Six degrees of freedom parallel positioner

Abstract

The invention relates to a support system (100) for generating a movement of a support plate (102) configured, when in use, to convey a workpiece to be moved to a predetermined spatial position relative to a known default position, the system comprising: a plurality of support assemblies (200) each of which is configured to move freely in and rotate freely around all of the axes (XYZ) and which is connected to the support plate (102) to translate the movement of the support plate (102) in several degrees of freedom among six degrees of freedom, based on the predetermined position; one or more motion units (108a-f) each associated with each of the plurality of support assemblies (200); a controller configured to drive one or more of the motion units (108a-f) so as to cause the support plate (102) to move to the predetermined position, the number of motion units (108a-f) configured to be driven being equal to the number of degrees of freedom required by the movement to move the support plate (102) to the predetermined position.

Description

[0001] DESCRIPTION

[0002] TITLE: SIX DEGREES OF FREEDOM PARALLEL POSITIONER

[0003] Technical field of the invention

[0004] The present invention relates to a system and a corresponding method for moving a support plate in a treatment environment, for example in a treatment environment for manufacturing electronic devices.

[0005] Technical Background

[0006] The manufacture of electronic devices involves numerous treatment steps and requires moving components from one treatment step to another or placing the electronic device in a particular location for a particular tool. This is especially useful when handling semiconductor wafers and the like.

[0007] In a typical manufacturing environment, a wafer goes through a number of different treatment steps in order to form the final wafer and all of the components associated with it. This requires the wafer to be moved in the manufacturing environment and, at all times, precise knowledge of the position and orientation of the wafer in the manufacturing environment. In addition, these environments are controlled and any human intervention must be limited. As a result, automatic systems with a support or platform are used to move and locate the wafer in the manufacturing environment.

[0008] To achieve the required level of precision, the wafer must be able to be moved by the robot with six degrees of freedom. Such robots already exist, but they have performance issues in some situations. Moreover, up until now, robots have been bulky and have had a large footprint relative to the size of the wafer. Moving one or more robots in a manufacturing environment is therefore a challenge. For some movements, it is common to have several robots or to stack robots up to ensure that all six degrees of freedom are taken into account. This leads to additional drawbacks. It is therefore necessary to find a better way of carrying and moving a wafer or similar object in a manufacturing environment, which makes it possible to overcome at least some of the problems associated with the previous robots and systems. It is necessary to remedy at least some of the disadvantages of the known and previous support robots.

[0009] Summary of the invention

[0010] The present invention relates to a support system for generating a movement of a support plate configured, when in use, to convey a workpiece to be moved to a predetermined spatial position relative to a known default position, the system comprising: a plurality of support assemblies each of which is configured to move freely along each of the three axes (XYZ) and to rotate freely around all the axes (XYZ) and which is connected to the support plate to translate the movement to the support plate in at least one degree of freedom among six degrees of freedom, based on the predetermined position; one or more motion units each associated with each of the plurality of support assemblies; a controller configured to drive one or more of the motion units so as to cause the support plate to move to the predetermined position, the number of motion units configured to be driven being equal to the number of degrees of freedom required by the movement to move the support plate to the predetermined position.

[0011] According to at least one embodiment of the invention, the support system comprises three support assemblies connected to the support plate.

[0012] According to at least one embodiment of the invention, each support assembly comprises two motion units configured to drive a movement along two different axes. According to at least one embodiment of the invention, the support assemblies each comprise two motion units connected to each other by a joint with six degrees of freedom.

[0013] According to at least one embodiment of the invention, the support assemblies each comprise a first motion unit imparting movement along a Z axis relative to the default position and a second motion unit imparting movement in a plane of the support plate relative to the default position.

[0014] According to at least one embodiment of the invention, the first motion unit is located in one leg of the support system; said leg is configured to change the height of the system relative to the default position. According to at least one embodiment of the invention, the second motion unit is located in a coupling in the plane of the support plate of the support system, and which is configured to change the position in the plane of the support plate of the system relative to the default position.

[0015] According to at least one embodiment of the invention, the coupling comprises two orthogonal parts, a first coupling extending in one direction in the plane of the support plate and a second coupling extending in one direction in the plane of the support plate and in which the first coupling is connected to the second coupling and the coupling is located below the support plate.

[0016] According to at least one embodiment of the invention, the support system further comprises a circular support plate attached to the plurality of support assemblies on a circumference thereof.

[0017] According to at least one embodiment of the invention, the support assemblies in the plurality of support assemblies are equidistantly located around the circumference.

