Substrate processing device and member management method

Abstract

Provided is a printing device comprising a lower supporting body 26, which is a replaceable member, and a mounting table on which the lower supporting body 26 is detachably mounted. The printing device serves as a substrate processing device for performing predetermined processing on a substrate by mounting the lower supporting body 26 on the mounting table, and further comprises: a jig 50 to which the lower supporting body 26 is attached; and a control device 70 that serves as a first association information acquisition means for acquiring first association information J1 for each of a plurality of lower supporting bodies 26, the first association information J1 indicating an association between the lower supporting body 26 and a jig 50 having the lower supporting body 26 attached thereto.

Description

Substrate processing apparatus and member management method

[0001] The present disclosure relates to a substrate processing apparatus that performs a predetermined process on a substrate and a member management method for the substrate processing apparatus.

[0002] Conventionally, as a substrate processing apparatus for performing a predetermined process on a substrate, for example, a printing apparatus that prints a paste such as solder on a substrate through a mask is known (see Patent Document 1 below). In the printing apparatus described in Patent Document 1, the substrate is supported from below by a substrate support part (lower support body), and the substrate support part is detachably attached to a support base (installation base) that supports it. When attaching or detaching (replacing) the substrate support part to or from the support base, the substrate support part is attached to a jig having a frame body substantially the same shape as the mask and positioned above the support base, and the support base is raised so as to approach the jig to receive the substrate support part from the jig.

[0003] In the above-mentioned Patent Document 1, the lower support, which is a replaceable part, is stored in a storage unit while attached to a jig. When it becomes necessary to set the lower support on an installation table, the lower support is removed from the storage unit together with the jig and positioned above the installation table in the same manner as the mask.

[0004] Japanese Patent Application Publication No. 2020-100147

[0005] When a replacement part such as a lower support is stored in a storage unit while attached to a jig as described above, one way to manage the replacement part in the storage unit is to provide an identifier on which individual identification information of the replacement part is recorded, and to read the individual identification information from the identifier when individual identification becomes necessary. However, in reality, when the replacement part is attached to the jig, the identifier attached to the replacement part is located in a position that makes it difficult to read the individual identification information, which has been a problem in that it is difficult to manage the replacement part while attached to the jig.

[0006] Therefore, an object of the present disclosure is to provide a substrate processing apparatus and a member management method that can easily manage replacement members attached to jigs.

[0007] The substrate processing apparatus of the present disclosure is a substrate processing apparatus that includes an exchangeable member and an installation stand on which the exchangeable member is installed so that it can be attached and detached, and that performs a predetermined process on a substrate by installing the exchangeable member on the installation stand, and also includes a jig on which the exchangeable member is attached, and a first correspondence information acquisition means that acquires, for each of a plurality of exchangeable members, first correspondence information that is information on the correspondence relationship between the exchangeable member and the jig on which the exchangeable member is attached.

[0008] The component management method disclosed herein is a component management method in a substrate processing apparatus that includes a replacement component, an installation stand on which the replacement component is installed so that it can be attached and detached, and a jig to which the replacement component is attached, and that performs a predetermined process on a substrate by installing the replacement component on the installation stand, and includes a first correspondence information acquisition process that acquires, for each of a plurality of replacement components, first correspondence information that is information on the correspondence relationship between the replacement component and the jig to which the replacement component is attached.

[0009] According to the present disclosure, it is possible to easily manage replacement parts while they are attached to jigs.

[0010]

[0011] An embodiment of the present disclosure will now be described with reference to the drawings. FIG. 1 illustrates a printing apparatus 1 as a substrate processing apparatus according to one embodiment of the present disclosure. The printing apparatus 1 includes a printing unit 2 and a storage unit 3 adjacent to the printing unit 2. The printing apparatus 1 performs a printing operation, which is a predetermined process, by loading a substrate KB, printing a solder paste Pst or other material onto an electrode pattern (not shown) on the top surface of the substrate KB, and then transporting the substrate KB to the outside. For ease of explanation, the direction in which the substrate KB is transported (loaded and unloaded) (the left-right direction as seen from the operator OP) is referred to as the X direction in this embodiment. Furthermore, the direction perpendicular to the X direction in the horizontal plane (the front-to-back direction as seen from the operator OP) is referred to as the Y direction, and the up-down direction is referred to as the Z direction. Furthermore, within the Y direction, the side facing the storage unit 3 from the printing unit 2 is referred to as the rear side (rear side), and the side facing the storage unit 3 from the printing unit 2 is referred to as the front side (near side).

[0012] 1 and 2, the printing unit 2 has a substrate holding unit 12 on a base 11. A substrate holding unit moving mechanism 13 is interposed between the substrate holding unit 12 and the base 11. A pair of guide rails 14 serving as a mask support unit are provided above the substrate holding unit 12 and extend horizontally, and a mask 15 is supported in a horizontal position by the pair of guide rails 14. A printing unit camera 16 serving as an imaging means is provided between the substrate holding unit 12 and the mask 15 so as to be movable in the XY plane. A print head 17 is provided above the mask 15.

[0013] 2, the substrate holder 12 includes a lifting base 21, a pair of conveyors 22, a lifter 23, a mounting table base 24, a mounting table 25, a lower support 26, and a pair of clampers 27. The substrate holder movement mechanism 13 is, for example, an XYZ table mechanism. The substrate holder movement mechanism 13 moves the entire substrate holder 12 within the XY plane and in the Z direction, and also rotates the entire substrate holder 12 around an axis extending in the Z direction (the Z axis).

[0014] 2, the lifting base 21 is made of a plate-shaped member and is supported in a horizontal position by the substrate holder moving mechanism 13. The pair of conveyors 22 is made up of a fixed conveyor 22 fixed to the lifting base 21 and a movable conveyor 22 arranged behind (at the rear side of) the fixed conveyor 22, and transports the substrate KB by running synchronously in the X direction.

[0015] The movable conveyor 22 is movable relative to the fixed conveyor 22 (and therefore relative to the installation table base 24). By moving the movable conveyor 22 closer to or farther away from the fixed conveyor 22, the distance between the pair of conveyors 22 can be adjusted according to the size of the board KB in the width direction (Y direction).

[0016] 2, the lifter 23 is provided on the lift base 21. The installation table base 24 is made of a flat plate-like member that extends along the XY plane as a whole. The lifter 23 moves the installation table base 24 in the Z direction relative to the lift base 21.

[0017] 2 and 3, the installation table 25 is provided on the installation table base 24. The installation table 25 (the fixed installation table 25a and the movable installation table 25b) is located below and between the pair of conveyors 22.

[0018] 2 and 3, the installation base 25 is composed of a fixed installation base 25a located at the front and a movable installation base 25b located at the back. The fixed installation base 25a and the movable installation base 25b are each made of a block-shaped member, and their upper surfaces are at the same height. A vacuum suction port 25K and a vacuum suction path opening 25H are formed side by side in the Y direction on the upper surface of the fixed installation base 25a.

[0019] The fixed-side installation table 25a is fixed on the installation table base 24. The movable-side installation table 25b is movable in the Y direction on the installation table base 24. The movable-side installation table 25b is movable in the Y direction integrally with the movable-side conveyor 22. Therefore, when the movable-side conveyor 22 moves in the Y direction, the movable-side installation table 25b also moves in the Y direction accordingly.

[0020] The lower support 26 is detachably mounted on the mounting table 25. The lower support 26 is made of a flat plate-shaped member overall, and its upper surface is formed flat. When the lower support 26 is mounted on the mounting table 25, it supports (receives) the substrate KB from below (FIG. 4(a) → FIG. 4(b)).

