Electrically conductive pin

Abstract

The present invention relates to an electrically conductive pin provided in an inspection apparatus for inspecting electrical characteristics of an object to be inspected, the electrically conductive pin comprising: a plunger which comes into contact with the object to be inspected; a body having a hollow providing a moving space of the plunger and a small hollow connecting the hollow to the outside in a longitudinal direction; and an elastic unit providing an elastic force to the plunger and the body.

Description

electrically conductive pins

[0001] The present invention relates to an electrically conductive pin, and more particularly, to an electrically conductive pin with improved durability.

[0002] Electrically conductive pins are pins that can be used in testing devices, such as probe cards or test sockets, that come into contact with the test object and test it. Here, the electrically conductive pins serve to transmit electrical signals between the test object and the testing device.

[0003] Testing of semiconductor devices is performed by providing electrical signals by contacting a test socket or probe card having a number of electrically conductive pins on a semiconductor package or semiconductor wafer or other inspection object.

[0004] In this regard, prior art document No. 10-2202826 discloses a "plunger and a probe pin using the same." The prior art document describes a probe pin comprising four parts: two plungers, a barrel, and an elastic member. The two plungers move up and down within the barrel via the elastic member, thereby examining the electrical characteristics of the test object.

[0005] However, the probe pin assembly process was complex due to the large number of parts involved, which increased process time and manufacturing costs. To overcome this problem, attempts were made to reduce the number of parts, as shown in Fig. 1.

[0006] The conductive pin of Fig. 1 is composed of a plunger (100'), an elastic member, and a body (200') having an opening (H). Even in this case, there still exists a problem of foreign substances entering the interior of the conductive pin due to the opening being relatively large and located on the side wall.

[0007] To improve the above-mentioned problems, attempts are being made to reduce the number of parts while improving durability by easily responding to foreign substances.

[0008] [Prior Art Literature]

[0009] [Patent Document]

[0010] (Patent Document 1) Patent Publication No. 10-2202826

[0011] In order to solve the above-described problems, the present invention aims to provide an electrically conductive pin having improved durability while reducing the number of component parts.

[0012] In order to achieve the above-described purpose, an electrically conductive pin according to an embodiment of the present invention may include a plunger that contacts the object to be inspected, a body having a hollow portion that provides a movement space for the plunger and a small hollow portion that longitudinally connects the hollow portion with the outside, and an elastic portion that provides elasticity to the plunger and the body.

[0013] Additionally, in an embodiment of the present invention, the small hollow portion may be located at an end of the body.

[0014] Additionally, in an embodiment of the present invention, the cross-sectional area of ​​the small hollow portion can be maintained the same as it goes toward the end.

[0015] Additionally, in an embodiment of the present invention, the elastic member is not fixed to the plunger and the body, and can be prevented from being separated from the plunger and the body.

[0016] Additionally, in an embodiment of the present invention, the elastic member may be capable of contacting the plunger and the body in the longitudinal direction in a compressed state.

[0017] In addition, in an embodiment of the present invention, the plunger may include a first-first support portion capable of supporting the elastic part in a longitudinal direction and a first-second support portion capable of supporting the elastic part in a radial direction, and the body may include a second-first support portion capable of supporting the elastic part in a longitudinal direction and a second-second support portion capable of supporting the elastic part in a radial direction, and the elastic part may have an inner diameter larger than that of the first-second support portion and the second-second support portion.

[0018] In addition, in an embodiment of the present invention, the plunger may include a moving part that moves along the hollow and a terminal part that extends from the moving part and has a larger outer diameter than the moving part, and the body may include a separation prevention part that contacts the terminal part to prevent separation of the plunger.

[0019] The present invention has the effect of reducing the number of components of an electrically conductive pin, making it easy to manufacture, and improving durability, thereby increasing the lifespan.

[0020] Figure 1 is a drawing showing a conventional conducting pin.

[0021] Fig. 2 is a drawing showing an electrically conductive pin according to an embodiment of the present invention.

[0022] Fig. 3 is a drawing showing a cross-section of the electrical conductive pin according to Fig. 2 taken along line AA'.

[0023] FIG. 4 is a drawing showing the positional relationship between an elastic part and a plunger in an embodiment of the present invention.

[0024] FIG. 5 is a drawing showing the positional relationship between an elastic part and a body in an embodiment of the present invention.

