2d conversion lens array structure and optical scanning device

Abstract

An optical scanning device according to the present invention comprises: a light source; a vertical division lens array for vertically distributing light emitted from the light source; and a detector for detecting vertically distributed beams of light generated from the vertical division lens array and reflected off an object. The beams of light may be 2D-converted through vertical light division to perform a real-time optical scan.

Description

2D transformation lens array structure and optical scanning device

[0001] The present invention relates to a 2D transformation lens array structure and an optical scanning device.

[0002]

[0003] For example, LiDAR (Light Detection And Ranging) sensors are radar systems that measure the positional coordinates of a reflector by measuring the time it takes for laser light to be reflected and returned. LiDAR sensors are used in a variety of devices, including automobiles, robots, and drones. Recently, LiDAR sensors have been installed on aircraft and satellites for topographic surveying, and are also being utilized in speed guns, autonomous mobile robots, and self-driving cars.

[0004] LiDAR sensors can generate information about objects based on the time-of-flight (ToF) measurement of light. For example, a LiDAR sensor transmits light toward an object and receives it back through the sensor, measuring the time-of-flight using high-speed electrical circuits. The LiDAR sensor then calculates the distance to the object from the time-of-flight and, using the calculated distance for each position of the object, generates additional information about the object.

[0005] However, when measuring using the ToF method, information on speed is not produced in real time, and if the emitted laser pulse is weakened by an atmospheric environment such as fog, the measurement intensity and measurement sensitivity may decrease.

[0006] For optical scanning, the transmitted light can be split into phased arrays. However, even with the phased array splitting, sufficiently high-precision position / velocity information may not be generated.

[0007] For example, Korean Patent Publication No. 10-2020-0127364 discloses a ToF type lidar sensor.

[0008]

[0009] One object of the present invention is to provide a 2D transformation lens array structure having improved precision and reliability.

[0010] An object of the present invention is to provide an optical scanning device having improved precision and reliability.

[0011]

[0012] 1. An optical scanning device comprising: a light source; a vertically split lens array that vertically distributes light emitted from the light source; and a detector that detects light reflected from an object by vertically distributed light generated from the vertically split lens array.

[0013] 2. An optical scanning device according to the above 1, further comprising a horizontal splitting device disposed between the light source and the vertical splitting lens array to generate horizontally split lights.

[0014] 3. In the above 2, the horizontal division device is an optical scanning device including an optical phased array (OPA) element.

[0015] 4. In the above 3, the OPA element is an optical scanning device including horizontal distribution optical paths including detection distribution optical paths that generate target lights and reference distribution optical paths that generate reference lights.

[0016] 5. In the above 4, the optical scanning device includes a first detector that detects the target lights reflected from the object and a second detector that detects the reference light.

[0017] 6. In the above 5, the optical scanning device, wherein the first detector is a single detector that continuously detects the target lights.

[0018] 7. In the above 2, the optical scanning device, wherein the vertical split lens array includes individual lenses corresponding to each of the split lights.

[0019] 8. In the above 7, the individual lenses have different refractive angles, an optical scanning device.

[0020] 9. An optical scanning device according to the above 1, wherein the vertical split lens array includes a plurality of column shift groups, each of which includes a predetermined number of individual lenses.

[0021] 10. An optical scanning device according to the above 2, further comprising a first lens structure disposed between the horizontal division device and the vertical division lens array to provide horizontal point division.

[0022] 11. An optical scanning device according to the above 10, further comprising a second lens structure arranged between the vertical split lens array and the target object to perform position-specific correction.

[0023] 12. An optical scanning device according to the above 2, further comprising an amplifier disposed between the light source and the horizontal splitting device.

[0024] 13. An optical scanning device in the above 2, wherein the vertically distributed lights generated by the vertically divided lens array are distributed to different positions in a zigzag direction on a two-dimensional plane.

[0025] 14. In the above 1, the light source is an optical scanning device that emits light in the wavelength range of 1500 nm to 2000 nm.

[0026] 15. A 2D transformation lens array structure comprising a lens substrate; and lenses arranged in a row direction on the lens substrate and having different refractive angles.

