Method for implementing docking of a plurality of overhead hoist transport systems by using conveying device

Abstract

A method for implementing docking of a plurality of overhead hoist transport systems by using a conveying device, comprising: a conveying device is newly added between two overhead hoist transport system devices for series connection, and the conveying device is docked with an inlet and an outlet of the two overhead hoist transport system devices and registers as a process device; when a carrier wafer is dispatched across areas of the two overhead hoist transport systems, a manufacturing execution system controls the process device of a first overhead hoist transport system to implement feeding; and the carrier wafer is automatically transferred to a second overhead hoist transport system, and the manufacturing execution system controls the second overhead hoist transport system to implement discharging. According to the method, different registrations are performed for a device for series connection across overhead hoist transport systems, thereby achieving series connection of a plurality of overhead hoist transport systems within a certain factory area, then solving the problem concerning integration of overhead hoist transport system devices of different suppliers, and paying the way for localization of overhead hoist transport system devices.

Description

A method for connecting multiple overhead crane handling systems using transmission equipment Technical Field

[0001] The present invention relates to the field of semiconductor production, and in particular to a method for achieving docking of multiple overhead crane transport systems by utilizing transmission equipment. Background Art

[0002] In automated logistics factories connected by overhead crane handling (OHT) systems, a single supplier's overhead crane handling system typically supports factory-wide logistics scheduling. The manufacturing execution system (MES) only issues carrier wafer scheduling requests for a given process. Currently, OHT equipment and the associated logistics scheduling systems are monopolized by foreign suppliers. If domestic OHT equipment were to be introduced and transferred to the associated logistics scheduling system, real-time information exchange would be required between two different logistics control and scheduling systems to complete carrier wafer scheduling tasks for their respective factory areas. One of these systems would then provide feedback to the MES regarding the final scheduling results. This entire process would require significant adjustments to the existing logistics scheduling system architecture, posing risks to its stability and even the risk of rejection by the existing logistics scheduling system supplier.

[0003] Summary of the Invention

[0004] In order to solve the technical problems existing in the prior art, the present invention provides a method for connecting multiple overhead crane handling systems using transmission equipment, and implements different registration methods for equipment connected in series across OHTs, effectively solving the problem of allowing multiple OHTs to be connected in series in the same factory area, thereby solving the problem of importing OHT equipment from different suppliers.

[0005] To achieve the above object, the technical solutions of the present invention are as follows:

[0006] A method for docking multiple overhead crane handling systems using a transmission device comprises the following steps:

[0007] Step 1: Add a transmission device to connect the two overhead crane transport systems. In the manufacturing execution system, the import and export of the transmission device connecting the two overhead crane transport systems are registered as process equipment. The two overhead crane transport systems are respectively recorded as the first overhead crane transport system and the second overhead crane transport system.

[0008] Step 2: When the wafer carrier is dispatched across two overhead crane transport systems, the manufacturing execution system controls the loading of the process equipment of the first overhead crane transport system.

[0009] Step 3: The wafer carrier is automatically transferred to the second-day transport system, and the manufacturing execution system controls the unloading of the wafer from the second-day transport system.

[0010] As an optimal technical solution, the two overhead crane handling systems exchange real-time information through two material scheduling systems. The first overhead crane handling system corresponds to the original material scheduling system, and the second overhead crane handling system corresponds to the new material scheduling system.

[0011] As a preferred technical solution, in step one, the second-day vehicle handling system and transmission equipment are uniformly controlled by the new material scheduling system.

[0012] As an optimal technical solution, in step two, the manufacturing execution system sends a loading request to the process equipment of the first-day car handling system. After receiving the loading request, the first-day car handling system transports the carrier wafer to the entrance of the transmission equipment, and feeds back the result of the scheduling task completion to the raw material scheduling system. The raw material scheduling system then feeds back the result of the loading completion to the manufacturing execution system.

[0013] As an optimal technical solution, in step three, when the carrier wafer arrives at the exit of the transmission equipment, the manufacturing execution system sends a material unloading scheduling request to the process equipment of the second-day vehicle handling system. Under the scheduling of the new material scheduling system, the second-day vehicle handling system moves the carrier wafer from the exit of the transmission equipment and feeds back the results of the scheduling task completion to the new material scheduling system. The new material scheduling system then feeds back the results of the loading completion to the manufacturing execution system.

[0014] As a preferred technical solution, the transmission equipment is registered in different systems in different ways: registered as EQP in the manufacturing execution system, registered as EQP1 in the original material scheduling system, and registered as CV in the new material scheduling system.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] The present invention provides a method for docking multiple overhead crane transport systems using transmission equipment. Different registration methods are implemented for equipment connected in series across OHTs. By splitting the processes, the problem that the manufacturing execution system can only place one carrier wafer scheduling demand for one process is solved. The scheduling problem across two or more overhead crane transport systems is effectively solved, while avoiding the structural adjustment of the original material scheduling system. Domestically produced equipment is uniformly docked, controlled and managed by the new material scheduling system, effectively avoiding the risk of foreign suppliers' equipment refusing to be modified. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] 1 is a flow chart of a method for docking multiple overhead crane handling systems using transmission equipment according to the present invention;

[0018] 2 is a flow chart of step 2 of the method for docking multiple overhead crane handling systems using transmission equipment according to the present invention;

[0019] FIG3 is a flow chart of step three of the method for docking multiple overhead crane transport systems using transmission equipment according to the present invention. DETAILED DESCRIPTION

[0020] The technical solution of the present invention is further described below in conjunction with specific embodiments:

