Structure and processing device

Abstract

A structure according to one embodiment of the present invention comprises a first member, a second member, and an intermediate member. The first member is a plate-shaped member containing carbon fibers and a resin, and has a first main surface and a second main surface facing each other. The second member is disposed facing the first member. The intermediate member is disposed between the first member and the second member, and is connected to each of the second main surface of the first member and the second member. The connection between the second main surface and the intermediate member is achieved by a configuration corresponding to deformation, due to moisture absorption, of a side surface portion of the first member.

Description

Structure and processing device

[0001] The present invention relates to a structure having a member containing carbon fiber and resin, and a processing device in which the structure is used.

[0002] Conventionally, various processing devices such as exposure devices and laser processing devices have been used. These processing devices often adopt a design in which components constituting the device are supported by a frame. For example, in the case of an exposure device, components such as a light emitting unit, a mask stage, a projection optical system, and a workpiece stage are supported by a frame. In the case of a laser processing device, components such as a laser emitting unit and a workpiece stage are supported by a frame. Examples of the workpiece include a substrate.

[0003] In such processing equipment, if the frame expands or contracts due to thermal expansion caused by changes in the ambient temperature or heat generated by the equipment itself, the positions of the components supported by the frame may change, which may result in a decrease in processing accuracy. Therefore, it is desirable to use a material with as low a coefficient of thermal expansion as possible for the material of the processing equipment frame.

[0004] The frame of the processing device also needs to have high rigidity (elastic modulus). For example, consider a case where a work stage is supported by the frame. The work stage frequently moves sequentially, for example, in step-and-repeat processes that expose divided areas of a substrate, or in drilling processes that form multiple through-holes in a substrate. As a result, the time spent moving the stage is often longer than the time spent actually performing the exposure process.

[0005] Therefore, if the work stage is supported by a frame with low rigidity, the frame will vibrate significantly with each successive movement of the work stage, and it will take a long time for the frame vibration to stop, i.e., the time until the next exposure or processing can be performed. As a result, the workpiece processing time will be longer, and the productivity of the device will decrease. Furthermore, if the frame's rigidity is low, it will be vulnerable to external vibrations and will be prone to shaking. This can also cause poor processing accuracy.

[0006] Another important requirement for frame components is low density, so that even large equipment can be relatively lightweight. To shorten the stage's movement time and increase its speed, the stage must be accelerated and decelerated at high speeds, but this is limited if the stage is heavy. For this reason, it is desirable for the moving parts to be as light as possible. Another option is to use a large drive motor, but this increases the weight, which in turn increases the cost of the equipment, requiring the floor of the factory where the equipment is installed to be reinforced.

[0007] Thus, it is desirable for the frame of a processing device to have characteristics such as high rigidity (elastic modulus), low thermal expansion coefficient (thermal expansion coefficient), and low density. Note that the conditions of high rigidity and low density can also be said to be the conditions of high specific rigidity (rigidity / specific gravity).

[0008] Properties that satisfy these conditions are often effective not only for frames, but also for the components that make up processing equipment. For example, a work stage on which a substrate or the like is placed must have a high degree of flatness in order to perform high-precision positioning. Furthermore, in order to perform high-precision positioning in a short time, it must be highly rigid and lightweight, i.e., have a high specific rigidity. Furthermore, it must not undergo dimensional deformation due to temperature changes, so a low coefficient of thermal expansion is required. Naturally, properties that satisfy these conditions are often effective for components other than work stages as well.

[0009] A material that has high rigidity, a small coefficient of thermal expansion, and a small density can be exemplified by carbon fiber reinforced plastic (CFRP).

[0010] CFRP is a composite material made by reinforcing resin with carbon fiber. Taking the example of reinforced concrete, which is also made of composite materials, the resin corresponds to the concrete and the carbon fiber to the reinforcing bars. CFRP is formed by, for example, impregnating carbon fiber with resin to form a plate-shaped (sheet-shaped) component called a prepreg, stacking multiple sheets of this prepreg in a mold while taking into consideration the fiber direction, and then heating and pressing them in an autoclave to harden them. Of course, the forming method is not limited to this.

[0011] Thermosetting resins such as epoxy resins are often used as the matrix (base material). CFRP is lightweight and has high strength, so it is used in a variety of applications, including golf clubs, fishing rods, aircraft, and automobiles.

[0012] CFRP has the property of absorbing moisture from the environment in which it is used, expanding and causing dimensional deformation. Furthermore, since moisture penetrates and diffuses slowly into CFRP, the distribution of moisture concentration inside CFRP is uneven and the state changes gradually.

[0013] The following Patent Documents 1 and 2 describe measures to prevent moisture absorption in CFRP. Patent Document 1 describes a structure in which ceramic members are sandwiched and bonded to both sides of a CFRP member, particularly a method of coating the CFRP member with an inorganic material such as metal or ceramic. Patent Document 2 describes a method of bonding aluminum or ceramic to the end faces of a CFRP-laminated member.

[0014] JP 2009-248398 A JP 2017-80899 A

[0015] When a structure having a plate-shaped member containing carbon fiber such as CFRP and resin is used for the frame or other components of a processing device, if the structure itself deforms due to moisture absorption and deformation of the member, processing accuracy may decrease.

[0016] In view of the above circumstances, an object of the present invention is to provide a structure having a plate-shaped member containing carbon fiber and resin, which is capable of suppressing deformation of the structure itself due to deformation of the member caused by moisture absorption, and a processing device in which the structure is used.

[0017] In order to achieve the above object, a structure according to one embodiment of the present invention comprises a first member, a second member, and an intermediate member. The first member is a plate-shaped member containing carbon fiber and resin, and has a first main surface and a second main surface facing each other. The second member is disposed opposite the first member. The intermediate member is disposed between the first member and the second member, and is connected to the second main surface of the first member and to the second member. The connection between the second main surface and the intermediate member is realized by a configuration that accommodates deformation of the side portion of the first member due to moisture absorption.

[0018] In this structure, an intermediate member is disposed between a plate-shaped first member containing carbon fiber and resin and a second member. The intermediate member is connected to the second main surface of the first member and to the second member. The connection between the second main surface and the intermediate member is realized by a configuration that accommodates deformation of the side surface of the first member due to moisture absorption. As a result, it is possible to prevent deformation of the structure itself due to deformation of the first member due to moisture absorption.

[0019] The deformation of the side surface portion may be such that the thickness from the first main surface to the second main surface is greatest on the side surface, and the thickness decreases from the side surface toward the interior of the first member.

[0020] The configuration for accommodating deformation of the side surface portion may include a configuration for connecting the intermediate member to an inner region that is a predetermined distance away from the periphery of the second main surface.

[0021] The inner region may be a region 5 mm away from the periphery of the second main surface.

[0022] The intermediate member may include a rib member disposed along the periphery of the second main surface, in which case the rib member may be disposed in an area that is more than 5 mm and less than 25 mm from the periphery of the second main surface.

[0023] The intermediate member may include a first rib member and a second rib member disposed along a periphery of the second main surface. In this case, the configuration for accommodating deformation of the side surface portion may be such that the first rib member is disposed on the periphery of the second main surface and the second rib member is disposed more inward than the first rib member.

[0024] The second rib member may be disposed in an area of ​​the second main surface at a distance from the peripheral edge that is greater than 5 mm and smaller than 25 mm.

[0025] The intermediate member may include a rib member disposed along a periphery of the second main surface. In this case, the configuration for accommodating deformation of the side surface portion may include a configuration in which a cross-sectional area of ​​the rib member in a direction perpendicular to a direction in which the first member and the second member face each other is large enough to allow the rib member to deform in response to deformation of the side surface.

[0026] The rib member may be a plate-like member having two opposing main surfaces. In this case, the configuration that accommodates deformation of the side surface portion may include a configuration in which a thickness between the two main surfaces of the rib member is smaller than a thickness from the first main surface to the second main surface of the first member.

[0027] The intermediate member may include a rib member disposed along a periphery of the second main surface. In this case, the configuration for accommodating deformation of the side surface portion may include a configuration in which a cross-sectional area of ​​a connecting portion connected to the second main surface of the rib member in a direction perpendicular to a direction in which the first member and the second member face each other is large enough to allow the connecting portion to deform in response to deformation of the side surface portion.

[0028] The cross-sectional area of ​​the connecting portion may be smaller than the cross-sectional area of ​​the remaining portion of the rib member.

[0029] The intermediate member may include a rib member disposed along a periphery of the second main surface and connected to the second main surface by an adhesive layer. In this case, the configuration that accommodates deformation of the side surface portion may include a configuration in which a thickness of the adhesive layer from the rib member to the second main surface is large enough to alleviate deformation of the side surface portion.

[0030] The intermediate member may have a rib member arranged along the periphery of the second main surface, and a core member arranged inside the rib member.

[0031] The second member may be a plate-like member containing carbon fiber and resin and having a third main surface and a fourth main surface facing each other. In this case, the intermediate member may be connected to the third main surface of the second member. The connection between the third main surface and the intermediate member may be realized by a configuration that accommodates deformation of a side portion of the second member due to moisture absorption.

