Fluorescent x-ray analysis apparatus

Abstract

The present invention stretches a partition wall film for installation so as to enable measurement even when there is a pressure difference between spaces partitioned by the partition wall film and prevent the partition wall film from being bent or wrinkled easily. Provided is a fluorescent X-ray analysis apparatus comprising an irradiation chamber with a vacuum interior and a sample chamber with atmospheric pressure, the fluorescent X-ray analysis apparatus further comprising: a window frame holding member that constitutes a part of a partition wall between the irradiation chamber and the sample chamber and that has an opening through which X-rays pass; and a window frame member that is formed from a material that transmits X-rays, holds a partition wall film that is a part of the partition wall, and is disposed in the opening of the window frame holding member. The window frame member comprises: an annular inner film holding member that has a peripheral wall extending from a base end located on the sample chamber side toward a distal end located on the irradiation chamber side, the distal end forming an opening that is closed by a part of the partition wall film; and an annular outer film holding member that is inserted from the distal end of the inner film holding member and is attached to the base end of the inner film holding member, to thereby fix the periphery of a part of the partition wall film to the inner film holding member.

Description

X-ray fluorescence analyzer

[0001] The present invention relates to an X-ray fluorescence analyzer.

[0002] X-ray fluorescence analyzers are known as devices for analyzing elements contained in samples (see Patent Document 1). X-ray fluorescence analyzers irradiate a sample with primary X-rays and perform analysis based on the intensity and energy of fluorescent X-rays emitted from the sample. Simple X-ray fluorescence analyzers are also known, each having a structure in which a sample chamber and an irradiation chamber are separated by a partition membrane to facilitate sample replacement (see Patent Document 2). Another known X-ray fluorescence analyzer has a sample cell stand that includes an X-ray transparent sheet sandwiched between an outer frame and an inner frame and closing one end of the inner frame (see Patent Document 3).

[0003] International Publication No. 2005-024407 International Publication No. 2004-088296 Japanese Patent Application Laid-Open No. 9-127028

[0004] The X-ray fluorescence analyzer of Patent Document 1 includes a sample chamber that houses a sample, an irradiation chamber that houses an X-ray source that irradiates the sample with primary X-rays and is connected to the sample chamber, an irradiation chamber that houses a detection means that detects secondary X-rays by dispersing them, and a partition wall that separates the irradiation chamber and allows X-rays to pass through. The partition wall film is made of polyimide or the like and deteriorates when exposed to X-rays. Therefore, the partition wall film needs to be replaced periodically, but the structure of the X-ray fluorescence analyzer of Patent Document 1 makes it difficult to easily replace the partition wall film.

[0005] In the X-ray fluorescence analyzer of Patent Document 2, the sample chamber and the irradiation chamber are separated by a first frame and a second frame sandwiching a partition membrane between them. The partition membrane can be easily replaced by forming the first frame from a permanent magnet and the second frame from a material that is attracted to the permanent magnet. However, the partition membrane is merely sandwiched between the magnets and is not fixed in place. Therefore, measurements cannot be performed in an environment where there is a pressure difference between the sample chamber and the irradiation chamber. Furthermore, when the partition membrane is sandwiched between the first and second frames, it may bend or wrinkle.

[0006] The X-ray fluorescence analyzer of Patent Document 3 does not assume that the X-ray tube is placed in a vacuum environment and the sample is placed in an atmospheric pressure environment, and therefore, measurement cannot be performed in an environment where there is a pressure difference between the area where the sample is placed and the area where the X-ray tube is placed.

[0007] The present disclosure has been made in view of the above-mentioned problems, and its object is to provide a fluorescent X-ray analyzer that can perform measurements even when there is a pressure difference in a space separated by a partition film, and that can easily stretch the partition film so that it does not bend or wrinkle.

