Evaporation boat for vapor deposition, and evaporation boat assembly

Abstract

An evaporation boat (100) for vapor deposition, and an evaporation boat assembly (200). The evaporation boat (100) comprises a melting tank (1) and an evaporation tank (2) which are formed in the evaporation boat (100); the melting tank (1) and the evaporation tank (2) are located on the same side of the evaporation boat (100); the melting tank (1) is communicated with the evaporation tank (2); and liquid in the melting tank (1) is suitable for flowing into the evaporation tank (2).

Description

Evaporation boats and evaporation boat assemblies for vapor deposition

[0001] Cross-references to related applications

[0002] This application is based on and claims priority to Chinese Patent Application No. 202420842298.X, filed on April 22, 2024, the entire contents of which are incorporated herein by reference. Technical Field

[0003] This application relates to the field of vapor deposition technology, and in particular to an evaporation boat for vapor deposition and an evaporation boat assembly having the evaporation boat. Background Technology

[0004] In related technologies, an evaporation boat is used to melt and evaporate the vapor deposition material. The melting and evaporation of the vapor deposition material occur in the same tank. The speed fluctuations, shaking, and melting state of the vapor deposition material during melting will cause disturbance to the liquid surface in the evaporation boat, affecting the evaporation state of the evaporation boat, thus resulting in poor film quality of the vapor deposition by the evaporation boat.

[0005] Summary of the Invention

[0006] This application aims to at least partially address one of the technical problems in the related art.

[0007] Therefore, one objective of this application is to provide an evaporation boat for vapor deposition.

[0008] Another objective of this application is to provide an evaporation boat assembly.

[0009] In a first aspect, embodiments of this application provide an evaporation boat for vapor deposition, comprising:

[0010] The evaporation boat has a melting tank and an evaporation tank, which are located on the same side of the evaporation boat and are connected. The liquid in the melting tank is suitable for flowing into the evaporation tank.

[0011] In the above technical solution, by setting up a melting tank and an evaporation tank, the melting area and evaporation area of ​​the vapor-deposited material can be separated, reducing the risk of instability of the liquid level in the evaporation tank caused by the adjustment or movement of the vapor-deposited material, which is conducive to improving the stability of vapor deposition and thus improving the film quality of vapor deposition.

[0012] Secondly, embodiments of this application also provide an evaporation boat assembly, including multiple evaporation boats, which are the aforementioned evaporation boats for vapor deposition. The multiple evaporation boats are arranged sequentially along a first direction, and the melting tank and evaporation tank of each evaporation boat are arranged along a second direction, with at least two evaporation boats having melting tanks and evaporation tanks arranged in opposite directions.

[0013] In the above technical solution, by arranging multiple evaporation boats of the evaporation boat assembly sequentially along a first direction, and arranging the melting tank and evaporation tank of each evaporation boat along a second direction, with at least two evaporation boats having their melting tank and evaporation tank arranged in opposite directions, the vapor deposition material can be fed along both sides of the second direction. This increases the evaporation area of ​​the evaporation boat assembly along the second direction, thereby increasing the film formation space of the evaporation boat assembly and improving its working efficiency. It also increases the space between two adjacent melting tanks and evaporation tanks, improving heat dissipation between adjacent evaporation boats. With multiple feeding mechanisms arranged on both sides of the evaporation boat assembly along the second direction, the operating space for personnel can be increased when adjusting the vapor deposition material or performing maintenance and inspection of the evaporation boat, facilitating maintenance and inspection of the evaporation boat assembly and thus extending its service life.

[0014] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0015] Figure 1 is a schematic diagram of the structure of an evaporation boat assembly provided in some embodiments of this application;

[0016] Figure 2 is a top view of an evaporation boat assembly provided in some embodiments of this application;

[0017] Figure 3 is a cross-sectional view at point A in Figure 2;

[0018] Figure 4 is a schematic diagram of the structure of an evaporation boat provided in some embodiments of this application;

[0019] Figure 5 is a top view of an evaporation boat provided in some embodiments of this application;

[0020] Figure 6 is a cross-sectional view at point B in Figure 5. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0022] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used in the description of this application is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms "comprising" and "having," and any variations thereof, in the description, claims, and accompanying drawings of this application are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the description, claims, or accompanying drawings of this application are used to distinguish different objects, not to describe a specific order or hierarchy.