[0032] A method for manufacturing a structure according to one aspect of the present invention includes disposing an intermediate member between a first member, which is a plate-like member containing carbon fiber and resin and has a first main surface and a second main surface facing each other, and a second member disposed opposite the first member. The intermediate member is connected to the second main surface of the first member in a configuration that accommodates deformation of a side surface portion of the first member due to moisture absorption. The intermediate member is connected to the second member.

[0033] A processing device according to one embodiment of the present invention is a processing device for processing a workpiece, and is configured using the structure described above.

[0034] The structure may be used as a work stage that holds the workpiece.

[0035] The processing apparatus may be configured as an exposure apparatus.

[0036] As described above, according to the present invention, it is possible to provide a structure having a plate-shaped member containing carbon fiber and resin, which can suppress deformation of the structure itself due to deformation of the member caused by moisture absorption, and a processing device using the structure. Note that the effects described here are not necessarily limited, and may be any of the effects described in this disclosure.

[0037] 7 is a schematic diagram showing an example of the configuration of a structure that is the subject of consideration by the inventors. FIG. 1 is a cross-sectional view taken along line A-A of the structure shown in FIG. 1. FIG. 2 is a schematic diagram showing flare deformation due to moisture absorption in the upper skin (lower skin). FIG. 3 is a schematic diagram showing flare deformation due to moisture absorption in the upper skin (lower skin). FIG. 4 is a schematic diagram showing flare deformation due to moisture absorption in the upper skin (lower skin). FIG. 5 is a cross-sectional view showing the shape of a structure when flare deformation occurs in the upper skin and the lower skin. FIG. 6 is a schematic diagram showing an example of the configuration of a structure when an inner region arrangement configuration is adopted. FIG. 7 is a cross-sectional view taken along line B-B of the structure shown in FIG. 1 is a schematic diagram showing a partial inner region arrangement configuration which is a modified example of the inner region arrangement configuration; FIG. 1 is a cross-sectional view of a structure when a double rib configuration is adopted; FIG. 2 is a diagram of the second main surface of the upper skin when viewed from the lower side in the up-down direction (Z direction); FIG. 3 is an enlarged view of a cross-section of a structure when a first flare deformation absorbing configuration is adopted (before flare deformation occurs); FIG. 4 is an enlarged view of a cross-section of a structure when a second flare deformation absorbing configuration is adopted (before flare deformation occurs); FIG. 5 is an enlarged view of a cross-section of a structure when a second flare deformation absorbing configuration is adopted (when flare deformation occurs); FIG. 6 is a schematic diagram showing a general configuration of an exposure apparatus which is an example of a processing apparatus; FIG. 7 is a schematic diagram showing a general configuration of a laser processing apparatus which is an example of a processing apparatus.

[0038] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0039] [Study on Structures Including CFRP] First, the study on structures including CFRP conducted by the present inventors will be described. Fig. 1 is a schematic diagram showing an example of the structure to be studied. Fig. 2 is a cross-sectional view of the structure shown in Fig. 1 taken along line A-A.

[0040] Hereinafter, for ease of understanding of the explanation, the left-right direction, front-rear direction, and up-down direction will be defined for convenience with respect to the structure 1. Specifically, the X direction in the drawing is the left-right direction (the positive side of the X axis is the right side, and the negative side is the left side), the Y direction in the drawing is the front-rear direction (the positive side of the Y axis is the rear side, and the negative side is the front side), and the Z direction in the drawing is the up-down direction (the positive side of the Z axis is the upper side, and the negative side is the lower side).

[0041] Of course, the application of this technology does not limit the orientation of the structure 1, nor does it limit which part of the structure 1 is the front side part and which part is the side side part.

[0042] 1 is a line parallel to the left-right direction (X direction) and passing through the center of the structure 1 in the front-rear direction (Y direction).

[0043] The structure 1 includes an upper skin 2, a lower skin 3, and an intermediate rib member 4. The upper skin 2 is made of CFRP. As shown in Figures 1 and 2, the upper skin 2 is a plate-like member that has a rectangular shape when viewed from the top-bottom direction (Z direction).

[0044] The upper skin 2 has a first main surface 5 and a second main surface 6 that face each other in the vertical direction (Z direction), and a side surface 7. The first main surface 5 is the upper main surface, and the second main surface 6 is the lower main surface. The side surface 7 is formed between the first main surface 5 and the second main surface 6.

[0045] In the upper skin 2 made of CFRP, both the first main surface 5 and the second main surface 6 are also called flatwise surfaces. In addition, the side surface 7 of the upper skin 2 is also called edgewise surface.

[0046] The side surfaces 7 that form the edgewise surfaces include a front side surface 7a, a rear side surface 7b, a left side surface 7c, and a right side surface 7d.

[0047] There are no limitations on the specific configuration of the CFRP for the upper skin 2. For example, the upper skin 2 can be produced by heat-curing a plurality of prepregs while applying pressure. For example, pitch-based prepregs, which are characterized by high elasticity and high vibration damping, or PAN-based prepregs, which are characterized by high strength, can be used as the prepregs.

[0048] The matrix resin constituting the prepreg is not limited either, and any thermosetting resin such as epoxy resin, unsaturated polyester, vinyl ester, phenol, cyanate ester, polyimide, etc. can be used.

[0049] Furthermore, for the upper skin 2, UD (Uni-Direction) material, CP (Cross-Ply) material, QI (Quasi-Isotropic) material, etc. may be arbitrarily adopted.

[0050] In addition, a CFRP plate member having any configuration produced by various molding methods such as autoclave molding, RTM molding, and press molding can be used as the upper skin 2. CFRP having such various configurations corresponds to one embodiment of the plate-shaped member containing carbon fiber and resin according to the present technology.

[0051] The lower skin 3 is also made of CFRP and has the same shape as the upper skin 2. That is, as shown in Figures 1 and 2, the lower skin 3 is a plate-like member and has a rectangular shape when viewed from the top-bottom direction (Z direction).

[0052] The lower skin 3 has a third main surface 8 and a fourth main surface 9 (flatwise surfaces) that face each other in the vertical direction (Z direction), and a side surface 10 (edgewise surface). The third main surface 8 is the upper main surface, and the fourth main surface 9 is the lower main surface. The side surface 10 is formed between the third main surface 8 and the fourth main surface 9.

[0053] The side surfaces 10 that form the edgewise surfaces include a front side surface 10a, a rear side surface 10b (not shown), a left side surface 10c, and a right side surface 10d.

[0054] 1 and 2, the upper skin 2 and the lower skin 3 are arranged so as to overlap each other when viewed from the vertical direction (Z direction). That is, the upper skin 2 and the lower skin 3 are arranged so that the left, right, front, and rear side surfaces 7 of the upper skin 2 and the left, right, front, and rear side surfaces 10 of the lower skin 3 overlap each other when viewed from the vertical direction (Z direction).

[0055] As shown in FIG. 2, the upper skin 2 and the lower skin 3 are arranged so that the second main surface 6 of the upper skin 2 and the third main surface 8 of the lower skin 3 face each other.

[0056] The specific structure of the upper skin 2 as a CFRP and the specific structure of the lower skin 3 as a CFRP may be the same or different from each other.

[0057] The intermediate rib member 4 is disposed between the upper skin 2 and the lower skin 3 and is connected to each of the second main surface 6 of the upper skin 2 and the third main surface 8 of the lower skin 3 .

[0058] 1 and 2, the intermediate rib member 4 has a front rib 11a, a rear rib 11b (not shown), a left rib 11c, and a right rib 11d. These front, rear, left, and right ribs 11a to 11d are made of plate-shaped members.

[0059] 1, the right rib 11d is disposed along the right side surface 7d of the upper skin 2 (i.e., the right side surface 10d of the lower skin 3). The size of the right rib 11d in the front-to-rear direction (Y direction) (which is the size of the right rib 11d in the longitudinal direction) is equal to the size of the right side surface 7d of the upper skin 2 (the right side surface 10d of the lower skin 3) in the front-to-rear direction (Y direction).

[0060] The right rib 11d is disposed so that its surface (the surface visible from the outside) is located on the same plane as the right side surface 7d of the upper skin 2 (the right side surface 10d of the lower skin 3). In other words, the right rib 11d is disposed so that its surface is flush with the right side surface 7d of the upper skin 2 (the right side surface 10d of the lower skin 3).

[0061] The left rib 11c is disposed along the left side surface 7c of the upper skin 2 (the left side surface 10c of the lower skin 3). The size of the left rib 11c in the front-to-rear direction (Y direction) (which is the size of the left rib 11c in the longitudinal direction) is equal to the size of the left side surface 7c of the upper skin 2 (the left side surface 10c of the lower skin 3) in the front-to-rear direction (Y direction).

[0062] The size of the left rib 11c in the vertical direction (Z direction) (which is the size of the left rib 11c in the short direction) is equal to the size of the right rib 11d in the vertical direction (Z direction) (which is the size of the right rib 11d in the short direction).

[0063] The left rib 11c is arranged so that its surface (the surface visible from the outside) is flush with the left side surface 7c of the upper skin 2 (the left side surface 10c of the lower skin 3).

[0064] 1, the front rib 11a is disposed along the front side surface 7a of the upper skin 2 (the front side surface 10a of the lower skin 3). The size of the front rib 11a in the left-right direction (X direction) (which is the size of the front rib 11a in the longitudinal direction) is approximately equal to the size of the front side surface 7a of the upper skin 2 (the front side surface 10a of the lower skin 3) in the left-right direction (X direction).

