Inclination adjusting device

Abstract

This inclination adjustment device (100) has a swinging body (22), a shaft (23), a crimping tool (21), a device base (30), a positioning mechanism (50), and a leaf spring (56) connected to the shaft (23). The positioning mechanism (50) has a plurality of actuators, and a plurality of movable members that are respectively moved by the plurality of actuators. The leaf spring (56) is configured to be flexible and deformable as the position of a tip (23b) of the shaft (23) changes. In the leaf spring (56), at least one of the plurality of movable members is connected to the shaft (23) such that the swinging body (22) can swing with respect to the device base (30) via the shaft (23).

Description

Tilt adjustment device

[0001] The present disclosure relates to a tilt adjustment device.

[0002] Conventionally, a bonding device in a semiconductor manufacturing device that bonds a workpiece to a reference stage includes a copying device. The copying device adjusts the inclination of the tool so that the tool and the reference stage are parallel. The tool includes a crimping tool end face.

[0003] For example, Patent Document 1 discloses a copying device including a device base having a concave hemispherical surface and a copying member including a tool and a moving body having a convex hemispherical surface. The convex hemispherical surface has the same radius of curvature as the concave hemispherical surface. The copying device disclosed in Patent Document 1 includes a holding member that engages with the copying member and an actuator that presses the copying member against the device base in the Z-axis direction, which is the axial direction of the device base, via the holding member. The copying member is attached to the device base so that the convex and concave hemispherical surfaces overlap and the convex hemispherical surface can rotate along the concave hemispherical surface. The copying device presses the tip surface of the tool, which is the end face of the crimping tool, against the upper surface of the reference stage and rotates the copying member along the concave hemispherical surface of the device base. In this way, the copying device copies the copying member so that it is parallel to the reference stage. The copying device maintains the state in which the copying member is parallel to the reference stage by pressing the copying member, which is parallel to the reference stage, against the device base via the holding member using an actuator.

[0004] Patent No. 4081247

[0005] In conventional copying devices, there is a risk of generating a load on the reference stage during a copying operation in which the tip surface of the tool is made parallel to the reference stage. It is therefore desirable for the tilt adjustment device to be equipped with a mechanism that does not generate a load on the reference stage while suppressing an increase in size in the Z-axis direction.

[0006] A tilt adjustment device according to one aspect of the present disclosure includes a rocking body, a shaft, a crimping tool, an apparatus base, a positioning mechanism, and a leaf spring. The rocking body has a first rocking body end face and a second rocking body end face that is a convex spherical surface. The shaft protrudes from the second rocking body end face. The crimping tool has a second crimping tool end face attached to the first rocking body end face and a first crimping tool end face that is different from the second crimping tool end face. The apparatus base has a first base end face. The first base end face is a concave spherical surface that engages with the second rocking body end face. The shaft passes through the apparatus base. The apparatus base has a second base end face that is different from the first base end face. The tilt adjustment device is configured to adjust the tilt of the rocking body so that the first crimping tool end face and a reference plane are parallel. The positioning mechanism is configured to oscillate the oscillator via the shaft by changing the position of the tip of the shaft in a plane parallel to the second base end face. The leaf spring is connected to the shaft. The positioning mechanism has a plurality of actuators and a plurality of movable members configured to be moved by the plurality of actuators, respectively. The leaf spring is configured to be able to flexibly deform in accordance with changes in the position of the tip. The leaf spring has a thickness direction that coincides with the direction in which a base axis, which is the axis of the device base, extends, and the leaf spring connects at least one of the plurality of movable members to the shaft so that the oscillator can oscillate relative to the device base via the shaft.

[0007] FIG. 1 is an exploded perspective view showing an inclination adjustment device. FIG. 2 is a cross-sectional view showing the inclination adjustment device of FIG. 1. FIG. 3 is an exploded perspective view showing the positioning mechanism of FIG. 1. FIG. 4 is a cross-sectional view showing the operation of the inclination adjustment device of FIG. 1. FIG. 5 is a view showing the operation of the positioning mechanism of FIG. 1. FIG. 6 is an enlarged cross-sectional view showing the operation of the positioning mechanism of FIG. 1. FIG. 7 is an enlarged cross-sectional view showing the operation of the locking mechanism of FIG. 1. FIG. 8 is a view showing a positioning mechanism in a modified example. FIG. 9 is a view showing a locking mechanism in a modified example.

[0008] An embodiment of the tilt adjustment device will be described below with reference to Figures 1 to 7. <Overall View of the Tilt Adjustment Device> As shown in Figures 1 and 2, the tilt adjustment device 100 includes a crimping portion oscillator 20, a device base 30, a locking mechanism 40, a positioning mechanism 50, and a rotation prevention mechanism 90. The tilt adjustment device 100 also includes a control device 70 and a tilt detection sensor 80.

[0009] 2, the crimping portion oscillator 20 is integrally formed with a crimping tool 21 that crimps a workpiece, an oscillator 22, and a shaft 23. The direction in which the crimping portion axis LP of the crimping portion oscillator 20 extends coincides with the direction in which the crimping tool 21, the oscillator 22, and the shaft 23 are aligned.

[0010] The crimping tool 21 is a columnar body having two end faces, i.e., a first crimping tool end face 21a and a second crimping tool end face 21b. The axial direction of the crimping tool 21 coincides with the extension direction of the crimping portion axis LP. The first crimping tool end face 21a is the opposite face to the second crimping tool end face 21b in the direction of the crimping portion axis LP. Therefore, the crimping tool 21 has a second crimping tool end face 21b and a first crimping tool end face 21a that is different from the second crimping tool end face 21b. The crimping tool 21 is attached to an oscillator 22. The first crimping tool end face 21a faces a reference plane S (described later), and the second crimping tool end face 21b faces a first oscillator end face 22a (described later). The second crimping tool end face 21b is attached to the first oscillator end face 22a. The tilt adjusting device 100 adjusts the tilt of the oscillator 22 so that the end surface 21a of the first crimping tool and the reference plane S are parallel to each other.

[0011] The oscillator 22 is a cylindrical body having a first oscillator end face 22a to which the crimping tool 21 is attached and a second oscillator end face 22b which is a convex spherical surface. As shown in Figure 1, the oscillator 22 is provided with an oscillator side pin 94.

[0012] The axial direction of the rocker 22 coincides with the direction in which the crimping portion axis LP extends. The rocker 22 has an inner circumferential surface 22c that is continuous with the second rocker end surface 22b. The rocker 22 has a rocker insertion hole 22d defined by the inner circumferential surface 22c.

[0013] A locking rocker chamber 22e is formed inside the rocker 22. The surface defining the locking rocker chamber 22e includes a concave spherical holding rocker end face 22f. The holding rocker end face 22f is continuous with the rocker inner circumferential surface 22c. The holding rocker end face 22f is connected to the second rocker end face 22b via the rocker inner circumferential surface 22c. In other words, the rocker 22 has a holding rocker end face 22f that is continuous with the rocker inner circumferential surface 22c between the first rocker end face 22a and the second rocker end face 22b. The locking rocker chamber 22e communicates with the outside of the rocker 22 via the rocker insertion hole 22d. The surface defining the locking rocker chamber 22e includes a rocker inner bottom surface 22g that faces the holding rocker end face 22f. A shaft fixing portion 23a of the shaft 23 is attached to the bottom surface 22g of the oscillator body.

[0014] 1, two oscillator side pins 94 (only one is shown) are provided on the outer peripheral surface of the oscillator 22. The oscillator side pins 94 are aligned in the radial direction of the oscillator 22. Each oscillator side pin 94 is a cylindrical body extending in a direction perpendicular to the crimping portion axis LP. As will be described later, each oscillator side pin 94 is inserted into an oscillator side pin hole 93b formed in the anti-rotation ring 93.

[0015] The shaft 23 extends from the bottom surface 22g inside the oscillator. The shaft 23 has a tip 23b, which is the end opposite the shaft fixing portion 23a. The shaft 23 is a cylindrical body extending from the shaft fixing portion 23a to the tip 23b. The axial direction of the shaft 23 coincides with the direction in which the crimping portion axis LP extends. Furthermore, the direction in which the shaft 23 extends coincides with the direction from the first oscillator end face 22a toward the second oscillator end face 22b. The shaft 23 passes through the oscillator insertion hole 22d. The tip 23b is located outside the oscillator 22.

