Differential lifting / lowering device for multiple circles of seed crystals and method for differential lifting / lowering of multiple circles of seed crystals

Abstract

A differential lifting / lowering device for multiple circles of seed crystals and a method for the differential lifting / lowering of multiple circles of seed crystals. The device comprises: a seed crystal holding mechanism provided with multiple circles of holders for holding seed crystals; at least one lifting / lowering mechanism for driving at least one circle of holders to perform lifting / lowering motion; and a control device for controlling the speed of the at least one lifting / lowering mechanism on the basis of a diameter change obtained from the diameter of at least one crystal rob among crystal rods generated by the circles of seed crystals held by the seed crystal holding mechanism.

Description

Multi-ring seed crystal differential lifting device and method for differentially lifting multi-ring seed crystal

[0001] Citation of Related Applications

[0002] This application claims the benefit of Chinese Patent Application No. 202311232889.1 filed with the State Intellectual Property Office of the People's Republic of China on September 22, 2023, the entire contents of which are hereby incorporated by reference into this document in their entirety. Technical Field

[0003] The present invention relates to the field of artificial crystal preparation, and in particular to a multi-ring seed crystal differential lifting device and a method for differentially lifting the multi-ring seed crystal. Background Art

[0004] As is known, controlling the diameter of the drawn ingots to meet usage requirements is a key technology in the field of intraocular crystal production. Taking the production of multi-crystalline and single-crystalline silicon as an example, a significant amount of columnar silicon ingots with diameters ranging from 8mm to 12mm are used throughout the production process. In actual production, handling of these residual materials, accidentally broken ingots, and scrap generated during the cutting and crushing processes of multi-crystalline and single-crystalline silicon manufacturers is extremely cumbersome. Many companies, to save time, simply discard these scraps or store them in warehouses for long periods of time. Others recycle these scraps by pulling them into ingots using a vertical pulling furnace, then cutting them into multiple 8mm*8mm or 10mm*10mm columnar silicon ingots using a multi-wire saw. This process not only increases the production cost of the columnar silicon ingots but also increases the introduction of impurities during the cutting process, reducing product quality and resulting in significant resource waste. Therefore, finding ways to reuse these scraps has become a long-standing technical challenge for those skilled in the art.

[0005] In order to solve the above technical problems, those skilled in the art put crushed silicon material into a crucible. After the silicon material in the crucible melts into a melt, the upper shaft drives the seed crystal clamping device to descend. When the lower end of the seed crystal clamped by the seed crystal clamping device contacts the melt and melts, the upper shaft drives the seed crystal clamping device to rise. After the melt rises with the seed crystal, it gradually begins to condense as the temperature drops. The new columnar crystal rod formed at this time is the desired silicon core. When the crystal rod is pulled, the diameter of the pulled crystal rod is related to the pulling speed of the crystal rod and the temperature at the crystallization site. That is, the higher the temperature at the crystallization site, the smaller the diameter of the crystal rod when the pulling speed remains unchanged, the lower the temperature at the crystallization site, the greater the viscosity of the melt, and the stronger its ability to follow the seed crystal. Therefore, when the pulling speed remains unchanged, the larger the diameter of the crystal rod.

[0006] During the actual drawing process, since the heater is arranged on the periphery of the crucible, the temperature of the melt in the crucible decreases from the outside to the inside, that is, the temperature is lowest at the center of the crucible and increases as you go outward (the temperature increases as you get closer to the heater). In order to be able to simultaneously draw more crystal rods, at least two circles of chucks are often arranged on the seed crystal clamping device located above the crucible, and then a seed crystal is clamped on each chuck. At this time, when the seed crystals located on the inner and outer circles of the seed crystal clamping device are used to draw the crystal rod, the temperatures at the crystallization points of the inner and outer circles of the seed crystals are also different (because the temperature of the melt in the crucible gradually decreases from the outside to the inside). When using the seed crystal chuck with the existing structure to draw the crystal rod, especially when multiple circles of chucks are arranged on the seed crystal chuck with the existing structure, the temperature at the crystallization point of the seed crystals clamped by each circle of chucks is different. Therefore, when the crystal rod pulling speed is the same, the diameter of the crystal rod pulled by each circle of chucks will be different.

[0007] Summary of the Invention

[0008] In order to solve the above problems, the present invention provides a multi-ring seed crystal differential lifting device for pulling artificial crystals and a method for differentially lifting multi-ring seed crystals in an artificial crystal furnace. The device and method can individually adjust the pulling speed / lifting speed of the inner and outer ring seed crystals on the seed crystal clamping device.

[0009] In order to achieve the above-mentioned objectives, the present application provides a multi-ring seed crystal differential lifting device for pulling artificial crystals, which includes: a seed crystal clamping mechanism, having multiple rings of chucks for clamping seed crystals; at least one lifting mechanism, driving at least one ring of chucks to perform lifting and lowering movements; and a control device, which controls the speed of at least one lifting mechanism based on the diameter change obtained from the diameter of at least one crystal rod in the crystal rod generated by each ring of seed crystals clamped by the seed crystal clamping mechanism.

[0010] Furthermore, the multi-turn seed crystal differential lifting device further includes: a rotating mechanism for driving each chuck of the multi-turn chuck to rotate.

[0011] Furthermore, the seed crystal clamping mechanism further includes a chuck body, wherein the chuck body includes a chuck body upper cover and a chuck body lower cover, and a cavity is formed between the chuck body upper cover and the chuck body lower cover.

[0012] Furthermore, the rotating mechanism includes an inner ring rotating shaft and an outer ring rotating shaft located at the outer edge of the inner ring rotating shaft, and the lifting mechanism includes a lifting plate connected to at least one of the inner ring rotating shaft and the outer ring rotating shaft, and the lifting plate is used to drive at least one of the inner ring rotating shaft and the outer ring rotating shaft to perform lifting and lowering movements.

[0013] Furthermore, the lifting mechanism also includes a lifting motor providing a power source, a lifting screw connected to the lifting motor, and a lifting nut sleeved on the outer edge surface of the lifting screw and connected to the lifting plate, wherein the lifting nut can move along the lifting screw.

[0014] Furthermore, the lifting mechanism includes a roller mechanism connected to the lifting plate.

[0015] Furthermore, the lifting mechanism also includes: a guide column, which is arranged at the upper end of the upper cover of the chuck body; and a support top plate, which is arranged at the upper end of the guide column, wherein the lifting plate is arranged between the support top plate and the upper cover of the chuck body, and is provided with a guide hole for the guide column to pass through.

[0016] Furthermore, the seed crystal clamping mechanism includes a hollow outer ring chuck body and a hollow inner ring chuck body arranged in the middle inner hole of the outer ring chuck body, the outer ring chuck body is provided with an outer ring chuck for clamping the seed crystal, the inner ring chuck body is provided with an inner ring chuck for clamping the seed crystal, and the outer ring chuck body and the inner ring chuck body are arranged to be able to perform relative lifting and lowering movements.

[0017] Furthermore, the first rotating device of the rotating mechanism drives the outer race chuck to rotate, and the second rotating device of the rotating mechanism drives the inner race chuck to rotate.

[0018] Furthermore, the lifting mechanism includes a first lifting device connected to the inner ring chuck body and driving the inner ring chuck to move up and down, and a second lifting device connected to the outer ring chuck body and driving the outer ring chuck to move up and down.

[0019] Furthermore, the outer ring chuck body is configured as a hollow circular structure, and a circle of first rotating shaft through-holes is provided on the outer ring chuck body, a first rotating shaft is provided in each first rotating shaft through-hole, one of the first rotating shafts is connected to the power source, an outer ring gear is provided on the outer edge surface of the first rotating shaft, and adjacent outer ring gears are engaged with each other.

[0020] Furthermore, the inner ring chuck body is configured as a hollow circular structure, a central rotating shaft through-hole is provided in the middle of the inner ring chuck body, and a circle of second rotating shaft through-holes is provided on the periphery of the central rotating shaft through-hole, a driving shaft connected to the power source is provided in the central rotating shaft through-hole, a second rotating shaft is provided in each second rotating shaft through-hole, a driving gear is provided on the outer edge surface of the driving shaft, and driven gears are respectively provided on the outer edge surfaces of the second rotating shafts, and each driven gear is engaged with the driving gear.

[0021] Furthermore, the inner ring chuck body is configured as a hollow circular structure, a circle of third rotating shaft through-holes is provided in the inner ring chuck body, a third rotating shaft is provided in each third rotating shaft through-hole, one of the third rotating shafts is connected to the power source, an inner ring gear is provided on the outer edge surface of the third rotating shaft, and adjacent inner ring gears are engaged with each other.

[0022] Furthermore, the lifting mechanism includes: a nut provided on the lifting plate; and a rotating cylinder connected to the nut via a thread provided on an outer edge surface, and the rotating cylinder is connected to a power source.

[0023] Furthermore, the lifting mechanism further includes: a guide column, which is configured to be accommodated in the guide hole of the lifting plate; and a supporting top plate, which is provided at the upper end of the guide column and is located above the rotating cylinder.

[0024] Furthermore, the first lifting device includes: an inner ring chuck body lifting shaft, a first end of which is connected to the inner ring chuck body; a first lifting plate, connected to the second end of the inner ring chuck body lifting shaft; a first lifting nut, which is connected to the first lifting plate; and a first lifting screw, which is sleeved on the first lifting screw and moves along the first lifting screw, and the first lifting screw is connected to the first power source.

[0025] Furthermore, the second lifting device includes: an outer ring chuck body lifting shaft, the first end of the outer ring chuck body lifting shaft is connected to the outer ring chuck body; a second lifting plate, the second lifting plate is connected to the second end of the outer ring chuck body lifting shaft; a second lifting nut, which is connected to the second lifting plate; and a second lifting screw, the second lifting nut is sleeved on the second lifting screw and moves along the second lifting screw, and the second lifting screw is connected to a second power source.

[0026] Furthermore, the outer ring chuck body lifting shaft has a hollow structure, the inner ring chuck body lifting shaft is arranged in the inner hole of the outer ring chuck body lifting shaft, and the first part of the inner ring chuck body lifting shaft passes through the outer ring chuck body lifting shaft and is located in the hollow structure of the outer ring chuck body lifting shaft, and the second part of the inner ring chuck body lifting shaft is located above the outer ring chuck body lifting shaft.

[0027] Furthermore, the seed crystal clamping mechanism includes an upper chuck body and a lower chuck body located below the upper chuck body, and the upper chuck body is provided with an outer ring chuck, and the lower chuck body is provided with an inner ring chuck.

[0028] Furthermore, the upper chuck body and the lower chuck body respectively include a chuck body upper cover and a chuck body lower cover, and a cavity is formed between the chuck body upper cover and the chuck body lower cover.

[0029] Furthermore, the lifting mechanism drives the inner ring chuck to perform lifting motion.

[0030] Furthermore, the lifting mechanism includes a lifting plate arranged between the upper chuck body and the lower chuck body, a plurality of inner ring driven gear fixing shafts are arranged on the lifting plate, and the inner ring chuck is arranged on the inner ring driven gear fixing shafts.

[0031] Furthermore, the lifting mechanism also includes a lifting motor providing a power source, a lifting screw connected to the lifting motor, and a lifting nut sleeved on the outer edge surface of the lifting screw and connected to the lifting plate, and the lifting nut can move along the lifting screw.

[0032] Furthermore, the diameter of the upper chuck body is greater than the diameter of the lower chuck body, and a plurality of arc-shaped grooves recessed toward the lower chuck body are provided on the outer edge surface of the lower chuck body.

[0033] Furthermore, the multi-ring seed crystal differential lifting device also includes an outer ring rotating shaft extending from the upper chuck body and located above the lower chuck body, and the outer ring chuck is arranged on the outer ring rotating shaft.

[0034] Furthermore, the diameter of the upper chuck body is the same as that of the lower chuck body, and the lower chuck body is provided with a through hole for the outer ring chuck to pass through.

