Bracket assembly for installing rod-shaped structure and valve assembly including same

Abstract

A bracket assembly according to an embodiment is a bracket assembly for fixing a rod-shaped structure to the upper portion of an object to be installed, the object including an inwardly recessed fastening groove on one surface and an inwardly recessed installation groove that is spaced an arbitrary distance from the fastening groove and has the rod-shaped structure installed therein. The bracket assembly has a structure including: a flat plate-shaped bracket body that includes a first coupling hole, formed passing through at a position corresponding to the fastening groove, and a first installation hole, formed passing through at a position corresponding to the installation groove, for inserting and coupling the rod-shaped structure; and a fastening member that is inserted into and coupled to the fastening groove and the first coupling hole to fix the rod-shaped structure to the object to be installed.

Description

Bracket assembly for installing a rod-shaped structure and valve assembly including the same

[0001] The present invention relates to a bracket assembly for installing a rod-shaped structure and a valve assembly including the same.

[0002] In general, the atomic layer deposition process is a technology for depositing a thin film on a wafer at the atomic level by repeatedly performing a unit cycle that repeats the supply of multiple source gases and the supply of purge gases. The atomic layer deposition process has the disadvantage of a slow deposition rate compared to the conventional chemical vapor deposition process using a gas phase reaction method. Accordingly, in the atomic layer deposition process, an ALD valve removal technology is being developed to reduce the unit cycle time and precisely supply gases by supplying various gases at high pressure and high speed.

[0003] The above ALD valve controls the supply of various gases by repeating open and close operation to perform the atomic layer deposition process. When operating at high speed, the ALD valve has a short response time of less than 15 msec. Therefore, any delay in the open and close operation may adversely affect the deposition process. Accordingly, the ALD valve is equipped with a fiber sensor installed at the top to accurately monitor the valve timing performance.

[0004] Figure 1 is a conceptual diagram showing a conventional structure in which a fiber sensor is installed in an ALD valve assembly.

[0005] Referring to Fig. 1, a conventional ALD valve assembly installs a fiber sensor on the upper surface in the following manner. First, a through-hole wrench bolt (90) having an insertion hole (91) formed therethrough is prepared, and a rod-shaped fiber sensor (80) is inserted into the insertion hole (91). Then, the through-hole wrench bolt (90) having the fiber sensor (80) inserted therein is coupled by rotation to a coupling hole (71) formed therein on the upper surface of the ALD valve assembly (70). In this way, in the past, in order to install a fiber sensor (80) on the ALD valve assembly (70), a method of fixing and installing the fiber sensor (80) on the ALD valve assembly (70) in a state in which a portion of the outer circumference of the fiber sensor (80) is bound to the insertion hole (91) has been utilized. At this time, the ALD valve assembly (70) may have a structure in which screw threads are formed on the inner circumference of the coupling hole (71) and the outer circumference of the through-hole wrench bolt (90), respectively.

[0006] However, the conventional method as described above has difficulty in confirming whether the fiber sensor (80) is completely installed in the ALD valve assembly (70), which may cause deviation in the sensing value. In addition, since the structure in which the fiber sensor (80) is installed by rotating the through-wrench bolt (90) inserted into the ALD valve assembly (70) is formed, there is a concern that the fiber sensor (80) may be twisted and damaged. In addition, when a plurality of ALD valve assemblies (70) are formed at adjacent locations, there is a problem in that the installation work is difficult because the through-wrench bolts (90) are joined using a tool such as a wrench from the side of the through-wrench bolts.

[0007] According to one embodiment, it is an object of the present invention to provide a technical content regarding a bracket assembly and a valve assembly including the same, which can install a rod-shaped structure at an accurate location, easily secure a working space for installing the rod-shaped structure, and prevent damage to the rod-shaped structure due to rotation.

[0008] A bracket assembly according to an embodiment is a bracket assembly for fixing a rod-shaped structure to an upper portion of an installation object, the bracket assembly including a fastening groove formed in one side of a surface and an installation groove formed in a position spaced apart from the fastening groove by an arbitrary interval so as to be installed inside the fastening groove, the bracket assembly having a flat plate shape including a first fastening hole formed through a position corresponding to the fastening groove and a first installation hole formed through a position corresponding to the installation groove and for inserting and coupling the rod-shaped structure; and a fastening member inserted and coupled into the fastening groove and the first fastening hole to fix the rod-shaped structure to the installation object.

[0009] In one embodiment, the rod-shaped structure may be a fiber sensor, and the installation target may be an ALD valve assembly.

[0010] According to one embodiment, the bracket body may further include a first lower body connected to a lower portion of the first installation hole.