[0018] According to at least one embodiment of the invention, the support assemblies in the plurality of support assemblies are located around the circumference of the support plate and a first and a second support assembly are separated by a 90° angle. For example, the various movements resulting in the position of the support plate can be measured.

[0019] According to at least one embodiment of the invention, the support system further comprises at least one sensor for measuring the movement of the support plate.

[0020] According to at least one embodiment of the invention, at least one sensor comprises means for measuring at least one movement of at least one part of the support system and the support system comprises means for calculating a position of the support plate based on the measured movement(s).

[0021] In fact, for example, the sensors measuring the position of the support plate are mostly indirect. It is quite difficult to manage the movements of the motors by measuring the resulting position at the support plate. The present invention therefore makes it possible to manage at least some of the various displacements or movements, for example, by measuring the position of the various motion units (or actuators) and calculating the position of the support plate.

[0022] According to at least one embodiment of the invention, the support system further comprises a spring configured to bear a weight of the support plate before, during or after the movement of the support plate in a Z direction.

[0023] According to at least one of its embodiments, the invention also relates to a method of moving a support plate in a support system according to any of the preceding claims, the support plate being configured, when in use, to convey a workpiece to be moved to a predetermined spatial position relative to a known default position, the method comprising the following steps: moving one or more support assemblies each of which is configured to move freely in and rotate freely around all of the axes (XYZ) and which is connected to the support plate to impart movement to the support plate in at least one of six degrees of freedom, based on the predetermined position, by driving one or more motion units to cause the support plate to move to the predetermined position; further comprising driving a number of motion units to move the support plate to the predetermined position.

[0024] Brief description of the figures

[0025] Other features and advantages of the invention will become apparent from the following detailed description, which will be understood by referring to the appended drawings in which:

[0026] [Fig. 1 ] is a simplified diagram of a support platform for a workpiece to be treated (or "processed") according to one aspect of the present invention;

[0027] [Fig. 2] is a schematic top view of the support platform in Figure 1 showing the relative positions of the legs of the support and the platform movement motor according to one aspect of the invention;

[0028] [Fig. 3a] and [Fig. 3b] respectively show the first and second coupler in Figures 1 and 2;

[0029] [Fig. 4] is a schematic diagram showing alternative relative positions of the legs of the support platform in accordance with one aspect of the invention;

[0030] [Fig. 5] is a technical drawing of the support platform in Figure 1 in accordance with one aspect of the invention.

[0031] Detailed description of the invention

[0032] Various aspects of different embodiments of fluid detectors according to the invention are described in more detail below, with reference to the attached drawings.

[0033] Various aspects of different embodiments of a system and a corresponding method for moving a support plate in a treatment environment, for example in a treatment environment for the manufacture of electronic devices according to the invention, are described in more detail below, with reference to the attached drawings. The present invention relates to a system for moving a platform in an electronics manufacturing environment, for example to place a wafer in a treatment position in one or more steps in a wafer or chip manufacturing process. The system is referred to here as a system or a robot, since it includes a robotic component that can move from one position to another automatically according to instructions. The instructions can be given directly by a user or using an interface and / or computer instructions, as the case may be. The various types of instructions will be discussed in more detail below. The system can also be used in a method of manufacturing a wafer or the like and the various steps in the method can be facilitated by the system through appropriate instructions.

[0034] The support system 100 is shown in three dimensions (3D) in Figure 1 . The system 100 comprises a plate or a platform 102 for carrying or conveying a workpiece (not shown) from one position to another in various workpiece treatment steps or for any other purpose.

[0035] The support platform is generally circular in shape, with a center point C and a radius r. The support platform can have any other shape, size or orientation required for different applications. The exact size and shape of the platform is known by the system, so that the relative movements of the platform can be programmed and executed.

[0036] In the present invention, the workpiece to be treated / handled is one or more electronic devices, for example in the form of a semiconductor wafer. The semiconductor wafer comprises, for example, a plurality of chips or similar elements arranged in an array. The array comprises a certain number of rows and columns of chips or the like arranged at a known distance from each other in a known plane. The array can be centered on the center point C and have a diameter slightly smaller than that of the support plate 102. The workpiece is attached to the platform while in use by an attachment interface adapted to the platform and to the workpiece or a tool designed to carry a workpiece. The position of the workpiece must be precisely known for each treatment step, so that the necessary treatment steps conform to a predetermined plan for manufacturing the part. The position of the workpiece is directly related to the support platform 102 and can be determined by the system as described below.

