Temperature adjustment device

Abstract

[Problem] To make the temperature distribution of a workpiece uniform with greater speed and energy efficiency. [Solution] A temperature adjustment device 1 according to the present invention comprises: a placement part 11 on which a workpiece W is placed; a first pipe part 12 provided inside the placement part 11 and having formed therein a first flow passage 125 that a working fluid F can enter; a vibration generation part 14 that vibrates the working fluid F in a predetermined direction along the first flow passage 125; and a second pipe part 13 having formed therein a second flow passage 131 that connects the vibration generation part 14 and the first flow passage 125. The linear heat capacity of the second pipe part 13 is smaller than the linear heat capacity of the first pipe part 12, where linear heat capacity is defined as the heat capacity per unit length in a direction along a flow passage.

Description

temperature control device

[0001] The present invention relates to a temperature control device.

[0002] There are various industrial processes in which the temperature distribution of a workpiece is important. Examples of such industrial processes include vapor deposition processes, electronic device manufacturing, product manufacturing using synthetic resins, composite materials, etc., three-dimensional object manufacturing using 3D printers, material testing, and solar panel manufacturing. In such industrial processes, if the temperature distribution of the workpiece is not uniform, various problems can arise. Examples of such problems include damage to the workpiece due to thermal stress, deformation of the workpiece such as warping, changes in the physical properties of the workpiece, large measurement errors, changes in product properties, and the occurrence of non-uniform vapor deposition films. Due to these circumstances, there is a need for a means to control the temperature distribution of the workpiece.

[0003] Regarding a means for controlling the temperature distribution of a workpiece, Patent Document 1 discloses an electrostatic chuck including a ceramic dielectric substrate having a first main surface on which the workpiece is placed, an electrode layer provided on the ceramic dielectric substrate, a base plate supporting the ceramic dielectric substrate, and a heater plate provided between the base plate and the first main surface, the heater plate having a first heater element that generates heat when a current flows through it and a second heater element that generates heat when a current flows through it, the first heater element bending more than the second heater element bending when viewed along a direction perpendicular to the first main surface, and the first heater element having a portion located in a gap between the second heater elements. The technology described in Patent Document 1 can improve the uniformity of the temperature distribution within the surface of the workpiece by suppressing temperature unevenness using the first heater element.

[0004] JP 2018-170508 A

[0005] Meanwhile, the Sustainable Development Goals (SDGs) and other targets have called for improved energy conservation in the industrial world. The technology described in Patent Document 1 suppresses temperature unevenness by using a first heater element that generates heat when an electric current flows through it. Therefore, this technology consumes electrical energy in the first heater element. Therefore, Patent Document 1 leaves room for further improvement in terms of increasing energy conservation when achieving a uniform temperature distribution in the workpiece.

[0006] An object of the present invention is to make the temperature distribution of the workpiece uniform more quickly and with greater energy savings.

[0007] As a result of intensive research into solving the above-mentioned problems, the inventors discovered that the above-mentioned object can be achieved by providing a first pipe section inside the mounting section that generates the dream pipe effect of the thermoacoustic phenomenon, and by suppressing the dream pipe effect in a second pipe section that connects the first pipe section to a vibration generating means related to the dream pipe effect, and thus completed the present invention. Specifically, the present invention provides the following.

[0008] The invention relating to a first feature provides a temperature control device comprising: a mounting section on which a workpiece is placed; a first pipe section provided inside the mounting section and having a first flow path formed therein through which a working fluid is introduced; a vibration generating section that vibrates the working fluid in a direction along the first flow path; and a second pipe section having a second flow path formed therein that connects the vibration generating section to the first flow path, wherein, in terms of length heat capacity, which is the heat capacity per unit length in the direction along the flow path, the length heat capacity of the second pipe section is smaller than the length heat capacity of the first pipe section.

[0009] It is known that vibrating the working fluid in the flow passage formed inside the tube produces the dream pipe effect, which increases the effective thermal conductivity of the working fluid along the direction of the oscillating flow. The dream pipe effect transports heat from high-temperature areas to low-temperature areas along the direction of the oscillating flow.

[0010] According to the first aspect of the present invention, the workpiece exchanges heat with the first pipe section via the mounting section. The working fluid in the first flow path formed inside the first pipe section is vibrated by the vibration generating section. As a result, the working fluid inside the first pipe section provided inside the mounting section transports heat in a direction along the orientation of the first pipe section from high-temperature areas to low-temperature areas due to the dream pipe effect. As a result, the first aspect of the present invention quickly uniforms the temperature distribution of the workpiece in a direction along the orientation of the first pipe section.

[0011] The working fluid in the second flow path connecting the vibration generating unit and the first flow path is continuous with the working fluid in the first flow path. Therefore, when the working fluid in the first flow path vibrates to produce the dream pipe effect, the working fluid in the second flow path also vibrates to produce the dream pipe effect. This raises the concern that heat may be transferred from the workpiece to the vibration generating unit via the working fluid in the first and second flow paths. Such heat transfer leads to a loss of some of the heat that moves from the high-temperature portion of the workpiece to the low-temperature portion, thereby homogenizing the temperature distribution. Therefore, such heat transfer may hinder the rapid homogenization of the temperature distribution of the workpiece. Furthermore, such heat transfer may result in an unintended temperature drop of the workpiece. In addition, such heat transfer may cause the vibration generating unit to become too hot, leading to various problems caused by high temperatures, such as malfunctions. The above issues arise when the workpiece is hotter than the vibration generating unit. Even when the workpiece is at a lower temperature than the vibration generating unit, the same problem can occur due to the flow of heat from the vibration generating unit to the workpiece.

[0012] It is known that the greater the length heat capacity of the tube containing the working fluid, the greater the dream pipe effect. In the first aspect of the invention, the length heat capacity of the second tube section is smaller than the length heat capacity of the first tube section. As a result, the dream pipe effect of the second tube section is smaller than the dream pipe effect of the first tube section. Therefore, in the first aspect of the invention, when heat transfer from high-temperature portions to low-temperature portions of the workpiece via the working fluid inside the first tube section is promoted, the first aspect of the invention reduces heat transfer between the workpiece and the vibration generating unit via the working fluid inside the second flow path. Therefore, the first aspect of the invention can more quickly uniform the temperature distribution of the workpiece and prevent various problems caused by temperature changes in the vibration generating unit.

[0013] As described above, the dream pipe effect increases the effective thermal conductivity of a working fluid along the direction of the oscillatory flow. Therefore, the amount of heat transported in a working fluid experiencing the dream pipe effect increases as the temperature gradient increases. The "temperature gradient" here refers to the temperature difference between the high-temperature portion (the source of heat transport) and the low-temperature portion (the destination of heat transport) divided by the distance between these portions. Therefore, when the temperature gradient is large, a working fluid experiencing the dream pipe effect transports more heat energy than the work energy used to generate the oscillations. The heat energy transported to the low-temperature portion in this way achieves a uniform temperature distribution in the workpiece with less work energy than the input energy required to heat the low-temperature portion with a heater. Therefore, the invention according to the first aspect can achieve a uniform temperature distribution in the workpiece with greater energy savings.

[0014] As described above, the first aspect of the invention makes it possible to more quickly make the temperature distribution of the workpiece uniform with greater energy savings.

[0015] The second feature of the invention is the first feature of the invention, and provides a temperature control device in which the first pipe portion is formed so that its shape when viewed from the perspective of the workpiece placed on the placement portion is serpentine.

[0016] In the second aspect of the invention, since the first pipe portion is serpentine, the direction along which the first pipe portion is oriented includes various directions, and therefore, the second aspect of the invention quickly makes the temperature distribution of the workpiece uniform even if the direction connecting the high-temperature portion and the low-temperature portion of the workpiece is various.

[0017] Furthermore, the meandering first pipe section can cover the area where the mounting section and the workpiece come into contact with a small number of curved sections. This allows the second aspect of the invention to reduce pressure loss associated with the vibrating working fluid that occurs at the curved sections of the first pipe section. Therefore, the second aspect of the invention reduces energy loss resulting from pressure loss in the working fluid. Therefore, the second aspect of the invention can achieve greater energy savings.

[0018] As described above, the second aspect of the invention makes it possible to uniformize the temperature distribution of the object to be treated more quickly and with greater energy savings.

