Substrate processing device

Abstract

This substrate processing device processes a substrate. The substrate processing device includes a plurality of pipes. Each of the plurality of pipes has an inner surface and an outer surface. A fluid circulates on the inside of the inner surface of each of the plurality of pipes. The plurality of pipes include at least one virgin material pipe and one recycled material pipe. The virgin material pipe contains a virgin material of a fluororesin. The recycled material pipe contains a recycled material of a fluororesin. The virgin material pipe and / or the recycled material pipe is subjected to marking and / or coloring for identifying the virgin material pipe and the recycled material pipe.

Description

Substrate Processing Equipment

[0001] The present invention relates to a substrate processing apparatus.

[0002] A substrate processing apparatus includes pipes for circulating a processing liquid and pipes for circulating a gas. The pipes for circulating a processing liquid are made of a fluororesin molded product (see, for example, Patent Document 1). Of the pipes for circulating a gas, the pipes arranged in a chemical liquid atmosphere are made of a fluororesin molded product.

[0003] Japanese Patent Application Laid-Open No. 2020-155649

[0004] However, there is a stronger demand than ever before for the conservation of environmental resources. Because the raw materials for fluororesin are natural products and the amount of these resources is limited, there is also a need to conserve the raw materials (environmental resources) used for fluororesin.

[0005] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a substrate processing apparatus that can save environmental resources.

[0006] According to one aspect of the present invention, a substrate processing apparatus processes a substrate. The substrate processing apparatus includes a plurality of pipes. Each of the plurality of pipes has an inner surface and an outer surface. A fluid flows inside the inner surface of each of the plurality of pipes. The plurality of pipes includes at least one virgin material pipe and one recycled material pipe. The virgin material pipe contains a virgin material of fluororesin. The recycled material pipe contains a recycled material of fluororesin. At least one of the virgin material pipe and the recycled material pipe is marked and / or colored to distinguish between the virgin material pipe and the recycled material pipe.

[0007] In one embodiment, at least one of the virgin material pipe and the recycled material pipe has a marking portion between the inner surface and the outer surface, and the marking portion is provided with a marking for distinguishing between the virgin material pipe and the recycled material pipe.

[0008] In one embodiment, the substrate processing apparatus further includes a substrate processing unit. The substrate processing unit performs substrate processing on the substrate. The substrate processing unit has a chamber that accommodates the substrate. The at least one virgin material pipe includes a pipe disposed within the chamber. The at least one recycled material pipe includes a pipe disposed outside the chamber.

[0009] In one embodiment, the at least one virgin material pipe includes a liquid supply pipe that supplies a liquid to the substrate processing unit, a portion of the liquid supply pipe being disposed inside the chamber and another portion of the liquid supply pipe being disposed outside the chamber.

[0010] In one embodiment, the substrate processing apparatus further includes a fluid cabinet. The fluid cabinet contains a liquid to be supplied to the substrate processing unit. The at least one virgin material pipe includes a recovery pipe. The recovery pipe circulates the liquid discharged from the substrate processing unit to the fluid cabinet. At least a portion of the recovery pipe is disposed outside the chamber.

[0011] In one embodiment, the at least one regenerant pipe includes a drain pipe, through which liquid discharged from the substrate processing unit flows, and the drain pipe is disposed outside the chamber.

[0012] In one embodiment, the plurality of pipes include a liquid supply pipe that supplies a liquid to the substrate processing unit. The substrate processing unit further includes an on-off valve and a fluid box. The on-off valve is provided on the liquid supply pipe. The on-off valve controls the flow of the liquid through the liquid supply pipe and the stop of the flow. The fluid box accommodates a portion of the liquid supply pipe and the on-off valve. The at least one regenerant pipe includes a gas pipe that flows a gas. At least a portion of the gas pipe is disposed within the fluid box.

[0013] In one embodiment, the marking portion further indicates the type of the fluid flowing through the virgin material pipe or the recycled material pipe.

[0014] In one embodiment, the marking portion further indicates a location where the virgin material piping or the recycled material piping is to be placed.

[0015] In one embodiment, the marking portion further indicates the flow direction of the fluid flowing through the virgin material pipe or the recycled material pipe.

[0016] In one embodiment, the virgin material pipe is colored.

[0017] In one embodiment, at least one of the virgin material pipe and the recycled material pipe is colored black.

[0018] In one embodiment, at least one of the virgin material pipe and the recycled material pipe includes the colored translucent portion.

[0019] In one embodiment, the translucent portion is colored black.

[0020] The substrate processing apparatus according to the present invention can conserve environmental resources.

[0021] 2A is a schematic diagram of a substrate processing apparatus according to an embodiment of the present invention; FIG. 2B is a diagram showing a recycled material pipe provided in a substrate processing apparatus according to an embodiment of the present invention; FIG. 2C is a diagram showing a cross section of a recycled material pipe provided in a substrate processing apparatus according to an embodiment of the present invention; FIG. 2C is a cross section showing a schematic configuration of a substrate processing unit included in a substrate processing apparatus according to an embodiment of the present invention; FIG. 5A is a diagram showing an example of a recycled material pipe, and FIG. 5B is a diagram showing another example of a recycled material pipe; FIG. 6A is a diagram showing a first modified example of a marking unit, FIG. 6B is a diagram showing a second modified example of a marking unit, and FIG. 6C is a diagram showing a third modified example of a marking unit; FIG. 7A is a diagram showing an example in which the entire recycled material pipe or virgin material pipe is colored and a marking unit is formed, and FIG. 7B is a diagram showing an example in which the entire recycled material pipe or virgin material pipe is colored and a marking unit is not formed.

[0022] Hereinafter, an embodiment of a substrate processing apparatus according to the present invention will be described with reference to the drawings (FIGS. 1 to 7B). However, the present invention is not limited to the following embodiment, and can be implemented in various forms without departing from the spirit of the present invention. Note that where explanations are redundant, they may be omitted as appropriate. Furthermore, in the drawings, the same or equivalent parts are designated by the same reference numerals, and explanations thereof will not be repeated.

[0023] The "substrate" to be processed in the substrate processing apparatus according to the present invention can be a semiconductor wafer, a glass substrate for a photomask, a glass substrate for a liquid crystal display, a glass substrate for a plasma display, a substrate for an FED (Field Emission Display), a substrate for an optical disk, a substrate for a magnetic disk, or a substrate for a magneto-optical disk. The following description of an embodiment of the present invention will be primarily focused on a case where a disk-shaped semiconductor wafer is the substrate to be processed. However, the substrate processing apparatus according to the present invention can be similarly applied to various substrates other than the semiconductor wafers described above. Furthermore, the shape of the substrate is not limited to a disk shape, and the substrate processing apparatus according to the present invention can be applied to substrates of various shapes.

[0024] FIG. 1 is a schematic diagram of a substrate processing apparatus 100 according to the present embodiment. More specifically, FIG. 1 is a schematic plan view of the substrate processing apparatus 100 according to the present embodiment. The substrate processing apparatus 100 processes substrates W. The substrate processing apparatus 100 according to the present embodiment is a single-wafer processing apparatus, and processes the substrates W one by one using a processing liquid. The substrate processing apparatus 100 is, for example, a cleaning apparatus or an etching apparatus.

[0025] As shown in FIG. 1, the substrate processing apparatus 100 includes a plurality of substrate processing units 300, a fluid cabinet 410, a plurality of fluid boxes 420, a plurality of load ports LP, an indexer robot IR, a center robot CR, and a control device 400.

[0026] Each load port LP accommodates a plurality of stacked substrates W. The indexer robot IR transports substrates W between the load port LP and the center robot CR. The center robot CR transports substrates W between the indexer robot IR and the substrate processing unit 300. Note that a placement stage (path) on which substrates W are temporarily placed may be provided between the indexer robot IR and the center robot CR, and the apparatus may be configured so that substrates W are indirectly transferred between the indexer robot IR and the center robot CR via the placement stage.

[0027] The substrate processing units 300 form a plurality of towers TW (four towers TW in FIG. 1 ). The towers TW are arranged to surround the center robot CR in a plan view. Each tower TW includes a plurality of substrate processing units 300 (three substrate processing units 300 in FIG. 1 ) stacked one above the other.

[0028] The fluid cabinet 410 contains a fluid. The fluid includes a processing liquid. Alternatively, the fluid may include a processing liquid and a gas, or may include only a gas. In this embodiment, the fluid cabinet 410 contains a processing liquid and a gas. The gas includes, for example, an inert gas. The inert gas is, for example, nitrogen gas. The processing liquid is not particularly limited as long as it is a liquid that comes into contact with the substrate W. The processing liquid may include, for example, a chemical liquid and a rinse liquid.

