Gas supply device and gas process system

Abstract

According to various embodiments, a gas supply device (156) comprises: an inert gas inlet (108) for receiving inert gas; a starting material inlet (104) for receiving a starting material; a hydrogen generator (102) for releasing hydrogen gas from the starting material; and a regeneration gas outlet (106) for providing a regeneration gas for a filter device; wherein the gas supply device (156) is designed to generate the regeneration gas by mixing the generated hydrogen gas with the inert gas.

Description

[0001] Description

[0002] Gas supply device and gas process system

[0003] Various embodiments relate to a gas supply device and a gas process system.

[0004] For various applications, such as a glove box, high-purity inert gas is used, which is extensively filtered (also known as gas purification) to meet the inert gas purity requirements. This process separates contaminants such as oxygen and / or moisture from the inert gas to increase the purity of the inert gas. During the gas purification process, the filter becomes saturated, reducing its ability to separate the contaminant from the inert gas. The saturated filter is either replaced or restored (also known as filter regeneration), for which a so-called regeneration gas from a compressed gas cylinder or other pressure vessel is conventionally used.

[0005] According to various embodiments, it has been recognized that filter regeneration can be simplified. Clearly, the use of pressure vessels (e.g., assembly and disassembly) requires complex safety precautions and trained personnel to reduce the hazard posed by the regeneration gas, which is costly. Furthermore, the availability of regeneration gas from pressure vessels may not always be reliable, making procurement expensive. Furthermore, safety precautions vary greatly worldwide and do not always meet requirements, making global customer support difficult.

[0006] According to various embodiments, the generation of regeneration gas is made possible at the filter site, eliminating the need for pressure vessels, increasing safety, and reducing dependence on external regeneration gas producers. For this purpose, hydrogen gas is generated, which is used to form the regeneration gas, for example, by mixing the hydrogen gas with the inert gas that is already kept on hand for the application. Due to local generation, the hydrogen gas and the regeneration gas are consumed directly, significantly reducing the total amount of hydrogen gas on site compared to the capacity of a pressure vessel.

[0007] Various designs of the gas supply device used to mix the regeneration gas feature, among other things, a simple and cost-effective design without compromising on meeting stringent safety requirements. This also allows for cost-effective and safe retrofitting of existing systems. Alternatively or additionally, the gas supply device is configured to mix the regeneration gas automatically (e.g., automatically), which reduces the risk of incorrect operation and the generation of flammable regeneration gas. This, in turn, simplifies operation and reduces the demands on personnel.

[0008] Various examples are described below which relate to what is described herein and shown in the figures.

[0009] Example 1 (e.g., a gas supply device) is configured according to one of the appended claims and / or comprises: an inert gas inlet for receiving inert gas; a feedstock inlet for receiving a feedstock; a hydrogen generator for releasing hydrogen gas from the feedstock; and a regeneration gas outlet (e.g., connection) for providing a regeneration gas for a filter device (e.g., for regenerating the filter device); optionally, a piping network (e.g., internal piping network). The feedstock inlet can, for example, be arranged in the interior of the gas supply device (e.g., a chamber housing thereof), e.g., configured for connecting a storage container (e.g., water tank) integrated therein.

[0010] Example 2 is a method (e.g., for operating the gas supply device according to Example 1), comprising: releasing hydrogen gas from the starting material, e.g., by means of the hydrogen generator; regenerating a filter device by means of the hydrogen gas, e.g., by means of a regeneration gas comprising the hydrogen gas.

[0011] Example 3 is using a hydrogen generator (e.g. of Example 1 or 2) to generate hydrogen gas (e.g. by means of electrolysis and / or by means of releasing the hydrogen gas from the starting material), wherein a filter device is regenerated by means of the hydrogen gas (e.g. by means of a regeneration gas comprising the hydrogen gas).

[0012] Example 4 is configured according to any one of Examples 1 to 3, wherein the starting material is a fluid, e.g., a liquid, and / or comprises (e.g., consists of) water; and / or wherein the regeneration gas comprises hydrogen gas. This reduces complexity and increases safety.

[0013] Example 5 is configured according to any one of Examples 1 to 4, wherein the hydrogen generator is configured to decompose the starting material, e.g., by means of electric current and / or a redox reaction, which is optionally stimulated by the electric current. This is particularly cost-effective to operate.

[0014] Example 6 is configured according to any one of Examples 1 to 5, wherein the hydrogen generator comprises or is formed from an electrolyzer, pyrolyzer, and / or a plasmalyzer. The electrolyzer is particularly cost-effective to operate.

[0015] Example 7 is configured according to any one of Examples 1 to 6, wherein the hydrogen generator has multiple electrodes and / or an electrical connection. This facilitates assembly.

[0016] Example 8 is configured according to any one of Examples 1 to 7, wherein the feedstock inlet has a thread and / or is a water connection for supplying the gas supply device with water as the feedstock. This is particularly cost-effective in operation.

[0017] Example 9 is configured according to any one of Examples 1 to 8, wherein the gas supply device is configured to generate the regeneration gas by mixing the hydrogen gas (e.g., from the hydrogen generator) with the inert gas, e.g., with a service gas (also referred to as operating gas) comprising the inert gas.

[0018] Example 10 (e.g., a gas processing system) comprises: a filter device and / or a working device (e.g., working chamber); a gas supply device, e.g., a gas supply device according to any one of Examples 1 to 9; and optionally, a piping network (e.g., external piping network).

[0019] Example 11 is configured according to Example 10, further comprising: the inert gas inlet or an additional inert gas inlet of the filter device for receiving an inert gas, e.g. a process gas.

[0020] Example 12 is configured according to example 10 or 11, wherein the filter device is configured to filter a process gas and / or wherein the filtering is carried out by means of (e.g. chemical) binding of at least one contaminant (e.g. oxygen) entrained with (e.g. mixed with) an inert gas.

[0021] Example 13 is configured according to any one of Examples 10 to 12, wherein the filter device is configured for gas purification by (e.g., chemical) binding of at least one contaminant. Example 14 is configured according to any one of Examples 10 to 13, wherein the external conduit network is configured to supply a larger volume flow of hydrogen gas (e.g., by means of the regeneration gas) to the filter device in a regeneration mode than in the separation mode.

[0022] Example 15 is configured according to any one of Examples 10 to 14, wherein the filtering (e.g., binding) is performed by means of a chemical reaction (then the filter device is also referred to as a reactor) and / or at least one binding agent of the filter device being exposed to the inert gas and / or the contaminant.

[0023] Example 16 is configured according to any one of Examples 10 to 15, wherein the impurity comprises (eg molecular) oxygen and / or moisture (eg water vapor).

[0024] Example 17 is configured according to any one of Examples 10 to 16, wherein the process gas is: supplied to the working device in a state (also referred to as a purified state) provided by the filter device; and / or supplied to the filter device in a state provided by the working device.

[0025] Example 18 is configured according to any one of Examples 10 to 17, wherein the process gas in a state leaving the filter device has a lower proportion of the impurity than in a state being supplied to the filter device.

[0026] Example 19 is configured according to any one of Examples 10 to 18, wherein the filter device comprises a regeneration gas inlet (e.g., a regeneration gas port) for receiving a regeneration gas (into the filter device) for regenerating the filter device.

[0027] Example 20 is configured according to any one of Examples 10 to 19, wherein the filter device comprises a first filter stage configured to bind oxygen (e.g., as a contaminant), wherein the first filter stage optionally comprises a sorbent and is configured to bind oxygen by means of the sorbent. In this regard, it can be understood that the first filter stage can be, for example, a combined filter stage (then also referred to as a combo filter stage) configured to bind a plurality of (e.g., chemically) different contaminants, e.g., oxygen and moisture.

[0028] Example 21 is configured according to any one of examples 10 to 20, wherein the working device has a (eg gas-tight sealed) working area (eg a chamber interior).

[0029] Example 22 is configured according to any one of examples 10 to 21, wherein the working device is configured to provide an atmosphere of a (eg filtered) service gas in the working area.

[0030] Example 23 is configured according to any one of Examples 10 to 22, wherein the filter device is configured to filter the process gas of the working device flowing along a self-contained circuit coupling the filter device and the working device to each other.

[0031] Example 24 is configured according to any one of Examples 1 to 23, further comprising at least one actuator configured to (e.g., to be actuated and / or controlled in response thereto) bring the gas supply device and / or the line network into a separation mode or a regeneration mode and / or to influence (e.g., to interrupt) a fluid line path (e.g., of the line network) that opens into the filter device and / or the hydrogen generator. Example 25 is configured according to Example 24, comprising at least one actuator: one or more than one first actuator (e.g., valve) configured to influence a connection of the line network, optionally when a change between the separation mode and the regeneration mode occurs.

[0032] Example 26 is configured according to example 24 or 25, comprising at least one actuator: one or more than one second actuator (e.g., electrical switch) configured to influence a supply of electrical power (also referred to as power supply) to the hydrogen generator, optionally when a change occurs between the separation mode and the regeneration mode, optionally such that: in the regeneration mode, the supply of electrical power to the hydrogen generator occurs; and in the separation mode and / or in a fault mode, the supply of electrical power to the hydrogen generator is interrupted.

[0033] Example 27 is configured according to any one of Examples 1 to 26, wherein the conduit network provides one or more fluid conduit paths (e.g., gas conduit paths), of which: a first fluid conduit path (e.g., inert gas path) leads from the inert gas inlet to the regeneration gas outlet (e.g., the filter device connected thereto, if present), which is optionally interrupted in the separation mode; and / or a second fluid conduit path leads from the hydrogen generator to the regeneration gas outlet (e.g., the filter device connected thereto, if present); and an optional third fluid conduit path leads from a gas mixing member, if present, to the regeneration gas outlet, which is optionally interrupted or vented in the separation mode. The inert gas path runs, for example, through the gas mixing member, if present.

