Energy overshoot suppression circuit based on balanced power amplifier, and control method therefor

Abstract

The present application relates to an energy overshoot suppression circuit based on a balanced power amplifier, and a control method therefor, which belong to the technical field of transient energy suppression, and solve the problems of circuit structures in existing energy overshoot suppression modes being complex, etc. The circuit comprises a coupler 1, a coupler 2, an impedance network 1, an impedance network 2, amplifiers A1 and A2, and resistors R1 and R2, wherein an output end of a power source is connected to a common source end of the coupler 1, a channel end and a coupling end of the coupler 1 are connected to an input end of the impedance network 1 and an input end of the impedance end 2, respectively, and an isolation end of the coupler 1 is connected to the resistor R1 and is then grounded; an output end of the impedance network 1 and an output end of the impedance network 2 connected to an input end of the amplifier A1 and an input end of the amplifier A2, respectively, and an output end of the amplifier A1 and an output end of the amplifier A2 are connected to a coupling end and a channel end of the coupler 2, respectively; and a common source end of the coupler 2 is connected to a load, and an isolation end of the coupler 2 is connected to the resistor R2 and is then grounded.

Description

Energy overshoot suppression circuit based on balanced power amplifier and control method thereof Technical Field

[0001] The present application relates to the technical field of transient energy suppression, and in particular to an energy overshoot suppression circuit based on a balanced power amplifier and a control method thereof. Background Art

[0002] RF power supplies are not only widely used in wireless communication devices, but also serve as power sources in plasma systems. In RF power-plasma systems, variations in RF power affect the plasma's equivalent impedance, and vice versa. Under low pressure and power conditions, the power-dependent plasma impedance and load-dependent RF power systems can exhibit significant instabilities. In pulsed applications, sudden changes in plasma impedance can cause RF power overshoots.

[0003] When the impedance of the load does not match the impedance of the power supply or transmission line, reflected power is generated. Excessive reflected power can cause energy overshoot in the power supply, potentially damaging circuits and equipment. Therefore, it is important to develop appropriate methods to suppress energy overshoot.

[0004] Existing methods for reducing reflected power to suppress energy overshoot include:

[0005] (1) Pure impedance network matching: Add an inductor and capacitor network between the load and the power supply so that the impedance of the load is conjugate with the impedance of the power supply and the transmission line. This includes L-type, T-type, and π-type impedance network matching. Impedance network matching is divided into manual adjustment and automatic adjustment. The size of the impedance network is mainly adjusted by adjusting the size of the capacitor.

[0006] (2) Complex feedback control circuit.

[0007] The existing energy overshoot suppression method has the following defects:

[0008] (1) Requires complex control circuits, involving many components and high circuit costs;

[0009] (2) When the load changes rapidly, there will still be a certain energy overshoot problem due to control delay and accuracy issues.

[0010] Summary of the Invention

[0011] In view of the above analysis, the embodiments of the present application aim to provide an energy overshoot suppression circuit based on a balanced power amplifier and a control method thereof, so as to solve the problems of complex circuit structure and poor suppression effect in existing energy overshoot suppression methods.

[0012] On the one hand, the present application provides an energy overshoot suppression circuit based on a balanced power amplifier, the suppression circuit comprising: a coupler 1, a coupler 2, an impedance network 1, an impedance network 2, an amplifier A1, an amplifier A2, a resistor R1, and a resistor R2; wherein,

[0013] The output end of the power supply is connected to the common source end of coupler 1, the path end and coupling end of coupler 1 are connected to the input ends of impedance network 1 and impedance network 2 respectively, and the isolation end of coupler 1 is connected to resistor R1 and then grounded;

[0014] The output ends of impedance network 1 and impedance network 2 are connected to the input ends of amplifier A1 and amplifier A2 respectively. The output ends of amplifier A1 and amplifier A2 are connected to the coupling end and the path end of coupler 2 respectively. The common source end of coupler 2 is connected to the load. The isolation end of coupler 2 is connected to resistor R2 and then grounded.

[0015] Based on the above solution, this application also makes the following improvements:

[0016] Furthermore, the suppression circuit further includes a control module;

[0017] The control module is used to measure and process the actual input power of the load when no reflected power is generated at the common source end of the coupler 2, to obtain a power supply output power control signal; and to adjust the output power of the power supply based on the power supply output power control signal.

