Method and apparatus for degrading SF6 by means of coordination of ultraviolet light and gliding arc plasma discharge

Abstract

A method and apparatus for degrading SF6 by means of coordination of ultraviolet light and gliding arc plasma discharge. The method comprises the following steps: introducing SF6 gas and Ar gas into a gas distribution apparatus for diluting and mixing same, and feeding the mixed gas into a reactor; the mixed gas entering the reactor to be degraded; preliminarily treating the degraded gas in a quartz tube (101c), then washing same in an alkali liquor gas washing pool, and drying same; and the dried gas entering a gas storage apparatus to be stored and analyzed. The apparatus comprises: a base part (100), comprising a bearing assembly (101) and a locking assembly (102) provided thereon; an insertion part (200), comprising a housing assembly (201) provided on the bearing assembly (101) and an insertion assembly (202) provided on the housing assembly (201); and a discharge degradation part (300), comprising a cyclone (301) provided on the bearing assembly (101) and a spiral electrode spray gun (302) provided on the cyclone (301), the bearing assembly (101) comprising a fixed cylinder (101a), a vacuum flange (101b) provided at one end of the fixed cylinder (101a) and a quartz tube (101c) provided on the fixed cylinder (101a).

Description

A method and device for degrading SF6 by ultraviolet light synergistic sliding arc plasma discharge Technical Field

[0001] The present invention relates to the technical field of SF6 discharge degradation, and in particular to a method and device for degrading SF6 by ultraviolet light coordinated sliding arc plasma discharge. Background Art

[0002] SF6 was first produced by French scientists in a laboratory by burning sulfur and fluorine. As a colorless, odorless, non-toxic, and non-flammable synthetic gas, SF6 can inhibit the formation of electric current in the system, thus exhibiting excellent insulation properties. Based on this, SF6 is widely used as an insulation material in today's electrical industry. SF6 is also used in fields such as semiconductors. Due to its widespread use, SF6 has a strong greenhouse effect, with a global warming potential of 23,500 times that of CO2, far exceeding that of other greenhouse gases. At the same time, due to its inherently stable chemical properties, it can exist stably in the atmosphere. In recent years, the environmental problems caused by SF6 have become increasingly serious. Due to its extremely stable chemical properties, the degradation of SF6 has important environmental significance in today's society.

[0003] Currently, all known methods for degrading SF6 have various flaws, failing to simultaneously achieve high degradation rates, high degradation energy consumption, and product selectivity, and can only achieve partial results. For example, Zhang Xiaoxing et al. from Wuhan University published an experimental and simulation study on the degradation of SF6 using dielectric barrier discharge plasma in the Proceedings of the Chinese Society of Electrical Engineering. They used DBD processing technology to degrade SF6 in a quartz tube reactor. By diluting SF6 and adding a carrier gas, they ultimately achieved a degradation rate exceeding 90%. However, while this method achieved good degradation results, it had limitations in product treatment and could not guarantee non-toxic emissions. Low-temperature plasma degradation, a popular degradation technology, can guarantee low energy consumption and high degradation rates, but its product selectivity is poor. Other methods, such as thermal degradation, also suffer from the practical problem of high energy consumption. While photodegradation can largely ensure the non-toxicity of the final product, its inherent degradation efficiency is too low to address the current large-scale SF6 emissions problem.

[0004] Summary of the Invention

[0005] The purpose of this section is to summarize some aspects of the embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the abstract and title of this application to avoid obscuring the purpose of this section, the abstract and the title of the invention, and such simplifications or omissions should not be used to limit the scope of the present invention.

[0006] In view of the above-mentioned problem of difficulty in balancing energy consumption, degradation rate and non-toxicity, the present invention is proposed.

[0007] Therefore, the object of the present invention is to provide a method and device for degrading SF6 by ultraviolet light synergistically with sliding arc plasma discharge.

[0008] In order to solve the above technical problems, the present invention provides the following technical solutions: a method for degrading SF6 by ultraviolet light synergistic sliding arc plasma discharge, comprising the following steps:

[0009] S1: SF6 gas and Ar gas are introduced into the gas distribution device for dilution and mixing, and then the mixed gas is output to the reactor at a constant flow rate;

[0010] S2: Start the reactor, the ultraviolet light source begins to irradiate, the spiral electrode spray gun is grounded to discharge, and plasma is generated in the discharge area. The plasma is constantly mixed and lifted into the reactor, and after passing through the cyclone, a swirling airflow is formed in the discharge area.

