A cooling device, a cooling assembly and a method for cooling a carrier of a probe

Abstract

Cooling device (1, 100, 150), a cooling assembly (250) and a method for cooling a carrier (29, 28) of a probe (24). The cooling device (1, 100, 150) comprises a refrigerator coupled to a cold plate assembly (7a, 6a, 5a, 4a, 3a, 3b, 7b), configured to be arranged in a vacuum space (18). The cold plate assembly (7a, 6a, 5a, 4a, 3a, 3b, 7b) comprises: a cold plate (31a, 35a, 33a, 34a, 32a, 35, 31b, 35b, 35c) comprising an opening (19a, 23a, 20a, 19b, 23b, 814) at least partially delimited by a wall (62a) for receiving the carrier (29, 28), wherein the wall (62a) comprises a first contact surface (217) for contacting the carrier (29, 28), wherein the refrigerator is configured for cooling the cold plate (31a, 35a, 33a, 34a, 32a, 35, 31b, 35b, 35c) to the low temperature; - a contact element (215a, 900, 9) arranged in or on the cold plate (31a, 35a, 33a, 34a, 32a, 35, 31b, 35b, 35c), adjacent to the opening (19a, 23a, 20a, 19b, 23b, 814) and moveable with respect to the cold plate (31a, 35a, 33a, 34a, 32a, 35, 31b, 35b, 35c) along a contact axis (403) towards the opening (19a, 23a, 20a, 19b, 23b, 814), wherein the contact element (215a, 900, 9) comprises a second contact surface (216, 903) for contacting the carrier (29, 28), and an actuator mechanism (51a, 51e, 51a', 71a, 51) configured for moving the contact element (215a, 900, 9) towards the opening (19a, 23a, 20a, 19b, 23b, 814) along the contact axis (403).

Description

[0001] A cooling device, a cooling assembly and a method for cooling a carrier of a probe

[0002] BACKGROUND

[0003] The invention relates to a cooling device, a cooling assembly and a method for cooling a carrier of a probe .

[0004] Cooling devices are used to cool and / or hold samples and equipment at a low temperature . In order to achieve said low temperature, the cooling device is commonly separated into multiple cooling stages in the form of a series of cold plates situated in a vacuum space, wherein each subsequent cold plate is progressively colder than a previous cold plate . In order to provide very low temperatures , in particular temperatures below 1 kelvin, it is known in the art to use a3He / 4He dilution refrigerator as the cooling device .

[0005] Due to the signi ficant costs associated with helium, use is increasingly made of cryogen-free or 'dry' dilution refrigerators . Due to the relatively long cool-down time of a couple of days , use is increasingly made of cooling devices in which a sample arranged on a carrier of a probe can be introduced through a so-called clear-shot into the cooling device . This clear-shot is generally formed by a series of aligned openings present in each of the cold plates of the cooling device . In such devices , the probe is introduced in a stepwise manner into the device , wherein the carrier is progressively brought into thermal contact with each of the progressively colder cold plates . Introduction in one shot , where the probe goes directly to the final position is also frequently used . Stepwise introduction warms up the refrigerator less than in one shot, but takes a bit longer .

[0006] WO 2010 / 002245 A2 discloses a probe for cooling and inserting a sample arranged on a holder into a cylindrical clear-shot of a dilution refrigerator . The dilution refrigerator comprises a cooling body and is configured for cooling the sample holder to a low temperature . The holder comprises a carrier body provided with two pairs of contact elements that are each thermally coupled via a respective spring element to the carrier body . Each of the contact elements comprises a contact body with a contact surface for thermally interfacing with a wall of the cooling body that surrounds the clear-shot .

[0007] The sample holder of WO 2010 / 002245 A2 is further provided with a central coupling body and a plurality of coupling arms pivotally connected between each of the contact bodies and the central coupling body . The central coupling body is displaceable along a longitudinal direction of the clear-shot with respect to the carrier body . To provide said displacement of the central coupling body, the central coupling body is provided with a drill hole with an internal screw thread into which a switching rod can be screwed .

[0008] As a result of the pivoting linkage between the central coupling body and each of the contact elements , the displacement of the central coupling body by the switching rod along the longitudinal direction results in a displacement of the contact elements along a radial direction of the carrier body . Accordingly, the contact elements are displaceable between a first position, in which the contact surfaces are clear of the wall of the cooling body that surrounds the clear-shot , and a second position in which the contact surfaces are pressed against the wall of the cooling body that surrounds the clear-shot and are thus in thermal contact with the cooling body . SUMMARY OF THE INVENTION

[0009] A disadvantage of the known device is that the useful space of each plate of the probe is quite limited because of the mechanical device . Thermal contact can also be somewhat limited, although much better than the spring contact used commonly by other manufacturers .

[0010] It is an obj ect of the present invention to provide a cooling device, a cooling assembly and a method for cooling a carrier of a probe that provides an increased rate of heat transfer between the carrier of the probe and a cold plate of the cooling device and an almost full use of the sample space on the various plates of the probe .

[0011] According to a first aspect , the invention provides a cooling device comprising a refrigerator, in particular a dilution refrigerator, for cooling a carrier of a probe, wherein the cooling device comprises a cold plate assembly configured to be arranged in a vacuum space, wherein the cold plate assembly comprises : a cold plate that comprises an opening that is at least partially delimited by a wall , wherein the opening is configured for receiving the carrier of the probe, wherein the wall comprises a first contact surface configured for contacting the carrier, wherein the refrigerator is configured for cooling the cold plate to a low temperature, a contact element arranged in or on the cold plate and arranged substantially adj acent to the opening, wherein the contact element is moveable with respect to the cold plate along a contact axis towards the opening, wherein the contact element comprises a second contact surface configured for contacting the carrier, and an actuator mechanism arranged in or on the cold plate for moving the contact element towards the opening along the contact axis , wherein the actuator mechanism comprises : a first drive element which is moveable along the contact axis with respect to the cold plate and configured for moving the contact element along the contact axis towards the opening, and a second drive element which is substantially linearly moveable with respect to the cold plate along a direction substantially perpendicular to the contact axis , wherein the first drive element is arranged at least partially between the contact element and the second drive element, wherein the second drive element is configured to slidably contact the first drive element for pushing the first drive element along the contact axis .

[0012] For cooling the carrier of the probe to a temperature near that of the cold plate, the carrier is arranged at least partially in the opening present in the cold plate . A movement of the contact element along the contact axis towards the opening and the carrier caused by a movement , in particular a pushing, of the contact element by the actuator mechanism, results in the carrier being clamped between the first contact surface of the wall of the cold plate and the second contact surface of the contact element . As a result, the carrier becomes thermally connected with the cold plate through at least the first contact surface . Accordingly, heat from the carrier is conducted to the cold plate substantially without an intermediate element that provides a thermal contact between the cold plate and the carrier . A rate of heat trans fer is increased due to a substantially direct thermal connection between the cold plate and the carrier, in particular the rate of heat trans fer is increased when compared to known devices such as , for example, via a separate coupling body and spring as disclosed in WO 2010 / 002245 A2 .

[0013] Furthermore, a substantially direct thermal contact between the carrier and the cold plate allows for a significant amount of force to be exerted by the actuator mechanism on the carrier via the contact element without damaging the cold plate or the contact element itself . One of the underlying reasons for the relatively low rate of heat transfer of the known solutions is that at low temperatures , in particular temperatures below 1 Kelvin, it is comparatively di fficult to reali ze a good heat transport between the carrier and the cold plate . A thermal resistance between a pair of contact surfaces is inversely proportional to a microscopic contact area between the two contact surfaces , and so to a pressure between said contact surfaces . Accordingly, providing an increased contact pressure between the carrier and the cold plate is advantageous and provides an increased rate of heat transfer .

[0014] The actuator mechanism allows for particularly large forces to be trans ferred by the actuator mechanism to the contact element . Due to the relatively high mechanical strength of the cold plate at least in a direction substantially parallel to the contact axis , a comparatively high force can be exerted by the first drive element in said direction on the cold plate without mechanically damaging or distorting the cold plate . In particular when compared to known solutions that provide for separate, distinct thermal coupling elements that are interposed between the cold plate and the carrier, wherein said thermal coupling elements are generally mechanically signi ficantly weaker than the cold plate .

[0015] Furthermore , the second drive element of the actuator mechanism allows a substantially linear force to be applied to the second drive element to move the contact element via the first drive element towards the opening . As a result, little torque is applied on the actuator mechanism and the cold plate assembly . This is particularly advantageous when the cold plate assembly is spaced apart from its surroundings using elongated thermally insulating spacing elements , as the spacing elements can commonly withstand signi ficant higher compression or tension stresses compared to shear stresses .

[0016] A further advantage is that the actuator mechanism generates relatively little heat through friction during use . A further advantage is that due to the arrangement of the actuator mechanism and the contact element on the cold plate instead of on the carrier, additional space is made available on the carrier for arranging, for example, samples and equipment on said carrier .