[0035] Furthermore, the multi-ring seed crystal differential lifting device also includes an outer ring rotating shaft extending from the upper chuck body and passing through the through hole of the lower chuck body, and the outer ring chuck is arranged on the outer ring rotating shaft.

[0036] Furthermore, the outer ring rotating shaft is formed as an integral structure.

[0037] Furthermore, the outer ring rotating shaft includes a fourth rotating shaft provided in the upper chuck body and a lower section of a rotating power transmission shaft connected to the fourth rotating shaft and passing through a through hole of the lower chuck body.

[0038] Furthermore, the outer ring rotating shaft also includes an upper section of the rotating power transmission shaft connected between the fourth rotating shaft and the lower section of the rotating power transmission shaft, wherein the upper section of the rotating power transmission shaft transmits the rotating power of the fourth rotating shaft to the lower section of the rotating power transmission shaft.

[0039] Furthermore, the lifting mechanism drives one of the upper chuck body and the lower chuck body to move up and down.

[0040] Furthermore, the lifting mechanism includes: a fixed cylinder fixedly connected to the lower chuck body; a lifting cylinder connected to the fixed cylinder and inserted into the fixed cylinder, the lifting cylinder can rotate in the fixed cylinder and drive the fixed cylinder to move up and down, and the fixed cylinder does not rotate with the lifting cylinder; a lifting driven gear fixedly connected to the lifting cylinder; a lifting active gear meshing with the lifting driven gear; and a hollow screw, the hollow screw is arranged in the lifting driven gear, and the upper end of the hollow screw is fixedly connected to the bottom of the upper chuck body, the lower end of the hollow screw is inserted into the lifting cylinder, and the lifting driven gear can rotate and move up and down around the hollow screw.

[0041] Furthermore, the inner hole of the fixing cylinder is provided with an annular limiting step, the outer edge surface of the lifting cylinder is provided with an outwardly protruding annular boss, and a bearing is provided between the annular boss and the annular limiting step.

[0042] Furthermore, the chuck body is provided with multiple circles of chucks, and the number of chucks in two adjacent circles of the multiple circles of chucks is the same.

[0043] Furthermore, the upper chuck body chuck and / or the lower chuck body are provided with multiple circles of chucks, and the number of chucks in two adjacent circles of the multiple circles of chucks is the same.

[0044] Furthermore, the chuck body is provided with multiple circles of chucks, and the number of chucks in two adjacent circles of the multiple circles of chucks is different.

[0045] Furthermore, the upper chuck body chuck and / or the lower chuck body are provided with multiple circles of chucks, and the numbers of chucks in two adjacent circles of the multiple circles of chucks are different.

[0046] According to another aspect of the present application, an intraocular crystal furnace for pulling intraocular crystals is provided, and the intraocular crystal furnace includes the above-mentioned multi-ring seed crystal differential lifting device.

[0047] According to another aspect of the present application, a method for differentially lifting multiple rings of seed crystals in an artificial crystal furnace is provided, characterized in that the method includes: measuring the diameter of at least one crystal rod of each ring of crystal rods generated by the multiple rings of seed crystals, and determining whether the diameter has changed; and adjusting the lifting speed of at least one lifting mechanism according to the measured diameter change of at least one crystal rod in each ring of crystal rods, wherein the lifting mechanism is connected to at least one seed crystal clamping mechanism that clamps one ring of the multiple rings of seed crystals to drive at least one ring of chucks of the seed crystal clamping mechanism to perform lifting and lowering movements.

[0048] According to another aspect of the present application, a computer device is provided, comprising a memory and a processor, wherein the memory stores a computer program that can be run on the processor, and when the processor executes the computer program, the steps of the above-mentioned method for differentially lifting and lowering multiple circles of seed crystals in an artificial crystal furnace are implemented.

[0049] According to another aspect of the present application, a computer-readable storage medium is provided, on which a computer program is stored. When the computer program is executed by a processor, the steps of the method for differentially lifting multiple rings of seed crystals in an artificial crystal furnace are implemented.

[0050] The multi-ring seed crystal differential lifting device and the method for differentially lifting multi-ring seed crystals of the present application achieve differential lifting speed by causing relative motion of seed crystals in different rings, thereby achieving the purpose of ensuring that the diameter of the pulled crystal rod meets the use requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] The accompanying drawings, which constitute part of this application, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0052] FIG1 is a schematic structural diagram of an intraocular lens pulling device according to an embodiment of the present invention;

[0053] FIG2 is a schematic diagram of the front structure of a multi-turn seed crystal differential lifting device according to a first embodiment of the present invention;

[0054] FIG3 is a schematic diagram of the top view of the structure of FIG2;

[0055] FIG4 is a schematic cross-sectional view of the structure taken along line AA of FIG2 ;

[0056] FIG5 is a schematic cross-sectional structural diagram taken along line BB of FIG3 ;

[0057] 6 is a schematic structural diagram of a multi-turn seed crystal differential lifting device according to a second embodiment of the present invention;

[0058] 7 is a perspective view of an upper shaft lifting mechanism according to a second embodiment of the present invention;

[0059] FIG8 is a schematic structural diagram of an upper shaft lifting mechanism according to a second embodiment of the present invention;

[0060] 9 is a schematic structural diagram of a multi-turn seed crystal differential lifting device according to a third embodiment of the present invention;

[0061] FIG10 is a schematic cross-sectional structural diagram taken along line CC of FIG9 ;

[0062] FIG11 is a schematic diagram of the right side structure of FIG9;

[0063] FIG12 is a schematic diagram of the top structure of FIG9;

[0064] 13 is a schematic structural diagram of a multi-turn seed crystal differential lifting device according to a fourth embodiment of the present invention;

[0065] 14 is a schematic structural diagram of a multi-ring seed crystal differential lifting device according to a fifth embodiment of the present invention;

[0066] FIG15 is a schematic diagram of the left structural view of FIG14;

[0067] FIG16 is a schematic diagram of the top structure of FIG14;

[0068] FIG17 is a schematic cross-sectional view of the structure taken along line AA of FIG16;

[0069] FIG18 is a schematic cross-sectional view of the structure taken along line BB of FIG16;

[0070] FIG19 is a schematic structural diagram of a multi-ring seed crystal differential lifting device according to a sixth embodiment of the present invention;

[0071] FIG20 is a schematic diagram of the left structural view of FIG19;

[0072] FIG21 is a schematic diagram of the top structure of FIG19;

[0073] FIG22 is a schematic cross-sectional view of the structure taken along line CC of FIG21;

[0074] FIG23 is a schematic cross-sectional view of the structure taken along line DD of FIG21;

[0075] 24 and 25 are schematic diagrams showing the three-dimensional structure of the multi-circle seed crystal differential lifting device according to the seventh embodiment of the present invention, viewed from different angles;

[0076] FIG26 is a schematic diagram of the top structure of FIG24;

[0077] FIG27 is a schematic cross-sectional view of the structure taken along line EE of FIG26;

[0078] FIG28 is a partial enlarged schematic diagram of FIG27;

[0079] FIG29 is a schematic cross-sectional structural diagram taken along line FF of FIG27 ;

[0080] FIG30 is a schematic diagram of a structure in which two rings of gears are provided on the chuck body according to an embodiment of the present invention, and the number of inner and outer ring gears is the same; and

[0081] FIG31 is a schematic structural diagram showing a structure in which two rings of gears are provided on a chuck body according to an embodiment of the present invention, and the numbers of the inner and outer ring gears are inconsistent. DETAILED DESCRIPTION

[0082] In order to make the purpose, technical solutions and advantages of this application more clearly understood, the present application is further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely for explaining this application and are not intended to limit this application. In this application, the same reference numerals represent the same components in different embodiments.

[0083] According to the present application, a multi-ring seed crystal differential lifting device for pulling artificial crystals is provided, which includes: a seed crystal clamping mechanism, having multiple rings of chucks for clamping seed crystals; at least one lifting mechanism, driving at least one ring of chucks to perform lifting and lowering movements; and a control device, which controls the speed of at least one lifting mechanism based on the diameter change obtained from the diameter of at least one crystal rod in the crystal rods generated by each ring of seed crystals clamped by the seed crystal clamping mechanism.

[0084] According to the multi-ring seed crystal differential lifting device of the present application, the lifting speed difference is achieved by causing the seed crystals of different rings to move relative to each other, thereby achieving the purpose of ensuring that the diameter of the pulled crystal rod meets the use requirements.

[0085] FIG1 shows a schematic structural diagram of an intraocular crystal pulling device or an intraocular crystal furnace according to an embodiment of the present invention.

[0086] As shown in Figure 1, this IOC furnace can simultaneously pull multiple crystal ingots. It includes a secondary furnace chamber 1, a crystal cooling mechanism 8 with multiple drawing holes, a crystal cooling mechanism lifting device 2 for raising and lowering the crystal cooling mechanism 8, a differential lifting device 3, crystal ingots 4, a lifting arm 5, a valve 6, a diameter measuring instrument 7, a furnace cover 9, a main furnace chamber 10, a heater 11, a melt 12, a crucible 13, and a control device.

[0087] The furnace cover 9 is arranged above the main furnace chamber 10, and a valve 6 is arranged above the furnace cover 9. The auxiliary furnace chamber 1 is arranged above the valve 6, and a crystal cooling mechanism lifting device 2 for lifting and lowering the crystal cooling mechanism 8 is provided on the auxiliary furnace chamber 1. The crystal cooling mechanism lifting device 2 drives the lifting arm 5 to lift and lower. The lifting arm 5 is connected to the crystal cooling mechanism 8. The lifting arm 5 can drive the crystal cooling mechanism 8 to move up and down between the auxiliary furnace chamber 1 and the main furnace chamber 10. Below the crystal cooling mechanism 8, a crucible 13 is provided in the main furnace chamber 10. A heater 11 is provided on the periphery of the crucible 13, and the upper axis lifting device of the artificial crystal is connected to the differential lifting device 3 and drives the differential lifting device 3 to move up and down.

[0088] During the pulling process, the diameter measuring instrument 7 can measure the diameter of at least one newly pulled ingot 4 on the outer or inner ring in real time. The control device can compare the diameter of the at least one ingot measured by the diameter measuring instrument 7 with a parameter value, or compare the diameters of the at least one ingot measured by the diameter measuring instrument 7 at different locations, to determine the corresponding diameter change and control the differential lifting device 3 based on this diameter change. Based on commands from the control device, the differential lifting device 3 pulls or lifts the ingots in different rings at different speeds, thereby obtaining ingots with the required diameter.

[0089] Next, a differential lifting device according to a first embodiment of the present application will be described with reference to FIG. 2 to FIG. 5 .

[0090] As shown in the figure, the differential lifting device includes a seed crystal clamping device, a rotating mechanism, and a lifting mechanism. The seed crystal clamping device is used to clamp the seed crystal, the rotating mechanism is used to drive the clamped seed crystal to rotate, and the lifting mechanism is used to drive at least a portion of the seed crystal clamping device to move up and down, for example, driving the outer ring chuck or the inner ring chuck to move up and down.

[0091] The seed crystal holding device includes a chuck body, which includes a chuck body upper cover 309, a chuck body lower cover 310, and a chuck 313. The chuck body upper cover 309 is provided above the chuck body lower cover 310, and the cavity between the chuck body lower cover 310 and the chuck body upper cover 309 forms a mounting cavity for accommodating the rotating mechanism.

[0092] The top of the chuck body lower cover 310 is provided with multiple rotational shaft holes extending through to the bottom of the chuck body lower cover 310. The rotational shaft of the rotation mechanism is mounted within each rotational shaft hole. Rotating wheels are located on the outer edges of each rotational shaft. The rotating wheels are interconnected and transmit power. Preferably, the rotating wheels are either gears or friction wheels. More preferably, an alternative structure to the gears or friction wheels is a combination of a sprocket and a plum blossom gear.

