Multi-contact pressure sensor, piezoelectric signal input device and flexible detection apparatus

Abstract

A multi-contact pressure sensor (1), a piezoelectric signal input device (2) and a flexible detection apparatus. The sensor (1) comprises a base (11), a force-bearing mechanism (12) and a control system, wherein the base (11) is provided with a pressure-sensitive diaphragm (111); at least one force-bearing mechanism (12) is provided, and all the ends of the force-bearing mechanism (12) abut against the pressure-sensitive diaphragm (111); the control system is in signal connection with the pressure-sensitive diaphragm (111); and after an external force is applied to the force-bearing mechanism (12), the force-bearing mechanism (12) can transmit the external acting force to the pressure-sensitive diaphragm (111), and the pressure-sensitive diaphragm (111) feeds back the transmission sequence of the acting force and the numerical value of the acting force to the control system. By means of configuring all the ends of the force-bearing mechanism (12) to abut against the pressure-sensitive diaphragm (111), when an external force is applied to the force-bearing mechanism (12), the external acting force is transmitted to the pressure-sensitive diaphragm (111) by means of the ends of the force-bearing mechanism (12), such that the pressure-sensitive diaphragm (111) feeds back the transmission sequence of the acting force and the numerical value of the acting force to the control system, thereby achieving multi-angle analysis and measurement, and improving the measurement accuracy.

Description

Multi-point contact pressure sensor, piezoelectric signal input device and flexible detection equipment Technical Field

[0001] The present invention belongs to the technical field of intelligent sensing equipment, and in particular relates to a multi-point contact pressure sensor, a piezoelectric signal input device and a flexible detection device. Background Art

[0002] A sensor is a detection device that can sense the information being measured and convert the sensed information into electrical signals or other required forms of information output according to certain rules to meet the requirements of information transmission, processing, storage, display, recording and control;

[0003] Sensors are divided into various types according to different test types, including pressure-sensitive and force-sensitive sensors, position sensors, liquid level sensors, speed sensors, thermal sensors, etc., and pressure sensors are also divided into various types according to different test pressure types.

[0004] A pressure sensor is a device or apparatus that senses pressure signals and converts them into a usable electrical output signal according to certain rules. The operating principles of pressure sensors are primarily based on the piezoelectric effect and the piezoresistive effect. There are many types of pressure sensors, such as strain gauge pressure sensors, piezoresistive pressure sensors, capacitive pressure sensors, piezoelectric pressure sensors, and vibration frequency pressure sensors.

[0005] Among them, strain gauge pressure sensors are sensors that indirectly measure pressure by measuring the strain of various elastic elements. Piezoresistive pressure sensors are sensors made using the piezoresistive effect of single-crystal silicon material and integrated circuit technology. Diffused silicon pressure sensors also operate based on the piezoresistive effect. Using this principle, the pressure of the measured medium acts directly on the sensor's diaphragm, causing the diaphragm to produce a micro-displacement proportional to the medium's pressure, which in turn changes the sensor's resistance. This change is detected by electronic circuitry and converted into a standard measurement signal corresponding to the pressure.

[0006] However, existing pressure sensors generally adopt a unidirectional contact conduction structure, and the sensor can only receive and analyze pressure in a single direction, for example, pressure measurement acting perpendicularly on a single crystal silicon wafer or diaphragm. As a result, the pressure sensors in the prior art have a single measurement angle and significant limitations in measurement functions. Summary of the Invention

[0007] In order to overcome the deficiencies of the prior art, the present invention provides a multi-point contact pressure sensor, a piezoelectric signal input device and a flexible detection device to solve the problems of the prior art pressure sensor having a single measurement angle and a large limitation in measurement function.

[0008] One embodiment of the present invention provides a multi-point contact pressure sensor, including a base, a force-receiving mechanism, and a control system; the base is provided with a piezoresistive diaphragm; the number of the force-receiving mechanisms is at least one group, and the ends of all the force-receiving mechanisms are abutted against the piezoresistive diaphragm; the control system is signal-connected to the piezoresistive diaphragm; wherein, after an external force is applied to the force-receiving mechanism, the external force can be transmitted to the piezoresistive diaphragm, and the piezoresistive diaphragm feeds back the transmission sequence and the value of the acting force to the control system.

[0009] The multi-point contact pressure sensor provided by the present invention has the following technical effects: by abutting the ends of all the force-receiving mechanisms against the sensing ends of the sensing electrical elements, when an external force is applied to the force-receiving mechanism, the external force is transmitted to the piezoresistive diaphragm through the ends of the force-receiving mechanism, so that the piezoresistive diaphragm feeds back the transmission sequence and the value of the acting force to the control system. Among them, according to the force application sequence of multiple groups of force-receiving mechanisms, the force application path when an external force is applied to the force-receiving mechanism can be accurately obtained; according to the force difference between multiple groups of force-receiving mechanisms, the pressure direction when an external force is applied to the force-receiving mechanism can be accurately obtained; according to the magnitude of the force received by the force-receiving mechanism, the pressure value received by the force-receiving mechanism when an external force is applied can be accurately obtained, thereby realizing multi-angle analysis and measurement and improving the measurement accuracy.

