Fluid introduction device

Abstract

A fluid introduction device according to an aspect of the present invention is capable of physically closing one end of a drain tube by using a valve during analysis by an analysis device. The fluid introduction device includes: a drain tube connected to a spray chamber so as to discharge droplets in an aerosol generated from a sample fluid in the spray chamber, the droplets having a predetermined size or larger; a pump which is always operated in an ON state; and a valve which is connected to one end of the drain tube, closes the one end of the drain tube in a first mode to allow the droplets to stay in the drain tube or the spray chamber, and connects the drain tube to the pump in a second mode to allow the droplets to be discharged to the outside by suction of the pump.

Description

Fluid introduction device

[0001] The present invention relates to contaminant analysis, and more particularly, to a device for discharging fluid during contaminant analysis.

[0002] As the need for high integration and high performance in semiconductor devices increases, various analysis technologies are being utilized to solve problems that arise in each process. For example, to analyze contaminants on the wafer surface, the wafer surface is scanned to capture a sample, and the contaminants within the sample are analyzed using technologies such as atomic absorption spectroscopy, inductively coupled plasma mass spectrometry (ICP-Mass Spectroscopy), and total X-ray fluorescence analysis.

[0003] A device (hereinafter referred to as a "sample introduction device") is used to introduce the captured sample into the analysis device. The sample introduction device supplies droplets of the captured sample smaller than a certain size to the analysis device and discharges droplets larger than a certain size to the outside. At this time, a peristaltic pump (10) as illustrated in Fig. 1 is used to discharge droplets larger than a certain size to the outside.

[0004] Since the peristaltic pump (10) illustrated in FIG. 1 is structured such that liquid droplets inside the drain tube (20) are discharged to the outside as the drain tube (20) is pressed by the roller (30) attached to the header of the peristaltic pump (10), the drain tube (20) is continuously pressed by the roller (30), which inevitably causes damage to the drain tube (10), and thus, there is a problem in that the drain tube (10) must be replaced periodically.

[0005] In addition, since the life of the drain tube (20) may vary depending on the setting method of the peristaltic pump (10), there is a limit to predicting the life of the drain tube (20) and replacing the drain tube (20) in advance, and since the equipment for obtaining the sample must also be stopped in order to replace the drain tube (20), there is also a problem that the equipment operation rate is lowered.

[0006] In addition, if the sample introduction device is operated for a long time without replacing the drain tube (20), the sample may leak due to damage to the drain tube (20), which may cause an environmental safety risk.

[0007] In addition, since the peristaltic pump (10) is designed to be linked to the analysis device, if the analysis device stops unexpectedly, the peristaltic pump (10) also stops, so the sample cannot be discharged to the outside, and the sample accumulates in the sample introduction device. After a long period of time, the sample overflows into the analysis device, which may cause the analysis device to shut down.

[0008] The present invention is intended to solve the above-described problems, and its technical task is to provide a fluid introduction device that can be maintained without separating a drain tube.

[0009] In addition, another technical task of the present invention is to provide a fluid introduction device that can physically close one end of a drain tube using a valve during analysis of an analysis device.

[0010] In addition, another technical task of the present invention is to provide a fluid introduction device capable of discharging fluid within a spray chamber regardless of whether the analysis device is in operation.

[0011] In addition, another technical problem of the present invention is to provide a fluid introduction device capable of increasing the time that a fluid remains in a drain tube.

[0012] In addition, another technical task of the present invention is to provide a fluid introduction device that can prevent fluid in a spray chamber from overflowing into the analysis device even when the power of the analysis device is turned off.

[0013] According to one aspect of the present invention for achieving the above-described technical problem, a fluid introduction device comprises: a drain tube connected to a spray chamber for discharging droplets having a predetermined size or larger among aerosols generated from a sample fluid within the spray chamber; a pump that is always operated in an on state; and a valve connected to one end of the drain tube, which closes one end of the drain tube in a first mode to allow the droplets to remain in the drain tube or the spray chamber, and connects the drain tube and the pump in a second mode to allow the droplets to be discharged to the outside by suction of the pump.

[0014] In one embodiment, the valve is a 3-way valve having a first port connected to the atmosphere, a second port connected to the drain tube, and a third port connected to the pump, and the valve is characterized in that, in the first mode, the first port and the third port are opened and the second port is closed so that the droplets remain in the drain tube or the spray chamber, and in the second mode, the second port and the third port are opened and the first port is closed so that the droplets are discharged to the outside by suction of the pump.

[0015] At this time, the first mode is a mode when the analysis device that analyzes the contaminants contained in the sample fluid is performing analysis, and the second mode is a mode when the analysis device is not performing analysis.

[0016] According to the present invention, when maintenance of a fluid drain device is required, the housing can be moved to an area for maintenance using a sliding module without detaching the drain tube, thereby increasing work convenience.

[0017] In addition, according to the present invention, by implementing the valve as a 3-way valve, the drain tube is physically blocked by the valve by closing the port connected to the drain tube among the ports of the valve during operation of the analysis device, thereby enabling the analysis device to be operated even before the first droplet is generated, thereby increasing the analysis efficiency.

[0018] In addition, according to the present invention, since the life of the drain tube is extended, the replacement cycle of the drain tube is increased, and accordingly, even when the fluid introduction device is operated for a long time without replacing the drain tube, fluid leakage can be prevented, thereby preventing environmental safety hazards in advance.

[0019] In addition, according to the present invention, the drain tube replacement cycle can be extended, thereby preventing a decrease in equipment operating rate caused by frequent drain tube replacement.

[0020] In addition, according to the present invention, by forming the drain tube by winding it in a spiral shape, there is an effect that the time for which the fluid remains in the drain tube can be increased.

[0021] In addition, according to the present invention, even when the power of the contaminant analysis system is turned off, the fluid can be normally discharged to the outside through the selective opening and closing operation of the ports constituting the valve, thereby preventing the fluid in the spray chamber from overflowing into the analysis device and shutting down the analysis device.

[0022] Figure 1 is a drawing showing a method of discharging a sample to the outside using a peristaltic pump.

[0023] FIG. 2 is a block diagram schematically showing the configuration of a contaminant analysis system according to one embodiment of the present invention.

[0024] Figure 3 is a drawing exemplarily showing the configuration of the aerosol device illustrated in Figure 2.

[0025] FIG. 4 is a drawing exemplarily showing the configuration of a drain module according to one embodiment of the present invention.

[0026] Figure 5 is a drawing showing the flow of sample fluid when the analysis device is performing analysis according to the first mode.