[0023] In this application, the reference to "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment that is mutually exclusive with other embodiments.

[0024] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "attachment" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0025] In this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, in this application, the character " / " generally indicates that the preceding and following related objects have an "or" relationship.

[0026] In the embodiments of this application, the same reference numerals denote the same components, and for the sake of brevity, detailed descriptions of the same components are omitted in different embodiments. It should be understood that the thickness, length, width, and other dimensions of various components in the embodiments of this application shown in the accompanying drawings, as well as the overall thickness, length, width, and other dimensions of the integrated device, are merely illustrative and should not constitute any limitation on this application.

[0027] In this application, "multiple" means two or more (including two).

[0028] Evaporation deposition is a process that uses heat to vaporize metal materials, which are then deposited onto the surface of the object to form a relatively uniform metal film. Before vapor deposition, the workpiece needs to be prepared, including grinding, degreasing, and cleaning, to ensure surface smoothness and cleanliness. During vapor deposition, the object is placed in the deposition equipment. A vacuum chamber within the equipment is created using a pumping system to achieve a certain degree of vacuum. The deposition material is then heated by a power system, causing it to evaporate and become gaseous. As the deposition material gradually turns into a gas during heating, it is deposited onto the surface of the object under vacuum, forming a metal film.

[0029] Vapor deposition technology has wide applications in many fields. In optics, vapor deposition can alter the transmission, reflection, and refraction properties of optical components such as lenses and filters. In electronics, vapor-deposited metals or alloys can improve the current carrying capacity and conductivity of microelectronic devices. In the chemical industry, vapor-deposited anti-corrosion layers can protect pipelines, containers, and other chemical equipment from corrosion by chemicals. In the mechanical industry, vapor-deposited thin films can enhance the hardness, wear resistance, and corrosion resistance of parts.

[0030] In the existing technology, an evaporation boat is used to melt and evaporate the vapor deposition material. The melting and evaporation of the vapor deposition material are both carried out in the same tank. The speed fluctuation, shaking and melting state of the vapor deposition material during melting will cause disturbance to the liquid surface in the evaporation boat, affecting the evaporation state of the evaporation boat, thus resulting in poor film quality of vapor deposition by the evaporation boat.

[0031] Based on the above considerations, in order to solve the technical problem of poor film quality caused by speed fluctuations, shaking, and disturbances to the liquid surface inside the evaporation boat during the melting of the vapor deposition material, this application proposes an evaporation boat for vapor deposition, comprising: an evaporation boat having a melting tank and an evaporation tank, the evaporation boat and the evaporation tank being located on the same side of the evaporation boat, the evaporation boat and the evaporation tank being connected, and the liquid in the melting tank being suitable for flowing into the evaporation tank.

[0032] In such an evaporation boat, by setting up a melting tank and an evaporation tank, the melting area and evaporation area of ​​the vapor-deposited material can be separated, reducing the risk of instability of the liquid level in the evaporation tank caused by the adjustment or movement of the vapor-deposited material. This is beneficial to improving the stability of vapor deposition, thereby improving the film quality of vapor deposition.

[0033] The following describes an evaporation boat 100 for vapor deposition according to an embodiment of this application, with reference to Figures 1-6. As an example, the vapor deposition material can be uniformly fed by a wire spool. The evaporation boat 100 may have a main and driven wheel of a feeding mechanism above it. The vapor deposition material can be pressed and melted by the main and driven wheel and then transported to the evaporation boat 100. The evaporation boat 100 can carry the high-temperature molten vapor deposition material. The vapor deposition material can be a metal wire. This application uses aluminum wire as an example for illustration.

[0034] Referring to Figures 4-6, the evaporation boat 100 according to an embodiment of this application includes: the evaporation boat 100 has a melting tank 1 and an evaporation tank 2, the melting tank 1 and the evaporation tank 2 are located on the same side of the evaporation boat 100, the melting tank 1 and the evaporation tank 2 are connected, and the liquid in the melting tank 1 is suitable for flowing into the evaporation tank 2.

[0035] The evaporation boat 100 has a melting tank 1 and an evaporation tank 2. The vapor deposition material is melted into a liquid state in the melting tank 1, and the melted liquid vapor deposition material flows into the evaporation tank 2. The liquid vapor deposition material can evaporate in the evaporation tank 2, which is conducive to the vapor deposition of the vapor deposition material into a film.

