Automatic traveling device for unmanned transfer of gas cylinders

Abstract

The present invention relates to an automatic traveling device for unmanned transfer of gas cylinders, the automatic traveling device transferring gas cylinders to cabinets in an unmanned and automatic manner such that gases are supplied to wafer production lines in semiconductor fabrication process facilities. The present invention enables straight traveling and steering control of automatic traveling robots even if the floor surface of the bunker room on which the automatic traveling robots travel is not flat. To this end, the present invention comprises: a cabinet (10) provided with a gas cylinder (40); a traveling unit (30) for loading and transferring the gas cylinder (40); a gripping unit (50) provided in the traveling unit (30) so as to grip the gas cylinder (40); a driving unit for loading or unloading the gas cylinder (40) by moving the gripping unit (50) along the X-, Y-, and Z-axis directions; a seating unit (60) provided in the traveling unit (30) so as to allow shock absorption and position identification when the gas cylinder (40) is put down by the gripping unit (50); and a direction-changing means (80) provided at the lower portion of the traveling unit (30) so as to enable changes of direction as well as straight travel of the traveling unit (30), when the traveling unit (30) travels, regardless of whether the floor surface (11) of a bunker room is flat.

Description

Gas cylinder unmanned transport automatic driving device

[0001] The present invention relates to an unmanned gas cylinder transport automatic driving device that automatically transports a gas cylinder in a cabinet to supply gas to a wafer production line in a semiconductor FAB (Fabrication Process) facility, and more specifically, to an unmanned gas cylinder transport automatic driving device that enables straight driving and steering control of an autonomous driving robot even if the floor of a bunker room in which the autonomous driving robot travels is not flat.

[0002] In general, various types of gases are supplied and used in the manufacturing process of semiconductors depending on the purpose. However, most of these gases require careful attention as they can cause serious damage such as safety accidents and environmental pollution if inhaled by the human body or exposed to the atmosphere.

[0003] For example, the types of gases used in the ion implantation process include fluid gases such as arsenic hydride (AsH3: Arsine), phosphine (PH3: Phosphine), or boron trifluoride (BF3: Boron Fluoride). These gases are highly toxic and can cause fatal consequences if inhaled by workers. Therefore, they must be carefully managed to prevent leakage during the process of supplying them to the production line.

[0004] The management of gases used in semiconductor manufacturing processes such as this is very important. These gases are charged at high pressure in gas cylinders, mounted in a cabinet, and supplied to the production line through a gas supply line. When about 90% of the gas is used up, workers replace the gas cylinder with a new one to prevent foreign substances remaining inside the gas cylinder from being supplied to the wafer processing process, thereby continuously supplying the gas.

[0005] FIG. 1 is a perspective view schematically showing a gas supply device for semiconductor equipment according to a conventional technology. A cabinet (1) is positioned at a predetermined location outside of a FAB (7) so that a plurality of gas cylinders (not shown) filled with process gases such as SiH4, PH3, NF3, CF4, etc. required by various equipment (8) within the FAB (7) can be installed, and a duct (4) is installed on one side of the cabinet (1) so as to guide a gas supply line (3) connected to each of the gas cylinders (2).

[0006] On the other side of the above duct (4), a number of regulator boxes (5) corresponding to the number of gas cylinders are installed so that process gas introduced along the gas supply line (3) can be supplied, and a number of supply pipes (9) equal to the number of equipment (8) are connected to the upper part of each regulator box (5) so that they can be connected to each equipment (8) in the FAB (7).

[0007] Accordingly, when process gas is supplied from each gas cylinder (2) installed in the cabinet (1), each process gas flows into each regulator box (5) along the gas supply line (3) passing through the interior of the duct (4).

[0008] Afterwards, each process gas flowing into each regulator box (5) is purified through a filter (not shown) and then supplied along each supply pipe (9) that is branched and connected to the corresponding number of equipment (8) in the FAB (7), thereby enabling wafer processing.

[0009] As described above, when gas is supplied to the gas supply line (3) and the gas runs out and the time to replace the gas cylinder (2) is detected by the control unit (not shown), the worker closes the valve (not shown) of the used gas cylinder (2) and then separates it from the external gas line.

[0010] Afterwards, the worker unloads the gas cylinder (2) separated from the gas line from the cabinet (1), replaces it with a new gas cylinder, reconnects the gas cylinder to the external gas line, and opens the valve handle that closes the gas injection nozzle, thereby completing the replacement of the gas cylinder.