[0037] The ability to precisely know the position of the workpiece and to move it to a new position for the next treatment step, or for any other use, relies on the precise knowledge of the position of the workpiece at any given time. To this end, the workpiece position is known in six degrees of freedom and the movements of the support plate 102 are also based on the programming of the movement in these six degrees of freedom and by conventional positional tracking devices.

[0038] It is assumed that platform 102 is in a known plane. For example, in an XY plane parallel to the floor. The XY plane comprises an X direction (or longitudinal direction) and a Y direction (or lateral direction). The X and Y directions are part of an S (or XYZ) coordinate system which is illustrated in Figure 1 , but which is understood to apply to all of the other figures although it is not shown. This S coordinate system comprises the X and Y directions forming the XY plane and the Z (or vertical) direction which is orthogonal to said XY plane. The system 100 is designed to be able to move the plate 102 in at least some of the six degrees of freedom. The six degrees of freedom comprise a translation Xi along the X direction; a rotation 9X around the X direction; a translation Yi along the Y direction; a rotation 0Y around the Y direction; a translation Zi along the Z direction; and a rotation 0Z around the Z direction.

[0039] The coordinate system can comprise different nomenclatures or schematics, as will be understood by the person skilled in the art.

[0040] In the illustrated system, there are three legs 104 (a), 104(b) and 104(c) and these legs are spaced in a triangular orientation, each leg being substantially 120° from the other two, measured in the XY plane and at the same distance from the center point C between the legs 104. This is illustrated in more detail in Figures 3a and 3b, and an alternative is shown in Figure 4 for other angular values. The system 100 is designed to be carried or supported by a robot from which the legs 104 extend. The legs 104 extend from the robot through a support structure 106 which ensures that the legs (104) do not move relative to the support plate 102 other than by the action of one or more motors 108a-c corresponding to each leg 104. At the top of each leg 104 is a ball-and-socket joint 110. In the illustrated example, the top of the leg 104 comprises a spherical end 1 12 that is configured to engage a respective cup 114, connected to the base of the plate 102. Each cup 114 is connected to the base of the support plate by a number of connectors. Other types of joint could also be used, provided they offer flexibility in all three rotations.

[0041] A first coupling 116 is oriented in the plane of the support plate 102 and perpendicular to a radius r of a circle centered on C. The first coupling 116 is attached to the base of the support plate 102 on the edge of its circumference. A second connector 118 is coupled to the first connector 1 16 and to the joint 110. The second connector 118 is perpendicular to the first connector 116 and extends along the radius r of the circle in the same plane as the support plate 102.

[0042] The robot comprises at least one motion unit or motor 108d-f for moving the support plate 102 from one position to another in one or more of the six degrees of freedom.

[0043] A first connector 116 is oriented in the XY plane and in line with the 60° position of the angle between the respective legs, so that if they are extended towards the center C, they meet. A second connector 118 connects the first connector 116 to the base of the support plate 102 and is oriented perpendicular to the axis of the first connector and in the same XY plane.

[0044] The robot comprises at least one motion unit or motor 108 that enables the robot to move from one position to another in one or more of the six degrees of freedom.

[0045] In one example, each leg can comprise a motor 108a, 108b, 108c above the end 120 closest to the robot. Each of these motors can move the respective leg in a positive or negative direction or Z axis. In order to move the platform 102 in the X and Y directions, three additional motors are associated with the connectors 116 and 118 and are capable of moving the support platform relative to the respective legs in the X and Y directions. In one aspect, the three motors 108d-f are associated with the connectors 116 and 118 and are capable of moving the support platform relative to the respective legs in the X, Y and theta Z directions respectively. The respective motors 108 generate a movement in at least one of the X, Y, Z directions or a rotation around at least one of the X, Y, Z axes. In some systems 100, there can be one motor for each type of movement, for example each of the six degrees of freedom, or there can be fewer motors when the same motor is used for more than one movement in different degrees of freedom.

[0046] At any time or at any step in a process, the current position of the workpiece is known. For a given manufacturing process, the next step in the process is determined. Based on this step, a required position for the next required workpiece position is determined. Depending on the difference between the known (current) position and the required (next) position, a series of movements of the support plate 102 is required. The motor or motors associated with the support plate 102 are then programmed to carry out the required movements in at least one of the six degrees of freedom in order to position the workpiece in the required position.

