Radio frequency circuit, radio frequency power supply device, and reactance compensation method

Abstract

The present application provides a radio frequency circuit, a radio frequency power supply device, and a reactance compensation method, relating to the technical field of radio frequency. The radio frequency circuit comprises a radio frequency power supply, a radio frequency output terminal, a transformer, a reactance compensation unit, and a turns ratio adjustment unit. The radio frequency power supply is configured to provide radio frequency power to a load. The radio frequency output terminal is configured to connect to the load. The transformer comprises a primary winding and a secondary winding, the primary winding being connected between the radio frequency power supply and the radio frequency output terminal. The reactance compensation unit is connected in series to the secondary winding of the transformer and is configured to selectively provide a compensation reactance. The turns ratio adjustment unit is configured to adjust the turns ratio of the transformer. When reactance compensation is needed in the radio frequency circuit, the reactance compensation unit provides a compensation reactance, and the turns ratio adjustment unit adjusts the turns ratio of the transformer, so as to compensate for the reactance on the primary winding side of the radio frequency circuit. The present application enables convenient reactance compensation for radio frequency circuits.

Description

Radio frequency circuit, radio frequency power supply equipment and reactance compensation method

[0001] This application claims priority to the Chinese patent application filed with the Patent Office of China on December 18, 2023, with application number 202311734436.9 and application name “RF Circuit, RF Power Supply Equipment and Reactance Compensation Method”, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present application relates to the field of radio frequency technology, and in particular to a radio frequency circuit, a radio frequency power supply device, and a reactance compensation method. Background Art

[0003] Currently, with the popularity of various radio frequency (RF) applications, impedance matching of RF circuits has become increasingly important in order to obtain a maximum load power value.

[0004] However, the current RF circuit design is becoming increasingly complex, and the components are becoming increasingly diverse. Whether before the RF circuit is working or when the reactance of the load changes during operation, it is difficult to compensate for the reactance of the RF circuit by adjusting the RF circuit. Therefore, how to conveniently compensate for the reactance of the RF circuit has become an issue that needs to be considered.

[0005] Summary of the Invention

[0006] The present application provides a radio frequency circuit, a radio frequency power supply device, and a reactance compensation method, which can conveniently perform reactance compensation on the radio frequency circuit.

[0007] In a first aspect, a radio frequency circuit is provided, comprising: a radio frequency power supply, a radio frequency output terminal, a transformer, a reactance compensation unit, and a transformation ratio adjustment unit, wherein the radio frequency power supply is used to provide radio frequency power to a load; the radio frequency output terminal is used to connect a load; the transformer comprises a primary winding and a secondary winding, and the primary winding is connected between the radio frequency power supply and the radio frequency output terminal; the reactance compensation unit is connected in series with the secondary winding of the transformer to selectively provide a compensating reactance; the transformation ratio adjustment unit is used to adjust the transformation ratio of the transformer; wherein, when the radio frequency circuit requires reactance compensation, the reactance compensation unit provides the compensating reactance, and the transformation ratio adjustment unit adjusts the transformation ratio of the transformer to compensate for the reactance of the radio frequency circuit on the primary winding side.

[0008] In one possible embodiment, the reactance compensation unit includes a first compensation branch, a second compensation branch and a switching unit, the first compensation branch is inductive, and the second compensation branch is capacitive; wherein, the switching unit is used to connect the first compensation branch or the second compensation branch in series with the secondary winding according to the reactance properties presented by one side of the primary winding to provide the compensation reactance, and the transformation ratio adjustment unit is used to further adjust the transformation ratio of the transformer according to the reactance properties presented by one side of the primary winding after compensation by the first compensation branch or the second compensation branch, so as to further compensate for the reactance properties presented by the RF circuit on the primary winding side.

[0009] In one possible embodiment, the switching unit is used to connect the first compensation branch in series with the secondary winding to provide compensating inductive reactance when the reactance property presented on one side of the primary winding is capacitive, and to connect the second compensation branch in series with the secondary winding to provide compensating capacitive reactance when the reactance property presented on one side of the primary winding is inductive; the transformation ratio adjustment unit is also used to further adjust the transformation ratio of the transformer according to the reactance property presented on one side of the primary winding after compensation by the first compensation branch, so as to further compensate for the reactance property presented by the RF circuit on the primary winding side.

[0010] In one possible embodiment, the situation in which the RF circuit needs to perform reactance compensation includes the situation in which the power of the load changes. When the power of the load changes, the reactance compensation unit provides compensating reactance, and the transformation ratio adjustment unit is further used to adjust the transformation ratio of the transformer in a corresponding adjustment direction and adjustment amplitude to compensate for the reactance of the RF circuit on the primary winding side, wherein the adjustment direction is the direction of increasing or decreasing the transformation ratio of the transformer, and the adjustment amplitude is the transformation ratio change value under the adjustment direction.

[0011] In one possible embodiment, when the power of the load changes continuously within a preset time period, the transformation ratio adjustment unit is further used to adjust the transformation ratio of the transformer at a corresponding adjustment speed to compensate for the reactance of the primary winding side that changes continuously within the preset time period, and the adjustment speed is the transformation ratio change value per unit time.

[0012] In a possible embodiment, the RF circuit further includes a matching unit, which is located in the output path of the RF power of the RF power supply to cooperate with the reactance compensation unit to match the reactance of the RF circuit on the primary winding side.

[0013] In the second aspect, a radio frequency power supply device is also provided, which includes the above-mentioned radio frequency circuit and further includes: a detection unit for detecting the parameters of the radio frequency power supply and the parameters of the load connected to the radio frequency output terminal; a control unit for calculating the target transformation ratio value of the transformer based on at least the parameters of the radio frequency power supply, the parameters of the load and the current transformation ratio value of the transformer, and controlling the transformation ratio adjustment unit to adjust the transformation ratio of the transformer to the target transformation ratio value, so as to compensate for the reactance of the radio frequency circuit on the primary winding side. The RF circuit includes: an RF power supply, an RF output end, a transformer, a reactance compensation unit and a transformation ratio adjustment unit, wherein the RF power supply is used to provide RF power to a load; the RF output end is used to connect to a load; the transformer includes a primary winding and a secondary winding, and the primary winding is connected between the RF power supply and the RF output end; the reactance compensation unit is connected in series with the secondary winding of the transformer and is used to selectively provide compensating reactance; the transformation ratio adjustment unit is used to adjust the transformation ratio of the transformer; wherein, when the RF circuit needs to perform reactance compensation, the reactance compensation unit provides the compensating reactance, and the transformation ratio adjustment unit adjusts the transformation ratio of the transformer to compensate for the reactance of the RF circuit on the primary winding side.