[0017] In an embodiment , the contact element is fixedly connected to the cold plate .

[0018] In an embodiment, the first drive element is configured to move substantially linearly along the contact axis with respect to the cold plate .

[0019] In an embodiment, at least the first contact surface of the wall is integrally formed with the cold plate .

[0020] In an embodiment , the contact element is an elongated contact element that extends substantially along a part of the circumference of the opening, wherein the second contact surface is arranged at a side of the contact element facing towards the opening, wherein the contact element comprises a distal end and a proximal end, wherein the proximal end is thermally and mechanically connected to the cold plate, preferably wherein the proximal end is fixedly connected to the cold plate, preferably wherein the proximal end of the contact element is integrally formed with the cold plate . The thermal connection between the proximal end of the contact element and the cold plate provides for an additional path for heat to trans fer from the carrier via the second contact surface of the contact element to the cold plate . As a result, a total rate of heat transfer is further increased due to both a thermal contact between the first contact surface of cold plate and the carrier, and between the second contact surface of the contact element and the carrier .

[0021] In an embodiment, the distal end is substantially free standing with respect to the cold plate .

[0022] In an alternative embodiment, the distal end is thermally and mechanically connected to the cold plate , preferably wherein the distal end is fixedly connected to the cold plate, preferably wherein the distal end of the contact element is integrally formed with the cold plate . The thermal connection between the distal end of the contact element and the cold plate provides for an additional path for heat to transfer from the carrier via the second contact surface of the contact element to the cold plate . As a result, a total rate of heat transfer is further increased due to the additional thermal contact between the second contact surface of the contact element and the carrier via the distal end .

[0023] As indicated above , in a preferred embodiment, the contact element, in particular the proximal end or the proximal and distal end, is / are integrally formed with the cold plate . An advantage of integrally forming the contact element and the cold plate is that this results in a further increased thermal conductivity between the contact element and the cold plate as substantially no additional thermal contact resistance is present between the contact element and the cold plate . Furthermore , the integral formation of the contact element provides for an increased ease of manufacturing and assembly of the cold plate assembly . For example, the contact element may be formed from the cold plate by milling a channel in the cold plate to form a slit at a side the contact element facing away from the opening in the cold plate .

[0024] In an embodiment , the contact element comprises a section which is elastically deflectable at least in a direction with a component along the contact axis . Due to the elastically deflectable nature of the section, a pushing force exerted by the actuator mechanism on the contact element results in a reversible deflection of at least a portion of the contact element towards and against the carrier . Furthermore, the elastically deflectable section may act as a spring urging the contact element away from the opening along the contact axis . This helps restore the contact element to a neutral position that substantially does not mechanically and / or thermally contact the carrier when the actuator mechanism is not pushing the contact element towards the opening . As a result , the contact element can be configured such that it substantially does not contact the carrier when the contact element is not moved or pushed towards the opening by the actuator mechanism. Accordingly, when the contact element is in the neutral position the carrier of the probe can substantially freely move in, out and / or through the opening in the cold plate . In addition, during a process of moving the carrier of the probe into or out of the opening in the cold plate of the cooling device , substantially no additional heat energy is generated in the form of friction between the carrier and the contact element .

[0025] In an embodiment , the cold plate comprises a slot or a groove that is arranged substantially adj acent to the contact element at a side of the contact element facing away from the opening and that is configured for receiving the actuator mechanism, wherein the actuator mechanism is arranged at least partially in the slot or groove, preferably wherein the actuator mechanism is arranged substantially fully in the slot or groove . Accordingly, a more compact cold plate assembly is achieved, in particular wherein fewer components of the cold body assembly extend axially outwards from the cold plate . As a result , the actuator mechanism is less likely to mechanically interfere with other components arranged in the cooling device and / or on the cold plate . Furthermore, an arrangement of the actuator mechanism in the slot or groove provides a better mechanical support of the actuator mechanism by the cold plate . This is especially advantageous when high forces are exerted by the actuator mechanism on the contact element to provide for a high contact pressure , in particular when the force is a pushing force applied along a radial direction of the opening in the cold plate .

[0026] In an embodiment , the actuator mechanism further comprises a substantially elongated transfer member that is moveable along the contact axis with respect to the cold plate, wherein the transfer member comprises a first longitudinal end that faces towards and abuts against the contact element at a side thereof facing away from the opening and a second longitudinal end opposite to the first longitudinal end, and wherein the actuator mechanism is configured for moving the second longitudinal end of the transfer member along the contact axis . The elongated shape of the transfer member acts to separate and space apart the actuator mechanism from the opening in the cold plate, to at least prevent a mechanical interference between the actuator mechanism and a part of a probe arranged in the opening of the cold plate . In addition, the elongated trans fer member may further thermally insulate the contact element from other components of the actuator mechanism and thus act to limit a heat transfer from the actuator mechanism to a carrier of a probe arranged in the opening of the cold plate .

[0027] In an embodiment, the transfer member comprises a section which is elastically compressible at least in a longitudinal direction of the transfer member . This elastically compressible section may substantially prevent damage to the contact element and / or a carrier of a probe arranged in the opening of the cold plate in case the actuator mechanism would provide a large force, which large force is of a magnitude that it is very likely to damage the contact element and / or the carrier if it would be applied directly thereon . To provide said elasticity to the elongated transfer member, the transfer member may be provided with one or more slits that extend in a direction perpendicular to a longitudinal direction of the trans fer member .

[0028] In an embodiment , the first drive element comprises a first inclined surface or a first curved surface facing away from the contact element, wherein the first inclined surface and the contact axis define an acute angle, preferably wherein the acute angle is greater than or equal to 45 degrees , preferably wherein the acute angle is greater than or equal to 80 degrees , and wherein the second drive element abuts against the first inclined surface or the first curved surface, wherein the second drive element is configured to slidably contact the first inclined surface or the first curved surface for pushing the first drive element along the contact axis by moving the second drive element in the direction substantially perpendicular to the contact axis .

[0029] It is noted that the acute angle is an angle greater than 0 degrees and smaller than 90 degrees . The mechanism according to this embodiment allows for particularly large forces to be trans ferred by the actuator mechanism to the contact element, while simultaneously providing for an actuator mechanism that generates relatively little heat through friction . Furthermore, this embodiment provides for a convenient way for selecting a ratio between a input force provided by the second drive element and the resulting output force provided by the first drive element on the contact element via an appropriate selection of the acute angle of the first inclined surface . As a result , when a relatively high contact pressure is desired between the contact element and the carrier, the acute angle of the first inclined surface is preferably chosen to be greater than 45 degrees or more preferably greater than 80 degrees . It is to be understood that when the first inclined surface comprises an acute angle close to 90 degrees , the first inclined surface is considered to extend substantially perpendicular to the contact axis . Furthermore, it is noted that the first inclined surface preferably comprises an inclined plane , wherein the inclined plane and the contact axis define the acute angle . Preferably, the inclined plane extends in a width direction substantially perpendicular to the contact axis and substantially perpendicular to the movement direction of the second drive element .

[0030] In a preferred embodiment , the cold plate extends along a cold plate plane , wherein the contact axis is substantially parallel to the cold plate plane and wherein the second drive element is moveable in a direction substantially perpendicular to the cold plate plane . Preferably, the first contact surface, the wall and / or the contact element intersect the cold plate plane .

[0031] In an embodiment , the first drive element comprises the second longitudinal end of the trans fer member, or wherein a side of the first drive element facing towards the contact element abuts the second longitudinal end of the transfer member . Accordingly the first drive element and the second longitudinal end of the transfer member may be integrally formed to reduce the number of components in the actuator mechanism. Alternatively, the first drive element and the transfer member are separate elements of the actuator mechanism.

[0032] In an embodiment , the second drive element comprises a contact surface configured to slidably contact the first inclined surface or the first curved surface , and wherein the second drive element further comprises a screw thread configured to screw into the cold plate to move at least the contact surface of the second drive element along a direction substantially perpendicular to the contact axis . An advantage is that this provides for a convenient means for operating the actuator mechanism via a rotational movement of the second dive element, which rotational movement can easily be applied by, for example , an operator via a screwdriver or spanner when the second drive element comprises a screw head with a corresponding screw drive . This embodiment allows to use a separate and / or removable mating tool , such as a screwdriver or spanner, which does not need to be permanently attached to the second drive element .

[0033] In an embodiment , wherein the second drive element further comprises a second inclined surface or a second curved surface, wherein the second inclined surface or the second curved surface abuts the first inclined surface or the first curved surface, wherein the actuator mechanism is configured to slidably contact the first inclined surface or the first curved surface with the second inclined surface or the second curved surface to push the first drive element along the contact axis by moving the second drive element along the direction substantially perpendicular to the contact axis , wherein the second inclined surface and the contact axis define an acute angle, preferably wherein the acute angle is greater than or equal to 45 degrees , preferably wherein the acute angle is greater than or equal to 80 degrees , more preferably wherein the second inclined surface is substantially parallel to the first inclined surface . This provides for a mechanically robust actuator mechanism that is particularly suitable for exerting large mechanical forces on the contact element . In particular, the first and second inclined surfaces allow for the force to be applied by the second drive member on the first drive member, and vice- versa, to be spread over a relatively large surface area of the overlap between the first and second inclined surfaces .

