Precision substrate storage container tray and semiconductor wafer storage container

Abstract

Provided are: an easy-to-handle precision substrate storage container tray achieving a weight reduction for precision substrate storage containers, or able to eliminate concerns of deformation of or damage to a semiconductor wafer storage container, and able to facilitate insertion and removal; and a semiconductor wafer storage container.　This invention icomprises: an adapter 31 into which a precision substrate storage container 1 is loaded and which is stored in a body 11; a plurality of fixation tools 50 for fixing a flange section 2 of the precision substrate storage container 1; and a pair of fixation pieces able to make contact with support teeth 12 of two sides of the interior of the body 11. The adapter 31 is formed into a frame shape fitting to the flange section 2 of the precision substrate storage container 1, and a support piece 34 supporting a lower surface 5 of the precision substrate storage container 1 is formed in the adapter 31. Further, a relief groove facing the rear of the peripheral edge of a lower surface 5 of the precision substrate storage container 1 is formed in the support piece 34, loading pieces are made to protrude out from two side sections of the adapter 31, and the loading pieces are each enabled to make contact with support teeth 12 distinct from the support teeth 12 of the body 11 contacting the fixation pieces.

Description

Tray for precision substrate storage container and semiconductor wafer storage container

[0001] The present invention relates to a tray for a precision substrate storage container that supports a precision substrate storage container such as a reticle storage container and is stored in a semiconductor wafer storage container, and to the semiconductor wafer storage container.

[0002] Semiconductor wafer storage containers called FOUPs are used in semiconductor factories to store and transport 300 mm semiconductor wafers, storing multiple 300 mm semiconductor wafers, but in recent years there has been a demand for them to store photomask storage containers or reticle storage containers instead of semiconductor wafers.This is because photomasks and reticles are used in the front-end processes of semiconductor manufacturing, and it would be extremely efficient if precision substrate storage containers such as photomask storage containers or reticle storage containers could be stored in semiconductor wafer storage containers and transported while being suspended by an automatic transport device such as an OHT.

[0003] However, because semiconductor wafers such as silicon wafers and precision substrate storage containers differ in size, shape, etc., it is difficult to safely store precision substrate storage containers in semiconductor wafer storage containers. In view of this, methods for safely and reliably storing precision substrate storage containers in semiconductor wafer storage containers have been studied and proposed (see Patent Documents 1, 2, and 3). For example, (1) a method in which the precision substrate storage container is mounted and fixed on a circular adapter and the adapter is stored in the body of the semiconductor wafer storage container via support teeth, and (2) a method in which a required number of precision substrate storage containers are stored in a shelf-shaped storage jig and the storage jig is stored in the body of the semiconductor wafer storage container have been studied and proposed.

[0004] Patent No. 5959302 Patent No. 5916508 Patent No. 7257418

[0005] However, while the SEMI standard stipulates the size and flange area of ​​precision substrate storage containers, there are no regulations regarding weight, which presents a problem, and both methods (1) and (2) present issues for further consideration. For example, while both methods (1) and (2) are expected to be effective, when weight restrictions are required from the perspective of transportation, achieving weight reduction is not easy, and there is a risk that the support teeth and other components that support the adapter of the semiconductor wafer storage container may be deformed or damaged. In addition, there is a risk of interfering with transportation by an automated transport device that suspends the semiconductor wafer storage container.

[0006] In addition, in the case of method (1), it is expected that inserting and removing a thick adapter into and from the body will not necessarily be easy, and there is a risk of deformation or damage to the body. Furthermore, in the case of method (2), the holding jig will be large, which may cause problems in handling.

[0007] The present invention has been made in consideration of the above, and aims to provide a tray for a precision substrate storage container and a semiconductor wafer storage container that can reduce the weight of the precision substrate storage container, eliminate the risk of deformation or damage to the semiconductor wafer storage container, and are easy to handle and can be easily taken in and out.

[0008] In order to solve the above-mentioned problems, the present invention provides an adapter for supporting a precision substrate storage container and storing it in a semiconductor wafer storage container, the adapter including an adapter for mounting the precision substrate storage container and being stored in a body having an opening at the front of the semiconductor wafer storage container, a fixture attached to at least either the front or rear of the adapter for fixing the flange portion of the precision substrate storage container, and a plurality of fixing members detachably attached to both sides of the adapter and capable of contacting support teeth on both sides inside the body, the adapter being formed into a planar, approximately frame-like shape that can be fitted into the flange portion of the precision substrate storage container, the adapter being formed with support pieces that can support the underside of the flange portion of the precision substrate storage container, and the support pieces being formed with escape grooves that can face behind the peripheral edge of the underside of the flange portion of the precision substrate storage container, mounting pieces protruding from both sides of the adapter, and the plurality of mounting pieces being capable of contacting support teeth that are different from the support teeth of the body that come into contact with the fixing members.