[0011] S3: After the swirling airflow enters the discharge area, the arc is broken down at the point where the distance between the two electrodes is the shortest. The swirling airflow drives the arc to rotate between the electrodes and slide toward the tip exit, which is called sliding arc discharge. When the arc moves to the farthest end, it is interrupted by the swirling airflow, and then broken down at the minimum distance. It is driven by the airflow to rotate and slide again, and this cycle repeats.

[0012] S4: After the ultraviolet light assisted plasma reaction, SF6 gas is decomposed and the decomposed gas flows out through the quartz tube. Placing a catalyst in the quartz tube can prevent the recovery of SF6 decomposed gas;

[0013] S5: The SF6 decomposition products that have been preliminarily treated by the catalyst in the quartz tube will be passed through the gas pipe to the alkali liquid treatment device, which can absorb the toxic acid gas products produced by the decomposition of SF6. At the same time, multiple alkali liquid pools can be set up to absorb the toxic acid gas to ensure that the exhaust does not contain toxic acid gas;

[0014] S6: After being treated by the alkali liquid treatment device, the SF6 and diluted gas will contain water vapor to a certain extent. The gas is passed through a desiccant for treatment to further purify the decomposition products;

[0015] S7: The SF6 decomposition product gas obtained through the above steps can be stored in the gas carrier chamber or collected through a gas collection bag for data analysis of the product.

[0016] As a preferred solution of the method for degrading SF6 by ultraviolet light synergistic sliding arc plasma discharge described in the present invention, the spiral electrode spray gun is provided with a central conical electrode and a cylindrical high-voltage electrode, and the outer jacket of the spiral electrode spray gun is provided with a quartz tube; wherein, the central conical electrode is grounded, and the high-voltage electrode is connected to the output end of the power supply. After the plasma power supply is started, a discharge is generated between the high-voltage electrode and the grounded electrode, and then plasma is generated in the discharge area.

[0017] As a preferred solution of the method for degrading SF6 by ultraviolet light synergistic sliding arc plasma discharge described in the present invention, the air flow rate and the power of the main power supply will affect the sliding arc discharge characteristics. Increasing the gas flow rate can increase the breakdown frequency of the sliding arc, and the arc length will increase accordingly. Increasing the power can limit the unstable development of the arc, and the arc length will decrease accordingly. Therefore, the reaction degree can be judged by the arc length and stability.

[0018] Beneficial effects of the present invention: The ultraviolet lamp source device designed in the present invention has a surround structure, which greatly improves the irradiation range of the ultraviolet lamp, enhances the efficiency of plasma synergistic ultraviolet light degradation of SF6, and has an important impact on synergistic degradation; the spiral electrode spray gun uses the sliding arc discharge principle to cooperate with ultraviolet light to degrade SF6, which has higher degradation efficiency than traditional methods, low energy consumption and non-toxic and harmless emission products.

[0019] In order to use the method, the present invention also provides an ultraviolet light-coordinated sliding arc plasma discharge SF6 degradation device.

[0020] A method for degrading SF6 by ultraviolet light-assisted sliding arc plasma discharge comprises a base component, a bearing assembly, and a locking assembly arranged on the bearing assembly; an insertion component, comprising a shell assembly arranged on the bearing assembly and an insertion component arranged on the shell assembly; a discharge degradation component, comprising a cyclone arranged on the bearing assembly and a spiral electrode spray gun arranged on the cyclone; wherein the bearing assembly comprises a fixed cylinder, a vacuum flange arranged at one end of the fixed cylinder, and a quartz tube arranged on the fixed cylinder.

[0021] As a preferred solution of the ultraviolet light synergistic sliding arc plasma discharge SF6 degradation device described in the present invention, wherein: the locking assembly includes a guide block arranged on the fixed cylinder, a limiting member arranged on the fixed cylinder and a movable member arranged on the fixed cylinder; wherein, the limiting member includes a first limiting groove opened on the fixed cylinder, a limiting ball arranged in the first limiting groove, the movable member includes a spring arranged on the fixed cylinder and a movable cylinder arranged on the fixed cylinder, the movable cylinder includes a sleeve arranged outside the spring, a limiting cylinder arranged in the sleeve and a protrusion arranged on the limiting cylinder.