[0047] A controller (not shown) is used to determine the movements and positioning of the workpiece or of the platform for the first step in the process and for each successive step. The process can consist of a plurality of steps, each taking place at a specific location, optionally using a specific tool. The specific location is spatially known by a set of coordinates relative to a neutral point located somewhere in the treatment environment. For example, the home position of an empty platform is defined as an original position in which all the coordinates of the six degrees of freedom are known to be zero. Thereafter, each step in the process takes place at a predetermined position and orientation, defined by the coordinates of the default position. The controller commands the motors to move as required to position the platform or the workpiece at each successive set of coordinates for the treatment to be carried out. It should be noted that after each treatment step, the size of the workpiece may have changed as a result of the previous treatment step, and this is taken into account when determining the next required position. For example, during a deposition step, the wafer thickness can change and the subsequent treatment step adjusts to this change. The controller identifies such a change and calculates the required position for the next step accordingly.

[0048] It should be noted that the controller is part of a computer system with a processor, memory and a range of other input and output mechanisms. One useful mechanism involves measuring the movement of the support platform and the expected movements required for the next step. The system comprises a number of sensors that measure the amount of platform or support plate 102 movement in each of the degrees of freedom. Typical sensors include optical linear sensors that can determine the movement of each leg and the movement of the motors corresponding to the first and second couplings 116 and 118. Other measurements can be used and other types of sensor can be used to measure these and other parameters. The controller can be used in conjunction with a list of executable codes stored in the memory and managed by the processor. The processor can thus provide instructions to the motors to move the support plate at each step in a sequence of steps. In addition, the controller, as stated above, knows a base or neutral position from which all measurements are calculated.

[0049] The way in which platform movement is generated will now be described in more detail with reference to Figure 2. The support plate is supported by three support assemblies 200. in which each support assembly 200 is configured to movably secure the support plate 102 to the legs 104 (not shown in Figure 2) by means of a combination of elements. The mobile nature of the combined support assemblies should add up to six degrees of freedom where six degrees of freedom are required. In the illustrated example, the elements comprise the joint 110 (not shown as such), the first connectors 116 and the second connectors 118. In some examples, there are as many motor directions as there are degrees of freedom.

[0050] It should be noted that there can be more support assemblies than the ones shown, in which case the support assemblies may not comprise any motors and simply be free to move. For example, there can be a fourth support that has no motor and moves freely in all axes.

[0051] As shown in Figure 1 , the legs 104 are each equipped with a motor 108a-c and each is controlled to move separately relative to the support 106 in which the motors 108a- c are located. The illustrated orientation of the system indicates that the motors 108a-c move the support plate in the Z direction (up and down). As each motor 108a- c operates separately, the position of the joint 110 and therefore of the support plate 102 can be moved in varying proportions, in varying directions, or not moved at all. The combination of these movements results in a corresponding movement of the support plate 102. Using the three motors 108a-c, the support plate 102 can be moved to any height in the system’s Z axis or Theta X or Theta Y rotation. The exact movement of each leg 104 is determined by the controller in order to position the workpiece at the precise location required. The exact movement imparted by the motors 108a-c is determined by the controller and generated in combination with other movements in the XY plane, as described below.

[0052] Each first connector 116 is attached to and below the support plate 102, and each second connector 118 is connected between the first connector 116 and the joint 110. The system comprises the three support structures 200 located at equal distances around the edge of the support plate, i.e. , at an angle of 120° to each other. With reference to Figure 3a, each first connector 116 extends tangentially along the circumference of the circle with the center C, as previously described. Each first connector 116 comprises an elongated guide 300 through which an elongated supporting rod 302 runs as a sliding connection. The elongated guide comprises a connection 301 linking the first connector 116 to the second connector 118. At each end of the elongated rod 302, there are respective upwardly curved parts 304a and 304b that both extend to a supporting rod 306 that is attached to the base 308 of the support plate 102. Inside the guide 300 is a motor 108 which, when operated, moves the elongated rod 302 within and relative to the elongated guide 300. Any movement of the elongated rod 302 relative to the guide 300 results in a corresponding movement of the support plate 102 and therefore of the workpiece. Any movement will result in a movement in at least one degree of freedom of the system.

