Attaching / detaching mechanism and article-transporting device

Abstract

An attachment / detachment mechanism according to the present invention is provided to a traction device that pulls a transport cart for transporting articles used in a substrate-related operation machine for performing a prescribed substrate-related operation on a substrate. The attachment / detachment mechanism comprises a linking member capable of linking the traction device and the transport cart, a connection part capable of electrically connecting the traction device and the transport cart to each other, and a control unit capable of controlling the transport cart via the connection part together with control of the attachment / detachment mechanism. The control unit also controls the linking member, supplies a power supply from the traction device to the transport cart, and controls the transport cart.

Description

Attachment / detachment mechanism and article transport device

[0001] This specification discloses techniques relating to an attachment / detachment mechanism and an article transport device.

[0002] The system described in Patent Document 1 may include one or more tools used by the robot. The tools may include, for example, a light, an imaging device (e.g., a camera), a robot arm, a sensor, an actuator, etc. The lifting mechanism described in Patent Document 1 may also include a coupler between the robot and the tool. The coupler provides an electrical, optical, or mechanical connection. Specifically, the robot communicates with the tool via the coupler, supplies power to the tool, and couples the robot to the tool.

[0003] Special table 2018-513817 publication

[0004] Consider a configuration in which a towing device is connected to a transport cart that transports an item, and the towing device tows the transport cart. In this configuration, if a control board that controls the transport cart and a drive power supply for the transport cart are installed on the transport cart itself, a control board, drive power supply, etc. would be required for each transport cart. As a result, the number of parts would increase, which could lead to higher costs.

[0005] In view of the above circumstances, this specification discloses an attachment / detachment mechanism and an article transport device that can simplify the configuration of a transport cart.

[0006] This specification discloses a detachable mechanism provided in a towing device that tows a transport cart that transports an object used in a substrate-related operation machine that performs a predetermined substrate-related operation on a substrate. The detachable mechanism includes a coupling member that can couple the towing device to the transport cart, a connector that can electrically connect the towing device to the transport cart, and a controller that can control the detachable mechanism and the transport cart via the connector. The controller controls the coupling member, supplies power from the towing device to the transport cart, and controls the transport cart.

[0007] This specification also discloses an article transport device including a transport cart for transporting articles used in a substrate-related operation machine that performs a predetermined substrate-related operation on a substrate, a towing device for towing the transport cart, and a detachment mechanism provided on the towing device. The detachment mechanism includes a coupling member for coupling the towing device to the transport cart, a connection part for electrically connecting the towing device to the transport cart, and a control part for controlling the detachment mechanism and the transport cart via the connection part. The control part controls the coupling member, supplies power from the towing device to the transport cart, and controls the transport cart.

[0008] This specification discloses the technical idea of ​​changing "the detachable mechanism according to claim 1" to "the detachable mechanism according to any one of claims 1 to 5" in claim 6 of the claims originally attached to the application (hereinafter referred to as the "original claims"). This specification also discloses the technical idea of ​​changing "the detachable mechanism according to claim 1" to "the detachable mechanism according to any one of claims 1 to 6" in claim 7 of the original claims. This specification also discloses the technical idea of ​​changing "the detachable mechanism according to claim 1" to "the detachable mechanism according to any one of claims 1 to 7" in claim 8 of the original claims.

[0009] According to the above-described detachable mechanism, the control unit of the detachable mechanism provided in the towing device can control the connecting member, supply power from the towing device to the transport cart, and control the transport cart. This simplifies the configuration of the transport cart. The above description of the detachable mechanism also applies to the article transport device.

[0010] 1 is a plan view showing an example of the configuration of production equipment. FIG. 2 is a partial perspective view showing an example of the configuration of a station and a transport cart. FIG. 3 is a perspective view showing an example of a state in which a storage case capable of storing articles is mounted on the transport cart of FIG. 2. FIG. 4 is a perspective view showing another example of a state in which a storage case capable of storing articles is mounted on the transport cart of FIG. 2. FIG. 5 is a perspective view showing an example of a towing device and a detachable mechanism. FIG. 6 is a perspective view showing an example of a towing device having a detachable mechanism mounted on its upper surface. FIG. 7 is a perspective view showing an example of the configuration of the bottom of the transport cart. FIG. 8 is a see-through perspective view of the detachable mechanism in a state in which the towing device is positioned relative to the transport cart. FIG. 9 is a perspective view showing an example of the detachable mechanism in a state in which the connecting member is stored on the upper surface of the towing device. FIG. 10 is a perspective view showing an example of the detachable mechanism in a state in which the connecting member protrudes above the towing device. FIG. 11 is a perspective view showing an example of the bottom of a transport cart to which the connecting member is connected. FIG. 12 is a partial perspective view showing an example of the detachable mechanism before the restriction of the connecting member is released. FIG. 13 is a partial perspective view showing an example of the detachable mechanism after the restriction of the connecting member is released. FIG. 14 is a schematic view showing an example of the configuration of a connecting portion and a connected portion.

[0011] 1. Embodiment 1-1. Configuration Example of Production Equipment 1 The mounting / removal mechanism 80 and the item transport device 90 can be applied to various production equipment 1 that produce product boards. As shown in FIG. 1 , the production equipment 1 of the embodiment includes at least one (four in this figure) component mounting machine 10, an exchange system 30, an item moving device 40, a station group 50, a transport cart 60, a towing device 70, a line control device LC0, a production management device WC0, and a transport management device CC0. The mounting / removal mechanism 80 is provided in the towing device 70. The item transport device 90 includes the transport cart 60, the towing device 70, and the mounting / removal mechanism 80. In the following description, the horizontal width direction of the component mounting machine 10 and the transport direction of the board are defined as the X direction. The horizontal depth direction of the component mounting machine 10 and the direction perpendicular to the X direction in a horizontal plane are defined as the Y direction. The vertical direction perpendicular to the X and Y directions are defined as the Z direction.