[0034] In an embodiment , the cooling device further comprises : a cover plate that is configured to receive a vacuum vessel for forming the vacuum space ; a central axis , preferably wherein the central axis extends substantially perpendicular to the contact axis ; at least one first spacer element arranged at least partially between the cover plate and the cold plate assembly for spacing apart the cold plate assembly from the cover plate , wherein the first spacer element extends along a direction substantially parallel to the central axis , wherein the first spacer element is configured for thermally insulating at least the cold plate from the cover plate , wherein the second drive element is configured to be substantially linearly moveable substantially parallel to the central axis . Preferably, the first spacer element comprises a thermally insulating material to thermally insulate the cold plate assembly from the cover plate .

[0035] In an embodiment , the cooling device further comprises an operating unit , wherein the operating unit comprises an operator element that extends from the cover plate to at least the actuator mechanism, wherein the operating unit is configured to engage the actuator mechanism with the operator element for operating the actuator mechanism to move the contact element along the contact axis towards the opening . The operating unit allows for operating the actuator mechanism from a position spaced apart from the cold plate assembly, which is particularly advantageous when the actuator mechanism needs to be operated when the cooling device is arranged inside a vacuum vessel connected to the cover plate .

[0036] In an embodiment , the operator element is substantially fixedly attached to the second drive element , and wherein the operator element comprises a thermal insulating member that is configured for substantially preventing a thermal conduction along a path from the cold plate to the cover plate via the operator element .

[0037] In an embodiment, the operating unit is configured for moving the second drive element in a direction substantially parallel to the central axis via the operator element . Accordingly, the force applied on the actuator mechanism and the cold plate assembly is substantially parallel to the central axis , and thus substantially parallel to the first spacer element . An advantage of this is that the first spacer element is subj ected to a compression or a tension instead of a shear stress . In particular when the first spacer element has an elongated shape, the first spacer element can generally withstand significantly higher compression or tension stresses compared to shear stresses .

[0038] In an embodiment , the operating unit further comprises a coupling element that is substantially fixedly attached to the operator element, wherein the coupling element comprises a contact surface configured for contacting the second drive member, wherein : the operator element extends at least partially through the cold plate , wherein the second drive element is arranged at least partially between the coupling element and the cover plate, and wherein the operating unit is configured for pulling the second drive element towards the cover plate in a direction substantially parallel to the central axis via the operator element and the coupling element, and / or the coupling element is arranged at least partially between the second drive element and the cover plate, and wherein the operating unit is configured for pushing the second drive element away from the cover plate in a direction substantially parallel to the central axis via the operator element and the coupling element . This provides for an operating unit and actuating mechanism that is particularly convenient and quick to assemble , in particular when multiple actuator mechanisms are present in the same cooling device and are to be operated via one operating unit .

[0039] In an embodiment , the cold plate assembly is a first cold plate assembly, wherein the cooling device further comprises a second cold plate assembly that comprises the features of the cold plate assembly as defined in any one of the embodiments described above, wherein the cooling device further comprises at least one second spacer element arranged between the first cold plate assembly and the second cold plate assembly to space the first cold plate assembly apart from the second cold plate assembly, wherein the second spacer element comprises a thermally insulating material to thermally insulate the first cold plate assembly from the second cold plate assembly plate , wherein the second cold plate assembly is arranged between the first cold plate assembly and the cover plate . Accordingly, the second cold plate assembly can shield the first cold plate assembly from the cover plate , in particular for substantially blocking heat radiation from the cover plate to reach the first cold plate assembly .

[0040] In an embodiment , the operating unit extends from the cover plate to the actuator mechanism of the first cold plate assembly passing through the cold plate of the second cold plate assembly, and wherein the operating unit is configured to substantially simultaneously engage with the actuator mechanisms of the first and second cold plate ass e mb lies .

[0041] In an embodiment, the refrigerator comprises a dilution refrigerator, preferably a3He / 4He dilution refrigerator comprising a mixing chamber arranged in thermal contact with the cold plate of the first cold plate assembly . Preferably, the mixing chamber is configured to, at least during use , cool the cold plate of the first cold plate assembly to a temperature lower than a temperature of the cold plate of the second cold plate assembly .

[0042] In an embodiment, at least during use of the cooling device, the second drive element is substantially linearly moveable along a substantially vertical direction and the contact axis is substantially parallel to a horizontal direction .

[0043] Alternatively, the first aspect of the invention provides a cooling device comprising a refrigerator, in particular a dilution refrigerator, for cooling a carrier of a probe, wherein the cooling device comprises a cold plate assembly configured to be arranged in a vacuum space, wherein the cold plate assembly comprises : a cold plate that comprises an opening that is at least partially delimited by a wall , wherein the opening is configured for receiving the carrier of the probe, wherein the wall comprises a first contact surface configured for contacting the carrier, wherein the refrigerator is configured for cooling the cold plate to a low temperature, a contact element arranged in or on the cold plate and arranged substantially adj acent to the opening, wherein the contact element is moveable with respect to the cold plate along a contact axis towards the opening, wherein the contact element comprises a second contact surface configured for contacting the carrier, and an actuator mechanism arranged in or on the cold plate and comprising an actuator element configured for moving the contact element towards the opening along the contact axis . It is to be understood that each of the above embodiments may also be applied to this alternative first aspect of the invention .

[0044] In an embodiment , the actuator mechanism further comprises : a first drive element which is moveable along the contact axis with respect to the cold plate and configured for moving the contact element along the contact axis towards the opening, wherein the first drive element comprises a first inclined surface facing away from the contact element, wherein the first inclined surface and the contact axis define an acute angle , preferably wherein the acute angle is greater than or equal to 45 degrees , preferably wherein the acute angle is greater than or equal to 80 degrees , and a second drive element which is moveable along a direction substantially perpendicular to the contact axis , wherein the second drive element abuts against the first inclined surface, wherein the first drive element is arranged at least partially between the contact element and the second drive element, wherein the second drive element is configured to slidably contact the first inclined surface for pushing the first drive element along the contact axis by moving the second drive element in the direction substantially perpendicular to the contact axis .

[0045] According to a second aspect , the invention provides a cooling assembly comprising a cooling device according to the first aspect of the invention or an embodiment thereof as described above, and a probe , wherein the probe comprises the carrier, wherein the carrier comprises a circumferential outer wall that is configured to be arranged at least partially in the opening of the cold plate , wherein the circumferential outer wall comprises a third contact surface configured to contact the first contact surface of the cold plate assembly, and a fourth contact surface configured to contact the second contact surface of the contact element , wherein the carrier is substantially rigid at least between the third and fourth contact surfaces . The substantially rigid carrier is preferably configured to withstand a large clamping force asserted by the contact element on the carrier .

[0046] In an embodiment, at least the outer wall of the carrier is arrangeable at least partially in the opening of the first cold plate assembly, and preferably wherein the outer wall of the carrier is arrangeable substantially fully in the opening of the first cold plate assembly . Preferably, the carrier is configured to fit into the opening of the first cold plate with little play, at least in the direction of the third and fourth contact surfaces . Accordingly the amount of movement provided by the actuator mechanism that is needed for the contact element to clamp the carrier in the opening is relatively small . It is noted that in order to more easily arrange the carrier in the opening of the first cold plate, the play should not be too small . In an embodiment, the play is less than 1 mm, preferably less than 0 , 5 mm, more preferably substantially equal to 0 , 2 mm .

[0047] In an embodiment , the carrier is a first carrier, wherein the probe further comprises a second carrier and a spacer, wherein the carrier spacer is thermally insulating and arranged at least partially between the first and second carriers for spacing apart the first and second carriers , and wherein the first and second carriers are arrangeable at least partially in the opening of the cold plate of respectively the first and second cold plate assemblies . An advantage is that the second carrier acts as a radiation shield to prevent thermal radiation from travelling downwards through the clear-shot towards the first cold plate assembly .

[0048] According to a third aspect , the invention provides a method for cooling a carrier of a probe, wherein the method comprises the following steps : providing a cooling device according to the first aspect of the invention or any one of the embodiments thereof as described above, or providing a cooling assembly according to the second aspect of the invention or any one of the embodiments thereof as described above, arranging the carrier of the probe at least partially in the opening of the cold plate of the cold plate assembly, and thermally connecting the carrier to the cold plate of the cold plate assembly by causing the actuating mechanism of the cold plate assembly to move the contact element of the cold plate assembly along the contact axis such that the carrier is clamped between the first and second contact surfaces .