[0053] Similarly, Figure 3b relates to each second connector 118. Each second coupling 118 comprises an elongated guide 310 through which an elongated supporting rod 312 runs. The elongated guide is attached to the first coupler 116 by the connector 311. At each end of the elongated rod 312 are respective downwardly curved parts 314a and 314b that both extend to a supporting rod 316 that is attached to the joint 110. The guide 310 does not comprise a motor, but is free to move as a result of the movement of the three motors 108d-f in the first couplings 116 which, when in operation, move the elongated rod 302 within and relative to the elongated guide 300. As the second coupling is free to move, any movement imparted by other motors in the system will generate a corresponding movement of the support plate 102 relative to the second coupling 118 of each support assembly 200. Any movement carried out by the first coupling 116 or the second coupling 118 as a result of movements induced by other motors will result in a movement of the support plate 102 in at least one degree of freedom of the system. As shown in the figures, there are six motors, each of which is associated with a translational movement in at least one of the six degrees of freedom of the support plate and of the corresponding workpiece in use. With six motors 108a-f the full range of movements in the six degrees of freedom is possible.

[0054] In the illustrated arrangement, there is a motor for each degree of freedom, but it is also possible to have fewer motors and a translational motion mechanism to generate the individual movements of the legs 104 or of the coupling 116. In this case, a motor with multiple degrees of freedom or similar can be centrally positioned, for example between the legs, and, via a translation system, transmit the drive required to move each of the legs as required. It will be understood that the number, nature and location of the motors can be further adapted as long as movement is possible within the degrees of freedom required for the robot’s needs.

[0055] As shown in Figure 2, there are three support assemblies 200. Each support assembly is equidistantly placed around the circumference of the support plate and has the same angle relative to the center point. Figure 4 shows another arrangement of support assemblies 200 in which two are at right angles to each other and the other is located at a point equidistant from the other two around the circumference. This means that the angular separation is not equal. Two assemblies are at right angles to each other and the third is 135° from the other two. This arrangement has some additional advantages. By having two motors at right angles, the movement produced by the motors is smoother, particularly in the XY direction, where the fact that two motors 108e and 108f are at right angles simplifies the XY movement. As a result, there is less risk of stepped movements, and the movement of support plate 102 is smoother than in some other support assembly orientations. It should be noted that Figures 2 and 4 refer to two exemplary support assembly positions and that others could be used without departing from the invention.

[0056] Figure 5 shows a technical diagram of the system in Figure 1 . The motors, legs and support assemblies are not visible as they are enclosed for protection. Figure 5 is included to show another advantageous feature of the present invention. There is a spring 500 between each system support or robot support. The purpose of the array of springs 500, which can be of the coiled wire, magnetic or gas type, is to compensate for part of the load on the support plate and thus limit the load on the legs 104. This is useful because it means that the total load of the support plate 102, which can be several kilograms, is not supported by the legs 104 alone. As a result, there is less strain on the motors from the weight of the support plate 102 when the movement has been carried out for a set period of time. In another example, the spring 500 is extended or retracted by known amounts after the leg has moved to take the load after one leg has completed its movement. In both cases, the spring can be disengaged whenever necessary to allow the movement to continue. In another option, the Z-wise movement is completed and the spring is deployed within a certain tolerance, in anticipation of the subsequent movement in the XY plane.

[0057] It should be noted that the movement of the motors can take place in parallel or in sequence, as the case may be.

[0058] The system is capable of moving a workpiece to a predetermined position on the support plate with very little potential deviation from the desired location. Deviations generally do not exceed 3 mm or 0.5°. This is consistent with the requirements necessary to operate in the given environment and use case.

[0059] The system is shown with a fully supported support plate 102 that can be moved in six degrees of freedom with a stacked configuration of couplers at the top of the legs, all within the circumference of the support plate 102. As a result, the robot’s footprint is limited by the support plate 102. This means that the space required in the XY plane is no more than the size of the support plate. The height of the system or of the robot is limited to some extent by the height of the legs and, if the legs are fixed, their size is a known minimum. It should be noted that telescopic legs can reduce the overall height of the system and can also be used to facilitate movement in the Z axis. The motors 18a-c can act to extend or compress the leg if it is telescopic in nature.

[0060] The above invention describes a situation for use in manufacturing a wafer or a chip- powered device. It also applies to any other robot-controlled environment, subject to the necessary adaptations for different uses. For example, a support system capable of carrying an optical, mechanical or other device, in order to take measurements, run processes and so on.

[0061] The various examples described are intended to include variations and more or less other features that will become clear from the scope of the claims appended hereto. The above description comprises various use cases, which are given by way of example only, and many other uses can be foreseen. It should be noted that there are many variations of the features described above which are included in the scope of the appended claims.