[0022] As a preferred solution of the ultraviolet light synergistic sliding arc plasma discharge SF6 degradation device described in the present invention, the outer shell assembly includes a shell connected to the fixed cylinder, a mounting part arranged on the shell and an ultraviolet ring lamp arranged on the mounting part, and the insertion assembly includes a guide head arranged at one end of the shell and a second limiting groove opened on the shell.

[0023] As a preferred solution of the ultraviolet light synergistic sliding arc plasma discharge SF6 degradation device described in the present invention, wherein: the guide head is adapted to the guide block, the shell is sleeved on the outside of the quartz tube and is slidably connected to the fixed cylinder, the first limiting groove and the second limiting groove are adapted in size and position, and the movable cylinder is adapted to the first limiting groove.

[0024] As a preferred solution of the ultraviolet light synergistic sliding arc plasma discharge SF6 degradation device described in the present invention, wherein: the cyclone includes a sealing plate arranged in the quartz tube, an air inlet pipe arranged on the sealing plate and a cyclone plate arranged on the sealing plate; the spiral electrode spray gun includes an electric wire arranged on the sealing plate, a conical electrode arranged on the cyclone and a circular tube electrode arranged in the quartz tube.

[0025] As a preferred solution of the ultraviolet light synergistic sliding arc plasma discharge SF6 degradation device described in the present invention, it also includes an automatic component, which includes a guide component arranged on the carrying component and a moving component arranged on the outer shell component; wherein, the moving component is adapted and slidably matched with the guide component.

[0026] As a preferred solution of the ultraviolet light synergistic sliding arc plasma discharge SF6 degradation device described in the present invention, wherein: the guide assembly includes a first guide groove arranged on the movable part, a first release groove connected to the first guide groove, a second guide groove connected to the first release groove, and a second release groove connected to the second guide groove; the moving assembly includes a rotating cylinder arranged on the shell, a connecting rod arranged on the rotating cylinder, and a moving block arranged on the connecting rod.

[0027] The beneficial effects of the present invention are as follows: the present invention provides a carrying assembly, a cyclone and a spiral electrode spray gun. When in use, a mixed gas of SF6 and Ar is ejected through the cyclone into the discharge area. In conjunction with the ultraviolet ring lamp and the spiral electrode spray gun, reciprocating sliding arc plasma discharge degradation can be performed, with higher degradation efficiency and lower energy consumption. In addition, by providing a locking assembly and an insertion assembly, installation and disassembly are more convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. Those skilled in the art can also derive other drawings based on these drawings without inventive effort. Among them:

[0029] FIG1 is a flow chart of a method for degrading SF6 by ultraviolet light assisted sliding arc plasma discharge.

[0030] FIG2 is a schematic diagram of the overall structure of an SF6 degradation device using ultraviolet light in conjunction with sliding arc plasma discharge.

[0031] FIG3 is a schematic diagram of the cross-sectional structure of an SF6 degradation device using ultraviolet light in conjunction with sliding arc plasma discharge.

[0032] FIG4 is a cross-sectional schematic diagram of a device for degrading SF6 using ultraviolet light in conjunction with gliding arc plasma discharge.

[0033] FIG5 is an enlarged view of point A in FIG3 .

[0034] FIG6 is a cross-sectional schematic diagram of the overlapped first limiting groove and the second limiting groove of an SF6 degradation device using ultraviolet light assisted sliding arc plasma discharge.

[0035] FIG7 is a schematic diagram showing the structure of the automatic components of an SF6 degradation device using ultraviolet light in conjunction with a sliding arc plasma discharge.

[0036] FIG8 is a schematic front view of the automatic components of an SF6 degradation device using ultraviolet light in conjunction with a sliding arc plasma discharge. DETAILED DESCRIPTION

[0037] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0038] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0039] Secondly, the term "one embodiment" or "embodiment" herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in various places throughout this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive of other embodiments.

[0040] Furthermore, the present invention is described in detail with reference to schematic diagrams. For ease of illustration, when describing the embodiments of the present invention, cross-sectional views illustrating device structures may be partially enlarged and not to scale. Furthermore, the schematic diagrams are merely illustrative and should not limit the scope of protection of the present invention. Furthermore, in actual production, the three-dimensional dimensions of length, width, and depth should be included.