[0008] (1) An X-ray fluorescence analyzer according to one aspect of the present disclosure is an X-ray fluorescence analyzer having an irradiation chamber in a vacuum environment in which an X-ray source that emits X-rays is disposed, and a sample chamber in an atmospheric pressure environment in which a sample cell is disposed, the X-ray fluorescence analyzer including: a window frame holding member that forms part of a partition wall between the irradiation chamber and the sample chamber and has an opening that allows the X-rays to pass from the irradiation chamber to the sample chamber; and a window frame member that holds a partition wall film that forms another part of the partition wall and is made of a material that transmits the X-rays and is disposed within the opening of the window frame holding member, the window frame holding member having a plurality of through holes that allow the X-rays to pass through, The present invention is characterized in that it comprises an annular inner film holding member, which has a film support member arranged adjacent to the irradiation chamber side of the wall film and supports the partition film from the irradiation chamber side, and the window frame member has a peripheral wall extending from a base end arranged on the sample chamber side to a tip end arranged on the irradiation chamber side, the tip end forming an opening that is closed by a part of the partition film, and an annular outer film holding member that is inserted from the tip of the inner film holding member and attached to the base end of the inner film holding member, thereby fixing the periphery of the part of the partition film to the inner film holding member.

[0009] (2) The inner film holding member has a flange portion at the base end for fixing the positional relationship with the window frame holding member.

[0010] (3) In another aspect of the present disclosure, the fluorescent X-ray analysis apparatus is characterized in that the flange portion includes a first flange portion provided on the tip side and clamping the partition film together with the outer film holding member, and a second flange portion provided on the base end side, having an outer diameter larger than that of the first flange portion, and fixed to the window frame holding member.

[0011] (4) In a fluorescent X-ray analyzer according to another aspect of the present disclosure, the first flange portion and the second flange portion are integrally formed.

[0012] (5) In another aspect of the present disclosure, the X-ray fluorescence analyzer is characterized in that the peripheral wall has a vertical portion extending perpendicularly from the flange portion toward the tip, and a curved portion curved from the vertical portion toward the tip.

[0013] (6) In another aspect of the present disclosure, the X-ray fluorescence analyzer is characterized in that the peripheral wall has a vertical portion extending perpendicularly from the flange portion toward the tip, and an inclined portion inclined from the vertical portion toward the tip.

[0014] (7) In another aspect of the present disclosure, in the fluorescent X-ray analyzer, the peripheral wall has a flat portion at the tip that is parallel to a plane of the opening that is blocked by a portion of the partition film.

[0015] (8) In another aspect of the present disclosure, in the fluorescent X-ray analyzer, the outer film holding member and / or the film support member are formed of resin.

[0016] (9) In a fluorescent X-ray analyzer according to another aspect of the present disclosure, the inner film holding member and / or the window frame holding member are formed of metal.

[0017] (10) Another aspect of the present disclosure is a fluorescent X-ray analysis apparatus, characterized in that the window frame holding member has a first gas inlet hole that penetrates from the outer side surface to the inner side surface facing the window frame member, and the flange portion has a second gas inlet hole that penetrates from the upper surface to the lower surface.

[0018] (11) In another aspect of the X-ray fluorescence analysis apparatus of the present disclosure, the window frame holding member has a gas supply port on the outside of the first gas inlet hole, which supplies gas to be flowed between the sample cell and the partition film via the first gas inlet hole and the second gas inlet hole.

[0019] According to the present disclosure, it is possible to measure even if there is a pressure difference in a space separated by a partition film, and the partition film can be easily stretched so as not to bend or wrinkle.

[0020] FIG. 1 is a diagram showing an outline of an X-ray fluorescence analysis device; FIG. 2 is a diagram showing a bird's-eye view of a sample stage; FIG. 3 is a diagram showing a bird's-eye view of the sample stage; FIG. 4 is a top view, a side view and a bottom view of a window frame holding member; FIG. 5 is a top view, a side view and a bottom view of a film support member; FIG. 6 is a top view, a side view and a bottom view of an inner film holding member; FIG. 7 is a top view, a side view and a bottom view of an outer film holding member; FIG. 8 is a diagram showing a cross-section of the sample stage; FIG. 9 is a diagram showing how a partition film is attached to a window frame member; and FIG. 10 is a diagram showing a cross-section of a window frame member according to a modified example.

[0021] Preferred embodiments (hereinafter referred to as "embodiments") for carrying out the present invention will be described below with reference to the drawings. FIG. 1 is a schematic diagram of an X-ray fluorescence analyzer 100. As shown in FIG. 1, the X-ray fluorescence analyzer 100 has a sample chamber 102 under atmospheric pressure and an irradiation chamber 106 under vacuum. The sample chamber 102 and the irradiation chamber 106 are separated by a partition wall including a partition wall 108 to prevent gas from moving between them. The partition wall 108 has an opening that allows X-rays to pass from the irradiation chamber 106 to the sample chamber 102.