[0018] Furthermore, in the control module, PID adjustment is performed on the deviation between the ideal input power and the actual input power of the load to obtain the power supply output power control signal.

[0019] Furthermore, when reflected power is generated at the common source end of the coupler 2, the reflected power is eliminated by using the coupler 2, the amplifier A1 and the amplifier A2.

[0020] Furthermore, the suppression circuit further includes a voltage sensor, a current sensor and a DSP;

[0021] The voltage sensor and the current sensor are used to collect the voltage and current of the common source end of the coupler 2 respectively;

[0022] The DSP calculates the forward power and reflected power at the common source end of the coupler 2 according to the voltage and current to determine whether the suppression circuit generates reflected power.

[0023] Furthermore, the coupler 1 and the coupler 2 have the same structure, both being 45° directional couplers.

[0024] Furthermore, in the suppression circuit, the amplifier A1 and the amplifier A2 are identical.

[0025] On the other hand, the present application also provides a control method for the above-mentioned energy overshoot suppression circuit based on a balanced power amplifier, the method comprising:

[0026] The output power of the power supply is input to the common source terminal of the coupler 1. The coupler 1 decomposes the output power of the power supply and outputs voltages with the same amplitude and opposite phases from the path terminal and the coupling terminal of the coupler 1 respectively.

[0027] Amplifiers A1 and A2 amplify the voltages output from the path end and coupling end of coupler 1, respectively. Amplifiers A1 and A2 input the amplified voltages into the coupling end and path end of coupler 2, respectively. The common source end of coupler 2 outputs power to the load.

[0028] Determine whether the common source end of coupler 2 generates reflected power;

[0029] If reflected power is generated, the coupler 2 and the amplifiers A1 and A2 are used to eliminate the reflected power.

[0030] Based on the above solution, this application also makes the following improvements:

[0031] Furthermore, the elimination of the reflected power by using the coupler 2 and the amplifiers A1 and A2 includes:

[0032] The reflected voltage is input from the common source terminal of coupler 2, and then voltages with the same amplitude and opposite phases are output from the path terminal and coupling terminal of coupler 2 respectively;

[0033] The voltages output from the path end and the coupled end of coupler 2 are blocked by amplifier A2 and amplifier A1 respectively. The amplitudes of the voltages output from the path end and the coupled end of coupler 2 change by multiples of the reflection coefficients of amplifier A2 and amplifier A1 respectively, while the phases remain unchanged.

[0034] The voltages blocked and reflected by amplifiers A2 and A1 are input from the path end and coupling end of coupler 2 respectively, and the common source end of coupler 2 outputs voltages with opposite phases and equal amplitudes, and the reflected power is eliminated.

[0035] Furthermore, the method further comprises:

[0036] If the common source end of the coupler 2 does not generate reflected power, the actual input power of the load is measured and processed to obtain a power supply output power control signal, and the output power of the power supply is adjusted based on the power supply output power control signal.

[0037] Compared with the prior art, this application can achieve at least one of the following beneficial effects:

[0038] The energy overshoot suppression circuit based on a balanced power amplifier provided in this application adds a balanced power amplifier between the power supply and the load, so that the generated reflected power does not affect the power supply. At the same time, PID feedback regulation is added. The balanced power amplifier and the control module jointly ensure that the output of the power supply is stable within a predetermined range and can effectively suppress energy overshoot. The specific description is as follows:

[0039] (1) Simple circuit structure. No need for complex circuit network and excessive parameter calculation.

[0040] (2) The performance of the balanced power amplifier is used to solve the energy overshoot problem caused by reflected power. It is not affected by load changes and does not need to consider control accuracy and delay issues, making it more stable.

[0041] (3) Balanced amplifiers have good input and output matching characteristics and can amplify power at the same time.

[0042] (4) A simple PID control module automatically adjusts the output power of the power supply to ensure that the load receives the predetermined input power, while preventing energy overshoot from occurring during the process of the load receiving the predetermined input power.

[0043] (5) Compared with 90° or other couplers, the 45° coupler proposed in this embodiment can ensure that the energy output from the two ports is the same, better reduce power loss during transmission, and better achieve energy overshoot suppression function.