[0027] Figure 6 is a drawing showing the flow of sample fluid when the analysis device has finished analysis according to the second mode.

[0028] Figures 7a to 7d are perspective views showing examples of implementation of a fluid drain device according to the present invention.

[0029] Figures 8a to 8c are drawings specifically showing the configuration of a tube fixing tower.

[0030] Figure 9 is a drawing specifically showing the configuration of the sliding module.

[0031] Figure 10 is a drawing showing when the fluid drain device is located in the first region.

[0032] Figure 11 is a drawing showing when the fluid drain device is located in the second region.

[0033] Fig. 12 is a drawing specifically showing the configuration of a second stopper according to one embodiment of the present invention.

[0034] FIGS. 13a and 13b are drawings showing the configuration of a tube fixing guide according to one embodiment of the present invention.

[0035] Figure 14 is a graph showing pressure changes during droplet discharge.

[0036] Figure 15 is a diagram showing pressure changes during droplet discharge in a steady state.

[0037] Figure 16 is a drawing showing pressure changes during droplet discharge in an ideal state.

[0038] Throughout the specification, identical reference numbers refer to substantially identical components. In the following description, detailed descriptions of components and functions not related to the core components of the present invention and those known in the art may be omitted. The meanings of terms used in this specification should be understood as follows.

[0039] The advantages and features of the present invention, and the methods for achieving them, will become clearer with reference to the embodiments described in detail below together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms. These embodiments are provided solely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined solely by the scope of the claims.

[0040] The shapes, sizes, ratios, angles, numbers, etc. disclosed in the drawings for explaining embodiments of the present invention are illustrative and are not limited to the details depicted. Like reference numerals designate like elements throughout the specification. Furthermore, in describing the present invention, detailed descriptions of related known technologies will be omitted if they are deemed to unnecessarily obscure the gist of the present invention.

[0041] In this specification, when the terms "includes," "has," and "consists of," are used, other parts may be added, unless "only" is used. When a component is expressed in the singular, it includes the plural unless otherwise explicitly stated.

[0042] When interpreting a component, it is interpreted as including the error range even if there is no separate explicit description.

[0043] When describing a positional relationship, for example, when the positional relationship between two parts is described as 'on top of', 'upper part of', 'lower part of', 'next to', etc., one or more other parts may be located between the two parts, unless 'right away' or 'directly' is used.

[0044] When describing a temporal relationship, for example, when the temporal continuity is described as 'after', 'following', 'next to', 'before', etc., it can also include cases where it is not continuous, as long as 'right away' or 'directly' is not used.

[0045] While terms like "first" and "second" are used to describe various components, these components are not limited by these terms. These terms are used merely to distinguish one component from another. Therefore, a "first" component referred to below may also be a "second" component within the technical scope of the present invention.

[0046] The term "at least one" should be understood to include all possible combinations of one or more associated items. For example, "at least one of the first, second, and third items" can mean any combination of items that can be represented by two or more of the first, second, and third items, as well as each of the first, second, and third items.

[0047] The features of each of the various embodiments of the present invention can be partially or wholly combined or combined with each other, and various technical connections and operations are possible, and each embodiment can be implemented independently of each other or implemented together in a related relationship.

[0048]

[0049] Hereinafter, embodiments of the present specification will be described in detail with reference to the attached drawings.

[0050] FIG. 2 is a block diagram schematically showing the configuration of a contaminant analysis system according to one embodiment of the present invention.

[0051] As illustrated in FIG. 2, a contaminant analysis system (200) according to one embodiment of the present invention includes a sample fluid acquisition device (210), a fluid introduction device (220), and an analysis device (230). In addition, the contaminant analysis system (200) according to the present invention may additionally include a scrubber (240).

[0052] The sample fluid acquisition device (210) acquires a sample fluid for contaminant analysis. In one embodiment, the sample fluid acquisition device (210) may acquire the sample fluid during the progress of a process for semiconductor manufacturing. For example, the sample fluid acquisition device (210) may acquire the sample fluid by scanning a wafer surface. In another example, the sample fluid acquisition device (210) may acquire the sample fluid from chemicals used in the semiconductor process.

[0053] The fluid introduction device (220) supplies the sample fluid obtained by the sample fluid acquisition device (210) to the analysis device (230). In one embodiment, the fluid introduction device (220) includes an aerosol device (222) and a fluid drain device (223).

[0054] The aerosol device (222) generates an aerosol from a sample fluid supplied from the sample fluid acquisition device (210). The configuration of the aerosol device (222) is described in more detail with additional reference to FIG. 3.

[0055] FIG. 3 is a drawing exemplarily showing the configuration of the aerosol device illustrated in FIG. 2. As illustrated in FIGS. 2 and 3, the aerosol device (222) may include an aerosol nozzle (310) and a spray chamber (320). In addition, as illustrated in FIG. 3, the aerosol device (222) additionally includes a carrier gas introduction unit (330) and a sample fluid introduction unit (340). In addition, the aerosol device (222) according to the present invention may additionally include a makeup gas introduction unit (350), as illustrated in FIG. 3.

[0056] The aerosol nozzle (310) generates an aerosol from the introduced sample fluid when the sample fluid supplied from the sample fluid acquisition device (210) is introduced through a carrier gas. Specifically, when the carrier gas is injected into the aerosol nozzle (310) through the carrier gas introduction unit (330), the sample fluid is sucked into the aerosol nozzle (310) by the negative pressure generated at the tip of the aerosol nozzle (310). The aerosol nozzle (310) generates an aerosol from the sucked sample fluid and sprays it into the spray chamber (320).

[0057] The spray chamber (320) accommodates an aerosol nozzle (310) therein so that an aerosol generated by the aerosol nozzle (310) can be sprayed therein. The spray chamber (320) is formed with a first port (320a) for supplying first droplets (L1) smaller than a first size from the aerosol to an analysis device (230) and a second port (320b) for discharging second droplets (L2) larger than the first size through a fluid drain device (223).

[0058] In one embodiment, the spray chamber (320) may have a cylindrical wall installed therein so that airflow can be formed in reverse directions inside and outside the chamber. Accordingly, relatively small droplets in the aerosol, for example, first droplets (L1), are moved to the analysis device (230) through the first port (320a). In addition, relatively large droplets in the aerosol, for example, second droplets (L2), collide with the inner wall surface of the spray chamber (320) and are then aggregated and discharged to the fluid drain device (223) through the second port (320b).

