Chuck device and chuck system

Abstract

A chuck device (10) comprises: a first movable part (14) and a second movable part (16) for gripping a workpiece (W); and a cylinder device (18) for moving the first movable part and the second movable part closer to and away from each other. The cylinder device is disposed between the first movable part and the second movable part in a movable direction in which the first movable part and the second movable part move closer to and away from each other.

Description

Chuck device and chuck system

[0001] The present disclosure relates to a chucking apparatus and a chucking system.

[0002] Japanese Patent Laid-Open Publication No. 2002-079486 discloses a chuck device including first and second movable parts for gripping a workpiece and a cylinder device for moving the first and second movable parts toward and away from each other. The first and second movable parts are arranged in a direction (height direction of the chuck device) perpendicular to the direction in which the first and second movable parts move toward and away from each other relative to the cylinder device.

[0003] There is a demand for a chuck device and a chuck system that can increase the maximum opening width of the first movable part and the second movable part while reducing the height dimension of the chuck device.

[0004] The present disclosure aims to solve the above-mentioned problems.

[0005] A first aspect of the present disclosure is a chuck device comprising a first movable part and a second movable part for gripping a workpiece, and a cylinder device for moving the first movable part and the second movable part toward and away from each other, wherein the cylinder device is disposed between the first movable part and the second movable part in a movable direction in which the first movable part and the second movable part move toward and away from each other.

[0006] A second aspect of the present disclosure is a chuck system including the chuck device according to the first aspect and a fluid circuit for supplying compressed fluid to the chuck device for driving the cylinder device.

[0007] According to the present disclosure, it is possible to increase the maximum opening width of the first movable part and the second movable part while reducing the height dimension of the cylinder device.

[0008] The above objects, features and advantages will be easily understood from the following description of the embodiments, which will be described with reference to the accompanying drawings.

[0009] FIG. 1 is a perspective view of a chuck device according to an embodiment with a first gripping member and a second gripping member attached thereto. FIG. 2 is a partially exploded perspective view of the chuck device. FIG. 3 is a cross-sectional view of the chuck device. FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. 3. FIG. 5 is a cross-sectional view taken along line V-V in FIG. 3. FIG. 6 is a side view of the chuck device. FIG. 7 is a schematic diagram of a chuck system. FIG. 8 is a schematic diagram of a chuck system. FIG. 9 is a diagram illustrating the operation of the chuck device. FIG. 10 is a diagram illustrating the operation of the chuck device. FIG. 11 is a diagram illustrating the operation of the chuck device. FIG. 12 is a diagram illustrating the operation of the chuck device. FIG. 13 is a cross-sectional view of a chuck device equipped with a cylinder device according to a modified example.

[0010] A chuck device 10 and a chuck system 144 according to an embodiment of the present disclosure will now be described with reference to the accompanying drawings. Fig. 1 is a perspective view of the chuck device 10 according to the embodiment, with a first gripping member 300 and a second gripping member 302 attached thereto. Fig. 2 is a partially exploded perspective view of the chuck device 10.

[0011] As shown in Fig. 1, the chuck device 10 is a device for gripping a workpiece W (see Fig. 12) with a first gripping member 300 and a second gripping member 302. The chuck device 10 is detachably attached to, for example, a robot hand (not shown). Note that the chuck device 10 may also be detachably attached to a jig other than a robot hand.

[0012] 1 and 2 , the chuck device 10 includes a chuck body 12, a first movable portion 14, and a second movable portion 16. The chuck body 12 has a cylinder device 18, a first support portion 20, a second support portion 22, a first guide portion 24, and a second guide portion 26. The cylinder device 18 moves the first movable portion 14 and the second movable portion 16 toward and away from each other.

[0013] Each of the first movable part 14 and the second movable part 16 is formed in a plate shape. As shown in Fig. 1 , a first gripping member (first attachment) 300 is detachably attached to the first movable part 14. A second gripping member (second attachment) 302 is detachably attached to the second movable part 16. The size, shape, etc. of each of the first gripping member 300 and the second gripping member 302 can be set according to the size, shape, etc. of the workpiece W.

[0014] FIG. 3 is a cross-sectional view of the chuck device 10. FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. 3. As shown in FIGS. 3 and 4, the cylinder device 18 moves the first movable part 14 and the second movable part 16 in a movable direction (X direction) in which they move toward and away from each other. The chuck device 10 can grip the workpiece W by the cylinder device 18 moving the first movable part 14 and the second movable part 16 in a direction in which they move toward each other. Specifically, the chuck device 10 can grip the workpiece W by the cylinder device 18 moving the first movable part 14 in a first direction (X2 direction) in which they move toward the second movable part 16 and moving the second movable part 16 in a second direction (X1 direction) in which they move toward the first movable part 14.

[0015] Furthermore, the chuck device 10 can release the workpiece W by causing the cylinder device 18 to move the first movable part 14 and the second movable part 16 in directions away from each other. Specifically, the chuck device 10 can release the workpiece W by causing the cylinder device 18 to move the first movable part 14 in the second direction (X1 direction) and the second movable part 16 in the first direction (X2 direction).

[0016] 1 to 4, the cylinder device 18 is disposed between the first movable part 14 and the second movable part 16 in the movable direction (X direction). In other words, the first movable part 14 is located in the X1 direction of the cylinder device 18. The second movable part 16 is located in the X2 direction of the cylinder device 18. In this embodiment, the first movable part 14, the cylinder device 18, and the second movable part 16 are aligned in this order in the X2 direction. As a result, the first movable part 14 and the second movable part 16 do not overlap with the cylinder device 18 in the height direction (Z direction) of the cylinder device 18, and therefore the size of the chuck device 10 in the height direction can be made compact.