[0016] <Device Base> As shown in Figures 1 and 2, the device base 30 has a first base end face 30a, which is a first end face in the axial direction, and a second base end face 30b, which is a second end face in the axial direction. The device base 30 is cylindrical. The device base 30 has a second base end face 30b different from the first base end face 30a. A base axis LB, which is the axis of the device base 30, is perpendicular to the first base end face 30a and the second base end face 30b. The extension direction of the base axis LB is the Z-axis direction of the tilt adjustment device 100. The extension direction of the base axis LB is the axial direction of the device base 30. The Z-axis direction coincides with the plate thickness direction T, which is shown in Figure 1 and will be described later.

[0017] The device base 30 has a hole-defining surface 30c that defines a base insertion hole 30d extending in the axial direction of the device base 30. The hole-defining surface 30c connects the second base end face 30b and the first base end face 30a. The first base end face 30a and the second base end face 30b each surround the base insertion hole 30d. As will be described later, the shaft 23 is inserted through the base insertion hole 30d. In other words, the shaft 23 passes through the device base 30.

[0018] The first base end surface 30a is a concave spherical surface. The radius of curvature of the first base end surface 30a is the same as the radius of curvature of the second oscillator end surface 22b, which is a convex spherical surface. The first base end surface 30a engages with the second oscillator end surface 22b. In other words, the device base 30 has the first base end surface 30a that engages with the second oscillator end surface 22b. Almost the entire first base end surface 30a is formed from the annular porous material 31. The second base end surface 30b is a flat surface.

[0019] The device base 30 has an air bearing air supply / discharge chamber 32 and an air bearing port 33 shown in Fig. 1. The air bearing air supply / discharge chamber 32 communicates with the outside of the device base 30 via a plurality of holes in the annular porous material 31 and the air bearing port 33. The air bearing port 33 is provided on the outer surface of the device base 30, as shown in Fig. 1. The annular porous material 31 works in conjunction with the air bearing air supply / discharge chamber 32 and the air bearing port 33 to function as an air hydrostatic bearing.

[0020] 2, 6, and 7, the hole-defining surface 30c is formed by a first cylindrical delimiting surface 301c, a second cylindrical delimiting surface 302c, and a third rectangular tubular delimiting surface 303c. The first delimiting surface 301c, the second delimiting surface 302c, and the third delimiting surface 303c are arranged in this order from the first base end surface 30a toward the second base end surface 30b. The inner diameter of the device base 30 at the second delimiting surface 302c is larger than the inner diameter of the device base 30 at the first delimiting surface 301c.

[0021] 1 and 6 , the third demarcated surface 303c includes four surfaces parallel to the base axis LB. Of the four surfaces included in the third demarcated surface 303c, a direction parallel to two opposing surfaces and perpendicular to the base axis LB is defined as a first direction A1. A direction perpendicular to the first direction A1 and the base axis LB is defined as a second direction A2. The third demarcated surface 303c includes two surfaces perpendicular to an axis extending in the first direction A1 and facing each other, and two surfaces perpendicular to an axis extending in the second direction A2 and facing each other.

[0022] 2 and 7, the first demarcation surface 301c and the second demarcation surface 302c are connected by a base step surface 30e. The base step surface 30e is perpendicular to the first demarcation surface 301c and the second demarcation surface 302c and is parallel to the second base end surface 30b. The base step surface 30e faces the same direction as the second base end surface 30b.

[0023] The second demarcated surface 302c and the third demarcated surface 303c are connected by a fixed base mounting surface 34. The fixed base mounting surface 34 faces the same direction as the second base end surface 30b. A fixed base 51, which will be described later, is attached to the fixed base mounting surface 34.

[0024] 2 and 7, the lock mechanism 40 includes a lock piston 41 and a lock shaft 42. The lock mechanism 40 further includes a magnet holding member 43, a magnet 44, and first to third seals 45 to 47.

[0025] The lock piston 41 has a disk-shaped piston body 411 and a male thread portion 412 extending from the center of the piston body 411. The axial direction of the lock piston 41 coincides with the axial direction of the device base 30. The lock piston 41 is housed in the base insertion hole 30d. Inside the base insertion hole 30d, the lock piston 41 is capable of reciprocating in the axial direction of the device base 30 along the hole defining surface 30c. A lock piston insertion hole 41a is defined in the lock piston 41. The lock piston insertion hole 41a passes through the piston body 411 and the male thread portion 412.

[0026] The outer peripheral surface of the piston body 411 faces the second demarcating surface 302c. A third seal 47 is provided on the outer peripheral surface of the piston body 411. The third seal 47 seals between the second demarcating surface 302c and the outer peripheral surface of the piston body 411. The piston body 411 has a lock piston step surface 41d that faces the base step surface 30e in the axial direction of the device base 30. The lock piston step surface 41d faces the same direction as the first base end surface 30a. The lock piston step surface 41d is parallel to the second base end surface 30b.

[0027] A lock shaft insertion hole 42a is defined in the lock shaft 42. The lock shaft insertion hole 42a passes through the lock shaft 42 in the axial direction of the device base 30. The lock shaft 42 has a female thread portion 421 at the portion of the lock shaft insertion hole 42a into which the male thread portion 412 of the lock piston 41 is inserted. The male thread portion 412 of the lock piston 41 and the female thread portion 421 of the lock shaft 42 are threadedly engaged with each other. A first seal 45 is held between the male thread portion 412 and the female thread portion 421. The first seal 45 provides a seal between the lock piston 41 and the lock shaft 42.

[0028] The lock piston 41 and the lock shaft 42 are coupled together. The lock shaft 42 is interlocked with the lock piston 41 and is reciprocable along the hole-defining surface 30c in the direction of the base axis LB. The lock mechanism 40 includes the lock shaft 42 that reciprocates integrally with the lock piston 41.

[0029] A shaft 23 is inserted through the lock piston insertion hole 41a and the lock shaft insertion hole 42a. The outer peripheral surface of the shaft 23 is spaced apart from the inner peripheral surfaces of the lock piston 41 and the lock shaft 42. The outer diameter of the shaft 23 is smaller than the inner diameters of the lock piston insertion hole 41a and the lock shaft insertion hole 42a.

[0030] The axial direction of the lock shaft 42 coincides with the axial direction of the device base 30. The lock shaft 42 is housed in the base insertion hole 30d. The lock shaft 42 is reciprocable in the axial direction of the device base 30 while moving along the hole defining surface 30c. The lock shaft 42 is interlocked with the lock piston 41. The lock shaft 42 has a lock shaft extension 42d in the locking rocker chamber 22e. The lock shaft extension 42d extends in a direction perpendicular to the base axis LB. The lock shaft 42, more specifically, the lock shaft extension 42d has a lock shaft engagement surface 42e that faces the holding rocker end surface 22f. The lock shaft engagement surface 42e is convex spherical. The radius of curvature of the lock shaft engagement surface 42e coincides with the radius of curvature of the holding rocker end surface 22f. The lock shaft engaging surface 42e is engageable with the holding rocker end surface 22f.

[0031] The magnet holding member 43 is fixed to the first defining surface 301c. The axial direction of the magnet holding member 43 coincides with the axial direction of the device base 30. A magnet holding member insertion hole 43a is defined in the magnet holding member 43. The magnet holding member 43 is located between the piston body 411 and the first base end surface 30a in the axial direction of the device base 30. The magnet holding member 43 has a magnet holding member end surface 43d that faces the lock piston step surface 41d. Furthermore, the magnet holding member 43 holds the magnet 44 on the side opposite the magnet holding member end surface 43d in the axial direction of the device base 30.

[0032] The lock shaft 42 is inserted through the magnet holding member insertion hole 43a. A second seal 46 is provided on the inner peripheral surface of the magnet holding member 43. The second seal 46 provides a seal between the inner peripheral surface of the magnet holding member 43 and the outer peripheral surface of the lock shaft 42.

[0033] The locking air chamber 48 is defined by the second defining surface 302c, the locking piston step surface 41d, the base step surface 30e, and the magnet holding member end surface 43d. As shown in Figure 1, a locking port 49 is provided on the outer surface of the device base 30, connecting the locking air chamber 48 to the outside of the device base 30.

