Manufacturing support device, manufacturing support method, and program

Abstract

A manufacturing support device according to the present invention comprises an acquisition unit, a specification unit, and an output unit. The acquisition unit acquires an upper limit power consumption that can be used by a manufacturing device that manufactures a product through a manufacturing process in a vacuum. The specification unit specifies an operation parameter corresponding to the upper limit power consumption acquired by the acquisition unit and with which it is possible to manufacture the product in a certain quality in the manufacturing process. The output unit outputs the operation parameter specified by the specification unit.

Description

Manufacturing support device, manufacturing support method, and program

[0001] This application claims priority to Japanese Patent Application No. 2024-012727, filed on January 31, 2024, the contents of which are incorporated herein by reference.

[0002] Products such as semiconductors, displays, and batteries are manufactured in factories through vacuum processes. Factories have traditionally sought to reduce the energy consumption of each manufacturing device. For example, a production control system has been disclosed that reduces power consumption while adhering to temperature limits within the factory and product delivery deadlines in a factory equipped with multiple machines and air conditioners (see, for example, Patent Document 1).

[0003] In recent years, various environmental initiatives have been implemented in the industrial sector. One example of such initiatives is Green Transformation (GX). Aiming for a decarbonized society, GX aims to shift from energy sources such as fossil fuels that generate greenhouse gases to clean energy sources such as solar power generation, and encourages organizations and companies to transform their business models and operational processes into ones that are socially and economically sustainable while also being environmentally conscious. In implementing such environmental initiatives, factories may be subject to restrictions on the amount of power consumed by fossil fuels (e.g., thermal power generation).

[0004] Japanese Patent No. 6059375

[0005] However, in conventional technologies, power consumption is reduced by operating components (e.g., air conditioners, vacuum pumps, heaters, etc.) that require power consumption even when products are not being produced. This can make it difficult to maintain product quality under power consumption constraints related to environmental initiatives, potentially preventing optimal production. For example, if product quality cannot be maintained at a desired level, power consumption constraints are addressed by completely shutting down operations in a portion of the factory or equipment. This limits factory operation options to whether or not to produce within the target range, making it impossible to ensure optimal production volume.

[0006] In addition to the quality of the product, there is also the risk that the effectiveness of reducing power consumption may be reduced. For example, in the composition of the power peak value, components that require power consumption only during production (e.g., sputtering power supplies) may have a higher proportion than components that require power consumption even when not in production. In this case, for components that require power consumption only during production, it is necessary to change the processing conditions, making it difficult to flexibly control the power supply.

[0007] In addition, in the conventional technology, the processing conditions are factors that determine the production volume of the production plan, and it is assumed that power consumption is controlled based on the production volume and the surrounding environment. In other words, there was no option to determine the processing conditions according to the power consumption constraints of the manufacturing equipment and accept the production volume resulting from those processing conditions.

[0008] The present invention was made in consideration of these circumstances, and its purpose is to provide technology that can maintain product quality and perform optimal production even under power consumption restrictions related to environmental initiatives.

[0009] In order to solve the above-mentioned problems, one aspect of the present invention is a manufacturing support device that includes an acquisition unit that acquires the maximum power consumption that can be used by a manufacturing device that manufactures a product through a manufacturing process in a vacuum, an identification unit that identifies operating parameters that correspond to the maximum power consumption acquired by the acquisition unit and that enable the product to be manufactured with a certain quality in the manufacturing process, and an output unit that outputs the operating parameters identified by the identification unit.

[0010] Another aspect of the present invention is a manufacturing support method in which a manufacturing support device executes processing including an acquisition step of acquiring the maximum power consumption that can be used by a manufacturing device that manufactures a product through a manufacturing process in a vacuum, an identification step of identifying operating parameters that correspond to the maximum power consumption acquired in the acquisition step and that can manufacture the product with a certain quality in the manufacturing process, and an output step of outputting the operating parameters identified in the identification step.

[0011] Another aspect of the present invention is a program that causes a computer of a manufacturing support device to function as an acquisition unit that acquires the maximum power consumption that can be used by a manufacturing device that manufactures a product through a manufacturing process in a vacuum, an identification unit that identifies operating parameters that correspond to the maximum power consumption acquired by the acquisition unit and that can manufacture the product with a certain quality in the manufacturing process, and an output unit that outputs the operating parameters identified by the identification unit.

[0012] According to the present invention, it is possible to suppress a decline in production efficiency while maintaining product quality under GX constraints.

[0013] 1 is a diagram showing an example of a manufacturing support system according to the present embodiment; FIG. 2 is a diagram showing a film forming apparatus which is an example of a manufacturing apparatus according to the present embodiment; FIG. 3 is a diagram showing an example of a film forming chamber according to the present embodiment; FIG. 4 is a block diagram showing an example of a hardware configuration of the manufacturing support apparatus; FIG. 5 is a diagram showing an example of a functional configuration of the manufacturing support apparatus; FIG. 6 is a diagram showing a production recipe database of the manufacturing apparatus stored in the manufacturing support apparatus; FIG. 7 is a flowchart showing an example of manufacturing support processing performed by the manufacturing support apparatus in a manufacturing process; FIG. 8 is a diagram showing a transition of power consumption (power value and usage time) indicated by operating parameters output by the manufacturing support apparatus; FIG. 9 is a diagram showing a transition of power consumption (power value and usage time) indicated by operating parameters output by the manufacturing support apparatus; FIG. 10 is a diagram showing a production recipe database at the time of start-up of the manufacturing apparatus stored in the manufacturing support apparatus; FIG. 11 is a flowchart showing an example of manufacturing support processing performed by the manufacturing support apparatus at the time of start-up of the manufacturing apparatus; FIG. 12 is a flowchart showing an example of manufacturing support processing performed in a manufacturing process by the manufacturing support apparatus according to Modification 2; FIG. 13 is a diagram showing a transition of power consumption (power value and usage time) indicated by operating parameters output by the manufacturing support apparatus according to Modification 2;

[0014] 1 is a diagram illustrating an example of a manufacturing support system according to this embodiment. The manufacturing support system 1 is installed in a manufacturing factory that manufactures, for example, semiconductors, displays, and battery products. As shown in FIG. 1, the manufacturing support system 1 includes a plurality of manufacturing apparatuses 100 and a manufacturing support apparatus 110. The plurality of manufacturing apparatuses 100 and the manufacturing support apparatus 110 are connected via a network such as a local area network (LAN) or a wide area network (WAN).