[0034] Example 28 is configured according to any one of examples 1 to 27, further comprising a control device which is configured (e.g., partially integrated in the filter device and) to initiate a change between the separation mode and the regeneration mode, preferably by controlling the at least one actuator of the gas process system and / or by means of a regeneration signal.

[0035] Example 29 is configured according to example 28, wherein the control device is configured to initiate the change from the separation mode to the regeneration mode (e.g., by controlling at least one actuator), optionally according to a change sequence and / or when a criterion (then also referred to as regeneration criterion) is met.

[0036] Example 30 is configured according to example 29, wherein the criterion is implemented by the control device (e.g., stored) and / or represents a regeneration requirement of the filter device.

[0037] Example 31 is configured according to example 29 or 30, wherein the criterion is met when: a (e.g., sensor-detected) state of the filter device meets the criterion; an amount of the sorbent of the filter device and / or a resulting sorbate of the filter device meets the criterion; a period of time for which the separation mode lasts meets the criterion; and / or when the control device receives a regeneration signal.

[0038] Example 32 is configured according to any one of Examples 29 to 31, wherein the change sequence is determined by comparing an actual state (e.g., of the gas process system or the gas supply device) with a desired state (e.g., of the gas process system or the gas supply device) and / or comprises: a first phase (also referred to as the first supply phase), in which a supply of water to the hydrogen generator is started; and / or in which a fluid line path of the line network, which leads from the hydrogen generator to the filter device and / or runs through a gas mixing element, is at least partially purged with the inert gas; a second phase (also referred to as the second supply phase), in which a supply of electrical power to the hydrogen generator is started. Example 33 is configured according to Example 32, wherein the second phase is delayed, e.g., by several (e.g., 10 or more, e.g.,20 or more) seconds, to the first phase being started, e.g. after the start of supplying the hydrogen generator with water; and / or wherein the first phase is started based on a result of the comparison.

[0039] Example 34 is configured according to any one of Examples 1 to 33, further comprising: a gas mixing member for generating the regeneration gas, wherein the gas mixing member is optionally coupled to a conduit network and / or is optionally configured to generate the regeneration gas comprising hydrogen gas generated by the hydrogen generator.

[0040] Example 35 is configured according to Example 34, wherein the line network, in the regeneration mode, is configured to supply the inert gas received by means of the inert gas inlet and the hydrogen gas generated by the hydrogen generator to the gas mixing element and to supply the regeneration gas formed based thereon by means of the gas mixing element to the filter device.

[0041] Example 36 is configured according to example 34 or 35, wherein the gas mixing element is provided by means of a container (then also referred to as a gas mixing container) and / or provides a condensate separator configured to separate condensate (then also referred to as wastewater) entrained with the hydrogen gas generated by the hydrogen generator. The condensate separator promotes a dry regeneration gas.

[0042] Example 37 is configured according to any one of Examples 1 or 36, wherein the regeneration gas has a volume fraction of hydrogen gas of less than 10% (e.g., 5% or less, e.g., 4% or less) and / or a volume fraction of inert gas of more than 90% (e.g., 95% or more). This meets the highest purity requirements.

[0043] Example 38 is configured according to any one of Examples 1 to 37, further comprising: an exhaust outlet (e.g.

[0044] Exhaust gas connection) and a process gas outlet (e.g., process gas connection), which are coupled to the filter device by means of the piping network. Optionally, the piping network is configured to fluidly couple the filter device's output side to the process gas outlet in the separation mode and to fluidly couple the filter device's output side to the exhaust gas outlet in the regeneration mode. The process gas outlet can be used to connect the working device to it.

[0045] Example 39 is configured according to any one of Examples 1 to 38, wherein the hydrogen generator releases less hydrogen gas in the separation mode than in the regeneration mode; and / or wherein the filter device is exposed to less hydrogen gas in the separation mode than in the regeneration mode.

[0046] Example 40 is configured according to any one of Examples 1 to 39, wherein the process gas comprises an inert gas, e.g. nitrogen or a noble gas, optionally consisting essentially (e.g. more than 99%) thereof.

[0047] Example 41 is configured according to example 1 or 40, further comprising a storage container (e.g. water tank) which is coupled to the hydrogen generator (e.g. on the inlet side) by means of the starting material inlet, for holding the starting material, wherein the storage container is optionally coupled to the hydrogen generator by means of a pump (e.g. diaphragm pump).

[0048] Example 42 is configured according to Example 41, wherein the storage container has a pressure equalization opening configured to release gas (e.g., oxygen) from the storage container to its surroundings (e.g., into the containment container). Example 43 is configured according to any one of Examples 1 to 42, further comprising a safety device configured (e.g., in the regeneration mode) to interrupt the release of hydrogen gas (e.g., by interrupting an electrical supply to the hydrogen generator) when a criterion (then also referred to as a fault criterion) is met (which is determined, for example, as a fault condition), wherein the fault criterion is optionally met when at least one operating parameter (e.g., of the gas process system or at least of the gas supply device) meets the fault criterion. This increases safety.

[0049] Example 44 is configured according to Example 43, further comprising a sensor arrangement configured to detect the at least one operating parameter. This increases safety.

[0050] Example 45 is configured according to example 43 or 44, wherein the at least one operating parameter relates to supplying the hydrogen generator with water, and / or represents one or more of the following: a temperature of the water; an electrical conductivity of the water; and / or a supply of the water, e.g., a fill level of the water; a flow rate at which the water is supplied to the hydrogen generator. This inhibits dry running.

[0051] Example 46 is configured according to any one of Examples 43 to 45, wherein the at least one operating parameter represents a pressure (e.g., an overpressure), which is optionally: the gas pressure of a containment atmosphere in which the hydrogen generator and / or at least one component of the conduit network and / or the gas mixing element are arranged; a gas pressure of the hydrogen gas (e.g., to which the hydrogen generator is exposed); a gas pressure of the regeneration gas (e.g., to which the hydrogen generator and / or the regeneration gas connection is exposed). This inhibits an enrichment of hydrogen gas.

[0052] Example 47 is configured according to any one of Examples 43 to 46, wherein the at least one operating parameter represents a pressure (or flow rate) of the regeneration gas (or the hydrogen gas) at which the hydrogen gas and / or the regeneration gas are supplied to the filter device; and / or wherein the at least one operating parameter represents a flow rate and / or a pressure of the inert gas. This inhibits an enrichment of hydrogen gas.

[0053] Example 48 is configured according to any one of Examples 43 to 47, wherein the at least one operating parameter represents a state of a chamber housing in which the hydrogen generator and / or at least one component of the conduit network and / or the gas mixing element are arranged, wherein the state optionally indicates whether the chamber housing (e.g., its door) is in a (e.g., gas-tight) closed state or not and / or whether a gas flow (e.g., an air flow or a nitrogen gas flow) flows through the chamber housing. This inhibits an enrichment of hydrogen gas.

[0054] Example 49 is configured according to any one of Examples 43 to 48, wherein the at least one operating parameter represents a condition (e.g., pressure and / or chemical composition) of a containment atmosphere in which the hydrogen generator and / or at least one component of the conduit network and / or the gas mixing element are arranged. This inhibits an enrichment of hydrogen gas.

[0055] Example 50 is configured according to any one of Examples 43 to 49, wherein the safety device is implemented by means of the control device and / or by means of an electrical generator configured to supply the hydrogen generator with electrical power. This facilitates a cost-effective implementation.

[0056] Example 51 is configured according to example 1 or 50, further comprising a chamber housing (also referred to as a safety housing), e.g., configured as a cabinet (e.g., a control cabinet), in which the hydrogen generator and / or the gas mixing element are arranged. The chamber housing optionally comprises a chamber lid configured, when the chamber housing is closed, to seal a maintenance opening of the chamber housing in a gas-tight manner. This increases safety. The chamber lid can, for example, be configured as a door.

[0057] Example 52 is configured according to any one of Examples 1 to 51, further comprising a gas conveying device (e.g. a blower, e.g. comprising a fan) which is configured to flush the hydrogen generator with a (e.g. non-flammable) gas stream (e.g. air, e.g. ambient air) and / or to supply the gas stream to the chamber housing, by means of which gas stream a safety atmosphere and / or an overpressure is optionally formed (e.g. in the chamber housing), in which the hydrogen generator and / or at least one component of the line network and / or the gas mixing element are arranged.

[0058] Example 53 is configured according to Example 52, wherein the chamber housing has a gas outlet throttle (e.g., a diaphragm) that is invariant or adjustable, e.g., that can be selectively set to a first state or a second state, which differ from each other in the resistance that the gas outlet throttle offers to the gas flow out of the chamber housing. This facilitates the adjustment of the containment atmosphere.

[0059] Example 54 is configured according to Example 53, wherein the first state or the second state of the gas outlet throttle and the gas conveying device are configured relative to one another such that: a pressure of the containment atmosphere in the chamber housing is greater than a hydrostatic pressure (then also referred to as ambient pressure) of the earth's atmosphere (also referred to as air) at the location of the gas process system, optionally by at least 1 millibar (e.g. 5 millibars, e.g. 10 millibars, e.g. 20 millibars, e.g. 50 millibars) and / or by a maximum of 500 millibars above ambient pressure; and / or the gas flow has a larger (e.g. at least ten times or at least one hundred times) volume flow than the hydrogen gas released by the hydrogen generator. This inhibits the enrichment of hydrogen gas.

