Capillary replacement mechanism and wire bonding device

Abstract

In the present invention, a capillary replacement unit comprises: a supply module that moves a replacement capillary from a capillary accommodation part to a capillary supply port along a supply direction; a replacement module that executes an operation for extracting the replacement capillary from the capillary supply port by moving the replacement capillary located in the capillary supply port along an axis and an operation for moving the extracted replacement capillary along the axis; and a conveyance module that executes an operation for receiving the replacement capillary moved by the operation for movement by the replacement module, and a conveyance operation for linearly moving, by a predetermined distance, and rotating, by a predetermined angle, the received replacement capillary.

Description

Capillary exchange mechanism and wire bonding device

[0001] The present invention relates to a capillary exchange mechanism and a wire bonding apparatus.

[0002] A wire bonding device electrically connects a lead frame to electrodes on a semiconductor chip using a wire. The wire is pressed against the electrodes on the semiconductor chip from a component called a capillary, and heat or ultrasonic waves are applied as needed. As a result, the wire is bonded to the electrodes on the semiconductor chip. This bonding operation is called bonding.

[0003] When bonding is repeated, it becomes difficult to obtain the desired bonding results due to wear at the tip of the capillary, etc. Therefore, the capillary is replaced every time a replacement condition set based on the number of bonding operations, etc. is met.

[0004] Patent Documents 1 to 3 each disclose techniques related to wire bonding. Patent Document 1 discloses an apparatus and method that allows continuous bonding while replacing the capillary, which is the bonding tool. Patent Document 2 discloses an apparatus and method that accurately detects the position of the capillary. Patent Document 3 discloses a method that more effectively suppresses wire dislodgment and wire bending.

[0005] Japanese Patent No. 4700595 Japanese Patent Publication No. 2001-249007 Japanese Patent No. 4467631

[0006] A large number of different types of manufacturing equipment are installed in a factory that manufactures semiconductor chips. The number of manufacturing equipment corresponds to the production volume in the factory, so the factory is equipped with a number of manufacturing equipment commensurate with the production volume. In this case, it is difficult to expand the factory's site area. In order to increase the number of manufacturing equipment within a certain site area, it is desirable to suppress the increase in size of the manufacturing equipment. This suppression of the increase in size of the manufacturing equipment is also desirable when adding a function for replacing capillaries, as described in Patent Document 1. In other words, in this technical field, there has been a demand for a mechanism that can provide an automatic capillary replacement function while suppressing the increase in size.

[0007] The present invention provides a capillary exchange mechanism that can provide an automatic capillary exchange function while suppressing an increase in size, and a wire bonding apparatus equipped with the capillary exchange mechanism.

[0008] A capillary replacement mechanism according to one embodiment of the present invention has a storage section that holds multiple replacement capillaries arranged in a supply direction perpendicular to the axis of the replacement capillaries, and a capillary supply port for removing replacement capillaries. The capillary supply module moves the replacement capillary from the storage section to the capillary supply port along the supply direction, a replacement module that performs the following operations: removing the replacement capillary from the capillary supply port by moving the replacement capillary located at the capillary supply port along its axis, and moving the removed replacement capillary along its axis; and a transport module that receives the replacement capillary moved by the movement operation of the replacement module, and transports the received replacement capillary by moving it linearly a predetermined distance and rotating it by a predetermined angle.

[0009] This capillary exchange mechanism can move the replacement capillary in three ways: in the supply direction, along the axis, and by rotating it by a predetermined angle. As a result, the degree of freedom in arranging the supply module, replacement module, and transport module for the automatic capillary exchange function is increased. Therefore, these modules can be arranged so that the area required for arranging the capillary exchange mechanism is compact, and the automatic capillary exchange function can be provided while suppressing an increase in size.

[0010] In the capillary exchanging mechanism, a first reference line overlapping the axis of the used capillary held by the horn and a second reference line perpendicular to the first reference line may be defined, the transport module may be disposed so as to include an intersection of the first reference line and the second reference line, and the replacement module may be disposed adjacent to the transport module along the direction of the second reference line. With this configuration, the replacement module can be disposed adjacent to the transport module.

[0011] In the capillary exchange mechanism, a first reference line overlapping the axis of the used capillary held by the horn and a second reference line perpendicular to the first reference line may be defined, the transport module may be disposed so as to include an intersection of the first reference line and the second reference line, and the supply module may be disposed adjacent to the transport module along the direction of the second reference line. With this configuration, the supply module can be disposed adjacent to the transport module.

[0012] In the capillary replacement mechanism, a first reference line overlapping the axis of the used capillary held by the horn, a second reference line perpendicular to the first reference line, and a third reference line parallel to the first reference line and spaced apart from the first reference line in the direction of the second reference line may be defined, the replacement module may be disposed so as to include an intersection of the second reference line and the third reference line, and the supply module may be disposed on the third reference line so as to be adjacent to the replacement module in the direction of the third reference line. With this configuration, the supply module can be disposed above or below the replacement module.

[0013] In the capillary exchanging mechanism, a first reference line overlapping the axis of the used capillary held by the horn, a second reference line perpendicular to the first reference line, and a third reference line parallel to the first reference line and spaced apart from the first reference line in the direction of the second reference line may be defined, the transport module is arranged to include an intersection of the first reference line and the second reference line, the replacement module is arranged to include an intersection of the second reference line and the third reference line, and the supply module is arranged on the third reference line so as to be adjacent to the replacement module in the direction of the third reference line. With this configuration, the replacement module can be arranged next to the transport module, and the supply module can be arranged above or below the replacement module.

[0014] In the capillary exchanging mechanism, a first reference line overlapping the axis of the used capillary held by the horn may be defined, the transport module may be arranged so as to overlap the first reference line, and the replacement module may be arranged so as to overlap the first reference line and adjacent to the transport module along the direction of the first reference line. With this configuration, the replacement module can be arranged below the transport module.

[0015] In the capillary exchange mechanism, a first reference line overlapping the axis of a used capillary held by the horn and a second reference line perpendicular to the first reference line may be defined, the transport module may be arranged so as to overlap the first reference line but not include an intersection of the first reference line and the second reference line, and the supply module may be arranged so as to overlap the second reference line. With this configuration, the supply module can be arranged below the transport module.

[0016] In the capillary replacement mechanism, a first reference line overlapping the axis of the used capillary held by the horn and a second reference line perpendicular to the first reference line may be defined, the replacement module may be disposed so as to include an intersection of the first reference line and the second reference line, and the supply module may be disposed so as to overlap the second reference line. With this configuration, the supply module can be disposed adjacent to the replacement module.

[0017] In the capillary exchanging mechanism, a first reference line overlapping the axis of a used capillary held by the horn and a second reference line perpendicular to the first reference line may be defined, the transport module may be arranged so as to overlap the first reference line but not include an intersection of the first reference line and the second reference line, the replacement module may be arranged so as to include an intersection of the first reference line and the second reference line, and the supply module may be arranged so as to overlap the second reference line. With this configuration, the replacement module can be arranged below the transport module, and the supply module can be arranged next to the replacement module.

[0018] The wire bonding apparatus according to another embodiment of the present invention includes a horn, a capillary detachably attached to the horn, and a capillary exchange mechanism for exchanging a used capillary for a replacement capillary. The capillary exchange mechanism includes a storage unit for holding a plurality of replacement capillaries arranged in a supply direction perpendicular to the axis of the replacement capillaries, a capillary supply port for removing the replacement capillaries, a supply module for moving the replacement capillary from the storage unit to the capillary supply port along the supply direction, a replacement module for performing an operation of removing the replacement capillary from the capillary supply port by moving the replacement capillary located at the capillary supply port along the axis and an operation of moving the removed replacement capillary along the axis, and a transport module for performing an operation of receiving the replacement capillary moved by the movement of the replacement module and a transport operation of linearly moving the received replacement capillary a predetermined distance and rotating it by a predetermined angle.

[0019] This wire bonding apparatus is equipped with the above-mentioned capillary exchange mechanism, and therefore the area required for arranging the capillary exchange mechanism can be made compact, thereby preventing the wire bonding apparatus from becoming larger due to the addition of an automatic capillary exchange function.

[0020] According to the present invention, it is possible to provide a capillary exchange mechanism and a wire bonding apparatus that can provide an automatic capillary exchange function while suppressing an increase in size.