[0017] The height direction of the cylinder device 18 is perpendicular to the X direction. In other words, the height direction of the cylinder device 18 is the direction in which the workpiece W and the cylinder device 18 are aligned when the chuck device 10 grips the workpiece W (see FIG. 12). Furthermore, because the cylinder device 18 is disposed between the first movable part 14 and the second movable part 16, the maximum opening width between the first movable part 14 and the second movable part 16 can be made relatively wide. Therefore, the chuck device 10 can grip a relatively wide workpiece W (see FIG. 12).

[0018] As shown in Figures 3 and 4, the cylinder device 18 comprises a cylinder body 28, a first end member 30, a second end member 32, an intermediate wall portion 34, a first piston portion 36, a second piston portion 38, a first rod 40, and a second rod 42.

[0019] The cylinder body 28 extends in the X direction. The cylinder body 28 has a cylinder hole 44 that extends in the X direction. The cylinder hole 44 extends in the movable direction (X direction). The cylinder hole 44 penetrates the cylinder body 28 in the X direction. The cylinder hole 44 extends in the width direction (Y direction) of the cylinder device 18. The Y direction is a direction perpendicular to the X direction and the Z direction (height direction of the cylinder device 18).

[0020] 5 is a cross-sectional view taken along line V-V in FIG. 3. As shown in FIG. 5, the cylinder bore 44 has a larger dimension in the width direction (Y direction) of the cylinder device 18 than in the height direction (Z direction) of the cylinder device 18. This allows the height dimension of the chuck device 10 to be reduced. In a cross section viewed from the X direction, the middle portion of the cylinder bore 44 in the Y direction extends in a rectangular shape. In a cross section viewed from the X direction, both ends of the cylinder bore 44 in the Y direction are formed in a semicircular shape that protrudes outward in the Y direction. The shape of the cylinder bore 44 is not limited to this and may be, for example, rectangular, elliptical, or the like.

[0021] As shown in Figures 3 and 4, the first end member 30 is a plate-shaped member attached to one end of the cylinder body 28 (the end of the cylinder body 28 in the X1 direction). The one end of the cylinder body 28 is located in the Z1 direction relative to the first end member 30. The first end member 30 is fixed to the one end of the cylinder body 28 with multiple (two in this embodiment) screw members 46 (see Figures 1 and 2). The first end member 30 covers the cylinder bore 44 from the X1 direction. The first end member 30 and the first movable part 14 are arranged to face each other in the X direction.

[0022] The second end member 32 is a plate-shaped member attached to the other end of the cylinder body 28 (the end of the cylinder body 28 in the X2 direction). The other end of the cylinder body 28 is located in the Z1 direction relative to the second end member 32. The second end member 32 is fixed to the other end of the cylinder body 28 with multiple (two in this embodiment) screw members 48 (see FIGS. 1 and 2). The second end member 32 covers the cylinder bore 44 from the X2 direction. The second end member 32 and the second movable part 16 are arranged to face each other in the X direction.

[0023] The intermediate wall portion 34 is disposed within the cylinder bore 44. The intermediate wall portion 34 divides the cylinder bore 44 in the axial direction (X direction) of the cylinder body 28. The intermediate wall portion 34 is airtightly fixed to the inner circumferential surface of the cylinder body 28. A seal member (not shown) is provided between the outer circumferential surface of the intermediate wall portion 34 and the inner circumferential surface of the cylinder body 28.

[0024] The first piston portion 36 and the second piston portion 38 are slidably disposed in the cylinder bore 44. The first piston portion 36 and the second piston portion 38 are arranged side by side in the movable direction (X direction). The first piston portion 36 is disposed in the X1 direction of the second piston portion 38. The first piston portion 36 includes an inner piston 50 and an outer piston 52. The inner piston 50 is disposed between the intermediate wall portion 34 and the second piston portion 38. A piston packing (not shown) is attached to the outer peripheral surface of the inner piston 50 to provide an airtight seal between the inner piston 50 and the cylinder body 28. The outer piston 52 is positioned on the opposite side of the second piston portion 38 with respect to the intermediate wall portion 34. In other words, the outer piston 52 is attached to the first rod 40 while being positioned on the opposite side of the inner piston 50 with respect to the intermediate wall portion 34. The outer piston 52 is disposed between the intermediate wall portion 34 and the first end member 30. A piston packing (not shown) is attached to the outer peripheral surface of the outer piston 52 to provide an airtight seal between the outer piston 52 and the cylinder body 28 .

[0025] The second piston portion 38 is disposed between the inner piston 50 and the second end member 32. A piston packing (not shown) is attached to the outer circumferential surface of the second piston portion 38 to provide an airtight seal between the second piston portion 38 and the cylinder body 28.

[0026] The first rod 40 connects the first piston portion 36 and the first movable portion 14 to each other. The end of the first rod 40 in the X2 direction is fixed to the inner piston 50. The first rod 40 extends from the inner piston 50 in the X1 direction and penetrates the intermediate wall portion 34, the outer piston 52, and the first end member 30. A seal member (not shown) is attached to the inner surface of the hole in the intermediate wall portion 34 through which the first rod 40 passes, providing an airtight seal between the first rod 40 and the intermediate wall portion 34. The outer piston 52 is fixed to the middle portion of the first rod 40 in the X direction. A seal member 54 is attached to the inner surface of the hole in the first end member 30 through which the first rod 40 passes, providing an airtight seal between the first rod 40 and the first end member 30. The end of the first rod 40 in the X1 direction is fixed to the first movable portion 14.