[0014] In a possible embodiment, the control unit is further used to determine the adjustment parameters of the ratio adjustment unit based on the parameters of the RF power supply, the parameters of the load, and the current ratio value and the target ratio value of the transformer, wherein the parameters of the RF power supply include the value of the RF power provided by the RF power supply, the parameters of the load include at least the power value of the load, and the adjustment parameters include at least the adjustment direction and adjustment amplitude of the ratio adjustment unit.

[0015] In a third aspect, a reactance compensation method is further provided, which is applied to the above-mentioned radio frequency power supply device and is used to compensate the radio frequency circuit in the radio frequency power supply device. The reactance compensation method includes:

[0016] Detecting parameters of the RF power supply and parameters of the load connected to the RF output terminal through a detection unit;

[0017] Calculate the target transformation ratio of the transformer based on the parameters of the RF power supply, the parameters of the load, and the current transformation ratio of the transformer;

[0018] The control ratio adjustment unit adjusts the transformation ratio of the transformer to a target transformation ratio value to compensate for the reactance of the radio frequency circuit on the primary winding side.

[0019] The RF power supply device includes the above-mentioned RF circuit, and also includes: a detection unit, which is used to detect the parameters of the RF power supply and the parameters of the load connected to the RF output end; a control unit, which is used to calculate the target transformation ratio value of the transformer based on at least the parameters of the RF power supply, the parameters of the load and the current transformation ratio value of the transformer, and control the transformation ratio adjustment unit to adjust the transformation ratio of the transformer to the target transformation ratio value, so as to compensate for the reactance of the RF circuit on the primary winding side.

[0020] In a possible implementation manner, after calculating the target transformation ratio of the transformer based on the parameters of the RF power supply, the parameters of the load, and the current transformation ratio of the transformer, the method further includes:

[0021] Determining adjustment parameters of the ratio adjustment unit according to parameters of the RF power supply, parameters of the load, and the current ratio value and target ratio value of the transformer;

[0022] The parameters of the RF power supply include the value of the RF power provided by the RF power supply, the parameters of the load include at least the power value of the load, and the adjustment parameters include at least the adjustment direction and adjustment amplitude of the transformation ratio adjustment unit.

[0023] The RF circuit, RF power supply device and reactance compensation method of the present application are connected in series with the secondary winding of the transformer through a reactance compensation unit, and can selectively provide compensating reactance, and adjust the transformation ratio of the transformer through a transformation ratio adjustment unit. When the RF circuit needs reactance compensation, the reactance compensation unit provides compensating reactance, and the transformation ratio adjustment unit adjusts the transformation ratio of the transformer, thereby conveniently compensating the reactance of the RF circuit on the primary winding side, so that the RF circuit completes impedance matching and obtains the maximum load power value. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0025] FIG1 is a circuit diagram of a radio frequency circuit in an embodiment of the present application.

[0026] FIG2 is a circuit diagram of a first compensation branch in another embodiment of the present application.

[0027] FIG3 is a circuit diagram of a first compensation branch in yet another embodiment of the present application.

[0028] FIG4 is a circuit diagram of a second compensation branch in another embodiment of the present application.

[0029] FIG5 is a circuit diagram of a second compensation branch in yet another embodiment of the present application.

[0030] FIG6 is a circuit diagram of a radio frequency circuit in another embodiment of the present application.

[0031] FIG7 is a circuit diagram of a rotating motor in which the ratio adjustment unit is a rotating motor in an embodiment of the present application.

[0032] FIG8 is a circuit diagram of a radio frequency circuit in an embodiment of the present application further including a matching unit.

[0033] FIG9 is a circuit diagram of a radio frequency power supply device in an embodiment of the present application.

[0034] FIG10 is a step diagram of a reactance compensation method in an embodiment of the present application.

[0035] FIG11 is a step diagram of a reactance compensation method in another embodiment of the present application.

[0036] Explanation of the accompanying drawings: 1. RF power supply equipment, 10. RF circuit, 100. RF power supply, 200. RF output end, 210. First end, 220. Second end, RL, load, 300. Transformer, 310. Primary winding, 320. Secondary winding, n, transformation ratio, 400. Reactance compensation unit, 411. First compensation branch, L1, compensation inductor, S2, first compensation switch, 412. Second compensation branch, C1, compensation capacitor, S3, second compensation switch, 413. Switch unit, S1, single-pole multi-throw switch, 414. Third compensation branch, 500, transformation ratio adjustment unit, 600, matching unit, 700, direct output branch, S4, direct output switch, GND, ground, 20. Detection unit, L2, matching inductor, C2, matching capacitor, 30. Control unit. DETAILED DESCRIPTION

[0037] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0038] In the description of the embodiments of the present application, it should be noted that the terms "upper", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present application and simplifying the description, and do not imply or indicate that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present application.

[0039] In the description of the embodiments of this application, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; and direct connections or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0040] In the description of the embodiments of the present application, it should be noted that the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, a feature defined as "first", "second", or "third" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "multiple" means two or more.

[0041] In addition, the terms "include" and "have" and any variations thereof are intended to cover a non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, product, or device.

[0042] Please refer to FIG. 1 , which is a schematic diagram of a radio frequency circuit in an embodiment of the present application. As shown in Figure 1, the present application provides a radio frequency circuit 10, which includes: an radio frequency power supply 100, an radio frequency output terminal 200, a transformer 300, a reactance compensation unit 400 and a transformation ratio adjustment unit 500. The radio frequency power supply 100 is used to provide radio frequency power to the load RL; the radio frequency output terminal 200 is used to connect the load RL; the transformer 300 includes a primary winding 310 and a secondary winding 320, and the primary winding 310 is connected between the radio frequency power supply 100 and the radio frequency output terminal 200; the reactance compensation unit 400 is connected in series with the secondary winding 320 of the transformer 300, and is used to selectively provide compensating reactance; the transformation ratio adjustment unit 500 is used to adjust the transformation ratio n of the transformer 300; wherein, when the radio frequency circuit 10 needs to perform reactance compensation, the reactance compensation unit 400 provides the compensating reactance, and the transformation ratio adjustment unit 500 adjusts the transformation ratio n of the transformer 300 to compensate for the reactance of the radio frequency circuit 10 on the primary winding 310 side.

[0043] Thus, the reactance compensation unit 400 is connected in series with the secondary winding 320 of the transformer 300, and can selectively provide compensating reactance, and the transformation ratio n of the transformer 300 is adjusted through the transformation ratio adjustment unit 500. When the RF circuit 10 needs to perform reactance compensation, the reactance compensation unit 400 provides compensating reactance, and the transformation ratio adjustment unit 500 adjusts the transformation ratio n of the transformer 300. Through the cooperation of the reactance compensation unit 400 and the transformation ratio adjustment unit 500, the reactance of the RF circuit 10 on the primary winding 310 side can be compensated conveniently and accurately, so that the RF circuit 10 completes impedance matching and obtains the maximum power value of the load RL.