[0093] At the lower end of each rotating shaft there is a chuck 313. According to one embodiment of the present application, the upper end of one of the rotating shafts is connected to a rotational power source to serve as a driving shaft.

[0094] The following description will be made by taking the example of providing the rotating device with two circles of rotating shaft through holes. However, the number of the rotating shaft through holes is not limited thereto.

[0095] When the rotating shaft through hole is set to two circles, the rotating mechanism includes an outer ring rotating shaft 311, a chuck 313, a rotating motor 314, a driving gear 317, an inner ring driven gear 318, an outer ring driven gear 319, an inner ring driven gear fixing shaft 320 and a driving gear driving shaft 321.

[0096] A plurality of rotation axis through-holes are provided on the chuck body lower cover 310. According to a preferred embodiment of the present application, the plurality of rotation axis through-holes are arranged as follows: a central rotation axis through-hole is provided in the middle, and a plurality of rotation axis through-holes are provided around the central rotation axis through-hole, extending to the bottom of the chuck body lower cover 310.

[0097] A driving gear drive shaft 321 is disposed within the central rotating shaft through-hole. A driving gear 317 is sleeved onto the outer edge of the driving gear drive shaft 321. Outer ring rotating shafts 311 are disposed within the outer ring rotating shaft through-holes, and inner ring driven gear fixed shafts 320 are disposed within the inner ring rotating shaft through-holes. An outer ring driven gear 319 is sleeved onto the outer edge of each outer ring rotating shaft 311, and an inner ring driven gear 318 is sleeved onto the outer edge of each inner ring driven gear fixed shaft 320. The outer ring driven gear 319 meshes with the inner ring driven gear 318, which in turn meshes with the driving gear 317. The upper end of the driving gear drive shaft 321 is connected to the rotating motor 314. According to a preferred embodiment of the present application, a rotary reducer 315 can be disposed between the driving gear drive shaft 321 and the rotating motor 314.

[0098] A chuck 313 (hereinafter referred to as the inner ring chuck or outer ring chuck, respectively) is provided at the lower end of the inner ring driven gear fixed shaft 320 and the outer ring rotating shaft 311. According to a preferred embodiment of the present application, a slag receiving box 312 can be provided on the outer edge surface of the inner ring driven gear fixed shaft 320 and the outer ring rotating shaft 311 above the chuck 313. For example, the structure and function of the slag receiving box 312 can be referred to in Chinese patent No. 202222778062.8, application date October 21, 2022, publication No. CN218262826U, and the patent name is A slag receiving device for a seed crystal chuck when simultaneously pulling multiple crystals.

[0099] According to the present application, the lifting mechanism includes a guide plate 301 , a support sleeve 302 , a lifting motor 303 , a lifting reducer 304 , a support top plate 305 , a guide column 306 , a lifting screw 307 , a lifting plate 308 and a lifting nut 316 .

[0100] A support sleeve 302 is provided on the chuck body upper cover 309. According to one embodiment of the present application, a transition mounting seat 322 may be provided between the support sleeve 302 and the chuck body upper cover 309. By providing the transition mounting seat 322, installation space may be reserved for the rotary reducer 315.

[0101] The support sleeve 302 is sleeved on the periphery of the rotating motor 314, and a guide plate 301 for guiding is provided on the upper end of the support sleeve 302. The two ends of the guide plate 301 are respectively connected to the guide wire in the furnace body, and an upper shaft connecting seat 337 is provided on the upper end of the guide plate 301.

[0102] At least two guide posts 306 are provided on the upper cover 309 of the chuck body. A support top plate 305 is provided at the upper end of the guide posts 306. A lifting plate 308 is provided between the support top plate 305 and the chuck body upper cover 309. The lifting plate 308 has at least two guide holes, which are respectively sleeved on the guide posts 306.

[0103] The lifting mechanism includes at least one lifting plate 308. The lifting plate 308 can be located above the upper cover 309 of the chuck body or below the lower cover 310 of the chuck body. Each lifting plate 308 is connected to a circle of rotating shafts and a lifting power source, which drives the lifting plate 308 up and down.

[0104] At least one lifting screw 307 is provided between the support top plate 305 and the chuck body upper cover 309. A lifting nut 316 is sleeved on the outer edge of the lifting screw 307, and the lifting nut 316 is connected to the lifting plate 308. When the lifting screw 307 rotates, since the lifting screw 307 only rotates and does not rise or fall, the lifting nut 316 moves up and down, thereby driving the lifting plate 308 to move up and down. The upper end of the lifting screw 307 is connected to the lifting motor 303, which is arranged above the support top plate 305. According to one embodiment of the present application, a lifting reducer 304 can be provided between the lifting screw 307 and the lifting motor 303.

[0105] According to another embodiment of the present application, the structure of the lifting motor 303, the lifting reducer 304, the lifting screw 307 and the lifting nut 316 in the above example can be replaced by a reel mechanism. The reel mechanism is fixed on the top of the support top plate 305, and the flexible shaft in the reel mechanism passes through the support top plate 305 to connect to the lifting plate 308. Preferably, the specific structure of the reel mechanism can be found in the Chinese invention patent, patent number 201720169053.5, application date February 24, 2017, announcement number CN206494981U, and the patent name is a lifting mechanism in the upper shaft lifting device for an artificial crystal furnace.

[0106] In order to improve the stability of lifting, whether choosing the lifting motor 303, the lifting reducer 304, the lifting screw 307 and the lifting nut 316, or choosing the winding wheel mechanism, it is best to set these lifting devices as two sets, and the two sets are symmetrically set, or can be set as three sets or more.

[0107] According to this embodiment of the present application, the upper shaft lifting device drives the differential lifting device 3 to move upward and downward. The diameter measuring instrument 7 monitors the diameter of at least one newly pulled ingot 4 on the outer or inner ring in real time. When a change in the diameter of the ingot 4 is detected, the control device activates the lifting motor 303 in the lifting mechanism of the differential lifting device 3. The lifting motor 303 drives the lifting plate 308 upward or downward. The lifting plate 308 drives the inner ring driven gear fixed shaft 320 of the inner ring or the outer ring rotating shaft 311 of the outer ring upward or downward, causing relative motion between the inner ring driven gear fixed shaft 320 and the outer ring rotating shaft 311, thereby achieving differential lifting of the inner and outer ring chucks. When the inner ring driven gear fixed shaft 320 or the outer ring rotating shaft 311 moves upward or downward, the gears do not move up and down along the inner ring driven gear fixed shaft 320 or the outer ring rotating shaft 311, and the gears remain engaged to ensure normal power transmission.

[0108] The specific structure in which the outer ring rotating shaft 311 can be raised and lowered while the outer ring rotating shaft 311 does not move up and down along the outer ring rotating shaft 311 will be described by taking the raising and lowering of the outer ring rotating shaft 311 in the first embodiment as an example.

[0109] Outer ring driven gear 319 is equipped with outwardly extending fixed shafts at its upper and lower ends. Rotary bearings are then installed on the outer edges of these fixed shafts. The outer edges of these bearings are located within the chuck body upper cover 309 and chuck body lower cover 310, respectively (as shown in Figure 4). This ensures the rotation of outer ring driven gear 319. Outer ring driven gear 319 is connected to outer ring rotating shaft 311 via a key, which transmits power to outer ring driven gear 319 via the key.

[0110] To ensure that outer ring driven gear 319 does not move up and down along outer ring rotating shaft 311, but rather that outer ring rotating shaft 311 rises and falls, a long key is provided on the outer edge of outer ring rotating shaft 311. This long key is received in the keyway of outer ring driven gear 319. This ensures that outer ring rotating shaft 311 always meshes with outer ring driven gear 319 as it moves up and down within the hole in the middle of outer ring driven gear 319, thereby consistently transmitting rotational power to outer ring driven gear 319.

[0111] The structure according to the first embodiment enables differential lifting and lowering of the inner race collet and the outer race collet.

[0112] Next, a differential lifting device according to a second embodiment of the present application will be described with reference to FIG. 6 to FIG. 8 .

[0113] The difference between the differential lifting device according to this embodiment and the differential lifting device of the first embodiment is that: the seed crystal clamping device of the first embodiment is an integral structure, and the seed crystal clamping device of the second embodiment is a split structure including an inner ring chuck body and an outer ring chuck body; and, in the second embodiment, the inner ring chuck of the inner ring chuck body and the outer ring chuck of the outer ring chuck body are rotated respectively by independent rotating mechanisms (for example, a first rotating device and a second rotating device), and the inner ring chuck body and the outer ring chuck body are lifted and lowered respectively by independent lifting mechanisms (for example, an upper shaft lifting mechanism 349 as shown in Figure 7 or 8), while the differential lifting device in the first embodiment is driven by the upper shaft lifting device, and the lifting mechanism of the differential lifting device is used to adjust the lifting speed of the inner ring chuck and the outer ring chuck.

[0114] That is, in the first embodiment, the upper shaft lifting device drives the differential lifting device to move upward and downward, and the lifting mechanism of the differential lifting device adjusts the lifting speed of the inner and outer chucks. In contrast, the differential lifting device in the second embodiment uses independent lifting mechanisms to independently adjust the lifting speed of the inner and outer chuck bodies.

[0115] Specifically, as shown in the figure, the seed crystal clamping device includes an inner chuck body 323 and an outer chuck body 324. A set of rotating mechanisms is respectively provided in the inner chuck body 323 and the outer chuck body 324, that is, the two are independent rotating mechanisms.

[0116] The inner race chuck body 323 and the outer race chuck body 324 are each connected to an upper shaft or flexible shaft (two shafts as shown in the upper portion of FIG6 , two shafts as shown in the lower portion of FIG7 , and one shaft as shown in the lower portion of FIG8 ). Each upper shaft of the inner race chuck body 323 and the outer race chuck body 324 is respectively connected to a set of upper shaft lifting mechanisms 349 . As shown in the figure, the lower shaft of the upper shaft lifting mechanism 349 in FIG7 or FIG8 is connected to the upper shaft shown in FIG6 , so that the inner race chuck body 323 and the outer race chuck body 324 are respectively raised and lowered under the drive of their respective upper shaft lifting mechanisms 349 .

[0117] According to one embodiment of the present application, an upper shaft lifting mechanism 349 (i.e., a lifting mechanism) is disposed above the auxiliary furnace chamber 1, with the upper shaft passing through the upper roof of the auxiliary furnace chamber 1 and extending into the furnace body. The inner and outer chuck bodies 323 and 324 are differentially lifted by controlling the lifting speed of each set of upper shaft lifting mechanisms 349. Preferably, the upper shaft lifting mechanism can employ the upper shaft lifting device disclosed in Chinese invention patent No. 201720169053.5 (filing date: February 24, 2017, publication No. CN206494981U, patent title: "Upper Shaft Lifting Device for Intraocular Crystal Furnace").

[0118] As shown in FIG. 6 , a specific embodiment of the inner race chuck body 323 is also shown.

[0119] The inner chuck body 323 is a hollow circular structure with a hollow core. A central rotation axis through-hole is located in the center of the inner chuck body 323, and a circle of rotation axis through-holes are located around the central rotation axis through-hole. An inner chuck driving gear drive shaft 333 is located within the central rotation axis through-hole. An inner chuck driving gear 332 is sleeved onto the outer edge of the inner chuck driving gear drive shaft 333. The inner chuck driving gear 332 is connected to the inner chuck driving gear drive shaft 333 via a key.

[0120] In addition, an inner ring chuck driven gear mounting shaft 329 is respectively arranged in the through-hole of each rotating shaft, and an inner ring chuck driven gear 331 is respectively sleeved on the outer edge surface of each inner ring chuck driven gear mounting shaft 329. The inner ring chuck driven gear 331 is connected to the inner ring chuck driven gear mounting shaft 329 through a key, and each inner ring chuck driven gear 331 is respectively engaged with the inner ring chuck driving gear 332.

