Inverter switching circuit and class-e fixed-frequency power amplifying and parallel driving system of radio frequency power supply

Abstract

The present application relates to the field of radio frequency technology, and to an inverter switching circuit and a class-E fixed-frequency power amplifying and parallel driving system of a radio frequency power supply, for use in solving the problems that tube breakdown is easily caused by a push-pull inverter, etc. In the circuit, first and second square wave direct current sources are respectively inputted to a non-dotted terminal and a dotted terminal of a primary coil of a transformer; the first and second square wave direct current sources are alternately at high level; dotted terminals of first and second secondary coils of the transformer are respectively connected to input ends of a first clamping anti-backflow module and a second clamping anti-backflow module, and output ends of the first clamping anti-backflow module and the second clamping anti-backflow module are respectively connected to gates of a first switch tube and a second switch tube; drains of the first switch tube and the second switch tube are connected to serve as a switching signal output end of the inverter switching circuit; non-dotted terminals of the first and second secondary coils are grounded; clamping ends of the first clamping anti-backflow module and the second clamping anti-backflow module are grounded; and sources of the first switch tube and the second switch tube are grounded.

Description

Inverter switching circuit, RF power supply, Class E fixed frequency power amplifier parallel drive system Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to an inverter switching circuit and a Class E fixed-frequency power amplifier parallel drive system for a radio frequency power supply. Background Art

[0002] The existing push-pull inverter parallel output drive circuit utilizes the fixed-frequency working characteristics of the inverter drive circuit and combines it with the BUS to provide a constant DC. Through the fixed-frequency characteristics of the switching tube inverter circuit and the combined characteristics of parallel connection to form power amplification, it provides a fixed-frequency, high-power RF power output.

[0003] The upper and lower potential points of the output of a push-pull inverter are usually connected to the BUS potential, but this is often subject to the performance of the switch tube components. If the pressure resistance of the push-pull switch tube is insufficient, it can easily cause the tube to break down, electronic components to explode, and circuit burnout.

[0004] Summary of the Invention

[0005] In view of the above analysis, the embodiments of the present application aim to provide an inverter switching circuit, a Class E fixed-frequency power amplifier parallel drive system for a radio frequency power supply, and to solve the problems of tube breakdown and electronic device explosion easily caused by existing push-pull inverters.

[0006] On the one hand, the present application discloses an inverter switching circuit, which includes a transformer, a first switching tube, a second switching tube, a first embedded anti-backflow module and a second embedded anti-backflow module; wherein,

[0007] The first square wave DC source and the second square wave DC source are respectively input to the opposite-name terminal and the same-name terminal of the primary coil of the transformer; the first square wave DC source and the second square wave DC source are alternately high level;

[0008] The same-name ends of the first secondary coil and the second secondary coil of the transformer are respectively connected to the input ends of the first embedded anti-backcurrent module and the second embedded anti-backcurrent module, and the output ends of the first embedded anti-backcurrent module and the second embedded anti-backcurrent module are respectively connected to the gates of the first switching tube and the second switching tube; the drains of the first switching tube and the second switching tube are connected as the switching signal output end of the inverter switching circuit;

[0009] The opposite-name ends of the first secondary coil and the second secondary coil are both grounded; the clamping ends of the first clamping anti-backflow module and the second clamping anti-backflow module are both grounded; and the sources of the first switching tube and the second switching tube are both grounded.

[0010] Based on the above solution, this application also makes the following improvements:

[0011] Furthermore, the first embedded anti-backflow module and the second embedded anti-backflow module have the same structure, both including a first diode, a third switch tube and a first resistor; wherein,

[0012] The gate of the third switch tube is connected to the anode of the first diode, the source of the third switch tube is connected to the cathode of the first diode, and the drain of the third switch tube is connected to one end of the first resistor;

[0013] The other end of the first resistor is used as the embedding end of the first embedding anti-backcurrent module or the second embedding anti-backcurrent module; the gate of the third switching tube is used as the input end of the first embedding anti-backcurrent module or the second embedding anti-backcurrent module; and the source of the third switching tube is used as the output end of the first embedding anti-backcurrent module or the second embedding anti-backcurrent module.

[0014] Furthermore, the inverter switching circuit further includes a first RC filter module and a second RC filter module; wherein,

[0015] A first RC filter module is connected in parallel between the same-name terminal and the opposite-name terminal of the first secondary coil;

[0016] A second RC filter module is connected in parallel between the same-name terminal and the opposite-name terminal of the second secondary coil.