[0034] <Positioning Mechanism> The positioning mechanism 50 will be described using Figures 1, 2, 3, and 6. As shown in Figure 3, the positioning mechanism 50 includes a fixed base 51, two first ultrasonic motors 52 that are first actuators, and a first movable member 53. The positioning mechanism 50 includes two second ultrasonic motors 54 that are second actuators, and a second movable member 55. The positioning mechanism 50 includes a leaf spring 56, a holding block 57, and a bearing 58. The positioning mechanism 50 includes the first ultrasonic motors 52 and the second ultrasonic motors 54 that are multiple actuators. The positioning mechanism 50 includes the first movable member 53 and the second movable member 55 that are multiple movable members.

[0035] The fixed base 51 is a plate-like body extending in a direction perpendicular to the base axis LB. The fixed base 51 has a first base surface 51a and a second base surface 51b that are opposite to each other in the axial direction of the device base 30. The first base surface 51a faces the same direction as the first base end surface 30a. The second base surface 51b faces the same direction as the second base end surface 30b. The fixed base 51 is formed with a fixed base insertion hole 51c that opens in the axial direction of the device base 30. The inner diameter of the fixed base insertion hole 51c is larger than the outer diameter of the shaft 23. The fixed base 51 is attached to the fixed base installation surface 34. The first base surface 51a faces the fixed base installation surface 34.

[0036] Each first ultrasonic motor 52 includes a first drive unit 52a and a first motor shaft 52b, which is a first actuator movable unit. The first motor shaft 52b is driven by the first drive unit 52a. A first movable member 53 is attached to the first motor shaft 52b. The first ultrasonic motor 52 is capable of moving the first movable member 53 in the axial direction of the first motor shaft 52b by driving the first motor shaft 52b.

[0037] The first ultrasonic motor 52 is provided on the second base surface 51b of the fixed base 51. The first ultrasonic motor 52 is capable of moving the first movable member 53 in the first direction A1. The first ultrasonic motor 52 is provided on the second base surface 51b so that the axial direction of the first motor shaft 52b is the first direction A1. The two first ultrasonic motors 52 are arranged side by side on the second base surface 51b in the second direction A2. The fixed base insertion hole 51c is located between the two first ultrasonic motors 52. The two first motor shafts 52b of the two first ultrasonic motors 52 operate integrally.

[0038] The first movable member 53 is a plate-like member extending in a direction perpendicular to the base axis LB. The first movable member 53 has a first movable member lower surface 53c and a first movable member upper surface 53d that are perpendicular to the base axis LB. The first movable member lower surface 53c faces the same direction as the first base end surface 30a. The first movable member upper surface 53d faces the same direction as the second base end surface 30b. The first movable member 53 is defined with a first movable member insertion hole 53a that opens in the direction of the base axis LB. The inner diameter of the first movable member insertion hole 53a is larger than the outer diameter of the shaft 23. Two first motor mounting portions 53e formed on the first movable member lower surface 53c are respectively attached to two first motor shafts 52b.

[0039] The first encoder 61 is provided on the second base surface 51b. The first encoder 61 measures the distance that the first movable member 53 moves in the first direction A1 relative to the fixed base 51. The first encoder 61 measures the distance between the first motor installation portion 53e and the first drive portion 52a, which face each other in the axial direction of the first motor shaft 52b. The first encoder 61 is connected to the control device 70 shown in FIG. 1 by wireless or wire so as to be able to transmit the measurement results to the control device 70.

[0040] Each second ultrasonic motor 54 includes a second drive unit 54a and a second motor shaft 54b, which is a second actuator movable unit. The second motor shaft 54b is driven by the second drive unit 54a. A second movable member 55 is attached to the second motor shaft 54b. The second ultrasonic motor 54 can move the second movable member 55 in the axial direction of the second motor shaft 54b by driving the second motor shaft 54b.

[0041] The second ultrasonic motor 54 is provided on the first movable member upper surface 53d. The second ultrasonic motor 54 is capable of moving the second movable member 55 in the second direction A2. The second ultrasonic motor 54 is provided on the first movable member upper surface 53d so that the axial direction of the second motor shaft 54b is the second direction A2. The two second ultrasonic motors 54 are arranged side by side in the first direction A1 on the first movable member upper surface 53d. The first movable member insertion hole 53a is located between the two second ultrasonic motors 54. The two second motor shafts 54b of the two second ultrasonic motors 54 operate integrally.

[0042] The second movable member 55 is a plate-like member extending in a direction perpendicular to the base axis LB. The second movable member 55 has a second movable member lower surface 55c and a second movable member upper surface 55d that are perpendicular to the base axis LB. The second movable member lower surface 55c faces the same direction as the first base end surface 30a. The second movable member upper surface 55d faces the same direction as the second base end surface 30b. The second movable member 55 has a second movable member insertion hole 55a that opens in the direction of the base axis LB. The inner diameter of the second movable member insertion hole 55a is larger than the outer diameter of the shaft 23. Two second motor mounting portions 55f are formed on the second movable member lower surface 55c, and two second motor shafts 54b are attached to them.

[0043] A movable member groove 55e recessed from a second movable member upper surface 55d is formed in the second movable member 55. The movable member groove 55e has a portion extending in the first direction A1 and a portion extending in the second direction A2 on the second movable member upper surface 55d.

[0044] The second encoder 62 is provided on the first movable member upper surface 53d. The second encoder 62 measures the distance that the second movable member 55 moves in the second direction A2 relative to the first movable member 53. The second encoder 62 measures the distance between the second motor installation portion 55f and the second drive portion 54a, which face each other in the axial direction of the second motor shaft 54b. The second encoder 62 is connected to the control device 70 shown in FIG. 1 by wireless or wire so as to be able to transmit the measurement results to the control device 70.

[0045] The first ultrasonic motor 52, the first movable member 53, the second ultrasonic motor 54, and the second movable member 55 are aligned along the base axis LB. In other words, the first movable member 53 and the second movable member 55 are arranged overlapping each other in the axial direction of the device base 30. The second movable member 55 is arranged on the opposite side of the first movable member 53 from the first base end surface 30a.

[0046] 1, the leaf spring 56 is a plate-shaped body that extends in a direction perpendicular to the base axis LB. The thickness direction T of the leaf spring 56 coincides with the direction in which the base axis LB extends, i.e., the axial direction of the device base 30. The thickness of the leaf spring 56 in the thickness direction T is 0.1 to 0.3 mm.

[0047] The leaf spring 56 has first to fourth leaf spring forming materials B1 to B4 and a leaf spring annular portion 56c. The longitudinal direction of the first leaf spring forming material B1 and the third leaf spring forming material B3 is the first direction A1. The first leaf spring forming material B1 and the third leaf spring forming material B3 are aligned in a straight line in the first direction A1. The longitudinal direction of the second leaf spring forming material B2 and the fourth leaf spring forming material B4 is the second direction A2. The second leaf spring forming material B2 and the fourth leaf spring forming material B4 are aligned in a straight line in the second direction A2. In other words, when viewed from the plate thickness direction T, the leaf spring 56 has a cross shape extending in the first direction A1 and the second direction A2. The first to fourth leaf spring forming materials B1 to B4 extend radially from the leaf spring annular portion 56c. The first to fourth leaf spring forming members B1 to B4 are continuous with one another via the leaf spring annular portion 56c.

[0048] The leaf spring 56 has a leaf spring hole 56b that opens in the plate thickness direction T. The first to fourth leaf spring forming members B1 to B4 are arranged to surround the leaf spring hole 56b. The leaf spring annular portion 56c forms a ring surrounding the leaf spring hole 56b. Each of the first to fourth leaf spring forming members B1 to B4 has a fixed end portion 56d on the opposite side in the longitudinal direction from the end connected to the leaf spring annular portion 56c. The first to fourth leaf spring forming members B1 to B4 are attached to the second movable member 55. The fixed end portions 56d of the first to fourth leaf spring forming members B1 to B4 are fixed to the second movable member upper surface 55d by a leaf spring fixing member 59. In other words, the leaf spring 56 is attached to the second movable member 55.

[0049] 1 and 6, each of the first to fourth leaf spring forming materials B1 to B4 is spaced apart from the inner bottom surface of the movable member groove 55e at a portion other than the fixed end 56d. The first to fourth leaf spring forming materials B1 to B4 cover the movable member groove 55e. In other words, the leaf spring 56 contacts the second movable member 55 only at the fixed end 56d of the first to fourth leaf spring forming materials B1 to B4. The leaf spring 56 is attached to the second movable member 55 so as to be flexible and deformable in the axial direction of the device base 30.