[0049] In an embodiment, the step of thermally connecting the carrier to the cold plate of the cold plate assembly further comprises : moving the second drive element in the direction substantially perpendicular to the contact axis to push the first drive element along the contact axis towards the contact element .

[0050] In an embodiment, the direction substantially perpendicular to the contact axis is substantially parallel to a vertical direction and / or wherein the contact axis is substantially parallel to a hori zontal direction .

[0051] The various aspects and features described and shown in the specification can be applied, individually, wherever possible . These individual aspects , in particular the aspects and features described in the attached dependent claims , can be made subj ect of divisional patent applications .

[0052] BRIEF DESCRIPTION OF THE DRAWINGS

[0053] The invention will be elucidated on the basis of an exemplary embodiment shown in the attached drawings , in which :

[0054] Figure 1A shows a first example of a cooling assembly comprising a probe and a cooling device for cooling a carrier of the probe ;

[0055] Figure IB shows a schematic cross-section of a part of the assembly of figure 1A wherein the probe is provided with a cold finger;

[0056] Figure 2 schematically shows the cooling assembly according to the first example in more detail ; Figures 3A and 3B each present a more detailed top- down view of the cooling assembly according to the first example, wherein the figures illustrate a working of the cooling assembly to provide a reversible thermal coupling between the carrier of the probe and a cold plate of a cold plate assembly of the cooling device ;

[0057] Figure 4A shows a more detailed view of an operating unit for operating an actuator mechanism of the cold plate assembly of the cooling device of the cooling assembly according to the first example ;

[0058] Figure 4B shows an alternative actuator mechanism comprising an eccentric leverage system;

[0059] Figures 5A and 5B each illustrate a section respectively taken along line VA - VA of figure 3A and line VB - VB of figure 3B, illustrating a working of the actuator mechanism and the operating unit according to the first example ;

[0060] Figure 6 shows an alternative example of an actuator mechanism and operating unit for use in the cooling assembly according to the first example ;

[0061] Figure 7 schematically shows a second example of a cooling device for cooling a carrier of a probe ;

[0062] Figures 8A and 8B each present a more detailed top- down view of a cooling assembly comprising the cooling device according to the second example, wherein the cooling assembly further comprises the probe , wherein the figures illustrate a working of the cooling assembly to provide a reversible thermal coupling between the carrier of the probe and a cold plate of a cold plate assembly of the cooling device ;

[0063] Figures 9A and 9B each illustrates a section respectively taken along line IXA - IXA of figure 8A and line IXB - IXB of figure 8B, illustrating a working of an actuator mechanism of the cold plate assembly according to the second example ;

[0064] Figures 10A and 10B show a top-down view of a third example of a cooling assembly comprising a probe with a carrier and a cooling device for cooling the carrier of the probe ; and

[0065] Figure 11 shows a top-down view of a fourth example of a cooling assembly according to the invention .

[0066] DETAILED DESCRIPTION OF THE INVENTION

[0067] Figure 1A schematically shows a first example of a cooling assembly comprising a probe 24 provided with a plurality of carriers 25 - 29 . The plurality of carriers 25

[0068] - 29 is shown to comprise at least a first carrier 29 and a second carrier 28 . The cooling assembly further comprises a cooling device 1 of a top loading probe type for cooling one or more of the carriers 25 - 29 of the probe 24 . The cooling device 1 comprises a plurality of cold plate assemblies 3a - 7a, wherein the plurality of cold plate assemblies 3a - 7a of this first example comprises a first cold plate assembly 7a, a second cold plate assembly 6a, a third cold plate assembly 5a, a fourth cold plate assembly 4a and a fi fth cold plate assembly 3a . Furthermore, each of the plurality of cold plates assemblies 3a - 7a in turn comprises a cold plate 31a

[0069] - 35a . The cooling device 1 is further shown to comprise a cover plate 2 normally held at room temperature . The cover plate 2 is connectable to a vacuum vessel 15 and is configured for, at least during use , in conj unction with the vacuum vessel 15 providing a vacuum space 18 . Furthermore, the plurality of cold plate assemblies 3a - 7a is arrangeable in the vacuum space 18 .

[0070] Figure 1A further shows that the cooling device 1 comprises a central axis C, wherein the central axis C in the present example is substantially parallel to a vertical axis . Each of the cold plates 31a - 35a are shown to have an approximately disc-like shape, wherein a radial direction of each of the cold plates 31a - 35a extends along a respective cold plate plane that is arranged substantially perpendicular to the central axis C and, at least in use , substantially parallel to a horizonal plane . The cooling device 1 further comprises one or more first spacer elements 14 ' and one or more second spacer elements 14 . A longitudinal axis of the first and second spacer elements 14 ' , 14 is shown to extend along a direction substantially parallel to the central axis C . The first spacer elements 14 ' are configured for spacing apart and thermally insulating the cover plate 2 from the cold plates assemblies 3a - 7a along a direction substantially parallel to the central axis C . The second spacer elements 14 are configured for mutually spacing apart and thermally insulating each of the cold plates assemblies 3a - 7a . The first and second spacer elements 14 ' , 14 comprise a thermally insulating material that is substantially less thermally conductive than at least the cold plate 35a of the first cold plate assembly 7a . It is noted that the first and second spacer element 14 ' , 14 may be di fferent, identical or continuous elements .

[0071] The cooling device 1 according to the present example comprises a3He-4He dilution refrigerator . A cooling power of this dilution refrigerator is provided by a mixing of helium-3 and helium-4 isotopes in a mixing chamber 13 arranged at and in thermal contact with the cold plate 35a of the first cold plate assembly 7a . The dilution refrigerator is configured to cool the cold plate 35a of the first cold plate assembly 7a via the mixing chamber 13 to temperatures below 1 kelvin, more preferably below 500 millikelvin and most preferably below 100 millikelvin . Furthermore, the dilution refrigerator is shown to comprise a still 12 or evaporator chamber that is fluid connected via a conduit 39 to the mixing chamber 13 . The still 12 is arranged at, and preferably in thermal contact with, the cold plate 33a of the third cold plate assembly 5a . The cooling device 1 is further provided with multiple heat exchangers 11 , 36, 38 each in thermal contact with the conduit 39. The multiple heat exchangers 11 , 36 , 38 are shown to comprise a first heat exchanger 36 that is in thermal contact with the cold plate 34a of the second cold plate assembly 6a .

[0072] Figure 1A further shows that the four cold plate assemblies 3a - 6a arranged between the cover plate 2 and the first cold plate assembly 7a can optionally each be provided with a thermal shield 30a - 30d that substantially encloses each subsequent, cooler, cold plate assembly 4a - 7a . The cooling device 1 further comprises a mechanical precooler 8 , wherein a first stage 9 of the mechanical precooler 8 is arranged in thermal contact with the cold plate 31a of the fifth cold plate assembly 3a and a second stage 10 is arranged in thermal contact with the cold plate 32a of the fourth cold plate assembly 4a

[0073] Furthermore , each of the cold plates 31a - 35a are provided with a substantially cylindrical opening 19a - 23a which is substantially delimited by an inner wall . The plurality of openings 19a - 23a together form a clear-shot extending along a longitudinal axis LI for receiving the probe

[0074] 24 therein . The carriers 25 - 29 of said plurality of carriers

[0075] 25 - 29 are shown to be spaced apart along a longitudinal axis L3 of the probe 24 and arranged in each of the openings 19a - 23a . The longitudinal axis L3 of the probe 24 is shown to extend substantially parallel to the longitudinal axis LI of the clear-shot and the central axis C . The plurality of carriers 25 - 29 are configured for receiving and mounting samples and equipment thereto . Furthermore, it is noted that each of the plurality of carriers 25 - 29 when arranged at least partially in the openings 19a - 23a acts as a radiation shield to prevent thermal radiation from travelling downwards through the clear-shot of the cooling device 1 towards the first cold plate assembly 7a . The cooling device 1 is further provided with a gate valve 16 arranged on the cover plate 2 and vacuum tube 17 attached to the gate valve 16 for bringing the probe 24 into the vacuum space 18 of the cooling device 1 .

[0076] As schematically shown in figure IB, the first carrier 29 may be further provided with a cold finger 291 at a side facing away from the cover plate 2 for mounting, for example, samples thereto . In this example, the cold finger is provided with first SMP connectors 292 which are configured to couple to corresponding second SMP connectors 702 provided on a SMP connector holder 701 which is attached to the bottom side of the first cold plate assembly 7a, preferably wherein the second SMP connectors 702 are coupled to the mixing chamber 13 of the dilution refrigerator . SMP connectors 292 , 702 allow tolerance on the angle of insertion so are preferred for this type of connection . As schematically shown in figure IB, the first SMP connectors 292 are arranged at a side of the cold finger 291 facing away from the first carrier 29, whereas the second FMP connectors 702 are arranged at a side of the SMP connector holder 701 facing towards the cold plate 35a, such that when the first carrier 29 is inserted in the opening 23a of the cold plate 35 , the first SMP connectors 292 are coupled with corresponding second SMP connectors .