[0029] The chemical solution includes, for example, dilute hydrofluoric acid (DHF), hydrofluoric acid (HF), hydronitric acid (a mixture of hydrofluoric acid and nitric acid (HNO3)), buffered hydrofluoric acid (BHF), ammonium fluoride, HFEG (a mixture of hydrofluoric acid and ethylene glycol), phosphoric acid (H3PO4), sulfuric acid, acetic acid, nitric acid, hydrochloric acid, ammonia water, hydrogen peroxide water, organic acids (e.g., citric acid, oxalic acid), organic alkalis (e.g., TMAH: tetramethylammonium hydroxide), sulfuric acid hydrogen peroxide water mixture (SPM), ammonia hydrogen peroxide water mixture (SC1), hydrochloric acid hydrogen peroxide water mixture (SC2), isopropyl alcohol (IPA), methanol, ethanol, hydrofluoroether (HFE), surfactants, or corrosion inhibitors.

[0030] The rinse liquid is, for example, deionized water (DIW). In other words, the rinse liquid may be so-called "ultrapure water." However, the rinse liquid is not limited to deionized water. For example, the rinse liquid may be carbonated water, electrolytic ionized water, hydrogen water, ozone water, ammonia water, or diluted hydrochloric acid water (for example, hydrochloric acid water with a concentration of about 10 ppm to 100 ppm).

[0031] Each fluid box 420 corresponds to one of the multiple towers TW. The processing liquid and gas in the fluid cabinet 410 are supplied to all of the substrate processing units 300 included in the corresponding tower TW via one of the fluid boxes 420. In other words, the fluid cabinet 410 contains fluids to be supplied to the substrate processing units 300.

[0032] Each of the substrate processing units 300 performs substrate processing on the substrate W. In this embodiment, each of the substrate processing units 300 uses a processing liquid to process the substrate W. For example, each of the substrate processing units 300 performs an etching process or a cleaning process on the substrate W.

[0033] The control device 400 controls the operation of each part of the substrate processing apparatus 100. For example, the control device 400 controls the substrate processing unit 300, the load port LP, the indexer robot IR, and the center robot CR. The control device 400 includes a control unit 401 and a storage unit 402.

[0034] The control unit 401 controls the operation of each unit of the substrate processing apparatus 100 based on various information stored in the storage unit 402. The control unit 401 has, for example, a processor. The control unit 401 may have a CPU (Central Processing Unit) or an MPU (Micro Processing Unit) as the processor. Alternatively, the control unit 401 may have a general-purpose computing device or a dedicated computing device.

[0035] The storage unit 402 stores various types of information for controlling the operation of the substrate processing apparatus 100. For example, the storage unit 402 stores various types of data and various computer programs. The various types of data include recipe data. The recipe data indicates a recipe that defines the processing content, processing conditions, and processing procedure for the substrate W. Various setting values ​​are set in the recipe as processing conditions.

[0036] The storage unit 402 includes a main storage device. The main storage device includes, for example, a semiconductor memory. The storage unit 402 may further include an auxiliary storage device. The auxiliary storage device includes, for example, at least one of a semiconductor memory and a hard disk drive. The storage unit 402 may also include removable media.

[0037] Next, the recycled material pipe 2a and virgin material pipe 2b provided in the substrate processing apparatus 100 of this embodiment will be described with reference to Figures 2A to 2C. Figure 2A is a diagram showing the recycled material pipe 2a provided in the substrate processing apparatus 100 of this embodiment. Figure 2B is a diagram showing the virgin material pipe 2b provided in the substrate processing apparatus 100 of this embodiment.

[0038] As shown in Fig. 2A, the substrate processing apparatus 100 includes a recycled material pipe 2a. Furthermore, as shown in Fig. 2B, the substrate processing apparatus 100 includes a virgin material pipe 2b. The recycled material pipe 2a and the virgin material pipe 2b are tubular components that allow fluids to flow. Specifically, the recycled material pipe 2a allows processing liquid or gas to flow. Similarly, the virgin material pipe 2b allows processing liquid or gas to flow.

[0039] The recycled material pipe 2a contains a recycled fluororesin material. Specifically, the recycled material pipe 2a may be a molded tube manufactured using a recycled fluororesin material. In other words, the recycled material pipe 2a may be made of a recycled fluororesin material.

[0040] The virgin material pipe 2b contains virgin fluororesin material. Specifically, a molded tube manufactured using virgin fluororesin material may be used for the virgin material pipe 2b. In other words, the virgin material pipe 2b may be made of virgin fluororesin material. Note that virgin fluororesin material refers to new fluororesin.

[0041] The fluororesin is, for example, polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkoxyethylene copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), or tetrafluoroethylene-ethylene copolymer (ETFE). For example, recycled PFA material is used for the recycled material pipe 2a through which the treatment liquid flows. Recycled PFA or PTFE material is used for the recycled material pipe 2a through which the gas flows. Similarly, virgin PFA material is used for the virgin material pipe 2b through which the treatment liquid flows. Virgin PFA material or PTFE material is used for the virgin material pipe 2b through which the gas flows.

[0042] As shown in FIG. 2A , in this embodiment, the recycled material pipe 2a has a marking portion 30. The marking portion 30 includes a first marking 30a for distinguishing between the recycled material pipe 2a and the virgin material pipe 2b. In other words, the marking portion 30 is provided with a marking for distinguishing between the recycled material pipe 2a and the virgin material pipe 2b. That is, the recycled material pipe 2a is provided with a marking for distinguishing between the recycled material pipe 2a and the virgin material pipe 2b. More specifically, the recycled material pipe 2a is provided with a marking that allows the recycled material pipe 2a and the virgin material pipe 2b to be visually distinguished from each other.

[0043] The marking portion 30 may, for example, represent letters or numbers. Alternatively, the marking portion 30 may represent marks such as symbols, figures, pictograms, etc. FIG. 2A illustrates an example in which the first marking 30a is a letter indicating "recycled material." The marking portion 30 may be formed on the recycled material pipe 2a by, for example, laser processing. The dashed rectangle in FIG. 2A indicates an area including the marking portion 30. This is similar in other figures such as FIG. 2B. The same rectangle is an example of a boundary line surrounding the first marking 30a including one or more marks. Such a boundary line may be a line that can be identified visually, or may be a virtual line that does not actually exist. In the former case, the boundary line may or may not be part of the marking portion 30.

[0044] According to this embodiment, the recycled material pipe 2a is provided with markings for distinguishing between the recycled material pipe 2a and the virgin material pipe 2b. Therefore, it is possible to visually distinguish between the recycled material pipe 2a and the virgin material pipe 2b. As a result, for example, during assembly of the substrate processing apparatus 100, the possibility of erroneously installing the virgin material pipe 2b in a location where the recycled material pipe 2a should be installed can be reduced. Similarly, the possibility of erroneously installing the recycled material pipe 2a in a location where the virgin material pipe 2b should be installed can be reduced. Furthermore, during maintenance of the substrate processing apparatus 100, the possibility of erroneously replacing the recycled material pipe 2a with the virgin material pipe 2b can be reduced. Similarly, the possibility of erroneously replacing the virgin material pipe 2b with the recycled material pipe 2a can be reduced.

[0045] Note that because the fluororesin tube molded products used for the piping of the substrate processing apparatus 100 are transparent, it is difficult to visually distinguish between the recycled material pipe 2a and the virgin material pipe 2b. Therefore, if the recycled material pipe 2a is not marked to distinguish between the recycled material pipe 2a and the virgin material pipe 2b, there is a possibility that the virgin material pipe 2b will be mistakenly installed in a location where the recycled material pipe 2a should be installed during assembly of the substrate processing apparatus 100. Similarly, there is a possibility that the recycled material pipe 2a will be mistakenly installed in a location where the virgin material pipe 2b should be installed. Furthermore, there is a possibility that the recycled material pipe 2a will be mistakenly replaced with the virgin material pipe 2b during maintenance of the substrate processing apparatus 100. Similarly, there is a possibility that the virgin material pipe 2b will be mistakenly replaced with the recycled material pipe 2a.

[0046] As shown in Figure 2B, in this embodiment, the virgin material pipe 2b has a marking portion 30, similar to the recycled material pipe 2a. The marking portion 30 includes a first marking 30a. Therefore, the virgin material pipe 2b is marked to distinguish between the recycled material pipe 2a and the virgin material pipe 2b. Figure 2B illustrates an example in which the first marking 30a is a character indicating "virgin material."

[0047] According to this embodiment, both the recycled material pipe 2 a and the virgin material pipe 2 b are provided with markings for distinguishing between the recycled material pipe 2 a and the virgin material pipe 2 b, making it possible to more reliably distinguish between the recycled material pipe 2 a and the virgin material pipe 2 b by visual inspection.

[0048] 2C is a cross-sectional view of the recycled material pipe 2a provided in the substrate processing apparatus 100 of this embodiment. Hatching of the recycled material pipe 2a is omitted in FIG. 2C. As shown in FIG. 2C, the recycled material pipe 2a is a tubular member made of a single layer of fluororesin. The inner diameter D1 of the recycled material pipe 2a is, for example, 4 mm. The outer diameter D2 of the recycled material pipe 2a is, for example, 6 mm. The wall thickness of the recycled material pipe 2a is, for example, 1 mm. The recycled material pipe 2a has an inner surface 21 and an outer surface 22, and a fluid (processing liquid or gas) flows inside the inner surface 21. The configuration of the virgin material pipe 2b is similar to that of the recycled material pipe 2a, and therefore a description thereof will be omitted.