[0044] Since the control method in the present application is based on the same principle as the above-mentioned control circuit, the control method in the present application also has the corresponding technical effects of the above-mentioned control circuit.

[0045] In this application, the above-mentioned technical solutions can be combined with each other to achieve more preferred combination solutions. Other features and advantages of this application will be described in the subsequent description, and some advantages will become apparent from the description or be understood by practicing this application. The objectives and other advantages of this application can be achieved and obtained through the contents particularly pointed out in the description and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] The accompanying drawings are only used for the purpose of illustrating specific embodiments and are not to be considered as limiting the present application. Throughout the drawings, the same reference symbols denote the same components.

[0047] FIG1 is a circuit diagram of an energy overshoot suppression circuit based on a balanced power amplifier provided in Example 1 of the present application;

[0048] FIG2 is a schematic diagram of the operation of the coupler 1 when the power of the power supply provided in Example 1 of the present application is propagating forward;

[0049] FIG3 is a schematic diagram of the operation of the coupler 2 when the power of the power supply provided in Example 1 of the present application is propagating forward;

[0050] FIG4 is a diagram of the reflected voltage V provided in Example 1 of the present application. r A schematic diagram of the operation of the common source terminal of the input coupler 2;

[0051] FIG5 is a schematic diagram showing the operation of the coupling end and the path end of the coupler 2 provided in Example 1 of the present application, respectively outputting voltages with the same amplitude and opposite phases;

[0052] FIG6 is a schematic diagram showing the operation of the coupler 2 provided in Example 1 of the present application, wherein the output voltages at the coupling end and the path end are blocked and reflected by the amplifier A2 and the amplifier A1, respectively;

[0053] FIG7 is a schematic diagram of the operation of the coupler 2 when the reflected power is eliminated according to Example 1 of the present application;

[0054] FIG8 is a 45° directional coupler in the form of two capacitors provided in Example 1 of the present application;

[0055] FIG9 is a flow chart of a method for controlling an energy overshoot suppression circuit based on a balanced power amplifier provided in Example 2 of the present application. DETAILED DESCRIPTION

[0056] The preferred embodiments of the present application are described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the present application and are used together with the embodiments of the present application to illustrate the principles of the present application, and are not used to limit the scope of the present application.

[0057] A specific embodiment 1 of the present application discloses an energy overshoot suppression circuit based on a balanced power amplifier. The circuit structure diagram is shown in Figure 1. The suppression circuit includes: a coupler 1, a coupler 2, an impedance network 1, an impedance network 2, an amplifier A1, an amplifier A2, a resistor R1, and a resistor R2; wherein the output end of the power supply is connected to the common source end of the coupler 1 (port 2 in Figure 1), the path end (port 1 in Figure 1) and the coupling end (port 4 in Figure 1) of the coupler 1 are respectively connected to the input ends of the impedance network 1 and the impedance network 2, and the isolation end (port 3 in Figure 1) of the coupler 1 is connected to the resistor R1 and then grounded; the output ends of the impedance network 1 and the impedance network 2 are respectively connected to the input ends of the amplifier A1 and the amplifier A2, the output ends of the amplifier A1 and the amplifier A2 are respectively connected to the coupling end and the path end of the coupler 2, the common source end of the coupler 2 is connected to the load, and the isolation end of the coupler 2 is connected to the resistor R2 and then grounded.

[0058] Compared to existing technologies, the balanced power amplifier-based energy overshoot suppression circuit provided in this embodiment has a simpler circuit structure and lower cost, effectively overcoming the complex circuit structure issues inherent in existing energy overshoot suppression methods. Furthermore, when reflected power is detected, coupler 2 and amplifiers A1 and A2 work together to eliminate the reflected power, effectively suppressing it.

[0059] Preferably, the suppression circuit in this embodiment further includes a control module; the control module is configured to measure and process the actual input power of the load when no reflected power is generated at the common source end of coupler 2 to obtain a power supply output power control signal; and to adjust the output power of the power supply based on the power supply output power control signal. By providing the control module, the output power of the power supply can be gradually adjusted to prevent energy overshoot. Specifically, in the control module, PID control is performed on the deviation between the ideal input power and the actual input power of the load to obtain the power supply output power control signal.