[0065] To be precise, the longitudinal size of the front rib 11a is equal to the size of the front side surface 7a of the upper skin 2 (the front side surface 10a of the lower skin 3) minus the thickness of each of the left and right ribs 11c and 11d (the size in the left-right direction (X direction)).

[0066] The size of the front rib 11a in the vertical direction (Z direction) (which is the size of the front rib 11a in the short side direction) is equal to the size of the left and right ribs 11c and 11d in the short side direction.

[0067] The front rib 11a is arranged so that its surface (the surface visible from the outside) is located on the same plane as the front side surface 7a of the upper skin 2 (the front side surface 10a of the lower skin 3).

[0068] The rear rib 11b is disposed along the rear side surface 7b of the upper skin 2 (the rear side surface 10b of the lower skin 3). The size of the rear rib 11b in the left-right direction (X direction) (which is the size of the rear rib 11b in the longitudinal direction) is approximately equal to the size of the rear side surface 7b of the upper skin 2 (the rear side surface 10b of the lower skin 3) in the left-right direction (X direction).

[0069] To be precise, the longitudinal size of the rear rib 11b is equal to the size of the rear side surface 7b of the upper skin 2 (the rear side surface 10b of the lower skin 3) minus the thickness of each of the left and right ribs 11c and 11d.

[0070] The size of the rear rib 11b in the vertical direction (Z direction) (which is the size of the rear rib 11b in the short side direction) is equal to the size of the left and right ribs 11c and 11d in the short side direction.

[0071] The rear rib 11b is arranged so that its surface (the surface visible from the outside) is located on the same plane as the rear side surface 7b of the upper skin 2 (the rear side surface 10b of the lower skin 3).

[0072] The ends of the front, rear, left, and right ribs 11a to 11d are connected to each other to form the intermediate rib member 4. The intermediate rib member 4 (front, rear, left, and right ribs 11a to 11d) is connected to the second main surface 6 of the upper skin 2 and the third main surface 8 of the lower skin 3. As a result, the front, rear, left, and right ribs 11a to 11d fill the space between the front, rear, left, and right side surfaces 7 and 10 of the upper skin 2 and the lower skin 3. Then, the internal space of the structure 1 is formed, as shown in FIG. 2 .

[0073] The front, rear, left and right ribs 11a to 11d are made of, for example, CFRP, but are not limited to this and may be made of a metal material such as aluminum or other materials.

[0074] [Deformation of Side Portions of Upper Skin 2 (Lower Skin 3)] FIGS. 3 to 5 are diagrams that schematically show deformation of the side portions of the upper skin 2 (lower skin 3) made of CFRP due to moisture absorption.

[0075] 3 to 5 show a cross section of the upper skin 2 (lower skin 3) shown in Fig. 2, but the hatching that indicates a cross section has been omitted. Also, in Fig. 3 to 5, the moisture absorption concentration inside the upper skin 2 (lower skin 3) is expressed by shades ranging from black to white. The darker the black, the higher the moisture absorption concentration, and the closer to white, the lower the moisture absorption concentration.

[0076] The resin (matrix) that makes up CFRP absorbs moisture from the environment, expanding and causing dimensional deformation. The higher the environmental temperature, the faster the moisture absorption and diffusion within the CFRP occurs. Also, the higher the environmental relative humidity, the higher the moisture concentration within the CFRP.

[0077] When the upper skin 2 (lower skin 3), a CFRP plate member, is left in a high-humidity, high-temperature environment, moisture diffuses from the surface toward the interior, causing moisture absorption expansion in proportion to the moisture concentration. Furthermore, moisture absorption deformation is small in the planar direction of the flatwise surface of the upper skin 2 (lower skin 3), but large in the planar direction of the edgewise surface, i.e., in the thickness direction of the upper skin 2 (lower skin 3).

[0078] 3 to 5, moisture absorption begins from the surface side of the side surface 7 of the upper skin 2 (side surface 10 of the lower skin 3), and the moisture slowly penetrates and diffuses toward the inside of the upper skin 2 (lower skin 3). Therefore, a concentration gradient occurs from the side surface 7 (side surface 10) toward the inside of the upper skin 2 (lower skin 3).

[0079] As a result, in the upper skin 2 (lower skin 3), the thickness from the upper first main surface 5 to the lower second main surface 6 (from the upper third main surface 8 to the lower fourth main surface 9) is greatest at the side surface 7 (side surface 10), and deformation occurs in which the thickness decreases from the side surface 7 (side surface 10) toward the inside of the upper skin 2 (lower skin 3). In other words, moisture absorption causes a trumpet-shaped flaring deformation (hereinafter referred to as flare deformation) to occur in the side surface 7 (side surface 10), which is an edgewise surface.

[0080] 3 to 5, the flare deformation occurs in a curved shape. When the shape of the first main surface 5 and the second main surface 6 (the third main surface 8 and the fourth main surface 9) in the side surface 7 (side surface 10) portion is expressed in terms of a radius of curvature, deformation occurs in which the radius of curvature increases from the side surface 7 (side surface 10) toward the interior. In the portion of the upper skin 2 (lower skin 3) where moisture absorption expansion does not occur, the first main surface 5 and the second main surface 6 (the third main surface 8 and the fourth main surface 9) become flat, and the radius of curvature becomes maximum (infinity).

[0081] As shown in Figure 3, in the initial stage of moisture absorption, the moisture concentration at the side surface 7 (side surface 10) increases, while moisture diffusion into the upper skin 2 (lower skin 3) does not progress. Therefore, moisture absorption expansion occurs significantly at the side surface 7 (side surface 10), but moisture absorption expansion is small on the inner side of the upper skin 2 (lower skin 3), and the region R1 where moisture absorption expansion occurs is also in the range close to the side surface 7 (side surface 10). As a result, flare deformation with a relatively large inclination angle occurs from the side surface 7 (side surface 10) toward the inner side. In other words, flare deformation with a large rate of increase in the radius of curvature occurs from the side surface 7 (side surface 10) toward the inner side.

[0082] As shown in Figure 4, as moisture diffusion progresses toward the inside of the upper skin 2 (lower skin 3), the moisture absorption concentration at the side surface 7 (side surface 10) remains almost unchanged, while the moisture absorption concentration gradually increases toward the inside of the upper skin 2 (lower skin 3). As a result, while the thickness at the side surface 7 (side surface 10) remains almost unchanged, moisture absorption expansion gradually increases toward the inside, and the region R1 where moisture absorption expansion occurs also extends to a range further away from the side surface 7 (side surface 10). As a result, the inclination angle of the flare deformation becomes gentler from the side surface 7 (side surface 10) toward the inside. In other words, the rate of increase in the radius of curvature becomes smaller from the side surface 7 (side surface 10) toward the inside.

[0083] As shown in Figure 5, as moisture diffusion continues toward the inside of the upper skin 2 (lower skin 3), moisture absorption expansion becomes even greater on the inside of the upper skin 2 (lower skin 3), and the region R1 where moisture absorption expansion occurs also becomes larger. As a result, the inclination angle of the flare deformation becomes even gentler from the side surface 7 (side surface 10) toward the inside. In other words, the rate of increase in the radius of curvature becomes even smaller from the side surface 7 (side surface 10) toward the inside.

[0084] 3 to 5 is a phenomenon that can occur regardless of the specific configuration of the CFRP. Of course, the manner in which the flare deformation occurs varies depending on the environment in which the CFRP is used.

[0085] Flare deformation can also occur even when the flatwise surface of CFRP is protected with a moisture-absorbing barrier layer such as aluminum. For example, protecting the edgewise surface of CFRP with a moisture-absorbing barrier layer is an effective measure, but it is difficult to achieve complete moisture protection, and it is also difficult to form a moisture-absorbing barrier layer on the edgewise surface. For example, forming a protective layer that is sufficiently flat and without steps on the edgewise surface is an extremely complicated task.

[0086] Naturally, flare deformation occurs at all positions on the side surface 7 of the upper skin 2 (side surface 10 of the lower skin 3). For example, at the four corner positions of the upper skin 2 (lower skin 3), flare deformation occurs in both the left-right direction (X direction) and the front-back direction (Y direction).

[0087] When the upper skin 2 (lower skin 3) has absorbed moisture sufficiently and the concentration gradient disappears, the entire upper skin 2 (lower skin 3) absorbs moisture and expands, increasing its thickness. At this stage, the flaring deformation of the side surface 7 (side surface 10) disappears. Although it depends on the environment in which the structure 1 is used, it is thought that in many cases a long time, such as one to ten years, is required for the flaring deformation to disappear.

[0088] Figure 6 is a cross-sectional view that schematically shows the shape of the structure 1 when the flare deformation shown in Figures 3 to 5 occurs on the left and right side surfaces 7 (7c and 7d) of the upper skin 2 and the left and right side surfaces 10 (10c and 10d) of the lower skin 3.