[0015] The multiple manufacturing apparatuses 100 manufacture products through a vacuum process. The multiple manufacturing apparatuses 100 may be different types of apparatus. The multiple manufacturing apparatuses 100 may include the same type of apparatus. The manufacturing support apparatus 110 is, for example, a computer such as a personal computer. The manufacturing support apparatus 110 may also be a portable computer such as a tablet device or a smartphone. The manufacturing support apparatus 110 may be located within a factory or outside the factory. Furthermore, the manufacturing support apparatus 110 may be provided within each manufacturing apparatus 100.

[0016] Next, an example of the manufacturing apparatus 100 will be described. In the following, a film forming apparatus will be described as an example of the manufacturing apparatus 100. Fig. 2A is a diagram showing a film forming apparatus which is an example of the manufacturing apparatus according to this embodiment. Fig. 2B is a diagram showing an example of a film forming chamber according to this embodiment.

[0017] As shown in FIG. 2A, the manufacturing apparatus 100 (film formation apparatus) includes a transfer chamber 111, a transfer / unloading chamber 112, a heating chamber 113, a transfer robot 114, a vacuum exhaust system 115, a first film formation chamber 120a, and a second film formation chamber 120b.

[0018] A transfer chamber 112, a heating chamber 113, a first film formation chamber 120a, and a second film formation chamber 120b are each connected to the transfer chamber 111. The transfer chamber 111, the transfer chamber 112, the heating chamber 113, the first film formation chamber 120a, and the second film formation chamber 120b are each connected to a vacuum exhaust system 115. The vacuum exhaust system 115 includes a vacuum exhaust system 115a for evacuating the internal space of each chamber.

[0019] The transfer chamber 111 includes a transfer robot 114 therein. The transfer robot 114 transfers a substrate 124 ( FIG. 2B ). Specifically, the transfer robot 114 transfers the substrate 124 between the loading / unloading chamber 112, the heating chamber 113, the first film formation chamber 120 a, and the second film formation chamber 120 b. The substrate 124 is transferred by the vacuum exhaust system 115 while the interiors of the transfer chamber 111, the loading / unloading chamber 112, the heating chamber 113, the first film formation chamber 120 a, and the second film formation chamber 120 b are kept under a vacuum atmosphere. Hereinafter, when the first film formation chamber 120 a and the second film formation chamber 120 b are not to be distinguished, they will be described as the film formation chambers 120.

[0020] One or more installation locations where cassettes (not shown) can be installed are provided within the load / unload chamber 112. The cassettes carry substrates 124. When the cassette carrying unprocessed substrates 124 is placed in the load / unload chamber 112, the transfer robot 114 removes the substrates 124 one by one from the cassette and carries them into the heating chamber 113.

[0021] The heating chamber 113 includes a heater 113a therein. The substrate 124 carried into the heating chamber 113 is heated by the heat generated by the heater 113a.

[0022] 2B , the first film formation chamber 120 and the second film formation chamber 120b each include a substrate holder 127 and a target 125 therein. The substrate 124 is carried into the film formation chamber 120 by the transfer robot 114. The substrate 124 carried into the film formation chamber 120 is placed on the substrate holder 127.

[0023] An electrostatic chucking device (not shown) is provided on the substrate holder 127. An electrostatic chuck power supply is arranged outside the film formation chamber 120. The electrostatic chucking device includes an electrode. A voltage is applied to the electrode from the electrostatic chuck power supply. When the voltage is applied, the substrate 124 on the substrate holder 127 is electrostatically attracted to the substrate holder 127.

[0024] The substrate holder 127 has a mounting surface on which the substrate 124 is placed. A groove (not shown) is provided in the mounting surface. When the substrate 124 is electrostatically attracted, a space surrounded by the inner wall of the groove and the substrate 124 is sealed. An ESC (electrostatic chuck) gas flows in the sealed space. This increases the thermal conductivity of the substrate 124.

[0025] The substrate holder 127 is provided with a heating / cooling source (not shown). When the heating / cooling source generates (or absorbs) heat, the substrate 124 is maintained at a predetermined temperature via the substrate holder 127.

[0026] A moving mechanism 160 is connected to the substrate holder 127. The moving mechanism 160 is capable of rotating the substrate holder 127 at a predetermined speed. The moving mechanism 160 is also capable of displacing the substrate holder 127 relative to the target 125 (in the vertical direction in the drawing).

[0027] An ambient gas source 141 is disposed outside the film formation chamber 120. An ambient gas (e.g., sputtering gas) is stored in the ambient gas source 141. The ambient gas source 141 is connected to the film formation chambers 120 (120a, 120b).

[0028] An atmospheric gas amount control device 145 is provided in the middle of the path connecting the film formation chamber 120 and the atmospheric gas source 141. The atmospheric gas amount control device 145 is connected to the control device 150. The atmospheric gas amount control device 145 controls the flow rate of the sputtering gas flowing into the atmospheric gas amount control device 145 based on a signal input from the control device 150.

[0029] An ambient gas power supply 151 is disposed outside the film formation chamber 120. The ambient gas power supply 151 is connected to the target 125. The ambient gas power supply 151 applies a voltage to the target 125. The target 125 has a sputtering surface to be sputtered. The sputtering surface faces the substrate 124 on the substrate holder 127.

[0030] The target 125 is made of, for example, a material containing a predetermined raw material (for example, titanium) as a main component. When the control device 150 supplies an atmospheric gas into the film formation chamber 120 during sputtering of the target 125, a Ti film, for example, is formed on the surface of the substrate 124 on the substrate holder 127.

[0031] The film formation chamber 120 is provided with an adhesion prevention plate 126 inside. The wall surface of the film formation chamber 120 and the surface of the adhesion prevention plate 126 form an inner wall surface. For example, when a Ti film is formed on the surface of the substrate 124 inside the film formation chamber 120, Ti adheres to the inner wall surface.

[0032] The substrate holder 127 is connected to a substrate-side power supply 155 arranged outside the film formation chamber 120. When a voltage is applied from the substrate-side power supply 155 to the substrate 124 during sputtering of the target 125, a film is formed on the surface of the substrate 124. Furthermore, when narrow grooves are formed on the surface of the substrate 124 by the application of this voltage, a thin film is also formed within the grooves.