[0041] Example 1

[0042] 1 , a method for degrading SF6 by ultraviolet light synergistically with sliding arc plasma discharge is provided, which comprises the following steps:

[0043] S1: SF6 gas and Ar gas are introduced into the gas distribution device for dilution and mixing, and then the mixed gas is output to the reactor at a constant flow rate;

[0044] S2: Start the reactor, the ultraviolet light source begins to irradiate, the spiral electrode spray gun is grounded to discharge, and plasma is generated in the discharge area. The plasma is constantly mixed and lifted into the reactor, and after passing through the cyclone, a swirling airflow is formed in the discharge area.

[0045] S3: After the swirling airflow enters the discharge area, the arc is broken down at the point where the distance between the two electrodes is the shortest. The swirling airflow drives the arc to rotate between the electrodes and slide toward the tip exit, which is called sliding arc discharge. When the arc moves to the farthest end, it is interrupted by the swirling airflow, and then broken down at the minimum distance. It is driven by the airflow to rotate and slide again, and this cycle repeats.

[0046] S4: After the ultraviolet light assisted plasma reaction, SF6 gas is decomposed and the decomposed gas flows out through the quartz tube. Placing a catalyst in the quartz tube can prevent the recovery of SF6 decomposed gas;

[0047] S5: The SF6 decomposition products that have been preliminarily treated by the catalyst in the quartz tube will be passed through the gas pipe to the alkali liquid treatment device, which can absorb the toxic acid gas products produced by the decomposition of SF6. At the same time, multiple alkali liquid pools can be set up to absorb the toxic acid gas to ensure that the exhaust does not contain toxic acid gas;

[0048] S6: After being treated by the alkali liquid treatment device, the SF6 and diluted gas will contain water vapor to a certain extent. The gas is passed through a desiccant for treatment to further purify the decomposition products;

[0049] S7: The SF6 decomposition product gas obtained through the above steps can be stored in the gas carrier chamber or collected through a gas collection bag for data analysis of the product.

[0050] Specifically, the ultraviolet lamp includes a mounting shaft and a lamp tube. A power cord is provided on the side of the mounting shaft, and a base plate is provided on the top of the mounting shaft, and the mounting shaft is welded to the base plate. The ultraviolet light source presents a surround structure, which greatly improves the irradiation range of the ultraviolet lamp and enhances the efficiency of plasma-assisted ultraviolet light degradation of SF6. The quartz glass layer can effectively prevent the ultraviolet lamp wick from being oxidized for a long time, resulting in a reduction in the ultraviolet effect. A catalyst is placed in the quartz tube for absorbing and treating the tail gas of SF6. An inert gas, such as Ar, can be mixed at the front end of the air intake to dilute the SF6 gas. A power regulation module is provided on the main unit to adjust the power of the discharge area. The front end of the buffer gas chamber is the gas treated in the alkali liquid treatment pool. After entering the buffer gas chamber, two outlets are provided at the end of the buffer gas chamber. One outlet is similar to the outlet of the alkali liquid treatment pool and can be used for gas collection or discharge. A pressure reducing valve, a solenoid valve and a flow meter are provided at each gas inlet and outlet to monitor the gas status in real time.

[0051] Furthermore, the spiral electrode spray gun is provided with a central conical electrode and a cylindrical high-voltage electrode, and the outer jacket of the spiral electrode spray gun is provided with a quartz tube; wherein, the central conical electrode is grounded, and the high-voltage electrode is connected to the output end of the power supply. After the plasma power supply is started, a discharge is generated between the high-voltage electrode and the grounded electrode, and then plasma is generated in the discharge area.

[0052] Furthermore, the air flow rate and the power of the main power supply will affect the characteristics of the sliding arc discharge. Increasing the gas flow rate can increase the breakdown frequency of the sliding arc, and the arc length will increase accordingly. Increasing the power can limit the unstable development of the arc, and the arc length will decrease accordingly. Therefore, the reaction degree can be judged by the arc length and stability.

[0053] Operation process: After the gas is passed through the reactor at a constant flow rate, a discharge is generated between the high-voltage electrode and the ground electrode, and then plasma is generated in the discharge area under the action of ultraviolet light. SF6 gas and Ar gas enter the ultraviolet discharge area through the cyclone. After the airflow passes through the cyclone, a swirling airflow is formed between the central conical electrode and the ground electrode. SF6 is decomposed under the action of ultraviolet light and plasma in the discharge area. The arc is broken down at the shortest distance between the two poles. The swirling airflow drives the arc to rotate between the electrodes and slide toward the tip outlet. After the reaction of the spiral electrode spray gun, the SF6 gas is decomposed, and the decomposed gas flows out through the quartz tube. Subsequently, the alkali solution treatment device can absorb the toxic acidic gas products produced by the decomposition of SF6 and treat them with a desiccant. The SF6 decomposition product gas obtained through the above steps can enter the carrier gas chamber to store this part of the gas.

