Securing device

Abstract

The invention relates to a securing device (24) for securing a functional component (25) to a substrate body (26), comprising a functional component (25) which can be inserted into a receiving area (27) of the substrate body (26) and a securing component (28) with at least two clamping elements (29) for producing a form-fitting connection between the functional component (25) and the substrate body (26).

Description

[0001] Fastening device

[0002] This patent application claims priority from German patent application DE 10 10 2023 208 042.7, the contents of which are incorporated herein by reference.

[0003] The present invention relates to a fastening device for fastening a functional component to a substrate body. Furthermore, the invention relates to a mirror device having such a fastening device, an optical system having such a mirror device, and a projection exposure system having such an optical system.

[0004] Mirror substrates and associated functional components are known from prior use.

[0005] Fastening devices are known from CA 2 624 761 A1, CN 114 321 112 A, WO 2004 / 088 154 A1, US 2008 / 0078031 A1 and DE 102 13 214 A1.

[0006] It is an object of the invention to provide a fastening device which facilitates the fastening of a functional component to a substrate body and is particularly user-friendly, particularly in the case of sensitive, for example brittle, materials for the substrate body.

[0007] This object is achieved according to the invention by a fastening device having the features recited in claim 1. The core of the invention lies in the positively securing the functional component to the substrate body by means of a fastening component.

[0008] The functional component is arranged in a receptacle of the substrate body. The fastening component can also be arranged in the receptacle of the substrate body. It is also possible for the fastening receptacle to be arranged on an outer surface of the substrate body.

[0009] The substrate body receptacle can be designed as a blind hole. It is also possible for the substrate body receptacle to be designed as a through-hole. The receptacle can have a central axis, in particular an axis of symmetry. The receptacle can, in particular, be rotationally symmetrical to the axis of symmetry.

[0010] The fastening component has at least two clamping elements with which the positive connection between the functional component and the substrate body is realized.

[0011] The functional component can be designed as a rotationally symmetric body, in particular as a cylindrical body. It is also possible for the functional component to be designed as a straight body with integer rotational symmetry.

[0012] The functional component can protrude from the substrate body's receptacle on one side and, in particular, on both sides. It is also possible for the functional component to be arranged entirely within the substrate body's receptacle. The functional component has an axial direction and a radial direction. Along the axial direction, the functional component is arranged at least partially within the substrate body's receptacle. The radial direction is perpendicular to the axial direction. The extension of the functional component along the radial direction is referred to as the radius of the functional component. In particular, the radius of the functional component cannot be constant.

[0013] The functional component can have a hollow space extending in the axial direction and, in particular, a continuous cavity. The functional component can, in particular, be designed as an annular body. A ring is understood to be a body whose surface has topological genus 1.

[0014] The fastening component can be designed as a rotationally symmetrical component. It is also possible for the fastening component to be designed as a rotationally symmetrical component with an integer rotational symmetry. In particular, it is possible for the symmetry of the fastening component and the symmetry of the functional component to be coordinated with each other. It is also possible for neither the fastening component nor the functional component to have inherent symmetries.

[0015] The positive fastening of a functional component to a substrate body using a fastening component has a number of technical advantages:

[0016] Because a positive connection is achieved through the precise interlocking of the connecting parts, such a connection can be manufactured particularly easily, quickly, and efficiently by a single operator. In particular, additional connecting elements such as screws, nuts, or bolts can be eliminated. Furthermore, additional fastening steps such as screwing, welding, and / or gluing components can be eliminated.

[0017] A positive connection can be created and released reversibly, in particular. This makes it possible to replace the functional component quickly and easily. Using the fastening device according to the invention, the functional component can be quickly and flexibly adapted to the respective requirements. Maintenance and / or replacement of the functional component can also be facilitated in the event of damage and / or wear to the functional component.

[0018] The time- and temperature-dependent viscoelastic or plastic deformation of the connecting partners under load, known as “creep”, can also be reduced and in particular avoided by means of the fastening device according to the invention.

[0019] The interaction of the functional component and the fastening component allows for greater tolerances in the dimensioning of the substrate body.

[0020] The functional component can, in particular, have a T-shaped cross-section. In such a case, the axial direction of the functional component represents the axis of symmetry of the T-shaped cross-section. The at least two clamping elements of the fastening component create a positive connection between the functional component and the substrate body, wherein the clamping elements of the fastening component mediate this positive connection in such a way that the connection is created between the functional component, on the one hand, and the assembly comprising the fastening component and the substrate body, on the other hand.

