Capillary supply module, capillary provision mechanism, and wire bonding device

Abstract

This supply module comprises: a magazine base that includes a base mounting surface on which a plurality of replacement capillaries are mounted, and a base extraction surface with which the replacement capillary comes into contact; and a magazine cover that is attached to the magazine base and includes a cover covering surface facing the base mounting surface and a cover extraction surface facing the base extraction surface. A capillary supply port includes a first supply port part and a second supply port part which are arranged along a direction from the base end to the tip of the replacement capillary. The opening width of the first supply port part is smaller than the diameter of the replacement capillary, and the opening width of the second supply port part is larger than the diameter of the replacement capillary.

Description

Capillary supply module, capillary providing mechanism, and wire bonding apparatus

[0001] The present invention relates to a capillary supply module, a capillary providing mechanism, and a wire bonding apparatus.

[0002] A wire bonding device electrically connects the electrodes of a semiconductor chip to a lead frame using a wire. The wire is pressed against the electrodes of the semiconductor chip from a component called a capillary, and heat or ultrasonic waves are applied as needed. As a result, the wire is bonded to the electrodes of the semiconductor chip. This bonding operation is called bonding.

[0003] When bonding is repeated, it becomes difficult to obtain the desired bonding results due to wear at the tip of the capillary, etc. Therefore, the capillary is replaced every time a replacement condition set based on the number of bonding operations, etc. is met.

[0004] Patent Documents 1 to 3 each disclose techniques related to wire bonding. Patent Document 1 discloses an apparatus and method that allows continuous bonding while replacing the capillary, which is the bonding tool. Patent Document 2 discloses an apparatus and method that accurately detects the position of the capillary. Patent Document 3 discloses a method that more effectively suppresses wire dislodgment and wire bending.

[0005] Japanese Patent No. 4700595 Japanese Patent Publication No. 2001-249007 Japanese Patent No. 4467631

[0006] This capillary replacement operation does not simply involve replacing a used capillary with a new one, but also involves preparing the wire inserted into the new capillary so that bonding can be resumed. In other words, multiple steps are required from the time bonding is stopped to replace the capillary until bonding can be resumed with the new capillary. Because the capillary replacement operation requires interrupting bonding, there is a need in the technical field to shorten the time required for capillary replacement, which involves multiple steps.

[0007] The present invention provides a capillary supply module that reduces the time required for replacing a capillary, a capillary supply mechanism that includes the capillary supply module, and a wire bonding apparatus.

[0008] A capillary supply module according to one embodiment of the present invention comprises a base including a base mounting surface on which a plurality of capillaries are mounted and a base removal surface to which a capillary to be removed from the plurality of capillaries contacts, and a cover attached to the base and including a cover covering surface facing the base mounting surface and a cover removal surface facing the base removal surface, wherein the base and cover form a capillary storage section which is an area formed between the base mounting surface and the cover covering surface, and a capillary supply port which is an area formed between the base removal surface and the cover removal surface, and the capillary supply port includes a first supply port portion and a second supply port portion which are aligned in a direction from the base end to the tip end of the capillary, and the opening width of the first supply port portion is smaller than the diameter of the capillary, and the opening width of the second supply port portion is larger than the diameter of the capillary.

[0009] According to this capillary supply module, new replacement capillaries can be supplied from a capillary storage section that stores multiple capillaries via a capillary supply port. That is, by replacing the capillary supply module, multiple new replacement capillaries can be supplied. Therefore, the time required for capillary replacement can be reduced compared to a mode in which replacement capillaries are replaced one by one.

[0010] In the capillary supply module, at least one of the base extraction surface and the cover extraction surface that constitute the first supply port portion may be provided with a protrusion that protrudes toward the other of the base extraction surface and the cover extraction surface. With this configuration, capillaries can be extracted from the capillary supply port in response to an external operation.

[0011] The length of the first supply port portion along the axis of the capillary of the capillary supply module may be longer than the length of the second supply port portion. With this configuration, the attitude of the capillary held in the capillary supply port can be stably maintained.

[0012] In the capillary supply module, the base mounting surface and the base removal surface may not be on a common virtual plane, and the angle between the base mounting surface and the base removal surface may be greater than 180 degrees. This configuration allows the base mounting surface to be arranged as an inclined surface. As a result, the capillaries can roll on the inclined surface, allowing them to move smoothly from the capillary storage section to the capillary supply port.

[0013] The capillary supply module may further include a capillary holding member having a plurality of holding grooves in which the plurality of capillaries are respectively placed and placed on the base, a holding force generating member that generates a holding force that presses the capillary holding member toward the cover, and a release force generating member that generates a release force that pulls the capillary holding member toward the base. With this configuration, it is possible to prevent the capillaries from falling out of the capillary supply module at an unintended timing.

[0014] Another form of the present invention is a capillary supply mechanism having a capillary storage section that stores a plurality of capillaries arranged in a supply direction perpendicular to the axis of the capillaries, and a capillary supply port including a first supply port section whose opening width is smaller than the diameter of the capillary and a second supply port section whose opening width is larger than the diameter of the capillary, and comprising: a capillary supply module that moves the capillaries from the capillary storage section to the capillary supply port along the supply direction; and a capillary replacement module that performs the operation of removing the capillaries by moving the capillaries located at the capillary supply port along the axis from the first supply port section to the second supply port section.

[0015] This capillary supply mechanism includes the capillary supply module. Therefore, by replacing the capillary supply module attached to the capillary replacement module, it is possible to supply multiple new replacement capillaries to the capillary replacement module. Therefore, the time required for the capillary replacement work can be shortened compared to an embodiment in which replacement capillaries are replaced one by one.

[0016] In the above-mentioned capillary providing mechanism, the capillary supply module has a base, a cover, a capillary holding member having a plurality of holding grooves in which each of the plurality of capillaries is placed, a holding force generating member that generates a holding force that presses the capillary holding member toward the cover, and a release force generating member that generates a release force that pulls the capillary holding member toward the base, and when the capillary supply module is not placed in the capillary replacement module, the plurality of capillaries are restrained by the capillary holding member and the holding force generating member so as not to move from the capillary storage portion toward the capillary supply port, and when the capillary supply module is placed in the capillary replacement module, the restraint by the capillary holding member and the holding force generating member is released by the release force generating member so that the plurality of capillaries can move from the capillary storage portion toward the capillary supply port.

[0017] According to this configuration, when the capillary supply module is not attached to the capillary replacement module, it is possible to prevent the capillaries from falling out of the capillary supply module. Furthermore, when the capillary supply module is attached to the capillary replacement module, it is possible to remove the capillaries from the capillary supply module. In other words, simply by attaching the capillary supply module to the capillary replacement module, it is possible to switch from a state in which the capillaries are prevented from falling out to a state in which the capillaries can be supplied.

[0018] A wire bonding apparatus according to yet another embodiment of the present invention includes a used capillary attached to a horn and into which a wire is inserted, and an exchange unit for exchanging the used capillary with a replacement capillary, the exchange unit including a capillary transport module for transporting the used capillary pulled out of the horn from a replacement position to a replacement position along a predetermined linear direction, and for transporting a replacement capillary to be attached to the horn in place of the used capillary from the replacement position to the replacement position in a direction opposite to the predetermined linear direction by a feeding mechanism; The capillary supply module has a capillary storage section that stores the capillaries in a line in a supply direction perpendicular to the axis of the capillaries, and a capillary supply port that includes a first supply port section whose opening width is smaller than the diameter of the replacement capillary and a second supply port section whose opening width is larger than the diameter of the replacement capillary, and moves the replacement capillary from the capillary storage section to the capillary supply port along the supply direction, and a capillary replacement module that performs the operation of removing the replacement capillary by moving the replacement capillary located at the capillary supply port along the axis from the first supply port section to the second supply port section.