[0077] When the probe 24 is inserted into the cooling device 1 and the cold plates 31a - 35a are held at their respective working temperatures , the probe 24 is preferably introduced in a stepwise manner into the cooling device 1 . For example, the first carrier 29 which is arranged at a distal end of the probe 24 is firstly positioned in the opening 19a of the cold plate 31a of the fifth cold plate assembly 3a and brought into thermal contact with said cold plate 31a . After the first carrier 29 is cooled down to a temperature close to a temperature of the cold plate 31a, the first carrier 29 is released or thermally separated from the cold plate 31a . The first carrier 29 is subsequently moved downward, arranged at least partially in the opening 20a of the cold plate 32a and brought in thermal contact with the cold plate 32a . This process is subsequently repeated for each of the cold plates 33a - 35a of the third, second and first cold plate assemblies 4a - 7a .

[0078] An alternative method is , to insert the probe 24 directly to its final position as schematically shown in figure 1A, and then actuating the actuator mechanisms of the various cold plate assemblies 3a, 4a, 5a, 6a, 7a, one after another or all at the same time . In this case there is more heat to be removed by the mechanical precooler 8 and the dilution refrigerator, but at the end it saves some time . Alternatively, the probe 24 may also be inserted into the cooling device 1 when the device is held at room temperature . Here, the probe 24 is commonly not inserted into the clear-shot through a stepwise-process and is instead directly inserted such that each of the carriers 25 - 29 are respectively arranged in each of the openings 19a - 23a . Following the insertion, each of the carriers 25 - 29 are then respectively brought into thermal contact with the cold plates 31a - 35a . It is to be understood that while the figure 1 schematically shows a top loading type3He-4He dilution refrigerator as a preferred embodiment , the present invention is not particularly limited to a top loading type, and may instead be, for example, a side or bottom loading type device .

[0079] Figure 2 schematically shows the cooling assembly shown in figure 1 in further detail . It is noted in particular that only a portion of each of the plurality of cold plate assemblies 3a - 7a is shown . Figure 2 shows that the probe 24 further comprises a flange 58 , wherein the flange 58 and each of the five carriers 25 - 29 of the probe 24 are mutually spaced apart by a plurality of carrier spacers 59, 59' , 59 ' ’ along the longitudinal axis L3 of the probe 24 . The carrier spacers 59, 59 ' , 59 ' ’ are configured for thermally insulating and mechanically supporting the carriers 25 - 29 from each other and from the flange 58 . It is noted that the carrier spacers 59, 59' , 59 ' ’ comprise a thermally insulating material that is substantially less thermally conductive than at least the first carrier 29 of the probe 24 .

[0080] Each of the cold plate assemblies 7a - 3a are shown in figure 2 to respectively comprise a contact element 215a - 215e and an actuator mechanism 51a - 51e . In the present example, each of the actuator mechanisms 51a - 51e and contact elements 215a - 215e are substantially, although not necessarily, identical .

[0081] Figures 3A and 3B show a more detailed top-down isolated view of the first carrier 29 of the probe and the first cold plate assembly 7a comprising the contact element 215a and the actuator mechanism 51a . The wall around the opening 23a of the cold plate 35a comprises a first contact surface 217 configured for contacting a substantially circumferential outer wall of the first carrier 29. The contact element 215a is shown to comprise a second contact surface 216 for contacting the first carrier 29. In the present example , the first contact surface 217 and the second contact surface 216 are arranged at approximately opposite sides of the opening 23a and the first carrier 29. Furthermore, the contact element 215a is arranged substantially adj acent to the opening 23a . The contact element 215a is integrally formed with the cold plate 35a and comprises a distal end 213 and a proximal end 214 . The proximal end 214 is shown to be both thermally and mechanically connected to the cold plate 35a, and the distal end 213 is shown to be substantially free standing with respect to the cold plate 35a . The contact element 215a is moveable with respect to the cold plate 35a along a contact axis R in a contact direction A towards the opening 23a and in a direction A' opposite to the contact direction A away from the opening 23a . The contact axis R extends substantially parallel to the cold plate plane and extends substantially perpendicular to the central axis C ( shown in figure 1 ) . The contact element 215a furthermore comprises a section 240 that is elastically deflectable at least in a direction with a component parallel to the contact axis R .

[0082] The figures 3A and 3B show that the cold plate 35a further comprises a slot or a groove 66 that extends along a direction parallel to the contact axis R and that is arranged at a side of the contact element 215a facing away from the opening 23a . The slot or groove 66 is configured for receiving the actuator mechanism 51a . In the present example, the actuator mechanism 51a is shown to be arranged substantially fully in the slot or groove 66. The actuator mechanism 51a further comprises a substantially elongated transfer member 211 . The trans fer member 211 is shown arranged in the slot or groove 66 and is moveable along the contact axis R with respect to the cold plate 35a . The trans fer member 211 comprises a first longitudinal end 212 that faces towards and abuts against the contact element 215a near the distal end 213 . The actuator mechanism 51a is configured to push the contact element 215a along the contact axis R towards the opening 23a via the transfer member 211 .

[0083] Figure 3B illustrates a situation wherein the actuator mechanism 51a has pushed the contact element 215a towards the opening 23a and the first carrier 29 along the contact axis R in the contact direction A relative to a situation shown in figure 3A. In figure 3A, the first and second contact surfaces 216, 217 are substantially not in ( thermal ) contact with the first carrier 29. In figure 3B in contrast , the first carrier 29 is substantially clamped between, and thus thermally connected to , the first and second contact surfaces 217 , 216. The first carrier 29 preferably comprises a circumferential outer wall (not shown) with a third contact surface and a fourth contact surface configured to respectively contact the first and second contact surfaces 217 , 216, wherein the first carrier 29 is substantially rigid at least between said third and fourth contact surfaces . It is noted that the contact element 215a as a result of its elongated shape and / or the elastically deflectable section 240 tends to urge the contact element 215a in a direction A' opposite to the contact direction A towards the situation illustrated in figure 3A.

[0084] It is noted that the first longitudinal end 212 of the transfer member 211 may be fixedly attached to contact element 215a in order to prevent the trans fer member 211 from being pushed out from the slot or groove 66 in a direction perpendicular to the contact axis R due to the force applied by the actuator mechanism 51a . Additionally or alternatively, the cold plate 35a may be provided with a fixedly attached retaining member (not shown) configured to prevent or at least limit a motion of the transfer member 211 in a direction other than substantially parallel to the contact axis R .

[0085] Referring again now to figure 2 , the cooling device 1 is shown to further comprise an operating unit 200 with an operator element 201 . The operator element 201 extends along a longitudinal axis L2 that is substantially parallel to the longitudinal axes LI , L3 of the clear-shot and the probe 24 and substantially parallel to the central axis C . As best seen in figure 1 , the operator element 201 extends from the cover plate 2 to the cold plate 35a of the first cold plate assembly 7a, passing through the cold plates 31a - 33a of the fifth - second cold plate assemblies 3a - 6a . It is noted that the operating unit 200 preferably further extends to a position external to the vacuum space 18 to permit an operator or a driving assembly to interact with the operating unit 200 . Figure 2 shows that the operating unit 200 is configured to engage at least the actuator mechanism 51a with the operator element 201 for operating the actuator mechanism 51a to push the contact element 215a towards the opening 23a . In the present example, the operating unit 200 is configured to engage substantially simultaneously with each of the actuator mechanisms 51a - 51e .

[0086] Preferably, the operator element 201 , at least the part that extends between the cover plate 2 and the first cold plate assembly 7a, is made from a thermally insulating material .

[0087] Figure 4A shows a working of the operating unit 200 of the cooling device 1 in further detail . It is noted in particular that for clarity only a portion of the fi fth cold plate 31a, the cover plate 2 and the transfer member 211 are shown . The operating unit 200 is shown to further comprise a motion generating member 203 fixedly attached to the cover plate 2 via a flange 204 . The flange 204 comprises several holes 205 for fastening the flange 204 to the cover plate 2 . The motion generating member 203 is arranged at an outside of the cooling device to be accessible for an operator . The motion generation member 203 is provided with a nut-shaped portion 202 and is arranged on a part of the operator element 201 that extends through the cover plate 2 , which part is provided with an external thread . The motion generation member 203 is , at least partially, provided with an internal thread (not shown) that matches the external thread of the operator element 201 . The side of the motion generating member 203 that is facing the cover plate 2 , rests against the flange 204 . By rotating the motion generation member 203 , using the nut-shaped portion 202 thereof , with respect to the operator element 201 , the rotational motion F exerted by, for example, an operator on the nut-shaped portion 202 is converted into a substantially linear motion of the operator element 201 in a direction B, B' parallel to the longitudinal axis L2 of the operator element 201 .

