Door driving mechanism, process chamber, and semiconductor process device

Abstract

The present application provides a door driving mechanism, a process chamber, and a semiconductor process device. The door driving mechanism comprises a first driving unit, a second driving unit, and a connecting portion; the connecting portion is used for being connected to a door and is in driving connection with the first driving unit and the second driving unit; the first driving unit is used for driving the connecting portion to move in a first direction, so that the connecting portion drives the door to move in the first direction; and the second driving unit is used for driving the connecting portion to move in a second direction intersecting with the first direction, so that the connecting portion drives the door to move relative to the first driving unit in the second direction. According to the door driving mechanism of the present application, transverse movement of the door can be achieved by providing the second driving unit, so that the door can press against a lining structure to achieve sealing, or the door can be separated from the lining, effectively avoiding friction between the door and the lining structure while the sealing effect of the door is guaranteed.

Description

Door drive mechanism, process chamber and semiconductor process equipment Technical Field

[0001] The present application relates to the field of semiconductor manufacturing, and in particular, to a door drive mechanism, a process chamber, and semiconductor process equipment. Background Art

[0002] In the field of semiconductor manufacturing, the process chamber is a very important equipment, and many semiconductor process equipment requires a process chamber. Taking the etcher as an example, a process chamber is set inside the etcher, with an upper electrode set at the top of the process chamber, and a lower electrode that can be raised and lowered inside the process chamber. The top of the process chamber is provided with an inner liner, the top of the inner liner is connected to the upper electrode, and the bottom is provided with an assembly port for the lower electrode. When the lower electrode rises to the assembly port, the upper electrode, the inner wall of the inner liner and the lower electrode together form an inner cavity for the etching process, and the outer wall of the inner liner and the inner wall of the process chamber form an outer cavity.

[0003] To facilitate the movement of wafers into and out of the process chamber, a transfer port is located on the outer wall of the process chamber, connecting to the external cavity, and a wafer transfer notch is located on the inner lining, connecting to the inner cavity. The transfer port corresponds to the wafer transfer notch, and wafers are transferred by a robotic arm through the transfer port and the wafer transfer notch. Because the integrity of the inner cavity must be maintained during the etching process, a liftable inner door mechanism is installed in the outer cavity. During the etching process, the inner door blocks the wafer transfer notch, forming a nearly perfect circle in the inner cavity, thereby improving the uniformity of the process environment within the chamber and enhancing etching uniformity.

[0004] However, in the prior art, since the inner door mechanism is raised and lowered along the outer wall of the inner liner during the opening and closing process, a movable gap is provided between the inner door and the inner liner to avoid friction between the inner door and the outer wall of the inner liner during the opening and closing process. As a result, the inner cavity is not completely closed, which is not conducive to stable and uniform airflow. At the same time, the plasma is not completely shielded, and there is a risk of plasma leakage. Moreover, although there is a movable gap between the inner door and the inner liner, the lifting rod is long, which causes the lifting of the inner door to be unstable. If the lifting rod is raised and lowered for a long time, there is a risk that the guide rod will tilt and the lifting rod will rub against the inner wall of the reaction chamber or the inner liner. Therefore, how to effectively prevent the friction between the inner door and the inner liner while ensuring the sealing effect of the inner cavity is a problem that needs to be solved in this field.

[0005] Summary of the Invention

[0006] The present application aims to solve the problem in the prior art that the inner door and the inner lining cannot be completely sealed and there is a risk of friction, and proposes a door drive mechanism, a process chamber and semiconductor process equipment.

[0007] To achieve the purpose of the present application, a door driving mechanism is provided, comprising: a first driving device;

[0008] a second drive device;

[0009] A connecting portion, the connecting portion being connected to the door body and being drivingly connected to the first driving device and the second driving device, the first driving device being used to drive the connecting portion to move in a first direction so that the connecting portion drives the door body to move in the first direction; and

[0010] The second driving device is used to drive the connecting portion to move along a second direction, where the second direction intersects the first direction, so that the connecting portion drives the door body to move along the second direction relative to the first driving device.

[0011] Furthermore, the second driving device includes:

[0012] a second housing having a mounting opening and a mounting space communicating with the mounting opening, the second housing being configured to be mounted on a support and to close the mounting opening via the support;

[0013] The second driving member is arranged in the installation space and is used to provide a driving force in the second direction to drive the connecting portion to move along the second direction.

[0014] Furthermore, the second driving device further includes a transmission assembly connected between the second driving member and the connecting portion, and the transmission assembly includes:

[0015] a connecting plate, movably disposed in the installation space, the connecting plate being drivingly connected to the second driving member;

[0016] A guide shaft is provided on the second shell, the axis of the guide shaft is set along the second direction and is movable relative to the second shell in the second direction, the first end of the guide shaft is located in the installation space and fixedly connected to the connecting plate, and the second end of the guide shaft is located outside the second shell; the second end of the guide shaft is provided with a mounting seat, the connecting portion is provided on the mounting seat, and the mounting seat is movable along the second direction driven by the guide shaft; wherein,

[0017] In the first direction, the connecting portion and the mounting seat are relatively movable;

[0018] In the second direction, the connecting portion and the mounting seat are relatively fixed, so that the mounting seat drives the connecting portion to move along the second direction.

[0019] Furthermore, the second shell includes:

[0020] a first receiving portion having a first end and a second end oppositely disposed along a second direction, the first end of the first receiving portion being used to connect to the support, and the first end of the first receiving portion being provided with the mounting opening;

[0021] a second accommodating portion having a first end and a second end oppositely disposed along a second direction, wherein the first end of the second accommodating portion is connected to the second end of the first accommodating portion;

[0022] The interior of the first accommodating portion is connected to the interior of the second accommodating portion to form the installation space;

[0023] The connecting plate is movably arranged in the first accommodation portion along the second direction;

[0024] The second driving member is disposed in the second accommodating portion.

[0025] Furthermore, the connection position between the first end of the second accommodating portion and the second end of the first accommodating portion forms a step structure, and a guide hole connected to the interior of the first accommodating portion is provided along the second direction. The guide hole is located on the step structure, and the guide shaft is movably arranged in the guide hole along the second direction.

[0026] Furthermore, the connecting plate includes a plate body and a connecting arm, the connecting arm is arranged on the periphery of the plate body, the plate body is drivingly connected to the second driving member, and the connecting arm is connected to the guide shaft.

[0027] Furthermore, a first mounting groove is provided in the first receiving portion, wherein the opening of the first mounting groove is located on the surface of the first end of the first receiving portion to form the mounting opening, and the bottom of the first mounting groove is located at the second end of the first receiving portion; the first mounting groove includes a main groove body and a sub-groove body, and the sub-groove body is provided on the periphery of the main groove body;

[0028] A second mounting groove is provided in the second receiving portion, the opening of the second mounting groove is located at the bottom of the first mounting groove and is connected to the main groove body, the bottom of the second mounting groove is located at the second end of the second receiving portion, and the first mounting groove and the second mounting groove together form the mounting space;

[0029] The plate body is located in the main tank body, and the connecting arm is located in the auxiliary tank body.