[0027] 16. In the above 15, the lenses form a 2D transformation lens array structure that distributes horizontally divided light into a plurality of columns.

[0028] 17. A 2D transformation lens array structure in which vertically distributed lights are generated at different positions in a zigzag direction on a two-dimensional plane through the lenses in the above 16.

[0029] 18. In the above 15, the lens substrate includes a first substrate and a second substrate,

[0030] A 2D transformation lens array structure, wherein the lenses include a micro lens array arranged on the first substrate and a micro prism array arranged on the second substrate.

[0031] 19. In the above 15, the lenses are a 2D transformation lens array structure including composite lenses in which micro lenses and micro prism structures are integrated.

[0032] 20. In the above 15, the lenses are a 2D transformation lens array structure including interference patterns including Fresnel lenses.

[0033]

[0034] A 2D transformation lens array structure according to embodiments of the present invention may include a plurality of lenses arranged in a horizontal direction, each having a different refractive angle. Light split in the horizontal direction through the lens array is distributed in a vertical direction, so that a position can be assigned to each wavelength of light on a two-dimensional plane. Accordingly, continuous optical scanning can be implemented through a sensor including the lens array, while increasing the signal processing speed.

[0035] According to embodiments of the present invention, the 2D transformation lens array structure can be applied to an optical scanning device such as a lidar sensor. The optical scanning device can include the 2D transformation lens array structure as a horizontal light splitting device and a vertical light splitting device. Transmission light beams horizontally split by the horizontal light splitting device can be finely split again by the vertical light splitting device. Accordingly, the precision and resolution of measurement information of an object can be improved, and velocity information of the object can be scanned and collected in real time.

[0036] For example, light that has been horizontally split through the horizontal splitting device and lens can be vertically split through the 2D transformation lens array structure. Accordingly, position / velocity information of an object can be detected even with a single detector through optical scanning.

[0037] For example, mechanical beam splitting devices such as separate motors or rotors can be eliminated, thereby avoiding inaccuracies in beam scanning caused by vibration or shock of the mechanical beam splitting device. In addition, optical efficiency can be improved by employing a lens as a vertical beam splitting device.

[0038] The above lidar sensor can be provided as an FMCW type sensor, and can suppress the deterioration of precision due to external light / external environment (snow, rain, fog, etc.) and provide position sensing that is harmless to the human body (e.g., the naked eye).

[0039]

[0040] FIG. 1 is a schematic cross-sectional view illustrating a 2D transformation lens array structure according to exemplary embodiments.

[0041] FIGS. 2 and 3 are schematic cross-sectional views illustrating a 2D transformation lens array structure according to some exemplary embodiments.

[0042] FIG. 4 is a schematic block diagram illustrating an optical scanning device according to exemplary embodiments.

[0043] FIG. 5 is a schematic block diagram illustrating an optical scanning device according to exemplary embodiments.

[0044] FIG. 6 is a schematic perspective view showing a horizontal splitting device according to exemplary embodiments.

[0045] FIG. 7 is a schematic diagram illustrating a light splitting mechanism by an optical scanning device according to exemplary embodiments.

[0046] FIG. 8 is a cross-sectional view illustrating a second lens structure according to exemplary embodiments.

[0047]

[0048]

[0049] Embodiments of the present invention provide a 2D transformation lens array structure including a plurality of lenses. Embodiments of the present invention provide an optical scanning device including a light source, a light splitting device, and a detector.

[0050] Hereinafter, embodiments of the present invention will be described in more detail with reference to the drawings. However, the following drawings attached to this specification illustrate preferred embodiments of the present invention and, together with the contents of the invention described above, serve to further understand the technical concept of the present invention. Therefore, the present invention should not be interpreted as being limited to the matters described in such drawings.

[0051] The terms “first,” “second,” “top,” “bottom,” “upper,” and “lower” used in this specification do not limit absolute positions or orders, but are used in a relative sense to distinguish different components or parts.

[0052] The term "row direction" as used in this application may refer to a horizontal direction, and the term "column direction" may refer to a vertical direction perpendicular to the row direction. A two-dimensional (2D) plane may be defined by the row direction and the column direction.