[0021] FIG. 1 is a perspective view showing the configuration of a wire bonding apparatus according to an embodiment. FIG. 2 is an enlarged plan view showing the tip of an ultrasonic horn. FIGS. 3(a), 3(b), 3(c), and 3(d) are plan views illustrating the capillary removal operation. FIGS. 4(a), 4(b), 4(c), 4(d), and 4(e) are views illustrating the wire retraction operation performed by the wire bonding apparatus. FIGS. 5(a), 5(b), 5(c), 5(d), and 5(e) are views illustrating the wire retraction operation performed by the wire bonding apparatus. FIG. 6 is a view illustrating the imaging operation performed by the wire bonding apparatus. FIG. 7 is a schematic diagram showing the configuration of a capillary replacement unit. FIG. 8 is a diagram illustrating the arrangement of a transfer module, a replacement module, and a supply module. FIGS. 9(a), 9(b), 9(c), and 9(d) are views illustrating the first transfer operation performed by the capillary replacement unit. 10(a), 10(b), 10(c), and 10(d) are diagrams for explaining the second transport operation performed by the capillary exchange unit. 11(a) and 11(b) are diagrams for explaining the extraction operation performed by the capillary exchange unit. 12(a), 12(b), 12(c), and 12(d) are diagrams for explaining the replacement operation performed by the capillary exchange unit. 13 is a functional block diagram of a controller provided in the wire bonding apparatus of the embodiment. 14 is a flowchart showing main steps of a method for replacing a capillary of the embodiment. 15 is a flowchart showing in detail steps for preparing for automatic capillary exchange in FIG. 14. 16(a) is a diagram showing an operation for moving a capillary onto a disposable bond stage. 16(b) is a diagram showing an operation for advancing a sub-base toward the capillary exchange unit. 16(c) is a diagram showing an operation for retracting the sub-base. Fig. 17 is a flowchart showing in detail the steps of performing automatic capillary exchange in Fig. 14. Figs. 18(a), 18(b), 18(c), and 18(d) are diagrams showing the steps of performing automatic capillary exchange, from the operation of advancing the sub-base to the operation of moving the transport carriage to the exchange position.19(a), 19(b), 19(c), and 19(d) are diagrams showing the steps of rotating the release pin to moving the replacement table in the insertion direction in the process of performing automatic capillary replacement. 20(a), 20(b), 20(c), and 20(d) are diagrams showing the steps of lowering the transport carriage to a predetermined position to retracting the sub-base in the process of performing automatic capillary replacement. 21 is a flowchart showing in detail the steps of performing preparation for bonding in FIG. 14. 22 is a diagram showing the arrangement of the transport module, replacement module, and supply module in the capillary replacement unit of Modified Example 1. 23 is a diagram showing the arrangement of the transport module, replacement module, and supply module in the capillary replacement unit of Modified Example 2.

[0022] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same elements are designated by the same reference numerals, and duplicated explanations will be omitted.

[0023] 1 is a perspective view showing a wire bonding apparatus according to an embodiment of the present invention. The wire bonding apparatus 1 includes a wire bonding unit 2, a bonding stage 3, a camera unit 4, a capillary exchange unit 5 (capillary exchange mechanism), and a controller 6.

[0024] The wire bonding unit 2 bonds bonding wires 12 (see FIG. 4, etc.) to the semiconductor chip 11. The bonding stage 3 sequentially moves multiple semiconductor chips 11 to be wire bonded to the working area of ​​the wire bonding unit 2. The camera unit 4 captures images for controlling the operation of the wire bonding unit 2. The capillary replacement unit 5 replaces a used capillary that needs to be replaced after multiple wire bonding operations with a new replacement capillary. The controller 6 has various control units that control the operation of each unit of the wire bonding apparatus 1 and perform various processes.

[0025] The wire bonding unit 2 has a main base 21, a tool XY stage 22, and a sub-base 23. The wire bonding unit 2 further has a bonding module 24, a Z-axis drive unit 25, a module base 26, a lower wire clamper 27, and an upper wire clamper 28.

[0026] The tool XY stage 22 is attached to the main base 21. The sub-base 23 is attached to a movable stage of the tool XY stage 22. The tool XY stage 22 moves the sub-base 23 in the X-axis direction and the Y-axis direction. A bonding module 24, a lower wire clamper 27, an upper wire clamper 28, and a camera unit 4 are attached to the sub-base 23. For example, when the sub-base 23 is moved in the X-axis direction by the tool XY stage 22, the bonding module 24, the lower wire clamper 27, the upper wire clamper 28, and the camera unit 4 also move integrally in the X-axis direction.

[0027] More specifically, the sub-base 23 includes a sub-base main surface 23a and a sub-base wall surface 23b. A Z-axis drive unit 25 is attached to the sub-base main surface 23a, and a module base 26 is attached to the Z-axis drive unit 25. A bonding module 24 and a lower wire clamper 27 are attached to the module base 26. Meanwhile, an upper wire clamper 28 and a camera unit 4 are attached to the sub-base wall surface 23b without intermediate members such as the Z-axis drive unit 25 and the module base 26. With this configuration, the bonding module 24 and the lower wire clamper 27 are reciprocated in the Z-axis direction by the Z-axis drive unit 25. More specifically, the tip of the bonding module 24 and the tip of the lower wire clamper 27 can perform reciprocating arc motion around the Z-axis drive unit 25. During this reciprocating arc motion, the relative position of the lower wire clamper 27 with respect to the bonding module 24 is maintained. On the other hand, the upper wire clamper 28 and the camera unit 4 are not reciprocated in the Z-axis direction by the Z-axis drive unit 25 .

[0028] In short, the bonding module 24 and the lower wire clamper 27 move in the X-axis direction, the Y-axis direction, and the Z-axis direction. In contrast, the upper wire clamper 28 and the camera unit 4 move in the X-axis direction and the Y-axis direction. In the example of this embodiment, the upper wire clamper 28 and the camera unit 4 do not move in the Z-axis direction. However, it is also possible to adopt a configuration in which the upper wire clamper 28 and the camera unit 4 are movable in the Z-axis direction.

[0029] <Bonding module 24> The bonding module 24 has a horn holder 241, an ultrasonic horn 242, and a capillary 243. The base end side of the horn holder 241 is attached to the Z-axis drive unit 25. The ultrasonic horn 242 is attached to the tip side of the horn holder 241. The capillary 243 is detachably attached to the tip side of the ultrasonic horn 242.

[0030] 2, a capillary mounting hole H1 and a pin insertion hole H2 are formed at the tip of the ultrasonic horn 242. The capillary mounting hole H1 and the pin insertion hole H2 pass through the ultrasonic horn 242 along the Z axis. In this embodiment, the capillary mounting hole H1 is provided closer to the tip of the ultrasonic horn 242 than the pin insertion hole H2. However, the pin insertion hole H2 may also be provided closer to the tip of the ultrasonic horn 242 than the capillary mounting hole H1.

[0031] The capillary attachment hole H1 and the pin insertion hole H2 are in communication with each other. In this embodiment, the capillary attachment hole H1 and the pin insertion hole H2 are in communication with each other via a slit S1. The slit S1 passes through the ultrasonic horn 242 in the Z-axis direction.

[0032] Furthermore, a slit S2 is formed in the ultrasonic horn 242. The slit S2 is in communication with the pin insertion hole H2. The slit S2 is formed closer to the base end of the ultrasonic horn 242 than the pin insertion hole H2. The slit S2 passes through the ultrasonic horn 242 in the Z-axis direction. In this way, the capillary mounting hole H1, the slit S1, the pin insertion hole H2, and the slit S2 are in communication with one another.

[0033] The capillary 243 is inserted into the capillary mounting hole H1. The ultrasonic horn 242 is made of an elastically deformable material. As shown in FIG. 3A, the capillary mounting hole H1 is smaller than the outer diameter of the capillary 243 when the capillary 243 is not inserted. The ultrasonic horn 242 can grasp the capillary 243 inserted into the capillary mounting hole H1 by its elastic force, by pushing the capillary mounting hole H1 open. In other words, the capillary 243 is inserted into the capillary mounting hole H1 in a state where the capillary mounting hole H1 is pushed open.

[0034] As shown in FIG. 3A, the pin insertion hole H2 is an elliptical hole. The release pin 511 of the release module 51 can be inserted into the pin insertion hole H2. The release pin 511 is inserted into the pin insertion hole H2 to release the grip of the capillary 243 by the ultrasonic horn 242. As shown in FIGS. 2 and 3A, the inner wall surface of the pin insertion hole H2 includes a first surface W1 and a second surface W2 that face each other. The first surface W1 and the second surface W2 face each other in the lateral direction of the elliptical pin insertion hole H2. The slit S1 and the slit S2 face each other in the longitudinal direction of the elliptical pin insertion hole H2. When the release pin 511 of the release module 51 is not inserted into the pin insertion hole H2, the lateral length of the pin insertion hole H2 is shorter than the length L1 of the release pin 511 in the first direction (longitudinal direction). The capillary attachment hole H1 communicates with the longitudinal end of the elliptical pin insertion hole H2 via a slit S1.