[0027] The second rod 42 connects the second piston portion 38 and the second movable portion 16 to each other. The end of the second rod 42 in the X1 direction is fixed to the second piston portion 38. The second rod 42 extends from the second piston portion 38 in the X2 direction and passes through the second end member 32. A seal member 56 is attached to the inner surface of the hole in the second end member 32 through which the second rod 42 passes, providing an airtight seal between the second rod 42 and the second end member 32. The end of the second rod 42 in the X2 direction is fixed to the second movable portion 16.

[0028] As shown in Figures 2 and 3, the first support part 20 supports the first movable part 14. The first support part 20 is a plate-like part that protrudes from one end (end in the X1 direction) of the cylinder body 28 in the opposite direction (X1 direction) from the second movable part 16. The second support part 22 supports the second movable part 16. The second support part 22 is a plate-like part that protrudes from the other end (end in the X2 direction) of the cylinder body 28 in the opposite direction (X2 direction) from the first movable part 14. The cylinder body 28, the first support part 20, and the second support part 22 are integrally molded from a metal material. Hereinafter, the member formed by the cylinder body 28, the first support part 20, and the second support part 22 may be referred to as the "main body 58."

[0029] The main body 58 does not have to be a one-piece molded product. That is, the cylinder body 28, the first support portion 20, and the second support portion 22 may be formed as separate parts, and the main body 58 may be formed by connecting these parts with screws or the like. If the main body 58 is a one-piece molded product, parts such as screws are not required, and the number of parts can be reduced.

[0030] As shown in FIG. 4, a pair of first mounting holes 60 are arranged side by side in the Y direction at the end of the first support portion 20 in the X2 direction (the portion adjacent to the cylinder device 18) for mounting the chuck device 10 to an object to be mounted (not shown).

[0031] 2 and 3 , the first support portion 20 has a first guide support portion 62 that is positioned in the X1 direction from the pair of first mounting holes 60 and supports the first guide portion 24. A first recess 64 for locating the first guide portion 24 is formed in the surface of the first guide support portion 62 that faces the first movable portion 14 (the surface that faces the Z2 direction). The first recess 64 penetrates the first guide support portion 62 in the X direction.

[0032] As shown in FIG. 2 , the first guide unit 24 has a pair of first guide rails 66 and a first slider 68. The pair of first guide rails 66 are disposed in the first recess 64 so as to face each other in the Y direction. Each first guide rail 66 extends in the X direction. The first slider 68 is disposed between the pair of first guide rails 66. The first movable unit 14 is fixed to the first slider 68 by a plurality of screw members 70. A plurality of balls (not shown) are disposed between the pair of first guide rails 66 and the first slider 68. The pair of first guide rails 66 guide the first slider 68 in the X direction.

[0033] As shown in FIG. 4, a pair of second mounting holes 72 are arranged side by side in the Y direction at the end of the second support portion 22 in the X1 direction (the portion adjacent to the cylinder device 18) for mounting the chuck device 10 to an object to be mounted (not shown).

[0034] 2 and 3 , the second support portion 22 has a second guide support portion 74 that is located in the X2 direction further from the pair of second mounting holes 72 and supports the second guide portion 26. A second recess 76 for locating the second guide portion 26 is formed in the surface of the second guide support portion 74 that faces the second movable portion 16 (the surface that faces the Z2 direction). The second recess 76 penetrates the second guide support portion 74 in the X direction.

[0035] As shown in FIG. 2 , the second guide portion 26 has a pair of second guide rails 78 and a second slider 80. The pair of second guide rails 78 are arranged in the second recess 76 so as to face each other in the Y direction. Each second guide rail 78 extends in the X direction. The second slider 80 is arranged between the pair of second guide rails 78. The second movable portion 16 is fixed to the second slider 80 by a plurality of screw members 82. A plurality of balls (not shown) are arranged between the pair of second guide rails 78 and the second slider 80. The pair of second guide rails 78 guide the second slider 80 in the X direction.

[0036] The chuck device 10 includes an adjuster mounting portion 86 for mounting an adjuster 84 that contacts the first movable portion 14 to adjust the movement limit position of the first movable portion 14 in the first direction (the stroke end position of the first piston portion 36). The adjuster mounting portion 86 includes a pair of first mounting portions 88 and a pair of second mounting portions 90.

[0037] The pair of first mounting portions 88 are provided on the first guide support portion 62. The pair of first mounting portions 88 are provided on each of a pair of surfaces of the first guide support portion 62 facing in the Y direction. The first mounting portions 88 include a first positioning recess 92 and two first screw holes 94. The first positioning recess 92 extends over the entire length of the first guide support portion 62 in the Z direction. The two first screw holes 94 are formed in the bottom surface of the first positioning recess 92. The two first screw holes 94 are arranged with an interval in the X direction.

[0038] The pair of second mounting portions 90 are provided on the first movable portion 14. The pair of second mounting portions 90 are provided on each of a pair of surfaces of the first movable portion 14 facing the Y direction. The second mounting portions 90 include three second screw holes 96 and two second positioning recesses 98. The three second screw holes 96 are arranged at intervals in the X direction. The two second positioning recesses 98 are located between adjacent second screw holes 96. The second positioning recesses 98 extend over the entire length of the first movable portion 14 in the Z direction.

[0039] The adjuster 84 has an adjuster body 100 and a contact piece 102. The adjuster body 100 is detachable from the first mounting portion 88. The user can select which of the pair of first mounting portions 88 to mount the adjuster body 100 to. The adjuster body 100 has a retaining member 104, a bolt support portion 105, a nut 106, and an adjuster bolt 108. The retaining member 104 has a shape corresponding to the first positioning recess 92.