[0019] The invention relating to the third feature provides a temperature control device according to the invention relating to the first or second feature, wherein at least a portion of the first pipe portion is adjacent to another portion of the first pipe portion, and within the first flow path, the direction from one end connected to the second flow path to the other end is opposite at the location corresponding to the one portion and the location corresponding to the other portion.

[0020] It is known that when the directions of the oscillatory flows of the working fluid inside two adjacent tubes are opposite to each other, the oscillatory flows have a diffusion-promoting effect between the working fluids. The details of the diffusion-promoting effect will be described in the embodiments.

[0021] In the third aspect of the invention, the directions of the flow from one end connected to the second flow path to the other end of the first flow path are opposite between the locations corresponding to the adjacent portions. That is, the directions of the oscillatory flow are opposite in phase between the working fluids associated with the two adjacent portions (the one portion and the other portion). Therefore, in the third aspect of the invention, the oscillatory flow generates a diffusion-promoting effect between the working fluids associated with the two adjacent portions. This diffusion-promoting effect occurs without increasing the work energy used to generate the vibrations. Therefore, the third aspect of the invention maintains higher energy savings while more quickly achieving a uniform temperature distribution in the workpiece through the diffusion-promoting effect.

[0022] As described above, the third aspect of the invention makes it possible to more quickly make the temperature distribution of the workpiece uniform with greater energy savings.

[0023] The invention relating to the fourth feature is an invention relating to any one or more of the first to third features, and provides a temperature control device in which at least a portion of the first pipe section is arranged along a direction connecting the central part and the outer peripheral part of the area in contact with the workpiece in the placement section.

[0024] Industrial processes such as electronics manufacturing, product manufacturing using synthetic resins or composite materials, and the production of three-dimensional objects using 3D printers may involve the cooling of a high-temperature workpiece. In such processes, the area of ​​contact with a heat-absorbing medium per volume of the workpiece may differ between the outer and central parts of the workpiece. This may result in a temperature difference between the outer and central parts of the workpiece.

[0025] In the fourth aspect of the invention, at least a portion of the first pipe section is arranged along a direction connecting the central portion and the outer periphery of the area of ​​the mounting section where the workpiece contacts. That is, the fourth aspect of the invention transports heat from the high-temperature central portion of the workpiece to the low-temperature outer periphery of the workpiece by utilizing the dream pipe effect of the working fluid in the first pipe section. This eliminates the temperature difference between the central and outer periphery of the workpiece. Therefore, the fourth aspect of the invention quickly equalizes the temperature distribution of the workpiece due to the temperature difference between the outer periphery and the central portion. This effect occurs without increasing the work energy used to generate vibrations.

[0026] As described above, the fourth aspect of the invention makes it possible to uniformize the temperature distribution of the object to be treated more quickly and with greater energy savings.

[0027] The invention relating to the fifth feature is an invention relating to any one or more of the first to fourth features, and provides a temperature control device in which at least a portion of the first pipe section is arranged along the circumferential direction of the area in the placement section where the workpiece comes into contact.

[0028] When the workpiece is a thin plate or film, a temperature difference in the circumferential direction can cause thermal stress in the circumferential direction of the workpiece, which can cause various problems, such as damage to the workpiece, deformation of the workpiece such as warping, changes in the properties of the product, and the occurrence of non-uniform deposition films.

[0029] In the fifth aspect of the invention, at least a portion of the first pipe section is arranged along the circumferential direction of the area of ​​the mounting section where the workpiece contacts. That is, the fifth aspect of the invention eliminates the temperature difference in the circumferential direction of the high-temperature workpiece through the dream pipe effect of the working fluid in the first pipe section. Therefore, the fifth aspect of the invention quickly equalizes the temperature distribution of the workpiece due to the circumferential temperature difference. This effect occurs without increasing the work energy used to generate the vibrations.

[0030] As described above, the fifth aspect of the invention can more quickly make the temperature distribution of the workpiece uniform and with greater energy savings.

[0031] The present invention can more quickly make the temperature distribution of the workpiece uniform and with greater energy savings.

[0032] FIG. 1 is a schematic diagram of a temperature control device 1 of this embodiment when viewed from the side of the workpiece W. FIG. 2 is a cross-sectional view of the temperature control device 1 of FIG. 1 taken along the line A-A'. FIG. 3 is an example of a circular temperature control device 1 of this embodiment. FIG. 4 is an example of a triangular temperature control device 1 of this embodiment. FIG. 5 is a cross-sectional view of an example of a curved temperature control device 1 of this embodiment. FIG. 6 is a cross-sectional view of an example of a curved temperature control device 1 of this embodiment in which the workpiece W is sandwiched. FIG. 7 is an explanatory diagram of the dream pipe effect. FIG. 8 is an explanatory diagram of the diffusion promotion effect due to antiphase oscillating flows. FIG. 9 is a schematic diagram of a square mounting unit 11 having a first pipe portion 12 connecting the central portion and the outer periphery. FIG. 10 is a schematic diagram of a circular mounting unit 11 having a first pipe portion 12 connecting the central portion and the outer periphery. FIG. 11 is a schematic diagram of a triangular mounting unit 11 having a first pipe portion 12 connecting the central portion and the outer periphery. Fig. 12 is a diagram showing an outline of a square mounting portion 11 having a first tubular portion 12 along the circumferential direction. Fig. 13 is a diagram showing an outline of a circular mounting portion 11 having a first tubular portion 12 along the circumferential direction. Fig. 14 is a diagram showing an outline of a triangular mounting portion 11 having a first tubular portion 12 along the circumferential direction. Fig. 15 is a diagram showing an outline of a square mounting portion 11 having a first tubular portion 12 with a fractal shape.

[0033] An example of a preferred embodiment of the present invention will be described below with reference to the drawings. Note that this is merely an example, and the technical scope of the present invention is not limited to this example.

[0034] <Temperature adjustment device 1> Fig. 1 is a schematic diagram showing a temperature adjustment device 1 of this embodiment when viewed from the side of the workpiece W. Fig. 2 is a cross-sectional view of the temperature adjustment device 1 of Fig. 1 taken along the line AA'. The following is an example of a preferred embodiment of the temperature adjustment device 1 of this embodiment using Figs. 1 and 2.

[0035] The temperature control device 1 includes at least a mounting section 11 on which a workpiece W is placed, a first pipe section 12 provided inside the mounting section 11, and a vibration generating section 14 connected to the first pipe section 12 via a second pipe section 13. A working fluid F is placed inside the first pipe section 12 and the second pipe section 13.

[0036] [Placement section 11] The placement section 11 is not particularly limited as long as it has a placement surface 111 on which the workpiece W is placed. In the example shown in Fig. 1, the placement section 11 is configured so that its shape when viewed from the placed workpiece W is rectangular. A first pipe section 12 is provided inside the placement section 11. A first flow path 125 is formed inside the first pipe section 12 (Fig. 2).

[0037] [Shape of the Mounting Section 11] The shape of the mounting section 11 is not limited to that shown in FIG. 1 . The shape of the mounting section 11 may be circular as seen from the placed workpiece W, for example, to ensure a uniform temperature distribution throughout the workpiece W having a circular bottom. Furthermore, the shape of the mounting section 11 may be polygonal, such as a triangle, as seen from the placed workpiece W, for example, to ensure a uniform temperature distribution throughout the workpiece W having a polygonal bottom. FIG. 3 shows an example of the temperature adjustment device 1 of this embodiment configured as a circle. FIG. 4 shows an example of the temperature adjustment device 1 of this embodiment configured as a triangle. The workpiece W is omitted from FIGS. 3 and 4 .

[0038] Furthermore, the mounting surface 111 of the mounting unit 11 is not limited to the flat surface shown in FIGS. 1 to 4 . The mounting surface 111 may be a curved surface, for example, to uniformly distribute the temperature across the workpiece W having a curved bottom. Furthermore, the mounting unit 11 may be shaped to sandwich the workpiece W, for example, to uniformly distribute the temperature across multiple surfaces of the workpiece W. Other shapes suitable for uniformly distributing the temperature across the workpiece W, such as a box shape, a sphere, or a torus, are also possible for the shape of the mounting unit 11. FIG. 5 is a cross-sectional view of an example in which the temperature adjustment device 1 of this embodiment is configured to have a curved surface. FIG. 6 is a cross-sectional view of an example in which the temperature adjustment device 1 of this embodiment is configured to sandwich the workpiece W.