[0035] The capillary 243, which is a bonding tool, bonds the bonding wire 12 to the semiconductor chip 11. The capillary 243 has a capillary body 243a and a capillary taper 243b. The capillary body 243a is cylindrical and is held at the tip of the ultrasonic horn 242. The capillary taper 243b is conical and tapers toward the tip, and the tip of the capillary taper 243b is pressed against a pad or the like of the semiconductor chip 11. The capillary 243 has a capillary through-hole 243h formed in it, which extends from the base end surface of the capillary body 243a to the tip surface of the capillary taper 243b. The bonding wire 12 is inserted through the capillary through-hole 243h.

[0036] <Lower Wire Clamp and Upper Wire Clamp> The lower wire clamper 27 and the upper wire clamper 28 can be switched between a state in which they grip the bonding wire 12 and a state in which they do not grip the bonding wire 12. As described above, the lower wire clamper 27 is movable along the Z-axis direction. Therefore, with respect to the upper wire clamper 28, whose position along the Z-axis direction is fixed, the position of the lower wire clamper 27 can be switched between a position close to the upper wire clamper 28 (close position 2N) and a position far from the upper wire clamper 28 (far position 2F). By switching between the gripping state and the release state and between the close position 2N and the far position 2F, the lower wire clamper 27 and the upper wire clamper 28 can perform an operation of drawing the bonding wire 12 from the capillary through-hole 243h (drawing operation) and an operation of feeding the bonding wire 12 into the capillary through-hole 243h (feeding operation).

[0037] [Pull-in Operation] The pull-in operation will be described with reference to FIG. 4. First, the lower wire clamper 27 located at the approach position 2N is opened, and the upper wire clamper 28 is closed ( FIG. 4( a)). Next, the open lower wire clamper 27 and the capillary 243 are moved downward toward the separated position 2F ( FIG. 4( b)). At this time, the bonding wire 12 is held by the upper wire clamper 28 and does not move. The downward movement of the capillary 243 relative to the stationary bonding wire 12 means that, from the perspective of the bonding wire 12, the bonding wire 12 moves upward relative to the capillary 243. In other words, the bonding wire 12 is pulled into the capillary 243. Next, the lower wire clamper 27 located at the separated position 2F is closed, and the upper wire clamper 28 is opened ( FIG. 4( c)). Next, the closed lower wire clamper 27 and the capillary 243 are moved upward toward the approach position 2N ( FIG. 4( d)). At this time, since the bonding wire 12 is held by the lower wire clamper 27, the bonding wire 12 also moves upward as the lower wire clamper 27 moves. As a result, comparing the state of FIG. 4(a) with the state of FIG. 4(b), the position of the capillary 243 is the same, but the tip of the bonding wire 12 has moved upward. In other words, the bonding wire 12 is being drawn into the capillary 243. The operations of FIG. 4(a) to FIG. 4(d) are repeated until a predetermined drawn-in length is reached. The drawn-in length is the distance D1 from the tip of the bonding wire 12 located inside the capillary through-hole 243h to the tip of the capillary 243, as shown in FIG. 4(e).

[0038] [Feed-Out Operation] The feed-out operation will be described with reference to FIG. 5. First, the lower wire clamper 27 located at the approach position 2N is closed, and the upper wire clamper 28 is opened (FIG. 5(a)). Next, the closed lower wire clamper 27 and the capillary 243 are moved downward toward the separated position 2F (FIG. 5(b)). At this time, the bonding wire 12 is held by the lower wire clamper 27, so the bonding wire 12 also moves as the lower wire clamper 27 moves downward. Next, the lower wire clamper 27 located at the separated position 2F is opened, and the upper wire clamper 28 is closed (FIG. 5(c)). Next, the opened lower wire clamper 27 and the capillary 243 are moved upward toward the approach position 2N (FIG. 5(d)). At this time, the bonding wire 12 is not held by the lower wire clamper 27. The bonding wire 12 does not move as the lower wire clamper 27 moves upward. The upward movement of the capillary 243 relative to the immovable bonding wire 12 means that, from the perspective of the bonding wire 12, the bonding wire 12 moves downward relative to the capillary 243. In other words, the bonding wire 12 is fed out to the capillary 243. As a result, when the state of FIG. 5( a) is compared with the state of FIG. 5(d), the position of the capillary 243 is the same, but the tip of the bonding wire 12 has moved downward. In other words, the bonding wire 12 is fed out to the capillary 243. The operations of FIG. 5(a) to FIG. 5(d) are repeated until a predetermined extension length D2 is reached. The extension length D2 is the distance from the tip of the capillary 243 to the tip of the bonding wire 12, as shown in FIG. 5(e).

[0039] <Camera Unit> The camera unit 4 captures an image of the semiconductor chip 11. The captured image of the semiconductor chip 11 is used to position the capillary 243 when wire bonding is performed on the semiconductor chip 11. In this way, the camera unit 4 functions as a wire bonding camera unit used to perform wire bonding.

[0040] The camera unit 4 is also used for automatic replacement of the capillary 243 by the capillary replacement unit 5. For example, the camera unit 4 is used for positioning the release pin portion 511, which will be described later, when switching the locked state of the ultrasonic horn 242 to the released state. The camera unit 4 is used for determining whether the state of the bonding wire 12 protruding from the tip of the capillary 243 is such that bonding can be resumed.

[0041] The camera unit 4 has a camera 41 having an imaging element, a camera arm 42 that supports the camera 41, the tool XY stage 22, and a camera control unit 66. The base end of the camera arm 42 is attached to the tool XY stage 22. The camera 41 is attached to the tip end of the camera arm 42. The camera arm 42 supports the camera 41 at a position above the bonding stage 3.

[0042] The camera unit 4 may acquire elevation images of each part by combining optical path changing means such as a mirror or a prism. For example, as shown in FIG. 6 , a case where the periphery of the tip of the capillary 243 is imaged is illustrated. The capillary 243 protrudes from the underside of the ultrasonic horn 242. Therefore, if the camera 41 is located directly above the ultrasonic horn 242, it will not be able to image the periphery of the tip of the capillary 243. Therefore, the camera 41 is positioned so as not to overlap with the ultrasonic horn 242. As shown in FIG. 6 , when the camera 41 and the capillary 243 are viewed from the front, an arrangement in which the axis of the capillary 243 and the optical axis of the camera 41 are offset is sometimes referred to as an offset arrangement. An optical component 43, such as a prism or mirror, that changes the direction of light is located directly below the camera 41. With this optical system, the periphery of the tip of the capillary 243 can be imaged using the offset-positioned camera 41. Note that a light source component 44, such as a laser diode, may be provided as needed. In this case, the capillary 243 is disposed between the optical component 43 and the light source component 44 .

[0043] The camera 41 and the camera arm 42 are attached to the tool XY stage 22 via the sub-base 23. That is, the camera 41 and the camera arm 42 are driven by the tool XY stage 22, and are capable of translation along the XY plane together with the capillary 243 and the like. In this way, the tool XY stage 22 functions as a part of the components of the wire bonding unit 2, and also functions as a part of the components of the camera unit 4. The camera control unit 66 controls various operations of the camera unit 4 and executes various processes. Details of the control performed by the camera control unit 66 will be described later.

[0044] <Capillary Replacement Unit> The capillary replacement unit 5 collects a used capillary 243E attached to the ultrasonic horn 242 and attaches a new replacement capillary 243T to the ultrasonic horn 242. In other words, the capillary 243 replacement operation includes the operation of collecting the capillary 243 and the operation of attaching the capillary 243. This capillary 243 replacement operation is automatically performed when a preset condition is met. For example, the condition may be the number of bonding operations. In other words, the capillary 243 replacement operation may be performed every time a predetermined number of bonding operations are performed.

[0045] 7 is a conceptual diagram showing the components constituting the capillary replacement unit 5. The capillary replacement unit 5 has a release module 51, a transport module 52, a replacement module 53, and a supply module 54. The release module 51, the transport module 52, and the replacement module 53 are housed in a replacement unit main body 50 so as to be an integrated device. The replacement unit main body 50 has a module slot 50a into which the supply module 54 is inserted.

[0046] <Release Module> The release module 51 has a release pin portion 511 , a release shaft 512 , and a release drive portion 513 .

[0047] The release module 51 switches the state in which the capillary 243 is constrained by the ultrasonic horn 242 to the state in which the capillary 243 is released from the ultrasonic horn 242 (release operation). Furthermore, the release module 51 switches the state in which the capillary 243 is released from the ultrasonic horn 242 to the state in which the capillary 243 is constrained by the ultrasonic horn 242 (lock operation).

[0048] When the capillary 243 is constrained by the ultrasonic horn 242, the capillary 243 cannot be removed from the ultrasonic horn 242. When the capillary 243 is released from the ultrasonic horn 242, the capillary 243 can be removed from the ultrasonic horn 242. Furthermore, when the capillary 243 is released from the ultrasonic horn 242, the capillary 243 can be attached to the ultrasonic horn 242.