[0059] The carrier gas introduction unit (330) supplies a carrier gas for sucking the sample fluid to the aerosol nozzle (310). In one embodiment, the carrier gas introduction unit (330) may supply an inert gas as the carrier gas to the aerosol nozzle (310). As an example, argon (Ar) gas may be used as the inert gas.

[0060] The sample fluid introduction unit (340) is connected to the sample fluid acquisition device (210) and supplies the sample fluid provided from the sample fluid acquisition device (210) to the aerosol nozzle (310). In one embodiment, the sample fluid supplied by the sample fluid introduction unit (340) may be supplied to the aerosol nozzle (310) through a carrier gas introduced by the carrier gas introduction unit (330). However, if necessary, the sample fluid introduction unit (340) may additionally use a pumping means (not shown) for introducing the sample fluid to supply the sample fluid to the aerosol nozzle (310).

[0061] The makeup gas introduction unit (350) supplies makeup gas to the spray chamber (320). The reason why the aerosol device (222) according to the present invention supplies makeup gas to the spray chamber (320) through the makeup gas introduction unit (350) is to form an atmosphere in which no gas other than the carrier gas exists within the spray chamber (320). In one embodiment, the makeup gas may be the same type of gas as the carrier gas. For example, an inert gas such as argon (Ar) may be used as the makeup gas.

[0062] Referring again to FIG. 2, the fluid drain device (223) is for discharging second droplets discharged from the spray chamber (320) and may include a drain tube (224), a drain module (226), and a controller (228).

[0063] The drain tube (224) is connected to the second port (320b) formed in the spray chamber (320) and discharges the sample fluid accumulated in the spray chamber (320) to the outside through the drain module (226). In one embodiment, the drain tube (224) discharges second droplets among the aerosols generated from the sample fluid to the outside through the drain module (226). In addition, the drain tube (224) may discharge deionized water (DIW) accumulated in the spray chamber (320) to the outside through the drain module (226) before the sample fluid is introduced into the spray chamber (320).

[0064] In one embodiment, the drain tube (224) may be formed by being wound in a spiral shape, as illustrated in FIG. 4. The reason for forming the drain tube (224) by being wound in a spiral shape in the present invention is to increase the time that the second droplets or pure water remain within the drain tube (224) by controlling the discharge time of the second droplets or pure water discharged from the spray chamber (320).

[0065] However, if the length of the drain tube (224) is too long and the second droplets or pure water accumulates excessively inside the drain tube (224), suction by the pressure of the pump (440) is limited, and the second droplets or pure water may not be discharged through the drain module (226). Therefore, the length of the drain tube (224) may be determined according to the state of the drain module (226) (e.g., the pumping pressure of the drain module (226), etc.).

[0066] For example, the drain tube (224) may be formed of a silicone material. However, the drain tube (224) according to the present invention is not limited thereto, and may be formed of various types of materials without limitation as long as the material can discharge the sample fluid while maintaining the outer shape of the drain tube (224) when the negative pressure state is established by the pump (440).

[0067] The drain module (226) is connected to the drain tube (224) and discharges the second droplets or pure water flowing from the spray chamber (320) through the drain tube (224) to the scrubber (240). For convenience of explanation, the second droplets or pure water will be referred to as the sample fluid below.

[0068] In one embodiment, the drain module (226) prevents the sample fluid within the spray chamber (320) or the drain tube (224) from being discharged to the outside when operating in the first mode. In addition, the drain module (226) forces the drain tube (224) into a negative pressure state when operating in the second mode, thereby forcibly discharging the sample fluid accumulated in the spray chamber (320) or the sample fluid remaining in the drain tube (224) to the scrubber (240).

[0069] In the above-described embodiment, the first mode refers to a state in which an analysis operation is performed by the analysis device (230) (or a mode in which the analysis is in a standby state), and the second mode refers to a mode in which the analysis is completed by the analysis device (230). In other words, the second mode may refer to a state before the analysis device (230) enters the analysis standby state again after the analysis is completed by the analysis device (230).

[0070] Hereinafter, the configuration of the drain module (226) according to the present invention will be described in more detail with reference to FIG. 4.

[0071] FIG. 4 is a drawing exemplarily showing the configuration of a drain module according to one embodiment of the present invention. As illustrated in FIG. 4, the drain module (226) according to the present invention is connected to a drain tube (224) and discharges the sample fluid discharged through the drain tube (224) to a scrubber (240). To this end, the drain module (226) includes a valve (410), a pump (440), a connecting tube (450), a pressure sensor (510), and an error detection unit (520).

[0072] The valve (410) allows the sample fluid to remain within the drain tube (224) without being discharged outside the drain tube (224) or allows the sample fluid to be discharged outside the drain tube (224) depending on the operating mode of the analysis device (230).

[0073] In one embodiment, the valve (410) may be implemented as a 3-way valve having a first port (410a) connected to the atmosphere, a second port (401b) connected to a drain tube (224), and a third port (420c) connected to a pump (440). At this time, when the valve (410) operates in the first mode, it opens the first port (410a) and the third port (410c) and closes the second port (410b) so that the sample fluid remains in the drain tube (224) or the spray chamber (320). In addition, when the valve (410) operates in the second mode, it opens the second port (410b) and the third port (410c) and closes the first port (410a) so that the sample fluid is discharged to the outside by suction of the pump (440). At this time, an internal flow path connecting the first port (410a) and the third port (410c) inside the valve (410) can be formed through the opening of the first port (410a) and the third port (410c), and an internal flow path connecting the second port (410b) and the third port (410c) can be formed through the opening of the second port (410b) and the third port (410c) inside the valve (410).

[0074] In one embodiment, the valve (410) operates in a first mode in an off state in which no current is applied from the outside, such that the first port (410a) and the third port (410c) are opened and the second port (410b) is maintained in a closed state. In addition, the valve (410) operates in a second mode in an on state in which current is applied from the outside, such that the second port (410b) and the third port (410c) are opened and the first port (410a) is maintained in a closed state.

[0075] As described above, the valve (410) opens the first port (410a) and the third port (410c) in the first mode to connect the pump (440) to the atmosphere, thereby allowing the pump (440) to suck in the atmosphere, and closes the second port (410b) to block the drain tube (224), thereby allowing the sample fluid to remain in the drain tube (224). That is, since the valve (410) closes the second port (410b) in the first mode, the pump (440) is prevented from sucking in the sample fluid remaining in the drain tube (224), so that the sample fluid is not discharged outside the drain tube (224) but remains in the drain tube (224).