[0060] Example 55 is configured according to any one of Examples 1 to 54, wherein the filter device comprises a sorbent (e.g., as a first separation stage) configured to bind oxygen, or sorbate resulting therefrom, wherein the sorbent is optionally a chemical absorbent.

[0061] Example 56 is configured according to Example 55, wherein the sorbent comprises a metal, optionally copper; and / or wherein the sorbent is in a solid state, optionally granular.

[0062] Example 57 is configured according to any one of Examples 1 to 56, wherein the filter device comprises an additional sorbent (e.g., implemented as a second separation stage or by means of the first filter stage) configured to bind moisture. In this regard, for a better understanding of the functions of the filter device, reference is made herein to multiple filter stages, it being understood that these do not necessarily have to be separate filter stages. What is described for this purpose can therefore apply analogously to a filter device that has (e.g., only) the combination filter stage, which jointly integrates the properties of the first filter stage and the second filter stage.

[0063] Example 58 is set up according to Example 57, wherein the additional sorbent comprises, e.g. consists of, a drying agent, e.g. silicate (e.g. zeolite), carbonate and / or silica gel. Alternatively or in addition to the drying agent, a cold trap can be used, e.g. to bind water. Zeolite is particularly cost-effective and low-maintenance. Example 59 is set up according to any one of Examples 1 to 58, further comprising a heating device which is set up to supply thermal power to the filter device (e.g. the sorbent and / or additional sorbent), e.g. in the regeneration mode and / or more than in the separation mode. This promotes (e.g. accelerates) the regeneration of the filter device.

[0064] Example 60 is configured according to any one of Examples 1 to 59, wherein the hydrogen generator comprises at least one electrolysis cell (e.g., one or more than one electrolysis cell), optionally comprising a proton-permeable polymer membrane (PEM) (then also referred to as a PEM cell). The PEM cell is easy to operate and requires a low operating voltage, which benefits safety.

[0065] Example 61 is configured according to Example 60, wherein the hydrogen generator comprises a plurality of electrolysis cells, which are optionally electrically connected in series with one another, and wherein the plurality of electrolysis cells optionally comprise a plurality of PEM cells. The series connection reduces the electrical current, which benefits safety.

[0066] Example 62 is configured according to any one of examples 1 to 61, further comprising a plurality of modules, of which: a first module (e.g. gas supply module) comprises the hydrogen generator and a first connection coupling (e.g. of the line network), a second module (e.g. filter module) comprises the filter device and a second connection coupling (e.g. of the line network), wherein the first connection coupling and the second connection coupling are configured to be joined together in a fluid-conducting manner.

[0067] Example 63 is configured according to Example 62, wherein the first connector coupling and the second connector coupling, when assembled together, provide a plurality of separate fluid conduit paths.

[0068] Example 64 is configured according to example 62 or 63, wherein the line network comprises two gas lines which are (spatially and / or circuit-wise) parallel to each other and of which each gas line opens into the first connection coupling and into the gas mixing element.

[0069] Example 65 is configured according to any one of examples 62 to 64, wherein the first module comprises a first control unit of the control device and / or wherein the second module comprises a second control unit of the control device, wherein the second control unit is configured to generate the regeneration signal when the regeneration criterion is met, which is optionally implemented (e.g., stored) by the second control unit and / or represents a regeneration requirement of the filter device. The regeneration signal can, for example, be transmitted from the second control unit to the first control unit, which is configured to initiate the changeover sequence or at least to initiate a start of the generation of the regeneration gas.

[0070] Example 66 is configured according to any one of Examples 1 to 65, further comprising a gas source comprising the inert gas (e.g., as a component of the process gas) and / or coupled to the inert gas inlet.

[0071] Example 67 is configured according to any one of Examples 1 to 66, wherein the filter device comprises two first separation stages (e.g., each comprising the sorbent) and an actuator, wherein the actuator is configured to alternately connect the two first separation stages to the gas supply device and / or the working device in a gas-conducting manner.

[0072] Example 68 (e.g., a process arrangement) is configured according to any one of Examples 1 to 67, comprising the working device, wherein the working device is, for example, coupled to the process gas outlet and / or configured to provide a working process using the inert gas provided by the filter device. Example 69 is configured according to Example 68, wherein the working device comprises one of the following: a working chamber (e.g., a gas box) configured to receive the inert gas and / or an object; and / or a processing device (e.g., a welding device) configured to process an object using the inert gas provided by the gas processing system. The processing device can, for example, be a joining device. For example, welding can be carried out using argon as the inert gas.

[0073] Example 70 (e.g., a method of operating the configuration according to any one of Examples 1 to 69) comprises: supplying a working device with inert gas provided (e.g., filtered) by the filter device in the separation mode; regenerating the filter device (e.g., its sorbate) using hydrogen gas provided by the hydrogen generator in the regeneration mode.

[0074] Example 71 is configured according to any one of Examples 1 to 70, wherein oxygen gas entrained with the inert gas taken up from the inert gas inlet is bound in the separation mode by means of the filter device (e.g. its sorbents) and the resultant is supplied to the working device.

[0075] Example 72 is configured according to any one of Examples 1 to 71, wherein the regeneration gas comprises the generated hydrogen gas and / or wherein regeneration gas is generated by mixing the generated hydrogen gas with the inert gas (e.g., process gas).

[0076] Example 73 is set up according to any one of Examples 1 to 72, wherein the (filtered) process gas provided by the filter device has a mass fraction of inert gas (e.g. argon and / or nitrogen gas) of more than 99%, e.g. more than 99.9% (corresponds to a purity of 1 N), e.g. more than approximately 99.99% (corresponds to a purity of 2 N), e.g. more than approximately 99.999% (corresponds to a purity of 3 N), e.g. more than approximately 99.9999% (corresponds to a purity of 4 N), e.g. more than approximately 99.9999% (corresponds to a purity of 5 N), e.g. more than approximately 99.99999% (corresponds to a purity of 6 N).

[0077] Example 74 is configured according to any one of Examples 1 to 73, wherein the process gas: comprises a greater proportion of the inert gas than the regeneration gas; and / or wherein the regeneration gas comprises a greater proportion of the hydrogen gas than the process gas.

[0078] Example 75 is configured according to any one of Examples 1 to 74, wherein the starting material (e.g., water) is deionized.

[0079] Example 76 is configured according to any one of Examples 1 to 75, wherein the impurity is gaseous and / or comprises oxygen.

[0080] Example 77 is configured according to any one of Examples 1 to 76, wherein the process gas comprises (e.g. consists of) the inert gas and an impurity entrained (e.g. mixed) therewith.

[0081] Example 78 is configured according to any one of Examples 1 to 77, wherein the regeneration gas outlet, the inert gas inlet, the starting material inlet and / or the regeneration gas inlet comprise: a connection (e.g., consisting thereof) and / or a fluid line, for example, opening into the connection.

[0082] Example 79 is configured according to any one of Examples 1 to 78, wherein the gas supply device comprises a hydrogen generator for generating the hydrogen gas by electrolysis of water (also referred to as water electrolysis). This is cost-effective and user-friendly.

[0083] Example 80 is configured according to any one of examples 1 to 79, further comprising: the (e.g., external) line network configured: in a separation mode, to supply (only) the process gas taken up by means of the inert gas inlet (or the additional inert gas inlet) to the filter device, and / or in a regeneration mode, to supply the hydrogen gas generated by means of the hydrogen generator (e.g., by means of the regeneration gas) to the filter device.

[0084] Example 81 is configured according to any one of examples 1 to 80, further comprising: the (e.g., internal) line network configured: in a regeneration mode, to supply the inert gas taken up at the inert gas inlet to the generation of the regeneration gas; and / or in a separation mode, to displace the regeneration gas (e.g., at least in sections) from the filter device and / or the gas supply device by means of the inert gas taken up at the inert gas inlet and / or to block off the inert gas inlet from the regeneration gas outlet.

[0085] It shows

[0086] Figure 1A shows a gas supply device according to various embodiments in a schematic structural diagram;

[0087] Figure 1B shows a gas process system according to various embodiments in a schematic structural diagram;

[0088] Figure 2 shows a gas supply device according to various embodiments in a schematic structural diagram;

[0089] Figure 3A shows a gas supply module according to various embodiments in a schematic perspective view;

[0090] Figure 3B shows a method according to various embodiments in a schematic flow diagram;

[0091] Figure 4A and Figure 4B each show a gas process system according to various embodiments in a schematic circuit diagram;

[0092] Figure 5A shows a gas process system according to various embodiments in a schematic layout diagram; and

[0093] Figure 5B shows the phases of a change sequence according to various embodiments in a schematic flow diagram.

[0094] In the following detailed description, reference is made to the accompanying drawings, which form a part hereof, and in which is shown by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terminology such as "top," "bottom," "front," "back," "fore," "rear," etc., is used with reference to the orientation of the described figure(s). Since components of embodiments can be positioned in a number of different orientations, the directional terminology is for purposes of illustration and is in no way limiting. It is to be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention.It is understood that the features of the various exemplary embodiments described herein can be combined with one another unless specifically stated otherwise. The following detailed description is therefore not to be construed in a limiting sense, and the scope of the present invention is defined by the appended claims. In this description, the terms "connected," "attached," and "coupled" are used to describe both a direct and an indirect connection (e.g., ohmic and / or electrically conductive, e.g., an electrically conductive connection), a direct or indirect connection, and a direct or indirect coupling. In the figures, identical or similar elements are provided with identical reference numerals where appropriate.