[0030] Furthermore, a seal is provided between the guide shaft and the second shell.

[0031] Furthermore, a positioning column is provided in the second shell, and the positioning column is arranged along the second direction; a positioning hole is provided on the connecting plate, and the positioning column is located in the positioning hole, and the connecting plate is movable relative to the positioning column to be positioned and guided by the cooperation of the positioning column and the positioning hole.

[0032] Furthermore, there are two positioning posts, and the two positioning posts are spaced apart and arranged in the second accommodating portion, and a limiting space for installing the second driving member is formed between two adjacent positioning posts.

[0033] Furthermore, the connecting portion includes a connecting rod, a penetrating mounting hole is provided on the mounting seat along the first direction, the connecting rod is passed through the mounting hole, and the connecting portion is movable along the first direction in the mounting hole.

[0034] Furthermore, the first driving device includes:

[0035] a first driving member movably arranged along the first direction, wherein the first driving member is provided with a first sliding portion;

[0036] A second sliding portion is provided on the connecting portion, the first sliding portion and the second sliding portion are engaged in a limit position in the first direction, and the first sliding portion and the second sliding portion are engaged in a sliding manner in the second direction, so that the first driving member drives the connecting portion to move along the first direction, and the connecting portion slides relative to the first driving member in the second direction.

[0037] Furthermore, the connecting portion includes:

[0038] a connecting rod, a first end of which is connected to the door body;

[0039] a sliding plate fixedly connected to the second end of the connecting rod, wherein the second sliding portion is provided on the sliding plate;

[0040] Wherein, the first sliding part is a sliding rail or a sliding groove arranged along the second direction, and the second sliding part is a sliding groove or a sliding rail matching with the first sliding part.

[0041] Furthermore, the first driving device further includes:

[0042] a bracket, wherein the first driving member is movably disposed on the bracket along the first direction;

[0043] A detection device is provided on the bracket, and is used to detect the position of the first driving member.

[0044] Furthermore, the door driving mechanism further comprises:

[0045] a first connecting member, the first connecting member being used to connect to a support, the first connecting member being provided with a long hole penetrating along the first direction, the connecting portion being passed through the long hole, and the radial length direction of the long hole being provided along the second direction;

[0046] The connecting portion and the long hole are slidably engaged in the first direction;

[0047] The connecting portion and the long hole are slidably engaged in the second direction;

[0048] The connecting portion is sealed and fitted with the long hole.

[0049] According to a second aspect of the present application, a process chamber is also disclosed, comprising: a chamber body;

[0050] an inner lining structure disposed in the chamber body, the inner lining structure dividing the chamber body into an inner cavity and an outer cavity, and the inner lining structure having a transmission notch connecting the inner cavity and the outer cavity;

[0051] a door body, movably disposed in the outer cavity, and used for opening and closing the film transmission gap;

[0052] The door driving mechanism is connected to the door driving mechanism to drive the door to open and close the sheet transmission gap.

[0053] Further, the door body has a first position, a second position and a third position;

[0054] In the first position, the door is located at the film transmission gap, closing the film transmission gap;

[0055] In the second position, the door body is located away from the transmission notch in the second direction, and a movable gap is formed between the door body and the outer wall of the lining structure;

[0056] In the third position, the door body is located in the first direction at a position avoiding the sheet transmission gap;

[0057] The first driving device is used to drive the door body to move between the second position and the third position;

[0058] The second driving device is used to drive the door body to move between the first position and the second position.

[0059] Furthermore, the lining structure has a first mating end surface, and the transmission notch is located on the first mating end surface;

[0060] The door body has a second mating end surface. When the door body is in the first position, the second mating end surface covers the first mating end surface and closes the transmission gap.

[0061] Furthermore, an inductive coil is provided on the second mating end surface of the door body. When the door body is in the first position, the door body presses the inductive coil against the lining structure.

[0062] Furthermore, a receiving groove is provided on the first mating end surface. When the door body is in the first position, the inductive coil is located in the receiving groove, and the inductive coil abuts against the bottom of the receiving groove.

[0063] Furthermore, the second mating end surface of the door body is provided with a boss structure, and the inductive coil is provided on the outer peripheral side of the boss structure;

[0064] The lining structure further comprises a sealing channel, wherein a first end of the sealing channel extends to the first mating end surface to form the transmission gap, and a second end of the sealing channel is in communication with the inner cavity;

[0065] When the door body is in the first position, the boss structure is located in the sealed channel, and the protruding end surface of the boss structure is flush with the inner wall surface of the inner cavity, so that a complete symmetrical space is formed inside the inner cavity;

[0066] A first sealing gap is formed between the outer peripheral wall of the boss structure and the inner wall of the sealing channel.

[0067] Furthermore, from the first end to the second end of the sealing channel, the distance between the inner walls arranged opposite to each other in the sealing channel gradually decreases, and the boss structure is a wedge-shaped boss that matches the sealing channel.

[0068] Furthermore, at least one annular protrusion is provided on the second mating end surface of the door body along the outer periphery of the boss structure, and the annular protrusion is located on the inner side of the electromagnetic coil;

[0069] At least one annular groove is provided on the first mating end surface of the lining structure, the annular protrusion is located in the corresponding annular groove, and a second sealing gap is formed between the annular protrusion and the annular groove.

[0070] Furthermore, when the door body is in the second position, the boss structure is separated from the sealing channel, so that the movable gap is formed between the door body and the outer wall of the lining structure;

[0071] The second driving device drives the door body to move so that the boss structure enters the sealing channel or leaves the sealing channel.

[0072] According to a third aspect of the present application, a semiconductor process equipment is also disclosed, comprising at least one of the above-mentioned process chambers.

[0073] The door driving mechanism of the present application, based on utilizing the first driving device to drive the door body to move along the first direction through the connecting part, can also utilize the second driving device to drive the door body to move along the second direction through the connecting part. Since the connecting part can move in the second direction relative to the first driving device and will not be restricted by the first driving device, the door body can be driven by the second driving device to move along the second direction (for example, horizontally), so that the door body can be pressed against the lining structure to achieve sealing or the door body can be separated from the lining. While ensuring the sealing effect of the door body, it can also effectively avoid the friction between the door body and the lining structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0074] FIG1 is a schematic structural diagram of a door driving mechanism according to a first embodiment of the present application;

[0075] FIG2 is a schematic structural diagram of a second driving device of the door driving mechanism according to the first embodiment of the present application;

[0076] FIG3 is a front view of the second driving device of the door driving mechanism of the first embodiment of the present application;

[0077] FIG4 is a cross-sectional view taken along line AA of the second housing of the second driving device of the door driving mechanism according to the first embodiment of the present application;

[0078] FIG5 is a cross-sectional view taken along line AA of the entire second drive device of the door drive mechanism according to the first embodiment of the present application;

[0079] FIG6 is a sectional view taken along line BB of the second drive device of the door drive mechanism according to the first embodiment of the present application;

[0080] FIG7 is a partial enlarged view of portion A in FIG5 ;

[0081] FIG8 is a schematic structural diagram of a first driving device of a door driving mechanism according to the first embodiment of the present application;