[0033] When a laminated film is produced in the manufacturing apparatus 100 (film formation apparatus), a plurality of substrates 124 loaded into one cassette constitutes one lot. The manufacturing apparatus 100 removes one or more substrates 124 from a cassette installed in the loading / unloading chamber 112. After heating the substrates 124 in the heating chamber 113, the manufacturing apparatus 100 forms a first layer of film in one of the first film formation chamber 120a and the second film formation chamber 120b. The manufacturing apparatus 100 then forms a second layer of film on the first layer in the other film formation chamber 120. The manufacturing apparatus 100 then returns the substrates 124 to the cassette installed in the loading / unloading chamber 112, and forms a laminated film on all of the substrates 124 that make up the lot.

[0034] In the following, for the sake of simplicity, the manufacturing process will be described as a process in the first film formation chamber 120a. Specifically, the manufacturing process is a process from removing one substrate 124 from the transfer chamber 112, placing it on the substrate holder 127 in the first film formation chamber 120a, to completing sputtering. However, the manufacturing process may also be a process from removing the substrate 124 to completing the product.

[0035] (Hardware Configuration of Manufacturing Support Device 110) Fig. 3A is a block diagram showing an example of the hardware configuration of the manufacturing support device. In Fig. 3A, the manufacturing support device 110 includes a CPU 301, a memory 302, a communication I / F 303, a storage medium I / F 304, an input device 305, a display 306, and a speaker 307. The components 301 to 306 are connected to each other via a bus 320.

[0036] The CPU 301 is responsible for overall control of the manufacturing support device 110. The memory 302 includes, for example, a ROM, a RAM, and a flash ROM. For example, the flash ROM and ROM store various programs, such as the manufacturing support program according to this embodiment. The RAM is used as a work area for the CPU 301. The programs stored in the memory 302 are loaded into the CPU 301, causing the CPU 301 to execute the coded processes. The memory 302 also stores a production recipe database related to the operation of the manufacturing device 100, details of which will be described later.

[0037] The communication I / F 303 is connected to a network such as the Internet via a communication line, and is connected to other devices (e.g., the manufacturing device 100) via the network. The communication I / F 303 also serves as an interface between the network and the inside of the device itself, and controls input and output of data from other devices. The storage medium I / F 304, under the control of the CPU 301, controls reading and writing of data from and to a storage medium (not shown), such as a magnetic disk, an optical disk, or a USB (Universal Serial Bus) flash memory.

[0038] The input device 305 includes a touch panel, a keyboard, a mouse, various operation buttons, a microphone, a camera, a scanner, etc. The display 306 is, for example, a liquid crystal display. The display 306 may be a touch panel type. The speaker 307 outputs sound. In addition to the display 306 and the speaker 307, the manufacturing support device 110 may also include a printer as an output device.

[0039] Note that the manufacturing support processing according to this embodiment is not limited to being performed by the CPU 301 executing a program. For example, the manufacturing support processing can be performed using hardware (including circuitry) such as an LSI (Large Scale Integration), an ASIC (Application Specific Integrated Circuit), an FPGA (Field-Programmable Gate Array), or a GPU (Graphics Processing Unit), or the manufacturing support processing can be performed by a combination of software and hardware.

[0040] (About GX) In recent years, as part of efforts to promote environmental measures, GX (Green Transformation) has led to the requirement to restrict the use of electricity from fossil fuels (for example, thermal power generation). Systems for purchasing carbon emission quotas are also becoming more widespread. Factories that use manufacturing equipment 100 may be subject to GX-related constraints, such as peak power constraints. Under these constraints, there is a growing trend to adjust resources to maximize production efficiency while maintaining product quality.

[0041] In recent years, efforts have been made to reduce carbon dioxide emissions throughout factories and to measure carbon footprints (tracking the amount of greenhouse gases emitted at each stage of a product or service's life cycle, converting the total amount into carbon dioxide and displaying it). For this reason, factories and other facilities are increasingly using renewable energy sources such as solar and wind power. However, there are several issues with the use of renewable energy. For example, the amount of power generated by renewable energy varies depending on climate change. This can make it difficult for users to adapt renewable energy to production plans. While the use of storage batteries is also considered, they are economically burdensome and have issues with capacity and degradation.

[0042] In factories and other facilities, restrictions are sometimes placed on power consumption. For example, during rainy weather, the upper limit on the amount of renewable energy that can be used for the entire factory during the daytime may be restricted in a 24-hour period. In this way, it is possible to imagine that the supply of electricity will be linked to climate change.

[0043] Conventionally, production has been managed to maximize production volume, yield, and product quality, assuming unlimited power consumption. Specifically, the highest priority has been placed on stably mass-producing high-quality products (devices) in a short amount of time. For this reason, the necessary materials, power, and personnel have been supplied in unlimited quantities. In other words, production factories have required manufacturing equipment 100 that can mass-produce products of the highest quality.

[0044] The operation of the manufacturing apparatus 100 has been strictly controlled in every aspect so that the residual between the set production recipe (set values) and the actual measured values ​​is extremely small. For this reason, the manufacturing apparatus 100 has been operated in strict compliance with a single production recipe that can maintain the desired quality and productivity.

[0045] One method for reducing power consumption is to reduce the power consumption of devices such as air conditioners, vacuum pumps, and heaters during production stoppages between production runs of a product. This method can significantly reduce power consumption for devices that regularly consume power, especially if the amount of power consumed is reduced over a predetermined period, such as one hour or one day. However, this method makes it difficult to significantly reduce instantaneous power consumption. For example, it is difficult to efficiently reduce instantaneous power consumption over a period of one or ten minutes.

[0046] Therefore, in this embodiment, even if it means sacrificing production volume or yield, the manufacturing method is adjusted to be optimal so as to keep it within an acceptable range and also reduce the environmental impact. Specifically, in this embodiment, even under the constraints of power consumption related to environmental measures, product quality is maintained at a certain level or higher and optimal production is performed. The functional configuration of the manufacturing support device 110 according to this embodiment will be described below.

[0047] (Functional Configuration of Manufacturing Support Device 110) Fig. 3B is a diagram showing an example of the functional configuration of the manufacturing support device. In Fig. 3B, the manufacturing support device 110 includes an acquisition unit 351, a determination unit 352, an identification unit 353, an extraction unit 354, and an output unit 355. Each unit is realized by a CPU 301. That is, the CPU 301 executes a manufacturing support program stored in memory 302 to realize the function of each unit.