[0054] Example 2

[0055] 2-6 , this embodiment differs from the first embodiment in that it provides an ultraviolet light coordinated sliding arc plasma discharge degradation device for SF6, comprising a base component 100, comprising a bearing assembly 101, and a locking assembly 102 arranged on the bearing assembly 101; an insertion component 200, comprising a shell assembly 201 arranged on the bearing assembly 101 and an insertion component 202 arranged on the shell assembly 201; a discharge degradation component 300, comprising a cyclone 301 arranged on the bearing assembly 101, and a spiral electrode spray gun 302 arranged on the cyclone 301; wherein the bearing assembly 101 comprises a fixed cylinder 101a, a vacuum flange 101b arranged at one end of the fixed cylinder 101a, and a quartz tube 101c arranged on the fixed cylinder 101a.

[0056] Specifically, the discharge degradation component 300 is arranged in the quartz tube 101c, a vacuum flange 101b is provided at one end of the quartz tube 101c for sealing, and an exhaust port is provided at the other end to output the degraded gas. The vacuum flange 101b is fixed on the fixed cylinder 101a, and the locking assembly 102 and the insertion assembly 202 cooperate with each other to connect the fixed shell assembly 201. The quartz tube 101c is transparent.

[0057] Furthermore, the locking assembly 102 includes a guide block arranged on the fixed cylinder 101a, a limiting member 102b arranged on the fixed cylinder 101a, and a movable member 102c arranged on the fixed cylinder 101a; wherein, the limiting member 102b includes a first limiting groove 102b-1 opened on the fixed cylinder 101a, a limiting ball 102b-2 arranged in the first limiting groove 102b-1, the movable member 102c includes a spring 102c-1 arranged on the fixed cylinder 101a and a movable cylinder 102c-2 arranged on the fixed cylinder 101a, the movable cylinder 102c-2 includes a sleeve 102c-2a arranged outside the spring 102c-1, a limiting cylinder 102c-2b arranged in the sleeve 102c-2a, and a protrusion 102c provided on the limiting cylinder 102c-2b. -2c, the guide block is arranged on the inner wall of the fixed cylinder and is provided with a slope. The first limiting groove 102b-1 is a groove body that is wide outside and narrow inside. The size of the limiting ball 102b-2 is slightly larger than the narrow mouth inside the first limiting groove 102b-1 and will not fall into the fixed cylinder 101a. The limiting ball 102b-2 is adapted to the size of the first limiting groove 102b-1. One end of the spring 102c-1 is fixed to the outer wall of the fixed cylinder 101a, and the other end is connected to the limiting On the positioning cylinder 102c-2b, the limiting cylinder 102c-2b is sleeved on the outside of the fixed cylinder 101a and is slidably connected. The sleeve 102c-2a is set on the outer wall of the limiting cylinder 102c-2b, covering the spring 102c-1. The protrusion 102c-2c can cover part of the first limiting groove 102b-1 when the movable cylinder 102c-2 moves, so that the limiting ball 102b-2 can slide out of the first limiting groove 102b-1 but cannot fall off.

[0058] Furthermore, the housing assembly 201 includes a shell 201a connected to the fixed cylinder 101a, a mounting member 201b provided on the shell 201a, and an ultraviolet ring lamp 201c provided on the mounting member 201b. The insertion assembly 202 includes a guide head 202a provided at one end of the shell 201a and a second limiting groove 202b provided on the shell 201a. A plurality of ultraviolet ring lamps 201c are provided. The ultraviolet ring lamps 201c are provided at the position of the spiral electrode spray gun 302. In the electrical area, the mounting member 201b is connected to an external power source and provides power to the ultraviolet ring lamp 201c. The guide head 202a is adapted to the size and shape of the guide block. The second limiting groove 202b is adapted to the position of the first limiting groove 102b-1. When the shell 201a is inserted into the fixed cylinder 101a, the guide head 202a is fitted with the guide block, the second limiting groove 202b is in the first limiting groove 102b-1, and the limiting ball 102b-2 can fall from the first limiting groove 102b-1 part into the second limiting groove 202b.