[0049] [Release Operation] Next, a description will be given of a grip release operation for releasing the grip of the capillary 243 by the ultrasonic horn 242. This grip release operation is performed by the release module 51. As shown in Fig. 3(a), the ultrasonic horn 242 grips the capillary 243 inserted into the capillary attachment hole H1 by elastic force. When this grip is to be released, the release pin portion 511 of the release module 51 is inserted into the pin insertion hole H2 of the ultrasonic horn 242. The insertion operation of the release module 51 into the pin insertion hole H2 is performed by the release drive unit 513.

[0050] As shown in FIG. 3B , with the release pin 511 inserted into the pin insertion hole H2, the release pin 511 is rotated 90 degrees around the Z axis. This causes both ends of the release pin 511 in the first direction (both ends in the longitudinal direction of the elliptical shape) to press against the first surface W1 and the second surface W2. Pressing the first surface W1 and the second surface W2 by the release pin 511 elastically deforms the ultrasonic horn 242. This widens the gap between the first surface W1 and the second surface W2 of the pin insertion hole H2. The rotation of the release module 51 is performed by the release drive unit 513.

[0051] Here, the pin insertion hole H2 and the capillary attachment hole H1 communicate with each other via the slit S1. Therefore, as the release pin 511 widens the gap between the first surface W1 and the second surface W2, the capillary attachment hole H1 is also widened. Widening the capillary attachment hole H1 releases the grip of the capillary 243 by the ultrasonic horn 242. That is, the grip release operation is an operation of rotating the release module 51 with the release pin 511 inserted into the pin insertion hole H2. The grip release operation is an operation of pressing the first surface W1 and the second surface W2 with both ends of the release pin 511 in the first direction (both ends in the longitudinal direction of the elliptical shape), thereby widening the gap between the first surface W1 and the second surface W2 and widening the capillary attachment hole H1. In this way, the release module 51 widens the pin insertion hole H2 and the capillary attachment hole H1, thereby releasing the grip of the capillary 243 by the ultrasonic horn 242.

[0052] As shown in FIG. 3( b), with the capillary mounting hole H1 being expanded by the release module 51, the capillary 243 is removed from the ultrasonic horn 242, and a new capillary 243 is inserted into the capillary mounting hole H1. This replacement of the capillary 243 is performed by the capillary replacement unit 5. Then, as shown in FIG. 3( c), the release pin 511 is rotated 90 degrees around the Z axis to release the pressure applied by the release pin 511 to the first surface W1 and the second surface W2. In other words, the gripping release operation is released. This causes the pin insertion hole H2 and the capillary mounting hole H1 to return to their original shapes shown in FIG. 3( a). Due to the elastic force of the capillary 243 attempting to return to its original shape, the capillary 243 inserted into the capillary mounting hole H1 is gripped by the inner wall surface of the capillary mounting hole H1.

[0053] 3D, the release pin 511 is removed from the pin insertion hole H2. In this manner, the ultrasonic horn 242 can grip and release the capillary 243 using the release module 51.

[0054] <Transport Module> Referring again to Fig. 7, the transport module 52 includes a transport carriage 521, a transport linear shaft 522, and a transport driver 523. The transport module 52 further includes a transport carousel 524 and a transport rotary pinion 525.

[0055] The transport module 52 pulls out the used capillary 243E from the ultrasonic horn 242 at the exchange position 52S. Furthermore, the transport module 52 transports the pulled out used capillary 243E from the exchange position 52S to the replacement position 52E.

[0056] The transport module 52 receives the replacement capillary 243T at the replacement position 52E from the replacement module 53. The transport module 52 transports the replacement capillary 243T from the replacement position 52E to the replacement position 52S. The transport module 52 inserts the replacement capillary 243T into the ultrasonic horn 242 at the replacement position 52S.

[0057] Thus, the movement of the transport carriage 521 includes linear movement between the replacement position 52S and the exchange position 52E and rotational movement that changes the attitude of the used capillary 243E. In this embodiment, the entire period of rotational movement overlaps with a portion of the period of linear movement. In other words, the period of linear movement includes a period of only linear movement and a period in which linear movement and rotational movement occur in parallel.

[0058] The transport module 52 having the above-described configuration can perform the first transport operation and the second transport operation described below.

[0059] [First Transport Operation] Here, the case where the used capillary 243E is transported from the exchange position 52S to the replacement position 52E is referred to as the first transport operation. In the first transport operation, first, a linear movement downward is started, and only linear movement is performed until the transport carriage 521 reaches the transport carousel 524.

[0060] The linear movement is performed by a conveying linear shaft 522 and a conveying driver 523. The conveying carriage 521 and the conveying linear shaft 522 constitute a so-called feed screw (lead screw) mechanism. When the conveying driver 523 rotates the conveying linear shaft 522, the conveying carriage 521 mounted on the conveying linear shaft 522, which is a screw shaft, moves linearly. The movement direction of the conveying carriage 521 is determined by the rotation direction of the conveying linear shaft 522. Note that a mechanism such as a ball screw may be used instead of the feed screw.

[0061] After the transport carriage 521 reaches the transport carousel 524, linear movement and clockwise rotational movement are carried out in parallel.

[0062] More specifically, a transport carousel 524 is provided at the lower end of the transport linear shaft 522. As shown in FIG. 9A, when the transport carriage 521 at the replacement position 52S approaches the lower end of the transport linear shaft 522, the transport rotation pinion 525 provided on the transport carriage 521 engages with the transport carousel 524 as shown in FIG. 9B. As a result, the transport carriage 521 rotates in a predetermined direction as the transport carriage 521 moves (see FIG. 9C). For example, as shown in FIG. 9D, the transport carriage 521 rotates 90 degrees clockwise. As a result, the posture (replacement posture) of the used capillary 243E that has moved to the replacement position 52E differs from the posture (replacement posture) of the used capillary 243E at the replacement position 52S. The posture of the used capillary 243E here may be defined as the angle of the axis AE of the used capillary 243E with respect to the Z-axis direction. For example, the orientation of the used capillary 243E at the replacement position 52S is such that the angle with respect to the Z-axis direction is 0 degrees. For example, the orientation of the used capillary 243E at the replacement position 52E is such that the angle with respect to the Z-axis direction is 90 degrees.

[0063] Note that adding a definition of direction to the axis AE of the used capillary 243E allows for a more detailed definition of the attitude of the used capillary 243E. For example, the direction from the base end to the tip end of the used capillary 243E is defined as positive. In this case, too, the attitude of the used capillary 243E at the replacement position 52S is at an angle of 0 degrees with respect to the Z-axis direction. For example, if the rotation of the transport carriage 521 causes the tip end of the used capillary 243E to be on the upper side and the base end to be on the lower side, the attitude of the used capillary 243E at the replacement position 52S can be said to be at an angle of 180 degrees with respect to the Z-axis direction.

[0064] [Second Transport Operation] Next, the transport of the replacement capillary 243T from the replacement position 52E to the replacement position 52S is referred to as the second transport operation. As shown in Figures 10(a) and 10(b), in the second transport operation, upward linear movement is started and counterclockwise rotational movement is simultaneously performed. While the transport carriage 521 is engaged with the transport carousel 524, the linear movement and rotational movement are performed in parallel. Then, as shown in Figures 10(c) and 10(d), after the transport carriage 521 is no longer engaged with the transport carousel 524, only upward linear movement is performed.

[0065] <Replacement Module> The replacement module 53 has a replacement table 531 , a replacement drive unit 532 , a replacement linear motion shaft 533 , a replacement shaft 534 , a replacement operating piece 535 , and a replacement fixed piece 536 .

[0066] [Pull-out Operation] The replacement module 53 pulls out the used capillary 243E transported to the replacement position 52E from the transport carriage 521. More specifically, the replacement table 531 and the replacement movable piece 535 move together away from the replacement fixed piece 536 due to the operation of the replacement drive unit 532 and the replacement linear motion shaft 533 (see FIG. 11B). Since the replacement movable piece 535 is hooked on the capillary taper portion 243b of the capillary 243, when the replacement movable piece 535 moves in a direction away from the replacement fixed piece 536, the capillary 243 also moves in a direction away from the replacement fixed piece 536 in accordance with the movement of the replacement movable piece 535. As a result, the capillary 243 is pulled out from the transport carriage 521.

[0067] [Replacement Operation] Furthermore, the replacement module 53 inserts the replacement capillary 243T into the transport carriage 521 from which the used capillary 243E has been pulled out. More specifically, the replacement table 531 and the replacement operating piece 535 move together toward the replacement fixed piece 536 through the operation of the replacement drive unit 532 and the replacement linear motion shaft 533. This operation of the replacement table 531 and the replacement operating piece 535 moving toward the replacement fixed piece 536 includes several steps, which will be described below.