[0012] At least one (four) component mounting machines 10 are installed along the board transport direction (X direction). The component mounting machine 10 is included in a board-related operation machine WM0 that performs predetermined board-related operations on boards. The component mounting machine 10 loads a board, positions it at a predetermined position, mounts multiple components on the positioned board, and then removes the board with the mounted components. In other words, the board-related operations performed by the component mounting machine 10 include board loading, positioning, and removal. Furthermore, the board-related operations performed by the component mounting machine 10 also include component supply, picking, and mounting. The board-related operation machine WM0 also includes a printer that prints solder on a board, an inspection machine that inspects boards with printed solder and boards with mounted components, a reflow oven that heats boards with mounted components to bond the components to the board, and so on. The board-related operation machine WM0 is not limited to the component mounting machine 10.

[0013] For example, the component mounting machine 10 is equipped with a component supply device that supplies components to be mounted on a board. The component supply device is provided with a plurality of detachable feeders 20. The feeders 20 are included in the item AR0 used in the component supply operation by the component mounting machine 10. The component supply device also has at least one slot that can accommodate the plurality of feeders 20. The component supply device of the embodiment is provided at two positions, a first position and a second position.

[0014] The first position operably holds the installed feeder 20. The operation of the feeder 20 installed at the first position is controlled by the component mounting machine 10 during work on boards, and components are sequentially supplied to a take-out section provided at a predetermined position on the feeder 20. The second position is located below the first position and stocks the installed feeder 20. In other words, the second position holds the feeder 20 used in production as a backup and temporarily holds the feeder 20 used in production.

[0015] The operation of replacing the feeder 20 between the first position and the second position, and the operation of replenishing and recovering the feeder 20 are performed using an exchange system 30 and an article moving device 40. Specifically, as shown in FIG. 1 , the exchange system 30 includes a first rail 31 and a second rail 32. The first rail 31 and the second rail 32 form a travel path for the article moving device 40. The first rail 31 and the second rail 32 are provided along the arrangement direction of at least one (four) component mounting machine 10 (the board transport direction (X direction)). The first rail 31 and the second rail 32 extend across substantially the entire area of ​​the production facility 1 in the board transport direction (X direction).

[0016] The article moving device 40 is provided so as to be able to travel along a travel path formed by a first rail 31 and a second rail 32. The article moving device 40 receives power from a power transmitting unit provided on the first rail 31 via a power receiving unit provided opposite the power transmitting unit through contactless power supply. The power received by the power receiving unit is used for the travel of the article moving device 40, predetermined work, etc., via a power receiving circuit. The article moving device 40 detects its position (current position) on the travel path, for example, using a position detection device. The position detection device can detect the position (current position) of the article moving device 40 on the travel path, for example, by optical position detection, position detection using electromagnetic induction, etc.

[0017] The above-mentioned predetermined operations also include an exchange operation in which equipment detachably provided on the substrate-related operation machine WM0, such as the component mounting machine 10, is exchanged between the substrate-related operation machine WM0 and the component mounting machine WM0. In the embodiment, the article moving device 40 performs an exchange operation of the feeder 20, which is the feeder 20 that supplies components to be mounted on a board, between the article moving device 40 and the component mounting machine 10, which is the substrate-related operation machine WM0. The article moving device 40 can also perform an exchange operation of the feeder 20 between the station group 50 and the station group 50.

[0018] Specifically, the article moving device 40 performs a feeder 20 replacement operation between a first position and a second position of the component supply device of the component mounting machine 10. The article moving device 40 also transports the feeder 20 from the station group 50 to the first position or the second position of the component supply device to perform a feeder 20 replenishment operation. Furthermore, the article moving device 40 transports the feeder 20 that is no longer needed by the component mounting machine 10 from the component supply device to the station group 50 to perform a feeder 20 recovery operation.

[0019] The station group 50 is provided on the substrate carry-in side (left side of the drawing in FIG. 1 ) of the production facility 1. As shown in FIGS. 1 and 2 , the station group 50 is provided with at least one station 50s (two in the drawing) that can transfer an item AR0 used in a substrate-related operation machine WM0 such as a feeder 20. The station 50s may take various forms as long as it can transfer the item AR0. For example, the station 50s is equipped with a plurality of rollers and can transfer the item AR0 from a transport cart 60 and can transfer the item AR0 to the transport cart 60.

[0020] The station 50s can also store a storage case AC0 shown in FIG. 3 that can store an item AR0. In this case, the station 50s can also use a plurality of rollers to load the storage case AC0 from a transport cart 60 and load the storage case AC0 back to the transport cart 60. The storage case AC0 may have, for example, a plurality of slots, each of which can be equipped with a feeder 20. The feeder 20 installed in the slot of the storage case AC0 loaded into the station 50s is supplied with power from the station 50s via the storage case AC0, and becomes capable of communicating with the line control device LC0. As a result, the identification information of the slot of the storage case AC0 and the feeder 20 installed in that slot are associated and recorded in the line control device LC0.

[0021] The transport cart 60 transports an item AR0 used in the substrate-related performing operation machine WM0. In this embodiment, the transport cart 60 transports the item AR0 to or from the station 50s. The transport of the item AR0 by the transport cart 60 is not limited to the station 50s; if possible, the transport cart 60 may transport the item AR0 directly to or from the substrate-related performing operation machine WM0. The transport cart 60 may take various forms as long as it can transport the item AR0. For example, as shown in FIGS. 2 and 3 , the transport cart 60 includes a main body 60a, a loading platform 60b, and multiple (e.g., four) wheels 60c. The loading platform 60b is provided on top of the main body 60a and can carry the item AR0. Furthermore, as shown in FIG. 3 , the loading platform 60b can also carry a storage case AC0 capable of accommodating the item AR0.