[0059] Furthermore, the guide head 202a is adapted to the guide block, the shell 201a is sleeved on the outside of the quartz tube 101c and is slidably connected to the fixed cylinder 101a, the first limiting groove 102b-1 and the second limiting groove 202b are adapted in size and position, and the movable cylinder 102c-2 is adapted to the first limiting groove 102b-1.

[0060] Furthermore, the cyclone 301 includes a sealing plate arranged in the quartz tube 101c, an air inlet pipe 301b arranged on the sealing plate, and a cyclone plate 301c arranged on the sealing plate. The spiral electrode spray gun 302 includes an electric wire 302a arranged on the sealing plate, a conical electrode 302b arranged on the cyclone 301, and a circular tube electrode 302c arranged in the quartz tube 101c. The air inlet pipe 301b and the electric wire 302a enter through the vacuum flange 101b. The sealing plate closes the cyclone 301. The air changes its flow direction after passing through the cyclone 301. The electric wire 302a provides the power required by the conical electrode 302b and the circular tube electrode 302c. When the conical electrode 302b and the circular tube electrode 302c are energized, an arc 302d can be generated.

[0061] The rest of the structure is the same as that of Example 1.

[0062] Operation process: The gas distribution device allows the proportioned gas to enter the device through the air inlet pipe 301b. Under the action of the cyclone 301, the proportioned gas enters the discharge area. The device is started. After the airflow passes through the cyclone 301, a swirling airflow is formed between the central conical electrode 302b and the circular tube electrode 302c. SF6 is decomposed under the action of the ultraviolet light and plasma in the discharge area. The arc 302d is broken down at the shortest distance between the two electrodes. The swirling airflow drives the arc 302d to rotate between the electrodes and exit toward the tip. The SF6 gas is decomposed after reacting in the spiral electrode spray gun 302, and the decomposed gas flows out through the quartz tube 101c; the output end of the external power supply is connected to the circular tube electrode 302c, and the central conical electrode 302b is grounded. When the power is turned on, an arc 302d is generated, and the vacuum flange 101b is connected to the circular tube wall electrode, and then connected to the quartz tube 101c through the vacuum flange 101b again. The tail of the quartz tube 101c is connected to an exhaust port, which is connected to the alkali solution washing device through the exhaust port air pipe;

[0063] When installing this device, the movable cylinder 102c-2 is controlled to compress the spring 102c-1 to move, and the shell 201a is directly inserted into the fixed cylinder 101a. The guide head 202a lifts the limiting ball 102b-2 to enable the shell 201a to be inserted. When the shell 201a is fully inserted, the guide head 202a and the guide block fit each other. At this time, the limiting ball 102b-2 falls and partially falls into the second limiting groove 202b. At this time, the movable cylinder 102c-2 is released, and the spring 102c-1 resets the movable cylinder 102c-2. The limiting cylinder 102c-2b of the movable cylinder 102c-2 will be pressed on the limiting ball 102b-2, so that the limiting ball 102b-2 is fixed in the two limiting grooves, and the insertion component 200 can be connected and fixed to the base component 100.

[0064] Example 3

[0065] 2-8 , this embodiment is different from the previous embodiment in that it further includes an automatic component 400, which includes a guide component 401 disposed on the carrier component 101 and a moving component 402 disposed on the shell component 201; wherein the moving component 402 is adapted and slidably matched with the guide component 401.

[0066] Specifically, the moving component 402 moves synchronously with the housing component 201, and can squeeze the guide component 401 through the moving component 402 to squeeze the movable cylinder 102c-2, automatically opening the first limiting groove 102b-1, and can be unlocked by rotating the moving component 402 during disassembly.

[0067] Furthermore, the guide assembly 401 includes a first guide groove 401a provided on the movable part 102c, a first release groove 401b connected to the first guide groove 401a, a second guide groove 401c connected to the first release groove 401b, and a second release groove 401d connected to the second guide groove 401c. The moving assembly 402 includes a rotating cylinder 402a provided on the shell 201a, a connecting rod 402b provided on the rotating cylinder 402a, and a moving block 402c provided on the connecting rod 402b.