[0010] Optionally, the base includes a first frame and a suspended membrane, the first frame and the suspended membrane are integrally formed by MEMS etching process from a silicon wafer, the suspended membrane is formed on the end face of the first frame, the radial cross-section of the base is arranged in a U-shaped structure, and the piezoresistive diaphragm is formed on the suspended membrane by MEMS process.

[0011] The first frame and the suspended membrane are integrally formed by MEMS etching process from a silicon wafer, and the piezoresistive diaphragm is formed on the suspended membrane by MEMS process, thereby improving the overall sensitivity and production efficiency.

[0012] Optionally, the force-receiving mechanism includes a force-receiving plate and abutting platforms, the number of the abutting platforms is multiple groups, and multiple groups of the abutting platforms are distributed in a matrix on the end face of the force-receiving plate; wherein, the end of the abutting platform far from the force-receiving plate is abutted against the piezoresistive diaphragm; when an external force is applied to the force-receiving plate, the abutting platform close to its force application point can be pressed against the piezoresistive diaphragm.

[0013] By arranging a plurality of groups of the abutment platform matrices distributed on the end surface of the force-bearing plate, and the abutment platforms are arranged to abut against the pressure-sensitive membrane away from the end of the force-bearing plate, when the force-bearing plate is subjected to an external force, the abutment platforms close to its force point can be pressed against the pressure-sensitive membrane, thereby transmitting the external force to the pressure-sensitive membrane, so that the pressure-sensitive membrane can feed back the transmission order and the value of the force to the control system, thereby greatly improving the detection sensitivity of the sensor.

[0014] Optionally, the force-bearing plate and the abutment platform are integrally formed from a silicon wafer through a MEMS wet etching process, wherein the abutment platform is affected by the side etching in the MEMS wet etching process and is arranged in a frustum structure as a whole; the end of the abutment platform facing away from the force-bearing plate gradually narrows.

[0015] The force-bearing plate and the abutment platform are integrally formed from a silicon wafer through a MEMS wet etching process, wherein the abutment platform is affected by the side etching in the MEMS wet etching process and is arranged in a frustum-shaped structure as a whole; and the end of the abutment platform facing away from the force-bearing plate gradually narrows (or gradually shrinks). When the force-bearing plate is subjected to an external force, the end of the abutment platform presses on the pressure-sensitive diaphragm, thereby improving the detection sensitivity and production efficiency of the sensor.

[0016] The present invention also provides a piezoelectric signal input device, including a mounting seat, the above-mentioned multi-point contact pressure sensor and a force-bearing hemisphere, wherein a piezoelectric conversion circuit is arranged on the mounting seat; the number of the multi-point contact pressure sensors is multiple groups, and all the multi-point contact pressure sensors are evenly distributed on the mounting seat; the force-bearing hemisphere is arranged on the mounting seat and can cover all the multi-point contact pressure sensors; wherein the piezoelectric conversion circuit is electrically connected to all the multi-point contact pressure sensors; after the force-bearing hemisphere is subjected to a force, the force is transferred to the multi-point contact pressure sensor.

[0017] By setting a piezoelectric conversion circuit on the mounting base, and installing a multi-point contact sensor as described above on the mounting base, by electrically connecting the multi-point contact sensor to the piezoelectric conversion circuit, and the force-bearing hemisphere can cover all multi-point contact pressure sensors, it is possible to transmit the force to the multi-point contact pressure sensor after the force-bearing hemisphere is subjected to the force, and realize data transmission and processing through the piezoelectric conversion circuit, so as to improve the detection sensitivity and production efficiency of the sensor.

[0018] Optionally, the mounting base includes a second frame and a suspension beam, wherein the number of the suspension beams is multiple groups, and the multiple groups of suspension beams are staggered in pairs in the inner circle of the second frame, and the multiple groups of bases are respectively arranged on the suspension beams in a one-to-one correspondence, and the edge of the force-bearing hemisphere is fixedly bonded to the end face of the frame, and all the multi-point contact pressure sensors are evenly distributed at the staggered positions of all the suspension beams.

[0019] By setting up multiple groups of bases in a one-to-one correspondence at the staggered positions of the suspension beams, the edge of the force-bearing hemisphere is fixedly bonded to the end face of the second frame to ensure that the force-bearing hemisphere covers all the bases, thereby achieving the transmission of external force to the base, so that the base can feedback the transmission order and force value of the force to the control system, greatly improving the detection sensitivity of the sensor.

[0020] Optionally, the piezoelectric signal input device also includes a force-guiding unit, and the number of the force-guiding units is multiple groups, and the multiple groups of force-guiding units are respectively arranged at the staggered positions of the cantilever beams, one end of the force-guiding unit extends into the force-bearing hemisphere, and the other end of the force-guiding unit abuts against the corresponding force-bearing mechanism.

[0021] By arranging multiple groups of force-guiding units corresponding one to one at the staggered positions of the suspension beams, the edge of the force-bearing hemisphere is fixedly bonded to the end face of the second frame, and the force-guiding unit is arranged in abutment with the force-bearing mechanism to ensure that the force-bearing hemisphere covers all bases, thereby realizing the transmission of external force to the base, so that the base can feedback the transmission order and force value of the force to the control system, thereby greatly improving the detection sensitivity of the sensor.