[0095] The term "gas mixing element" (also referred to as a gas mixing device) refers herein to a device designed to form a gas mixture. For this purpose, the gas mixing element can comprise a plurality of inlets (e.g., fluid lines) by means of which a plurality of gases can be supplied separately from one another, and a cavity (also referred to as a mixing chamber) into which the inlets open to bring the gases together so that they mix with one another and the mixture is formed. The mixing chamber is provided, for example, by means of a gas mixing container, but can also be provided by means of a pipe branching.

[0096] The term "gas" refers herein to a gaseous material, e.g., a pure gaseous substance or a gas mixture. For some pure substances, their gaseous (e.g., molecular) state is expressed using the suffix "-gas," such as "hydrogen gas" for hydrogen as a pure substance. The term "hydrogen gas" refers to molecular hydrogen. The term "oxygen gas" refers to molecular oxygen. The term "nitrogen gas" refers to molecular nitrogen.

[0097] The term "inert gas" refers to a gas (e.g., a pure gaseous substance) that is unreactive under normal conditions and hardly participates (e.g., does not participate) in chemical reactions. The inert gas is, for example, inert towards the filter device or at least its separation stages, e.g., the sorbent (also referred to as sorption agent). Examples of the inert gas include: a noble gas (e.g., argon), nitrogen gas. If the inert gas carries at least one (e.g., gaseous) impurity, the resulting mixture is referred to as "process gas," which essentially consists of the inert gas, e.g., having a purity of more than 1 N, e.g., 2N, e.g., 3N, e.g., 4N, e.g., 5N. If reference is made herein to the inert gas for the sake of simplicity, it can be understood that the inert gas can, for example, be provided by means of the process gas, which may contain at least one impurity.Examples of contamination include: oxygen gas and / or moisture (i.e. gaseous water vapor).

[0098] The term "filtration" generally refers to a separation process (also referred to as separation for short) by means of which two components of a mixture (e.g. gas mixture) are separated from each other, e.g. by means of sorption (e.g. adsorption and / or absorption). Examples of the separation process include: a chemical separation process (e.g. referred to by absorption) or a physical separation process (e.g. referred to by adsorption). Sorption refers to a binding process (also referred to as binding for short) that leads to an enrichment of a contaminant within a chemical phase (then also referred to as absorption) or at an interface between two chemical phases (then also referred to as adsorption). During sorption, the so-called sorbent (also referred to as sorbent) is converted into a sorbate, which contains the bound contaminant, by binding the contaminant (then also referred to as sorbent).During regeneration, the process that occurs in reverse to sorption is stimulated, in which the sorbate is transferred back into the sorbent, releasing the contaminant.

[0099] The term "electrolysis" refers herein to a chemical process that is stimulated (e.g., forced) by the consumption of electrical power. Chemical energy is supplied to a starting material by means of the electrical power, whereby the starting material releases several reaction products, into which the starting material is, for example, decomposed. In one example, the electrolysis of water (then also referred to as water electrolysis) occurs, in which hydrogen gas and oxygen gas are released as reaction products. The electrical power can be provided by a direct current source and fed to the so-called electrolyzer, in which the electrolysis takes place.

[0100] The term "control device" can be understood as any type of logic-implementing entity, which may, for example, comprise circuitry, instructions, and / or a processor capable of executing software stored in a storage medium, firmware, or a combination thereof, and issuing the instructions based thereon. The control device may, for example, be configured using code segments (e.g., software) to provide various functions implemented by the code segments.

[0101] The term "actuator" (e.g., having an actuator) can be understood as a transducer configured to influence an actual state, e.g., in response to actuation of the actuator or control of the actuator thereof by means of a control signal. The actuator can be used to influence, for example, a physical quantity (such as pressure or temperature), a process (e.g., a gas flow), or a device. Examples of components of an actuator include: a shut-off device (e.g., a shut-off valve or butterfly valve), a throttle device (e.g., a gas flow regulator, pressure valve, or needle valve), a directional control valve, a drive device as an actuator (e.g., an electric motor, solenoid, or reciprocating piston), an electrical switch, or the like. The control signal can, for example, be generated by a control device and / or transmitted by means of an electrical line.An actuator can be part of a control chain that has a corresponding infrastructure (e.g., a processor, storage medium, and / or bus system, or the like) to control the actuator based on a desired state as an input variable and to generate a corresponding electrical control signal that represents the control variable. The control chain can be implemented, for example, by means of the control device.

[0102] The term "sensor" (also referred to as a detector) can be understood as a transducer that is configured to qualitatively detect a property of its environment corresponding to the type of sensor or quantitatively as a measurand, e.g., a physical or chemical property and / or a material quality. The measurand is the physical quantity to which the measurement is applied by the sensor. A sensor can be part of a measuring chain that has a corresponding infrastructure (e.g., a processor, storage medium, and / or bus system, or the like) to control the sensor, process its detected measurand as an input, and, based thereon, provide an electrical signal as an output that represents the input. The measuring chain can, for example, be implemented by means of the control device.

[0103] The term "gas-tight" with reference to a hollow body (e.g., a chamber or other container, a pipe) or its cavity (e.g., an area) expresses that several adjacent individual parts (e.g., walls) of the hollow body can be sealed or connected to another hollow body by means of a seal. Examples of the hollow body include: a pressure chamber, a vacuum chamber, an atmospheric pressure chamber, etc.

[0104] The term "drying agent" refers herein to a water-binding (e.g., hygroscopic) material designed to bind water physically or chemically. Zeolite as a drying agent is particularly low-maintenance because it is durable and easily regenerable, non-toxic, and therefore safe and cost-effective. Quantitative data regarding a gas, e.g., a proportion of it in a gas mixture or in relation to another gas, refer herein to its volume, for example, given in volume percent (vol%), which is also referred to as the volume fraction. These data are based on the same conditions as a reference, e.g., standard conditions.

[0105] The term "monitoring" in the context of an operating parameter (or, by analogy, a state represented by it) can be understood as a process in which the operating parameter is recorded as an actual state (e.g., the actual value of the operating parameter) and compared with a specification (e.g., a target state and / or criterion). Optionally, a signal can be generated based on the comparison. If, for example, the deviation of the actual state from the target state fulfills the criterion representing a fault state (then also referred to as the fault criterion), the signal representing the fault state can be generated. Examples of the signal include: an electrical signal, an acoustic signal, an optical signal. For example, the signal can trigger a shutdown of the hydrogen generator, e.g., by triggering an interruption in the supply of electrical power to the hydrogen generator.

[0106] For clarity, a material interface is referred to herein as an "inlet" or "outlet," such as a regeneration gas outlet, inert gas inlet, or feedstock inlet. The material interface is material-conductive (e.g., fluid-conductive) and has a cavity through which the material is guided, e.g., transported, e.g., can flow. Examples of interface components include: fluid line, connection, coupling. Examples of a connection include: quick-release coupling, such as a gas quick-release coupling, flange, plug-in connection, sleeve, etc. Examples of a fluid line include: pipe, e.g., supply pipe, hose. The material interface can, for example, have a coupling integrated into the connection, such as a bayonet coupling, snap-in coupling, screw coupling, etc.

[0107] For ease of understanding, reference is made herein to an example configuration (see Example 6) of the hydrogen generator, which is configured as an electrolyzer, by means of which, during operation, water electrolysis takes place to generate hydrogen gas and oxygen gas. The description can apply analogously to any other process by which hydrogen can be generated, such as steam reforming or pyrolysis, as well as any other type of feedstock.

[0108] Herein, aspects are explained using various components (e.g. gas supply device, filter device, working device) and a gas process system formed therefrom, wherein it can be understood that these components can also be provided individually, e.g. not necessarily as part of the gas process system.

[0109] Fig. 1 A illustrates a gas supply device according to various embodiments 100a in a schematic structural diagram, optionally configured according to Example 1. For ease of understanding, the existing fluid line paths 110a, 110b, 110c are shown herein, some of which can be influenced (e.g., interrupted or connected) by means of an actuator (if present). For each of the existing connections, for example, the starting material inlet 104, the regeneration gas outlet 106, and the inert gas inlet 108 (see Example 7B), a fluid line path 110a, 110b, 110c is present, which opens into the connection. In this regard, it can be understood that a fluid line path 110a, 110b, 110c can be provided by means of at least one fluid line, but this does not necessarily have to be the case if the connection is directly mounted.For example, the feedstock inlet port 104 (also referred to as feedstock port) may be mounted on the electrolyzer 102 and provide its inlet port or may be connected to the inlet port of the hydrogen generator 102 by means of a fluid line 104a.

[0110] Additionally, the fluid lines may branch, but do not necessarily have to. For ease of understanding, reference is made to a line network 110 (see Example 25) with respect to the fluid lines, which is formed by the fluid lines and (if present) the actuators and provides the fluid line paths 110a, 110b, 110c.

[0111] An example configuration of water electrolysis is started in phases, e.g., when the regeneration mode is initiated. In a first supply phase, the electrolyzer 102 is supplied with water as the starting material. This occurs, for example, by opening a valve and / or starting a pump 168. The water is arranged in a storage tank 166 (see Example 41), which can be refilled as needed. In a second supply phase, electrical power is supplied to the electrolyzer 102, which is converted by the water electrolysis. The resulting hydrogen is fed to the regeneration gas outlet 106, e.g., before or after it is mixed with inert gas taken in via the inert gas inlet 108.

[0112] Fig.lB illustrates a gas process system according to various embodiments 100b in a schematic structural diagram, for example configured according to example 10 and / or comprising a gas supply device 156 according to embodiments 100a.