[0121] The upper end of the inner chuck driving gear drive shaft 333 extends upward from the top of the inner chuck body 323. The upper end of the inner chuck driving gear drive shaft 333 is connected to the rotary motor 314. The rotary motor 314 transmits rotational power to the inner chuck driving gear drive shaft 333. The inner chuck driving gear drive shaft 333 transmits power to the inner chuck driving gear 332 via a flat key. The inner chuck driving gear 332 transmits power to the inner chuck driven gear 331, thereby rotating all the inner chuck driven gears 331.

[0122] An inner race chuck 313 is provided at the lower end of each inner race chuck driven gear mounting shaft 329 , and each inner race chuck 313 holds a seed crystal. Furthermore, the inner race chuck driven gear mounting shaft 329 drives the inner race chuck 313 to rotate.

[0123] Preferably, in order to ensure the smooth rotation of the inner race chuck driven gear 331 , bearings 327 may be provided at the upper and lower ends of the inner race chuck driven gear mounting shaft 329 .

[0124] According to another specific embodiment of the present application, the inner ring chuck body 323 can also be configured as the following structure.

[0125] The inner race chuck body 323 is a hollow circular structure with a hollow core. A circle of rotation axis holes is located in the center of the inner race chuck body 323, and an inner race chuck driven gear mounting shaft 329 is mounted in each rotation axis hole. An inner race chuck driven gear 331 is sleeved onto the outer edge of each inner race chuck driven gear mounting shaft 329. The inner race chuck driven gears 331 are keyed to the inner race chuck driven gear mounting shaft 329. The inner race chuck driven gears 331 mesh with each other within the circle. The upper end of one of the inner race chuck driven gear mounting shafts 329 extends upward from the top of the inner race chuck body 323. The upper end of this inner race chuck driven gear mounting shaft 329 is connected to the rotating motor 314, thereby serving as a drive shaft. The rotating motor 314 rotates to transmit the rotational power to the inner ring chuck driven gear mounting shaft 329 connected to it. The inner ring chuck driven gear mounting shaft 329 transmits the power to the inner ring chuck driven gear 331 through the flat key. The inner ring chuck driven gear 331 transmits the power one by one to the inner ring chuck driven gear 331 meshing with it, thereby realizing the rotation of all the inner ring chuck driven gears 331.

[0126] An inner chuck 313 is provided at the lower end of each inner chuck driven gear mounting shaft 329, each of which holds a seed crystal. Preferably, to ensure smooth rotation of the inner chuck driven gear 331, bearings 327 may be provided at the upper and lower ends of the inner chuck driven gear mounting shaft 329.

[0127] As shown in FIG. 6 , a specific embodiment of the outer race collet body 324 is shown.

[0128] The outer ring chuck body 324 is a hollow annular structure with a hollow structure formed therein. The inner ring chuck body 323 is arranged in the inner hole in the middle of the outer ring chuck body 324. The outer ring chuck body 324 and the inner ring chuck body 323 can generate relative movement.

[0129] A circle of rotation axis through-holes is provided in the center of the outer chuck body 324. An outer chuck driving gear drive shaft 328 is mounted in one of these through-holes, while outer chuck driven gear mounting shafts 325 are mounted in the remaining through-holes. An outer chuck driving gear 330 is sleeved onto the outer edge of the outer chuck driving gear drive shaft 328, while an outer chuck driven gear 326 is sleeved onto the outer edge of each outer chuck driven gear mounting shaft 325. The outer chuck driving gear 330 meshes with its adjacent outer chuck driven gear 326, and the outer chuck driven gear 326 meshes with its adjacent outer chuck driven gear 326, thereby transmitting rotational power.

[0130] The upper end of the outer ring chuck driving gear drive shaft 328 extends upward from the top of the outer ring chuck body 324, and the upper end of the outer ring chuck driving gear drive shaft 328 is connected to the rotating motor 314. The rotating motor 314 rotates, thereby transmitting the rotational power to the outer ring chuck driving gear drive shaft 328 connected thereto. The outer ring chuck driving gear drive shaft 328 transmits the power to the outer ring chuck driving gear 330 through a flat key, and the outer ring chuck driving gear 330 transmits the power to the outer ring chuck driven gear 326 meshing with it, thereby realizing the rotation of all outer ring chuck driven gears 326.

[0131] An outer chuck 313 is mounted at the lower end of the outer chuck driving gear drive shaft 328 and each outer chuck driven gear mounting shaft 325. Each outer chuck 313 holds a seed crystal. Furthermore, the outer chuck driving gear drive shaft 328 and each outer chuck driven gear mounting shaft 325 drive the outer chuck 313 to rotate.

[0132] Preferably, in order to ensure smooth rotation, bearings 327 may be provided at the upper and lower ends of the outer race chuck driving gear drive shaft 328 and the outer race chuck driven gear mounting shaft 325 , respectively.

[0133] According to this embodiment, the diameter measuring instrument 7 detects the diameter of at least one newly pulled crystal ingot 4 on the outer or inner ring in real time. If a change in the diameter of the crystal ingot 4 is detected, the pulling speeds of the two upper-shaft pulling mechanisms are controlled to differ, thereby causing relative movement between the inner and outer chuck bodies 323 and 324. The different pulling speeds of the inner and outer chuck bodies 323 and 324 enable differential lifting of the inner and outer chuck bodies 323 and 324, thereby ensuring that the diameters of the crystal ingots pulled by the inner and outer rings meet the required values.

[0134] Next, a differential lifting device according to a third embodiment of the present application will be described with reference to FIG. 9 to FIG. 12 .

[0135] The differential lifting device according to this embodiment differs from the differential lifting device of the first embodiment in that the specific structure of the lifting mechanism is different. The following description omits the seed crystal clamping device and the rotating mechanism that are the same as those of the first embodiment.

[0136] According to this embodiment, the lifting structure includes a lifting motor 303, a lifting reducer 304, a support top plate 305, a guide column 306, a lifting plate 308, a guide wheel mounting seat 334, a guide wheel 335, a rotating cylinder 336, an upper shaft connecting seat 337, a nut 338 and a connecting cylinder 339.

[0137] A connecting cylinder 339 is sleeved onto the periphery of the rotating motor 314. A rotating cylinder 336 is sleeved onto the periphery of the connecting cylinder 339. The outer edge of the rotating cylinder 336 is provided with external threads. At least two guide posts 306 are provided on the top of the chuck body upper cover 309. A support top plate 305 is provided at the upper ends of the guide posts 306. The support top plate 305 is located above the rotating cylinder 336. Guide wheel mounting seats 334 are provided at each end of the support top plate 305. Within each guide wheel mounting seat 334 is a guide wheel 335. Each guide wheel 335 is connected to a guide wire rope within the furnace body.

[0138] The upper end of the rotating cylinder 336 is provided with a rotating connecting shaft, which is connected to the lifting motor 303 provided on the supporting top plate 305. Preferably, a lifting reducer 304 is provided between the rotating connecting shaft and the lifting motor 303.

[0139] A lifting plate 308 is positioned between the support top plate 305 and the chuck body upper cover 309. The lifting plate 308 is provided with at least two guide holes, which accommodate the guide posts 306. A nut 338 is provided on the lifting plate 308, which is threadedly engaged with the external thread on the outer edge of the rotating cylinder 336. The lifting plate 308 is connected to an outer ring rotating shaft 311 or an inner ring driven gear fixed shaft 320, and is driven by the lifting plate 308 to achieve the desired movement.

[0140] Preferably, the lifting motor 303, the lifting reducer 304, the support top plate 305, the guide column 306, the lifting plate 308, the guide wheel mounting seat 334, the guide wheel 335, the rotating cylinder 336, the upper shaft connecting seat 337, the nut 338 and the connecting cylinder 339 can be arranged above the upper cover 309 of the chuck body, or below the lower cover 310 of the chuck body.

[0141] Next, a differential lifting device according to a fourth embodiment of the present application will be described with reference to FIG. 13 .

[0142] The differential lifting device according to this embodiment differs from the differential lifting device of the second embodiment in that the specific structure of the lifting mechanism is different. The seed crystal clamping device and the rotating mechanism that are the same as those of the second embodiment are omitted in the following description.

[0143] Similar to the structure of the third embodiment, the seed crystal clamping device includes an inner chuck body 323 and an outer chuck body 324. Each of the inner chuck body 323 and the outer chuck body 324 is equipped with a rotation mechanism, meaning they are independent rotation mechanisms. Each of the inner chuck body 323 and the outer chuck body 324 is connected to a lifting mechanism, meaning there are two lifting mechanisms (i.e., a first lifting mechanism and a second lifting mechanism). The two lifting mechanisms are connected to the inner chuck body 323 and the outer chuck body 324, respectively. The specific structure of the lifting mechanisms is shown in Figure 12.

[0144] The first lifting device includes a lifting motor 303 , a lifting reducer 304 , a lifting screw 307 , a lifting plate 308 , a lifting nut 316 and an inner race chuck main body lifting shaft 340 .

[0145] The lifting reducer 304 is mounted above the auxiliary furnace chamber 1. It is connected to the lifting motor 303. The power output shaft of the lifting reducer 304 is connected to the lifting screw 307. A lifting nut 316 is sleeved on the outer edge of the lifting screw 307, which moves up and down. During operation, the lifting screw 307 rotates without moving up and down, while the lifting nut 316 moves up and down. The lifting nut 316 is connected to the lifting plate 308. The end of the lifting plate 308 is connected to the upper end of the inner race chuck main body lifting shaft 340. The lower end of the inner race chuck main body lifting shaft 340 is connected to the upper surface of the inner race chuck main body 323, driving the inner race chuck main body 323 to move up and down.

[0146] The second lifting device includes a lifting motor 303 , a lifting reducer 304 , a lifting screw 307 , a lifting plate 308 , a lifting nut 316 and an outer race chuck main body lifting shaft 341 .

[0147] The lifting reducer 304 is mounted above the auxiliary furnace chamber 1. It is connected to the lifting motor 303. The power output shaft of the lifting reducer 304 is connected to the lifting screw 307. A lifting nut 316 is sleeved on the outer edge of the lifting screw 307, which moves up and down. During operation, the lifting screw 307 rotates without moving up and down, while the lifting nut 316 moves up and down. The lifting nut 316 is connected to the lifting plate 308. The end of the lifting plate 308 is connected to the upper end of the outer chuck body lifting shaft 341. The lower end of the outer chuck body lifting shaft 341 is connected to the upper surface of the outer chuck body 324, driving the outer chuck body 324 to move up and down.

[0148] Therefore, by controlling the lifting speeds of the first lifting device and the second lifting device respectively, a speed difference is generated between the two lifting mechanisms, thereby achieving differential lifting of the inner race chuck body 323 and the outer race chuck body 324 .

[0149] Preferably, the outer chuck body lifting shaft 341 is hollow, with the inner chuck body lifting shaft 340 disposed within the inner hole in the middle of the outer chuck body lifting shaft 341. The inner chuck body lifting shaft 340 can be arranged concentrically or eccentrically, with no particular limitation. The upper end (or first portion) of the inner chuck body lifting shaft 340 passes through the upper end of the outer chuck body lifting shaft 341 and is located within the hollow structure of the outer chuck body lifting shaft 341. The inner chuck body lifting shaft 340 is located above the outer chuck body lifting shaft 341.

[0150] Preferably, a cooling device may be provided to cool the inner race chuck body lifting shaft 340 and the outer race chuck body lifting shaft 341 .

[0151] For example, according to one embodiment of the present application, a first cooling medium channel 345 can be provided on the inner chuck body lifting shaft 340. A cooling medium inlet 348 and a cooling medium diversion hole 343, each connected to the first cooling medium channel 345, are provided on the outer edge of the inner chuck body lifting shaft 340. A second cooling medium channel 344 is formed through the gap between the inner chuck body lifting shaft 340 and the outer chuck body lifting shaft 341. The second cooling medium channel 344 is connected to the first cooling medium channel 345 via the cooling medium diversion hole 343. A cooling medium outlet 346 is provided on the outer edge of the outer chuck body lifting shaft 341, extending through the second cooling medium channel 344.