[0076] As described above, since the drain tube (224) is kept physically blocked due to the closure of the second port (410b), analysis by the analysis device (230) can be initiated immediately regardless of whether the first droplet to block the drain tube (224) has been generated, and analysis sensitivity and sensitivity reproducibility can be improved even when analysis by the analysis device (230) is being performed.

[0077] Meanwhile, the valve (410) opens the second port (410b) and the third port (410c) in the second mode, thereby allowing the sample fluid to be discharged to the outside by the suction of the pump (440). The pressure change due to the suction of the pump (440) in the second mode is illustrated in FIG. 14. As can be seen in FIG. 14, since the pump (440) is always operating in an on state, it can be seen that all droplets in the drain tube (224) and the spray chamber (320) are discharged whenever the second port (410b) and the third port (410c) are opened in the second mode.

[0078] As described above, in the present invention, by implementing the valve (410) as a 3-way type valve, it is possible to prevent the phenomenon of droplets abnormally flowing back into the valve (410) due to the installation position or height of the valve (410) or a connecting member for connecting the valve (410), and to prevent hunting-like detection caused by reverse contamination of calcium (Ca), potassium (K), etc. due to the reverse flow of droplets. In addition, by implementing the valve (410) as a 3-way type valve, it is possible to prevent the phenomenon of droplets flowing back into the valve (410) when analysis is being performed by the analysis device (410).

[0079] In addition, since the valve (410) is implemented as a 3-way type valve, the discharge of the droplets can be physically blocked by directly installing the valve (410) on the path through which the droplets are discharged, so that even if there is a time deviation in which the first droplet is generated for each fluid introduction device (220), the analysis reproducibility can be consistently secured.

[0080] The opening and closing of the above-described valve (410) can be controlled by the controller (228) illustrated in FIG. 2.

[0081] The pump (440) operates in a constantly on state. That is, the pump (440) always operates in a constantly on state in the first mode and the second mode to perform a pumping operation. The pump (440) according to the present invention operates in a constantly on state, but in the first mode, the valve (410) opens the first port (410a) and the third port (410c), so that the pump (440) is connected to the atmosphere and sucks in outside air.

[0082] In addition, in the second mode, as the valve (410) opens the second port (410b) and the third port (410c), the pump (440) is connected to the drain tube (224) and causes the drain tube (224) to be in a negative pressure state through a pumping operation, thereby sucking up the sample fluid remaining in the drain tube (224) or accumulated in the spray chamber (320). The pump (440) discharges the sucked sample fluid to the scrubber (240). For example, the pump (440) may be implemented as a vacuum pump, and according to this embodiment, the pump (440) may be implemented as a low-vacuum pump. As another example, the pump (440) may be implemented as a diaphragm or a piezoelectric pump.

[0083] The pressure of the above-described pump (440) can be controlled by the controller (228) shown in FIG. 2.

[0084] The connecting tube (450) connects the pump (440) to the third port (410c) of the valve (410). In the above-described embodiment, the pump (440) is described as being connected to the third port (410c) of the valve (410) through one connecting tube (450). However, in a modified embodiment, as shown in the enlarged portion of FIG. 4, the pump (440) may be connected to the third port (410c) of the valve (410) through a first connecting tube (450a), a connecting member (460), and a second connecting tube (450b). The connecting member (460) may be formed in a T shape.

[0085] Specifically, one end of the first connecting tube (450a) is connected to the pump (440), and the other end of the first connecting tube (450a) is connected to the first terminal of the connecting member (460). One end of the second connecting tube (450b) is connected to the second port (410b) of the valve (410), and the other end of the second connecting tube (450b) is connected to the second terminal of the connecting member (460).

[0086] The pressure sensor (510) is connected to the pump (440) via the connecting tube (450) to sense the pressure of the pump (440) and transmit the sensed result value to the error detection unit (520). To this end, the drain module (226) may further include a third connecting tube (450c) for connecting the pressure sensor (510) to the connecting tube (450). One end of the third connecting tube (450c) is connected to the pressure sensor (510), and the other end of the connecting tube (450c) is connected to the third terminal of the connecting member (460).

[0087] The error detection unit (520) determines that the pump (440) is not operating when the pressure detected by the pressure sensor (510) does not change based on a predetermined reference value, and generates an interlock. In addition, the error detection unit (520) determines that the pump (440) or the valve (410) is operating abnormally when the pressure detected by the pressure sensor (510) changes but changes in a range outside the predetermined reference range, and generates an interlock. In one embodiment, the error detection unit (520) may cause an interlock to occur by notifying the fact of an error using a visual alarm signal or an audible alarm signal. When an interlock occurs, the sample fluid supply is stopped, thereby preventing the sample fluid from overflowing into the analysis device (230).

[0088] For example, when there is no problem with the valve (410) and the pump (440), it can be seen that regular, though not periodic, pressure changes occur as shown in FIG. 15, and when the pump (440) is not driven as shown in FIG. 16(a) and FIG. 16(b), no pressure change occurs for liquid droplet discharge regardless of the on / off state of the valve (410), so the error detection unit (520) generates an interlock.

[0089] In the above-described embodiment, it was described that the occurrence of an error is determined using a pressure sensor (510), but in another embodiment, the current of the pump (440) is measured using a multimeter, and if the measured current is a predetermined value (e.g., 0-1 mA), the error detection unit (520) can generate an interlock.

[0090] The controller (228) controls the operation of the drain module (226) according to a predetermined control sequence. Specifically, the controller (228) controls the on / off of the valve (410) according to a predetermined control sequence. In addition, the controller (228) regulates the pressure or operating speed (Hz) of the pump (440). In one embodiment, the controller (228) may be implemented as software that can automatically execute a predetermined control sequence. In addition, the controller (228) may control the overall operation of the drain module (226).

[0091] In the above-described embodiment, the controller (228) is described as controlling the pressure or operating speed of the pump (440), but in other embodiments, the pressure or operating speed of the pump (44) may be controlled by a separate pump controller.

[0092] In addition, in the above-described embodiment, the error detection unit (520) is described as being a separate configuration from the controller (228), but this is only an example, and the error detection unit (520) may not be configured separately, and the controller (228) may perform the function of the error detection unit (520).

[0093] As described above, according to the present invention, rather than discharging fluid to the outside by pressing the drain tube by a roller included in a conventional peristaltic pump, the drain module (226) selectively blocks the internal flow path through which the sample fluid is discharged through the valve (410), so that the physical force applied to the drain tube (224) for discharging the sample fluid to the outside can be eliminated, thereby preventing damage to the drain tube (224).