[0082] FIG9 is a top view of a first connecting member of a first driving device of a door driving mechanism according to the first embodiment of the present application;

[0083] FIG10 is a front view of the first driving device of the door driving mechanism of the first embodiment of the present application;

[0084] FIG11 is a cross-sectional view of a top view of the first driving device of the door driving mechanism according to the first embodiment of the present application;

[0085] FIG12 is a schematic structural diagram of a process chamber door in a first position according to the first embodiment of the present application;

[0086] FIG13 is a schematic structural diagram of the door of the process chamber in the first embodiment of the present application in the second position;

[0087] FIG14 is a schematic structural diagram of the door of the process chamber in the first embodiment of the present application in the third position;

[0088] FIG15 is a schematic diagram of the cooperation between the lining structure and the door body of the process chamber according to the first embodiment of the present application;

[0089] FIG16 is a partial enlarged view of portion C in FIG15 ;

[0090] FIG17 is a schematic structural diagram of a door body of a process chamber according to the first embodiment of the present application;

[0091] FIG18 is a partial enlarged view of portion D in FIG17 ;

[0092] FIG19 is a partial enlarged view of portion B in FIG14 ;

[0093] FIG20 is a schematic diagram of the structure of the boss structure and the sealing channel of the process chamber of the first embodiment of the present application;

[0094] List of reference numerals: 10. first driving device; 11. first connecting member; 111. long hole; 12. bracket; 13. first driving member; 131. shielding member; 14. first sliding portion; 15. detection device; 151. transmitting end; 152. receiving end; 16. sliding mechanism; 17. servo motor; 20. second driving device; 21. second housing; 211. first accommodating portion; 212. second accommodating portion; 213. guide hole; 214. step structure; 22. second driving member; 221. piston rod; 23. connecting plate; 23a. plate body; 23b. connecting arm; 231. positioning hole; 24. guide shaft; 25. mounting seat; 251. mounting hole; 26. buffer ring; 27. positioning column; 28. Positioning sleeve; 29. ​​Locking nut; 30. Connecting portion; 31. Connecting rod; 32. Sliding plate; 321. Second sliding portion; 40. Installation space; 41. First installation groove; 41a. Main groove body; 41b. Sub-groove body; 411. Installation opening; 42. Second installation groove; 50. Chamber body; 51. Inner cavity; 52. Outer cavity; 60. Lining structure; 61. Transmission notch; 62. First mating end face; 621. Accommodating groove; 622. Annular groove; 63. Sealing channel; 70. Door body; 71. Second mating end face; 72. Boss structure; 73. Annular protrusion; 80. Dielectric coil; 90. Labyrinth seal structure; 91. First sealing gap; 92. Second sealing gap. DETAILED DESCRIPTION

[0095] In order to enable those skilled in the art to better understand the technical solution of the present application, the door drive mechanism, process chamber and semiconductor process equipment provided by the present application are described in detail below with reference to the accompanying drawings.

[0096] To achieve the purpose of the present application, as shown in FIG1 , an embodiment of the present application discloses a door driving mechanism, which can be applied to various semiconductor process equipment such as an etching machine to drive the door to close the film transmission gap or move away from the film transmission gap. The door driving mechanism of the embodiment of the present application may include: a first driving device 10, a second driving device 20 and a connecting portion 30. The connecting portion 30 is used to connect with the door 70, and the connecting portion 30 is driven and connected to the first driving device 10. The first driving device 10 is used to drive the connecting portion 30 to move along the first direction, so that the connecting portion 30 drives the door 70 to move along the first direction; in a second direction intersecting with the first direction, the connecting portion 30 is movable relative to the first driving device 10, and the connecting portion 30 is also driven and connected to the second driving device 20. The second driving device 20 is used to drive the connecting portion 30 to move along the second direction, so that the connecting portion 30 drives the door 70 to move along the second direction relative to the first driving device 10.

[0097] During use, the first drive device 10 drives the connecting part 30 to move, and the connecting part 30 drives the door body 70 to move along the first direction; when the door body 70 moves to the preset position, the first drive device 10 stops, so that the connecting part 30 stops moving in the first direction. At this time, the second drive device 20 will drive the connecting part 30 to move in the second direction. Since the connecting part 30 can move in the second direction relative to the first drive device 10, it will not be restricted by the first drive device 10. Therefore, under the drive of the second drive device 20, the connecting part 30 can drive the door body 70 to move along the second direction.

[0098] After the door driving mechanism is assembled on the process chamber, in this embodiment, the first direction is the vertical direction, i.e., the up-down direction in FIG1 , and the second direction is the horizontal direction, i.e., the left-right direction in FIG1 . When closing the door 70, the first driving device 10 can be used to drive the connecting portion 30 and the door 70 to rise together. After rising to an appropriate position, the second driving device 20 drives the door 70 to move in the lateral direction (i.e., the second direction) through the connecting portion 30, thereby pressing the door 70 against the lining structure 60 (see FIG12 ) to achieve sealing. When opening the door 70, the second driving device 20 is first used to drive the door 70 to move in the lateral direction (i.e., the second direction) through the connecting portion 30 to separate the door 70 from the lining structure 60, and then the first driving device 10 drives the second driving device 20 and the door 70 to descend together, thereby completing the opening of the door 70.

[0099] The door driving mechanism of the present application, based on utilizing the first driving device 10 to drive the door body 70 to move along the first direction through the connecting portion 30, can also utilize the second driving device 20 to drive the door body 70 to move along the second direction through the connecting portion 30. Since the connecting portion 30 can move in the second direction relative to the first driving device 10 and will not be restricted by the first driving device 10, the door body 70 can be driven by the second driving device 20. Move in the second direction (for example, horizontally), so that the door body 70 can be pressed against the lining structure 60 to achieve sealing or separate the door body 70 from the lining structure 60. While ensuring the sealing effect of the door body 70, it can also effectively avoid friction between the door body 70 and the lining structure 60.

[0100] As shown in FIG1 , in this embodiment, the connecting portion 30 includes a connecting rod 31. The connecting rod 31 is disposed on the second drive device 20, with the axial direction of the connecting rod 31 being arranged along a first direction and movable relative to the second drive device 20 in the first direction. One end of the connecting rod 31 is movably disposed on the first drive device 10 along a second direction, and the second end of the connecting rod 31 is configured to be connected to the door body 70. In other words, as shown in FIG1 , the connecting rod 31 is disposed on the second drive device 20 in a vertical direction (i.e., the first direction) as viewed in FIG1 , and is movable relative to the second drive device 20 in the vertical direction, thereby preventing the first drive device 10 from being restricted by the second drive device 20 when driving the connecting rod 31 upward or downward. Similarly, the connecting rod 31 is movable relative to the first drive device 10 in a horizontal direction (i.e., the second direction) as viewed in FIG1 , thereby preventing the second drive device 20 from being restricted by the first drive device 10 when driving the connecting rod 31 horizontally.