[0068] In the first stage (see FIG. 12(a)), as the replacement table 531 moves, the upright portion 531a of the replacement table 531 approaches the replacement fixed piece 536 while pressing against the base end surface of the replacement capillary 243T located at the capillary supply port 54b. As a result, the replacement capillary 243T falls from the capillary supply port 54b onto the replacement table 531 (see FIG. 12(b)). In the second stage, as the replacement table 531 moves, the replacement movable piece 535 comes into contact with the replacement fixed piece 536 (see FIG. 12(c)). In the third stage, as the replacement table 531 moves, the replacement table 531 moves even closer to the replacement fixed piece 536. In this third stage, the replacement movable piece 535 abuts against the replacement fixed piece 536, so the replacement movable piece 535 does not move. Therefore, in the third stage, the replacement table 531 carrying the replacement capillary 243T approaches the replacement operating piece 535 that abuts against the replacement fixed piece 536. In other words, in the third stage, the distance from the replacement table 531 carrying the replacement capillary 243T to the replacement operating piece 535 that abuts against the replacement fixed piece 536 gradually decreases. In the fourth stage (see FIG. 12(d)), as the replacement table 531 moves, the capillary taper portion 243b of the replacement capillary 243T carried on the replacement table 531 passes through the replacement operating piece 535 and the replacement fixed piece 536 and is inserted into the transport carriage 521.

[0069] <Supply Module> The supply module 54 has a capillary receiving portion 54a and a capillary supply port 54b.

[0070] The supply module 54 can be removed from the module slot 50a as needed. The supply module 54 accommodates a plurality of replacement capillaries 243T in a capillary accommodation portion 54a. The supply module 54 supplies the replacement capillaries 243T one by one from the capillary supply port 54b to the replacement module 53 in accordance with the operation of the replacement module 53.

[0071] Next, the positional relationship of the above-mentioned transfer module 52, replacement module 53, and supply module 54 will be described with reference to Fig. 8. According to the positional relationship of each module described below, the area required for the operation up to inserting the replacement capillary 243T into the ultrasonic horn 242 can be made compact.

[0072] To explain the positional relationship of each module, a first reference line B1, a second reference line B2, and a third reference line B3 are defined. These reference lines are based on the axis AE of the used capillary 243E attached to the ultrasonic horn 242. The first reference line B1 is defined as overlapping with the axis AE of the used capillary 243E. The second reference line B2 is defined as being perpendicular to the first reference line B1. The first reference line B1 and the second reference line B2 define a first intersection C1, which is the point where the first reference line B1 and the second reference line B2 intersect with each other. The third reference line B3 is defined as being parallel to the first reference line B1 and spaced apart from the first reference line B1 in the direction of the second reference line B2. The second reference line B2 and the third reference line B3 define a second intersection C2, which is the point where the second reference line B2 and the third reference line B3 intersect with each other.

[0073] First, the transport module 52 is positioned so as to overlap the first reference line B1. Furthermore, the transport module 52 is positioned so as to include the first intersection C1. Here, "including the first intersection C1" means that the first intersection C1 is located within the area of ​​the transport module 52 when the transport module 52 is viewed from the front, as shown in FIG. 8 . For example, the first intersection C1 may be located at the replacement position 52E described above. Furthermore, the first intersection C1 may be located at the rotation center of the capillary catcher 52F of the transport carriage 521 located at the replacement position 52E. In this case, for example, the first reference line B1 may overlap with the central axis of the cylindrical capillary catcher 52F.

[0074] Next, the replacement module 53 is positioned so as to overlap the second reference line B2. The replacement module 53 is positioned so as to be adjacent to the transport module 52 along the direction of the second reference line B2. In other words, when the replacement module 53 is viewed from the front, the second reference line B2 is located within the area of ​​the replacement module 53. The second reference line B2 may coincide with an axis defining the direction in which the used capillary 234E is pulled out of the capillary catcher 52F of the transport carriage 521. In other words, the second reference line B2 may coincide with an axis defining the direction in which the replacement capillary 243T is inserted into the capillary catcher 52F of the transport carriage 521. Furthermore, the replacement module 53 is positioned so as to include the second intersection C2. The meaning of "including the second intersection C2" is the same as that explained in the description of "including the first intersection C1."

[0075] The supply module 54 is disposed adjacent to the transport module 52 along the second reference line B2. The supply module 54 is also disposed so as to overlap with the third reference line B3. More precisely, the supply module 54 is inserted into the module slot 50a of the replacement unit body 50 as described above. Therefore, a configuration in which a portion of the supply module 54 is integrated with the replacement module 53 is also included in the configuration in which the supply module 54 is adjacent to the transport module 52. Since the replacement module 53 is disposed at the second intersection C2 on the third reference line B3, a configuration for transferring the replacement capillary 243T from the supply module 54 to the replacement module 53 is disposed on the third reference line B3. This configuration for transferring the replacement capillary 243T from the supply module 54 to the replacement module 53 is the capillary supply port 54b described above.

[0076] With the transfer module 52, replacement module 53 and supply module 54 arranged as described above, the replacement capillary 243T is inserted into the ultrasonic horn 242 through the following movements.

[0077] The replacement capillaries 243T are held in the capillary storage section 54a of the supply module 54. In the capillary storage section 54a, multiple replacement capillaries 243T are lined up in a supply direction SD that is perpendicular to the axis AT of the replacement capillaries 243T. This supply direction SD is a direction toward the replacement module 53 along the third reference line B3. Each time a replacement capillary 243T is removed from the capillary supply port 54b, the multiple replacement capillaries 243T in the capillary storage section 54a move along the supply direction SD from the capillary storage section 54a to the capillary supply port 54b. In other words, when moving from the capillary storage section 54a to the capillary supply port 54b, the replacement capillary 243T moves along the third reference line B3.

[0078] The replacement module 53 removes the replacement capillary 243T located at the capillary supply port 54b. Specifically, the replacement module 53 moves the replacement capillary 243T located at the capillary supply port 54b along the axis AT of the replacement capillary 243T. The capillary supply port 54b includes a protrusion 54b1 that prevents the replacement capillary 243T from falling and a gap 54b2 through which the replacement capillary 243T falls. The replacement capillary 243T located at the capillary supply port 54b is caught on the protrusion 54b1. When the replacement module 53 moves the replacement capillary 243T in the insertion direction (see FIG. 12(b)), the replacement capillary 243T moves from the protrusion 54b1 to the gap 54b2. As a result, the replacement capillary 243T falls through the gap 54b2 and is placed on the replacement table 531 of the replacement module 53.

[0079] That is, the replacement capillary 243T moves along the third reference line B3 and along the second reference line B2 when moving from the supply module 54 to the replacement module 53. Details of the movement from the supply module 54 to the replacement module 53 have already been explained in the "Replacement Operation" based on Figures 12(a), 12(b), 12(c), and 12(d).

[0080] The transport module 52 performs an operation of receiving the replacement capillary 243T and a transport operation of linearly moving the received replacement capillary 243T a predetermined distance and rotating it by a predetermined angle. The receiving operation (S308: see FIG. 19(d)) is the insertion of the replacement capillary 243T into the transport carriage 521 waiting at the replacement position 52E. In other words, from the perspective of the replacement module 53, the receiving operation is an active operation of moving the replacement table 531. On the other hand, from the perspective of the transport module 52, the receiving operation is a passive operation of having the transport carriage 521 waiting at the replacement position 52E. Note that the receiving operation may also be interpreted as the operation of moving the transport carriage 521 to the replacement position 52E.

[0081] On the other hand, the transport operation (S309: see FIG. 20A) is an active operation of the transport module 52. The transport operation described here means the above-mentioned [second transport operation]. Therefore, a detailed description thereof will be omitted.

[0082] <Controller> The controller 6 controls the operations of the wire bonding unit 2 and the capillary replacement unit 5. The controller 6 is a computer having a processor that executes various programs and a memory that stores the programs and desired databases. The controller 6 receives information provided by various sensors provided in the wire bonding apparatus 1. Then, the controller 6 uses the received information to output control signals for controlling the operations of the wire bonding unit 2 and the capillary replacement unit 5.

[0083] The controller 6 executes the capillary replacement program to perform the functions of several functional components shown in FIG. 13 . Specifically, the controller 6 has a bonding control unit 61, a clamper control unit 62, a release control unit 63, a transport control unit 64, and a replacement control unit 65. The bonding control unit 61 outputs a control signal G61a to the Z-axis drive unit 25 and outputs a control signal G61b to the tool XY stage 22. The clamper control unit 62 outputs a control signal G62a to the lower wire clamper 27 and outputs a control signal G62b to the upper wire clamper 28. The release control unit 63 outputs a control signal G63 to the release drive unit 513 of the capillary replacement unit 5. The transport control unit 64 outputs a control signal G64 to the transport drive unit 523 of the capillary replacement unit 5. The replacement control unit 65 outputs a control signal G65 to the replacement drive unit 532 of the capillary replacement unit 5.