[0053] FIG. 1 is a schematic cross-sectional view illustrating a 2D transformation lens array structure according to exemplary embodiments.

[0054] Referring to FIG. 1, a 2D transformation lens array structure (50) (hereinafter, may be abbreviated as a lens array structure) may include a lens substrate (55) and lenses (60) arranged on the lens substrate (55).

[0055] The lens substrate (55) may include a transparent material such as glass, quartz, transparent resin, transparent ceramic, etc. For example, a plurality of lenses (60) may protrude convexly from the lens substrate (55) and form an array in the form of an embossed pattern.

[0056] According to exemplary embodiments, a plurality of lenses (60) may be arranged in a row direction or a horizontal direction to form a single row lens array.

[0057] The lens array may include a plurality of heat shift groups. In some embodiments, each of the heat shift groups may include a plurality of lenses (60).

[0058] For example, as illustrated in FIG. 1, the lens array may include a first row shift group (60a), a second row shift group (60b), and a third row shift group (60c).

[0059] The lenses (60) included in the first column shift group (60a) can each shift different horizontally split lights in the column direction and position them in the same row. For example, different horizontally split lights can be positioned in the first row by the first column shift group (60a).

[0060] The lenses (60) included in the second column shift group (60b) can each shift different horizontally split lights in the column direction and position them in the same row. For example, different horizontally split lights can be positioned in the second row shifted in the column direction with respect to the first row by the second column shift group (60b).

[0061] The lenses (60) included in the third column shift group (60c) can each shift different horizontally split lights in the column direction and position them in the same row. For example, different horizontally split lights can be positioned in the third row shifted in the column direction with respect to the first and second rows by the third column shift group (60c).

[0062] As described above, in the embodiment illustrated in FIG. 1, each of the nine lenses (60) can shift individual horizontally split lights in the column direction and two-dimensionally disperse the nine horizontally split lights into three rows. Accordingly, the nine lights can be irradiated to different locations in a two-dimensional plane.

[0063] According to exemplary embodiments, the positions of nine individual lights can be assigned in a zigzag manner along the thermal direction to enable continuous optical scanning of the object.

[0064] Therefore, information on the location, distance, speed, etc. of the target object can be easily collected practically in real time, and the detection speed can also be significantly increased.

[0065] The number of lenses (60), the number of heat shift groups, and the number of individual lights illustrated in Fig. 1 are described as examples, and can be appropriately adjusted in consideration of the measurement target and the detection performance of the sensor.

[0066] The lenses (60) may have different refractive angles. In some embodiments, the refractive angles of all lenses (60) included in the lens array structure (50) may be different.

[0067] In one embodiment, the lenses (60) may be formed of the same material, have different shapes (different sizes or curvatures, as illustrated in FIG. 1), and have different refractive angles. In one embodiment, the lenses (60) may be formed of different materials and have different refractive indices.

[0068] FIGS. 2 and 3 are schematic cross-sectional views illustrating a 2D transformation lens array structure according to some exemplary embodiments. For convenience of illustration, only three lenses or three prism structures are illustrated in FIGS. 2 and 3 , but the number of lenses or prisms may be expanded. The shapes of the lenses / prisms illustrated in FIGS. 2 and 3 are exemplary, and the contents of the present disclosure are not limited thereto.

[0069] Referring to FIG. 2, the lens array structure may include a microlens array and a microprism (e.g., micropyramid) array together.

[0070] For example, at least one of the microlens array and the microprism array can provide different refractive angles.

[0071] The above micro lens array may include a first substrate (55a) and sub-lenses (63) arranged on the first substrate (55a). The above micro prism array may include a second substrate (55b) and prism structures (or pyramid structures) (65) arranged on the second substrate (55b).

[0072] For example, a single lens can be defined by a sub-lens (64) and a prism structure (65) that overlap each other in the direction of light propagation, and a plurality of lenses can provide different refractive angles.

[0073] In one embodiment, the horizontally split light beams can sequentially pass through the micro lens array and the micro prism array. Even when the sub-lenses (63) have the same shape (e.g., provide the same angle of refraction), the horizontally split light beams can be thermally shifted through the micro prism array at different angles of refraction as described above.