[0094] In addition, since damage to the drain tube (224) is prevented, the life of the drain tube (224) can be extended, and thus the replacement cycle of the drain tube (224) can be lengthened, so that equipment downtime due to frequent replacement of the drain tube (224) can be reduced, thereby preventing a decrease in equipment operating rate.

[0095] In addition, since the on / off of the drain module (226) according to the present invention is not linked to the on / off of the analysis device (230), even if the analysis device (230) is forcibly shut down in an unexpected situation, the drain module (226) operates normally. Accordingly, the sample fluid accumulated in the spray chamber (320) can be normally discharged to the outside, thereby preventing an accident in which the sample fluid in the spray chamber (320) overflows into the analysis device (230).

[0096] In addition, according to the present invention, the operating status of the pump (440) can be checked in real time through the pressure sensor (510), so that when a problem occurs in which the pump (440) is not operated, the operation of the equipment (e.g., a sample fluid acquisition device, etc.) can be stopped, thereby preventing in advance the phenomenon in which the sample fluid accumulates in the spray chamber (320) due to the pump (440) not operating and overflows into the analysis device (230).

[0097] Referring again to FIGS. 2 and 3, the analysis device (230) analyzes contaminants contained in the sample fluid. Specifically, the analysis device (230) is connected to the first port (320a) of the spray chamber (320) and can detect trace amounts of metal ions contained in the sample fluid based on the first droplets supplied through the first port (320a). In one embodiment, the analysis device (230) may be an inductively coupled plasma mass spectrometer (ICP-Mass Spectroscopy).

[0098] The scrubber (240) collects the sample fluid discharged from the drain module (226).

[0099] Hereinafter, the flow of sample fluid during the contaminant analysis process according to the present invention will be described with reference to FIGS. 5 and 6.

[0100]

[0101] *Figure 5 is a drawing showing the flow of sample fluid when the analysis device is performing analysis according to the first mode. As illustrated in Figure 5, the sample fluid is supplied into the spray chamber (320) to generate an aerosol, and the first droplets (L1) are supplied to the analysis device (230) through the first port (320a). In addition, since the first port (410a) and the third port (410c) of the valve (410) are open and the second port (410b) is closed, the pump (440) can only suck in outside air along the first flow path (LP1) and cannot suck in the sample fluid in the drain tube (224), so the sample fluid remains in the drain tube (224) and is not discharged to the outside.

[0102] FIG. 6 is a drawing showing the flow of sample fluid when the analysis device has finished analysis according to the second mode. As illustrated in FIG. 6, since the analysis by the analysis device (230) has finished, the supply of sample fluid into the spray chamber (320) is stopped, the second port (410b) and the third port (410c) of the valve (410) are opened, and the first port (410a) is closed, so that the pump (440) sucks the sample fluid in the drain tube (224) along the second flow path (LP2) and discharges it to the outside. At this time, since pure water may be supplied from the outside into the spray chamber (320) for cleaning purposes or to protect the analysis device (230), the pure water accumulated in the spray chamber (320) by the pump (440) may be forcibly discharged to the outside by the pressure of the pump (440).

[0103] Meanwhile, although not illustrated in FIGS. 5 and 6, during the process illustrated in FIGS. 5 and 6, the pressure sensor (510) senses the pressure by the pump (440), and the error detection unit (520) determines that the pump (440) is not operating if the pressure detected by the pressure sensor (510) does not change based on a predetermined reference value, and may generate an alarm. In addition, the error detection unit (520) determines that the pump (440) or valve (410) is operating abnormally if the pressure detected by the pressure sensor (510) changes, but changes in a range outside a predetermined reference range, and may generate an alarm.

[0104] An implementation example of the fluid drain device illustrated in Fig. 2 is illustrated in Figs. 7a to 7d. The fluid drain device (223) illustrated in Figs. 7a to 7d may be positioned at the lower side of a spray chamber (320) attached to one wall of an analysis device (230), and at this time, the fluid drain device (223) may be connected to the spray chamber (320) via a drain tube (224).

[0105] Hereinafter, the configuration of the fluid drain device (223) according to the present invention will be described in more detail with additional reference to FIGS. 7 to 13.

[0106] Figures 7a to 7d are perspective views showing the configuration of a fluid drain device according to the present invention. In Figures 7a to 7d, the same configuration as that illustrated in Figures 2 and 3 is given the same drawing number.

[0107] The fluid drain device (223) illustrated in FIGS. 7A to 7D is connected to the spray chamber (320) via a drain tube (224), and discharges droplets (second droplets) or pure water of a predetermined size or larger among the aerosols generated from the sample fluid within the spray chamber (320) to the outside. For the convenience of the following description, the droplets or pure water of a predetermined size or larger will be referred to as the sample fluid.

[0108] The fluid drain device (223) includes a housing (800), a drain tube (224), a tube fixing tower (810), a valve (410), a pump (440), a first connecting tube (450a), a second connecting tube (450b), a third connecting tube (450c), a connecting member (460), and a pressure sensor (510), as shown in FIGS. 7a to 7d.

[0109] The housing (800) protects the components of the fluid drain device (223) by accommodating the components constituting the fluid drain device (223) therein. In one embodiment, a portion of the upper surface (802) of the housing (800) may be implemented as a cover (804) of the housing (800).

[0110] The cover (804) can be hingedly connected to the upper surface (802) of the housing (800) so that it can be opened and closed in a first direction (D1) in the height direction of the housing (800) for maintenance of the fluid drain device (223).

[0111] A first through hole (TH1) through which a drain tube (224) passes may be formed on the upper surface (802) of the housing (800).

[0112] The drain tube (224) is connected to the spray chamber (320) through the first passage hole (TH1) formed on the upper surface (802) of the housing (800).

[0113] In one embodiment, the drain tube (224) may be composed of first to fourth drain tubes (224a to 224d), as illustrated in FIGS. 7a, 7c, 7d, and 8b. The first drain tube (224a), as illustrated in FIG. 7a, is a portion of the drain tube (224) that is connected from the spray chamber (320) to the first passage hole (TH1). The second drain tube (224b), as illustrated in FIGS. 7b, 7c, and 8b, is a portion of the drain tube (224) that is wound around the tube fixing tower (810). The third drain tube (224c), as illustrated in FIGS. 7b, 7c, and 8b, is a portion that is connected from the first passage hole (TH1) to one end of the second drain tube (224b). The fourth drain tube (224d) is a portion extending from the other end of the second drain tube (224b) among the drain tubes (224) to the second port (410b) of the valve (410), as shown in FIGS. 7b, 7c, and 8b.