[0011] However, these conventional devices had several problems, including:

[0012] First, to ensure that the supply of gas through the gas line is not interrupted, the used gas cylinders must be replaced quickly. However, since the worker transported the heavy gas cylinders using a cart to replace them, not only was the quick replacement of the gas cylinders impossible, but the worker's fatigue was also increased.

[0013] Second, since the worker manually replaced the gas cylinders loaded in the cabinet whenever the gas was exhausted, human error occurred depending on the worker's skill level.

[0014] Third, there was a fatal defect that could cause an explosion or poisoning of the worker by leaking gas from the gas cylinder if the worker was careless while carrying or replacing the gas cylinder.

[0015] The present invention has been devised to solve the above-mentioned problems of the past, and its purpose is to drastically improve the structure so that precise control of the straight driving and steering control of an autonomous driving robot is possible even if the floor of the bunker room is not flat.

[0016] Another object of the present invention is to enable the driving unit to always maintain a horizontal position before loading or unloading a gas cylinder into a cabinet while the driving of an autonomous driving robot is stopped, thereby enabling the gas cylinder to be handled in a stable state.

[0017] Another object of the present invention is to maximize the space utilization of a bunker room by minimizing the driving range of the driving unit by positioning the gas cylinder mounted on the driving unit at the loading or unloading point of the cabinet.

[0018] According to an aspect of the present invention for achieving the above object, there is provided a gas cylinder unmanned transport automatic driving device, characterized in that it comprises a cabinet equipped with a gas cylinder, a driving unit for loading and transporting the gas cylinder, a gripping part provided in the driving unit for gripping the gas cylinder, a driving part for moving the gripping part along the X-Y-Z axis direction to load or unload the gas cylinder, a settling part provided in the driving unit for absorbing shock and confirming the position when the gas cylinder is put down by the gripping part, and a direction changing means provided at the lower part of the driving unit for changing the direction as well as straight driving of the driving unit without being affected by the flatness of the floor surface of the bunker room when the driving unit is driven.

[0019] The present invention has the following several advantages over the prior art.

[0020] First, two drive wheels for transporting the autonomous driving robot are installed side by side in the inline direction so that the mounting portion where the gas cylinder is mounted can be placed on the side of the driving unit, thereby enabling handling of the gas cylinder without changing the direction of the driving unit at the gas cylinder loading or unloading point of the cabinet, and accordingly, a greater number of cabinets can be placed in a bunker room of the same size.

[0021] Second, a pair of drive wheels installed side by side so as to be rotatable in the inline direction on the bottom surface of the drive unit drive along a drive guidance means such as tape fixed to the floor surface of the bunker room. Even if the floor surface is not flat and straight driving is difficult, this is detected by the second detection means and the rotation range of the drive wheels is automatically corrected, thereby enabling stable straight driving of the drive unit.

[0022] Third, since a support member that supports the neck ring is fixed to each gripper of the gripping part, even if the gripping force (gripping force) of the gripper decreases due to malfunction during handling of the gas cylinder and the gas cylinder slips from the gripper, the neck ring of the gas cylinder is caught on the support member, so the phenomenon of the gas cylinder falling can be fundamentally resolved.

[0023] Fourth, since the horizontal posture correction means is arranged in a triangular shape on the bottom surface of the driving unit, the driving unit can be maintained in a horizontal state regardless of the flatness of the floor surface when the driving unit is positioned at the gas cylinder loading or unloading point of the cabinet, thereby enabling the gas cylinder to be handled in a stable state.

[0024] Figure 1 is a perspective view schematically showing a gas supply device for semiconductor equipment according to a conventional technology.

[0025] Figure 2 is a perspective view showing the present invention.

[0026] Figure 3 is a perspective view showing a part of the present invention cut away.

[0027] Figure 4 is a perspective view showing the driving unit of the present invention.

[0028] Figure 5 is a bottom perspective view of Figure 4.

[0029] Figure 6 is a bottom view showing the driving unit of the present invention.

[0030] Figure 7 is a cross-sectional view showing the mounting portion of the present invention.

[0031] Figure 8 is a perspective view showing the gripping part and driving part of the present invention.

[0032] Figures 9a and 9b are cross-sectional views for explaining the loading state of the gas cylinder in the present invention.

[0033] Figure 10 is an enlarged view of part "A" of Figure 8.

