Bond head driving structure unit for turret-type die bonding device

By designing a bonding head drive structure unit for a turret-type die bonding device, including multiple sleeve assemblies and a voice coil motor, the problem that the bonding head drive structure is difficult to meet the accuracy and speed requirements is solved, and high efficiency and high precision of chip placement are achieved.

WO2025195353A1PCT designated stage Publication Date: 2025-09-25SHANGHAI YINGSHUO ELECTRONICS TECH CO LTD
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Patent Information

Application Number
PCT/CN2025/083077
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-03-18
Filing Date
2025-03-18
Publication Date
2025-09-25

AI Technical Summary

Technical Problem

In existing turret-type die bonding devices, the bonding head driving structure cannot simultaneously meet the precision and speed requirements of chip placement, and cannot flexibly and accurately drive the bonding head to perform linear movement along the radial direction of the mounting frame.

Method used

A bang head driving structure unit including a first transmission shaft, a first shaft sleeve assembly, a second shaft sleeve assembly, a second transmission shaft, a third shaft sleeve assembly and a fourth shaft sleeve assembly is adopted. The connecting piece and the connecting rod are driven by a voice coil motor to realize linear movement of the bang head in different directions.

Benefits of technology

It improves the speed and accuracy of chip placement, reduces the weight of the mounting frame, and realizes flexible and accurate linear movement of the bonding head to meet the market demand for high production capacity.

✦ Generated by Eureka AI based on patent content.

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Abstract

A bond head driving structure unit for a turret-type die bonding device, the unit comprising a first transmission shaft (10), a first bushing assembly (20), a second bushing assembly (30), a second transmission shaft (40), a third bushing assembly (50) and a fourth bushing assembly (60), wherein the first transmission shaft (10) is generally T shaped; the second transmission shaft (40) is generally cylindrical, and the second transmission shaft (40) is hollow inside and open at two ends; a first bushing body (21), a second bushing body (31), a third bushing body (51) and a fourth bushing body (61) are all in the form of a circular ring; the first bushing body (21) and the second bushing body (31) are arranged around the first transmission shaft (10); the third bushing body (51) and the fourth bushing body (61) are arranged around the second transmission shaft (40); and the second transmission shaft (40) is arranged around the first transmission shaft (10), and the axis of the second transmission shaft (40) is in line with the axis of the first transmission shaft (10). The bond head driving structure unit can drive a plurality of target bond heads located in the same plane to move linearly in different directions.
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Description

Bonding head drive structure unit for turret die bonding device Technical Field

[0001] The present invention relates to the field of semiconductor chip processing and packaging, and in particular to a bonding head driving structural unit for a turret-type die bonding device. Background Art

[0002] The die bonder, also known as a chip mounter, is the most critical and core piece of equipment in the die attach phase of the chip packaging and testing process. The die bonder removes the die from the pre-cut wafer and places it on the corresponding die attach position (die flag) on ​​the lead frame, bonding the die to the lead frame using epoxy. The die bonder's die bonding quality directly impacts the yield and cost of chip packaging and testing, and thus affects subsequent steps like wire bonding. In practice, the higher the unit per hour (UPH) throughput requirement for the chip testing process, the higher the accuracy and speed required of the die bonder. Therefore, a die bonder must meet both die attach accuracy and speed requirements to meet market demand.

[0003] In a turret-type die bonder, at least one bonding head is fixedly connected to a large, disc-shaped mounting frame. When a first motor drives the mounting frame to rotate, it drives the bonding head to the desired position—for example, to a chip pickup or placement position. A second motor then drives the bonding head to move linearly along the mounting frame's radial direction, completing chip pickup or placement. To increase chip placement speed, the mounting frame's rotation speed must be as fast as possible, and the second motor must be able to quickly and flexibly drive the bonding head's linear movement along the mounting frame's radial direction. To achieve the required chip placement accuracy, the second motor must be able to flexibly and accurately drive the bonding head's linear movement along the mounting frame's radial direction. Therefore, the drive structure that drives the bonding head's linear movement along the mounting frame's radial direction plays a significant role in improving the chip placement speed and accuracy of a turret-type die bonder. Needless to say, designing and improving the drive structure that drives the bonding head's linear movement along the mounting frame's radial direction has become a pressing technical challenge for those skilled in the art. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a bonding head driving structure unit for a turret-type die bonding device, which can drive multiple target bonding heads of the turret-type die bonding device located in the same plane to perform linear motion in different directions.

[0005] In order to solve the above technical problems, the invention adopts the following technical solutions:

[0006] A bonding head drive structure unit for a turret-type crystal bonding device, the bonding head drive structure unit includes a first transmission shaft, a first shaft sleeve assembly, a second shaft sleeve assembly, a second transmission shaft, a third shaft sleeve assembly, and a fourth shaft sleeve assembly; the third shaft sleeve assembly and the second shaft sleeve assembly are identical in shape and structure; the fourth shaft sleeve assembly and the first shaft sleeve assembly are identical in shape and structure; the first shaft sleeve assembly includes a first shaft sleeve body; the second shaft sleeve assembly includes a second shaft sleeve body portion; the third shaft sleeve assembly includes a third shaft sleeve body portion; the fourth shaft sleeve assembly includes a fourth shaft sleeve body portion; the first transmission shaft is T-shaped as a whole, and the first transmission shaft includes a main body portion, a circular disc portion and a shaft head portion; the main portion of the first transmission shaft The body portion is cylindrical, the shaft head portion is cylindrical and hollow inside, the center position of one side surface of the circular disc portion is fixedly connected to one end of the main body portion, and the other side surface of the circular disc portion is fixedly connected to one end of the shaft head portion; the second transmission shaft is cylindrical as a whole, the interior of the second transmission shaft is hollow and open at both ends; the first sleeve body portion, the second sleeve body portion, the third sleeve body portion and the fourth sleeve body portion are all annular; the first sleeve body portion, the second sleeve body portion, the third sleeve body portion and the fourth sleeve body portion are all used to be fixedly connected to the bond head of the turret type crystal fixing device; along the radial direction of the shaft head portion of the first transmission shaft, the first sleeve body portion and the second sleeve body portion are two The first and second shafts are connected to each other via a shaft connecting rod and a shaft supporting cam, and the second and second shafts are connected to each other via a shaft connecting rod and a shaft supporting cam. In the radial direction of the shaft head of the driving shaft, a circular second bearing is arranged between the second sleeve body and the shaft head of the first transmission shaft, so that the second sleeve body can rotate around the shaft head of the first transmission shaft; the second transmission shaft is sleeved on the outside of the main body of the first transmission shaft, and the axis of the second transmission shaft and the axis of the first transmission shaft are located on the same straight line; along the axial direction of the first transmission shaft, a circular first retaining ring is arranged between the first bearing and the second bearing, and along the radial direction of the shaft head of the transmission shaft, the first retaining ring is sleeved on the outside of the shaft head of the first transmission shaft, and the first retaining ring is used to limit the first bearing and the second bearing along the axial direction of the first transmission shaft.

[0007] Preferably, the second transmission shaft includes a base portion and a sleeve portion fixedly connected to each other, the inner diameter of the base portion is equal to the inner diameter of the sleeve portion, and the outer diameter of the base portion is larger than the outer diameter of the sleeve portion, so that a shoulder is formed on the outer side wall of the second transmission shaft and at the connection between the base portion and the sleeve portion; along the radial direction of the sleeve portion of the second transmission shaft, the third sleeve body portion and the fourth sleeve body portion are both sleeved on the outside of the sleeve portion of the second transmission shaft; and along the axial direction of the second transmission shaft, the third sleeve body portion is located at the end of the sleeve portion away from the shoulder, and the fourth sleeve body portion is located at the end of the sleeve portion close to the sleeve portion; the sleeve portion of the second transmission shaft is close to the circular disk portion of the first transmission shaft and a slit is provided between the two, and the base portion of the second transmission shaft is away from the circular disk portion of the first transmission shaft; the Bang head drive structural unit also includes a third bearing, a fourth bearing , and a second retaining ring; along the radial direction of the sleeve portion of the second transmission shaft, a circular third bearing is provided between the third sleeve body and the sleeve portion of the second transmission shaft, so that the third sleeve body can rotate around the sleeve portion of the second transmission shaft; along the radial direction of the sleeve portion of the second transmission shaft, a circular fourth bearing is provided between the fourth sleeve body and the sleeve portion of the second transmission shaft, so that the fourth sleeve body can rotate around the sleeve portion of the second transmission shaft; along the axial direction of the second transmission shaft, a circular second retaining ring is provided between the third bearing and the fourth bearing, and along the radial direction of the sleeve portion of the second transmission shaft, the second retaining ring is sleeved on the outside of the sleeve portion of the second transmission shaft, and the second retaining ring is used to limit the third bearing and the fourth bearing along the axial direction of the second transmission shaft; the shoulder of the second transmission shaft limits the fourth bearing.