[0088] The fi fth cold plate 31a, shown schematically via dashed lines , is further provided with a holder 207 that is configured to be substantially fixedly arranged in or on the fifth cold plate 31a . Furthermore, the transfer member 211 is shown to comprise a first drive element 502 formed at a second longitudinal end of the transfer member 211 , and the actuator mechanism 51e is shown to comprise a second drive element 210 . The first and second drive elements 502 , 210 are shown to be arranged at least partially in the holder 207 . The actuator mechanism 51e further comprises a filling element 209 , arranged at least partially in the holder 207 , for filling a space between the second drive element 210 and the holder 207 . It is noted that , as best seen in for example figure 3A, the first drive element 502 is arranged between the contact element 215a and the second drive element 210 .

[0089] Instead of the motion generation member 203 with the nut-shaped portion 202 , the motion generation member can also be provided with an eccentric leverage system 401 as schematically shown in figure 4B . The eccentric leverage system comprises an eccentric member 402 that is connected to the operator element 201 via an axis 403 , wherein the axis 403 extends in a direction substantially perpendicular to a longitudinal direction of the operator element 201 . The eccentric member 402 is rotatable around said axis 403 , and a side of said eccentric member 402 facing the cover plate 2 is abutting against the flange 204 . Due to the eccentric shape of the eccentric member 402 , the distance between the axis 403 and the flange 205 can be adj usted by a rotation of the eccentric member 402 , for example by pushing the lever 404 towards the cover plate 2 or pulling the lever 404 away from the cover plate 2 . An advantage of this eccentric leverage system 401 is that it provides for a more easy and quicker activation of the operator element 201 , in particular when compared to the system of figure 4A which commonly requires that an operator turns the nut several times to suitably activate the operator element 201 such that the carrier of a probe is clamped inside the opening of the cold plate .

[0090] In addition, in the example as shown in figure 4B, the transfer member 211 comprises a section 211a which is elastically compressible at least in the contact direction A, which in this case is substantially parallel to a longitudinal direction of the trans fer member 211 .

[0091] Figures 5A and 5B each illustrates a section respectively taken along line VA - VA of figure 3A and line VB - VB of figure 3B, illustrating a working of the actuator mechanism 51a and the operating unit according to the first example in further detail . The figures 5A and 5B show that the first drive element 502 comprises a first inclined surface 503 , wherein the first inclined surface 503 and the contact axis R define an acute angle fi> . The second drive element 210 is shown to further comprise a second inclined surface 504 , wherein the second inclined surface 504 is shown to abut the first inclined surface 502 . It is noted that the first inclined surface 503 preferably further comprises an inclined plane, wherein said inclined plane and the contact axis R further define the acute angle fi> . Preferably the acute angle fi> is greater than or equal to 45 degrees , preferably greater than or equal to 80 degrees , in a typical example , the acute angle fi> is 83 degrees .

[0092] The second drive element 210 is movable in a pulling direction B substantially parallel to the longitudinal axis L2 of the operator element 201 , and a pushing direction B' opposite to the pulling direction B . The actuator mechanism 51a is configured to slidably contact the first inclined surface 503 with the second inclined surface 504 to push the first drive element 502 along the contact axis R in the contact direction A by moving the second drive element 210 in the pulling direction B .

[0093] It is noted that the first and second inclined surfaces 503 , 504 and the longitudinal axis L2 enclose an acute angle a, which is smaller than or equal to 45 degrees , preferably smaller than or equal to 10 degrees , in a typical example, the acute angle a is 7 degrees . It is further noted that when the longitudinal axis L2 is perpendicular to the contact axis R, as in the example of figures 5A and 5B, the acute angle a = 90 degrees - fi> .

[0094] Figures 5A and 5B further show that the operating unit comprises a coupling element 208 that is substantially fixedly attached to the operator element 201 . The coupling element 208 comprises a contact surface 508 configured for contacting the second drive member 210 and the filling element 209 . The operator unit is configured for pulling the second drive element 210 via the operator element 201 and the coupling element 208 in the pulling direction B . Accordingly, as shown in figure 4 , the operator unit 200 is configured to pull the second drive element 210 towards the cover plate 2 in a direction parallel to the central axis C .

[0095] Figure 5B illustrates an example wherein, relative to the situation illustrated in figure 5A, the operating unit has pulled the operator element 201 in the pulling direction B . As a result, the second inclined surface 504 slidably engages with the first inclined surface 503 of the first drive element 502 to push the first drive element 502 , and thus the transfer member 211 , in the contact direction A. It is to be understood that alternatively the coupling element 208 can be arranged between the second drive element 210 and the cover plate 2 shown in figure 4 . In this alternative , the operating unit 200 is configured for pushing the second drive element 210 away from the cover plate 2 in a direction parallel to the central axis C via the coupling element to move the transfer member 211 in the contact direction A. Accordingly, in this alternative , the first inclined surface 503 and the second inclined surface 504 are respectively angled towards and away from the cover plate 2 .

[0096] Figure 6 shows an alternative actuator mechanism 51a' and operating element 201 ' , wherein the same reference symbols denotes features substantially similar to figure 5B . In contrast to the operating element 201 of figure 5B, the operating element 201 ' of figure 6 is not provided with coupling element 208 . Instead, the operator element 201 ' is directly and fixedly attached to the second drive member 210 and optionally the filling element 209. The alternative actuator mechanism 51a' is shown to comprise a first drive element 506 that is not formed by a second longitudinal end 212 ' of the transfer member . Instead, the first drive element 506 is formed as a separate element, wherein a side of the first drive element 506 facing away from the second drive element 210 abuts the second longitudinal end 212 ' of the transfer member . Figure 6 shows a situation wherein the alternative operating element 201 ' has previously pushed the first drive element 506 and the second longitudinal end 212 ' of the transfer member along the contact direction towards the opening via the second drive element 210 . Accordingly, a subsequent movement of the alternative operating element 201 ' and the second drive element 210 in the pulling direction B' will result in a corresponding movement of the first drive element 506 in the direction A' opposite to the contact direction urged by the contact element (not shown) . It is noted that in the example of figure 6, the first inclined surface 503 and the second inclined surface 504 are respectively angled towards and away from the cover plate (not shown) of the cooling assembly .

[0097] Figures 7 - 9 illustrate a second example of a cooling assembly according to the present invention, wherein features that substantially correspond to the same features of the cooling assembly shown in the figures 1 - 6 are denoted with the same or similar reference symbols . Figure 7 shows a cooling device 100 which, like the cooling device according to the first example , comprises a plurality of cold plate assemblies 3b - 7b of which only a portion is shown for clarity . Furthermore , each cold plate assembly 3b - 7b is again provided with a cold plate 31b - 35b, which in turn each comprises an opening 19b - 23b with an inner wall 62a - 62e for forming a clear-shot . The clear-shot is shown to extend along a longitudinal axis LI , wherein figure 7 illustrates an example wherein no probe is arranged in the clear-shot of the cooling device 100 . Furthermore, each of the cold plate assemblies 3b - 7b are shown to be spaced apart along a central axis C that is substantially parallel to the longitudinal axis LI . Figure 7 further shows that each cold plate assembly 3b - 7b is provided with a contact element 215a - 215e which are substantially similar to the contact elements 215a - 215e according to the first example . The circumferential inner walls 62a - 62e are shown to each comprise a first contact surface 217 . The contact elements 215a - 215e are shown to each comprise a second contact surface 216 . In contrast to the cooling device according to the first example, the plurality of cold plate assemblies 3b - 7b of the cooling device 100 according to the second example are provided with a plurality of alternative actuator mechanisms 71a - 71e . Furthermore, in the example of figure 7 , the cooling device 100 is not provided with an operating unit with an operating element for a simultaneously operating of one or more actuator mechanisms by an operator . This contact method is meant to be used at room temperature unlike the previously described method that is suitable for cooling a probe when the refrigerator is cold .

[0098] Figures 8A and 8B each present a more detailed top- down view of the cooling assembly comprising the cooling device 100 shown in figure 7 . Figures 8A and 8B show an isolated top-down view of a first cold plate assembly 7b of the plurality of cold plates assemblies 3b - 7b of cooling device . The cooling assembly is shown to comprise a probe comprising at least a first carrier 29, wherein the first carrier 29 is arranged at least partially in the opening 23b of the cold plate 35b of the first cold plate assembly 7b . The first contact surface 217 and the second contact surface

[0099] 216 are each configured for contacting the first carrier 29. The actuator mechanism 71a is configured for pushing the contact element 215a towards the opening 23b and the first carrier 29 along a contact axis R in a contact direction A. The cold plate 35b of the first cold plate assembly 7b further comprises a slot or a groove 222 configured for receiving the actuator mechanism 71a . The slot or groove 222 extends along a direction parallel to the contact axis R and is arranged at a side of the contact element 215a facing away from the opening 23b . Furthermore , the actuator mechanism 71a is shown to be arranged substantially fully in the slot or groove 222 .