[0039] [Material of the Mounting Portion 11] The material of the mounting portion 11 is not particularly limited. In order to quickly reflect the temperature distribution of the workpiece W and to prevent deformation, deterioration, or damage when a high-temperature workpiece W is placed on the mounting portion 11, the material of the mounting portion 11 is preferably a material with excellent thermal conductivity and heat resistance. Examples of such materials include various metals and alloys with melting points higher than room temperature, highly heat-resistant ceramics, etc. Examples of the various metals include iron, copper, aluminum, nickel, and chromium. Examples of the various alloys include various stainless steels, nickel-chromium alloys, Kanthal (registered trademark), etc. Examples of the highly heat-resistant ceramics include sintered materials such as aluminum nitride and silicon nitride.

[0040] [First pipe section 12] Refer back to FIG. 1 . As described above, the first pipe section 12 is provided inside the mounting section 11, and the first flow path 125 is formed inside the first pipe section 12. The working fluid F, which will be described later, is placed inside the first flow path 125. The first pipe section 12 can be configured in various shapes depending on the purpose of the temperature control device 1, the shape of the mounting section 11, and the like. A preferred shape of the first pipe section 12 will be described later.

[0041] As shown in FIG. 1 , a first pipe partition 122, which is a part of the flow path wall forming the first flow path 125, is provided between the first flow paths 125. A first pipe side wall 124, which is a part of the flow path wall forming the first flow path 125, is provided between the first flow path 125 and the outside of the mounting unit 11. As shown in FIG. 2 , a first pipe upper wall 121, which is a part of the flow path wall forming the first flow path 125, is provided between the first flow path 125 and the workpiece W. A first pipe lower wall 123, which is a part of the flow path wall forming the first flow path 125, is provided on the opposite side of the workpiece W as viewed from the first flow path 125. The first flow path 125 is connected to a second flow path 131, which will be described later, at one end 1251 and the other end 1252.

[0042] To enable the procedure of fitting the first flow path 125 to the inside of the mounting unit 11 after adjusting its shape, the first pipe upper wall 121, the first pipe partition wall 122, the first pipe lower wall 123, and the first pipe side wall 124 may be entirely configured separately from the mounting unit 11. Furthermore, to prevent deformation, damage, etc. due to differences in thermal expansion coefficients between the first pipe upper wall 121, the first pipe partition wall 122, the first pipe lower wall 123, and the first pipe side wall 124 may be entirely or partially part of the mounting unit 11.

[0043] The material of the first pipe section 12 is not particularly limited. The material of the first pipe section 12 may be the same as that of the mounting section 11. The lengthwise heat capacity of the first pipe section 12 is greater than the lengthwise heat capacity of the second pipe section 13 described below. The "lengthwise heat capacity" here refers to the heat capacity per unit length in the direction along the flow path.

[0044] The number of first pipe sections 12 is not particularly limited. A portion of the first flow path 125 may be formed outside the first pipe section 12, i.e., outside the mounting section 11. An example of such a first flow path 125 is a flow path formed by connecting the ends of the first pipe sections 12, which communicate with one side of the mounting section 11 along the longitudinal direction of the mounting section 11, with a U-shaped pipe formed outside the mounting section 11. In this case, in order to prevent heat transfer between the mounting section 11 and the portion formed outside, it is preferable that the length of the heat capacity of the pipe forming the outside of the first flow path 125 is smaller than that of the first pipe section 12.

[0045] [Second pipe section 13] Refer back to Fig. 1. The second pipe section 13 is a pipe having a second flow path 131 formed therein, which connects the first flow path 125 with the vibration generating section 14, which will be described later. A working fluid F, which will be described later, is placed inside the second flow path 131. To allow flexibility in the positional relationship between the mounting section 11 and the vibration generating section 14, the second pipe section 13 is preferably made of a bendable material and has a bendable structure.

[0046] The second pipe section 13 is configured so that its lengthwise heat capacity is smaller than that of the first pipe section. This configuration results in a smaller dream pipe effect associated with the second pipe section 13 than that associated with the first pipe section 12. Therefore, when the dream pipe effect associated with the first pipe section 12 promotes heat transfer, heat transfer between the workpiece W and the vibration generating unit 14 via the working fluid F inside the second pipe section 13 is reduced. This prevents some of the heat that moves from high-temperature portions to low-temperature portions of the workpiece W to uniformize the temperature distribution from flowing to the vibration generating unit 14 and being lost. This also prevents the temperature of the vibration generating unit 14 from changing due to the heat transfer, which can cause various problems. The relationship between heat capacity and the dream pipe effect will be explained later using FIG. 7 .

[0047] The second pipe section 13 preferably includes a second pipe section 13A having one second flow path 131A connecting one end 1251 of the first flow path 125 formed inside the first pipe section 12 to the vibration generating section 14, and another second pipe section 13B having another second flow path 131B connecting the other end 1252 of the first flow path 125 formed inside the first pipe section 12 to the vibration generating section 14. This allows the vibration generating section 14 to vibrate the working fluid F from both ends of the first flow path 125. Furthermore, the vibration generating section 14 can receive vibrations applied from one end 1251 of the first flow path 125 from the other end 1252 of the first flow path 125 and use the vibrations to vibrate the working fluid F on the one end 1251 side. The vibration generating section 14 can also use vibrations applied from the other end 1252 of the first flow path 125 when receiving the vibrations from the one end 1251 of the first flow path 125.

[0048] The second pipe portion 13 is preferably longer than the displacement amplitude of the vibration generated by the vibration generating unit 14 described below. This prevents the vibrating working fluid F from moving from inside the first flow path 125 to inside the vibration generating unit 14. This prevents the heat received by the vibrating working fluid F inside the first flow path 125 from being transferred to inside the vibration generating unit 14. This configuration also prevents heat inside the vibration generating unit 14 from being transferred to the first flow path 125.

[0049] [Vibration Generating Unit 14] The vibration generating unit 14 is a member that vibrates the working fluid F in a predetermined direction along the first flow path 125. The vibration generating unit 14 is not particularly limited as long as it vibrates the working fluid F. The vibration generating unit 14 may be configured to include, for example, a prime mover 141, a piston 142 that is reciprocated by the prime mover 141, and a cylinder 143 that houses the piston 142. With this configuration, the piston 142 pushes or pulls the working fluid F. The piston 142 then vibrates the working fluid F inside the second flow path 131 and the first flow path 125.

[0050] The prime mover 141 is not particularly limited. From the viewpoint of controllability of angular frequency, the prime mover 141 is preferably an electric motor. From the viewpoint of energy saving, the prime mover 141 is preferably operated using renewable energy such as wind power or hydraulic power. The structure by which the prime mover 141 causes the piston 142 to reciprocate is not particularly limited. Examples of such a structure include various structures that convert rotational motion into reciprocating motion using a crank, a cam, a gear, or the like.

[0051] The piston 142 preferably reciprocates the working fluid F in the first piston chamber 144 at one end and reciprocates the working fluid F in the second piston chamber 145 at the other end. In this case, the second flow path 131 and the first flow path 125 are preferably configured so that the working fluid F in the first piston chamber 144 pushed by one end of the piston 142 passes through the second flow path 131 and the first flow path 125 and enters the second piston chamber 145.

[0052] In the above-described configuration, the working fluid F inside the first piston chamber 144 pushed by one end of the piston 142 pushes the piston 142 from the other end to one end inside the second piston chamber 145. Alternatively, the working fluid F inside the second piston chamber 145 pushed by the other end of the piston 142 pushes the piston 142 from one end to the other end inside the first piston chamber 144. As a result, part of the kinetic energy transmitted from the piston 142 to the working fluid F vibrates the working fluid F via the piston 142. Therefore, such a piston 142 exhibits higher energy saving properties.

[0053] In addition to the above-described configuration using the prime mover 141, from the viewpoint of controllability, the vibration generating unit 14 may be configured using a member that reciprocates based on an electric signal, such as a speaker, a linear motor, etc. Furthermore, from the viewpoint of energy saving, the vibration generating unit 14 may be a self-excited vibration type that generates vibration from a temperature gradient by a thermoacoustic phenomenon.

[0054] The vibration generating unit 14 vibrates the working fluid F inside the first flow path 125, thereby generating a dream pipe effect that increases the effective thermal conductivity of the working fluid F. The angular frequency and displacement amplitude of the vibration generated by the vibration generating unit 14 will be described later.