[0009] It is preferable that the spacer be interposed between the flange of the precision substrate storage container and the support piece of the adapter, and that the surface of the spacer be formed with a relief groove that can face the rear peripheral edge of the underside of the flange of the precision substrate storage container. Also, an engagement hole for the spacer can be provided on the inner periphery of the hollow part of the adapter, the spacer be formed into a substantially X-shaped planar shape, and an engagement protrusion can be formed on the end of at least one of a pair of inclined pieces that form the spacer, which can be fitted into the engagement hole in the hollow part of the adapter.

[0010] Furthermore, an endless support piece having a generally L-shaped cross section can be formed on the rear surface of the adapter to support either the peripheral edge of the underside of the flange portion of the precision substrate storage container or the spacer. Furthermore, an endless support piece having a generally plate-shaped cross section can be formed on the inner periphery of the hollow portion of the adapter that fits into the flange portion of the precision substrate storage container to support the peripheral edge of the underside of the flange portion of the precision substrate storage container.

[0011] The fixture also includes a first fixture that is rotatably attached to the front of the adapter and engages with the front of the flange portion of the precision substrate storage container, and a second fixture that is approximately inverted L-shaped and attached to the rear of the adapter and engages with the rear of the flange portion of the precision substrate storage container, and these first and second fixtures can be made movable up and down by a spring member.

[0012] The first fixing device also includes a cylindrical portion rotatably supported at the front of the adapter, and a locking piece formed on the cylindrical portion that can be locked onto the front of the flange portion of the precision substrate storage container, with an operating handle formed on the locking piece, and when fixing the precision substrate storage container mounted on the adapter, the locking piece is oriented in the front-to-rear direction of the adapter and comes into contact with a door set fitted to the front of the body of the semiconductor wafer storage container.

[0013] In addition, in order to solve the above problem, the present invention is characterized in that it includes a front-opening box body that stores the tray for the precision substrate storage container described in claim 1 or 2, and a door set that is removably fitted to the open front of the body, and is used in the semiconductor manufacturing process.

[0014] Here, the precision substrate storage container in the claims includes a photomask storage container or a reticle storage container, etc., whose lower portion at least has a flange portion. This precision substrate storage container may be a single-pod type or a multi-pod type, and it is preferable that one or two substrates are stored in the body. Furthermore, the term "flat, approximately frame-shaped" for the adapter includes not only a flat, frame-shaped type but also similar shapes that do not result in any difference in the effects of the present invention. The support piece of the adapter may directly support the precision substrate storage container or indirectly support it via a spacer.

[0015] The term "substantially X-shaped in plan view" includes not only an X-shaped in plan view but also similar shapes (such as a substantially +-shaped or X-shaped in plan view) that do not cause any difference in the effects of the present invention. Furthermore, the term "substantially L-shaped in cross section" includes not only an L-shaped in cross section but also similar shapes (such as a substantially J-shaped in cross section) that do not cause any difference in the effects of the present invention. The fasteners are preferably attached to the front and rear of the adapter, but may also be attached only to the front or rear of the adapter.

[0016] The first fixture of the fixtures may rotate 80° or more, or may rotate 360°. The term "generally inverted L-shaped" includes not only an inverted L-shaped shape but also similar shapes (such as an approximately inverted J-shaped shape) that do not result in any difference in the effects of the present invention. The up / down, front / rear, left / right directions of the tray for precision substrate storage containers according to the present invention are directions based on the drawings and can be appropriately changed as needed. Furthermore, while the subject of the present invention is a tray for precision substrate storage containers, if the configuration of another application is the same as the configuration of the present invention and can be converted into a tray for precision substrate storage containers, and the effects of the present invention are achieved, the configuration for the other application falls within the technical scope of the present invention.

[0017] According to the present invention, since the adapter is not a typical plate but is a hollow, roughly frame-shaped one, it is expected to be lightweight, and this lightweight design reduces the risk of interference with the transport of semiconductor wafer storage containers. Furthermore, since the adapter's mounting piece and fixing member are separately brought into contact with the multiple support teeth of the body, the load acting on the support teeth can be dispersed, preventing damage or cracks to the support teeth, and the adapter can be made thin so that it can be easily inserted and removed from the body.

[0018] The present invention has the advantages of realizing a lightweight precision substrate storage container and eliminating the risk of deformation or damage to the semiconductor wafer storage container, as well as allowing the tray for the precision substrate storage container to be easily inserted and removed, making handling easier.