[0034] Figure 11 is a perspective view showing the direction changing means of the present invention.

[0035] Figure 12 is a drawing for explaining the driving state of the driving unit by the direction changing means of the present invention.

[0036] Figure 13 is a perspective view showing the horizontal posture correction means of the present invention.

[0037] Figure 14 is a diagram showing a state in which the driving unit of the present invention is maintained horizontally by a horizontal posture correction means.

[0038] Figures 15a to 15d are diagrams showing the state of loading a gas cylinder into a cabinet in the present invention.

[0039] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings so that those skilled in the art can easily practice the present invention. The present invention may be implemented in many different forms and is not limited to the embodiments described herein. It should be noted that the drawings are schematic and not drawn to scale. The relative dimensions and proportions of parts in the drawings are exaggerated or reduced in size for clarity and convenience in the drawings, and any dimensions are merely illustrative and not limiting. In addition, the same reference numerals are used for the same structures, elements, or parts appearing in two or more drawings to indicate similar features.

[0040] FIG. 2 is a perspective view showing the present invention, FIG. 3 is a perspective view showing a part of the present invention cut away, and FIG. 4 is a perspective view showing a driving unit of the present invention. In the present invention, cabinets (10) are arranged in one row or multiple rows facing each other along the inline direction inside a bunker room (not shown) as shown in FIGS. 15a to 15d, and a driving guidance means (12) such as a tape that guides the driving of an autonomous driving robot (20) is fixed to the floor surface (11) of the bunker room.

[0041] A driving unit (30) that loads or unloads a gas cylinder (40) into a cabinet (10) while being guided by a driving guide means (12) fixed to the floor surface (11) of the above bunker room is provided with a gripping part (50) that handles the gas cylinder (40), so that the gripping part (50) stably places the gas cylinder (40) on a mounting part (60) formed in a “U” shape as shown in FIGS. 2 and 3 according to the driving of the driving part (X, Y-axis motor and Z-axis motor) to load or unload the gas cylinder (40) into the cabinet (10).

[0042] This driving unit (30) is equipped with a first sensor (31) that detects obstacles in front, behind, left, and right of the driving unit (30) while driving, and a second sensor (32) that detects a collision while driving. A third sensor (33) that detects the loading or unloading area of ​​the gas cylinder (40) is fixed to the left and right sides of the driving unit (30).

[0043] The above first sensor (31) forms a recess (34) on the edge of the driving unit (30) and by installing two sensors diagonally to the recess (34), it is possible to detect obstacles within a 360° range, and even if the driving unit (30) collides with an obstacle, the first sensor (31) is safely installed within the recess (34), so that it can be expected to have the effect of preventing damage.

[0044] The second sensor (32) has the same function as the first sensor (31) to detect obstacles twice and thus enable safe management. It also acts as a bumper to absorb shock, and the third sensor (33) accurately controls the working position of the driving unit (30) by recognizing the position where the gas cylinder is loaded or unloaded using reflectors (not shown) fixed to both sides of the cabinet (10) even if the driving guidance means (12) fixed to the floor surface (11) of the bunker room is damaged.

[0045] A chamfered surface (35) is formed at each corner of the driving unit (30), which is intended to minimize the rotation radius of the driving unit (30).

[0046] FIG. 7 is a cross-sectional view showing a mounting part of the present invention, and the mounting part (60) is composed of a frame (61) of a driving unit (30), a die (64) which is fitted to a plurality of rods (62) positioned on the upper surface of the frame (61) and elastically installed with a spring (63) so that a gas cylinder (40) is mounted on it, a fixed plate (65) fixed to the lower surface of the frame (61), and a first detection means (70) which detects the gas cylinder (40) being placed on the upper surface of the die (64) and lowers it, and notifies the main control unit (not shown) of the driving unit (30).

[0047] The first detection means (70) is composed of a proximity sensor (72) fixed to a frame (61) by a bracket (71) and a dog (74) fixed to a dog bracket (73) fixed to the bottom surface of the rod (62), so that when the die (64) descends while compressing the spring (63) due to the fixation of the gas cylinder (40), the shock due to the fixation of the gas cylinder (40) is absorbed, and at the same time, when the contact point of the dog (74) from the proximity sensor (72) is short-circuited, the fixation of the gas cylinder (40) on the die (64) is notified to the main control unit of the driving unit (30) so as to stop the operation of the Z-axis motor (51), which is the driving unit.