[0011] According to one embodiment, the bracket assembly has a first screw thread formed on the inner surface of the first installation hole and the lower body, a second screw thread having a structure corresponding to the first screw thread is formed on a portion of the outer surface of the rod-shaped structure, and the rod-shaped structure can be installed to the installation object in a rotationally coupled manner to the bracket body by the first screw thread and the second screw thread.

[0012] According to one embodiment, the bracket body may have a structure in which a concave portion is formed in an area between the first joining hole and the first installation hole.

[0013] According to one embodiment, the fastening member may have a structure including a bolt head having a +, - or hexagonal insertion groove formed on the upper surface thereof and a bolt body connected to the lower portion of the bolt head and having a third screw thread formed on the outer circumferential surface thereof.

[0014] According to one embodiment, the bracket assembly may further include a second coupling hole formed through a position corresponding to the fastening groove and a second installation hole formed through a position corresponding to the installation groove and for inserting and coupling the rod-shaped structure, and a support reinforcing plate installed between the installation object and the bracket body. At this time, the support reinforcing plate may further include a receiving hole formed through a central region, and may further include a second lower body connected to a lower portion of the second coupling hole and having a fourth screw thread formed on an inner circumferential surface.

[0015] Meanwhile, the valve assembly according to the embodiment may have a structure in which a rod-shaped structure is installed on the upper portion using the bracket assembly.

[0016] The above-mentioned rod-shaped structure may be a fiber sensor, and the above-mentioned valve assembly may be an ALD valve assembly.

[0017] The bracket assembly for installing a rod-shaped structure according to an embodiment can install the rod-shaped structure at an exact location of the installation target. The bracket assembly for installing a rod-shaped structure according to an embodiment can be installed from above using a driver or a hex wrench, thereby easily securing a working space for installing the rod-shaped structure and preventing damage to the rod-shaped structure during installation.

[0018] In addition, the bracket assembly according to the embodiment can accurately install the installation target on top of the ALD valve assembly, thereby preventing the occurrence of a sensing value deviation. In particular, the rod-shaped structure may be a fiber sensor, and the installation target may be an ALD valve assembly.

[0019] Figure 1 is a conceptual diagram showing a conventional structure in which a fiber sensor is installed in an ALD valve assembly.

[0020] FIGS. 2 and 3 are exploded perspective views each showing a bracket assembly for installing a rod-shaped structure according to one embodiment.

[0021] FIG. 4 is a diagram showing a state in which a rod-shaped structure is installed using a bracket assembly for installing a rod-shaped structure according to one embodiment.

[0022] Figures 2 and 3 are exploded perspective views each showing a bracket assembly for installing a rod-shaped structure according to one embodiment. Figure 4 is a diagram showing a state in which a rod-shaped structure is installed using the bracket assembly for installing a rod-shaped structure according to one embodiment.

[0023] Referring to FIGS. 2 to 4, a bracket assembly (300) according to one embodiment can secure a rod-shaped structure (200) to the upper portion of an installation target (100).

[0024] First, the installation target (100) may have a structure including a fastening groove (101) and an installation groove (103) formed internally on one side of the surface. The fastening groove (101) and the installation groove (103) may be formed at positions spaced apart from each other by an arbitrary interval. The fastening groove (101) provides a space for installing a fastening member (330) to be described later. The installation groove (103) forms a receiving space for receiving a lower portion of the rod-shaped structure (200).

[0025] The above-described installation object (100) may be an ALD valve assembly installed to control gas supply in an atomic layer deposition device. The above-described installation object (100) may have a structure in which an inlet (105) is formed in a central region. The above-described installation object (100) may form a structure in which a valve structure (110) is installed through the inlet (105). The above-described valve structure (110) may have a structure including a pipe and a valve for gas supply.

[0026] The above-mentioned rod-shaped structure (200) may have a rod-shaped structure. The rod-shaped structure (200) may have a structure in which screw threads are formed on one side of the lower outer circumference. Accordingly, the rod-shaped structure (200) may be fixed to a bracket body (310) in which screw threads of a structure corresponding to the screw threads are formed in a rotational coupling manner. The above-mentioned rod-shaped structure (200) may be a fiber sensor or an optical fiber sensor installed to monitor the timing performance of an installation target, i.e., an ALD valve assembly. The fiber sensor may have a structure including a current-conducting wire.

[0027] The bracket assembly (300) according to the embodiment has a structure including a bracket body (310) and a fastening member (330) to secure a rod-shaped structure (200) to the upper portion of an installation target (100).

[0028] The above bracket body (310) may have a flat plate-shaped structure. The bracket body (310) has a structure in which a first joining hole (311) and a first installation hole (313) are each formed through the bracket body.

[0029] The first coupling hole (311) may be formed at a position corresponding to the bonding groove (101). The first installation hole (313) may be formed at a position corresponding to the installation groove (103).