[0055] [Working fluid F] The working fluid F is not particularly limited. From the viewpoint of reducing energy loss inside the first flow path 125, etc., the working fluid F is preferably in a liquid phase in the temperature range in which the temperature control device 1 is used. From the viewpoint of transporting more heat from the high-temperature portion to the low-temperature portion of the workpiece W, the working fluid F preferably has a large constant-pressure heat capacity per unit volume. As such a working fluid F, for example, water (H ２ O. Constant pressure heat capacity per unit volume: 4.2 MJ / m ３ -K) and various aqueous solutions.

[0056] When a high-temperature workpiece W is placed on the working fluid F, the working fluid F is preferably a liquid having a boiling point higher than that of water, from the viewpoint of preventing evaporation of the working fluid F. Examples of liquids having a boiling point higher than that of water include various high-boiling solvents and mixtures containing high-boiling solvents, such as methyl benzoate (boiling point 199°C), benzyl alcohol (boiling point 205°C), diethylene glycol (boiling point 245°C), and benzyl benzoate (boiling point 325°C). From the viewpoint of preventing ignition and fire, the working fluid F is preferably flame-retardant. The flame-retardant working fluid F is a liquid to which various liquid-based flame retardants, such as trixylenyl phosphate, have been added.

[0057] When a high-temperature workpiece W is placed thereon, the working fluid F may be in a gas phase in the temperature range in which the temperature control device 1 is used, in order to prevent a phase change of the working fluid F. As in the case of a liquid phase, the working fluid F in the gas phase preferably has a high volumetric specific heat. In other words, the working fluid F in the gas phase preferably has a high molar heat capacity at constant pressure. Examples of such a working fluid F in the gas phase include carbon dioxide and water vapor.

[0058] [Workpiece W] The workpiece W is not particularly limited as long as it is related to various industrial processes in which the temperature distribution of the workpiece W is important. Examples of such workpieces W include electronic components, electronic devices, synthetic resin products and parts, composite material products and parts, output from 3D printers, measurement targets for material testing, solar cell panels, and objects to be subjected to vapor deposition treatment.

[0059] [Uniform temperature distribution by the dream pipe effect] With the above-described configuration, the temperature control device 1 uniforms the temperature distribution of the workpiece W by the dream pipe effect brought about by the oscillating flow of the working fluid F inside the first flow path 125. Figure 7 is an explanatory diagram of the dream pipe effect. The following is a general description of uniform temperature distribution by the dream pipe effect using Figure 7.

[0060] [Explanation of Fig. 7] Fig. 7 shows a cycle in which the dream pipe effect uniforms the temperature distribution. In the partial diagram showing each step of the cycle shown in Fig. 7, the workpiece W is placed above the placement section 11. Inside the placement section 11, a first pipe section 12 is provided, in which a first flow path 125 is formed along the left-right direction of the diagram. On the left side of the partial diagram, there is a high-temperature region H corresponding to the high-temperature portion of the workpiece W. On the right side of the partial diagram, there is a low-temperature region L corresponding to the low-temperature portion of the workpiece W. In the center of the partial diagram, there is an intermediate region M. The working fluid F moves in a direction along the first flow path 125, i.e., along the left-right direction of the diagram, with a displacement amplitude ξ ０ The displacement ξ oscillates at a constant velocity. A negative displacement ξ indicates that the working fluid F is displaced to the left of the diagram. A positive displacement ξ indicates that the working fluid F is displaced to the right of the diagram. The arrows indicate the direction of change in displacement ξ. A group of "+" symbols in the diagram indicates a high temperature. A group of "-" symbols in the diagram indicates a low temperature at the indicated location. A "±" symbol in the diagram indicates that the temperature at the indicated location is somewhere between these two. A group of "±" symbols mixed with "+" or "-" symbols indicates that the temperature at the indicated location is slightly higher or slightly lower than the intermediate temperature. For ease of viewing, the vertical direction in the partial diagrams showing each step of the cycle shown in Figure 7 is exaggerated compared to the horizontal direction.

[0061] [Step S1: Heat transfer from workpiece W to working fluid F] The displacement of the working fluid F approaches its maximum in the negative direction. At this time, in the high-temperature region H, the working fluid F inside the first flow path 125 receives heat from the high-temperature portion of the workpiece W via the mounting portion 11. As a result, the temperature of the working fluid F in the high-temperature region H becomes high. The cycle proceeds to step S2.

[0062] [Step S2: Oscillation of Working Fluid F] The displacement of the working fluid F changes from the negative direction to the positive direction. At this time, the rate of change of the displacement is large. Therefore, the time for heat exchange between the working fluid F and the first pipe section 12 is short. Therefore, the amount of heat transferred from the high-temperature working fluid F to the first pipe section 12 is small. The cycle proceeds to step S3.

[0063] [Step S3: Displacement Near Maximum in Positive Direction] The displacement of the working fluid F reaches near maximum in the positive direction. At this time, the working fluid F that has reached a high temperature in step S1 has moved to the intermediate region M. Also, the working fluid F at an intermediate temperature that was in the intermediate region M has moved to the low temperature region L. The cycle proceeds to step S4.

[0064] [Step S4: Heat Transfer] When the displacement approaches its maximum in the positive direction, the direction of change of the displacement reverses, resulting in a long period of heat exchange between the working fluid F and the first pipe section 12. Therefore, in the intermediate region M, heat transfers from the working fluid F that has reached a high temperature in step S1 to the first pipe section 12 corresponding to the intermediate region M. If the heat capacity of the first pipe section 12 is sufficiently large, the high-temperature working fluid F and the first pipe section 12 reach a temperature slightly higher than halfway between the high and low temperatures.

[0065] Furthermore, the working fluid F at an intermediate temperature that has been moved from step S2 to step S3 to the low-temperature region L provides heat to the low-temperature portion of the workpiece W via the mounting portion 11. As a result, the temperature of the working fluid F in the low-temperature region L becomes low. The cycle proceeds to step S5.

[0066] [Step S5: Oscillation of Working Fluid F] The displacement of the working fluid F changes from the positive direction to the negative direction. At this time, the rate of change of the displacement is large. Therefore, the time for heat exchange between the working fluid F and the first pipe section 12 is short. Therefore, the amount of heat transferred from the low-temperature working fluid F to the first pipe section 12 is small. The cycle proceeds to step S6.

[0067] [Step S6: Displacement Near Maximum in Negative Direction] The displacement of the working fluid F reaches near maximum in the negative direction. At this time, the working fluid F, which has become cold in step S4, has moved to the intermediate region M. In addition, the working fluid F, which was in the intermediate region M in step S4 and has a temperature slightly higher than the intermediate temperature, has moved to the high temperature region H. The cycle proceeds to step S7.

[0068] [Step S7: Heat Transfer from the First Pipe Section 12 to the Working Fluid F] When the displacement approaches its maximum in the negative direction, the direction of change of the displacement reverses, and therefore the time for heat exchange between the working fluid F and the first pipe section 12 is long. Therefore, in the intermediate region M, the working fluid F, which has reached a low temperature in step S4, receives heat from the first pipe section 12 in the intermediate region M, which has reached a slightly higher temperature. As a result, the low-temperature working fluid F and the first pipe section 12 reach a temperature intermediate between the high and low temperatures.

[0069] Furthermore, in the high-temperature region H, the working fluid F, which has reached a temperature slightly higher than the intermediate temperature in step S4, receives heat from the high-temperature portion of the workpiece W via the mounting portion 11. As a result, the temperature of the working fluid F in the high-temperature region H becomes high. In addition, the working fluid F, which has been moved to the low-temperature region L at an intermediate temperature in steps S5 to S6, imparts heat to the low-temperature portion of the workpiece W via the mounting portion 11. As a result, the temperature of the working fluid F in the low-temperature region L becomes low. The cycle returns to step S2. Thereafter, the cycle of steps S2 to S7 is repeated until the temperature difference between the high-temperature region H and the low-temperature region L becomes sufficiently small.

[0070] [Effects of Steps S1 to S7] In steps S1 to S7 related to the dream pipe effect, heat from the high-temperature region H moves to the first pipe portion 12 in the intermediate region M via the oscillating working fluid F. The heat that has moved to the first pipe portion 12 in the intermediate region M then moves to the low-temperature region L via the oscillating working fluid F. At this time, the heat from the high-temperature region H travels back and forth between the first pipe portion 12 and the working fluid F multiple times before moving to the low-temperature region L. Because the first pipe portion 12 and the working fluid F are in contact with each other, the distance over which this heat transfer occurs is shorter than the distance from the high-temperature region H to the low-temperature region L. Furthermore, because the working fluid F oscillates in a direction connecting the high-temperature region H and the low-temperature region L, the heat transferred to the working fluid F is quickly transported to the low-temperature region L. Therefore, the dream pipe effect can increase the effective thermal conductivity of the oscillating working fluid F.