[0021] The installation base 25 suctions the underside of the lower support 26 through vacuum suction ports 25K provided on the upper surface thereof. Therefore, the front region of the underside of the lower support 26 is suction-held through the vacuum suction ports 25K of the fixed installation base 25a, and the rear region of the underside of the lower support 26 is supported in a resting state by the movable installation base 25b.

[0022] The lower surface of the lower support 26 has an opening 26H for a vacuum suction path formed therein ( FIGS. 5( a) and 5(b) ). The upper surface of the lower support 26 has a vacuum chuck hole 26C connected to the vacuum suction path ( FIGS. 3 and 5(a) ). When the lower support 26 is placed on the installation table 25, the vacuum suction path opening 25H of the installation table 25 is connected to the opening 26H of the lower support 26. Therefore, the lower support 26 can suction and hold the substrate KB supported on its upper surface by the vacuum suction force generated through the vacuum chuck hole 26C.

[0023] 5A, recesses 26Z (or through holes if the components BH are tall) are provided on the upper surface of the lower support 26 to avoid interference with the components BH mounted on the underside of the supported board KB. Since the arrangement of the components BH mounted on the board KB differs for each board KB, the arrangement of the recesses 26Z provided on the upper surface of the lower support 26 also differs depending on the type of board KB.

[0024] The plurality of vacuum chuck holes 26C are each open at a position that avoids the plurality of recesses 26Z provided on the upper surface of the lower support 26. Therefore, the arrangement of the vacuum chuck holes 26C and recesses 26Z in the area of ​​the upper surface of the lower support 26 that supports the substrate KB from below (the area that is inside the substrate KB when the substrate KB is supported from below) differs for each substrate KB. For this reason, in this embodiment, different types of lower supporters 26 are prepared depending on the type of substrate KB, and are replaceable with respect to the installation table 25. That is, in this embodiment, the lower supporter 26 is a replaceable part in the printing apparatus 1.

[0025] A large lower support 26 is selected that corresponds to the width dimension (here, the dimension in the Y direction) of the board KB to be produced, and is placed on the placement table 25. The distance between the fixed-side placement table 25a and the movable-side placement table 25b is adjusted according to the size of the board KB. In this embodiment, as described above, the movable-side placement table 25b moves in the Y direction integrally with the movable-side conveyor 22. Therefore, when the distance between the fixed-side conveyor 22 and the movable-side conveyor 22 is adjusted, the distance between the fixed-side placement table 25a and the movable-side placement table 25b is also automatically adjusted.

[0026] 3, a plurality of protruding members 26T that protrude outward in the X direction are attached to each of two sides extending along the Y direction (opposing in the X direction) of the upper surface of the lower support 26. In this embodiment, two protruding members 26T are attached to each of the two outer edges extending in the Y direction of the upper surface of the lower support 26, but this number is merely an example.

[0027] 5(a) and 5(b), an upper surface-side identifier 26P and a lower surface-side identifier 26Q are attached to the upper and lower surfaces of the lower support 26, respectively, as lower support identifiers (replacement part identifiers) that record individual identification information for the lower support 26. In detail, the upper surface-side identifier 26P is provided on the upper surface of the circuit board KB (FIGS. 3, 4(a), 4(b), 5(a) and 5(b)), and the lower surface-side identifier 26Q is provided on the lower surface of the circuit board KB (FIGS. 5(a) and 5(b)).

[0028] The top surface-side identifier 26P needs to be provided on a flat surface of the top surface of the lower support 26. However, as described above, the area of ​​the top surface of the lower support 26 that supports the substrate KB from below (the area that is inside the substrate KB when the substrate KB is supported from below) has a number of recesses (vacuum chuck holes 26C and recesses 26Z) formed therein, the placement of which varies depending on the type of substrate KB. Therefore, if an attempt is made to provide the top surface-side identifier 26P in such an area while avoiding the recesses, when reading the individual identification information from the top surface-side identifier 26P, it becomes necessary to change the reading location (imaging position) for each type of substrate KB. For this reason, in this embodiment, as shown in FIGS. 4( a) and 4(b), the top surface-side identifier 26P is provided in an area that is not hidden by the substrate KB when the lower support 26 holds the substrate KB on its top surface, that is, in an area on the top surface of the lower support 26 that is outside the substrate KB when the lower support 26 supports the substrate KB from below.

[0029] Similarly, the lower surface-side identifier 26Q needs to be provided on a flat surface of the lower surface of the lower support 26. For this reason, the lower surface-side identifier 26Q is provided in an area (area KR surrounded by dashed lines in FIGS. 5(a) and 5(b)) facing the vacuum suction port 25K of the fixed-side installation base 25a, which is an area that is necessarily formed flat on the lower surface of the lower support 26. The upper surface-side identifier 26P and the lower surface-side identifier 26Q do not need to be identical as long as their contents (individual identification information) are the same.

[0030] 2, the pair of clampers 27 are arranged opposite each other in the Y direction above the pair of conveyors 22. The pair of clampers 27 clamp both side surfaces of the substrate KB supported (received from below) by the lower supports 26 from the Y direction, corresponding to the Y direction, to hold the substrate KB.

[0031] In this manner, the board holding unit 12 is configured to support (receive from below) the board KB carried in by the pair of conveyors 22 with the lower supports 26 and to clamp and hold the board KB with the pair of clampers 27 .

[0032] As shown in Figures 3, 6(a) and 6(b), the substrate holder 12 further includes a plurality of (four) lifting cylinders 31 and a pair of support release mechanisms 32 on the installation table base 24.

[0033] 3 and 6(a) and 6(b), two of the four lift cylinders 31 are arranged at both ends of the fixed-side installation base 25a in the X direction (positions sandwiching the fixed-side installation base 25a in the X direction), and the remaining two are arranged at both ends of the movable-side installation base 25b in the X direction (positions sandwiching the movable-side installation base 25b in the X direction). These four lift cylinders 31 are provided separately from the fixed-side installation base 25a and the movable-side installation base 25b. Each of the four lift cylinders 31 can move the piston rod 31R in the up and down direction. The two lift cylinders 31 arranged at positions sandwiching the movable-side installation base 25b in the X direction move integrally with the movable-side installation base 25b in the Y direction.

[0034] The four lift cylinders 31 operate in synchronization to move the piston rods 31R up and down in the same direction by the same amount, so that the upper ends of the four piston rods 31R of the four lift cylinders 31 are always positioned at the same height.

[0035] 3 and 6(a) and 6(b), a pair of support release mechanisms 32 are disposed at both ends of the fixed-side installation base 25a in the X direction (positions sandwiching the fixed-side installation base 25a in the X direction). Each support release mechanism 32 includes an operating cylinder 33, a rack 34, a pinion 35, and an operating rod 36.

[0036] Each of the two operating cylinders 33 is disposed with its piston rod (operating cylinder rod 33R) facing outward in the X direction. A rack guide 34G extending in the X direction is provided below the operating cylinder rod 33R. The rack 34 is provided on the rack guide 34G so as to be movable in the X direction, and is connected to the end of the operating cylinder rod 33R.

[0037] The two operating cylinders 33 operate in synchronization to move the operating cylinder rod 33R by the same amount in opposite directions, so that when the two operating cylinders 33 operate, they simultaneously move toward or away from the two racks 34 and the fixed-side installation base 25a, which are positioned on either side of the fixed-side installation base 25a in the X direction.

[0038] 3 and 6(a) and 6(b), the two pinions 35 are disposed on either side of the fixed installation table 25a in the X direction, and are each located above the rack 34. The two pinions 35 are each rotatably supported by a rotary support shaft 35J (FIG. 3) extending along the Y direction. Both ends of each of the two rotary support shafts 35J are fixed relatively to the installation table base 24.