[0101] Specifically, as shown in Figure 2 , in this embodiment, the second driving device 20 includes a second housing 21 and a second driving member 22 . As shown in Figure 3 , the second housing 21 has a mounting opening 411 and a mounting space 40 communicating with the mounting opening 411 . The second housing 21 is configured to be mounted on a support and to close the mounting opening 411 via the support. The second driving member 22 is disposed within the mounting space 40 and is configured to provide a driving force in the second direction to drive the connecting portion 30 to move in the second direction.

[0102] It should be noted that the support is a component used to install the second shell 21. In this embodiment, as shown in Figure 12, the interior of the process chamber includes an inner cavity 51 and an outer cavity 52. ​​The support is the inner wall of the outer cavity 52. ​​After the second shell 21 is installed on the inner wall of the outer cavity 52, the inner wall surface of the outer cavity 52 closes the installation port 411, thereby isolating the installation space 40 from the outer cavity 52. ​​On the one hand, it can prevent the process gas in the process chamber from entering the installation space 40 and adversely affecting the components in the second drive device 20. On the other hand, it can also prevent the internal components of the second drive device 20 from generating particles due to friction and impact into the process chamber and affecting the product, achieving multiple goals at one stroke.

[0103] The second drive device 20 further includes a transmission assembly connected between the second drive member 22 and the connecting portion 30. The second drive member 22 applies a driving force in the second direction to the connecting portion 30 through the transmission assembly, thereby driving the connecting portion 30 to move in the second direction. In some embodiments, the transmission assembly includes a connecting plate 23, a guide shaft 24, and a mounting base 25.

[0104] The connecting plate 23 is movably arranged in the installation space 40, and the connecting plate 23 is driven and connected to the second driving member 22; the guide shaft 24 is passed through the second shell 21, and the axis of the guide shaft 24 is arranged along the second direction and is movable relative to the second shell 21 in the second direction. The first end of the guide shaft 24 is located in the installation space 40 and is fixedly connected to the connecting plate 23, and the second end of the guide shaft 24 is located outside the second shell 21; the second end of the guide shaft 24 is provided with a mounting seat 25, and the connecting part 30 is provided on the mounting seat 25, and the mounting seat 25 is movable along the second direction under the drive of the guide shaft 24; wherein, in the first direction, the connecting part 30 and the mounting seat 25 are movable relative to each other; in the second direction, the connecting part 30 and the mounting seat 25 are relatively fixed, so that the mounting seat 25 drives the connecting part 30 to move along the second direction.

[0105] In some embodiments, as shown in FIG4 , the second housing 21 includes a first accommodating portion 211 and a second accommodating portion 212. The first accommodating portion 211 has a first end and a second end oppositely disposed along a second direction, with the first end of the first accommodating portion 211 being configured to connect to a support. Furthermore, in some embodiments, a first mounting groove 41 is disposed within the first accommodating portion 211, which is the interior of the first accommodating portion 211. The opening of the first mounting groove 41 is located on the surface of the first end of the first accommodating portion 211, forming the mounting opening 411, and the bottom of the first mounting groove 41 is located at the second end of the first accommodating portion 211.

[0106] The second accommodating portion 212 has a first end and a second end arranged opposite to each other along the second direction, and the first end of the second accommodating portion 212 is connected to the second end of the first accommodating portion 211; further, in some embodiments, a second mounting groove 42 is provided in the second accommodating portion 212, and the second mounting groove 42 is the internal space of the second accommodating portion 212, and the groove opening of the second mounting groove 42 is located at the bottom of the first mounting groove 41 and is connected to the first mounting groove 41, and the bottom of the second mounting groove 42 is located at the second end of the second accommodating portion 212, and the first mounting groove 41 and the second mounting groove 42 together form an installation space 40.

[0107] Further, in some embodiments, as shown in Figure 4, the first mounting groove 41 includes a main groove body 41a and a sub-groove body 41b, the sub-groove body 41b is arranged on the periphery of the main groove body 41a, and the sub-groove body 41b is connected to the main groove body 41a, and the second mounting groove 42 is connected to the main groove body 41a.

[0108] In some embodiments, the connection between the first end of the second accommodating portion 212 and the second end of the first accommodating portion 211 forms a stepped structure 214. A guide hole 213 is further provided on the first accommodating portion 211 along the second direction. The guide hole 213 communicates with the interior of the first accommodating portion 211 and is located on the stepped structure 214. In other words, as shown in Figure 4, one end of the guide hole 213 extends to the bottom of the auxiliary groove body 41b, and the other end of the guide hole 213 extends to the outer surface of the second end of the first accommodating portion 211. Furthermore, the axial direction of the guide hole 213 is arranged along the second direction.

[0109] Furthermore, in some embodiments, a positioning post 27 is disposed within the second housing 21. The positioning post 27 is disposed along the second direction, with a first end of the positioning post 27 connected to the bottom of the second mounting slot 42, and a second end of the positioning post 27 extending to the slot opening (mounting opening 411) of the first mounting slot 41. Two positioning posts 27 are provided, spaced apart within the second accommodating portion 212, with a confined space formed between adjacent positioning posts 27 for mounting the second driver 22.

[0110] As shown in Figures 4 and 5, in this embodiment, the second driving member 22 is a pneumatic cylinder, which is disposed in the second mounting groove 42 and located within the confined space formed by the two positioning posts 27. The piston rod 221 of the pneumatic cylinder faces the mounting opening 411 and is fixedly connected to the connecting plate 23, thereby driving the connecting plate 23 to move in the second direction via the piston rod 221 of the pneumatic cylinder.

[0111] The connecting plate 23 is movably arranged in the first mounting groove 41 along the second direction. In some embodiments, the connecting plate 23 includes a plate body 23a and a connecting arm 23b. The connecting arm 23b is arranged on the periphery of the plate body 23a. The plate body 23a is located in the main groove body 41a, and the connecting arm 23b is located in the auxiliary groove body 41b. The plate body 23a is drivingly connected to the second driving member 22, and the connecting arm 23b is connected to the guide shaft 24.

[0112] Specifically, as shown in Figure 5 , the plate body 23a of the connecting plate 23 is fixedly connected to the piston rod 221 of the cylinder. A positioning hole 231 is also provided on the plate body 23a of the connecting plate 23. A positioning post 27 is located within the positioning hole 231. The connecting plate 23 is movable relative to the positioning post 27, so that the positioning post 27 cooperates with the positioning hole 231 for positioning and guidance. When installing the connecting plate 23, the positioning hole 231 needs to be aligned with the positioning post 27 so that the connecting plate 23 can be installed in the first mounting groove 41.

[0113] As shown in Figure 5 , the guide shaft 24 is disposed within the guide hole 213 and is movable relative to the second housing 21 in the second direction. As shown in Figure 3 , the first end of the guide shaft 24 is located within the auxiliary groove 41b of the first mounting groove 41 and is fixedly connected to the connecting plate 23. As shown in Figure 5 , the second end of the guide shaft 24 is located outside the second housing 21. Referring to Figures 1 and 5 , the mounting seat 25 is disposed at the second end of the guide shaft 24 , and the connecting portion 30 is disposed on the mounting seat 25 . Driven by the guide shaft 24 , the mounting seat 25 is movable in the second direction.