[0044] Specifically, the reactance of the RF circuit 10 on the primary winding 310 side includes the sum of the internal reactance of the RF power supply 100, the reactance of the primary winding 310, and the reactance of the connected load RL. Whether the RF circuit 10 is operating before or during operation and the load RL changes, impedance matching of the RF circuit 10 is required. When the RF power supply 100 provides RF power to the load RL in an impedance-matched state, the maximum power value of the load RL can be obtained. That is, the internal impedance of the RF power supply 100 of the RF circuit 10 matches the impedance of the load RL connected to the RF output terminal 200, and the RF power provided by the RF power supply 100 is also the power value of the load RL.

[0045] The transformer 300 can transmit reactive power, and the primary power P1 is equal to the secondary power P2, and the following relationship expression is satisfied:

[0046] P1=n*U12 / Z1; P2=U22 / Z2.

[0047] Where U1 is the primary voltage, Z1 is the reactance of the primary winding 310, U2 is the secondary voltage, and Z2 is the secondary reactance. Since there are no electrical consumers on the secondary winding 320 side of the RF circuit 10, the primary voltage U1 is equal to the secondary voltage U2. Therefore, the primary reactance Z1 = n*Z2. When the secondary reactance Z2 is not zero, adjusting the transformation ratio n of the transformer 300 and / or adjusting the secondary reactance Z2 can change the reactance Z1 of the primary winding 310, thereby changing the reactance of the RF circuit 10 on the primary winding 310 side and compensating for the reactance of the RF circuit 10 on the primary winding 310 side.

[0048] Furthermore, when the RF circuit 10 needs to perform reactance compensation, the present application does not need to adjust the circuit part of the RF circuit 10 on the primary winding 310 side, and only provides compensating reactance in the circuit part on the secondary winding 320 side. The adjustment unit adjusts the transformation ratio n of the transformer 300, so as to conveniently compensate for the reactance of the RF circuit 10 on the primary winding 310 side, so that the RF circuit 10 completes impedance matching and obtains the maximum power value of the load RL.

[0049] In one or more embodiments, when the RF circuit 10 needs to perform reactance compensation, the reactance compensation unit 400 can first provide the compensating reactance, and the transformation ratio adjustment unit 500 can then adjust the transformation ratio n of the transformer 300 to compensate for the reactance of the RF circuit 10 on the primary winding 310 side. The reactance of the RF circuit 10 on the primary winding 310 side can be preliminarily compensated by the compensating reactance, and then the reactance of the RF circuit 10 on the primary winding 310 side can be further compensated by adjusting the transformation ratio n of the transformer 300.

[0050] In one or more embodiments, when the RF circuit 10 requires reactance compensation, the transformation ratio adjustment unit 500 may also first adjust the transformation ratio n of the transformer 300, and the reactance compensation unit 400 may then provide the compensating reactance. Based on the reactance compensation value required by the RF circuit 10 and the compensating reactance value that the reactance compensation unit 400 can provide, the transformation ratio n of the transformer 300 may be first adjusted to the target transformation ratio value, and then the compensating reactance may be provided. This avoids the situation where the absolute value of the primary reactance on the primary winding 310 side of the compensating reactance is greater than the reactance compensation value required by the RF circuit 10 due to a large difference between the current transformation ratio value of the transformer 300 and the target transformation ratio value, or even the absolute value of the reactance Z1 of the primary winding 310 is greater than twice the reactance compensation value required by the RF circuit 10, which in turn causes the internal impedance of the RF power supply 100 of the RF circuit 10 to be further mismatched with the impedance of the load RL connected to the RF output terminal 200, and the power value of the load RL is lower.

[0051] In one or more embodiments, when the RF circuit 10 needs to perform reactance compensation, the transformation ratio adjustment unit 500 can also preliminarily adjust the transformation ratio n of the transformer 300, and the reactance compensation unit 400 then provides the compensation reactance. The transformation ratio adjustment unit 500 finally further adjusts the transformation ratio n of the transformer 300, so that the reactance of the RF circuit 10 on the primary winding 310 side can be gradually compensated when the RF circuit 10 needs to perform reactance compensation, thereby avoiding excessive disturbance to the circuit part of the RF circuit 10 on the primary winding 310 side.

[0052] In particular, to avoid counterproductive reactance compensation for the RF circuit 10 on the primary winding 310 side, the value of the compensating reactance can be reduced, the transformation ratio n of the transformer 300 can be pre-adjusted, and a compensation threshold can be set. When the reactance compensation value required by the RF circuit 10 is less than the compensation threshold, the reactance compensation unit 400 does not provide compensating reactance. When the reactance change value is greater than or equal to the compensation threshold, the reactance compensation unit 400 provides compensating reactance, and the transformation ratio adjustment unit 500 adjusts the transformation ratio n of the transformer 300 to compensate for the reactance of the RF circuit 10 on the primary winding 310 side. The compensation threshold can be the absolute value of the difference between the compensating reactance provided by the reactance compensation unit 400 and the minimum reactance Z1 of the primary winding 310.

[0053] Among them, the transformation ratio n of the transformer 300 is the turns ratio of the primary winding 310 and the secondary winding 320 of the transformer 300. The number of turns of the primary winding 310 can be adjusted, and the number of turns of the secondary winding 320 can be adjusted, both of which can adjust the transformation ratio n of the transformer 300.

[0054] In one or more embodiments, the internal resistance value of the RF power supply 100 and the resistance value of the load RL can both be a standard resistance value of 50Ω. By only performing reactance compensation on the RF circuit 10, the internal impedance of the RF power supply 100 of the RF circuit 10 and the impedance matching of the load RL connected to the RF output terminal 200 can be achieved, which makes it easier for the RF circuit 10 to complete impedance matching.

[0055] In one or more embodiments, the RF output end 200 includes a first end 210 and a second end 220, the first end 210 is connected to one end of the primary winding 310, and the second end is grounded GND, one end of the RF power supply 100 is connected to the other end of the primary winding 310, and the other end of the RF power supply 100 is grounded GND.

[0056] As shown in Figure 1, the reactance compensation unit 400 includes a first compensation branch 411, a second compensation branch 412 and a switch unit 413. The first compensation branch 411 is inductive and the second compensation branch 412 is capacitive. The switch unit 413 is used to connect the first compensation branch 411 or the second compensation branch 412 in series with the secondary winding 320 according to the reactance properties presented on one side of the primary winding 310 to provide compensation reactance. The transformation ratio adjustment unit 500 is used to further adjust the transformation ratio n of the transformer 300 according to the reactance properties presented on one side of the primary winding 310 after compensation in the first compensation branch 411 or the second compensation branch 412, so as to further compensate for the reactance properties presented by the RF circuit 10 on the primary winding 310 side.