[0008] Preferably, the first sleeve assembly also includes a first protrusion; the second sleeve assembly also includes a second protrusion; the third sleeve assembly also includes a third protrusion; the fourth sleeve assembly also includes a fourth protrusion; the bungee driving structure unit also includes a connecting rod fixedly connected to the protrusion; the outer peripheral side surface of the first sleeve body portion is fixedly provided with at least one first protrusion extending outward relative to the first sleeve body portion, each first protrusion is fixedly connected to one end of a first connecting rod, and the end of each first connecting rod is used to fixedly connect a bungee of the turret-type crystal fixing device; the outer peripheral side surface of the second sleeve body portion is fixedly provided with at least one second protrusion extending outward relative to the second sleeve body portion, and each second protrusion is fixedly connected to a One end of the second connecting rod is fixedly connected, and the end of each second connecting rod is used to fixedly connect a bonding head of the turret type crystal fixing device; the outer peripheral side surface of the third sleeve body is fixedly provided with at least one third protrusion extending outward relative to the third sleeve body, and each third protrusion is fixedly connected to one end of a third connecting rod, and the end of each third connecting rod is used to fixedly connect a bonding head of the turret type crystal fixing device; the outer peripheral side surface of the fourth sleeve body is fixedly provided with at least one fourth protrusion extending outward relative to the fourth sleeve body, and each fourth protrusion is fixedly connected to one end of a fourth connecting rod, and the end of each fourth connecting rod is used to fixedly connect a bonding head of the turret type crystal fixing device.

[0009] Further preferably, the outer peripheral side surface of the first sleeve body is fixedly provided with two first protrusions extending outward relative to the first sleeve body, and the two first protrusions are symmetrically arranged, each first protrusion is fixedly connected to one end of a first connecting rod, and the two first connecting rods are located on the same straight line passing through the center point of the first sleeve body; the outer peripheral side surface of the second sleeve body is fixedly provided with two second protrusions extending outward relative to the second sleeve body, and the two second protrusions are symmetrically arranged, each second protrusion is fixedly connected to one end of a second connecting rod, and the two second connecting rods are located on the same straight line passing through the center point of the second sleeve body.

[0010] Further preferably, the outer peripheral side surface of the third sleeve body is fixedly provided with two third protrusions extending outward relative to the third sleeve body, and the two third protrusions are symmetrically arranged, each third protrusion is fixedly connected to one end of a third connecting rod, and the two third connecting rods are located on the same straight line passing through the center point of the third sleeve body; the outer peripheral side surface of the fourth sleeve body is fixedly provided with two fourth protrusions extending outward relative to the fourth sleeve body, and the two fourth protrusions are symmetrically arranged, each fourth protrusion is fixedly connected to one end of a fourth connecting rod, and the two fourth connecting rods are located on the same straight line passing through the center point of the fourth sleeve body.

[0011] Further preferably, the outer peripheral side surface of the third sleeve body is fixedly provided with two third protrusions extending outward relative to the third sleeve body, and the two third protrusions are symmetrically arranged, each third protrusion is fixedly connected to one end of a third connecting rod, and the two third connecting rods are located on the same straight line passing through the center point of the third sleeve body; the outer peripheral side surface of the fourth sleeve body is fixedly provided with two fourth protrusions extending outward relative to the fourth sleeve body, and the two fourth protrusions are symmetrically arranged, each fourth protrusion is fixedly connected to one end of a fourth connecting rod, and the two fourth connecting rods are located on the same straight line passing through the center point of the fourth sleeve body.

[0012] Further preferably, the first protrusion is L-shaped, the first protrusion includes a first bottom arm and a first extension arm, the first bottom arm is fixedly connected to the first extension arm and the two are perpendicular to each other, the first bottom arm of the first protrusion is fixedly connected to the outer peripheral side surface of the first sleeve body portion, and the first bottom arm of the first protrusion extends outward relative to the first sleeve body portion along the radial direction of the first sleeve body portion, and the first extension arm of the first protrusion extends along the axial direction of the first transmission shaft; the second protrusion is straight plate-shaped, and the second protrusion extends outward relative to the second sleeve body portion along the radial direction of the second sleeve body portion. The outer peripheral side of the fourth sleeve body is fixedly connected to the second bottom arm of the fourth projection, and the second bottom arm of the fourth projection extends outward relative to the fourth sleeve body along the radial direction of the fourth sleeve body, and the second extension arm of the fourth projection extends along the axial direction of the second transmission shaft.

[0013] Further preferably, the first protrusion is L-shaped, the first protrusion includes a first bottom arm and a first extension arm, the first bottom arm is fixedly connected to the first extension arm and the two are perpendicular to each other, the first bottom arm of the first protrusion is fixedly connected to the outer peripheral side surface of the first sleeve body portion, and the first bottom arm of the first protrusion extends outward relative to the first sleeve body portion along the radial direction of the first sleeve body portion, and the first extension arm of the first protrusion extends along the axial direction of the first transmission shaft; the second protrusion is straight plate-shaped, and the second protrusion extends outward relative to the second sleeve body portion along the radial direction of the second sleeve body portion. The outer peripheral side of the fourth sleeve body is fixedly connected to the second bottom arm of the fourth projection, and the second bottom arm of the fourth projection extends outward relative to the fourth sleeve body along the radial direction of the fourth sleeve body, and the second extension arm of the fourth projection extends along the axial direction of the second transmission shaft.

[0014] Further preferably, along the axial direction of the first transmission shaft, the first extension arm of the first protrusion of the first sleeve body extends toward the second sleeve body, so that all the first connecting rods and all the second connecting rods are located in the same plane.

[0015] Further preferably, along the axial direction of the second transmission shaft, the second extension arm of the fourth protrusion of the fourth sleeve body extends toward the third sleeve body, so that all the third connecting rods and all the fourth connecting rods are located in the same plane.

[0016] Further preferably, along the axial direction of the first transmission shaft, the first extension arm of the first protrusion of the first bushing assembly extends toward the direction close to the second bushing body, and the fixed connection between the second protrusion of the second bushing assembly and the second connecting rod is located on the side of the second protrusion away from the first bushing body; along the axial direction of the second transmission shaft, the second extension arm of the fourth protrusion of the fourth bushing assembly extends toward the direction close to the third bushing body, and the fixed connection between the third protrusion of the third bushing assembly and the third connecting rod is located on the side of the second protrusion away from the fourth bushing body; through the above arrangement, the two first connecting rods, the two second connecting rods, the two third connecting rods and the two fourth connecting rods are located in the same plane.

[0017] Further preferably, the straight line where the two first connecting rods are located is perpendicular to the straight line where the two second connecting rods are located.

[0018] Further preferably, the straight line where the two third connecting rods are located is perpendicular to the straight line where the two fourth connecting rods are located.

[0019] Further preferably, the straight line where the two first connecting rods are located is perpendicular to the straight line where the two second connecting rods are located; the straight line where the two third connecting rods are located is perpendicular to the straight line where the two fourth connecting rods are located; the two first connecting rods, the two second connecting rods, the two third connecting rods and the two fourth connecting rods are evenly distributed radially, and the angle between any two adjacent connecting rods is 45°.

[0020] Preferably, the diameter of the circular disc portion is larger than the diameter of the shaft head portion, so that a circular flange portion is formed at the connection between the circular disc portion and the shaft head portion; along the axial direction of the first transmission shaft, the flange portion of the first transmission shaft serves to limit the second bearing.