[0071] [Effective Thermal Conductivity Related to the Dream Pipe Effect] Effective thermal conductivity κ of the working fluid F related to the dream pipe effect Ｄis known to be expressed by the following formula (1) (unit: W / K·m).

[0072] The variables and constants in formula (1) have the following meanings: Fs is the heat capacity of the wall, etc., C Ｗ (Unit: J / Km ３ ) is a dimensionless quantity related to Fs = C Ｗ / C, where C is the constant pressure heat capacity per unit volume of the working fluid F (unit: J / K m ３ Therefore, Fs is the heat capacity of the wall, etc. Ｗ When is small compared to the heat capacity C of the working fluid F, it approaches 0, and when the heat capacity C of the wall, etc. Ｗ is large enough relative to the heat capacity C of the working fluid F, it approaches 1. χ″ is a dimensionless quantity that gives a measure of the irreversible heat exchange related to the dream pipe effect. ω is the angular frequency of the vibration of the working fluid F (unit: s －１ ). ０ is the displacement amplitude of the vibration of the working fluid F (unit: m).

[0073] (Heat Capacity of the Pipe) From the formula (1), the smaller the heat capacity of the wall, etc., the smaller the effective thermal conductivity κ of the working fluid F related to the dream pipe effect. Ｄ In addition, the larger the heat capacity of the wall, etc., the smaller the effective thermal conductivity κ of the working fluid related to the dream pipe effect. Ｄ Therefore, as described above, by configuring the lengthwise heat capacity of the second pipe section 13 to be smaller than the lengthwise heat capacity of the first pipe section 12, the outflow of heat of the working fluid inside the first flow path 125 to the vibration generating section 14 and the like via the second pipe section 13 is reduced.

[0074] (Regarding the heat capacity of the working fluid F) From equation (1), by increasing the constant pressure heat capacity C per unit volume of the working fluid F, the effective thermal conductivity κ of the working fluid F related to the dream pipe effect can be Ｄ becomes larger.

[0075] (Regarding the displacement amplitude of the vibration generated by the vibration generating unit 14) From equation (1), the displacement amplitude ξ ０ By increasing the effective thermal conductivity κ of the working fluid F related to the dream pipe effect, Ｄbecomes larger.

[0076] (Regarding the angular frequency of vibration generated by the vibration generating unit 14) In equation (1), χ″ is a dimensionless number that gives a measure of irreversible heat exchange related to the dream pipe effect. From equation (1), by making the measure of irreversible heat exchange χ″ as large as possible, the effective thermal conductivity κ of the working fluid F related to the dream pipe effect can be reduced. Ｄ becomes larger.

[0077] Incidentally, it is known that χ" converges toward 0 as ωτ asymptotically approaches 0 from near 3. It is also known that χ" converges toward 0 as ωτ diverges from near 3 toward positive infinity. Here, τ is the radial relaxation time of the temperature in the working fluid F.

[0078] Considering the relationship between χ" and ωτ, when χ" is to be made as large as possible, ωτ is preferably within the following range. The lower limit of ωτ is preferably 1 or more, and more preferably 2 or more. The upper limit of ωτ is preferably 10 or less, and more preferably 5 or less.

[0079] Here, the temperature relaxation time τ in the radial direction is proportional to the square of r [m], which is the radius or the like of the cross-sectional shape of the first flow path 125, and is defined by the formula "τ = 1 / 2 (r2 / α)" which is inversely proportional to the thermal diffusion coefficient α [m2 / s] of the working fluid F. For example, when the cross-sectional shape of the first flow path 125 is circular or approximately circular, r [m] is the radius of the first flow path 125. Furthermore, for example, when the cross-sectional shape of the first flow path 125 is rectangular or approximately rectangular, r [m] is 1 / 2 of the width in the short direction of the first flow path 125. The thermal diffusion coefficient α is calculated by dividing the thermal conductivity k by the density ρ [kg / m ３ ] and specific heat capacity c ｐ Divide by [J / kg・K] using the formula "α = k / (ρc ｐ Therefore, a suitable range of the angular frequency ω [rad / s] of the vibration generated by the vibration generating unit 14 is determined from the range related to ωτ and each equation described above, by determining the type of working fluid F and the cross-sectional shape of the first flow path 125.

[0080] (Regarding the waveform of vibration generated by the vibration generating unit 14) From the explanation using Figure 7, it is preferable that the vibration waveform is a waveform in which the rate of change of displacement at the timing when the displacement is near its maximum is smaller than at other times. Examples of waveforms that satisfy the above requirements include sine waves, square waves, and waveforms similar to these. Sine waves and waveforms similar to sine waves in which the rate of change of displacement changes smoothly are particularly preferable from the viewpoint of energy saving in the vibration generating unit 14.

[0081] [Diffusion-promoting effect due to opposite-phase oscillatory flows] When the phases of the vibrations of the working fluid advance in opposite directions between adjacent first flow paths 125, i.e., when there are opposite-phase oscillatory flows, a diffusion-promoting effect due to the opposite-phase oscillatory flows can be obtained. This not only makes the temperature distribution uniform along the first pipe section 12, but also makes the temperature distribution uniform in directions different from the direction of the first pipe section 12.

[0082] A case in which there are oscillatory flows of opposite phases between adjacent first flow paths 125 occurs, for example, when at least a portion of first pipe portion 12 is adjacent to another portion, and inside first flow path 125, the direction from one end 1251 connected to second flow path 131 to the other end 1252 faces the direction at a portion corresponding to the one portion and a portion corresponding to the other portion. The examples shown in Figures 1, 3, 4, and 9 to 15 all fall into this type of shape.

[0083] 8 is an explanatory diagram of the diffusion promotion effect due to the oscillatory flows of opposite phases. The following is a schematic explanation of the diffusion promotion effect due to the oscillatory flows of opposite phases, using FIG. 8.

[0084] [Explanation of Figure 8] Figure 8 shows a cycle in which the out-of-phase oscillating flows associated with the dream pipe effect homogenize the temperature distribution in a direction opposite to the flow path direction. Figure 8 depicts a portion of the first flow path 125, which has a serpentine shape when viewed from the workpiece W placed on the placement unit 11. In Figure 8, the first flow path 125 has parallel straight sections aligned in the left-right direction. The parallel straight sections of the first flow path 125 are, from top to bottom, first flow path A section 125A, first flow path B section 125B, and first flow path C section 125C. The direction from one end 1251 connected to the second flow path 131 to the other end 1252 in each straight section of the first flow path 125 is indicated by a dashed arrow on the right side of the first flow path 125. This direction in each straight section of the first flow path 125 is opposite to the corresponding direction in adjacent straight sections. A working fluid F is present within the first flow path 125. The working fluid F flows in a direction along the first flow path 125, i.e., in the vertical direction in the figure, with a displacement amplitude ξ ０ 8. At the top of the figure, there is a high-temperature region H corresponding to the high-temperature portion of the workpiece W. At the bottom of the figure, there is a low-temperature region L corresponding to the low-temperature portion of the workpiece W. At the center of the figure, there is an intermediate region M. The meanings of the arrows, "+", "-" and "±" symbols in the figure are the same as in FIG. 7. For ease of viewing, the vertical direction is exaggerated compared to the horizontal direction in the partial views showing each step of the cycle shown in FIG. 8.

[0085] [Step S11: Heat transfer from workpiece W to working fluid F] The displacement of the working fluid F in the first flow path A portion 125A and the first flow path C portion 125C is near its maximum in the negative direction. Also, the displacement of the working fluid F in the first flow path B portion 125B is near its maximum in the positive direction. At this time, in the high-temperature region H, the working fluid F inside the first flow path 125 receives heat from the high-temperature portion of the workpiece W via the mounting portion 11. As a result, the temperature of the working fluid F in the high-temperature region H becomes high. The cycle proceeds to step S12.