[0048] The acquisition unit 351 acquires the maximum power consumption (hereinafter referred to as "consumable power") that can be used by a factory having multiple manufacturing apparatuses 100. The consumable power may be determined, for example, according to the amount of carbon dioxide that can be emitted per unit period. The consumable power may be the upper limit of supply specified by an electric power company. The consumable power may be an upper limit specified in order to achieve carbon neutrality while taking into account the composition ratio of power generation methods, or to achieve a target carbon footprint value for the final product. The consumable power may also be power calculated taking into account the purchase price of electricity.

[0049] The consumable power can include electricity purchased from an electric power company (for example, thermal power generation) as well as electricity from renewable energy sources (solar power generation and wind power generation). For example, during the daytime on a clear day, the amount of electricity generated by solar power generation is large, so production can be carried out without any restrictions on power consumption. On the other hand, at night, the proportion of electricity generated by thermal power generation is high, so production can be carried out with certain restrictions on power consumption. Furthermore, when using electricity generated by private power generation outside the factory, such as a mega solar power plant, the consumable power includes power corresponding to self-consignment (power transmission allocated to each factory). The acquisition unit 351 acquires the consumable power from a higher-level device (another device that manages consumable power).

[0050] The acquisition unit 351 acquires the upper limit of power consumption (hereinafter referred to as "upper limit power") that can be used by each manufacturing apparatus 100 in the factory based on the consumable power. Specifically, the acquisition unit 351 outputs the acquired consumable power to the determination unit 352. The determination unit 352 determines (calculates) the upper limit power of each manufacturing apparatus 100 based on the consumable power acquired from the acquisition unit 351. The determination unit 352 may determine the upper limit power by dividing the consumable power proportionately among the number of manufacturing apparatuses 100. The determination unit 352 may determine the upper limit power according to a ratio set by the user. The determination unit 352 outputs the determined upper limit power to the acquisition unit 351. In this way, the acquisition unit 351 can acquire the upper limit power of one manufacturing apparatus 100 based on the consumable power.

[0051] The acquiring unit 351 is not limited to acquiring the upper limit power determined by the determining unit 352. The function performed by the determining unit 352 may be provided in a higher-level device, and the acquiring unit 351 may acquire the upper limit power of each manufacturing apparatus 100 from an external device (higher-level device).

[0052] The identifying unit 353 identifies the operation parameters for one manufacturing apparatus 100. The operation parameters are parameters corresponding to the upper limit power acquired by the acquiring unit 351. The operation parameters are parameters that enable a product to be manufactured with a certain quality in the manufacturing process. The operation parameters will be described below with reference to FIG. 4.

[0053] (Regarding the production recipe database of the manufacturing apparatus 100) FIG. 4 is a diagram showing a production recipe database of the manufacturing apparatus stored in the manufacturing support device. The production recipe database 400 shown in FIG. 4 shows an operation plan for the manufacturing process in the manufacturing apparatus 100. The production recipe database 400 is stored for each manufacturing apparatus. The production recipe database 400 stores production recipes 401 (401a, 401b, 401c, ...). Note that each of the multiple production recipes is a production recipe that has been confirmed to produce a certain level of quality in the products produced according to that production recipe. Therefore, although the power consumption and operating time differ depending on the production recipe, the quality of the produced products will be at least a certain level. The production recipe database 400 is stored in the memory 302, for example, but may also be stored in an external device.

[0054] The production recipe database 400 includes items for recipe name, manufacturing process power, and operation parameters. The manufacturing process power includes items for source power 1 and source power 2. The operation parameters include items for process time, substrate temperature, target-substrate distance, and substrate rotation speed. By inputting information for each item, a production recipe 401 (401a, 401b, 401c, ...) is stored as a record.

[0055] The production recipe database 400 may include quality performance (film thickness distribution, refractive index, mobility, etc.) in addition to the above items. The operation parameters may include the flow rate of the atmospheric gas and the type of the atmospheric gas instead of or in addition to the above items. Information in each item may be input by the user. The item to be input may be specified by the user. Apart from the above items, other items may be generated by the user.

[0056] The recipe name indicates the name of the production recipe 401. The process time indicates the time (seconds) required for the manufacturing process. The manufacturing process power indicates the sum of the source power 1 and the source power 2. The source power 1 indicates, for example, the power consumption (kW) of the ambient gas power supply 151 (FIG. 2) for generating plasma in the manufacturing process. The source power 2 indicates, for example, the power consumption (W) of the substrate-side power supply 155 (FIG. 2) in the manufacturing process. The substrate temperature indicates, for example, the temperature (°C) of the substrate 124 in the manufacturing process. The target-substrate distance indicates, for example, the distance (mm) between the target 125 and the substrate 124 (substrate holder 127) in the manufacturing process. The substrate rotation speed indicates, for example, the rotation speed (rpm) of the substrate 124 (substrate holder 127) in the manufacturing process.

[0057] For example, production recipes 401a, 401b, and 401c each have different manufacturing process power (items for power supply power 1 and power supply power 2), and therefore each item indicates different information. Specifically, production recipe 401a indicates that the recipe name is "no limit," power supply power 1 is "18 kW," power supply power 2 is "400 W," process time is "30 seconds," substrate temperature is "350°C," target-substrate distance is "300 mm," and substrate rotation speed is "60 rpm."

[0058] The production recipe 401b indicates information that requires a lower manufacturing process power and a longer process time than the production recipe 401a. Specifically, the production recipe 401b indicates a recipe name of "Limit A," a power supply power 1 of "17 kW," a power supply power 2 of "350 W," a process time of "40 seconds," a substrate temperature of "325°C," a target-substrate distance of "270 mm," and a substrate rotation speed of "60 rpm."

[0059] The production recipe 401c indicates information with an even lower manufacturing process power and a longer process time than the production recipe 401b. Specifically, the production recipe 401c indicates a recipe name of "Limit B," a power supply power 1 of "15 kW," a power supply power 2 of "300 W," a process time of "60 seconds," a substrate temperature of "300°C," a target-substrate distance of "270 mm," and a substrate rotation speed of "60 rpm."

[0060] The extraction unit 354 extracts a production recipe 401 corresponding to the upper limit power from the production recipe database 400. Specifically, the extraction unit 354 identifies, for example, the manufacturing process power (power supply power 1 and power supply power 2) that is within the upper limit power and that maximizes the sum of power supply power 1 and power supply power 2. Then, the extraction unit 354 extracts a production recipe 401 that includes the identified manufacturing process power.