[0019] According to the invention of claim 2, by using a spacer, the height of the precision substrate storage container relative to the fixture can be adjusted, making the fixing work easier regardless of the height of the precision substrate storage container. Furthermore, by utilizing the clearance groove of the spacer, the flange portion of the precision substrate storage container can be properly sandwiched and held between the spacer and the fixture. According to the invention of claim 3, since the spacer is generally X-shaped in plan view, the spacer can be made lighter, more durable, and more rigid. Furthermore, since the engaging protrusion of the spacer performs an identification function in addition to its positioning and fixing function, it is possible to prevent the spacer from being installed incorrectly on the support piece of the adapter.

[0020] According to the invention of claim 4, a support piece having a generally L-shaped cross section is formed on the back surface of the adapter to support either the peripheral edge of the underside of the flange of the precision substrate storage container or the spacer, so that the precision substrate storage container can be inserted deeply and stably mounted regardless of its height. Moreover, since the support piece is formed endlessly rather than divided into multiple pieces, it is expected that the adapter will be easier to manufacture.

[0021] According to the invention of claim 5, since there is no need to provide an engagement hole on the inner periphery of the hollow portion of the adapter, a simplified configuration can be expected. Furthermore, since the support piece of the adapter has a generally plate-shaped cross section that does not protrude downward, molding is easy. Furthermore, since the support piece is formed endlessly rather than divided into multiple pieces, manufacturing of the adapter can be expected to be easier. According to the invention of claim 6, since the first and second fasteners each move up and down using a spring member, the first and second fasteners can be appropriately hooked onto the flange portion, etc., of the precision substrate storage container regardless of the height of the precision substrate storage container.

[0022] According to the seventh aspect of the present invention, the locking piece of the first fixture can be easily rotated by operating the handle of the locking piece. Furthermore, since the locking piece comes into contact with the door set and restricts free rotation, it is possible to prevent the precision substrate container from shifting position or falling off during transportation of the semiconductor wafer storage container. According to the eighth aspect of the present invention, precision substrate storage containers such as photomask storage containers and reticle storage containers can be stored in a semiconductor wafer storage container, and the semiconductor wafer storage container can be transported while being suspended by an automatic transport device, thereby improving the efficiency of semiconductor manufacturing.

[0023] FIG. 1 is a front explanatory view showing a state in which an embodiment of a tray for a precision substrate storage container according to the present invention is stored in a semiconductor wafer storage container. FIG. 2 is a cross-sectional side view showing a state in which an embodiment of a tray for a precision substrate storage container according to the present invention is stored in a semiconductor wafer storage container. FIG. 3 is a perspective explanatory view showing an embodiment of a tray for a precision substrate storage container according to the present invention. FIG. 4 is a perspective explanatory view showing an embodiment of a tray for a precision substrate storage container according to the present invention from the bottom side. FIG. 5 is a plan explanatory view showing an adapter in an embodiment of a tray for a precision substrate storage container according to the present invention. FIG. 6 is a plan explanatory view showing a relationship between an adapter and a spacer in an embodiment of a tray for a precision substrate storage container according to the present invention. FIG. 7 is a main part explanatory view showing a clearance groove of an adapter, a clearance groove of a spacer, etc. in an embodiment of a tray for a precision substrate storage container according to the present invention. FIG. 8 is a main part explanatory view showing a relationship between a support tooth of a body, a mounting piece of an adapter, and a fixing piece of an adapter in an embodiment of a tray for a precision substrate storage container according to the present invention. 12. It is a plan view of a main part which shows a state in which an adapter is inserted into the inside of a body in an embodiment of a tray for a precision substrate storage container according to the present invention. It is a plan view which shows a state in which fixing pieces are slid from the inside to the outside into a pair of mounting grooves of the adapter in FIG. 10 to be positioned and fitted. It is a plan view which shows a state in which the fixing pieces in FIG. 11 are screwed and fixed by a plurality of fasteners. It is a plan view of a main part which shows a state in which the supporting piece of the adapter in FIG. 12 supports the peripheral edge of the lower surface of the flange portion of the precision substrate storage container, and the locking pieces of a pair of first fasteners are rotated. It is a plan view which shows a state in which the locking pieces are locked to the front upper surface of the flange portion of the precision substrate storage container in FIG. 13. It is a plan view which shows a state in which a door set is fitted to the open front of the body in FIG. It is a front explanatory view which shows a state in which the tray for a precision substrate storage container according to a second embodiment of the present invention is stored in a semiconductor wafer storage container. 10 is a cross-sectional side view schematically showing a state in which a tray for a precision substrate storage container according to a second embodiment of the present invention is stored in a semiconductor wafer storage container. FIG.1 is a perspective explanatory view schematically showing a tray for a precision substrate storage container according to a second embodiment of the present invention, and FIG. 2 is a perspective explanatory view schematically showing the tray for a precision substrate storage container according to the second embodiment of the present invention, from the bottom side.