[0022] Optionally, the force-guiding unit is arranged in a hemispherical structure, and the sum of the inner diameters of all the force-guiding units is smaller than the inner diameter of the force-bearing hemisphere.

[0023] By setting the force-guiding unit in a hemispherical structure and the sum of the inner diameters of all the force-guiding units being smaller than the inner diameter of the force-bearing hemisphere, it is ensured that the force-bearing hemisphere covers all the force-guiding units, so that when the force-bearing hemisphere is subjected to external force, the force-guiding unit close to its force point is pressed on the pressure-sensitive diaphragm according to the transmitted external force, thereby achieving the transmission of the external force to the pressure-sensitive diaphragm and improving the detection sensitivity of the sensor.

[0024] Optionally, the force guiding unit is provided in a columnar structure, and the force guiding unit and the cantilever beam are perpendicular to each other.

[0025] By setting the force-guiding unit in a columnar structure and setting the force-guiding unit in contact with the force-bearing mechanism, when the force-bearing hemisphere is subjected to external force, the force-guiding unit close to its force point presses on the force-bearing mechanism according to the transmitted external force, thereby transmitting the external force to the pressure-sensitive diaphragm and improving the detection sensitivity of the sensor.

[0026] Optionally, all the force-guiding units are distributed in a concentric circular array with the center of the force-bearing hemisphere as the center, and the heights of all the force-guiding units gradually decrease in the direction away from the center of the force-bearing hemisphere.

[0027] By distributing the force-guiding units in a concentric circular array with the center of the force-bearing hemisphere as the center, and gradually decreasing the height of all the force-guiding units in the direction away from the center of the force-bearing hemisphere, the force transmission effect between the force-guiding units and the force-bearing hemisphere is improved, so that when the force-bearing hemisphere is subjected to external force, the force-guiding units close to its force point are pressed on the pressure-sensitive diaphragm according to the transmitted external force, thereby achieving the transmission of the external force to the pressure-sensitive diaphragm and improving the detection sensitivity of the sensor.

[0028] The present invention provides a flexible detection device, comprising the multi-point contact pressure sensor as described above.

[0029] The flexible detection device provided by the present invention has the following technical effects: the traditional flexible detection device is arranged in a flexible ring structure, and the tactile sensing unit adopts a single-point detection method for detection. If the wearing position deviates, the detection result of the tactile sensing unit will be deviated, or even the detection result cannot be displayed; when the flexible detection device using this multi-point contact pressure sensor is worn on the user's preset part, the direction of the signal source can be judged according to the multiple pressure information received by the multi-point contact pressure sensor, and the wearer can make appropriate adjustments in the corresponding direction, thereby effectively improving the detection effect; at the same time, the multi-point contact pressure sensor in this embodiment is processed and formed by MEMS technology, and the space occupancy is extremely low. Therefore, a single flexible detection device can be loaded with multiple groups of array-distributed multi-point contact pressure sensors, further improving the practicality of the flexible detection device. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0031] FIG1 is a schematic structural diagram of a multi-point contact pressure sensor provided by an embodiment of the present invention;

[0032] FIG2 is a three-dimensional structural diagram of the multi-point contact pressure sensor in FIG1;

[0033] FIG3 is another perspective structural diagram of the multi-point contact pressure sensor in FIG1 ;

[0034] FIG4 is a three-dimensional structural diagram of the force-bearing mechanism in FIG1 ;

[0035] FIG5 is a three-dimensional structural diagram of the base in FIG1;

[0036] FIG6 is a schematic structural diagram of a multi-point contact pressure sensor provided by another embodiment of the present invention;

[0037] FIG7 is a schematic cross-sectional view of a multi-point contact pressure sensor according to one embodiment of the present invention;

[0038] FIG8 is an exploded view of a multi-point contact pressure sensor provided by one embodiment of the present invention;

[0039] FIG9 is a schematic cross-sectional view of a multi-point contact pressure sensor according to another embodiment of the present invention;

[0040] FIG10 is a three-dimensional structural diagram of the connection between the base and the force guide unit in FIG8;

[0041] FIG11 is a schematic cross-sectional view of a multi-point contact pressure sensor according to another embodiment of the present invention;

[0042] FIG12 is a schematic cross-sectional view of a multi-point contact pressure sensor according to another embodiment of the present invention;

[0043] FIG13 is a schematic structural diagram of a mouse equipped with a multi-point contact pressure sensor provided by an embodiment of the present invention.

[0044] Description of the drawings: 1. Multi-point contact pressure sensor, 11. Base, 111. Pressure-sensitive diaphragm, 112. First frame, 113. Suspended membrane, 12. Force-bearing mechanism, 121. Force-bearing plate, 122. Abutment platform,

[0045] 2. Piezoelectric signal input device, 21. Mounting seat, 211. Piezoelectric conversion circuit, 212. Second frame, 213. Cantilever beam, 22. Force-bearing hemisphere, 23. Force guide unit;

[0046] 3. Mouse. DETAILED DESCRIPTION

[0047] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0048] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0049] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of such features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0050] Please refer to Figures 1-5. One embodiment of the present invention provides a multi-point contact pressure sensor 1, including a base 11, a force-bearing mechanism 12 and a control system, wherein the base 11 is provided with a pressure-sensitive membrane 111; the number of the force-bearing mechanism 12 is at least one group, and the ends of all the force-bearing mechanisms 12 are in contact with the pressure-sensitive membrane 111; the control system is connected to the pressure-sensitive membrane 111 by signal; after the external force is applied to the force-bearing mechanism 12, the external force can be transmitted to the pressure-sensitive membrane 111, and the pressure-sensitive membrane 111 feeds back the transmission order and the value of the force to the control system.