[0049] As shown in FIG. 2C , the recycled material pipe 2a has a marking portion 30 between the inner surface 21 and the outer surface 22. Therefore, the marking portion 30 is an inner marking. In other words, an inner marking is applied to the recycled material pipe 2a. The marking portion 30 (inner marking) may be formed, for example, by adjusting the focal position of the laser light between the inner surface 21 and the outer surface 22 during laser processing. Note that the marking portion 30 of the virgin material pipe 2b is also an inner marking, just like the recycled material pipe 2a.

[0050] According to this embodiment, the marking portion 30 is formed between the inner surface 21 and the outer surface 22. Therefore, compared to a pipe in which the marking portion 30 is formed on the inner surface 21, generation of particles can be suppressed.

[0051] Specifically, when the marking portion 30 is formed on the inner surface 21 by laser processing, carbides are generated on the inner surface 21. As a result, the carbides may be mixed into the fluid flowing inside the inner surface 21. Therefore, the fluid containing the carbides may come into contact with the substrate W, increasing the number of particles on the substrate W. In contrast, according to this embodiment, the marking portion 30 is formed between the inner surface 21 and the outer surface 22. Therefore, there is little possibility that the carbides generated by the laser processing will be mixed into the fluid flowing inside the inner surface 21. Therefore, an increase in the number of particles on the substrate W can be suppressed.

[0052] Furthermore, according to this embodiment, the possibility of fluid leakage from the joint connecting the recycled material pipe 2a to another recycled material pipe 2a can be reduced compared to when the marking portion 30 is formed on the outer surface 22. In other words, the sealing performance can be improved compared to a pipe having the marking portion 30 formed on the outer surface 22. Similarly, the sealing performance of the virgin material pipe 2b can also be improved.

[0053] Specifically, when the marking portion 30 is formed on the outer surface 22 by laser processing, irregularities are formed on the outer surface 22. As a result, irregularities may be formed on the outer surface 22 of one end of the pipe to be inserted into the fitting. If irregularities are formed on the outer surface 22 of one end of the pipe to be inserted into the fitting, there is a possibility that fluid will leak from the fitting through the irregularities. In contrast, according to this embodiment, the marking portion 30 is formed between the inner surface 21 and the outer surface 22. Therefore, since no irregularities are formed on the outer surface 22 of one end of the recycled material pipe 2a to be inserted into the fitting, the possibility of fluid leaking from the fitting can be reduced. Similarly, the possibility of fluid leaking from the fitting can be reduced for the virgin material pipe 2b.

[0054] Next, the substrate processing apparatus 100 of this embodiment will be described with reference to Fig. 3. Fig. 3 is a cross-sectional view schematically showing the configuration of a substrate processing section 300 included in the substrate processing apparatus 100 of this embodiment.

[0055] 3, the substrate processing apparatus 300 includes a chamber 301, an FFU (fan filter unit) 302, a spin chuck 3, a spin motor unit 4, a first nozzle 5, a nozzle moving unit 6, a liquid receiving unit 7, a blocking member 8, a first elevating unit 76, and a second elevating unit 85. The substrate processing apparatus 100 further includes a first processing liquid line 11L, a second processing liquid line 12L, a first gas line 14L, a recovery line 15L, a drain line 16L, and an exhaust line 17L.

[0056] The chamber 301 has a generally box-like shape and accommodates the spin chuck 3, the spin motor unit 4, the first nozzle 5, the nozzle moving unit 6, the liquid receiving unit 7, the blocking member 8, the first lifting unit 76, the second lifting unit 85, a portion of the first processing liquid line 11L, a portion of the second processing liquid line 12L, a portion of the first gas line 14L, a portion of the recovery line 15L, a portion of the drain line 16L, and a portion of the exhaust line 17L.

[0057] The substrate W is loaded into the chamber 301. Thus, the chamber 301 accommodates the substrate W. The substrate W is processed in the chamber 301.

[0058] The FFU 302 is disposed outside the chamber 301. The FFU 302 blows air toward the inner space of the chamber 301, generating a downflow within the chamber 301.

[0059] More specifically, the FFU 302 blows air from within a clean room in which the substrate processing apparatus 100 is installed toward the interior space of the chamber 301. Specifically, the FFU 302 has blades, an electric motor, and a filter. The blades rotate to draw in air from within the clean room and blow the drawn-in air toward the interior space of the chamber 301. The electric motor rotates the blades. The filter filters the air blown by the rotating blades. As a result, air purified by the filter is blown toward the interior space of the chamber 301.

[0060] The spin chuck 3 holds the substrate W in a horizontal position. As shown in Fig. 3, the spin chuck 3 may include a spin base 31 and a plurality of chuck members 32. The spin base 31 is substantially disk-shaped and supports the plurality of chuck members 32 in a horizontal position. The plurality of chuck members 32 are arranged on the periphery of the spin base 31. The plurality of chuck members 32 clamp the periphery of the substrate W. The plurality of chuck members 32 hold the substrate W in a horizontal position. The operation of the plurality of chuck members 32 is controlled by a control device 400 (control unit 401).

[0061] The spin motor unit 4 rotates the spin chuck 3 and the substrate W together around a first rotation axis AX1 extending in the vertical direction. The control device 400 (control unit 401) controls the rotation of the substrate W by the spin motor unit 4. More specifically, the first rotation axis AX1 passes through the center of the spin base 31. The multiple chuck members 32 are arranged so that the center of the substrate W faces the center of the spin base 31. Therefore, the substrate W rotates around the center of the substrate W.

[0062] 3, the spin motor unit 4 may have a motor body 41 and a shaft 42. The shaft 42 is coupled to the spin base 31. The motor body 41 rotates the shaft 42. As a result, the spin base 31 rotates. The operation of the motor body 41 is controlled by a control device 400 (control unit 401).

[0063] The first nozzle 5 ejects the chemical solution from a position above the substrate W held by the spin chuck 3 toward the upper surface of the rotating substrate W. As the chemical solution is ejected onto the upper surface of the rotating substrate W, a liquid film of the chemical solution is formed on the upper surface of the substrate W. As a result, the upper surface of the substrate W is treated with the chemical solution.

[0064] The first processing liquid line 11L supplies the chemical liquid to the first nozzle 5. As shown in FIG.

[0065] The first liquid supply pipe 111 is a tubular member through which a processing liquid (liquid) flows. The first liquid supply pipe 111 supplies the chemical liquid (liquid) to the substrate processing unit 300. More specifically, the first liquid supply pipe 111 flows the chemical liquid up to the first nozzle 5.

[0066] A portion of the first liquid supply pipe 111 is housed within the chamber 301. Another portion of the first liquid supply pipe 111 is housed in the fluid box 420 described with reference to Fig. 1. In other words, a portion of the first liquid supply pipe 111 is disposed within the chamber 301, and the other portion of the first liquid supply pipe 111 is disposed outside the chamber 301. In this embodiment, the virgin material pipe 2b described with reference to Figs. 2B and 2C is used for the first liquid supply pipe 111.

[0067] The first on-off valve 112 is disposed in the first liquid supply pipe 111. The first on-off valve 112 is housed in the fluid box 420 described with reference to FIG. 1 . The first on-off valve 112 is switchable between an open state and a closed state. The control device 400 (control unit 401) controls the opening and closing operation of the first on-off valve 112. The actuator of the first on-off valve 112 is, for example, a pneumatic actuator.

[0068] The first on-off valve 112 controls the flow and stop of the flow of the chemical liquid (liquid) through the first liquid supply pipe 111. In other words, the first on-off valve 112 controls the supply and stop of the supply of the chemical liquid to the first nozzle 5.

[0069] The control device 400 (controller 401) opens the first on-off valve 112 when supplying the chemical liquid to the substrate W. As a result, the chemical liquid flows through the first liquid supply pipe 111 toward the first nozzle 5, and is discharged from the first nozzle 5 toward the substrate W.

[0070] The control device 400 (control unit 401) closes the first on-off valve 112 when stopping the discharge of the chemical liquid from the first nozzle 5. As a result, the flow of the chemical liquid through the first liquid supply pipe 111 is stopped, and the discharge of the chemical liquid from the first nozzle 5 is stopped.

[0071] The nozzle moving unit 6 moves the first nozzle 5 along a horizontal plane. The nozzle moving unit 6 is controlled by the control device 400 (control unit 401). More specifically, the nozzle moving unit 6 moves the first nozzle 5 between a first retracted position and a processing position. The first retracted position is a position outside the spin chuck 3. For example, the first retracted position may be a position outside the liquid receiving unit 7. In this embodiment, the processing position is a position opposite the center of the substrate W. The first nozzle 5 ejects the chemical liquid from the processing position toward the substrate W.

[0072] 3, the nozzle movement unit 6 may have a nozzle arm 61, a nozzle base 62, and a nozzle movement mechanism 63. The nozzle base 62 extends vertically. A base end of the nozzle arm 61 is connected to the nozzle base 62. The nozzle arm 61 extends horizontally from the nozzle base 62. The nozzle arm 61 supports the first nozzle 5. The first nozzle 5 protrudes vertically downward from the nozzle arm 61.