[0017] Furthermore, the first RC filter module and the second RC filter module have the same structure, both including a second resistor and a first capacitor; wherein,

[0018] The same-name end of the first secondary coil or the second secondary coil is connected to one end of the first capacitor, the other end of the first capacitor is connected to one end of the second resistor, and the other end of the second resistor is connected to the opposite-name end of the first secondary coil or the second secondary coil.

[0019] Furthermore, the inverter switching circuit further includes a first phase-matching device and a second phase-matching device; wherein,

[0020] The first phase transformer is connected in series to the opposite-signal terminal of the primary coil of the transformer; the first square wave DC source is input to the opposite-signal terminal of the primary coil of the transformer via the first phase transformer;

[0021] The second phase-matching device is connected in series to the same-name end of the primary coil of the transformer; the second square wave DC source is input to the same-name end of the primary coil of the transformer via the second phase-matching device.

[0022] Furthermore, the inverter switching circuit further includes a second capacitor; the second capacitor is connected in series between the same-name end of the primary coil of the transformer and the second in-phase device or between the opposite-name end of the primary coil and the first in-phase device.

[0023] On the other hand, the present application also discloses a Class E fixed-frequency power amplifier parallel drive system for a radio frequency power supply, characterized in that the system includes: multiple groups of inverter switching circuits, output capacitors, balancing resistors and first-order LC filters as described above, as well as a radio frequency stabilizer and a voltage regulator modulator; wherein,

[0024] The switching signal output end of each group of inverter switching circuits is connected to one end of each balancing resistor, and the other ends of all balancing resistors are connected to a common center point to form a star structure;

[0025] The switching signal output end of each group of inverter switching circuits is also connected to the input end of the corresponding first-order LC filter, and the output ends of all first-order LC filters are connected to form a bus output port, which is simultaneously connected to the voltage modulator and the RF stabilizer;

[0026] Using the bus output port as the radio frequency signal output port of the system;

[0027] The voltage regulator is used to adjust the amplitude of the voltage introduced into the bus output port.

[0028] Based on the above solution, this application also proposes the following improvements:

[0029] Furthermore, the system further includes multiple groups of output capacitors;

[0030] The switching signal output terminals of each group of inverter switching circuits are further grounded via respective output capacitors.

[0031] Furthermore, the system further includes a DC block; in this case,

[0032] The current sink output port is also connected to the input end of a DC block, and the output end of the DC block serves as the radio frequency signal output end of the system.

[0033] Furthermore, the system further includes a high-order LC filter circuit; in this case,

[0034] The current sink output port is also connected to the input end of the high-order LC filter circuit, and the output end of the high-order LC filter circuit is used as the radio frequency signal output end of the system.

[0035] Furthermore, the system further includes a high-order LC filter circuit and a DC block; in this case,

[0036] The bus output port is also connected to the input end of a high-order LC filter circuit, the output end of the high-order LC filter circuit is connected to the input end of a DC block, and the output end of the DC block is used as the RF signal output end of the system.

[0037] Compared with the prior art, this application can achieve at least one of the following beneficial effects:

[0038] On the one hand, the inverter switching circuit provided by the present application limits the alternation of the first square wave DC source and the second square wave DC source to a high level, and sets a first embedded anti-backflow module and a second embedded anti-backflow module at the output ends of the first secondary coil and the second secondary coil of the transformer. By connecting the drains of the first switching tube and the second switching tube in parallel, the high and low levels of the switching signal output end of the inverter switching circuit are switched, so that the inverter switching circuit can maintain the switching capability of the switching tube, which effectively solves the dynamic nonlinearity and gain imbalance that are prone to occur in existing linear RF pulse power amplifiers. At the same time, the first embedded anti-backflow module and the second embedded anti-backflow module can prevent the push-pull tube from being burned by the instantaneous high voltage caused by the coil short circuit, and at the same time avoid the reverse current impacting the coil and causing the coil to burn out due to high voltage, which effectively solves the problems of tube breakdown and electronic device explosion that are prone to existing push-pull inverters. Furthermore, since the output potential and output power modulation of the switching signal output terminal of the inverter switching circuit are determined by the potential change of the voltage Vbus at the DC BUS, as long as the frequencies of the two input signals are stable, the frequency of the output AC signal will also be relatively stable, achieving the effect of constant-frequency power modulation, thereby meeting the power adjustment requirements in a constant-frequency environment.