[0060] In addition, the suppression circuit in this embodiment also includes a voltage sensor, a current sensor, and a DSP; wherein the voltage sensor and the current sensor are used to collect the voltage and current at the common source end of the coupler 2, respectively; the DSP calculates the forward power and reflected power at the common source end of the coupler 2 based on the voltage and current to determine whether the suppression circuit generates reflected power. During the specific implementation process, the DSP calculates the forward power and reflected power based on the magnitude and phase of the sampling signal at the common source end of the coupler 2 detected by the voltage sensor and the current sensor. The forward power and reflected power can be considered as the power flowing to the load and the power reflected from the load, respectively. The power dissipated in the load is the forward power minus the reflected power, which is called the load power.

[0061] The suppression circuit in this embodiment is described in detail below:

[0062] (1) Impedance network 1, impedance network 2:

[0063] The impedance network composed of capacitors and inductors does not require a control circuit. Its function is to make the equivalent load impedance connected to the path end and coupling end of the coupler 1 the same as the characteristic impedance Z0, thereby eliminating the reflected power caused by impedance mismatch.

[0064] It should be noted that, in this embodiment, the output end of the path end and the coupling end of the coupler 1 are considered as a load, and the equivalent impedance of the load is the equivalent load impedance connected to the path end and the coupling end of the coupler 1.

[0065] (2) Amplifier A1, Amplifier A2

[0066] The two amplifiers are exactly the same. The amplification factors K1 and K2 of amplifier A1 and amplifier A2 are exactly the same, and the reflection coefficients Γ1 and Γ2 are exactly the same.

[0067] In this embodiment, the amplifier has two functions: on the one hand, it amplifies the signals output from the path end and the coupling end of the coupler 1 by K1 and K2 times respectively; on the other hand, it works together with the coupler 2 to block the reflected power from being transmitted to the power supply.

[0068] (3) Resistors R1 and R2

[0069] The magnitudes of resistors R1 and R2 are the same as the characteristic impedance Z0.

[0070] (4) Coupler 1 and Coupler 2

[0071] Coupler 1 and coupler 2 have the same structure, both being 45° directional couplers. In this embodiment, the functions of coupler 1 and coupler 2 in the suppression circuit are described using the coupler in the circuit diagram of the energy overshoot suppression circuit based on a balanced power amplifier shown in FIG1 as an example. The 45° directional coupler in FIG1 includes: capacitors C1, C2, C3, and C4, coupled inductors L1, and coupled inductors L2; ​​wherein, one end of capacitor C1 is connected to the same-name terminal of coupled inductor L1, and the opposite-name terminal of coupled inductor L1 is connected to one end of capacitor C2; one end of capacitor C3 is connected to the same-name terminal of coupled inductor L2, and the opposite-name terminal of coupled inductor L2 is connected to one end of capacitor C4; the other ends of capacitor C1, C3, C2, and C4 are all grounded. As can be seen from FIG1, the coupler is a symmetrical structure about the x and y axes, so each port can be used as an input port (common source terminal). Therefore, in the circuit structure of the coupler shown in Figure 1, at the four ports of the two coupled inductors, one port is arbitrarily determined as the common source end, the diagonal port of the common source end is the isolation end, and the remaining two ports are the path end and the coupling end, respectively. For example, in Figure 1, the same-name end and the opposite-name end of the coupled inductor L1 are used as the path end and the common source end of the coupler, respectively; the same-name end and the opposite-name end of the coupled inductor L2 are used as the isolation end and the coupling end of the coupler, respectively. In the above-mentioned 45° directional coupler, the frequency of the power supply is f, the characteristic impedance is Z0, then the sizes of capacitors C1, C2, C3 and C4 are all The sizes of coupled inductor L1 and coupled inductor L2 are both The inductive coupling degree m between the coupled inductor L1 and the coupled inductor L2 is 1.

[0072] In this embodiment, although couplers 1 and 2 have identical structures, their circuit functions and the distribution of their input, output, and ground ports differ. The following discusses the operation of the two couplers, respectively, in the forward direction of power transmission and when the load impedance mismatches the impedance of the power source and RF transmission line.