[0073] The nozzle movement mechanism 63 rotates the nozzle base 62 in both forward and reverse directions about a second rotation axis AX2 extending vertically. As a result, the first nozzle 5 moves in the circumferential direction about the second rotation axis AX2. The nozzle movement mechanism 63 is controlled by the control device 400 (control unit 401). The actuator of the nozzle movement mechanism 63 may include, for example, an electric motor that can rotate in both forward and reverse directions and a reducer.

[0074] The blocking member 8 is positioned above the substrate W held by the spin chuck 3. A lower surface 81 of the blocking member 8 faces the upper surface of the substrate W held by the spin chuck 3. The lower surface 81 has, for example, a circular shape. The diameter of the lower surface 81 is equal to or greater than the diameter of the substrate W and smaller than the inner diameter of the liquid receiving portion 7. Hatching of the blocking member 8 is omitted in Figure 3.

[0075] The second lifting unit 85 raises and lowers the blocking member 8 between the second retracted position and the blocking position. The blocking position is lower than the second retracted position. Specifically, the blocking position is closer to the substrate W held by the spin chuck 3 than the second retracted position. Figure 3 shows the blocking member 8 positioned at the second retracted position.

[0076] When the blocking member 8 moves from the second retracted position to the blocking position, a processing space is formed by the liquid receiving portion 7 and the blocking member 8. The processing space is a space that is substantially isolated from the atmosphere outside the processing space. In other words, the processing space is a local space formed inside the chamber 301. The processing space is substantially isolated from the atmosphere inside the chamber 301.

[0077] The second lifting / lowering unit 85 is controlled by the control device 400 (control unit 401). The actuator of the second lifting / lowering unit 85 includes, for example, an electric motor that can rotate in both forward and reverse directions, and a ball screw mechanism.

[0078] 3 , the blocking member 8 has a second nozzle 82 and a third nozzle 83. The outlets of the second nozzle 82 and the third nozzle 83 open to a lower surface 81 of the blocking member 8. The outlets of the second nozzle 82 and the third nozzle 83 may be disposed at positions facing the center of the substrate W held by the spin chuck 3. The second nozzle 82 ejects a rinse liquid toward the upper surface of the substrate W. The third nozzle 83 ejects an inert gas. In this embodiment, the third nozzle 83 ejects nitrogen gas.

[0079] The second processing liquid line 12L supplies a rinse liquid to the second nozzle 82. As shown in FIG. 3 , the second processing liquid line 12L includes a second liquid supply pipe 121 and a second on-off valve 122. The second liquid supply pipe 121 supplies a rinse liquid (liquid) to the substrate processing unit 300. More specifically, the second liquid supply pipe 121 distributes the rinse liquid up to the second nozzle 82. In this embodiment, the virgin material pipe 2b described with reference to FIGS. 2B and 2C is used as the second liquid supply pipe 121. The configuration of the second processing liquid line 12L is substantially the same as that of the first processing liquid line 11L, and therefore a detailed description thereof will be omitted.

[0080] The first gas line 14L supplies an inert gas to the third nozzle 83. In this embodiment, the first gas line 14L supplies nitrogen gas to the third nozzle 83. As shown in FIG. 3 , the first gas line 14L includes a first gas pipe 141 and a third on-off valve 142. The first gas pipe 141 supplies an inert gas (gas) to the substrate processing unit 300. More specifically, the first gas pipe 141 distributes the inert gas (gas) up to the third nozzle 83. In this embodiment, the virgin material pipe 2b described with reference to FIGS. 2B and 2C is used for the first gas pipe 141. The configuration of the first gas line 14L is substantially the same as that of the first processing liquid line 11L, and therefore a detailed description thereof will be omitted.

[0081] The liquid receiving section 7 receives the chemical liquid discharged from the substrate W. The liquid receiving section 7 further receives the rinse liquid discharged from the substrate W. More specifically, the liquid receiving section 7 includes a first liquid receiving section 71 and a second liquid receiving section 72. The first liquid receiving section 71 is disposed inside the second liquid receiving section 72. The first liquid receiving section 71 receives the rinse liquid discharged from the substrate W. The second liquid receiving section 72 receives the chemical liquid discharged from the substrate W.

[0082] 3, the first liquid receiving portion 71 has a first guard portion 711 and a first cup portion 712. The second liquid receiving portion 72 has a second guard portion 721 and a second cup portion 722.

[0083] The first guard part 711 has a substantially cylindrical shape and surrounds the spin chuck 3 and the spin motor part 4, and is disposed around the spin chuck 3 and the spin motor part 4. The first guard part 711 receives the rinse liquid splashed from the substrate W as it rotates.

[0084] The first cup portion 712 forms an annular groove below the lower end of the first guard portion 711. The first cup portion 712 collects the rinse liquid that flows down from the inner circumferential surface of the first guard portion 711.

[0085] The second guard part 721 has a substantially cylindrical shape and surrounds the first guard part 711, and is disposed around the first guard part 711. The second guard part 721 receives the chemical solution splashed from the substrate W as it rotates.

[0086] The second cup portion 722 forms an annular groove below the lower end of the second guard portion 721. The second cup portion 722 collects the chemical solution that flows down from the inner circumferential surface of the second guard portion 721.

[0087] 3, the liquid receiving portion 7 further includes a third liquid receiving portion 73. The third liquid receiving portion 73 is a guard portion. A detailed description of the third liquid receiving portion 73 will be omitted.

[0088] The first lifting / lowering unit 76 individually raises and lowers the first guard portion 711, the second guard portion 721, and the third liquid receiving portion 73 (guard portion). The first lifting / lowering unit 76 is controlled by the control device 400 (control unit 401). Specifically, the first lifting / lowering unit 76 individually raises and lowers the first guard portion 711, the second guard portion 721, and the third liquid receiving portion 73 (guard portion) between a liquid receiving position and a third retracted position. The liquid receiving position is a position above the third retracted position. The first lifting / lowering unit 76 includes, for example, an electric motor that can rotate in both forward and reverse directions and a ball screw mechanism. FIG. 3 shows the first guard portion 711, the second guard portion 721, and the third liquid receiving portion 73 (guard portion) positioned in the liquid receiving position.

[0089] The drain line 16L discharges the rinse liquid collected in the first cup unit 712 to the outside of the substrate processing unit 300 (chamber 301). For example, the drain line 16L guides the rinse liquid collected in the first cup unit 712 to a pipe connected to a waste liquid facility of a factory in which the substrate processing apparatus 100 is installed. That is, the drain line 16L discharges the rinse liquid collected in the first cup unit 712 to the outside of the substrate processing apparatus 100. Alternatively, the drain line 16L may discharge the rinse liquid collected in the first cup unit 712 to a drain tank disposed outside the substrate processing unit 300, or may discharge the rinse liquid to the outside of the substrate processing apparatus 100 via the drain tank.

[0090] 3, the drain line 16L includes a first drain pipe 161 and a second drain pipe 162. The first drain pipe 161 and the second drain pipe 162 are tubular members through which the treatment liquid (liquid) flows.

[0091] The first drainage pipe 161 is housed in the chamber 301. In other words, the first drainage pipe 161 is disposed inside the chamber 301. One end of the first drainage pipe 161 is connected to the bottom of the first cup portion 712. As a result, the rinse liquid collected in the first cup portion 712 flows into the first drainage pipe 161. In this embodiment, the virgin material pipe 2b described with reference to FIGS. 2B and 2C is used for the first drainage pipe 161.

[0092] The second drainage pipe 162 is disposed outside the chamber 301. The upstream end of the second drainage pipe 162 is connected to the downstream end of the first drainage pipe 161. Therefore, the rinse liquid flows from the first drainage pipe 161 into the second drainage pipe 162. As a result, the rinse liquid (liquid) discharged from the substrate processing unit 300 flows through the second drainage pipe 162. For example, the downstream end of the first drainage pipe 161 and the upstream end of the second drainage pipe 162 may be connected via a joint. In this embodiment, the regenerated material pipe 2a described with reference to FIGS. 2A and 2C is used for the second drainage pipe 162.

[0093] The second drainage pipe 162 distributes the rinse liquid that has flowed into the second drainage pipe 162 via the first drainage pipe 161 to a pipe connected to a waste liquid facility in a factory where the substrate processing apparatus 100 is installed. That is, the second drainage pipe 162 distributes the rinse liquid collected in the first cup portion 712 to the outside of the substrate processing apparatus 100. Alternatively, the second drainage pipe 162 may distribute the rinse liquid that has flowed into the second drainage pipe 162 via the first drainage pipe 161 to a drain tank disposed outside the substrate processing unit 300, or may distribute the rinse liquid to the outside of the substrate processing apparatus 100 via the drain tank.

[0094] The recovery line 15L guides the chemical liquid collected in the second cup portion 722 to the outside of the substrate processing unit 300 (chamber 301). More specifically, the recovery line 15L guides the chemical liquid collected in the second cup portion 722 to the fluid cabinet 410 described with reference to FIG. 1. As a result, the chemical liquid collected in the second cup portion 722 is recovered in the fluid cabinet 410.