[0036] Melting tank 1 and evaporation tank 2 are located on the same side of evaporation boat 100. As an example, along the thickness direction of evaporation boat 100, which is the X direction in Figure 6, evaporation boat 100 has two sides, an upper side and a lower side. Melting tank 1 and evaporation tank 2 can both be located on the upper side of evaporation boat 100. The upper end of melting tank 1 is an open end, and the upper end of evaporation tank 2 is also an open end.

[0037] As some embodiments of this application, the melting tank 1 and the evaporation tank 2 are connected, and a flow hole 41 can be provided between the melting tank 1 and the evaporation tank 2. The flow hole 41 connects the melting tank 1 and the evaporation tank 2, and the liquid (i.e. the liquid vapor deposition material) in the melting tank 1 can flow into the evaporation tank 2 through the flow hole 41.

[0038] As some embodiments of this application, the melting tank 1 and the evaporation tank 2 are connected, and a flow channel can be provided between the melting tank 1 and the evaporation tank 2. The flow channel connects the melting tank 1 and the evaporation tank 2, and the liquid (i.e., liquid vapor deposition material) in the melting tank 1 can flow into the evaporation tank 2 through the flow channel.

[0039] As some embodiments of this application, there are no specific limitations on the connection method between the melting tank 1 and the evaporation tank 2. The specific connection method can be selected according to requirements, as long as the liquid in the melting tank 1 can flow into the evaporation tank 2. This facilitates the melting of the vapor deposition material in the melting tank 1 first, followed by the flow of the molten liquid vapor deposition material into the evaporation tank 2, where it evaporates. This reduces the risk of surface disturbance in the evaporation tank 2 caused by adjusting or moving the vapor deposition material, improves the stability of the vapor deposition process, and thus helps to improve the quality of the vapor deposition film.

[0040] In the above technical solution, by setting up a melting tank 1 and an evaporation tank 2, the melting area and evaporation area of ​​the vapor-deposited material can be separated, reducing the risk of instability of the liquid level in the evaporation tank 2 caused by the adjustment or movement of the vapor-deposited material, which is conducive to improving the stability of vapor deposition and thus improving the film quality of vapor deposition.

[0041] According to some embodiments of this application, as shown in FIG4, the evaporation boat 100 includes: an evaporation boat body 3 and an annular limiting wall 4. An evaporation groove 2 is formed on the upper surface of the evaporation boat body 3, and the annular limiting wall 4 is disposed on the upper surface of the evaporation boat body 3 to define a melting groove 1.

[0042] The evaporation boat 100 may include an evaporation boat body 3 and an annular limiting wall 4. The evaporation boat body 3 and the annular limiting wall 4 may be integrally formed, or the annular limiting wall 4 may be bonded to the evaporation boat body 3. However, this application is not limited to these methods. As long as the annular limiting wall 4 is provided on the evaporation boat body 3, this application will use the integral forming of the evaporation boat body 3 and the annular limiting wall 4 as an example for illustration. Integral forming can improve the connection reliability of the evaporation boat body 3 and the annular limiting wall 4, reduce the risk of separation between the evaporation boat body 3 and the annular limiting wall 4, and help to improve the service life of the evaporation boat 100. It can also reduce the risk of leakage of molten liquid vapor-deposited material from between the evaporation boat body 3 and the annular limiting wall 4, thereby improving the working stability of the evaporation boat 100.

[0043] An evaporation tank 2 is formed on the upper surface of the evaporation boat body 3. As an example, a limiting ring is provided on the upper surface of the evaporation boat body 3, and the limiting ring and the upper surface of the evaporation boat body 3 together define the evaporation tank 2. As another example, the evaporation tank 2 can be an inwardly recessed groove on the upper surface of the evaporation boat body 3. This application uses the inwardly recessed groove on the upper surface of the evaporation boat body 3 as an example for description. The molten liquid vapor deposition material can flow into the evaporation tank 2 and evaporate in the evaporation tank 2, which helps to stabilize the liquid vapor deposition material in the evaporation tank 2, thereby improving the stability of vapor deposition and thus improving the film quality of vapor deposition. An annular limiting wall 4 is provided on the upper surface of the evaporation boat body 3 to define the melting tank 1. The vapor deposition material melts into a liquid state in the melting tank 1, which can reduce the risk of liquid surface disturbance in the evaporation tank 2 caused by the vapor deposition material during the melting process.