[0084] The controller 6 has, as functional components, a camera control unit 66 and a detection sensor control unit 67. The camera control unit 66 processes the planar images and elevation images acquired by the camera 41. As a result, the position of each part in the X, Y, and Z directions is detected.

[0085] The detection sensor control unit 67 receives detection data from a plurality of detection sensors 50S provided in the capillary replacement unit 5. For example, the detection sensor 50S confirms that the used capillary 243E and the replacement capillary 243T, which are sequentially transported inside the capillary replacement unit 5, are present at predetermined positions. After confirming that the used capillary 243E and the replacement capillary 243T are present at the predetermined positions, the controller 6 proceeds to the next operation.

[0086] <Method for Replacing a Capillary> The method for replacing a capillary, which will be described below, is executed by the functional components of the controller 6 shown in Fig. 13. In the following description, the manner in which the method for replacing a capillary is executed by the controller 6 is described in detail. The flowchart in Fig. 14 shows the main steps of the method for replacing a capillary. The three main steps constituting the method for replacing a capillary are shown in detail in Figs. 15, 17, and 21, respectively.

[0087] <Preparation for Capillary Replacement> First, the controller 6 determines whether the conditions for capillary replacement are met (S1). When the controller 6 determines that the conditions for capillary replacement are not met (S1: NO), it resumes bonding without replacing the capillary 243 in use (S5). When the controller 6 determines that the conditions for capillary replacement are met (S1: YES), it proceeds to the operation of replacing the used capillary 243E (S2, S3, S4).

[0088] The controller 6 prepares for capillary replacement (S2). More specifically, as shown in Fig. 15, the controller 6 first ends bonding (S21). The controller 6 outputs a control signal D61a to the Z-axis driver 25 to stop the arcuate reciprocating motion of the bonding module 24.

[0089] Next, the controller 6 forms a straight tail (S22). A straight tail is a portion of the bonding wire 12 that protrudes from the tip of the capillary 243 and does not have a ball 122 (see FIG. 5(d)) formed at its tip. If a ball 122 is formed, the tip of the bonding wire 12 cannot be drawn into the capillary through-hole 243h. However, with a straight tail, the tip of the bonding wire 12 can be drawn into the capillary through-hole 243h. In other words, forming a straight tail means removing the ball 122, and the operation of removing the ball 122 is called a so-called throw-away bond operation.

[0090] First, the controller 6 moves the capillary 243 above the sacrificial bond stage 15 ( FIG. 16A , S221). Next, the controller 6 opens the upper wire clamper 28 and lowers the capillary 243 together with the open lower wire clamper 27. As a result, the ball 122 is bonded to the sacrificial bond stage 15. Next, the controller 6 closes the upper wire clamper 28 and raises the capillary 243 together with the open lower wire clamper 27. Next, the controller 6 opens the upper wire clamper 28 and closes the lower wire clamper 27. Then, the controller 6 raises the capillary 243 together with the closed lower wire clamper 27. As a result, the bonding wire 12 is cut at a location where its strength is relatively reduced. For example, since the strength of the neck portion where the ball 122 and the bonding wire 12 are connected is likely to be reduced by bonding, the bonding wire 12 is cut at this location.

[0091] Then, the controller 6 draws the tip of the bonding wire 12 into the used capillary 243E (S23). This step S23 is the "drawing operation" described above with reference to FIG.

[0092] 17, the controller 6 advances the sub-base 23 toward the capillary exchange unit 5 (S301, see FIGS. 16(b) and 18(a)). This action moves the capillary 243 from above the temporary bond stage 15 onto the capillary exchange unit 5. Next, the controller 6 lowers the ultrasonic horn 242 to insert the used capillary 243E into the capillary guide portion 55 (S302, see FIG. 18(b)).

[0093] Next, the controller 6 inserts the release pin portion 511 into the pin insertion hole H2 (S303, see FIG. 18(c)). In this operation, the release pin portion 511 is simply inserted into the pin insertion hole H2, and a release operation by rotating the release pin portion 511 is not performed. Therefore, in this operation, the capillary 243 is constrained by the ultrasonic horn 242. Next, the controller 6 moves the transport carriage 521 upward (S304, see FIG. 18(d)). As a result, the capillary 243 is inserted into the transport carriage 521. Once the capillary 243 is inserted, the transport carriage 521 holds the capillary 243. Next, the controller 6 rotates the release pin portion 511 forward (S305, see FIG. 19(a)). This step S305 is the "release operation" described above with reference to FIG. 3. As a result, the capillary 243 is released from the state of being restrained by the ultrasonic horn 242 (release state).

[0094] Next, the controller 6 moves the transport carriage 521 from the exchange position 52S to the replacement position 52E (S306, see FIG. 19B). This step S306 is the "first transport operation" described above with reference to FIG. 9. As a result of this step S306, the used capillary 243E moves from the exchange position 52S to the replacement position 52E, and the posture of the used capillary 243E becomes an exchange posture at an angle of 0 degrees with respect to the Z axis, and a replacement posture at an angle of 90 degrees with respect to the Z axis.

[0095] Next, the controller 6 moves the replacement table 531 in the pull-out direction (S307, see FIG. 19(c)). This step S307 corresponds to the "pull-out operation" described above with reference to FIG. 11. Next, the controller 6 moves the replacement table 531 in the insert-in direction (S308, see FIG. 19(d)). This step S308 corresponds to the "replacement operation" described above with reference to FIG. 12. As a result of the pull-out operation (S307) and the replacement operation (S308), the used capillary 243E held by the transport carriage 521 at the second position is replaced with the replacement capillary 243T.

[0096] Next, the controller 6 moves the transport carriage 521 from the replacement position 52E to the replacement position 52S (S309, see FIG. 20(a)). This step S309 is the "second transport operation" described above with reference to FIG. 10. As a result of this step S309, the replacement capillary 243T moves from the replacement position 52E to the replacement position 52S, and the posture of the replacement capillary 243T changes from the replacement posture at an angle of 90 degrees with respect to the Z axis to the replacement posture at an angle of 0 degrees with respect to the Z axis. The rising replacement capillary 243T is guided by the capillary guide unit 55 to the capillary through-hole 243h of the ultrasonic horn 242. Since the used capillary 243E is withdrawn from the ultrasonic horn 242 while being in contact with the capillary guide 55, it can be said that the position of the used capillary 243E is preserved by the capillary guide 55. Therefore, the replacement capillary 243T, which is guided by the capillary guide 55 that preserves the position of the used capillary 243E, can be accurately inserted into the position of the used capillary 243E. Similarly, when the used capillary 243E is withdrawn, the bonding wire 12 is not affected in any way. Therefore, the tip of the bonding wire 12 is guided into the capillary through-hole 243h of the replacement capillary 243T, which is inserted so as to be in the same position as the used capillary 243E.

[0097] Next, the controller 6 reversely rotates the release pin portion 511 (S310, see FIG. 20(b)). This reverse rotation switches the ultrasonic horn 242 from the release state to the lock state. As a result, the replacement capillary 243T is fixed to the ultrasonic horn 242. Next, the controller 6 lowers the transport carriage 521 to a predetermined position (S311, see FIG. 20(c)). Then, the controller 6 pulls out the release pin portion 511 from the pin insertion hole H2 (S312, see FIG. 20(c)). Next, the controller 6 raises the ultrasonic horn 242 to pull out the replacement capillary 243T from the capillary guide portion 55 (S313, see FIG. 20(d)). Then, the controller 6 retracts the sub-base 23 (S314, see FIG. 16(c)).

[0098] <Preparation for Bonding: S4> Then, the controller 6 executes the preparation for bonding shown in FIG. 21 (S4). A first condition and a second condition may be set as conditions for resuming bonding. The first condition is the protrusion length D2 of the bonding wire 12 protruding from the tip of the capillary 243. The second condition is the shape of the ball 122 formed at the tip of the bonding wire 12. In step S4, a bonding wire 12 that satisfies the first and second conditions is formed. The controller 6 first sets the state to satisfy the first condition, and then sets the state to satisfy the second condition after the first condition is satisfied.

[0099] First, the controller 6 executes a feeding operation (S41). This step S41 is the "feeding operation" described above with reference to FIG. 5. Next, the controller 6 executes a protrusion length measurement (S42). This protrusion length measurement may be performed using an image captured using a camera 41 and optical components 43, as shown in FIG. 5. The controller 6 obtains the protrusion length D2 by analyzing the image.