[0152] Preferably, in order to ensure the sealing of the second channel 344 of the cooling medium, the upper end sealing shaft seal 347 and the lower end sealing shaft seal 342 are respectively sleeved on the upper and lower ends of the outer edge surface of the inner ring chuck main body lifting shaft 340, and the outer edge surfaces of the upper end sealing shaft seal 347 and the lower end sealing shaft seal 342 are in contact with the inner edge surface of the outer ring chuck main body lifting shaft 341.

[0153] Next, a multi-turn seed crystal differential lifting device according to a fifth embodiment of the present application will be described with reference to Figures 14 to 18 .

[0154] As shown in the figure, the differences between the differential lifting device of this embodiment and the first embodiment mainly lie in: the number of chuck bodies provided, the fixing method of the support top plate 305, the structure of the guide assembly 351, the setting method of the rotating motor 314, the setting position of the inner ring driven gear 318 and the position of the lifting plate 308, etc. The other structures are basically the same and will not be repeated here.

[0155] In the first embodiment, the seed crystal holding device is provided with a single chuck body. In the fifth embodiment, the seed crystal holding device is provided with two chuck bodies, namely an upper chuck body and a lower chuck body. The structure of each chuck body in the fifth embodiment is the same as that of the chuck body in the first embodiment of the present application and will not be repeated here.

[0156] According to the fifth embodiment of the present application, the diameter of the upper chuck body is larger than that of the lower chuck body, thereby avoiding mutual interference between the outer ring chuck 313 on the upper chuck body and the inner ring chuck 313 on the lower chuck body.

[0157] The upper chuck body is provided with at least one outer ring of chucks 313, and the lower chuck body is provided with at least one inner ring of chucks 313. The outer ring of chucks 313 is positioned above the lower chuck body. The outer edge of the lower chuck body is provided with a plurality of arcuate grooves 380 recessed toward the lower chuck body. During the drawing process, the lower end of the long seed crystal held by the outer ring of chucks 313 extends through the arcuate grooves 380 on the outer edge of the lower chuck body and is positioned below the lower chuck body. Of course, the arcuate grooves can be omitted from the outer edge of the lower chuck body, as long as the seed crystal held by the outer ring of chucks does not interfere with the outer edge of the lower chuck body.

[0158] According to this embodiment of the present application, the positions of the upper chuck body and the lower chuck body are fixed, that is, the two chuck bodies are simultaneously lifted and lowered by the upper shaft (or the upper shaft lifting device) without relative movement.

[0159] In the first embodiment, the support top plate 305 is fixed by the guide column 306, and the guide column 306 provides the lifting function for the lifting plate 308 while providing a guiding function. In the fifth embodiment, the support top plate 305 is connected by the support top plate connecting column 353 and is located below the upper chuck body. The guide column 306 is fixed on the lower chuck body. Thus, the support top plate 305 is fixed simultaneously by the guide column 306 and the support top plate connecting column 353 respectively. In addition, the sum of the lengths of the guide column 306 and the support top plate connecting column 353 is the setting distance between the upper and lower chuck bodies, and also plays the role of fixing the upper and lower chuck bodies.

[0160] Guide assembly 351 connects to a guide wire within the furnace chamber to prevent the chuck from shaking. The structure of guide assembly 351 in this embodiment differs from that in the first embodiment. For example, an example of a guide assembly in this application can be found in patent application number 202323187287.7.

[0161] In addition, a cable clamp 350 is provided in this embodiment for clamping the cable of the motor.

[0162] According to this embodiment, as shown in Figure 17 , a rotary motor 314 is disposed between the upper and lower chuck bodies. The power output shaft of the rotary motor 314 is connected to the power input shaft of a rotary reducer 315, and the power output shaft of the rotary reducer 315 is connected to a power gear 355. Therefore, the rotary reducer 315 is disposed between the rotary motor 314 and the power gear 355. Of course, the rotary reducer 315 may be omitted as desired.

[0163] Without the rotary reducer 315, the main shaft of the rotary motor 314 is connected to a power gear 355 located within the cavity of the upper chuck body. The power gear 355 meshes with a power transmission gear 356 mounted on a driven gear drive shaft 321. A driving gear 317 is mounted on the driven gear drive shaft 321, meshing with an outer driven gear 319 on the upper chuck body. The outer ring rotary shaft 311 is mounted within the outer driven gear 319. The outer chuck is attached to the lower end of the outer ring rotary shaft 311.

[0164] According to the present application, multiple circles of outer ring chucks can be provided as needed, and the number of outer ring chucks in each circle can be the same or different.

[0165] As shown in Figure 30, two adjacent circles of driven gears 319 are shown in the upper chuck body. These two circles of driven gears 319 are identical in number. In other words, the upper chuck body has two circles of outer chucks with the same number of outer chucks. This arrangement results in a structure with two circles of outer chucks, each with an equal number of outer chucks.

[0166] FIG31 also shows two adjacent circles of driven gears 319 in the upper chuck body. However, unlike FIG30 , the number of driven gears 319 in the outermost circle is twice the number of driven gears 319 in the relatively inner circle. In other words, the number of outer chucks in the two circles of the upper chuck body is different. This arrangement allows for a structure in which the number of outer chucks in the two adjacent circles differs.

[0167] Figure 31 shows, by way of example, a case where the number of chucks in one of two adjacent circles of chucks is twice that of the other circle of chucks. Of course, as needed, the number of chucks in one of two adjacent circles of chucks can also be set to be multiple times the number of chucks in the other circle, such as three times, four times, or five times.

[0168] When the quantity relationship between two adjacent circles of chucks is set to multiple times, a driven gear 319 located in the inner circle is simultaneously connected to and drives multiple driven gears 319 located in the outer circle; or a driven gear 319 located in the inner circle (for example, it is called the first driven gear) is connected to and drives a driven gear 319 located in the outer circle (for example, it is called the second driven gear), and the second driven gear 319 is connected to and drives multiple driven gears 319 located in the outer circle where the second driven gear 319 is located.

[0169] According to the above arrangement, when only two inner and outer circles of chucks 313 are required (i.e., one circle of chucks is provided on each of the upper and lower chuck bodies), the driving gear only needs to be provided with a single-stage transmission, i.e., the driving gear only needs to drive one circle of the driven gear to rotate, thereby effectively preventing the gear from being stuck due to deformation, thereby ensuring that the gear can rotate smoothly. If multiple circles of chucks 313 are required, for example, four circles of chucks are provided (i.e., two circles of chucks are provided on each of the upper and lower chuck bodies), the driving gear only needs to be provided with a two-stage transmission, i.e., the driving gear only needs to drive the first circle of the driven gear, which in turn connects to the second circle of the driven gear and drives the second circle of the driven gear to rotate.

[0170] Therefore, the above arrangement can effectively prevent the gears from being stuck due to deformation, thereby ensuring that the gears can rotate smoothly and reducing the number of transmission stages.

[0171] As shown in Figure 17, the driving gear 317 and the power transmission gear 356 are arranged with an upper and lower spacing. The lower end of the driven gear drive shaft 321 extends downward into the cavity of the lower chuck body. The driving gear 317 is sleeved on the outer edge surface of the lower end of the driven gear drive shaft 321. In this way, the driving gear 317 in the upper chuck body and the driving gear 317 in the lower chuck body can rotate simultaneously. The driving gear 317 of the lower chuck body is engaged with the inner ring driven gear 318. The inner ring driven gear 318 is sleeved on the outer edge surface of the hollow rotating shaft 357. The inner edge surface of the inner hole of the hollow rotating shaft 357 is connected to the inner ring driven gear fixed shaft 320 via a key. The upper end of the inner ring driven gear fixed shaft 320 is connected to the lifting plate 308, and its lower end is connected to the inner ring chuck 313.

[0172] In this embodiment, a long key is provided on the outer edge of the inner driven gear fixed shaft 320, and a keyway is provided in the inner bore of the hollow rotating shaft 357. The long key can slide up and down within the keyway. Therefore, during operation, the hollow rotating shaft 357 does not move up and down, but only rotates. The inner driven gear fixed shaft 320, mounted within its inner bore, moves both up and down.

[0173] It should be noted that a hollow rotating shaft is also provided in the first embodiment, as shown in the lower right corner of FIG. 5 .

[0174] Similar to the arrangement of the outer ring chuck, multiple circles of inner ring chucks can be provided as needed. Moreover, the number of inner ring chucks in each circle can be the same or different, as shown in Figures 30 and 31.

[0175] According to this embodiment, as shown in Figure 14 , a plurality of arcuate grooves (or avoidance grooves) 380 are provided on the outer edge of the lower chuck body. Furthermore, the arcuate grooves 380 are recessed toward the lower chuck body. The provision of the arcuate grooves 380 prevents interference between the drawn ingot and the lower chuck body during the ingot pulling process.

[0176] According to the present application, one end of the upper shaft connecting seat 337 is connected to the upper shaft (or the upper shaft lifting device), and the other end of the upper shaft connecting seat 337 is connected to the chuck body upper cover 309 of the upper chuck body.

[0177] As shown in Figure 17, the rotating motor 314 is connected to the rotating reducer 315 (the rotating reducer 315 can also be omitted as needed). The rotating reducer 315 is connected to the power gear 355. The rotating motor 314 drives the rotating reducer 315. The rotating reducer 315 drives the power gear 355 to rotate. The power gear 355 engages with the power transmission gear provided on the driving gear drive shaft 321, so that the power gear 355 drives the power transmission gear 356 to rotate. The power transmission gear 356 is provided on the driving gear drive shaft 321, thereby driving the driving gear drive shaft 321 to rotate. In addition, the driving gear 317 is coaxially arranged with the power transmission gear 356, and they are both provided on the driving gear drive shaft 321. Therefore, the driving gear 317 provided on the driven gear drive shaft 321 rotates synchronously with the power transmission gear 356. The driving gear 317 engages with each outer ring driven gear 319 respectively and drives each outer ring driven gear 319 to rotate respectively. The outer ring driven gear 319 is sleeved onto the outer edge of the outer ring rotating shaft 311. This drives the outer ring rotating shaft 311 in rotation. The outer ring chuck 313 is mounted on the outer ring rotating shaft 311. Driven by the rotary motor 314, the outer ring chuck 313 of the upper chuck body rotates in conjunction with the rotation of the outer ring driven gears 319.

[0178] The lower end of the driving gear drive shaft 321 is sleeved with the driving gear 317 located in the lower chuck body. When the driving gear drive shaft 321 rotates, it drives the driving gear 317 in the lower chuck body to rotate synchronously. The driving gear 317 in the lower chuck body meshes with each inner ring driven gear 318, driving each inner ring driven gear 318 to rotate. The inner ring driven gear 318 is sleeved onto the hollow rotating shaft 357. The inner ring driven gear fixed shaft 320 is inserted into the inner hole in the middle of the hollow rotating shaft 357. Consequently, the inner ring driven gear 318 drives the inner ring driven gear fixed shaft 320 to rotate. The inner ring chuck 313 is mounted on the inner ring driven gear fixed shaft 320. Driven by the rotary motor 314, the inner ring chuck 313 of the lower chuck body rotates in conjunction with the rotation of the inner ring driven gears 318.

[0179] According to the present application, the driving gear drive shaft 321 can be an integrated structure or a split structure.

[0180] In addition, since the rotating motor 314 is arranged on one side below the upper chuck body, in order to improve the stability of the entire device during operation, a counterweight block 352 for balancing the weight of the rotating motor 314 is provided on the other side below the upper chuck body.

[0181] The lifting mechanism in the fifth embodiment differs from that in the first embodiment in that the lifting plate 308 of this embodiment is located between the upper chuck body and the lower chuck body. Other structures are substantially the same as those in the first embodiment and will not be described again.