[0089] A new finding made by the inventors is that when flare deformation occurs in the side surface 7 of the upper skin 2 (side surface 10 of the lower skin 3), stress is generated at the connection points between the upper skin 2 (lower skin 3) and the front, rear, left, and right ribs 11 (11c and 11d). As a result, as shown in Figure 6, the upper skin 2 (lower skin 3) deforms in a concave shape from the outside to the inside. As a result, the flatness of the first main surface 5 of the upper skin 2 and the fourth main surface 9 of the lower skin 3 decreases.

[0090] As shown in Figure 6, if the structure 1 itself is deformed due to the flare deformation of the upper skin 2 (lower skin 3), machining accuracy may be reduced when the structure 1 is applied to a machining device. For example, when the structure 1 is used as a work stage that holds a workpiece, a reduction in the flatness of the first main surface 5 of the upper skin 2 and the fourth main surface 9 of the lower skin 3 may cause a reduction in machining accuracy. For example, in a machining device that requires precise machining, even a deformation (error) of a few micrometers affects machining accuracy, and the deformation of the structure 1 itself due to the flare deformation shown in Figure 6 also becomes a problem.

[0091] [Configuration to Accommodate Flare Deformation] The inventors have conducted extensive research into ways to suppress deformation of the structure 1 itself caused by flaring deformation of the side surface 7 of the upper skin 2 (side surface 10 of the lower skin 3) due to moisture absorption, and have devised a new configuration for connecting the second main surface 6 of the upper skin 2 with the intermediate rib member 4 (front, rear, left, and right ribs 11a to 11d) that accommodates flaring deformation of the side surface 7 of the upper skin 2 due to moisture absorption.

[0092] Similarly, the inventor has newly devised a configuration for connecting the third main surface 8 of the lower skin 3 with the intermediate rib member 4 (front, rear, left and right ribs 11a to 11d) that accommodates the flare deformation of the side surface 10 of the lower skin 3 due to moisture absorption.

[0093] Hereinafter, the configuration that accommodates the flare deformation of the side surface 7 of the upper skin 2 due to moisture absorption and the configuration that accommodates the flare deformation of the side surface 10 of the lower skin 3 due to moisture absorption will be referred to as a flare deformation accommodating configuration.

[0094] The flare deformation-compatible configuration realizes a connection between the upper skin 2 (lower skin 3) and the front, rear, left and right ribs 11a to 11d, thereby making it possible to suppress deformation of the structure 1 itself caused by flare deformation of the upper skin 2 (lower skin 3) due to moisture absorption.

[0095] Hereinafter, variations of the flare deformation-accommodating configuration newly devised by the present inventor will be described.

[0096] In the structure 1 employing the flare deformation-compatible configuration described below, the upper skin 2 is a plate-like member containing carbon fiber and resin according to the present invention, and is one embodiment of the first member having a first main surface and a second main surface that face each other.

[0097] The lower skin 3 of the structure 1 is an embodiment of the second member according to the present invention, which is disposed opposite the first member. The lower skin 3 is a plate-like member containing carbon fiber and resin, and is an embodiment of the second member according to the present invention, which has a third main surface and a fourth main surface facing each other.

[0098] The intermediate rib member 4 is an embodiment of an intermediate member according to the present invention that is disposed between the first member and the second member and is connected to both the second main surface of the first member and the second member, and also an embodiment of an intermediate member according to the present invention that is connected to the third main surface of the second member.

[0099] The flare deformation-accommodating configuration realizes the connection between the second main surface and the intermediate member, and the connection between the third main surface and the intermediate member.

[0100] (Inner region arrangement configuration) An inner region arrangement configuration included in the flare deformation compliant configuration will be described. Fig. 7 is a schematic diagram showing a configuration example of the structure 13 when the inner region arrangement configuration is adopted. Fig. 8 is a cross-sectional view of the structure 13 shown in Fig. 7 taken along line B-B. Fig. 9 is a diagram of the second main surface 6 of the upper skin 2 as viewed from below in the vertical direction (Z direction).

[0101] The inner region arrangement configuration is a configuration in which the intermediate rib member 4 is connected to an inner region IA that is a predetermined distance t away from the periphery 14 of the second main surface 6 of the upper skin 2. The periphery 14 of the second main surface 6 is the portion that becomes the side surface 7 of the upper skin 2 shown in Figure 7. The portion that becomes the front side surface 7a becomes the front periphery 14a, and the portion that becomes the rear side surface 7b becomes the rear periphery 14b. Furthermore, the portion that becomes the left side surface 7c becomes the left periphery 14c, and the portion that becomes the right side surface 7d becomes the right periphery 14d.

[0102] Furthermore, the inner region IA being a predetermined distance t away from the periphery 14 of the second main surface 6 means that the shortest distance from the periphery 14 to the inner region IA is at least the distance t.

[0103] 7 to 9, the front rib 11a of the intermediate rib member 4 is disposed along the front peripheral edge 14a in the inner region IA. The rear rib 11b is disposed along the rear peripheral edge 14b in the inner region IA. The left rib 11c is disposed along the left peripheral edge 14c in the inner region IA. The right rib 11d is disposed along the right peripheral edge 14d in the inner region IA.

[0104] The connection of the intermediate rib member 4 (front, rear, left, and right ribs 11a to 11d) to the third main surface 8 of the lower skin 3 is also achieved by the same configuration as in Fig. 9. That is, the connection of the intermediate rib member 4 (front, rear, left, and right ribs 11a to 11d) to the third main surface 8 of the lower skin 3 is also achieved by the inner region arrangement configuration.

[0105] As shown in Figure 8, the front, rear, left, and right ribs 11a to 11d are connected to the inner area IA of the second main surface 6 of the upper skin 2 (the third main surface 8 of the lower skin 3). This makes it possible to suppress stress generation at the connection points between the upper skin 2 (the lower skin 3) and the front, rear, left, and right ribs 11a to 11d, and to suppress deformation of the structure 13 itself due to flare deformation. As a result, it is possible to suppress concave deformation of the upper skin 2 (the lower skin 3), and to suppress a decrease in flatness of the first main surface 5 of the upper skin 2 and the fourth main surface 9 of the lower skin 3.

[0106] The distance t defining the inner region IA can be set, for example, based on the deformation (radius of curvature) of the peripheral portion of the second main surface 6 (third main surface 8) due to flare deformation. As shown in Figures 3 to 5, the radius of curvature gradually increases as the distance from the side surface 7 (side surface 10) increases inward. Furthermore, even at the same position, the radius of curvature gradually increases as moisture absorption progresses.

[0107] For example, it is possible to set the distance t that defines the inner area IA based on the position where the radius of curvature becomes larger than a predetermined threshold value. Of course, it is also possible to set the position where the radius of curvature becomes larger than a predetermined threshold value as the distance t that defines the inner area IA.

[0108] It is also possible to set the distance t that defines the inner region IA taking into consideration the time it takes for moisture absorption to progress. It is also possible to set the distance t based on the position at which the radius of curvature becomes larger than a predetermined threshold value after a predetermined time has elapsed. For example, the distance t that defines the inner region IA may be set based on the idea that, in the early stages of moisture absorption, the radius of curvature becomes smaller than the predetermined threshold value, but if the radius of curvature becomes larger than the predetermined threshold value after a certain amount of time has passed, the influence of flare deformation during that time is acceptable.

[0109] Of course, it is possible to consider the influence of flare deformation in the early stage of moisture absorption with importance and set the distance t defining the inner area IA to a large value.

[0110] As a result of studies by the inventors, it was found that by setting the distance t to 5 mm, it was possible to sufficiently suppress deformation of the structure 13 itself due to flare deformation. That is, by setting a region 5 mm away from the periphery 14 of the second main surface 6 of the upper skin 2 (the periphery of the third main surface 8 of the lower skin 3) as the inner region IA, it was possible to sufficiently suppress deformation of the structure 13 itself due to flare deformation. Of course, the invention is not limited to setting the inner region IA in this way.

[0111] 10 is a schematic diagram illustrating an example of setting the connection positions of the intermediate rib member 4. The inventors have also conducted extensive research into the connection positions of the intermediate rib member 4 (front, rear, left, and right ribs 11a to 11d) that are arranged along the periphery 14 of the second main surface 6 of the upper skin 2.

[0112] For example, if the front, rear, left, and right ribs 11a to 11d are positioned too far from the periphery 14 of the second main surface 6 (i.e., near the center of the second main surface 6), the function of supporting the upper skin 2 and the lower skin 3 may be reduced, possibly reducing the strength of the structure 13. Furthermore, the upper skin 2 and the lower skin 3 may tilt, possibly compromising the stability of the structure 1.

[0113] Therefore, it is desirable to set the front, rear, left and right ribs 11a to 11d at positions close to the periphery 14 of the second main surface 6 within a range where the influence of the flare deformation can be suppressed.

[0114] As a result of considering these points, the present inventors have devised the following new technical feature. Specifically, as shown in Figure 10, the front, rear, left, and right ribs 11a to 11d are arranged in the inner region IA within a range of a predetermined distance from the periphery of the inner region IA. For example, the front, rear, left, and right ribs 11a to 11d are arranged in a region R2 that is a distance from the periphery 14 of the second main surface 6 of the upper skin 2 that is greater than 5 mm and less than 25 mm.