[0113] An example configuration of the filter device 152 (also referred to as a separation device) comprises a plurality of cascaded filter stages 152a, 152b (also referred to as separation stages), each filter stage configured to bind a contaminant entrained by the inert gas passed through the filter stage. The filter stages 152a, 152b comprise a first filter stage (optionally according to Example 56) configured to bind oxygen using copper as a sorbent (then also referred to as copper filter stage 152a). The filter stages 152a, 152b further comprise a second filter stage (optionally according to Example 58) configured to bind moisture using a zeolite as a sorbent. It is understood that any other sorbent capable of binding the contaminant present (e.g., a metal other than copper) may be used.

[0114] In regeneration mode, the copper and / or zeolite (if present) can be exposed to the process gas flowing through the filter device. The oxygen gas in the process gas is bound by the copper through a chemical reaction to form copper oxide as a sorbate. The moisture in the process gas is adsorbed by the zeolite. The process gas discharged from the filter device in separation mode (then also referred to as filtered process gas) can, for example, have an inert gas purity of more than 1N, e.g., 2N, e.g., 3N, e.g., 4N, e.g., 5N.

[0115] An example configuration of the working device 152 (optionally according to Example 10 and / or Example 65) has a gas-tight working chamber (also referred to as a housing) in which a cavity 154 is formed as a working area. The working device 152 is configured to form an atmosphere in the cavity 154 from the filtered process gas (then also referred to as process gas atmosphere), which flows from the filter device 152 to the working device 152. For this purpose, a self-contained fluid line path 160 (then also referred to as a working path) can be provided, which connects the filter device 152 and the working device 152 to one another. If the working device 152 is configured as a glove box (then also referred to as a glove box) (see Example 65), it can further have one or more than one glove adjacent to the cavity 154.

[0116] The filter device 152 can couple two control valves 164, 162, e.g., directional control valves, as actuators (or components thereof), by means of which the working path 160 can be interrupted, e.g., in the regeneration mode. By means of the control valves 164, 162, a fluid conduction path (then also referred to as a regeneration path) is provided in the regeneration mode from the regeneration gas outlet 106 through the filter device 152 to an outlet 114 (e.g., a disposal outlet), and in the separation mode, through the filter device 152 to the process gas outlet 124.

[0117] In the regeneration mode, the copper oxide (or copper, if present) and / or the zeolite (if present) can be exposed to the regeneration gas flowing through the filter device. The hydrogen gas of the regeneration gas reacts chemically with the copper oxide to form copper, releasing moisture, which is carried with the remaining regeneration gas to the outlet 114. The water adsorbed by the zeolite is released into the regeneration gas and carried by it to the outlet 114. Furthermore (see Example 59) a heating device is provided which, in the regeneration mode, is configured to supply thermal energy to the filter device so that the copper oxide and / or the zeolite are heated, which promotes regeneration.

[0118] Other examples of the working device 152 or components thereof (see Example 69) include:

[0119] - a joining device (e.g. welding device) as a process device, which is designed to join (e.g. weld) using the process gas, e.g. to weld titanium, to carry out 3D printing using titanium, and / or to machine an aircraft engine;

[0120] - a working chamber in which sensitive objects are to be stored or processed, e.g. objects sensitive to moisture or oxygen;

[0121] - a working chamber (e.g. vacuum chamber) in which a sensitive process (e.g. research process) is carried out;

[0122] - a working chamber of a manufacturing plant.

[0123] Examples of such sensitive objects include:

[0124] - Semiconductor electronics, such as displays, or their components, for example OLED displays or OLEDs (organic light-emitting diodes),

[0125] - Raw materials, e.g. organics and / or dyes;

[0126] - Batteries and their components, such as electrodes, lithium-containing components, etc.

[0127] - Electronics of a different type.

[0128] An example configuration of the process gas atmosphere is inert and / or has a mass fraction of inert gas (e.g. argon and / or nitrogen gas) of more than 99%, e.g. more than 99.9% (corresponds to a purity of 1 N), e.g. more than approximately 99.99% (corresponds to a purity of 2 N), e.g. more than approximately 99.999% (corresponds to a purity of 3 N), e.g. more than approximately 99.9999% (corresponds to a purity of 4 N), e.g. more than approximately 99.9999% (corresponds to a purity of 5 N), e.g. more than approximately 99.99999% (corresponds to a purity of 6 N).

[0129] A particularly compact example configuration of the gas process system has precisely one source 120 for the inert gas (then also referred to as the inert gas source). The inert gas source 120 is connected to the inert gas inlet 108 of the gas supply device in order to supply the gas supply device with the inert gas in the regeneration mode, which is mixed with the hydrogen gas to form the regeneration gas. Furthermore, the inert gas source 120 is connected to the working path 160, e.g., by means of an inert gas inlet 118 branching off therefrom (if present) or by means of the filter device 108. This makes it possible to supply the filter device in the separation mode with a quantity of inert gas that replaces the inert gas escaping from the working device 154.What has been described for the compact implementation can apply analogously to multiple inert gas sources, of which a first inert gas source is connected to the inert gas inlet 108 of the gas supply device and a second inert gas source is connected to the inert gas inlet 118 branching off from the working path 160. Examples of the inert gas source include: a gas cylinder or a building gas line in which the inert gas is arranged.

[0130] An example configuration of the gas process system (optionally according to Example 62), which facilitates retrofitting an existing filter device with the gas supply device 156, has a modular design. The gas supply device 156 is provided as a first module (then also referred to as the gas supply module) and the filter device is provided as a second module (then also referred to as the filter module). The filter module and the gas supply module each have complementary connection couplings by means of which they can be coupled to one another. For example, the connection coupling of the gas supply module can provide the regeneration gas outlet 106, optionally the inert gas inlet 108, and optionally an electrical connection (then also referred to as a signal connection).Correspondingly, the connection coupling of the filter device 152 can be configured to receive the regeneration gas from the regeneration gas outlet 106, optionally supply the inert gas inlet 108 with inert gas, and / or optionally couple a regeneration signal into the signal connection. The regeneration signal clearly indicates that regeneration of the filter device 152 is to take place. For example, the two control valves 164, 162 can be switched using the regeneration signal.

[0131] The regeneration signal can be provided, for example, by means of a DC voltage applied to the signal terminal as long as the regeneration phase is active. The regeneration signal 168 can, of course, also be more complex or generated according to a communication protocol (e.g., a fieldbus communication protocol) if instructions and / or more information are to be transmitted.

[0132] An example configuration of the regeneration signal (see Example 31) is generated by a control unit of the filter module as soon as the separation mode has been active for a specified period of time. Alternatively or additionally, the electrical conductivity of the copper can be monitored by sensors as a representative of the saturation of the copper filter stage. For this purpose, the gas supply module has a control unit that starts the water electrolysis, e.g., in phases, in response to receiving the regeneration signal from the filter device.

[0133] Fig. 2 illustrates a gas supply device according to various embodiments 200 in a schematic structural diagram, which can optionally be configured according to one of the embodiments 100a or 100b.

[0134] An example configuration of the safety housing 230 (see Example 51) houses the electrolyzer 102, the gas mixing element 240, and the water tank 166. Cost-effectively, the safety housing is provided by a control cabinet having a maintenance opening and a door 262 (also referred to as a chamber door) closing the maintenance opening. The door 262 is configured to close the maintenance opening in a gas-tight manner by means of a seal. The seal can, for example, be mounted on the door 262 or a frame of the safety housing 230 in which the maintenance opening is formed, and can be configured to seal a gap between the frame and the door 262.

[0135] To increase safety, the containment housing 230 can be actively ventilated by means of a fan 216 as a gas conveying device (see Example 52). The fan 216 is configured to draw in ambient air (e.g., the earth's atmosphere) and transport it as a gas stream into the containment housing (then also referred to as the containment atmosphere). This promotes an increase in pressure in the containment housing. The containment atmosphere exits the containment housing 230 through a gas outlet throttle 318 (e.g., configured as an actuator) (see Example 53). The gas outlet throttle 318 can optionally be manually adjustable, which makes it easier to adjust the pressure in the containment housing and / or the gas flow. To reduce costs, the gas outlet throttle 318 has several orifices of different diameters, which can be interchanged.However, a fixed gas outlet throttle 318 can also be used, for example if the adjustment is only to be carried out once during assembly.

[0136] The gas supply device has (optionally according to example 24, e.g. example 26) a plurality of actuators by means of which the gas flow in the gas supply device can be influenced and which are represented here as valves by way of example. In this regard, it can be understood that what has been described for this purpose can apply analogously to differently implemented actuators, e.g. mass flow controllers, a throttle valve or the like. It can also be understood that the functions for influencing the gas flow, which are explained by means of separate actuators, can also be implemented together in one actuator and vice versa. Furthermore, some actuators have an electrical signal input 250, by means of which they can be electrically controlled by means of a control signal that is generated by the control device (not shown) and fed to the signal input 250.

[0137] The line network (optionally according to Example 27) provides an inert gas path 110c as a fluid line path, which leads from the inert gas inlet 108 through the gas mixing element 240 to the regeneration gas outlet 106. The line network further provides a hydrogen path as a fluid line path 110b, which leads from a hydrogen connection A2 of the electrolyzer 102 through the gas mixing element 240 to the regeneration gas outlet 106. The line network further provides a regeneration gas path 110d as a fluid line path, which leads from the gas mixing element 240 to the regeneration gas connection 106 and from which a vent path 110e branches off as a fluid line path. The vent path 110e opens into a vent actuator 230 and / or a safety valve 232.