[0021] The functional component and / or the substrate body can be a component of a projection exposure system for lithography for producing structured components, in particular structured semiconductor components.

[0022] The functional component can in particular be designed as an interface by means of which further components, in particular electronic components or bearing components, can be connected to the fastening device.

[0023] The fastening device can be part of an optical component, in particular of a projection exposure system. This optical component can be a mirror, for example a collector mirror or a mirror of an illumination optics system of a projection exposure system for guiding useful light towards an object field, or a mirror of an imaging optics system of a projection exposure system for imaging an object field into an image field, or else a lens or a component, in particular of a projection exposure system, that does not serve to guide useful light. The mirror can be a mirror for grazing incidence (GI mirror, mirror with an angle of incidence greater than 45 degrees) or a mirror for normal incidence (NI mirror, mirror with an angle of incidence less than 45 degrees).A mirror body of such a mirror, which carries a reflection surface, in particular a highly reflective layer or a highly reflective multilayer, can be a base body made of Si or SiSiC.

[0024] The functional component, if it is an optical component, is usually the component that directly guides the optical beam. An example of a non-optical component that includes the mounting device is a frame of a detection device. Such a frame can also be made of SiSiC. In this case, the functional component is at least one sensor element. Other examples of non-optical functional components are measuring devices and tools for projection exposure with a base body made of silicon or ceramic, particularly SiSiC.

[0025] The thermal expansion coefficient of the functional component is smaller than the thermal expansion coefficient of the fastening component. This prevents unwanted tension between the functional component and the fastening component, especially when the fastening component heats up.

[0026] A fastening device according to claim 2 ensures a particularly stable connection between the functional component and the substrate body. The functional component contact surface allows the functional component to rest securely and firmly against the substrate body. This also enables more precise insertion of the functional component into the substrate body's receptacle. The additional contact pressure created between the functional component contact surface and the substrate body holds the functional component particularly securely in position.

[0027] The functional component contact surface can be flat or curved.

[0028] In the case of a functional component with a T-shaped cross-section, the functional component contact surface can be located on a boundary surface of a main leg section of the T-shaped longitudinal section, i.e. in particular in that section of the functional component which has a larger diameter.

[0029] A fastening device according to claim 3 enables particularly high tolerances of the substrate body. The less precisely the substrate body, and in particular the substrate body holder, is manufactured, the less precise the positive connection between the functional component and the substrate body. A fastening component designed in such a way that it centers the functional component in the substrate body holder during fastening compensates for these tolerances particularly efficiently.

[0030] A fastening component according to claim 4 is particularly easy to install. The non-constant radius of the radial fastening contact surface of the functional component results in two possible positions that the functional component can assume in the receptacle of the substrate body. The functional component can be arranged in a non-clamped state, i.e. in a non-clamped position, in the receptacle of the substrate body. In the non-clamped state, the functional component is loosely held by the fastening component and has freedom of movement, particularly in the radial direction. In the non-clamped state, the functional component is particularly easy to remove from and / or insert into the receptacle of the substrate body.

[0031] Alternatively, the functional component can be arranged in the substrate body's receptacle in a clamped state, i.e., in a clamped position. In the clamped state, the positive connection is ensured, particularly in the radial direction. In the clamped position, the functional component has no freedom of movement in the radial direction. In the clamped position, the functional component can be arranged, particularly centered, in the substrate body's receptacle.

[0032] In the clamped position, a form-fit connection, at least partially, is created in the axial direction. Removing and / or inserting the functional component into the substrate body's receptacle is difficult and, in particular, impossible in the clamped position. This ensures that the functional component is particularly securely and stably attached to the substrate body.

[0033] A fastening device according to claim 6 enables the particularly simple transfer of the functional component from the non-clamped state to the clamped state. Due to the constant gradient of the toothing of the fastening contact surface of the functional component and / or the constant gradient of the fastening elements of the fastening component, which are designed as ribs extending counter to the radial direction, it is possible to insert the functional component in the non-clamped state into the receptacle of the substrate body and to fasten it by rotating the functional component in the circumferential direction using the clamping elements of the fastening component.