[0073] (1) In the direction of forward propagation of power

[0074] The function of coupler 1 is to decompose the input voltage into two voltages with the same amplitude and opposite phase (phase shift of -45° and 45° respectively), as shown in Figure 2. The output of the power supply is connected to the common source terminal of coupler 1, and the input voltage is V with a phase of 0°. The output of the path terminal of coupler 1 is The voltage with a phase of -45°, the output of the coupling end of coupler 1 is A voltage with a 45° phase difference. Coupler 1's isolation termination resistor R1. Ideally, the output power at the path and coupled ends of coupler 1 is equal, and half the input power at the common source end of coupler 1. The output power at the isolated end of coupler 1 is zero, equivalent to dividing the input power at the common source end of coupler 1 equally and outputting it at the path and coupled ends.

[0075] The function of coupler 2 is to couple the input voltages of the coupling end and the path end of coupler 2, as shown in Figure 3. The path end of coupler 2 is connected to the output end of amplifier A2, and the input size is The voltage with a phase of 45°; the coupling end of coupler 2 is connected to the output end of amplifier A1, and the input size is The phase is -45° voltage; the common source end of coupler 2 is connected to the load, and the output size is The isolation terminal of coupler 2 is grounded via resistor R2, outputting a voltage with an opposite phase. Ideally, the output power at the common source terminal of coupler 2 is the sum of the input power at the path and coupling terminals of coupler 2.

[0076] (2) When the impedance of the load does not match the impedance of the power supply and transmission line:

[0077] The reflected power P is generated at the common source end of coupler 2. r , assuming the corresponding reflected voltage is V r At this time, coupler 2 and amplifiers A1 and A2 can eliminate the influence of reflected power on the power supply. For the reflected power elimination process, refer to Figures 4 to 7. When reflected power is generated, the reflected voltage V rThe common source terminal of coupler 2 is input, as shown in Figure 4. After being decomposed by coupler 2, voltages of equal amplitude and opposite phase are output through the coupled and path terminals of coupler 2, as shown in Figure 5. The output voltages of the coupled and path terminals of coupler 2 are blocked and reflected by amplifiers A2 and A1, respectively, as shown in Figure 6. The voltages blocked and reflected by amplifiers A2 and A1 are input through the coupled and path terminals of coupler 2, respectively, and the common source terminal of coupler 2 outputs voltages of equal amplitude and opposite phase, eliminating the reflected power, as shown in Figure 7. Meanwhile, although the output voltages of the common source terminal and the isolated terminal of coupler 2 have the same amplitude, the isolated terminal of coupler 2 is grounded after passing through resistor R2, causing the power output from the isolated terminal of coupler 2 to be dissipated as heat. Therefore, the reflected power is blocked and eliminated by coupler 2 and the two amplifiers, preventing it from affecting the power supply.

[0078] It should be noted that there are many forms of 45° directional couplers. There is no limit on the number of inductors and capacitors in the coupler, nor on the type of circuit. In actual applications, a 45° directional coupler in the form of a microstrip line can also be used. Or the four capacitors in Figure 1 can be equivalent to two capacitors (capacitor C1 and capacitor C3 are equivalent to one capacitor, and capacitor C2 and capacitor C4 are equivalent to one capacitor), to obtain a 45° directional coupler in the form of two capacitors, as shown in Figure 8. At this time, the sizes of the two capacitors are both The sizes of the two coupled inductors are

[0079] Based on the above analysis, it can be seen that in the energy overshoot suppression circuit based on the balanced power amplifier provided in this embodiment, two paths are set to suppress energy overshoot:

[0080] (1) Eliminate interference by utilizing the proposed 45° directional coupler and the amplifier's inherent operating properties to prevent reflected power from affecting the power supply. At coupler 1, reflected power is minimized through stable impedance matching. At coupler 2 and the two amplifiers, part of the generated reflected power is transferred to the ground terminal, while part is offset by voltages of equal amplitude and opposite phase.

[0081] (2) PID regulation: Through PID regulation, the output power is gradually stabilized within the normal range, which also makes the system stable when disturbed and suppresses energy overshoot.