[0115] This made it possible to suppress deformation of the structure 13 itself due to flare deformation while sufficiently suppressing decreases in strength, stability, and the like of the structure 13. That is, the farther the connection positions of the front, rear, left, and right ribs 11a to 11d are from the peripheral edge 14 of the second main surface 6, the more effectively the effects of flare deformation can be suppressed. On the other hand, the closer the connection positions of the front, rear, left, and right ribs 11a to 11d are to the peripheral edge 14 of the second main surface 6, the more the strength and stability of the structure 13 are improved.

[0116] As a result of examining this trade-off relationship, a new and effective configuration was found in which the front, rear, left, and right ribs 11a to 11d are arranged in the region R2 that is more than 5 mm and less than 25 mm from the periphery 14 of the second main surface 6. Of course, the application of the present invention is not limited to the ranges defined by these numerical values.

[0117] 1 and 2 , the inner region arrangement configuration has the following advantages over the configuration in which the intermediate rib member 4 (front, rear, left, and right ribs 11a to 11d) are arranged flush with the side surface 7 of the upper skin 2 (side surface 10 of the lower skin 3). Specifically, since the intermediate rib member 4 (front, rear, left, and right ribs 11a to 11d) only needs to be included in the inner region IA (region R2), there is a high degree of freedom in the connection position. This simplifies the process of connecting the intermediate rib member 4 (front, rear, left, and right ribs 11a to 11d) to the upper skin 2 (lower skin 3).

[0118] 11 and 12 are schematic diagrams showing variations of the embodiment of the intermediate member according to the present invention.

[0119] In the example shown in Figure 11, one embodiment of the intermediate member is configured as an intermediate rib member 4 (front, rear, left and right ribs 11a to 11d) arranged along the periphery 14 of the second main surface 6 of the upper skin 2 (the periphery of the third main surface 8 of the lower skin 3), and a core member 16 arranged inside the intermediate rib member 4.

[0120] 11 , the core member 16 includes a plurality of plate-like members 17a extending in the front-rear direction (Y direction) and arranged at equal intervals in the left-right direction (X direction). The core member 16 also includes a plurality of plate-like members 17b that intersect with the plate-like members 17a at 60 degrees clockwise. The core member 16 also includes a plurality of plate-like members 17c that intersect with the plate-like members 17a at 60 degrees counterclockwise.

[0121] The ends of each of the plate-like members 17a to 17c are connected to one of the front, rear, left, and right ribs 11a to 11d. Slits are formed at the intersections of the plate-like members 17a to 17c, and the slits fit together.

[0122] Each of the plate-like members 17a to 17c is made of, for example, CFRP, but is not limited to this and may be made of a metal material such as aluminum or other materials.

[0123] 11 can be said to have a honeycomb structure in the broad sense when viewed from the top-bottom direction (Z direction). Of course, the configuration of the core member 16 is not limited and may be designed arbitrarily.

[0124] The rib members constituting the intermediate member according to the present invention are typically made of plate-like or columnar members and are arranged along the periphery 14 of the second main surface 6 of the upper skin 2 (the periphery of the third main surface 8 of the lower skin 3). For example, the rib members may be columnar members such as circular cylinders or rectangular prisms arranged at equal intervals along the periphery 14 of the second main surface 6 of the upper skin 2 (the periphery of the third main surface 8 of the lower skin 3). Alternatively, the rib members may be four columnar ribs arranged at the four corners of the inner area IA shown in FIG. 11 etc. Any other configuration may be adopted.

[0125] The core member is a member disposed inside the rib member. By disposing the core member as an intermediate member and connecting it to the upper skin 2 and the lower skin 3, the strength of the structure 13 can be improved.

[0126] 12, only the core member 16 is disposed. In this manner, the intermediate member may be configured with only the core member 16 without disposing the rib member.

[0127] In any of the cases where the intermediate member is configured to consist only of a rib member (intermediate rib member 4) as shown in Fig. 9 , where the intermediate member is configured to consist of a rib member (intermediate rib member 4) and a core member 16 as shown in Fig. 11 , and where the intermediate member is configured to consist only of a core member 16 as shown in Fig. 12 , the intermediate member is connected to the inner area IA of the second main surface 6 of the upper skin 2 (the third main surface 8 of the lower skin 3). This makes it possible to suppress deformation of the structure 13 itself due to flare deformation, and to suppress a decrease in the flatness of the first main surface 5 of the upper skin 2 and the fourth main surface 9 of the lower skin 3.

[0128] 13 and 14 are schematic diagrams showing a partial inner region arrangement configuration, which is a modification of the inner region arrangement configuration described with reference to Fig. 11 and 12. For example, even in a configuration in which a part of the intermediate member is not included in the inner region IA, as long as most of the intermediate member is arranged in the inner region IA, the effect of suppressing deformation of the structure itself due to flare deformation can be exerted.

[0129] 13, the rear rib 11b is disposed at the position of the rear peripheral edge 14b of the second main surface 6 of the upper skin 2. In addition, in the example shown in Fig. 14, the rear ends of the multiple plate-like members 17a extend to the position of the rear peripheral edge 14b of the second main surface 6 of the upper skin 2.

[0130] Even when the partial inner region arrangement configuration as shown in Figures 13 and 14 is adopted, since most of the intermediate member is arranged in the inner region IA, the effect of suppressing deformation of the structure itself due to flare deformation is exerted.

[0131] In other words, a partial inner area arrangement configuration in which a portion of the intermediate member is arranged outside the inner area IA, but the majority of the intermediate member is arranged in the inner area IA, is also included in the flare deformation-compatible configuration of the present invention.

[0132] One possible method for determining whether or not a partial inner region arrangement configuration is one that uses the ratio of the portion connected to the inner region IA to the entire portion connected to the second main surface 6 of the upper skin 2 of the intermediate member.

[0133] For example, the following percentages can be used as criteria for determining whether or not a configuration has a partial inner region arrangement. If 60% or more of the portion connected to the second main surface 6 is connected to the inner region IA, it is determined to have a partial inner region arrangement configuration according to the present invention. Alternatively, if 70% or more of the portion connected to the second main surface 6 is connected to the inner region IA, it is determined to have a partial inner region arrangement configuration according to the present invention.

[0134] Alternatively, if 80% or more of the portion connected to the second main surface 6 is connected to the inner region IA, it is considered to be a partial inner region arrangement configuration according to the present invention. Alternatively, if 90% or more of the portion connected to the second main surface 6 is connected to the inner region IA, it is considered to be a partial inner region arrangement configuration according to the present invention.

[0135] In this way, it is possible to appropriately set the proportion of the portion connected to the inner region IA and determine whether or not the partial inner region configuration according to the present invention is adopted. It is desirable that at least 50% or more of the portion connected to the second main surface 6 is arranged in the inner region IA.

[0136] (Double Rib Configuration) The double rib configuration included in the flare deformation accommodating configuration will be described. Fig. 15 is a cross-sectional view of a structure 19 in which a double rib configuration is adopted. Fig. 16 is a view of the second main surface 6 of the upper skin 2 as viewed from below in the vertical direction (Z direction).

[0137] 15 and 16 , in the double rib configuration, a first intermediate rib member 20 and a second intermediate rib member 21 are arranged as intermediate members along the periphery 14 of the second main surface 6 of the upper skin 2. In addition, the double rib configuration is configured such that the first intermediate rib member 20 is arranged on the periphery 14 of the second main surface 6 of the upper skin 2, and the second intermediate rib member 21 is arranged more inward than the first intermediate rib member 20.

[0138] 15 and 16, the first intermediate rib member 20 has a first front rib 22a, a first rear rib 22b, a first left rib 22c, and a first right rib 22d. The first front rib 22a, the first rear rib 22b, the first left rib 22c, and the first right rib 22d have the same configuration as the front, rear, left, and right ribs 11 shown in FIGS.

[0139] In other words, the first intermediate rib member 20 is positioned so that its surface (the surface visible from the outside) is located on the same plane as the front, rear, left and right side surfaces 7 of the upper skin 2 (the front, rear, left and right side surfaces 10 of the lower skin 3).

[0140] The second intermediate rib member 21 has a second front rib 23 a, a second rear rib 23 b, a second left rib 23 c, and a second right rib 23 d. The second intermediate rib member 21 may have the same configuration as the intermediate rib member 4 in the inner region arrangement configuration shown in Figures 7 to 9, for example.

[0141] That is, the second front rib 23a, the second rear rib 23b, the second left rib 23c, and the second right rib 23d can be configured in the same manner as the front rib 11a, the rear rib 11b, the left rib 11c, and the right rib 11d shown in Figures 7 to 9.

[0142] 15 , in the double rib configuration, when flaring occurs on the side surface 7 of the upper skin 2 (side surface 10 of the lower skin 3), the concave deformation of the upper skin 2 (lower skin 3) can be suppressed by the second intermediate rib member 21. That is, the second intermediate rib member 21 can correct, suppress, and alleviate the concave deformation of the upper skin 2 (lower skin 3). As a result, deformation of the structure 19 itself can be suppressed, and a decrease in the flatness of the first main surface 5 of the upper skin 2 and the fourth main surface 9 of the lower skin 3 can be suppressed.

[0143] The double rib configuration can improve the strength and stability of the structure 19. Furthermore, the double rib configuration can also make it possible to use the first intermediate rib member 20 disposed on the outside like a decorative panel, thereby improving the design of the structure 19.