[0019] This wire bonding apparatus is equipped with the capillary supply module. Therefore, by replacing the capillary supply module attached to the capillary replacement module, it is possible to supply multiple new replacement capillaries to the capillary replacement module. Therefore, the time required for the capillary replacement work can be shortened compared to an embodiment in which replacement capillaries are replaced one by one.

[0020] According to the present invention, it is possible to provide a capillary exchange mechanism and a wire bonding apparatus that can reduce the time required for capillary exchange.

[0021] FIG. 1 is a perspective view showing the configuration of a wire bonding apparatus according to an embodiment. FIG. 2 is a front view showing an upper clamper and a lower clamper. FIG. 3 is a diagram schematically showing the configuration of a capillary exchange unit. FIG. 4 is a perspective view showing a specific configuration of the capillary exchange unit. FIG. 5 is a perspective view showing an example of a specific configuration of a transfer module. FIGS. 6(a), 6(b), 6(c), and 6(d) are views for explaining a first transfer operation performed by the capillary exchange unit. FIGS. 7(a), 7(b), 7(c), and 7(d) are views for explaining a second transfer operation performed by the capillary exchange unit. FIG. 8 is a perspective view showing an example of a specific configuration of a replacement module. FIGS. 9(a) and 9(b) are views for explaining a pulling operation performed by the capillary exchange unit. FIGS. 10(a), 10(b), 10(c), and 10(d) are views for explaining a replacement operation performed by the capillary exchange unit. FIG. 11 is a perspective view showing the inside of the capillary supply module with the magazine cover separated. FIG. 12 is a side view showing the state in which the capillary supply module is attached to the capillary replacement module. FIG. 13 is a perspective view of the magazine cover seen from the back. FIG. 14 is a perspective view showing the magazine base, the capillary holding mechanism, and the capillary feed mechanism in exploded form. FIG. 15 is a side view showing an enlarged capillary supply port. FIG. 16 is a plan view showing an enlarged capillary supply port. FIGS. 17(a), 17(b), and 17(c) are views showing the operation of removing a replacement capillary. FIGS. 18(a), 18(b), 18(c), and 18(d) are views showing the operation of returning the replacement table to its initial position. FIG. 19 is a cross-sectional view showing the state in which a replacement capillary is held. FIG. 20 is a cross-sectional view showing the state in which the holding of the replacement capillary is released. FIG. 21 is a functional block diagram of a controller provided in the wire bonding apparatus of the embodiment.

[0022] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same elements are designated by the same reference numerals, and duplicated explanations will be omitted.

[0023] 1 is a perspective view showing a wire bonding apparatus according to an embodiment of the present invention. The wire bonding apparatus 1 includes a wire bonding unit 2, a bonding stage 3, a camera unit 4, a capillary exchange unit 5, and a controller 6.

[0024] The wire bonding unit 2 bonds bonding wires 12 to the semiconductor chips 11. The bonding stage 3 sequentially moves multiple semiconductor chips 11 to be wire bonded to the working area of ​​the wire bonding unit 2. The camera unit 4 captures images for controlling the operation of the wire bonding unit 2. The capillary replacement unit 5 replaces a used capillary that needs to be replaced after multiple wire bonding operations with a new replacement capillary. The controller 6 has various control units that control the operation of each unit of the wire bonding apparatus 1 and perform various processes.

[0025] The wire bonding unit 2 has a main base 21, a tool XY stage 22, and a sub-base 23. The wire bonding unit 2 further has a bonding module 24, a Z-axis drive unit 25, a module base 26, a lower wire clamper 27, and an upper wire clamper 28.

[0026] The tool XY stage 22 is attached to the main base 21. The sub-base 23 is attached to a movable stage of the tool XY stage 22. The tool XY stage 22 moves the sub-base 23 in the X-axis direction and the Y-axis direction. A bonding module 24, a lower wire clamper 27, an upper wire clamper 28, and a camera unit 4 are attached to the sub-base 23. For example, when the sub-base 23 is moved in the X-axis direction by the tool XY stage 22, the bonding module 24, the lower wire clamper 27, the upper wire clamper 28, and the camera unit 4 also move integrally in the X-axis direction.

[0027] More specifically, the sub-base 23 includes a sub-base main surface 23a and a sub-base wall surface 23b. A Z-axis drive unit 25 is attached to the sub-base main surface 23a, and a module base 26 is attached to the Z-axis drive unit 25. A bonding module 24 and a lower wire clamper 27 are attached to the module base 26. Meanwhile, an upper wire clamper 28 and a camera unit 4 are attached to the sub-base wall surface 23b without intermediate members such as the Z-axis drive unit 25 and the module base 26. With this configuration, the bonding module 24 and the lower wire clamper 27 are reciprocated in the Z-axis direction by the Z-axis drive unit 25. More specifically, the tip of the bonding module 24 and the tip of the lower wire clamper 27 can perform reciprocating arc motion around the Z-axis drive unit 25. During this reciprocating arc motion, the relative position of the lower wire clamper 27 with respect to the bonding module 24 is maintained. On the other hand, the upper wire clamper 28 and the camera unit 4 are not reciprocated in the Z-axis direction by the Z-axis drive unit 25 .

[0028] In short, the bonding module 24 and the lower wire clamper 27 move in the X-axis direction, the Y-axis direction, and the Z-axis direction. In contrast, the upper wire clamper 28 and the camera unit 4 move in the X-axis direction and the Y-axis direction. In the example of this embodiment, the upper wire clamper 28 and the camera unit 4 do not move in the Z-axis direction. However, it is also possible to adopt a configuration in which the upper wire clamper 28 and the camera unit 4 are movable in the Z-axis direction.

[0029] <Bonding module 24> The bonding module 24 has a horn holder 241, an ultrasonic horn 242, and a capillary 243. The base end side of the horn holder 241 is attached to the Z-axis drive unit 25. The ultrasonic horn 242 is attached to the tip side of the horn holder 241. The capillary 243 is detachably attached to the tip side of the ultrasonic horn 242.

[0030] The capillary 243, which is a bonding tool, bonds the bonding wire 12 to the semiconductor chip 11. The capillary 243 has a capillary body 243a and a capillary taper 243b. The capillary body 243a is cylindrical and is held at the tip of the ultrasonic horn 242. The capillary taper 243b is conical and tapers toward the tip, and the tip of the capillary taper 243b is pressed against a pad or the like of the semiconductor chip 11. The capillary 243 has a capillary through-hole 243h formed in it, which extends from the base end surface of the capillary body 243a to the tip surface of the capillary taper 243b. The bonding wire 12 is inserted through the capillary through-hole 243h.

[0031] 2 , the lower wire clamper 27 and the upper wire clamper 28 can be switched between a state in which they grip the bonding wire 12 and a state in which they do not grip the bonding wire 12. As described above, the lower wire clamper 27 is movable along the Z-axis direction. Therefore, with respect to the upper wire clamper 28, whose position along the Z-axis direction is fixed, the position of the lower wire clamper 27 can be switched between a position close to the upper wire clamper 28 and a position farther away from the upper wire clamper 28. By switching between the gripping state and the release state and switching positions, the lower wire clamper 27 and the upper wire clamper 28 can draw the bonding wire 12 from the capillary through-hole 243 h and feed the bonding wire 12 to the capillary through-hole 243 h.

[0032] <Camera Unit> The camera unit 4 captures an image of the semiconductor chip 11. The captured image of the semiconductor chip 11 is used to position the capillary 243 when wire bonding is performed on the semiconductor chip 11. In this way, the camera unit 4 functions as a wire bonding camera unit used to perform wire bonding.