[0048] Fig. 8 is a perspective view showing a gripping part and a driving part of the present invention, and the gripping part (50) is composed of a pair of grippers (52) that grip the body of a gas cylinder (40), and a support member (53) that is fixed to the upper portion of each gripper (52) and supports the lower portion of the neck ring (41) of the gas cylinder (40).

[0049] At this time, the support member (53) also serves to support the neck ring (41) when the gripping force (holding force) of the gripper (52) decreases and the gas cylinder (40) slides downward from the gripper (52), thereby preventing the gas cylinder (40) from falling.

[0050] A trapezoidal groove (not shown) is formed at the body connection portion of the gripper (52). This is to maximize the contact area of ​​the body while minimizing the thickness of the gripper (52).

[0051] A fourth sensor (54) for detecting the loading or unloading area of ​​the gas cylinder (40) is installed at the bottom of each gripper (52), and a fifth sensor (55) for emitting and receiving light to detect the position of the neck ring (41) of the gas cylinder (40) is installed at the top surface of each support member (53).

[0052] The above pair of grippers (52) are installed on a gripper main plate (58) that is guided by a pair of guide rods (57) to ascend and descend as the ball screw (56) rotates by the driving of the Z-axis motor (51), and the gripper (52) grips a gas cylinder (40) or transfers the gas cylinder (40) gripped by the gripper (52) toward the cabinet (10) as the X-axis motor or Y-axis motor (omitted from the drawing) drives it.

[0053] In addition, as shown in Fig. 9a, a nut housing (59) is supported on the gripper main plate (58) so as to be able to rise and fall by being guided by a pair of guide pins (43) that are elastically installed with a spring (42), and a sixth sensor (44) that detects the seating state of the gas cylinder (40) according to the lowering of the nut housing (59) is fixed to the gripper main plate (58).

[0054] FIG. 11 is a perspective view showing a direction changing means of the present invention, and the direction changing means (80) is composed of a pair of drive wheels (83) that are rotatably installed side by side on an installation plate (81) along an inline direction on the central bottom surface of a drive unit (30) and rotate according to the driving of a drive motor (82), a second detection means (84) that determines the rotation angle of each drive wheel (83), a steering gear drive motor (85) that compares the displacement amount detected by the second detection means (84) with a normal value and then drives the drive wheel (83) when it deviates from the normal value so that the angular position of the drive wheel can be maintained in the straight direction, and a power transmission means (86) that transmits the power of the steering gear drive motor (85) to each drive wheel (83).

[0055] The above power transmission means (86) is composed of a driving gear (86a) that rotates by a steering gear driving motor (85), a steering gear (86b) that is engaged with the driving gear (86a) fixed to a frame (61), and a shaft (87) that is fixed to the driving wheel (83). As the driving gear (86a) that is engaged with the steering gear (86b) rotates due to the driving of the steering gear driving motor (85), the driving gear (86a) is engaged with the steering gear (86b) and turns, so that the installation plate (81) on which the driving wheel (83) is installed rotates about the shaft (87).

[0056] The second detection means (84) is composed of a fixed guide sensor (84a) fixed to a frame (61) located on one side of each installation plate (81), and a rotation guide sensor (84b) fixed to the installation plate (81) and displaced together with the rotation angle of the driving wheel (83).

[0057] The drive wheel (83) whose displacement is adjusted according to the driving of each steering gear drive motor (85) is elastically installed by the suspension (88) to absorb the shock applied when the drive unit (30) is driven and to maintain the ground contact force of the drive wheel (83) constant even if the floor surface (11) is uneven.

[0058] In the present invention, the mounting portion (60) can be placed on the side of the driving unit (30) as shown in Fig. 2, as the driving wheel (83) is installed in parallel along the inline direction at the center of the bottom surface of the driving unit (30).

[0059] Accordingly, it has the advantage of being able to load or unload the gas cylinder (40) without changing the direction of the driving unit (30) while the driving unit (30) is stopped at the loading or unloading point of the cabinet (10).

[0060] In the present invention, a horizontal posture correction means (90) is further provided on the bottom surface of the driving unit (30) to maintain the driving unit (30) in a horizontal state while it is stopped at a predetermined position in the cabinet (10) where the gas cylinder (40) is loaded or unloaded.