[0022] The irradiation chamber 106 is equipped with an X-ray source 110 that emits X-rays, a spectroscopic element 111 that disperses fluorescent X-rays, a detector 112 that detects the fluorescent X-rays, and other components. The X-ray source 110 irradiates the sample cell 116 with X-rays through the opening. Fluorescent X-rays are emitted from the sample irradiated with X-rays. The spectroscopic element 111 disperses the fluorescent X-rays of a predetermined wavelength emitted from the sample. The detector 112 is disposed at a position where the fluorescent X-rays dispersed by the spectroscopic element 111 are incident. The detector 112 is, for example, a proportional counter. The detector 112 measures the fluorescent X-rays and outputs a pulse signal. A counter (not shown) counts the pulse signal output from the detector 112 to obtain the intensity of the fluorescent X-rays. The sample is analyzed based on the intensity of the fluorescent X-rays.

[0023] Note that a spectroscopic element 111 and a detector 112 may be provided for each element to be analyzed, or a configuration in which a pair of spectroscopic element 111 and detector 112 rotates and moves may be used. When a pair of spectroscopic element 111 and detector 112 is rotated and moved, a mechanism (goniometer) for rotating and moving the spectroscopic element 111 and detector 112 is disposed in the irradiation chamber 106. The present disclosure is particularly effective when analyzing light elements in a wavelength-dispersive X-ray fluorescence analyzer 100 in which the distance from the sample to the detector 112 is long, as shown in FIG. 1 , but the X-ray fluorescence analyzer 100 may also be an energy-dispersive device that does not have a spectroscopic element 111.

[0024] The sample chamber 102 is provided with a sample stage 104, and a sample cell 116 is placed on the sample stage 104. The interior of the sample chamber 102 may be filled with helium or air. According to the present disclosure, measurements can be performed whether the sample is in a helium environment or an air environment. The following describes a case in which the sample is placed in an air environment, which does not require the procurement of helium gas and allows for low-cost measurements. The sample may be either a liquid or a solid (including powder), but the following describes a case in which the sample is a liquid. The liquid sample is placed in the sample cell 116. The sample cell 116 is cylindrical, and a sample-holding film is attached to cover the bottom. The liquid sample is placed on the sample-holding film. The top surface of the sample cell 116 is sealed with another film to prevent the sample from spilling. The sample stage 104 includes a window frame member 300, a window frame holding member 400, and a cover member 118. The specific configuration of the sample stage 104 will be described with reference to FIGS.

[0025] 2 and 3 are overhead views of the sample stage 104 (excluding the cover member 118) and the partition wall 108 between the sample chamber 102 and the irradiation chamber 106. FIG. 2 shows the state in which the window frame holding member 400 and the window frame member 300 are placed on the partition wall 108, and FIG. 3 shows the state in which the window frame member 300 and the film support member 500 have been removed. FIGS. 4 to 7 show top views (upper side), side views (center), and bottom views (lower side) of each component. FIG. 8 shows a cross section of the sample stage 104 and the partition wall 108 with the sample cell 116 placed therein.

[0026] The window frame holding member 400 forms part of the partition wall between the irradiation chamber 106 and the sample chamber 102, and has an opening that allows X-rays to pass from the irradiation chamber 106 to the sample chamber 102. Specifically, the window frame holding member 400, together with the partition wall 108, forms part of the partition wall that separates the sample chamber 102 from the irradiation chamber 106. The window frame holding member 400 has an upper holding member 402 and a lower holding member 404 shown in FIG. 4, and a film support member 500 shown in FIG. 5. The upper holding member 402 and the lower holding member 404 have openings that allow X-rays to pass from the irradiation chamber 106 to the sample chamber 102. Note that if the opening of the partition wall 108 is closed only by the film support member 500 and the partition film 800, the window frame holding member 400 does not need to form part of the partition wall.