[0040] The holding member 104 has two first insertion holes 110. When the holding member 104 is placed in the first positioning recess 92, the two first insertion holes 110 of the holding member 104 overlap with the two first screw holes 94 when viewed from the Y direction. The holding member 104 is attached to the first mounting portion 88 with two screw members 112. The bolt support portion 105 protrudes from the holding member 104 in the Z2 direction. The bolt support portion 105 has a bolt insertion hole 114 formed therein that penetrates in the X direction. The adjuster bolt 108 is inserted into the bolt insertion hole 114.

[0041] The nut 106 is attached to the bolt support portion 105. The adjuster bolt 108 is threadedly engaged with the nut 106. By rotating the adjuster bolt 108 relative to the nut 106, the protruding length of the adjuster bolt 108 in the X1 direction relative to the bolt support portion 105 can be adjusted.

[0042] The contact piece 102 is detachably attached to the second mounting portion 90. The user attaches the contact piece 102 to the second mounting portion 90 corresponding to the first mounting portion 88 to which the adjuster body 100 is attached. The contact piece 102 has, for example, a rectangular parallelepiped shape. The contact piece 102 is provided with a positioning protrusion 116 and two second insertion holes 118. The positioning protrusion 116 is insertable into the second positioning recess 98. When the positioning protrusion 116 is inserted into the second positioning recess 98, the two second insertion holes 118 of the contact piece 102 overlap with two adjacent second screw holes 96 out of the three second screw holes 96 when viewed from the Y direction. The contact piece 102 is attached to the second mounting portion 90 with two screw members 120.

[0043] 4, the cylinder device 18 is provided with a first chamber 122a, a first chamber 122b, a second chamber 124, a third chamber 126, and a fourth chamber 128. The first chamber 122a is formed between the outer piston 52 and the first end member 30. The first chamber 122b is formed between the intermediate wall portion 34 and the inner piston 50. The second chamber 124 is formed between the second piston portion 38 and the second end member 32. The third chamber 126 is formed between the outer piston 52 and the intermediate wall portion 34. The fourth chamber 128 is formed between the inner piston 50 and the second piston portion 38.

[0044] The compressed fluid in the first chamber 122a presses the outer piston 52 in the X2 direction. The compressed fluid in the first chamber 122b presses the inner piston 50 in the X2 direction. That is, the first piston portion 36 is pressed in the X2 direction by the compressed fluid in the first chamber 122a and the compressed fluid in the first chamber 122b. The compressed fluid in the second chamber 124 presses the second piston portion 38 in the X1 direction.

[0045] The first piston portion 36 has a first pressure surface 130. The first pressure surface 130 is pressed in the X2 direction (first direction) by the compressed fluid in the first chamber 122a and the compressed fluid in the first chamber 122b. The first pressure surface 130 includes a pressure surface 132 of the outer piston 52 facing the X1 direction and a pressure surface 134 of the inner piston 50 facing the X1 direction. The second piston portion 38 has a second pressure surface 136. The second pressure surface 136 is pressed in the X1 direction (second direction) by the compressed fluid in the second chamber 124. The second pressure surface 136 is the surface of the second piston portion 38 facing the X1 direction. The area of ​​the first pressure surface 130 (the sum of the areas of the pressure surface 132 and the pressure surface 134) is larger than the area of ​​the second pressure surface 136. That is, the first thrust of the first piston portion 36 in the X2 direction (first direction) is greater than the second thrust of the second piston portion 38 in the X1 direction (second direction).

[0046] FIG. 6 is a side view of the chuck device 10. In other words, FIG. 6 is a side view of the chuck device 10 as viewed from the X2 direction. As shown in FIGS. 1, 2, 5, and 6, the main body 58 is formed with a first port 138, a second port 140, and a third port 142. The first port 138 communicates with the first chamber 122a and the first chamber 122b. The second port 140 communicates with the second chamber 124. The third port 142 communicates with the third chamber 126 and the fourth chamber 128. The first port 138, the second port 140, and the third port 142 each open to both end faces of the main body 58 in the X direction. In other words, the first port 138, the second port 140, and the third port 142 each open to the outer surface of the first support portion 20 and the outer surface of the second support portion 22.

[0047] 7 and 8 are schematic diagrams of a chuck system 144. As shown in Figures 7 and 8, the above-described chuck device 10 is provided in the chuck system 144. The chuck system 144 includes the chuck device 10 and a fluid circuit 146. The fluid circuit 146 includes a fluid supply source 148, a supply flow path 150, a switching valve 152, a discharge flow path 154, a discharge port 156, a first circuit portion 158, and a second circuit portion 160.

[0048] The fluid supply source 148 can supply compressed fluid (e.g., high-pressure air). The outlet 156 is provided with a silencer 162. The fluid circuit 146 does not necessarily have to include the silencer 162. The supply flow path 150 guides the compressed fluid supplied from the fluid supply source 148 to the switching valve 152. The outlet flow path 154 guides the compressed fluid discharged from the switching valve 152 to the outlet 156.

[0049] The first circuit portion 158 has a connecting flow path 164, a first flow path 166, a first flow control valve 168, a second flow path 170, a second flow control valve 172, and a third flow control valve 174. The connecting flow path 164 is connected to the switching valve 152. The first flow path 166 and the second flow path 170 are connected to the connecting flow path 164.