[0039] 3 and 6(a) and 6(b), the teeth formed on the outer periphery of each pinion 35 mesh with teeth formed on the upper surface of the rack 34 located below that pinion 35. Therefore, when the two operating cylinders 33 are actuated to move the two racks 34 in the X direction (moving closer to or farther apart), the two pinions 35 rotate in opposite directions about their respective rotation support shafts 35J.

[0040] The base ends (lower ends) of the two operating rods 36 are connected to the pinions. Therefore, when the two operating cylinders 33 are actuated and the two pinions 35 rotate in opposite directions as described above, the two operating rods 36 swing between a position where they are tilted toward each other (the operating rods 36 shown by dashed lines in FIG. 6(a)) and a position where they are raised to a substantially vertical position (the operating rods 36 shown by solid lines in FIG. 6(a)). Hereinafter, the position where the two operating rods 36 are tilted toward each other will be referred to as the "tilted position," and the position where the two operating rods 36 are both raised to a vertical position will be referred to as the "raised position."

[0041] 7, a pair of guide rails 14 each extend in the Y direction and are arranged opposite each other in the X direction. The mask 15 is made of a rectangular plate-shaped member. The four sides of the mask 15 are supported by a rectangular mask frame 15W. A pattern opening 15K corresponding to the electrode pattern of the substrate KB is formed in the center of the mask 15.

[0042] In Figure 7, the two guide rails 14 are each formed in an L-angle shape. The two guide rails 14 support from below two of the four sides of the mask frame 15W that extend in the Y direction and face each other in the X direction. The mask 15 can be moved in the Y direction on the guide rails 14. During printing, the mask 15 is positioned (placed) at a mask placement position MI set on the guide rails 14 (Figure 7). The mask placement position MI is a position corresponding to the top of the substrate holder 12.

[0043] 2, the printing unit camera 16 includes a lower imaging unit 16a that images the lower side and an upper imaging unit 16b that images the upper side. The printing unit camera 16 is moved in a horizontal plane by a printing unit camera moving mechanism (not shown), and the lower imaging unit 16a images the substrate KB (more specifically, the marks provided on the substrate KB) held by the substrate holding unit 12, and the upper imaging unit 16b images the mask 15 (more specifically, the marks provided on the mask) positioned at the mask installation position MI.

[0044] In Figure 2, the print head 17 is equipped with two squeegees 17S arranged opposite each other in the Y direction. Each squeegee 17S is made of a spatula-shaped member extending in the X direction. The print head 17 is moved in the Y direction by a print head moving mechanism 17K (Figures 1 and 2) made of a ball screw mechanism or the like. The two squeegees 17S are raised and lowered individually by two squeegee raising and lowering units 17M provided on the print head 17.

[0045] 1, the storage unit 3 includes a magazine 41 and a magazine elevator 42. The magazine 41 is a box-shaped member with openings on both the front and back sides. The magazine 41 includes a plurality of slots 41S arranged in the Z direction as storage areas.

[0046] A plurality of types of masks 15 corresponding to the types of substrates KB to be produced are stored in slots 41S in the lower half region of magazine 41. A plurality of types of lower supports 26 are stored in slots 41S in the upper half region of magazine 41, attached to jigs 50 (FIGS. 8(a) and 8(b)) having substantially the same outer shape as the masks 15.

[0047] Here, the jig 50 will be described. As shown in Figures 8(a) and 8(b), the jig 50 includes a frame body 51, auxiliary rails 52, two movement guides 53, and two support members 54. The frame body 51 has a rectangular shape, and is substantially the same shape as the mask frame 15W.

[0048] Similar to the mask 15, the frame 51 has two sides extending along the Y direction (i.e., facing each other in the X direction) supported by the guide rails 14. Therefore, similar to the mask 15, the jig 50 can slide in the Y direction on the pair of guide rails 14. The auxiliary rails 52 extend in the X direction within the internal space of the frame 51, and both ends thereof are fixed to the two sides of the frame 51 facing each other in the Y direction.

[0049] 8(a) and 8(b), two movable guides 53 each extend in the Y direction. One end (rear end) of each movable guide 53 is supported by a frame 51, and the other end (front end) is supported by an auxiliary rail 52. Each of the two movable guides 53 can move in the X direction while maintaining its orientation extending in the Y direction.

[0050] 8(a) and 8(b), the two support members 54 each extend in the Y direction. The two support members 54 are provided on the opposing surfaces of the two movement guides 53. The opposing surfaces of the two support members 54 are each formed with a protruding piece 54T that protrudes in the directions facing each other.

[0051] 8(a) and 8(b), the two moving guides 53 are each biased inwardly of the frame body 51 by a plurality of biasing springs 55 provided between the two moving guides 53 and the frame body 51. Therefore, the two support members 54 are movable between a close position (FIG. 9(a)) where they are close to each other and a separated position (FIG. 9(b)) where they have moved in directions separating them from the close position. Note that both FIGS. 9(a) and 9(b) are cross-sectional views taken along the line V-V in FIG. 8(a).

[0052] As described above, in this embodiment, the jig 50 has a configuration including a frame body 51 and a pair of support members 54 that are provided on the frame body 51 and can move toward and away from each other.

[0053] When the two support members 54 are positioned in a close position ( FIG. 9( a) ), the distance between the two protruding pieces 54T is greater than the dimension of the lower support body 26 in the X direction and smaller than the distance between the outer ends of the two overhanging members 26T facing each other in the X direction. Therefore, when the two support members 54 are positioned in a close position, the lower support body 26 can be attached to the jig 50 by placing the multiple overhanging members 26T of the lower support body 26 from above on the protruding pieces 54T of each of the two support members 54 ( FIG. 8( a) → FIG. 8( b) ). When the lower support body 26 is attached to the jig 50 in this manner, the lower support body 26 can be moved by moving the jig 50.

[0054] 1, the magazine elevator 42 has a lift table 42B that extends along a horizontal plane. The magazine 41 is placed on the lift table 42B, and when the magazine elevator 42 moves the lift table 42B up and down, the magazine 41 rises and falls relative to the printing unit 2.

[0055] 1, a change mechanism 60 that switches (changes) the mask 15 or jig 50 positioned at the mask installation position MI is provided between the printing unit 2 and the storage unit 3. The change mechanism 60 is composed of an insertion / removal mechanism 61 located on the storage unit 3 side and a movement mechanism 62 located on the printing unit 2 side.

[0056] The loading / unloading mechanism 61 performs an operation of loading / unloading the mask 15 or jig 50 in the storage unit 3 (magazine 41) from / to the printing unit 2. The moving mechanism 62 uses a rod 62R that can project and retract downward to perform a loading operation in which the loading / unloading mechanism 61 moves the mask 15 or jig 50 removed from the storage unit 3 along the guide rails 14 and loads it into the printing unit 2 (more specifically, moves it to the mask installation position MI), and an unloading operation in which the moving mechanism 62 moves the mask 15 or jig 50 positioned at the mask installation position MI along the guide rails 14 toward the storage unit 3. The moving mechanism 62 does not have a self-propelled mechanism, and moves in the Y direction together with the print head 17 while connected to the print head 17.

[0057] FIG. 10 shows the control system of the printing apparatus 1. The control device 70, which serves as the control unit for the printing apparatus 1, controls the operations of the substrate holder 12 to load, hold, and unload the substrate KB; the XY-plane movement and elevation of the substrate holder 12 by the substrate holder movement mechanism 13; the imaging operations of the printing unit camera 16 (lower imaging unit 16a and upper imaging unit 16b); the elevation and elevation of the squeegee 17S by the squeegee elevation unit 17M; and the movement of the print head 17 by the print head movement mechanism 17K. The control device 70 also controls the suction and holding of the lower support 26 and the substrate KB via the installation table 25; the operation of the four elevation cylinders 31 that serve as the elevation means; and the operation of the two operating cylinders 33 that constitute the support release mechanism 32. The control device 70 also controls the elevation and elevation of the magazine 41 by the magazine elevator 42 and the change operation of the mask 15 or jig 50 by the change mechanism 60.