[0182] As shown in Figures 14, 17 and 18, the lifting motor 303 is arranged on the support top plate 305. The support top plate connecting column 353 is used to fix the support top plate 305. The support top plate 305 is fixed above the lower chuck body by the guide column 306. The lifting plate 308 located between the upper chuck body and the lower chuck body is guided by the guide column 306 when it is lifted up and down. The guide column 306 not only fixes the support top plate 305, but also guides the lifting plate 308. The guide sleeve 354 is sleeved on the guide column 306 and can slide up and down on the guide column 306, reducing the friction between the guide column 306 and the lifting plate 308.

[0183] The power output shaft of the lift motor 303 is connected to the power input shaft of the lift reducer 304, and the power output shaft of the lift reducer 304 is connected to the lift screw 307. The lift motor 303 drives the lift reducer 304. The lift reducer 304 drives the lift screw 307 to rotate. The lift screw 307 drives the lift nut 316 up and down. This, in turn, drives the lift plate 308 connected to the lift nut 316, thereby causing the lift plate 308 to move up and down.

[0184] According to a preferred embodiment of the present application, the lifting motor 303, the lifting screw 307 and the lifting nut 316 can be provided as two sets, and the two sets are symmetrically arranged.

[0185] As shown in Figure 18, when the upper and lower chuck bodies do not require differential lifting, the upper shaft (or upper shaft lifting mechanism) drives the upper and lower chuck bodies to rise and fall at the same speed. When differential lifting is required, while the upper shaft drives the upper and lower chuck bodies to rise and fall at the same speed, the lifting motor 303 drives the lifting screw 307 to rotate. Similar to the structure of the first embodiment, the lifting screw 307 only rotates and does not lift. When the lifting screw 307 rotates, the lifting nut 316 that cooperates with it moves up and down along the lifting screw 307. Furthermore, the lifting nut 316 is connected to the lifting plate 308. Thus, the lifting motor 303 drives the lifting plate 308 up and down. Multiple inner ring driven gear fixed shafts 320 are connected to the bottom of the lifting plate 308. Therefore, the lifting plate 308 can drive the multiple inner ring driven gear fixed shafts 320 to rise and fall. This, in turn, drives the inner ring chuck attached to the inner ring driven gear fixed shafts 320 up and down. Through this arrangement, differential movement of the outer race chuck of the upper chuck body and the inner race chuck of the lower chuck body can be achieved.

[0186] According to a preferred embodiment of the present application, the structures of the upper and lower chuck bodies can be interchanged, except for their diameters. Specifically, the power gear 355 is positioned within the cavity of the lower chuck body. This arrangement also achieves the aforementioned function. However, this arrangement requires the lifting mechanism to be moved from the lower chuck body to the upper chuck body.

[0187] In this embodiment, the upper and lower chuck bodies move synchronously driven by the upper shaft. As needed, while the upper and lower chuck bodies move synchronously, the lifting mechanism can drive the inner chuck of the lower chuck body to move up and down, thereby achieving differential lifting of the outer chuck of the upper chuck body and the inner chuck of the lower chuck body.

[0188] 19 to 23 schematically illustrate the structure of a multi-turn seed crystal differential lifting device according to a sixth embodiment of the present application.

[0189] The difference between the multi-ring seed crystal differential lifting device according to the sixth embodiment of the present application and the multi-ring seed crystal differential lifting device according to the fifth embodiment is that: the diameter of the upper chuck body is the same as the diameter of the lower chuck body; and a through hole for the outer ring chuck to pass through is provided on the lower chuck body; the outer ring rotating shaft extends from the upper chuck body and passes through the through hole of the lower chuck body.

[0190] As shown in FIG18 , the outer ring rotation shaft of the upper chuck body (in FIG18 , it includes outer ring rotation shaft 311, upper rotational power transmission shaft section 358, and lower rotational power transmission shaft section 359) extends through a through-hole in the lower chuck body, located below the upper chuck body. Outer ring chuck 313 is located at the lower end of the outer ring rotation shaft, below the lower chuck body.

[0191] According to a preferred embodiment of the present application, the outer ring rotating shaft can be provided as an integral structure.

[0192] According to this embodiment, as shown in FIG. 18 , the outer ring rotating shaft is provided as a split structure, a fourth rotating shaft 311 , a rotating power transmission shaft upper section 358 and a rotating power transmission shaft lower section 359 .

[0193] The upper section 358 of the rotational power transmission shaft transmits the rotational power of the outer ring rotation shaft 311 to the lower section 359 of the rotational power transmission shaft. Alternatively, the upper section 358 of the rotational power transmission shaft and the lower section 359 of the rotational power transmission shaft may be integrally formed.

[0194] The rotational power transmission shaft lower section 359 transmits the rotational power of the rotational power transmission shaft upper section 358 to the outer race chuck 313 .

[0195] According to the fifth embodiment, the outer chuck of the upper chuck body of the multi-turn seed crystal differential lifting device must hold a long seed crystal, and the lower end of the seed crystal must extend downward to below the lower chuck body. The differential lifting device according to the sixth embodiment, however, avoids the use of long seed crystals, making it easier to process the crystal ingot and assemble it.

[0196] Next, a multi-turn seed crystal differential lifting device according to a seventh embodiment of the present application will be described with reference to Figures 24 to 29. Descriptions of the same components as those in the above embodiments will be omitted.

[0197] The seventh embodiment shares the same principle as the fourth embodiment, but differs in structure. Aside from the different method of power transmission between the upper and lower chuck bodies, the seventh embodiment employs the same configuration for the rotary motor 314 as the fifth embodiment. Specifically, whereas the fifth embodiment transmits rotational power via the driving gear drive shaft 321, the seventh embodiment transmits rotational power via the ball spline shaft 366. In this seventh embodiment, the ball spline shaft both transmits rotational power and enables the upward and downward sliding movement of the ball spline sliding seat 379.

[0198] As shown in the figure, the differential lifting device according to the seventh embodiment is provided with an upper chuck body, a lower chuck body, a driving gear 317, an outer ring driven gear 319, an inner ring driven gear 318, an outer ring rotating shaft 311, an inner ring driven gear fixed shaft 320, etc., and is also provided with an upper guide assembly 360, a lifting driven gear 361, an anti-slip ring 362, a fixing cylinder 363, a guide sleeve 364, a lower guide assembly 365, a ball spline shaft 366, a lifting motor support seat 367, an upper clamping nut 368, a lifting cylinder 369, a lifting driving gear 370, a hollow screw 371, a lower clamping nut 372, a thrust bearing 373, a gear center sleeve 374, a bearing lower pressure cover 375, a bearing sleeve 376, a bearing inner ring spacer 377, a bearing outer ring spacer 378, a ball spline shaft sliding seat 379 and an arc groove 380.

[0199] The upper guide assembly 360 and the lower guide assembly 365 are respectively connected to the guide wires provided in the furnace chamber. They are mainly used for guidance and can also prevent the entire lifting device from rotating and swinging. In this embodiment, the structure of the upper guide assembly and the lower guide assembly can adopt the same structure as the guide assembly in the fifth and sixth embodiments of the present application.

[0200] The lift driven gear 361 transmits power and is connected to the lift cylinder 369, for example, by bolts, rotating with the lift driven gear 361. The anti-slip ring 362 is used to prevent the bolts from falling out or failing when the lift driven gear 361 and lift cylinder 369 are bolted together. The anti-slip ring 362 is connected to the lift driven gear 361 and lift cylinder 369 by bolts.

[0201] According to one embodiment of the present application, an anti-slip groove is provided on the outer edge of the lifting cylinder 369. The anti-slip ring 362 is configured as two semicircular structures, with a boss provided on the inner edge of the anti-slip ring 362. The boss engages with the anti-slip groove. The anti-slip ring 362 prevents relative movement between the lifting driven gear 361 and the lifting cylinder 369.

[0202] The fixing cylinder 363 is fixedly connected to the chuck body upper cover 309 of the lower chuck body, for example, by bolts. The inner hole of the fixing cylinder 363 is connected to the lifting cylinder 369 through a bearing to play a supporting role.

[0203] The lower end of the guide post 306 is inserted into the guide sleeve 364. The guide sleeve 364 is used in conjunction with the guide post 306 to both guide and prevent the lower chuck body from rotating.

[0204] The ball spline shaft 366 not only transmits rotational power but also provides vertical guidance. The upper end of the ball spline shaft 366 is connected to the driving gear 317 in the upper chuck body and the power transmission gear 356 via a flat key. The power transmission gear 356 is spaced apart from the driving gear 317 and positioned below it. The power transmission gear 356 rotates synchronously with the driving gear 317.

[0205] The ball spline sliding seat 379 at the lower end of the ball spline shaft 366 is bolted to the gear center sleeve 374. The gear center sleeve 374 is connected to the driving gear 317 and is fixedly bolted to the ball spline shaft sliding seat 379. The gear center sleeve 374 rotates with the ball spline shaft sliding seat 379. The gear center sleeve 374 drives the driving gear 317 in the lower chuck body. A thrust bearing 373 is positioned beneath the gear center sleeve 374. The thrust bearing 373 is compressed by a bearing lower pressure cover 375. The bearing lower pressure cover 375 is bolted to the chuck body lower cover 310 of the lower chuck body.

[0206] The ball spline shaft sliding seat 379 and the ball spline shaft 366 are used in conjunction with each other, and both are standard parts.

[0207] The lower end of the lifting motor support seat 367 is fixed on the chuck body upper cover 309 of the lower chuck body for installing the lifting motor 303. The upper clamping nut 368 is used to clamp the bearing 327.

[0208] The lifting driving gear 370 is connected to the lifting motor 303 for transmitting power.

[0209] The upper end of the hollow screw 371 is bolted to the chuck body lower cover 310 of the upper chuck body. The outer edge of the hollow screw 371 is provided with external threads that engage with the internal threads in the central hole of the lift driven gear 361. During operation, the hollow screw 371 remains stationary, while the lift driven gear 361 rotates and moves up and down simultaneously.

[0210] The lower pressing nut 372 is used to compress the thrust bearing 373. The bearing lower pressure cover 375 is fixedly connected to the chuck body lower cover 310 of the lower chuck body by bolts.

[0211] The bearing sleeve 376 is fixedly connected to the chuck body cover 309 of the lower chuck body by bolts. Its lower end surface is connected to the gear center sleeve 374 via a thrust bearing 373. The bearing sleeve 376 is sleeved onto the outer edge of the ball spline shaft sliding seat 379, with the bearing 327 disposed therebetween. The primary function of the bearing sleeve 376 is to reduce the weight of the chuck body cover 309. If cost and weight are not a concern, the bearing sleeve 376 can be integrated with the chuck body cover 309.

[0212] The inner race spacer 377 supports the bearing 327. The outer race spacer 378 supports the bearing 327. An arcuate groove 380 is provided on the outer edge of the lower chuck body. This prevents the drawn ingot from interfering with the lower chuck body during the ingot drawing process.

[0213] According to this embodiment, the rotating motor 314 transmits power to the rotating reducer 315 (the rotating reducer 315 may be omitted as needed). The rotating reducer 315 transmits the rotational power to the power gear 355. The power gear 355 meshes with the power transmission gear 356 and drives the power transmission gear 356 to rotate. The power transmission gear 356 is keyed to the outer edge of the ball spline shaft 366, thereby driving the ball spline shaft 366 to rotate. The driving gear 317 is also sleeved on the outer edge of the ball spline shaft 366, that is, the driving gear 317 is coaxially arranged with the power transmission gear 356. Therefore, the driving gear 317 rotates synchronously with the power transmission gear 356. The driving gear 317 meshes with the outer ring driven gear 319. The outer ring driven gear 319 is connected to the outer ring rotating shaft 311 and drives the outer ring rotating shaft 311 to rotate. The outer ring rotating shaft 311 is connected to the outer ring chuck 313. Thus, by driving the rotary motor 314 , the outer ring chuck 313 of the upper chuck body can rotate along with the rotation of each outer ring driven gear 319 .