[0039] On the other hand, the Class E fixed-frequency amplifier parallel drive system of the RF power supply provided by the present application is simple in design. Under the premise of a relatively fixed frequency, multiple groups of inverter switching circuits can be combined with a multi-order filtering resonant topology to form an E-type amplifier through simple parallel connection or combination, thereby achieving the purpose of increasing the power upper limit. At the same time, the voltage amplitude introduced into the bus output port is adjusted by a voltage regulator to ensure the stability of the output power. In addition, by adopting multiple groups of inverter switching circuits combined with related resonant topologies, the output RF signal power is increased and the voltage is constant, which effectively expands the power range of the RF signal that can be provided by the Class E fixed-frequency amplifier parallel drive system of the RF power supply and enriches its application scenarios.

[0040] In this application, the above-mentioned technical solutions can be combined with each other to achieve more preferred combination solutions. Other features and advantages of this application will be described in the subsequent description, and some advantages will become apparent from the description or be understood by practicing this application. The objectives and other advantages of this application can be achieved and obtained through the contents particularly pointed out in the description and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] The accompanying drawings are only used for the purpose of illustrating specific embodiments and are not to be considered as limiting the present application. Throughout the drawings, the same reference symbols denote the same components.

[0042] FIG1 is a circuit diagram of an inverter switching circuit provided in Example 1 of the present application;

[0043] FIG2 is a schematic diagram of control waveforms of the first switching transistor MOS1 and the second switching transistor MOS2 in the inverter switching circuit provided in Example 1 of the present application;

[0044] FIG3 is a circuit diagram of a Class E fixed-frequency power amplifier parallel drive system of an RF power supply provided in Example 2 of the present application. DETAILED DESCRIPTION

[0045] The preferred embodiments of the present application are described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the present application and are used together with the embodiments of the present application to illustrate the principles of the present application, and are not used to limit the scope of the present application.

[0046] A specific embodiment 1 of the present application discloses an inverter switching circuit, the circuit diagram of which is shown in FIG1 , wherein the inverter switching circuit includes a transformer, a first switch tube MOS1, a second switch tube MOS2, a first embedded anti-backflow module and a second embedded anti-backflow module; wherein the first square wave DC source and the second square wave DC source are respectively input to the opposite-name end and the same-name end of the primary coil of the transformer; the first square wave DC source and the second square wave DC source are alternately high level; the same-name end of the first secondary coil and the second secondary coil of the transformer are respectively connected to the first embedded anti-backflow module The input ends of the first and second embedded anti-backcurrent modules are connected to the gates of the first and second switching tubes MOS1 and MOS2, respectively; the drains of the first and second switching tubes MOS1 and MOS2 are connected as the switching signal output ends of the inverter switching circuit; the opposite-name ends of the first and second secondary coils are grounded; the embedded ends of the first and second embedded anti-backcurrent modules are grounded; the sources of the first and second switching tubes MOS1 and MOS2 are grounded.

[0047] In this embodiment, the first switch tube MOS1 and the second switch tube MOS2 are both switching switch tubes. The first embedded anti-backflow module and the second embedded anti-backflow module have the same structure, both including a first diode, a third switch tube (embedded tube) and a first resistor (embedded resistor); wherein the gate of the third switch tube is connected to the anode of the first diode, the source of the third switch tube is connected to the cathode of the first diode, and the drain of the third switch tube is connected to one end of the first resistor; the other end of the first resistor is used as the embedded end of the first embedded anti-backflow module or the second embedded anti-backflow module; the gate of the third switch tube is used as the input end of the first embedded anti-backflow module or the second embedded anti-backflow module; the source of the third switch tube is used as the output end of the first embedded anti-backflow module or the second embedded anti-backflow module. In Figure 1, in order to distinguish them, the first diode, the third switch tube, and the first resistor in the first embedded anti-backflow module are represented by symbols D1, MOS3, and R1 respectively. The first diode, the third switch tube, and the first resistor in the second embedded anti-backflow module are represented by symbols D2, MOS4, and R4 respectively.