[0100] The figure 8B illustrates a situation wherein the actuator mechanism 71a has pushed the contact element 215a towards the first carrier 29 in the contact direction A along the contact axis R relative to a situation shown in figure 8A. In figure 8A, the first and second contact surfaces 216,

[0101] 217 are shown to be substantially not in ( thermal ) contact with respectively a third and fourth contact surface of the carrier 29 . In figure 8B in contrast, the first carrier 29 is shown to be substantially clamped between the first and second contact surfaces 217 , 216. Accordingly, the first and second contact surfaces 217 , 216 are in thermal contact with the first carrier 29 . It is noted that the contact element 215a, like the contact element according to the first example, tends to urge the contact element 215a in a direction A' opposite to the contact direction A from the situation illustrated in figure 8B towards the situation illustrated in figure 8A.

[0102] Figures 9A and 9B show a section respectively taken along line IXA - IXA of figure 8A and line IXB - IXB of figure 8B, further illustrating a working of the actuator mechanism 71a according to the second example . The actuator mechanism 71a is shown to comprise a first drive element 218 that is moveable along the contact axis R in the contact direction A. The first drive element 218 is shown to abut against the contact element 215a at a side of the contact element 215a facing away from the second contact surface 216. It is noted that the actuator mechanism 71a may alternatively be provided with a trans fer member arranged between the contact element 215a and the first drive element 218 . The first drive element 218 comprises a first inclined surface 808 facing away from the contact element 215a, wherein the first inclined surface

[0103] 808 and the contact axis R define an acute angle p . Furthermore the first inclined surface 808 preferably comprises an inclined plane, wherein the inclined plane and the contact axis R define the acute angle p . The cold plate 35b is further shown to be provided with a fixedly attached retaining member 219 configured to prevent or at least limit a motion of the first drive member 218 in a direction other than substantially parallel to the contact axis R .

[0104] Figures 9A and 9B further show that the actuator mechanism 71a further comprises a second drive element 220 moveable in a pushing direction E substantially parallel to the central axis C . The cold plate 35b is shown to further comprise a holder 802 that is substantially fixedly arranged in or on the cold plate 35b, wherein the first and second drive elements 218 , 220 are at least partially arranged in the holder 802 . The second drive element 220 further comprises a tool engagement member 807 provided with a contact surface

[0105] 809 configured to slidably contact the first inclined surface 808 . The second drive element 220 further comprises a screw thread 815 . The holder 802 is further shown to comprise an opening 814 provided with a corresponding screw thread 811 to receive the screw thread 815 of the second drive element 220 .

[0106] Figure 9B illustrates an example wherein, relative to the situation illustrated in figure 9A, the second drive element 220 has been rotated via the tool engagement member 807 in a rotation direction D around the central axis C to further screw the second drive element into the holder 802 . The corresponding movement of the second drive element 220 in the pushing direction E causes the contact surface 809 to slidably engage with the first inclined surface 808 of the first drive element 218 to push the first drive element 218 in the contact direction A towards the contact element 215a . It is noted that the contact surface 809 of the second drive element 220 can for example alternatively be formed as an inclined circumferential surface . The situation shown in figure 8A may be again restored through a rotational movement of the second drive member 220 in a direction D' opposite to the rotation direction D, resulting in a motion of at least the contact surface 809 in a direction E' opposite to the pulling direction E . Furthermore , like the contact element according to the first example, an elongated shape and / or an elastically deflectable section comprised by the contact element 215a, tends to urge the contact element 215a and the first drive element 218 in a direction opposite to the contact direction A towards the situation shown in figure 9A. It is noted that the rotation of the second drive element 220 can be performed by an operator interacting with the tool engagement member 807 of the second drive element 220 with, for example , a hex key .

[0107] Figures 10A and 10B show a third example of a cooling assembly according to the present invention . The cooling assembly shown in the figures 10A and 10B is substantially similar to the cooling assembly according to the first example shown in the figures 1 - 6. Accordingly, features that substantially correspond to the same features of the cooling assembly of the figures 1 - 6 are denoted with the same or similar reference symbols . The cooling assembly is again shown to comprise a probe with a first carrier 29 , and part of a cooling device 150 configured for cooling the first carrier 29 of the probe . The cooling device 150 comprises a first cold plate assembly with a cold plate 35c . The cold plate 35c comprises an opening 23a with an inner wall for receiving the first carrier 29. The inner wall comprises a first contact surface 217 configured for contacting an outer wall of the first carrier 29 .

[0108] In contrast to the cooling device 1 according to the first example , the cold plate assembly of the cooling device 150 according to the third example is provided with an alternative contact element 900 . The contact element 900 is an elongated contact element that extends substantially along a part of the circumference of the opening 23a, wherein a second contact surface 903 is arranged at a side of the contact element 900 facing towards the opening 23a . The contact element 900 comprises a proximal end 901 and a distal end 902 , wherein both the proximal end 901 and the distal end 902 are thermally and mechanically connected to the cold plate 35c, in particular wherein the proximal end 901 and the distal end 902 are integrally formed with the cold plate 35c . The contact element 9 is for example formed by milling a channel in the cold plate 35c to form a slit 904 that extend through the complete height of the cold plate 35c, wherein the slit 904 is arranged at a side the contact element 900 facing away from the opening 23a in the cold plate 35c .

[0109] The contact element 900 comprises a section between the proximal end 901 and the distal end 902 , which is elastically deflectable at least in a direction with a component along the contact axis R .

[0110] The first cold plate assembly is further shown to comprise an actuator mechanism 51a that is substantially similar to the actuator mechanism 51a according to the first example . Figure 10B schematically illustrates a situation wherein the actuator mechanism 51a has pushed the contact element 900 towards the first carrier 29 and the opening 23a in the contact direction A along the contact axis R relative to a situation shown in figure 10A. In figure 10A, the first and second contact surfaces 217 , 903 are substantially not in thermal contact with respectively a third and fourth contact surface of the first carrier 29. In figure 10B in contrast , the first carrier 29 is shown to be substantially clamped between, and thus thermally connected to, the first and second contact surfaces 217 , 903 . It is noted that the contact element 900 is preferably configured to urge the contact element 900 along the contact axis R in the direction A' opposite to the contact direction A away from the opening 23a and the first carrier 29 towards its rest position as shown in figure 10A. Alternatively, the actuator mechanism 51a may for example be provided with one or more springs attached between the cold plate 35c and the contact element 900 to urge the contact element 900 away from the opening 23a and the first carrier 29 .

[0111] Figures 11 shows a part of a fourth example of a cooling assembly 250 according to the present invention . The cooling assembly shown in the figure 11 is substantially similar to the cooling assembly according to the third example shown in the figures 10A and 10B . The cooling assembly 250 is this fourth example differs from the cooling assembly of the third example, in that the contact element 900 is provided with protrusions 905 , 906 at a side of the contact element 900 that faces the opening 23a in the cold plate 35c . Accordingly, the contact element 900 of this fourth example comprises two second contact surfaces 903a, 903b, which correspond with the protrusions 905 , 906 of the contact element 900 .

[0112] When activating the actuator mechanism 51 to push the contact element 900 towards the first carrier 29 in the opening 23a, the first carrier 29 is clamped between the first contact surface 217 and the two second contact surfaces 903a, 903b, thus at three spaced apart points around the circumference of the first carrier 29. Accordingly, the three contact points between the first carrier 29 and the cold plate 35c can provide an increased total rate of heat transfer between the cold plate 35c and the carrier 29 . In addition, the cold plate assembly according to this fourth example, can provide a more stable confinement of the first carrier 29 due to the three separate contact surfaces 217 , 903a, 903b .

[0113] It is to be understood that the above description is included to illustrate the operation of the preferred embodiments and is not meant to limit the scope of the invention . From the above discussion, many variations will be apparent to one skilled in the art that would yet be encompassed by the scope of the present invention .

[0114] In summary, the invention relates to a cooling device , a cooling assembly and a method for cooling a carrier of a probe . The cooling device comprises a refrigerator coupled to a cold plate assembly, configured to be arranged in a vacuum space . The cold plate assembly comprises : a cold plate comprising an opening at least partially delimited by a wall for receiving the carrier, wherein the wall comprises a first contact surface for contacting the carrier, wherein the refrigerator is configured for cooling the cold plate to the low temperature ; a contact element arranged in or on the cold plate , adj acent to the opening and moveable with respect to the cold plate along a contact axis towards the opening, wherein the contact element comprises a second contact surface for contacting the carrier, and an actuator mechanism configured for moving the contact element towards the opening along the contact axis .