[0050] The first flow path 166 connects the connection flow path 164 and the first port 138. The first flow path 166 communicates with the first chamber 122a and the first chamber 122b via the first port 138. A first flow control valve 168 is provided in the first flow path 166. The first flow control valve 168 performs meter-out control to adjust the flow rate of compressed fluid discharged from the first chamber 122a and the first chamber 122b of the chuck device 10. The first flow control valve 168 has a throttle portion 178 and a check valve 180. The throttle portion 178 and the check valve 180 are provided in parallel. The throttle portion 178 is, for example, a variable throttle portion that can adjust the flow rate of fluid discharged from the chuck device 10. The check valve 180 allows the flow of compressed fluid in a direction from the switching valve 152 toward the chuck device 10 and prevents the flow of compressed fluid in a direction from the chuck device 10 toward the switching valve 152 .

[0051] The second flow path 170 connects the connection flow path 164 and the second port 140. The second flow path 170 communicates with the second chamber 124 via the second port 140. A second flow control valve 172 and a third flow control valve 174 are provided in series with the second flow path 170. The second flow control valve 172 performs meter-in control to adjust the flow rate of compressed fluid introduced into the second chamber 124 of the chuck device 10. The second flow control valve 172 has a throttle portion 182 and a check valve 184. The throttle portion 182 and the check valve 184 are provided in parallel. The throttle portion 182 is, for example, a variable throttle portion that can adjust the flow rate introduced into the chuck device 10. The check valve 184 blocks the flow of compressed fluid from the switching valve 152 toward the chuck device 10 and allows the flow of compressed fluid from the chuck device 10 toward the switching valve 152.

[0052] The third flow control valve 174 performs meter-out control to adjust the flow rate of the compressed fluid discharged from the second chamber 124 of the chuck device 10. The third flow control valve 174 has a configuration similar to that of the first flow control valve 168. Therefore, a description of the configuration of the third flow control valve 174 will be omitted.

[0053] The second circuit portion 160 has a third flow path 186 and a fourth flow control valve 188. The third flow path 186 connects the switching valve 152 and the third port 142. The third flow path 186 communicates with the third chamber 126 and the fourth chamber 128 via the third port 142. The fourth flow control valve 188 is provided in the third flow path 186. The fourth flow control valve 188 performs meter-out control to adjust the flow rates of compressed fluid discharged from the third chamber 126 and the fourth chamber 128 of the chuck device 10. The fourth flow control valve 188 has a configuration similar to that of the first flow control valve 168. Therefore, a description of the configuration of the fourth flow control valve 188 will be omitted.

[0054] The first flow path 166, the second flow path 170, and the third flow path 186 are connected to the first port 138, the second port 140, and the third port 142, respectively, via pipe joints (not shown). In this embodiment, the first port 138, the second port 140, and the third port 142 each open to the outer surface of the first support portion 20 and the outer surface of the second support portion 22, respectively (see FIGS. 1, 2, and 6). Therefore, the pipe joints can be disposed adjacent to the first support portion 20 or the second support portion 22 depending on the environment in which the chuck device 10 is used.

[0055] The switching valve 152 is a solenoid valve that can be switched between a first state and a second state. As shown in Fig. 7 , in the first state, the switching valve 152 interconnects the supply flow path 150 and the third flow path 186, and interconnects the discharge flow path 154 and the connecting flow path 164. As shown in Fig. 8 , in the second state, the switching valve 152 interconnects the supply flow path 150 and the connecting flow path 164, and interconnects the discharge flow path 154 and the third flow path 186. The switching valve 152 is, for example, but is not limited to, an electromagnetic pilot switching valve.

[0056] Next, we will explain the operation of the chucking device 10. Figures 9 to 12 are explanatory views of the operation of the chucking device 10. As shown in Figure 9, in the initial state, the first gripping member 300 and the second gripping member 302 are attached to the chucking device 10.

[0057] When the workpiece W is gripped by the chuck device 10, the first movable part 14 and the second movable part 16 are moved in directions away from each other to widen the gap between the first gripping member 300 and the second gripping member 302. Specifically, as shown in FIG. 7 , the switching valve 152 is set to the first state. Then, the compressed fluid supplied from the fluid supply source 148 to the supply flow path 150 is guided to the third flow path 186 via the switching valve 152. The compressed fluid guided to the third flow path 186 flows through the check valve 180 of the fourth flow control valve 188, and is then guided to the third chamber 126 and the fourth chamber 128 via the third port 142.

[0058] The compressed fluid introduced into the third chamber 126 presses the outer piston 52 in the X1 direction. The compressed fluid introduced into the fourth chamber 128 presses the inner piston 50 in the X1 direction and presses the second piston portion 38 in the X2 direction. This causes the first piston portion 36 (the outer piston 52 and the inner piston 50) to move in the X1 direction, and accordingly, the first movable portion 14 and the first gripping member 300 move in the X1 direction. Furthermore, the second piston portion 38 moves in the X2 direction, and accordingly, the second movable portion 16 and the second gripping member 302 move in the X2 direction. This causes the first gripping member 300 and the second gripping member 302 to move away from each other.

[0059] When the first piston portion 36 moves in the X1 direction, the compressed fluid in the first chamber 122a and the compressed fluid in the first chamber 122b are guided to the first flow path 166 via the first port 138. The compressed fluid guided to the first flow path 166 flows through the throttle portion 178 of the first flow control valve 168 and into the connecting flow path 164.

[0060] When the second piston portion 38 moves in the X2 direction, the compressed fluid in the second chamber 124 is guided to the second flow path 170 via the second port 140. The compressed fluid guided to the second flow path 170 flows through the throttle portion 178 of the third flow control valve 174 and the check valve 184 of the second flow control valve 172, and is then guided to the connecting flow path 164. The compressed fluid guided to the connecting flow path 164 is then discharged to the outside from the discharge port 156 via the switching valve 152 and the discharge flow path 154. In this embodiment, the moving speeds of the first piston portion 36 and the second piston portion 38 can be adjusted by the meter-out control first flow control valve 168 and the meter-out control third flow control valve 174.