[0051] In this embodiment, by designing the ends of all the force-bearing mechanisms 12 and the sensing ends of the sensing electrical elements to be abutted structures, when an external force is applied to the force-bearing mechanism 12, the external force is transmitted to the piezoresistive diaphragm 111 through the end of the force-bearing mechanism 12, so that the piezoresistive diaphragm 111 feeds back the transmission sequence of the force and the value of the force to the control system. Among them, according to the force sequence of multiple groups of force-bearing mechanisms 12, the force application path when an external force is applied to the force-bearing mechanism 12 can be accurately obtained; according to the force difference between multiple groups of force-bearing mechanisms 12, the pressure direction when an external force is applied to the force-bearing mechanism 12 can be accurately obtained; according to the magnitude of the force on the force-bearing mechanism 12, the pressure value received by the force-bearing mechanism 12 when an external force is applied can be accurately obtained, thereby achieving multi-angle analysis and measurement and improving the measurement accuracy.

[0052] Please refer to FIGS. 1-5. In one embodiment, the base 11 includes a first frame 112 and a suspended film 113. The first frame 112 and the suspended film 113 are integrally formed from a silicon wafer through a MEMS etching process. The suspended film 113 is formed on the end face of the first frame 112. The radial cross-section of the base 11 is arranged in a U-shaped structure. The piezoresistive diaphragm 111 is formed on the suspended film 113 through a MEMS process.

[0053] In this embodiment, the first frame 112 and the suspended film 113 are integrally formed from a silicon wafer through a MEMS etching process, and the piezoresistive diaphragm 111 is formed on the suspended film 113 through a MEMS process, thereby improving the overall sensitivity and production efficiency. Among them, the MEMS process (Microelectromechanical systems, MEMS) is a general term for microstructural processing technologies ranging from the nanoscale to the millimeter scale.

[0054] Please refer to FIGS. 1-5. In one embodiment, the force-bearing mechanism 12 includes a force-bearing plate 121 and abutting platforms 122. The number of the abutting platforms 122 is multiple groups, and multiple groups of the abutting platforms 122 are distributed in a matrix on the end face of the force-bearing plate 121; among them, the end of the abutting platform 122 far from the force-bearing plate 121 abuts against the piezoresistive diaphragm 111; when an external force is applied to the force-bearing plate 121, the abutting platform 122 close to its force application point can be pressed against the piezoresistive diaphragm 111.

[0055] In this embodiment, a plurality of groups of the abutment platforms 122 are arranged in a matrix distributed on the end surface of the force-bearing plate 121, and the abutment platforms 122 are arranged to abut against the pressure-sensitive membrane 111 away from the end of the force-bearing plate 121, so that when the force-bearing plate 121 is subjected to an external force, the abutment platforms 122 close to its force point can be pressed against the pressure-sensitive membrane 111, thereby realizing the transmission of the external force to the pressure-sensitive membrane 111, so that the pressure-sensitive membrane 111 can feedback the transmission order and the value of the force to the control system, thereby greatly improving the detection sensitivity of the sensor.

[0056] Please refer to Figures 1-5. In one embodiment, the force-bearing plate 121 and the abutment platform 122 are integrally formed from a silicon wafer through a MEMS wet etching process, wherein the abutment platform 122 is affected by the side etching in the MEMS wet etching process and has an overall frustum structure; the abutment platform 122 gradually narrows at the end facing away from the force-bearing plate 121.

[0057] In this embodiment, the force-bearing plate 121 and the abutment platform 122 are integrally formed from a silicon wafer through a MEMS wet etching process, wherein the abutment platform 122 is affected by the side etching in the MEMS wet etching process and is arranged in a frustum structure as a whole; and the end of the abutment platform 122 facing away from the force-bearing plate 121 gradually narrows (or gradually shrinks). When the force-bearing plate 121 is subjected to an external force, the end of the abutment platform 122 is pressed on the pressure-sensitive membrane 111, thereby improving the detection sensitivity and production efficiency of the sensor.

[0058] Please refer to Figures 1-5. This solution distributes multiple groups of abutment platforms 122 in a matrix pattern by processing from the microscopic level of the wafer, and the tip of the abutment platform 122 is bonded to the pressure-sensitive membrane 111. The multiple force points of the pressure-sensitive membrane 111 independently and in real time provide feedback on the current force values ​​of the corresponding abutment platforms 122. The force parameters of all the abutment platforms 122 are calculated to obtain the direction, strength, and order of the current force source.

[0059] In this embodiment, the number of the force-bearing plates 121 is one group, and the number of the abutment platforms 122 is four groups. The four groups of abutment platforms 122 are arranged in a rectangular array on the end surface of the force-bearing plate 121 facing the pressure-sensitive membrane 111; wherein, the force-bearing plate 121 and the suspended membrane 113 are parallel to each other, and a gap is provided between the force-bearing plate 121 and the suspended membrane 113. The abutment platforms 122 and the pressure-sensitive membrane 111 are located in the gap, and the abutment platforms 122 and the pressure-sensitive membrane 111 are always in an abutment state.