[0095] 3, the recovery line 15L has a recovery pipe 151. The recovery pipe 151 is a tubular member through which the treatment liquid (liquid) flows. One end of the recovery pipe 151 is connected to the bottom of the second cup portion 722. Therefore, the chemical liquid collected in the second cup portion 722 flows into the recovery pipe 151.

[0096] At least a portion of the recovery pipe 151 is disposed outside the chamber 301. In this embodiment, a portion of the recovery pipe 151 is housed within the chamber 301. In other words, a portion of the recovery pipe 151 is disposed within the chamber 301, and another portion of the recovery pipe 151 is disposed outside the chamber 301.

[0097] The recovery pipe 151 allows the chemical liquid that has flowed in from the second cup portion 722 to flow to the fluid cabinet 410 described with reference to Fig. 1. In other words, the recovery pipe 151 allows the chemical liquid (liquid) discharged from the substrate processing unit 300 to flow to the fluid cabinet 410. In this embodiment, the recovery pipe 151 uses the virgin material pipe 2b described with reference to Figs. 2B and 2C.

[0098] The exhaust line 17L exhausts gas inside the chamber 301 to the outside of the chamber 301. Specifically, the exhaust line 17L has a first exhaust pipe 171 and a second exhaust pipe 172. The first exhaust pipe 171 and the second exhaust pipe 172 are tubular members through which gas flows.

[0099] The first exhaust pipe 171 is housed in the chamber 301. In other words, the first exhaust pipe 171 is disposed inside the chamber 301. One end of the first exhaust pipe 171 communicates with the inner space of the chamber 301 at a position below the spin chuck 3. In this embodiment, the virgin material pipe 2b described with reference to FIGS. 2B and 2C is used for the first exhaust pipe 171.

[0100] The second exhaust pipe 172 is disposed outside the chamber 301. The upstream end of the second exhaust pipe 172 is connected to the downstream end of the first exhaust pipe 171. For example, the downstream end of the first exhaust pipe 171 and the upstream end of the second exhaust pipe 172 may be connected via a joint. In this embodiment, the recycled material pipe 2a described with reference to Figures 2A and 2C is used for the second exhaust pipe 172.

[0101] Gas in the first exhaust pipe 171 and the second exhaust pipe 172 is constantly sucked by an exhaust system (not shown) provided in a factory where the substrate processing apparatus 100 is installed. Therefore, when a substrate W is being processed with a chemical solution, the chemical solution atmosphere in the chamber 301 is drawn to the upstream end of the first exhaust pipe 171 by the suction force of the exhaust system transmitted through the exhaust line 17L. As a result, the chemical solution atmosphere in the chamber 301 is exhausted to the outside of the substrate processing apparatus 300 (chamber 301) through the exhaust line 17L. Similarly, when a processing space is formed by the blocking member 8 and the liquid receiving portion 7, an inert gas (nitrogen gas) introduced into the processing space is exhausted to the outside of the substrate processing apparatus 300 (chamber 301) through the exhaust line 17L.

[0102] Next, substrate processing by the substrate processing apparatus 100 of this embodiment will be described with reference to Fig. 3. First, the control device 400 (controller 401) controls the center robot CR described with reference to Fig. 1 to load the substrate W to be processed into the chamber 301. Then, the control device 400 (controller 401) controls the spin chuck 3 to hold the substrate W loaded by the center robot CR on the spin chuck 3.

[0103] When the substrate W is held by the spin chuck 3, the control device 400 (controller 401) controls the spin motor unit 4 to rotate the spin chuck 3 and the substrate W together. The control device 400 (controller 401) also controls the first lifting unit 76 to move the second guard unit 721 and the third liquid receiving unit 73 (guard unit) from the third retracted position to the liquid receiving position while keeping the first guard unit 711 in the third retracted position. The control device 400 (controller 401) then controls the nozzle moving unit 6 to move the first nozzle 5 from the first retracted position to the processing position.

[0104] The control device 400 (controller 401) moves the first nozzle 5 to the processing position, and then opens the first on-off valve 112. When the first on-off valve 112 opens, the chemical liquid is supplied to the first nozzle 5 via the first liquid supply pipe 111, and the chemical liquid is discharged from the first nozzle 5 toward the center of the rotating substrate W. As a result, a liquid film of the chemical liquid is formed on the upper surface of the substrate W, and the substrate W is processed by the chemical liquid.

[0105] The chemical liquid supplied to the rotating substrate W is discharged to the periphery of the substrate W. The chemical liquid discharged from the substrate W is received by the second guard portion 721. The chemical liquid received by the second guard portion 721 flows into the recovery pipe 151 via the second cup portion 722. As a result, the chemical liquid discharged from the substrate W is recovered via the recovery line 15L into the fluid cabinet 410 described with reference to FIG. 1.

[0106] When a predetermined time has elapsed since the start of the discharge of the chemical liquid, the control device 400 (controller 401) closes the first on-off valve 112. When the first on-off valve 112 is closed, the flow of the chemical liquid through the first liquid supply pipe 111 is stopped, and the discharge of the chemical liquid from the first nozzle 5 is stopped. As a result, the processing of the substrate W with the chemical liquid is completed.

[0107] After completing the treatment of the substrate W with the chemical liquid, the control device 400 (controller 401) controls the nozzle moving part 6 to move the first nozzle 5 from the treatment position to the first retracted position.

[0108] When the control device 400 (controller 401) moves the first nozzle 5 from the processing position to the first retracted position, it controls the second lifting unit 85 to move the blocking member 8 from the second retracted position to the blocking position to form a processing space. In addition, the control device 400 (controller 401) controls the first lifting unit 76 to move the first guard unit 711 from the third retracted position to the liquid receiving position.

[0109] After forming the processing space, the control device 400 (controller 401) opens the third on-off valve 142. As a result, nitrogen gas is supplied to the processing space from the third nozzle 83, and the atmosphere in the processing space is replaced from the air atmosphere to a nitrogen atmosphere.

[0110] After starting the supply of nitrogen gas, the control device 400 (controller 401) opens the second on-off valve 122. When the second on-off valve 122 opens, the rinse liquid is supplied to the second nozzle 82 via the second liquid supply pipe 121, and the rinse liquid is discharged from the second nozzle 82 toward the center of the rotating substrate W. As a result, the chemical liquid remaining on the substrate W is washed away by the rinse liquid, and a liquid film of the rinse liquid is formed on the upper surface of the substrate W.

[0111] When a predetermined time has elapsed since the start of the discharge of the rinse liquid, the control device 400 (controller 401) closes the second on-off valve 122. When the second on-off valve 122 is closed, the flow of the rinse liquid through the second liquid supply pipe 121 stops, and the discharge of the rinse liquid from the second nozzle 82 stops. As a result, the rinse process ends.

[0112] After stopping the discharge of the rinse liquid, the control device 400 (controller 401) controls the spin motor unit 4 to increase the rotation speed of the substrate W and rotate the substrate W at high speed. By rotating the substrate W at high speed, the rinse liquid adhering to the substrate W is scattered from the substrate W, and the substrate W is dried. When a predetermined time has elapsed since increasing the rotation speed of the substrate W, the control device 400 (controller 401) controls the spin motor unit 4 to stop the rotation of the substrate W. As a result, the drying process is completed.

[0113] Hereinafter, the piping arranged inside the chamber 301 may be referred to as "internal chamber piping." Furthermore, the piping through which the processing liquid supplied to the substrate W flows may be referred to as "liquid supply piping." The internal chamber piping includes a first liquid supply piping 111, a second liquid supply piping 121, a first gas piping 141, a recovery piping 151, a first drainage piping 161, and a first exhaust piping 171. The liquid supply piping includes the first liquid supply piping 111 and the second liquid supply piping 121.

[0114] 1 to 3, in this embodiment, the virgin material pipe 2b is used for the piping within the chamber. Since the virgin material pipe 2b is cleaner than the recycled material pipe 2a, by using the virgin material pipe 2b for the piping within the chamber, the inside of the chamber 301 is less likely to be contaminated than when the recycled material pipe 2a is used for the piping within the chamber. As a result, the number of particles on the substrate W is less likely to increase than when the recycled material pipe 2a is used for the piping within the chamber.

[0115] In this embodiment, a virgin material pipe 2b is used as the liquid supply pipe. The virgin material pipe 2b is cleaner than the recycled material pipe 2a, and therefore, by using the virgin material pipe 2b as the liquid supply pipe, the number of particles on the substrate W is less likely to increase compared to when the recycled material pipe 2a is used as the liquid supply pipe.

[0116] Furthermore, in this embodiment, a virgin material pipe 2b is used for the first gas pipe 141. The virgin material pipe 2b is cleaner than the recycled material pipe 2a, and therefore, by using the virgin material pipe 2b for the first gas pipe 141, the inside of the chamber 301 is less likely to be contaminated than when the recycled material pipe 2a is used for the first gas pipe 141. As a result, the number of particles on the substrate W is less likely to increase than when the recycled material pipe 2a is used for the first gas pipe 141.