[0061] Next, as shown in Fig. 9, the workpiece W is positioned between the first gripping member 300 and the second gripping member 302. Thereafter, as shown in Fig. 8, the switching valve 152 is switched to the second state. Then, the compressed fluid supplied from the fluid supply source 148 to the supply flow path 150 is guided to the connecting flow path 164 via the switching valve 152. The compressed fluid guided to the connecting flow path 164 is divided and flows into the first flow path 166 and the second flow path 170.

[0062] The compressed fluid flowing into the first flow path 166 flows through the check valve 180 of the first flow control valve 168 and is then guided to the first chamber 122a and the first chamber 122b via the first port 138. The compressed fluid guided into the second flow path 170 flows through the throttle portion 182 of the second flow control valve 172 and the check valve 180 of the third flow control valve 174 and is then guided to the second chamber 124 via the second port 140. In this case, because the second flow path 170 is provided with the meter-in controlled second flow control valve 172, the compressed fluid is guided to the first chamber 122a and the first chamber 122b before being guided to the second chamber 124. In other words, the timing at which the compressed fluid is introduced into the first chamber 122a and the first chamber 122b is earlier than the timing at which the compressed fluid is introduced into the second chamber 124.

[0063] The compressed fluid introduced into the first chamber 122a presses the outer piston 52 in the X2 direction. The compressed fluid supplied to the first chamber 122b presses the inner piston 50 in the X2 direction. This causes the first piston portion 36 (outer piston 52 and inner piston 50) to move in the X2 direction, and accordingly, the first movable portion 14 and the first gripping member 300 move in the X2 direction (first direction). Furthermore, the compressed fluid introduced into the second chamber 124 presses the second piston portion 38 in the X1 direction. This causes the second piston portion 38 to move in the X1 direction, and accordingly, the second movable portion 16 and the second gripping member 302 move in the X1 direction (second direction).

[0064] In this embodiment, the second piston portion 38 starts to move after the first piston portion 36 starts to move. In addition, since the first thrust of the first piston portion 36 is greater than the second thrust of the second piston portion 38, the moving speed of the first piston portion 36 is faster than the moving speed of the second piston portion 38.

[0065] When the first movable part 14 and the first gripping member 300 move in the X2 direction in conjunction with the movement of the first piston part 36, the first gripping member 300 comes into contact with the workpiece W, as shown in FIG. 10. Furthermore, the contact piece 102 attached to the first movable part 14 comes into contact with the adjuster bolt 108, thereby preventing the first movable part 14 from moving in the X2 direction (see FIG. 11). In other words, the first movable part 14 reaches the movement limit position. In other words, the first piston part 36 is located at the stroke end.

[0066] When the first movable part 14 reaches its travel limit position, the second movable part 16 has not yet reached its travel limit position. Therefore, when the movement of the first movable part 14 and the first gripping member 300 is stopped, the second movable part 16 and the second gripping member 302 move in the X1 direction. As shown in FIG. 12 , the second gripping member 302 contacts the workpiece W and presses the workpiece W in the X1 direction. As a result, the workpiece W is clamped between the first gripping member 300 and the second gripping member 302. In this case, because the first thrust of the first piston part 36 is greater than the second thrust of the second piston part 38, the workpiece W pushed by the second gripping member 302 does not return in the X1 direction. This allows the gripping position of the workpiece W in the movable direction (X direction) to be constant. Furthermore, in this embodiment, the position at which the workpiece W is gripped (the travel limit position of the first movable part 14) can be appropriately adjusted by adjusting the contact position between the contact piece 102 and the adjuster bolt 108. Therefore, the workpiece W can be held in a balanced manner at the center position of the chuck device 10 in the X direction.

[0067] (Modification) Fig. 13 is a cross-sectional view of the chuck device 10 equipped with a cylinder device 18a according to a modification. As shown in Fig. 13, the chuck device 10 may be equipped with the cylinder device 18a according to the first modification instead of the cylinder device 18. In this modification, the same reference numerals are used to designate components that are substantially the same as those described above, and detailed descriptions thereof will be omitted.

[0068] According to this embodiment, the cylinder device 18a is disposed between the first movable part 14 and the second movable part 16 in the movement direction of the first movable part 14 and the second movable part 16. This prevents the first movable part 14, the second movable part 16, and the cylinder device 18a from overlapping with each other in the height direction (Z direction) of the chuck device 10, thereby reducing the height dimension of the chuck device 10. Furthermore, the maximum opening width of the first movable part 14 and the second movable part 16 can be increased.

[0069] The cylinder device 18a includes a cylinder body 28, a first end member 30, a second end member 32, a first piston portion 36a, a second piston portion 38, a first rod 40a, and a second rod 42. Note that the cylinder device 18a does not include the intermediate wall portion 34 described above. In this case, the cylinder device 18a is provided with a first chamber 190, a second chamber 124, and a third chamber 192. The first chamber 190 is formed between the first piston portion 36a and the first end member 30. The second chamber 124 is formed between the second piston portion 38 and the second end member 32. The third chamber 192 is formed between the first piston portion 36a and the second piston portion 38.