[0058] 10, the control device 70 includes a storage unit 71. The storage unit 71 includes a program storage unit 72 that stores an operation program in which the procedure for the printing operation of printing the paste Pst on the substrate KB is recorded, as well as a data storage unit 73 that stores various data.

[0059] 7, a mask identifier KS1 for individually identifying the mask 15 is provided on the front surface ZM of the mask 15. Also, as shown in Figures 8(a) and 8(b), a jig identifier KS2 for individually identifying the jig 50 is provided on the front surface ZM of the jig 50. The mask identifier KS1 and the jig identifier KS2 are each formed of, for example, a QR code (registered trademark).

[0060] As described above, a plurality of types of lower supports 26 are prepared corresponding to a plurality of types of circuit boards KB, and each type of lower support 26 is adapted to be attached to a dedicated jig 50. Therefore, when a lower support 26 is removed from the jig 50 and then reinstalled to the jig 50, it is always attached to the dedicated jig 50 for that lower support 26. Therefore, a one-to-one relationship is maintained between the lower support 26 and the jig 50 to which the lower support 26 is attached.

[0061] Next, the flow of a printing operation for printing paste Pst on a board KB, which is performed by the printer 1 having the above configuration, will be described with reference to the flowchart in Figure 11. When performing printing, as preparations, the operator OP attaches each of the multiple types of lower supports 26 to be used in the printing operation to its own dedicated jig 50. Then, the operator OP performs a storage operation to store the lower supports 26 with the attached jig 50 in the slot 41S of the magazine 41.

[0062] When attaching the support 26 to the jig 50, the operator OP causes a first information reader 81, which may be, for example, a handheld information reader, to read the individual identification information of the support 26 (referred to as "support information") and the individual identification information of the jig 50 to which the support 26 is to be attached (referred to as "jig information"). Specifically, the operator OP causes the first information reader 81 to recognize the support identifier (upper surface identifier 26P or lower surface identifier 26Q) provided on the upper surface of the support 26 and read the support information recorded in the support identifier, and also causes the first information reader 81 to recognize the jig identifier KS2 provided on the jig 50 and read the jig information recorded in the jig identifier KS2 ( FIG. 12 ). The support information and jig information read by the first information reader 81 are transmitted to the control device 70.

[0063] Upon receiving the jig information and the receiver information transmitted from the first information reader 81, the control device 70 acquires, for each of the plurality of receivers 26, information on a one-to-one correspondence between the receiver information and the jig information (referred to as "first correspondence information J1") (first correspondence information acquisition process; step ST1 shown in FIG. 11). In detail, the control device 70 acquires the first correspondence information J1 for each of the plurality of receivers 26 based on the individual identification information (receiver information) of the receiver 26 read by the first information reader 81 from the receiver identifier (upper surface-side identifier 26P or lower surface-side identifier 26Q) and the individual identification information (jig information) of the jig 50 read by the first information reader 81 from the jig identifier KS2.

[0064] As described above, in this embodiment, the control device 70 serves as a first correspondence information acquisition means that acquires, for each of the plurality of lower supports 26, first correspondence information J1, which is information about the correspondence between the lower support 26 and the jig 50 to which the lower support 26 is attached. After acquiring the first correspondence information J1, the control device 70 stores the data of the first correspondence information J1 in the memory unit 71 (more specifically, the data memory unit 73) (FIGS. 10 and 12).

[0065] 1, a second information reader 82 is provided in front of the storage unit 3. The imaging field of the second information reader 82 faces rearward. When the control device 70 detects that the operator OP has completed the storage work, the control device 70 causes the magazine elevator 42 to raise and lower the magazine 41, while causing the second information reader 82 to read the individual identification information of the mask 15 stored in each slot 41S (referred to as "mask information") recorded on that mask 15 and the individual identification information of the jig 50 (the jig information described above) recorded on the jig 50 (FIG. 13).

[0066] After reading the mask information or jig information, the second information reader 82 transmits the read mask information or jig information to the control device 70 (FIG. 13). At this time, the second information reader 82 also transmits to the control device 70 information about the position of the slot 41S in which the mask 15 or jig 50 is stored (referred to as the "position within the storage section").

[0067] When the control device 70 receives the mask information or jig information and information on the position of the mask 15 or jig 50 within the storage unit (storage unit position information) from the second information reader 82, it acquires, for each of the multiple jigs 50, information on the correspondence relationship ("second correspondence information J2") that establishes a one-to-one correspondence between the mask information or jig information and the corresponding storage unit position information of the mask 15 or jig 50 (second correspondence information acquisition process, step ST2). In detail, the control device 70 acquires the second correspondence information J2 based on the individual identification information (jig information) of the jig 50 read from the jig identifier KS2 and the information on the position of the jig 50 within the storage unit.

[0068] As described above, in this embodiment, the control device 70 functions as a second correspondence information acquisition means that acquires, for each of the multiple jigs 50, the second correspondence information J2, which is information on the correspondence between the jig 50 and the position information within the storage unit of the jig 50. After acquiring the second correspondence information J2, the control device 70 stores the data of the second correspondence information J2 in the storage unit 71 (more specifically, the data storage unit 73) (FIGS. 10 and 13).

[0069] After acquiring the first correspondence information J1 and the second correspondence information J2 as described above, the control device 70 acquires, based on the first correspondence information J1 and the second correspondence information J2, correspondence information (referred to as "third correspondence information J3"; Figure 14) for each of the multiple lower supports 26, which is a replacement part, that corresponds one-to-one between the individual identification information (lower support information) of the lower support 26, which is a replacement part, and information on the position within the storage section of the jig 50 to which the lower support 26 is attached (third correspondence information acquisition process; step ST3).

[0070] As described above, in this embodiment, the control device 70 functions as a third correspondence information acquisition unit that acquires, for each of the plurality of lower receivers 26, third correspondence information J3, which is information about the relationship between the lower receiver 26 and the position within the storage unit of the jig 50 to which the lower receiver 26 is attached, based on the acquired first correspondence information J1 and second correspondence information J2. After acquiring the third correspondence information J3, the control device 70 stores the data of the third correspondence information J3 in the memory unit 71 (more specifically, the data memory unit 73) ( FIG. 10 ).

[0071] When the printing device 1 executes a printing operation to print paste Pst on the board KB, it first executes a lower support installation operation to remove from the storage unit 3 a type of lower support 26 that corresponds to the type of board KB to be produced and install it on the installation stand 25. In the lower support installation operation, the control device 70 first uses the storage unit position detection unit 74 (FIG. 10) to detect the position within the storage unit where the lower support 26 to be installed on the installation stand 25 is stored, based on the third correspondence information J3 stored in the memory unit 71 (first storage unit position detection process, step ST4).

[0072] When the control device 70 detects the position of the lower support 26 to be installed within the storage section, it operates the magazine elevator 42 to raise and lower the magazine 41. Then, the jig 50 located at the detected position within the storage section (slot 41S) is positioned at the height of the guide rail 14.

[0073] When the jig 50 is positioned at the height of the guide rails 14, the control device 70 causes the change mechanism 60 to carry the jig 50 into the printing unit 2 (FIG. 15(a) → FIG. 15(b)), and positions the jig 50 at the mask installation position MI above the installation table 25 (pre-installation jig positioning step, step ST5). As a result, the jig 50 with the lower support body 26 attached is positioned above the installation table 25 together with the lower support body 26 (FIGS. 15(b) and 16).