[0044] In the above technical solution, by forming an evaporation tank 2 on the upper surface of the evaporation boat body 3, and setting an annular limiting wall 4 on the upper surface of the evaporation boat body 3 to limit the melting tank 1, the arrangement of the evaporation tank 2 and the melting tank 1 is realized. This is beneficial for the vapor deposition material to melt into a liquid state in the melting tank 1, and then flow into the evaporation tank 2 and evaporate in the evaporation tank 2. This reduces the risk of liquid surface disturbance in the evaporation tank 2 caused by the vapor deposition material during the melting process, improves the stability of vapor deposition, and thus helps to improve the film quality of vapor deposition.

[0045] According to some embodiments of this application, as shown in FIG4, the annular limiting wall 4 is formed with a flow hole 41, and the liquid in the melting tank 1 is adapted to flow into the evaporation tank 2 through the flow hole 41.

[0046] The annular limiting wall 4 may have a flow hole 41, through which liquid in the melting tank 1 can flow into the evaporation tank 2. The annular limiting wall 4 may have, but is not limited to, polygonal or circular flow holes 41. This application uses an example of an annular limiting wall 4 having a rectangular flow hole 41. The rectangular flow hole 41 in the annular limiting wall 4 facilitates the flow of the molten liquid vapor deposition material in the melting tank 1 into the evaporation tank 2, which is beneficial to improving the continuity and stability of the vapor deposition process, thereby improving the working efficiency and film formation effect of the evaporation boat 100.

[0047] In the above technical solution, by forming a flow hole 41 in the limiting wall, the liquid in the melting tank 1 can flow into the evaporation tank 2 through the flow hole 41, which is beneficial to improve the continuity and stability of the evaporation process, thereby improving the working efficiency and film formation effect of the evaporation boat 100.

[0048] According to some embodiments of this application, as shown in FIG4, a flow hole 41 is formed on the wall of the annular limiting wall 4 facing the evaporation tank 2 along the arrangement direction of the melting tank 1 and the evaporation tank 2.

[0049] In one example, along the arrangement direction of the melting tank 1 and the evaporation tank 2, the melting tank 1 and the evaporation tank 2 are arranged along the length direction of the evaporation boat 100, i.e., the Y direction in Figure 4. The annular limiting wall 4 has a flow hole 41 formed on the wall portion facing the evaporation tank 2. The annular limiting wall 4 can have four wall portions that are opposite each other in pairs. Among the four wall portions of the annular limiting wall 4, the wall portion facing the evaporation tank 2 (that is, the wall portion closest to the evaporation tank 2) has a flow hole 41. This allows the liquid in the melting tank 1 to flow into the evaporation tank 2 through the flow hole 41 to have a shorter flow distance. This helps to reduce the time for the liquid to flow from the melting tank 1 into the evaporation tank 2, which is beneficial to further improve the continuity and stability of the vapor deposition process, thereby improving the working efficiency and film formation effect of the evaporation boat 100.

[0050] In the above technical solution, by forming a flow hole 41 on the wall of the evaporation tank 2 facing the melting tank 1 along the arrangement direction of the melting tank 1 and the evaporation tank 2, the flow distance of the liquid in the melting tank 1 into the evaporation tank 2 through the flow hole 41 is shorter, which helps to reduce the time for the liquid to flow from the melting tank 1 into the evaporation tank 2, and is conducive to further improving the continuity and stability of the vapor deposition process, thereby improving the working efficiency and film formation effect of the evaporation boat 100.

[0051] According to some embodiments of this application, as shown in FIG4, the evaporation boat 100 further includes: a flow guide 5, which is disposed on the upper surface of the evaporation boat body 3 and located between the melting tank 1 and the evaporation tank 2. The flow guide 5 forms a flow guide groove 51, which connects the flow hole 41 and the evaporation tank 2.