[0114] In the above-described embodiment, the second drain tube (224b) and the third drain tube (224c) can be formed integrally.

[0115] The tube fixing tower (810) is formed to extend in a first direction (D1) from the bottom surface (806) of the housing (800) toward the top surface (802) of the housing (800). A second drain tube (224b) among the drain tubes (224) is wound around the tube fixing tower (810).

[0116] In one embodiment, the tube fixing tower (810) may include a plurality of support columns (812a-812d), a first coupling member (814), and a second coupling member (816) for winding the second drain tube (224b), as illustrated in FIG. 8a.

[0117] A plurality of support columns (812a to 812d) are formed to extend in a first direction (D1) from the bottom surface (806) of the housing (800). Specifically, the tube fixing tower (810) may include a first support column (812a), a second support column (812b), a third support column (812c), and a fourth support column (812d). The first support column (812a) and the second support column (812b) are arranged to face each other at a predetermined interval based on the second direction (D2), which is the front-back direction of the housing (800). The third support column (812c) and the fourth support column (812d) are arranged to face each other at a predetermined interval based on the third direction (D3), which is the left-right direction of the housing (800).

[0118] Accordingly, an empty space is formed inside the first to fourth support columns (812a to 812d) by the arrangement of the first to fourth support columns (812a to 812d). In the present invention, the reason why the tube fixing tower (810) is not formed in a polygonal or cylindrical shape, but rather four support columns (812a to 812d) are used to form an empty space inside it is to easily confirm the presence of droplets in the second drain tube (224b) from all directions or to confirm the state in which the second drain tube (224b) is wound around the tube fixing tower (810) from all directions.

[0119] That is, when the tube fixing tower (810) is formed in a polygonal or cylindrical shape, the winding state of the second drain tube (224b) cannot be visually confirmed from all directions, but when the tube fixing tower (810) is formed with four support columns (812a to 812d), the winding state of the second drain tube (224b) on the opposite support column side from a specific support column side can be visually confirmed, so that the state in which the second drain tube (224b) is wound on the tube fixing tower (810) can be confirmed from all directions.

[0120] As illustrated in Fig. 8a, each support pillar (812a to 812d) has a plurality of receiving grooves (818) formed at a predetermined interval along the first direction (D1) for fixing the second drain tube (224b).

[0121] In one embodiment, as illustrated in FIG. 8b, the second drain tube (224b) may be spirally wound around the tube fixing tower (810) so as to increase the residence time of the sample fluid within the second drain tube (224b). In this embodiment, as illustrated in FIG. 8c, the second drain tube (224b) may be sequentially wound around the first row of receiving grooves (818_1) among the receiving grooves (818) of each of the support columns (812a to 812d) and then sequentially wound around the second row of receiving grooves (818_2) disposed below the first row, thereby being spirally wound around the tube fixing tower (810) as a whole.

[0122] The first coupling member (814) couples the lower sides of the plurality of support columns (812a to 812d) to the housing (800). In one embodiment, the first coupling member (814) may be formed in a cross shape to include a first region (814a) where the lower side of the first support column (812a) is coupled, a second region (814b) where the lower side of the second support column (812b) is coupled, a third region (814c) where the lower side of the third support column is coupled, and a fourth region (814d) where the lower side of the fourth support column (812d) is coupled. The first coupling member (814) is coupled to the bottom surface (806) of the housing (800).

[0123] The second coupling member (816) couples the upper sides of the plurality of support columns (812a to 812d) to the housing (800). In one embodiment, the second coupling member (816) may be formed in a cross shape to include a first region (816a) where the upper side of the first support column (812a) is coupled, a second region (816b) where the upper side of the second support column (812b) is coupled, a third region (816c) where the upper side of the third support column is coupled, and a fourth region (816d) where the upper side of the fourth support column (812d) is coupled. The second coupling member (816) is coupled to the rear surface (807) of the housing (800).

[0124] A valve (410) is installed inside the housing (800) to be connected to the drain tube (224). In the first mode, the valve (410) opens the first port (410a) and the third port (410c), and closes the second port (410b). Accordingly, the drain tube (224) is physically blocked by the valve (410), and sample fluids remain within the drain tube (224).

[0125] Additionally, the valve (410) opens the second port (410b) and the third port (410c) in the second mode, and closes the first port (410a). Accordingly, the drain tube (224) is connected to the suction pump (440) by the valve (410), so that the sample fluids are discharged to the outside by the pumping operation of the pump (440). In one embodiment, the valve (410) may be connected to the fourth drain tube (224d).

[0126] The pump (440) is installed inside the housing (800) so as to be connected to the first connecting tube (450a). The pump (440) operates in a constantly on state, and in the second mode, when the second port (410b) and the third port (410c) are opened, the pump sucks the sample fluid inside the drain tube (224) and discharges it to the outside. At this time, one end of the first connecting tube (450a) is connected to the pump (440), the other end of the first connecting tube (450a) is connected to the first terminal of the connecting member (460), one end of the second connecting tube (450b) is connected to the third port (410c) of the valve (410), and the other end of the second connecting tube (450b) is connected to the second terminal of the connecting member (460).

[0127] The pressure sensor (510) is connected to the pump (440) via a third connecting tube (450c), a connecting member (460), and a first connecting tube (450a). That is, one end of the third connecting tube (450c) is connected to the pressure sensor (510), and the other end of the third connecting tube (450c) is connected to a third terminal of the connecting member (460), thereby connecting the pressure sensor (510) to the pump (440). Through this, the pressure sensor (510) senses the pressure of the pump (440) and transmits the sensed result value to an error detection unit (not shown).

[0128] Meanwhile, the fluid drain device (223) according to the present invention may further include a sliding module (1000) for moving the housing (800) left and right along the third direction (D3), as illustrated in FIGS. 9 to 12. In the present invention, the reason why the fluid drain device (223) includes the sliding module (1000) is that, when maintenance of the fluid drain device (223) is required, the fluid drain device (223) can be moved to an area where there is no interference from other components, including the analysis device (230) or the spray chamber (320), through the sliding module (1000), so that maintenance of the fluid drain device (223) can be easily performed. In addition, since the fluid drain device (223) includes a sliding module (1000), the fluid drain device (223) can be moved when maintenance of the analysis device (230) or spray chamber (320) is required, thereby eliminating interference with work caused by the fluid drain device (223), making it easy to perform maintenance of the analysis device (230) or spray chamber (320).