[0114] It should be noted that, as shown in FIG6 , the mounting base 25 is provided with a through-mounting hole 251 extending in a first direction. The connecting portion 30 is disposed within the through-mounting hole 251 and moves in the first direction within the through-mounting hole 251. Thus, in the first direction, the connecting portion 30 and the mounting base 25 are relatively movable. In the second direction, the connecting portion 30 and the mounting base 25 are relatively fixed, so that the mounting base 25 drives the connecting portion 30 to move in the second direction.

[0115] It should also be noted that in order to ensure the stability of the movement of the connecting part 30, as shown in Figure 2, a positioning sleeve 28 and a locking nut 29 are provided in the mounting hole 251. The positioning sleeve 28 is located between the connecting part 30 and the mounting hole 251, and the locking nut 29 is installed on the positioning sleeve 28 to prevent the connecting part 30 from shaking in the mounting hole 251.

[0116] In some embodiments, a seal is provided between the guide shaft 24 and the second housing 21. For example, as shown in FIG7 , a sealing ring is provided between the guide shaft 24 and the guide hole 213 to ensure the sealing of the installation space 40. Furthermore, to ensure smooth movement of the guide shaft 24 in the second direction, a buffer ring 26 is provided on the guide shaft 24 and is located between the guide shaft 24 and the inner wall of the guide hole 213.

[0117] In this embodiment, as shown in Figures 5 and 6, there are two connecting rods 31, which are spaced apart to ensure that the door body 70 is evenly stressed and operates more stably. Accordingly, there are two guide holes 213 and two guide shafts 24, and the second accommodating portion 212 is located between the two guide shafts 24. This arrangement not only facilitates the installation of the second housing 21, but also fully utilizes the space between the two connecting rods 31 to accommodate the second housing 21, fully utilizing the space within the already narrow process chamber to achieve horizontal movement, improve the sealing effect of the door body 70, and effectively prevent the door body 70 from rubbing against the lining structure 60.

[0118] In addition, by setting the positioning column 27, not only can the cylinder be limited to facilitate the installation and fixation of the cylinder, but also the positioning column 27 and the positioning hole 231 can cooperate to facilitate the positioning of the connecting plate 23 during assembly. Moreover, the two positioning columns 27 are set in parallel to ensure that the assembly angle of the connecting plate 23 is perpendicular to the second direction, so as to ensure that the position of the guide shaft 24 connected to the two sides of the connecting plate 23 is consistent, and then ensure that the position of the two connecting rods 31 is consistent, and finally ensure the tightness of the cooperation between the door body 70 and the lining structure 60, which is a typical multi-purpose product.

[0119] In some embodiments, the first driving device 10 includes: a first driving member 13, the first driving member 13 is movably arranged along the first direction, and a first sliding portion 14 is provided on the first driving member 13; further, in some embodiments, in order to realize the movability of the connecting portion 30 relative to the first driving member 13, as shown in Figure 10, a second sliding portion 321 is provided on the connecting portion 30 (for example, a connecting rod 31), and the first sliding portion 14 and the second sliding portion 321 are engaged in upper limit positioning in the first direction, and the first sliding portion 14 and the second sliding portion 321 are engaged in sliding cooperation in the second direction, so that the first driving member 13 drives the connecting portion 30 (for example, a connecting rod 31) to move along the first direction, and the connecting portion 30 (for example, a connecting rod 31) slides relative to the first driving member 13 in the second direction.

[0120] Specifically, in this embodiment, as shown in Figure 8 , the first sliding portion 14 is a slide rail extending along the second direction, and the second sliding portion 321 is a slide groove matching the first sliding portion 14 . The slide rail is fixedly mounted on the first driving member 13 along the second direction. To ensure stability, as shown in Figure 10 , two slide rails are spaced apart. Of course, in actual applications, the first sliding portion 14 may also be a slide groove extending along the second direction, and the second sliding portion 321 may be a slide rail matching the first sliding portion 14 .

[0121] In some embodiments, as shown in Figures 1 and 8, the door drive mechanism further includes a first connecting member 11, which is used to connect a support. The first connecting member 11 and the connecting portion 30 (e.g., the connecting rod 31) slide in a first direction, and the first connecting member 11 and the connecting portion 30 (e.g., the connecting rod 31) slide in a second direction. Specifically, the first connecting member 11 is provided with a long hole 111 extending along the first direction, the connecting portion 30 (e.g., the connecting rod 31) is inserted into the long hole 111, and the radial length direction of the long hole 111 is provided along the second direction; the connecting portion 30 and the long hole 111 slide in the first direction; the connecting portion 30 and the long hole 111 slide in the second direction; and the connecting portion 30 and the long hole 111 are sealed.

[0122] It should be noted that, in this embodiment, as shown in Figures 1, 8 and 9, the first connecting member 11 is a mounting plate, and a long hole 111 (see Figure 9) is provided on the mounting plate, which passes through the mounting plate along a first direction (the up and down direction in Figure 1). The connecting portion 30 is inserted into the long hole 111, and the radial length direction of the long hole 111 is set along the second direction (the up and down direction in Figure 9). The connecting portion 30 slides with the long hole 111 in the first direction, so that the connecting portion 30 moves under the drive of the first driving member 13; the connecting portion 30 slides with the long hole 111 in the second direction, that is, the whole can move left and right in Figure 1, so that the connecting portion 30 moves under the drive of the second driving member 22; the connecting portion 30 is sealed with the long hole 111, so that after the mounting plate is assembled on the process chamber, the process gas can be prevented from leaking from the long hole 111. Preferably, as shown in Figures 1 and 8, the connecting portion 30 and the long hole 111 are sealed by a bellows, which can take into account both sealing and movement.

[0123] Furthermore, in some embodiments, the first driving device 10 further includes a bracket 12. As shown in FIG10 , the first connecting member 11 is fixed to a first end of the bracket 12 by, for example, bolts.

[0124] As shown in Figure 12, when assembled to the process chamber, the first connecting member 11 is connected to the chamber body 50, an opening is provided at the bottom of the chamber body 50, the outer cavity 52 is connected to the outside through the opening, the first connecting member 11 is installed at the opening position of the chamber body 50, and the bracket 12 is fixedly connected to the chamber body 50 through the first connecting member 11.

[0125] The connecting rod 31 of the connecting portion 30 is simultaneously passed through the first connecting member 11 and the chamber body 50 . The first connecting member 11 and the connecting portion 30 slide together in a first direction, and the first connecting member 11 and the connecting portion 30 slide together in a second direction.

[0126] Further, in some embodiments, as shown in Figure 10, the first driving device 10 also includes: a sliding mechanism 16 and a servo motor 17, wherein the servo motor 17 is fixed to the second end of the bracket 12, the sliding mechanism 16 is installed on the bracket 12 between the first end and the second end of the bracket 12, the servo motor 17 is driven and connected to the sliding mechanism 16, and the first driving member 13 is fixedly connected to the sliding mechanism 16, that is, the first driving member 13 is movably set on the bracket 12 through the sliding mechanism 16, and the connecting part 30 (for example, the connecting rod 31) is set on the first driving member 13, and the first driving member 13 is used to drive the connecting part 30 to move in the first direction, and the connecting part 30 is movable along the second direction on the first driving member 13.