[0057] Thus, the first compensation branch 411 or the second compensation branch 412 is connected in series with the secondary winding 320 through the switching unit 413 according to the reactance properties presented on one side of the primary winding 310 to provide a compensating reactance, and the transformation ratio n of the transformer 300 is further adjusted through the transformation ratio adjustment unit 500 according to the reactance properties presented on one side of the primary winding 310 after compensation in the first compensation branch 411 or the second compensation branch 412, so as to conveniently further compensate for the reactance properties presented by the RF circuit 10 on the primary winding 310 side, so that the RF circuit 10 completes impedance matching and obtains the maximum power value of the load RL.

[0058] In one or more embodiments, the RF circuit 10 also includes a direct output branch 700, which is connected in parallel with the reactance compensation unit. The direct output branch 700 includes a direct output switch S4. The direct output switch S4 is used to connect the direct output branch 700 in series with the secondary winding 320 when the RF circuit 10 does not need to perform reactance compensation, and short-circuit the reactance compensation unit 400. At this time, the reactance compensation unit 400 does not perform reactance compensation.

[0059] Therefore, the direct output path can avoid disabling the reactance compensation unit 400 when the RF circuit 10 does not need reactance compensation, and can maintain the secondary winding 320 to maintain the path, so that the impedance of the RF circuit 10 is still matched.

[0060] As shown in Figure 1, the switching unit 413 is used to connect the first compensation branch 411 in series with the secondary winding 320 to provide compensating inductive reactance when the reactance property presented on the primary winding 310 side is capacitive, and to connect the second compensation branch 412 in series with the secondary winding 320 to provide compensating capacitive reactance when the reactance property presented on the primary winding 310 side is inductive; the transformation ratio adjustment unit 500 is also used to further adjust the transformation ratio n of the transformer 300 according to the reactance property presented on the primary winding 310 side after compensation by the first compensation branch 411, so as to further compensate for the reactance property presented by the RF circuit 10 on the primary winding 310 side.

[0061] Thus, compensating inductive reactance or compensating capacitive reactance is provided according to the reactance properties presented on one side of the primary winding 310, and the transformation ratio n of the transformer 300 is further adjusted according to the reactance properties presented on one side of the primary winding 310 after compensation by the first compensation branch 411, so that the RF circuit 10 can be further compensated on the primary winding 310 side.

[0062] In one or more embodiments, when the reactance property presented on one side of the primary winding 310 is capacitive, the switch unit 413 connects the first compensation branch 411 in series with the secondary winding 320 to provide compensation for the capacitive reactance, and increases the transformation ratio n of the transformer 300 when the reactance property presented on the side of the primary winding 310 after compensation by the first compensation branch 411 is capacitive, and decreases the transformation ratio n of the transformer 300 when it is inductive, so as to further compensate for the reactance property presented by the RF circuit 10 on the side of the primary winding 310. Similarly, when the reactance property presented on the primary winding 310 side is inductive, the switch unit 413 connects the second compensation branch 412 in series with the secondary winding 320 to provide compensating inductive reactance, and increases the transformation ratio n of the transformer 300 when the reactance property presented on the primary winding 310 side after compensation by the second compensation branch 412 is inductive, and decreases the transformation ratio n of the transformer 300 when it is capacitive, so as to further compensate for the reactance property presented by the RF circuit 10 on the primary winding 310 side.

[0063] As shown in Figure 1, the switch unit 413 includes a single-pole multi-throw switch S1, which includes a fixed end and multiple free ends. The fixed end is connected to one end of the secondary winding 320, the first compensation branch 411 is connected between one of the free ends and the other end of the secondary winding 320, and the second compensation branch 412 is connected between the other free end and the other end of the secondary winding 320. The throwing end of the single-pole multi-throw switch S1 can be selectively connected to one of the free ends, thereby connecting the first compensation branch 411 or the second compensation branch 412 in series with the secondary winding 320.

[0064] Thus, the throwing end of the single-pole multi-throw switch S1 can be selectively connected to one of the free ends, and the inductive first compensation branch 411 or the capacitive second compensation branch 412 can be connected in series with the secondary winding 320 according to the reactance properties presented on one side of the primary winding 310.

[0065] As shown in FIG1 , the first compensation branch 411 includes at least one compensation inductor L1 , and the second compensation branch 412 includes at least one compensation capacitor C1 .

[0066] Thus, the first compensation branch 411 is inductive through the at least one compensation inductor L1 to provide a compensating inductive reactance when connected in series with the secondary winding 320. Furthermore, the second compensation branch 412 is capacitive through the at least one compensation capacitor C1 to provide a compensating capacitive reactance when connected in series with the secondary winding 320.

[0067] As shown in FIG1 , at least one compensation inductor L1 is an adjustable inductor, and at least one compensation capacitor C1 is an adjustable capacitor. By adjusting the size of at least one compensation inductor L1 or at least one compensation capacitor C1, the value of the compensation inductive reactance or the compensation capacitive reactance on the primary winding 310 side is conjugate with the reactance compensation value required by the RF circuit 10.

[0068] Thus, by making at least one compensation inductor L1 an adjustable inductor and at least one compensation capacitor C1 an adjustable capacitor, the size of at least one compensation inductor L1 or at least one compensation capacitor C1 can be adjusted according to the reactance properties presented on one side of the primary winding 310, and auxiliary compensation is performed on the reactance properties presented by the RF circuit 10 on the primary winding 310 side, so that the value of the compensation inductive reactance or the compensation capacitive reactance on the primary winding 310 side is conjugate with the reactance compensation value required by the RF circuit 10. There is even no need to adjust the transformation ratio n of the transformer 300 by the adjustment unit. By only adjusting the size of at least one compensation inductor L1 or at least one compensation capacitor C1, the reactance of the RF circuit 10 on the primary winding 310 side can be compensated, so that the RF circuit 10 completes impedance matching and obtains the maximum power value of the load RL.

[0069] Please refer to Figures 2 and 3 . Figure 2 is a schematic circuit diagram of the first compensation branch in another embodiment of the present application, and Figure 3 is a schematic circuit diagram of the first compensation branch in yet another embodiment of the present application. As shown in Figures 2 and 3 , the first compensation branch 411 includes at least two compensation inductors L1 connected in series or in parallel and at least two first compensation switches S2 . The at least two first compensation switches S2 are used to connect at least one compensation inductor L1 in series with the secondary winding 320 to provide a compensating inductive reactance when the reactance property exhibited by the primary winding 310 is capacitive, so that the value of the compensating inductive reactance on the primary winding 310 side is conjugate with the reactance compensation value required by the RF circuit 10 .

[0070] Thus, by using at least two compensation inductors L1 connected in series or in parallel and at least two first compensation switches S2, when the reactance property presented on one side of the primary winding 310 is capacitive, at least one compensation inductor L1 can be connected in series with the secondary winding 320, and the value of the provided compensation inductive reactance on the side of the primary winding 310 is conjugate with the reactance compensation value required by the RF circuit 10.

[0071] In one or more embodiments, each first compensation switch S2 may connect a corresponding compensation inductor L1 in series with the secondary winding 320 , so as to facilitate control of connection and disconnection of each compensation inductor L1 .