[0027] The lower holding member 404 is a member disposed on and in contact with the partition wall 108. When viewed from the top and bottom, the lower holding member 404 has a substantially circular outer edge and a circular opening at a position corresponding to the opening in the partition wall 108. The lower holding member 404 is formed so that its outer periphery is thickest and its inner side is thinner in cross-sectional view. For example, when the window frame member 300 is disposed, the lower holding member 404 has a step (first step) at the position of the outer edge of the window frame member 300 (a position corresponding to the peripheral wall 606 of the inner film holding member 600, described later). The lower holding member 404 has an O-ring at the position of the step that contacts the curved portion 610 of the inner film holding member 600. This allows the irradiation chamber 106 to be maintained at a vacuum while the sample chamber 102 is in an atmosphere or gas-substituted state (e.g., filled with helium gas). Furthermore, the lower holding member 404 has a step (second step) inside the step (first step). When the film support member 500 is placed, the outer edge of the film support member 500 is located at the step (second step).

[0028] The upper holding member 402 is a member that is placed on top of and in contact with the lower holding member 404. When viewed from the top and bottom, the upper holding member 402 has a substantially circular outer edge and a circular opening with a larger diameter that is centered at the same position as the opening provided in the lower holding member 404. The upper holding member 402 has an O-ring at a position where it comes into contact with the lower holding member 404.

[0029] The upper holding member 402 also has a first gas inlet 408 that penetrates from the outer side surface to the inner side surface facing the window frame member 300. The upper holding member 402 has a gas supply port 406 that supplies gas to be flowed between the sample cell 116 and the partition film 800 via the first gas inlet 408 and a second gas inlet 614 (described later). A hose or the like that serves as a gas flow path is attached to the gas supply port 406, and gas supplied from an external gas supply device flows from the outer side surface to the inner side surface.

[0030] The upper holding member 402 and the lower holding member 404 are preferably made of metal. Metal materials are less susceptible to deterioration by X-rays than resin materials, and can be used repeatedly. Alternatively, the upper holding member 402 and the lower holding member 404 may be integrally formed.

[0031] The film support member 500 has a plurality of through-holes 502 that allow X-rays to pass through. The film support member 500 is disposed adjacent to the partition film 800 on the irradiation chamber 106 side, supporting the partition film 800 from the irradiation chamber 106 side. Specifically, as shown in FIG. 5 , the film support member 500 has a substantially circular outer edge when viewed from the top and bottom. The film support member 500 is formed so that the film support member 500 is thin near the periphery and thicker on the inside than near the periphery. The thicker portion of the film support member 500 has a shape that corresponds to the shape of the opening of the lower holding member 404. The film support member 500 is disposed on the lower holding member 404 so that the thicker portion is positioned in the opening of the lower holding member 404. In this case, the outer edge of the film support member 500 is positioned at the location of a step (second step) provided in the lower holding member 404. The plurality of through-holes 502 that allow X-rays to pass through are provided in the thicker portion of the film support member 500.

[0032] In this embodiment, the film support member 500 has five through holes 502. Each through hole 502 is elongated. Each through hole 502 has the same width but is formed so that it is longer toward the center. However, the shape of the through holes 502 is not limited to the shape shown in FIG. 5 . For example, the multiple through holes 502 may be hexagonal and arranged to form a honeycomb structure. Furthermore, the film support member 500 is preferably formed from a thermoplastic resin such as polyether ether ketone, which is less susceptible to degradation by X-rays. According to the present disclosure, the partition film 800 is supported by the portions between adjacent through holes 502. This prevents the partition film 800 from being damaged due to the pressure difference between the sample chamber 102 and the irradiation chamber 106.

[0033] The window frame member 300 holds a partition film 800 made of a material that transmits X-rays and that constitutes another part of the partition, and is placed within the opening of the window frame holding member 400. Specifically, the window frame member 300 has an inner film holding member 600 shown in Fig. 6 and an outer film holding member 700 shown in Fig. 7. The window frame member 300 is placed within the opening of the window frame holding member 400 with the partition film 800 sandwiched between the inner film holding member 600 and the outer film holding member 700. The partition film 800 in the opening constitutes part of the partition.

[0034] The inner film holding member 600 has an annular shape and includes a flange portion at a base end located on the sample chamber 102 side, and a peripheral wall 606 extending from the base end toward a tip end located on the irradiation chamber 106 side. Specifically, the flange portion is provided at the base end, has a circular outer edge, and has a circular opening on the inside. The flange portion includes a first flange portion 602 on the tip side and a second flange portion 604 on the base end side. The peripheral wall 606 extends from the first flange portion 602 toward the tip, and the first flange portion 602 and the peripheral wall 606, together with the outer film holding member 700, sandwich the partition film 800.