[0127] During use, the servo motor 17 drives the sliding mechanism 16, causing the sliding mechanism 16 to drive the first driving member 13 to move between the first end and the second end of the bracket 12. The moving first driving member 13 drives the connecting portion 30 to move in the first direction. After moving to a preset position, the connecting portion 30 can be driven by the second driving device 20 to move in the second direction on the first driving member 13, thereby driving the door body 70 to move in the second direction.

[0128] After being assembled to the process chamber, the servo motor 17 drives the sliding mechanism 16, causing the sliding mechanism 16 to move the first driving member 13. The moving first driving member 13 then drives the connecting portion 30 to move in the first direction, thereby causing the connecting portion 30 to drive the door 70 to move between the position shown in FIG13 and the position shown in FIG14. When the first driving member 13 moves to the first end of the bracket 12, the connecting portion 30 drives the door 70 to move to the position shown in FIG13. At this time, driven by the second driving device 20, the connecting portion 30 can move in the second direction on the first driving member 13, thereby driving the door 70 to move in the second direction to the position shown in FIG12, thereby closing the film transmission gap 61.

[0129] The connecting portion 30 includes a connecting rod 31 and a sliding plate 32. For example, there are two connecting rods 31. The first ends of the two connecting rods 31 are fixedly connected to the door body 70, and the second ends of the two connecting rods 31 are fixedly connected to the sliding plate 32. That is, the sliding plate 32 is fixedly connected to the second end of the connecting rod 31. The sliding plate 32 is movably disposed on the slide rail along the second direction. The sliding plate 32 is provided with a slide groove, and the slide rail is located within the slide groove and slidably engages with the slide groove. In other words, the sliding plate 32 is movably disposed on the first driving member 13 via the slide rail, and the connecting rod 31 is fixedly connected to the sliding plate 32, thereby achieving movement in the second direction relative to the first driving member 13. In this manner, the two connecting rods 31 can be ensured to move synchronously, ensuring smooth movement of the door body 70. Furthermore, in this embodiment, the cross-section of the slide rail has a T-shaped structure.

[0130] It should be noted that in this embodiment, the first sliding portion 14 is a slide rail provided on the first driving member 13 along the second direction, and the second sliding portion 321 is a slide groove provided on the sliding plate 32 that cooperates with the first sliding portion 14. However, this is not restrictive. In other embodiments not shown in the figures, the first sliding portion 14 may also be a slide groove, and the second sliding portion 321 may be a slide rail. As long as the structure can achieve the limited position cooperation between the first sliding portion 14 and the second sliding portion 321 in the first direction and the sliding cooperation between the first sliding portion 14 and the second sliding portion 321 in the second direction, it is within the scope of protection of this application.

[0131] In order to facilitate the acquisition of the position of the door body 70, as shown in Figure 8, the first drive device 10 also includes: a detection device 15, the detection device 15 is arranged on the bracket 12, and the detection device 15 is used to detect the position of the first drive member 13, so as to indirectly obtain the position of the door body 70. Specifically, referring to Figure 11, the detection device 15 is an optical sensor, which has a transmitting end 151 and a receiving end 152 arranged opposite to each other, and a detection space is formed between the transmitting end 151 and the receiving end 152. A shielding member 131 is provided on the first drive member 13. When the first drive member 13 moves to a position corresponding to the detection device 15, the shielding member 131 is located in the detection space, thereby realizing the detection of the position of the first drive member 13, and then indirectly obtaining the position of the door body 70.

[0132] It should be noted that, in this embodiment, as shown in FIG8 , there are two detection devices 15 , which are spaced apart and arranged on the bracket 12 . The two detection devices 15 correspond to the upper limit position and the lower limit position of the movement of the first driving member 13 in the first direction, that is, to the two extreme positions of the door body 70 in the first direction. However, this is not restrictive. In some other embodiments not shown in the figure, the detection device 15 can also be arranged only at a position close to the first end of the bracket 12, so that the detection device 15 can detect whether the first driving member 13 is at the upper limit position of the travel in the first direction. At this time, the corresponding position of the door body 70 is the same as the height of the transmission notch, thereby facilitating the control of the movement of the second driving device 20.

[0133] As shown in Figures 12 to 14, the present application further discloses a process chamber, comprising: a chamber body 50, a lining structure 60, a door 70, and the aforementioned door drive mechanism. The lining structure 60 is disposed within the chamber body 50, and the lining structure 60 divides the chamber body 50 into an inner cavity 51 and an outer cavity 52. ​​The lining structure 60 has a film-transmitting notch 61 connecting the inner cavity 51 and the outer cavity 52; the door 70 is movably disposed within the outer cavity 52, and the door 70 is used to open and close the film-transmitting notch 61; and the door drive mechanism is operatively connected to the door 70 to drive the door 70 to open and close the film-transmitting notch 61.

[0134] The process chamber provided in the present application is connected to the door driving mechanism provided in the present application with the door 70, so that the door 70 can be moved horizontally (i.e., in the second direction) to make the door 70 press against the lining structure 60 to achieve sealing or separate the door 70 from the lining, while ensuring the sealing effect of the door 70, it also effectively avoids friction between the door 70 and the lining.

[0135] In some embodiments, as shown in FIG. 12 to FIG. 13 , the door body 70 has a first position, a second position, and a third position.

[0136] As shown in FIG. 12 , in the first position, the door body 70 is located at the film transmission gap 61 , closing the film transmission gap 61 .

[0137] As shown in FIG. 13 , in the second position, the door body 70 is located away from the transmission notch 61 in the second direction, and a movable gap is formed between the door body 70 and the outer wall of the lining structure 60 .

[0138] As shown in Figure 14, in the third position, the door body 70 is located in the first direction to avoid the transmission piece gap 61; the first driving device 10 is used to drive the door body 70 to move between the second position and the third position; the second driving device 20 is used to drive the door body 70 to move between the first position and the second position.

[0139] In some embodiments, the process chamber provided in the present application also includes a control device, which is electrically connected to the detection device 15, the servo motor 17, and the second drive device 20, respectively. The control device is used to control the second drive device 20 to drive the door body 70 to switch between the first position and the second position according to the position of the first drive member 13.

[0140] In some embodiments, as shown in Figures 15 and 16, the lining structure 60 has a first mating end face 62, and the film transmission gap 61 is located on the first mating end face 62; the door body 70 has a second mating end face 71, and in the first position of the door body 70, the second mating end face 71 covers the first mating end face 62 and closes the film transmission gap 61.

[0141] In some embodiments, as shown in Figures 17 and 18 , an inductive coil 80 is disposed on the second mating end surface 71 of the door 70. When the door 70 is in the first position, the door 70 presses the inductive coil 80 against the lining structure 60. By providing the inductive coil 80, when the door 70 is in the first position, the door 70 presses the inductive coil 80 against the lining structure 60, establishing electrical communication between the lining structure 60 and the door 70, thereby creating a completely enclosed RF environment.