[0050] The holding block 57 is attached to the leaf spring 56 in the second movable member insertion hole 55a by a leaf spring fixing member 59. The axial direction of the holding block 57 coincides with the direction in which the crimping portion axis LP extends. A holding block insertion hole 57a is defined in the holding block 57. The outer diameter of the holding block 57 is smaller than the inner diameter of the second movable member insertion hole 55a.

[0051] The outer ring of the bearing 58 is fixed to the inner peripheral surface of the holding block 57, which defines the holding block insertion hole 57a. The tip end 23b of the shaft 23 is inserted into the inner ring of the bearing 58. The inner ring of the bearing 58 is fixed to the tip end 23b of the shaft 23 by a fixing member 24. The axial direction of the bearing 58 coincides with the direction in which the crimping portion axis LP extends. Rolling elements 58a are provided between the inner ring and outer ring of the bearing 58. The bearing 58 is a rolling ball bearing in which the rolling elements 58a are balls.

[0052] <Rotation Prevention Mechanism> As shown in FIGS. 1 and 2, the rotation prevention mechanism 90 includes two side plates 91, a base-side pin 92, a rotation prevention ring 93, and an oscillator-side pin 94.

[0053] The side plate 91 is attached to the outer surface of the device base 30 on the side closer to the first base end surface 30a. The two side plates 91 are arranged facing each other, sandwiching the device base 30 and the crimping portion oscillator 20 between them. The two side plates 91 are aligned in the second direction A2. The side plates 91 are plate-like bodies having a thickness direction in the second direction A2. The side plates 91 are provided with base-side pins 92 on the surface facing the crimping portion oscillator 20. The base-side pins 92 are cylindrical bodies extending from the side plates 91 toward the outer surface of the oscillator 22.

[0054] The anti-rotation ring 93 is an annular body having an inner circumferential surface that surrounds the oscillator 22. The anti-rotation ring 93 has an inner circumferential surface that is spaced apart from the outer circumferential surface of the oscillator 22 and an outer circumferential surface that is spaced apart from the side plate 91. As shown in Fig. 2, the oscillator 22 bulges in a direction perpendicular to the crimping portion axis LP at a portion that includes the first oscillator end face 22a. The anti-rotation ring 93 is supported by the oscillator 22 by being placed on the bulging portion of the oscillator 22.

[0055] As shown in Figures 1 and 2, the anti-rotation ring 93 has two base-side pin holes 93a and two oscillator-side pin holes 93b. As shown in Figure 2, the two base-side pin holes 93a are aligned in the second direction A2. As shown in Figure 1, the two oscillator-side pin holes 93b (only one is shown) are aligned in the first direction A1. The base-side pin hole 93a is a groove-like portion that opens in the direction from the first oscillator end face 22a to the second oscillator end face 22b and penetrates the anti-rotation ring 93 in the radial direction. The oscillator-side pin hole 93b is a groove-like portion that opens in the direction from the first oscillator end face 22a to the second oscillator end face 22b and penetrates the anti-rotation ring 93 in the radial direction.

[0056] A base-side pin 92 extending from the side plate 91 is inserted into the base-side pin hole 93a. The outer peripheral surface of the base-side pin 92 contacts the surface that defines the base-side pin hole 93a in the circumferential direction of the anti-rotation ring 93.

[0057] A rocker pin 94 is inserted into the rocker pin hole 93b. The outer peripheral surface of the rocker pin 94 is in contact with the surface that defines the rocker pin hole 93b in the circumferential direction of the anti-rotation ring 93.

[0058] The base-side pin 92 is fixed to the device base 30 by a side plate 91. Rotation of the anti-rotation ring 93 in the circumferential direction is restricted by the base-side pin 92 inserted into the base-side pin hole 93a. The rocker 22 is interlocked with the anti-rotation ring 93 by the rocker-side pin 94 inserted into the rocker-side pin hole 93b. In other words, the rocker 22, together with the anti-rotation ring 93, restricts rotation of the anti-rotation ring 93 in the circumferential direction. The anti-rotation mechanism 90 restricts rotation of the crimping portion rocker 20 around the crimping portion axis LP.

[0059] <Positional Relationship Between the Crimping Section Oscillator, Device Base, and Positioning Mechanism> The relationship between the crimping section oscillator 20, device base 30, and positioning mechanism 50 will be described with reference to FIGS. 1, 2, and 7. FIG.

[0060] The positioning mechanism 50 is housed in a space defined by the third defining surface 303 c. A fixed base 51 provided on the positioning mechanism 50 is attached to a fixed base installation surface 34 formed on the hole defining surface 30 c. In other words, the positioning mechanism 50 is fixed to the device base 30 by the fixed base 51.

[0061] The crimping portion oscillator 20 is attached to the device base 30 so that the shaft 23 is inserted through the base insertion hole 30d and the first base end face 30a and the second oscillator end face 22b face each other. The second oscillator end face 22b also faces the annular porous material 31.

[0062] The shaft 23 of the crimping portion rocking body 20 is inserted through the lock piston insertion hole 41a and the lock shaft insertion hole 42a. The tip 23b protrudes from the lock piston 41. The outer peripheral surface of the shaft 23 is spaced apart from the inner peripheral surfaces of the lock piston 41 and the lock shaft 42. The lock shaft 42 moves in conjunction with the lock piston 41 and surrounds the shaft 23 at a distance from the outer peripheral surface of the shaft 23.

[0063] The lock shaft extension 42d is housed in the locking rocker chamber 22e so that the holding rocker end face 22f and the lock shaft engagement surface 42e face each other. The lock shaft 42 is inserted through the rocker insertion hole 22d. In the rocker insertion hole 22d, the lock shaft 42 is surrounded by the rocker inner circumferential surface 22c so that the outer circumferential surface of the lock shaft 42 is spaced apart from the rocker inner circumferential surface 22c.

[0064] In the rocker insertion hole 22d, the rocker inner circumferential surface 22c is spaced apart from the outer circumferential surface of the lock shaft 42. The outer circumferential surface of the shaft 23 is spaced apart from the inner circumferential surfaces of the lock shaft 42 and the lock piston 41. The rocker 22 protrudes from the base insertion hole 30d so as to be rockable relative to the lock piston 41 and the lock shaft 42. The second rocker end surface 22b is rockable along the first base end surface 30a.

[0065] The shaft 23 extends in the axial direction of the device base 30 from the lock piston 41 toward the second base end face 30b and is inserted through the fixed base insertion hole 51c, the first movable member insertion hole 53a, and the second movable member insertion hole 55a. In other words, the tip 23b of the shaft 23 passes through the fixed base insertion hole 51c, the first movable member insertion hole 53a, and the second movable member insertion hole 55a. The tip 23b of the shaft 23 is inserted into and attached to the bearing 58. The tip 23b of the shaft 23 supports the retaining block 57 via the bearing 58. As described above, the retaining block 57 is connected to the leaf spring 56. In other words, the shaft 23 is connected to the leaf spring 56 via the retaining block 57 and the bearing 58. In other words, the tilt adjustment device 100 has the leaf spring 56 connected to the shaft 23.

[0066] As described above, the fixed ends 56d of the first to fourth leaf spring forming materials B1 to B4 are fixed to the second movable member upper surface 55d, thereby attaching the leaf spring 56 to the second movable member 55. In other words, the leaf spring 56 connects the tip end 23b of the shaft 23, which passes through the first movable member insertion hole 53a and the second movable member insertion hole 55a, to the second movable member 55.

[0067] As described above, the shaft 23 is inserted through the base insertion hole 30d so that the oscillating body 22 can oscillate relative to the first base end surface 30a. In other words, the leaf spring 56 connects at least one of the multiple movable members, the first movable member 53 and the second movable member 55, to the shaft 23 so that the oscillating body 22 can oscillate relative to the device base 30 via the shaft 23. In this embodiment, the leaf spring 56 connects the shaft 23 and the second movable member 55.

[0068] <Control Device and Tilt Detection Sensor> The control device 70 controls the positioning mechanism 50. As shown in Fig. 1 , the control device 70 includes a motor control unit 71 and a movement amount calculation unit 72. The motor control unit 71 drives the first ultrasonic motor 52 and the second ultrasonic motor 54.

[0069] The control device 70 includes a processor and a storage unit (not shown). The processor included in the control device 70 is, for example, a central processing unit (CPU) or a micro processing unit (MPU). The storage unit included in the control device 70 is, for example, a read-only memory (ROM) or a random access memory (RAM). The processor included in the control device 70 functions as a motor control unit 71 and a movement amount calculation unit 72 by executing instructions included in a program stored in the storage unit.