[0052] The evaporation boat 100 may further include a flow guide 5, which is located on the upper surface of the evaporation boat body 3 and between the melting tank 1 and the evaporation tank 2. The flow guide 5 can be connected to both the evaporation boat body 3 and the annular limiting wall 4. As an example, the flow guide 5, the evaporation boat body 3, and the annular limiting wall 4 are integrally formed. The flow guide 5 can guide the liquid vapor deposition material, facilitating the smooth flow of the molten liquid vapor deposition material in the melting tank 1 into the evaporation tank 2. The flow guide section 5 has a flow guide groove 51, which connects the flow hole 41 and the evaporation tank 2. The liquid in the melting tank 1 first flows into the flow guide groove 51 through the flow hole 41, and then flows into the evaporation tank 2 through the flow guide groove 51. The liquid in the melting tank 1 flows in the flow guide groove 51, which reduces the risk of liquid vapor deposition material overflowing along the edge of the flow guide section 5. This facilitates the smooth flow of the molten liquid in the melting tank 1 into the evaporation tank 2, further improving the continuity and stability of the vapor deposition process, thereby further improving the working efficiency and film formation effect of the evaporation boat 100.

[0053] Furthermore, the flow guide 5 is located on the upper surface of the evaporation boat body 3 and between the melting tank 1 and the evaporation tank 2. This allows the flow guide 5 to act as a reinforcing rib, which helps to strengthen the connection between the annular limiting wall 4 and the evaporation boat body 3, and reduces the risk of cracking or even breakage of the annular limiting wall 4 and the evaporation boat body 3 due to thermal stress. This, in turn, helps to extend the service life of the evaporation boat 100.

[0054] In the above technical solution, by placing the guide portion 5 on the upper surface of the evaporation boat body 3 and located between the melting tank 1 and the evaporation tank 2, the guide portion 5 forms a guide channel 51, which connects the flow hole 41 and the evaporation tank 2. This allows the molten liquid vapor deposition material in the melting tank 1 to flow sequentially into the evaporation tank 2 through the flow hole 41 and the guide portion 5, which helps to further improve the continuity and stability of the vapor deposition process, thereby further improving the working efficiency and film formation effect of the evaporation boat 100. The guide portion 5, located on the upper surface of the evaporation boat body 3 and between the melting tank 1 and the evaporation tank 2, also acts as a reinforcing rib, which helps to strengthen the connection strength between the annular limiting wall 4 and the evaporation boat body 3, reducing the risk of cracking or even breakage of the annular limiting wall 4 and the evaporation boat body 3 due to thermal stress, thus extending the service life of the evaporation boat 100.

[0055] According to some embodiments of this application, as shown in FIG4, along the arrangement direction of the melting tank 1 and the evaporation tank 2, the guide channel 51 has a first open end 511 and a second open end 512 opposite to each other. The first open end 511 corresponds to the flow hole 41, and the second open end 512 communicates with the evaporation tank 2.

[0056] Along the arrangement direction of the melting tank 1 and the evaporation tank 2, which is the length direction of the evaporation boat 100 (Y direction in Figure 4), the guide channel 51 has a first open end 511 and a second open end 512. The first open end 511 corresponds to the flow hole 41, facilitating the flow of the molten liquid vapor deposition material in the melting tank 1 through the flow hole 41 and the first open end 511 into the guide channel 51. The second open end 512 is connected to the evaporation tank 2, allowing the liquid vapor deposition material guided by the guide channel 51 to flow into the evaporation tank 2 through the second open end 512, thereby enabling the liquid vapor deposition material to evaporate and form a film in the evaporation tank 2.

[0057] In the above technical solution, by making the guide groove 51 have a first open end 511 and a second open end 512, and the first open end 511 corresponds to the flow hole 41, and the second open end 512 is connected to the evaporation tank 2, the guide groove 51 is connected to the flow hole 41 and the evaporation tank 2, so that the liquid vapor deposition material molten in the melting tank 1 can flow into the evaporation tank 2 in sequence through the flow hole 41, the first open end 511, the guide groove 51 and the second open end 512, so that the liquid vapor deposition material can evaporate into a film in the evaporation tank 2.

[0058] According to some embodiments of this application, as shown in FIG4, the bottom wall of the guide channel 51 is constructed as a guide slope 513, which is suitable for guiding liquid to the evaporation tank 2.