[0021] Preferably, the first sleeve assembly also includes a first cover edge portion; the second sleeve assembly also includes a second cover edge portion; a first cover edge portion is fixedly provided on an end surface of the first sleeve body portion, and the first cover edge portion extends inwardly along the radial direction of the first sleeve body portion and is in a circular ring shape; a second cover edge portion is fixedly provided on an end surface of the second sleeve body portion, and the second cover edge portion extends inwardly along the radial direction of the second sleeve body portion and is in a circular ring shape; along the axial direction of the first transmission shaft, the first cover edge portion is located at one end of the circular disk portion of the first sleeve body portion away from the first transmission shaft, and the second cover edge portion is located at one end of the circular disk portion of the second sleeve body portion away from the first transmission shaft; along the axial direction of the first transmission shaft, the first cover edge portion limits the first bearing, and the second cover edge portion limits the second bearing.

[0022] Further preferably, the third sleeve assembly also includes a third cover edge; the fourth sleeve assembly also includes a fourth cover edge; a third cover edge is fixedly provided on one end surface of the third sleeve body, and the third cover edge extends inwardly along the radial direction of the third sleeve body and is in a circular ring shape; a fourth cover edge is fixedly provided on one end surface of the fourth sleeve body, and the fourth cover edge extends inwardly along the radial direction of the fourth sleeve body and is in a circular ring shape; along the axial direction of the second transmission shaft, the third cover edge is located at one end of the third sleeve body close to the shoulder of the second transmission shaft, and the fourth cover edge is located at one end of the fourth sleeve body close to the shoulder of the second transmission shaft; along the axial direction of the second transmission shaft, the third cover edge serves to limit the third bearing, and the fourth cover edge serves to limit the fourth bearing.

[0023] Preferably, the bang head driving mechanism further includes a first connecting member, a second connecting member, a first voice coil motor, and a second voice coil motor; the first transmission shaft is fixedly connected to the first voice coil motor by means of the first connecting member; the second transmission shaft is fixedly connected to the second voice coil motor by means of the second connecting member.

[0024] Any range described in the present invention includes the end value and any numerical value between the end values ​​and any sub-range formed by the end value or any numerical value between the end values.

[0025] Unless otherwise specified, all raw materials in the present invention can be purchased commercially, and the equipment used in the present invention can adopt conventional equipment in the relevant field or refer to the existing technology in the relevant field.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] (1) The bonding head driving structure unit for a turret-type die bonding device provided by the present invention can drive the target bonding head of the turret-type die bonding device to perform linear motion in different directions. For example, the bonding head driving structure unit can drive the target bonding head to perform linear motion in a horizontal direction relative to the wafer, or the bonding head driving structure can drive the target bonding head to perform linear motion in a vertical direction relative to the lead frame.

[0028] (2) The present invention provides a driving structure unit for a turret-type crystal bonding device, comprising a T-shaped first transmission shaft, a first sleeve assembly and a second sleeve assembly. The first sleeve assembly and the second sleeve assembly can rotate around the shaft head of the first transmission shaft. If the driving force output by the first voice coil motor is along, for example, the horizontal direction (or vertical direction), the first voice coil motor drives the first connecting member to move along the horizontal direction (or vertical direction), and the first connecting member further drives the first transmission shaft to move along the horizontal direction (or vertical direction). The first transmission shaft drives the first bearing, the second bearing, the first sleeve assembly and the second sleeve assembly to move along the horizontal direction (or vertical direction). The first sleeve assembly drives the first connecting rod to move along the horizontal direction (or vertical direction) and the second sleeve assembly drives the second connecting rod to move along the horizontal direction (or vertical direction). The first connecting rod and the second connecting rod each drive the bond head fixed thereto to move along the horizontal direction (or vertical direction), thereby realizing that the first voice coil motor can drive the bond head to perform linear motion along the horizontal direction (or vertical direction).

[0029] (3) The present invention provides a driving structural unit for a turret-type crystal bonding device, comprising a cylindrical second transmission shaft, a third shaft sleeve assembly and a fourth shaft sleeve assembly. The third shaft sleeve assembly and the fourth shaft sleeve assembly can rotate around the sleeve portion of the second transmission shaft. If the driving force output by the second voice coil motor is along, for example, the horizontal direction (or vertical direction), the second voice coil motor drives the second connecting member to move along the horizontal direction (or vertical direction), and the second connecting member further drives the second transmission shaft to move along the horizontal direction (or vertical direction). The second transmission shaft drives the third bearing, the fourth bearing, the third shaft sleeve assembly and the fourth shaft sleeve assembly to move along the horizontal direction (or vertical direction). The third shaft sleeve assembly drives the third connecting rod to move along the horizontal direction (or vertical direction) and the fourth shaft sleeve assembly drives the fourth connecting rod to move along the horizontal direction (or vertical direction). The third connecting rod and the fourth connecting rod each drive the bond head fixed thereto to move along the horizontal direction (or vertical direction), thereby realizing that the second voice coil motor can drive the bond head to perform linear motion along the horizontal direction (or vertical direction).

[0030] (4) The present invention provides a bonding head driving structure unit for a turret-type crystal bonding device, wherein the second transmission shaft is sleeved on the outside of the main body of the first transmission shaft, the axis of the second transmission shaft and the axis of the first transmission shaft are located on the same straight line, four sleeves are arranged in a line around the two transmission shafts and along the axis of the first transmission shaft (or the second transmission shaft), and eight connecting rods fixedly connected to the four sleeves are radially arranged. The eight connecting rods are located in the same plane, and a bonding head is connected to the end of each connecting rod, thereby improving the chip mounting speed while ensuring the chip mounting accuracy.

[0031] (5) The bonding head driving structure unit for the turret-type die bonding device provided by the present invention has the advantages of simple structure and agile movement. It can flexibly and accurately drive the target bonding head to move linearly along the radial direction of the mounting frame of the turret-type die bonding device, thereby improving the chip mounting speed while ensuring the chip mounting accuracy.

[0032] (6) The present invention provides a bonding head driving structure unit for a turret-type die bonding device. The voice coil motor does not need to be installed on the large disc-shaped mounting frame of the turret-type die bonding device, thereby reducing the weight of the mounting frame and increasing the rotation speed of the mounting frame, thereby increasing the chip mounting speed while ensuring the chip mounting accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The specific embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0034] FIG1 is a perspective schematic diagram of a bonding head driving structure unit for a turret-type die bonding device according to an embodiment of the present invention;

[0035] FIG2 is a perspective schematic diagram of a first shaft sleeve of a bonding head driving structure unit for a turret-type die bonding device according to an embodiment of the present invention;

[0036] FIG3 is a schematic diagram of the three-dimensional structure of a second shaft sleeve of a bonding head driving structure unit for a turret-type die bonding device according to an embodiment of the present invention;

[0037] FIG4 is a perspective schematic diagram of a first transmission shaft of a bonding head driving structure unit for a turret-type die bonding device according to an embodiment of the present invention;

[0038] FIG5 is a perspective schematic diagram of a second transmission shaft of a bonding head driving structure unit for a turret-type die bonding device according to an embodiment of the present invention;

[0039] FIG6 is an exploded schematic diagram of a bonding head driving structure unit for a turret-type die bonding device according to an embodiment of the present invention;

[0040] 7 is a cross-sectional schematic diagram of a bonding head driving structure unit for a turret-type die bonding device provided by an embodiment of the present invention (a cross-section along the axial direction of the first transmission shaft). DETAILED DESCRIPTION

[0041] In order to explain the present invention more clearly, the present invention is further described below in conjunction with preferred embodiments. Those skilled in the art should understand that the following specific description is illustrative rather than restrictive and should not be used to limit the scope of protection of the present invention.

[0042] As shown in Figures 1, 2, 3, 4, 5, 6 and 7, the bond head driving structure unit for the turret-type crystal bonding device provided in this embodiment includes a first transmission shaft 10, a first shaft sleeve assembly 20, a second shaft sleeve assembly 30, a second transmission shaft 40, a third shaft sleeve assembly 50, a fourth shaft sleeve assembly 60, a first bearing 24, a second bearing 34, a first retaining ring 26, a third bearing 54, a fourth bearing 64, a second retaining ring 56, a connecting rod, a first connecting member 70, a second connecting member (not shown in the figure), a first voice coil motor (not shown in the figure), and a second voice coil motor (not shown in the figure).