[0025] FIG. 6 is a drawing showing an opening and a small hollow portion of a body in an embodiment of the present invention.

[0026] Fig. 7 is a drawing showing an electrically conductive pin in an overdrive state in an embodiment of the present invention.

[0027] FIG. 8 is a flowchart showing a method for manufacturing an electrically conductive pin according to an embodiment of the present invention.

[0028] Figures 9a and 9b are drawings showing a preparation step according to an embodiment of the present invention.

[0029] Fig. 10 is a drawing showing a deformed portion after a deformation step in an embodiment of the present invention.

[0030] FIGS. 11A to 11C are drawings showing cross-sections of a body after body formation in an embodiment of the present invention.

[0031] Those skilled in the art will be able to develop various devices that embody the principles of the invention and fall within the scope and spirit of the invention, even if not explicitly described or illustrated in this specification. Furthermore, all conditional terms and embodiments listed herein are expressly intended, in principle, to facilitate understanding of the invention's concept and should be understood as being in no way limiting to the specifically listed embodiments and conditions.

[0032] The above-described objects, features and advantages will become more apparent through the following detailed description of the invention in conjunction with the accompanying drawings, so that those skilled in the art will be able to easily implement the technical idea of ​​the invention.

[0033] The embodiments described herein will be described with reference to cross-sectional and / or perspective views, which are ideal illustrations of the present invention. The dimensions of components depicted in these drawings may be exaggerated for the purpose of effectively explaining the technical content. The form of the illustrations may be altered due to manufacturing techniques and / or tolerances.

[0034] When describing various embodiments, components that perform the same function will be given the same names and reference numbers for convenience even if the embodiments are different. In addition, the expression "at least one of A, B, and C" means that it is composed of one, two, or three of A, B, and C. In addition, the cross-section and cross-sectional area may mean the cross-section and the area thereof perpendicular to the longitudinal direction unless otherwise specified. In addition, the longitudinal direction may mean the tensile and compressive directions of the elastic part. Furthermore, the configuration and operation already described in other embodiments will be omitted for convenience.

[0035] Below, an electrically conductive pin (10) according to an embodiment of the present invention will be described.

[0036] Fig. 1 is a drawing showing a conventional conductive pin. Fig. 2 is a drawing showing an electrically conductive pin (10) according to an embodiment of the present invention. Fig. 3 is a drawing showing a cross-section of the electrically conductive pin taken along line AA' of Fig. 2. Fig. 4 is a drawing showing the positional relationship between an elastic part (300) and a plunger (100) according to an embodiment of the present invention. Fig. 5 is a drawing showing the positional relationship between an elastic part (300) and a body (200) according to an embodiment of the present invention. Fig. 6 is a drawing showing an opening (280) and a small hollow (270) of a body (200) according to an embodiment of the present invention. Fig. 7 is a drawing showing an electrically conductive pin (10) in an overdrive state according to an embodiment of the present invention.

[0037] Referring to FIGS. 2 and 3, an electrically conductive pin (10) according to an embodiment of the present invention may include a plunger (100) that contacts an inspection object; a body (200) having a hollow portion (250) that provides a movement space for the plunger (100) and a small hollow portion (270) that longitudinally connects the hollow portion (250) to the outside; and an elastic portion (300) that provides elasticity to the plunger (100) and the body (200).

[0038] The plunger (100) refers to an area that can come into contact with a test object (not shown). The plunger (100) may include at least one of a first contact portion (110) that comes into contact with the test object, a first-first support portion (120) extending from the first contact portion (110), a first-second support portion (130) extending from the first-first support portion (120), a moving portion (140) extending from the first-second support portion (130), and a terminal portion (150) extending from the moving portion (140).

[0039] The first contact portion (110) can directly contact the inspection object by including a first contact tip (111) at the end. The first contact tip (111) can be formed so that its cross-sectional area (or outer diameter) gradually decreases toward the end, thereby enabling direct contact with the electrode or solder of the inspection object.

[0040] Referring to FIG. 4, the first-first support portion (120) may be a step formed to protrude in the radial direction of the plunger (100). The first-first support portion (120) may be formed along the circumference of the plunger (100). The first-first support portion (120) may fix the plunger (100) to the inspection device. The first-first support portion (120) may support the elastic portion (300) in the longitudinal direction. The outer diameter of the first-first support portion (120) may be the largest among the components of the plunger (100).