[0086] [Step S12: Oscillation of Working Fluid F] The displacement of the working fluid F in the first flow path A portion 125A and the first flow path C portion 125C changes from the negative direction to the positive direction. Also, the displacement of the working fluid F in the first flow path B portion 125B changes from the positive direction to the negative direction. At this time, the rate of change of the displacement is large. Therefore, the time for heat exchange between the working fluid F and the first pipe portion 12 is short. Therefore, the amount of heat transferred from the high-temperature working fluid F to the first pipe portion 12 is small. The cycle proceeds to step S13.

[0087] [Step S13: Near Maximum Displacement (1)] The displacement of the working fluid F in the first flow path A portion 125A and the first flow path C portion 125C is near its maximum in the positive direction. The displacement of the working fluid F in the first flow path B portion 125B is near its maximum in the negative direction. At this time, the working fluid F, which was in the high-temperature region H of the first flow path A portion 125A and the first flow path C portion 125C in step S11 and has become hot, moves to the intermediate region M. The working fluid F, which was in the low-temperature region L of the first flow path B portion 125B in step S11 and has become cold, moves to the intermediate region M. The cycle proceeds to step S14.

[0088] [Step S14: Heat Transfer (1)] When the displacement approaches its maximum, the direction of change in displacement reverses, resulting in a long period of heat exchange between the working fluid F and the first pipe section 12. Therefore, in the intermediate region M, heat is diffused from the working fluid F, which has reached a high temperature in step S11, through the first pipe section partition wall 122 to the working fluid F, which has reached a low temperature in step S11. The temperature of these working fluids F then becomes approximately intermediate between high and low temperatures.

[0089] Furthermore, the intermediate-temperature working fluid F, which was in the intermediate region M of the first flow path A portion 125A and the first flow path C portion 125C in step S11 and moved to the low-temperature region L in step S13, provides heat to the low-temperature portion of the workpiece W via the mounting portion 11. As a result, the temperature of the working fluid F in the low-temperature region L becomes low. In addition, the intermediate-temperature working fluid F, which was in the intermediate region M of the first flow path B portion 125B in step S11 and moved to the high-temperature region H in step S13, receives heat from the high-temperature portion of the workpiece W via the mounting portion 11. As a result, the temperature of the working fluid F in the high-temperature region H becomes high. The cycle proceeds to step S15.

[0090] [Step S15: Oscillation of Working Fluid F] The displacement of the working fluid F in the first flow path A portion 125A and the first flow path C portion 125C changes from the positive direction to the negative direction. Also, the displacement of the working fluid F in the first flow path B portion 125B changes from the negative direction to the positive direction. At this time, the rate of change of the displacement is large. Therefore, the time for heat exchange between the working fluid F and the first pipe portion 12 is short. Therefore, the amount of heat transferred between the working fluid F and the first pipe portion 12 is small. The cycle proceeds to step S16.

[0091] [Step S16: Near Maximum Displacement (2)] The displacement of the working fluid F in the first flow path A portion 125A and the first flow path C portion 125C is near its maximum in the negative direction. The displacement of the working fluid F in the first flow path B portion 125B is near its maximum in the positive direction. At this time, the working fluid F, which was in the low-temperature region L of the first flow path A portion 125A and the first flow path C portion 125C in step S14 and has become low temperature, moves to the intermediate region M. The working fluid F, which was in the high-temperature region H of the first flow path B portion 125B in step S14 and has become high temperature, moves to the intermediate region M. The cycle proceeds to step S17.

[0092] [Step S17: Heat Transfer (2)] When the displacement approaches its maximum, the direction of change in displacement reverses, resulting in a long period of heat exchange between the working fluid F and the first pipe section 12. Therefore, in the intermediate region M, heat is diffused from the working fluid F, which has reached a high temperature in step S14, through the first pipe section partition wall 122 to the working fluid F, which has reached a low temperature in step S14. The temperature of these working fluids F then becomes approximately intermediate between high and low temperatures.

[0093] Furthermore, the intermediate-temperature working fluid F, which was in the intermediate region M of the first flow path A portion 125A and the first flow path C portion 125C in step S14 and moved to the high-temperature region H in step S16, receives heat from the high-temperature portion of the workpiece W via the mounting portion 11. As a result, the temperature of the working fluid F in the high-temperature region H becomes high. In addition, the intermediate-temperature working fluid F, which was in the intermediate region M of the first flow path B portion 125B in step S14 and moved to the low-temperature region L in step S16, imparts heat to the low-temperature portion of the workpiece W via the mounting portion 11. As a result, the temperature of the working fluid F in the low-temperature region L becomes low. The cycle returns to step S12. Thereafter, the cycle of steps S12 to S17 is repeated until the temperature difference between the high-temperature region H and the low-temperature region L becomes sufficiently small.

[0094] [Effects of Steps S11 to S17] In steps S11 to S17, which involve the diffusion promotion effect of the opposite-phase oscillatory flows, the working fluid in the adjacent first flow paths 125 alternately vibrates with respect to the heat in the high-temperature region H. Therefore, near the maximum displacement, thermal diffusion between the high-temperature working fluid and the low-temperature working fluid is promoted. This thermal diffusion occurs in a direction different from that along the first flow path 125. Therefore, when the phases of the working fluid vibrations between adjacent first flow paths 125 are opposite to each other, i.e., when opposite-phase oscillatory flows exist, the effect of promoting thermal diffusion in a direction different from that along the first flow path 125 is achieved. This diffusion promotion effect occurs without increasing the work energy used to generate the vibrations. Therefore, such a first flow path 125 maintains higher energy efficiency while more quickly uniforming the temperature distribution of the workpiece W through the diffusion promotion effect.

[0095] However, when the diffusion promotion effect is achieved, thermal diffusion near the one end 1251 and the other end 1252 of the first flow path 125 is also promoted. That is, thermal diffusion from the workpiece W to the second flow path 131 of the first flow path 125 is promoted. This increases the risk of heat transfer between the workpiece W and the vibration generating unit 14 via the working fluid inside the first and second flow paths, compared to when the thermal diffusion promotion effect is not achieved. The temperature control device 1 of this embodiment reduces such heat transfer by using a configuration related to the length-wise heat capacity of the second pipe section 13. Therefore, a configuration that achieves the diffusion promotion effect by the opposite-phase oscillatory flows more quickly and uniformly distributes the temperature of the workpiece W. Furthermore, this configuration prevents various problems caused by temperature changes in the vibration generating unit 14. In addition, this configuration prevents a decrease in energy efficiency due to heat transfer between the workpiece W and the vibration generating unit 14.

[0096] [Angular Frequency When Utilizing the Diffusion Promotion Effect] When utilizing the diffusion promotion effect, the angular frequency ω [rad / s] of the vibration generated by the vibration generating unit 14 is selected to an appropriate value according to the cross-sectional shape of the first flow path 125. For example, when the cross-sectional shape of the first flow path 125 is square, approximately square, circular, or approximately circular, the angular frequency ω is preferably within a range determined by the following lower and upper limits: Lower limit: 1.6×10 －３ ×κ / r ２ [rad / s] or more, upper limit: 4.9×κ / r ２ [rad / s] or less. However, the term "square" here refers to a rectangle in which the width in the longitudinal direction is within twice the width in the lateral direction. Note that, when the cross-sectional shape of the first flow path 125 is square or approximately square, r [m] is half the width in the lateral direction of the cross-sectional shape of the first flow path 125 (unit: m). Furthermore, when the cross-sectional shape of the first flow path 125 is circular or approximately circular, r [m] is the radius of the first flow path 125 (unit: m). κ is the thermal diffusivity of the working fluid F (m ２ / s). Furthermore, for example, when the cross-sectional shape of the first flow path 125 is a parallel plate, that is, a rectangle or a substantially rectangle in which the longitudinal width of the cross-sectional shape is sufficiently larger than the lateral width, the angular frequency ω is preferably within a range determined by the following lower and upper limits: Lower limit: 0.8×10 －３ ×κ / d２ [rad / s] or more, upper limit: 2.5×κ / d ２ [rad / s] or less, where d [m] is half the width in the short direction of the cross-sectional shape of the first flow path 125 (unit: m).

[0097] [Shape of First Pipe Section 12] The shape of the first pipe section 12 is not particularly limited.