[0068] Among them, the first guide groove 401a is gradually positioned toward the arc groove of the spring 102c-1, the first release groove 401b and the second release groove 401d are both straight grooves, and the second guide groove 401c is gradually positioned away from the arc groove of the spring 102c-1. The widths of the various grooves are the same, the rotating cylinder 402a is rotatably connected to the shell 201a, and the moving block 402c is adapted to the size of each groove and slidably fits.

[0069] The rest of the structure is the same as that of Example 2.

[0070] Operation process: When installing the housing assembly 201, the moving block 402c first enters the first guide groove 401a. As the housing assembly 201 is inserted, the moving block 402c squeezes the side wall of the first guide groove 401a, squeezing the movable cylinder 102c-2 in the direction of the spring 102c-1. At the same time, the moving block 402c also moves along the first guide groove 401a. Since the movable cylinder 102c-2 cannot rotate, the rotating cylinder 402a rotates at this time. When the moving block 402c reaches the bottom of the first guide groove 401a, the limiting ball 102b-2 has fallen into the second limiting groove 202b. At this time, the moving block 402c enters the first release groove 401b, and the movable cylinder 102c-2 is pushed back by the spring 102c-1. The moving block 402c then reaches the bottom of the first release groove 401b. The first release groove 401b and the second guide groove 401 The movable cylinder 102c-2 is pressed into the second guide groove 401c again, and the movable cylinder 102c-2 is automatically opened when the movable cylinder 102c-2 is installed.

[0071] It is important to note that the construction and arrangement of the present application shown in a number of different exemplary embodiments are merely illustrative. Although only a few embodiments are described in detail in this disclosure, it should be readily understood by those who refer to this disclosure that many modifications are possible (e.g., the size, scale, structure, shape and proportion of various elements, as well as parameter values ​​(e.g., temperature, pressure, etc.), mounting arrangements, use of materials, color, directional changes, etc.) without departing substantially from the novel teachings and advantages of the subject matter described in this application. For example, an element shown as integrally formed may be composed of multiple parts or elements, the position of the element may be inverted or otherwise changed, and the nature or number or position of the discrete elements may be altered or changed. Therefore, all such modifications are intended to be included within the scope of the present invention. The order or sequence of any process or method steps may be changed or reordered according to alternative embodiments. In the claims, any "means plus function" clause is intended to cover the structure described herein that performs the function, and is not only structurally equivalent but also equivalent structures. Other replacements, modifications, changes, and omissions may be made in the design, operating conditions, and arrangement of the exemplary embodiments without departing from the scope of the present invention. Therefore, the invention is not limited to the specific embodiments, but extends to various modifications that still fall within the scope of the appended claims.

[0072] Additionally, in order to provide a concise description of exemplary embodiments, all features of an actual embodiment (ie, those features that are not relevant to the best mode presently contemplated for carrying out the invention or those that are not relevant to implementing the invention) may not be described.

[0073] It will be appreciated that in the development of any actual embodiment, as in any engineering or design project, numerous implementation-specific decisions may be made. Such a development effort may be complex and time-consuming, but will, for those of ordinary skill having the benefit of this disclosure, be a routine undertaking of design, fabrication, and production without undue experimentation.

[0074] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present invention, which should all be included in the scope of the claims of the present invention.

Claims

1. A method for degrading SF6 by ultraviolet light assisted sliding arc plasma discharge, characterized in that: The following steps are included: SF6 gas and Ar gas are introduced into a gas distribution device for dilution and mixing, and then sent into a reactor after mixing; The mixed gas enters the reactor for degradation; The degraded gas is initially treated in a quartz tube and then sent to an alkali gas washing tank for washing and drying; The dried gas enters the gas storage device for storage and analysis.

2. The method for degrading SF6 by ultraviolet light assisted sliding arc plasma discharge according to claim 1, characterized in that: The spiral electrode spray gun is provided with a central conical electrode and a circular tubular high-voltage electrode, and the outer jacket of the spiral electrode spray gun is provided with a quartz tube; Among them, the central conical electrode is grounded, and the high-voltage electrode is connected to the output end of the power supply. After the plasma power supply is started, discharge is generated between the high-voltage electrode and the grounded electrode, and then plasma is generated in the discharge area.