[0034] The constant gradient of the components ensures that the force required during such a rotation increases evenly and / or that the rotational movement occurs smoothly, i.e., without the physical magnitude of jerk. This significantly simplifies the assembly of the functional component to the substrate body.

[0035] A fastening device according to claim 9 enables a particularly secure connection of the functional component to the substrate body. By wedging and / or clamping the functional component to the fastening component, a particularly strong holding force is exerted between the two components. This makes the connection between the functional component and the substrate body particularly secure and stable.

[0036] A fastening device according to claim 9 is particularly heat-resistant. If the substrate body and subsequently the functional component and / or the fastening component heat up, these components will expand thermally.

[0037] According to claim 9, the fastening component expands the most. The functional component expands the least. The substrate body expands in between. This ensures that, apart from the necessary assembly holding forces between the fastening component and the functional component, no further forces act on the functional component due to thermal expansion. This prevents rapid wear of the functional component. The fastening device according to the invention ensures that the functional component is particularly durable.

[0038] The expansion behavior according to claim 9 also ensures that the functional component is precisely arranged in the receptacle of the substrate body even under thermal influence.

[0039] The functional component can be made of a metal, particularly Invar. Invar has proven itself suitable for such applications due to its particularly low coefficient of thermal expansion.

[0040] The fastening component can be formed from another metal, which, however, has a significantly higher coefficient of thermal expansion than Invar. Advantageously, the fastening component can be made of a material such as stainless steel or aluminum.

[0041] The substrate body is formed in particular from silicon carbide, according to a particularly preferred embodiment variant of silicon-infiltrated silicon carbide (SiSiC).

[0042] Further objects of the invention are to improve a mirror device, in particular an EUV collector, an optical system, and a projection exposure system. These objects are achieved according to the invention by a mirror device having the features of claim 10, an optical system having the features of claim 12, and a projection exposure system having the features of claim 13.

[0043] The advantages of the mirror device, the optical system and the projection exposure system correspond to those already explained above with reference to the fastening device.

[0044] The projection exposure system can be used to manufacture a microchip made of semiconductor material, in particular a memory chip. Such a semiconductor component, which can be manufactured using the projection exposure system, can have micro- or nanostructures.

[0045] Embodiments of the invention are explained in more detail below with reference to the figures. They show:

[0046] Fig. 1 shows a meridional section of a projection exposure system for EUV projection lithography,

[0047] Fig. 2 shows a fastening device in a longitudinal section along the section line II-II in Fig. 3, and

[0048] Fig. 3 is a sectional view of the fastening device along section line III-III in Fig. 2.

[0049] In the following, the essential components of a projection exposure system 1 for microlithography are first described by way of example with reference to Figure 1. The description of the basic structure of the projection exposure system 1 and its components is not intended to be limiting.

[0050] One embodiment of an illumination system 2 of the projection exposure system 1 has, in addition to a light or radiation source 3, an illumination optics 4 for illuminating an object field 5 in an object plane 6. In an alternative embodiment, the light source 3 can also be provided as a separate module from the rest of the illumination system. In this case, the illumination system does not include the light source 3.

[0051] A reticle 7 arranged in the object field 5 is exposed. The reticle 7 is held by a reticle holder 8. The reticle holder 8 can be displaced, in particular in a scanning direction, via a reticle displacement drive 9.

[0052] Figure 1 shows a Cartesian xyz coordinate system for illustrative purposes. The x-direction runs perpendicular to the drawing plane. The y-direction runs horizontally, and the z-direction runs vertically. The scanning direction in Figure 1 runs along the y-direction. The z-direction runs perpendicular to the object plane 6.

[0053] The projection exposure system 1 comprises projection optics 10. The projection optics 10 serve to image the object field 5 into an image field 11 in an image plane 12. The image plane 12 runs parallel to the object plane 6. Alternatively, an angle other than 0° between the object plane 6 and the image plane 12 is also possible. A structure on the reticle 7 is imaged onto a light-sensitive layer of a wafer 13 arranged in the region of the image field 11 in the image plane 12. The wafer 13 is held by a wafer holder 14. The wafer holder 14 can be displaced, in particular along the y-direction, via a wafer displacement drive 15. The displacement of the reticle 7, on the one hand, via the reticle displacement drive 9, and the displacement of the wafer 13, on the other hand, via the wafer displacement drive 15 can be synchronized with one another.