[0033] The camera unit 4 is also used for automatic replacement of the capillary 243 by the capillary replacement unit 5. For example, the camera unit 4 is used for positioning the release pin portion 511, which will be described later, when switching the locked state of the ultrasonic horn 242 to the released state. The camera unit 4 is used for determining whether the state of the bonding wire 12 protruding from the tip of the capillary 243 is such that bonding can be resumed.

[0034] The camera unit 4 has a camera 41 having an imaging element, a camera arm 42 that supports the camera 41, the tool XY stage 22, and a camera control unit 66. The base end of the camera arm 42 is attached to the tool XY stage 22. The camera 41 is attached to the tip end of the camera arm 42. The camera arm 42 supports the camera 41 at a position above the bonding stage 3.

[0035] The camera 41 and the camera arm 42 are attached to the tool XY stage 22 via the sub-base 23. That is, the camera 41 and the camera arm 42 are driven by the tool XY stage 22, and are capable of translation along the XY plane together with the capillary 243 and the like. In this way, the tool XY stage 22 functions as a part of the components of the wire bonding unit 2, and also functions as a part of the components of the camera unit 4. The camera control unit 66 controls various operations of the camera unit 4 and executes various processes. Details of the control performed by the camera control unit 66 will be described later.

[0036] <Capillary Replacement Unit> The capillary replacement unit 5 collects a used capillary 243E attached to the ultrasonic horn 242 and attaches a new replacement capillary 243T to the ultrasonic horn 242. In other words, the capillary 243 replacement operation includes the operation of collecting the capillary 243 and the operation of attaching the capillary 243. This capillary 243 replacement operation is automatically performed when a preset condition is met. For example, the condition may be the number of bonding operations. In other words, the capillary 243 replacement operation may be performed every time a predetermined number of bonding operations are performed.

[0037] Fig. 3 is a conceptual diagram showing components constituting the capillary replacement unit 5. Fig. 4 is a perspective view showing a specific configuration example of the capillary replacement unit 5. The capillary replacement unit 5 has a release module 51, a transport module 52 (capillary transport module), a replacement module 53, and a supply module 54 (capillary supply module). The release module 51, transport module 52, and replacement module 53 are housed in a replacement unit main body 50 as an integrated device. The replacement unit main body 50 has a module slot 50a into which the supply module 54 is inserted.

[0038] <Release Module> The release module 51 has a release pin portion 511 , a release shaft 512 , and a release drive portion 513 .

[0039] The release module 51 switches (release operation) the state in which the capillary 243 is constrained by the ultrasonic horn 242 to the state in which the capillary 243 is released from the ultrasonic horn 242. Furthermore, the release module 51 switches (release operation) the state in which the capillary 243 is released from the ultrasonic horn 242 to the state in which the capillary 243 is constrained by the ultrasonic horn 242.

[0040] <Transport Module> The transport module 52 includes a transport carriage 521, a transport linear shaft 522, and a transport driver 523. The transport module 52 further includes a transport carousel 524 and a transport rotary pinion 525.

[0041] The transport module 52 pulls out the used capillary 243E from the ultrasonic horn 242 at the exchange position 52S. Furthermore, the transport module 52 transports the pulled out used capillary 243E from the exchange position 52S to the replacement position 52E.

[0042] The transport module 52 receives the replacement capillary 243T at the replacement position 52E from the replacement module 53. The transport module 52 transports the replacement capillary 243T from the replacement position 52E to the replacement position 52S. The transport module 52 inserts the replacement capillary 243T into the ultrasonic horn 242 at the replacement position 52S.

[0043] Thus, the movement of the transport carriage 521 includes linear movement between the replacement position 52S and the exchange position 52E and rotational movement that changes the attitude of the used capillary 243E. In this embodiment, the entire period of rotational movement overlaps with a portion of the period of linear movement. In other words, the period of linear movement includes a period of only linear movement and a period in which linear movement and rotational movement occur in parallel.

[0044] Next, a more specific example of the configuration of the transport module 52 will be described with reference to Fig. 5. In addition to the transport carriage 521 and the like described above, the transport module 52 further includes a transport base 526. The transport base 526 has a transport base bottom surface 52A and a transport base upright surface 52B. The transport base upright surface 52B stands upright from the transport base bottom surface 52A, and the transport base 526 appears L-shaped when viewed from the Y direction.

[0045] A motor, which serves as the conveying driver 523, is attached to the back surface of the conveying base bottom portion 52A. The output shaft of the conveying driver 523 faces in the Z direction. A conveying linear shaft 522 stands upright on the main surface of the conveying base bottom portion 52A. The lower end of the conveying linear shaft 522 is connected to the output shaft of the conveying driver 523. The upper end of the conveying linear shaft 522 is connected to a shaft support portion 528 that stands upright on the main surface of the conveying base upright portion 52B. The shaft support portion 528 rotatably supports the upper end of the conveying linear shaft 522. A helical screw groove is formed on the outer periphery of the cylindrical conveying linear shaft 522. In other words, the conveying linear shaft 522 functions as a feed screw (lead screw). The conveying linear shaft 522 rotates in accordance with the rotation of the output shaft of the conveying driver 523. When the conveying linear motion shaft 522 rotates, linear movement occurs in the conveying carriage 521, which has a threaded portion that meshes with the feed screw of the conveying linear motion shaft 522. In other words, the conveying linear motion shaft 522 is a part of a member that converts the rotational motion of the conveying drive unit 523 into linear motion of the conveying carriage 521.

[0046] The transport module 52 further includes a transport guide shaft 527. The transport guide shaft 527 restricts the movement of the transport carriage 521, caused by the rotation of the transport linear shaft 522, to linear movement along the Z axis. The transport guide shaft 527 is a cylindrical member. Because the transport guide shaft 527 restricts the movement direction of the transport carriage 521, unlike the transport linear shaft 522, the transport guide shaft 527 does not have a thread groove formed on its outer surface, nor is it rotatable. In other words, the lower end of the transport guide shaft 527 is fixed to the transport base bottom surface portion 52A. The upper end of the transport guide shaft 527 is fixed to a shaft fixing portion that stands up from the transport base upright surface portion 52B.

[0047] The transport carriage 521 has a carriage base 52C, a carriage shaft 52D, and a capillary catcher 52F. The carriage base 52C receives driving force from the transport linear shaft 522 and moves up and down along the Z axis. Specifically, the transport carriage 521 can move from the exchange position 52S to the replacement position 52E. Conversely, the transport carriage 521 can move from the replacement position 52E to the exchange position 52S. Note that the transport carriage 521 can also remain at any position between the exchange position 52S and the replacement position 52E.

[0048] The carriage base 52C includes a carriage body 52C1 and carriage flanges 52C2 and 52C3. The carriage body 52C1 has a through-hole through which the carriage shaft 52D passes. The carriage flange 52C2 is provided on the underside of a first side surface of the carriage body 52C1. The carriage flange 52C2 has a threaded portion that engages with the thread groove of the conveying linear motion shaft 522. This threaded portion and the conveying linear motion shaft 522 form a feed screw mechanism. The carriage flange 52C3 is provided approximately in the center of a second side surface of the carriage body 52C1. The carriage flange 52C3 has a through-hole 52H through which the conveying guide shaft 527 passes. For example, the through-hole 52H has an elongated shape.

[0049] The carriage shaft 52D is passed through a through-hole in the carriage body 52C1. The carriage shaft 52D is rotatable relative to the carriage body 52C1. A capillary catcher 52F is fixed to the tip of the carriage shaft 52D.