[0035] The second flange portion 604 has a larger outer diameter than the first flange portion 602 and is fixed to the window frame holding member 400. The second flange portion 604 is provided with screw holes 616 and is fixed to the upper holding member 402 by screws 200 inserted into the screw holes 616. The window frame member 300 is placed on the window frame holding member 400 so that the outer edge of the peripheral wall 606 is positioned at a step (first step) of the lower holding member 404. In this embodiment, the first flange portion 602 and the second flange portion 604 are formed integrally, but the first flange portion 602 and the second flange portion 604 may also be formed separably. The flange portion also has a second gas inlet hole 614 that penetrates from the upper surface on the base end side to the lower surface on the tip end side.

[0036] The peripheral wall 606 extends from the first flange portion 602 toward the tip, and the tip forms an opening that is closed by a part of the partition film 800. Specifically, the peripheral wall 606 has a vertical portion 608 that extends perpendicularly from the flange portion toward the tip, a curved portion 610 that curves from the vertical portion 608 toward the inside of the tip, and a flat portion 612 that is parallel to the plane of the opening at the tip. The peripheral wall 606 and the first flange portion 602 are integrally formed from metal. Note that the peripheral wall 606 may have the vertical portion 608 and the curved portion 610, but may not have the flat portion 612.

[0037] The outer film holding member 700 is an annular member that, together with the inner film holding member 600, holds the partition film 800. Specifically, the outer film holding member 700 is an annular member that is inserted from the tip of the inner film holding member 600. The inner diameter of the outer film holding member 700 corresponds to the outer diameter of the peripheral wall 606. By attaching the outer film holding member 700 to the base end of the inner film holding member 600, the periphery of a portion of the partition film 800 (the portion that closes the opening of the peripheral wall 606) is fixed to the inner film holding member 600. In FIGS. 7 and 8 , the outer diameter of the base end of the outer film holding member 700 is larger than the outer diameter of the tip end, but the outer film holding member 700 may have any shape as long as it can, together with the inner film holding member 600, hold the partition film 800. Furthermore, the outer film holding member 700 is preferably formed from a thermoplastic resin, such as polyether ether ketone, that is less susceptible to deterioration by X-rays, so that it can be easily attached to the peripheral wall 606.

[0038] The lid member 118 seals the space in which the sample cell 116 is placed. Specifically, as shown in Fig. 8 , the lid member 118 has a shape that covers the space in which the sample cell 116 is placed, and is placed in contact with the upper holding member 402 of the window frame holding member 400. The lid member 118 has an O-ring at a position where it contacts the upper holding member 402, and separates the inside and outside of the lid member 118 so that gas does not move between them except for the paths of the first gas inlet hole 408 and the second gas inlet hole 614.

[0039] According to the present disclosure, a partition film 800 that needs to be replaced periodically can be easily attached to a window frame member 300 without warping or wrinkling. FIG. 9 is a diagram illustrating how the partition film 800 is attached to a window frame member 300. First, the inner film holding member 600 is placed on a flat surface with its base end facing downward (its tip facing upward). The partition film 800, which is sufficiently larger than the opening, is positioned so as to cover the opening at its tip. In this state, the outer film holding member 700 is fitted to the peripheral wall 606 from its tip to its base end. At this time, a pulling force acts on the partition film 800 in the direction of the arrow in FIG. 9 . Therefore, the partition film 800 can be easily tensioned without warping or wrinkling. Furthermore, because the peripheral wall 606 has a curved portion 610 and a flat portion 612, the force applied to the tensioned partition film 800 can be dispersed. Therefore, since force is not applied to one point on the partition film 800, the possibility of the partition film 800 being torn when being pinched can be reduced.

[0040] Furthermore, according to the present disclosure, sample replacement and gas replacement in the sample chamber 102 can be performed while the irradiation chamber 106 is maintained at a vacuum. Specifically, the lower holding member 404 has an O-ring at the position where the step (first step) is provided. When the window frame member 300 is placed on the lower holding member 404, the O-ring contacts both the curved portion 610 of the inner film holding member 600 and the lower holding member 404. This allows for an airtight seal between the window frame member 300 and the window frame holding member 400. Furthermore, the opening of the window frame holding member 400 is closed by the partition film 800 held by the window frame member 300. Therefore, even when the sample cell 116 is removed (see FIG. 2 ), the sample chamber 102 and the irradiation chamber 106 are isolated from each other. Therefore, sample replacement and gas replacement in the sample chamber 102 can be performed while the irradiation chamber 106 is maintained at a vacuum. Furthermore, the sample can be easily replaced without using tools by simply opening the cover member 118 and replacing the sample cell 116 .