[0070] The first piston portion 36a is configured similarly to the above-described inner piston 50. In a modified example, the first piston portion 36a does not include the above-described outer piston 52. The outer diameter of the first rod 40a is smaller than the outer diameter of the second rod 42. Therefore, the area of ​​the first pressure-receiving surface 130 of the first piston portion 36a is larger than the area of ​​the second pressure-receiving surface 136 of the second piston portion 38. Therefore, the first thrust of the first piston portion 36a in the X2 direction (first direction) is larger than the second thrust of the second piston portion 38 in the X1 direction (second direction).

[0071] The cylinder device 18a according to the modified example provides the same effects as the cylinder device 18 described above.

[0072] This embodiment is not limited to the above-described configuration. The chuck device 10 does not necessarily have to have the adjuster attachment portion 86.

[0073] The following additional notes are further disclosed regarding the above embodiment.

[0074] (Supplementary Note 1) The chuck device (10) of the present disclosure includes a first movable part (14) and a second movable part (16) for gripping a workpiece (W), and a cylinder device (18, 18a) for moving the first movable part and the second movable part toward and away from each other, and the cylinder device is disposed between the first movable part and the second movable part in a movable direction in which the first movable part and the second movable part move toward and away from each other.

[0075] With this configuration, the first and second movable parts and the cylinder device do not overlap each other in the height direction of the chuck device, which reduces the height dimension of the chuck device and also increases the maximum opening width of the first and second movable parts.

[0076] (Supplementary Note 2) In the chuck device described in Supplementary Note 1, the cylinder device includes a cylinder body (28) having a cylinder hole (44) extending in the movable direction, a first piston portion (36, 36a) and a second piston portion (38) slidably arranged in the cylinder hole, a first rod (40, 40a) connecting the first piston portion and the first movable portion to each other, and a second rod (42) connecting the second piston portion and the second movable portion to each other, and the first piston portion and the second piston portion may be arranged side by side in the movable direction.

[0077] With this configuration, the diameters (outer diameters) of the first piston portion and the second piston portion can be made relatively large while keeping the size of the cylinder device small in the directions perpendicular to the moving direction (the height direction and width direction of the chuck device). In other words, the thrust of the first piston portion and the second piston portion can be increased while making the cylinder device compact.

[0078] (Supplementary Note 3) In the chuck device described in Supplementary Note 2, a first thrust of the first piston portion in a first direction in which the first movable portion approaches the second movable portion may be greater than a second thrust of the second piston portion in a second direction in which the second movable portion approaches the first movable portion.

[0079] With this configuration, because the first thrust is greater than the second thrust, the first piston section can start moving in the first direction before the second piston section starts moving in the second direction. Also, the speed at which the first piston section moves in the first direction can be made faster than the speed at which the second piston section moves in the second direction. Furthermore, the second piston section can press the workpiece in the second direction when the first piston section has moved to the stroke end. That is, the workpiece can be gripped when the first piston section is positioned at the stroke end. This allows the gripping position of the workpiece to be constant in the moving direction.

[0080] (Supplementary Note 4) In the chuck device described in Supplementary Note 3, the first piston portion has a first pressure-receiving surface (130) that is pressed in the first direction by the compressed fluid, and the second piston portion has a second pressure-receiving surface (136) that is pressed in the second direction by the compressed fluid, and the area of ​​the first pressure-receiving surface may be larger than the area of ​​the second pressure-receiving surface.

[0081] According to this configuration, the first thrust can be made larger than the second thrust with a simple configuration.

[0082] (Supplementary Note 5) In the chuck device described in Supplementary Note 4, an intermediate wall portion (34) that divides the cylinder hole in the axial direction of the cylinder body is attached to the cylinder body, the first rod is inserted into the intermediate wall portion, and the first piston portion may include an inner piston (50) attached to the first rod while being located between the intermediate wall portion and the second piston portion, and an outer piston (52) attached to the first rod while being located in the opposite direction from the inner piston with respect to the intermediate wall portion.

[0083] According to this configuration, the area of ​​the first pressure-receiving surface can be made larger than the area of ​​the second pressure-receiving surface with a simple configuration.

[0084] (Appendix 6) In the chuck device described in Appendix 4, the outer diameter of the first rod may be formed smaller than the outer diameter of the second rod so that the area of ​​the first pressure-receiving surface is larger than the area of ​​the second pressure-receiving surface.

[0085] According to this configuration, the area of ​​the first pressure-receiving surface can be made larger than the area of ​​the second pressure-receiving surface with a simple configuration.

[0086] (Supplementary Note 7) The chuck device according to any one of Supplementary Notes 3 to 6 may include an adjuster mounting portion (86) for mounting an adjuster (84) that is in contact with the first movable portion and is capable of adjusting the movement limit position of the first movable portion in the first direction.

[0087] According to this configuration, the gripping position of the workpiece can be adjusted by adjusting the movement limit position of the first movable part in the first direction.

[0088] (Appendix 8) The chuck device according to any one of Appendices 2 to 7 includes a first support portion (20) protruding from the cylinder body in a direction opposite to the second movable portion, a first guide portion (24) provided on the first support portion to guide the first movable portion, a second support portion (22) protruding from the cylinder body in a direction opposite to the first movable portion, and a second guide portion (26) provided on the second support portion to guide the second movable portion, and the first support portion, the cylinder body, and the second support portion may be integrally molded.

[0089] With this configuration, the first support portion, the cylinder body, and the second support portion are integrally molded, which reduces the number of parts and weight of the chuck device compared to when these components are formed as separate parts.

[0090] (Supplementary Note 9) In the chuck device described in Supplementary Note 8, ports (138, 140, 142) for circulating compressed fluid for driving the cylinder device may open on each of the outer surfaces of the first support portion and the second support portion.

[0091] With this configuration, the member (for example, a pipe joint) connected to the port can be disposed adjacent to the first support portion or the second support portion depending on the environment in which the chuck device is used.