[0024] A preferred embodiment of the present invention will now be described with reference to the drawings. As shown in FIGS. 1 to 15 , a tray 30 for precision substrate storage containers in this embodiment is a special tray dedicated to supporting a wide variety of precision substrate storage containers 1 and storing them in a semiconductor wafer storage container 10. The tray 30 includes an adapter 31 that mounts the flange 2 of the precision substrate storage container 1 and is stored in the body 11 of the semiconductor wafer storage container 10, a spacer 40 that is interposed as needed between the flange 2 of the precision substrate storage container 1 and the adapter 31, a plurality of fasteners 50 that are screwed onto the front and rear portions of the adapter 31 and engage with the flange 2 of the precision substrate storage container 1, and a pair of fasteners 60 that are detachably screwed onto both sides of the adapter 31 and can contact the support teeth 12 of the body 11, thereby contributing to the achievement of Goal 9 of the SDGs adopted at the United Nations Summit.

[0025] As shown in Figures 2 and 13 to 15, the precision substrate storage container 1 is, for example, a pod weighing approximately 5 kg, with a lid fitted over the open top of a main body for storing precision substrates, and with the front, rear, left, and right sides of the lower flange portion 2 extending outward in the width direction. Specifically, it is at least one of a photomask storage container for storing photomasks, which are precision substrates, and a reticle storage container for storing reticles, which are precision substrates. These may be tall or short. A pair of left and right ribs 4 are generally arranged at a distance on the flat top surface 3 in front of the flange portion 2 of the precision substrate storage container 1.

[0026] 1, 2, 11 to 15, the semiconductor wafer storage container 10 is configured as a FOUP type used in mini-environment semiconductor factories, and includes a body 11 capable of storing a plurality of semiconductor wafers in an aligned manner, and a door set 18 that is detachably fitted to the open front of the body 11. The body 11 is molded into a front-open box with an open front from a molding material containing a predetermined resin, and on both sides inside the body 11, a pair of left and right support teeth 12 that are originally intended to horizontally support semiconductor wafers of 300 mm in diameter are provided opposite each other, and these left and right support teeth 12 are arranged at a predetermined interval in the vertical direction.

[0027] Each support tooth 12 is formed as a long, narrow plate that extends while bending in the front-to-rear direction of the body 11, and near the center of the surface, a positioning step 13 that positions and supports the side peripheral edge of the semiconductor wafer is formed as a recess that is approximately in the shape of a waning crescent moon in plan view. Due to the recess formation of this positioning step 13, the front part of the support tooth 12 is formed as a jump-out prevention part 14 that restricts the semiconductor wafer from jumping out forward.

[0028] A bottom plate 15, which may be substantially Y-shaped, triangular, polygonal, or the like, is mounted horizontally on the underside of the bottom plate of the body 11, and a plurality of positioning fixtures are attached to this bottom plate 15, each of which fits from above onto a positioning pin of a semiconductor processing device (not shown) to position the semiconductor wafer storage container 10 with high precision. A robotic flange 16, which is substantially rectangular in plan view, is detachably attached as an option to the approximate center of the ceiling of the body 11, and this robotic flange 16 is suspended by an automatic transport device such as an OHT (overhead hitch) in a factory (not shown). Removably attached gripping handles 17 are optional on the outer surfaces of both sides of the body 11.

[0029] 15, the door set 18 comprises a door body 19 having a generally rectangular front surface that is detachably press-fitted into the open front surface of the body 11, and a pair of left and right door covers 20 that cover both sides of the open front surface of the door body 19, with a locking mechanism 21 interposed between both sides of the open front surface of the door body 19 and the pair of left and right door covers 20 to prevent them from falling off. A front retainer (not shown) that holds the front peripheral edge of a semiconductor wafer horizontally with an elastic piece is detachably attached to a recessed central part of the back surface of the door body 19 that faces the back surface of the body 11, but this front retainer is removed and unused when a precision substrate storage container tray 30 is used.

[0030] As shown in Figures 1 to 6 and 13 to 15, the adapter 31 of the tray 30 for precision substrate storage containers is molded into a flat rectangular frame-shaped plate from a molding material containing a specified resin in order to position the precision substrate storage container 1 and reduce its weight, and is supported by a pair of left and right support teeth 12 of the body 11 in place of semiconductor wafers.

[0031] The specified resin for the molding material is not particularly limited, but examples thereof include thermoplastic resins such as polycarbonate (PC) resin, cycloolefin polymer (COP) resin, cycloolefin copolymer (COC) resin, polypropylene (PP) resin, polyetherimide (PEI) resin, polyether ketone (PEK) resin, polyether ether ketone (PEEK) resin, polybutylene terephthalate (PBT) resin, polyacetal (POM) resin, and liquid crystal polymer, as well as alloys thereof.