[0061] The identifying unit 353 identifies the operating parameters included in the production recipe 401 extracted by the extracting unit 354. The output unit 355 outputs the operating parameters identified by the identifying unit 353.

[0062] The operating parameters may be output as a display output to the display 306. In this case, the manufacturing support device 110 may receive an input as to whether or not to change the operating parameters displayed on the display 306. When the manufacturing support device 110 receives an input indicating that the operating parameters should be changed, the manufacturing support device 110 may instruct the manufacturing device 100 to change the operating parameters. This causes the manufacturing device 100 to change the operating parameters. Furthermore, the output of the operating parameters is not limited to a display output to the display 306, but may also be an output to the manufacturing device 100. In this case, the manufacturing device 100 may automatically change the operating parameters.

[0063] The manufacturing support device 110 can control the timing of application of the operating parameters in the manufacturing device 100. Specifically, the manufacturing support device 110 may change (immediately apply) the operating parameters at the timing when the operating parameters are output. Furthermore, the operating behavior of the manufacturing support device 110 is not limited to the above-described example. The manufacturing support device 110 may apply the operating parameters from the start of production of the next product. The manufacturing support device 110 may apply the operating parameters from the start of production of the next lot.

[0064] 5 is a flowchart showing an example of a manufacturing support process performed by the manufacturing support device 110 in a manufacturing process. In FIG. 5, the manufacturing support device 110 determines whether it is time to change an operating parameter (step S501).

[0065] The timing of changing the operating parameters is the timing when the manufacturing process for one product is completed. The timing of the change may be manual, when an input indicating the change is received from an operator, or may be timing according to a schedule (automatic timing). The timing according to a schedule is a timing that is set in advance, such as timing after a predetermined time has elapsed, timing at a predetermined time, or timing when a predetermined number of manufacturing processes are completed.

[0066] The manufacturing support device 110 waits until it is time to change the operating parameters (step S501: NO). When it is time to change the operating parameters (step S501: YES), the manufacturing support device 110 obtains the available power that can be used in the factory (step S502).

[0067] Then, the manufacturing support device 110 acquires the upper limit power allocated to the manufacturing device 100 (step S503). When the upper limit power is acquired from an external device, the manufacturing support device 110 may request the external device to transmit the upper limit power instead of the process of step S502.

[0068] Then, the manufacturing support device 110 refers to the production recipe database 400 (FIG. 4) and identifies the manufacturing process power (power supply power 1 and power supply power 2) corresponding to the upper limit power acquired in step S503 (step S504). Specifically, the manufacturing support device 110 identifies the maximum power among the manufacturing process powers equal to or less than the upper limit power.

[0069] Then, the manufacturing support device 110 extracts the production recipe 401 including the identified manufacturing process power (power supply power 1 and power supply power 2) from the production recipe database 400 (step S505). Next, the manufacturing support device 110 outputs the operating parameters included in the extracted production recipe 401 (step S506), and ends the series of processes.

[0070] In addition to the above-described processing, the manufacturing support device 110 may, for example, be configured to arbitrarily accept a designation of a manufacturing period. In this case, the manufacturing support device 110 may acquire time-series data of the upper limit power for the manufacturing period. Furthermore, in this case, the manufacturing support device 110 may identify a period within the manufacturing period with an optimal upper limit power, and extract from the production recipe database 400 a production recipe 401 that corresponds to the upper limit power for the identified period.

[0071] Furthermore, the manufacturing apparatus 100 may be configured to accept upper and lower limits for operation parameters (e.g., process time, substrate temperature, etc.). For example, by accepting upper and lower limits for the process time, the process time can be set according to the user's wishes. However, even in this case, the parameters are set so that the product can be manufactured with a certain quality in the manufacturing process.

[0072] 6A and 6B are diagrams showing the transition of power consumption (power value and usage time) indicated by the operating parameters output by the manufacturing support device. In Fig. 6A and Fig. 6B, the transition of power consumption 600 (600a, 600b) indicates the manufacturing process power 601 (601a, 601b), the heater power 602, and the pump power 603.

[0073] The heater power 602 indicates the power for heating the heater 113a provided in the heating chamber 113. The pump power 603 indicates the power for operating the vacuum exhaust system 115a. The heater power 602 and the pump power 603 indicate constant power that is always used while the manufacturing apparatus 100 is in operation. In other words, the heater power 602 and the pump power 603 indicate constant power that is used regardless of the production recipe 401.

[0074] 6A and 6B, manufacturing process power 601a indicates, for example, the manufacturing process power (the sum of power supply power 1 and power supply power 2) in production recipe 401a (no limit). Manufacturing process power 601b indicates, for example, the manufacturing process power (the sum of power supply power 1 and power supply power 2) in production recipe 401b (limit A). Compared to manufacturing process power 601a, manufacturing process power 601b has a lower peak power value and a longer duration of power usage.

[0075] In this way, the manufacturing support device 110 can operate the manufacturing device 100 according to operating parameters that correspond to the upper limit power. As a result, when the upper limit power is low, the power value at the peak power level is lowered and the duration of power usage is extended, thereby making it possible to maintain consistent product quality.

[0076] (Regarding Start-Up of Manufacturing Apparatus 100) Next, the start-up of manufacturing apparatus 100 will be described. When starting up for steady operation after performing non-steady operation such as maintenance, the power consumption of manufacturing apparatus 100 is large. For this reason, manufacturing support apparatus 110 changes the operating parameters of heater 113a, vacuum exhaust system 115a, etc. according to the upper limit power. Specifically, identification unit 353 identifies the operating parameters at the start-up of manufacturing apparatus 100 that correspond to the upper limit power. Below, the operating parameters at the start-up of manufacturing apparatus 100 will be described using FIG. 7.

[0077] (Regarding the startup method database of the manufacturing apparatus 100) FIG. 7 is a diagram showing a startup method database of the manufacturing apparatus stored in the manufacturing support device. The startup method database 700 shown in FIG. 7 indicates the operation method at the time of start-up of the manufacturing apparatus 100. The startup method database 700 is set for each manufacturing apparatus. The startup method database 700 stores startup methods 701 (701a, 701b, 701c, ...). The startup method 701 is information that associates operating parameters with power consumption. The startup method database 700 is stored in, for example, the memory 302, but may also be stored in an external device. The control targets of the startup method 701 are, for example, the heater 113a and the vacuum exhaust system 115a.

[0078] The start-up method database 700 includes fields for limit name, start-up power, and operating parameter (start-up time). By inputting information for each field, a start-up method 701 (701a to 701f) is stored as a record.