[0100] Next, the controller 6 determines whether the wire extension length D2 is longer than the lower limit (S43). If the controller 6 determines that the extension length D2 is not longer than the lower limit (S43: NO), that is, if the extension length D2 is shorter than the lower limit, the controller 6 executes the feeding operation (S44). Then, the controller 6 executes the extension length measurement again (S42). On the other hand, if the controller 6 determines that the extension length D2 is longer than the lower limit (S43: YES), the controller 6 determines whether the extension length D2 of the bonding wire 12 is shorter than the upper limit (S45).

[0101] When the controller 6 determines that the protrusion length D2 is not shorter than the upper limit (S45: NO), that is, when the protrusion length D2 is longer than the upper limit, the controller 6 executes a retraction operation (S46). Then, the controller 6 executes protrusion length measurement again (S42). When the controller 6 determines that the protrusion length D2 is shorter than the upper limit (S45: YES), the controller 6 completes preparation for bonding.

[0102] That is, by the controller 6 executing steps S42 to S46, it is possible to obtain a protrusion length D2 that is in the range of not less than the lower limit value and not more than the upper limit value.

[0103] Next, the controller 6 forms a ball 122 at the tip of the bonding wire 12 (S47). The controller 6 moves the tip of the bonding wire 12 to a discharge area of ​​the discharge device. Then, the controller 6 operates the discharge device to form the ball 122 at the tip of the bonding wire 12. Next, the controller 6 determines whether the shape of the ball 122 satisfies predetermined conditions (S48). This determination may also be made using an image captured using the camera 41 and the optical component 43. The controller 6 obtains information about the shape of the ball 122 by analyzing the image.

[0104] When the controller 6 determines that the shape of the ball 122 does not satisfy the conditions (S48: NO), it forms the ball 122 again. Specifically, the controller 6 removes the ball 122 that does not satisfy the conditions by discard bonding (S49). Then, the controller 6 forms the ball 122 again by the discharge device. On the other hand, when the controller 6 determines that the shape of the ball 122 satisfies the conditions (S48: YES), it is ready to resume bonding. Then, the controller 6 resumes bonding (S5).

[0105] <Operation and Effect> The wire bonding apparatus 1 includes an ultrasonic horn 242, a capillary 243 detachably attached to the ultrasonic horn 242, and a capillary exchange unit 5 that exchanges a used capillary 243E for a replacement capillary 243T. The capillary exchange unit 5 has a capillary storage section 54a that stores a plurality of replacement capillaries 243T arranged in a supply direction SD perpendicular to the axis AT of the replacement capillaries 243T, and a capillary supply port 54b for removing the replacement capillaries 243T, and includes a supply module 54 that moves the replacement capillary 243T from the capillary storage section 54a to the capillary supply port 54b along the supply direction SD, and a capillary exchange module 54 that exchanges the replacement capillary 243T located at the capillary supply port 54b along the axis AT. and a transport module 52 that receives the replacement capillary 243T moved by the movement operation of the replacement module 53, and that transports the received replacement capillary 243T by moving it linearly a predetermined distance and rotating it by a predetermined angle.

[0106] The wire bonding apparatus 1 and the capillary exchange unit 5 can move the exchange capillary 243T in three ways: in the supply direction SD, along the axes AT and AE, and by rotating it by a predetermined angle. As a result, the degree of freedom in arranging the supply module 54, the replacement module 53, and the transport module 52 for the automatic capillary 243 exchange function is increased. Therefore, these modules can be arranged so that the area required for arranging the capillary exchange unit 5 is compact, and therefore the automatic capillary exchange function can be provided while suppressing an increase in size.

[0107] In the capillary replacement unit 5, a first reference line B1 overlapping the axis AE of the used capillary 243E held by the ultrasonic horn 242 and a second reference line B2 perpendicular to the first reference line B1 are defined. The transport module 52 is disposed so as to include a first intersection C1 of the first reference line B1 and the second reference line B2. The replacement module 53 is disposed adjacent to the transport module 52 along the direction of the second reference line B2. This configuration allows the replacement module 53 to be disposed next to the transport module 52.

[0108] In the capillary replacement unit 5, a first reference line B1 overlapping the axis AE of the used capillary 243E held by the ultrasonic horn 242 and a second reference line B2 perpendicular to the first reference line B1 are defined. The transport module 52 is disposed so as to include a first intersection C1 of the first reference line B1 and the second reference line B2. The supply module 54 is disposed adjacent to the transport module 52 along the direction of the second reference line B2. This configuration allows the supply module 54 to be disposed next to the transport module 52.

[0109] In the capillary replacement unit 5, a first reference line B1 overlapping the axis line AE of the used capillary 243E held by the ultrasonic horn 242, a second reference line B2 perpendicular to the first reference line B1, and a third reference line B3 parallel to the first reference line B1 and spaced apart from the first reference line B1 in the direction of the second reference line B2 are defined. The replacement module 53 is disposed so as to include the intersection of the second reference line B2 and the third reference line B3. The supply module 54 is disposed on the third reference line B3 adjacent to the replacement module 53 in the direction of the third reference line B3. This configuration allows the supply module 54 to be disposed above the replacement module 53.

[0110] In the capillary replacement unit 5, a first reference line B1 overlapping the axis line AE of the used capillary 243E held by the ultrasonic horn 242, a second reference line B2 perpendicular to the first reference line B1, and a third reference line B3 parallel to the first reference line B1 and spaced apart from the first reference line B1 in the direction of the second reference line B2 are defined. The transport module 52 is positioned to include the intersection of the first reference line B1 and the second reference line B2. The replacement module 53 is positioned to include the intersection of the second reference line B2 and the third reference line B3. The supply module 54 is positioned on the third reference line B3 adjacent to the replacement module 53 in the direction of the third reference line B3. This configuration allows the replacement module 53 to be positioned next to the transport module 52, and the supply module 54 to be positioned above the replacement module 53.

[0111] Although examples of the capillary exchange mechanism and the wire bonding apparatus according to the present invention have been described above, the capillary exchange mechanism and the wire bonding apparatus are not limited to the above-described embodiments. For example, the positional relationship between the transfer module 52, the replacement module 53, and the supply module 54 is not limited to the example shown in Fig. 8. As other examples of the positional relationship between the transfer module 52, the replacement module 53, and the supply module 54, Modifications 1 and 2 will be described.

[0112] <Modification 1> Fig. 22 schematically shows the positional relationship between the transfer module 52, the replacement module 53, and the supply module 54 in the capillary replacement unit 5A of Modification 1. As shown in Fig. 22, the transfer module 52, the replacement module 53, and the supply module 54 of the capillary replacement unit 5A of Modification 1 can also be defined by a first reference line B1, a second reference line B2, and a first intersection C1. The definitions of the first reference line B1, the second reference line B2, and the first intersection C1 are the same as those described in the embodiment.

[0113] First, the transport module 52 of the first modification is disposed so as to overlap the first reference line B1, similar to the embodiment. On the other hand, unlike the embodiment, the transport module 52 of the first modification is disposed so as not to include the first intersection C1.

[0114] Next, the replacement module 53 of Modification 1 is arranged so as to overlap the first reference line B1, unlike the embodiment. Furthermore, the replacement module 53 is arranged so as to be adjacent to the transport module 52 along the direction of the first reference line B1. Furthermore, unlike the embodiment, the replacement module 53 is arranged so as to include the first intersection C1. For example, it can be said that the replacement module 53 of Modification 1 is arranged below the transport module 52.

[0115] The supply module 54 of Modification 1 is arranged so as to overlap the second reference line B2. The axis AT of the replacement capillary 243T held by the supply module 54 of Modification 1 is parallel to the first reference line B1. In FIG. 22 , the supply module 54A1 is arranged to the right of the replacement module 53 on the paper. The supply module 54A2 may be arranged to the left of the replacement module 53 on the paper.

[0116] The movement of the replacement capillary 243T in the capillary replacement unit 5A of Modification 1 differs from that of the embodiment in the movement of the replacement capillary 243T in the transport module 52. In the embodiment, the orientation of the replacement capillary 243T received by the transport module 52 from the replacement module 53 is such that the axis AT of the replacement capillary 243T is 90 degrees relative to the first reference line B1 (Z-axis). On the other hand, in Modification 1, the orientation of the replacement capillary 243T received by the transport module 52 from the replacement module 53 is such that the axis AT of the replacement capillary 243T is 180 degrees relative to the first reference line B1 (Z-axis). The axis AT of the replacement capillary 243T being 180 degrees relative to the first reference line B1 (Z-axis) means that the axis AT of the replacement capillary 243T overlaps (is parallel to) the first reference line B1, but the orientation of the replacement capillary 243T is opposite. The tip of the capillary 233E held by the ultrasonic horn 242 faces downward. In contrast, in the first modification, the tip of the replacement capillary 243T received by the transport module 52 from the replacement module 53 faces upward.