[0138] The absorbed inert gas flow, which is supplied to the regeneration gas outlet 106 along the inert gas path 110c, is influenced by a blocking actuator 228 (e.g., a shut-off valve) and / or an adjustment actuator 220 (e.g., comprising a needle valve and / or a gas flow regulator). The blocking actuator 228 is controlled by a control signal generated according to the actual mode, which can be, for example, the regeneration mode or the separation mode. If the actual mode is the separation mode, the inert gas path 110c is interrupted (i.e., blocked) by the blocking actuator 228. If the actual mode is the regeneration mode, the interruption of the inert gas path 110c is canceled (i.e., the inert gas flow is released) by the blocking actuator 228. The adjustment actuator 220 is configured to be manually operated to manually increase or decrease the inert gas flow 202I (also referred to as adjustment).Once set, the adjustment actuator 220 can remain unchanged, for example, for several cycles of separation mode and regeneration mode. An example configuration of the gas mixing element 240 (optional according to Example 34) has a gas mixing container (then also referred to as a mixing vessel). A condensate separator 240a is arranged in the gas mixing container, through which the hydrogen path 110b leads and which is configured to release moisture entrained with the hydrogen gas into the gas mixing container. The condensate separator 240a is provided, for example, by means of a fluid line opening freely into the gas mixing container, from which condensed moisture (then also referred to as water condensate) can drip off. The water condensate is collected in the gas mixing container and disposed of, since small amounts of the hydrogen gas are dissolved in the water condensate. This increases safety.

[0139] The vent actuator 230 is controlled by a control signal generated according to the actual mode, which can be, for example, the regeneration mode or the separation mode. If the actual mode is the separation mode, the regeneration gas path 11 Oe is vented by means of the vent actuator 230, e.g., into the safety housing 230. If the actual mode is the regeneration mode, the vent actuator 230 is closed. The safety valve 232 is configured to be manually operated to manually increase or decrease the pressure of the regeneration flow 202r to which the regeneration gas outlet 106 is exposed (then also referred to as adjustment). Once set, the safety valve 232 can remain unchanged, e.g., for several cycles of separation mode and regeneration mode. The safety valve serves, e.g., as an overpressure protection device and is, e.g., preset so that it cannot be changed or at least cannot be manually adjusted (e.g., without tools).

[0140] In the exemplary configuration shown, the water (then also referred to as supply water), driven by a pump 168, circulates in a closed circuit (then also referred to as supply circuit) through the electrolyzer 102. The supply circuit has the fluid line path 110a (also referred to as water inlet), which leads from the water tank 166 to an inlet connection A1 of the electrolyzer 102. The water tank 166 can, for example, be connected, e.g., screwed, to the feedstock inlet 104. The supply circuit has an additional fluid line path 252r (also referred to as water return), which leads from a return connection A3 of the electrolyzer 102 to the water tank 166. Furthermore, the water tank 166 has a venting device (e.g., a line or opening) by means of which the water tank 166 can be vented, e.g., into the safety housing 230.This facilitates the removal of oxygen gas 202o, which is carried along with the supply water (e.g. dissolved therein) and released in the water tank 166, from the supply circuit.

[0141] Furthermore, various sensors may be present to monitor the actual state of the gas supply device, e.g., one or more operating parameters thereof. Examples of these sensors include:

[0142] - a first motor sensor 210 which is configured to detect the rotational speed of the pump 168 (e.g. a motor M thereof) as an actual operating parameter;

[0143] - a second motor sensor 212, which is configured to detect the rotational speed of the fan 216 (e.g. a motor M thereof) as an actual operating parameter;

[0144] - a water flow sensor 222 which is configured to detect a flow 202w of the supply water through the electrolyzer 102 as an actual operating parameter;

[0145] - a plurality of sensors as the first measuring element 208, which are configured to detect the actual state of the supply water (see example 45) as an actual operating parameter, e.g., a temperature of the supply water as an actual operating parameter, an electrical conductivity of the supply water as an actual operating parameter; and / or a fill level of the supply water in the water tank 166 as an actual operating parameter;

[0146] - a plurality of sensors as a second measuring element 218, which are configured to detect the actual state of the inert gas flow 202I as an actual operating parameter, e.g. the supply pressure of the inert gas to which the inert gas inlet 108 is exposed and / or the mixing pressure of the inert gas to which the gas mixing element 240 is exposed;

[0147] - a pressure sensor 206 which is configured to detect the pressure in the safety housing 230 as an actual operating parameter.

[0148] For safety reasons, the gas supply device may include a safety device (not shown) coupled to one or more of the sensors via a signal line 204, 214 for reading the sensor. The safety device may be configured to implement one or more safety mechanisms using the sensors. A first safety mechanism is configured to interrupt the electrical power supplied to the electrolyzer 102 when a fault condition is detected, thereby interrupting water electrolysis (also referred to as a fault mode). An optional second safety mechanism is configured to emit an alarm signal (e.g., an acoustic alarm) when the fault condition is detected.

[0149] Examples where the error condition is determined include:

[0150] - when the speed of the pump 168 (e.g. of a motor M thereof) and / or that of the fan 216 falls below a threshold value;

[0151] - when the flow rate 202w of the supply water through the electrolyzer 102 falls below a threshold value;

[0152] - if the temperature of the supply water exceeds a threshold;

[0153] - if the electrical conductivity of the supply water and / or the level of the supply water falls below a threshold value;

[0154] - if the supply pressure of the inert gas, the mixed pressure of the inert gas, or a difference between them leaves a range between two threshold values;

[0155] - the pressure in the safety chamber 230 falls below a threshold value.

[0156] The threshold values ​​clearly define a range for each operating parameter within which the operation of the gas supply device meets the safety requirements. For example, if the fan 216 fails, there is a risk that a flammable gas mixture will accumulate in the safety chamber 230. If the pump 210 fails, there is a risk that the electrolyzer 102 will overheat or at least run dry. If the pressure of the inert gas is too high or too low, there is a risk that the generated regeneration gas composition will become flammable.

[0157] Fig. 3A illustrates a gas supply module according to various embodiments 300a in a schematic perspective view, which are optionally configured according to one of the embodiments 100a to 200. An example configuration of the connection coupling 302 (see example 62) of the gas supply module has the inert gas inlet 108, by means of which the gas supply module can obtain the inert gas from the filter device. The connection coupling 302 of the gas supply module further has the regeneration gas outlet 10, by means of which the gas supply module can deliver the regeneration gas to the filter device. An example configuration of the maintenance opening 304 (see example 51) is configured such that, when the chamber lid is removed from the safety housing 302, it allows access to the electrolyzer 102, the gas mixing element 240, and the water tank 166.

[0158] An example configuration of the water tank 166 and the gas mixing element 240 (e.g., their containers) are configured similarly and / or have a thread by means of which they can be positively connected to the respective ports. This reduces maintenance effort.

[0159] Fig. 3B illustrates a method according to various embodiments 300b in a schematic flow diagram, optionally configured according to Example 2.

[0160] An example configuration for releasing hydrogen gas occurs at 351 by means of water electrolysis and / or in the regeneration mode. An example configuration for regenerating the filter device occurs at 353 by chemically reducing the copper oxide of the filter device to copper, to which thermal energy is supplied by the heating device. For example, the copper oxide can be heated to more than 100°C (e.g., to a thermal decomposition temperature or at least above 500°C), but not above its melting temperature.

[0161] The copper oxide is formed during a separation mode in which a gas purification process takes place. The gas purification process involves exposing the copper to an inert gas that carries oxygen gas. The copper reacts chemically with the oxygen gas to form copper oxide, which reduces the amount of oxygen gas carried by the inert gas.

[0162] Fig. 4A and Fig. 4B each illustrate a gas process system according to various embodiments when the actual mode is the regeneration mode 400a and when the actual mode is the separation mode 400b, in a schematic interconnection diagram, which are optionally configured according to one of the embodiments 100a to 300b. Solid arrows in the interconnection diagram represent enabled fluid paths. Dashed arrows in the interconnection diagram represent interrupted (e.g., blocked) fluid paths.

[0163] Fig. 5A illustrates a gas process system according to various embodiments 500a in a schematic configuration diagram, which are optionally configured according to one of the embodiments 100a to 400b. The gas process system comprises a system of multiple filter devices 152, 552 (then also referred to as a filter system), each filter device having two filter stages 152a, 152b. The first filter device 152 of the filter system 152, 552 is alternately placed in separation mode and regeneration mode. Complementarily, a second filter device 552 of the filter system 152, 552 is placed in regeneration mode when the first filter device 152 is in separation mode and placed in separation mode when the first filter device 152 is in regeneration mode. This promotes a high and uninterrupted conversion of the filter process.For this purpose, the gas supply device can generate the regeneration gas even when one of the filter devices 152, 552 is in the separation mode, but this does not necessarily have to be continuous.

[0164] The two filter devices 152, 552 can be coupled to one another by means of a 4-2-way valve as control valve 164, which is configured to fluidly connect the one of the two filter devices 152, 552 that is in the separation mode to the working device 154, and to fluidly connect the other of the two filter devices 152, 552, which is in the regeneration mode, to the gas supply device 156. Fig. 5B illustrates the phases of a change sequence according to various embodiments 500b in a schematic flow diagram (see Example 32), according to which the transition from the separation phase to the regeneration phase takes place.

[0165] In the following, various working examples are described which relate to what is described herein and shown in the figures, and which are aimed at concrete implementations thereof.