[0079] In FIG. 7 , the restriction name indicates the name of the startup method 701. The startup power indicates the power consumption (kW) required to start up the manufacturing equipment 100. The power required during startup includes, for example, the heater power supply, the pump power, and the computer power. The startup time indicates the time (seconds) required to start up the manufacturing equipment 100. Note that the operating parameters may include the "control mode" of devices such as the pump and heater in addition to the startup time. In other words, the startup method 701 may include the above-mentioned "control mode."

[0080] For example, startup methods 701a, 701b, and 701c have different start-up power requirements, and therefore each item indicates different information. Specifically, startup method 701a indicates that the limit name is "no limit," the start-up power is "L0," and the start-up time is "T0."

[0081] The startup method 701b indicates information indicating a lower startup power consumption than the startup method 701a. Specifically, the startup method 701b indicates that the limit name is "limit a", the startup power consumption is "L1" (<L0), and the startup time is "T1" (>T0).

[0082] The startup method 701c indicates information that requires even lower startup power consumption than the startup method 701b. Specifically, the startup method 701c indicates that the limit name is "limit b," the startup power consumption is "L2" (<L1), and the startup time is "T2" (>T1).

[0083] (Manufacturing support processing performed by the manufacturing support device 110 when starting up the manufacturing apparatus 100) Figure 8 is a flowchart showing an example of manufacturing support processing performed by the manufacturing support device when starting up the manufacturing apparatus. In Figure 8, the manufacturing support device 110 determines whether it is time to start up the manufacturing apparatus 100 (step S801). The start-up timing of the manufacturing apparatus 100 may be manual, for example, when an input operation related to start-up (power ON) is received from an operator. The start-up timing of the manufacturing apparatus 100 may also be automatic, when the manufacturing apparatus 100 automatically restarts periodically (or according to a schedule).

[0084] The manufacturing support device 110 waits until it is time to start up the manufacturing device 100 (step S801: NO). When it is time to start up the manufacturing device 100 (step S801: YES), the manufacturing support device 110 obtains the available power that can be used in the factory (step S802).

[0085] Then, the manufacturing support device 110 acquires the upper limit power allocated to the manufacturing device 100 (step S803). When the upper limit power is acquired from an external device, the manufacturing support device 110 may request the external device to transmit the upper limit power instead of the process of step S802.

[0086] Then, the manufacturing support device 110 refers to the startup method database 700 (FIG. 7) and identifies the startup power corresponding to the upper limit power acquired in step S803 (step S804). Specifically, the manufacturing support device 110 identifies, for example, the maximum startup power within the upper limit power.

[0087] Then, the manufacturing support device 110 extracts a startup method 701 including the identified startup power from the startup method database 700 (step S805). Next, the manufacturing support device 110 outputs the operating parameters included in the extracted startup method 701 (step S806), and ends the series of processes.

[0088] As described above, the manufacturing support device 110 according to this embodiment outputs operating parameters that correspond to the upper limit power available to the manufacturing device 100 and enable the manufacturing process to produce products with a consistent quality. This allows the power consumption to be changed for each manufacturing process, as shown in the manufacturing process power 601b, for example. Therefore, the instantaneous power consumption in the manufacturing process can be significantly changed (reduced). Therefore, the manufacturing support device 110 according to this embodiment can maintain product quality and perform optimal production, even under power consumption constraints imposed by environmental initiatives.

[0089] Furthermore, under the constraints of constantly changing power consumption (time fluctuations), the manufacturing process can be performed with optimal operating parameters (operating parameters of the manufacturing process) in real time. In this manner, in this embodiment, by changing the operating parameters for each product, it is possible to limit the maximum value of the power (high power) used for plasma generation, which is intermittently repeated for each product. While the production volume per unit period may decrease in some cases, this can be tolerated and products of a consistent quality can be manufactured.

[0090] Furthermore, the manufacturing support device 110 according to this embodiment extracts a production recipe 401 or a startup method 701 (operation method) corresponding to the upper limit power from the production recipe database 400 ( FIG. 4 ) or the startup method database 700 ( FIG. 7 ), and identifies the operation parameters included in the extracted production recipe 401 or startup method 701. This makes it possible to output the optimum operation parameters from among the preset production recipes 401 or startup methods 701.

[0091] Furthermore, the manufacturing support device 110 according to this embodiment identifies and outputs operating parameters corresponding to the upper limit power when starting up the manufacturing device 100. This allows the power consumption to be changed each time the manufacturing device 100 is started up. Therefore, the instantaneous power consumption associated with the start-up of the manufacturing device 100 can be significantly reduced.

[0092] Furthermore, the manufacturing support device 110 according to this embodiment acquires the available power of a factory having multiple manufacturing devices 100, and acquires the upper limit power of each manufacturing device based on the available power. This allows the upper limit power to be acquired according to the ever-changing available power, and can output optimal operating parameters according to the upper limit power when starting up the manufacturing process or the manufacturing device 100.

[0093] (Modifications) Next, modifications of the embodiment will be described. In the modifications below, the same reference numerals will be used to designate the same parts as those described in the embodiment, and the description will be omitted as appropriate.

[0094] (Modification 1) In the above-described embodiment, an example has been described in which the production recipe 401 is output using the production recipe database 400 ( FIG. 4 ). In a modification, an example will be described in which the production recipe 401 is predicted using machine learning.

[0095] For example, when Bayesian optimization is used as an example of machine learning, the manufacturing support device 110 learns in advance the relationship between multiple operating parameters that satisfy the upper limit power and the results of multiple samplings, and predicts the quality performance that is the result of operating the manufacturing device 100 using those operating parameters. The manufacturing support device 110 calculates an acquisition function for the corresponding operating parameters from the predicted quality performance. By repeating this calculation, the manufacturing support device 110 can output the operating parameters that maximize quality.

[0096] Alternatively, the manufacturing support device 110 may predict the production recipe 401 by, for example, combining a trained neural network that predicts quality performance with a mathematical optimization algorithm, instead of Bayesian optimization. First, the neural network is trained to predict quality performance from the operating parameters using a training dataset consisting of a combination of input samples of operating parameters and output samples of quality performance. The manufacturing support device 110 receives an input of an upper limit of power consumption, generates candidates for operating parameters that satisfy the upper limit, and inputs each candidate into the neural network to obtain a predicted result of quality performance. The manufacturing support device 110 determines the operating parameters that maximize quality by performing a mathematical optimization calculation based on the generated candidates and the obtained prediction result.