[0117] As with the capillary replacement unit 5 of the embodiment, the capillary replacement unit 5A of the first modified example also makes it possible to make compact the area required for the operation of inserting the replacement capillary 243T into the ultrasonic horn 242.

[0118] In the capillary replacement unit 5A, a first reference line B1 is defined that overlaps the axis AE of the used capillary 243E held by the ultrasonic horn 242. The transport module 52 is disposed so as to overlap the first reference line B1. The replacement module 53 is disposed so as to overlap the first reference line B1 and to be adjacent to the transport module 52 along the direction of the first reference line B1. With this configuration, the replacement module 53 can be disposed below the transport module 52.

[0119] In the capillary replacement unit 5A, a first reference line B1 overlapping the axis line AE of the used capillary 243E held by the ultrasonic horn 242 and a second reference line B2 perpendicular to the first reference line B1 are defined. The transfer module 52 is positioned so as to overlap the first reference line B1 but not to include a first intersection C1 between the first reference line B1 and the second reference line B2. The supply module 54 is positioned so as to overlap the second reference line B2. With this configuration, the supply module 54 can be positioned below the transfer module 52.

[0120] In the capillary replacement unit 5A, a first reference line B1 overlapping the axis line AE of the used capillary 243E held by the ultrasonic horn 242 and a second reference line B2 perpendicular to the first reference line B1 are defined. The replacement module 53 is positioned to include a first intersection C1 of the first reference line B1 and the second reference line B2. The supply module 54 is positioned to overlap the second reference line B2. With this configuration, the supply module 54 can be positioned adjacent to the replacement module 53.

[0121] In the capillary replacement unit 5A, a first reference line B1 overlapping the axis AE of the used capillary 243E held by the ultrasonic horn 242 and a second reference line B2 perpendicular to the first reference line B1 are defined. The transport module 52 is positioned so as to overlap the first reference line B1 but not to include a first intersection C1 between the first reference line B1 and the second reference line B2. The replacement module 53 is positioned so as to include a second intersection C2 between the first reference line B1 and the second reference line B2. The supply module 54 is positioned so as to overlap the second reference line B2. With this configuration, the replacement module 53 can be positioned below the transport module 52, and the supply module 54 can be positioned next to the replacement module 53.

[0122] <Modification 2> In the capillary replacement unit 5 of the embodiment, the transport module 52, the replacement module 53, and the supply module 54 are arranged on a so-called YZ plane. As in the capillary replacement unit 5B of Modification 2 shown in FIG. 23 , the transport module 52, the replacement module 53, and the supply module 54 may be arranged on a so-called XZ plane. With this configuration, the area required for the operation of inserting the replacement capillary 243T into the ultrasonic horn 242 can be made compact, as with the capillary replacement unit 5 of the embodiment. Furthermore, the capillary replacement unit 5B of Modification 2 has multiple (four in the example of FIG. 23 ) replacement modules 53 and supply modules 54. Each of the four supply modules 54 may hold a replacement capillary 243T of the same type. In this case, the number of times an empty supply module 54 is replaced with a new supply module 54 filled with a replacement capillary 243T can be reduced. Furthermore, the four supply modules 54 may each hold a different type of replacement capillary 243T. The bonding mode required for the wire bonding apparatus may differ for each semiconductor chip 11. Furthermore, even on the same semiconductor chip 11, the bonding mode may differ depending on the location. When different types of replacement capillaries 243T are held in the four supply modules 54, an appropriate replacement capillary 243T can be inserted into the ultrasonic horn 242 depending on the required bonding mode.

[0123] 1...wire bonding apparatus, 5...capillary exchange unit (capillary exchange mechanism), 41...camera, 52...transport module, 52S...exchange position, 52E...replacement position, 53...replacement module, 122...ball, 242...ultrasonic horn (horn), 243...capillary, 243E...used capillary, 243h...capillary through-hole, 243T...replacement capillary, AE, AT...axis.

Claims

1. A supply module having a storage section that stores a plurality of replacement capillaries arranged in a supply direction perpendicular to the axis of the replacement capillary and a capillary supply port for removing the replacement capillary, and that moves the replacement capillary from the storage section to the capillary supply port along the supply direction; a replacement module having a moving member that moves relative to the storage section while holding the replacement capillary, and that performs an operation of removing the replacement capillary from the capillary supply port by the moving member that moves along the axis relative to the storage section, and an operation of moving the replacement capillary removed by the removing operation along the axis by the moving member; and a transport module that performs an operation of receiving the replacement capillary moved by the moving operation of the replacement module, and a transport operation of linearly moving the received replacement capillary a predetermined distance and rotating it by a predetermined angle, wherein the transport module moves a used capillary from a first position to a second position, The moving member moves along the axis to pull out the used capillary at the second position from the transport module.

2. The capillary exchange mechanism of claim 1, wherein a first reference line overlapping an axis of a used capillary held by a horn and a second reference line perpendicular to the first reference line are defined, the transport module is positioned to include an intersection of the first reference line and the second reference line, and the replacement module is positioned adjacent to the transport module along the direction of the second reference line.

3. The capillary exchange mechanism of claim 1, wherein a first reference line overlapping an axis of a used capillary held by the horn and a second reference line perpendicular to the first reference line are defined, the transport module is positioned to include an intersection of the first reference line and the second reference line, and the supply module is positioned adjacent to the transport module along the direction of the second reference line.

4. The capillary exchange mechanism of claim 1, further comprising: a first reference line overlapping an axis of a used capillary held by the horn; a second reference line perpendicular to the first reference line; and a third reference line parallel to the first reference line and spaced apart from the first reference line in the direction of the second reference line; the replacement module is positioned to include an intersection of the second reference line and the third reference line; and the supply module is positioned on the third reference line adjacent to the replacement module along the direction of the third reference line.

5. A capillary exchange mechanism as described in claim 1, wherein a first reference line overlapping with the axis of a used capillary held by a horn, a second reference line perpendicular to the first reference line, and a third reference line parallel to the first reference line and spaced apart from the first reference line in the direction of the second reference line are defined, the transport module is positioned so as to include an intersection of the first reference line and the second reference line, the replacement module is positioned so as to include an intersection of the second reference line and the third reference line, and the supply module is positioned on the third reference line adjacent to the replacement module along the direction of the third reference line.

6. The capillary exchange mechanism of claim 1, wherein a first reference line is defined that overlaps with an axis of a used capillary held by the horn, the transport module is positioned so as to overlap with the first reference line, and the replacement module is positioned so as to overlap with the first reference line and adjacent to the transport module along the direction of the first reference line.

7. A capillary exchange mechanism as described in claim 1, wherein a first reference line overlapping an axis of a used capillary held by a horn and a second reference line perpendicular to the first reference line are defined, the transport module is positioned so as to overlap the first reference line but not include an intersection of the first reference line and the second reference line, and the supply module is positioned so as to overlap the second reference line.

8. The capillary exchange mechanism of claim 1, wherein a first reference line overlapping an axis of a used capillary held by the horn and a second reference line perpendicular to the first reference line are defined, the replacement module is positioned to include an intersection of the first reference line and the second reference line, and the supply module is positioned to overlap the second reference line.

9. The capillary exchange mechanism of claim 1, wherein a first reference line overlapping an axis of a used capillary held by a horn and a second reference line perpendicular to the first reference line are defined, the transport module is positioned so as to overlap the first reference line but not include an intersection of the first reference line and the second reference line, the replacement module is positioned so as to include an intersection of the first reference line and the second reference line, and the supply module is positioned so as to overlap the second reference line.

10. A capillary exchange mechanism comprising: a horn; a capillary detachably attached to the horn; and a capillary exchange mechanism for exchanging the used capillary for a replacement capillary, the capillary exchange mechanism comprising: a storage section for storing a plurality of replacement capillaries arranged in a supply direction perpendicular to an axis of the replacement capillary, and a capillary supply port for removing the replacement capillary, and a supply module for moving the replacement capillary from the storage section to the capillary supply port along the supply direction; a replacement module having a moving member that moves relative to the storage section while holding the replacement capillary, the replacement capillary being removed from the capillary supply port by the moving member that moves along the axis relative to the storage section, and a replacement module for moving the replacement capillary removed by the removal operation along the axis by the moving member; a transfer module that performs an operation of receiving the replacement capillary moved by the moving operation of the replacement module, and a transfer operation of linearly moving the received replacement capillary a predetermined distance and rotating it by a predetermined angle, wherein the transfer module moves a used capillary from a first position to a second position, and the moving member moves along the axis to pull out the used capillary present at the second position from the transfer module.

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