[0142] In some embodiments, as shown in FIG19 , a receiving groove 621 is provided on the first mating end surface 62. As shown in FIG20 , when the door 70 is in the first position, the inductive coil 80 is located within the receiving groove 621 and abuts against the bottom of the receiving groove 621. By providing the receiving groove 621 on the first mating end surface 62, the inductive coil 80 is located within the receiving groove 621 and abuts against the bottom of the receiving groove 621 when the door 70 is in the first position. This ensures that the first mating end surface 62 and the second mating end surface 71 are in contact with each other, thereby improving the sealing effect.

[0143] In some embodiments, as shown in Figures 17 and 18, the second mating end face 71 of the door body 70 is provided with a boss structure 72, and the inductive coil 80 is provided on the outer peripheral side of the boss structure 72; as shown in Figure 19, the lining structure 60 also has a sealing channel 63, and the first end of the sealing channel 63 extends to the first mating end face 62 to form a transmission gap 61, and the second end of the sealing channel 63 is connected to the inner cavity 51; as shown in Figure 20, in the first position of the door body 70, the boss structure 72 is located in the sealing channel 63, and the protruding end surface of the boss structure 72 is flush with the inner wall surface of the inner cavity 51, so that a complete symmetrical space is formed inside the inner cavity 51; a first sealing gap 91 is formed between the outer peripheral wall of the boss structure 72 and the inner wall of the sealing channel 63 (see Figure 16). A first sealing gap 91 is formed by providing the boss structure 72 and the sealing channel 63. The first sealing gap 91 can, on the one hand, prevent the lining structure 60 from colliding with the door body 70 to form particulate matter that contaminates the wafer; on the other hand, it can hinder the passage of plasma in the process gas, thereby protecting the electromagnetic coil 80.

[0144] As shown in Figure 16, the distance between the opposing inner walls of sealing channel 63 gradually decreases from the first end to the second end. The boss structure 72 is a wedge-shaped boss that matches the sealing channel 63. In other words, the inner wall of sealing channel 63 is inclined. In this embodiment, the distance between the outer wall of boss structure 72 and the inner wall of sealing channel 63 is d, with a value of d ranging from 0.5 to 1.3 mm. The inner wall of sealing channel 63 forms an angle α with the tangent of the arc at that location, with a value of α ranging from 30° to 60°. This increases the gap aspect ratio and achieves the purpose of plasma annihilation.

[0145] Referring to Figures 16 to 20 , an annular protrusion 73 is provided on the second mating end surface 71 of the door body 70 along the outer periphery of the boss structure 72. The annular protrusion 73 is located inside the induction coil 80. An annular groove 622 is provided on the first mating end surface 62 of the lining structure 60. The annular protrusion 73 is located within the annular groove 622, and a second sealing gap 92 is formed between the annular protrusion 73 and the annular groove 622. The first sealing gap 91 and the second sealing gap 92 are connected to form a labyrinth seal structure 90. By providing the first and second sealing gaps 91 and 92, the labyrinth seal structure 90 increases the distance traveled by the process gas to the induction coil 80, increasing the flow resistance and, in turn, making it more difficult for the process gas to reach the induction coil 80. This also increases the probability of plasma annihilation and better protects the induction coil 80.

[0146] As shown in Figures 13 and 19, in the second position of the door body 70, the boss structure 72 disengages from the sealing channel 63 to form a movable gap between the door body 70 and the outer wall of the lining structure 60; the second driving device 20 drives the door body 70 to move so that the boss structure 72 enters the sealing channel 63 or disengages from the sealing channel 63.

[0147] In order to ensure that the door body 70 can be pressed tightly and the electromagnetic coil 80 is compressed to a certain extent (the compression amount is between 20% and 25%), and because the boss structure 72 needs to enter the sealing channel 63, the first sealing gap 91 needs to be maintained at 0.5 to 1.3 mm. Therefore, it is necessary to improve the matching accuracy between the door body 70 and the lining structure 60. Therefore, the traditional door body structure is split into a first drive device 10 that drives the door body 70 to move in the first direction and a second drive device 20 that drives the door body 70 to move in the second direction. The servo motor 17 of the first drive device 10 is used to accurately control the lifting height of the door body 70 in the first direction; the added second drive device 20 can ensure that the door body 70 moves smoothly in the second direction while compacting the arc-shaped electromagnetic coil 80, ensuring the integrity of the RF circuit and thereby improving the process uniformity.

[0148] The present application also discloses a semiconductor processing apparatus including at least one of the aforementioned process chambers. A second drive device 20 is provided to enable lateral movement of a door 70, thereby pressing the door 70 against the lining structure 60 to achieve sealing or separating the door 70 from the lining structure 60. This ensures a sealing effect for the door 70 while effectively preventing contact between the door 70 and the lining structure 60.

[0149] It is understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present application, and the present application is not limited thereto. Those skilled in the art may make various modifications and improvements without departing from the spirit and substance of the present application, and such modifications and improvements are also considered to be within the scope of protection of the present application.

Claims

1. A door body driving mechanism, characterized in that, Comprising: A first driving device; A second driving device; A connecting part, which is used to connect with a door body and is drivingly connected to the first driving device and the second driving device. The first driving device is used to drive the connecting part to move along a first direction, so that the connecting part drives the door body to move along the first direction; and The second driving device is used to drive the connecting part to move along a second direction, and the second direction intersects with the first direction, so that the connecting part drives the door body to move along the second direction relative to the first driving device.

2. The door body driving mechanism according to claim 1, wherein The second driving device includes: A second housing, having an installation opening and an installation space communicating with the installation opening. The second housing is used to be installed on a support and close the installation opening through the support; A second driving member, arranged in the installation space, for providing a driving force in the second direction to drive the connecting part to move along the second direction.

3. The door body driving mechanism according to claim 2, wherein The second driving device further includes a transmission assembly, connected between the second driving member and the connecting part. The transmission assembly includes: A connecting plate, movably arranged in the installation space, and the connecting plate is drivingly connected to the second driving member; A guiding shaft, penetrating through the second housing. The axis of the guiding shaft is arranged along the second direction and is movable relative to the second housing in the second direction. The first end of the guiding shaft is located in the installation space and is fixedly connected to the connecting plate, and the second end of the guiding shaft is located outside the second housing; an installation seat is arranged at the second end of the guiding shaft, and the connecting part is arranged on the installation seat. The installation seat is movable along the second direction driven by the guiding shaft; wherein, In the first direction, the connecting part and the installation seat can move relatively; In the second direction, the connecting part and the installation seat are relatively fixed, so that the installation seat drives the connecting part to move along the second direction.

4. The door body driving mechanism according to claim 3, characterized in that, The second housing includes: A first accommodating part, having a first end and a second end arranged oppositely along the second direction. The first end of the first accommodating part is used to connect with the support, and the installation opening is arranged at the first end of the first accommodating part; A second accommodating part, having a first end and a second end arranged oppositely along the second direction. The first end of the second accommodating part is connected to the second end of the first accommodating part; The interior of the first accommodating part communicates with the interior of the second accommodating part to form the installation space; The connecting plate is movably arranged in the first accommodating part along the second direction; The second driving member is arranged in the second accommodating part.