[0060] Specifically, the external force acts on the force-bearing plate 121 along a preset direction, and the force-bearing plate 121 acts on the abutment platform 122 in turn along the preset direction. All abutment platforms 122 transmit the force to the pressure-sensitive membrane 111 in turn. The control system can determine the direction and strength of the force through the resistance change sequence and change value of the pressure-sensitive membrane 111.

[0061] In order to improve the self-recovery convenience of the pressure-sensitive membrane 111, in the remaining embodiments, the force plate 121 and the frame are respectively installed on two groups of relatively moving driving parts. After the two groups of driving parts are close to each other, the abutment platform 122 abuts against the pressure-sensitive membrane 111; when the two groups of driving parts are driven to disperse, the abutment platform 122 is separated from the pressure-sensitive membrane 111, and the pressure-sensitive membrane 111 returns to the preset shape, thereby extending the service life of the pressure-sensitive membrane 111.

[0062] As shown in Figures 1-5, by arranging multiple groups of abutment platforms 122 in an array along a preset direction, it is possible to accurately measure the force information of the force plate 121 through a multi-point method. Furthermore, by extending the abutment platforms 122 from large to small, with the small end abutting the sensing end of the pressure-sensitive membrane 111, the force is transmitted to the small end through the large end surface of the abutment platform 122, and the force is then applied to the pressure-sensitive membrane 111 through the small end surface, thereby preventing interference caused by the force application points of two adjacent groups of abutment platforms 122 being too close, thereby accurately transmitting the force information to the pressure-sensitive membrane 111 and improving measurement accuracy.

[0063] Please refer to Figures 1-5. In one embodiment, when the force-bearing plate 121 is subjected to an external force, the force-bearing plate 121 applies the external force to the pressure-sensitive membrane 111 in sequence according to the force-bearing time points through multiple groups of abutment platforms 122 close to the force points, so that the pressure-sensitive membrane 111 obtains a force application path acting on the force-bearing plate 121 according to the force-applying time points of different abutment platforms 122.

[0064] In this embodiment, multiple groups of abutment platforms 122 arranged along a preset direction sequentially detect the applied force, and the force application path can be obtained based on the time points at which the abutment platforms 122 apply force. Specifically, by arranging the abutment platforms 122 at the end surface of the force-bearing plate 121, when the force-bearing plate 121 is subjected to force, the force can be quickly and accurately transmitted to the pressure-sensitive diaphragm 111, thereby obtaining the force application path of the force-bearing plate 121 (i.e., the force application path of the external force).

[0065] Please refer to Figures 1-5. In one embodiment, when the force-bearing plate 121 is subjected to an external force, the force-bearing plate 121 applies the external force to the pressure-sensitive membrane 111 in sequence through multiple groups of abutment platforms 122 according to the time points of force application, so that the direction of pressure applied to the force-bearing plate 121 is obtained by calculating the difference between the force values ​​applied by all abutment platforms 122 on the pressure-sensitive membrane 111 per unit time.

[0066] In this embodiment, the pressure direction currently exerted on the pressure sensor can be obtained by the difference between the force values ​​exerted on the pressure chip by all the abutment platforms 122 per unit time; specifically, by setting the abutment platform 122 at the end face of the force-bearing plate 121, when the force-bearing plate 121 is subjected to force, the force can be quickly and accurately transferred to the pressure-sensitive diaphragm 111, thereby obtaining the pressure direction exerted on the force-bearing plate 121 (i.e., the direction of the external force).

[0067] Please refer to Figures 1-5. In one embodiment, when the force-bearing plate 121 is subjected to an external force, the force-bearing plate 121 applies the external force to the pressure-sensitive membrane 111 in sequence through multiple groups of abutment platforms 122 according to the time points of force application, so that the degree of change of the force applied to the force-bearing plate 121 per unit time is obtained according to the force application time periods of all abutment platforms 122.

[0068] In this embodiment, the degree of force change per unit time can be obtained through the force application time periods of all the abutment platforms 122; specifically, by setting the abutment platforms 122 at the force-bearing plate 121, when the force-bearing plate 121 is subjected to force, the force can be quickly and accurately transferred to the pressure-sensitive membrane 111, and the degree of force change on the force-bearing plate 121 (i.e., the degree of force change of the external force) can be obtained according to the force application time periods of all the abutment platforms 122.

[0069] In one embodiment of the present invention, the multi-point contact pressure sensor 1 can be applied to wearable devices for measuring physiological parameters such as a person's motion state, heart rate, and blood pressure. For example, smart watches, smart bracelets, pulse diagnostic devices, and heart rate monitors can be used. For example, in conventional pulse diagnostic devices, the pulse sensor is configured as a flexible ring structure, and the tactile sensing unit uses a single-point detection method to detect the pulse. If the pulse sensor is worn in a misaligned position, the detection results of the tactile sensing unit will be biased, and the pulse diagnosis may even be impossible. When the flexible detection bracelet using the multi-point contact pressure sensor 1 is worn on the patient's wrist, the optimal pulse detection position can be determined based on the multiple pressure information received by the multi-point contact pressure sensor 1. The wearer can then make appropriate adjustments, thereby effectively improving the accuracy of pulse detection. Furthermore, the multi-point contact pressure sensor 1 in this embodiment is manufactured using a MEMS process, occupying a very small space. Therefore, a single pulse sensor can accommodate multiple arrays of multi-point contact pressure sensors 1, further improving the practicality of the pulse diagnostic device.