[0074] When the lower support body 26 is positioned above the installation table 25, the control device 70 advances the printing unit camera 16 to the area below the jig 50. Then, the printing unit camera 16 (more specifically, the upper imaging unit 16b) serving as an imaging means captures an image of the lower surface side identifier 26Q of the lower support body 26 attached to the jig 50 ( FIG. 17( a) ).

[0075] After causing the printing unit camera 16 to capture an image of the lower surface side identifier 26Q, the control device 70 reads the lower support body information recorded in the lower surface side identifier 26Q based on the image capture result. The control device 70 then compares the read lower support body information with the work program stored in the program storage unit 72 and determines whether the lower support body 26 attached to the jig 50 is appropriate (the correct type specified in the work program) (pre-installation lower support body confirmation process, step ST6).

[0076] In this embodiment, the judgment unit 75 of the control device 70 serves as a judgment means for individually identifying the lower support body 26 on which the lower side identifier 26Q is provided from the lower side identifier 26Q imaged by the printing unit camera 16, which is an imaging means, and for determining whether or not the lower support body 26 is suitable for installation on the installation stand 25.

[0077] If the control device 70 determines that the lower support 26 attached to the jig 50 is not appropriate as a result of the above determination, the control device 70 issues an alarm to the operator OP by an alarm means (not shown). On the other hand, if the control device 70 determines that the lower support 26 attached to the jig 50 is appropriate as a result of the determination, the control device 70 operates the substrate holder moving mechanism 13 to raise the lifting base 21, and also operates the lifter 23 to raise the installation table base 24, thereby bringing the installation table 25 closer to the jig 50 from below (FIG. 17(a) → FIG. 17(b)).

[0078] When the installation table 25 has risen to a predetermined height close to the jig 50, the control device 70 stops the raising of the installation table 25 and activates the four lifting cylinders 31. Then, the upper ends of the piston rods 31R of the four lifting cylinders 31 are brought into contact with the four corners of the lower support body 26. As a result, the lower support body 26, which is supported by the jig 50 positioned above the installation table 25, is supported from below by the four lifting cylinders 31 (FIG. 18(a), pre-release support process, step ST7).

[0079] Once the lower support body 26 is supported by the four lift cylinders 31, the control device 70 further moves the piston rods 31R of the four lift cylinders 31 upward, thereby pushing up the lower support body 26. As a result, the multiple overhanging members 26T are spaced upward from the protruding pieces 54T of the two support members 54 (FIG. 18(b)). Note that this step of pushing up the lower support body 26 is not necessarily required.

[0080] The control device 70 operates the four lifting cylinders 31 to support (or further push up) the lower support body 26, and then operates the two operating cylinders 33 to move the two racks 34 in directions away from each other. When the two racks 34 move in directions away from each other, the two pinions 35 rotate about the rotation support shafts 35J, and the pair of operating rods 36 move from the lying-down position to the raised position (FIG. 18(b) → FIG. 19(a)).

[0081] When the pair of operating rods 36 move from the lowered position to the raised position, the pair of support members 54 are pushed by the pair of operating rods 36 and move in directions away from each other (arrow A shown in FIG. 19(a)), and the support of the lower support body 26 by the pair of support members 54 is released (support release step, step ST8). As a result, the lower support body 26 is now supported only by the four lifting cylinders 31.

[0082] Once the support of the lower support body 26 by the pair of support members 54 is released, the control device 70 activates the four lifting cylinders 31 to move the piston rod 31R downward. This causes the lower support body 26 to descend while maintaining a horizontal position, bringing its lower surface into contact with the upper surface of the installation base 25 (fixed installation base 25a and movable installation base 25b) (FIG. 19(a) → FIG. 19(b), FIG. 20(a) → FIG. 20(b)). When the lower surface of the lower support body 26 abuts the upper surface of the installation base 25, the control device 70 generates a vacuum suction force in the vacuum suction port 25K on the upper surface of the fixed installation base 25a. This causes the front region of the lower support body 26 to be suction-held on the upper surface of the fixed installation base 25a, and the lower support body 26 is placed on the installation base 25 (installation process, step ST9).

[0083] In this way, the pair of support release mechanisms 32 provided in the printing device 1 in this embodiment serve as support release means that release the support of the lower support body 26 from the pair of support members 54 by moving the pair of support members 54 in directions away from each other with the jig 50 supporting the lower support body 26 installed above the installation table 25. In addition, the multiple (four) lifting cylinders 31 serve as lifting means that support the lower support body 26 from below before the support by the pair of support members 54 is released by the pair of support release mechanisms 32, which are support release means, and that lower the lower support body 26 and hold it on the installation table 25 after the support by the pair of support members 54 is released by the pair of support release mechanisms 32.

[0084] As described above, the printing device 1 in this embodiment is equipped with a jig 50 that is installed above the installation table 25 in a state in which both ends of the lower support body 26 (more specifically, the multiple protruding members 26T provided at both ends) are supported from below by a pair of support members 54 that are close to each other before the lower support body 26 is installed on the installation table 25, and further equipped with a pair of support release mechanisms 32 as support release means that releases the support of the lower support body 26 by the pair of support members 54 by moving the pair of support members 54 in directions away from each other when the jig 50 supporting the lower support body 26 is positioned above the installation table 25, and a plurality (four) of lifting cylinders 31 as lifting means that support the lower support body 26 from below before the support by the pair of support members 54 is released by the pair of support release mechanisms 32, and that lowers the lower support body 26 to install it on the installation table 25 after the support by the pair of support members 54 is released by the pair of support release mechanisms 32.

[0085] Once the lower support body 26 has been placed by the placement table 25, the control device 70 actuates the two operating cylinders 33 to move the two racks 34 toward each other. As the two racks 34 move toward each other, the two pinions 35 rotate about the pivot shafts 35J, and the pair of operating rods 36 move from their raised positions to their lowered positions. As a result, the pair of support members 54 move toward each other due to the biasing force of the biasing springs 55 (arrow B shown in FIG. 21(a)), and then return to their original positions (the positions before movement) (FIG. 21(a)).

[0086] When the pair of support members 54 have returned to their original positions, the control device 70 activates the lifter 23 to lower the installation table base 24, and activates the substrate-holding unit moving mechanism 13 to lower the substrate holding unit 12 (arrow C shown in FIG. 21(b)). When the substrate holding unit 12 is thereby returned to its original height position (FIGS. 21(b) and 22), the lower support installation work for holding the lower support 26 on the installation table 25 is completed.

[0087] Once the lower support installation work has been completed as described above, the control device 70 advances the printing section camera 16 to the area below the jig 50, and causes the printing section camera 16 (or the lower imaging section 16a in the study) to capture an image of the upper surface identifier 26P provided on the upper surface of the lower support 26 installed on the installation stand 25 (Figure 23).

[0088] After the control device 70 causes the printing unit camera 16 to capture an image of the top surface identifier 26P of the lower receiver 26, the determination unit 75 (FIG. 10) recognizes the top surface identifier 26P captured by the printing unit camera 16 and acquires the individual identification information of the lower receiver 26 recorded in the top surface identifier 26P. Then, by comparing the acquired individual identification information of the lower receiver 26 with the work program, the control device 70 determines whether the lower receiver 26 is properly installed on the installation table 25 (whether it is the correct type specified in the work program) (post-installation determination process, step ST10).

[0089] In this embodiment, the judgment unit 75, which serves as a judgment means, individually identifies the lower support body 26 on which the upper surface identifier 26P is provided from the upper surface identifier 26P imaged by the printing unit camera 16, which serves as an imaging means, and judges whether or not the lower support body 26 is appropriately installed on the installation stand 25.