[0043] The first sleeve assembly 20 includes a first sleeve body 21, a first protrusion 22, and a first cover rim 25. The second sleeve assembly 30 includes a second sleeve body 31, a second protrusion 32, and a second cover rim 35. The third sleeve assembly 50 includes a third sleeve body 51, a third protrusion 52, and a third cover rim 55. The fourth sleeve assembly 60 includes a fourth sleeve body 61, a fourth protrusion 62, and a fourth cover rim 64. The third sleeve assembly 50 has the same shape and structure as the second sleeve assembly 30. The fourth sleeve assembly 60 has the same shape and structure as the first sleeve assembly 20.

[0044] As shown in Figure 4, the first transmission shaft 10 is T-shaped as a whole, and the first transmission shaft 10 includes a main body 11, a circular disc portion 12 and a shaft head 13; the main body 11 of the first transmission shaft 10 is cylindrical, the shaft head 13 is cylindrical and hollow inside, the center position of one side surface of the circular disc portion 12 is fixedly connected to one end of the main body 11, and the other side surface of the circular disc portion 12 (that is, the side surface away from the main body 11) is fixedly connected to one end of the shaft head 13; the diameter of the circular disc portion 12 is larger than the diameter of the shaft head 13, so that a circular flange portion 14 is formed at the connection between the circular disc portion 12 and the shaft head 13.

[0045] As shown in Figure 2, the first sleeve body 21 is annular in shape. Two first protrusions 22 are fixedly disposed on the outer circumference of the first sleeve body 21, extending outward from the first sleeve body 21. The two first protrusions 22 are symmetrically arranged (i.e., they are located on the same line passing through the center of the first sleeve body 21). Each first protrusion 22 is fixedly connected to one end of a first connecting rod 23, which are located on the same line passing through the center of the first sleeve body 21. The distal end of each first connecting rod 23 (i.e., the end distal from the first sleeve body 21) is used to securely connect to a bonding head (not shown) of the turret-type die bonder described above. A first cover rim 25 is fixedly disposed on one end surface of the first sleeve body 21. The first cover rim 25 extends inward in a radial direction of the first sleeve body 21 (perpendicular to the axis of the first sleeve body 21) and is annular in shape. The first protrusion 22 is L-shaped, and the first protrusion 22 includes a first bottom arm 21a and a first extension arm 21b. The first bottom arm 21a and the first extension arm 21b are fixedly connected and are perpendicular to each other. The first bottom arm 21a of the first protrusion 22 is fixedly connected to the outer peripheral side surface of the first sleeve body 21, and the first bottom arm 21a of the first protrusion 22 extends outward relative to the first sleeve body 21 along the radial direction of the first sleeve body 21, and the first extension arm 21b of the first protrusion 22 extends along the axial direction of the first transmission shaft 10.

[0046] Those skilled in the art will readily appreciate that, depending on practical needs, the outer circumferential side surface of the first sleeve body 21 may also be fixedly provided with a first protrusion 22 extending outwardly from the first sleeve body 21. This first protrusion 22 is fixedly connected to one end of a first connecting rod 23. The distal end of the first connecting rod 23 (i.e., the end away from the first sleeve body 21) is used to fixedly connect to a bonding head of the above-mentioned turret-type die bonder (not shown in the figure). Similarly, depending on practical needs, the outer circumferential side surface of the first sleeve body 21 may also be fixedly provided with three or more first protrusions 22 extending outwardly from the first sleeve body 21. Each first protrusion 22 is fixedly connected to one end of a first connecting rod 23. The distal end of each first connecting rod 23 (i.e., the end away from the first sleeve body 21) is used to fixedly connect to a bonding head of the above-mentioned turret-type die bonder (not shown in the figure).

[0047] As shown in Figure 3, the second sleeve body 31 is annular in shape. Two second protrusions 32 are fixedly disposed on the outer circumference of the second sleeve body 31, extending outward from the second sleeve body 31. The two second protrusions 32 are symmetrically arranged (i.e., they are located on the same line passing through the center of the second sleeve body 31). Each second protrusion 32 is fixedly connected to one end of a second connecting rod 33, which are located on the same line passing through the center of the second sleeve body 31. The distal end of each second connecting rod 33 (i.e., the end distal from the second sleeve body 31) is used to securely connect to a bonding head (not shown) of the turret-type die bonder described above. A second cover rim 35 is fixedly disposed on one end surface of the second sleeve body 31. The second cover rim 35 extends inward in a radial direction of the second sleeve body 31 (perpendicular to the axis of the second sleeve body 31) and is annular in shape. The second protrusion 32 is in a straight plate shape and extends outward relative to the second sleeve body 31 along the radial direction of the second sleeve body 31 .

[0048] Those skilled in the art will readily appreciate that, depending on practical needs, the outer circumferential side surface of the second sleeve body 31 may also be fixedly provided with a second protrusion 32 extending outwardly from the second sleeve body 31 . This second protrusion 32 is fixedly connected to one end of a second connecting rod 33 . The distal end of the second connecting rod 33 (i.e., the end away from the first sleeve body 21 ) is used to fixedly connect to a bunger of the turret-type die bonder (not shown in the figure). Similarly, depending on practical needs, the outer circumferential side surface of the second sleeve body 31 may also be fixedly provided with three or more second protrusions 32 extending outwardly from the second sleeve body 31 . Each second protrusion 32 is fixedly connected to one end of a second connecting rod 33 . The distal end of each second connecting rod 33 (i.e., the end away from the second sleeve body 31 ) is used to fixedly connect to a bunger of the turret-type die bonder (not shown in the figure).

[0049] As shown in Figure 3, the third sleeve body 51 is annular in shape. Two third protrusions 52 are fixedly disposed on the outer circumference of the third sleeve body 51, extending outward from the third sleeve body 51. The two third protrusions 52 are symmetrically arranged (i.e., they are located on the same line passing through the center of the third sleeve body 51). Each third protrusion 52 is fixedly connected to one end of a third connecting rod 53, which are located on the same line passing through the center of the third sleeve body 51. The distal end of each third connecting rod 53 (i.e., the end distal from the third protrusion 52) is used to securely connect to a bonding head (not shown) of the turret-type die bonder described above. A third cover 55 is fixedly disposed on one end surface of the third sleeve body 51. The third cover 55 extends inward in a radial direction of the third sleeve body 51 (perpendicular to the axis of the third sleeve body 51) and is annular in shape. The third protrusion 52 is in a straight plate shape and extends outward relative to the third sleeve body 51 along the radial direction of the third sleeve body 51 .

[0050] Those skilled in the art will readily appreciate that, depending on practical needs, the outer circumference of the third sleeve body 51 may also be fixedly provided with a third protrusion 52 extending outwardly from the third sleeve body 51. This third protrusion 52 is fixedly connected to one end of a third connecting rod 53. The distal end of the third connecting rod 53 (i.e., the end away from the third sleeve body 51) is used to fixedly connect to a bonding head of the turret-type die bonder (not shown in the figure). Similarly, depending on practical needs, the outer circumference of the third sleeve body 51 may also be fixedly provided with three or more third protrusions 52 extending outwardly from the third sleeve body 51. Each third protrusion 52 is fixedly connected to one end of a third connecting rod 53. The distal end of each third connecting rod 53 (i.e., the end away from the third sleeve body 51) is used to fixedly connect to a bonding head of the turret-type die bonder (not shown in the figure).

[0051] As shown in Figure 2, the fourth sleeve body 61 is annular in shape. Two fourth protrusions 62 are fixedly mounted on the outer circumference of the fourth sleeve body 61, extending outward from the fourth sleeve body 61. The two fourth protrusions 62 are symmetrically arranged (i.e., they are located on the same line passing through the center of the fourth sleeve body 61). Each fourth protrusion 62 is fixedly connected to one end of a fourth connecting rod 63, which are located on the same line passing through the center of the fourth sleeve body 61. The distal end of each fourth connecting rod 63 (i.e., the end distal from the fourth sleeve body 61) is used to securely connect to a bonding head (not shown) of the turret-type die bonder described above. A fourth cover 64 is fixedly mounted on one end surface of the fourth sleeve body 61. The fourth cover 64 extends inward in a radial direction of the fourth sleeve body 61 (this radial direction is perpendicular to the axis of the fourth sleeve body 61) and is annular in shape. The fourth protrusion 62 is L-shaped, and the fourth protrusion 62 includes a second bottom arm 61a and a second extension arm 61b. The second bottom arm 61a is fixedly connected to the second extension arm 61b and the two are perpendicular to each other. The second bottom arm 61a of the fourth protrusion 62 is fixedly connected to the outer peripheral side surface of the fourth sleeve body 61, and the second bottom arm 21a of the fourth protrusion 62 extends outward relative to the fourth sleeve body 61 along the radial direction of the fourth sleeve body 61, and the second extension arm 21b of the fourth protrusion 62 extends along the axial direction of the second transmission shaft 40.