[0070] As shown in FIGS. 1, 4, and 5, the movement amount calculation unit 72 determines, as target values, the angle α of tilt of the crimping unit oscillator 20 relative to the device base 30 and the azimuth angle θ indicating the tilt direction, which are necessary for the first crimping tool end face 21a to be parallel to the reference plane S. The movement amount calculation unit 72 determines the angle α and the azimuth angle θ based on parallelism information transmitted by the tilt detection sensor 80. The parallelism information includes the angle α and the azimuth angle θ between the first crimping tool end face 21a and the reference plane S at the time of measurement. The movement amount calculation unit 72 calculates the distance by which the first movable member 53 is moved in the first direction A1 by the first ultrasonic motor 52 based on the parallelism information and the target value. The movement amount calculation unit 72 calculates the distance by which the first movable member 53 is moved in the second direction A2 by the second ultrasonic motor 54 based on the parallelism information and the target value. The distances by which the first and second movable members 53 and 55 are moved can be calculated using the following equations (1) and (2).

[0071] X2=X1+K・L{sinα2cosθ2-sinα1cosθ1}…(1) Y2=Y1+K・L{sinα2sinθ2-sinα1sinθ1}…(2) １ is the distance between the fixed base 51 and the first movable member 53 in the first direction A1 when the crimping portion axis LP and the base axis LB are aligned. １ is the distance between the first movable member 53 and the second movable member 55 in the second direction A2 when the crimping portion axis LP and the base axis LB are aligned. ２is the distance between the fixed base 51 and the first movable member 53 in the first direction A1 when the crimping portion rocking body 20 is inclined at the target angle relative to the device base 30. ２ is the distance between the first movable member 53 and the second movable member 55 in the second direction A2 when the crimping portion rocking body 20 is inclined at the target angle relative to the device base 30. １ and Y １ are measured by the first and second encoders 61 and 62, respectively, at the initial position.

[0072] As shown in FIG. 4, the angle α is the angle between the crimping portion axis LP and the base axis LB. １ is the angle α measured by the tilt detection sensor 80. As shown in Fig. 5, when an origin through which the reference axis passes is determined on the base axis LB and the first direction A1 is defined as the direction in which the reference axis extends, the azimuth angle θ indicates the angle at which a line connecting the origin and the crimping portion axis LP in a plane perpendicular to the base axis LB is tilted with respect to the reference axis. θ １ is the azimuth angle θ measured by the tilt detection sensor 80. ２ is the target value of the angle between the crimping portion axis LP and the base axis LB. ２ is the target value of the azimuth angle θ. K is a proportional gain value, which is a predetermined proportional constant. L is the distance from the center of oscillation of the oscillator 22 to the center of the tip end 23b.

[0073] The movement amount calculation unit 72 calculates the amount of movement of the first motor installation unit 53e and the second motor installation unit 55f required to make the reference plane S and the first crimping tool end face 21a parallel, based on the measurement value obtained by the tilt detection sensor 80. The measurement value includes information on the tilt of the first crimping tool end face 21a with respect to the reference plane S.

[0074] The tilt detection sensor 80 is a sensor that detects the parallelism between the first crimping tool end face 21a and the reference plane S. The parallelism between the first crimping tool end face 21a and the reference plane S includes the angle and direction of the tilt of the first crimping tool end face 21a with respect to the reference plane S. The parallelism is included in the measurement value of the tilt detection sensor 80. The tilt detection sensor 80 is, for example, a plurality of laser sensors attached to a plurality of locations on the crimping portion oscillator 20. The tilt detection sensor 80 measures the tilt of the first crimping tool end face 21a with respect to the reference plane S by measuring the distance between the first crimping tool end face 21a and the reference plane S at a plurality of locations using the laser sensors.

[0075] The tilt detection sensor 80 is electrically connected to the control device 70, detects the parallelism between the first crimping tool end face 21 a and the reference plane S, and transmits information related to the parallelism to the control device 70. Based on the measurement value acquired by the tilt detection sensor 80, the control device 70 drives each of the first and second ultrasonic motors 52, 54 using the motor control unit 71 so that the first crimping tool end face 21 a is parallel to the reference plane S.

[0076] <Operation of the tilt adjustment device to achieve a parallel posture> The operation of the tilt adjustment device 100 will be described using Figures 1, 2, and 4 to 7. As shown in Figure 2, the tilt adjustment device 100 is in an initial position. The tilt adjustment device 100 is attached, for example, to a transport device (not shown). In the initial position, the first crimping tool end surface 21a faces the reference plane S, and the crimping tool 21 is located away from the reference plane S. In the initial position, the crimping portion axis LP of the crimping portion oscillator 20 and the base axis LB of the device base 30 coincide with each other. When the tilt adjustment device 100 is in the initial position, the reference plane axis LS, which extends in a direction perpendicular to the reference plane S, is not parallel to the crimping portion axis LP and the base axis LB.

[0077] In the initial position, each of the first to fourth leaf spring forming members B1 to B4 of the leaf spring 56 is at its natural length. In other words, in the initial position, the leaf spring 56 does not bias the tip end 23b of the shaft 23 in any direction.

[0078] In the initial position, a pressure supply source (not shown) sucks air from the locking air chamber 48 via the locking port 49, thereby making the pressure supplied to the locking air chamber 48 negative.

[0079] 2, when the supply pressure is negative, the lock piston 41 is in a position where a part of the lock piston step surface 41d abuts against the base step surface 30e in the axial direction of the device base 30. The lock shaft extension 42d is in a position where the holding rocker end surface 22f and the lock shaft engagement surface 42e are separated in the axial direction of the device base 30.

[0080] During tilt adjustment by the tilt adjustment device 100, the tilt detection sensor 80 measures the tilt of the first crimping tool end face 21a relative to the reference plane S. The tilt detection sensor 80 transmits the tilt of the first crimping tool end face 21a relative to the reference plane S as current angle information to the control device 70. The control device 70 receives the current angle information transmitted from the tilt detection sensor 80. The control device 70 determines, via the movement amount calculation unit 72, the tilt of the crimping part oscillator 20 relative to the device base 30 in an attitude in which the reference plane S and the first crimping tool end face 21a are parallel to each other, as a target value. The movement amount calculation unit 72 of the control device 70 determines the amount of movement of each of the first and second movable members 53, 55 required to achieve the target value, using equations (1) and (2).

[0081] Once the amount of movement is determined, a pressure supply source (not shown) supplies air to the air bearing port 33. The supplied air is supplied between the first base end face 30a and the second oscillator end face 22b via the air bearing air supply / discharge chamber 32 and multiple holes in the annular porous material 31. As a result, the annular porous material 31 receives air supply from the air bearing port 33. This air supply pressurizes the gap between the second oscillator end face 22b and the first base end face 30a. As a result, the second oscillator end face 22b moves away from the first base end face 30a. At the same time, the oscillator 22 is attracted toward the first base end face 30a by the magnetic attraction of the magnet 44 held by the magnet holding member 43. As a result, a small gap is formed between the second oscillator end face 22b and the first base end face 30a and this gap is maintained. The device base 30 supports the swingable body 22 so as to be swingable at a distance from the first base end surface 30a.

[0082] 1 and 3, the motor control unit 71 drives the first drive unit 52a to move the first movable member 53 based on the determination by the movement amount calculation unit 72. The motor control unit 71 drives the second drive unit 54a to move the second movable member 55 based on the determination by the movement amount calculation unit 72.

[0083] Driving the first drive unit 52a by the motor control unit 71 guides the first movable member 53 to move in the first direction A1 by the first ultrasonic motor 52. The movement of the first movable member 53 in the first direction A1 guides the movement of the tip end 23b of the shaft 23 in the first direction A1 via the second movable member 55 and the leaf spring 56.

[0084] Furthermore, driving of the second drive unit 54a by the motor control unit 71 induces movement of the second movable member 55 in the second direction A2 by the second ultrasonic motor 54. The movement of the second movable member 55 induces movement of the tip end 23b of the shaft 23 in the second direction A2 via the leaf spring 56. As described above, the first direction A1 and the second direction A2 are perpendicular to each other and perpendicular to the base axis LB. Therefore, by driving the first and second ultrasonic motors 52, 54, the motor control unit 71 moves the tip end 23b of the shaft 23 in a plane perpendicular to the base axis LB.

