Carrier table

Abstract

The present application relates to a carrier table, comprising: a carrier table main body, wherein a suction face is formed on one side of the carrier table main body in a first direction, and the suction face comprises at least one suction area for suctioning products; each of the suction areas is provided with at least two suction grooves, and the suction grooves are independent of each other; and the carrier table main body is provided with air holes in the first direction, and the suction grooves are in communication with the air holes corresponding thereto, such that the suction grooves can suction the products to the suction areas corresponding to the suction grooves. In the carrier table, since the suction grooves are independent of each other, when the products are carried on the carrier table, the suction grooves that are independent of each other can be brought into communication with corresponding vacuum generators through the air holes in communication with the suction grooves. Therefore, compared with the method in the prior art of suction holes being densely distributed, the suction grooves can be independently controlled, and when a local suction groove experiences a leak, the overall suction effect will not be affected.

Description

stage Technical Field

[0001] The present application relates to the technical field of solar cell manufacturing equipment, and in particular to a carrier. Background Art

[0002] Solar cells are devices that directly convert light energy into electrical energy through the photovoltaic or photochemical effects. As a new energy technology, they are gaining increasing popularity. During the solar cell manufacturing process, multiple laser scribing steps are required. During laser scribing, the solar cell substrate is held in place on a carrier using vacuum suction, ensuring a stable position and ensuring the laser scribing effect.

[0003] Traditionally, the carrier's surface is densely covered with suction holes, which are connected to a vacuum pump. The vacuum pump maintains a vacuum in the holes, allowing the solar cell substrate to be attached to the carrier's surface. However, this arrangement results in high processing costs due to the dense distribution of suction holes. Furthermore, these densely distributed holes are difficult to control individually, and leaks in some of the holes can affect the overall suction effect.

[0004] Summary of the Invention

[0005] Based on this, it is necessary to provide a carrier that can reduce processing costs and ensure adsorption effects to address the above problems.

[0006] A carrier, comprising:

[0007] A carrier body, wherein one side of the carrier body in the first direction forms an adsorption surface, the adsorption surface including at least one adsorption area for adsorbing the product, each adsorption area having at least two adsorption grooves, and the adsorption grooves are independent of each other;

[0008] The carrier body is provided with air holes in the first direction, and each of the adsorption grooves is communicated with the corresponding air hole, so that the adsorption groove can adsorb the product to the corresponding adsorption area.

[0009] The above-mentioned carrier, since each adsorption groove is independent of each other, when the product is placed on the carrier, each independent adsorption groove can be connected to the corresponding vacuum generator through the air holes connected thereto. In this way, compared with the method of densely distributed adsorption holes in the prior art (the method of densely distributed adsorption holes requires all adsorption holes to converge into the air flow channel, which is connected to the vacuum pump through the air flow channel. Since the adsorption holes are interconnected, when a local adsorption hole leaks, it will affect the overall adsorption effect), each adsorption groove can be independently controlled, and when a local adsorption groove leaks, it will not affect the overall adsorption effect. At the same time, compared with the method of densely distributed adsorption holes in the prior art, the carrier provided by the embodiment of the present application only needs to process adsorption grooves on the adsorption surface and open air holes in the first direction, which is convenient to process and reduces processing costs.

[0010] In one embodiment, the carrier body is an integrated structure.

[0011] In one embodiment, the carrier body is a rectangular plate-shaped structure, and the first direction is the thickness direction of the carrier body.

[0012] In one embodiment, each of the adsorption grooves includes a frame groove and a connecting groove. The frame groove can enclose itself to form a closed figure. The two ends of the connecting groove are respectively connected to the frame groove. The connecting groove of the adsorption groove is connected to the air hole.

[0013] In one embodiment, the frame groove is rectangular, the long side of the frame groove extends along the second direction, and the short side extends along the third direction; each of the adsorption grooves includes a first connecting groove extending along the second direction and a second connecting groove extending along the third direction, both ends of the first connecting groove and the second connecting groove are connected to the frame groove, and both the first connecting groove and the second connecting groove are connected to the air hole;

[0014] The first direction, the second direction, and the third direction intersect with each other.

[0015] In one embodiment, the carrier body is provided with a through hole in the first direction, the through hole is for a conveying mechanism to pass through the other side of the carrier body in the first direction to protrude the adsorption surface, the conveying mechanism is used to convey the product onto the carrier body along the second direction or the conveying mechanism is used to output the product from the carrier body along the second direction or the conveying mechanism is used to convey the product onto the carrier body along the second direction and output the product from the carrier body;

[0016] The second direction intersects the first direction.

[0017] In one embodiment, the through holes are arranged in a strip shape along the second direction.