[0129] As illustrated in FIGS. 9 to 12, a sliding module (1000) according to one embodiment of the present invention includes a fixed frame (1010) and a sliding frame (1020).

[0130] The fixed frame (1010) is coupled to a housing support member (1030) that supports the housing (800) at the bottom of the housing (800). A first guide rail (1012) extending in a third direction is formed on one side of the fixed frame (1010), and a second guide rail (1014) arranged to face the first guide rail (1012) with respect to the second direction (D2) is formed on the other side of the fixed frame (1010).

[0131] The sliding frame (1020) is coupled to the lower surface (808) of the housing (800). On one side of the sliding frame (1020), a first sliding rail (1022) is formed to extend in a third direction (D3) so as to be slidable along a first guide rail (1012), and on the other side of the sliding frame (1020), a second sliding rail (1024) is formed to extend in a third direction (D3) so as to be slidable along a second guide rail (1014).

[0132] In one embodiment, so that the sliding frame (102) can slide more smoothly on the fixed frame (1020), the fixed frame (1010) and the sliding frame (1020) can be formed of a material having a coefficient of friction lower than a predetermined standard value.

[0133] Meanwhile, a first stopper (1016) is coupled to one end of the fixed frame (1010) (e.g., the side in which the sliding frame (1020) moves forward) so as to protrude in the first direction (D1). The first stopper (1016) prevents the sliding frame (1020) from being separated from the fixed frame (1010) by excessive movement in the third direction (D3). That is, when the sliding frame (1020) moves in the third direction (D3), its movement is stopped by contact with the first stopper (1016).

[0134] In one embodiment, the fluid drain device (223) according to the present invention may further include a second stopper (1026) formed to protrude toward the fixed frame on the lower surface of the sliding frame (1020). The second stopper (1026) fixes the position of the sliding frame (1020) when the sliding frame (1020) moves in the third direction (D3) and reaches a desired position. To this end, the fixed frame (1010) is formed with a slot (1018) through which the second stopper (1026) passes, extending in the third direction (D3), and a coupling member (not shown, for example, a nut, etc.) is fastened to the second stopper (1026) passing through the slot (1018), whereby the sliding frame (1020) is coupled to the fixed frame (101) at the corresponding position. Meanwhile, the second stopper (1026) may also prevent the sliding frame (1020) from being separated from the fixed frame (1010) by excessive movement in the third direction (D3) similar to the first stopper (1016). In this embodiment, the first stopper (1016) may prevent the sliding frame (1020) from being separated in the right direction in the third direction (D3), and the second stopper (1026) may prevent the sliding frame (1020) from being separated in the left direction in the third direction (D3).

[0135] As described above, according to the present invention, since the fluid drain device (223) includes the sliding module (1000), the fluid drain device (223) can be easily moved in the third direction (D3), thereby facilitating maintenance of the fluid drain device (223). Specifically, when the fluid drain device (223) is to be used for analysis of a sample fluid, as illustrated in FIG. 10, the housing (800) of the fluid drain device (223) is moved to the first region in the right direction on FIG. 12 until it comes into contact with the first stopper (1016).

[0136] In addition, when maintenance of the fluid drain device (223), maintenance of the analysis device (230), or maintenance of the spray chamber (320) is required, the fluid drain device (223) is moved to the second region in the left direction as illustrated in FIG. 11. At this time, when the fluid drain device (223) is moved to the desired position as illustrated in FIG. 12, the position of the fluid drain device (223) is fixed by fastening the coupling member to the second stopper (1026). Meanwhile, when the fluid drain device (223) is moved to the left as illustrated in FIG. 11 for maintenance of the analysis device (230) or the spray chamber (320), the fluid drain device (223) can operate normally.

[0137] According to the above-described embodiment, in order to prevent the drain tube (124) from being damaged or the drain tube (124) from being detached from the tube fixing tower even when the fluid drain device (223) moves left and right, the drain tube (224) may be formed of an elastic material, and in particular, the third drain tube (124c) may be formed to have a length including a margin length determined according to the displacement of the fluid drain device (223) in consideration of the left and right movement distance of the fluid drain device (223).

[0138] Meanwhile, the fluid drain device (223) according to the present invention may further include a first discharge tube (560) for discharging the sample fluid sucked from the drain tube (224) by the pump (440) to an external scrubber (240 in FIG. 2). To this end, one end of the first discharge tube (560) may be connected to the output end of the pump (440), and the other end of the first discharge tube (560) may be connected to the scrubber (240). In this embodiment, the first discharge tube (560) may be connected to the scrubber (240) by passing through a second passage hole (TH2) formed in one side wall (809) of the housing (800).

[0139] In the above-described embodiment, the first discharge tube (560) is described as being composed of a single tube. However, in another embodiment, the first discharge tube (560) may be composed of a 1-1 discharge tube (560a) extending from the output end of the pump (440) to the second passage hole (TH2) and a 1-2 discharge tube (560b) extending from the second passage hole (TH2) to the scrubber (240).

[0140]

[0141] *In one embodiment, the fluid drain device (223) according to the present invention may further include a second discharge tube (570) for discharging the sample fluid collected on the inner bottom of the housing (800) to an external scrubber (240 in FIG. 2). To this end, one end of the second discharge tube (570) may be connected to a third passage hole (TH3) formed on the lower part of one side wall (809_1) of the housing (800), and the other end of the second discharge tube (570) may be connected to the scrubber (240). At this time, the third passage hole (TH3) may be formed at a position in the one side wall (809_1) of the housing (800) so that the sample fluid collected on the inner bottom of the housing (800) can be smoothly discharged to the outside.

[0142] According to the above-described embodiment, the fluid drain device (223) may further include a leak detection sensor (590) for checking the amount of sample fluid collected on the inner bottom of the housing (800). The leak detection sensor (590) is installed on the bottom surface (806) of the housing (800) to check the presence of sample fluid collected on the inner bottom of the housing (800) and transmit the result to the controller (228).

[0143] In the above-described embodiments, the fluid drain device (223) may further include a tube fixing guide (600) for fixing the first discharge tube (560) and the second discharge tube (570), as illustrated in FIGS. 13A and 13B. The tube fixing guide (600) is installed at the lower portion of the housing (800). More specifically, the tube fixing guide (600) may be installed so as to be coupled to the fixing frame (1010).