[0072] In one or more embodiments, the compensation inductances provided by each compensation inductor L1 may be the same or different, that is, the size of each compensation inductor L1 may be the same or different.

[0073] Please refer to Figures 4 and 5 , which are a schematic circuit diagram of a second compensation branch in another embodiment of the present application, and Figure 5 is a schematic circuit diagram of a second compensation branch in yet another embodiment of the present application. As shown in Figures 4 and 5 , the second compensation branch 412 includes at least two compensation capacitors C1 connected in series or in parallel and at least two second compensation switches S3 . The at least two second compensation switches S3 are used to connect at least one compensation capacitor C1 in series with the secondary winding 320 to provide a compensating capacitive reactance when the reactance property exhibited by the primary winding 310 side is inductive, so that the value of the compensating capacitive reactance on the primary winding 310 side is conjugate with the reactance compensation value required by the RF circuit 10 .

[0074] Thus, by using at least two compensation capacitors C1 connected in series or in parallel and at least two second compensation switches S3, when the reactance property presented on one side of the primary winding 310 is inductive, at least one compensation capacitor C1 can be connected in series with the secondary winding 320, and the value of the provided compensation capacitive reactance on the primary winding 310 side is conjugate with the reactance compensation value required by the RF circuit 10.

[0075] In one or more embodiments, each second compensation switch S3 may connect a corresponding compensation capacitor C1 in series with the secondary winding 320 , thereby facilitating control of connection and disconnection of each compensation capacitor C1 .

[0076] In one or more embodiments, the compensation capacitive reactance provided by each compensation capacitor C1 may be the same or different, that is, the size of each compensation capacitor C1 may be the same or different.

[0077] In one or more embodiments, the first compensation branch 411 may further include at least one auxiliary capacitor, which is connected in series or in parallel with the compensation inductor L1, and the second compensation branch 412 may further include at least one auxiliary inductor, which is connected in series or in parallel with the compensation capacitor C1.

[0078] Thus, at least one auxiliary capacitor can be used to assist in adjusting the value of the compensation inductive reactance provided by the first compensation branch 411. Furthermore, at least one auxiliary inductor can be used to assist in adjusting the value of the compensation capacitive reactance provided by the second compensation branch 412, thereby avoiding the difficulty of accurately adjusting the value of the provided compensation inductive reactance or compensation capacitive reactance using a single compensation inductor L1 and compensation capacitor C1.

[0079] Please refer to Figure 6, which is a circuit diagram of an RF circuit in another embodiment of the present application. As shown in Figure 6, the reactance compensation unit 400 includes a third compensation branch 414 and a switch unit 413. The third compensation branch 414 is inductive or capacitive. The switch unit 413 is configured to connect the third compensation branch 414 in series with the secondary winding 320 to provide compensation for inductive reactance or capacitive reactance based on the reactance properties of the primary winding 310. The transformation ratio adjustment unit 500 is configured to further adjust the transformation ratio n of the transformer 300 based on the reactance properties of the primary winding 310 after compensation by the third compensation branch 414, thereby further compensating for the reactance properties of the RF circuit 10 on the primary winding 310.

[0080] Thus, according to the reactance properties presented on one side of the primary winding 310, the third compensation branch 414 is connected in series with the secondary winding 320 through the switch unit 413 to provide compensation inductive reactance or compensation capacitive reactance, and according to the reactance properties presented on one side of the primary winding 310 after compensation by the third compensation branch 414, the transformation ratio adjustment unit 500 further adjusts the transformation ratio n of the transformer 300, and conveniently further compensates for the reactance properties presented by the RF circuit 10 on the primary winding 310 side, so that the RF circuit 10 completes impedance matching and obtains the maximum power value of the load RL.

[0081] Among them, at least one compensation inductor L1 is an adjustable inductor, and at least one compensation capacitor C1 is an adjustable capacitor. By adjusting the size of at least one compensation inductor L1 or at least one compensation capacitor C1, the value of the compensation inductive reactance or the compensation capacitive reactance on the primary winding 310 side is conjugate with the reactance compensation value required by the radio frequency circuit 10.

[0082] Therefore, compared with the reactance compensation unit 400 of the RF circuit 10 of one embodiment shown in Figure 1, the reactance compensation unit 400 of the RF circuit 10 of another embodiment shown in Figure 6 does not require an inductive first compensation branch 411 and a capacitive second compensation branch 412. Only one compensation branch, namely the third compensation branch 414 in Figure 6, is required to provide compensation for inductive reactance or compensation for capacitive reactance. The adjustable inductance and adjustable capacitance of the third compensation branch 414 can also accurately adjust the value of the provided compensation reactance.

[0083] In one or more embodiments, situations in which the RF circuit 10 requires reactance compensation include situations in which the power of the load RL changes. When the power of the load RL changes, the reactance compensation unit 400 provides compensating reactance, and the transformation ratio adjustment unit 500 is also used to adjust the transformation ratio n of the transformer 300 in a corresponding adjustment direction and adjustment amplitude to compensate for the reactance of the RF circuit 10 on the primary winding 310 side, wherein the adjustment direction is the direction of increasing or decreasing the transformation ratio n of the transformer 300, and the adjustment amplitude is the change value of the transformation ratio n under the adjustment direction.

[0084] Thus, when the power of the load RL changes, it is determined that the RF circuit 10 needs to perform reactance compensation, the reactance compensation unit 400 provides the compensating reactance, and the ratio adjustment unit 500 adjusts the transformation ratio n of the transformer 300 in the corresponding adjustment direction and adjustment amplitude to accurately compensate for the reactance of the RF circuit 10 on the primary winding 310 side.

[0085] Please refer to Figure 7, which is a circuit diagram of an embodiment of the present application in which the ratio adjustment unit is a rotary motor. As shown in Figure 7, the ratio adjustment unit 500 can be a rotary motor, the adjustment direction is the rotation direction of the rotary motor, and the adjustment range is the number of rotations of the rotary motor or a specific rotation angle.

[0086] Specifically, the transformer 300 further includes an iron core, the primary winding 310 may include a primary bobbin for winding the primary winding, the primary bobbin being rotatably mounted on the iron core, and the secondary winding 320 may include a secondary bobbin for winding the secondary winding, the secondary bobbin being rotatably mounted on the iron core. The rotating shaft of the rotating motor is fixedly connected to the primary bobbin or the secondary bobbin. For example, in FIG7 , the rotating motor rotates, driving the secondary bobbin to rotate. As a result, the rotation of the secondary bobbin increases or decreases the number of turns of the secondary winding wound on the secondary bobbin, thereby adjusting the transformation ratio n of the transformer 300 to increase or decrease.