[0061] FIG. 13 is a perspective view showing a horizontal posture correction means of the present invention, and FIG. 8 is a state diagram showing a driving unit of the present invention maintained in a horizontal state by the horizontal posture correction means, wherein the horizontal posture correction means (90) is composed of an elevation screw (92) which is installed on each driving unit (30) and rises and falls according to the driving of a BLDC motor (91), a level foot (93) which is rotatably connected to the lower portion of each elevation screw (92) with a ball joint structure, a home sensor (94) which detects the rising and falling of the elevation screw (92) and controls the driving of the BLDC motor (91), and an angle sensor (95) which is installed in the frame (61) and detects the horizontal state of the driving unit (30).

[0062] At this time, the present invention has the advantage of minimizing the number of installations while maintaining the driving unit (30) in a stable state when loading or unloading the gas cylinder (40) by arranging the horizontal posture correction means (90) to take a triangular shape on the lower surface of the driving unit (30).

[0063] It is preferable that each of the above level feet (93) be wrapped with a non-slip member (95) made of urethane or rubber to prevent slipping of the level foot (93) when the driving unit (30) is maintained in a horizontal state.

[0064] First, the present invention will be described from the state in which a gas cylinder is not installed in the mounting portion (60) of the driving unit (30), and a gas cylinder (40) is supplied to the cabinet (10) to supply process gas to the production line.

[0065] In the process of supplying process gas from the gas cylinder (40) supplied to the above cabinet (10) to the wafer production line, when the gas is exhausted and the integrated management system issues a command to replace the gas cylinder of the cabinet (10), the driving motor (82) of the autonomous driving robot (20) waiting in the charging tech (not shown) is driven to rotate a pair of driving wheels (83) simultaneously.

[0066] In this way, when a pair of driving wheels (83) rotate simultaneously, the driving unit (30) moves to the corresponding cabinet (10) along the driving guidance means (12) fixed to the floor of the bunker room and stops, automatically opening the door of the cabinet (10).

[0067] As described above, when the driving unit (30) is driven, if the horizontal state of the floor surface (11) is not even, the driving unit (30) tilts to one side and cannot move in a straight line, and the driving unit (30) deviates from the center of the driving guidance means (12), the control unit receives feedback from the fixed guide sensor (84a) on the amount of deviation, and drives the steering gear drive motor (85) so that the rotation guide sensor (84b) can adjust the direction by the amount of feedback, thereby continuously performing feedback control so that the center of the driving guidance means (12) is maintained.

[0068] Accordingly, the driving unit (30) can maintain straight driving even if the level of the floor of the bunker room is uneven.

[0069] As described above, when the driving unit (30) is driven, the ground surface is uneven, which may cause the ground contact force of the driving wheel (83) to change. Therefore, the suspension (88) is the element that changes the driving force, and thus the ground contact force is always maintained at a constant level, thereby enabling stable driving of the autonomous driving robot (20).

[0070] Meanwhile, when the autonomous driving robot (20) is driving, two first sensors (31) installed diagonally along the edge of the driving unit (30) detect obstacles located in the front, rear, left, and right sensing ranges, and automatically control driving obstruction. In addition, the second sensor (32) detects a collision, so that the driving unit (30) can be stably moved toward the cabinet (10).

[0071] If, while the autonomous driving robot (20) is driving, the first and second sensors (31) (32) detect an obstacle or a collision, the buzzer (36), which is a notification means, sounds to quickly notify the operator and temporarily stop the driving of the autonomous driving robot (20).

[0072] The third sensor (33) installed on the left and right sides of the above driving unit (30) temporarily stops driving the driving motor (30) at the point where it detects the reflector of the cabinet (10), which is the loading or unloading area of ​​the gas cylinder (40).

[0073] As described above, when the driving unit (30) stops driving in the gas cylinder loading or unloading area of ​​the cabinet (10), the BLDC motors (91) of the horizontal posture correction means (90) arranged to take a triangular shape on the bottom surface of the driving unit (30) are each driven to rotate a plurality of lifting screws (92) simultaneously, so that the level foot (93) descends and touches the floor surface (11), thereby separating the driving wheel (83) of the driving unit (30) from the floor surface (11).

[0074] At this time, the angle sensor (95) installed at the center of the driving unit (30) checks the inclination of the driving unit (30) and controls the lowering of the lifting screw (92) of the horizontal posture correction means (90) so that the value of the angle sensor (95) becomes horizontal.