5. The door body driving mechanism according to claim 4, characterized in that, A step structure is formed at the connection position between the first end of the second accommodating part and the second end of the first accommodating part. A guiding hole communicating with its interior is arranged on the first accommodating part along the second direction, and the guiding hole is located on the step structure. The guiding shaft is movably arranged in the guiding hole along the second direction.

6. The door body driving mechanism according to claim 4, characterized in that, The connecting plate includes a plate body and a connecting arm. The connecting arm is arranged on the outer periphery of the plate body. The plate body is drivingly connected to the second driving member, and the connecting arm is connected to the guiding shaft.

7. The door body driving mechanism according to claim 6, characterized in that, A first accommodation part is provided with a first installation groove. The notch of the first installation groove is located on the surface of the first end of the first accommodation part to form the installation opening, and the bottom of the first installation groove is located at the second end of the first accommodation part. The first installation groove includes a main groove body and a secondary groove body, and the secondary groove body is arranged on the outer periphery of the main groove body. A second accommodation part is provided with a second installation groove. The notch of the second installation groove is located at the bottom of the first installation groove and communicates with the main groove body. The bottom of the second installation groove is located at the second end of the second accommodation part. The first installation groove and the second installation groove jointly form the installation space. The plate body is located in the main groove body, and the connecting arm is located in the secondary groove body.

8. The door driving mechanism according to claim 3, wherein A sealing arrangement is provided between the guiding shaft and the second housing.

9. The door driving mechanism according to claim 4, wherein A positioning post is arranged in the second housing and is arranged along the second direction. A positioning hole is arranged on the connecting plate. The positioning post is located in the positioning hole, and the connecting plate is movable relative to the positioning post to perform positioning and guiding through the cooperation of the positioning post and the positioning hole.

10. The door driving mechanism according to claim 9, wherein There are two positioning posts. The two positioning posts are arranged at intervals in the second accommodation part, and a limiting space for installing the second driving member is formed between two adjacent positioning posts.

11. The door driving mechanism according to claim 3, wherein The connecting part includes a connecting rod. A through installation hole is arranged on the mounting seat along the first direction, and the connecting rod is arranged in the installation hole. And the connecting part is movable along the first direction in the installation hole.

12. The door body driving mechanism according to any one of claims 1-11, characterized in that, The first driving device includes: A first driving member, which is arranged to be movable along the first direction, and a first sliding part is arranged on the first driving member. A second sliding part is arranged on the connecting part. The first sliding part and the second sliding part are in limit cooperation in the first direction, and the first sliding part and the second sliding part are in sliding cooperation in the second direction, so that the first driving member drives the connecting part to move along the first direction, and the connecting part slides relative to the first driving member in the second direction.

13. The door body driving mechanism according to claim 12, characterized in that, The connecting part includes: A connecting rod, the first end of the connecting rod is connected to the door body; A sliding plate, which is fixedly connected to the second end of the connecting rod, and the second sliding part is arranged on the sliding plate; Wherein, the first sliding part is a slide rail or a chute arranged along the second direction, and the second sliding part is a chute or a slide rail matching the first sliding part.

14. The door body driving mechanism according to claim 13, characterized in that, The first driving device further includes: A bracket, the first driving member is arranged to be movable along the first direction on the bracket; A detection device, the detection device is arranged on the bracket, and the detection device is used for detecting the position of the first driving member.

15. The door body driving mechanism according to any one of claims 1-11, characterized in that, The door driving mechanism further includes: A first connecting member for connecting a support, the first connecting member being provided with a long hole penetrating along the first direction, the connecting portion being inserted into the long hole, and the radial length direction of the long hole being arranged along the second direction; The connecting portion is in sliding fit with the long hole in the first direction; The connecting portion is in sliding fit with the long hole in the second direction; The connecting portion is in sealing fit with the long hole.

16. A process chamber, characterized in that, Comprising: A chamber body; A lining structure disposed within the chamber body, the lining structure dividing the interior of the chamber body into an inner cavity and an outer cavity, and the lining structure having a film transfer notch communicating the inner cavity with the outer cavity; A door movably disposed within the outer cavity, the door being used to open and close the film transfer notch; The door driving mechanism according to any one of claims 1 to 15, drivingly connected to the door to drive the door to open and close the film transfer notch.

17. The process chamber according to claim 16, wherein The door has a first position, a second position, and a third position; In the first position, the door is located at the position of the film transfer notch, closing the film transfer notch; In the second position, the door is located away from the position of the film transfer notch in the second direction, and an activity gap is formed between the door and the outer wall of the lining structure; In the third position, the door is located at a position avoiding the film transfer notch in the first direction; The first driving device is used to drive the door to move between the second position and the third position; The second driving device is used to drive the door to move between the first position and the second position.

18. The process chamber according to claim 17, wherein The lining structure has a first mating end face, and the film transfer notch is located on the first mating end face; The door has a second mating end face, and in the first position of the door, the second mating end face covers the first mating end face and closes the film transfer notch.

19. The process chamber according to claim 18, wherein A dielectric coil is provided on the second mating end face of the door, and in the first position of the door, the door presses the dielectric coil against the lining structure.

20. The process chamber according to claim 19, wherein, A receiving groove is provided on the first mating end face, and in the first position of the door, the dielectric coil is located within the receiving groove, and the dielectric coil presses against the bottom of the receiving groove.

21. The process chamber according to claim 19, wherein, A convex platform structure is provided on the second mating end face of the door, and the dielectric coil is provided on the outer peripheral side of the convex platform structure; The lining structure further has a sealing channel, a first end of the sealing channel extending to the first mating end face to form the film transfer notch, and a second end of the sealing channel communicating with the inner cavity; When the door is in the first position, the convex platform structure is located within the sealing channel, and the protruding end surface of the convex platform structure is flush with the inner wall surface of the inner cavity, so as to form a complete symmetrical space inside the inner cavity; A first sealing gap is formed between the outer peripheral wall of the convex platform structure and the inner wall of the sealing channel.

22. The process chamber according to claim 21, wherein, From the first end to the second end of the sealed channel, the distance between the relatively arranged inner walls in the sealed channel gradually decreases, and the boss structure is a wedge-shaped boss matching the sealed channel.

23. The process chamber according to claim 21, wherein, At least one annular protrusion is arranged along the outer periphery of the boss structure on the second mating end face of the door body, and the annular protrusion is located inside the dielectric coil; At least one annular groove is arranged on the first mating end face of the lining structure, the annular protrusion is located in the corresponding annular groove, and a second sealing gap is formed between the annular protrusion and the annular groove.

24. The process chamber according to claim 21, wherein, When the door body is in the second position, the boss structure disengages from the sealed channel so that an activity gap is formed between the door body and the outer wall of the lining structure; The second driving device drives the door body to move so that the boss structure enters or disengages from the sealed channel.

25. A semiconductor process equipment, characterized in that, Comprising: At least one process chamber according to any one of claims 16 to 24.

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