[0059] The bottom wall of the guide channel 51 can be constructed as a guide slope 513. The guide slope 513 can convert the gravitational potential energy of the liquid into kinetic energy, thereby guiding the liquid to the evaporation tank 2. In this application, the guide slope 513 can give the molten liquid vapor deposition material in the melting tank 1 a certain kinetic energy, increase the flow speed of the liquid vapor deposition material, facilitate the smooth flow of the molten liquid vapor deposition material in the melting tank 1 into the evaporation tank 2, and also help the liquid vapor deposition material to spread evenly in the evaporation tank 2, improve the evaporation efficiency, and thus allow the liquid vapor deposition material to evaporate and form a film in the evaporation tank 2. Furthermore, in the evaporation tank 2, the molten liquid vapor deposition material can react with the evaporation boat 100 to generate impurities. By setting the guide slope 513, the molten liquid vapor deposition material flows into the evaporation tank 2 through the guide slope 513, which helps to flush the impurities in the evaporation tank 2 to the vicinity of the tank wall, reduce the risk of impurities affecting the stability of the liquid, and further improve the film formation effect of the evaporation boat 100.

[0060] In the above technical solution, by constructing the bottom wall of the guide channel 51 as a guide slope 513, and the guide slope 513 guides the liquid to the evaporation tank 2, it is beneficial to convert the gravitational potential energy of the molten liquid vapor deposition material in the melting tank 1 into kinetic energy, increase the flow speed of the liquid vapor deposition material, facilitate the smooth flow of the molten liquid vapor deposition material in the melting tank 1 into the evaporation tank 2, and also facilitate the uniform spread of the liquid vapor deposition material in the evaporation tank 2, improve the evaporation efficiency, so that the liquid vapor deposition material can evaporate into a film in the evaporation tank 2, and also wash the impurities in the evaporation tank 2 to the vicinity of the tank wall of the evaporation tank 2, which is beneficial to further improve the film formation effect of the evaporation boat 100.

[0061] According to some embodiments of this application, as shown in FIG4, the angle between the guide slope 513 and the upper surface of the evaporation boat body 3 is greater than or equal to 1° and less than or equal to 3°.

[0062] The upper surface of the evaporation boat body 3 can be a plane. The angle between the guide slope 513 and the upper surface of the evaporation boat body 3 is greater than or equal to 1° and less than or equal to 3°. That is to say, the angle between the guide slope 513 and the upper surface of the evaporation boat body 3 can be any value between 1° and 3°. The angle between the guide slope 513 and the upper surface of the evaporation boat body 3 can be, but is not limited to, 1°, 2° or 3°. This setting can reduce the risk that the liquid in the melting tank 1 cannot flow smoothly into the evaporation tank 2 due to the angle between the guide slope 513 and the upper surface of the evaporation boat body 3 being too small. It can also reduce the risk of the liquid disturbing the liquid in the evaporation tank 2 due to the angle between the guide slope 513 and the upper surface of the evaporation boat body 3 being too large. This reduces the risk of liquid splashing and scalding the film surface, and allows the liquid to flow into the evaporation tank 2 relatively stably along the guide slope 513. This is beneficial to the continuity and stability of the liquid flow from the melting tank 1 to the evaporation tank 2, thereby improving the working efficiency and film formation effect of the evaporation boat 100.

[0063] In the above technical solution, by setting the angle between the guide slope 513 and the upper surface of the evaporation boat body 3 to be greater than or equal to 1° and less than or equal to 3°, the risk that the liquid in the melting tank 1 cannot flow smoothly into the evaporation tank 2 due to the angle between the guide slope 513 and the upper surface of the evaporation boat body 3 being too small can be reduced. It can also reduce the risk of the liquid disturbing the liquid in the evaporation tank 2 due to the angle between the guide slope 513 and the upper surface of the evaporation boat body 3 being too large. This reduces the risk of liquid splashing and scalding the film surface, allowing the liquid to flow into the evaporation tank 2 relatively stably along the guide slope 513. This is beneficial to the continuity and stability of the liquid flow from the melting tank 1 into the evaporation tank 2, thereby improving the working efficiency and film formation effect of the evaporation boat 100.

[0064] According to some embodiments of this application, as shown in FIG4, along the arrangement direction of the melting tank 1 and the evaporation tank 2, the guide slope 513 has a first end 5131 and a second end 5132 opposite to each other. The first end 5131 is connected to the annular limiting wall 4 and is located between the upper edge of the flow hole 41 and the upper surface of the evaporation boat body 3, and the second end 5132 is adjacent to the evaporation tank 2.