[0052] Those skilled in the art will readily appreciate that, depending on practical needs, the outer circumferential side surface of the fourth sleeve body 61 may also be fixedly provided with a fourth protrusion 62 extending outwardly from the fourth sleeve body 61. This fourth protrusion 62 is fixedly connected to one end of a fourth connecting rod 63. The distal end of the fourth connecting rod 63 (i.e., the end away from the fourth sleeve body 61) is used to fixedly connect to a bonding head (not shown in the figure). Similarly, depending on practical needs, the outer circumferential side surface of the fourth sleeve body 61 may also be fixedly provided with three or more fourth protrusions 62 extending outwardly from the fourth sleeve body 61. Each fourth protrusion 62 is fixedly connected to one end of a fourth connecting rod 63. The distal end of each first connecting rod 23 (i.e., the end away from the fourth sleeve body 61) is used to fixedly connect to a bonding head of the above-mentioned turret-type die bonding device (not shown in the figure).

[0053] It should be noted that, in this embodiment, the first connecting rod 23, the second connecting rod 33, the third connecting rod 53, and the fourth connecting rod 63 are collectively referred to as "connecting rods"; the first protrusion 22, the second protrusion 32, the third protrusion 52, and the fourth protrusion 62 are collectively referred to as "protrusions".

[0054] As shown in Figures 6 and 7, both the first sleeve body 21 and the second sleeve body 31 are sleeved on the outside of the shaft head 13 of the first transmission shaft 10 along the radial direction of the shaft head 13 of the first transmission shaft 10 (this radial direction is perpendicular to the axis of the first transmission shaft 10). Along the axis of the first transmission shaft 10, the first sleeve body 21 is located at the end of the shaft head 13 away from the circular disc portion 12, and the second sleeve body 31 is located at the end of the shaft head 13 closer to the circular disc portion 12. Along the axis of the first transmission shaft 10, the first cover edge 25 of the first sleeve body 21 is located at the end of the first sleeve body 21 away from the circular disc 12, and the second cover edge 35 of the second sleeve body 31 is located at the end of the second sleeve body 31 away from the circular disc 12. Along the axis of the first transmission shaft 10, the first extension arm 21b of the first protrusion 22 of the first sleeve body 21 extends toward the second sleeve body 31, so that the two first connecting rods 23 and the two second connecting rods 33 are located in the same plane. In a preferred embodiment of this embodiment, the straight line on which the two first connecting rods 23 are located is perpendicular to the straight line on which the two second connecting rods 33 are located.

[0055] Along the radial direction of the shaft head 13 of the transmission shaft 10 (this radial direction is perpendicular to the axis of the first transmission shaft 10), a circular first bearing 24 is arranged between the first sleeve body 21 and the shaft head 13 of the first transmission shaft 10, so that the first sleeve body 21 can rotate around the shaft head 13 of the first transmission shaft 10; along the radial direction of the shaft head 13 of the transmission shaft 10 (this radial direction is perpendicular to the axis of the first transmission shaft 10), a circular second bearing 34 is arranged between the second sleeve body 31 and the shaft head 13 of the first transmission shaft 10, so that the second sleeve body 31 can rotate around the shaft head 13 of the first transmission shaft 10.

[0056] Along the axis of the first transmission shaft 10, a circular first retaining ring 26 is disposed between the first bearing 24 and the second bearing 34. The first retaining ring 26 is sleeved on the outside of the shaft head 13 of the first transmission shaft 10 along the radial direction of the shaft head 13 of the transmission shaft 10 (this radial direction is perpendicular to the axis of the first transmission shaft 10). The first retaining ring 26 is used to limit the first bearing 24 and the second bearing 34 along the axis of the first transmission shaft 10, thereby separating the first sleeve body 21 from the second sleeve body 31 to prevent mutual interference between the first sleeve body 21 and the second sleeve body 31. Along the axis of the first transmission shaft 10, the first cover rim 25 of the first sleeve body 21 limits the first bearing 24. Both the flange 14 of the first transmission shaft 10 and the second cover rim 35 of the second sleeve body 31 limit the second bearing 34.

[0057] As shown in Figure 5, the second transmission shaft 40 is cylindrical as a whole, the interior of the second transmission shaft 40 is hollow and open at both ends; the second transmission shaft 40 includes a base portion 41 and a socket portion 42 fixedly connected to each other, the inner diameter of the base portion 41 is equal to the inner diameter of the socket portion 42, and the outer diameter of the base portion 41 is larger than the outer diameter of the socket portion 42, so that a shoulder 43 is formed on the outer wall of the second transmission shaft 40 and at the connection between the base portion 41 and the socket portion 42.

[0058] The second transmission shaft 40 is sleeved on the outside of the main body 11 of the first transmission shaft 10 (the main body 11 of the first transmission shaft 10 is located in the internal cavity of the second transmission shaft 40), the axis of the second transmission shaft 40 and the axis of the first transmission shaft 10 are located on the same straight line, the sleeve portion 42 of the second transmission shaft 40 is close to the circular disk portion 12 of the first transmission shaft 10 and a slit is provided between the two, and the base portion 41 of the second transmission shaft 40 is away from the circular disk portion 12 of the first transmission shaft 10.

[0059] Along the radial direction of the sleeve portion 42 of the second transmission shaft 40 (this radial direction is perpendicular to the axis of the second transmission shaft 40), both the third sleeve body portion 51 and the fourth sleeve body portion 61 are sleeved on the outside of the sleeve portion 42 of the second transmission shaft 40; and along the axial direction of the second transmission shaft 40 (or the axial direction of the first transmission shaft 10), the third sleeve body portion 51 is located at the end of the sleeve portion 42 away from the shoulder 43, and the fourth sleeve body portion 61 is located at the end of the sleeve portion 42 close to the sleeve portion 42. Along the axis of the second transmission shaft 40, the third cover edge 55 of the third sleeve body 51 is located at one end of the third sleeve body 51 near the shoulder 43 of the second transmission shaft 40, and the fourth cover edge 64 of the fourth sleeve body 61 is located at one end of the fourth sleeve body 61 near the shoulder 43 of the second transmission shaft 40. Along the axis of the second transmission shaft 40, the second extension arm 61b of the fourth protrusion 62 of the fourth sleeve body 61 extends toward the third sleeve body 51, so that the two third connecting rods 53 and the two fourth connecting rods 63 are located in the same plane. In a preferred embodiment of this embodiment, the straight line on which the two third connecting rods 53 are located is perpendicular to the straight line on which the two fourth connecting rods 63 are located.

[0060] In a preferred implementation of the present embodiment, along the axial direction of the first transmission shaft 10, the first extension arm 21b of the first protrusion 22 of the first shaft sleeve assembly 20 extends in a direction close to the second shaft sleeve body 31, and the fixed connection between the second protrusion 32 of the second shaft sleeve assembly 20 and the second connecting rod 33 is located on the side of the second protrusion 32 away from the first shaft sleeve body 21; along the axial direction of the second transmission shaft 40, the second extension arm 61b of the fourth protrusion 62 of the fourth shaft sleeve assembly 60 extends in a direction close to the third shaft sleeve body 51, and the fixed connection between the third protrusion 52 of the third shaft sleeve assembly 50 and the third connecting rod 53 is located on the side of the third protrusion 52 away from the fourth shaft sleeve body 61; through the above arrangement, the two first connecting rods 23, the two second connecting rods 33, the two third connecting rods 53 and the two fourth connecting rods 63 are located in the same plane. In another preferred implementation of this embodiment, the two first connecting rods 23, the two second connecting rods 33, the two third connecting rods 53 and the two fourth connecting rods 63 are evenly distributed in a radial shape, and the angle between any two adjacent connecting rods is 45°.