[0090] If the determination by the determination unit 75 indicates that the lower support 26 installed on the installation table 25 is inappropriate (is not of the correct type specified in the work program), the control device 70 issues an alarm to the operator OP using the alarm means (not shown) described above. On the other hand, if the determination indicates that the lower support 26 installed on the installation table 25 is appropriate (is of the correct type specified in the work program), the control device 70 operates the change mechanism 60 to transport the jig 50 from the mask installation position MI and return it to the magazine 41 of the storage unit 3 (post-installation jig return process, step ST11).

[0091] In this embodiment, the change mechanism 60 is configured to remove the lower support body 26 from the jig 50 taken out of the storage section 3 and place it on the installation table 25, and then return the jig 50 to the storage section 3.

[0092] After returning the jig 50 from which the lower support 26 has been removed to the magazine 41, the control device 70 positions the mask 15 corresponding to the type of board KB to be produced at the mask installation position MI. To do this, first, the above-mentioned storage unit position detection unit 74 detects the position within the storage unit of the mask 15 to be positioned at the mask installation position MI based on the first correspondence information J1 stored in the memory unit 71 (mask storage unit position detection step, step ST12).

[0093] When the control device 70 detects the position within the storage unit of the mask 15 to be placed at the mask placement position MI, it activates the magazine elevator 42 to raise and lower the magazine 41. Then, the mask 15 located at the detected position within the storage unit (i.e., the mask 15 to be placed on the placement table 25) is placed at the height of the guide rails 14.

[0094] When the mask 15 located at the detected position within the storage section is positioned at the height of the guide rails 14, the control device 70 causes the change mechanism 60 to carry the mask 15 into the printing section 2 (FIG. 24(a) → FIG. 24(b)), and positions it at the mask installation position MI (mask positioning step, step ST13). As a result, the mask 15 is positioned above the installation table 25 (FIG. 24(b)).

[0095] Once the mask 15 is positioned at the mask installation position MI, the paste Pst is supplied onto the mask 15. This supply of the paste Pst is performed manually by an operator OP or automatically by a paste supplying device (not shown).

[0096] Once the paste Pst has been supplied onto the mask 15, the control device 70 executes the printing process (step ST14). In the printing process, the control device 70 first operates the conveyor 22 of the substrate holder 12 to load the substrate KB. After the substrate KB has been loaded, the control device 70 operates the lifter 23 to raise the installation table base 24 (FIG. 4(a) → FIG. 4(b)). This raises the lower support 26 together with the installation table 25, and the substrate KB is supported by the lower support 26 (FIG. 25). Once the substrate KB has been supported, an adsorption force is generated in the vacuum chuck hole 26C of the lower support 26, causing the lower support 26 to adsorb and hold the substrate KB.

[0097] Once the substrate KB has been sucked and held by the lower receiver 26, the control device 70 activates the lifter 23 to raise the setting table base 24 (arrow D shown in FIG. 26). Then, after the substrate KB has been clamped by the clamper 27 (arrow E shown in FIG. 26), the setting table base 24 is further raised, so that the upper surface of the substrate KB is at the same height as the upper surface of the clamper 27. This brings the substrate KB into a state where it is held by the substrate holder 12.

[0098] Once the substrate KB is held by the substrate holder 12, the control device 70 advances the printing unit camera 16 into the area between the substrate KB and the mask 15. The lower imaging unit 16a of the printing unit camera 16 then images an alignment mark (not shown) provided on the substrate KB, and the upper imaging unit 16b images an alignment mark (not shown) provided on the mask 15 (FIG. 27). The control device 70 determines the positional relationship between the substrate KB and the mask 15 from the relative positions of the two alignment marks obtained by these images.

[0099] After grasping the positional relationship between the substrate KB and the mask 15, the control device 70 operates the substrate-holding-unit moving mechanism 13 to move the substrate holding unit 12 in the XY plane so that the electrode pattern of the substrate KB and the pattern openings 15K of the mask 15 coincide in a planar view. Then, once the electrode pattern of the substrate KB and the pattern openings 15K of the mask 15 coincide in a planar view, the control device 70 raises the substrate holding unit 12 (arrow F shown in FIG. 28 ) to bring the substrate KB into contact with the mask 15 from below ( FIG. 28 ), thereby aligning the electrode pattern of the substrate KB with the pattern openings 15K of the mask 15.

[0100] When the substrate KB comes into contact with the mask 15, the control device 70 activates the squeegee lifting unit 17M to lower one of the two squeegees 17S. Then, when the lower end of the lowered squeegee 17S abuts against the upper surface of the mask 15, the print head 17 is moved in the Y direction (arrow G shown in FIG. 2 ), and the paste Pst on the mask 15 is scraped up by the squeegee 17S. This fills the pattern openings 15K with the paste Pst, and the paste Pst is applied to the electrode pattern on the substrate KB.

[0101] Once the paste Pst has been applied to the electrode pattern on the substrate KB, the control device 70 operates the substrate holder moving mechanism 13 to lower the substrate holder 12 and separate the substrate KB downward from the mask 15 (so-called plate release). After plate release is complete, the control device 70 operates the conveyor 22 to transport the substrate KB to the outside (substrate transport). This completes printing on one sheet of the substrate KB.

[0102] When the above printing process is repeatedly performed and a change in model is required to change the type of substrate KB to be produced, the control device 70 first returns the used mask 15 to the magazine 41 in the reverse order of the procedure used to position the mask 15 at the mask installation position MI (mask returning process, step ST15).Then, after removing the lower support body 26 (used lower support body 26) installed on the installation table 25, a lower support body replacement operation is performed to install on the installation table 25 a lower support body 26 corresponding to the next model.

[0103] When performing the lower support replacement work, the control device 70 advances the printing unit camera 16 to the area below the jig 50. Then, the lower imaging unit 16a captures an image of the upper surface side identifier 26P of the lower support 26 placed on the placement table 25, and reads the individual identification information (lower support information) of the lower support 26 ( FIG. 23 ).

[0104] After reading the individual identification information of the lower support 26, the control device 70 detects the position within the storage unit of the jig 50 corresponding to the lower support 26 (the lower support 26 to be removed, i.e., the used lower support 26) installed on the installation table 25 based on the read individual identification information and the third correspondence information J3 ( FIG. 14 ) acquired in step ST3 (second storage unit position detection process, step ST16). Specifically, the control device 70 detects the position within the storage unit of the jig 50 (the jig 50 dedicated to the lower support 26 to be removed) returned to the storage unit 3 in the aforementioned step ST11 based on the third correspondence information J3. After detecting the position within the storage unit of the jig 50 corresponding to the lower support 26 to be removed, the control device 70 activates the magazine elevator 42 to raise and lower the magazine 41. The jig 50 located at the detected position within the storage unit is then positioned at the height of the guide rail 14.

[0105] In this embodiment, when the lower support body 26 installed on the installation table 25 is removed from the installation table 25 and returned to the storage section 3, a second storage section position detection process is executed in step ST11 to detect the position within the storage section of the jig 50 returned to the storage section 3 by the change mechanism 60 based on the third correspondence information J3.

[0106] Once the jig 50 is positioned at the height of the guide rails 14, the control device 70 uses the change mechanism 60 to carry the jig 50 into the printing unit 2 (arrow H shown in FIG. 29). The control device 70 then positions the jig 50 at the mask installation position MI (pre-removal jig positioning process, step ST17). This positions the jig 50 corresponding to the lower support 26 to be removed from the installation table 25 above the installation table 25. When the jig 50 is positioned at the mask installation position MI, the lower support 26 to be removed is positioned below the jig 50 (FIG. 29).