[0144] If a configuration similar to the inner region arrangement configuration is adopted for the connection position of the second intermediate rib member 21, the second intermediate rib member 21 will be arranged in the inner region IA, a predetermined distance away from the periphery 14 of the second main surface 6 of the upper skin 2 (the periphery of the third main surface 8 of the lower skin 3).

[0145] For example, the inner region IA can be set to a region 5 mm away from the periphery 14 of the second main surface 6 of the upper skin 2 (the periphery of the third main surface 8 of the lower skin 3). Also, the second intermediate rib member 21 may be disposed in a region R2 that is 5 mm away from the periphery 14 of the second main surface 6 of the upper skin 2 (the periphery of the third main surface 8 of the lower skin 3) and is greater than 5 mm and less than 25 mm.

[0146] Of course, the position of the second intermediate rib member 21 is not limited to the position of the intermediate rib member 4 in the inner placement area configuration, and other positions that can press down and suppress the concave deformation of the upper skin 2 (lower skin 3) may be set.

[0147] (First flare deformation absorbing configuration) A first flare deformation absorbing configuration included in the flare deformation accommodation configuration will be described. Figures 17 and 18 are enlarged views of a cross section of structure 25 when the first flare deformation absorbing configuration is employed.

[0148] Fig. 17 is a schematic diagram showing the state before flare deformation occurs in the side surfaces 7 (left side surface 7c) and 10 (left side surface 10c) of the upper skin 2 and the lower skin 3. Fig. 18 is a schematic diagram showing the state when flare deformation occurs in the side surfaces 7 and 10 of the upper skin 2 and the lower skin 3.

[0149] In the first flare deformation absorbing configuration, an intermediate rib member 27 is arranged as an intermediate member along the periphery 14 of the second main surface 6 of the upper skin 2 (the periphery 26 of the third main surface 8 of the lower skin 3).

[0150] The peripheral edge 26 of the third main surface 8 of the lower skin 3 is the portion that becomes the side surface 10 of the lower skin 3. In Figures 17 and 18, of the peripheral edge 26 of the third main surface 8, a left peripheral edge 26c that becomes the left side surface 10c is illustrated.

[0151] 1, the intermediate rib members 27 are each a plate-shaped member, and have front, rear, left, and right ribs 28 arranged on the periphery 14 of the second main surface 6 of the upper skin 2 (the periphery 26 of the third main surface 8 of the lower skin 3). In Figures 17 and 18, the left rib 28c of the intermediate rib member 27 is shown.

[0152] The first flare deformation absorption configuration is a configuration in which the cross-sectional area of ​​the intermediate rib member 27 when cut along the XY plane is large enough to allow the intermediate rib member 27 to deform in accordance with the flare deformation of the side portions of each of the upper skin 2 and the lower skin 3.

[0153] The XY plane direction corresponds to a direction perpendicular to the direction in which the upper skin 2 and the lower skin 3 face each other. In other words, the size of the cross-sectional area when the intermediate rib member 27 is cut along the XY plane direction corresponds to one embodiment of the size of the cross-sectional area of ​​the rib member in the direction perpendicular to the direction in which the first member and the second member face each other according to the present invention.

[0154] In the example shown in Figures 17 and 18, the thickness of the front, rear, left and right ribs 28 that make up the intermediate rib member 27 is designed to be large enough to absorb the flare deformation of the side portions of each of the upper skin 2 and the lower skin 3 through deformation of the front, rear, left and right ribs 28, thereby achieving the first flare deformation absorption configuration.

[0155] The thickness of the front, rear, left, and right ribs 28 refers to the thickness between the surface (the surface visible from the outside) and the inner surface (the surface facing the internal space) of the front, rear, left, and right ribs 28. The surface (the surface visible from the outside) and the inner surface (the surface facing the internal space) of the front, rear, left, and right ribs 28 correspond to one embodiment of two opposing main surfaces of the rib member according to the present invention.

[0156] Flare deformation can be absorbed by deformation of the front, rear, left and right ribs 28, making it possible to suppress deformation of the structure 25 itself and suppress a decrease in flatness of the first main surface 5 of the upper skin 2 and the fourth main surface 9 of the lower skin 3.

[0157] The thickness of the front, rear, left, and right ribs 28 for realizing the first flare deformation absorption configuration may be appropriately designed based on, for example, the specific configuration and thickness of the upper skin 2 and the lower skin 3 as CFRP, the material and configuration of the front, rear, left, and right ribs 28, etc.

[0158] After investigations by the present inventors, it was found that the front, rear, left, and right ribs 28 could be made of CFRP and had a thickness smaller than that of each of the upper skin 2 and the lower skin 3. This made it possible to realize the first flare deformation absorbing configuration according to the present invention. Making the front, rear, left, and right ribs 28 of CFRP is also advantageous in reducing the weight of the structure 25. Of course, the present inventors are not limited to this configuration, and any configuration that can absorb flare deformation by deformation of the intermediate rib member 27 may be adopted.

[0159] (Second flare deformation absorbing configuration) A second flare deformation absorbing configuration included in the flare deformation accommodation configuration will be described. Figures 19 and 20 are enlarged views of a cross section of the structure 30 when the second flare deformation absorbing configuration is employed.

[0160] Fig. 19 is a schematic diagram showing the state before flare deformation occurs on the side surfaces 7 (left side surface 7c) and 10 (left side surface 10c) of the upper skin 2 and the lower skin 3. Fig. 20 is a schematic diagram showing the state when flare deformation occurs on the side surfaces 7 and 10 of the upper skin 2 and the lower skin 3.

[0161] In the second flare deformation absorbing configuration, an intermediate rib member 31 is arranged as an intermediate member along the periphery 14 of the second main surface 6 of the upper skin 2 (the periphery 26 of the third main surface 8 of the lower skin 3).

[0162] The intermediate rib member 31 has front, rear, left and right ribs 32 arranged on the periphery 14 of the second main surface 6 of the upper skin 2 (the periphery 26 of the third main surface 8 of the lower skin 3). In Figures 19 and 20, the left rib 32c of the intermediate rib member 31 is shown.

[0163] In the second flare deformation absorption configuration, as shown in Figures 19 and 20, the front, rear, left and right ribs 32 are composed of connection portions 33 connected to the second main surface 6 of the upper skin 2, a main body portion 34, and connection portions 35 connected to the third main surface 8 of the lower skin 3.

[0164] The second flare deformation absorption configuration is configured such that the cross-sectional area of ​​the connection portion 33 connected to the second main surface 6 of the upper skin 2 of the intermediate rib member 31 and the connection portion 35 connected to the third main surface 8 of the lower skin 3 when cut along the XY plane is large enough to allow the connection portions 33 and 35 to deform in accordance with the flare deformation of the side portions of each of the upper skin 2 and the lower skin 3.

[0165] 20 , the second flare deformation absorbing configuration is a configuration in which the cross-sectional areas of connection portions 33 and 35 that connect the front, rear, left, and right ribs 32 to the upper skin 2 and the lower skin 3 are designed to be large enough to absorb the flare deformation of the side surfaces of the upper skin 2 and the lower skin 3 through deformation of the connection portions 33 and 35. In this example, the cross-sectional areas of the connection portions 33 and 35 are parameters that correlate with the thickness of the connection portions 33 and 35.

[0166] The deformation of the connecting portions 33 and 35 makes it possible to absorb the flare deformation, thereby making it possible to suppress deformation of the structure 30 itself and to suppress a decrease in the flatness of the first main surface 5 of the upper skin 2 and the fourth main surface 9 of the lower skin 3.

[0167] 19 and 20 , the connecting portion 33 connected to the upper skin 2 is configured so that the cross-sectional area (thickness) decreases as it approaches the upper skin 2. In addition, the connecting portion 35 connected to the lower skin 3 is configured so that the cross-sectional area (thickness) decreases as it approaches the lower skin 3.

[0168] In this way, when the cross-sectional area (thickness) of the connection portions 33 and 35 changes, the average value of the cross-sectional area (thickness) of the connection portions can be defined as the cross-sectional area (thickness) of the connection portions, and the present technology can be applied.

[0169] The cross-sectional areas (thicknesses) of the connection portions 33 and 35 of the front, rear, left, and right ribs 32 for realizing the second flare deformation absorption configuration may be appropriately designed based on, for example, the specific configuration and cross-sectional area (thickness) of the upper skin 2 and the lower skin 3 as CFRP, the material and configuration of the front, rear, left, and right ribs 32, etc.

[0170] Typically, the second flare deformation absorption configuration can be realized by configuring the cross-sectional area (thickness) of the connection portions 33 and 35 connected to the upper skin 2 and lower skin 3 of the intermediate rib member 31 to be smaller than the cross-sectional area (thickness) of the main body portion 34, which is the other part of the intermediate rib member 31.

[0171] 19 and 20 , a configuration is adopted in which the cross-sectional area (thickness) of the connecting portions 33 and 35 continuously decreases toward the upper skin 2 and the lower skin 3. Of course, this is not limiting, and the connecting portions 33 and 35 may be designed to have a plate-like configuration with a smaller cross-sectional area (thickness) than the main body portion 34, that is, a configuration in which the cross-sectional area (thickness) is constant.