[0061] Along the radial direction of the sleeve connection portion 42 of the second transmission shaft 40 (this radial direction is perpendicular to the axis of the second transmission shaft 40), a circular ring-shaped third bearing 54 is provided between the third sleeve body 51 and the sleeve connection portion 42 of the second transmission shaft 40, so that the third sleeve body 51 can rotate around the sleeve connection portion 42 of the second transmission shaft 40; along the radial direction of the sleeve connection portion 42 of the second transmission shaft 40 (this radial direction is perpendicular to the axis of the second transmission shaft 40), a circular ring-shaped fourth bearing 64 is provided between the fourth sleeve body 61 and the sleeve connection portion 42 of the second transmission shaft 40, so that the fourth sleeve body 61 can rotate around the sleeve connection portion 42 of the second transmission shaft 40.

[0062] Along the axis of the second transmission shaft 40, an annular second retaining ring 56 is disposed between the third bearing 54 and the fourth bearing 64. The second retaining ring 56 is sleeved on the outside of the sleeve portion 42 of the second transmission shaft 40 along the radial direction of the sleeve portion 42 of the second transmission shaft 40 (this radial direction is perpendicular to the axis of the second transmission shaft 40). The second retaining ring 56 is used to limit the third bearing 54 and the fourth bearing 64 along the axis of the second transmission shaft 40, thereby separating the third bearing 54 from the fourth bearing 64 to prevent mutual interference between the third bearing 54 and the fourth bearing 64. Along the axis of the second transmission shaft 40, the third cover rim 55 of the third sleeve body 51 limits the third bearing 54. Both the shoulder 43 of the second transmission shaft 40 and the fourth cover rim 64 of the fourth sleeve body 61 limit the fourth bearing 64.

[0063] The first transmission shaft 10 is fixedly connected to a first voice coil motor (not shown) via a first connector 70. Specifically, the end of the main body 11 of the first transmission shaft 10, away from the shaft head 13, is fixedly connected to the first connector 70. For example, one end of the first connector 70 is sleeved over the end of the main body 11 away from the shaft head 13 and the two are fixedly connected. The other end of the first connector 70 is fixedly connected to the first voice coil motor (not shown).

[0064] The second transmission shaft 40 is fixedly connected to the second voice coil motor (not shown) via a second connector (not shown). Specifically, the end of the base portion 41 of the second transmission shaft 40, away from the sleeve portion 42, is fixedly connected to one end of the second connector, while the other end of the second connector is fixedly connected to the second voice coil motor (not shown).

[0065] During use, if the driving force output by the first voice coil motor is along, for example, the horizontal direction (or vertical direction), the first voice coil motor drives the first connecting member 70 to move along the horizontal direction (or vertical direction), and the first connecting member 70 further drives the first transmission shaft 10 to move along the horizontal direction (or vertical direction), the first transmission shaft 10 drives the first bearing 24, the second bearing 34, the first shaft sleeve assembly 20 and the second shaft sleeve assembly 30 to move along the horizontal direction (or vertical direction), the first shaft sleeve assembly 20 drives the first connecting rod 23 to move along the horizontal direction (or vertical direction) and the second shaft sleeve assembly 30 drives the second connecting rod 33 to move along the horizontal direction (or vertical direction), the first connecting rod 23 and the second connecting rod 33 each drive the bang head fixed thereto to move along the horizontal direction (or vertical direction), thereby enabling the first voice coil motor to drive the bang head to perform linear motion along the horizontal direction (or vertical direction).

[0066] Similarly, during use, if the driving force output by the second voice coil motor is along, for example, the horizontal direction (or vertical direction), the second voice coil motor drives the second connecting member to move along the horizontal direction (or vertical direction), and the second connecting member then drives the second transmission shaft 40 to move along the horizontal direction (or vertical direction), the second transmission shaft 40 drives the third bearing 54, the fourth bearing 64, the third shaft sleeve assembly 50 and the fourth shaft sleeve assembly 60 to move along the horizontal direction (or vertical direction), the third shaft sleeve assembly 50 drives the third connecting rod 53 to move along the horizontal direction (or vertical direction) and the fourth shaft sleeve assembly 60 drives the fourth connecting rod 63 to move along the horizontal direction (or vertical direction), the third connecting rod 53 and the fourth connecting rod 63 each drive the bang head fixed thereto to move along the horizontal direction (or vertical direction), thereby enabling the second voice coil motor to drive the bang head to perform linear motion along the horizontal direction (or vertical direction).

[0067] During the operation of the turret-type crystal bonding device, when the first shaft sleeve assembly 20 drives the target bonding head to rotate to the chip picking position via the first connecting rod 23 (or the second shaft sleeve assembly 30 via the second connecting rod 33, or the third shaft sleeve assembly 50 via the third connecting rod 53, or the fourth shaft sleeve assembly 60 via the fourth connecting rod 63), for example, the target bonding head and the first connecting rod 23 (or the second connecting rod 33, or the third connecting rod 53, or the fourth connecting rod 63) are in a horizontal direction, and the target bonding head and the first connecting rod 23 (or the second connecting rod 33, or the third connecting rod 53, or the fourth connecting rod 63) are perpendicular to the plane where the wafer (not shown in the figure) is located, at this time, the first voice coil motor (or the second voice coil motor) can drive the target bonding head to perform linear movement relative to the wafer. When the first sleeve assembly 20 drives the target bunker to rotate to the chip placement position via the first connecting rod 23 (or the second sleeve assembly 30 via the second connecting rod 33, or the third sleeve assembly 50 via the third connecting rod 53, or the fourth sleeve assembly 60 via the fourth connecting rod 63), for example, the target bunker and the first connecting rod 23 (or the second connecting rod 33) are located in a vertical direction, and the target bunker and the first connecting rod 23 (or the second connecting rod 33, or the third connecting rod 53, or the fourth connecting rod 63) are all perpendicular to the plane where the lead frame (not shown in the figure) is located, the first voice coil motor (or the second voice coil motor) can drive the target bunker to perform linear motion relative to the lead frame, thereby achieving the target bunker placing the chip.

[0068] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the embodiments of the present invention. Those skilled in the art will appreciate that other variations or modifications based on the above description are possible. It is not possible to enumerate all embodiments here. Any obvious variations or modifications arising from the technical solution of the present invention remain within the scope of protection of the present invention.

Claims

1. A bonding head drive structure unit for a turret-type die bonding device, characterized in that: The Bang head driving structural unit comprises a first transmission shaft (10), a first shaft sleeve assembly (20), a second shaft sleeve assembly (30), a second transmission shaft (40), a third shaft sleeve assembly (50), and a fourth shaft sleeve assembly (60); The third shaft sleeve assembly (50) and the second shaft sleeve assembly (30) have the same shape and structure; the fourth shaft sleeve assembly (60) and the first shaft sleeve assembly (20) have the same shape and structure; the first shaft sleeve assembly (20) includes a first shaft sleeve body (21); the second shaft sleeve assembly (30) includes a second shaft sleeve body portion (31); the third shaft sleeve assembly (50) includes a third shaft sleeve body portion (51); and the fourth shaft sleeve assembly (60) includes a fourth shaft sleeve body portion (61); The first transmission shaft (10) is T-shaped as a whole, and comprises a main body (11), a circular disc (12) and a shaft head (13); the main body (11) of the first transmission shaft (10) is cylindrical, the shaft head (13) is cylindrical and hollow inside, the center position of one side of the circular disc (12) is fixedly connected to one end of the main body (11), and the other side of the circular disc (12) is fixedly connected to one end of the shaft head (13); The second transmission shaft (40) is cylindrical in shape as a whole, and the interior of the second transmission shaft (40) is hollow and has openings at both ends; The first sleeve body (21), the second sleeve body (31), the third sleeve body (51) and the fourth sleeve body (61) are all in annular shape; the first sleeve body (21), the second sleeve body (31), the third sleeve body (51) and the fourth sleeve body (61) are all used for fixed connection with the bonding head of the turret-type crystal bonding device; Along the radial direction of the shaft head (13) of the first transmission shaft (10), the first sleeve body (21) and the second sleeve body (31) are both sleeved on the outside of the shaft head (13) of the first transmission shaft (10); along the axial direction of the first transmission shaft (10), the first sleeve body (21) is located at an end of the shaft head (13) away from the circular disc (12), and the second sleeve body (31) is located at an end of the shaft head (13) close to the circular disc (12); Along the radial direction of the second transmission shaft (40), the third sleeve body portion (51) and the fourth sleeve body portion (61) are both sleeved on the outside of the second transmission shaft (40); The Bang head drive structure unit further includes a first bearing (24), a second bearing (34), and a first retaining ring (26); along the radial direction of the shaft head (13) of the transmission shaft (10), a circular first bearing (24) is provided between the first sleeve body (21) and the shaft head (13) of the first transmission shaft (10), so that the first sleeve body (21) can rotate around the shaft head (13) of the first transmission shaft (10); along the radial direction of the shaft head (13) of the transmission shaft (10), a circular second bearing (34) is provided between the second sleeve body (31) and the shaft head (13) of the first transmission shaft (10), so that the second sleeve body (31) can rotate around the shaft head (13) of the first transmission shaft (10); The second transmission shaft (40) is sleeved on the outside of the main body (11) of the first transmission shaft (10), and the axis of the second transmission shaft (40) and the axis of the first transmission shaft (10) are located on the same straight line; A first annular retaining ring (26) is provided between the first bearing (24) and the second bearing (34) along the axial direction of the first transmission shaft (10), and the first retaining ring (26) is sleeved on the outer side of the shaft head (13) of the first transmission shaft (10) along the radial direction of the shaft head (13) of the transmission shaft (10). The first retaining ring (26) is used to limit the first bearing (24) and the second bearing (34) along the axial direction of the first transmission shaft (10).