[0075] Even if the floor surface (11) is not flat but curved as shown in Fig. 14 during the operation described above, the level foot (93) is rotatably connected to each lifting screw (92), so that the level foot (93) rotates at the lifting screw (92), thereby safely maintaining the driving unit (30) in a horizontal state.

[0076] In this way, when the driving unit (30) is maintained in a horizontal state in the loading or unloading area of ​​the gas cylinder (40), the gripping unit (50) is driven by the driving unit to unload the used gas cylinder (40) from the cabinet (10) and place it on the mounting unit (60) of the driving unit (30).

[0077] That is, when the X-axis motor of the driving unit drives the Z-axis motor (51) to rotate the ball screw (56) while the pair of grippers (52) are in a mutually separated state, the gripper main plate (58) rises along the pair of guide rods (57). The rise of the gripper main plate (58) is until the fifth sensor (55) of the support member (53) fixed to the upper portion of each gripper (52) detects the neck ring (41) of the gas cylinder (40).

[0078] When the fifth sensor (55), which is a light-emitting and light-receiving element, detects the neck ring (41), the Z-axis motor (51) is re-driven to reversely rotate the ball screw (56), thereby slightly lowering the gripper main plate (58) that had been raised so that the support member (53) is positioned at the bottom of the neck ring (41), and then the operation of the Z-axis motor (51) is stopped.

[0079] In this way, when the operation of the Z-axis motor (51) is stopped, the Y-axis motor is driven to move the gripper (52) forward toward the cabinet (10), so that the support member (53) fixed to the upper part of the gripper (52) is positioned at the lower part of the neck ring (41).

[0080] After that, the X-axis motor drives a pair of grippers (52) that were spread out on both sides to move inward simultaneously, so that a pair of grippers (52), which are the gripping part (50), grip the body of the gas cylinder (40).

[0081] When the above gripper (52) holds the gas cylinder (40), the nut housing (59) is maintained in close contact with the bottom surface of the gripper main plate (58) as shown in Fig. 9a.

[0082] After the gripper (52) grasps the gas cylinder (40) through the above-described operation, the Z-axis motor (51) is re-driven to raise the gripper main plate (58) to a predetermined height, and then the Y-axis motor is driven to return the gripping portion (50) to the initial position, thereby enabling the unloading of the empty gas cylinder from the cabinet (10).

[0083] After unloading the empty gas cylinder from the cabinet (10) in this way, the door of the cabinet (10) that was opened must be closed and the unloaded empty gas cylinder must be stably placed on the mounting portion (60) of the driving unit (30).

[0084] Accordingly, when the Z-axis motor (51) is driven to rotate the ball screw (56) to place the gas cylinder (40) held by the gripper (52) on the mounting portion (60), the gripper main plate (58) is lowered, so that when the gas cylinder (40) held by the gripper (52) is placed on the die (64) which is the mounting portion (60), the shock is absorbed by the compressive force of the spring (63) fitted to the plurality of rods (62), and at the same time, the contact point of the dog (74) is short-circuited from the proximity sensor (72) fixed to the bracket (71), so that the operation of the Z-axis motor (51) is stopped by the main control unit of the autonomous driving robot (20).

[0085] After unloading the empty gas cylinder used from the cabinet (10) into the mounting portion (60) of the driving unit (30) by the operation described above, the plurality of lifting screws (92) that had been lowered are raised to separate the driving wheel (83) from the floor surface (11), thereby driving the driving unit (30) and transporting the empty gas cylinder to the empty stacker (not shown).

[0086] As described above, in the event that the gripping force of the gripper (52) decreases due to a malfunction in the process of gripping and handling the gas cylinder (40) by a pair of grippers (52), which are the gripping unit (60), a support member (53) is fixed to each upper portion of the pair of grippers (52), so that the neck ring (41) of the gas cylinder (40) falling downwards is hung on the support member (53), it is possible to prevent in advance the occurrence of a safety accident due to the fall of the gas cylinder (40).

[0087] After unloading the used gas cylinder (40) from the cabinet (10), the driving unit (30) moves to the side of the stacker (omitted) where the new gas cylinder is stored, so that the gas cylinder is stably placed on the upper surface of the die (64), which is the mounting portion (60) of the driving unit (30) as described above, as shown in FIG. 15a, and then the driving unit (30) drives until the third sensor (33) fixed to both sides of the driving unit (30) detects the loading or unloading area of ​​the gas cylinder, and then the driving is stopped.