[0065] Along the arrangement direction of the melting tank 1 and the evaporation tank 2, which is the length direction of the evaporation boat 100, i.e. the Y direction in Figure 4, the guide slope 513 has a first end 5131 and a second end 5132. The first end 5131 is the end close to the annular limiting wall 4, and the second end 5132 is the end close to the evaporation tank 2. The first end 5131 is connected to the annular limiting wall 4 and is located between the upper edge of the flow hole 41 and the upper surface of the evaporation boat body 3. That is to say, the first end 5131 can be located at any position between the upper edge of the flow hole 41 and the upper surface of the evaporation boat body 3. As an example: the first end 5131 can be located at the lower edge of the flow hole 41, or it can be located between the lower edge of the flow hole 41 and the upper surface of the evaporation boat body 3. As long as the first end 5131 is located between the upper edge of the flow hole 41 and the upper surface of the evaporation boat body 3, it is acceptable. This facilitates the smooth flow of liquid in the melting tank 1 through the flow hole 41 out of the melting tank 1, allowing the liquid in the melting tank 1 to flow smoothly into the guide channel 51. The second end 5132 can be adjacent to the evaporation tank 2, which facilitates the flow of liquid into the evaporation tank 2 through the second end 5132, thus allowing the liquid to flow smoothly from the melting tank 1 into the evaporation tank 2.

[0066] In the above technical solution, along the arrangement direction of the melting tank 1 and the evaporation tank 2, by making the guide slope 513 have a first end 5131 and a second end 5132, and the first end 5131 is connected to the annular limiting wall 4 and located between the upper edge of the flow hole 41 and the upper surface of the evaporation boat body 3, and the second end 5132 is adjacent to the evaporation tank 2, it is beneficial for the liquid in the melting tank 1 to flow out of the melting tank 1 smoothly through the flow hole 41, and then flow into the evaporation tank 2 through the second end 5132, so that the liquid can flow smoothly from the melting tank 1 into the evaporation tank 2.

[0067] According to some embodiments of this application, as shown in FIG4, the sidewall of the evaporation boat body 3 has a notch structure 31.

[0068] The sidewall of the evaporation boat body 3 can have a notched structure 31. For example, the cross-section of the evaporation boat body 3 can be, but is not limited to, an inverted trapezoid. By setting the notched structure 31, the cross-sectional area of ​​the evaporation boat body 3 can be reduced, thereby increasing the resistance of the evaporation boat 100. When the evaporation boat 100 is energized, the evaporation boat body 3 can generate more heat in the same amount of time, which is beneficial to raising the temperature of the evaporation boat body 3, reducing the risk of solidification of the liquid vapor deposition material due to low temperature, and improving the evaporation efficiency of the liquid vapor deposition material, thereby further improving the film formation effect of the evaporation boat 100.

[0069] In the above technical solution, by forming a notched structure 31 on the side wall of the evaporation boat body 3, when the evaporation boat 100 is powered on, the evaporation boat body 3 can generate more heat in the same amount of time, which is beneficial to increase the temperature of the evaporation boat body 3, reduce the risk of solidification of the liquid vapor deposition material due to low temperature, and improve the evaporation efficiency of the liquid vapor deposition material, thereby further improving the film formation effect of the evaporation boat 100.

[0070] According to some embodiments of this application, as shown in FIG4, the evaporation boat 100 further includes a protective sheet 6, which is assembled in the melting tank 1 and disposed on the bottom wall of the melting tank 1.

[0071] The evaporation boat 100 may further include a protective sheet 6. The protective sheet 6 can be made of refractory metals such as tungsten or tungsten-rhenium alloy, but this application is not limited to this; other metal sheets that have the same effect as tungsten or tungsten-rhenium alloy can also be used. The protective sheet 6 is assembled inside the melting tank 1 and located on the bottom wall of the melting tank 1. The shape and size of the protective sheet 6 can be adapted to the shape of the bottom wall of the melting tank 1, reducing the risk that the protective sheet 6 is too large to be assembled inside the melting tank 1, and also reducing the risk that the protective sheet 6 is too small to reliably protect the bottom wall of the melting tank 1. Assembling the protective sheet 6 inside the melting tank 1 and located on the bottom wall of the melting tank 1 can reduce the risk of the evaporation boat 100 being corroded by the continuous impact of the vaporized material on the bottom wall of the melting tank 1, and also reduce the risk of the bottom wall of the melting tank 1 being corroded by the high-temperature liquid, thereby improving the service life of the evaporation boat 100. It should be noted that the service life of the evaporation boat 100 can typically be extended from 20 hours to 30 hours.