2. The bonding head driving structure unit for a turret-type die bonding device according to claim 1, characterized in that: The second transmission shaft (40) comprises a base portion (41) and a sleeve portion (42) fixedly connected to each other, the inner diameter of the base portion (41) is equal to the inner diameter of the sleeve portion (42), and the outer diameter of the base portion (41) is larger than the outer diameter of the sleeve portion (42), so that a shoulder portion (43) is formed on the outer wall of the second transmission shaft (40) and at the connection between the base portion (41) and the sleeve portion (42); Along the radial direction of the sleeve connection portion (42) of the second transmission shaft (40), both the third sleeve body portion (51) and the fourth sleeve body portion (61) are sleeved on the outside of the sleeve connection portion (42) of the second transmission shaft (40); and along the axial direction of the second transmission shaft (40), the third sleeve body portion (51) is located at an end of the sleeve connection portion (42) away from the shoulder portion (43), and the fourth sleeve body portion (61) is located at an end of the sleeve connection portion (42) close to the sleeve connection portion (42); The sleeve portion (42) of the second transmission shaft (40) is close to the circular disc portion (12) of the first transmission shaft (10) with a slit provided therebetween, and the base portion (41) of the second transmission shaft (40) is away from the circular disc portion (12) of the first transmission shaft (10); The Bang head drive structure unit further includes a third bearing (54), a fourth bearing (64), and a second retaining ring (56); along the radial direction of the sleeve portion (42) of the second transmission shaft (40), a circular ring-shaped third bearing (54) is provided between the third sleeve body (51) and the sleeve portion (42) of the second transmission shaft (40), so that the third sleeve body (51) can rotate around the sleeve portion (42) of the second transmission shaft (40); along the radial direction of the sleeve portion (42) of the second transmission shaft (40), a circular ring-shaped fourth bearing (64) is provided between the fourth sleeve body (61) and the sleeve portion (42) of the second transmission shaft (40), so that the fourth sleeve body (61) can rotate around the sleeve portion (42) of the second transmission shaft (40); Along the axial direction of the second transmission shaft (40), a circular second retaining ring (56) is provided between the third bearing (54) and the fourth bearing (64), and along the radial direction of the sleeve connection portion (42) of the second transmission shaft (40), the second retaining ring (56) is sleeved on the outer side of the sleeve connection portion (42) of the second transmission shaft (40). The second retaining ring (56) is used to limit the third bearing (54) and the fourth bearing (64) along the axial direction of the second transmission shaft (40); the shoulder portion (43) of the second transmission shaft (40) limits the fourth bearing (64).

3. The bonding head driving structure unit for a turret-type die bonding device according to claim 1 or 2, characterized in that: The first sleeve assembly (20) further includes a first protrusion (22); the second sleeve assembly (30) further includes a second protrusion (32); the third sleeve assembly (50) further includes a third protrusion (52); the fourth sleeve assembly (60) further includes a fourth protrusion (62); the bungee drive structure unit further includes a connecting rod fixedly connected to the protrusion; At least one first protrusion (21) extending outward relative to the first sleeve body (21) is fixedly provided on the outer peripheral side surface of the first sleeve body (21), each first protrusion (21) is fixedly connected to one end of a first connecting rod (22), and the end of each first connecting rod (22) is used for fixedly connecting a bonding head of the turret-type crystal bonding device; At least one second protrusion (31) extending outward relative to the second sleeve body (31) is fixedly provided on the outer peripheral side surface of the second sleeve body (31), each second protrusion (31) is fixedly connected to one end of a second connecting rod (32), and the end of each second connecting rod (32) is used for fixedly connecting a bonding head of the turret-type crystal bonding device; At least one third protrusion (52) extending outward relative to the third sleeve body (51) is fixedly provided on the outer peripheral side surface of the third sleeve body (51), each third protrusion (52) is fixedly connected to one end of a third connecting rod (53), and the end of each third connecting rod (53) is used for fixedly connecting to a bonding head of the turret-type crystal bonding device; At least one fourth protrusion (61) extending outward relative to the fourth sleeve body (61) is fixedly provided on the outer peripheral side surface of the fourth sleeve body (61), and each fourth protrusion (61) is fixedly connected to one end of a fourth connecting rod (62), and the end of each fourth connecting rod (62) is used to be fixedly connected to a bonding head of the turret-type crystal fixing device.

4. The bonding head driving structure unit for a turret die bonding device according to claim 3, characterized in that: The outer peripheral side surface of the first sleeve body (21) is fixedly provided with two first protrusions (22) extending outward relative to the first sleeve body (21), and the two first protrusions (22) are symmetrically arranged, each first protrusion (22) is fixedly connected to one end of a first connecting rod (23), and the two first connecting rods (23) are located on the same straight line passing through the center point of the first sleeve body (21); the outer peripheral side surface of the second sleeve body (31) is fixedly provided with two second protrusions (32) extending outward relative to the second sleeve body (31), and the two second protrusions (32) are symmetrically arranged, each second protrusion (32) is fixedly connected to one end of a second connecting rod (33), and the two second connecting rods (33) are located on the same straight line passing through the center point of the second sleeve body (31).

5. The bonding head driving mechanism for a turret die bonder according to claim 3, wherein: Two third protrusions (52) extending outward relative to the third sleeve body (51) are fixedly provided on the outer peripheral side surface of the third sleeve body (51), and the two third protrusions (52) are symmetrically arranged, each third protrusion (52) is fixedly connected to one end of a third connecting rod (53), and the two third connecting rods (53) are located on the same straight line passing through the center point of the third sleeve body (51); Two fourth protrusions (62) extending outward relative to the fourth sleeve body (61) are fixedly provided on the outer peripheral side surface of the fourth sleeve body (61), and the two fourth protrusions (62) are symmetrically arranged. Each fourth protrusion (62) is fixedly connected to one end of a fourth connecting rod (63), and the two fourth connecting rods (63) are located on the same straight line passing through the center point of the fourth sleeve body (61).

6. The bonding head driving mechanism for a turret die bonder according to claim 4, characterized in that: Two third protrusions (52) extending outward relative to the third sleeve body (51) are fixedly provided on the outer peripheral side surface of the third sleeve body (51), and the two third protrusions (52) are symmetrically arranged, each third protrusion (52) is fixedly connected to one end of a third connecting rod (53), and the two third connecting rods (53) are located on the same straight line passing through the center point of the third sleeve body (51); Two fourth protrusions (62) extending outward relative to the fourth sleeve body (61) are fixedly provided on the outer peripheral side surface of the fourth sleeve body (61), and the two fourth protrusions (62) are symmetrically arranged. Each fourth protrusion (62) is fixedly connected to one end of a fourth connecting rod (63), and the two fourth connecting rods (63) are located on the same straight line passing through the center point of the fourth sleeve body (61).