[0048] Preferably, the inverter switching circuit in this embodiment further includes a first RC filter module and a second RC filter module; wherein the first RC filter module is connected in parallel between the same-name end and the opposite-name end of the first secondary coil; and the second RC filter module is connected in parallel between the same-name end and the opposite-name end of the second secondary coil. Specifically, the first RC filter module and the second RC filter module have the same structure and both include a second resistor and a first capacitor; wherein the same-name end of the first secondary coil or the second secondary coil is connected to one end of the first capacitor, the other end of the first capacitor is connected to one end of the second resistor, and the other end of the second resistor is connected to the opposite-name end of the first secondary coil or the second secondary coil. In Figure 1, for distinction, the second resistor and the first capacitor in the first RC filter module are represented by R2 and C1, respectively. The second resistor and the first capacitor in the second RC filter module are represented by R3 and C2, respectively.

[0049] Preferably, in order to prevent the signals of the first square wave DC source and the second square wave DC source from being too weak and unstable, the inverter switching circuit in this embodiment also includes a first phase regulator and a second phase regulator; wherein the first phase regulator is connected in series to the opposite-name ends of the primary coil of the transformer; the first square wave DC source is input to the opposite-name ends of the primary coil of the transformer via the first phase regulator; the second phase regulator is connected in series to the same-name end of the primary coil of the transformer; the second square wave DC source is input to the same-name end of the primary coil of the transformer via the second phase regulator, so as to perform initial same-phase stable amplification on the input signal.

[0050] Preferably, the inverter switching circuit in this embodiment further includes a second capacitor C3; the second capacitor C3 is connected in series between the same-name end of the primary coil of the transformer and the second phase shifter or in series between the opposite-name end of the primary coil and the first phase shifter to absorb part of the energy of the voltage fluctuation, so that the voltage input to the primary winding of the transformer is more stable.

[0051] In addition, in a specific implementation process, the first switch tube MOS1 and the second switch tube MOS2 are NMOS tubes; and the third switch tube is a PMOS tube.

[0052] The working process of the inverter switching circuit provided in this embodiment is described below:

[0053] During the specific implementation, it should be noted that the first square wave DC source and the second square wave DC source are alternately high, and the proportion of the high level is determined by the duty cycle. In some cases, the first square wave DC source and the second square wave DC source are strictly in anti-phase with each other. At the same time, for the convenience of description, in Figure 1, the circuit formed by connecting the first secondary coil, the first switching tube MOS1, the first clamped anti-backflow module, and the first RC filter module is referred to as the first circuit group, labeled ①. The circuit formed by connecting the second secondary coil, the second switching tube MOS2, the second clamped anti-backflow module, and the second RC filter module is referred to as the second circuit group, labeled ②.

[0054] (1) The first square wave DC source is low level, and the second square wave DC source is high level

[0055] At this time, the current in the primary coil is 2->1. Since the secondary coils have the same terminals, the direction of the secondary coil current in the two circuits is the same as that of the primary coil.

[0056] No effective potential is formed between the G and S poles of the clamping transistors in the two circuits, and the clamping transistors in the two circuits are both turned off (i.e., MOS3 and MOS4 in Figure 1 are both turned off). An effective potential is formed between the G and S poles of the switching transistors in the two circuits, and the switching transistors in the two circuits are both turned on (i.e., the first switching transistor MOS1 and the second switching transistor MOS2 are both turned on). The secondary coils of the two circuits are almost short-circuited, and the RC filter modules of the two circuits will provide buffer protection for the switching transistors by limiting voltage and current.

[0057] When both the first switch MOS1 and the second switch MOS2 are turned on, since the D electrodes of the first switch MOS1 and the second switch MOS2 are connected in parallel, the switching signal output terminal of the inverter switching circuit outputs a high signal.

[0058] (2) The first square wave DC source is high level, and the second square wave DC source is low level

[0059] At this point, the primary coil current is 1->2. Because the secondary coils have the same terminals, no effective potential is formed at the G and S poles of the switches in both circuits. Both switches are turned off (i.e., both the first and second switches MOS1 and MOS2 are off). The G and S poles of the clamped transistors in both circuits form an effective potential, turning them on. Simultaneously, the clamped resistors provide current limiting protection, and the secondary coils, RC filter modules, and clamped backflow protection modules of the two circuits form an internal loop that does not interfere with the output.

[0060] At this time, the potential of the switching signal output terminal of the inverter switching circuit is equal to ground, zero potential or a relatively low signal.