[0030] The above-mentioned fastening groove (101) and the first coupling hole (311) form a structure in which a fastening member (330) is inserted and coupled. The above-mentioned installation groove (103) and the above-mentioned first installation hole (313) form a structure in which a rod-shaped structure (200) is inserted and coupled. Accordingly, the bracket body (310) is fixed to the upper portion of the installation target (100) by the fastening member (330) in a state in which the rod-shaped structure (200) is coupled to one side, thereby fixing the rod-shaped structure (200) to the upper portion of the installation target (100).

[0031] The bracket body (310) may further include a first lower body (315) connected to the lower portion of the first installation hole (313). The first installation hole (313) and the inner surface of the first lower body (315) may have a structure in which a first screw thread is formed. A portion of the outer circumferential surface of the rod-shaped structure (200) has a structure in which a second screw thread corresponding to the first screw thread is formed. Accordingly, the rod-shaped structure (200) may be fixedly installed to the bracket body (310) in a rotationally coupled manner by the first screw thread and the second screw thread.

[0032] The bracket body (310) may have a structure in which a concave portion (317) is formed in the area between the first coupling hole (311) and the first installation hole (313). The concave portion (317) forms a structure that is concavely curved inwardly from the side on one side of the central area of ​​the bracket body (310). Accordingly, the bracket body (310) may form a structure that does not restrict the installation of the valve structure (110) on the upper portion of the installation object (100).

[0033] The above-mentioned fastening member (330) is inserted and connected through the fastening groove (101) and the first fastening hole (311) to fix the rod-shaped structure (200) to the upper portion of the installation target (100).

[0034] The above-mentioned fastening member (330) can be implemented using a bolt structure having a structure including a bolt head and a bolt body. The fastening member (330) can have a structure in which one of a +-shaped, --shaped, or hexagonal insertion groove is formed on the upper surface of the bolt head. The bolt body has a structure in which it is connected to the lower portion of the bolt head and a third screw thread is formed on the outer circumference.

[0035] The above-mentioned fastening member (330) can be inserted and coupled through the fastening groove (101) and the first coupling hole (311) by rotation. Accordingly, the fastening member (330) can fix the rod-shaped structure (200) to the upper portion of the installation object (100). At this time, the fastening member (330) can be inserted and coupled through the fastening groove (101) and the first coupling hole (311) by using a + or - shaped driver, or a hexagonal wrench, etc.

[0036] Meanwhile, the bracket assembly (300) according to one embodiment may further include a support reinforcement plate (350).

[0037] The above support reinforcing plate (350) is installed between the installation target (100) and the bracket body (310) to strengthen the bonding force by the bonding member (330) and form a structure that more strongly fixes the rod-shaped structure (200) to the installation target (100) at the top.

[0038] The above-mentioned support reinforcement plate (350) may have a structure including a second joining hole (351) and a second installation hole (353).

[0039] The second coupling hole (351) may be formed through a position corresponding to the fastening groove (101). The second installation hole (353) may be formed through a position corresponding to the installation groove (103). Accordingly, a structure is formed in which the fastening member (330) is inserted and coupled through the fastening groove (101), the second coupling hole (351), and the first coupling hole (311). In addition, the support reinforcing plate (350) may further include a second lower body (355) connected to the lower portion of the second coupling hole (351) and having a fourth screw thread formed on the inner circumferential surface.

[0040] The above-mentioned rod-shaped structure (200) forms a structure that is inserted and coupled through the installation groove (103), the second installation hole (353), and the first installation hole (313). Accordingly, the bracket body (310) is fixed to the upper portion of the installation target (100) by the fastening member (330) in a state in which the rod-shaped structure (200) is coupled to one side together with the support reinforcing plate (350), thereby fixing the rod-shaped structure (200) to the upper portion of the installation target (100).

[0041] The above-mentioned support reinforcing plate (350) may further include a receiving hole (357) formed penetratingly in the central region. Accordingly, the support reinforcing plate (350) may have a ring-shaped structure and may form a structure that does not restrict the installation of the valve structure (110) on the upper portion of the installation object (100).

[0042] Meanwhile, the bracket assembly according to the embodiment can fix a rod-shaped structure (200) to the upper part of an installation target (100), such as an ALD valve, in the following manner. The ALD valve assembly, which is the installation target (100), has a structure in which a fastening groove (101) and an installation groove (103) are formed on the upper surface.

[0043] First, the rod-shaped structure (200) is rotationally coupled to the first installation hole (313) of the bracket body (310) to form an assembly structure. At this time, a separation prevention member may be additionally installed at the lowest part of the rod-shaped structure (200) of the assembly structure. Then, the assembly structure is placed on the upper part of the installation target (100), and the fastening member (330) is rotationally coupled and fixed through the fastening groove (101) and the first fastening hole (311). Accordingly, the rod-shaped structure (200) can be fixed to the upper part of the installation target (100).