[0172] (Third flare deformation absorbing configuration) A third flare deformation absorbing configuration included in the flare deformation accommodating configuration will be described. In the third flare deformation absorbing configuration, an intermediate member is connected to the second main surface 6 of the upper skin 2 (the third main surface 8 of the lower skin 3) by an adhesive layer.

[0173] The adhesive layer may be formed by applying a thermoplastic or thermosetting adhesive, or may be formed by using a sheet-like adhesive, adhesive film, adhesive tape, or the like.

[0174] The third flare deformation absorption configuration is a configuration in which the thickness from the intermediate member of the adhesive layer to the second main surface 6 of the upper skin 2 (the third main surface 8 of the lower skin 3) is designed to be large enough to alleviate flare deformation of the side portions of each of the upper skin 2 and the lower skin 3.

[0175] Since the adhesive layer can absorb the flare deformation, it is possible to suppress deformation of the structure 30 itself, and it is possible to suppress a decrease in the flatness of the first main surface 5 of the upper skin 2 and the fourth main surface 9 of the lower skin 3.

[0176] The thickness of the adhesive layer for realizing the third flare deformation absorption configuration may be appropriately designed based on, for example, the specific configuration and cross-sectional area (thickness) of the upper skin 2 and the lower skin 3 as CFRP.

[0177] The inventors of the present invention have found that the third flare deformation absorbing configuration according to the present invention can be realized by making the thickness of the adhesive layer greater than 0.5 mm. Of course, the thickness is not limited to this numerical range, and any thickness may be adopted as long as it is within a range that can absorb flare deformation.

[0178] (Combination of each flare deformation accommodating configuration) The flare deformation accommodating configuration according to the present invention can also be realized by appropriately combining the above-described inner region arrangement configuration, partial inner region arrangement configuration, double rib configuration, and first to third flare deformation absorbing configurations, which have been described as flare deformation accommodating configurations.

[0179] For example, the first to third flare deformation absorbing configurations may also be employed in the inner region arrangement configuration. Furthermore, in the double rib configuration, the first to third flare deformation absorbing configurations may be employed in the first intermediate rib member 20 arranged on the outside. By employing the first to third flare deformation absorbing configurations in the first intermediate rib member 20 arranged on the outside, flare deformation is absorbed, suppressing concave deformation of the upper skin 2 (lower skin 3). Furthermore, deformation can be suppressed by the second intermediate rib member 21 arranged on the inside. As a result, deformation of the structure itself due to flare deformation can be sufficiently suppressed.

[0180] [Manufacturing Method of Structure] One example of a manufacturing method of the structure 1 employing the above-described flare deformation-accommodating configuration can be a manufacturing method including the following steps: an arrangement step of placing an intermediate member between an upper skin 2, which is a plate-shaped member containing carbon fiber and resin and has a first main surface 5 and a second main surface 6 facing each other, and a lower skin 3 arranged opposite the upper skin 2; a first connection step of connecting the intermediate member to the second main surface 6 of the upper skin 2 using a configuration (flare deformation-accommodating configuration) that accommodates flare deformation of the side portion of the upper skin 2 due to moisture absorption; and a second connection step of connecting the intermediate member to the lower skin 3.

[0181] The arrangement step, the first connection step, and the second connection step may be performed independently of each other. Alternatively, the arrangement step, the first connection step, and the second connection step may be performed simultaneously. Furthermore, the arrangement step may be followed by the first connection step and the second connection step simultaneously.

[0182] When the lower skin 3 is a plate-like member containing carbon fiber and resin and is a member that generates flare deformation, the second connecting step is the following step: That is, the second connecting step is a step of connecting the intermediate member to the third main surface 8 of the lower skin 3 using a configuration that accommodates flare deformation of the side surface portion of the lower skin 3 due to moisture absorption (flare deformation-accommodating configuration).

[0183] The first and second connecting steps are performed to realize the various variations of the flare deformation-compatible configurations described above. Any connecting technique using an adhesive, a jig, or the like may be used to perform the first and second connecting steps. Furthermore, the connecting steps for realizing the various variations of the flare deformation-compatible configurations can be realized using known connecting techniques.

[0184] As described above, in the structure according to this embodiment, an intermediate member is disposed between the upper skin 2 and the lower skin 3, which are plate-shaped and comprise carbon fiber and resin. The intermediate member is connected to each of the second main surface 6 of the upper skin 2 and the third main surface 8 of the lower skin 3. The connection to the second main surface 6 of the upper skin 2 and the connection to the third main surface 8 of the lower skin 3 are realized by a flare deformation-compatible configuration that accommodates flare deformation of the side surfaces of the upper skin 2 and the lower skin 3 due to moisture absorption. As a result, it is possible to prevent deformation of the structure itself due to flare deformation of the upper skin 2 and the lower skin 3 due to moisture absorption.

[0185] When the structure according to the present technology is applied to a work stage (suction plate), high-precision positioning can be achieved due to high flatness accuracy. In addition, high-precision positioning can be performed in a short time.

[0186] For example, in the case of an apparatus that performs high-precision exposure by frequently moving the stage position, such as a step-and-repeat exposure apparatus (division projection exposure apparatus), there are significant benefits to applying the structure related to this technology to the work stage (adsorption plate).

[0187] Of course, this structure is not limited to application to work stages (suction plates), but can also be applied to frames and other components, making it possible to realize processing equipment that is lightweight and has excellent braking characteristics.

[0188] [Processing Apparatus] An example of a processing apparatus to which the structure according to the present technology can be applied will be described. The structure according to the present technology can be used in any processing apparatus that processes a workpiece such as a substrate.

[0189] 21 is a schematic diagram showing the general configuration of an exposure apparatus, which is an example of a processing apparatus. The exposure apparatus 37 is a projection exposure apparatus that exposes a workpiece W. Here, the workpiece W is a silicon workpiece, a printed circuit board, a glass substrate for a liquid crystal panel, or the like, and is a workpiece with a resist film applied to its surface.

[0190] The exposure device 37 has a light emitting unit 38 , a mask stage 39 , a projection optical system 40 , a workpiece stage 41 , and a frame 42 .

[0191] The light emitting unit 38 emits the exposure light EL. For example, a short arc type mercury lamp is used as the light emitting unit 38. The mercury lamp emits ultraviolet light having wavelengths of, for example, 365 nm (i-line), 405 nm (h-line), and 436 nm (g-line). Of course, the configuration is not limited to this, and a lamp that emits light in a wavelength band other than ultraviolet light may be used. Alternatively, a solid-state light source such as an LED (Light Emitting Diode) or an LD (Laser Diode) may be used.

[0192] The mask stage 39 is disposed below the light emitting part 38. The mask stage 39 holds an exposure mask M. A predetermined mask pattern is formed on the mask M. The mask M also has alignment marks (mask marks) formed thereon.

[0193] The projection optical system 40 irradiates the workpiece W held on the workpiece stage 41 with the exposure light EL that is emitted from the light emitting unit 38 and transmitted through the mask M. As a result, an image of the mask pattern formed on the mask M is projected onto the workpiece W. The projection optical system 40 is configured as an imaging optical system having a projection lens.

[0194] The workpiece stage 41 holds the workpiece W. The workpiece stage 41 has a suction plate to which the workpiece W is attached. A plurality of vacuum suction holes are formed in the suction plate, and the workpiece W is held by vacuum suction.

[0195] The frame 42 supports components that make up the exposure apparatus 37, such as the light emitting unit 38, the mask stage 39, the projection optical system 40, and the workpiece stage 41. These components are held in predetermined positions by the frame 42.

[0196] Note that components such as the mask stage 39 and the workpiece stage 41 may be movably supported by the frame 42. For example, the components may be supported by the frame 42 so as to be capable of linear movement in two mutually perpendicular directions along the horizontal direction, linear movement along the optical axis direction of the exposure light EL (up and down direction), and rotational movement with the optical axis direction of the exposure light EL (up and down direction) as the rotation axis direction. Of course, a portion of the frame 42 that supports the components may be configured to be movable.

[0197] For example, it is possible to realize a movement mechanism for moving components or a frame using any movement mechanism such as a linear stage using a stepping motor, or any rotation mechanism using a gear mechanism.

[0198] In the exposure device 37, once the alignment of the mask M and the workpiece W and focus control are completed, the exposure process for the workpiece W begins, and the exposure light EL is emitted from the light emitting unit 38. The exposure light EL emitted from the light emitting unit 38 is irradiated onto the workpiece W via the mask M on which a mask pattern is formed and the projection optical system 40. As a result, the mask pattern is projected onto the workpiece W and exposed.

[0199] 21 , the structure according to the present technology is applied to components such as a frame 42 and a work stage (suction plate) 41. This makes it possible to sufficiently suppress deformation of the structure itself due to flare deformation, and makes it possible to demonstrate characteristics that are effective in improving exposure accuracy. As a result, high exposure accuracy is achieved.

[0200] 22 is a schematic diagram showing the general configuration of a laser processing apparatus 43, which is an example of a processing apparatus. The laser processing apparatus 43 has a laser beam emitting unit 44, a workpiece stage 45, and a frame 46.