[0166] According to Working Example 1, the flow of supply water through the electrolyzer is 1 liter per minute (l / min). Accordingly, the flow of hydrogen gas generated by the electrolyzer is 1 liter per minute. Furthermore, the proportion of hydrogen gas in the regeneration gas is 10% or less. This inhibits the flammability of the hydrogen gas. The regeneration gas supplied to the filter device, for example, has a hydrogen gas content of no more than 5 vol%. The flow of regeneration gas supplied to the filter device is then 20 l / min.

[0167] According to a working example 2, the process gas, which essentially consists of the inert gas and contains oxygen and / or moisture as impurities, circulates through a glove box and the filter device. The flow of the process gas through the glove box can, for example, be greater than Fs . This promotes cost-effective gas purification. The value Fs for the flow of the process gas through the glove box can be a function of the internal volume V of the glove box, for example, so that a multiple (e.g., at least 10-fold) volume change occurs per hour. For a glove box with an internal volume of V = 1 m 3 the value is exemplary Fs = 60 m 3 / h or more. This promotes efficient mixing and the removal of contaminants.

[0168] According to working example 3, two filter stages (e.g., a copper filter stage) are used to bind oxygen gas, one of which is always in separation mode. This enables continuous operation. If the filter stage in separation mode is saturated, it is switched to regeneration mode, and the other filter stage is switched to separation mode. Analogously, more than two filter stages can also be used, which are switched to separation mode one after the other.

[0169] According to a working example 4, the hydrogen generator is surrounded during operation (when it generates hydrogen gas) by a volume flow of the safety atmosphere (e.g. atmospheric air) which has a pressure of at least 10 mbar above atmospheric pressure.

[0170] According to a working example 5, a heating device is provided per filter device, which supplies thermal energy to the filter stage(s) of the filter device when it is in the regeneration mode.

[0171] According to a working example 6, the supply water is deionized and monitored, e.g., its electrical conductivity to ensure water quality and the degree of deionization. Furthermore, the fill level and temperature of the supply water are monitored to prevent overheating of the hydrogen generator. The supply water is monitored using a combination probe as a measuring element, which has multiple sensors and is located in the water tank. Poor water quality (e.g., contamination in the water) can damage the electrolyzer. Monitoring the fill level protects the pump and electrolyzer from running dry and ensures that sufficient water is available to pump the water.

[0172] According to a working example 7, oxygen gas produced during water electrolysis is vented into the containment enclosure, through which the safety atmosphere, provided by the ambient air, flows. This prevents a safety-relevant accumulation of oxygen gas in the vicinity of the hydrogen generator. Alternatively or additionally, water extracted from the water electrolysis (then also referred to as wastewater), which is carried along with the hydrogen gas, is separated from the hydrogen gas and collected in the gas mixing tank. This promotes a cost-effective and safe design.

[0173] According to a working example 8, the pressure of the hydrogen gas and / or the regeneration gas is low and / or at least less than 2 bar (e.g., 1.5 bar absolute pressure or less). This reduces the requirements for components and tightness, which facilitates legal approval, simplifies operation, and saves costs.

[0174] According to a working example 9, the electrolyzer comprises several (e.g., three or more) electrolysis cells electrically connected in series (see example 61). The series connection reduces the electrical current for a given electrical power generated by the electrolyzer. This also reduces the requirements for the infrastructure supplying the electrolyzer's electrical power (e.g., electrical cables and an electrical generator), which saves costs and simplifies operation.

[0175] According to a working example 10, the electrolyzer has at least one proton-permeable polymer membrane (PEM) per electrolysis cell, which provides the electrolysis cell (then also referred to as a PEM cell). The PEM cell is inexpensive, low-maintenance, and easy to operate. For example, the PEM cell requires no pressure build-up and is therefore immediately ready for use. It requires no run-on time, no venting, and can be started at room temperature.

[0176] According to working example 11, the wastewater is not recycled into the water electrolysis process but disposed of. For this purpose, an open end of the water circuit is provided at the outlet side of the electrolyzer. This inhibits the mixing of oxygen gas and hydrogen gas and is more cost-effective to implement than a closed water circuit, which recirculates the condensate water into the supply water, thus requiring additional safety precautions.

[0177] According to a working example 12, the containment enclosure is a pressure chamber in which overpressure is generated by introducing air into the containment enclosure using a fan (also referred to as a blower). The volume flow of air introduced into the containment enclosure is greater than the volume flow of hydrogen gas generated by the hydrogen generator (e.g., ten times, one hundred times, or more). This guarantees sufficient dilution, even if all of the hydrogen gas escapes due to a leak. If the door of the containment enclosure is open or the leak is detected by a sensor, the hydrogen generator is automatically deactivated, e.g., by interrupting the electrical power supply. The overpressure can, for example, be 10 millibars above the hydrostatic pressure of the Earth's atmosphere (also referred to as atmospheric pressure) at the location of the hydrogen generator.Alternatively or additionally, the overpressure is manually adjusted once using a mechanical gas outlet throttle, allowing the use of an unregulated blower, thus saving costs. The blower and the gas outlet throttle are protected by a grille, increasing operational safety. Alternatively or additionally, the blower can be equipped with a dust filter, which increases operational safety.

[0178] According to a working example 13, the regeneration gas and the process gas are identical in the inert gas. This eliminates the need to purge the filter device during gas exchange, saving gas, time, and thus costs. For example, argon can be used as an inert gas in both the regeneration gas and the process gas. Even small amounts of nitrogen gas can be disruptive in an Ar-based application. Optionally, the process gas supplied to the filter device in separation mode is used in regeneration mode to be mixed with the hydrogen gas to form the regeneration gas. This further simplifies the structure and / or prevents the filter device from being exposed to pressure fluctuations. For example, the process gas, which has a pressure between 5-6 bar, is supplied to the filter device and / or the gas supply device. Optionally, the regeneration gas leaving the filter device is disposed of, e.g., via a disposal outlet.

[0179] According to a working example 14, the regeneration signal (e.g., having 24 volts) by which the control valves are controlled is branched off from one of the control valves and fed to the gas supply device. This simplifies the design and thus reduces costs. As soon as the control valve receives the regeneration signal, the hydrogen generator is started, e.g., according to the switching sequence. If the regeneration signal is switched off, the hydrogen generator is stopped, e.g., according to a reverse switching sequence.

[0180] According to a working example 15, the following occurs sequentially when starting the hydrogen generator (e.g. according to the change sequence):

[0181] - Checking the stored water (e.g. its level, conductivity and / or temperature);

[0182] - Start the pump to supply the stored water to the hydrogen generator and thus rinse it (e.g. its electrolysis cells);

[0183] - Injecting the inert gas into the gas mixing vessel to purge it, which reduces the risk of air entering the filter device:

[0184] - After 10-20 seconds, electrical power is coupled into the hydrogen generator to start water electrolysis, which produces hydrogen gas and supplies it to the gas mixing tank.

[0185] According to a working example 16, the following occurs sequentially when stopping the hydrogen generator (e.g. according to the reverse change sequence):

[0186] - interruption of electrical power so that water electrolysis ends;

[0187] - After 10-20 seconds, the supply of inert gas to the gas mixing vessel is interrupted so that the gas mixing vessel is purged again for this time;

[0188] - Stop the pump so that no more stored water is supplied to the hydrogen generator.

[0189] If the change sequence runs backwards, checking the water supply can optionally be omitted.

[0190] According to a working example 17, the storage container and / or the gas mixing element are provided by means of a screw-in cylinder (also referred to as a screw-in cylinder). This is cost-effective and can be scaled with little effort. For example, a screw-in cylinder with a 1-liter capacity can be exchanged for one with a larger or smaller capacity without having to change the design of the gas supply device.

[0191] According to a working example 18, the safety of the gas supply device is increased cost-effectively by means of:

[0192] - a splash-proof electric generator;

[0193] - an intervention protection for the manually adjustable valves which are designed to influence the chemical composition of the regeneration gas (e.g. safety valve and / or adjustment actuator);

[0194] - a measuring chain by means of which safety-relevant operating parameters are monitored by sensors, e.g. the water pressure in the electrolyzer, the pressure of the hydrogen gas at the outlet of the electrolyzer and / or in the gas mixing tank, the pressure of the safety atmosphere; and a control unit which triggers an interruption of the electrical power supplied to the electrolyzer if the measuring chain determines that the actual state of at least one of the monitored operating parameters exceeds or falls below a threshold value.

[0195] For example, a leak or incorrectly installed container (e.g. gas mixing container) can be detected by a deviation in the pressure of the regeneration gas and / or the hydrogen gas.

[0196] According to a working example 19, each of the following applications provided by the working device comprising an enclosure is particularly suitable to be supplied by the inert gas from the filter device:

[0197] - a glove box, which is provided, for example, by means of the enclosure;

[0198] - Welding under argon, e.g. in the enclosure;

[0199] - an OLED production, e.g. in the enclosure,

[0200] - examination, production or storage of dyes, e.g. in the enclosure;

[0201] - Inspection, production or storage of Li-ion batteries or components thereof, e.g. in the enclosure.

[0202] These applications reflect only a fraction of possible applications of the working device, in which processes are carried out that are sensitive to the influence of air humidity and oxygen gas.