[0022] The loading platform 60b is equipped with a plurality of rollers 60b1 and is capable of carrying the item AR0 into the station 50s and carrying the item AR0 out of the station 50s. The loading platform 60b is also capable of carrying the storage case AC0 into the station 50s and carrying the storage case AC0 out of the station 50s. The loading platform 60b secures the item AR0 or the storage case AC0 except when carrying the item AR0 or the storage case AC0 in or out. When carrying the item AR0 or the storage case AC0 in or out, the loading platform 60b releases the securement of the item AR0 or the storage case AC0.

[0023] A plurality of (four) wheels 60c are provided on the lower part of the main body 60a, and the transport cart 60 is towed by a traction device 70. Specifically, the traction device 70 is connected to the main body 60a so as to be able to tow the transport cart 60 when the traction device 70 is inserted below the main body 60a. The traction device 70 is not limited as long as it is capable of automatic travel. For example, a known automatic guided vehicle (AGV), an autonomous mobile robot (AMR), or the like can be used as the traction device 70.

[0024] The line control device LC0 is configured to be able to input and output various data via a network to and from each device that makes up the production facility 1. The line control device LC0 monitors the operating status of the production facility 1, and controls the substrate-related operation machine WM0 such as the component mounting machine 10, the exchange system 30, the article moving device 40, and the station group 50. The line control device LC0 stores various data for controlling the substrate-related operation machine WM0, the exchange system 30, the article moving device 40, and the station group 50.

[0025] The production control device WC0 can manage at least one (one in the figure) production facility 1. The production control device WC0 is configured to be able to communicate with the line control device LC0 of at least one (one) production facility 1, and manages the production of product boards by at least one (one) production facility 1. The transport control device CC0 can manage the transport carts 60 and the towing devices 70.

[0026] The transport management device CC0 is capable of communicating with the transport cart 60, the towing device 70, the line control device LC0, and the production management device WC0, and controls the transport cart 60 to travel and transfer the item AR0 according to the production status of the product boards in the production facility 1. For example, if the towing device 70 is an autonomous transport robot, the towing device 70 can move while recognizing its own position in the production facility 1 using a known camera, sensor, or the like. If the towing device 70 is an unmanned transport vehicle, the towing device 70 can move using a guide unit such as a magnetic tape, for example.

[0027] When the transport cart 60 arrives at the target station 50s, it sends the item AR0 or storage case AC0 to the station 50s, and the station 50s receives the item AR0 or storage case AC0 from the transport cart 60. The station 50s can also send the item AR0 or storage case AC0 to the transport cart 60, and the transport cart 60 can also receive the item AR0 or storage case AC0 from the station 50s.

[0028] Furthermore, the transport cart 60 can send the item AR0 or storage case AC0 to one station 50s, move to another station 50s, and receive the item AR0 or storage case AC0 from the station 50s. The transport cart 60 can also receive the item AR0 or storage case AC0 from one station 50s, move to the other station 50s, and send the item AR0 or storage case AC0 received from the first station 50s to the other station 50s. The item AR0 can be delivered while it is housed in the storage case AC0, or it can be delivered without being housed in the storage case AC0.

[0029] Furthermore, the item AR0 is not limited to the feeder 20. The item AR0 may be, for example, a mask used in solder printing, a substrate support member capable of supporting a substrate, or the like. As shown in FIG. 4 , for example, the mask can be transported in a storage case AC0 and transferred in the storage case AC0. In this case, the transfer mechanism provided on the side of the station 50s can grasp the storage case AC0 containing the mask and transfer it from the transport cart 60 to the station 50s. Furthermore, the transfer mechanism provided on the side of the station 50s can grasp the storage case AC0 containing the mask and transfer it from the station 50s to the transport cart 60.

[0030] 1-2. Configuration Example of the Attachment / Detachment Mechanism 80 The attachment / detachment mechanism 80 is provided on the towing device 70 that tows the transport cart 60. As shown in Figures 5 and 6, for example, the attachment / detachment mechanism 80 is provided on the upper surface 70u of the towing device 70. As shown in Figures 3 and 4, for example, the attachment / detachment mechanism 80 allows the towing device 70 to enter below the transport cart 60 and be positioned relative to the transport cart 60, and can also connect the towing device 70 and the transport cart 60.

[0031] The detachment mechanism 80 may take various forms as long as it can connect the towing device 70 and the transport cart 60. For example, the detachment mechanism 80 may include a connecting member 81 and a driving unit 82. The detachment mechanism 80 may also include a moving mechanism 80s and a guiding mechanism 80g. The detachment mechanism 80 may also include a guided member 83. The detachment mechanism 80 may also include a connecting unit 84. The detachment mechanism 80 may also include a control unit 85. The detachment mechanism 80 may also include a wireless communication device 86. As shown in FIGS. 5 and 6 , the detachment mechanism 80 of this embodiment includes a connecting member 81, a driving unit 82, a moving mechanism 80s, a guiding mechanism 80g, a guided member 83, a connecting unit 84, a control unit 85, and a wireless communication device 86.

[0032] The same applies to the transport cart 60, which may take various forms. For example, the transport cart 60 may include a forward guide member 61. The transport cart 60 may also include a backward guide member 62. The transport cart 60 may also include a connected portion 63. The transport cart 60 may also include a sensor 64. The transport cart 60 may also include a transfer mechanism 65. As shown in FIGS. 2 , 3 , and 7 , the transport cart 60 of the embodiment includes a forward guide member 61, a backward guide member 62, a connected portion 63, a sensor 64, and a transfer mechanism 65. The features described in this specification may be selected and applied as appropriate. The features described in this specification may also be combined as appropriate.