[0201] The laser emission unit 44 emits a laser beam L. The laser beam L emitted from the laser emission unit 44 is irradiated onto a workpiece W held on a workpiece stage 45, and processing such as cutting or drilling the workpiece W is performed.

[0202] The frame 46 supports components that make up the laser processing device 43, such as the laser emission unit 44 and the workpiece stage 45. These components are held in predetermined positions by the frame 46. Note that the frame 46 may movably support components such as the workpiece stage 45. Of course, a portion of the frame 46 that supports the components may be configured to be movable.

[0203] In the laser processing device 43 shown in Fig. 22, the structure according to the present technology is applied to components such as a frame 46 and a work stage 45. This makes it possible to sufficiently suppress deformation of the structure itself due to flare deformation, and makes it possible to exhibit characteristics that are effective in improving laser processing accuracy. As a result, high laser processing accuracy is achieved.

[0204] In addition, the structure according to the present technology can be applied to various processing devices. For example, the structure according to the present technology can be used as a component for semiconductor device manufacturing devices. The structure according to the present technology is also suitable as a stage component used for precision positioning in steppers, inspection devices, etc. In addition, the structure according to the present technology can be applied to position measurement mirrors, wafer chucks, position adjustment components, precision measurement jigs, etc., making it possible to improve processing accuracy.

[0205] <Other Embodiments> The present invention is not limited to the above-described embodiment, and various other embodiments can be realized.

[0206] In the above embodiment, the case where both the upper skin and the lower skin are made of CFRP plate-like members has been described, that is, the case where flare deformation occurs in both the upper skin and the lower skin has been described.

[0207] However, the present invention is not limited to this, and can also be applied to cases where only the upper and lower skins are made of CFRP plate-like members and are the members that generate flare deformation. In this case, the present invention is applied to the upper and lower skins made of CFRP plate-like members as one embodiment of the first member of the present invention. This makes it possible to suppress deformation of the structure itself due to flare deformation.

[0208] In the above embodiment, a CFRP plate-shaped member is given as one embodiment of the plate-shaped member containing carbon fiber and resin according to the present invention. However, the present invention can also be applied to a plate-shaped member containing carbon fiber and resin that is not classified as CFRP but that generates flare deformation as shown in Figures 3 to 5.

[0209] Various components can be manufactured using the processing apparatus according to the present invention. For example, by performing exposure using the exposure apparatus according to the present invention, various substrates on which predetermined patterns are formed can be manufactured as components. For example, components can be manufactured such as electrical circuit elements, optical elements, MEMS, recording elements, sensors, or molds. Examples of electrical circuit elements include volatile or non-volatile semiconductor memories such as DRAM, SRAM, flash memory, and MRAM, as well as semiconductor elements such as LSIs, CCDs, image sensors, and FPGAs. Examples of molds include molds for imprinting.

[0210] The structures, upper skin, lower skin, intermediate rib member, core member, inner region arrangement configuration, partial inner region arrangement configuration, double rib configuration, first to third flare deformation absorbing layers, processing device, exposure device, laser processing device, and other configurations, as well as the structure manufacturing method, exposure method, laser processing method, etc., described with reference to the drawings are merely one embodiment and can be modified as desired without departing from the spirit of the present invention. In other words, any other configurations, processing flows, algorithms, etc. for implementing the present invention may be adopted.

[0211] In this disclosure, terms such as "approximately" and "substantially" are used as appropriate to facilitate understanding of the explanation. However, there is no clear difference between using and not using terms such as "approximately." In other words, in this disclosure, concepts that define shape, size, positional relationship, state, etc., such as "center," "middle," "equal," "same," "orthogonal," and "parallel," include concepts such as "substantially center," "substantially central," "substantially equal," "substantially the same," "substantially orthogonal," and "substantially parallel."

[0212] In the present disclosure, expressions using "than", such as "greater than A" and "smaller than A", are expressions that comprehensively include both concepts that include the case where something is equivalent to A and concepts that do not include the case where something is equivalent to A. For example, "greater than A" is not limited to cases that do not include the case where something is equivalent to A, but also includes "A or more". Furthermore, "smaller than A" is not limited to "less than A" but also includes "A or less". When implementing the present invention, specific settings and the like can be appropriately adopted from the concepts included in "greater than A" and "smaller than A" so that the effects described above can be achieved.

[0213] It is also possible to combine at least two of the features of the present technology described above. That is, the various features described in each embodiment may be arbitrarily combined without distinguishing between the embodiments. Furthermore, the various effects described above are merely examples and are not intended to be limiting, and other effects may also be achieved.

[0214] IA...inner region 1, 13, 19, 25, 30...structure 2...upper skin 3...lower skin 4, 27, 31...intermediate rib member 5...first main surface of upper skin 6...second main surface of upper skin 7...side surface of upper skin 8...third main surface of lower skin 9...fourth main surface of lower skin 10...side surface of lower skin 11, 28, 32...rib 14...periphery of second main surface 16...core member 20...first intermediate rib member 21...second intermediate rib member 26...periphery of lower skin 33...connection portion of rib to upper skin 34...main body of rib 35...connection portion of rib to lower skin 37...exposure device 41, 45...work stage 43...laser processing device

Claims

1. A structure comprising: a first member, which is a plate-like member containing carbon fiber and resin and has a first main surface and a second main surface facing each other; a second member arranged opposite the first member; and an intermediate member arranged between the first member and the second member and connected to each of the second main surface of the first member and the second member, wherein the connection between the second main surface and the intermediate member is realized by a configuration that accommodates deformation of the side portion of the first member due to moisture absorption.

2. A structure according to claim 1, wherein the deformation of the side surface portion is such that the thickness from the first main surface to the second main surface is greatest on the side surface, and the thickness decreases from the side surface toward the interior of the first member.

3. A structure according to claim 1 or 2, wherein the configuration for dealing with deformation of the side surface portion includes a configuration for connecting the intermediate member to an inner region that is a predetermined distance away from the periphery of the second main surface.

4. A structure according to claim 3, wherein the inner region is a region 5 mm away from the periphery of the second main surface.

5. A structure according to claim 3, wherein the intermediate member includes a rib member disposed along the periphery of the second main surface, and the rib member is disposed in an area that is more than 5 mm and less than 25 mm away from the periphery of the second main surface.

6. A structure according to claim 1, wherein the intermediate member includes a first rib member and a second rib member arranged along the periphery of the second main surface, and the configuration that accommodates deformation of the side surface portion is such that the first rib member is arranged on the periphery of the second main surface, and the second rib member is arranged more inward than the first rib member.

7. A structure according to claim 6, wherein the second rib member is disposed in an area of ​​the second main surface at a distance from the peripheral edge that is greater than 5 mm and less than 25 mm.

8. A structure as claimed in claim 1, wherein the intermediate member includes a rib member arranged along the periphery of the second main surface, and the configuration that accommodates deformation of the side surface portion includes a configuration in which the cross-sectional area of ​​the rib member in a direction perpendicular to the direction in which the first member and the second member face each other is large enough to allow the rib member to deform in response to deformation of the side surface.

9. A structure as claimed in claim 8, wherein the rib member is formed of a plate-like member having two main surfaces facing each other, and the configuration that accommodates deformation of the side surface portion includes a configuration in which the thickness between the two main surfaces of the rib member is smaller than the thickness from the first main surface to the second main surface of the first member.

10. A structure as claimed in claim 1, wherein the intermediate member includes a rib member arranged along the periphery of the second main surface, and the configuration to accommodate deformation of the side portion includes a configuration in which the cross-sectional area of ​​the connecting portion connected to the second main surface of the rib member in a direction perpendicular to the direction in which the first member and the second member face each other is large enough to enable the connecting portion to deform in response to deformation of the side portion.

11. A structure according to claim 10, wherein the cross-sectional area of ​​the connecting portion is smaller than the cross-sectional area of ​​the other portions of the rib member.

12. A structure as claimed in claim 1, wherein the intermediate member includes a rib member arranged along the periphery of the second main surface and connected to the second main surface by an adhesive layer, and the configuration to accommodate deformation of the side surface portion includes a configuration in which the thickness of the adhesive layer from the rib member to the second main surface is large enough to alleviate deformation of the side surface portion.

13. A structure according to claim 1, wherein the intermediate member has a rib member arranged along the periphery of the second main surface, and a core member arranged inside the rib member.

14. A structure as claimed in claim 1, wherein the second member is a plate-like member containing carbon fiber and resin, and has a third main surface and a fourth main surface facing each other, the intermediate member is connected to the third main surface of the second member, and the connection between the third main surface and the intermediate member is realized by a configuration that accommodates deformation of the side portion of the second member due to moisture absorption.

15. A method for manufacturing a structure, comprising: placing an intermediate member between a first member, which is a plate-like member containing carbon fiber and resin and has a first main surface and a second main surface facing each other, and a second member arranged opposite the first member; connecting the intermediate member to the second main surface of the first member in a configuration that accommodates deformation of the side portion of the first member due to moisture absorption; and connecting the intermediate member to the second member.

16. A processing device for processing a workpiece, which is configured using the structure described in claim 1.

17. A processing device according to claim 16, wherein the structure is used as a work stage that holds the workpiece.

18. The processing apparatus according to claim 16, configured as an exposure apparatus.

Images