[0050] The capillary catcher 52F rotates in response to the rotation of the carriage shaft 52D. The capillary catcher 52F extends in a direction perpendicular to the axis of the carriage shaft 52D. The capillary catcher 52F is a cylindrical member. The base end of the capillary catcher 52F is fixed to the tip of the carriage shaft 52D. A catcher opening 52G is formed at the tip of the capillary catcher 52F. The capillary tapered portion 243b is inserted into this catcher opening 52G. The capillary catcher 52F has a configuration capable of holding the capillary 243. "Holding" here means that the capillary 243 will not fall out of the capillary catcher 52F even if the axis of the capillary 243 is tilted with respect to the vertical direction. For example, even if the axis of the capillary 243 is set to be perpendicular to the vertical direction, the capillary 243 will not fall off the capillary catcher 52F.

[0051] A transport rotary pinion 525 is attached to the base end of the carriage shaft 52D. As already mentioned, the capillary catcher 52F rotates in response to the rotation of the carriage shaft 52D. This rotation of the carriage shaft 52D is achieved by the transport rotary pinion 525 and the transport rotary rack 524. The transport rotary pinion 525, carriage shaft 52D, and capillary catcher 52F can rotate as a unit. The transport rotary rack 524, which meshes with the transport rotary pinion 525, is attached to the transport base upright portion 52B. More specifically, the transport rotary rack 524 is attached below the transport base upright portion 52B, i.e., near the exchange position 52E. The transport rotary rack 524 and the transport rotary pinion 525 form a rack-and-pinion mechanism that converts the linear motion of the transport carriage 521 into rotational motion of the capillary catcher 52F.

[0052] [First Transport Operation] Here, the case where the used capillary 243E is transported from the exchange position 52S to the replacement position 52E is referred to as the first transport operation. In the first transport operation, first, a linear movement downward is started, and only linear movement is performed until the transport carriage 521 reaches the transport carousel 524.

[0053] The linear movement is performed by a conveying linear shaft 522 and a conveying driver 523. The conveying carriage 521 and the conveying linear shaft 522 constitute a so-called feed screw mechanism. When the conveying driver 523 rotates the conveying linear shaft 522, the conveying carriage 521 mounted on the conveying linear shaft 522, which is a screw shaft, moves linearly. The movement direction of the conveying carriage 521 is determined by the rotation direction of the conveying linear shaft 522.

[0054] After the transport carriage 521 reaches the transport carousel 524, linear movement and clockwise rotational movement are carried out in parallel.

[0055] More specifically, a transport carousel 524 is provided at the lower end of the transport linear shaft 522. As shown in FIG. 6( a), when the transport carriage 521 at the replacement position 52S approaches the lower end of the transport linear shaft 522, the transport rotation pinion 525 provided on the transport carriage 521 engages with the transport carousel 524 as shown in FIG. 6( b). As a result, the transport carriage 521 rotates in a predetermined direction as the transport carriage 521 moves (see FIG. 6( c)). For example, as shown in FIG. 6( d), the transport carriage 521 rotates 90 degrees clockwise. As a result, the posture of the used capillary 243E that has moved to the replacement position 52E is different from the posture of the used capillary 243E at the replacement position 52S. The posture of the used capillary 243E here may be defined as the angle of the axis A of the used capillary 243E based on the Z-axis direction. For example, the orientation of the used capillary 243E at the replacement position 52S is such that the angle with respect to the Z-axis direction is 0 degrees. For example, the orientation of the used capillary 243E at the replacement position 52E is such that the angle with respect to the Z-axis direction is 90 degrees.

[0056] Note that adding a definition of direction to the axis A of the used capillary 243E allows for a more detailed definition of the posture of the used capillary 243E. For example, the direction from the base end to the tip end of the used capillary 243E is defined as positive. In this case, too, the posture of the used capillary 243E at the replacement position 52S is at an angle of 0 degrees with respect to the Z-axis direction. For example, if the rotation of the transport carriage 521 causes the tip end of the used capillary 243E to be on the upper side and the base end to be on the lower side, the posture of the used capillary 243E at the replacement position 52S can be said to be at an angle of 180 degrees with respect to the Z-axis direction.

[0057] [Second Transport Operation] Next, the case where the replacement capillary 243T is transported from the replacement position 52E to the replacement position 52S is referred to as the second transport operation. As shown in Figures 7(a) and 7(b), in the second transport operation, upward linear movement is started and counterclockwise rotational movement is simultaneously performed. While the transport carriage 521 is engaged with the transport carousel 524, the linear movement and rotational movement are performed in parallel. Then, as shown in Figures 7(c) and 7(d), after the transport carriage 521 is no longer engaged with the transport carousel 524, only upward linear movement is performed.

[0058] 8 is a perspective view showing an example of a specific configuration of the replacement module 53. The replacement module 53 has a replacement table 531, a replacement drive unit 532, a replacement linear shaft 533, a replacement spring shaft 534, a replacement operating piece 535, a replacement fixed piece 536, a replacement guide shaft 537, a magazine slot 538, and a replacement base 539.

[0059] The replacement table 531, replacement operating piece 535, and replacement spring shaft 534 together constitute a replacement table unit 53S. The replacement table unit 53S is capable of reciprocating movement relative to a replacement base 539. The replacement table unit 53S receives driving force for reciprocating movement from a replacement drive unit 532 and a replacement linear motion shaft 533. The direction of reciprocating movement of the replacement table unit 53S is regulated by a replacement guide shaft 537. The replacement guide shaft 537 is inserted through a through hole in the replacement table 531. One end of the replacement guide shaft 537 is fixed to the replacement base 539 on the side of the replacement drive unit 532, and the other end of the replacement guide shaft 537 is fixed to the replacement base 539 on the side of the replacement fixed piece 536.

[0060] The replacement drive unit 532, which is a motor, is fixed to the replacement base 539. A replacement linear motion shaft 533 is connected to the replacement drive unit 532. That is, one end of the replacement linear motion shaft 533 is connected to the replacement drive unit 532. The other end of the replacement linear motion shaft 533 is rotatably supported by a bearing provided in the replacement base 539.

[0061] The replacement movable piece 535 can move toward and away from the replacement table 531. In other words, the distance from the replacement movable piece 535 to the replacement table 531 is variable. The replacement spring shaft 534 has a shaft body 534a and a compression spring 534b into which the shaft body 534a is inserted. One end of the shaft body 534a is disposed in the replacement movable piece 535. The replacement movable piece 535 may be fixed relative to the shaft body 534a. The other end of the shaft body 534a is disposed in the replacement table 531. The replacement table 531 is movable relative to the shaft body 534a. The compression spring 534b is disposed between the replacement movable piece 535 and the replacement table 531. The compression spring 534b exerts a force that increases the distance from the replacement movable piece 535 to the replacement table 531. This force keeps the distance from the replacement operating piece 535 to the replacement table 531 at a predetermined initial distance.

[0062] The replacement table 531 moves in accordance with the rotation of the replacement linear motion shaft 533. In other words, the replacement linear motion shaft 533 and the replacement table 531 constitute a so-called feed screw mechanism. The replacement table 531 receives a driving force from the replacement linear motion shaft 533, causing the replacement table unit 53S including the replacement table 531 to move back and forth.

[0063] Here, with the replacement operating piece 535 in contact with the replacement fixed piece 536, the replacement table 531 may receive a driving force in a direction toward the replacement fixed piece 536. In this case, the replacement operating piece 535 does not move because it is in contact with the replacement fixed piece 536. On the other hand, the replacement table 531 can move further toward the replacement operating piece 535. In other words, the replacement table 531 gradually approaches the replacement operating piece 535. When the replacement table 531 approaches the replacement operating piece 535, the compression spring 534b is compressed, and the replacement table 531 approaches the replacement operating piece 535 against the reaction force received from the compression spring 534b.