[0033] As shown in FIG. 6 , for example, the detachable mechanism 80 can include a connecting member 81 and a drive unit 82. The connecting member 81 is a member capable of connecting the towing device 70 and the detachable mechanism 80. The drive unit 82 drives the connecting member 81. In this embodiment, the connecting member 81 protrudes above the towing device 70 and can be connected to the transport cart 60. The drive unit 82 drives the connecting member 81 to protrude from the upper surface 70u of the towing device 70. In the above embodiment, the drive unit 82 drives the connecting member 81 to protrude above the towing device 70, so that the towing device 70 is positioned relative to the transport cart 60 and the connecting member 81 is connected to the transport cart 60. The connecting member 81 and the drive unit 82 can take various forms.

[0034] The same applies to positioning, and various configurations can be used to position the towing device 70 relative to the transport cart 60. For example, as shown in Fig. 7, the transport cart 60 can be provided with a travel direction side guide member 61. The travel direction side guide member 61 is a member that is provided above the towing device 70 on the travel direction side (arrow FS0 side) when the transport cart 60 is connected to the towing device 70, and guides the towing device 70 to a predetermined position when positioning the towing device 70 in the forward / backward direction (arrow FB0 direction).

[0035] In the above embodiment, as shown in Fig. 6, the attachment / detachment mechanism 80 can include a guided member 83. The guided member 83 is a member provided on the traveling direction side (arrow FS0 side) of the towing device 70, and is guided by the traveling direction-side guiding member 61. In this embodiment, as shown in Fig. 8, when the towing device 70 enters below the transport cart 60, the guided member 83 is guided by the traveling direction-side guiding member 61, and the towing device 70 is positioned at a predetermined position in the traveling / retreating direction (arrow FB0 direction).

[0036] The forward direction guiding member 61 and the guided member 83 may take various forms as long as they can position the traction device 70 relative to the transport cart 60 as described above. For example, as shown in Figures 6 and 7, the forward direction guiding member 61 and the guided member 83 may each be V-shaped. The forward direction guiding member 61 is provided on the bottom 60d of the transport cart 60 together with the backward direction guiding member 62 and the connected portion 63, which will be described later. In this case, the V-shaped guided member 83 is guided by the forward direction guiding member 61, which is also V-shaped, and the traction device 70 is positioned at a predetermined position in the forward / backward direction (the direction of arrow FB0).

[0037] As shown in Figures 6 and 7, the travel direction guiding member 61 and the guided member 83 can be provided symmetrically in the advancing / retreating direction (direction of arrow FB0) of the traction device 70. The travel direction guiding member 61 and the guided member 83 can be formed into similar V-shapes. In this case, as shown in Figure 8, the guided member 83 can be in close surface contact with the travel direction guiding member 61. The predetermined position corresponds to the position in the advancing / retreating direction (direction of arrow FB0) of the traction device 70 when the guided member 83 is in surface contact with the travel direction guiding member 61.

[0038] 6 to 8 , for example, each of the travel direction side guiding member 61 and the guided member 83 can be formed in a V shape so as to gradually narrow in width toward the travel direction (direction of arrow FD0) of the traction device 70. Also, each of the travel direction side guiding member 61 and the guided member 83 can be formed in a V shape so as to gradually widen in width toward the travel direction (direction of arrow FD0) of the traction device 70. In other words, each of the travel direction side guiding member 61 and the guided member 83 can be formed in a V shape so as to gradually change in width toward the travel direction (direction of arrow FD0) of the traction device 70.

[0039] 7, the transport cart 60 may also include a rearward direction guide member 62. The rearward direction guide member 62 is a member that is provided above the towing device 70 on the rearward direction side (arrow BS0 side) when the transport cart 60 is coupled to the towing device 70, and guides the towing device 70 to a specified position in positioning the towing device 70 in the width direction (arrow WD0 direction) perpendicular to the forward / backward direction (arrow FB0 direction) of the towing device 70 on a horizontal plane.

[0040] 9 and 10 , after the traction device 70 is positioned at a predetermined position in the forward / backward direction (direction of arrow FB0), the drive unit 82 moves the connecting member 81 in the backward direction (direction of arrow BD0) of the traction device 70, causing the connecting member 81 to protrude above the traction device 70. In this embodiment, as shown in FIG. 11 , when the connecting member 81 protruding above the traction device 70 moves in the backward direction (direction of arrow BD0) of the traction device 70, the connecting member 81 is guided by the backward direction guide member 62 and is positioned at a predetermined position in the width direction (direction of arrow WD0).

[0041] The reverse direction guide member 62 may take various forms as long as it can position the traction device 70 relative to the transport cart 60 as described above. As shown in FIG. 7 , for example, the reverse direction guide member 62 may include a tapered portion 62a formed in a V-shape. In this case, as shown in FIG. 11 , the connecting member 81 protruding upward from the traction device 70 is guided by the tapered portion 62a formed in a V-shape, and the traction device 70 is positioned at a predetermined position in the width direction (direction of arrow WD0). Furthermore, the connecting member 81 protruding upward from the traction device 70 is guided along the tapered portion 62a and connected to the reverse direction guide member 62.

[0042] As shown in Fig. 7, the tapered portion 62a formed in a V-shape can be provided symmetrically in the forward / backward direction (direction of arrow FB0) of the traction device 70. The specified position corresponds to the position in the width direction (direction of arrow WD0) of the traction device 70 in a state where the connecting member 81 protruding upward from the traction device 70 is connected to the backward direction guide member 62. As shown in Figs. 7 and 11, for example, the tapered portion 62a can be formed in a V-shape so as to gradually narrow in width toward the backward direction (direction of arrow BD0) of the traction device 70.

[0043] Furthermore, if the tip of the connecting member 81 protruding above the traction device 70 is formed in a V shape, the tapered portion 62a can also be formed in a V shape so as to gradually widen in the retreat direction (arrow BD0 direction) of the traction device 70. In other words, the tapered portion 62a can be formed in a V shape so that the width gradually changes in the retreat direction (arrow BD0 direction) of the traction device 70.