[0088] When the above driving unit (30) reaches the loading or unloading area of ​​the gas cylinder (40), a plurality of lifting screws (92), which are horizontal posture correction means (90), are lowered simultaneously to maintain the horizontal state of the driving unit (30).

[0089] After that, after opening the door of the cabinet (10), the gripper (52) is raised until the fourth sensor (54) fixed to a pair of grippers (52) detects the reflector (13) fixed inside the cabinet (10) as shown in Fig. 15b, and the gas cylinder (40) is separated from the mounting portion (60), and then the X-axis of the driving portion is moved to correct the position.

[0090] After the position of the above gas cylinder (40) is corrected, the Y-axis motor is driven to advance the gripper (52) from the gripper main plate (58) toward the cabinet (10) until the gas cylinder detection sensor (omitted from the drawing) detects it, so that the gas cylinder (40) held by the gripper (52) is accommodated inside the cabinet (10) as shown in FIG. 15c.

[0091] As such, once the gas cylinder (40) gripped by the gripper (52) is accommodated inside the cabinet (10), the Z-axis motor (51) is re-driven to lower the gripper main plate (58), so that the gas cylinder (40) is settled inside the cabinet (10) as shown in Fig. 15d.

[0092] After that, the X-axis motor is driven to slightly spread a pair of grippers (52) so that a play is created in the gas cylinder (40) from the grippers (52), and then the clamping means (17) installed inside the cabinet (10) completely grips the gas cylinder (40), and then the X-axis motor is driven again so that the gripper (52) completely spreads and the gripping state of the gas cylinder (40) is released.

[0093] Once the gripping state of the above gas cylinder (40) is completely released, the pair of grippers (52), which are the gripping part (50) that had moved forward toward the cabinet (10) by re-driving the X-axis motor, can be returned to the initial position.

[0094] After the above gas cylinder (40) is accommodated inside the cabinet (10), the opened door is closed, the driving unit (30) is moved to the charging deck, and then docked to wait for charging, so that the gas cylinder can be automatically replaced continuously.

[0095] Meanwhile, as shown in Fig. 12, the aforementioned description is such that the mounting portion (60) is positioned at the top of the driving unit (30), so that the gas cylinder (40) can be automatically loaded or unloaded into the cabinet (10) positioned at the top in the driving direction.

[0096] However, if the empty stacker or stacker is arranged to have a 90° phase difference with the cabinet, the direction of the driving unit (30) must be rotated 90°, and the state of switching the direction of the driving unit (30) is shown.

[0097] Although the embodiments of the present invention have been described with reference to the attached drawings, those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical idea or essential features.

[0098] Therefore, the embodiments described above should be understood as being exemplary and not restrictive in all respects, and the scope of the present invention described in the detailed description above is indicated by the claims described below, and all changes or modifications derived from the meaning and scope of the claims and their equivalent concepts should be interpreted as being included in the scope of the present invention.

[0099] Even if the floor of the bunker room where the autonomous robot drives is uneven, the robot can still drive straight and control its steering. Therefore, this technology holds industrial potential for practical application in semiconductor manufacturing.

Claims

1. A cabinet equipped with a gas cylinder, A driving unit that carries and transports the above gas cylinder, and a gripping unit that is provided on the driving unit and grips the gas cylinder, A driving unit that moves the above-mentioned holding unit along the X-Y-Z axis to load or unload the gas cylinder, A mounting part provided in the above driving unit to absorb shock and confirm the position when the gas cylinder is lowered by the grip part, A gas cylinder unmanned transport automatic driving device characterized in that it is configured to include a direction changing means that changes direction as well as straight driving of the driving unit without being affected by the flatness of the floor surface of the bunker room when the driving unit is driven, and is provided at the lower part of the driving unit.

2. In claim 1, The above-mentioned part is, A pair of grippers for holding the body of the above gas cylinder, A gas cylinder unmanned transport automatic driving device characterized by comprising a support member fixed to the upper portion of each gripper so that the neck ring of the gas cylinder is hung when the gas cylinder falls.

3. In claim 2, A gas cylinder unmanned transport automatic driving device characterized in that a trapezoidal groove is formed at the connection part of each gripper that holds the body of the gas cylinder.

4. In claim 2, A gas cylinder unmanned transport automatic driving device characterized in that a fourth sensor for detecting a loading or unloading area of a gas cylinder is fixed to each gripper of the above-mentioned gripping part.