[0041] The first-second support portion (130) may have an outer diameter smaller than that of the first-first support portion (120). The first-second support portion (130) may support the elastic portion (300) in the radial direction. The outer diameter of the first-second support portion (130) may be formed smaller than the inner diameter of the elastic portion (300), so that a gap space (SP) may be formed between the outer diameter of the first-second support portion (130) and the inner diameter of the elastic portion (300). The first-second support portion (130) may enable a small amount of movement of the elastic portion (300) in the radial direction. The first-second support portion (130) may be provided to be located at the center (or inner diameter) of the elastic portion (300).

[0042] Since the electrically conductive pin (10) according to the embodiment of the present invention does not have the first-second support portion (130) in contact with and fixed to the elastic portion (300), the process of fixing the elastic portion (300) in contact with and fixed to the first-second support portion (130) is omitted, so that the manufacturing time can be shortened.

[0043] The electrically conductive pin (10) according to the embodiment of the present invention can have improved durability by reducing friction between the elastic portion (300) and the first and second support portions (130).

[0044] The moving part (140) can move along the hollow (250) at least partially. In the overdrive state, as the elastic part (300) is compressed, the moving part (140) can move along the hollow (250) toward the body (200) or the second contact tip (211), and in the release state, as the elastic part (300) is restored, the moving part (140) can move along the hollow (250) toward the opposite direction of the body (200) or the second contact tip (211).

[0045] Here, the overdrive state means a state in which the elastic part (300) is compressed or compressed by receiving force in the longitudinal direction after the electric conductive pin (10) comes into contact with the test object, and the release state may mean a state in which the elastic part (300) is stretched or stretched.

[0046] The moving part (140) may have a smaller cross-sectional area than the first-first support part (120) and the first-second support part (130). The outer diameter of the moving part (140) may be formed to be smaller than the inner diameter of the elastic part (300), so that a space may be formed between the outer diameter of the moving part (140) and the inner diameter of the elastic part (300). The moving part (140) may be provided to be positioned at the center (or inner diameter) of the elastic part (300). Accordingly, the elastic part (300) may be provided in a form that surrounds the moving part (140) and the first-second support part (130).

[0047] The moving part (140) may include an internal moving part (141) located only in the hollow (250) and an external moving part (142) partially located in the hollow (250). The internal moving part (141) may be spaced apart from the side wall of the body (200) forming the hollow (250). The external moving part (142) may be provided so as to be in contact with the side wall of the body (200) forming the hollow (250). The internal moving part (141) may have a smaller outer diameter than the external moving part (142).

[0048] The distal end (150) can move along the hollow (250). In the overdrive state, the distal end (150) can move along the hollow (250) toward the small hollow (270) or the second contact tip (211) simultaneously with the compression of the elastic part (300), and in the release state, the distal end (150) can move along the hollow (250) toward the opposite direction of the small hollow (270) or the second contact tip (211) simultaneously with the restoration of the elastic part (300).

[0049] The distal end (150) may include a first inclined portion (151) whose cross-sectional area gradually decreases toward one end, a second inclined portion (152) whose cross-sectional area gradually decreases toward the other end, and a holding portion (153) whose cross-sectional area remains the same between the first inclined portion (151) and the second inclined portion (152). The distal end (150) may be connected to the moving portion (140) through the second inclined portion (152).

[0050] The retaining portion (153) (or the distal portion (150)) may have a larger outer diameter than the inner moving portion (141). The retaining portion (153) (or the distal portion (150)) may have the same outer diameter as the outer moving portion (142). The retaining portion (153) (or the distal portion (150)) may be provided so as to be in contact with the side wall of the body (200) forming the hollow (250).

[0051] In the hollow space (250) narrowed by the anti-separation portion (240) described later, the inner diameter of the body (200) may be smaller than the outer diameter of the retaining portion (153) and larger than the outer diameter of the internal moving portion (141).