[0044] The drive unit 82 can cause the connecting member 81 to protrude above the towing device 70 by various methods, and the manner in which the connecting member 81 protrudes above the towing device 70 is not limited. For example, the drive unit 82 can cause the connecting member 81 to protrude above the towing device 70 by using a biasing member 82s such as a spring. For example, the biasing member 82s can apply a biasing force to the connecting member 81 in the traveling direction of the towing device 70 (the direction of arrow FD0). However, as shown in FIG. 9 , the connecting member 81 stored in the upper surface 70u of the towing device 70 is restricted from protruding above the towing device 70 by the biasing member 82s.

[0045] 10 , when the drive unit 82 moves the connecting member 81 in the backward direction (direction of arrow BD0) of the towing device 70, the drive unit 82 releases the restriction on the connecting member 81, causing the connecting member 81 to protrude above the towing device 70. For example, the drive unit 82 can release the restriction on the connecting member 81 just before the position (release position) where the backward direction guide member 62 of the transport cart 60 is provided in the forward / backward direction (direction of arrow FB0) of the towing device 70, causing the connecting member 81 to protrude above the towing device 70. For example, the drive unit 82 can include a motor 82a. The attachment / detachment mechanism 80 can include a movement mechanism 80s and a guide mechanism 80g.

[0046] The moving mechanism 80s uses the power of the motor 82a to move the connecting member 81 in the forward / backward direction of the traction device 70 (the direction of the arrow FB0). The motor 82a and the moving mechanism 80s are not limited as long as they can move the connecting member 81 as described above. The moving mechanism 80s may be, for example, a known sliding mechanism such as a belt mechanism. For example, as shown in FIG. 12 , the moving mechanism 80s includes a pulley 80sp and a belt 80sb. The connecting member 81 is connected to the belt 80sb of the moving mechanism 80s. As the motor 82a rotates, the belt 80sb moves, moving the connecting member 81 in the backward direction of the traction device 70 (the direction of the arrow BD0). The guide mechanism 80g guides the operating member 81a provided on the connecting member 81 as the moving mechanism 80s moves, preventing the connecting member 81 from protruding upward, until the moving mechanism 80s moves to a release position in the forward / backward direction of the traction device 70 (the direction of the arrow FB0).

[0047] As shown in Figures 12 and 13, the actuating member 81a may be, for example, a pin member. The actuating member 81a moves together with the connecting member 81 in the backward direction of the traction device 70 (in the direction of arrow BD0) until it reaches the release position. As shown in Figure 12, when the connecting member 81 reaches the release position, the actuating member 81a rides up onto the guide mechanism 80g. The actuating member 81a then moves along an inclined surface provided on the guide mechanism 80g and slides downward. This allows the connecting member 81 to rotate about the rotation shaft 81b, and the restriction on the connecting member 81 is released.

[0048] 13 , when the restriction on the connecting member 81 is released, the connecting member 81 is rotated by the biasing member 82s, and the connecting member 81 protrudes above the towing device 70. In this way, when the moving mechanism 80s moves the connecting member 81 in the backward direction of the towing device 70 (the direction of the arrow BD0), the restriction on the connecting member 81 by the guide mechanism 80g is released at the release position, and the connecting member 81 is rotated by the biasing member 82s, and the connecting member 81 protrudes above the towing device 70.

[0049] The detachable mechanism 80 may include a connecting portion 84. The connecting portion 84 refers to a portion capable of electrically connecting the towing device 70 and the transport cart 60. In this case, the transport cart 60 may include a connected portion 63. The connected portion 63 refers to a portion that is electrically connected to the connecting portion 84. The connecting portion 84 and the connected portion 63 may be formed using connecting members that are mechanically and electrically connectable, such as connectors. The connecting portion 84 and the connected portion 63 may also be formed using connecting members that are electrically connectable without contact, such as optical communication or contactless power supply.

[0050] For example, as shown in FIG. 8 , the drive unit 82 can move the connecting portion 84 in the traveling direction of the towing device 70 (direction of arrow FD0) to electrically connect the connecting portion 84 to the connected portion 63. Furthermore, the connecting portion 84 and the connected portion 63 can be connected at a timing different from the timing at which the towing device 70 and the transport cart 60 are coupled, but it is preferable to connect them at the same timing as the timing at which the towing device 70 and the transport cart 60 are coupled. As described above, the drive unit 82 includes a motor 82a, and the attachment / detachment mechanism 80 includes a moving mechanism 80s. In this case, the moving mechanism 80s can use the power of the motor 82a to move the coupling member 81 in the retreating direction of the towing device 70 (direction of arrow BD0) and move the connecting portion 84 in the traveling direction of the towing device 70 (direction of arrow FD0).

[0051] 12 and 13 , a connecting member 81 is connected to a lower belt 80sb of the moving mechanism 80s, and the belt 80sb moves with the rotation of the motor 82a, moving the connecting member 81 in the backward direction (arrow BD0 direction) of the towing device 70. A connecting portion 84 is connected to an upper belt 80sb of the moving mechanism 80s, and the belt 80sb moves with the rotation of the motor 82a, moving the connecting member 81 in the forward direction (arrow FD0 direction) of the towing device 70. As a result, the connecting portion 84 and the connected portion 63 are connected at the same timing as the towing device 70 and the transport cart 60 are connected.

[0052] Furthermore, a floating connector FC0 can be used when a connecting member that can be mechanically and electrically connected, such as a connector, is used for the connecting portion 84 and the connected portion 63. For example, as shown in Fig. 14, in the floating connector FC0, the connected portion 63 is provided so that it cannot move relative to the connecting portion 84, and the connecting portion 84 is provided so that it can move relative to the connecting portion 84 in a plane 80p that is perpendicular to the connection direction with the connected portion 63 (the direction of arrow CN0). This facilitates mechanical connection between the connecting portion 84 and the connected portion 63.