[0064] On the other hand, when the replacement table 531 is close to the replacement operating piece 535, the replacement table 531 may receive a driving force in a direction away from the replacement fixed piece 536. At this time, the replacement table 531 gradually moves away from the replacement fixed piece 536 and returns to the predetermined initial distance.

[0065] A receiving groove 531b for receiving a replacement capillary 243T is provided on the replacement table main surface 531S of the replacement table 531. The end of the receiving groove 531b on the replacement operating piece 535 side is open. On the other hand, the end of the receiving groove 531b on the replacement drive unit 532 side is closed. A table upright portion 531a that stands up from the replacement table main surface 531S is provided on the end of the replacement table main surface 531S on the replacement drive unit 532 side. The table upright portion 531a presses the replacement capillary 243T waiting at the capillary supply port 54b of the supply module 54 toward the replacement fixed piece 536. This pressing moves the replacement capillary 243T toward the replacement fixed piece 536, allowing the replacement capillary 243T to be removed from the capillary supply port 54b into the receiving groove 531b.

[0066] [Pull-out Operation] The replacement module 53 pulls out the used capillary 243E transported to the replacement position 52E from the transport carriage 521. More specifically, the replacement table 531 and the replacement movable piece 535 move together away from the replacement fixed piece 536 due to the operation of the replacement drive unit 532 and the replacement linear motion shaft 533 (see FIG. 9B). Since the replacement movable piece 535 is hooked on the capillary taper portion 243b of the capillary 243, when the replacement movable piece 535 moves in a direction away from the replacement fixed piece 536, the capillary 243 also moves in a direction away from the replacement fixed piece 536 in accordance with the movement of the replacement movable piece 535. As a result, the capillary 243 is pulled out from the transport carriage 521.

[0067] [Replacement Operation] Furthermore, the replacement module 53 inserts the replacement capillary 243T into the transport carriage 521 from which the used capillary 243E has been pulled out. More specifically, the replacement table 531 and the replacement operating piece 535 move together toward the replacement fixed piece 536 through the operation of the replacement drive unit 532 and the replacement linear motion shaft 533. This operation of the replacement table 531 and the replacement operating piece 535 moving toward the replacement fixed piece 536 includes several steps, which will be described below.

[0068] In the first stage (see FIG. 10(a)), as the replacement table 531 moves, the replacement table upright portion 531a approaches the replacement fixed piece 536 while pressing the base end surface of the replacement capillary 243T located at the capillary supply port 54b. As a result, the replacement capillary 243T falls from the capillary supply port 54b onto the replacement table 531 (see FIG. 10(b)). In the second stage, as the replacement table 531 moves, the replacement movable piece 535 comes into contact with the replacement fixed piece 536 (see FIG. 10(c)). In the third stage, as the replacement table 531 moves, the replacement table 531 moves even closer to the replacement fixed piece 536. In this third stage, the replacement movable piece 535 abuts against the replacement fixed piece 536, so the replacement movable piece 535 does not move. Therefore, in the third stage, the replacement table 531 carrying the replacement capillary 243T approaches the replacement operating piece 535 that abuts against the replacement fixed piece 536. In other words, in the third stage, the distance from the replacement table 531 carrying the replacement capillary 243T to the replacement operating piece 535 that abuts against the replacement fixed piece 536 gradually decreases. In the fourth stage (see FIG. 10(d)), as the replacement table 531 moves, the capillary taper portion 243b of the replacement capillary 243T carried on the replacement table 531 passes through the replacement operating piece 535 and the replacement fixed piece 536 and is inserted into the transport carriage 521.

[0069] <Supply Module> The supply module 54 has a capillary receiving portion 54a and a capillary supply port 54b.

[0070] As described above, the supply module 54 is inserted into the module slot 50a of the replacement unit main body 50. The supply module 54 can be removed from the module slot 50a as needed (see FIG. 4). The supply module 54 accommodates a plurality of replacement capillaries 243T in the capillary accommodation section 54a. The supply module 54 supplies replacement capillaries 243T one by one to the replacement module 53 from the capillary supply port 54b in accordance with the operation of the replacement module 53.

[0071] The structure of the supply module 54 will be described in detail below with reference to Figures 11 to 20. As shown in Figure 11, the supply module 54 has a magazine cover 541 and a magazine base 542. The magazine base 542 is provided with a recess for the capillary storage section 54a. The magazine cover 541 is detachably attached to the magazine base 542.

[0072] 12, a capillary storage section 54a and a capillary supply port 54b are formed by attaching the magazine cover 541 to the magazine base 542. The capillary storage section 54a is an area formed between the base mounting surface 542b and the cover covering surface 541a (see FIG. 12). The capillary supply port 54b is an area formed between the base extraction surface 542d and the cover extraction surface 541b (see FIG. 12).

[0073] 13, the magazine cover 541 has a cover covering surface 541a and a cover removal surface 541b. Three cover magnets 541M are embedded in the cover covering surface 541a.

[0074] 14, the magazine base 542 includes a base coupling surface 542a, a base mounting surface 542b, a base groove surface 542c (base groove portion), a base removal surface 542d, and a base back surface 542e. The magazine cover 541 contacts the base coupling surface 542a. A groove having multiple steps is provided in the base coupling surface 542a. The bottom surface of the first step is the base mounting surface 542b. A replacement capillary 243T is mounted on the base mounting surface 542b. The bottom surface of the second step is the base groove surface 542c. A capillary holding table 54S1 (described later) is arranged on the base groove surface 542c.

[0075] The base extraction surface 542d is connected to the base mounting surface 542b. That is, the replacement capillary 243T can also come into contact with the base extraction surface 542d. Although the base extraction surface 542d is connected to the base mounting surface 542b, they do not exist on the same imaginary plane. A ridge line 542k exists between the base extraction surface 542d and the base mounting surface 542b. An angle 542A between the base extraction surface 542d and the base mounting surface 542b is, for example, greater than 180 degrees.

[0076] The base mounting surface 542b and the base removal surface 542d are viewed from the side when the supply module 54 is placed in the replacement module 53 (see FIG. 12). The base mounting surface 542b is inclined with respect to the Z direction. In other words, when the supply module 54 is placed in the replacement module 53, the base mounting surface 542b can also be considered to be an inclined surface. In contrast, the base removal surface 542d is parallel to the Z direction. In other words, when the supply module 54 is placed in the replacement module 53, the capillary supply port 54b formed by the base removal surface 542d can also be considered to extend vertically downward.

[0077] In other words, the supply module 54 is inserted obliquely into the replacement module 53. In this state, the base back surface 542e contacts the slot main surface 538b. Furthermore, the base engaging surface 542f contacts the slot upper surface 538a. The contact between the base engaging surface 542f and the slot upper surface 538a determines the insertion depth of the supply module 54 into the replacement module 53.

[0078] <Capillary Supply Port> Figure 15 is a view of the capillary supply port 54b as viewed from the direction of the axis AT of the replacement capillary 243T (Y direction). As described above, the capillary supply port 54b is formed by the cover extraction surface 541b and the base extraction surface 542d. The opening width G54b from the cover extraction surface 541b to the base extraction surface 542d is slightly larger than the diameter D243 of the replacement capillary 243T. Therefore, the replacement capillary 243T can roll down from the capillary storage portion 54a and be positioned at the capillary supply port 54b.