[0052] The body (200) refers to an area that can be contacted by an inspection device (or an electrode of the inspection device). The body (200) has an opening (280) at one end through which a plunger (100) can enter; a second-second support portion (230) having the opening (280) and extending from the opening (280); a second-first support portion (220) extending from the second-second support portion (230); a second contact portion (210) extending from the second-first support portion (220); It may include at least one of a hollow (250) extending from the opening (280) to at least a part of the second contact portion (210), an inclined hollow (260) extending from the hollow (250) and having a gradually decreasing cross-sectional area, a small hollow (270) that connects the inclined hollow (260) or the hollow (250) to the outside of the body (200), and a separation prevention portion (240) that narrows the hollow (250) between one end and the other end of the second contact portion (210).

[0053] An opening (280) may be formed at one end of the body (200). The opening (280) may refer to an area where the plunger (100) enters the interior (or hollow (250)) of the body (200).

[0054] Referring to FIG. 5, the second-second support portion (230) may have a smaller outer diameter than the second-first support portion (220). The second-second support portion (230) may support the elastic portion (300) in the radial direction. The outer diameter of the second-second support portion (230) may be formed to be smaller than the inner diameter of the elastic portion (300), so that a gap space (SP) may be formed between the outer diameter of the second-second support portion (230) and the inner diameter of the elastic portion (300). The second-second support portion (230) may enable a small amount of movement of the elastic portion (300) in the radial direction. The second-second support portion (230) may be provided to be located at the center (or inner diameter) of the elastic portion (300).

[0055] The second-first support portion (220) may be a step formed to protrude in the radial direction of the body (200). The second-first support portion (220) may be formed along the perimeter of the body (200). The second-first support portion (220) may fix the body (200) to the inspection device. The second-first support portion (220) may support the elastic portion (300) in the longitudinal direction. The outer diameter of the second-first support portion (220) may be the largest among other components of the body (200).

[0056] Since the electrically conductive pin (10) according to the embodiment of the present invention does not have the 2-2 support portion (230) in contact with and fixed to the elastic portion (300), the process of fixing the elastic portion (300) to and fixing to the 2-2 support portion (230) is omitted, so that the manufacturing time can be shortened.

[0057] The electrically conductive pin (10) according to the embodiment of the present invention can have improved durability by reducing friction between the elastic portion (300) and the second-second support portion (230).

[0058] Referring to Fig. 6, the second contact portion (210) may form at least a portion of the hollow portion (250). The second contact portion (210) may be divided into one side and the other side based on the separation prevention portion (240). One side of the second contact portion (210) may provide a space through which the distal portion (150) and the internal moving portion (141) move through the hollow portion (250). The other side of the second contact portion (210) may provide a space through which the internal moving portion (141) and the external moving portion (142) move through the hollow portion (250).

[0059] The second contact portion (210) can directly contact the inspection object by including a second contact tip (211) at the end. The second contact tip (211) can be formed so that its cross-sectional area (or outer diameter) gradually decreases toward the end, so that it can directly contact the electrode of the inspection device.

[0060] The hollow (250) can provide a space for a portion of the plunger (100) to move. The hollow (250) can be provided from the opening (280) to at least a portion of the second contact portion (210). The hollow (250) can be formed so that the size and shape of the cross-sectional area are the same along the length direction, except for the separation prevention portion (240).

[0061] The inclined hollow (260) may extend from the hollow (250). The inclined hollow (260) may be formed so that the size of the cross-sectional area gradually decreases toward the end along the length direction.

[0062] The small hollow (270) may extend from the inclined hollow (260). The small hollow (270) may be formed so that the size and shape of the cross-sectional area are the same along the longitudinal direction. The small hollow (270) may be formed so that the size or shape of the cross-sectional area is not the same or irregular along the longitudinal direction. The small hollow (270) may be formed to extend in the longitudinal direction. The small hollow (270) may connect the hollow (250) (or the inclined hollow (260)) with the outside of the body (200). The small hollow (270) may be formed in the second contact tip (211).

[0063] The body (200) may include a plating layer (not shown) on the surface to improve electrical conductivity. The plating material (or plating solution) may be introduced into the interior of the body (200) through the opening (280) or the small hollow (270) of the body (200). The small hollow (270) allows air existing inside the body (200) to escape, thereby allowing the plating material to easily enter through the opening (280) (see FIG. 6). Contrary to FIG. 6, the opening (280) allows air existing inside the body (200) to escape, thereby allowing the plating material to easily enter through the small hollow (270).