[0021] As shown in Figure 1, MES is the manufacturing execution system, Conveyor (CV) is the transmission equipment, CVS is the transmission equipment control system, OHT1 is the first crane handling system, OHT2 is the second crane handling system, FOUP is the carrier, MCS1 is the original material scheduling system, MCS2 is the new material scheduling system, OCS1 is the crane control system corresponding to the first crane handling system, and OCS2 is the crane control system corresponding to the second crane handling system. A method for connecting multiple crane handling systems using transmission equipment includes the following steps:

[0022] Step 1: Add a new transmission equipment between the two sets of overhead crane handling system equipment for serial connection. In the manufacturing execution system, the import and export of the transmission equipment connecting the two sets of overhead crane handling system equipment are registered as process equipment. The two sets of overhead crane handling systems are respectively recorded as the first crane handling system and the second crane handling system. The two sets of overhead crane handling systems exchange real-time information through two sets of material scheduling systems. The first crane handling system corresponds to the original material scheduling system, and the second crane handling system corresponds to the new material scheduling system.

[0023] Step two, as shown in Figure 2, when the carrier wafer is scheduled across two sets of overhead crane transport system areas, the manufacturing execution system controls the loading of the process equipment of the first overhead crane transport system; specifically, the manufacturing execution system sends a loading request to the process equipment of the first overhead crane transport system. After receiving the loading request, the first overhead crane transport system transports the carrier wafer to the entrance of the transmission equipment and feeds back the result of the scheduling task completion to the raw material scheduling system, and the raw material scheduling system then feeds back the result of the loading completion to the manufacturing execution system.

[0024] In step three, as shown in Figure 3, the carrier wafers are automatically transferred to the second-day transport system, where the manufacturing execution system controls unloading. Specifically, after the carrier wafers are transported from the inlet to the outlet of the conveyor equipment, the manufacturing execution system issues an unloading scheduling request to the process equipment of the second-day transport system. Under the scheduling of the new material scheduling system, the second-day transport system removes the carrier wafers from the conveyor equipment outlet and feeds back the scheduling task completion result to the new material scheduling system. The new material scheduling system then feeds back the loading completion result to the manufacturing execution system.

[0025] Domestically produced equipment (second-generation vehicle handling system and transmission equipment) are uniformly connected, controlled and managed by the new material scheduling system, effectively avoiding the risk of foreign suppliers refusing to make modifications.

[0026] The same transmission equipment can be registered in different systems in different ways: as an EQP in the Manufacturing Execution System, as an EQP1 in the original Material Scheduling System, and as a CV in the new Material Scheduling System. This allows for the interconnection of two or more OHT equipment sets without frequent business information exchange between the related scheduling and control systems. This is particularly true for MCS1, with virtually no impact on architecture, stability, or business data flow, significantly enhancing the integration and autonomy of domestically produced OHT equipment and supporting systems.

[0027] This embodiment is only a further explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to this embodiment as needed, but as long as they are within the scope of the claims of the present invention, they are protected by patent law.

Claims

1. A method for realizing the docking of multiple overhead crane handling systems by using a transmission device, characterized in that The method includes the following steps: Step 1: Add a new transmission device to connect in series between two overhead crane handling system devices. In the manufacturing execution system, the transmission device docks the inlets and outlets of the two overhead crane handling system devices and is registered as a process equipment. The two overhead crane handling systems are respectively denoted as the first overhead crane handling system and the second overhead crane handling system; Step 2: When the carrier wafer is scheduled across the areas of the two overhead crane handling systems, the manufacturing execution system controls the feeding of the process equipment of the first overhead crane handling system; Step 3: The carrier wafer automatically flows to the second overhead crane handling system, and the manufacturing execution system controls the discharging of the second overhead crane handling system.

2. A method for realizing the docking of multiple overhead crane handling systems by using a transmission device according to claim 1, characterized in that, Real-time information interaction is carried out between the two overhead crane handling systems through two material scheduling systems. The first overhead crane handling system corresponds to the raw material scheduling system, and the second overhead crane handling system corresponds to the new material scheduling system.

3. A method for realizing the docking of multiple overhead crane handling systems by using a transmission device according to claim 2, characterized in that In Step 1, the second overhead crane handling system and the transmission device are uniformly controlled by the new material scheduling system.

4. A method for realizing the docking of multiple overhead crane handling systems by using a transmission device according to claim 2, characterized in that, In Step 2, the manufacturing execution system sends a feeding request to the process equipment of the first overhead crane handling system. After receiving the feeding request, the first overhead crane handling system transports the carrier wafer to the inlet of the transmission device and feeds back the result of the completion of the scheduling task to the raw material scheduling system, and the raw material scheduling system then feeds back the result of the completion of the feeding to the manufacturing execution system.

5. The method for realizing the docking of multiple overhead crane handling systems by using a transmission device according to claim 2, wherein, In Step 3, when the carrier wafer reaches the outlet of the transmission device, the manufacturing execution system issues a discharging scheduling request to the process equipment of the second overhead crane handling system. Under the scheduling of the new material scheduling system, the second overhead crane handling system removes the carrier wafer from the outlet of the transmission device and feeds back the result of the completion of the scheduling task to the new material scheduling system, and the new material scheduling system then feeds back the result of the completion of the feeding to the manufacturing execution system.

6. A method for implementing the docking of multiple overhead crane handling systems by using a transmission device according to claim 1, characterized in that The transmission device is registered in different systems in different ways. It is registered as EQP in the manufacturing execution system, EQP1 in the raw material scheduling system, and CV in the new material scheduling system.

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