[0079] A protrusion 54T is provided on the base extraction surface 542d. This protrusion 54T is for temporarily retaining the replacement capillary 243T in the capillary supply port 54b. The protrusion 54T protrudes from the base extraction surface 542d toward the cover extraction surface 541b. Therefore, an opening width G54a from the protrusion tip surface 54Ta of the protrusion 54T to the cover extraction surface 541b is smaller than the diameter of the replacement capillary 243T. Therefore, the replacement capillary 243T is caught on the protrusion 54T and does not fall out of the capillary supply port 54b.

[0080] FIG. 16 is a view of the capillary supply port 54b viewed vertically upward (+Z direction). The length of the capillary supply port 54b is the supply port length L54b. In the example shown in FIG. 16, the supply port length L54b is longer than the capillary length L243 of the replacement capillary 243T. The protrusion 54T is provided on a portion of the base extraction surface 542d in the width direction. In other words, the base extraction surface 542d constituting the capillary supply port 54b includes a portion where the protrusion 54T is provided and a portion where the protrusion is not provided. The portion where the protrusion 54T is provided corresponds to the first supply port portion 54b1 of the capillary supply port 54b. The portion where the protrusion 54T is not provided corresponds to the second supply port portion 54b2 of the capillary supply port 54b. The replacement capillary 243T is caught on the portion where the protrusion 54T is provided. Therefore, as long as the replacement capillary 243T is caught on the protrusion 54T, the replacement capillary 243T will not fall from the capillary supply port 54b. On the other hand, since the length W1 of the portion where the protrusion 54T is not provided is greater than the capillary diameter 243D of the replacement capillary 243T, the replacement capillary 243T will fall from the capillary supply port 54b.

[0081] The protrusion 54T is provided at a position where it contacts the capillary body 243a of the replacement capillary 243T. The capillary body 243a is longer than the capillary taper 243b. Therefore, the length W1 of the portion where the protrusion 54T is provided is longer than the length W2 of the portion where the protrusion 54T is not provided. For example, the length W1 of the protrusion 54T may correspond to the capillary body 243a, and the length W2 of the portion where the protrusion 54T is not provided may correspond to the capillary taper 243b.

[0082] The replacement capillary 243T that has fallen from the capillary storage section 54a into the capillary supply port 54b is caught on the protrusion 54T. When the replacement capillary 243T is pushed to the left side of the page by the replacement table 531 of the replacement module 53, the replacement capillary 243T gradually moves to a section where the protrusion 54T is not provided. When the base end of the capillary body 243a gradually reaches a section where the protrusion 54T is not provided, the replacement capillary 243T falls from the capillary supply port 54b onto the replacement table 531.

[0083] As described above, the capillary base end surface 243e of the replacement capillary 243T is pressed by the table upright portion 531a of the replacement table 531. Therefore, as shown in Fig. 15, when viewed from the direction of the axis AT, the table upright portion 531a overlaps a part of the replacement capillary 243T. For example, the table upright portion 531a does not overlap the axis AT of the replacement capillary 243T. In other words, the upper end surface 531c of the table upright portion 531a is located below the axis AT of the replacement capillary 243T.

[0084] According to this positional relationship, the relationship between the replacement capillary 243T and the table standing part 531a can take two forms. In the first form, the table standing part 531a moves from the right side to the left side of the paper. In the first form, the table standing part 531a moves while pressing the capillary base end surface 243e, thereby moving the replacement capillary 243T to the left side of the paper (see FIGS. 17(a) and 17(b)). In the first form, the replacement capillary 243T also moves in the same direction as the table standing part 531a as the table standing part 531a moves. Then, the replacement capillary 243T moves from the first supply port 54b1 to the second supply port 54b2, and the replacement capillary 243T is removed onto the replacement table 531 (see FIG. 17(c)).

[0085] In the second mode, the table riser 531a moves from the left side to the right side of the paper, which is the opposite of the first mode. As shown in FIG. 18(a), the table riser 531a is initially positioned to the left of the replacement capillary 243T. At this time, the table riser 531a does not contact the replacement capillary 243T. Then, when the table riser 531a moves to the right side of the paper, the table riser 531a contacts the capillary taper portion 243b (see FIG. 18(b)). Because the capillary taper portion 243b is an inclined surface, the table riser 531a does not get caught on the capillary taper portion 243b. The table riser 531a moves to the right side of the paper while pushing up the capillary taper portion 243b. At this time, the replacement capillary 243T is pushed up according to the height of the table riser 531a. However, the replacement capillary 243T does not move to the right side of the paper together with the table standing portion 531a in response to the movement of the table standing portion 531a to the right side of the paper.

[0086] Then, the table standing portion 531a moves further to the right of the drawing while contacting the outer peripheral surface of the capillary main body 243a (see FIG. 18(c)). At this time, the replacement capillary 243T is only slightly pushed upward and does not move toward the right of the drawing. Then, when the table standing portion 531a reaches the right side of the capillary base end surface 243e, the replacement capillary 243T returns to its original position (see FIG. 18(d)).

[0087] In this way, by configuring the table standing portion 531a so that it does not overlap with the axis AT of the replacement capillary 243T located at the capillary supply port 54b, it is possible to realize a mode in which the replacement capillary 243T moves together with the table standing portion 531a, and a mode in which the replacement capillary 243T does not move together with the table standing portion 531a.

[0088] 14, the magazine base 542 further includes a holding mechanism arrangement hole 54H1 and a feed mechanism arrangement hole 54H2. The holding mechanism arrangement hole 54H1 is a hole having an opening in the base groove surface 542c. The holding mechanism arrangement hole 54H1 is a through hole that extends from the base groove surface 542c to the base back surface 542e. The feed mechanism arrangement hole 54H2 is a hole having an opening in the base mounting surface 542b. The feed mechanism arrangement hole 54H2 is a through hole that extends from the base mounting surface 542b to the base back surface 542e.

[0089] Several parts are attached to the magazine base 542. A base magnet 542M and a base pin 54P are attached to the magazine base 542. These base magnet 542M and base pin 54P are used to attach the magazine cover 541 to the magazine base 542. The base magnet 542M is attracted to the cover magnet 541M, thereby fixing the magazine cover 541 to the magazine base 542. Furthermore, the fixed base magnet 542M also allows the magazine cover 541 to be easily removed from the magazine base 542. Therefore, the magazine cover 541 can be easily removed to load a new replacement capillary 243T into an empty supply module 54.

[0090] A capillary holding mechanism 54S is attached to the magazine base 542. The capillary holding mechanism 54S switches between a state in which the replacement capillary 243T cannot be removed and a state in which the replacement capillary 243T can be removed. Before or during the installation of the supply module 54 to the replacement module 53, there is no need to remove the replacement capillary 243T. Therefore, to prevent the replacement capillary 243T from being unintentionally ejected, the capillary holding mechanism 54S actively holds the position of the replacement capillary 243T housed therein.

[0091] More specifically, the capillary holding mechanism 54S has a capillary holding table 54S1 (capillary holding member), a guide pin 54S2, a holding spring 54S3 (holding force generating member, see FIG. 19), and a holding magnet 54S4 (releasing force generating member, see FIG. 19). The capillary holding table 54S1 switches between a state in which the replacement capillary 243T is held and a state in which the replacement capillary 243T is released from the hold. The capillary holding table 54S1 includes a table plate portion 54S5 and a table main body portion 54S6.

[0092] The table plate 54S5 is disposed on the base groove surface 542c. A plurality of holding grooves 54S7 are provided on the main surface of the table plate 54S5. One replacement capillary 243T can be placed in one holding groove 54S7. For example, the table plate 54S5 in FIG. 14 has ten holding grooves 54S7. Therefore, the supply module 54 can accommodate ten replacement capillaries 243T.