[0032] The hollow portion 32 at the center of the adapter 31 is formed into a rectangular shape in plan view, and is sized in accordance with SEMI standards so that it can fit loosely with a small gap or tightly and without a gap into the flange portion 2 of the precision substrate storage container 1. Engagement holes 33 for the spacers 40 are drilled through the inner peripheral surface of this hollow portion 32 on one front side and one rear side, and each engagement hole 33 is formed into a horizontally long rectangle.

[0033] Support pieces 34 with an L-shaped cross section are provided around the back surface of the adapter 31 in a planar frame shape, located below the inner peripheral surface of the hollow portion 32, and function to support either the peripheral edge of the underside 5 of the flange portion of the precision substrate storage container 1 or the spacer 40. A relief groove (also called a relief allowance) 35 is formed in the rear surface of the support pieces 34, recessed and inclined at an angle of about 10° so as to face the rear of the peripheral edge of the underside 5 of the flange portion of the precision substrate storage container 1, and by using this relief groove 35, the rear of the precision substrate storage container 1 can be tilted downward before it is smoothly loaded.

[0034] Mounting grooves 36 for the fixing pieces 60 are cut out on the flat surfaces on both left and right sides of the adapter 31, and the fixing pieces 60 are fitted into the pair of mounting grooves 36. A pair of mounting pieces 37 protrude horizontally from the outer surfaces on both sides of the adapter 31, so as to face the fixing pieces 60 from below with a gap between them, and each mounting piece 37 is formed to be thinner than the wall thickness of the adapter 31. The mounting pieces 37 are formed in the shape of long, narrow plates extending in the front-to-rear direction of the adapter 31, and are strongly supported by the support teeth 12 of the body 11 under their own weight. Notches are formed on the back surfaces of the mounting pieces 37 as necessary, and these notches come into contact with the positioning steps 13 of the support teeth 12 to perform their positioning function.

[0035] 3, 4, 6, 7, etc., the spacer 40 is formed as a flat X-shaped plate piece from the same molding material as the adapter 31 in order to improve lightness and durability, and is not used and is omitted when the precision substrate storage container 1 is tall, but when the precision substrate storage container 1 is short, it is fitted into the hollow portion 32 of the adapter 31 and supported and mounted on the support piece 34, and functions to mount the precision substrate storage container 1 and adjust its height relative to the multiple fixtures 50. The thickness of this spacer 40 is determined taking into account the heights of the multiple types of precision substrate storage containers 1.

[0036] A recessed relief groove 41 is formed in the rear surface of the spacer 40 at an incline of approximately 10° to face the rear peripheral edge of the flange portion undersurface 5 of the precision substrate storage container 1. Furthermore, engagement protrusions 43 that fit into the pair of engagement holes 33 to position the spacer 40 are formed on the front and rear ends of a pair of inclined pieces 42 that form the spacer 40. In addition to the function of positioning and fixing the spacer 40, each engagement protrusion 43 also prevents incorrect insertion. This prevents the spacer 40 from being mounted upside down and supported by the support pieces 34 of the adapter 31 in this incorrect state.

[0037] 1 to 6 and 11 to 15, the multiple fixtures 50 are configured to include a pair of left and right first fixtures 51 rotatably (swingably) arranged on the front surface of the adapter 31 and engaging with the front upper surface 3 of the flange portion 2 of the precision substrate storage container 1, and a second fixture 55 with an inverted L-shaped cross section that is screwed into the vicinity of the center of the rear surface of the adapter 31 and engaging with the rear upper surface 3 of the flange portion 2 of the precision substrate storage container 1 to position and fix it. Each of these first and second fixtures 51 and 55 has a built-in coil spring (not shown) so that they can accommodate flange portions 2 of precision substrate storage containers 1 that are not of the same height, and the coil spring allows them to move up and down in a range of 1 mm to 5 mm, preferably 1 mm to 3 mm.

[0038] One of the pair of first fasteners 51 (left side in Figure 3, etc.) rotates 90° counterclockwise, and the other (right side in Figure 3, etc.) first fastener 51 rotates 90° clockwise, from the viewpoint of fixing the first fasteners 51 while avoiding the pair of ribs 4 on the front upper surface 3 of the flange 2 of the precision substrate storage container 1. Each first fastener 51 is formed in a substantially T-shape, including a cylindrical tube portion 52 rotatably supported near the center of the front surface of the adapter 31, and an elongated plate-like locking piece 53 formed horizontally on the upper end of the tube portion 52 and locking onto the front upper surface 3 of the flange 2 of the precision substrate storage container 1, and a handle 54 for rotation is formed on one end of the locking piece 53.