[0018] In one embodiment, the through holes are distributed in an array along the second direction and the third direction;

[0019] The first direction, the second direction, and the third direction intersect with each other.

[0020] In one embodiment, each adsorption area is provided with a first mounting groove at the end in the second direction, and the first mounting groove is used to install a limiting mechanism, and the limiting mechanism can limit the position of the product in the adsorption area in the second direction; the second direction intersects with the first direction.

[0021] In one embodiment, the first mounting groove passes through the carrier body along the first direction.

[0022] In one embodiment, each of the adsorption areas is provided with a second mounting groove at both opposite ends in the third direction, and the second mounting groove is used to install a shaping mechanism, and the shaping mechanism can be pressed against the product in the third direction to adjust the position of the product in the adsorption area; the third direction intersects with the first direction.

[0023] In one embodiment, the second mounting groove passes through the carrier body along the first direction.

[0024] In one embodiment, each of the adsorption areas is correspondingly provided with at least two groups of second mounting grooves, and each group of the second mounting grooves includes two second mounting grooves spaced apart in the third direction.

[0025] In one embodiment, each of the adsorption areas is correspondingly provided with two groups of the second mounting grooves.

[0026] In one embodiment, each of the adsorption areas is further provided with a third mounting groove at both opposite ends in the second direction, and the third mounting groove is used to install a transition mechanism, and the transition mechanism can support the product when the product moves relative to the carrier body along the second direction; the second direction intersects with the first direction.

[0027] In one embodiment, the third mounting groove passes through the carrier body along the first direction.

[0028] In one embodiment, the adsorption surface has two adsorption areas, one adsorption area includes another adsorption area, and the two adsorption areas share one third mounting groove.

[0029] In one embodiment, four third mounting grooves are provided on the carrier body, two of the third mounting grooves are located at one end of the two adsorption areas in the second direction, and the other two third mounting grooves are located at the other end of the two adsorption areas in the second direction, and the two third mounting grooves located at the same end are spaced apart along the third direction;

[0030] The first direction, the second direction, and the third direction intersect with each other.

[0031] In one embodiment, the adsorption surface includes at least two adsorption areas, each of the adsorption areas has a different size, and the larger adsorption area includes the smaller adsorption area. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] FIG1 is a plan view of a carrier provided in one embodiment of the present application.

[0033] Description of reference numerals:

[0034] 100. Carrier; 10. Carrier body; 20. Adsorption surface; 21. Adsorption area; 30. Adsorption groove; 31. Frame groove; 32. Connecting groove; 40. Air hole; 50. Through hole; 60. First mounting groove; 70. Second mounting groove; 80. Third mounting groove. DETAILED DESCRIPTION

[0035] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0036] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0037] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0038] In this application, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0039] In this application, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0040] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods.

[0041] Referring to FIG1 , an embodiment of the present application provides a carrier 100 capable of carrying and adsorbing products. Specifically, the carrier 100 is used in a laser scribing device, and the product that the carrier 100 can carry and adsorb is a solar cell substrate. When the solar cell substrate is carried and adsorbed on the carrier 100, the laser scribing device can scribble on the solar cell substrate. In a specific embodiment, the solar cell is a perovskite cell. There are three processes in the production process of the perovskite cell that require scribing, namely the P1 process, the P2 process, and the P3 process. The above-mentioned laser scribing device can scribble in the P3 process.

[0042] It is conceivable that in other embodiments, there is no limitation on the type of equipment used by the carrier 100 , and there is no limitation on the type of products carried and adsorbed by the carrier 100 .

[0043] The carrier 100 includes a carrier body 10. A suction surface 20 is formed on one side of the carrier body 10 in a first direction. The suction surface 20 includes at least one suction region 21 for adsorbing products. Each adsorption region 21 is provided with at least two adsorption slots 30, each of which is independent of the other. The carrier body 10 is provided with air holes 40 in the first direction. Each adsorption slot 30 is connected to a corresponding air hole 40. That is, each adsorption slot 30 is connected to a different air hole 40, allowing the adsorption slot 30 to adsorb products to its corresponding adsorption region 21.

[0044] It should be noted that the fact that the adsorption tanks 30 are independent of each other means that the adsorption tanks 30 are not connected to each other.