5. In claim 2, A gas cylinder unmanned transport automatic driving device characterized in that a fifth sensor for detecting the neck ring position of the gas cylinder is installed on the upper surface of each support member of the above-mentioned grip part.

6. In claim 2, A gas cylinder unmanned transport automatic driving device characterized in that the above pair of grippers is installed on a gripper main plate that rises and falls as a ball screw rotates by driving a Z-axis motor, and a nut housing is installed on the gripper main plate so as to be supported to rise and fall by being guided by a pair of guide pins that are elastically installed with a spring, and a sixth sensor that detects the seating state of the gas cylinder as the nut housing descends is installed on the upper surface of the gripper main plate.

7. In claim 1, The above-mentioned fixing part is, The frame of the above driving unit, A die that is installed so as to be exposed to the upper surface of the above frame and is elastically installed with a spring fitted to a plurality of rods and on which a gas cylinder is seated, A fixed plate fixed to the bottom of the above frame, A gas cylinder unmanned transport automatic driving device characterized by including a first detection means for detecting the gas cylinder as it is placed on the upper surface of the die and descending and notifying the integrated management system.

8. In claim 7, The above first detection means, A proximity sensor fixed to the above frame with a bracket, A gas cylinder unmanned transport automatic driving device characterized in that it is configured with a dog fixed to a dog bracket fixed to the bottom surface of the above load, and that as the die descends, a proximity sensor notifies the integrated management system that the contact of the dog is short-circuited.

9. In claim 1, A gas cylinder unmanned transport automatic driving device characterized in that a first sensor for detecting obstacles in front, behind, left, and right of the driving unit and a second sensor for detecting collisions during driving are installed on the driving unit.

10. In claim 9, A gas cylinder unmanned transport automatic driving device characterized in that a groove is formed along the edge of the driving unit and two first sensors are installed so as to be positioned diagonally of the groove.

11. In claim 1, A gas cylinder unmanned transport automatic driving device characterized in that a third sensor for detecting a loading or unloading area of a gas cylinder is installed on each of the left and right side portions of the driving unit.

12. In claim 1, A gas cylinder unmanned transport automatic driving device characterized in that the mounting part provided on the upper part of the driving unit is arranged on the side of the driving unit located between the direction changing means.

13. In claim 1, The above direction changing means is, A pair of drive wheels each installed side by side and rotatably installed along the inline direction on the installation plate at the center of the lower surface of the above driving unit, A driving motor that rotates each of the above driving wheels, A second detection means for determining the rotation angle of each of the above driving wheels, A steering gear drive motor that compares the displacement detected by the second detection means with a normal value and then drives the steering gear when it deviates from the normal value so that the angular position of the driving wheel can be corrected to maintain the straight direction, A gas cylinder unmanned transport automatic driving device characterized by including a power transmission means that transmits the power of the steering gear drive motor to each drive wheel.

14. In claim 13, The above second detection means, A fixed guide sensor fixed to a frame located on one side of each installation plate, A gas cylinder unmanned transport automatic driving device characterized by comprising a variable guide sensor fixed to the above installation plate and displaced together according to the rotation angle of the driving wheel.

15. In claim 13, A gas cylinder unmanned transport automatic driving device characterized in that each drive wheel, the displacement of which is adjusted according to the driving of the steering gear drive motor, is elastically installed as a suspension.

16. In claim 1, A gas cylinder unmanned transport automatic driving device characterized in that the driving unit is further provided with a horizontal attitude correction means for correcting the horizontal state of the driving unit before loading or unloading the gas cylinder while the driving unit is stopped.

17. In claim 16, A gas cylinder unmanned transport automatic driving device characterized in that the horizontal posture correction means is installed so as to take a triangular shape on the lower surface of the driving unit.

18. In claim 16 or claim 17, The above horizontal posture correction means, A plurality of lifting screws installed on each of the above driving units and raised and lowered according to the operation of the BLDC motor, A level foot rotatably connected to the lower portion of each of the above lifting screws, A home sensor that detects the rising and falling of the above-mentioned lifting screw and controls the operation of the BLDC motor, A gas cylinder unmanned transport automatic driving device characterized by comprising an angle sensor for detecting the horizontal state of the driving unit in the above frame.

19. In claim 18, A gas cylinder unmanned transport automatic driving device characterized in that an anti-slip member is installed to be wrapped around each level foot.

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