[0082] In summary, the energy overshoot suppression circuit based on a balanced power amplifier provided in this embodiment adds a balanced power amplifier between the power supply and the load, so that the generated reflected power does not affect the power supply. At the same time, PID feedback regulation is added. The balanced power amplifier and the control module jointly ensure that the output of the power supply is stable within a predetermined range and can effectively suppress energy overshoot. The beneficial effects of this embodiment are specifically described as follows:

[0083] (1) Simple circuit structure. No need for complex circuit network and excessive parameter calculation.

[0084] (2) The performance of the balanced power amplifier is used to solve the energy overshoot problem caused by reflected power. It is not affected by load changes and does not need to consider control accuracy and delay issues, making it more stable.

[0085] (3) Balanced amplifiers have good input and output matching characteristics and can amplify power at the same time.

[0086] (4) A simple PID control module automatically adjusts the output power of the power supply to ensure that the load receives the predetermined input power, while preventing energy overshoot from occurring during the process of the load receiving the predetermined input power.

[0087] (5) Compared with 90° or other couplers, the 45° coupler proposed in this embodiment can ensure that the energy output from the two ports is the same, better reduce power loss during transmission, and better achieve energy overshoot suppression function.

[0088] A specific embodiment 2 of the present application discloses a control method for an energy overshoot suppression circuit based on a balanced power amplifier, the flow chart of which is shown in FIG9 . The method includes the following steps:

[0089] Step S1: Input the output power of the power supply to the common source terminal of the coupler 1. The coupler 1 decomposes the output power of the power supply and outputs voltages with the same amplitude and opposite phases from the path terminal and the coupling terminal of the coupler 1 respectively.

[0090] Step S2: Amplifiers A1 and A2 amplify the voltages output from the path end and the coupling end of coupler 1, respectively. Amplifiers A1 and A2 input the amplified voltages into the coupling end and the path end of coupler 2, respectively. The common source end of coupler 2 outputs power to the load.

[0091] Step S3: determining whether the common source end of coupler 2 generates reflected power;

[0092] Step S4: If reflected power is generated, the reflected power is eliminated by using the coupler 2 and the amplifiers A1 and A2.

[0093] In addition, the method may further comprise the following steps:

[0094] Step S5: If the common source end of the coupler 2 does not generate reflected power, measure and process the actual input power of the load to obtain a power supply output power control signal, and adjust the output power of the power supply based on the power supply output power control signal.

[0095] Specifically, in step S4, the reflected power is eliminated by using the coupler 2 and the amplifiers A1 and A2, which specifically includes:

[0096] Step S41: a reflected voltage is input from the common source terminal of the coupler 2, and then voltages with the same amplitude and opposite phases are output from the path terminal and the coupling terminal of the coupler 2 respectively;

[0097] Step S42: The voltages outputted from the path end and the coupled end of coupler 2 are blocked by amplifier A2 and amplifier A1, respectively. The amplitudes of the voltages outputted from the path end and the coupled end of coupler 2 change by a multiple of the reflection coefficients of amplifier A2 and amplifier A1, respectively, while the phases remain unchanged.

[0098] Step S43: The voltages reflected and blocked by amplifiers A2 and A1 are inputted from the path end and coupling end of coupler 2 respectively, and the common source end of coupler 2 outputs voltages with opposite phases and equal amplitudes, and the reflected power is eliminated.

[0099] It should be noted that the specific implementation process of the embodiment of the method of the present application can be referred to the above circuit embodiment, and this embodiment will not be repeated here.

[0100] Since the principles of this embodiment are the same as those of the above circuit embodiment, the present method embodiment also has the corresponding technical effects of the above circuit embodiment.

[0101] Those skilled in the art will appreciate that all or part of the process steps of the above-described embodiments can be implemented by instructing related hardware through a computer program, and the program can be stored in a computer-readable storage medium, such as a magnetic disk, an optical disk, a read-only memory, or a random access memory.

[0102] The above is only a preferred specific implementation method of the present application, but the scope of protection of the present application is not limited thereto. Any changes or replacements that can be easily thought of by any technician familiar with this technical field within the technical scope disclosed in this application should be covered by the scope of protection of the present application.