[0041] Furthermore, although the film support member 500 is made of a material that is less susceptible to deterioration by X-rays, it is desirable to replace it periodically. According to the present disclosure, the film support member 500 is disposed on the window frame holding member 400 and is not secured by screws or the like. Therefore, the film support member 500 can be easily replaced by simply placing the window frame member 300, to which the partition wall film 800 has been attached, in the opening of the window frame holding member 400 as described above. Furthermore, according to the present disclosure, the second flange portion 604 is provided with a screw hole 616, and the window frame member 300 is secured to the upper holding member 402 by a screw 200 inserted into the screw hole 616. The screw fastening operation can be performed from above, which is easier to access, so the user can easily secure the window frame member 300 to the upper holding member 402.

[0042] Furthermore, according to the present disclosure, deterioration of the partition film 800 due to ozone generated during measurement can be prevented. Specifically, as shown in FIGS. 1 and 8 , the sample holding film covering the bottom surface of the sample cell 116 and the partition film 800 are disposed close to each other, but there is a gap between them. Therefore, when the sample chamber 102 is filled with air, air exists between the sample holding film and the partition film 800. Also, as shown in FIG. 1 , X-rays are irradiated onto the partition film 800 during measurement. Because air contains oxygen, exposure of this oxygen to X-rays generates ozone, which accelerates deterioration of the partition film 800. In the present disclosure, gas is supplied to the gas supply port 406 from an external gas supply device. The supplied gas is preferably nitrogen, but air may also be used. The dashed arrows in FIG. 8 indicate the path along which the supplied gas flows. The gas supplied from the gas supply port 406 passes through the first gas inlet 408 and reaches the space between the window frame member 300 and the window frame holding member 400 (the space near the outer film holding member 700 in FIG. 8 ). This space exists in a ring shape along the outer film holding member 700. Furthermore, because this space is connected to the second gas inlet 614, the supplied gas passes through the second gas inlet 614 and reaches the space between the sample cell 116 and the cover member 118. Furthermore, a portion of the supplied gas passes between the sample cell 116 and the inner film holding member 600 and reaches the gap between the sample holding film and the partition film 800. Note that the spaces between the sample cell 116 and the inner film holding member 600 and between the sample holding film and the partition film 800 are actually very small, but are exaggerated in FIG. 8 for ease of understanding. If ozone is generated between the sample holding film and the partition film 800, the ozone is discharged together with the supplied gas into the space between the sample cell 116 and the lid member 118. The ozone is then discharged from the gas supply port 406 on the opposite side to the gas supply port 406 to which gas is supplied from the gas supply device. As described above, by supplying gas from the gas supply port 406, ozone does not remain between the sample holding film and the partition film 800, and therefore deterioration of the partition film 800 due to ozone generated during measurement can be prevented.

[0043] The present invention is not limited to the above-described embodiment and various modifications are possible. The configuration of the X-ray fluorescence analyzer 100 described above is an example and is not limited to this. The configuration described in the above-described embodiment may be replaced with a configuration that is substantially the same as the configuration shown in the above embodiment, that provides the same effects, or that achieves the same purpose. For example, although the outer edges of the window frame member 300 and the window frame holding member 400 are described as being circular, they may be polygonal or have other shapes.

[0044] 10 is a cross-sectional view of a window frame member 300 according to a modified example. In the inner film holding member 600 according to the modified example, the first flange portion 602 and the peripheral wall 606 are integrally formed, but the first flange portion 602 and the second flange portion 604 are separable. In this modified example, the peripheral wall 606 has an inclined portion 1002 that slopes inward from the vertical portion 608 to the tip, instead of the curved portion 610. Even with this shape, the partition film 800 can be easily attached to the window frame member 300. As with the above, the flat portion 612 may be omitted in the modified example.