[0085] The movement of the tip 23b induces movement of the oscillator 22 in a direction perpendicular to the base axis LB via the shaft 23. However, the oscillator 22 has a second oscillator end face 22b that engages with the first base end face 30a. As a result, the movement of the tip 23b induces oscillation of the oscillator 22 relative to the device base 30 via the shaft 23. In other words, the positioning mechanism 50 oscillates the oscillator 22 via the shaft 23 by changing the position of the tip 23b of the shaft 23 in a plane parallel to the second base end face 30b.

[0086] As a result of the oscillation of the oscillator 22, a parallel posture of the oscillator 22 is realized, in which the first crimping tool end face 21 a is parallel to the reference plane S. Therefore, the tilt adjustment device 100 drives the positioning mechanism 50 based on a target value determined by the control device 70. The tilt adjustment device 100 tilts the oscillator 22 with respect to the device base 30, thereby realizing a parallel posture of the oscillator 22, in which the first crimping tool end face 21 a is parallel to the reference plane S. The tilt adjustment device 100 adjusts the tilt of the oscillator 22 so that the first crimping tool end face 21 a is parallel to the reference plane S, while oscillating the second oscillator end face 22 b along the first base end face 30 a.

[0087] Therefore, the tilt adjustment device 100 adjusts the parallelism of the oscillating body 22 so that the first crimping tool end surface 21a is parallel to the reference plane S by driving the positioning mechanism 50 based on the control device 70 and the tilt detection sensor 80.

[0088] When the positioning mechanism 50 oscillates the oscillator 22 via the shaft 23, the air bearing port 33 supplies air to the oscillator 22. By supplying air to the oscillator 22 from the air bearing port 33, the oscillator 22 is tilted to the desired angle without the second oscillator end surface 22b sliding against the first base end surface 30a. Furthermore, when the oscillator 22 oscillates, the anti-rotation mechanism 90 restricts the crimping portion oscillator 20 from rotating around the crimping portion axis LP.

[0089] Movement of the tip portion 23b by the positioning mechanism 50 in a plane parallel to the second base end surface 30b induces swinging of the swinging body 22 via the shaft 23. This swinging induces tilting of the crimping portion axis LP relative to the base axis LB. In other words, the shaft 23 also swings in conjunction with the swinging of the swinging body 22. The swinging of the shaft 23 tilts the axial directions of the holding block 57 and the bearing 58 relative to the base axis LB and induces flexural deformation of the leaf spring 56.

[0090] For example, as shown in Figures 6 and 7, consider a situation in which the shaft 23 is tilted in the second direction A2 by the second movable member 55. Note that in the first direction A1, one side is the positive side and the other side is the negative side. Similarly, in the second direction A2, one side is the positive side and the other side is the negative side. In this situation, the tip end 23b moves in a direction from the fourth leaf spring forming material B4 toward the second leaf spring forming material B2, and the crimping portion rocking body 20 is tilted toward the positive side of the second direction A2. The tilt of the crimping portion rocking body 20 guides the movement of the tip end 23b in the axial direction of the device base 30. As the tip end 23b moves, the second leaf spring forming material B2 bends in a direction approaching the inner bottom surface of the movable member groove 55e. At the same time, as the tip end 23b moves, the fourth leaf spring forming material B4 bends in a direction away from the inner bottom surface of the movable member groove 55e. The second leaf spring forming material B2, which is bent in a direction approaching the inner bottom surface of the movable member groove 55e, is accommodated in the movable member groove 55e. The above-described bending deformation of the leaf spring 56 occurs regardless of the direction in which the tip portion 23b moves. Note that the direction and magnitude of the bending deformation change depending on the direction in which the tip portion 23b moves. For example, among the first to fourth leaf spring forming materials B1 to B4, the leaf spring forming material that undergoes bending deformation differs depending on the direction in which the tip portion 23b moves. The leaf spring 56 can be bent in response to changes in the position of the tip portion 23b of the shaft 23 caused by the positioning mechanism 50. The bending deformation of the leaf spring 56 absorbs the movement of the tip portion 23b in the direction along the base axis LB associated with the swing of the swing body 22 and the tilt of the shaft 23.

[0091] Even when the crimping portion rocking body 20 is tilted to the negative side in the second direction A2, the leaf spring 56 absorbs the movement of the tip end 23 b in the direction along the base axis LB. Furthermore, although not shown, even when the crimping portion rocking body 20 is tilted to the positive side in the first direction A1 or the negative side in the first direction A1, the leaf spring 56 absorbs the movement of the tip end 23 b in the direction along the base axis LB.

[0092] <Operation of Inclination Adjustment Device for Maintaining Parallel Posture> Next, an operation of the inclination adjustment device 100 for maintaining an attitude in which the first crimping tool end surface 21a and the reference plane S are parallel will be described.

[0093] After the first crimping tool end surface 21a becomes parallel to the reference plane S, the pressure supply source (not shown) stops the supply of air to the air bearing port 33. After stopping the air supply, the pressure supply source sucks air from the air bearing port 33. Therefore, the air in the annular porous material 31 flows in the direction of being discharged from the air bearing port 33. The pressure supply source creates a negative pressure in the air bearing air supply / discharge chamber 32 by sucking air through the air bearing port 33.

[0094] 7 , when the air bearing air supply / discharge chamber 32 is under negative pressure, the oscillator 22 abuts against and is adsorbed to the first base end surface 30a of the device base 30 while maintaining an orientation in which the first crimping tool end surface 21a is parallel to the reference plane S. As a result of the air bearing air supply / discharge chamber 32 being under negative pressure, the tilt adjustment device 100 performs a temporary lock to maintain the parallel orientation of the first crimping tool end surface 21a with respect to the reference plane S. In other words, the tilt adjustment device 100 fixes the inclined orientation of the oscillator 22 by sucking air through the air bearing port 33.

[0095] After the air bearing air supply / discharge chamber 32 becomes negative pressure, temporarily locking the lock, and the pressure supply source switches the air pressure supplied to the lock port 49 from negative to positive. This causes the pressure supply source to pressurize the lock air chamber 48, which communicates with the lock port 49. Pressurizing the lock air chamber 48 causes the lock piston 41 and the lock shaft 42 to move in a direction from the first base end face 30a toward the second base end face 30b, as shown by the two-dot chain line in FIG. 7 . This movement causes the lock shaft 42 to pressurize the lock shaft engagement surface 42e against the holding rocker end face 22f in the lock rocker chamber 22e. This pressing force firmly engages the lock shaft 42 and the rocker 22. As a result, the crimping portion rocker 20 is pressed in a direction from the first base end face 30a toward the second base end face 30b. Due to the provisional lock, the oscillator 22 of the crimping part oscillator 20 abuts against the first base end face 30a at the second oscillator end face 22b. Therefore, pressurization of the locking air chamber 48 by the pressure supply source generates a normal force against the pressing of the crimping part oscillator 20 at the contact surface between the second oscillator end face 22b and the first base end face 30a. This normal force induces a static friction force at the contact surface that prevents the oscillator 22 from oscillating relative to the device base 30. This limits the oscillation of the crimping part oscillator 20 relative to the device base 30. As a result of pressurizing the locking air chamber 48 by the pressure supply source, the tilt adjustment device 100 performs a final lock, which maintains the parallel orientation of the first crimping tool end face 21a relative to the reference plane S, in addition to the provisional lock. Therefore, the tilt adjusting device 100 maintains the parallel posture of the crimping portion rocking body 20 and the reference plane S by provisional locking and final locking.

[0096] [Effects of this embodiment] The effects of this embodiment will be described together with the operation. (1) The tilt adjustment device 100 includes a positioning mechanism 50 having first and second ultrasonic motors 52, 54. The positioning mechanism 50 swings the swinging body 22 and the crimping tool 21 via the shaft 23 by changing the position of the tip end 23b of the shaft 23. The tilt adjustment device 100 adjusts the attitude of the crimping portion swinging body 20 by this swing so that the first crimping tool end face 21a is parallel to the reference plane S. As a result, the tilt adjustment device 100 can adjust the first crimping tool end face 21a to be parallel to the reference plane S without generating a load on the reference plane S.