Claims

1. An energy overshoot suppression circuit based on a balanced power amplifier, characterized in that: The suppression circuit includes: a coupler 1, a coupler 2, an impedance network 1, an impedance network 2, an amplifier A1, an amplifier A2, a resistor R1 and a resistor R2; wherein, The output end of the power supply is connected to the common source end of the coupler 1, the path end and the coupling end of the coupler 1 are respectively connected to the input ends of the impedance network 1 and the impedance network 2, and the isolation end of the coupler 1 is connected to the resistor R1 and then grounded; The output ends of impedance network 1 and impedance network 2 are connected to the input ends of amplifier A1 and amplifier A2 respectively. The output ends of amplifier A1 and amplifier A2 are connected to the coupling end and the path end of coupler 2 respectively. The common source end of coupler 2 is connected to the load. The isolation end of coupler 2 is connected to resistor R2 and then grounded.

2. The energy overshoot suppression circuit based on a balanced power amplifier according to claim 1, characterized in that: The suppression circuit also includes a control module; The control module is used to measure and process the actual input power of the load when the common source end of the coupler 2 does not generate reflected power, obtain the power supply output power control signal; and adjust the output power of the power supply based on the power supply output power control signal.

3. The energy overshoot suppression circuit based on a balanced power amplifier according to claim 2, characterized in that: In the control module, PID adjustment is performed on the deviation between the ideal input power and the actual input power of the load to obtain the output power control signal of the power supply.

4. The energy overshoot suppression circuit based on a balanced power amplifier according to claim 1, characterized in that: When reflected power is generated at the common source end of coupler 2, coupler 2, amplifier A1 and amplifier A2 are used to eliminate the reflected power.

5. The energy overshoot suppression circuit based on a balanced power amplifier according to any one of claims 2 to 4, characterized in that: The suppression circuit also includes a voltage sensor, a current sensor and a DSP; The voltage sensor and the current sensor are used to collect the voltage at the common source end of the coupler 2, Current; The DSP calculates the forward power and the reflected power at the common source end of the coupler 2 according to the voltage and the current to determine whether the suppression circuit generates reflected power.

6. The energy overshoot suppression circuit based on a balanced power amplifier according to claim 5, characterized in that: The structures of the coupler 1 and the coupler 2 are the same, both of which are 45° directional couplers.

7. The energy overshoot suppression circuit based on a balanced power amplifier according to claim 6, characterized in that: In the suppression circuit, amplifier A1 and amplifier A2 are identical.

8. A control method for an energy overshoot suppression circuit based on a balanced power amplifier according to any one of claims 1 to 7, characterized in that: The method comprises: The output power of the power source is input into the common source end of the coupler 1, and the coupler 1 decomposes the output power of the power source, and outputs voltages with the same amplitude and opposite phases from the path end and the coupling end of the coupler 1 respectively; Amplifier A1 and amplifier A2 respectively amplify the voltage output from the channel end and coupling end of coupler 1, and amplifier A1 and amplifier A2 respectively input the amplified voltage into the coupling end and channel end of coupler 2; the common source end of coupler 2 outputs power to the load; Determine whether the common source end of coupler 2 generates reflected power; If reflected power is generated, the reflected power is eliminated by using the coupler 2 and the amplifiers A1 and A2.

9. The control method of the energy overshoot suppression circuit based on the balanced power amplifier according to claim 8, characterized in that: The method of eliminating the reflected power by using the coupler 2 and the amplifiers A1 and A2 includes: The reflected voltage is input from the common source end of the coupler 2, and then the voltages with the same amplitude and opposite phases are output from the path end and the coupling end of the coupler 2 respectively; The voltage output from the channel end and the coupling end of coupler 2 is blocked by amplifier A2 and amplifier A1 respectively. The voltage amplitude output from the channel end and the coupling end of coupler 2 is respectively equal to the voltage amplitude of amplifier A2 and amplifier A1. The reflection coefficient of device A1 changes by multiples, but the phase remains unchanged; The voltages blocked and reflected by amplifiers A2 and A1 are input from the path end and coupling end of coupler 2 respectively, and the common source end of coupler 2 outputs voltages with opposite phases and equal amplitudes, and the reflected power is eliminated.

10. The control method of the energy overshoot suppression circuit based on the balanced power amplifier according to claim 8 or 9, characterized in that: The method further comprises: If the common source end of the coupler 2 does not generate reflected power, the actual input power of the load is measured and processed to obtain a power supply output power control signal, and the output power of the power supply is adjusted based on the power supply output power control signal.

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