[0039] When the precision substrate storage container 1 is not fixed, the locking piece 53 of the first fixture 51 is oriented in the left-right direction of the adapter 31, and when the precision substrate storage container 1 mounted on the adapter 31 is fixed, the locking piece 53 rotates 90° and is oriented in the front-to-rear direction of the adapter 31. When the locking piece 53 rotates 90° and is oriented in the front-to-rear direction of the adapter 31, it comes into contact with the center of the back surface of the door main body 19 that constitutes the door set 18. This contact restricts the rotation of the first fixture 51, preventing the precision substrate storage container 1 from shifting position or falling off.

[0040] 1, 3 to 6, 8, and 11 to 15, the pair of fixing pieces 60 are slid from the inside to the outside into the pair of mounting grooves 36 of the adapter 31 to position and fit them, respectively, in order to facilitate the insertion and removal of the precision substrate storage container tray 30, and are then detachably screwed in with a plurality of fasteners. The pair of fixing pieces 60 are formed with mutually different designs and shapes in order to prevent incorrect fitting or screwing. Therefore, the fixing piece 60 for one side is properly fitted or screwed into the mounting groove 36 on one side of the adapter 31, and incorrect fitting or screwing of the fixing piece 60 for the other side into the mounting groove 36 on one side is prevented.

[0041] Each fixing piece 60 is molded from the same molding material as the adapter 31 into a polygonal plate extending in the front-to-rear direction of the adapter 31, is formed thinner than the wall thickness of the adapter 31, and functions to be in pressure contact with the rear surface of the support tooth 12 of the body 11 from below. The fixing piece 60 is in pressure contact with the rear surface of the support tooth 12 of the body 11 from below, but this support tooth 12 is separate from the support tooth 12 on which the mounting piece 37 of the adapter 31 is supported and mounted, and is located above the support tooth 12 on which the mounting piece 37 of the adapter 31 is supported and mounted. For example, when the fixing piece 60 is in pressure contact with the rear surface of the fifth-stage support tooth 12 from the bottom of the body 11, the mounting piece 37 of the adapter 31 is supported and mounted on the third-stage support tooth 12 from the bottom.

[0042] The pressure contact force of the fixed piece 60 can be obtained by interposing a shim with excellent spacer function between the mounting piece 37 of the adapter 31 and the fixed piece 60, by forming an inclined portion on the fixed piece 60, by changing the thickness of the fixed piece 60, etc.

[0043] In the above configuration, when a tall precision substrate storage container 1 is stored in the semiconductor wafer storage container 10 and transported, first, the adapter 31 is inserted horizontally between the multiple support teeth 12 at the bottom inside of the empty body 11 (see Figure 10), the pair of mounting pieces 37 of this adapter 31 are supported horizontally by the pair of left and right support teeth 12 of the body 11 (see Figure 9), and the fixing pieces 60 are slid horizontally from the inside to the outside into the pair of mounting grooves 36 of the adapter 31 to position and fit them (see Figure 11), and then each fixing piece 60 is screwed and fixed with multiple fasteners such as bolts and pressed against the back surface of the upper support tooth 12 (see Figures 8 and 12).

[0044] At this time, when the mounting piece 37 of the adapter 31 is mounted and supported on the first support tooth 12 from below, for example, the fixing piece 60 is pressed against the back surface of the third support tooth 12 from below on the body 11 .

[0045] Next, the precision substrate storage container 1 is inserted into the body 11 and its rear part is tilted downward, so that the rear of the flange portion 2 of the precision substrate storage container 1 is clamped between the rear of the support piece 34 of the adapter 31 and the second fixture 55 via the escape groove 35, and then the front of the precision substrate storage container 1 is tilted downward so that the support piece 34 of the adapter 31 directly supports the peripheral edge of the underside 5 of the flange portion of the precision substrate storage container 1 (see Figure 13).

[0046] In this case, no large gap is created between the flange portion 2 of the precision substrate storage container 1 and the multiple fixtures 50, which does not interfere with the fixation of the precision substrate storage container 1, and so the spacer 40 is omitted. Also, the rear portion of the support piece 34 has an escape groove 35, which can be utilized to properly hold the rear of the flange portion 2 of the precision substrate storage container 1 between the rear portion of the support piece 34 of the adapter 31 and the second fixture 55. Also, because the second fixture 55 moves up and down due to the coil spring, the short piece protruding forward of the second fixture 55 can be securely engaged with the rear upper surface 3 of the flange portion 2 of the precision substrate storage container 1.

[0047] Next, the handles 54 of the locking pieces 53 of each first fixture 51 are operated to rotate the locking pieces 53 by 90°, and each locking piece 53 is locked onto the front upper surface 3 of the flange portion 2 of the precision substrate storage container 1 to position and fix it (see Figures 13 and 14), and the door set 18 is fitted into the open front of the body 11, allowing the tall precision substrate storage container 1 to be stored in the semiconductor wafer storage container 10 and transported (see Figure 15).