7. The bonding head driving mechanism for a turret die bonder according to claim 3, wherein: The first protrusion (22) is L-shaped, and includes a first bottom arm (21a) and a first extension arm (21b). The first bottom arm (21a) and the first extension arm (21b) are fixedly connected and perpendicular to each other. The first bottom arm (21a) of the first protrusion (22) is fixedly connected to the outer peripheral side surface of the first sleeve body (21), and the first bottom arm (21a) of the first protrusion (22) extends outward relative to the first sleeve body (21) along the radial direction of the first sleeve body (21), and the first extension arm (21b) of the first protrusion (22) extends along the axial direction of the first transmission shaft (10). The second protrusion (32) is in a straight plate shape, and the second protrusion (32) extends outward relative to the second sleeve body (31) along the radial direction of the second sleeve body (31); The third protrusion (52) is in a straight plate shape, and the third protrusion (52) extends outward relative to the third sleeve body (51) along the radial direction of the third sleeve body (51); The fourth protrusion (62) is L-shaped. The fourth protrusion (62) includes a second bottom arm (61a) and a second extension arm (61b). The second bottom arm (61a) and the second extension arm (61b) are fixedly connected and perpendicular to each other. The second bottom arm (61a) of the fourth protrusion (62) is fixedly connected to the outer peripheral side of the fourth sleeve body (61). The second bottom arm (21a) of the fourth protrusion (62) extends outward relative to the fourth sleeve body (61) along the radial direction of the fourth sleeve body (61). The second extension arm (21b) of the fourth protrusion (62) extends along the axial direction of the second transmission shaft (40).

8. The bonding head driving mechanism for a turret die bonder according to claim 6, wherein: The first protrusion (22) is L-shaped, and includes a first bottom arm (21a) and a first extension arm (21b). The first bottom arm (21a) and the first extension arm (21b) are fixedly connected and perpendicular to each other. The first bottom arm (21a) of the first protrusion (22) is fixedly connected to the outer peripheral side surface of the first sleeve body (21), and the first bottom arm (21a) of the first protrusion (22) extends outward relative to the first sleeve body (21) along the radial direction of the first sleeve body (21), and the first extension arm (21b) of the first protrusion (22) extends along the axial direction of the first transmission shaft (10). The second protrusion (32) is in a straight plate shape, and the second protrusion (32) extends outward relative to the second sleeve body (31) along the radial direction of the second sleeve body (31); The third protrusion (52) is in a straight plate shape, and the third protrusion (52) extends outward relative to the third sleeve body (51) along the radial direction of the third sleeve body (51); The fourth protrusion (62) is L-shaped. The fourth protrusion (62) includes a second bottom arm (61a) and a second extension arm (61b). The second bottom arm (61a) and the second extension arm (61b) are fixedly connected and perpendicular to each other. The second bottom arm (61a) of the fourth protrusion (62) is fixedly connected to the outer peripheral side surface of the fourth shaft sleeve body (61). The second bottom arm (61a) of the fourth protrusion (62) extends outward relative to the fourth shaft sleeve body (61) along the radial direction of the fourth shaft sleeve body (61). The second extension arm (61b) of the fourth protrusion (62) extends along the axial direction of the second transmission shaft (40).

9. The bonding head driving mechanism for a turret die bonder according to claim 7, wherein: Along the axial direction of the first transmission shaft (10), the first extension arm (21b) of the first protrusion (22) of the first sleeve body (21) extends in a direction close to the second sleeve body (31), so that all the first connecting rods (23) and all the second connecting rods (33) are located in the same plane.

10. The bonding head driving mechanism for a turret die bonder according to claim 7, wherein: Along the axial direction of the second transmission shaft (40), the second extension arm (61b) of the fourth protrusion (62) of the fourth sleeve body (61) extends in a direction close to the third sleeve body (51), so that all the third connecting rods (53) and all the fourth connecting rods (63) are located in the same plane.

11. The bonding head driving mechanism for a turret die bonder according to claim 8, wherein: Along the axial direction of the first transmission shaft (10), the first extension arm (21b) of the first protrusion (22) of the first sleeve assembly (20) extends in a direction close to the second sleeve body (31), and the fixed connection between the second protrusion (32) of the second sleeve assembly (20) and the second connecting rod (33) is located on a side of the second protrusion (32) away from the first sleeve body (21); along the axial direction of the second transmission shaft (40), the fourth protrusion of the fourth sleeve assembly (60) is The second extension arm (61b) of (62) extends in a direction close to the third sleeve body (51), and the fixed connection between the third protrusion (52) of the third sleeve assembly (50) and the third connecting rod (53) is located on the side of the second protrusion (51) away from the fourth sleeve body (61); through the above arrangement, the two first connecting rods (23), the two second connecting rods (33), the two third connecting rods (53) and the two fourth connecting rods (63) are located in the same plane.

12. The bonding head driving mechanism for a turret die bonder according to claim 11, wherein: The straight line where the two first connecting rods (23) are located and the straight line where the two second connecting rods (33) are located are perpendicular to each other.

13. The bonding head driving mechanism for a turret die bonder according to claim 11, wherein: The straight line on which the two third connecting rods (53) are located and the straight line on which the two fourth connecting rods (63) are located are perpendicular to each other.

14. The bonding head driving mechanism for a turret die bonder according to claim 11, wherein: The straight line on which the two first connecting rods (23) are located is perpendicular to the straight line on which the two second connecting rods (33) are located; the straight line on which the two third connecting rods (53) are located is perpendicular to the straight line on which the two fourth connecting rods (63) are located; the two first connecting rods (23), the two second connecting rods (33), the two third connecting rods (53) and the two fourth connecting rods (63) are evenly distributed in a radial shape, and the angle between any two adjacent connecting rods is 45°.

15. The bonding head driving mechanism for a turret die bonder according to claim 1, wherein: The diameter of the circular disc portion (12) is greater than the diameter of the shaft head portion (13), so that a circular flange portion (14) is formed at the connection between the circular disc portion (12) and the shaft head portion (13); along the axial direction of the first transmission shaft (10), the flange portion (14) of the first transmission shaft (10) has a limiting effect on the second bearing (34).

16. The bonding head driving mechanism for a turret die bonder according to claim 1 or 2, characterized in that: The first sleeve assembly (20) further includes a first cover edge portion (25); the second sleeve assembly (30) further includes a second cover edge portion (35); a first cover edge portion (25) is fixedly provided on one end surface of the first sleeve body portion (21), and the first cover edge portion (25) extends inwardly along the radial direction of the first sleeve body portion (21) and is in the shape of a circular ring; a second cover edge portion (35) is fixedly provided on one end surface of the second sleeve body portion (31), and the second cover edge portion (35) extends inwardly along the radial direction of the second sleeve body portion (31). The first cover edge portion (25) is located at one end of the circular disc portion (12) of the first sleeve body portion (21) away from the first transmission shaft (10) along the axial direction of the first transmission shaft (10), and the second cover edge portion (35) is located at one end of the circular disc portion (12) of the second sleeve body portion (31) away from the first transmission shaft (10); along the axial direction of the first transmission shaft (10), the first cover edge portion (25) has a limiting effect on the first bearing (24), and the second cover edge portion (35) has a limiting effect on the second bearing (34).

17. The bonding head driving mechanism for a turret die bonder according to claim 2, wherein: The third sleeve assembly (50) further includes a third cover edge (55); the fourth sleeve assembly (60) further includes a fourth cover edge (64); a third cover edge (55) is fixedly provided on one end surface of the third sleeve body (51), and the third cover edge (55) extends inwardly along the radial direction of the third sleeve body (51) and is in the shape of a circular ring; a fourth cover edge (64) is fixedly provided on one end surface of the fourth sleeve body (61), and the fourth cover edge (64) extends inwardly along the radial direction of the fourth sleeve body (61). The third cover edge (55) is located at one end of the third sleeve body (51) close to the shoulder (43) of the second transmission shaft (40) along the axial direction of the second transmission shaft (40), and the fourth cover edge (64) is located at one end of the fourth sleeve body (61) close to the shoulder (43) of the second transmission shaft (40); along the axial direction of the second transmission shaft (40), the third cover edge (55) has a limiting effect on the third bearing (54), and the fourth cover edge (64) has a limiting effect on the fourth bearing (64).

18. The bonding head driving mechanism for a turret die bonder according to claim 1 or 2, characterized in that: The bang head driving mechanism also includes a first connecting member (70), a second connecting member, a first voice coil motor, and a second voice coil motor; the first transmission shaft (10) is fixedly connected to the first voice coil motor by means of the first connecting member (70); and the second transmission shaft (40) is fixedly connected to the second voice coil motor by means of the second connecting member.

Citation Information

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