[0093] The table main body 54S6 is a portion that protrudes from the back surface of the table plate 54S5. The table main body 54S6 is inserted into the holding mechanism arrangement hole 54H1. Two guide holes 54S8 are provided in the table main body 54S6. A guide pin 54S2 is inserted into each of the guide holes 54S8. The guide pin 54S2 is inserted into a hole 54H3 formed in the side wall of the holding mechanism arrangement hole 54H1. The guide hole 54S8 is an elongated hole whose longitudinal direction is the thickness direction of the magazine base 542. Because the guide pin 54S2 is inserted into this elongated hole, the capillary holding table 54S1 as a whole can move back and forth in the thickness direction of the magazine base 542. In other words, the capillary holding table 54S1 can move toward and away from the magazine cover 541.

[0094] 19, the movement of the capillary holding table 54S1 toward the magazine cover 541 is caused by a holding spring 54S3 disposed between the magazine base 542 and the table plate portion 54S5. The holding spring 54S3 exerts a force that presses the capillary holding table 54S1 toward the magazine cover 541.

[0095] 20, the movement of the capillary holding table 54S1 away from the magazine cover 541 is caused by the holding magnet 54S4. The holding magnet 54S4 is attracted to the slot magnet 53M provided in the magazine slot 538 of the replacement module 53, thereby exerting a force in a direction that moves the capillary holding table 54S1 away from the magazine cover 541.

[0096] Furthermore, a capillary feeding mechanism 54K (see FIG. 14) is attached to the magazine base 542. The capillary feeding mechanism 54K is used to actively feed the replacement capillary 243T from the capillary storage portion 54a toward the capillary supply port 54b.

[0097] More specifically, the capillary feed mechanism 54K has a feed shaft 54K1, a feed spring 54K2, and a feed member 54K3. The feed shaft 54K1 is inserted into the feed spring 54K2, and the feed shaft 54K1 and the feed spring 54K2 are disposed in the feed mechanism arrangement hole 54H2. The feed member 54K3 is disposed on the upper end side of the feed shaft 54K1. The feed member 54K3 transmits the force received from the feed spring 54K2 to the replacement capillary 243T. The feed member 54K3 includes an arm portion 54K4 having a through hole into which the feed shaft 54K1 is inserted, and a capillary pressing portion 54K5 that contacts the replacement capillary 243T.

[0098] 21 , the controller 6 controls the operations of the wire bonding unit 2 and the capillary replacement unit 5. The controller 6 is a computer having a processor that executes various programs and a memory that stores the programs and desired databases. The controller 6 receives information provided by various sensors provided in the wire bonding apparatus 1. Then, the controller 6 uses the received information to output control signals for controlling the operations of the wire bonding unit 2 and the capillary replacement unit 5.

[0099] The controller 6 executes the capillary replacement program to perform the functions of several functional components shown in FIG. 12 . Specifically, the controller 6 has a bonding control unit 61, a clamper control unit 62, a release control unit 63, a transport control unit 64, and a replacement control unit 65. The bonding control unit 61 outputs a control signal G61a to the Z-axis drive unit 25 and outputs a control signal G61b to the tool XY stage 22. The clamper control unit 62 outputs a control signal G62a to the lower wire clamper 27 and outputs a control signal G62b to the upper wire clamper 28. The release control unit 63 outputs a control signal G63 to the release drive unit 513 of the capillary replacement unit 5. The transport control unit 64 outputs a control signal G64 to the transport drive unit 523 of the capillary replacement unit 5. The replacement control unit 65 outputs a control signal G65 to the replacement drive unit 532 of the capillary replacement unit 5.

[0100] The controller 6 has, as functional components, a camera control unit 66 and a detection sensor control unit 67. The camera control unit 66 processes the planar images and elevation images acquired by the camera 41. As a result, the position of each part in the X, Y, and Z directions is detected.

[0101] The detection sensor control unit 67 receives detection data from a plurality of detection sensors 50S provided in the capillary replacement unit 5. For example, the detection sensor 50S confirms that the used capillary 243E and the replacement capillary 243T, which are sequentially transported inside the capillary replacement unit 5, are present at predetermined positions. After confirming that the used capillary 243E and the replacement capillary 243T are present at the predetermined positions, the controller 6 proceeds to the next operation.

[0102] <Effects> The supply module 54 comprises a magazine base 542 including a base mounting surface 542b on which a plurality of replacement capillaries 243T are placed and a base removal surface 542d with which the replacement capillary 243T to be removed from the plurality of replacement capillaries 243T comes into contact, and a magazine cover 541 attached to the magazine base 542 and including a cover cover surface 541a facing the base mounting surface 542b and a cover removal surface 541b facing the base removal surface 542d. The magazine base 542 and the magazine cover 541 form a capillary storage section 54a, which is an area formed between the base mounting surface 542b and the cover covering surface 541a, and a capillary supply port 54b, which is an area formed between the base removal surface 542d and the cover removal surface 541b. The capillary supply port 54b includes a first supply port section 54b1 and a second supply port section 54b2 that are aligned in a direction from the base end to the tip end of the replacement capillary 243T, and the opening width G54a of the first supply port section 54b1 is smaller than the diameter D243 of the replacement capillary 243T, and the opening width G54b of the second supply port section 54b2 is larger than the diameter D243 of the replacement capillary 243T.

[0103] According to this supply module 54, replacement capillaries 243T can be supplied from a capillary storage section 54a, which stores a plurality of replacement capillaries 243T, via a capillary supply port 54b. That is, it is possible to supply a plurality of replacement capillaries 243T by replacing the supply module 54. Therefore, the time required for replacing the replacement capillaries 243T can be reduced compared to a mode in which the replacement capillaries 243T are replaced one by one.

[0104] The base removal surface 542d constituting the first supply port portion 54b1 is provided with a protrusion 54T protruding toward the cover removal surface 541b. With this configuration, the replacement capillary 243T can be removed from the capillary supply port 54b in response to an external operation.

[0105] The length of the first supply port 54b1 along the axis of the replacement capillary 243T is longer than the length of the second supply port 54b2. With this configuration, the attitude of the replacement capillary 243T held in the capillary supply port 54b can be stably maintained.

[0106] The base mounting surface 542b and the base extraction surface 542d do not exist on a common imaginary plane. The angle between the base mounting surface 542b and the base extraction surface 542d is greater than 180 degrees. This configuration allows the base mounting surface 542b to be arranged as an inclined surface. As a result, the replacement capillary 243T can be smoothly moved from the capillary storage section 54a to the capillary supply port 54b by rolling on the inclined base mounting surface 542b.

[0107] The supply module 54 has a plurality of holding grooves 54S7 in which the plurality of replacement capillaries 243T are respectively placed. The supply module 54 further includes a capillary holding table 54S1 placed on the magazine base 542, a holding spring 54S3 that generates a holding force that presses the capillary holding table 54S1 toward the magazine cover 541, and a holding magnet 54S4 that generates a release force that pulls the capillary holding table 54S1 toward the magazine base 542. This configuration can prevent the replacement capillary 243T from falling out of the supply module 54 at an unintended timing.

[0108] The capillary supply mechanism 55 includes a capillary storage section 54a that stores multiple replacement capillaries 243T arranged in a supply direction perpendicular to the axis of the replacement capillary 243T, and a capillary supply port 54b that includes a first supply port section 54b1 having an opening width G54a smaller than the diameter of the replacement capillary 243T and a second supply port section 54b2 having an opening width G54b larger than the diameter of the replacement capillary 243T.The capillary supply mechanism 55 includes a supply module 54 that moves the replacement capillary 243T from the capillary storage section 54a to the capillary supply port 54b along the supply direction, and a replacement module 53 that performs the operation of removing the replacement capillary 243T by moving the replacement capillary 243T located at the capillary supply port 54b along the axis from the first supply port section 54b1 to the second supply port section 54b2.