[0048] At this time, the first fixture 51 moves up and down by the coil spring so as to correspond to the height of the flange portion 2 of the precision substrate storage container 1, so that the locking piece 53 can be securely locked to the front upper surface 3 of the flange portion 2 of the precision substrate storage container 1. Furthermore, the locking piece 53 comes into contact with the center of the back surface of the door set 18, restricting free rotation, so that the precision substrate storage container 1 can be prevented from shifting position or falling off even when the semiconductor wafer storage container 10 is transported.

[0049] According to the above configuration, the adapter 31 is not a disk or the like but a hollow frame with reduced weight, which allows for a reduction in weight and eliminates the risk of cracking or damage to the support teeth 12 of the body 11. Furthermore, the reduction in weight also eliminates the risk of interfering with the transport of the automatic transport device that suspends the semiconductor wafer storage container 10. Furthermore, by using the spacer 40, the height of the precision substrate storage container 1 can be adjusted when it is fixed, making the process of fixing the precision substrate storage container 1 extremely easy.

[0050] Furthermore, the mounting pieces 37 and fixing pieces 60 of the adapter 31 are separately brought into contact with the multiple support teeth 12 of the body 11, distributing the load acting on the support teeth 12, thereby preventing deformation or damage to the support teeth 12 and enabling the adapter 31 to be easily inserted and removed from the body 11. Furthermore, the adapter 31 is not a large shelf, so it does not become bulky, eliminating the risk of it being difficult to handle. Furthermore, the support pieces 34 of the adapter 31 have an L-shaped cross section and extend vertically, so the precision substrate storage container 1 can be mounted in a stable position regardless of its height.

[0051] Next, Figures 16 to 19 show a second embodiment of the present invention, in which the precision substrate storage container 1 is a low-profile type, and the flange portion 2 of this precision substrate storage container 1 is directly supported by the support piece 34A of the adapter 31.

[0052] Examples of the precision substrate storage container 1 include a low-profile photomask storage container for storing photomasks and a low-profile reticle storage container for storing reticles. The adapter 31 has a flat frame-shaped support piece 34A, which is a plate-shaped cross section and contacts and supports the periphery of the flange underside 5 of the precision substrate storage container 1, at the lower inner peripheral surface of the hollow portion 32. A recess 35, inclined at approximately 10°, is formed in the rear surface of the support piece 34A so as to face the rear of the periphery of the flange underside 5 of the precision substrate storage container 1. The use of this recess 35 allows the rear of the precision substrate storage container 1 to be tilted downward before smooth loading. The remaining components are similar to those of the above embodiment, and therefore will not be described further.

[0053] This embodiment is expected to have the same advantageous effects as the above-described embodiments, and since there is no need to drill multiple engagement holes 33 in the inner peripheral surface of the hollow portion 32 of the adapter 31, a simplified configuration can be expected. Furthermore, since the support pieces 34A of the adapter 31 have a plate-shaped cross section that does not protrude downward, molding is easy. Furthermore, by inserting the deep-type precision substrate storage container tray 30 with spacers 40 of the first embodiment into the lower interior of the body 11 and the shallow-type precision substrate storage container tray 30 of the second embodiment into the upper interior of the body 11, two low-profile precision substrate storage containers 1 can be stored and transported efficiently in the semiconductor wafer storage container 10, and significant improvements in production efficiency can be expected.

[0054] The body 11 and door set 18 of the semiconductor wafer storage container 10 in the above embodiment can be molded from the same molding material as the adapter 31. This semiconductor wafer storage container 10 is preferably a FOUP type, but if no problems arise, it may be an unused FOSB type used for transportation. Also, while the adapter 31 in the above embodiment has a substantially square frame shape in plan, it may also have a substantially polygonal frame shape in plan. The outer peripheral surface of this adapter 31 may have multiple corners or steps, or may be curved.

[0055] In addition to the specified resin, the molding material of the adapter 31 may contain conductive materials such as carbon fiber, carbon powder, carbon nanotubes, and conductive polymers, as well as various antistatic agents such as anionic, cationic, and nonionic antistatic agents, as needed. Engagement holes 33 for the spacer 40 may be drilled on the other front and rear sides of the inner circumferential surface of the hollow portion 32 of the adapter 31. The support pieces 34, 34A of the adapter 31 may be endless frame-shaped or may be multiple pieces. For example, the support pieces 34, 34A may be formed so as to protrude only from the lower front and lower rear portions of the inner circumferential surface of the hollow portion 32 of the adapter 31.

[0056] Furthermore, when the mounting piece 37 of the adapter 31 is supported and mounted on the support tooth 12, the fixing piece 60 may be supported by the support tooth 12 immediately above and adjacent to this support tooth 12. Furthermore, the spacer 40 may be, but is not limited to, an X-shape in plan view, and may be, for example, an asterisk symbol with multiple lines extending radially, or a plate that is approximately H-shaped in plan view. Of the multiple forming pieces that form this approximately H-shaped spacer 40 in plan view, an engaging protrusion 43 that fits into the engaging hole 33 of the support piece 34 can be formed on the end of at least one forming piece.