[0070] Please refer to Figures 6-12. One embodiment of the present invention provides a piezoelectric signal input device 2, including a mounting base 21, the multi-point contact pressure sensor 1 as described above, and a force-bearing hemisphere 22, wherein a piezoelectric conversion circuit 211 is arranged on the mounting base 21; the number of the multi-point contact pressure sensors 1 is multiple groups, and all the multi-point contact pressure sensors 1 are evenly distributed on the mounting base 21; the force-bearing hemisphere 22 is arranged on the mounting base 21 and can cover all the multi-point contact pressure sensors 1; wherein the piezoelectric conversion circuit 211 is electrically connected to all the multi-point contact pressure sensors 1; after the force-bearing hemisphere 22 is subjected to a force, the force is transferred to the multi-point contact pressure sensor 1.

[0071] In this embodiment, a piezoelectric conversion circuit 211 is provided on the mounting base 21, and a multi-point contact sensor as described above is installed on the mounting base 21, and the multi-point contact sensor is electrically connected to the piezoelectric conversion circuit 211, and the force-bearing hemisphere 22 can cover all the multi-point contact pressure sensors 1, so that after the force-bearing hemisphere 22 is subjected to the force, the force is transmitted to the multi-point contact pressure sensor 1, and data transmission and processing are realized through the piezoelectric conversion circuit 211, so as to improve the detection sensitivity and production efficiency of the sensor.

[0072] In one embodiment, the mounting base 21 includes a second frame 212 and a suspension beam 213, wherein the number of the suspension beams 213 is multiple groups, and the multiple groups of suspension beams 213 are staggered in pairs in the inner circle of the second frame 212, and the multiple groups of bases 11 are respectively arranged on the suspension beams 213 in a one-to-one correspondence, and the edge of the force-bearing hemisphere 22 is fixedly bonded to the end face of the second frame 212, and all the multi-point contact pressure sensors 1 are evenly distributed at the staggered positions of all the suspension beams 213.

[0073] In this embodiment, the second frame 212 and the suspension beam 213 are integrally formed by a silicon wafer through a MEMS etching process, and the second frame 212 and the suspension beam 213 are integrally formed by a silicon wafer through a MEMS etching process, and multiple groups of suspension beams 213 are provided. The multiple groups of suspension beams 213 are staggered in pairs in the inner circle of the second frame 212, and the edge of the force-bearing hemisphere 22 is fixedly bonded to the end face of the second frame 212 to ensure that the force-bearing hemisphere 22 covers all the bases 11, thereby realizing the transmission of the external force to the base 11, so that the base 11 feeds back the transmission order of the force and the value of the force to the control system, which greatly improves the detection sensitivity of the sensor. The forming process of the suspension beam 213 is as follows: first, shallow hole etching is performed on the end surface of the second frame 212 facing the abutment platform 122. For example, there are four suspension beams 213 in this embodiment, and the four suspension beams 213 are distributed in a criss-cross structure. The shallow hole is located between two adjacent groups of suspension beams 213; then, deep hole etching is performed on the end surface of the second frame 212 facing away from the abutment platform 122 until the deep hole is connected with the shallow hole, thereby forming the suspension beam 213.

[0074] Please refer to Figures 6-12. In one embodiment, the piezoelectric signal input device 2 includes a force-guiding unit 23, the edge of the force-bearing hemisphere 22 is fixedly bonded to the end face of the second frame 212, and the force-bearing hemisphere 22 covers all the pressure-sensitive membranes 111; the number of the force-guiding units 23 is multiple groups, and the multiple groups of the force-guiding units 23 are respectively arranged at the staggered positions of the cantilever beam 213, and the ends of the force-guiding units 23 extend into the force-bearing hemisphere 22.

[0075] In this embodiment, multiple groups of force-guiding units 23 and the multi-point contact pressure sensors 1 are arranged one by one at the staggered positions of the cantilever beams 213, one end of the force-guiding unit 23 is in contact with the force-bearing mechanism 12 of the multi-point contact pressure sensor 1, and the other end of the force-guiding unit 23 extends into the force-bearing hemisphere 22, and the edge of the force-bearing hemisphere 22 is fixedly bonded to the end face of the second frame 212, ensuring that the force-bearing hemisphere 22 covers all the pressure-sensitive membranes 111, so that when the force-bearing hemisphere 22 is subjected to external force, the force-guiding unit 23 near its force point can be pressed on the force-bearing mechanism 12, thereby realizing the transmission of the external force to the pressure-sensitive membrane 111, so that the pressure-sensitive membrane 111 can feedback the force transmission sequence and force value to the control system, thereby greatly improving the detection sensitivity of the sensor.

[0076] Please refer to Figures 6-10. In one embodiment, the force guiding unit 23 is arranged in a columnar structure, and the force guiding unit 23 and the suspension beam 213 are perpendicular to each other.