[0097] Furthermore, for example, when reinforcement learning is used as an example of machine learning, the manufacturing support device 110 can output operation parameters using a reinforcement learning model that calculates operation parameters when the upper limit power is given as an environment, with the product quality obtained by simulating the operation of the manufacturing device as a reward. The reward and the environment may have other configurations.

[0098] As described above, the manufacturing support device 110 according to the first modification uses machine learning to identify operating parameters. This allows the power consumption to be changed for each manufacturing process, as shown in the manufacturing process power 601b, for example. This allows for a significant reduction in instantaneous power consumption in the manufacturing process. Therefore, the manufacturing support device 110 according to the first modification can maintain product quality and perform optimal production, even under power consumption constraints imposed by environmental initiatives.

[0099] (Variation 2) Next, Variation 2 will be described. In the above-described embodiment, the control of power in the manufacturing process of one manufacturing apparatus 100 has been described. In Variation 2, the control of power between multiple manufacturing apparatuses 100 will be described. Specifically, in Variation 2, the manufacturing support apparatus 110 controls the multiple manufacturing apparatuses 100 so that power peaks in the manufacturing process do not overlap. Below, a supplementary description will be given of the functional configuration of the manufacturing support apparatus 110 according to Variation 2.

[0100] In the second modification, the determination unit 352 ( FIG. 3B ) determines the timing of the manufacturing processes so as to differentiate the peak power consumption of at least some of the manufacturing apparatuses 100. For example, the determination unit 352 determines the timing of each manufacturing process so that the power peaks of the manufacturing apparatuses 100 do not overlap with each other.

[0101] For example, the operation of the manufacturing apparatuses 100 may include phases in which power is consumed and phases in which power is not consumed, or multiple phases with different power consumption amounts. In such cases, the operation timing for a combination of several manufacturing apparatuses 100 can be determined so that the phases are offset from each other. This allows the upper limit power per apparatus to be increased compared to when all of the manufacturing apparatuses 100 are operated simultaneously.

[0102] The acquiring unit 351 acquires (calculates) the upper limit power of each manufacturing apparatus 100 based on each timing determined by the determining unit 352. Specifically, the acquiring unit 351 acquires (calculates) the upper limit power of each manufacturing apparatus 100 at each timing. For example, the acquiring unit 351 acquires time-series data of the upper limit power for each manufacturing apparatus 100. The time-series data of the upper limit power is, for example, information (for example, information on an operation plan) indicating the relationship between the upper limit power and elapsed time (for example, time).

[0103] The identifying unit 353 identifies operating parameters based on the upper limit power of the manufacturing apparatus 100 when the manufacturing process is performed, from the time-series data. Specifically, the extracting unit 354 extracts a production recipe 401 corresponding to the upper limit power of the manufacturing apparatus 100 when the manufacturing process is performed, from the production recipe database 400 of each manufacturing apparatus 100. The identifying unit 353 identifies operating parameters included in the production recipe 401 extracted by the extracting unit 354. In this way, the identifying unit 353 identifies the operating parameters.

[0104] Furthermore, the output unit 355 outputs, for each manufacturing process, the operating parameters identified by the identification unit 353 and the timing determined by the determination unit 352. The output of the operating parameters and timing is, for example, a display output to the display 306.

[0105] (Manufacturing support processing performed in a manufacturing process by the manufacturing support device 110 according to Modification 2) Fig. 9 is a flowchart showing an example of manufacturing support processing performed in a manufacturing process by the manufacturing support device according to Modification 2. In Fig. 9, the manufacturing support device 110 determines whether or not it is time to change an operating parameter (step S1101).

[0106] The manufacturing support device 110 waits until it is time to change the operating parameters (step S1101: NO). When it is time to change the operating parameters (step S1101: YES), the manufacturing support device 110 obtains the available power that can be used in the factory (step S1102).

[0107] The manufacturing support device 110 then determines the timing of each manufacturing process so that the peak power consumption of each manufacturing device 100 differs (step S1103). Next, the manufacturing support device 110 acquires the upper limit power of each manufacturing device at the determined timing (step S1104). The manufacturing support device 110 then acquires time-series data of the upper limit power for each manufacturing device 100 (step S1105).

[0108] Next, the manufacturing support device 110 extracts a production recipe 401 corresponding to the upper limit power consumption when each manufacturing apparatus 100 performs a manufacturing process from the production recipe database 400 of each manufacturing apparatus 100 (step S1106).The manufacturing support device 110 then outputs the operating parameters included in the extracted production recipe 401 and the timing determined in step S1103 (step S1017), and ends the series of processes.

[0109] 10A and 10B are diagrams showing the transition of power consumption (power value and usage time) indicated by the operating parameters output by the manufacturing support device according to Modification 2. In Fig. 10A and 10B, the transition of power consumption 1200 includes manufacturing process power 1201 (1201a, 1201b, 1201c).

[0110] 10A , manufacturing process power 1201a and 1201b indicate, for example, the manufacturing process power (the sum of power supply power 1 and power supply power 2) in production recipe 401a (no restrictions). Manufacturing process power 1201a indicates the power value of one manufacturing apparatus 100. Manufacturing process power 1201b indicates the power value of another manufacturing apparatus 100 different from the one manufacturing apparatus 100. The peak of manufacturing process power 1201b is shifted from that of manufacturing process power 1201a.

[0111] In FIG. 10B , manufacturing process power 1201c indicates, for example, the manufacturing process power (the sum of power supply power 1 and power supply power 2) in production recipe 401b (limit A). The peak of manufacturing process power 1201c is shifted from that of manufacturing process power 1201a. Furthermore, the power value of the power peak of manufacturing process power 1201c is lower than that of manufacturing process power 1201a, and the duration of power usage is longer.

[0112] In this way, the manufacturing support device 110 can prevent overlapping of power peaks in the manufacturing process of each manufacturing device 100. For example, if there are two manufacturing devices 100 (low-power devices) that consume little power and one manufacturing device 100 (high-power device) that consumes much power, the two low-power devices are run simultaneously, and the high-power device is run later. This prevents overlapping of power peaks between the two low-power devices and the high-power device. Furthermore, if the upper limit power is small, the power value of the power peaks can be lowered and the power usage time extended, thereby maintaining consistent product quality.