[0107] After positioning the jig 50 at the mask installation position MI, the control device 70 removes the used lower support 26 to be removed from the installation table 25 and attaches it to the jig 50 (lower support removing and attaching process, step ST18). The procedure for removing this used lower support 26 from the installation table 25 and attaching it to the jig 50 is the reverse of the procedure for removing the lower support 26 from the jig 50 and installing it on the installation table 25 described above.

[0108] After attaching the used lower support body 26 to the jig 50, the control device 70 returns the jig 50 to which the used lower support body 26 is attached to the storage unit 3 using the same procedure as when the jig 50 was returned to the storage unit 3 after the lower support body 26 was installed on the installation table 25 (removal and jig return process, step ST19). After returning the lower support body 26 to the storage unit 3 in this manner, the control device 70 determines whether to change the model and continue the printing operation (determination process, step ST20). If the model is to be changed and the printing operation is to be continued, the process returns to the first storage unit position detection process of step ST4 and prepares to attach the lower support body 26 corresponding to the next model to the installation table 25. If the model is not to be changed, the printing operation is terminated.

[0109] As described above, in this embodiment, the operation (component replacement method) of replacing the lower support 26, which is a replacement component, on the installation table 25 includes a pre-installation jig positioning process (step ST5) in which a jig 50, which supports both ends of the lower support 26 by a pair of support members 54, is positioned above the installation table 25; a pre-release support process (step ST7) in which the lower support 26, which is supported by the jig 50 positioned above the installation table 25, is supported from below by a plurality of lifting cylinders 31; a support release process (step ST8) in which, while the lower support 26 is supported by the plurality of lifting cylinders 31, the pair of support members 54 are moved in directions away from each other to release the support of the lower support 26 from the pair of support members 54; and an installation process (step ST9) in which the lower support 26 is lowered by the plurality of lifting cylinders 31 and installed on the installation table 25.

[0110] As described above, in the printing apparatus 1 (component replacement method) of the present embodiment, when the lower support body 26 is removed from the jig 50 positioned above the installation table 25 and placed on the installation table 25, first the lower support body 26 is supported from below by the plurality of lifting cylinders 31, then the pair of support release mechanisms 32 move the pair of support members 54 in directions away from each other to release support for the lower support body 26, and once the support is released, the lifting cylinders 31 lower the lower support body 26 to the installation table 25. Therefore, when the lower support body 26 is removed from the jig 50 and placed on the installation table 25, the lower support body 26 simply moves up and down relative to the jig 50.

[0111] For this reason, with the printing device 1 (member replacement method) of this embodiment, when attaching or detaching the lower support 26 to or from the jig 50, there is no need for complicated movements such as lifting the lower support 26 relative to the jig 50, moving the lower support 26 laterally relative to the jig 50, and then lowering it, as has been done in the past. Therefore, with the printing device 1 (member replacement method) of this embodiment, the time required to attach or detach the lower support 26 to or from the jig 50 can be shortened.

[0112] Furthermore, in the printing apparatus 1 of this embodiment, the mask 15 is adapted to be moved above the installation table 25 along a pair of guide rails 14 extending horizontally, and the jig 50 has a shape that allows it to move along the guide rails 14. Therefore, the jig 50 can be moved above the installation table 25 by moving it on the guide rails 14 that also move the mask 15, and is easily adapted to a printing apparatus 1 that has a change mechanism 60 and an automatic mask 15 replacement function, as in this embodiment.

[0113] In this embodiment, the printing operation performed by the printing device 1 includes a first correspondence information acquisition process (step ST1) for acquiring, for each of the plurality of lower supports 26, first correspondence information J1, which is information on the correspondence between the lower supports 26, which are replacement parts, and the jigs 50 to which the lower supports 26 are attached; a second correspondence information acquisition process (step ST2) for acquiring, for each of the plurality of jigs 50, second correspondence information J2, which is information on the correspondence between the jigs 50 and the positions in the storage section 3 of the storage area (slot 41S) in which the jigs 50 are stored; and a process for acquiring, for each of the plurality of jigs 50, second correspondence information J2, which is information on the correspondence between the jigs 50 and the positions in the storage section 3 of the storage area (slot 41S) in which the jigs 50 are stored. Based on this, a third correspondence information acquisition process (step ST3) is performed to acquire third correspondence information J3 for each of the plurality of lower support bodies 26, which is information on the correspondence relationship between the lower support body 26, which is a replacement part, and the position within the storage section of the jig 50 to which the lower support body 26 is attached, and a first storage section position detection process (step ST4) is performed to detect the position within the storage section of the lower support body 26 based on the third correspondence information J3 acquired in the third correspondence information acquisition process when the lower support body 26 to be installed on the installation stand 25 is removed from the storage section 3 and installed on the installation stand 25, which constitutes the component management method in the printing device 1 in this embodiment.

[0114] When the lower support 26 attached to the jig 50 is stored in the storage unit 3, it is difficult to read the individual identification information from the replacement part identifier (lower support identifier, which is upper surface side identifier 26P and lower surface side identifier 26Q), which is its identifier. However, in the present embodiment, the individual identification information (lower support information) of the lower support 26 is managed in association with the individual identification information (jig information) of the jig 50. Therefore, even in a situation where it is difficult to read information from the individual identifier of the lower support 26 because the lower support 26 is attached to the jig 50, the individual identification information of the lower support 26 can be easily obtained by reading information from the individual identifier (jig identifier KS2) of the jig 50. Furthermore, in the present embodiment, the individual identification information of the jig 50 and information on its position within the storage unit are managed in association with each other. Therefore, even if the lower support 26 is stored in the storage unit 3 in a state where it is attached to the jig 50, the position of the lower support 26 can be easily detected from the information on its position within the storage unit. As described above, according to this embodiment, the lower support 26 attached to the jig 50 can be easily managed.

[0115] Furthermore, in the printing device 1 of this embodiment, an image of the underside identifier 26Q provided on the underside of the lower receiver 26 is captured by the printing unit camera 16, which is an imaging means, from below the lower receiver 26 that is positioned above the installation stand 25 in order to be installed on the installation stand 25, and the lower receiver 26 is individually identified from the underside identifier 26Q obtained by the image capture, and it is determined whether or not the lower receiver 26 is appropriate to be installed on the installation stand 25. Therefore, with the printing device 1 of this embodiment, it is possible to confirm whether the lower receiver 26 is the lower receiver 26 that should be installed on the installation stand 25 immediately before the lower receiver 26 is installed on the installation stand 25, and it is possible to prevent in advance the mistake of attaching a lower receiver 26 that should not be installed on the installation stand 25 to the installation stand 25.

[0116] Furthermore, an upper surface identifier 26P is provided on the upper surface of the lower support 26 to individually identify the lower support 26, and the individual identification of the lower support 26 can also be performed by imaging the upper surface identifier 26P. Therefore, in the printing device 1 of this embodiment, it is also possible to determine whether the lower support 26 placed on the installation table 25 is properly placed on the installation table 25.

[0117] As described above, in the printing device 1 (component management method) of the present embodiment, the individual identification information of the lower support 26 and the individual identification information of the jig 50 to which the lower support 26 is attached are linked and managed, so even if the lower support 26 is stored in the storage unit 3 while attached to the jig 50, the position of the lower support 26 can be easily detected from the information on its position within the storage unit. Furthermore, because the individual identification information of the jig 50 and the information on its position within the storage unit are linked and managed, even if the lower support 26 is stored in the storage unit 3 while attached to the jig 50, the position of the lower support 26 can be easily detected from the information on its position within the storage unit. Therefore, according to the printing device 1 (component management method) of the present embodiment, the lower support 26 can be easily managed while attached to the jig 50.