[0054] The radiation source 3 is an EUV radiation source. The radiation source 3 emits, in particular, EUV radiation 16, which is also referred to below as useful radiation or illumination radiation. The useful radiation has, in particular, a wavelength in the range between 5 nm and 30 nm. The radiation source 3 can be a plasma source, for example an LPP source (laser produced plasma, plasma generated using a laser) or a DPP source (gas discharged produced plasma, plasma generated by gas discharge). It can also be a synchrotron-based radiation source. The radiation source 3 can be a free-electron laser (FEL).

[0055] The illumination radiation 16 emanating from the radiation source 3 is focused by a collector 17. The collector 17 can be a collector with one or more ellipsoidal and / or hyperboloidal reflection surfaces. The at least one reflection surface of the collector 17 can be exposed to the illumination radiation 16 at grazing incidence (Gl), i.e., at angles of incidence greater than 45°, or at normal incidence (NI), i.e., at angles of incidence less than 45°. The collector 17 can be structured and / or coated, on the one hand, to optimize its reflectivity for useful radiation and, on the other hand, to suppress stray light.

[0056] A fastening device which serves to fasten additional functional components to the collector 17 is explained in more detail below with reference to Figures 2 and 3.

[0057] After the collector 17, the illumination radiation 16 propagates through an intermediate focus in an intermediate focal plane 18. The intermediate focal plane 18 can represent a separation between a radiation source module, comprising the radiation source 3 and the collector 17, and the illumination optics 4.

[0058] The illumination optics 4 comprises a first facet mirror 19. If the first facet mirror 19 is arranged in a plane of the illumination optics 4 that is optically conjugate to the object plane 6, it is also referred to as a field facet mirror. The first facet mirror 19 comprises a plurality of individual first facets 20, which are also referred to below as field facets. Only a few of these facets are shown in Figure 1 as examples.

[0059] The first facets 20 can be designed as macroscopic facets, in particular as rectangular facets or as facets with an arcuate or partially circular edge contour. The first facets 20 can be designed as flat facets or, alternatively, as convexly or concavely curved facets. As is known, for example, from DE 10 2008 009 600 A1, the first facets 20 themselves can also be composed of a plurality of individual mirrors, in particular a plurality of micromirrors. The first facet mirror 19 can, in particular, be designed as a microelectromechanical system (MEMS system). For details, reference is made to DE 10 2008 009 600 A1.

[0060] In the beam path of the illumination optics 4, a second facet mirror 2E is arranged downstream of the first facet mirror 19. If the second facet mirror 21 is arranged in a pupil plane of the illumination optics 4, it is also referred to as a pupil facet mirror. The second facet mirror 21 can also be arranged at a distance from a pupil plane of the illumination optics 4. In this case, the combination of the first facet mirror 19 and the second facet mirror 21 is also referred to as a specular reflector. Specular reflectors are known from US 2006 / 0132747 A1, EP 1 614 008 B1, and US Pat. No. 6,573,978.

[0061] The second facet mirror 21 comprises a plurality of second facets 22. In the case of a pupil facet mirror, the second facets 22 are also referred to as pupil facets.

[0062] The second facets 22 can also be macroscopic facets, which can, for example, be round, rectangular, or hexagonal, or alternatively facets composed of micromirrors. Reference is also made to DE 10 2008 009 600 A1 in this regard.

[0063] The second facets 22 can have flat or, alternatively, convex or concave curved reflection surfaces. The illumination optics 4 thus forms a double-faceted system. This basic principle is also referred to as a fly's-eye integrator.

[0064] It may be advantageous not to arrange the second facet mirror 21 exactly in a plane that is optically conjugate to a pupil plane of the projection optics 10. In particular, the pupil facet mirror 22 can be arranged tilted relative to a pupil plane of the projection optics 7, as described, for example, in DE 10 2017 220 586 A1.

[0065] With the aid of the second facet mirror 21 and an imaging optical assembly in the form of a transmission optics 23, the individual first facets 20 are imaged into the object field 5.

[0066] The transmission optics 23 can comprise exactly one mirror, but alternatively also two or more mirrors arranged one behind the other in the beam path of the illumination optics 4. The transmission optics can, in particular, comprise one or two mirrors for normal incidence (NI mirrors, normal incidence mirrors) and / or one or two mirrors for grazing incidence (GL mirrors, grazing incidence mirrors). In the embodiment shown in Figure 1, the illumination optics 4 has exactly three mirrors after the collector 17, namely the transmission optics 23, the first facet mirror 19, and the pupil facet mirror 21.