[0074] In one embodiment, the horizontally split lights may sequentially pass through the micro-prism array and the micro-lens array.

[0075] Referring to FIG. 3, composite lenses (67) in which lens and prism structures are integrated with each other can be arranged on a lens substrate (55) to form a lens array structure. Each of the composite lenses (67) has a different shape depending on the incorporation of the prism structures and can provide different refractive angles.

[0076] The lens array structure (50) may include an array of interference patterns or diffraction patterns using Fresnel lenses. In one embodiment, the lens array structure (50) may be formed using a meta-lens.

[0077] FIG. 4 is a schematic block diagram illustrating an optical scanning device according to exemplary embodiments.

[0078] The term "optical scanning device" as used in this application is used as a comprehensive term for a sensor that illuminates a target object with light and detects information about the target object through the reflected light. According to exemplary embodiments, the optical scanning device may include, but is not limited to, a lidar sensor.

[0079] Hereinafter, an optical scanning device and a measurement method using the same will be described with reference to FIGS. 4 to 7.

[0080] Referring to FIG. 4, the optical scanning device (100) may include a light source (110) and a vertical split lens array (140). The optical scanning device (100) may further include a horizontal split device (130) disposed between the light source (110) and the vertical split lens array (140).

[0081] According to exemplary embodiments, the light source (110) may be a device that irradiates light in the infrared region. By using light in the infrared region, mixing with natural light, including, for example, visible light, can be prevented. However, the light transmitted from the light source (110) is not limited to infrared, and light of multiple different wavelength bands may be emitted simultaneously.

[0082] In some embodiments, the wavelength of light emitted from the light source (110) may be between 1500 nm and 2000 nm. In one embodiment, the wavelength may be between 1520 nm and 1580 nm, or between 1520 nm and 1560 nm. In this wavelength range, the deterioration of detection performance due to light scattering can be prevented while reducing the harmfulness to the human eye.

[0083] According to exemplary embodiments, continuous light can be irradiated from a light source (110).

[0084] In some embodiments, the light source (110) may include a laser light source. For example, the light source (110) may include an edge emitting laser, a vertical-cavity surface emitting laser (VCSEL), a distributed feedback laser, a laser diode, or the like.

[0085] In some embodiments, the transmitted light generated from the light source (110) may be amplified by the amplifier (120). Accordingly, the intensity of the transmitted light is increased, and the intensity of the received light is prevented from being weakened while passing through the light splitting devices described below.

[0086] The light transmitted from the light source (110) or the light amplified through the amplifier (120) can be split by a light splitting device. According to exemplary embodiments, the light splitting device can include a horizontal splitting device (130) and a vertical splitting lens array (140). The horizontal splitting device (130) and the vertical splitting lens array (140) can be sequentially arranged from the light source (110).

[0087] The transmitted light from the light source (110) or the light amplified through the amplifier (120) can be split into a plurality of horizontal lights through the horizontal splitting device (130). For example, the transmitted light from the light source (110) can generate a plurality of horizontally split lights having an angular difference or a phase difference in the X-direction (row direction) plane.

[0088] According to exemplary embodiments, the horizontal segmentation device (130) may include an optical phased array (OPA) element. The configuration / structure of the horizontal segmentation device (130) including the OPA element is described in more detail below with reference to FIG. 6.

[0089] Lights horizontally divided by the horizontal division device (130) can be vertically divided / distributed by the vertical division lens array (140). For example, the horizontally divided lights can be given an angular difference in the y-axis direction by the vertical division lens array (140). Accordingly, light transmitted from the light source (110) can be dispersed in the horizontal direction and then dispersed in the vertical direction to generate vertically distributed lights. Accordingly, the transmitted lights can have two-dimensionally different phases or positions, and the identification characteristics of each light can be enhanced.

[0090] According to embodiments of the present invention, a 2D transformation lens array structure (50) described with reference to FIGS. 1 to 3 may be applied as a vertical split lens array (140).