[0061] For example, a schematic diagram of the control waveforms of the first switching tube MOS1 and the second switching tube MOS2 in the inverter switching circuit is shown in Figure 2. As can be seen from Figure 2, the control waveforms of the first switching tube MOS1 and the second switching tube MOS2 are consistent as a whole, except for slight deviations in individual positions. When the first switching tube MOS1 and the second switching tube MOS2 are both turned on, the switching signal output terminal of the inverter switching circuit outputs a high signal. When the first switching tube MOS1 and the second switching tube MOS2 are both turned off, the potential of the switching signal output terminal of the inverter switching circuit is equivalent to ground, zero potential, or a relatively low signal. Therefore, by using two square wave DC sources with a timing delay difference, an AC signal with a relatively stable waveform and a fixed frequency can be generated.

[0062] In the circuit provided in this embodiment, the output potential and output power of the signal output terminal are modulated by the potential change of the voltage Vbus at the DC BUS (see Figure 3). As long as the frequencies of the two input signals (the first square wave DC source and the second square wave DC source) are stable, the frequency of the output AC signal will also be relatively stable, thereby achieving the effect of fixed-frequency power modulation.

[0063] Specific embodiment 2 of the present application discloses a Class E fixed-frequency power amplifier parallel drive system for an RF power supply, a circuit diagram of which is shown in Figure 3. The system includes: multiple groups of inverter switching circuits, balancing resistors and first-order LC filters as described in Example 1, as well as an RF stabilizer and a voltage regulator modulator; wherein the switching signal output end of each group of inverter switching circuits is respectively connected to one end of each balancing resistor, and the other ends of all balancing resistors are connected to a common center point (star) to form a star structure; the switching signal output end of each group of inverter switching circuits is also respectively connected to the input end of the corresponding first-order LC filter, and the output ends of all first-order LC filters are connected to form a bus output port, which is simultaneously connected to the voltage regulator modulator and the RF stabilizer; the bus output port is used as the RF signal output end of the system; wherein the voltage regulator modulator is used to adjust the amplitude of the voltage introduced into the bus output port.

[0064] During implementation, a corresponding voltage regulator can be selected based on the requirements for voltage regulation, such as a buck regulator, a boost regulator, or a CUK regulator. The voltage regulator illustrated in FIG3 is a buck regulator. Specifically, the buck regulator includes a buck switch MOS5, an inductor L, a diode D, and a capacitor C0. The gate of the buck switch MOS5 is used to receive a duty cycle modulation signal. The drain of the buck switch MOS5 is connected to ground via capacitor C0 and is also connected to a power supply Vdc. The source of the buck switch MOS5 is connected to one end of the inductor L and the cathode of the diode D, the anode of the diode D is grounded, and the other end of the inductor L is connected to the bus output port. The buck regulator adjusts the voltage amplitude introduced to the bus output port based on the duty cycle modulation signal. In addition, to prevent the duty cycle adjustment signal from being too weak and unstable, the buck regulator may also include a third phase regulator. At this time, the input of the third inverting device is used to receive the duty cycle modulation signal, and the output of the third inverting device is connected to the gate of the buck switch. In this embodiment, the buck switch MOS5 is an NMOS transistor. The specific form of the boost modulator or CUK modulator can be referred to in existing methods and will not be repeated here.

[0065] Preferably, to ensure the quality of RF signal output, this embodiment provides the following optional optimization solutions based on the above solutions:

[0066] (1) The system also includes a DC block

[0067] In this case, the bus output port is also connected to the input of a DC block, and the output of the DC block serves as the RF signal output of the system. The DC block isolates the DC component in the signal, thereby optimizing the RF signal output quality. For example, the DC block can be implemented using a DC blocking capacitor C.

[0068] (2) The system also includes a high-order LC filter circuit

[0069] In this case, the confluence output port is also connected to the input of a high-order LC filter circuit, and the output of the high-order LC filter circuit serves as the RF signal output of the system. The high-order LC filter circuit filters out high-order harmonics, effectively ensuring the quality of the output signal. Exemplarily, the high-order LC filter circuit is a second-order LC filter, or a second-order LC filter and a third-order LC filter connected in series.