[0067] If the transmission optics 23 are omitted after the second facet mirror 21, the second facet mirror 21 is the last bundle-forming or actually the last mirror for the illumination radiation 16 in the beam path in front of the object field 5. An example of an illumination optics 4 without transmission optics is disclosed in Figure 2 of WO 2019 / 096654 A1.

[0068] The imaging of the first facets 20 by means of the second facets 22 or with the second facets 22 and a transmission optics 23 into the object plane 6 is usually only an approximate imaging.

[0069] The projection optics 10 comprises a plurality of mirrors Mi, which are numbered according to their arrangement in the beam path of the projection exposure system 1.

[0070] In the example shown in Figure 1, the projection optics 10 comprises eight mirrors M1 to M8. Alternatives with four, six, ten, twelve, or a different number of mirrors M1 are also possible. The projection optics 10 is an obscured optic. The last mirror M8 has a passage opening for the illumination radiation 16. The projection optics 10 has an image-side numerical aperture that is greater than 0.4 and can be, for example, 0.5. The image-side numerical aperture can also be even larger, can be greater than 0.6 and can be, for example, 0.7 or 0.75.

[0071] Reflection surfaces of the mirrors Mi can be designed as freeform surfaces without a rotational symmetry axis. Alternatively, the reflection surfaces of the mirrors Mi can be designed as aspherical surfaces with exactly one rotational symmetry axis of the reflection surface shape. The mirrors Mi, like the mirrors of the illumination optics 4, can have highly reflective coatings for the illumination radiation 16. These coatings can be designed as multilayer coatings, in particular with alternating layers of molybdenum and silicon.

[0072] The projection optics 10 can be designed in particular to be anamorphic. In particular, it has different image scales ß x , ß y in the x- and y-direction. The two magnifications ß x , ßy of the projection optics 10 are preferably (ß x , ß y) = (+ / - 0.25, + / - 0.125). A positive magnification ß means an image without image inversion. A negative magnification ß means an image with image inversion.

[0073] The projection optics 10 results in a reduction in the ratio 4:1 in the x-direction, i.e. in the direction perpendicular to the scanning direction.

[0074] The projection optics 10 results in a reduction of 8:1 in the y-direction, i.e. in the scanning direction.

[0075] Other magnifications are also possible. Magnifications with the same sign and absolutely identical in the x and y directions, for example, with absolute values ​​of 0, 125, or 0.25, are also possible.

[0076] The number of intermediate image planes in the x- and y-directions in the beam path between the object field 5 and the image field 11 can be the same or can be different, depending on the design of the projection optics 10. Examples of projection optics with different numbers of such intermediate images in the x- and y-directions are known from US 2018 / 0074303 A1. Each of the pupil facets 22 is assigned to exactly one of the field facets 20 to form a respective illumination channel for illuminating the object field 5. This can, in particular, result in illumination according to the Köhler principle. The far field is divided into a plurality of object fields 5 with the aid of the field facets 20. The field facets 20 generate a plurality of images of the intermediate focus on the pupil facets 22 assigned to them.

[0077] The field facets 20 are each imaged onto the reticle 7 by an associated pupil facet 22, superimposed on one another, to illuminate the object field 5. The illumination of the object field 5 is, in particular, as homogeneous as possible. It preferably has a uniformity error of less than 2%. Field uniformity can be achieved by superimposing different illumination channels.

[0078] By arranging the pupil facets, the illumination of the entrance pupil of the projection optics 10 can be geometrically defined. By selecting the illumination channels, in particular the subset of the pupil facets that guide light, the intensity distribution in the entrance pupil of the projection optics 10 can be adjusted. This intensity distribution is also referred to as the illumination setting or illumination pupil fill.

[0079] A similarly preferred pupil uniformity in the area of ​​defined illuminated sections of an illumination pupil of the illumination optics 4 can be achieved by redistributing the illumination channels. Further aspects and details of the illumination of the object field 5 and, in particular, the entrance pupil of the projection optics 10 are described below.

[0080] The projection optics 10 can, in particular, have a homocentric entrance pupil. This can be accessible. It can also be inaccessible.