[0091] As described above, the transmitted light can be split / dispersed into different positions in a two-dimensional plane through the light splitting device and can be continuously incident on the target object (160). The light reflected by the target object (160) can be input to the detector (170). The received light can be converted into an electrical signal by the detector (170). For example, a current can be output by the detector (170).

[0092] In exemplary embodiments, the detector (170) may include at least one pixel. For example, the detector (170) may include a plurality of pixels arranged in an array or matrix form. Each of the pixels may function as a light-receiving element and output an electrical signal, such as a current, corresponding to the reflected light. Information, such as the direction or position of the target object (160), may be generated based on the position of the pixel that detected the corresponding light among the pixels.

[0093] For example, the distance to the target object (160) can be calculated based on the light emission time of the light source (110) and the light detection time of the detector (170).

[0094] The above pixel may be a photodetector that operates under an applied bias voltage. For example, the detector (170) may include an avalanche photodiode (APD) or a single photon avalanche diode (SPAD).

[0095] The electrical signal generated from the detector (170) can be processed and calculated through the processor (180). For example, the processor (180) can determine location information about the target object (160) using the detection result of the detector (170). The location information about the target object (160) can include at least one of the direction, height, and distance of the target object (160).

[0096] Additionally, as described below, real-time positional changes of the object (160) can be detected through continuous optical scanning. Accordingly, velocity information can be derived together with positional information of the object (160).

[0097] The processor (180) may also control the operation of the light source (110). For example, the light emission operation may be controlled through the processor (180).

[0098] The optical scanning device (100) may further include a lens structure. According to exemplary embodiments, the lens structure may include a first lens structure (150a) disposed between the horizontal split device (130) and the vertical split lens array (140), and a second lens structure (150b) disposed between the vertical split lens array (140) and the target (160).

[0099] The operation and structure of the first lens structure (150a) and the second lens structure (150b) will be described in more detail later with reference to FIGS. 7 and 8.

[0100] The light source (110) and the amplifier (120) are connected to each other through a first optical path (LP1), and the amplifier (120) and the horizontal splitter (130) can be connected to each other through a second optical path (LP2). The optical paths (LP1, LP2) are formed of optical fibers and can suppress optical transmission loss.

[0101] Fig. 5 is a schematic block diagram illustrating an optical scanning device according to exemplary embodiments. Detailed descriptions of configurations and operations substantially the same as or similar to those described with reference to Fig. 4 are omitted.

[0102] Referring to FIG. 5, as described later with reference to FIG. 6, the horizontal distribution light paths (135) included in the horizontal division device (130) may include detection distribution light paths (134) and reference distribution light paths (136). Reference light may be generated through the reference distribution light path (136), and target light may be generated through the detection distribution light paths (134).

[0103] The detector (170) may include a first detector (173) and a second detector (175). The reference light generated through the reference distribution optical path (136) may be directly introduced into the second detector (175). The target light generated through the detection distribution optical paths (134) may be vertically divided through the vertical division lens array (140) and then reflected by the target object (160) and introduced into the first detector (173).

[0104] The above target lights can be more clearly identified based on the reference light recognized through the second detector (175). In addition, the location information of the object (160) can be processed / generated in high resolution through the target signal generated by the target lights based on the reference signal generated by the reference light through the processor (180).

[0105] According to exemplary embodiments, the first detector (173) may be a single detector that continuously detects the target lights.

[0106] FIG. 6 is a schematic perspective view showing a horizontal splitting device according to exemplary embodiments.

[0107] Referring to FIG. 6, as described above, the horizontal splitting device (130) may include an OPA element. The horizontal splitting device (130) may include a substrate (131) and horizontal distribution optical paths (e.g., waveguides) (135) formed on the upper surface of the substrate (131).

[0108] For example, light emitted from a light source (110) may be input to an optical input unit (132) included in a horizontal splitter (130) via an amplifier (120). The input light may be input to horizontal distribution optical paths (135) via a splitter included in a branching area of ​​the horizontal distribution optical paths (135). The splitter may have, for example, an MMI (multimode interference) structure.

[0109] Light input into each of the horizontal distribution optical paths (135) can be converted to have different phases by a phase modulator. The phase modulator can be included in each of the horizontal distribution optical paths (135) and can perform light modulation through electrical, magnetic, thermal, mechanical, etc. methods.