[0044] Alternatively, the rod-shaped structure (200) is rotationally coupled to the first installation hole (313) of the bracket body (310) to form an assembly structure. Then, the support reinforcing plate (350) is placed on the upper portion of the installation target (100). Next, the bracket body (310) to which the rod-shaped structure (200) is fixed is placed on the upper portion of the support reinforcing plate (350), and the fastening member (330) is rotationally coupled and fixed through the fastening groove (101), the second fastening hole (351), and the first fastening hole (311). Accordingly, the rod-shaped structure (200) can be fixed to the upper portion of the installation target (100).

[0045] The bracket assembly for installing a rod-shaped structure according to the above-described embodiment can install the rod-shaped structure at an accurate position of an installation target and can perform installation work from above using a driver or a hex wrench, thereby easily securing a working space for installing the rod-shaped structure and preventing damage to the rod-shaped structure during installation. In addition, the bracket assembly according to the embodiment can install the installation target at an accurate position on top of the ALD valve assembly, thereby preventing occurrence of a sensing value deviation. In particular, the rod-shaped structure may be a fiber sensor, and the installation target may be an ALD valve assembly.

[0046] [Explanation of symbols]

[0047] 100: Installation target 101: Fastening groove

[0048] 103: Installation groove 105: Inlet

[0049] 110: Valve structure 200: Rod structure

[0050] 300: Bracket assembly 310: Bracket body

[0051] 311: First joint 313: First installation hole

[0052] 315: First lower body 317: Concave part

[0053] 330: Binding member 350: Support reinforcement plate

[0054] 351: Second joint 353: Second installation hole

[0055] 355: Second lower body

[0056] A bracket assembly for installing a rod-shaped structure according to an embodiment can be used for manufacturing an ALD valve used in an atomic layer deposition device, as it can install an installation target in an accurate position.

Claims

1. A bracket assembly for fixing a rod-shaped structure to the upper part of an installation object, which includes a fastening groove formed on one side of a surface and an installation groove formed at a position spaced apart from the fastening groove by an arbitrary interval and in which a rod-shaped structure is installed inside, A flat-shaped bracket body including a first joining hole formed through a position corresponding to the above-mentioned fastening groove and a first installation hole formed through a position corresponding to the above-mentioned installation groove and for inserting and connecting the rod-shaped structure; and A bracket assembly including a fastening member that is inserted and fastened into the fastening groove and the first fastening hole to fasten the rod-shaped structure to the installation target.

2. In paragraph 1, A bracket assembly characterized in that the above-mentioned rod-shaped structure is a fiber sensor.

3. In paragraph 1, A bracket assembly, characterized in that the above installation target is an ALD valve assembly.

4. In paragraph 1, The above bracket body is, A bracket assembly further comprising a first lower body connected to the lower portion of the first installation hole.

5. In paragraph 4, The above bracket assembly, A first screw thread is formed on the inner surface of the first installation hole and the lower body, A second screw thread having a structure corresponding to the first screw thread is formed on a portion of the outer surface of the above-mentioned rod-shaped structure. A bracket assembly characterized in that the above-mentioned rod-shaped structure is installed to the installation object in a rotationally coupled manner to the bracket by the first screw thread and the second screw thread.

6. In paragraph 1, The above bracket body is, A bracket assembly characterized in that a concave portion is formed in an area between the first joining hole and the first installation hole.

7. In paragraph 1, The above absence of bonding, A bracket assembly including a bolt head having a +, - or hexagonal insertion groove formed on the upper surface and a bolt body connected to the lower portion of the bolt head and having a third screw thread formed on the outer surface.

8. In paragraph 1, The above bracket assembly, A bracket assembly characterized in that it includes a second joining hole formed through a position corresponding to the above-mentioned fastening groove, and a second installation hole formed through a position corresponding to the above-mentioned installation groove and for inserting and connecting the rod-shaped structure, and further includes a support reinforcing plate installed between the installation target and the bracket body.

9. In paragraph 8, The above supporting reinforcement plate is, A bracket assembly further characterized by including a receiving hole formed through a central region.

10. In paragraph 8, The above supporting reinforcement plate is, A bracket assembly characterized by further including a second lower body connected to the lower portion of the second joining hole and having a fourth screw thread formed on an inner surface.

11. A valve assembly having a rod-shaped structure installed on the upper portion using the bracket assembly described in any one of clauses 1 to 10.

12. In paragraph 11, The above rod-shaped structure is a fiber sensor, A valve assembly characterized in that the above valve assembly is an ALD valve assembly.

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