[0117] 2C, the virgin material pipe 2b is provided with an inner marking. Therefore, by using the virgin material pipe 2b as the liquid supply pipe, carbonized matter is less likely to be mixed into the processing liquid supplied to the substrate W than when the liquid supply pipe has a marking 30 formed on its inner surface 21. Therefore, the number of particles on the substrate W is less likely to increase than when the liquid supply pipe has a marking 30 formed on its inner surface 21.

[0118] Similarly, by using the virgin material pipe 2b for the first gas pipe 141, carbides are less likely to be mixed into the gas supplied into the chamber 301 than when the marking portion 30 is formed on the inner surface 21 of the first gas pipe 141. Therefore, the inside of the chamber 301 is less likely to be contaminated than when the marking portion 30 is formed on the inner surface 21 of the first gas pipe 141. As a result, the number of particles on the substrate W is less likely to increase than when the marking portion 30 is formed on the inner surface 21 of the first gas pipe 141.

[0119] Furthermore, if the marking portion 30 is formed on the outer surface 22 of the intra-chamber piping, the inside of the chamber 301 may be contaminated by carbides peeled off from the outer surface 22. For example, if the atmosphere inside the chamber 301 is acidic, carbides are likely to peel off from the outer surface 22. In contrast, according to this embodiment, the virgin material pipe 2b is provided with inner markings. Therefore, by using the virgin material pipe 2b as the intra-chamber piping, the possibility of the inside of the chamber 301 being contaminated by carbides can be reduced compared to when the marking portion 30 is formed on the outer surface 22 of the intra-chamber piping. As a result, the number of particles on the substrate W is less likely to increase compared to when the marking portion 30 is formed on the outer surface 22 of the intra-chamber piping.

[0120] Furthermore, according to this embodiment, the virgin material pipe 2b is used for the recovery pipe 151. The chemical liquid flowing through the recovery pipe 151 is recovered into the fluid cabinet 410 and reused for substrate processing. Since the virgin material pipe 2b is cleaner than the recycled material pipe 2a, by using the virgin material pipe 2b for the recovery pipe 151, the number of particles on the substrate W is less likely to increase compared to when the recycled material pipe 2a is used for the recovery pipe 151.

[0121] Furthermore, by using the virgin material pipe 2b for the recovery pipe 151, carbonized matter is less likely to be mixed into the processing liquid supplied to the substrate W than when the marking portion 30 is formed on the inner surface 21 of the recovery pipe 151. Therefore, the number of particles on the substrate W is less likely to increase than when the marking portion 30 is formed on the inner surface 21 of the recovery pipe 151.

[0122] Furthermore, according to this embodiment, recycled material pipes 2a are used for the second drainage pipes 162 and the second exhaust pipes 172. Therefore, the amount of virgin fluororesin material used in the substrate processing apparatus 100 can be reduced compared to when virgin material pipes 2b are used for the second drainage pipes 162 and the second exhaust pipes 172. This allows for the conservation of environmental resources.

[0123] 2A and 2B, the recycled material pipe 2a is provided with a marking (first marking 30a) for distinguishing between the recycled material pipe 2a and the virgin material pipe 2b. Therefore, the recycled material pipe 2a and the virgin material pipe 2b can be visually distinguished from each other. As a result, the possibility of mistakenly using the recycled material pipe 2a as an in-chamber pipe during assembly or maintenance of the substrate processing apparatus 100 can be reduced.

[0124] 2A and 2B, the virgin material pipe 2b is also provided with a marking (first marking 30a) for distinguishing between the recycled material pipe 2a and the virgin material pipe 2b, similar to the recycled material pipe 2a. Therefore, it is possible to more reliably distinguish between the recycled material pipe 2a and the virgin material pipe 2b by visual inspection.

[0125] Next, the substrate processing apparatus 100 of this embodiment will be described with reference to Fig. 4. Fig. 4 is a diagram showing a part of the configuration of the substrate processing apparatus 100 of this embodiment. As shown in Fig. 4, the substrate processing apparatus 100 further includes a storage tank 411, a recovery tank 154, a second gas line 18L, a circulation line 19L, and a valve drive unit 500.

[0126] The storage tank 411 is housed in the fluid cabinet 410. The storage tank 411 stores the chemical liquid. The circulation line 19L circulates the chemical liquid stored in the storage tank 411. Specifically, the circulation line 19L has a circulation pipe 191, a circulation pump 192, and a circulation filter 193.

[0127] The circulation pipe 191 is a tubular member through which a processing liquid (liquid) flows. One end and the other end of the circulation pipe 191 are connected to a storage tank 411. A portion of the circulation pipe 191 is housed in a fluid cabinet 410. Another portion of the circulation pipe 191 is housed in a fluid box 420. In this embodiment, a virgin material pipe 2b is used for the circulation pipe 191.

[0128] The circulation pump 192 is installed in the circulation pipe 191. The circulation pump 192 is housed in the fluid cabinet 410. The circulation pump 192 pumps the chemical solution so that the chemical solution flows through the circulation pipe 191 from one end to the other end of the circulation pipe 191. As a result, the chemical solution circulates through the circulation pipe 191 via the storage tank 411. The circulation pump 192 is controlled by the control device 400 (control unit 401).

[0129] The circulation filter 193 is installed in the circulation pipe 191. The circulation filter 193 is housed in the fluid cabinet 410. The circulation filter 193 removes foreign matter from the chemical liquid flowing through the circulation pipe 191.

[0130] The recovery tank 154 is housed within the fluid cabinet 410. The recovery tank 154 stores the chemical liquid recovered by the recovery line 15L. The recovery line 15L distributes the chemical liquid recovered from the liquid receiving section 7 to the storage tank 411 via the recovery tank 154. Specifically, the recovery line 15L further includes a recovery filter 152 and a recovery pump 153. The recovery pipe 151 includes a first recovery pipe 151a and a second recovery pipe 151b. Note that the first recovery pipe 151a and the second recovery pipe 151b use virgin material pipe 2b.

[0131] The upstream end of the first recovery pipe 151a is connected to the bottom of the second cup portion 722 described with reference to Fig. 3. The downstream end of the first recovery pipe 151a is connected to the recovery tank 154. Therefore, the first recovery pipe 151a allows the chemical liquid discharged from the substrate W to flow to the recovery tank 154.

[0132] The collection filter 152 is disposed in the first collection pipe 151 a. The collection filter 152 removes foreign matter from the chemical liquid flowing through the first collection pipe 151 a. The collection filter 152 is housed in the fluid cabinet 410, for example.

[0133] The second recovery pipe 151b is housed in the fluid cabinet 410. One end of the second recovery pipe 151b is connected to the recovery tank 154. The other end of the second recovery pipe 151b is connected to the storage tank 411.

[0134] The recovery pump 153 is housed in the fluid cabinet 410. The recovery pump 153 is attached to the second recovery pipe 151b. The recovery pump 153 pumps the chemical liquid so that the chemical liquid flows through the second recovery pipe 151b from one end to the other end of the second recovery pipe 151b. As a result, the chemical liquid is recovered in the storage tank 411. The recovery pump 153 is controlled by the control device 400 (control unit 401).

[0135] 4 , one end of the first liquid supply pipe 111 is connected to the first nozzle 5, and the other end of the first liquid supply pipe 111 is connected to the circulation pipe 191. When the first on-off valve 112 is opened, the chemical liquid that has flowed from the circulation pipe 191 into the first liquid supply pipe 111 flows through the first liquid supply pipe 111 toward the first nozzle 5. As a result, the chemical liquid is ejected from the first nozzle 5. Note that the first nozzle 5 may be formed by an end of the first liquid supply pipe 111.

[0136] In this embodiment, the actuator of the first on-off valve 112 is a pneumatic actuator. The second gas line 18L supplies air to the actuator of the first on-off valve 112. The valve driving unit 500 changes the pressure of the air supplied to the actuator of the first on-off valve 112 via the second gas line 18L to open or close the first on-off valve 112. The valve driving unit 500 is controlled by the control device 400 (control unit 401). The valve driving unit 500 is, for example, a speed controller.

[0137] The second gas line 18L has a second gas pipe 181. The second gas pipe 181 is a tubular member through which air (gas) flows. In this embodiment, the recycled material pipe 2a is used for the second gas pipe 181. A portion of the second gas pipe 181 is disposed within the fluid box 420.

[0138] 4, according to this embodiment, the virgin material pipe 2b is used for the circulation pipe 191. Therefore, compared to when the recycled material pipe 2a is used for the circulation pipe 191, the number of particles on the substrate W is less likely to increase.

[0139] Furthermore, according to this embodiment, the recycled material pipe 2a is used for the second gas pipe 181. Therefore, the amount of virgin fluororesin material used in the substrate processing apparatus 100 can be reduced compared to when the virgin material pipe 2b is used for the second gas pipe 181. This allows for saving environmental resources.