[0081] The entrance pupil of the projection optics 10 cannot usually be precisely illuminated with the pupil facet mirror 21. When the projection optics 10 images the center of the pupil facet mirror 21 telecentrically onto the wafer 13, the aperture rays often do not intersect at a single point. However, a surface can be found in which the pairwise determined spacing of the aperture rays is minimized. This surface represents the entrance pupil or a surface conjugate to it in spatial space. In particular, this surface exhibits a finite curvature.

[0082] It is possible that the projection optics 10 have different entrance pupil positions for the tangential and sagittal beam paths. In this case, an imaging element, in particular an optical component of the transmission optics 23, should be provided between the second facet mirror 21 and the reticle 7. With the help of this optical element, the different positions of the tangential entrance pupil and the sagittal entrance pupil can be taken into account.

[0083] In the arrangement of the components of the illumination optics 4 shown in Figure 1, the pupil facet mirror 21 is not arranged in a surface conjugated to the entrance pupil of the projection optics 10. It is also tilted relative to the object plane 5. The second facet mirror 21 is further tilted relative to an arrangement plane defined by the first facet mirror 19.

[0084] The fastening device 24 for fastening a functional component 25 to the collector 17 is explained in more detail below in longitudinal section with reference to Figures 2 and 3. Depending on the design, the functional component 25 can be a mirror, for example, a mirror of an EUV collector, or, if the functional component is designed as a non-optical component, a sensor element or another form of measuring device or tool for projection lithography.

[0085] Figure 2 shows the fastening device 24 and a substrate body 26 in a cross-sectional view, with the fastening device 24 shown in longitudinal section. The substrate body can be a mount, a holder, or even a frame for the respective optical or non-optical functional component 25.

[0086] The fastening device 24 comprises at least one such functional component 25, which is to be fastened to and / or in the substrate body 26. For this purpose, the substrate body 26 has a receptacle 27, which, in the illustration according to Figure 2, is designed in particular as a through-hole.

[0087] The functional component 25 is held in the receptacle 27 of the substrate body 26 by a fastening component 28. For this purpose, the fastening component 28 has at least one clamping element 29. In the embodiment shown in Figures 2 and 3, the fastening component 28 has three clamping elements 29, which are designed as ribs or lugs extending circumferentially around a central axis of the circular receptacle 27 and are integrally formed on a base body of the fastening component 28 via solid-state joints.

[0088] The functional component 25 further comprises a flat functional component contact surface 30, by means of which the functional component 25 rests against the substrate body 26.

[0089] The functional component 25 further comprises a curved fastening contact surface 31 which rests against the clamping elements 29 of the fastening component 28 in a wedged and / or clamped manner such that a positive connection is created between the functional component 25 and the substrate body 26 in a radial direction 32 to a longitudinal axis of the functional component 25.

[0090] As can further be seen from Figure 2, the base body of the fastening component 28 is arranged on the side of the substrate body 26 opposite the functional component contact surface 30.

[0091] Figure 2 shows exactly one clamping element 29 of the fastening component 28. The respective clamping element 29 is preloaded counter to the radial direction 32 toward the center of the receptacle 27 via the associated flexure joint.

[0092] The functional component 25 has a T-shaped longitudinal section.

[0093] A transverse web of the T, i.e. the main section of the T-longitudinal section, comprises the functional component contact surface 30, with which the functional component 25 rests against the substrate body 26. The section of the T orthogonal to the transverse web comprises, as the outer shell wall, the fastening contact surface 31, which has a non-constant radius of curvature. The radius of curvature of the fastening contact surface 31 of the functional component 25 periodically increases and decreases along the circumferential direction 33 (not shown in Figure 1). This results in a fastening contact surface 31 with cams or teeth 31a that is cam-shaped or tooth-shaped in the circumferential direction. A gradient of a pitch of a radius value of this toothing of the fastening contact surface 31, measured in the circumferential direction 33, is constant in certain sections.

[0094] Figure 3 shows the fastening device 24 in plan view.

[0095] Figure 3 shows a fastening component 28 with three clamping elements 29. The three clamping elements 29 are preloaded by the fastening component 28 against the radial direction 32 toward the center of the receptacle 27. In the circumferential direction 33, the clamping elements 29 are spaced at a constant distance from one another. With respect to the center of the receptacle 27, two of the clamping elements 29 are arranged at a 120° angle to one another.