[0057] It is also possible to interpose a coil spring, leaf spring, or the like for vertical movement between the front of the adapter 31 and the first fixing device 51. It is also possible to interpose a coil spring, leaf spring, or the like for vertical movement between the rear of the adapter 31 and the second fixing device 55. The number of the pair of left and right first fixing devices 51 may be increased or decreased as necessary. Furthermore, all of the technologies described in this specification are subject to the acquisition of rights through amendments, divisional applications, etc.

[0058] The tray for a precision substrate storage container and the semiconductor wafer storage container according to the present invention are used in the field of semiconductor manufacturing and the like.

[0059] REFERENCE SIGNS LIST 1 precision substrate storage container 2 flange portion 3 upper surface 4 rib 5 lower surface 10 semiconductor wafer storage container 11 body 12 support teeth 18 door set 19 door body 30 tray for precision substrate storage container 31 adapter 32 hollow portion 33 engagement hole 34 support piece 34A support piece 35 relief groove 37 mounting piece 40 spacer 41 relief groove 42 inclined piece 43 engagement protrusion 50 fixing device 51 first fixing device 52 cylindrical portion 53 locking piece 54 handle 55 second fixing device 60 fixing piece (fixing member)

Claims

1. A tray for a precision substrate storage container which supports a precision substrate storage container and is stored in a semiconductor wafer storage container, comprising: an adapter which mounts the precision substrate storage container and is stored in a body which opens at the front of the semiconductor wafer storage container; a fastener which is attached to at least either the front or the rear of the adapter and which fastens the flange portion of the precision substrate storage container; and a plurality of fixing members which are detachably attached to both sides of the adapter and which can contact support teeth on both interior sides of the body; the adapter is formed into a planar, roughly frame-like shape which can fit into the flange portion of the precision substrate storage container, the adapter is formed with support pieces which can support the underside of the flange portion of the precision substrate storage container, and the support pieces are formed with escape grooves which can face each other behind the peripheral edge of the underside of the flange portion of the precision substrate storage container, mounting pieces respectively protrude from both sides of the adapter, and the plurality of mounting pieces can contact support teeth other than the support teeth of the body which come into contact with the fixing members.

2. A tray for a precision substrate storage container as described in claim 1, which includes a spacer interposed between the flange portion of the precision substrate storage container and the support piece of the adapter, and a clearance groove is formed on the surface of the spacer so as to face the rear peripheral edge of the underside of the flange portion of the precision substrate storage container.

3. A tray for precision substrate storage containers as described in claim 2, in which an engagement hole for a spacer is provided on the inner circumference of the hollow portion of the adapter, the spacer is formed into an approximately X-shape in plan view, and an engagement protrusion is formed on the end of at least one of a pair of inclined pieces forming the spacer, which can be fitted into the engagement hole in the hollow portion of the adapter.

4. A tray for precision substrate storage containers as claimed in claim 2, wherein a support piece having a generally L-shaped cross section is formed endlessly on the rear surface of the adapter for supporting either the peripheral edge of the underside of the flange of the precision substrate storage container or the spacer.

5. A tray for a precision substrate storage container as described in claim 1, in which an endless support piece having an approximately plate-shaped cross section is formed on the inner periphery of the hollow portion of the adapter that fits into the flange portion of the precision substrate storage container to support the peripheral edge of the underside of the flange portion of the precision substrate storage container.

6. A tray for precision substrate storage containers as described in claim 1 or 2, wherein the fixing devices include a first fixing device rotatably attached to the front part of the adapter and engaging with the front of the flange portion of the precision substrate storage container, and a second fixing device having a substantially inverted L-shape attached to the rear part of the adapter and engaging with the rear of the flange portion of the precision substrate storage container, and these first and second fixing devices are made movable up and down by a spring member.

7. A tray for precision substrate storage containers as described in claim 6, wherein the first fixing device includes a cylindrical portion rotatably supported on the front portion of the adapter, and a locking piece formed on the cylindrical portion that can be locked to the front of the flange portion of the precision substrate storage container, a handle for operation is formed on the locking piece, and when the precision substrate storage container mounted on the adapter is fixed, the locking piece is oriented in the fore-and-aft direction of the adapter and comes into contact with a door set fitted to the front of the body of the semiconductor wafer storage container.

8. A semiconductor wafer storage container comprising a front-open box body for storing the tray for a precision substrate storage container according to claim 1 or 2, and a door set which is removably fitted to the open front of the body, and which is used in the semiconductor manufacturing process.

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