[0140] 2A and 2B, the recycled material pipe 2a is provided with a marking (first marking 30a) for distinguishing between the recycled material pipe 2a and the virgin material pipe 2b. Therefore, the recycled material pipe 2a and the virgin material pipe 2b can be visually distinguished from each other. As a result, the possibility of mistakenly using the recycled material pipe 2a as the circulation pipe 191 can be reduced, for example, during assembly or maintenance of the substrate processing apparatus 100.

[0141] 2A and 2B, the virgin material pipe 2b is also provided with a marking (first marking 30a) for distinguishing between the recycled material pipe 2a and the virgin material pipe 2b, similar to the recycled material pipe 2a. This further reduces the possibility that the recycled material pipe 2a will be mistakenly used as the circulation pipe 191.

[0142] Next, the recycled material pipe 2a and the virgin material pipe 2b will be described with reference to Figures 5A and 5B. Figure 5A is a diagram showing an example of the recycled material pipe 2a. Figure 5B is a diagram showing another example of the recycled material pipe 2a.

[0143] As shown in FIG. 5A , the marking portions 30 may be provided intermittently along the longitudinal direction of the recycled material pipe 2a. In other words, the marking portions 30 may be provided intermittently along the longitudinal direction of the tube molded product used for the recycled material pipe 2a. Alternatively, as shown in FIG. 5B , the marking portions 30 may be provided continuously along the longitudinal direction of the recycled material pipe 2a. In other words, the marking portions 30 may be provided continuously along the longitudinal direction of the tube molded product used for the recycled material pipe 2a. Similarly, the marking portions 30 may be provided intermittently along the longitudinal direction of the virgin material pipe 2b, or may be provided continuously along the longitudinal direction of the virgin material pipe 2b. When the marking portions 30 are provided continuously along the longitudinal direction of the recycled material pipe 2a or the virgin material pipe 2b, two adjacent marking portions 30 in the longitudinal direction may be adjacent to each other, or may be separated by a distance shorter than the length of one marking portion 30 in the longitudinal direction. The marking section 30 includes one or more marks. The marks may be any of letters, numbers, symbols, figures, and pictograms, or may be other than these. When the marking section 30 includes two or more marks, the marks may be adjacent to each other or may be spaced apart by a distance shorter than the length of one mark in the longitudinal direction of the recycled material pipe 2 a or the virgin material pipe 2 b.

[0144] Hereinafter, a tube molded product manufactured using recycled fluororesin material may be referred to as a "recycled material molded product." Also, a tube molded product manufactured using virgin fluororesin material may be referred to as a "virgin material molded product."

[0145] The length of the tube molded product (recycled material molded product and virgin material molded product) is constant. For example, the length of the tube molded product is 10 m. When a tube molded product (recycled material molded product) is used for the recycled material piping 2a, the tube molded product may be cut to the required length to produce the recycled material piping 2a from the tube molded product. Similarly, when a tube molded product (virgin material molded product) is used for the virgin material piping 2b, the tube molded product may be cut to the required length to produce the virgin material piping 2b from the tube molded product. Therefore, for example, if a marking is applied to only one location on the tube molded product, depending on the location where the tube molded product is cut, it may be difficult to distinguish whether the piping made from the tube molded product is recycled material piping 2a or virgin material piping 2b.

[0146] In contrast, in the recycled material piping 2a and virgin material piping 2b described with reference to Figures 5A and 5B, the marking portions 30 are provided intermittently or continuously along the longitudinal direction of the tube molded product, so that no matter where the tube molded product is cut, it is possible to identify whether the piping made from the tube molded product is recycled material piping 2a or virgin material piping 2b.

[0147] Next, modified examples of the marking unit 30 will be described with reference to Figures 6A to 6C. Figure 6A is a diagram showing a first modified example of the marking unit 30. Figure 6B is a diagram showing a second modified example of the marking unit 30. Figure 6C is a diagram showing a third modified example of the marking unit 30.

[0148] First, referring to Fig. 6A, a first modified example of the marking portion 30 will be described using the recycled material pipe 2a as an example. As shown in Fig. 6A, the marking portion 30 may include a second marking 30b and a third marking 30c in addition to the first marking 30a described with reference to Figs. 2A and 2B. The second marking 30b indicates the type of fluororesin. The third marking 30c indicates the location where the recycled material pipe 2a or virgin material pipe 2b is located.

[0149] 6A illustrates an example in which the second marking 30b is the character indicating "PFA" and the third marking 30c is the character indicating "drain." In other words, the marking portion 30 indicates that the material of the recycled material pipe 2a is "PFA" and that the location where the recycled material pipe 2a is installed is the "drain line." The "drain line" is a line for draining the treatment liquid. For example, the drain line includes the drain line 16L shown in FIGS. 3 and 4.

[0150] As shown in FIG. 6A, by indicating the location where the recycled material pipe 2a is to be installed using the marking portion 30, it is possible to reliably install the recycled material pipe 2a at the intended location, for example, when assembling the substrate processing apparatus 100.

[0151] Next, referring to Fig. 6B, a second modification of the marking section 30 will be described using the virgin material pipe 2b as an example. As shown in Fig. 6B, the marking section 30 may include second markings 30b to fourth markings 30d in addition to the first marking 30a described with reference to Figs. 2A and 2B. The fourth marking 30d indicates the type of fluid flowing through the recycled material pipe 2a or the virgin material pipe 2b.

[0152] 6B illustrates an example in which the second marking 30b is the character indicating "PFA," the third marking 30c is the character indicating "process," and the fourth marking 30d is the character indicating phosphoric acid (H3PO4). In other words, the marking 30 indicates that the material of the virgin material pipe 2b is "PFA," the location where the virgin material pipe 2b is installed is the "process line," and the fluid flowing through the virgin material pipe 2b is phosphoric acid. The "process line" is a line for supplying a processing liquid to the substrate processing unit 300. For example, the process line includes the first processing liquid line 11L and the second processing liquid line 12L shown in FIGS. 3 and 4.

[0153] 6B, by indicating the type of fluid flowing through the virgin material pipe 2b by the marking portion 30, it is possible to reliably install the virgin material pipe 2b in the intended location, for example, when assembling the substrate processing apparatus 100. Furthermore, when performing maintenance on the substrate processing apparatus 100, an operator can check the type of fluid flowing through the virgin material pipe 2b, which makes the maintenance work easier.

[0154] Next, referring to Fig. 6C, a third modification of the marking section 30 will be described using the recycled material pipe 2a as an example. As shown in Fig. 6C, the marking section 30 may include second markings 30b to fifth markings 30e in addition to the first marking 30a described with reference to Figs. 2A and 2B. The fifth marking 30e indicates the flow direction of the fluid flowing through the recycled material pipe 2a or the virgin material pipe 2b.

[0155] 6C illustrates an example in which the second marking 30b is the characters indicating "PTFE," the third marking 30c is the characters indicating "Fluid Box," the fourth marking 30d is the characters indicating "Air," and the fifth marking 30e is a symbol indicating an arrow. In other words, the marking portion 30 indicates that the material of the recycled material pipe 2a is "PTFE," the location where the recycled material pipe 2a is installed is the fluid box 420, the fluid flowing through the recycled material pipe 2a is air, and the fluid (here, air) flows in the direction of the arrow.

[0156] As shown in Figure 6C, by indicating the direction of fluid flow using the marking section 30, for example, when performing maintenance on the substrate processing apparatus 100, the worker can confirm the direction of fluid flow through the recycled material piping 2a, making maintenance work easier.

[0157] The embodiment of the present invention has been described above with reference to the drawings (FIGS. 1 to 6C). According to this embodiment, recycled material piping 2a can be used for piping in the substrate processing apparatus 100. Therefore, environmental resources can be saved.

[0158] Furthermore, according to this embodiment, markings are applied to the recycled material pipes 2a and the virgin material pipes 2b, so that the recycled material pipes 2a and the virgin material pipes 2b can be visually distinguished from each other.

[0159] Furthermore, according to this embodiment, inner markings are applied to the recycled material pipe 2 a and the virgin material pipe 2 b, so that the same level of cleanliness can be maintained as in a configuration using pipes without markings.

[0160] The present invention is not limited to the above-described embodiments, and can be implemented in various forms without departing from the spirit of the present invention. Furthermore, the components disclosed in the above-described embodiments can be modified as appropriate. For example, some of the components shown in one embodiment may be added to the components of another embodiment, or some of the components shown in one embodiment may be deleted from the embodiment.

[0161] The drawings mainly show each component in a schematic manner to facilitate understanding of the invention, and the thickness, length, number, spacing, etc. of each component shown in the drawings may differ from the actual ones due to the convenience of creating the drawings. Furthermore, the configuration of each component shown in the above embodiment is merely an example and is not particularly limited, and it goes without saying that various modifications are possible within a range that does not substantially deviate from the effects of the present invention.

[0162] For example, in the embodiment described with reference to Figures 1 to 7B, the recycled material pipe 2a and the virgin material pipe 2b were each tubular members made of a single layer of fluororesin, but at least one of the recycled material pipe 2a and the virgin material pipe 2b may be a tubular member made of two or more layers of fluororesin.