[0203] According to a working example 20, a hydrogen-inert gas mixture is used as the regeneration gas for the regeneration of several reactors, which are used for gas purification. In contrast, the commercially available hydrogen-inert gas mixture is usually provided in pressurized gas cylinders, which increases costs but, in particular, limits availability. Furthermore, the required hydrogen gas volume flow is generated directly using a PEM electrolysis cell (also referred to as a PEM cell for short) and immediately mixed (i.e., diluted) with an inert gas (e.g., nitrogen or argon), so that a safety-relevant enrichment of hydrogen gas can never occur. The gas supply device is arranged in a forced-ventilation safety housing, the internal pressure of which is monitored in order to detect and prevent the formation of potentially safety-relevant hydrogen gas concentrations (e.g., in the event of a leak) at any time.The water supply to the PEM cell is provided by a system consisting of a storage vessel (also called a reservoir) and a water separator, which are provided by laboratory-sized gas cylinders, simplifying the setup and making it cost-effective. The water supply (e.g., fill level, temperature, and / or conductivity of the supply water) is monitored using a flexible combination probe inserted into the storage vessel from above. Gas mixing takes place directly in the water separator, minimizing the water content of the regeneration gas. An advantage of this working example over a conventional configuration is its application-specific simplicity, significantly reducing the need for safety technology, and thus significantly reducing costs compared to a universal configuration.

[0204] According to a working example 21, the regeneration of one or more reactors is carried out using a regeneration gas containing hydrogen gas. The standard volume flow of the regeneration gas is 20 l / min. The regeneration gas mixture meets at least the requirements for the regeneration of systems with up to 60 m 3 / h volume flow capacity. The regeneration gas has a maximum hydrogen gas content of 5 vol%. This inhibits its flammability. This results in a maximum volume flow of hydrogen gas generated by the electrolyzer of 1 l / min. According to a working example 22, hydrogen gas is generated by an electrolyzer (e.g., having one or more PEM electrolysis cells). The electrolyzer is supplied with water by a direct current diaphragm pump, which supplies the electrolyzer with a water flow rate of approximately 1 l / min. The water is drawn from the storage tank by the pump and fed to a dedicated inlet connection (also referred to as the H2O inlet) of the electrolyzer.The water leaves the electrolyzer along with the oxygen gas produced during water electrolysis through the electrolyzer's return port (also referred to as the O2 outlet) and is returned to the storage tank. The proportion of water that is decomposed by the electrolyzer is 0.8 ml / min (milliliters per minute). The remaining water can contribute to cooling the electrolyzer.

[0205] According to a working example 23, a laboratory glass bottle (e.g., 1 liter capacity) is used as a storage container. The laboratory glass bottle is removed from the starting material inlet (e.g., its screw cap) for filling and emptying. A flexible combination probe protrudes from above into the laboratory glass bottle to measure the conductivity, temperature, and fill level of the stored water in the laboratory glass bottle. The hydrogen connection (then also referred to as the H2 outlet) of the electrolyzer is fluidly coupled to an additional laboratory glass bottle (e.g., 1 liter capacity) as the container of the gas mixing element, in which the water droplets are separated. The additional laboratory glass bottle is also mounted so that it can be removed and emptied by the operator after regeneration. In the additional laboratory glass bottle, the hydrogen gas is mixed with inert gas (e.g., nitrogen gas) to form the regeneration gas.The flow of inert gas into the additional laboratory glass bottle can be controlled using a needle valve as an adjustment actuator. Once adjusted, this valve is generally only readjusted in the event of a fault or during maintenance. The needle valve couples the additional laboratory glass bottle to the inert gas inlet, to which, for example, the inert gas source connected to the filter device is connected. The pressure provided by the inert gas source (for example, approximately 6 bar above atmospheric pressure) is reduced to approximately 0.5 bar above atmospheric pressure, which then becomes the pressure of the regeneration gas. This ensures that the flow of the regeneration gas through the filter device is sufficiently invariant with respect to fluctuations in the backpressure in the filter device, making it possible to do without an additional pressure or flow regulator, thus saving costs.

[0206] According to a working example 24, a deviation of the actual chemical composition of the regeneration gas from the target chemical composition (e.g., specified as the ratio of hydrogen gas to inert gas) is minimized. For this purpose, the pressure of the inert gas to which the gas mixing element and / or the inert gas inlet 108 is exposed is monitored by means of the second measuring element. The second measuring element has two pressure switches, which are exposed to inert gas flowing from the inert gas inlet to the gas mixing element. The two pressure switches are used to monitor whether the pressure of the inert gas is within a range between a minimum pressure and a maximum pressure as a specified interval. The switches respond, for example, in the event of a blocked regeneration gas connection or similar errors.

[0207] According to a working example 25, the electrolyzer (e.g., its PEM cell) is supplied with electrical power by means of a direct current constant current source, which, for example, supplies an electrical voltage in a range between 3 volts (V) (e.g., 10 V) and 20 V and / or an electrical current in a range between 10 amperes (A) and 100 A for the power supply. The power supply (e.g., current supply) is interrupted in response to a fault condition (then also referred to as a malfunction) being detected. The fault condition is determined when at least one safety-relevant operating parameter fulfills the fault criterion. For example, the electrolyzer can consume electrical power in a range between 100 watts and 500 watts during operation, e.g., approximately 220 watts.

[0208] According to a working example 26, the failure criterion is met if the inert gas pressure, as a safety-relevant operating parameter, is less than a specified value, e.g., the minimum pressure, and / or greater than a specified value, e.g., the maximum pressure. Alternatively or additionally, the failure criterion is met if it is determined that the gas delivery device has failed or is impaired (e.g., by means of the second motor sensor).

[0209] According to a working example 27, the safety device is provided by means of a relay interconnection as a switching circuit. The switching circuit implements the monitoring of the operating parameters of the gas supply device. This allows for cost-effective implementation, since no programmable logic controller (PLC) is required as a safety device. Alternatively or additionally, the visualization and / or influencing of the operating parameters of the gas supply device, which are not safety-relevant, for example, is carried out using a system that has a miniature PLC and a display for displaying the most important operating parameters.

[0210] According to a working example 28, the regeneration phase, in which the regeneration gas is generated, is initiated by the regeneration signal generated by the filter device, e.g., by its control unit. The regeneration signal is a 24 V signal, by means of which the control valves (e.g., in the valve block) are controlled.

[0211] According to a working example 29, the safety device, the hydrogen generator, the gas mixing element, and the storage container are arranged in a gas-tight safety housing. The safety housing is continuously supplied with sufficient ambient air by means of a fan, which exits at exactly one air outlet of the safety housing (e.g., throttled). This promotes that the safety pressure in the safety housing is an overpressure, for example, a maximum of approximately 50 mbar (millibars) above atmospheric pressure. This safety pressure is monitored by a pressure switch, which facilitates failure detection of the fan. The volume flow of the ambient air through the safety housing is arranged in such a way that even if the maximum possible amount of the generated hydrogen gas flows out directly into the safety housing, a safety-relevant enrichment of hydrogen gas is inhibited.For this purpose, the volume flow of ambient air through the safety enclosure can, for example, be at least approximately 50 l / min (which corresponds to approximately 3 cubic meters per hour).

Claims

Patent claims 1. Gas supply device (156) comprising: • an inert gas inlet (106) for receiving inert gas; • a starting material inlet (104) for receiving a starting material; • a hydrogen generator (102) for releasing hydrogen gas from the starting material; and • a regeneration gas outlet (108) for providing a regeneration gas for a filter device; • wherein the gas supply device (156) is configured to generate the regeneration gas by mixing the generated hydrogen gas with the inert gas.

2. The gas supply device (156) according to claim 1, further comprising a gas mixing member (240) for generating the regeneration gas, wherein the gas mixing member (240) comprises a condensate separator configured to separate water entrained with the hydrogen gas generated by the hydrogen generator (102).

3. Gas supply device (156) according to one of claims 1 to 2, wherein the hydrogen generator (102) comprises an electrolyzer.

4. Gas supply device (156) according to one of claims 1 to 3, wherein the inert gas is provided by means of a service gas which has an impurity and has a larger proportion of the inert gas than the regeneration gas.

5. Gas supply device (156) according to one of claims 1 to 4, further comprising a safety device which is arranged to interrupt the release of hydrogen gas when an operating parameter of the gas supply device (156) meets a criterion, wherein the operating parameter: • relates to supplying the hydrogen generator (102) with water; • represents a pressure of a safety atmosphere in which the hydrogen generator (102) is arranged; • represents a pressure of the regeneration gas; and / or • represents a pressure of the inert gas.

6. Gas supply device (156) according to one of claims 1 to 5, further comprising a line network which is arranged: • in a regeneration mode, supplying the inert gas taken up by means of the inert gas inlet (108) to generate the regeneration gas; • and is arranged in a separation mode to displace the regeneration gas from the gas supply device (156) by means of the inert gas received at the inert gas inlet (108).

7. Gas process system, comprising: • the gas supply device (156) according to one of claims 1 to 6, • and the filter device (152) which is arranged to filter a process gas.

8. Gas process system, comprising: • a working device having a working area, wherein the working device (154) is configured to provide an atmosphere of a service gas in the working area; • a filter device (152) for filtering the process gas of the working device, wherein the filter device (152) has a regeneration gas inlet for receiving a regeneration gas for regenerating the filter device (152); • a gas supply device (156) which is arranged to generate the regeneration gas by mixing hydrogen with the process gas.

9. Gas process system according to one of claims 7 to 8, wherein the filter device (152) is arranged to chemically bind oxygen gas as a contaminant of the process gas, preferably by means of a metal.

10. Gas process system according to one of claims 7 to 9, further comprising: • a chamber housing in which the hydrogen generator (102) and preferably the starting material inlet are arranged, wherein the chamber housing has a chamber lid which is designed to close a maintenance opening of the chamber housing in a closed state of the chamber housing in a gas-tight manner; and • a fan which is designed to supply ambient air to the chamber housing, by means of which an overpressure is formed in the chamber housing.

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