[0098] [Cross-sectional Shape] The cross-sectional shape of the first pipe portion 12 is not particularly limited. In order to suitably transfer heat between the workpiece W and the working fluid F via the mounting portion 11, the first pipe portion 12 preferably has a cross-sectional shape in which the side of the first flow path 125 formed therein facing the workpiece W is approximately flat. From the viewpoint of suitably achieving the dream pipe effect, the cross-sectional shape of the thermal boundary layer of the working fluid F is preferably close to the cross-sectional shape of the first flow path 125. In order to make the cross-sectional shape of the thermal boundary layer of the working fluid F close to the cross-sectional shape of the first flow path 125, the first pipe portion 12 preferably has a cross-sectional shape in which the cross-sectional shape of the first flow path 125 formed therein is approximately circular. Examples of shapes that satisfy the above two conditions include a crescent-shaped cross-sectional shape in which the side of the first flow path 125 facing the workpiece W is approximately flat, and a rectangular cross-sectional shape in which the side of the first flow path 125 facing the workpiece W is approximately flat.

[0099] [Shape mainly composed of straight sections] In order to reduce pressure loss at the curved sections, it is preferable that the shape of the first pipe section 12 be a shape mainly composed of substantially straight sections and secondary to the curved sections. That is, the proportion of the length of the straight sections in the entire first pipe section 12 is preferably 60% or more, more preferably 80% or more, and even more preferably 90% or more. Such a shape reduces energy loss resulting from pressure loss of the working fluid. This allows the vibration generating section 14 to vibrate the working fluid with less energy consumption. Therefore, a first pipe section 12 whose proportion of the length of the straight sections is within the above-mentioned range contributes to achieving higher energy savings.

[0100] [Regarding the Shape as Seen from the Workpiece W] The shape of the first pipe portion 12 as seen from the workpiece W is preferably selected from various shapes such as a serpentine shape, a shape connecting the central portion and the outer periphery, a shape along the circumferential direction, and a shape including various directions, depending on the purpose of the temperature adjustment device 1, the workpiece W, etc. The following are examples of the shape of the first pipe portion 12 as seen from the workpiece W.

[0101] (Serpentine Shape) In order to make various temperature distributions uniform and to achieve higher energy savings, it is preferable that the first pipe portion 12 has a serpentine shape. In a serpentine shape, the direction along which the first pipe portion 12 is oriented includes various directions. This allows the temperature control device 1 to quickly make the temperature distribution of the workpiece W uniform even if the direction connecting the high-temperature portion and the low-temperature portion of the workpiece W is various.

[0102] 1, 3, and 4, the meandering first pipe section 12 having parallel straight portions can cover the area where the mounting section 11 and the workpiece W come into contact with each other with a small number of curved portions. In other words, the meandering shape can be made to be primarily straight. This reduces pressure loss associated with the vibrating working fluid that occurs at the curved portions of the first pipe section. Therefore, the meandering first pipe section 12 reduces energy loss resulting from pressure loss of the working fluid, contributing to achieving greater energy savings.

[0103] Furthermore, the first pipe section 12 that meanders with parallel straight portions can be easily configured so that at least a portion thereof is adjacent to another portion, and inside the first flow path 125, the direction from one end 1251 connected to the second flow path 131 toward the other end 1252 faces the portion corresponding to the one portion at a location corresponding to the other portion. As a result, the first pipe section 12 that meanders with parallel straight portions achieves the above-mentioned antiphase diffusion promotion effect. Therefore, the first pipe section 12 that meanders with parallel straight portions not only quickly uniforms the temperature distribution of the workpiece W in the direction along the straight portions, but also quickly uniforms the temperature distribution of the workpiece W in directions different from the straight portions.

[0104] This shape can be realized by various shapes of the mounting portion 11. The shapes illustrated in Figures 1, 3, and 4 are serpentine shapes that have parallel straight portions. In addition, the shapes illustrated in Figures 1, 3, and 4 include adjacent portions that face each other in the direction from one end of the first tube portion 12 to the other end.

[0105] (Shape connecting central portion and outer periphery) When it is desired to make uniform the temperature distribution related to the temperature difference occurring between the outer periphery and central portion of the workpiece W, it is preferable that the first pipe portion 12 has a shape connecting the central portion and the outer periphery. In this shape, at least a part of the first pipe portion 12 is arranged along a direction connecting the central portion and outer periphery of the region of the mounting portion 11 that comes into contact with the workpiece W.

[0106] In this shape, heat is transported from the high-temperature central portion of the workpiece W to the low-temperature outer peripheral portion of the workpiece W due to the dream pipe effect of the working fluid F in the first pipe section 12. Therefore, the first pipe section 12, which is shaped to connect the central portion and the outer peripheral portion, quickly equalizes the temperature distribution of the workpiece W related to the temperature difference occurring between the outer peripheral portion and the central portion.

[0107] The shape connecting the central portion and the outer peripheral portion is not particularly limited. The shape may be a meandering shape. Alternatively, the shape may be a non-meandering shape achieved by branching the first pipe portion 12 or by folding back the first pipe portion 12 at a portion of the mounting portion 11 that does not contact the workpiece W.

[0108] Furthermore, the shape is preferably such that at least a portion of the first pipe portion 12 is adjacent to another portion, and the direction from one end 1251 connected to the second flow path 131 to the other end 1252 inside the first flow path 125 faces the portion corresponding to the one portion at a location corresponding to the other portion at a location corresponding to the other portion. This allows the first pipe portion 12 to achieve the aforementioned antiphase diffusion promotion effect. Therefore, the first pipe portion 12 having this shape not only quickly equalizes the temperature distribution of the workpiece W caused by the temperature difference between the outer periphery and the center, but also quickly equalizes various temperature distributions, such as between outer periphery portions and between center portions.

[0109] This shape can be realized by the mounting portion 11 having various shapes. FIGS. 9 to 11 show examples of the mounting portion 11 having a first tubular portion 12 that connects the central portion and the outer periphery. FIG. 9 is a diagram showing an outline of a square mounting portion 11 having a first tubular portion 12 that connects the central portion and the outer periphery. FIG. 10 is a diagram showing an outline of a circular mounting portion 11 having a first tubular portion 12 that connects the central portion and the outer periphery. FIG. 11 is a diagram showing an outline of a triangular mounting portion 11 having a first tubular portion 12 that connects the central portion and the outer periphery. The shapes shown in FIGS. 9 to 11 are meandering shapes that have parallel straight portions. Furthermore, the shapes shown in FIGS. 9 to 11 include adjacent portions whose directions from one end of the first tubular portion 12 to the other end are opposite to each other.

[0110] (Shape along the circumferential direction) When there is a demand for uniform temperature distribution in the circumferential direction of the workpiece W, it is preferable that the first pipe section 12 has a shape along the circumferential direction. In this shape, at least a portion of the first pipe section 12 is arranged along the circumferential direction of the region of the mounting section 11 that comes into contact with the workpiece W.

[0111] In this shape, heat is transported along the circumferential direction of the workpiece W due to the dream pipe effect of the working fluid F related to the first pipe section 12. Therefore, the first pipe section 12 having a shape that follows the circumferential direction quickly makes the temperature distribution along the circumferential direction of the workpiece W uniform.

[0112] The shape along the circumferential direction is not particularly limited. The shape may be a meandering shape. Alternatively, the shape may be a non-meandering shape achieved by branching the first pipe portion 12 or by folding back the first pipe portion 12 at a portion of the mounting portion 11 that does not contact the workpiece W.

[0113] Furthermore, the shape is preferably configured so that at least a portion of the first pipe portion 12 is adjacent to another portion, and the direction from one end 1251 connected to the second flow path 131 to the other end 1252 inside the first flow path 125 faces the portion corresponding to the one portion and the portion corresponding to the other portion. This allows the first pipe portion 12 to obtain the above-mentioned antiphase diffusion promotion effect. Therefore, the first pipe portion 12 having the shape not only quickly uniforms the circumferential temperature distribution of the workpiece W, but also quickly uniforms various temperature distributions, such as the temperature distribution of the workpiece W related to the temperature difference occurring between the outer circumferential portion and the central portion.

[0114] This shape can be realized by the mounting portion 11 having various shapes. FIG. 12 is a diagram showing an outline of a square mounting portion 11 having a first tubular portion 12 along the circumferential direction. FIG. 13 is a diagram showing an outline of a circular mounting portion 11 having a first tubular portion 12 along the circumferential direction. FIG. 14 is a diagram showing an outline of a triangular mounting portion 11 having a first tubular portion 12 along the circumferential direction. The shapes exemplified in FIGS. 12 to 14 are serpentine shapes. The shapes exemplified in FIGS. 12 and 14 are serpentine shapes having parallel straight portions. The shape exemplified in FIG. 13 is a serpentine shape having parallel curved portions. Furthermore, the shapes exemplified in FIGS. 12 to 14 include adjacent portions whose directions from one end 1251 to the other end 1252 of the first tubular portion 12 are opposite to each other.