[0087] The rotation direction includes a first direction and a second direction, the first direction being opposite to the second direction. When the rotary motor rotates in the first direction, the adjustment direction may be a direction of increasing the transformation ratio n of the transformer 300. Correspondingly, when the rotary motor rotates in the second direction, the adjustment direction may be a direction of decreasing the transformation ratio n of the transformer 300. When the rotary motor rotates in the first direction, the adjustment direction may also be a direction of decreasing the transformation ratio n of the transformer 300. Correspondingly, when the rotary motor rotates in the second direction, the adjustment direction may be a direction of increasing the transformation ratio n of the transformer 300.

[0088] When the power of the load RL continuously changes within a preset period, the transformation ratio adjustment unit 500 is further configured to adjust the transformation ratio n of the transformer 300 at a corresponding adjustment speed to compensate for the reactance continuously changing on the primary winding 310 side during the preset period. The adjustment speed is the change in the transformation ratio n per unit time. Thus, when the power of the load RL continuously changes within a preset period, the transformation ratio n of the transformer 300 is adjusted by the transformation ratio adjustment unit 500 at the corresponding adjustment speed to compensate for the reactance of the RF circuit 10 on the primary winding 310 side in real time.

[0089] In one or more embodiments, the regulated speed is the rotational speed of the rotary motor.

[0090] In one or more embodiments, when the load RL does not continuously change within a preset period, the transformation ratio adjustment unit 500 may adjust the transformation ratio n of the transformer 300 only in the corresponding adjustment direction and adjustment amplitude to compensate for the reactance of the RF circuit 10 on the primary winding 310 side. When the load RL continuously changes within a preset period, the transformation ratio adjustment unit 500 may simultaneously adjust the transformation ratio n of the transformer 300 in the corresponding adjustment direction, adjustment amplitude, and adjustment speed to compensate for the reactance on the primary winding 310 side that continuously changes within the preset period.

[0091] In one or more embodiments, when the load RL changes slowly within a preset time period, the transformation ratio adjustment unit 500 may also adjust the transformation ratio n of the transformer 300 only with the corresponding adjustment direction and adjustment amplitude to compensate for the reactance of the RF circuit 10 on the primary winding 310 side. That is, a change rate threshold may be set. When the change rate of the load RL within the preset time period is less than the change rate threshold, the transformation ratio adjustment unit 500 adjusts the transformation ratio n of the transformer 300 with the corresponding adjustment direction and adjustment amplitude. When the change rate of the load RL within the preset time period is greater than or equal to the change rate threshold, the transformation ratio adjustment unit 500 adjusts the transformation ratio n of the transformer 300 with the corresponding adjustment direction, adjustment amplitude, and adjustment speed.

[0092] Please refer to Figure 8, which is a schematic diagram of a circuit in which the RF circuit in one embodiment of the present application further includes a matching unit. As shown in Figure 8, the RF circuit 10 further includes a matching unit 600. The matching unit 600 is located in the RF power output path of the RF power supply 100 and cooperates with the reactance compensation unit 400 to match the reactance of the RF circuit 10 on the primary winding 310 side.

[0093] Therefore, the reactance of the RF circuit 10 on the primary winding 310 side is matched by the matching unit 600 and the reactance compensation unit 400 .

[0094] In one or more embodiments, the matching unit 600 may be connected between the RF power supply 100 and the RF output terminal 200 , or may be located inside the RF power supply 100 .

[0095] In one or more embodiments, when the load RL is a purely resistive load and the internal resistance value of the RF power supply 100 and the resistance value of the load RL are both standard resistance values ​​of 50Ω, it is easier to perform impedance matching on the RF circuit 10 before operation. The matching unit 600 can cooperate with the reactance compensation unit 400 to only perform reactance matching on the internal reactance of the RF power supply 100, thereby achieving impedance matching between the internal impedance of the RF power supply 100 and the load RL.

[0096] In one or more embodiments, when the load RL is an inductive load or a capacitive load, and the internal resistance value of the RF power supply 100 and the resistance value of the load RL are both a standard resistance value of 50Ω, the matching unit 600 can also cooperate with the reactance compensation unit 400 to perform reactance matching on the reactance of the load RL, thereby achieving impedance matching between the internal impedance of the RF power supply 100 and the load RL.

[0097] In one or more embodiments, when the internal resistance value of the RF power supply 100 is inconsistent with the resistance value of the load RL, the matching unit 600 can also be used to perform impedance matching on the internal resistance of the RF power supply 100 and the resistance of the load RL, thereby achieving impedance matching between the internal impedance of the RF power supply 100 and the load RL.

[0098] In one or more embodiments, the matching unit 600 may include at least one matching inductor L2 and at least one matching capacitor C2, and the at least one matching inductor L2 and the at least one matching capacitor C2 are connected in series or in parallel. It may also include resistive components such as a matching resistor. The present application is not limited to this, as long as the matching unit 600 can at least perform reactance matching on the internal reactance of the RF power supply 100.

[0099] The RF circuit 10 of the present application, through the above-mentioned structure, does not need to adjust the circuit part of the RF circuit 10 on the side of the primary winding 310, and only provides compensating reactance on the circuit part on the side of the secondary winding 320. The adjustment unit adjusts the transformation ratio n of the transformer 300, which can conveniently and accurately compensate the reactance of the RF circuit 10 on the side of the primary winding 310, and can perform real-time compensation, so that the RF circuit 10 completes impedance matching and obtains the maximum power value of the load RL.

[0100] Please refer to Figure 9, which is a circuit diagram of an RF power supply device in an embodiment of the present application. As shown in Figure 9, the present application also provides an RF power supply device 1, which includes the above-mentioned RF circuit 10, and also includes: a detection unit 20 for detecting parameters of the RF power supply 100 and parameters of a load RL connected to the RF output terminal 200; a control unit 30 for calculating a target transformation ratio value of the transformer 300 based on at least the parameters of the RF power supply 100, the parameters of the load RL, and the current transformation ratio value of the transformer 300, and controlling the transformation ratio adjustment unit 500 to adjust the transformation ratio n of the transformer 300 to the target transformation ratio value to compensate for the reactance of the RF circuit 10 on the primary winding 310 side.

[0101] As shown in Figure 9, the RF circuit 10 includes: an RF power supply 100, an RF output terminal 200, a transformer 300, a reactance compensation unit 400 and a transformation ratio adjustment unit 500. The RF power supply 100 is used to provide RF power to the load RL; the RF output terminal 200 is used to connect the load RL; the transformer 300 includes a primary winding 310 and a secondary winding 320, and the primary winding 310 is connected between the RF power supply 100 and the RF output terminal 200; the reactance compensation unit 400 is connected in series with the secondary winding 320 of the transformer 300 to selectively provide compensating reactance; the transformation ratio adjustment unit 500 is used to adjust the transformation ratio n of the transformer 300; wherein, when the RF circuit 10 needs to perform reactance compensation, the reactance compensation unit 400 provides the compensating reactance, and the transformation ratio adjustment unit 500 adjusts the transformation ratio n of the transformer 300 to compensate for the reactance of the RF circuit 10 on the primary winding 310 side.