[0053] The drive unit 82 can move the connecting member 81 protruding above the towing device 70 in the traveling direction of the towing device 70 (the direction of the arrow FD0) while storing the connecting member 81 in the upper surface 70u of the towing device 70, thereby releasing the connection between the towing device 70 and the transport cart 60. As described above, for example, the drive unit 82 includes a motor 82a, and the attachment / detachment mechanism 80 includes a moving mechanism 80s and a guide mechanism 80g. The drive unit 82 rotates the motor 82a in a direction opposite to the rotation direction of the motor 82a when moving the connecting member 81 in the retreating direction of the towing device 70 (the direction of the arrow BD0). This allows the drive unit 82 to move the connecting member 81 protruding above the towing device 70 in the traveling direction of the towing device 70 (the direction of the arrow FD0).

[0054] The connecting member 81 protruding above the towing device 70 moves in the direction of travel of the towing device 70 (in the direction of arrow FD0) to a release position. When the connecting member 81 reaches the release position, the operating member 81a moves along an inclined surface provided on the guide mechanism 80g and rides up onto the guide mechanism 80g. This causes the connecting member 81 to rotate about the rotation shaft 81b in the direction opposite to that at the time of release and be housed in the upper surface 70u of the towing device 70. The connecting member 81 housed in the upper surface 70u of the towing device 70 is restricted from protruding upward from the towing device 70 by the biasing member 82s. The connecting member 81 and the operating member 81a then move further in the direction of travel of the towing device 70 (in the direction of arrow FD0) beyond the release position and return to their pre-release states.

[0055] As shown in Fig. 3, for example, the transport cart 60 can transport the feeder 20. Furthermore, as shown in Fig. 4, the transport cart 60 can also transport a mask. The transport cart 60 can transport not only the feeder 20 and the mask, but also various other items AR0 used in the substrate-related performing machine WM0. Thus, different types of items AR0 to be transported may have different shapes, weights, etc., and multiple types of transport carts 60 capable of transporting different types of items AR0 may be used.

[0056] In this case, for example, if the arrangement of the backward direction guide members 62 in the transport carts 60 differs, multiple types of attachment / detachment mechanisms 80 are required that match the arrangement of the backward direction guide members 62. Similarly, if the arrangement of the connected parts 63 in the transport carts 60 differs, multiple types of attachment / detachment mechanisms 80 are required that match the arrangement of the connected parts 63. Therefore, when multiple types of transport carts 60 that can transport different types of articles AR0 are provided, it is preferable that the arrangement of the backward direction guide members 62 in the transport carts 60 and the arrangement of the connected parts 63 in the transport carts 60 are the same for each of the multiple types of transport carts 60.

[0057] As a result, the towing device 70 can be connected to multiple types of transport carts 60 using one type of attachment / detachment mechanism 80. The same applies to the arrangement of the forward direction guide members 61 on the transport carts 60. In other words, the arrangement of the forward direction guide members 61 on the transport carts 60, the arrangement of the backward direction guide members 62 on the transport carts 60, and the arrangement of the connected portions 63 on the transport carts 60 may be the same for each of the multiple types of transport carts 60.

[0058] The production facility 1 may also be equipped with one type of transport cart 60. In this case, the towing device 70 can be connected to one type of transport cart 60 using one type of attachment / detachment mechanism 80. In other words, the types of transport carts 60 may be the same or different. When the production facility 1 is equipped with multiple transport carts 60, for example, while a worker is using one transport cart 60 to transport an item AR0, he or she can use another transport cart 60 to prepare for transport of the item AR0.

[0059] In this way, when multiple transport carts 60 are used, if a control board for controlling the transport carts 60 and a drive power supply for the transport carts 60 are provided on the transport carts 60, a control board, drive power supply, etc. are required for each transport cart 60. As a result, the number of parts increases, which may lead to increased costs. The above-mentioned problem becomes more pronounced as the number of transport carts 60 used increases. Therefore, the attachment / detachment mechanism 80 provided on the towing device 70 is equipped with a control unit 85.

[0060] The control unit 85 is a component that can control the attachment / detachment mechanism 80 and the transport cart 60 via the connection unit 84. Specifically, the control unit 85 controls the coupling member 81, supplies power from the towing device 70 to the transport cart 60, and controls the transport cart 60. The control unit 85 may take various forms as long as it can perform the above control and power supply. For example, the control unit 85 can drive and control the drive unit 82 to control the coupling member 81, as described above. This allows the attachment / detachment mechanism 80 to couple the towing device 70 to the transport cart 60 and to release the coupling between the towing device 70 and the transport cart 60. In other words, the control unit 85 can control the attachment / detachment of the towing device 70 to the transport cart 60.

[0061] As already described, the detachable mechanism 80 includes a connecting portion 84, and the transport cart 60 includes a connected portion 63. The control unit 85 electrically connects the connecting portion 84 to the connected portion 63, thereby supplying power from the towing device 70 to the transport cart 60 and controlling the transport cart 60. The control unit 85 also controls the coupling member 81 to couple the towing device 70 and the transport cart 60, and electrically connects the connecting portion 84 to the connected portion 63, thereby supplying power from the towing device 70 to the transport cart 60 and controlling the transport cart 60. In either case, the control unit 85 controls the drive unit 82, as already described.

[0062] As shown in FIG. 14 , the connecting portion 84 and the connected portion 63 include a power connection portion C1 and a signal connection portion C2. A power line capable of transmitting electric power is connected to the power connection portion C1. For example, power (driving power) can be supplied to the transport cart 60 from a battery of the towing device 70 via the power connection portion C1, eliminating the need for a power source to be mounted on the transport cart 60. The transport cart 60 can operate various devices using the driving power supplied from the towing device 70. For example, the transport cart 60 can operate a sensor 64, a handover mechanism 65, and the like, which will be described later, using the driving power supplied from the towing device 70.