[0110] In some embodiments, the horizontal distribution light paths (135) may include detection distribution light paths (134) and reference distribution light paths (136). Reference light may be generated through the reference distribution light path (136), and target light may be generated through the detection distribution light paths (134).

[0111] For example, a reference signal corresponding to the reference light and a target signal corresponding to the target light can be generated through the processor (180). Using the correlation between the reference signal and the target signal, location information of the object (160) can be generated with high reliability. In addition, the identification of the target light can be increased through the reference light.

[0112] The horizontal splitting device (130) may include a transparent material capable of suppressing light loss. For example, the horizontal splitting device (130) may include Si, Ge, SiGe, or an oxide or nitride thereof.

[0113] FIG. 7 is a schematic diagram illustrating a light splitting mechanism by an optical scanning device according to exemplary embodiments.

[0114] Referring to FIG. 7, the horizontally split lights in the horizontal splitting device (130) described with reference to FIG. 6 have a wide angle increased through the first lens structure (150a), and can be beam formed in a substantially point splitting manner.

[0115] In one embodiment, the first lens structure (150a) may be in contact with the horizontal splitting device (130). In one embodiment, the first lens structure (150a) may be disposed spaced apart from the horizontal splitting device (130).

[0116] In the example illustrated in FIG. 7, nine split lights (first to ninth split lights (λ1 to λ9)) having different wavelengths can be generated in rows in the X direction through the horizontal split device (130) and the first lens structure (150a). Each of the split lights can be 2D converted through the vertical split lens array (140).

[0117] As a vertical split lens array (140), a 2D transformation lens array structure (50) described in FIGS. 1 to 3 can be employed.

[0118] The vertical split lens array (140) may include lenses (60) having different refractive angles. The first to ninth split lights (λ1 to λ9) may be incident on one lens (60) of the vertical split lens array (140), respectively, and may be refracted in the Y direction and vertically split.

[0119] The first to third split lights (λ1, λ2, λ3) can be shifted by the first column so as to be positioned in the same first row. The fourth to sixth split lights (λ4, λ5, λ6) can be shifted by the second column so as to be positioned in the same second row. The seventh to ninth split lights (λ7, λ8, λ9) can be shifted by the third column so as to be positioned in the same third row.

[0120] Accordingly, the split lights can be matched to a 2D plane so that optical scanning is performed in a zigzag path along the first row, the second row, and the third row sequentially from λ1 to λ9.

[0121] According to the exemplary embodiments described above, by combining the horizontal segmentation device (130) and the vertical segmentation lens array (140), two-dimensional or three-dimensional optical scanning can be practically implemented. Accordingly, positional information, including the distance and height of the target object (160), can be calculated with higher precision.

[0122] Additionally, vertical segmentation using mechanical elements such as motors or rotors can be eliminated. As described above, a lens array, which is an optical element, can be employed as a vertical segmentation device, thereby reducing or suppressing detection errors caused by vibration and shock.

[0123] Vertical light splitting having substantially point-split characteristics can be realized through the vertical split lens array (140). For example, light passing through the horizontal split device (130) can be horizontally point-split through the first lens structure (150a). The horizontally point-split light can be vertically point-split through the vertical split lens array (140).

[0124] Accordingly, practical continuous real-time optical scanning can be implemented with a single detector for target lights, and a Frequency Modulated Continuous Wave (FMCW) type lidar sensor can be implemented.

[0125] For example, in a TOF (Time of Flight) type lidar sensor based on a single optical pulse, the sensing sensitivity may decrease due to the weakening of the optical pulse depending on the atmospheric environment. However, according to exemplary embodiments, the sensing sensitivity can be effectively maintained through continuous optical scanning, and information on the speed of the target object (160) can be calculated in real time based on continuous measurements.

[0126] In some embodiments, the TOF type lidar sensor can also be implemented using the above-described optical scanning device or 2D conversion lens array structure.

[0127] Additionally, vertical splitting is implemented using optical elements that do not require a separate power supply, thereby improving light / power efficiency.