[0118] Although the embodiments of the present disclosure have been described above, the present disclosure is not limited to the above and various modifications are possible. For example, the configurations of the support release means, lifting means, etc. shown in the above-described embodiments are merely examples, and other configurations may be used as long as they function to perform the required operations. The jig 50 may also have other configurations as long as it has a pair of support members 54 that can move toward and away from each other and is positioned above the installation table 25 with both ends of the replacement part supported from below by the pair of support members 54 before installation on the installation table 25.

[0119] Furthermore, in the above-described embodiment, the replacement member is described as the lower support body 26 that supports the substrate KB from below, but the replacement member is not limited to the lower support body 26 and may be a member such as a cleaning unit that cleans the underside of the mask 15 or a paste supply pod that supplies the paste Pst.

[0120] Furthermore, in the above-described embodiment, the substrate processing apparatus to which the present disclosure is applied has been described as a printing apparatus 1 that performs printing work to print paste Pst on a substrate KB through a mask 15, but the substrate processing apparatus to which the present disclosure is applied may be an apparatus that includes an exchangeable member and an installation stand on which the exchangeable member is installed in a removable manner, and that performs a predetermined process on a substrate by installing the exchangeable member on the installation stand, and is not limited to the printing apparatus 1.

[0121] This application is based on a Japanese patent application (Patent Application No. 2023-202807) filed on November 30, 2023, the contents of which are incorporated herein by reference.

[0122] A substrate processing apparatus and a member management method are provided that can easily manage replacement members attached to jigs.

[0123] REFERENCE SIGNS LIST 1 Printing apparatus (substrate processing apparatus) 2 Printing section 3 Storage section 15 Mask 16 Printing section camera 25 Installation stand 25K Vacuum suction port 26 Lower receiver (replaceable member) 26P Upper surface side identifier (replaceable member identifier) ​​26Q Lower surface side identifier (replaceable member identifier) ​​31 Lifting cylinder 32 Support release mechanism 41 Magazine 41S Slot (storage area) 42 Magazine elevator 51 Frame body 54 Support member 55 Biasing spring 60 Change mechanism 70 Control device (first information acquisition means) (second information acquisition means) (third information acquisition means) 71 Memory section 74 Storage section position detection section 75 Determination section 81 First information reader 82 Second information reader J1 First correspondence information J2 Second correspondence information J3 Third correspondence information KS1 Mask identifier KS2 Jig Identifier KB Board

Claims

1. A substrate processing apparatus comprising an exchangeable part and a mounting stand on which the exchangeable part is detachably mounted, and which performs a predetermined process on a substrate by mounting the exchangeable part on the mounting stand, the substrate processing apparatus comprising: a jig on which the exchangeable part is mounted; and a first correspondence information acquisition means for acquiring, for each of a plurality of exchangeable parts, first correspondence information which is information on the correspondence between the exchangeable part and the jig on which the exchangeable part is mounted.

2. A substrate processing apparatus as described in claim 1, comprising: a storage unit having a plurality of storage areas in which the jigs are stored; a second correspondence information acquisition means for acquiring, for each of the plurality of jigs, second correspondence information which is information on the correspondence between the jigs and a position within the storage unit which is the position in the storage unit of the storage area in which the jigs are stored; and a third correspondence information acquisition means for acquiring, for each of the plurality of replacement parts, third correspondence information which is information on the correspondence between the replacement parts and the position within the storage unit of the jigs to which the replacement parts are attached, based on the first correspondence information acquired by the first correspondence information acquisition means and the second correspondence information acquired by the second correspondence information acquisition means.

3. A substrate processing apparatus as described in claim 2, wherein the replacement part is provided with a replacement part identifier on which individual identification information of the replacement part is recorded, and the jig is provided with a jig identifier on which individual identification information of the jig is recorded, the first correspondence information acquisition means acquires the first correspondence information based on the individual identification information of the replacement part read from the replacement part identifier and the individual identification information of the jig read from the jig identifier, and the second correspondence information acquisition means acquires the second correspondence information based on the individual identification information of the jig read from the jig identifier and information on the position of the jig within a storage unit.

4. A substrate processing apparatus as described in claim 2, comprising: a change mechanism which removes the jig from the storage unit and moves it toward the installation table; and a storage unit position detection unit which detects the position of a replacement part within the storage unit based on the third correspondence information acquired by the third correspondence information acquisition means when the replacement part to be installed on the installation table is removed from the storage unit and installed on the installation table, and wherein the change mechanism removes the jig from the storage unit position of the replacement part detected by the storage unit position detection unit.

5. The substrate processing apparatus of claim 4, wherein the change mechanism is adapted to return the jig to the storage unit after the replacement part is removed from the jig removed from the storage unit and placed on the installation table, and when the replacement part placed on the installation table is removed from the installation table and returned to the storage unit, the storage unit position detection unit detects the position within the storage unit of the jig returned to the storage unit based on the third correspondence information, and the change mechanism removes the jig from the position within the storage unit of the jig detected by the storage unit position detection unit.

6. A substrate processing apparatus as described in any one of claims 1 to 5, comprising: a mask with which the upper surface of the substrate supported by the lower support comes into contact; and a squeegee that prints paste on the substrate through the mask by scraping up paste on the mask with which the upper surface of the substrate comes into contact.

7. A component management method in a substrate processing apparatus comprising a replacement part, a mounting stand on which the replacement part is detachably mounted, and a jig to which the replacement part is attached, and which performs a predetermined process on a substrate by mounting the replacement part on the mounting stand, the component management method including a first correspondence information acquisition step of acquiring, for each of a plurality of replacement parts, first correspondence information which is information on the correspondence between the replacement part and the jig to which the replacement jig is attached.

8. The member management method according to claim 7, wherein the substrate processing apparatus is provided with a storage unit having a plurality of storage areas in which the jigs are stored, and further comprising: a second correspondence information acquisition process for acquiring, for each of the plurality of jigs, second correspondence information which is information on the correspondence between the jig and a position within the storage unit which is the position in the storage unit of the storage area in which the jig is stored; and a third correspondence information acquisition process for acquiring, for each of the plurality of replacement parts, third correspondence information which is information on the correspondence between the replacement part and a position within the storage unit of the jig to which the replacement part is attached, based on the first correspondence information acquired in the first correspondence information acquisition process and the second correspondence information acquired in the second correspondence information acquisition process.

9. A member management method as described in claim 8, wherein the replacement member is provided with a replacement member identifier in which individual identification information of the replacement member is recorded, and the jig is provided with a jig identifier in which individual identification information of the jig is recorded, the first correspondence information acquisition step acquires the first correspondence information based on the individual identification information of the replacement member read from the replacement member identifier and the individual identification information of the jig read from the jig identifier, and the second correspondence information acquisition step acquires the second correspondence information based on the individual identification information of the jig read from the jig identifier and information on the position of the jig within a storage section.

10. The material management method described in claim 8, wherein the substrate processing apparatus is provided with a change mechanism that removes the jig from the storage section and moves it toward the installation table, and when a replacement part to be installed on the installation table is removed from the storage section and installed on the installation table, a first storage section position detection process is executed to detect the position of the replacement part within the storage section based on the third correspondence information acquired in the third correspondence information acquisition process.

11. A material management method as claimed in claim 10, wherein the change mechanism is adapted to return the jig to the storage unit after the replacement part is removed from the jig taken out of the storage unit and placed on the installation stand, and when the replacement part placed on the installation stand is removed from the installation stand and returned to the storage unit, a second storage unit position detection process is executed to detect the position within the storage unit of the jig returned to the storage unit based on the third correspondence information.

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