[0064] The opening (280) and the small hollow (270) are located at one end and the other end of the body (200), respectively, and can perform complementary roles by allowing air to escape from either the opening (280) or the small hollow (270) when plating material is introduced through either one of them.

[0065] Referring to Fig. 7, in the case where a conductive pin (10') according to a comparative example has an opening (H) formed in the body (200') on the movement path of the plunger (100'), foreign substances (P) may enter through the opening (H), thereby reducing the movement force of the plunger (100').

[0066] In contrast, the electrically conductive pin (10) according to the embodiment of the present invention is positioned at the end of the body (200) where the small hollow (270) does not overlap with the longitudinal movement path of the plunger (100), so that the movement force of the plunger (100) can be maintained even if foreign substances enter the hollow (250) through the small hollow (270).

[0067] The electrically conductive pin (10) according to the embodiment of the present invention is provided with an opening (280) and a small hollow (270) at one end and the other end of the body (200), respectively, so that the plating material can easily contact the surface of the body (200), and at the same time, the movement force of the plunger (100) can be maintained even if foreign substances are introduced.

[0068] Referring back to FIG. 3, the anti-separation portion (240) can limit the movement of the plunger (100). The anti-separation portion (240) can be formed by cocking the outer surface of the body (200) and being recessed in the direction of the central axis. The anti-separation portion (240) can be located between one end and the other end of the second contact portion (210). The anti-separation portion (240) can be provided as a single portion continuously along the periphery of the second contact portion (210), but can be provided as a plurality of portions spaced apart from each other intermittently along the periphery of the second contact portion (210).

[0069] The separation prevention unit (240) can prevent the plunger (100) from being separated from the body (200). The separation prevention unit (240) can contact the distal end (150) to limit the movement of the distal end (150). Specifically, the separation prevention unit (240) can contact the inclined surface of the second inclined end (152) to limit the movement of the distal end (150). The separation prevention unit (240) can be separated from the distal end (150) in the overdrive state, and can contact the distal end (150) in the released state.

[0070] The electrically conductive pin (10) according to an embodiment of the present invention can prevent the plunger (100) passing through the center of the elastic part (300) from being separated from the body (200) by the separation prevention part (240), and can prevent the elastic part (300) from being separated from the body (200) and the plunger (100).

[0071] The elastic member (300) may be a coil spring. One end of the elastic member (300) may be supported by the first-first support member (120), and the other end may be supported by the second-first support member (220). The elastic member (300) may provide elastic force to the first-first support member (120) and the second-first support member (220) in an overdrive state. The elastic member (300) may be in contact or non-contact with the first-first support member (120) and / or the second-first support member (220) in a released state.

[0072] The inner diameter of the elastic member (300) may be larger than the outer diameters of the first-second support member (130) and the second-second support member (230). A separation space (SP) may be formed between the elastic member (300) and the first-second support member (130) (see FIG. 4). A separation space (SP) may be formed between the elastic member (300) and the second-second support member (230) (see FIG. 5).

[0073] Accordingly, the elastic member (300) may at least partially contact the first-second support member (130) and / or the second-second support member (230), but may not be fixedly in contact with the first-second support member (130) and the second-second support member (230). That is, in the overdrive state and the release state, the elastic member (300) may have a partial area in contact with at least one of the first-second support member (130) and the second-second support member (230), but at the same time, the remaining area except for a portion may not be in contact with the first-second support member (130) and the second-second support member (230).

[0074] Since the plunger (100) is prevented from being separated from the body (200), the elastic member (300) that passes the plunger (100) through the center can be prevented from being separated from the plunger (100) and the body (200). Furthermore, since the elastic member (300) is not fixed in contact with the first-second support member (130) and the second-second support member (230), a separate fixing process is not required, thereby shortening the manufacturing time.

[0075] Next, a method for manufacturing an electrically conductive pin (10) according to an embodiment of the present invention will be examined.

[0076] Fig. 8 is a flowchart illustrating a method for manufacturing an electrically conductive pin (10) according to an embodiment of the present invention. Figs. 9a and 9b are drawings illustrating a preparation step (S100) according to an embodiment of the present invention. Fig. 10 is a drawing illustrating a deformation part (402) after a deformation step (S200) according to an embodiment of the present invention. Figs. 11a to 11c are drawings illustrating a cross-section of a body (200) after the body (200) is formed according to an embodiment of the present invention.