[0045] The carrier 100 provided in the embodiment of the present application has independent adsorption grooves 30. When the product is carried on the carrier 100, each independent adsorption groove 30 can be connected to the corresponding vacuum generator through the air holes 40 connected thereto. In this way, compared with the dense adsorption hole method in the prior art (the dense adsorption hole method requires all adsorption holes to converge into the air flow channel and be connected to the vacuum pump through the air flow channel. Since the adsorption holes are connected to each other, when a local adsorption hole leaks, it will affect the overall adsorption effect), each adsorption groove 30 can be independently controlled, and when a local adsorption groove 30 leaks, it will not affect the overall adsorption effect. At the same time, compared with the dense adsorption hole method in the prior art, the carrier 100 provided in the embodiment of the present application only needs to process the adsorption grooves 30 on the adsorption surface 20 and open the air holes 40 in the first direction, which is convenient to process and reduces the processing cost.

[0046] In some embodiments, the carrier body 10 is an integrated structure. Compared with a spliced ​​carrier body 10, the integrated structure of the carrier body 10 can ensure the flatness of the entire adsorption surface 20, thereby ensuring the adsorption effect.

[0047] Furthermore, the carrier body 10 is a rectangular plate-shaped structure, and the first direction is the thickness direction of the carrier body 10. It should be understood that in other embodiments, the shape of the carrier body 10 is not limited, for example, the carrier body 10 can also be disc-shaped.

[0048] In some embodiments, referring to FIG1 , the adsorption surface 20 has at least two adsorption areas 21, and each adsorption area 21 has a different size, so that the carrier 100 can adsorb products of different sizes. The larger adsorption area 21 includes the smaller adsorption area 21, that is, the smaller adsorption area 21 is a part of the larger adsorption area 21. In one specific embodiment, the adsorption surface 20 has two adsorption areas 21, and one adsorption area 21 includes the other adsorption area 21. When the larger adsorption area 21 adsorbs a product, the smaller adsorption area 21 cannot adsorb the product, so that the carrier 100 can adsorb two products of different specifications, but can only adsorb one product at a time. Of course, in other embodiments, there is no limitation on the number and arrangement of the adsorption areas 21.

[0049] Furthermore, each adsorption region 21 is provided with 12 adsorption slots 30. It is conceivable that in other embodiments, the number of adsorption slots 30 included in each adsorption region 21 is not limited.

[0050] The adsorption groove 30 includes a frame groove 31 and a connecting groove 32. The frame groove 31 can be enclosed to form a closed shape. The two ends of the connecting groove 32 are respectively connected to the frame groove 31. The connecting groove 32 of the adsorption groove 30 is connected to the air hole 40. In this way, the adsorption area of ​​the adsorption groove 30 can be increased to ensure the adsorption effect of the product on the carrier 100. Of course, in other embodiments, the adsorption groove 30 can also include only the frame groove 31 and omit the connecting groove 32. In this case, the air hole 40 is directly connected to the frame groove 31.

[0051] In some specific embodiments, referring to FIG1 , the frame groove 31 is rectangular, the long side of the frame groove 31 extends along the second direction, and the short side extends along the third direction. Each adsorption groove 30 includes a first connecting groove extending along the second direction and a second connecting groove extending along the third direction. Both ends of the first connecting groove and the second connecting groove are connected to the frame groove 31, and both the first connecting groove and the second connecting groove are connected to the air hole 40. Among them, the first direction, the second direction and the third direction intersect with each other. Specifically, the first direction, the second direction and the third direction are perpendicular to each other. When the carrier body 10 is a rectangular plate-like structure, the second direction is the length direction of the carrier body 10, and the third direction is the width direction of the carrier body 10. As shown in FIG1 , the second direction is the X direction in FIG1 , the third direction is the Y direction in FIG1 , and the first direction is the direction perpendicular to the paper in FIG1 .

[0052] The above arrangement, on the one hand, facilitates the processing of the adsorption groove 30; on the other hand, can further increase the adsorption area of ​​the adsorption groove 30, further ensuring the adsorption effect.

[0053] It is conceivable that in some other embodiments, the arrangement of the frame groove 31 and the connecting groove 32 is not limited.

[0054] In some embodiments, the carrier body 10 is provided with a through hole 50 extending in the first direction. The through hole 50 allows a conveying mechanism to pass through the other side of the carrier body 10 in the first direction to protrude the suction surface 20. The conveying mechanism is used to convey the product onto the carrier body 10 in the second direction, or to remove the product from the carrier body 10 in the second direction, or to both convey the product onto the carrier body 10 in the second direction and remove the product from the carrier body 10 in the second direction. Specifically, the conveying mechanism includes a conveying wheel. Before the product is adsorbed onto the carrier 100 for marking or after being removed from the carrier 100, the conveying wheel can pass through the through hole 50. The driving member of the conveying mechanism drives the conveying wheel to rotate to transport the product in the second direction. When the product is to be placed on the carrier 100 for marking, the conveying wheel can move in the first direction within the through hole 50 and retract into the through hole 50, allowing the suction surface 20 of the carrier 100 to adsorb the product.