[0097] The crimping portion oscillator 20 and the second movable member 55 included in the positioning mechanism 50 are connected by a leaf spring 56. The plate thickness direction T of the leaf spring 56 coincides with the axial direction of the device base 30. The leaf spring 56 is a thin plate. Therefore, by connecting the crimping portion oscillator 20 and the positioning mechanism 50 by the leaf spring 56, the tilt adjustment device 100 can be provided with the positioning mechanism 50 that adjusts the attitude of the crimping portion oscillator 20 while preventing the device from becoming larger in size in the direction of the base axis LB.

[0098] (2) When the positioning mechanism 50 tilts the shaft 23 relative to the base axis LB, the leaf spring 56 bends in the plate thickness direction T. As a result, the axial displacement of the device base 30 that occurs at the tip end 23b of the shaft 23 is absorbed by the leaf spring 56. As a result, the tilt adjustment device 100 can guide the tilt of the shaft 23 without causing wear on the tip end 23b when the shaft 23 tilts, compared to when a highly rigid member connects the tip end 23b to the positioning mechanism 50 and guides the movement of the tip end 23b. Therefore, the tilt adjustment device 100 can adjust the tilt of the crimping portion oscillator 20 with high precision.

[0099] (3) The tilt adjustment device 100 uses a thin plate-shaped leaf spring 56 that is easily deformed. For example, compared to using a leaf spring 56 that is not easily deformed and has high rigidity, the thrust required by the first and second ultrasonic motors 52, 54 that move the tip portion 23b is smaller. Therefore, by using a thin plate-shaped leaf spring 56 that is easily deformed, the tilt adjustment device 100 can reduce the size of the first and second ultrasonic motors 52, 54. As a result, the tilt adjustment device 100 is made smaller.

[0100] (4) In the positioning mechanism 50, the fixed base 51, the first ultrasonic motor 52, the first movable member 53, the second ultrasonic motor 54, and the second movable member 55 are arranged in a stacked manner in the axial direction of the device base 30. In other words, compared to a case in which the first ultrasonic motor 52, the first movable member 53, the second ultrasonic motor 54, and the second movable member 55 are arranged in a direction perpendicular to the base axis LB, the tilt adjustment device 100 is made smaller in size in the direction perpendicular to the base axis LB.

[0101] The shaft 23 is inserted through the fixed base insertion hole 51c, the first movable member insertion hole 53a, and the second movable member insertion hole 55a. The tip end 23b of the shaft 23 is connected to the second movable member 55 by a leaf spring 56 so that the shaft 23 can oscillate in the base insertion hole 30d. The positioning mechanism 50 is attached to the fixed base installation surface 34 by the fixed base 51 and is housed in the base insertion hole 30d. That is, the tilt adjustment device 100 moves the tip end 23b in the base insertion hole 30d using the positioning mechanism 50, and oscillates the shaft 23 and the oscillating body 22. Therefore, the tilt adjustment device 100 is smaller in size in the direction of the base axis LB than when the positioning mechanism 50 is provided on the second base end surface 30b outside the base insertion hole 30d.

[0102] (5) If the first movable member 53 does not have the first movable member insertion hole 53a and the second movable member 55 does not have the second movable member insertion hole 55a, the leaf spring 56 may need to be attached to the positioning mechanism 50 within the base insertion hole 30d. This makes the attachment difficult. Furthermore, in this case, it is necessary to ensure sufficient space within the base insertion hole 30d to allow for the attachment. This leads to an increase in the size of the tilt adjustment device 100.

[0103] In contrast, in the tilt adjustment device 100 of this embodiment, a first movable member insertion hole 53a is formed in the first movable member 53, and a second movable member insertion hole 55a is formed in the second movable member 55. The tip end 23b of the shaft 23 inserted through the fixed base insertion hole 51c, the first movable member insertion hole 53a, and the second movable member insertion hole 55a is exposed to the outside of the device base 30 through the base insertion hole 30d. The second movable member upper surface 55d of the second movable member 55 to which the leaf spring 56 is attached is also exposed to the outside of the device base 30 through the base insertion hole 30d. Therefore, there is no need to secure space within the base insertion hole 30d for attaching the leaf spring 56.

[0104] Therefore, the tilt adjustment device 100 of this embodiment is easy to assemble and can be made compact. (6) In the lock mechanism 40, the shaft 23 is inserted through the lock piston insertion hole 41a and the lock shaft insertion hole 42a. The outer peripheral surface of the shaft 23 is spaced from the inner peripheral surfaces of the lock piston 41 and the lock shaft 42. The lock mechanism 40 performs the main locking by abutting the lock shaft engagement surface 42e of the lock shaft 42 against the holding oscillator end surface 22f and then pressing the oscillator 22 against the first base end surface 30a. In other words, when the positioning mechanism 50 adjusts the parallelism of the crimping portion oscillator 20, the shaft 23 is spaced from the lock piston 41 and the lock shaft 42, and the oscillator 22 is spaced from the lock shaft 42. In other words, the tilt adjustment device 100 can adjust the crimping portion oscillator 20 to be parallel to the reference plane S without interfering with the lock mechanism 40. Furthermore, during full locking, the locking mechanism 40 can maintain the parallel posture of the crimping portion rocking body 20 without applying a rocking moment to the crimping portion rocking body 20 via the shaft 23. That is, the locking mechanism 40 can maintain and hold the parallel posture of the crimping portion rocking body 20 with high precision compared to when a rocking moment is applied to the crimping portion rocking body 20. As a result, the tilt adjusting device 100 can adjust the crimping portion rocking body 20 to be parallel to the reference plane S with high precision compared to when the locking mechanism 40 and the crimping portion rocking body 20 are in contact with each other.

[0105] (7) The leaf spring 56 has a cross shape extending in both the first direction A1 and the second direction A2. Furthermore, each of the first to fourth leaf spring forming members B1 to B4 extends from the leaf spring annular portion 56c. In other words, deformation occurring in each of the first to fourth leaf spring forming members B1 to B4 only affects the other leaf spring forming members via the leaf spring annular portion 56c. Therefore, by forming the leaf spring 56 into a cross shape, the influence of mutual interference between the first to fourth leaf spring forming members B1 to B4 is reduced. As a result, the tilt adjustment device 100 can adjust the crimping portion rocker 20 to be parallel to the reference plane S with greater precision than when the leaf spring 56 is, for example, rectangular rather than cross-shaped.

[0106] (8) The shaft 23 is inserted through the holding block 57 and the bearing 58, and is connected to the leaf spring 56 via the holding block 57 and the bearing 58. This reduces the effect of the leaf spring 56 on the movement of the crimping portion oscillator 20 in the direction of the crimping portion axis LP. As a result, the tilt adjustment device 100 can adjust the tilt of the crimping portion oscillator 20 with respect to the reference plane S with high precision.

[0107] (9) In the positioning mechanism 50, the first movable member 53 is moved in the first direction A1 by the first ultrasonic motor 52, and the second movable member 55 is moved in the second direction A2 by the second ultrasonic motor 54. The first motor shaft 52b of the first ultrasonic motor 52 is driven by the first drive unit 52a and moves the first movable member 53 in the first direction A1. The second motor shaft 54b of the second ultrasonic motor 54 is driven by the second drive unit 54a and moves the second movable member 55 in the second direction A2. Each of the first ultrasonic motor 52 and the second ultrasonic motor 54 operates by receiving power from a power source (not shown). In other words, the positioning mechanism 50 operates by receiving power from a power source (not shown).

[0108] When the first movable member 53 is moved and the supply of power to the first ultrasonic motor 52 is cut off, the first ultrasonic motor 52 stops operating while maintaining the position of the moved first movable member 53. Furthermore, when the second movable member 55 is moved and the supply of power to the second ultrasonic motor 54 is cut off, the second ultrasonic motor 54 stops operating while maintaining the position of the moved second movable member 55. In other words, when the positioning mechanism 50 changes the position of the tip end 23b in a plane parallel to the second base end face 30b and then cuts off the supply of power, the positioning mechanism 50 stops operating while maintaining the position of the tip end 23b. This allows the tilt adjustment device 100 to maintain the orientation of the crimping part oscillator 20 parallel to the reference plane S even when the supply of power to the positioning mechanism 50 is cut off after adjusting the parallelism of the crimping part oscillator 20.

[0109] [Modifications] The above embodiment can be modified as follows: The above embodiment and the following modifications can be combined with each other within the scope of technical compatibility.