[0070] (3) The system also includes a high-order LC filter circuit and a DC block;

[0071] In this case, the bus output port is also connected to the input of a high-order LC filter circuit, the output of which is connected to the input of a DC block, and the output of the DC block serves as the RF signal output of the system. By combining the high-order LC filter circuit and the DC block, high-order harmonics in the signal can be filtered out while the DC component in the signal can be isolated, thereby optimizing the RF signal output quality.

[0072] During the specific implementation process, the above basic system design method or various preferred system design methods can be selected according to the output requirements of the actual application scenario for the RF signal.

[0073] In the E-class fixed-frequency power amplifier parallel drive system of the RF power supply provided in this embodiment, multiple groups of inverter switching circuits are used in combination with related resonant topologies. The output end of each group of inverter switching circuits is configured with an output capacitor and a balancing resistor, and after waveform filtering and shaping by a first-order LC filter, the signal outputs of each group are converged in parallel or by a combiner. Among them, the difference from the existing push-pull power amplifier is that the introduction point of the convergence output port (i.e., DC BUS) is at the output end of the LC filter, and does not directly act on the switch tube. According to the design requirements, the output end of any order LC filter can be selected as the introduction point.

[0074] Taking Figure 3 as an example, the DC bus is introduced at the output of the first-order LC filter. The entire resonant topology interacts with the output of the aforementioned inverter switching circuit to provide high power output. Second-order and even third-order filters are used to optimize the waveform. An RF stabilizer is used to prevent self-excitation of the entire power amplifier topology. Furthermore, a DC block can be used to limit the RF signal output.

[0075] At the same time, considering that the amplitude of the DC BUS directly affects the output voltage and output power stability, a buck modulator can be set in the system. By controlling the duty cycle of the buck switch tube, the amplitude of the DC BUS introduced into the power amplifier can be adjusted. In this example, the adjustable range of the DC BUS amplitude is 0 to Vdc.

[0076] Furthermore, in this embodiment, the output of each inverter switching circuit is connected to an output capacitor, achieving output signal stability. Simultaneously, the output of each inverter switching circuit is connected in parallel to a first-order LC filter via a balancing resistor, and the current flowing from the signal output to the first-order LC filter is limited by shunting. Furthermore, when the current flowing through the switching signal output of the inverter switching circuit passes through the balancing resistor, the resistance value fluctuates due to temperature variations within the device itself. When connected in a star configuration, the actual balancing resistors output by each inverter switching circuit group dynamically adjust. This dynamic adjustment is achieved by balancing the corresponding resistance and current output by each inverter switching circuit group. This balance stabilizes the voltage and current at each output, resulting in stable power output. In the aforementioned Class E fixed-frequency amplifier parallel drive system for RF power supplies, the output signals of the inverter switching circuits are waveform-filtered and regulated by first-order LC filters. Simultaneously, the outputs of all first-order LC filters combine the signal outputs of each group in parallel or as a combiner, forming a combined output port. The output level is calibrated / corrected by a radio frequency stabilizer to obtain the radio frequency signal output of the above system.

[0077] Those skilled in the art will appreciate that all or part of the process steps of the above-described embodiments can be implemented by instructing related hardware through a computer program, and the program can be stored in a computer-readable storage medium, such as a magnetic disk, an optical disk, a read-only memory, or a random access memory.

[0078] The above is only a preferred specific implementation method of the present application, but the scope of protection of the present application is not limited thereto. Any changes or replacements that can be easily thought of by any technician familiar with this technical field within the technical scope disclosed in this application should be covered by the scope of protection of the present application.

Claims

1. An inverter switching circuit, characterized in that: The inverter switching circuit includes a transformer, a first switch tube, a second switch tube, a first embedded anti-backflow module and a second embedded anti-backflow module; wherein, The first square wave DC source and the second square wave DC source are respectively input to the opposite-name end and the same-name end of the primary coil of the transformer; the first square wave DC source and the second square wave DC source are alternately high level; The same-name ends of the first secondary coil and the second secondary coil of the transformer are respectively connected to the input ends of the first embedded anti-backflow module and the second embedded anti-backflow module, and the output ends of the first embedded anti-backflow module and the second embedded anti-backflow module are respectively connected to the gates of the first switch tube and the second switch tube; the drains of the first switch tube and the second switch tube are connected as the switching signal output end of the inverter switching circuit; The opposite ends of the first secondary coil and the second secondary coil are both grounded; the embedded ends of the first embedded anti-backflow module and the second embedded anti-backflow module are both grounded; the source electrodes of the first switch tube and the second switch tube are both grounded.