[0092] (Supplementary Note 10) A chuck system (144) of the present disclosure includes the chuck device described in any one of Supplementary Notes 3 to 9, and a fluid circuit (146) for supplying compressed fluid to the chuck device for driving the cylinder device.

[0093] According to this configuration, a chuck system including the chuck device described in any one of Supplementary Notes 3 to 9 can be obtained.

[0094] (Supplementary Note 11) In the chuck system described in Supplementary Note 10, the cylinder device may have a first chamber (122a, 122b, 190) and a second chamber (124), the first piston portion is pressed in a first direction in which the first movable portion approaches the second movable portion by introducing compressed fluid into the first chamber, the second piston portion is pressed in a second direction in which the second movable portion approaches the first movable portion by introducing compressed fluid into the second chamber, the fluid circuit may include a first flow path (166) communicating with the first chamber and a second flow path (170) communicating with the second chamber, a first flow control valve (168) that performs meter-out control is provided in the first flow path, and a second flow control valve (172) that performs meter-in control and a third flow control valve (174) that performs meter-out control may be connected in series in the second flow path.

[0095] With this simple configuration, compressed fluid can be introduced into the first chamber before the second chamber, which allows the timing at which the first piston starts moving in the first direction to be earlier than the timing at which the second piston starts moving in the second direction.

[0096] Although the present disclosure has been described in detail, the present disclosure is not limited to the individual embodiments described above. Various additions, substitutions, modifications, partial deletions, etc. are possible in these embodiments without departing from the gist of the present disclosure or the spirit of the present disclosure derived from the content of the claims and their equivalents. These embodiments can also be implemented in combination. For example, in the above-described embodiments, the order of each operation and the order of each process are shown as examples and are not limited to these. The same applies when numerical values ​​or mathematical expressions are used in the description of the above-described embodiments.

Claims

1. A chuck device (10) comprising: a first movable part (14) and a second movable part (16) for gripping a workpiece (W); and a cylinder device (18, 18a) for moving the first movable part and the second movable part toward and away from each other, wherein the cylinder device is disposed between the first movable part and the second movable part in a movable direction in which the first movable part and the second movable part move toward and away from each other.

2. A chuck device according to claim 1, wherein the cylinder device comprises: a cylinder body (28) having a cylinder hole (44) extending in the movable direction; a first piston portion (36, 36a) and a second piston portion (38) slidably arranged in the cylinder hole; a first rod (40, 40a) connecting the first piston portion and the first movable portion to each other; and a second rod (42) connecting the second piston portion and the second movable portion to each other, and the first piston portion and the second piston portion are arranged side by side in the movable direction.

3. A chuck device according to claim 2, wherein the first thrust of the first piston portion in the first direction in which the first movable portion approaches the second movable portion is greater than the second thrust of the second piston portion in the second direction in which the second movable portion approaches the first movable portion.

4. A chuck device according to claim 3, wherein the first piston portion has a first pressure-receiving surface (130) that is pressed in the first direction by the compressed fluid, and the second piston portion has a second pressure-receiving surface (136) that is pressed in the second direction by the compressed fluid, and the area of ​​the first pressure-receiving surface is larger than the area of ​​the second pressure-receiving surface.

5. A chuck device according to claim 4, wherein an intermediate wall portion (34) is attached to the cylinder body to partition the cylinder hole in the axial direction of the cylinder body, the first rod is inserted into the intermediate wall portion, and the first piston portion includes: an inner piston (50) attached to the first rod while being positioned between the intermediate wall portion and the second piston portion, and an outer piston (52) attached to the first rod while being positioned in the opposite direction from the inner piston with respect to the intermediate wall portion.

6. A chuck device according to claim 4, wherein the outer diameter of the first rod is smaller than the outer diameter of the second rod so that the area of ​​the first pressure-receiving surface is larger than the area of ​​the second pressure-receiving surface.

7. A chuck device according to any one of claims 3 to 6, comprising an adjuster mounting portion (86) for mounting an adjuster (84) that contacts the first movable portion and is capable of adjusting the movement limit position of the first movable portion in the first direction.

8. A chuck device according to claim 2, comprising: a first support portion (20) protruding from the cylinder body in a direction opposite to the second movable portion; a first guide portion (24) provided on the first support portion to guide the first movable portion; a second support portion (22) protruding from the cylinder body in a direction opposite to the first movable portion; and a second guide portion (26) provided on the second support portion to guide the second movable portion, wherein the first support portion, the cylinder body, and the second support portion are integrally molded.

9. A chuck device according to claim 8, wherein ports (138, 140, 142) for passing compressed fluid for driving said cylinder device are opened on the outer surface of said first support portion and the outer surface of said second support portion, respectively.

10. A chuck system (144) comprising: a chuck device according to any one of claims 3 to 9; and a fluid circuit (146) for supplying compressed fluid to the chuck device for driving the cylinder device.

11. A chuck system according to claim 10, wherein the cylinder device has a first chamber (122a, 122b, 190) and a second chamber (124), wherein the first piston portion is pressed in a first direction in which the first movable portion approaches the second movable portion when compressed fluid is introduced into the first chamber, and wherein the second piston portion is pressed in a second direction in which the second movable portion approaches the first movable portion when compressed fluid is introduced into the second chamber, and the fluid circuit comprises: a first flow path (166) communicating with the first chamber; and a second flow path (170) communicating with the second chamber, wherein a first flow control valve (168) performing meter-out control is provided in the first flow path, and a second flow control valve (172) performing meter-in control and a third flow control valve (174) performing meter-out control are connected in series to the second flow path.

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