[0063] A signal line capable of transmitting a control signal is connected to the signal connection portion C2. The control portion 85 can control the transport cart 60 via the signal connection portion C2 of the connection portion 84. The control of the transport cart 60 is not limited. For example, the control portion 85 can control the sensor 64, the transfer mechanism 65, etc., which will be described later, via the signal connection portion C2 of the connection portion 84. The control portion 85 can also control the operation panel 80c, which can be operated by an operator, via the signal connection portion C2 of the connection portion 84. The control portion 85 can also supply power from the traction device 70 to the transport cart 60 via contactless power supply. The control portion 85 can also control the transport cart 60 via wireless communication.

[0064] The control unit 85 can perform various controls of the attachment / detachment mechanism 80, including control of the connecting member 81. The control of the attachment / detachment mechanism 80 includes communication control using a wireless communication device 86. The wireless communication device 86 is a device capable of wireless communication with the station 50s of the substrate-related performing machine WM0 that transfers the item AR0. The wireless communication device 86 only needs to be able to wirelessly communicate with the station 50s, and the communication method is not limited. For example, the wireless communication device 86 can communicate with the station 50s using non-directional wireless communication such as infrared communication or wireless communication used for radio frequency identification (RFID).

[0065] The wireless communication device 86 can also wirelessly communicate with the station 50s via optical communication. Optical communication is directional wireless communication, which improves transmission efficiency compared to the non-directional wireless communication described above, and is less susceptible to noise during reception, improving reception sensitivity. Optical communication can also be initiated with the transport cart 60 before it arrives at the target station 50s. Therefore, the wireless communication device 86 of the embodiment wirelessly communicates with the station 50s via optical communication. The control unit 85 can use the wireless communication device 86 to transmit and receive various information to and from the station 50s.

[0066] For example, the control unit 85 can use the wireless communication device 86 to confirm whether the transport cart 60 and the towing device 70 have arrived at the target station 50s. The control unit 85 can also use the wireless communication device 86 to transmit information about the transport cart 60 (e.g., the type of transport cart 60, etc.) and information about the items AR0 loaded on the transport cart 60 (e.g., the type, loading method, and number of items AR0 loaded, etc.) to the station 50s. The control unit 85 can also use the wireless communication device 86 to receive information about the station 50s (e.g., the method of delivery of the items AR0, etc.) from the station 50s.

[0067] The control unit 85 can also use the wireless communication device 86 to notify the station 50s that the transport cart 60 is ready to transfer the item AR0. The control unit 85 can also use the wireless communication device 86 to confirm that the station 50s is ready to transfer the item AR0. The control unit 85 can also use the wireless communication device 86 to confirm the transfer status of the item AR0. The control unit 85 can also use the wireless communication device 86 to confirm that the transfer of the item AR0 between the station 50s and the control unit 85 has been completed.

[0068] The transport cart 60 may be equipped with a sensor 64 that detects events occurring during the transport of the item AR0. In this case, the control unit 85 can control the sensor 64 to detect the events and receive the detection results detected by the sensor 64. The sensor 64 is not limited as long as it can detect events occurring during the transport of the item AR0. For example, the control unit 85 needs to confirm that the transport cart 60 has arrived at station 50s of the substrate-related performing machine WM0, which transfers the item AR0. The control unit 85 also needs to confirm that the item AR0 is loaded on the transport cart 60.

[0069] Therefore, the sensor 64 may be at least one of an arrival sensor 64a and a presence sensor 64b. The arrival sensor 64a detects that the transport cart 60 has arrived at the station 50s of the substrate-related performing machine WM0, which transfers the item AR0. The presence sensor 64b detects that the item AR0 is loaded on the transport cart 60. As shown in FIGS. 2 to 4, the transport cart 60 of this embodiment is equipped with both the arrival sensor 64a and the presence sensor 64b.

[0070] In this case, the control unit 85 controls the arrival sensor 64a to detect the arrival of the transport cart 60 and receives the detection result detected by the arrival sensor 64a. The control unit 85 also controls the presence sensor 64b to detect the loading of the item AR0 and receives the detection result detected by the presence sensor 64b. The arrival sensor 64a and the presence sensor 64b may take various forms as long as they are capable of detecting the above events. For example, the arrival sensor 64a is provided on the transport cart 60 connected to the towing device 70, in the direction of travel of the towing device 70 (the direction of arrow FS0).

[0071] The arrival sensor 64a uses, for example, a light shielding sensor or a proximity sensor to detect a contact state in which a cart-side contact portion provided on the transport cart 60 is in contact with a station-side contact portion provided on the station 50s, or a separation state in which the cart-side contact portion and the station-side contact portion are separated from each other. In this configuration, the arrival sensor 64a detects the contact state when the transport cart 60 arrives at the station 50s of the substrate-related performing machine WM0 that delivers the item AR0. The arrival sensor 64a detects the separation state when the transport cart 60 has not yet arrived at the station 50s of the substrate-related performing machine WM0 that delivers the item AR0.

[0072] Furthermore, for example, the presence sensor 64b is provided on the transport cart 60 connected to the towing device 70, on the side in the backward direction of the towing device 70 (the side in the direction of arrow BS0). The presence sensor 64b detects the presence or absence of the item AR0 or the storage case AC0 that stores the item AR0 on the loading platform 60b using, for example, a light blocking sensor or a proximity sensor. The presence sensor 64b can also be provided on the transport cart 60 connected to the towing device 70, on the side in the forward direction of the towing device 70 (the side in the direction of arrow FS0). In this configuration, the presence sensor 64b can also detect whether the item AR0 is protruding or whether the item AR0 stored in the storage case AC0 is protruding.

[0073] 2 and 3, the transport cart 60 can be equipped with a transfer mechanism 65 that transfers the item AR0. The previously described loading platform 60b is equipped with a plurality of rollers 60b1, which are included in the transfer mechanism 65. In this case, the control unit 85 controls the transfer mechanism 65 to transfer the item AR0. Specifically, the control unit 85 drives and controls the plurality of rollers 60b1 to carry the item AR0 into the station 50s and to carry the item AR0 out of the station 50s.