[0096] The toothing of the gear-shaped fastening contact surface 31 of the functional component 25 has, as shown in Figure 2, three cams or teeth 31a. The number of teeth 31a of the fastening contact surface 31 corresponds to the number of clamping elements 29 of the fastening component. In other embodiments of the invention, more clamping elements 29 and correspondingly more teeth of the fastening contact surface 31 are possible. A larger number of teeth of the fastening contact surface 31 correspondingly leads to a greater gradient of the fastening contact surface 31 in the circumferential direction 33.

[0097] The functional component 25 is shown in Figure 2 in a clamped position relative to the substrate body 26. By rotating the functional component 25 in the circumferential direction 33, the functional component 25 can be transferred to a non-clamped position. In a non-clamped position, the functional component 25 can be replaced.

[0098] In the clamped position, the functional component 25 is arranged centered relative to the receptacle 27 of the substrate body 26. In particular, in the clamped arrangement, the geometric centroids of the receptacle 27 and the functional component 25 coincide.

[0099] As further illustrated in Figure 2, the functional component 25 is hollow in its interior. The hollow space of the functional component 25 extends, in particular in the axial direction, along the entire length of the functional component 25, so that the receptacle 27, designed as a through-hole, is not closed by the fastening of the functional component 25 to the substrate body 26.

[0100] To produce a micro- or nanostructured component, the projection exposure system 1 is used as follows: First, the reticle 7 and the wafer 13 are prepared. Subsequently, a structure on the reticle 7 is projected onto a light-sensitive layer of the wafer 13 using the projection exposure system 1. By developing the light-sensitive layer, a micro- or nanostructure is then created on the wafer 13, thus creating the microstructured component. This component is a semiconductor component, in particular a microchip, for example a memory chip.

Claims

Patent claims 1. Fastening device (24) for fastening a functional component (25) to a substrate body (26), with the functional component (25) which can be inserted into a receptacle (27) of the substrate body (26), and a fastening component (28) with at least two clamping elements (29) for creating a positive connection between the functional component (25) on the one hand and the fastening component (28) and the substrate body (26) on the other hand, wherein a thermal volume expansion coefficient of the functional component (25) is smaller than a thermal volume expansion coefficient of the fastening component.

2. Fastening device (24) according to claim 1, characterized in that the functional component (25) has a functional component contact surface (30) via which the functional component (25) can be applied to the substrate body (26).

3. Fastening device (24) according to one of the preceding claims, characterized in that the fastening component (28) is designed for the centered reception of the functional component (25) in the receptacle of the substrate body (26).

4. Fastening device (24) according to one of the preceding claims, characterized in that the functional component (25) has a curved fastening contact surface (31) with a non- has a constant radius of curvature, via which the functional component (25) rests against the clamping element (29) of the fastening component (28).

5. Fastening device (24) according to claim 4, characterized in that the fastening contact surface (31) has a toothing in the circumferential direction (33) and / or that the clamping elements (29) of the fastening component (28) are designed as ribs extending counter to the radial direction (32).

6. Fastening device (24) according to claim 5, characterized in that the toothing of the fastening contact surface (31) of the functional component (25) and / or the ribs of the fastening component (28) extending counter to the radial direction (3) have a constant gradient in the circumferential direction (33).

7. Fastening device (24) according to one of the preceding claims, characterized in that the functional component (25) is wedged and / or clamped to the fastening component (28).

8. Fastening device (24) according to one of the preceding claims, characterized in that the substrate body (26) represents a component of the fastening device (24), wherein the substrate body (26) has a receptacle (27) for the functional component (25).

9. Fastening device (24) according to claim 8, characterized in that the thermal expansion coefficient of the Functional component (25) is smaller than the thermal volume expansion coefficient of the substrate body (26) and / or the thermal volume expansion coefficient of the substrate body (26) is smaller than the thermal volume expansion coefficient of the fastening component (28).

10. Mirror device with at least one fastening device (24) according to one of claims 1 to 9.

11. Mirror device according to claim 10, characterized by an embodiment as an EUV collector (17).

12. Optical system comprising a mirror device according to one of claims 10 to 11 and an illumination source (3).

13. Projection exposure apparatus (1) with an optical system according to claim 12.

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