[0144] The tube fixing guide (600) is formed with a receiving groove (610) extending along the third direction (D3) to receive and fix the first discharge tube (560) and the second discharge tube (570). In one embodiment, the direction in which the first discharge tube (560) and the second discharge tube (570) extend within the receiving groove (610) may be determined depending on the position of the scrubber (240). For example, when the scrubber (240) is positioned on the other side wall (809_2) of the housing (800) opposite to one side wall (809_1), the first discharge tube (560) and the second discharge tube (570) may be received within the receiving groove (610) to extend from one side wall (809_1) of the housing (800) toward the other side wall (809_2) of the housing (800).

[0145] In one embodiment, the tube fixing guide (600) can be coupled to the fixing frame (1010) via a third coupling member (620). Meanwhile, since the third coupling member (620) is arranged to surround the open area of ​​the receiving groove (610) as illustrated in FIG. 13b, the first discharge tube (560) and the second discharge tube (570) accommodated in the receiving groove (610) can be prevented from being separated from the receiving groove (610).

[0146] Those skilled in the art will appreciate that the present invention described above can be implemented in other specific forms without changing the technical idea or essential features thereof.

[0147] Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive. The scope of the present invention is defined by the claims described below rather than the detailed description above, and all changes or modifications derived from the meaning and scope of the claims and their equivalent concepts should be construed as being included within the scope of the present invention.

Claims

1. A drain tube connected to the spray chamber to discharge droplets larger than a predetermined size among the aerosols generated from the sample fluid within the spray chamber; A pump that operates in a constantly on state; and A fluid introduction device characterized by comprising a valve connected to one end of the drain tube, closing the one end of the drain tube in a first mode to allow the droplets to remain in the drain tube or the spray chamber, and connecting the drain tube and the pump in a second mode to allow the droplets to be discharged to the outside by suction of the pump.

2. In paragraph 1, The above valve is a 3-way valve having a first port connected to the atmosphere, a second port connected to the drain tube, and a third port connected to the pump. A fluid introduction device characterized in that the valve opens the first port and the third port and closes the second port in the first mode to allow the droplets to remain in the drain tube or the spray chamber, and opens the second port and the third port and closes the first port in the second mode to allow the droplets to be discharged to the outside by suction of the pump.

3. In paragraph 1, A fluid introduction device characterized in that the first mode is a mode when the analysis device analyzing the contaminants contained in the sample fluid is performing analysis, and the second mode is a mode when the analysis device is not performing analysis.

4. In paragraph 1, A tube fixing tower on which the above drain tube is wound; and Further comprising a housing covering the drain tube, the pump, the valve, and the tube fixing tower; A fluid introduction device characterized in that the drain tube is connected to the spray chamber through a first passage hole formed on the upper surface of the housing.

5. In paragraph 4, The above tube fixing tower, A plurality of support pillars formed to extend in a first direction from the bottom surface of the housing toward the upper surface of the housing, and having a plurality of receiving grooves formed at a predetermined interval along the first direction for fixing the drain tube; A first connecting member that connects the lower side of the plurality of support columns to the housing; and A fluid introduction device characterized by including a second connecting member that connects the upper side of the plurality of support columns to the housing.

6. In paragraph 5, The above multiple support columns, First and second support pillars arranged to face each other at a predetermined interval based on the second direction, which is the front-back direction of the housing; and It includes third and fourth support pillars arranged to face each other at a predetermined interval based on the third direction, which is the left and right direction of the housing, A fluid introduction device characterized in that the plurality of receiving grooves are formed on the outer surface of each of the first to fourth support columns.

7. In paragraph 4, A fluid introduction device characterized in that it further includes a sliding module that slides the housing in a third direction, that is, the left-right direction, on a support member that supports the housing at the lower portion of the housing.

8. In the 7th paragraph, the sliding module, A fixed frame formed by being connected to the above support member and having guide rails extending along the third direction on both sides; and A fluid introduction device characterized in that it further includes a sliding frame that is coupled to the lower surface of the housing and has sliding rails formed on both sides extending along the third direction so as to be able to slide along the guide rail.

9. In paragraph 8, A fluid introduction device characterized in that the sliding module further includes a first stopper that is coupled to one end of the fixed frame so as to protrude in the first direction and restricts movement of the sliding frame in the third direction.

10. In paragraph 8, The above sliding module further includes a second stopper formed on the lower surface of the sliding frame to protrude toward the fixed frame, A slot is formed in the above fixed frame, which extends in the third direction and through which the second stopper penetrates. A fluid introduction device characterized in that a connecting member is fastened to the second stopper penetrated through the slot, thereby fixing the sliding frame at a predetermined position on the fixed frame.

11. In paragraph 4, A first discharge tube that is connected to an external scrubber through a second passage formed in one side wall of the housing at the output end of the pump and discharges the droplets discharged from the output end of the pump to the outside; and A fluid introduction device characterized in that it further includes a second discharge tube that is connected to the scrubber through a third passage formed in the lower part of one side wall of the housing and discharges leaking droplets collected on the inner bottom of the housing to the outside.

12. In paragraph 11, It further includes a tube fixing guide installed at the lower part of the housing, and having a receiving groove in which the first discharge tube and the second discharge tube are received and fixed, which extends along the third direction, that is, the left and right direction of the housing. A fluid introduction device characterized in that the first discharge tube and the second discharge tube extend from the one side wall toward the other side wall of the housing within the receiving groove.

13. In paragraph 4, A fluid introduction device characterized in that the drain tube is wound in a spiral shape around the tube fixing tower so as to increase the residence time of the droplets within the drain tube.

14. In paragraph 4, The above drain tube, A first drain tube connected from the spray chamber to the first passage hole; A second drain tube wound around the above tube fixing tower; A third drain tube connected from the first passage hole to one end of the second drain tube; and A fourth drain tube extending from the other end of the second drain tube to the second port of the valve, The first to fourth drain tubes are formed of a flexible material, A fluid introduction device characterized in that the third drain tube is formed to have a length including a margin length determined according to a displacement of the housing when the housing slides.

15. In paragraph 14, A connecting tube connecting the pump to the third port of the valve; A pressure sensor connected to the above connecting tube to detect the pressure of the pump; and A fluid introduction device characterized in that it further includes an error detection unit that determines that the pump is not operating and generates an alarm when the pressure detected by the pressure sensor does not change based on a predetermined reference value, and determines that the pump or the valve is operating abnormally and generates an alarm when the pressure detected by the pressure sensor is changing in an area outside a predetermined reference range.

Images