[0109] The capillary providing mechanism 55 includes the above-described supply module 54. Therefore, by replacing the supply module 54 attached to the replacement module 53, it is possible to supply a plurality of replacement capillaries 243T to the replacement module 53. Therefore, compared to a mode in which the replacement capillaries 243T are replaced one by one, the time required for the replacement capillaries 243T replacement can be shortened.

[0110] The supply module 54 has a magazine base 542, a magazine cover 541, a capillary holding table 54S1 having a plurality of holding grooves 54S7 in which a plurality of replacement capillaries 243T are respectively arranged, a holding spring 54S3 that generates a holding force that presses the capillary holding table 54S1 toward the magazine cover 541, and a holding magnet 54S4 that generates a release force that pulls the capillary holding table 54S1 toward the magazine base 542. The replacement capillary 243T is restrained by the capillary holding table 54S1 and the holding spring 54S3 so as not to move from the capillary storage section 54a toward the capillary supply port 54b, and when the supply module 54 is placed in the replacement module 53, the restraints imposed by the capillary holding table 54S1 and the holding spring 54S3 on the multiple replacement capillaries 243T are released by the holding magnet 54S4 so that they can move from the capillary storage section 54a toward the capillary supply port 54b.

[0111] This configuration can prevent the replacement capillary 243T from falling out of the supply module 54 when the supply module 54 is not attached to the replacement module 53. Furthermore, the replacement capillary 243T can be removed from the supply module 54 when the supply module 54 is attached to the replacement module 53. In other words, simply by attaching the supply module 54 to the replacement module 53, it is possible to switch from a state in which the replacement capillary 243T is prevented from falling out to a state in which the replacement capillary 243T can be supplied.

[0112] The wire bonding apparatus 1 includes a used capillary 243 that is attached to an ultrasonic horn 242 and into which a bonding wire 12 is inserted, and a capillary exchange unit 5 that exchanges the used capillary 243 for a replacement capillary 243T. The capillary exchange unit 5 includes a transport module 52 that transports a used capillary 243E pulled out of the ultrasonic horn 242 from a replacement position to a replacement position along a predetermined linear direction, and transports a replacement capillary 243T to be attached to the ultrasonic horn 242 in place of the used capillary 243E from the replacement position to the replacement position in a direction opposite to the predetermined linear direction using a feed screw mechanism; a capillary storage section 54a that stores a plurality of replacement capillaries 243T arranged in a supply direction perpendicular to the axis of the replacement capillary 243T; a supply module 54 that moves the replacement capillary 243T from the capillary storage section 54a to the capillary supply port 54b along the supply direction; and a replacement module 53 that performs the operation of removing the replacement capillary 243T by moving the replacement capillary 243T located at the capillary supply port 54b along the axis from the first supply port section 54b1 to the second supply port section 54b2.

[0113] This wire bonding apparatus 1 is equipped with the above-described supply module 54. Therefore, by replacing the supply module 54 attached to the replacement module 53, it is possible to supply a plurality of new replacement capillaries 243T to the replacement module 53. Therefore, compared to a mode in which the replacement capillaries 243T are replaced one by one, it is possible to shorten the time required for the operation of replacing the replacement capillaries 243T.

[0114] <Modifications> Although examples of the capillary replacement method and wire bonding apparatus according to the present invention have been described above, the capillary replacement method and wire bonding apparatus are not limited to the above-described embodiments.

[0115] 1...wire bonding apparatus, 41...camera, 52...transport module (capillary transport module), 52E...replacement position, 54...supply module (capillary supply module), 243...capillary, 243E...used capillary, 243h...capillary through-hole, 243T...replacement capillary, A...axis.

Claims

1. A capillary supply module comprising: a base including a base mounting surface on which a plurality of capillaries are mounted and a base removal surface with which a capillary to be removed from the plurality of capillaries contacts; and a cover attached to the base and including a cover covering surface facing the base mounting surface and a cover removal surface facing the base removal surface, wherein the base and the cover define a capillary accommodating portion which is an area formed between the base mounting surface and the cover covering surface, and a capillary supply port which is an area formed between the base removal surface and the cover removal surface, wherein the capillary supply port includes a first supply port portion and a second supply port portion which are aligned in a direction from a base end to a tip end of the capillary, wherein an opening width of the first supply port portion is smaller than a diameter of a cylindrical capillary body portion of the capillary, and an opening width of the second supply port portion is larger than a diameter of a cylindrical capillary body portion of the capillary.

2. A capillary supply module as described in claim 1, wherein at least one of the base extraction surface and the cover extraction surface constituting the first supply port portion is provided with a protrusion protruding toward the other of the base extraction surface and the cover extraction surface.

3. The capillary supply module according to claim 1, wherein the length of said first supply port portion along the axis of said capillary is longer than the length of said second supply port portion.

4. The capillary supply module according to claim 1, wherein said base mounting surface and said base extraction surface do not exist on a common imaginary plane, and an angle between said base mounting surface and said base extraction surface is greater than 180 degrees.

5. A capillary supply module as described in claim 1, further comprising: a capillary holding member arranged on the base and having a plurality of holding grooves in which each of the plurality of capillaries is arranged; a holding force generating member that generates a holding force that presses the capillary holding member toward the cover; and a release force generating member that generates a release force that pulls the capillary holding member toward the base.

6. A capillary providing mechanism comprising: a capillary storage section that stores a plurality of capillaries arranged in a supply direction perpendicular to an axis of the capillaries; and a capillary supply port including a first supply port section having an opening width smaller than a diameter of a cylindrical capillary body section of the capillary and a second supply port section having an opening width larger than a diameter of the cylindrical capillary body section of the capillary, the capillary supply module moving the capillary from the capillary storage section to the capillary supply port along the supply direction; and a capillary replacement module that performs an operation of removing the capillary by moving the capillary located at the capillary supply port from the first supply port section to the second supply port section along the axis.

7. The capillary supply module comprises: a base, a cover, a capillary holding member having a plurality of holding grooves in which each of the plurality of capillaries is positioned, a holding force generating member that generates a holding force that presses the capillary holding member toward the cover, and a release force generating member that generates a release force that pulls the capillary holding member toward the base; when the capillary supply module is not placed in the capillary replacement module, the plurality of capillaries are restrained by the capillary holding member and the holding force generating member so as not to move from the capillary accommodating portion toward the capillary supply port; and when the capillary supply module is placed in the capillary replacement module, the restraint by the capillary holding member and the holding force generating member is released by the release force generating member so that the plurality of capillaries can move from the capillary accommodating portion toward the capillary supply port. A capillary providing mechanism as described in claim 6.

8. A capillary is attached to a horn and has a wire inserted therein; and an exchange unit that exchanges the used capillary for a replacement capillary, the exchange unit comprising: a capillary transport module that transports the used capillary pulled out of the horn from a replacement position to a replacement position along a predetermined linear direction, and transports the replacement capillary to be attached to the horn in place of the used capillary from the replacement position to the replacement position by a feed mechanism in a direction opposite to the predetermined linear direction; a capillary storage section that stores a plurality of replacement capillaries arranged in a supply direction perpendicular to an axis of the replacement capillary; and a capillary supply port including a first supply port section having an opening width smaller than a diameter of a cylindrical capillary body section of the replacement capillary and a second supply port section having an opening width larger than a diameter of the cylindrical capillary body section of the replacement capillary, the capillary supply module moving the replacement capillary from the capillary storage section to the capillary supply port along the supply direction; and a capillary replacement module that performs an operation of removing the replacement capillary by moving the replacement capillary located at the capillary supply port from the first supply port section to the second supply port section along the axis.

Images