[0214] The lower end of the ball spline shaft 366 is connected to a driving gear 317 located within the lower chuck body. This driving gear 317 meshes with an inner driven gear 318. The inner driven gear 318 is connected to an inner driven gear fixing shaft 320, driving the inner driven gear fixing shaft 320 to rotate. The inner driven gear fixing shaft 320 is connected to the inner chuck 313. Consequently, driven by the rotary motor 314, the inner chuck 313 of the lower chuck body rotates in conjunction with the rotation of the inner driven gears 318.

[0215] Furthermore, according to this embodiment, the lifting mechanism includes a lifting motor 303 , a lifting driven gear 361 , a fixing cylinder 363 , a lifting cylinder 369 and a lifting driving gear 370 .

[0216] The fixed cylinder 363 is fixedly connected to the lower chuck body. The lifting cylinder 369 is connected to and inserted into the fixed cylinder 363. The lifting driven gear 361 is fixedly connected to the lifting cylinder 369. The lifting driving gear 370 is meshed with the lifting driven gear 361. The lifting motor 303 is connected to the lifting driving gear 370.

[0217] A hollow screw 371 is mounted within the lifting driven gear 361. The upper end of the hollow screw 371 is fixedly connected to the lower portion of the upper chuck body, while the lower end of the hollow screw 371 is inserted into the lifting cylinder 369. The lifting driven gear 361 can rotate around the hollow screw 371 and move up and down. The lifting cylinder 369 can rotate around the fixed cylinder 363, driving the fixed cylinder 363 up and down.

[0218] The lifting motor 303 drives the lifting driving gear 370. The lifting driving gear 370 drives the lifting driven gear 361. The lifting driven gear 361 is fixedly connected to the lifting cylinder 369. The outer edge of the hollow screw 371 is sleeved onto the inner hole of the lifting driven gear 361. Because the hollow screw 371 is fixed to the bottom of the upper chuck body by bolts, it only moves up and down with the upper chuck body. Because the hollow screw 371 is fixed, when the lifting driven gear 361 rotates around the hollow screw 371, the lifting driven gear 361 can be raised and lowered, thereby driving the lifting cylinder 369 to rise and fall.

[0219] The lifting cylinder 369 is connected to the fixed cylinder 363. The lower end of the fixed cylinder 363 is fixedly connected to the lower chuck body by a bolt. When the lifting cylinder 369 is lifted up and down, the lower chuck body can be driven to lift up and down by the fixed cylinder 363.

[0220] In order to prevent the lower chuck body from rotating when it is lifted up and down, a thrust bearing 373 is provided between the lifting cylinder 369 and the fixed cylinder 363 , thereby ensuring that the lifting cylinder 369 does not drive the fixed cylinder 363 to rotate when it rotates.

[0221] The lifting motor 303 is mounted on a lifting motor support 367. The lifting motor support 367 is mounted on the upper portion of the lower chuck body. A lifting driving gear 370 is mounted on the main shaft of the lifting motor 303. The lifting driving gear 370 engages with the lifting driven gear 361. The internal thread in the central inner hole of the lifting driven gear 361 is connected to the external thread on the hollow screw 371. The upper end of the hollow screw 371 is bolted to the lower portion of the upper chuck body, and the lower end of the hollow screw 371 is inserted into the lifting cylinder 369. The upper end of the lifting cylinder 369 is bolted to the lifting driven gear 361.

[0222] Preferably, in order to prevent the connection bolts between the lifting cylinder 369 and the lifting driven gear 361 from breaking and failing, an anti-slip ring 362 is provided on the lower end surface of the lifting driven gear 361 through bolts. The protrusion on the anti-slip ring 362 is clamped into the groove on the outer edge surface of the lifting cylinder 369.

[0223] The lifting cylinder 369 is inserted into the fixed cylinder 363, and the lower end of the fixed cylinder 363 is fixed to the lower chuck body by bolts. After the lifting cylinder 369 is connected to the fixed cylinder 363, the lifting cylinder 369 can rotate around the fixed cylinder 363 and drive the fixed cylinder 363 to move up and down.

[0224] Specifically, according to one embodiment of the present application, an annular stop step is provided on the inner edge of the inner bore of the fixed cylinder 363. A bearing 327 is positioned above the annular stop step. A bearing inner race spacer 377 and a bearing outer race spacer 378 are provided on the inner and outer sides of the bearing 327, respectively. Another bearing 327 is also positioned on the inner and outer race spacers 377 and 378. The upper surface of the upper bearing 327 is compressed by an upper compression nut 368. The outer diameter of the upper compression nut 368 is larger than the diameter of the inner bore of the fixed cylinder 363. The lower surface of the upper compression nut 368 is located on the upper end surface of the fixed cylinder 363 and does not contact the upper end surface of the fixed cylinder 363. Furthermore, the internal threads of the upper compression nut 368 are threadedly engaged with the external threads on the outer edge of the lifting cylinder 369. This structure ensures that the upper compression nut 368 rotates with the lifting cylinder 369 while compressing the inner race of the bearing 327.

[0225] An outwardly protruding annular boss 382 is provided on the outer edge surface of the lifting cylinder 369 below the annular limiting step 381 of the inner hole of the fixed cylinder 363. A thrust bearing 373 is provided between the annular boss 382 and the annular limiting step 381. A thrust bearing 373 (i.e., a plane bearing) is also provided below the annular boss 382. The lower thrust bearing 373 located below is clamped by a lower clamping nut 372. The external thread on the outer edge surface of the lower clamping nut 372 is threadedly engaged with the internal thread provided at the lower part of the inner hole of the fixed cylinder 363. During operation, when the lifting cylinder 369 moves upward, the thrust bearing 373 located above is subjected to axial force, and when the lifting cylinder 369 moves downward, the thrust bearing 373 located below is subjected to axial force.

[0226] According to a preferred embodiment of the present application, a bearing sleeve 376 is fixed to the lower chuck body upper cover 309 by bolts. A ball spline shaft sliding seat 379 is inserted into the bearing sleeve 376, and a bearing 327 is provided between the bearing sleeve 376 and the ball spline shaft sliding seat 379 to ensure that the ball spline shaft sliding seat 379 rotates within the bearing sleeve 376.

[0227] The below of ball spline shaft sliding seat 379 is connected to gear center sleeve 374 by bolt. Gear center sleeve 374 rotates and rises and falls synchronously with ball spline shaft sliding seat 379. Drive gear 317 is sleeved on the outer edge surface of gear center sleeve 374.

[0228] During operation, the ball spline shaft 366 drives the ball spline shaft sliding seat 379 to rotate. The ball spline shaft sliding seat 379 drives the gear center sleeve 374 to rotate. The gear center sleeve 374 drives the driving gear 317 to rotate together.

[0229] The driving gear 317 meshes with the inner ring driven gear 318. The inner ring driven gear 318 is connected to the inner ring driven gear fixing shaft 320. The inner ring driven gear fixing shaft 320 is connected to the inner ring chuck 313.

[0230] An upper thrust bearing 373 is disposed between the bearing sleeve 376 and the gear center sleeve 374. A bearing lower gland 375 is disposed below the gear center sleeve 374. The bearing lower gland 375 is bolted to the underside of the lower chuck body. A lower thrust bearing 373 is disposed between the bearing lower gland 375 and the gear center sleeve 374. During operation, when the lower chuck body moves upward, the upper thrust bearing 373 bears axial force; when the lower chuck body moves downward, the lower thrust bearing 373 bears axial force.

[0231] In the fifth and sixth embodiments, when the upper and lower chuck bodies move synchronously, the multi-turn seed crystal differential lifting device can use a lifting mechanism to drive the outer chuck of the upper chuck body or the inner chuck of the lower chuck body to move upward and downward, thereby achieving differential lifting of the outer chuck of the upper chuck body and the inner chuck of the lower chuck body. The seventh embodiment of the present application differs from the fifth and sixth embodiments in that, in the seventh embodiment, the lifting mechanism drives the entire lower chuck body to move upward and downward. Therefore, in the seventh embodiment, the upper and lower chuck bodies can move relative to each other, while in the fifth and sixth embodiments, the upper and lower chuck bodies do not move relative to each other. According to the present application, the lifting mechanism for lifting the crystal ingot clamped by the chuck is not limited to the above structure; any structure that can achieve lifting of the crystal ingot clamped by the chuck is applicable. Furthermore, according to the present application, the lifting structure can be located above or below the seed crystal clamping device.

[0232] The following describes a process of pulling a crystal rod using the artificial crystal pulling device or artificial crystal furnace of the present application.

[0233] The raw materials are placed in the crucible 13 in the crystal growth furnace, the power is turned on, and the heater 11 heats the crucible 13. After the heater 11 melts the silicon material in the crucible 13 into a melt 12, the upper shaft lifting device drives the differential lifting device 3 to descend, and the lower end of the seed crystal clamped on the differential lifting device 3 passes through the drawing hole on the crystal cooling mechanism 8 and contacts the melt 12 in the crucible 13. After the lower end of the seed crystal melts and merges with the melt 12, the differential lifting device 3 is slowly lifted, and the seed crystal is slowly driven by the differential lifting device 3 to rise. At this time, the melt rises together with the seed crystal. When the melt moves upward with the seed crystal and passes through the crystal drawing hole on the crystal cooling mechanism 8, it will gradually begin to crystallize as the temperature decreases.

[0234] During the drawing process, the diameter measuring instrument 7 measures the diameter of at least one newly drawn crystal ingot 4 on the outer or inner ring in real time. If the diameter of the crystal ingot 4 changes, the control device controls the lifting mechanism in the differential lifting device 3 to cause the inner and outer ring chucks (e.g., the inner and outer ring chucks in the first and third embodiments, and the inner and outer ring chucks of the inner and outer ring chuck bodies in the second and fourth embodiments) to move relative to each other, thereby achieving a speed difference between the inner and outer ring seed crystals.

[0235] At this time, the melt 12 rises along with the seed crystal to form a new group of columnar crystals. The differential lifting device 3 drives the seed crystal to rise slowly, and a finished columnar crystal of the required length can be formed.

[0236] According to the present application, the diameter of the crystal rod can be measured by the diameter measuring instrument 7, or it can be observed by the operator visually. When the operator visually observes that the diameter of the crystal rod changes, the purpose of adjusting the diameter of the crystal rod can be achieved by manually inputting the rising or falling speed of the lifting mechanism.

[0237] According to the present application, the pulling speed difference of the inner and outer ring seed crystals is achieved by making the inner and outer ring seed crystals move relative to each other, thereby achieving the diameter of the pulled crystal rod meeting the use requirements.

[0238] The foregoing description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations of the present invention are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention are intended to be within the scope of protection of the present invention.

Claims

1. A multi-ring seed crystal differential lifting device for pulling artificial crystals, characterized in that: The multi-turn seed crystal differential lifting device comprises: A seed crystal clamping mechanism, wherein the seed crystal clamping mechanism has a multi-circle clamping head for clamping the seed crystal; At least one lifting mechanism, the lifting mechanism drives the at least one circle of chucks to perform lifting motion; and The control device controls the speed of the at least one lifting mechanism based on the diameter change of at least one crystal rod among the crystal rods generated by each circle of seed crystals clamped by the seed crystal clamping mechanism.

2. The multi-turn seed crystal differential lifting device according to claim 1, characterized in that: The multi-turn seed crystal differential lifting device further comprises: a rotating mechanism, and the rotating mechanism is used to drive each chuck of the multi-turn chuck to rotate.

3. The multi-turn seed crystal differential lifting device according to claim 2, characterized in that: The seed crystal clamping mechanism further comprises a chuck body, wherein the chuck body comprises a chuck body upper cover and a chuck body lower cover, and a cavity is formed between the chuck body upper cover and the chuck body lower cover.