[0062] List of reference numbers

[0063] 100 Support system

[0064] 102 Support plate

[0065] 104 (a), 104(b) and 104(c) Legs

[0066] 106 Support structure

[0067] 108, (108a-f) Motors

[0068] 110 Joint

[0069] 112 Spherical end

[0070] 114 Cup

[0071] 116 First coupling

[0072] 118 Second coupling

[0073] 200 Support assemblies

[0074] 300 Elongated guide

[0075] 301 Connection

[0076] 302 Elongated rod end

[0077] 304a and 304b Curved parts

[0078] 306 Supporting rod

[0079] 308 Base

[0080] 310 Elongated guide

[0081] 311 Connection

[0082] 312 Elongated rod end

[0083] 314a and 314b Curved parts

[0084] 316 Supporting rod

[0085] 318 Base

[0086] 500 Spring

Claims

CLAIMS1. A support system (100) for generating a movement of a support plate (102) configured, when in use, to convey a workpiece to be moved to a predetermined spatial position relative to a known default position, the system comprising: a plurality of support assemblies (200) each of which is configured to move freely along each of the three axes (XYZ) and to rotate freely around all the axes (XYZ) and which is connected to the support plate (102) to translate the movement to the support plate (102) in at least one degree of freedom among six degrees of freedom, based on the predetermined position; one or more motion units (108a-f) each associated with each of the plurality of support assemblies (200); a controller configured to drive one or more of the motion units (108a-f) so as to cause the support plate (102) to move to the predetermined position, the number of motion units (108a-f) configured to be driven being equal to the number of degrees of freedom required by the movement to move the support plate (102) to the predetermined position.

2. The support system (100) according to claim 1 , characterized in that it comprises three support assemblies (200) connected to the support plate (102).

3. The support system (100) according to claim 1 or claim 2, characterized in that each support assembly (200) comprises two motion units (108a-f) configured to drive movement along two different axes.

4. The support system (100) according to any of the preceding claims, characterized in that the support assemblies (200) each comprise two motion units (108a-f) connected to each other by a joint (110, 112, 114) with six degrees of freedom .

5. The support system (100) according to any of the preceding claims, characterized in that the support assemblies (200) each comprise a first motion unit (108a-c) imparting movement along a Z axis relative to the default position and a second motion unit (108d-f) imparting movement in a plane of the support plate (102) relative to the default position.

6. The support system (100) according to claim 5, characterized in that the first motion unit (108a-c) is located in one leg (104) of the support system; said leg (104) is configured to change the height of the system relative to the default position.

7. The support system (100) according to claim 5 or claim 6, characterized in that the second motion unit (108d-f) is located in a coupling in the plane of the support plate of the support system (102), and which is configured to change the position in the plane of the support plate of the system relative to the default position.

8. The support system (100) according to claim 7, characterized in that the coupling comprises two orthogonal parts, a first coupling (116) extending in one direction in the plane of the support plate (102) and a second coupling (118) extending in one direction in the plane of the support plate (102) and in which the first coupling (116) is connected to the second coupling (118) and the coupling is located below the support plate (102).

9. The support system (100) according to any of the preceding claims, characterized in that the system further comprises a circular support plate (102) attached to the plurality of support assemblies (200) on a circumference thereof.

10. The support system (100) according to claim 9, characterized in that the support assemblies in the plurality of support assemblies (200) are equidistantly located around the circumference.11 . The support system (100) according to claim 9, characterized in that the support assemblies in the plurality of support assemblies are located around the circumference of the support plate and a first and a second support assembly are separated by a 90° angle.

12. The support system (100) according to any of the preceding claims, characterized in that it further comprises at least one sensor for measuring the movement of the support plate (102).

13. The support system (100) according to claim 12, characterized in that at least one sensor comprises means for measuring at least one movement of at least one part of the support system and in that the support system comprises means for calculating a position of the support plate (102) based on the measured movement(s).

14. The support system (100) according to any of the preceding claims, characterized in that it further comprises a spring (500) configured to bear a weight of the support plate (102) before, during or after the movement of the support plate in a Z direction.

15. A method of moving a support plate in a support system (100) according to any of the preceding claims, the support plate (102) being configured, when in use, to convey a workpiece to be moved to a predetermined spatial position relative to a known default position, the method comprising the following steps: moving one or more support assemblies (200) each of which is configured to move freely in and rotate freely around all of the axes (XYZ) and which is connected to the support plate (102) to impart movement to the support plate (102) in at least one of six degrees of freedom, based on the predetermined position, by driving one or more motion units (108a-f) to cause the support plate (102) to move to the predetermined position; further comprising driving a number of motion units (108a-f) to move the support plate (102) to the predetermined position.

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