[0045] The second flange portion 604 also has a second peripheral wall 1004 that extends perpendicularly toward the tip. As shown in Figure 10, the partition film 800 is sandwiched not only between the outer film holding member 700 and the first flange portion 602, but also between the second peripheral wall 1004 and the outer film holding member 700. That is, the partition film 800 is folded twice in cross-sectional view and fixed. Therefore, in this modified example, the partition film 800 can be fixed more firmly.

[0046] 100 X-ray fluorescence analyzer, 102 sample chamber, 104 sample stage, 106 irradiation chamber, 108 partition wall, 110 X-ray source, 111 spectroscopic element, 112 detector, 116 sample cell, 118 cover member, 200 screw, 300 window frame member, 400 window frame holding member, 402 upper holding member, 404 lower holding member, 406 gas supply port, 408 first gas inlet hole, 500 film support member, 502 through hole, 600 inner film holding member, 602 first flange portion, 604 second flange portion, 606 peripheral wall, 608 vertical portion, 610 curved portion, 612 flat portion, 614 second gas inlet hole, 616 screw hole 700 outer film holding member, 800 partition film, 1002 inclined portion, 1004 Second surrounding wall.

Claims

1. An X-ray fluorescence analysis apparatus having an irradiation chamber in a vacuum environment in which an X-ray source that emits X-rays is disposed, and a sample chamber in an atmospheric pressure environment in which a sample cell is disposed, comprising: a window frame holding member that constitutes a part of a partition between the irradiation chamber and the sample chamber and has an opening that allows the X-rays to pass from the irradiation chamber to the sample chamber; and a window frame member that holds a partition film that constitutes another part of the partition and is formed from a material that transmits the X-rays and is disposed within the opening of the window frame holding member, wherein the window frame holding member has a plurality of through holes that allow the X-rays to pass through, and a film support member that is disposed adjacent to the irradiation chamber side of the partition film and supports the partition film from the irradiation chamber side, and the window frame member has: an annular inner film holding member that has a peripheral wall extending from a base end that is disposed on the sample chamber side to a tip that is disposed on the irradiation chamber side, and the tip forms an opening that is blocked by a part of the partition film; and an annular outer film holding member that is inserted from the tip of the inner film holding member and attached to the base end of the inner film holding member, thereby fixing the periphery of the portion of the partition film to the inner film holding member.

2. The fluorescent X-ray analysis apparatus according to claim 1, wherein the inner film holding member has a flange portion at the base end for fixing the positional relationship with the window frame holding member.

3. The fluorescent X-ray analysis apparatus described in claim 2, characterized in that the flange portion has: a first flange portion provided on the tip side and clamping the partition film together with the outer film holding member; and a second flange portion provided on the base end side, having an outer diameter larger than that of the first flange portion, and fixed to the window frame holding member.

4. The fluorescent X-ray analysis apparatus according to claim 3, wherein the first flange portion and the second flange portion are integrally formed.

5. The fluorescent X-ray analysis apparatus according to claim 2, characterized in that the peripheral wall has a vertical portion extending perpendicularly from the flange portion toward the tip, and a curved portion curved from the vertical portion to the tip.

6. The fluorescent X-ray analysis apparatus according to claim 2, characterized in that the peripheral wall has a vertical portion extending perpendicularly from the flange portion toward the tip, and an inclined portion inclined from the vertical portion toward the tip.

7. The fluorescent X-ray analysis apparatus according to claim 1, wherein the peripheral wall has a flat portion at the tip which is parallel to the plane of the opening which is closed by a part of the partition film.

8. The fluorescent X-ray analysis apparatus according to claim 1, wherein the outer film holding member and / or the film support member is made of resin.

9. The fluorescent X-ray analysis apparatus according to claim 1, wherein the inner film holding member and / or the window frame holding member are made of metal.

10. The fluorescent X-ray analysis apparatus according to claim 2, characterized in that the window frame holding member has a first gas inlet hole that penetrates from the outer side surface to the inner side surface facing the window frame member, and the flange portion has a second gas inlet hole that penetrates from the upper surface to the lower surface.

11. The fluorescent X-ray analysis apparatus described in claim 10, characterized in that the window frame holding member has a gas supply port on the outside of the first gas inlet hole, which supplies gas to be flowed between the sample cell and the partition film via the first gas inlet hole and the second gas inlet hole.

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