[0077] Referring to FIGS. 2 and 8 to 10, a method for manufacturing an electrically conductive pin (10) according to an embodiment of the present invention may include a preparation step (S100) of preparing a tubular member (401) in which a hollow (250) through which a plunger (100) moves is formed; a deformation step (S200) of forming a deformation portion (402) by narrowing the hollow (250) corresponding to one end region of the tubular member (401); and a second contact tip forming step (S300) of forming a second contact tip (211) that contacts an electrode by processing the deformation portion (402); and may further include a body forming step (S400) of forming an outer shape of a body (200) by processing the tubular member (401).

[0078] First, a preparation step (S100) can be performed.

[0079] Referring to FIGS. 9A and 9B, the tubular member (401) may have a hollow space (250) formed longitudinally therein. The hollow space (250) is not limited to being formed throughout the entire tubular member (401) along the longitudinal direction, and may be formed from one end to a certain depth along the longitudinal direction of the tubular member (401). The tubular member (401) may have a hollow space (250) formed through drilling (D) while the cylindrical member is being gripped by the gripping portion (30).

[0080] Next, a transformation step (S200) can be performed.

[0081] Referring to FIG. 10, a deformation portion (402) may be formed in one end region of a tubular member (401). The deformation portion (402) may be a region where a portion of the tubular member (401) is plastically deformed by being bent into a shape in which the hollow (250) becomes narrower. The deformation portion (402) may be deformed into a shape in which one end region of the tubular member (401) is bent in the direction of the central axis (or cylindrical axis) so that the annular ends (annular cross sections) of the tubular member (401) face each other. The annular ends may contact each other to close the hollow (250) (see FIG. 11a), or may not contact each other to partially close the hollow (250) to form the aforementioned small hollow (270).

[0082] The tubular member (401) can be deformed by being rotated by the gripper (30) while the deformation means (not shown) is in contact with the outer surface of the side wall (403) of one end region. At this time, the formation of the deformation portion (402) can be performed by the herashibori method, but is not limited thereto. After being processed, the deformation portion (402) can become the second contact tip (211).

[0083] The deformation portion (402) may include an inclined hollow portion (260). The inclined hollow portion (260) may be formed inside the body (200) (or the tubular member (401)). The inclined hollow portion (260) may refer to a section in which the hollow portion (250) is narrowed by the deformation portion (402) formed in one end region of the tubular member (401). Specifically, the inclined hollow portion (260) may be formed such that the cross-sectional area thereof gradually decreases from the cross-sectional area of ​​the hollow portion (250) of the tubular member (401). The cross-section of the hollow portion (250) refers to a virtual cross-section formed by the hollow portion (250) when the tubular member (401) (or the second contact portion (210)) is cut perpendicular to the longitudinal direction.

[0084] The deformation portion (402) may include a small hollow portion (270). The small hollow portion (270) may refer to a section extending from the inclined hollow portion (260) by the deformation portion (402) formed in one end region of the tubular member (401). Specifically, the small hollow portion (270) may be formed to have a cross-sectional area smaller than the cross-sectional area of ​​the hollow portion (250) of the tubular member (401).

[0085] Next, a second contact tip forming step (S300) can be performed.

[0086] Referring to FIGS. 11A to 11C, the second contact tip (211) may be formed by processing a deformation portion (402). The second contact tip (211) may include an inclined section formed such that the outer diameter gradually decreases toward the end. The deformation portion (402) formed by deforming one end region of the tubular member (401) may be cut and provided on the tubular member (401) as the second contact tip (211).

[0087] The second contact tip (211) may be provided in a form in which a portion of the deformation portion (402) is cut off. The second contact tip (211) may be formed by cutting the outer surface of the deformation portion (402) in an inclined manner toward the central axis. The uncut inclined hollow portion (260) of the deformation portion (402) may constitute the inner surface of the inner wall of the second contact tip (211).

[0088] Next, a body forming step (S400) can be performed.

[0089] The body forming step (S400) may include a step of processing the outer surface of the side wall (403) of the tubular member (401) to reduce the thickness of the side wall (403) and a step of forming a small hollow (270) that is longitudinally connected to the hollow (250) in the deformed portion (402).