[0077] In this embodiment, the force-guiding unit 23 is arranged in a columnar structure, and the force-guiding unit 23 and the cantilever beam 213 are arranged perpendicular to each other, so that when the force-bearing hemisphere 22 is subjected to an external force, the force-guiding unit 23 close to its force point is pressed on the pressure-sensitive membrane 111 according to the transmitted external force, thereby achieving the transmission of the external force to the pressure-sensitive membrane 111 and improving the detection sensitivity of the sensor.

[0078] Please refer to FIG. 11 . In one embodiment, the force guiding unit 23 is provided in a hemispherical structure, and the sum of the inner diameters of all the force guiding units 23 is smaller than the inner diameter of the force-bearing hemisphere 22 .

[0079] In this embodiment, the force-guiding units 23 are arranged in a hemispherical structure, and the sum of the inner diameters of all the force-guiding units 23 is smaller than the inner diameter of the force-bearing hemisphere 22, so as to ensure that the force-bearing hemisphere 22 covers all the force-guiding units 23. When the force-bearing hemisphere 22 is subjected to an external force, the force-guiding units 23 close to its force-bearing points are pressed on the pressure-sensitive membrane 111 according to the transmitted external force, thereby achieving the transmission of the external force to the pressure-sensitive membrane 111 and improving the detection sensitivity of the sensor.

[0080] Please refer to Figure 12. In one embodiment, all the force-guiding units 23 are distributed in a concentric circular array with the center of the force-bearing hemisphere 22 as the center, and the height of all the force-guiding units 23 gradually decreases in the direction away from the center of the force-bearing hemisphere 22.

[0081] In this embodiment, the force-guiding units 23 are distributed in a circumferential array of concentric rings with the center of the force-bearing hemisphere 22 as the center, and the heights of all the force-guiding units 23 gradually decrease in the direction away from the center of the force-bearing hemisphere 22, thereby improving the force transmission effect between the force-guiding units 23 and the force-bearing hemisphere 22. When the force-bearing hemisphere 22 is subjected to an external force, the force-guiding units 23 close to its force point are pressed against the pressure-sensitive membrane 111 according to the transmitted external force, thereby achieving the transmission of the external force to the pressure-sensitive membrane 111 and improving the detection sensitivity of the sensor.

[0082] 6-12 , multiple groups of force-guiding units 23 in cylindrical, hemispherical, or other shapes are distributed in a matrix pattern, and a glue structure (i.e., a force-bearing hemispherical body 22) is used to cover all the force-guiding units 23 on the integrated module (i.e., the base 11). The cured glue structure can receive external forces from multiple dimensions and feedback to the force-guiding units 23 at corresponding positions.

[0083] Vertical direction: The force guiding unit 23 can analyze the force magnitude at each position along its length direction;

[0084] Horizontally: the force parameter differences between the force guiding units 23 can be judged; the two-way combination can realize three-dimensional force sensing.

[0085] Specifically, when a user touches the force-bearing hemisphere 22, the applied force is transmitted to the pressure-sensitive membrane 111 via the force-guiding unit 23. Since there are multiple force-bearing points on the spherical surface, each point, after receiving a force, transmits the external force through the hemisphere to the force-guiding unit 23 near the force-bearing point. There are deviations in the forces applied to the force-guiding units 23 at different locations, and these deviations are fed back as differential electrical signals from the corresponding pressure-sensitive membrane 111, thereby achieving multi-dimensional pressure sensing. Universal pressure sensing is achieved by using the force-bearing hemisphere 22 and the force-guiding unit 23.

[0086] Please refer to FIG. 13 , one embodiment of the present invention provides a mouse 3 including the piezoelectric signal input device 2 as described above.

[0087] In this embodiment, the beneficial effects of the piezoelectric signal input device 2 have been described in the above content and will not be repeated here. Since the mouse 3 adopts the above-mentioned piezoelectric signal input device 2, the mouse 3 has the same beneficial effects. When in use, when the multi-point contact pressure sensor 1 is subjected to force, the force is transmitted to the pressure-sensitive diaphragm 111 through multiple groups of corresponding force-bearing mechanisms 12 according to the force situation, thereby accurately obtaining one or more force information including the force path, pressure direction and degree of force change per unit time acting on the force-bearing mechanism 12, realizing multi-angle analysis and measurement, and improving measurement accuracy.

[0088] Please refer to Figure 13. The mouse 3 with this structure replaces the traditional scroll wheel structure, providing users with a more comfortable way to use the mouse 3. The service life, flexibility, and convenience of turning pages / sliding down the mouse 3 are greatly improved.

[0089] The spherical abutment end face of the force-bearing hemisphere is used as the force-bearing surface. When the user's fingertip rubs across the force-bearing hemisphere, the force-bearing hemisphere transmits the force to the corresponding pressure-sensitive membrane in sequence. The control system records the resistance change time, resistance change duration and resistance change value of the pressure-sensitive membrane. All control systems feed back the data to the piezoelectric conversion circuit. The piezoelectric conversion circuit obtains the fingertip movement path parameters and force parameters based on the calculations of all control systems, and inputs the parameters into the mouse control. The mouse control generates relevant instructions based on the parameters, such as scrolling, zooming, etc.; Compared with the traditional wheel mouse, the operator rotates the wheel to , in order to input relevant instructions, the scroll wheel rotation structure has mechanical wear and tear, and in a long-term use environment, the mechanical structure is easily damaged, resulting in a technical problem of signal input failure. In the mouse provided by the present invention, the piezoelectric input signal is received through the force-bearing hemisphere as a signal contact source, and the fingertips only need to rub and slide on the hemisphere to input relevant instructions. On the one hand, the static force-bearing structure is structurally stable, avoids mechanical wear and tear, and effectively extends the service life of the mouse. On the other hand, the operator's fingertip activity pattern is similar to the traditional one, and the user does not need to spend a lot of learning costs to get used to the new operation mode, thereby improving the practicality and market recognition of the mouse.