[0074] The control unit 85 can also drive and control the rollers 60b1 to carry the storage case AC0 containing the item AR0 into the station 50s, and can also carry the storage case AC0 containing the item AR0 out of the station 50s. For example, the feeder 20 can transfer the item to and from the station 50s in the above-described manner while being housed in the storage case AC0 shown in FIG. 3.

[0075] 4, for example, a mask is stored in a storage case AC0 that is mounted on a loading platform 60b via an attachment 60t. In this case, the transfer mechanism provided on the side of the station 50s can grasp the storage case AC0 containing the mask and carry it into the station 50s from the transport cart 60. The transfer mechanism provided on the side of the station 50s can also grasp the storage case AC0 containing the mask and carry it out of the station 50s to the transport cart 60.

[0076] In this way, the transport cart 60 may have different methods for transferring the item AR0 depending on the type of the item AR0. In this case, the control unit 85 changes the method for transferring the item AR0 depending on the type of the item AR0 to be transferred. In the above example, when transferring the feeder 20, the control unit 85 controls the transfer mechanism 65 to transfer the feeder 20. In contrast, when transferring a mask, the control unit 85 requests the station 50s to transfer the mask. The request for transferring the mask can be made using the wireless communication device 86 already described.

[0077] 1-3. Example of Configuration of Item Transport Apparatus 90 The item transport apparatus 90 includes the transport cart 60, the towing device 70, and the detachment mechanism 80, which have already been described. The detachment mechanism 80 also includes the coupling member 81, the connection unit 84, and the control unit 85, which have already been described. The control unit 85 also controls the coupling member 81, supplies power from the towing device 70 to the transport cart 60, and controls the transport cart 60. Therefore, what has been described above regarding the detachment mechanism 80 also applies to the item transport apparatus 90. Note that duplicated explanations will be omitted in this specification.

[0078] 2. Example of Effect of the Embodiment According to the detachment mechanism 80, the control unit 85 of the detachment mechanism 80 provided in the towing device 70 can control the connecting member 81, supply power from the towing device 70 to the transport cart 60, and control the transport cart 60. This simplifies the configuration of the transport cart 60. What has been described above about the detachment mechanism 80 can also be said about the item transport device 90.

[0079] 3. Other Configurations For example, the detachable mechanism 80 may be provided on the side of the towing device 70. In this case, the towing device 70 translates laterally relative to the transport cart 60, and the detachable mechanism 80 connects the towing device 70 to the transport cart 60. In this configuration, in the above description, "the upper surface 70u of the towing device 70" should be read as "the side surface of the towing device 70." Also, in the above description, "the towing device 70 enters below the transport cart 60" should be read as "the towing device 70 translates laterally relative to the transport cart 60." Furthermore, in the above description, "above the towing device 70" should be read as "to the side of the towing device 70." The same applies to the article transport device 90 equipped with the above-described detachable mechanism 80.

[0080] 50s: Station, 60: Transport cart, 63: Connected part, 64: Sensor, 64a: Arrival sensor, 64b: Presence sensor, 65: Transfer mechanism, 70: Traction device, 80: Attachment / detachment mechanism, 81: Linking member, 84: Connection part, 85: Control unit, 86: Wireless communication device, 90: Article transport device, AR0: Article, WM0: Substrate-related operation machine.

Claims

1. A detachable mechanism provided in a towing device that tows a transport cart that transports items used in a substrate-related operation machine that performs specified substrate-related operations on substrates, comprising: a coupling member that can couple the towing device and the transport cart; a connection part that can electrically connect the towing device and the transport cart; and a control part that can control the towing device and the transport cart via the connection part, and also control the towing device and the transport cart, wherein the control part controls the coupling member, supplies power from the towing device to the transport cart, and controls the transport cart.

2. The attachment / detachment mechanism according to claim 1, further comprising a wireless communication device capable of wireless communication with a station of the substrate-related operation machine that transfers the article.

3. The attachment / detachment mechanism according to claim 2, wherein the wireless communication device wirelessly communicates with the station by optical communication.

4. The transport cart is equipped with a sensor that detects events that occur in relation to the transport of the item, and the control unit controls the sensor to detect the events and receives the detection results detected by the sensor. A detachment mechanism as described in any one of claims 1 to 3.

5. The attachment / detachment mechanism according to claim 4, wherein the sensor is at least one of an arrival sensor that detects that the transport cart has arrived at the station of the substrate-related operation machine that transfers the item, and a presence sensor that detects that the item is loaded on the transport cart.

6. The attachment / detachment mechanism according to claim 1, wherein the transport cart is provided with a transfer mechanism for transferring the article, and the control unit controls the transfer mechanism to transfer the article.

7. The attachment / detachment mechanism according to claim 1, wherein the transport cart has a method of transferring the item that differs depending on the type of the item, and the control unit changes the method of transferring the item depending on the type of the item being transferred.

8. The detachable mechanism described in claim 1, wherein the transport cart is provided with a connected part that is electrically connected to the connecting part, and the control part controls the connecting member to connect the towing device and the transport cart and electrically connects the connecting part to the connected part, thereby supplying power from the towing device to the transport cart and controlling the transport cart.

9. An article transport device comprising: a transport cart for transporting articles used in a substrate-related operation machine that performs specified substrate-related operations on substrates; a towing device for towing the transport cart; and a detachable mechanism provided on the towing device, wherein the detachable mechanism comprises: a coupling member capable of coupling the towing device and the transport cart; a connection part capable of electrically connecting the towing device and the transport cart; and a control part capable of controlling the detachable mechanism and also controlling the transport cart via the connection part, wherein the control part controls the coupling member, supplies power from the towing device to the transport cart, and controls the transport cart.

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