[0115] (Shape Including Various Directions) When it is desired to make the temperature distribution uniform in various directions, it is preferable that the first pipe section 12 has a shape including various directions, in which the first pipe section 12 includes a curved portion or a straight portion along two directions.

[0116] In this shape, heat is transported in various directions due to the dream pipe effect of the working fluid F in the first pipe section 12. Therefore, the first pipe section 12 having a shape including various directions quickly makes the temperature distribution in various directions of the workpiece W uniform.

[0117] The shape including various directions is not particularly limited. The shape may be a meandering shape. Alternatively, the shape may be a non-meandering shape achieved by branching the first pipe portion 12 or by folding back the first pipe portion 12 at a portion of the mounting portion 11 that does not contact the workpiece W.

[0118] The shape including various directions may be a shape including a fractal shape to facilitate the design of the tubular shape according to the size of the mounting portion 11. The fractal shape is not particularly limited. The shape of the first tubular portion 12 is, for example, a shape related to a space-filling curve among fractal shapes. Examples of such shapes include a Moore curve, a Peano curve, a Hilbert curve, a Sierpinski curve, a De Rham curve, and a Dragon curve. FIG. 15 is a schematic diagram of a rectangular mounting portion 11 having a fractal-shaped first tubular portion 12. In the example shown in FIG. 15, the first tubular portion 12 is configured in a shape that follows a Moore curve of degree 4, which is a space-filling curve related to a fractal shape. This allows the temperature control device 1 to quickly and uniformly distribute the temperature of the workpiece W in various directions.

[0119] <Examples of Use of Temperature Control Device 1> Various examples of use of the temperature control device 1 are given below.

[0120] [Vapor deposition process] In vapor deposition processes, it is important to form a uniform film on the surface of the object to be coated. If uniform temperature distribution is not ensured, a uniform film thickness cannot be obtained, resulting in reduced film uniformity. This can result in the coated object's functionality and / or performance not reaching the expected level. Furthermore, vapor deposition processes require control of the physical properties of the coating film, such as adhesion, hardness, and crystalline structure. If uniform temperature distribution is not maintained, these physical properties cannot be uniformly controlled, which can hinder the improvement of the quality of the coating film. Furthermore, if the temperature is high in one area and low in another, sputtering, a phenomenon in which unwanted materials are scattered, may occur. In addition, if the temperature distribution is not uniform in vapor deposition processes, there is a risk of deterioration or deformation of the workpiece due to thermal stress.

[0121] The temperature control device 1 achieves a uniform temperature distribution during the deposition process, thereby contributing to solving the various problems mentioned above. By achieving a uniform temperature distribution, the temperature control device 1 contributes to improving the quality and process efficiency of the deposition process, and ensuring consistency and reliability throughout the entire manufacturing process.

[0122] [Electronics Manufacturing] In the electronics industry, accurate temperature control is essential in semiconductor manufacturing, wiring processes on substrates, soldering, assembly processes, and the like. If sufficiently uniform temperature distribution is not ensured in semiconductor manufacturing, the semiconductor growth and etching processes will not proceed uniformly, which can lead to reduced device performance and reliability. Furthermore, if sufficiently uniform temperature distribution is not ensured in wiring processes on substrates, fine structures will not be formed uniformly, which can lead to reduced signal transmission and component reliability. Furthermore, some materials used in electronic devices require uniform thermal stress. If sufficiently uniform temperature distribution is not ensured during processes such as soldering and assembly, electronic components may deteriorate, deform, or be damaged due to thermal stress.

[0123] The temperature control device 1 makes the temperature distribution of various workpieces, such as semiconductors and substrates, uniform in semiconductor manufacturing, wiring processes on substrates, soldering, assembly processes, etc. In this way, the temperature control device 1 contributes to solving the various problems mentioned above.

[0124] [Product manufacturing using synthetic resins, composite materials, etc.] In the manufacturing of products using synthetic resins, composite materials, etc., uniform temperature distribution may be required in parts, products, etc. If uniform temperature distribution is not achieved, the physical properties of the product may not be uniform, and quality, such as uniform hardness and durability, may be reduced. Furthermore, if uniform temperature distribution is not achieved, distortion and stress during cooling and hardening may prevent the production of a uniform, shape-stable product. If uniform temperature distribution is not achieved in composite materials, different components and fibers may not be evenly dispersed. Furthermore, if uniform temperature distribution is not achieved, it may be difficult to achieve product reproducibility, consistent quality, etc.

[0125] The temperature control device 1 makes the temperature distribution of various workpieces, such as parts and products, uniform in the manufacturing of products using composite materials, etc., thereby contributing to solving the various problems mentioned above. Furthermore, the temperature control device 1 can help maximize the properties of materials through uniform temperature distribution in the development of new synthetic resins, composite materials, etc., thereby enabling the manufacturing of higher performance and more sustainable materials.

[0126] [Manufacturing Using a 3D Printer] In a 3D printer, the heat of the resin ejected from the nozzle causes uneven temperature distribution in the object. This can lead to an uneven cooling process in the object, resulting in deformations such as warping. The temperature control device 1 can make the temperature distribution in the object uniform and prevent such deformations. This makes it possible to manufacture products with more complex shapes and structures with greater precision and reliability. In addition, by making the temperature distribution in the object uniform, the temperature control device 1 contributes to improving the quality of multi-material printing using different types of materials. This is because making the temperature distribution in the object uniform minimizes the interaction between different materials.

[0127] [Material Testing] The properties of materials can change depending on the temperature. Therefore, if the temperature distribution is non-uniform during material testing, there is a concern that the properties may not be measured accurately. The temperature control device 1 contributes to accurate measurement of material properties by making the temperature distribution uniform.

[0128] Solar Panel Manufacturing Solar panels are sensitive to temperature changes, and the temperature control device 1 allows consistent temperature conditions to be maintained across the solar panel during its manufacturing.

[0129] It should be noted that within the scope of the concept of the present invention, those skilled in the art may conceive of various modifications and alterations. Therefore, it is understood that such modifications and alterations fall within the scope of the present invention. For example, even if a person skilled in the art appropriately adds, deletes, or modifies components of the above-described embodiment, or adds, omits, or modifies the conditions of a process, such modifications are also included within the scope of the present invention as long as they maintain the gist of the present invention.

[0130] DESCRIPTION OF SYMBOLS 1 Temperature control device 11 Placement section 111 Placement surface 12 First pipe section 121 First pipe section upper wall 122 First pipe section partition wall 123 First pipe section lower wall 124 First pipe section side wall 125 First flow path 1251 One end of first flow path 1252 Other end of first flow path 13 Second pipe section 131 Second flow path 14 Vibration generating section 141 Prime mover 142 Piston 143 Cylinder 144 First piston chamber 145 Second piston chamber F Working fluid W Workpiece

Claims

1. A temperature control device comprising: a mounting section on which an object to be treated is placed; a first pipe section provided inside the mounting section and having a first flow path formed therein through which a working fluid is introduced; a vibration generating section that vibrates the working fluid in a direction along the first flow path; and a second pipe section having a second flow path formed therein that connects the vibration generating section and the first flow path, wherein, in terms of length heat capacity, which is the heat capacity per unit length in the direction along the flow path, the length heat capacity of the second pipe section is smaller than the length heat capacity of the first pipe section.

2. The temperature control device according to claim 1, wherein the first pipe section is formed so that its shape when viewed from the object to be treated placed on the placement section is serpentine.

3. A temperature control device as described in claim 1, wherein at least a portion of the first pipe section is adjacent to another portion of the first pipe section, and within the first flow path, the direction from one end connected to the second flow path to the other end is opposite at a location corresponding to the one portion and a location corresponding to the other portion.

4. A temperature control device as described in claim 1, wherein at least a portion of the first pipe section is arranged along a direction connecting the central part and the outer periphery of the area in contact with the workpiece in the placement section.

5. A temperature control device according to claim 1, wherein at least a portion of the first pipe section is arranged along the circumferential direction of the area in the placement section that comes into contact with the object to be treated.

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