[0128] FIG. 8 is a cross-sectional view illustrating a second lens structure according to exemplary embodiments.

[0129] Referring to FIG. 8, the second lens structure (150b) may include a base portion (80) and lens portions (90) formed on the base portion (80). For example, a plurality of lens portions (90) may protrude convexly from the base portion (80) and form an array in the form of an embossed pattern.

[0130] According to exemplary embodiments, a plurality of lens elements (90) may be arranged in a horizontal direction (e.g., in the X direction) to form a lens row. For example, the lens elements (90) may form a micro lens array.

[0131] The second lens structure (150b) may be provided as a position-specific correction lens. Each of the lens units (90) included in the second lens structure (150b) may correspond to each of the lenses (60) included in the vertically divided lens array (140). For example, the lens units (90) included in the second lens structure (150b) and the lenses (60) included in the vertically divided lens array (140) may be matched 1:1.

[0132] The second lens structure (150b) can additionally provide a wide angle to the light passing through the vertically split lens array (140). In addition, the intensity and area of ​​the light can be uniformly adjusted, making it easy to implement a substantially uniform 2D scan.

[0133] Additionally, the light collection characteristics toward the target object (160) can be improved through the second lens structure (150b). Accordingly, the detection intensity through the detector (170) can be improved while additionally increasing the intensity of reflected light.

Claims

1. Light source; A vertical split lens array that distributes light emitted from the light source in a vertical direction; and An optical scanning device comprising a detector for detecting light reflected from a target object by vertically distributed light generated from the vertically divided lens array.

2. An optical scanning device according to claim 1, further comprising a horizontal splitting device disposed between the light source and the vertical splitting lens array to generate horizontally split lights.

3. An optical scanning device according to claim 2, wherein the horizontal segmentation device includes an optical phased array (OPA) element.

4. An optical scanning device according to claim 3, wherein the OPA element includes horizontal distribution optical paths including detection distribution optical paths that generate target lights and reference distribution optical paths that generate reference lights.

5. An optical scanning device according to claim 4, wherein the detector comprises a first detector for detecting the target lights reflected from the object and a second detector for detecting the reference light.

6. An optical scanning device according to claim 5, wherein the first detector is a single detector that continuously detects the target lights.

7. An optical scanning device according to claim 2, wherein the vertical split lens array includes individual lenses corresponding to each of the split lights.

8. An optical scanning device according to claim 7, wherein the individual lenses have different refractive angles.

9. An optical scanning device according to claim 1, wherein the vertically split lens array comprises a plurality of column shift groups, each of which includes a predetermined number of individual lenses.

10. An optical scanning device according to claim 2, further comprising a first lens structure disposed between the horizontal splitting device and the vertical splitting lens array to provide horizontal point splitting.

11. An optical scanning device according to claim 10, further comprising a second lens structure disposed between the vertically split lens array and the target object to perform positional correction.

12. An optical scanning device according to claim 2, further comprising an amplifier disposed between the light source and the horizontal splitting device.

13. An optical scanning device according to claim 2, wherein the vertically distributed light rays generated by the vertically divided lens array are distributed to different positions in a zigzag direction in a two-dimensional plane.

14. An optical scanning device according to claim 1, wherein the light source emits light in a wavelength range of 1500 nm to 2000 nm.

15. Lens material; and A 2D transformation lens array structure comprising lenses arranged in a row direction on the above lens substrate and having different refractive angles.

16. A 2D transformation lens array structure according to claim 15, wherein the lenses form column shift groups that distribute horizontally split light beams into a plurality of columns.

17. A 2D transformation lens array structure according to claim 16, wherein vertically distributed light beams are generated at different positions in a zigzag direction in a two-dimensional plane through the lenses.

18. In claim 15, the lens substrate includes a first substrate and a second substrate, A 2D transformation lens array structure, wherein the lenses include a micro lens array arranged on the first substrate and a micro prism array arranged on the second substrate.

19. A 2D transformation lens array structure according to claim 15, wherein the lenses include composite lenses in which micro lenses and micro prism structures are integrated.

20. A 2D transformation lens array structure according to claim 15, wherein the lenses include interference patterns including Fresnel lenses.

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