[0090] Referring to Fig. 11a, in the step of processing the outer surface of the side wall (403) of the tubular member (401) to reduce the thickness of the side wall (403), the body (200) can be processed to form an outer shape.

[0091] The tubular member (401) can be cut by being rotated by the gripper (30) while the cutting means is in contact with it. The tubular member (401) can be formed into the outer shape of the body (200) by cutting the outer surface of the side wall (403) so that the thickness of the side wall (403) is reduced. Specifically, the tubular member (401) can be formed into a second contact portion (210), a second-first support portion (220), and a second-second support portion (230) by cutting the outer surface of the side wall (403). The second contact portion (210) of the body (200) can maintain the same outer diameter except for the second contact tip (211), the separation prevention portion (240), the second-first support portion (220), and the second-second support portion (230), and can maintain the same side wall (403) thickness.

[0092] A part of the side wall (403) of the tubular member (401) may be cut to a thickness thicker than the set thickness (d2) or may be left unprocessed to become the second-first support portion (220), and the remainder of the side wall (403) may be cut to a thickness thinner than the second-first support portion (220). The detachment prevention portion (240) may be formed by cocking a part of the second contact portion (110) and recessing it in the direction of the central axis.

[0093] Referring to FIGS. 11b and 11c, in the step of forming a small hollow (270) that is longitudinally connected to the hollow (250) or the inclined hollow (260) in the deformation portion (402), the deformation portion (402) or the second contact tip (211) may be processed to form the small hollow (270).

[0094] The small hollow (270) may be formed to penetrate longitudinally from an end of the body (200). When viewed from the end of the body (200), the small hollow (270) may be formed in an 'o' shape. The small hollow (270) may be formed by cutting the deformation portion (402) in an 'o' shape by rotating the drill (D). The small hollow (270) may maintain the same cross-sectional area as it goes to the end (see FIG. 11b). Alternatively, the small hollow (270) may have a cross-sectional area that decreases as it goes to the end (see FIG. 11c).

[0095] Continuing, a step of forming a detachment prevention portion (240) may be performed to narrow the hollow (250) of a portion of the tubular member (401). The detachment prevention portion (240) may be formed in a state where the plunger (100) is positioned in the hollow (250) of the body (200) and the plunger (100) passes through the center of the elastic portion (300).

[0096] Accordingly, the plunger (100) can be prevented from being separated from the body (200) by having the distal end (150) contact the separation prevention part (240), and the elastic part (300) can also be prevented from being separated from the plunger (100) and the body (200).

[0097] The second contact tip forming step (S300) and the body forming step (S400) can be performed sequentially. That is, since both the forming of the second contact tip (211) by machining the deformable portion (402) and the forming of the outer shape of the body (200) by machining the tubular member (401) can be performed by a cutting process, they can be performed simultaneously or at different times by the same or different cutting means.

[0098] Meanwhile, since the deformation step (S200) and the second contact tip forming step (S300) are performed in one end region of the tubular member (401), the gripping part (30) can grip the tubular member (401) in a direction in which one end region of the tubular member (401) is exposed. The body forming step (S400) can be performed in one end region exposed by the gripping part (30).

[0099] Next, since the body forming step (S400) is also performed in the other end region of the tubular member (401), the gripping part (30) can grip the tubular member (401) in a direction in which the other end region of the tubular member (401) is exposed. The body forming step (S400) can be performed in the other end region newly exposed by the gripping part (30).

[0100] As a comparative example, when the outer shape of the body is formed first and the hollow body is formed later, scratches may occur on the outer shape of the body due to the frictional force of the gripper (30) and the drill.

[0101] In contrast, the method for manufacturing an electrically conductive pin (10) according to an embodiment of the present invention forms a second contact tip (211) in a tubular member (401) having a hollow (250) and cuts the outer surface of the side wall (403) of the tubular member (401) to ultimately form a body (200), so that the outer surface of the body (200) can be prevented from being damaged by the gripping portion (30) during the process of forming the hollow (250).

[0102] Even if a scratch already exists in the tubular member (401) or a scratch occurs during the process of forming a hollow (250) in a member (401') without a hollow (250), the scratch can be removed because the outer surface of the side wall (403) of the tubular member (401) is subsequently cut.