[0113] The manufacturing support device 110 according to the second modification determines the timing of manufacturing processes so as to vary the peak power consumption of at least some of the manufacturing devices 100, and obtains the upper limit power of each manufacturing device 100 at the determined timing. This allows optimal operating parameters to be identified based on the upper limit power at each timing. This allows for a significant reduction in the instantaneous power consumption of each manufacturing process.

[0114] Furthermore, the manufacturing support device 110 according to the second modification specifies operating parameters based on the upper limit power during the manufacturing process among the time-series data of the upper limit power, thereby enabling each manufacturing device 100 to be operated with optimal operating parameters within the range of the upper limit power according to the time-series data.

[0115] The control shown in Modification 2 can also be performed when starting up multiple manufacturing apparatuses 100. Specifically, the manufacturing support apparatus 110 determines the start-up timing so as to differentiate the peak power consumption of at least some of the multiple manufacturing apparatuses 100. For example, the determination unit 352 determines the start-up timing of each manufacturing apparatus 100 so that the power peaks of the manufacturing apparatuses 100 do not overlap.

[0116] The acquisition unit 351 acquires the upper limit power of each manufacturing apparatus 100 based on each timing determined by the determination unit 352. Then, the identification unit 353 identifies the operating parameters based on the upper limit power acquired by the acquisition unit 351. This makes it possible to prevent power peaks from overlapping among multiple manufacturing apparatuses 100 during start-up.

[0117] As explained in Modification 2, various optimization algorithms can be used to prevent the power peaks of the multiple manufacturing apparatuses 100 from overlapping.

[0118] In addition, in Modification 2, the control of power between multiple manufacturing apparatuses 100 has been described. This is not limited to the above-described modification, and it is also possible to similarly control power between multiple devices (e.g., the first film formation chamber 120a and the second film formation chamber 120b) included in one manufacturing apparatus 100. Specifically, the manufacturing support apparatus 110 can control the multiple devices (the first film formation chamber 120a and the second film formation chamber 120b) so that power peaks in the manufacturing process do not overlap.

[0119] The programs for implementing the manufacturing support system 1 and manufacturing support device 110 described above may be recorded on a computer-readable recording medium and loaded into a computer system for execution. The term "computer system" as used herein includes hardware such as an OS and peripheral devices. The term "computer-readable recording medium" also refers to portable media such as flexible disks, optical magnetic disks, ROMs, and CD-ROMs, as well as storage devices such as hard disks built into a computer system. The term "computer-readable recording medium" also includes devices that retain a program for a certain period of time, such as volatile memory (RAM) within a computer system that serves as a server or client when a program is transmitted via a network such as the Internet or a communication line such as a telephone line. The program may also be transmitted from a computer system storing the program in a storage device to another computer system via a transmission medium or by transmission waves within the transmission medium. The term "transmission medium" used to transmit the program refers to a medium capable of transmitting information, such as a network (communication network) such as the Internet or a communication line (communication line) such as a telephone line. The program may also be used to implement part of the aforementioned functions. Furthermore, the above-mentioned functions may be realized in combination with a program already recorded in the computer system, that is, a so-called differential file (differential program).

[0120] 1... manufacturing support system, 100... manufacturing apparatus, 110... manufacturing support apparatus, 113a... heater, 115a... vacuum exhaust system, 151... atmosphere gas power supply, 155... substrate side power supply, 301... CPU, 302... memory, 306... display, 351... acquisition unit, 352... determination unit, 353... identification unit, 354... extraction unit, 355... output unit, 400... production recipe database, 401... production recipe, 600... power usage transition, 601... manufacturing process power, 700... startup method database, 701... startup method, 1200... power usage transition, 1201... manufacturing process power

Claims

1. A manufacturing support device comprising: an acquisition unit that acquires the upper limit of power consumption that can be used by manufacturing equipment that manufactures products through a manufacturing process in a vacuum; an identification unit that identifies operating parameters that correspond to the upper limit of power consumption acquired by the acquisition unit and that can manufacture the product with a certain quality in the manufacturing process; and an output unit that outputs the operating parameters identified by the identification unit.

2. The manufacturing support device of claim 1, further comprising: an extraction unit that extracts an operating method corresponding to the upper limit of power consumption from a memory unit that stores operating methods that correspond to the operating parameters and power consumption; and an identification unit that identifies the operating parameters included in the operating method extracted by the extraction unit.

3. The manufacturing support device of claim 1, wherein the identification unit predicts quality performance from the operating parameters by learning based on sample data related to past manufacturing processes, and, based on the results of the prediction, identifies the operating parameters that satisfy the certain quality at or below the upper limit of power consumption.

4. A manufacturing support device according to any one of claims 1 to 3, wherein the specifying unit specifies the operating parameters at the time of start-up of the manufacturing device according to the upper limit of power consumption.

5. A manufacturing support device as described in any one of claims 1 to 3, wherein the acquisition unit acquires the maximum power consumption that can be used by a factory having multiple manufacturing devices, and acquires the upper limit of power consumption that can be used by each manufacturing device in the factory based on the maximum power consumption.

6. A manufacturing support device as described in claim 5, further comprising a determination unit that determines the timing of the manufacturing process so as to vary the peak power consumption of at least some of the manufacturing devices, and the acquisition unit acquires the upper limit of power consumption that can be used by each manufacturing device in the factory based on the timing determined by the determination unit.

7. The manufacturing support device according to claim 6, wherein the output unit outputs the timing determined by the determination unit.

8. A manufacturing support device as described in any one of claims 1 to 3, wherein the acquisition unit acquires time series data of the upper limit of power consumption, and the identification unit identifies the operating parameter based on the upper limit of power consumption from the time series data when carrying out the manufacturing process.

9. A manufacturing support method in which a manufacturing support device executes processing including: an acquisition step of acquiring the upper limit of power consumption usable by a manufacturing device that manufactures a product through a manufacturing process in a vacuum; an identification step of identifying operating parameters that correspond to the upper limit of power consumption acquired in the acquisition step and that enable the product to be manufactured with a certain quality in the manufacturing process; and an output step of outputting the operating parameters identified in the identification step.

10. A program that causes a computer of a manufacturing support device to function as: an acquisition unit that acquires the maximum power consumption that can be used by a manufacturing device that manufactures a product through a manufacturing process in a vacuum; an identification unit that identifies operating parameters that correspond to the maximum power consumption acquired by the acquisition unit and that can manufacture the product with a certain quality in the manufacturing process; and an output unit that outputs the operating parameters identified by the identification unit.

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