2. The inverter switching circuit according to claim 1, characterized in that: The first embedded anti-backflow module and the second embedded anti-backflow module have the same structure, both of which include a first diode, a third switch tube and a first resistor; wherein, The gate of the third switch tube is connected to the anode of the first diode, the source of the third switch tube is connected to the cathode of the first diode, and the drain of the third switch tube is connected to one end of the first resistor; The other end of the first resistor is used as the embedding end of the first embedded anti-backcurrent module or the second embedded anti-backcurrent module; the gate of the third switch tube is used as the input end of the first embedded anti-backcurrent module or the second embedded anti-backcurrent module; the source of the third switch tube is used as the output end of the first embedded anti-backcurrent module or the second embedded anti-backcurrent module.

3. The inverter switching circuit according to claim 2, characterized in that: The inverter switching circuit also includes a first RC filter module and a second RC filter module; wherein, A first RC filter module is connected in parallel between the same-name end and the opposite-name end of the first secondary coil; A second RC filter module is connected in parallel between the same-name end and the opposite-name end of the second secondary coil.

4. The inverter switching circuit according to claim 3, characterized in that: The first RC filter module and the second RC filter module have the same structure, both including a second resistor and a first capacitor; wherein, The same-name end of the first secondary coil or the second secondary coil is connected to one end of the first capacitor, the other end of the first capacitor is connected to one end of the second resistor, and the other end of the second resistor is connected to the opposite-name end of the first secondary coil or the second secondary coil.

5. The inverter switching circuit according to any one of claims 1 to 4, characterized in that: The inverter switching circuit also includes a first phase converter and a second phase converter; wherein, The first phase converter is connected in series to the opposite-name end of the primary coil of the transformer; the first square wave DC source is input to the opposite-name end of the primary coil of the transformer via the first phase converter; The second phase comparator is connected in series to the same-name end of the primary coil of the transformer; the second square wave DC source is input to the same-name end of the primary coil of the transformer via the second phase comparator.

6. The inverter switching circuit according to claim 5, characterized in that: The inverter switching circuit also includes a second capacitor; the second capacitor is connected in series between the same-name end of the primary coil of the transformer and the second in-phase device or between the opposite-name end of the primary coil and the first in-phase device.

7. A class E fixed frequency power amplifier parallel drive system for a radio frequency power supply, characterized in that: The system comprises: a plurality of sets of inverter switching circuits, output capacitors, balancing resistors and first-order LC filters as described in any one of claims 1 to 6, as well as a radio frequency stabilizer and a voltage regulator; wherein, The switching signal output end of each group of inverter switching circuits is respectively connected to one end of each balancing resistor, and the other ends of all balancing resistors are connected to a common center point to form a star structure; The switching signal output end of each group of inverter switching circuits is also connected to the input end of the corresponding first-order LC filter, and the output ends of all first-order LC filters are connected to form a bus output port, and the bus output port is simultaneously connected to the voltage regulator and the RF stabilizer; Using the bus output port as the radio frequency signal output end of the system; The voltage regulator is used to adjust the amplitude of the voltage introduced into the bus output port.

8. The class E fixed-frequency power amplifier parallel drive system of the radio frequency power supply according to claim 7, characterized in that: The system also includes multiple sets of output capacitors; The switching signal output terminals of each group of inverter switching circuits are also grounded via respective output capacitors.

9. The class E fixed-frequency power amplifier parallel drive system of the radio frequency power supply according to claim 7 or 8, characterized in that: The system also includes a DC block; in this case, The current sink output port is also connected to the input end of the DC block, and the output end of the DC block is used as the radio frequency signal output end of the system.

10. The class E fixed frequency power amplifier parallel drive system of the radio frequency power supply according to claim 7 or 8, characterized in that: The system also includes a high-order LC filter circuit; in this case, The confluence output port is also connected to the input end of the high-order LC filter circuit, and the output end of the high-order LC filter circuit is used as the RF signal output end of the system.

11. The class E fixed-frequency power amplifier parallel drive system of the radio frequency power supply according to claim 7 or 8, characterized in that: The system also includes a high-order LC filter circuit and a DC block; at this time, The bus output port is also connected to the input end of the high-order LC filter circuit, the output end of the high-order LC filter circuit is connected to the input end of the DC block, and the output end of the DC block is used as the RF signal output end of the system.

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