[0055] In one embodiment, the through holes 50 are arranged in a strip shape along the second direction to facilitate the conveying wheel to pass through. Of course, in other embodiments, the shape of the through holes 50 is not limited, such as the cross-sectional shape of the through holes 50 can also be square or circular.

[0056] Furthermore, the through holes 50 are distributed in an array along the second direction and the third direction. Of course, in some other embodiments, the carrier body 10 may also be provided with only one row of through holes 50 in the third direction, which is not limited here.

[0057] In some embodiments, a first mounting groove 60 is provided at the end of each adsorption region 21 in the second direction. The first mounting groove 60 is used to mount a limiting mechanism that can limit the position of the product in the adsorption region 21 in the second direction. Specifically, when the conveying mechanism conveys the product onto the carrier 100, the limiting mechanism can limit the position of the product in the second direction.

[0058] It should be noted that when the product is marked and transported off the carrier 100 by the conveying mechanism, the limiting mechanism retracts into the first mounting groove 60, thereby preventing the conveying mechanism from transporting the product. Furthermore, the first mounting groove 60 extends through the carrier body 10 in the first direction. Of course, in other embodiments, the first mounting groove 60 may not extend through the carrier body 10, and this is not a limitation here.

[0059] In some embodiments, each adsorption region 21 is provided with second mounting slots 70 at opposite ends in the third direction. The second mounting slots 70 are used to mount a shaping mechanism that abuts against the product in the third direction to adjust the product's position within the adsorption region 21. Furthermore, the second mounting slots 70 extend through the carrier body 10 along the first direction. Of course, in other embodiments, the second mounting slots 70 may not extend through the carrier body 10, and this is not a limitation here.

[0060] It should be noted that the adsorption groove 30 can be used to extract the gas therein through a vacuum generator when marking to adsorb the product. Before adsorption, it is often necessary to adjust the position of the product so that the product is in a preset position, such as making the central axis of the product coincide with the central axis of the carrier body 10 extending in the second direction. At this time, gas can be introduced into the adsorption groove 30 to make the product in a suspended state, and the shaping mechanism located on both sides of the product can abut against the product in the third direction to adjust the position of the product. It should also be noted that after the position of the product is adjusted, the shaping mechanism is reset. At this time, the vacuum generator can make the adsorption groove 30 in a vacuum state, so that the product is adsorbed to the adsorption surface 20 of the carrier body 10.

[0061] Further, referring to Figure 1, each adsorption area 21 is correspondingly provided with at least two groups of second mounting groove groups, and each group of second mounting groove groups includes two second mounting grooves 70 spaced apart in the third direction. In this way, more shaping mechanisms can be installed to facilitate shaping of the product before adsorption.

[0062] In one embodiment, two second mounting slot groups are provided for each adsorption region 21. In this case, four shaping mechanisms are provided for each adsorption region 21. It should be understood that in other embodiments, the number of second mounting slot groups is not limited.

[0063] In some embodiments, each adsorption region 21 further includes third mounting slots 80 at both ends along the second direction. These slots are used to mount a transition mechanism. When the product moves relative to the carrier body 10 in the second direction, the transition mechanism supports the product, preventing it from sagging due to lack of support. Furthermore, the third mounting slots 80 extend through the carrier body 10 along the first direction. Of course, in other embodiments, the third mounting slots 80 may not extend through the carrier body 10, and this is not a limitation here.

[0064] Specifically, when the suction surface 20 has two suction areas 21, and one suction area 21 includes the other suction area 21, the two suction areas 21 can share the third mounting groove 80. That is, the third mounting grooves 80 of the two suction areas 21 are integrated or connected. More specifically, the carrier body 10 is provided with four third mounting grooves 80: two third mounting grooves 80 are located at one end of the two suction areas 21 in the second direction, and the other two third mounting grooves 80 are located at the other end of the two suction areas 21 in the second direction. The two third mounting grooves 80 located at the same end are spaced apart along the third direction.

[0065] In some other embodiments, there is no limitation on the number and arrangement of the adsorption areas 21 , and there is no limitation on the number and arrangement of the third installation slots 80 .

[0066] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0067] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, and these modifications and improvements fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A carrier, characterized in that: include: A carrier body (10), wherein a suction surface (20) is formed on one side of the carrier body (10) in a first direction, wherein the suction surface (20) comprises at least one suction area (21) for suctioning a product, wherein each suction area (21) is provided with at least two suction grooves (30), and each of the suction grooves (30) is independent of each other; The carrier body (10) is provided with air holes (40) in the first direction, and each of the adsorption grooves (30) is connected to the corresponding air hole (40), so that the adsorption groove (30) can adsorb the product to the corresponding adsorption area (21).