Claims

C L A I M S1 . A cooling device comprising a refrigerator for cooling a carrier of a probe , wherein the cooling device comprises a cold plate assembly configured to be arranged in a vacuum space , wherein the cold plate assembly comprises : a cold plate that comprises an opening that is at least partially delimited by a wall , wherein the opening is configured for receiving the carrier of the probe, wherein the wall comprises a first contact surface configured for contacting the carrier, wherein the refrigerator is configured for cooling the cold plate to a low temperature, a contact element arranged in or on the cold plate and arranged substantially adj acent to the opening, wherein the contact element is at least partially moveable with respect to the cold plate along a contact axis towards the opening, wherein the contact element comprises a second contact surface configured for contacting the carrier, and an actuator mechanism arranged in or on the cold plate for moving the contact element towards the opening along the contact axis , wherein the actuator mechanism comprises : a first drive element which is moveable along the contact axis with respect to the cold plate and configured for moving the contact element along the contact axis towards the opening, and a second drive element which is substantially linearly moveable with respect to the cold plate along a direction substantially perpendicular to the contact axis , wherein the first drive element is arranged at least partially between the contact element and the second drive element, wherein the second drive element is configured to slidably contact the first drive element for pushing the first drive element along the contact axis .2 . The cooling device according to claim 1 ,wherein the contact element is an elongated contact element that extends substantially along a part of the circumference of the opening, wherein the second contact surface is arranged at a side of the contact element facing towards the opening, wherein the contact element comprises a distal end and a proximal end, wherein the proximal end is thermally and mechanically connected to the cold plate, preferably wherein the proximal end is fixedly connected to the cold plate, preferably wherein the proximal end of the contact element is integrally formed with the cold plate .3 . The cooling device according to claim 2 , wherein the distal end is substantially free standing with respect to the cold plate .4 . The cooling device according to claim 2 , wherein the distal end is thermally and mechanically connected to the cold plate , preferably wherein the distal end is fixedly connected to the cold plate , preferably wherein the distal end of the contact element is integrally formed with the cold plate .

5. The cooling device according to any one of the claims 1 - 4 , wherein the contact element comprises a section which is elastically deflectable at least in a direction with a component along the contact axis .

6. The cooling device according to any one of the previous claims , wherein the cold plate comprises a slot or a groove that is arranged substantially adj acent to the contact element at a side of the contact element facing away from the opening and that is configured for receiving the actuator mechanism, wherein the actuator mechanism is arranged at least partially in the slot or groove, preferably wherein the actuator mechanism is arranged substantially fully in the slot or groove .7 . The cooling device according to any one of the previous claims , wherein the actuator mechanism further comprises a substantially elongated transfer member that is moveable along the contact axis with respect to the cold plate, wherein the transfer member comprises a first longitudinal end that faces towards and abuts against the contact element at a side thereof facing away from the opening and a second longitudinal end opposite to the first longitudinal end, and wherein the actuator mechanism is configured for moving the second longitudinal end of the transfer member along the contact axis .8 . The cooling device according to claim 7 , wherein the transfer member comprises a section which is elastically compressible at least in a longitudinal direction of the transfer member .

9. The cooling device according to any one of the previous claims , wherein the first drive element comprises a first inclined surface facing away from the contact element, wherein the first inclined surface and the contact axis define an acute angle , preferably wherein the acute angle is greater than or equal to 45 degrees , preferably wherein the acute angle is greater than or equal to 80 degrees , and wherein the second drive element abuts against the first inclined surface, wherein the second drive element is configured to slidably contact the first inclined surface for pushing the first drive element along the contact axis by moving the second drive element in the direction substantially perpendicular to the contact axis .10 . The cooling device according to claim 9 , when dependent on claim 7 , wherein the first drive element comprises the second longitudinal end of the transfer member, or wherein a side of the first drive element facing towardsthe contact element abuts the second longitudinal end of the transfer member .11 . The cooling device according to claim 9 or 10 , wherein the second drive element comprises a contact surface configured to slidably contact the first inclined surface , and wherein the second drive element further comprises a screw thread configured to screw into the cold plate to move at least the contact surface of the second drive element along a direction substantially perpendicular to the contact axis .12 . The cooling device according to claim 9 or 10 , wherein the second drive element further comprises a second inclined surface, wherein the second inclined surface abuts the first inclined surface, wherein the actuator mechanism is configured to slidably contact the first inclined surface with the second inclined surface to push the first drive element along the contact axis by moving the second drive element along the direction substantially perpendicular to the contact axis , wherein the second inclined surface and the contact axis define an acute angle, preferably wherein the acute angle is greater than or equal to 45 degrees , preferably wherein the acute angle is greater than or equal to 80 degrees , more preferably wherein the second inclined surface is substantially parallel to the first inclined surface .13 . The cooling device according to any one of the previous claims , wherein the cooling device further comprises : a cover plate that is configured to receive a vacuum vessel for forming the vacuum space ; a central axis , preferably wherein the central axis extends substantially perpendicular to the contact axis ; at least one first spacer element arranged at least partially between the cover plate and the cold plate assembly for spacing apart the cold plate assembly from the cover plate, wherein the first spacer element extends along adirection substantially parallel to the central axis , wherein the first spacer element is configured for thermally insulating at least the cold plate from the cover plate .14 . The cooling device according to claim 13 , further comprising an operating unit, wherein the operating unit comprises an operator element that extends from the cover plate to at least the actuator mechanism, wherein the operating unit is configured to engage the actuator mechanism with the operator element for operating the actuator mechanism to move the contact element along the contact axis towards the opening .

15. The cooling device according to claim 14 , when dependent on claim 9, wherein the operator element is substantially fixedly attached to the second drive element , and wherein the operator element comprises a thermal insulating member that is configured for substantially preventing a thermal conduction along a path from the cold plate to the cover plate via the operator element .

16. The cooling device according to claim 14 or 15, wherein the operating unit is configured for moving the second drive element in a direction substantially parallel to the central axis via the operator element .17 . The cooling device according to claim 16 , wherein the operating unit further comprises a coupling element that is substantially fixedly attached to the operator element , wherein the coupling element comprises a contact surface configured for contacting the second drive member, wherein : the operator element extends at least partially through the cold plate , wherein the second drive element is arranged at least partially between the coupling element and the cover plate, and wherein the operating unit is configured for pulling the second drive element towards the cover platein a direction substantially parallel to the central axis via the operator element and the coupling element, and / or the coupling element is arranged at least partially between the second drive element and the cover plate, and wherein the operating unit is configured for pushing the second drive element away from the cover plate in a direction substantially parallel to the central axis via the operator element and the coupling element .18 . The cooling device according to any one of the claims 13 - 17 , wherein the cold plate assembly is a first cold plate assembly, wherein the cooling device further comprises a second cold plate assembly that comprises the features of the cold plate assembly as defined in any one of the previous claims , wherein the cooling device further comprises at least one second spacer element arranged between the first cold plate assembly and the second cold plate assembly to space the first cold plate assembly apart from the second cold plate assembly, wherein the second spacer element comprises a thermally insulating material to thermally insulate the first cold plate assembly from the second cold plate assembly plate, wherein the second cold plate assembly is arranged between the first cold plate assembly and the cover plate .

19. The cooling device according to claim 18 , when dependent on claim 14 , wherein the operating unit extends from the cover plate to the actuator mechanism of the first cold plate assembly passing through the cold plate of the second cold plate assembly, and wherein the operating unit is configured to substantially simultaneously engage with the actuator mechanisms of the first and second cold plate ass e mb lies .20 . The cooling device according to any one of theprevious claims , wherein the refrigerator comprises a dilution refrigerator .21 . A cooling assembly comprising a cooling device according to any one of the previous claims and a probe , wherein the probe comprises the carrier, wherein the carrier comprises a circumferential outer wall that is configured to be arranged at least partially in the opening of the cold plate , wherein the circumferential outer wall comprises a third contact surface configured to contact the first contact surface of the cold plate assembly, and a fourth contact surface configured to contact the second contact surface of the contact element , wherein the carrier is substantially rigid at least between the third and fourth contact surfaces .22 . The cooling assembly according to claim 21 , when dependent on claim 18 , wherein the carrier is a first carrier, wherein the probe further comprises a second carrier and a carrier spacer, wherein the carrier spacer is thermally insulating and arranged at least partially between the first and second carriers for spacing apart the first and second carriers , and wherein the first and second carriers are arrangeable at least partially in the opening of the cold plate of respectively the first and second cold plate assemblies23 . A method for cooling a carrier of a probe , wherein the method comprises the following steps : providing a cooling device according to any one of the claims 1 - 20 , and a probe comprising the carrier, or providing a cooling assembly according to claim 21 or 22 , arranging the carrier of the probe at least partially in the opening of the cold plate of the cold plate assembly, and thermally connecting the carrier to the cold plateof the cold plate assembly by causing the actuating mechanism of the cold plate assembly to move the contact element of the cold plate assembly along the contact axis such that the carrier is clamped between the first and second contact surfaces .24 . The method according to claim 23 , wherein the step of thermally connecting the carrier to the cold plate of the cold plate assembly further comprises : - moving the second drive element in the direction substantially perpendicular to the contact axis to push the first drive element along the contact axis towards the contact element .-o- o-o-o-o- o-o-o-MVD / BP

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