[0102] The more specific structure of the radio frequency circuit 10 can be found in the relevant content of the radio frequency circuit 10 in any of the aforementioned embodiments, which will not be repeated here.

[0103] Thus, the detection unit 20 detects the parameters of the RF power supply 100 and the parameters of the load RL connected to the RF output terminal 200, and the control unit 30 calculates the target transformation ratio value of the transformer 300 based on at least the parameters of the RF power supply 100, the parameters of the load RL and the current transformation ratio value of the transformer 300, and controls the transformation ratio adjustment unit 500 to adjust the transformation ratio n of the transformer 300 to the target transformation ratio value, so as to compensate for the reactance of the RF circuit 10 on the primary winding 310 side.

[0104] In one or more embodiments, the detection unit 20 may include a voltage detection unit, a current detection unit, etc., wherein the voltage detection unit may be a voltmeter, or other voltage detection devices such as a voltage sensor, or a voltage detection circuit composed of components such as resistors, capacitors, and diodes; the current detection unit may be an ammeter, or other current detection devices such as a Hall sensor, or a current detection circuit composed of components such as resistors, capacitors, and diodes.

[0105] In one or more embodiments, the control unit 30 is further used to determine the adjustment parameters of the ratio adjustment unit 500 based on the parameters of the RF power supply 100, the parameters of the load RL, and the current transformation ratio value and the target transformation ratio value of the transformer 300, wherein the parameters of the RF power supply 100 include the value of the RF power provided by the RF power supply 100, the parameters of the load RL include at least the power value of the load RL, and the adjustment parameters include at least the adjustment direction and adjustment amplitude of the transformation ratio adjustment unit 500.

[0106] Therefore, the control unit 30 determines the adjustment parameters of the transformation ratio adjustment unit 500 to accurately compensate for the reactance of the radio frequency circuit 10 on the primary winding 310 side.

[0107] In one or more embodiments, the detection unit 20 is used to detect the values ​​of the RF voltage and RF current of the RF power supply 100 and the voltage and current values ​​across the load RL. The control unit 30 obtains the value of the RF power provided by the RF power supply 100 and the power value of the load RL based on the values ​​of the RF voltage and RF current of the RF power supply 100 and the voltage and current values ​​across the load RL, and then calculates the target transformation ratio value of the transformer 300 based on the current transformation ratio value of the transformer 300, and controls the transformation ratio adjustment unit 500 to adjust the transformation ratio n of the transformer 300 to the target transformation ratio value, so as to compensate for the reactance of the RF circuit 10 on the primary winding 310 side.

[0108] In one or more embodiments, the adjustment parameter further includes the adjustment speed of the transformation ratio adjustment unit 500. Thus, the reactance of the RF circuit 10 on the primary winding 310 side is compensated in real time.

[0109] When the ratio adjustment unit 500 is a rotary motor, the adjustment direction is the rotation direction of the rotary motor, the adjustment amplitude is the number of rotations of the rotary motor or a specific rotation angle, and the adjustment speed is the rotation speed of the rotary motor.

[0110] In one or more embodiments, the control unit 30 can be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).

[0111] The RF circuit 10 and RF power supply device 1 of the present application, through the above structure, detect the parameters of the RF power supply 100 and the parameters of the load RL connected to the RF output terminal 200, and calculate the target transformation ratio value of the transformer 300 based on at least the parameters of the RF power supply 100, the parameters of the load RL and the current transformation ratio value of the transformer 300 through the control unit 30, and control the transformation ratio adjustment unit 500 to adjust the transformation ratio n of the transformer 300 to the target transformation ratio value. The reactance of the RF circuit 10 on the primary winding 310 side can be accurately compensated conveniently and in real time, so that the RF circuit 10 completes impedance matching and obtains the maximum power value of the load RL.

[0112] Please refer to Figure 10, which is a step diagram of a reactance compensation method in an embodiment of the present application. As shown in Figure 10, the present application also provides a reactance compensation method, which is applied to the above-mentioned RF power supply device 1 to compensate the RF circuit 10 in the RF power supply device 1. The reactance compensation method includes:

[0113] Step S100: detecting parameters of the RF power supply and parameters of the load connected to the RF output terminal by a detection unit;

[0114] Step S200: Calculating a target transformation ratio of the transformer based on parameters of the RF power supply, parameters of the load, and the current transformation ratio of the transformer;

[0115] Step S300: controlling the transformation ratio adjustment unit to adjust the transformation ratio of the transformer to a target transformation ratio value, so as to compensate for the reactance of the radio frequency circuit on the primary winding side.

[0116] As shown in Figure 9, the RF power supply device 1 includes the above-mentioned RF circuit 10, and also includes: a detection unit 20, which is used to detect the parameters of the RF power supply 100 and the parameters of the load RL connected to the RF output terminal 200; a control unit 30, which is at least used to calculate the target transformation ratio value of the transformer 300 based on the parameters of the RF power supply 100, the parameters of the load RL and the current transformation ratio value of the transformer 300, and control the transformation ratio adjustment unit 500 to adjust the transformation ratio n of the transformer 300 to the target transformation ratio value, so as to compensate for the reactance of the RF circuit 10 on the primary winding 310 side.

[0117] The more specific structure of the radio frequency power supply device 1 can be found in the relevant content of the radio frequency power supply device 1 in any of the aforementioned embodiments, which will not be repeated here.

[0118] Thus, by detecting the parameters of the RF power supply 100 and the parameters of the load RL connected to the RF output terminal 200, and based on the parameters of the RF power supply 100, the parameters of the load RL and the current transformation ratio value of the transformer 300, the target transformation ratio value of the transformer 300 is calculated, and the transformation ratio adjustment unit 500 is controlled to adjust the transformation ratio n of the transformer 300 to the target transformation ratio value, so as to compensate for the reactance of the RF circuit 10 on the primary winding 310 side.

[0119] Please also refer to FIG11, which is a step diagram of the reactance compensation method in another embodiment of the present application. As shown in FIG10 and FIG11, after step S200: based on the parameters of the RF power supply, the parameters of the load and the current transformation ratio of the transformer, the target transformation ratio of the transformer is calculated, the following steps are also included:

[0120] Step S210: determining adjustment parameters of the ratio adjustment unit according to parameters of the RF power supply, parameters of the load, and the current and target ratio values ​​of the transformer;

[0121] The parameters of the RF power supply 100 include the value of the RF power provided by the RF power supply 100 , the parameters of the load RL include at least the power value of the load RL, and the adjustment parameters include at least the adjustment direction and adjustment amplitude of the ratio adjustment unit 500 .

[0122] Therefore, by determining the adjustment parameters of the transformation ratio adjustment unit 500 , the reactance of the radio frequency circuit 10 on the primary winding 310 side can be accurately compensated.