[0103] With continued reference to FIGS. 11A to 11C, the electrically conductive pin (10) according to an embodiment of the present invention may have a thickness (d1) of an inner wall of the second contact tip (211) greater than a thickness (d2) of a side wall (403) of the body (200) or the second contact portion (210) in at least a portion of the second contact tip (211). Here, the inner wall of the second contact tip (211) may refer to a wall between the inclined hollow (260) and the outside in the second contact tip (211), and the side wall (403) of the second contact portion (210) may refer to a wall between the hollow (250) and the outside in the second contact portion excluding the second contact tip (211).

[0104] Specifically, the second contact tip (211) may be formed such that the thickness (d1) of the inner wall gradually increases toward the end. The second contact tip (211) may include a section in which the thickness (d1) of the inner wall gradually increases toward the central axis of the body (200). Here, the thickness (d1) of the second contact tip (211) may refer to the thickness in the direction perpendicular to the inner surface forming the hollow (250) or the inclined hollow (260).

[0105] The electrically conductive pin (10) according to the embodiment of the present invention can be prevented from being deformed or damaged against a force received from an electrode of an inspection device by configuring the thickness (d1) of the second contact tip (211) to be relatively greater than the thickness (d2) of the second contact portion (21).

[0106] According to an embodiment of the present invention, the electrically conductive pin (10) can have improved plating characteristics depending on the interaction between the small hollow (260) and the opening (280), the small hollow (260) can be positioned at the end of the body (200) to improve durability against foreign substances, and the durability against contact with the electrode can be improved by making the thickness of the inner wall of the second contact tip (211) greater than the thickness of the side wall of the second contact portion (210).

[0107] As described above, the present invention has been described with reference to preferred embodiments thereof, but it will be apparent to those skilled in the art that various modifications or variations may be made to the present invention without departing from the spirit and scope of the present invention as set forth in the following claims.

[0108] [Explanation of symbols]

[0109] 10: Electrically conductive pin

[0110] 30: The phage department

[0111] 100: Plunger

[0112] 110: First contact point

[0113] 111: First contact tip

[0114] 120: 1st Support Division

[0115] 130: 1st-2nd Support Division

[0116] 140: Moving part

[0117] 141: Internal moving part

[0118] 142: External moving part

[0119] 150: Terminal part

[0120] 151: 1st Slope Division

[0121] 152: 2nd Slope Division

[0122] 153: Maintenance Department

[0123] 200: Body

[0124] 210: Second contact point

[0125] 211: Second Contact Tip

[0126] 220: 2nd-1st Support Division

[0127] 230: 2nd-2nd Support Division

[0128] 240: Anti-detachment section

[0129] 250: Hollow

[0130] 260: Slant hollow

[0131] 270: Small hollow

[0132] 280: Aperture

[0133] 300: Elasticity

[0134] 401: Tubular member

[0135] 402: Transformation section

[0136] 403: Side wall

Claims

1. In the electrically conductive pin provided in the testing device for testing the electrical characteristics of the test object, A plunger that comes into contact with the above test object; A body having a hollow portion that provides a movement space for the plunger and a small hollow portion that longitudinally connects the hollow portion to the outside; and An electrically conductive pin, comprising an elastic member that provides elasticity to the plunger and the body.

2. In paragraph 1, The above small hollow is, An electrically conductive pin located at the end of the above body.

3. In paragraph 1, The above small hollow is, An electrically conductive pin whose cross-sectional area remains the same as it moves toward the end.

4. In paragraph 1, The above elastic part, An electrically conductive pin that is not fixed to the plunger and the body and is prevented from being separated from the plunger and the body.

5. In paragraph 1, The above elastic part, An electrically conductive pin capable of longitudinally contacting the plunger and the body in a compressed state.

6. In paragraph 1, The above plunger, It includes a first-first support part capable of supporting the elastic part in the longitudinal direction and a first-second support part capable of supporting the elastic part in the radial direction, The above body, It includes a second-first support part capable of supporting the elastic part in the longitudinal direction and a second-second support part capable of supporting the elastic part in the radial direction, The above elastic part, An electrically conductive pin having an inner diameter larger than that of the first and second support portions and the second and second support portions.

7. In paragraph 1, The plunger includes a moving portion that moves along the hollow portion and a distal portion that extends from the moving portion and has an outer diameter larger than the moving portion, The body is an electrically conductive pin including a release prevention portion that contacts the terminal portion to prevent the plunger from being released.

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