[0163] For example, the recycled material pipe 2 a and the virgin material pipe 2 b may each include an outer layer and an inner layer that do not contain a substance that changes photochemically when exposed to laser light, and an intermediate layer that contains a substance that changes photochemically when exposed to laser light. In this case, the marking portion 30 is formed in the intermediate layer. The substance that changes photochemically when exposed to laser light includes, for example, color pigments, metal oxides, and hydroxides.

[0164] Alternatively, at least one of the recycled material pipe 2a and the virgin material pipe 2b may be a tubular member made of two layers of fluororesin. For example, the recycled material pipe 2a and the virgin material pipe 2b may each have an outer layer and an inner layer that do not contain a substance that changes photochemically in response to laser light, and a film sandwiched between the outer layer and the inner layer. In this case, the film contains a substance that changes photochemically in response to laser light. Therefore, the marking portion 30 is formed on the film.

[0165] Furthermore, in the embodiment described with reference to Figures 1 to 7B, markings were applied to both the recycled material pipe 2a and the virgin material pipe 2b, but markings may be applied to only one of the recycled material pipe 2a and the virgin material pipe 2b.

[0166] Furthermore, in the embodiment described with reference to Figures 1 to 7B, markings were applied to the recycled material pipes 2a and the virgin material pipes 2b by forming marking portions 30 on the recycled material pipes 2a and the virgin material pipes 2b, but markings may also be applied to at least one of the recycled material pipes 2a and the virgin material pipes 2b by coloring at least one of the recycled material pipes 2a and the virgin material pipes 2b.

[0167] For example, when coloring the recycled material pipe 2a, the recycled material pipe 2a may be colored entirely or only a part of it. Similarly, when coloring the virgin material pipe 2b, the virgin material pipe 2b may be colored entirely or only a part of it.

[0168] The coloring method is not particularly limited as long as it allows the recycled material pipe 2a and the virgin material pipe 2b to be distinguished from each other. For example, when coloring a portion of the recycled material pipe 2a, a colored portion may be provided intermittently around the entire circumference of the recycled material pipe 2a in the longitudinal direction of the recycled material pipe 2a. Alternatively, a band-like color may be applied to a portion of the circumference of the recycled material pipe 2a, extending continuously from both ends of the recycled material pipe 2a in the longitudinal direction. The same applies when coloring a portion of the virgin material pipe 2b.

[0169] When both the recycled material pipe 2a and the virgin material pipe 2b are colored, that is, when the recycled material pipe 2a is colored with the recycled material display color and the virgin material pipe 2b is colored with the virgin material display color, the recycled material display color and the virgin material display color may be different.

[0170] When the recycled material pipe 2a is colored, the colored portion of the recycled material pipe 2a may be translucent or opaque. In the former case, the transparency of the recycled material pipe 2a may be such that the presence or absence of liquid in the recycled material pipe 2a can be visually discernible, or may be such that the presence or absence of liquid cannot be visually discernible. The same applies when coloring the virgin material pipe 2b.

[0171] When coloring the recycled material pipe 2a, a black coloring component different from fluororesin may be contained in the colored portion of the recycled material pipe 2a. In this case, the recycled material pipe 2a is colored black to a depth corresponding to the concentration of the coloring component. If the concentration of the coloring component is low, the recycled material pipe 2a is colored gray (light black). The recycled material pipe 2a may be colored black with a transparency that allows visual identification of whether or not liquid is present in the recycled material pipe 2a. The coloring component may be a substance other than black, such as blue. The black coloring component may be carbon. In this case, the recycled material pipe 2a can be colored without increasing contaminants such as metals. The content of this paragraph also applies to coloring the virgin material pipe 2b.

[0172] The recycled material pipe 2a may have a marking portion 30 formed thereon, and may be partially or entirely colored. Alternatively, the recycled material pipe 2a may not have a marking portion 30 formed thereon, but may instead be partially or entirely colored. The same applies to the virgin material pipe 2b. FIG. 7A shows an example in which the recycled material pipe 2a or the virgin material pipe 2b is entirely colored and has a marking portion 30 formed thereon. FIG. 7B shows an example in which the recycled material pipe 2a or the virgin material pipe 2b is entirely colored and has no marking portion 30 formed thereon. The cross-hatched areas in FIGS. 7A and 7B represent colored translucent areas.

[0173] 1 to 7B, a portion of the drain line 16L (first drain piping 161) is disposed inside the chamber 301, but substantially the entire piping included in the drain line 16L may be disposed outside the chamber 301. For example, when the first cup portion 712 is installed on the bottom wall of the chamber 301, substantially the entire piping included in the drain line 16L is disposed outside the chamber 301.

[0174] 1 to 7B, a portion of the recovery pipe 151 is disposed inside the chamber 301, but substantially the entire recovery pipe 151 may be disposed outside the chamber 301. For example, if the second cup portion 722 is installed on the bottom wall of the chamber 301, substantially the entire recovery pipe 151 is disposed outside the chamber 301.

[0175] 1 to 7B, the spin chuck 3 is a clamping type chuck, but the spin chuck 3 is not limited to a clamping type chuck. For example, the spin chuck 3 may be a vacuum type chuck.

[0176] Furthermore, in the embodiment described with reference to FIGS. 1 to 7B, the substrate processing apparatus 100 is a single-wafer type apparatus, but the substrate processing apparatus 100 may also be a batch type apparatus.

[0177] 1 to 7B, the substrate processing apparatus 100 is an etching apparatus or a cleaning apparatus, but the substrate processing apparatus 100 is not particularly limited as long as it is an apparatus for processing a substrate. For example, the substrate processing apparatus 100 may be a coating apparatus, a developing apparatus, an exposure apparatus, a baking apparatus, or a film forming apparatus.

[0178] This application claims priority based on Japanese Patent Application No. 2023-158165 filed on September 22, 2023, and Japanese Patent Application No. 2024-110864 filed on July 10, 2024, the entire contents of which are incorporated herein by reference.

Claims

1. A substrate processing apparatus for processing substrates, comprising a plurality of pipes having an inner surface and an outer surface, through which a fluid flows inside the inner surface, the plurality of pipes including at least one virgin material pipe containing a virgin material of a fluororesin, and at least one recycled material pipe containing a recycled material of a fluororesin, at least one of the virgin material pipe and the recycled material pipe being marked and / or colored to distinguish between the virgin material pipe and the recycled material pipe.

2. The substrate processing apparatus of claim 1, wherein at least one of the virgin material piping and the recycled material piping has a marking portion between the inner surface and the outer surface, the marking being for identifying the virgin material piping and the recycled material piping.

3. A substrate processing apparatus as described in claim 1 or claim 2, further comprising a substrate processing unit that performs substrate processing on the substrate, the substrate processing unit having a chamber that accommodates the substrate, the at least one virgin material pipe including a pipe disposed within the chamber, and the at least one recycled material pipe including a pipe disposed outside the chamber.

4. The substrate processing apparatus of claim 3, wherein the at least one virgin material pipe includes a liquid supply pipe that supplies liquid to the substrate processing apparatus, a portion of the liquid supply pipe being disposed within the chamber, and another portion of the liquid supply pipe being disposed outside the chamber.

5. The substrate processing apparatus of claim 3, further comprising a fluid cabinet for containing liquid to be supplied to the substrate processing apparatus, wherein the at least one virgin material pipe includes a recovery pipe for circulating the liquid discharged from the substrate processing apparatus to the fluid cabinet, and at least a portion of the recovery pipe is positioned outside the chamber.

6. The substrate processing apparatus according to claim 3, wherein the at least one recycled material pipe includes a drain pipe through which liquid discharged from the substrate processing apparatus flows, and the drain pipe is disposed outside the chamber.

7. The substrate processing apparatus of claim 3, wherein the plurality of pipes include a liquid supply pipe that supplies liquid to the substrate processing unit, the substrate processing apparatus further comprising: an on-off valve provided in the liquid supply pipe that controls the flow of the liquid through the liquid supply pipe and the halt of the flow; and a fluid box that accommodates a portion of the liquid supply pipe and the on-off valve; and the at least one regenerator pipe includes a gas pipe that flows a gas, and a portion of the gas pipe is disposed within the fluid box.

8. The substrate processing apparatus according to claim 2, wherein the marking section further indicates the type of the fluid flowing through the virgin material pipe or the recycled material pipe.

9. The substrate processing apparatus according to claim 2, wherein the marking portion further indicates a location where the virgin material pipe or the recycled material pipe is disposed.

10. The substrate processing apparatus according to claim 2, wherein the marking portion further indicates a flow direction of the fluid flowing through the virgin material pipe or the recycled material pipe.

11. The substrate processing apparatus according to claim 1, wherein the virgin material pipe is colored.

12. The substrate processing apparatus according to claim 1 or 11, wherein at least one of the virgin material pipes and the recycled material pipes is colored black.

13. The substrate processing apparatus according to claim 1 or 11, wherein at least one of the virgin material piping and the recycled material piping includes a translucent portion that is colored.

14. The substrate processing apparatus according to claim 13, wherein the translucent portion is colored black.

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