: Air exhaust

[0178] 500: Control Unit

[0179] 600: Power supply

[0180] 700: Display section

Claims

1. Housing portion including a module mounting hole; A dew point measuring unit mounted in the above module mounting hole and including a cooling mirror and a Peltier element; A heat dissipation unit including a first heat dissipation plate disposed inside the housing and connected to the Peltier element; An air circulation unit that injects target air from outside the housing toward the cooling mirror; and A control unit that controls the dew point measuring unit, the heat dissipation unit, and the air circulation unit, and obtains dew point data; An ultra-low dew point measuring device using a cooling mirror, including:

2. In paragraph 1, The above heat dissipation unit further includes an intake fan that draws external air of the housing into the first heat dissipation plate, The above-mentioned intake fan is an ultra-low dew point measuring device using a cooling mirror that draws the outside air into the inside of the housing through a plurality of intake holes of the housing.

3. In paragraph 2, An ultra-low dew point measuring device using a cooling mirror, wherein the housing part further includes a plurality of exhaust holes through which the outside air passes through the first heat sink and is discharged outside the housing.

4. In paragraph 3, An ultra-low dew point measuring device using a cooling mirror, wherein the plurality of intake holes are arranged on the lower surface of the housing, and the plurality of exhaust holes are arranged on the side surface of the housing.

5. In paragraph 1, An ultra-low dew point measuring device using a cooling mirror, wherein the air circulation unit includes an air injection unit and an air discharge unit penetrating one surface of the housing unit, and an internal fan that forms a pressure difference in the air injection unit and the air discharge unit.

6. In paragraph 5, An ultra-low dew point measuring device using a cooling mirror, further comprising a first pressure sensor for measuring the pressure inside the air injection unit, and a second pressure sensor for measuring the pressure inside the air discharge unit.

7. In paragraph 6, The above control unit, An ultra-low dew point measuring device using a cooling mirror, which obtains first atmospheric pressure data inside the air injection unit from the first atmospheric pressure sensor, obtains second atmospheric pressure data inside the air discharge unit from the second atmospheric pressure sensor, and controls the internal fan based on the first atmospheric pressure data and the second atmospheric pressure data.

8. In paragraph 1, An ultra-low dew point measuring device using a cooling mirror, wherein the air injection unit includes a filter that filters dust from the air to be measured.

9. In paragraph 1, The above dew point measuring unit, An ultra-low dew point measuring device using a cooling mirror, comprising: a main body part mounted in the module mounting hole and including the cooling mirror and the Peltier material; and a head part connected to the main body part and including an optical sensor that measures the degree of scattering of light reflected from the cooling mirror.

10. In paragraph 9, The head portion includes a magnetic body of the first polarity and the body portion includes a magnetic body of the second polarity, An ultra-low dew point measuring device using a cooling mirror, wherein the head portion is detached from the main body portion using the first polarity magnetic body and the second polarity magnetic body.

11. In paragraph 9, An ultra-low dew point measuring device using a cooling mirror, wherein when the head part is removed, the upper surface of the cooling mirror is exposed to the outside of the main body part.

12. In paragraph 9, The above optical sensor, An ultra-low dew point measuring device using a cooling mirror, comprising a light emitting unit that irradiates light toward the upper surface of the cooling mirror, and a detection unit that detects light reflected from the upper surface of the cooling mirror.

13. In paragraph 9, The above main body part, An ultra-low dew point measuring device using a cooling mirror, further comprising an internal injection hole disposed around the cooling mirror and injecting the measured air into the upper surface of the cooling mirror, and an internal discharge hole disposed around the cooling mirror and discharging the measured air injected into the upper surface of the cooling mirror.

14. In paragraph 13, The above main body part, An ultra-low dew point measuring device using a cooling mirror, further comprising a protrusion surrounding the cooling mirror, the internal injection hole, and the internal discharge hole on a plan view.

15. In paragraph 5, An ultra-low dew point measuring device using a cooling mirror, wherein the air to be measured moves from the inside of a duct section positioned outside the ultra-low dew point measuring device toward the upper surface of the cooling mirror, and the air to be measured passes through the upper surface of the cooling mirror and is discharged into the interior of the duct section.

16. In paragraph 15, An ultra-low dew point measuring device using a cooling mirror, further comprising a flange structure connected to the air injection unit and the air discharge unit and connected to the interior of the duct unit.

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