2. The stage according to claim 1, characterized in that: The carrier body (10) is an integrated structure.

3. The stage according to claim 1, characterized in that: The carrier body (10) is a rectangular plate-shaped structure, and the first direction is the thickness direction of the carrier body (10).

4. The stage according to claim 1, characterized in that: Each of the adsorption grooves (30) comprises a frame groove (31) and a connecting groove (32); the frame groove (31) can be enclosed by itself to form a closed figure; two ends of the connecting groove (32) are respectively connected to the frame groove (31); and the connecting groove (32) of the adsorption groove (30) is connected to the air hole (40).

5. The stage according to claim 4, characterized in that: The frame groove (31) is rectangular, the long side of the frame groove (31) extends along the second direction, and the short side extends along the third direction; each of the adsorption grooves (30) comprises a first connecting groove extending along the second direction and a second connecting groove extending along the third direction, both ends of the first connecting groove and the second connecting groove are connected to the frame groove (31), and both the first connecting groove and the second connecting groove are connected to the air hole (40); The first direction, the second direction and the third direction intersect each other.

6. The stage according to claim 1, characterized in that: The platform body (10) is provided with a through hole (50) in the first direction, and the through hole (50) is used for the conveying mechanism to pass through the other side of the platform body (10) in the first direction to protrude the adsorption surface (20), and the conveying mechanism is used to convey the product to the platform body (10) along the second direction or the conveying mechanism is used to output the product from the platform body (10) along the second direction or the conveying mechanism is used to convey the product to the platform body (10) along the second direction and to output the product from the platform body (10); The second direction intersects the first direction.

7. The stage according to claim 6, characterized in that: The through holes (50) are arranged in a long strip shape along the second direction.

8. The stage according to claim 6, characterized in that: The through holes (50) are distributed in an array along the second direction and the third direction; The first direction, the second direction and the third direction intersect each other.

9. The stage according to claim 1, characterized in that: Each adsorption area (21) is provided with a first mounting groove (60) at the end in the second direction, the first mounting groove (60) being used to install a limiting mechanism, the limiting mechanism being capable of limiting the position of the product in the adsorption area (21) in the second direction; the second direction intersects with the first direction.

10. The stage according to claim 9, characterized in that: The first mounting groove (60) penetrates the carrier body (10) along the first direction.

11. The stage according to claim 1, characterized in that: Each of the adsorption areas (21) is provided with a second mounting groove (70) at two opposite ends in a third direction, the second mounting groove (70) being used to mount a shaping mechanism, the shaping mechanism being able to abut against the product in the third direction to adjust the position of the product in the adsorption area (21); the third direction intersects with the first direction.

12. The stage according to claim 11, characterized in that: The second mounting groove (70) penetrates the carrier body (10) along the first direction.

13. The stage according to claim 11, characterized in that: Each of the adsorption areas (21) is correspondingly provided with at least two groups of second mounting grooves, and each group of the second mounting grooves includes two second mounting grooves (70) spaced apart in the third direction.

14. The stage according to claim 13, characterized in that: Each of the adsorption areas (21) is correspondingly provided with two groups of the second installation grooves.

15. The stage according to claim 1, characterized in that: Each of the adsorption areas (21) is also provided with a third mounting groove (80) at two opposite ends in the second direction, and the third mounting groove (80) is used to install a transition mechanism, and the transition mechanism can support the product when the product moves relative to the carrier body (10) along the second direction; the second direction intersects with the first direction.

16. The stage according to claim 15, characterized in that: The third installation groove (80) penetrates the carrier body (10) along the first direction.

17. The stage according to claim 15, characterized in that: The adsorption surface (20) has two adsorption areas (21), one adsorption area (21) includes another adsorption area (21), and the two adsorption areas (21) share one third mounting groove (80).

18. The stage according to claim 17, characterized in that: The platform body (10) is provided with four third mounting grooves (80), two of the third mounting grooves (80) are located at one end of the two adsorption areas (21) in the second direction, and the other two of the third mounting grooves (80) are located at the other end of the two adsorption areas (21) in the second direction, and the two third mounting grooves (80) located at the same end are arranged at intervals along the third direction; The first direction, the second direction and the third direction intersect each other.

19. The stage according to any one of claims 1 to 18, characterized in that: The adsorption surface (20) comprises at least two adsorption areas (21), each of the adsorption areas (21) has a different size, and the adsorption area (21) with a larger size contains the adsorption area (21) with a smaller size.

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