[0110] The tilt adjustment device 100 does not need to use a plurality of ultrasonic motors as the plurality of actuators. In this case, for example, a plurality of linear actuators may be used as the plurality of actuators.

[0111] The shaft 23 may be connected to the leaf spring 56 without using the retaining block 57 and the bearing 58. In other words, the leaf spring 56 may be attached directly to the tip end 23b of the shaft 23. In this case, the tilt adjustment device 100 may not include the anti-rotation mechanism 90.

[0112] The leaf spring 56 does not have to be cross-shaped. For example, a rectangular leaf spring having sides extending in both the first direction A1 and the second direction A2 may be used. The lock shaft engagement surface 42e does not have to be convex spherical, and the holding rocker end surface 22f does not have to be concave spherical. In this case, as shown in FIG. 9 , the holding rocker end surface 22f is a flat surface perpendicular to the crimping portion axis LP. The lock mechanism 40 also has an engagement member G including the lock shaft engagement surface 42e. The engagement member G is provided at an end of the lock shaft 42 that is different from the end having the female thread portion 421. The engagement member G can reciprocate integrally with the lock shaft 42 in the direction in which the base axis LB extends. The engagement member G is also provided to be able to swing relative to the end of the lock shaft 42. In this case, the lock shaft engagement surface 42e is formed on the engagement member G and is a surface perpendicular to the outer circumferential surface of the engagement member G. In this case, the lock shaft engaging surface 42e is a flat surface perpendicular to the crimping portion axis LP. The center of swing of the engaging member G is in a plane including the lock shaft engaging surface 42e. The lock shaft engaging surface 42e engages with the holding rocker end surface 22f.

[0113] The locking mechanism 40 does not have to include the locking piston 41 and the locking shaft 42. Furthermore, the tilt adjusting device 100 does not have to include the locking mechanism 40. In this case, the position of the crimping portion rocking body 20 is maintained only by temporary locking.

[0114] The positioning mechanism 50 does not have to include the first actuator and the second actuator as the multiple actuators. Furthermore, the positioning mechanism 50 does not have to include the first movable member 53 and the second movable member 55 as the multiple movable members.

[0115] For example, the positioning mechanism 50 may include, as the multiple actuators, three actuators surrounding the tip portion 23b of the shaft 23. Furthermore, the positioning mechanism 50 may include, as the multiple movable members, three movable members.

[0116] 8 shows a positioning mechanism 50 equipped with first to third ultrasonic motors C1 to C3 as three actuators. The positioning mechanism 50 is equipped with first to third movable members D1 to D3 corresponding to the first to third ultrasonic motors C1 to C3. In this case, the positioning mechanism 50 has three fixed bases E1 to E3. The three fixed bases E1 to E3 are attached to the fixed base mounting surface 34. The three fixed bases E1 to E3 are centered on the base axis LB of the device base 30 and are arranged on the circumference of a circle having a radial direction parallel to the fixed base mounting surface 34. The three fixed bases E1 to E3 are preferably arranged at equal angular intervals in the circumferential direction of the circle.

[0117] The first to third ultrasonic motors C1 to C3 are attached to the fixed base mounting surface 34 by three fixed bases E1 to E3, respectively. The first to third ultrasonic motors C1 to C3 are capable of moving the corresponding first to third movable members D1 to D3 in different directions. That is, the first to third ultrasonic motors C1 to C3 are arranged around the tip 23b. The first to third ultrasonic motors C1 to C3 are preferably arranged so that three axes extending in the movement directions of the ultrasonic motors form an equilateral triangle. The first to third movable members D1 to D3 are connected to the tip 23b via the corresponding first to third linear slide mechanisms F1 to F3, leaf springs 56, and holding blocks 57. Each of the first to third linear slide mechanisms F1 to F3 is capable of linear movement in a direction along the fixed base mounting surface 34.

[0118] The first linear slide mechanism F1 absorbs distortion of the leaf spring 56 in accordance with changes in the distance between the first movable member D1 and the leaf spring 56, which occurs with the movements of the second movable member D2 and the third movable member D3. The second linear slide mechanism F2 absorbs distortion of the leaf spring 56 in accordance with changes in the distance between the second movable member D2 and the leaf spring 56, which occurs with the movements of the first movable member D1 and the third movable member D3. The third linear slide mechanism F3 absorbs distortion of the leaf spring 56 in accordance with changes in the distance between the third movable member D3 and the leaf spring 56, which occurs with the movements of the first movable member D1 and the second movable member D2.

[0119] The tip 23b moves in a direction that combines the moving directions of the first to third ultrasonic motors C1 to C3 in a plane parallel to the fixed base installation surface 34. Therefore, the positioning mechanism 50 changes the position of the tip 23b in a plane parallel to the fixed base installation surface 34 by using the first to third ultrasonic motors C1 to C3.

[0120] The positioning mechanism 50 in the embodiment shown in FIG. 8 may include two or four or more actuators as the plurality of actuators, and may include two or four or more movable members as the plurality of movable members.

[0121] The expression "at least one" used in this specification means "one or more" of the desired options. As an example, the expression "at least one" used in this specification means "only one option" or "both of two options" if the number of options is two. As another example, the expression "at least one" used in this specification means "only one option" or "any combination of two or more options" if the number of options is three or more.

Claims

1. A tilt adjustment device comprising: a rocker having a first rocker end face and a second rocker end face which is a convex spherical surface; a shaft protruding from the second rocker end face; a crimping tool having a second crimping tool end face attached to the first rocker end face and which has a first crimping tool end face different from the second crimping tool end face; and an equipment base having a first base end face which is a concave spherical surface that engages with the second rocker end face and through which the shaft passes, the second base end face being different from the first base end face; the tilt adjustment device is configured to adjust the tilt of the rocker so that the first crimping tool end face is parallel to a reference plane, the tilt adjustment device comprising: a positioning mechanism configured to rock the rocker via the shaft by changing the position of the tip end of the shaft within a plane parallel to the second base end face; and a leaf spring connected to the shaft, the positioning mechanism comprising: a plurality of actuators; a plurality of movable members configured to be moved by the plurality of actuators, respectively; the leaf spring is configured to be capable of flexibly deforming in accordance with a change in the position of the tip, and has a plate thickness direction that coincides with the direction in which a base axis, which is the axis of the device base, extends; and at least one of the plurality of movable members is connected to the shaft so that the oscillating body can oscillate relative to the device base via the shaft.

2. The tilt adjustment device described in claim 1, wherein the multiple actuators include a first actuator and a second actuator, and the multiple movable members include a first movable member and a second movable member, the first movable member is movable in a first direction perpendicular to the base axis by a first actuator movable part of the first actuator, and defines a first movable member insertion hole through which the shaft is inserted, the second movable member is movable in a second direction perpendicular to the base axis and the first direction by a second actuator movable part of the second actuator, and defines a second movable member insertion hole through which the shaft is inserted, the first movable member and the second movable member are arranged overlapping in the direction in which the base axis extends, and the first movable member is arranged between the first base end face and the second movable member, and the leaf spring connects the tip end of the shaft that passes through the first movable member insertion hole and the second movable member insertion hole to the second movable member.

3. The inclination adjustment device according to claim 1 or 2, wherein the oscillator has an inner circumferential surface of an oscillator that defines a oscillator insertion hole through which the shaft passes, a locking oscillator chamber that is formed inside the oscillator and communicates with the outside of the oscillator via the oscillator insertion hole, and a retaining oscillator end face that is continuous with the inner circumferential surface of the oscillator and is formed between the first oscillator end face and the second oscillator end face, and the inclination adjustment device further has a locking mechanism including: a lock piston that is provided inside the device base so as to be able to reciprocate in the direction in which the base axis extends and that surrounds the shaft at a distance from the outer surface of the shaft, and a lock shaft that is configured to reciprocate integrally with the lock piston, has a lock shaft engagement surface that is engageable with the retaining oscillator end face, and surrounds the shaft at a distance from the outer surface of the shaft.

4. The tilt adjustment device according to claim 2, wherein the leaf spring is cross-shaped extending in the first direction and the second direction when viewed from the plate thickness direction.

5. A tilt adjustment device as described in claim 1 or claim 2, wherein the positioning mechanism has a retaining block attached to the leaf spring and a bearing supporting the retaining block at the tip, and the shaft is connected to the leaf spring via the retaining block and the bearing.

6. The tilt adjustment device according to claim 1 or 2, wherein the actuator comprises an ultrasonic motor.

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