[0090] As needed, the mouse center control can also generate corresponding instructions based on different parameters. For example, when the parameter of vertical pressure is detected, the effect of the [OK] instruction is generated, or in 3D scenes such as game mode, when the parameter of lateral pressure is detected, the effect of instructions such as [Turn or sideways] is generated, thereby achieving the effect of refined simulation operation and improving the accuracy, flexibility and experience of operation.

[0091] The above description is only a preferred embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made by using the contents of the present invention description and drawings under the inventive concept of the present invention, or direct / indirect application in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A multi-point contact pressure sensor, characterized in that: Comprising: A base provided with a piezoresistive diaphragm. A force-applying mechanism, the number of which is at least one group, and the ends of all the force-applying mechanisms are abutted against the piezoresistive diaphragm. A control system, which is signal-connected to the piezoresistive diaphragm. Wherein, after an external force is applied to the force-applying mechanism, the external force can be transmitted to the piezoresistive diaphragm, and the piezoresistive diaphragm feeds back the transmission sequence and the value of the acting force to the control system.

2. The multi-point contact pressure sensor according to claim 1, wherein: The base includes a first frame and a suspended membrane, the first frame and the suspended membrane are integrally formed by MEMS etching process on a silicon wafer, the suspended membrane is formed on the end face of the first frame, the radial cross-section of the base is arranged in a U-shaped structure, and the piezoresistive diaphragm is formed on the suspended membrane by MEMS process.

3. The multi-point contact pressure sensor according to claim 2, wherein: The force-applying mechanism includes: A force-bearing plate; Abutting platforms, the number of which is multiple groups, and the multiple groups of abutting platforms are distributed in a matrix on the end face of the force-bearing plate; Wherein, the end of the abutting platform far from the force-bearing plate is abutted against the piezoresistive diaphragm; when an external force acts on the force-bearing plate, the abutting platform near its force application point can be pressed against the piezoresistive diaphragm.

4. The multi-point contact pressure sensor according to claim 3, wherein: The force-bearing plate and the abutting platforms are integrally formed by MEMS wet etching process on a silicon wafer, wherein, affected by side etching in the MEMS wet etching process, the abutting platforms are integrally arranged in a frustum structure; the end of the abutting platform facing away from the force-bearing plate gradually narrows.

5. A piezoelectric signal input device, characterized in that: Comprising: A mounting base provided with a piezoelectric conversion circuit thereon; The multi-point contact pressure sensor according to any one of claims 1-4, the number of which is multiple groups, and all the multi-point contact pressure sensors are evenly distributed on the mounting base; A force-bearing hemisphere, which is arranged on the mounting base and can cover all the multi-point contact pressure sensors; Wherein, the piezoelectric conversion circuit is electrically connected to all the multi-point contact pressure sensors; after the force-bearing hemisphere is acted upon by a force, the force is transmitted to the multi-point contact pressure sensors.

6. The piezoelectric signal input device according to claim 5, wherein: The mounting base includes a second frame and suspension beams, wherein, the number of the suspension beams is multiple groups, the multiple groups of suspension beams are distributed in a staggered manner in the inner circle of the second frame, the multiple groups of bases are respectively arranged on the suspension beams in a one-to-one correspondence, the edge of the force-bearing hemisphere is fixedly bonded to the end face of the second frame, and all the multi-point contact pressure sensors are evenly distributed at the staggered positions of all the suspension beams.

7. The piezoelectric signal input device according to claim 6, wherein: The piezoelectric signal input device further includes a force guiding unit, the number of which is multiple groups, the multiple groups of force guiding units are respectively arranged at the staggered positions of the suspension beams in a one-to-one correspondence, one end of the force guiding unit extends into the force-bearing hemisphere, and the other end of the force guiding unit is abutted against the corresponding force-applying mechanism.

8. The piezoelectric signal input device according to claim 7, wherein: The force guiding unit is arranged in a hemispherical structure, and the sum of the inner diameters of all the force guiding units is smaller than the inner diameter of the force-bearing hemisphere; Or, the force guiding unit is arranged in a cylindrical structure, and the force guiding unit is perpendicular to the suspension beam.

9. The piezoelectric signal input device according to claim 7 or 8, characterized in that: All the force-guiding units are distributed in a circumferential array of concentric circles with the center of the force-bearing hemisphere as the center, and the heights of all the force-guiding units gradually decrease in the direction away from the center of the force-bearing hemisphere.

10. A flexible detection device, characterized in that: The multi-point contact pressure sensor comprises the multi-point contact pressure sensor according to any one of claims 1 to 4.

Images