3. The method for degrading SF6 by ultraviolet light assisted sliding arc plasma discharge according to claim 2, characterized in that: The gas flow rate and the main power supply power will affect the sliding arc discharge characteristics. Increasing the gas flow rate can increase the breakdown frequency of the sliding arc, and the arc length will increase accordingly. Increasing the power can limit the unstable development of the arc, and the arc length will decrease accordingly. Therefore, the reaction degree can be judged by the arc length and stability.

4. An ultraviolet light assisted sliding arc plasma discharge SF6 degradation device, used in the ultraviolet light assisted sliding arc plasma discharge SF6 degradation method according to any one of claims 1 to 3, characterized in that: include, A base component (100) comprises a bearing assembly (101) and a locking assembly (102) arranged on the bearing assembly (101); An insertion component (200) comprises a housing component (201) arranged on the bearing component (101) and an insertion component (202) arranged on the housing component (201); A discharge degradation component (300) comprises a cyclone (301) arranged on the supporting assembly (101), and a spiral electrode spray gun (302) arranged on the cyclone (301); The bearing assembly (101) comprises a fixed cylinder (101a), a vacuum flange (101b) arranged at one end of the fixed cylinder (101a), and a quartz tube (101c) arranged on the fixed cylinder (101a).

5. The ultraviolet light assisted sliding arc plasma discharge SF6 degradation device as claimed in claim 4, characterized in that: The locking assembly (102) comprises a guide block arranged on the fixed cylinder (101a), a limiter (102b) arranged on the fixed cylinder (101a), and a movable member (102c) arranged on the fixed cylinder (101a); The limiting member (102b) comprises a first limiting groove (102b-1) provided on the fixed cylinder (101a), and a limiting ball (102b-2) arranged in the first limiting groove (102b-1); the movable member (102c) comprises a spring (102c-1) provided on the fixed cylinder (101a) and a movable cylinder (102c-2) provided on the fixed cylinder (101a); the movable cylinder (102c-2) comprises a sleeve (102c-2a) sleeved outside the spring (102c-1), a limiting cylinder (102c-2b) provided in the sleeve (102c-2a), and a protrusion (102c-2c) provided on the limiting cylinder (102c-2b).

6. The ultraviolet light assisted sliding arc plasma discharge SF6 degradation device as claimed in claim 5, characterized in that: The housing component (201) comprises a shell (201a) connected to a fixed cylinder (101a), a mounting member (201b) arranged on the shell (201a), and an ultraviolet ring lamp (201c) arranged on the mounting member (201b); and the insertion component (202) comprises a guide head (202a) arranged at one end of the shell (201a) and a second limiting groove (202b) opened on the shell (201a).

7. The ultraviolet light assisted sliding arc plasma discharge SF6 degradation device according to claim 6, characterized in that: The guide head (202a) is matched with the guide block, the shell (201a) is sleeved on the outside of the quartz tube (101c) and is slidably connected to the fixed cylinder (101a), the first limiting groove (102b-1) and the second limiting groove (202b) are matched in size and position, and the movable cylinder (102c-2) is matched with the first limiting groove (102b-1).

8. The ultraviolet light assisted sliding arc plasma discharge SF6 degradation device as claimed in claim 7, characterized in that: The cyclone (301) comprises a sealing plate arranged in the quartz tube (101c), an air inlet pipe (301b) arranged on the sealing plate, and a cyclone plate (301c) arranged on the sealing plate; the spiral electrode spray gun (302) comprises an electric wire (302a) arranged on the sealing plate, a conical electrode (302b) arranged on the cyclone (301), and a circular tube electrode (302c) arranged in the quartz tube (101c).

9. The ultraviolet light assisted sliding arc plasma discharge SF6 degradation device according to claim 6 or 8, characterized in that: It also includes an automatic component (400), wherein the automatic component (400) includes a guide component (401) arranged on the bearing component (101) and a moving component (402) arranged on the housing component (201); Wherein, the moving component is adapted and slidably matched with the guiding component (401).

10. The ultraviolet light assisted gliding arc plasma discharge SF6 degradation device according to claim 9, characterized in that: The guide assembly (401) comprises a first guide groove (401a) arranged on the movable part (102c), a first spreading groove (401b) connected to the first guide groove (401a), a second guide groove (401c) connected to the first spreading groove (401b), and a second spreading groove (401d) connected to the second guide groove (401c); the moving assembly (402) comprises a rotating cylinder (402a) arranged on the shell (201a), a connecting rod (402b) arranged on the rotating cylinder (402a), and a moving block (402c) arranged on the connecting rod (402b).

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