[0123] As shown in FIG10 and FIG11 , step S300: controlling the transformation ratio adjustment unit to adjust the transformation ratio of the transformer to a target transformation ratio value to compensate for the reactance of the RF circuit on the primary winding side, including:

[0124] Step S310: controlling the transformation ratio adjustment unit to adjust the transformation ratio of the transformer to a target transformation ratio value by adjusting the parameters, so as to compensate for the reactance of the radio frequency circuit on the primary winding side.

[0125] In one or more embodiments, the adjustment parameter further includes the adjustment speed of the transformation ratio adjustment unit 500. Thus, the reactance of the RF circuit 10 on the primary winding 310 side is compensated in real time.

[0126] In one or more embodiments, the control unit 30 of the RF power supply device 1 executes the above-mentioned reactance compensation method to compensate the RF circuit 10 in the RF power supply device 1 .

[0127] The RF circuit 10, RF power supply device 1 and reactance compensation method of the present application, through the above-mentioned structure and method, do not need to adjust the circuit part of the RF circuit 10 on the primary winding 310 side, and only provide compensation reactance in the circuit part on the secondary winding 320 side. The adjustment unit adjusts the transformation ratio n of the transformer 300, which can conveniently and accurately compensate the reactance of the RF circuit 10 on the primary winding 310 side, and can perform real-time compensation, so that the RF circuit 10 completes impedance matching and obtains the maximum power value of the load RL.

[0128] The above description is only a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by any person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of this application; the embodiments of this application and the features of the embodiments can be combined with each other unless there is a conflict. Therefore, the scope of protection of this application should be based on the scope of protection of the claims.

Claims

1. A radio frequency circuit, comprising: A radio frequency power supply, used for providing radio frequency power to a load; RF output terminal, used to connect the load; A transformer, comprising a primary winding and a secondary winding, wherein the primary winding is connected between the RF power supply and the RF output terminal; A reactance compensation unit, connected in series with the secondary winding of the transformer, for selectively providing a compensating reactance; as well as A transformation ratio adjustment unit, used for adjusting the transformation ratio of the transformer; When the RF circuit needs to perform reactance compensation, the reactance compensation unit provides the compensation reactance, and the transformation ratio adjustment unit adjusts the transformation ratio of the transformer to compensate for the reactance of the RF circuit on the primary winding side.

2. The radio frequency circuit according to claim 1, wherein: The reactance compensation unit comprises a first compensation branch, a second compensation branch and a switch unit, the first compensation branch is inductive, and the second compensation branch is capacitive; Among them, the switching unit is used to connect the first compensation branch or the second compensation branch in series with the secondary winding according to the reactance properties presented on one side of the primary winding to provide the compensation reactance, and the transformation ratio adjustment unit is used to further adjust the transformation ratio of the transformer according to the reactance properties presented on one side of the primary winding after compensation by the first compensation branch or the second compensation branch to further compensate for the reactance properties presented by the RF circuit on the primary winding side.

3. The radio frequency circuit according to claim 2, wherein: The switch unit is used to connect the first compensation branch in series with the secondary winding to provide a compensating inductive reactance when the reactance property presented on one side of the primary winding is capacitive, and to connect the second compensation branch in series with the secondary winding to provide a compensating capacitive reactance when the reactance property presented on one side of the primary winding is inductive; The transformation ratio adjustment unit is also used to further adjust the transformation ratio of the transformer according to the reactance properties of the primary winding after compensation by the first compensation branch, so as to further compensate for the reactance properties of the RF circuit on the primary winding.

4. The radio frequency circuit according to claim 1, wherein: The situation in which the RF circuit needs to perform reactance compensation includes the situation in which the power of the load changes. When the power of the load changes, the reactance compensation unit provides compensating reactance, and the transformation ratio adjustment unit is also used to adjust the transformation ratio of the transformer with a corresponding adjustment direction and adjustment amplitude to compensate for the reactance of the RF circuit on the primary winding side, wherein the adjustment direction is the direction of increasing or decreasing the transformation ratio of the transformer, and the adjustment amplitude is the transformation ratio change value in the adjustment direction.

5. The radio frequency circuit according to claim 4, wherein: When the power of the load changes continuously within a preset time period, the transformation ratio adjustment unit is also used to adjust the transformation ratio of the transformer at a corresponding adjustment speed to compensate for the reactance of the primary winding that changes continuously within the preset time period. The adjustment speed is the transformation ratio change value per unit time.

6. The radio frequency circuit according to claim 1, wherein: The RF circuit also includes a matching unit, which is located in the output path of the RF power of the RF power supply to cooperate with the reactance compensation unit to achieve matching of the reactance of the RF circuit on one side of the primary winding.

7. A radio frequency power supply device, wherein: comprising a radio frequency circuit as claimed in any one of claims 1 to 5; And also includes: A detection unit, used to detect parameters of the RF power supply and parameters of the load connected to the RF output terminal; The control unit is at least used to calculate the target transformation ratio value of the transformer based on the parameters of the RF power supply, the parameters of the load and the current transformation ratio value of the transformer, and control the transformation ratio adjustment unit to adjust the transformation ratio of the transformer to the target transformation ratio value to compensate for the reactance of the RF circuit on the primary winding side.

8. The radio frequency power supply device according to claim 7, wherein: The control unit is also used to determine the adjustment parameters of the ratio adjustment unit according to the parameters of the RF power supply, the parameters of the load, and the current transformation ratio value and the target transformation ratio value of the transformer, wherein the parameters of the RF power supply include the value of the RF power provided by the RF power supply, the parameters of the load include at least the power value of the load, and the adjustment parameters include at least the adjustment direction and adjustment amplitude of the transformation ratio adjustment unit.

9. A reactance compensation method, wherein: Applied in the radio frequency power supply device according to claim 7 or 8, for compensating the radio frequency circuit in the radio frequency power supply device, the reactance compensation method comprises: Detecting parameters of the RF power supply and parameters of a load connected to the RF output terminal by a detection unit; Based on the parameters of the RF power supply, the parameters of the load and the current transformation ratio value of the transformer, a target transformation ratio value of the transformer is calculated; The control ratio adjustment unit adjusts the transformation ratio of the transformer to a target transformation ratio value to compensate for the reactance of the radio frequency circuit on the primary winding side.

10. The reactance compensation method according to claim 9, wherein: After the target transformation ratio of the transformer is calculated based on the parameters of the RF power supply, the parameters of the load and the current transformation ratio of the transformer, the method further includes: Determine the adjustment parameters of the ratio adjustment unit according to the parameters of the RF power supply, the parameters of the load, and the current ratio value and the target ratio value of the transformer; The parameters of the RF power supply include the value of the RF power provided by the RF power supply, the parameters of the load include at least the power value of the load, and the adjustment parameters include at least the adjustment direction and adjustment amplitude of the transformation ratio adjustment unit.

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