4. The multi-turn seed crystal differential lifting device according to claim 3, characterized in that: The rotating mechanism includes an inner ring rotating shaft and an outer ring rotating shaft located at the outer edge of the inner ring rotating shaft, and the lifting mechanism includes a lifting plate connected to at least one of the inner ring rotating shaft and the outer ring rotating shaft, and the lifting plate is used to drive at least one of the inner ring rotating shaft and the outer ring rotating shaft to perform lifting and lowering movements.

5. The multi-turn seed crystal differential lifting device according to claim 4, characterized in that: The lifting mechanism also includes a lifting motor providing a power source, a lifting screw connected to the lifting motor, and a lifting nut sleeved on the outer edge surface of the lifting screw and connected to the lifting plate, wherein the lifting nut can move along the lifting screw.

6. The multi-turn seed crystal differential lifting device according to claim 4, characterized in that: The lifting mechanism comprises a roller mechanism connected to the lifting plate.

7. The multi-turn seed crystal differential lifting device according to claim 5 or 6, characterized in that: The lifting mechanism also includes: a guide column, which is arranged at the upper end of the upper cover of the chuck body; and a support top plate, which is arranged at the upper end of the guide column, wherein the lifting plate is arranged between the support top plate and the upper cover of the chuck body, and is provided with a guide hole for the guide column to pass through.

8. The multi-turn seed crystal differential lifting device according to claim 2, characterized in that: The seed crystal clamping mechanism includes a hollow outer ring chuck body and a hollow inner ring chuck body arranged in the middle inner hole of the outer ring chuck body, the outer ring chuck body is provided with an outer ring chuck for clamping the seed crystal, the inner ring chuck body is provided with an inner ring chuck for clamping the seed crystal, and the outer ring chuck body and the inner ring chuck body are arranged to be able to perform relative lifting and lowering movements.

9. The multi-turn seed crystal differential lifting device according to claim 8, characterized in that: The first rotating device of the rotating mechanism drives the outer race chuck to rotate, and the second rotating device of the rotating mechanism drives the inner race chuck to rotate.

10. The multi-turn seed crystal differential lifting device according to claim 8 or 9, characterized in that: The lifting mechanism includes a first lifting device connected to the inner ring chuck body and driving the inner ring chuck to rise and fall, and a second lifting device connected to the outer ring chuck body and driving the outer ring chuck to rise and fall.

11. The multi-turn seed crystal differential lifting device according to claim 8 or 9, characterized in that: The outer ring chuck body is configured as a hollow circular structure, and a circle of first rotating shaft through holes is provided on the outer ring chuck body, a first rotating shaft is provided in each of the first rotating shaft through holes, one of the first rotating shafts is connected to a power source, an outer ring gear is provided on the outer edge surface of the first rotating shaft, and adjacent outer ring gears are meshed with each other.

12. The multi-turn seed crystal differential lifting device according to claim 8 or 9, characterized in that: The inner ring chuck body is configured as a hollow circular structure, a middle rotating shaft through hole is provided in the middle of the inner ring chuck body, and a circle of second rotating shaft through holes is provided on the periphery of the middle rotating shaft through hole, a driving shaft connected to a power source is provided in the middle rotating shaft through hole, a second rotating shaft is provided in each of the second rotating shaft through holes, a driving gear is provided on the outer edge surface of the driving shaft, and driven gears are respectively provided on the outer edge surface of the second rotating shaft, and each of the driven gears is meshed with the driving gear.

13. The multi-turn seed crystal differential lifting device according to claim 8 or 9, characterized in that: The inner ring chuck body is configured as a hollow circular structure, a circle of third rotating shaft through holes is configured in the inner ring chuck body, a third rotating shaft is configured in each of the third rotating shaft through holes, one of the third rotating shafts is connected to a power source, an inner ring gear is configured on the outer edge surface of the third rotating shaft, and adjacent inner ring gears are meshed with each other.

14. The multi-turn seed crystal differential lifting device according to claim 4, characterized in that: The lifting mechanism comprises: a nut arranged on the lifting plate; and a rotating cylinder connected to the nut via a thread arranged on an outer edge surface, and the rotating cylinder is connected to a power source.

15. The multi-turn seed crystal differential lifting device according to claim 14, characterized in that: The lifting mechanism further includes: a guide column, which is arranged to be accommodated in the guide hole of the lifting plate; and a supporting top plate, which is arranged at the upper end of the guide column and is located above the rotating cylinder.

16. The multi-turn seed crystal differential lifting device according to claim 10, characterized in that: The first lifting device includes: an inner ring chuck body lifting shaft, a first end of which is connected to the inner ring chuck body; a first lifting plate, the first lifting plate is connected to the second end of the inner ring chuck body lifting shaft; a first lifting nut, which is connected to the first lifting plate; and a first lifting screw, the first lifting nut is sleeved on the first lifting screw and moves along the first lifting screw, and the first lifting screw is connected to a first power source.

17. The multi-turn seed crystal differential lifting device according to claim 16, characterized in that: The second lifting device includes: an outer ring chuck body lifting shaft, a first end of the outer ring chuck body lifting shaft is connected to the outer ring chuck body; a second lifting plate, the second lifting plate is connected to the second end of the outer ring chuck body lifting shaft; a second lifting nut, which is connected to the second lifting plate; and a second lifting screw, the second lifting nut is sleeved on the second lifting screw and moves along the second lifting screw, and the second lifting screw is connected to a second power source.

18. The multi-turn seed crystal differential lifting device according to claim 17, characterized in that: The outer ring chuck body lifting shaft has a hollow structure, the inner ring chuck body lifting shaft is arranged in the inner hole of the outer ring chuck body lifting shaft, and the first part of the inner ring chuck body lifting shaft passes through the outer ring chuck body lifting shaft and is located in the hollow structure of the outer ring chuck body lifting shaft, and the second part of the inner ring chuck body lifting shaft is located above the outer ring chuck body lifting shaft.

19. The multi-turn seed crystal differential lifting device according to claim 2, characterized in that: The seed crystal clamping mechanism comprises an upper chuck body and a lower chuck body located below the upper chuck body, and an outer ring chuck is arranged on the upper chuck body, and an inner ring chuck is arranged on the lower chuck body.

20. The multi-turn seed crystal differential lifting device according to claim 19, characterized in that: The upper chuck body and the lower chuck body respectively include a chuck body upper cover and a chuck body lower cover, and a cavity is formed between the chuck body upper cover and the chuck body lower cover.

21. The multi-turn seed crystal differential lifting device according to claim 19, characterized in that: The lifting mechanism drives the inner ring chuck to perform lifting motion.

22. The multi-turn seed crystal differential lifting device according to claim 21, characterized in that: The lifting mechanism comprises a lifting plate arranged between the upper chuck body and the lower chuck body, a plurality of inner ring driven gear fixing shafts are arranged on the lifting plate, and the inner ring chuck is arranged on the inner ring driven gear fixing shafts.

23. The multi-turn seed crystal differential lifting device according to claim 22, characterized in that: The lifting mechanism also includes a lifting motor providing a power source, a lifting screw connected to the lifting motor, and a lifting nut sleeved on the outer edge surface of the lifting screw and connected to the lifting plate, wherein the lifting nut can move along the lifting screw.

24. The multi-turn seed crystal differential lifting device according to any one of claims 19 to 23, characterized in that: The diameter of the upper chuck body is greater than that of the lower chuck body, and a plurality of arc-shaped grooves recessed toward the lower chuck body are arranged on the outer edge surface of the lower chuck body.

25. The multi-turn seed crystal differential lifting device according to claim 24, characterized in that: The multi-ring seed crystal differential lifting device also includes an outer ring rotating shaft extending from the upper chuck body and located above the lower chuck body, and the outer ring chuck is arranged on the outer ring rotating shaft.

26. The multi-turn seed crystal differential lifting device according to any one of claims 19 to 23, characterized in that: The diameter of the upper chuck body is the same as that of the lower chuck body, and the lower chuck body is provided with a through hole for the outer ring chuck to pass through.

27. The multi-turn seed crystal differential lifting device according to claim 26, characterized in that: The multi-ring seed crystal differential lifting device further comprises an outer ring rotating shaft extending from the upper chuck body through the through hole of the lower chuck body, and the outer ring chuck is arranged on the outer ring rotating shaft.

28. The multi-turn seed crystal differential lifting device according to claim 27, characterized in that: The outer ring rotating shaft is formed as an integral structure.

29. The multi-turn seed crystal differential lifting device according to claim 27, characterized in that: The outer ring rotating shaft includes a fourth rotating shaft disposed in the upper chuck body and a lower section of a rotating power transmission shaft connected to the fourth rotating shaft and passing through a through hole of the lower chuck body.

30. The multi-turn seed crystal differential lifting device according to claim 29, characterized in that: The outer ring rotating shaft also includes an upper section of a rotating power transmission shaft connected between the fourth rotating shaft and the lower section of the rotating power transmission shaft, wherein the upper section of the rotating power transmission shaft transmits the rotating power of the fourth rotating shaft to the lower section of the rotating power transmission shaft.

31. The multi-turn seed crystal differential lifting device according to claim 19 or 20, characterized in that: The lifting mechanism drives one of the upper chuck body and the lower chuck body to move up and down.

32. The multi-turn seed crystal differential lifting device according to claim 31, characterized in that: The lifting mechanism includes: a fixed cylinder fixedly connected to the lower chuck body; a lifting cylinder connected to the fixed cylinder and inserted into the fixed cylinder, the lifting cylinder can rotate in the fixed cylinder and drive the fixed cylinder to lift up and down, and the fixed cylinder does not rotate with the lifting cylinder; a lifting driven gear fixedly connected to the lifting cylinder; a lifting active gear meshingly connected to the lifting driven gear; and a hollow screw, the hollow screw is arranged in the lifting driven gear, and the upper end of the hollow screw is fixedly connected to the bottom of the upper chuck body, the lower end of the hollow screw is inserted into the lifting cylinder, and the lifting driven gear can rotate and lift up and down around the hollow screw.

33. The multi-turn seed crystal differential lifting device according to claim 32, characterized in that: An annular limiting step is arranged on the inner edge surface of the inner hole of the fixing cylinder, an annular boss protruding outward is arranged on the outer edge surface of the lifting cylinder, and a bearing is arranged between the annular boss and the annular limiting step.

34. The multi-turn seed crystal differential lifting device according to any one of claims 3 to 7, characterized in that: The chuck body is provided with a plurality of chuck circles, and the number of chuck circles of two adjacent chuck circles in the plurality of chuck circles is the same.

35. The multi-turn seed crystal differential lifting device according to any one of claims 19 to 23, characterized in that: The upper chuck body and / or the lower chuck body are provided with multiple circles of chucks, and the numbers of the chucks in two adjacent circles of the multiple circles of chucks are the same.

36. The multi-turn seed crystal differential lifting device according to any one of claims 3 to 7, characterized in that: The chuck body is provided with a plurality of chuck circles, and the numbers of chuck circles of two adjacent chuck circles in the plurality of chuck circles are different.

37. The multi-turn seed crystal differential lifting device according to any one of claims 19 to 23, characterized in that: The upper chuck body and / or the lower chuck body are provided with multiple circles of chucks, and the numbers of chucks in two adjacent circles of the multiple circles of chucks are different.

38. An artificial crystal furnace for pulling artificial crystals, the artificial crystal furnace comprising a multi-ring seed crystal differential lifting device according to any one of claims 1 to 37.

39. A method for differentially lifting multiple rings of seed crystals in an artificial crystal furnace, characterized in that: The method comprises: measuring the diameter of at least one crystal rod of each ring of crystal rods generated by multiple rings of seed crystals, and determining whether the diameter changes; and The lifting speed of at least one lifting mechanism is adjusted according to the measured diameter change of at least one crystal rod in each ring of crystal rods, wherein the lifting mechanism is connected to at least one seed crystal clamping mechanism that clamps one ring of seed crystals in the multiple rings of seed crystals to drive at least one ring of chucks of the seed crystal clamping mechanism to perform lifting and lowering movements.

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