[0072] In the above technical solution, by setting up a protective plate 6 and assembling the protective plate 6 inside the melting tank 1 and placing it on the bottom wall of the melting tank 1, the risk of the vaporized material continuously impacting the bottom wall of the melting tank 1 and corroding the evaporation boat 100 can be reduced, as can the risk of high-temperature liquid scouring and corroding the bottom wall of the melting tank 1, thereby improving the service life of the evaporation boat 100.

[0073] According to some embodiments of this application, as shown in FIG4, the evaporation boat 100 is constructed as a ceramic part.

[0074] Among them, the evaporation boat 100 can be constructed as a ceramic part. Ceramic has high thermal conductivity. Constructing the evaporation boat 100 as a ceramic part can improve the heat transfer efficiency of the evaporation boat 100, which is conducive to improving the vapor deposition effect of the evaporation boat 100. In addition, ceramic has good corrosion resistance. Constructing the evaporation boat 100 as a ceramic part can also improve the working stability and service life of the evaporation boat 100.

[0075] In the above technical solution, by constructing the evaporation boat 100 as a ceramic part, the heat conduction efficiency of the evaporation boat 100 can be improved, which is beneficial to improving the evaporation effect of the evaporation boat 100, and can also improve the working stability and service life of the evaporation boat 100.

[0076] The evaporation boat assembly 200 according to an embodiment of this application is described below with reference to Figures 1-3.

[0077] Referring to Figures 1-3, the evaporation boat assembly 200 according to an embodiment of this application includes a plurality of evaporation boats 100. The evaporation boats 100 are the evaporation boats 100 used for vapor deposition in the above embodiments. The plurality of evaporation boats 100 are arranged sequentially along a first direction. The melting tank 1 and evaporation tank 2 of each evaporation boat 100 are arranged along a second direction, and the melting tank 1 and evaporation tank 2 of at least two evaporation boats 100 are arranged in opposite directions.

[0078] The evaporation boat assembly 200 includes multiple evaporation boats 100, which are the evaporation boats 100 used for vapor deposition in the above embodiment. There can be 2, 3, 4 or more evaporation boats 100. This application takes 4 evaporation boats 100 as an example for explanation. The 4 evaporation boats 100 are arranged in sequence along a first direction, which is the Z direction in Figure 1. The melting tank 1 and evaporation tank 2 of each evaporation boat 100 are arranged along a second direction, which is the length direction of the evaporation boat 100, which is the Y direction in Figure 1. The first direction, the second direction and the third direction are perpendicular to each other. The third direction is the X direction in Figure 1, which is the thickness direction of the evaporation boat 100. Furthermore, the melting tanks 1 and evaporation tanks 2 of at least two evaporation boats 100 are arranged in opposite directions. That is, along the second direction, the melting tanks 1 and evaporation tanks 2 of at least two evaporation boats 100 are arranged in opposite directions. This arrangement allows the vapor deposition material to be fed along both sides of the second direction. Multiple feeding mechanisms are respectively arranged on both sides of the evaporation boat assembly 200 along the second direction, which also helps to increase the evaporation area of ​​the evaporation boat assembly 200 along the second direction, thereby increasing the film formation space of the evaporation boat assembly 200 and improving the working efficiency of the evaporation boat assembly 200.

[0079] Along the second direction, the melting tanks 1 and evaporation tanks 2 of at least two evaporation boats 100 are arranged in opposite directions. For example, the opposite arrangement of the melting tanks 1 and evaporation tanks 2 of adjacent evaporation boats 100 allows for a spaced-out arrangement, increasing the space between adjacent melting tanks 1 and evaporation tanks 2, improving heat dissipation between adjacent evaporation boats 100, and extending the service life of the evaporation boat assembly 200. Multiple feeding mechanisms are arranged on both sides of the evaporation boat assembly 200 along the second direction. When adjustments to the vapor deposition material or maintenance and inspection of the evaporation boat 100 are required, this increases the operating space for personnel, facilitating maintenance and inspection of the evaporation boat assembly 200, thereby further extending its service life.

[0080] In the above technical solution, by arranging multiple evaporation boats 100 of the evaporation boat assembly 200 sequentially along a first direction, and arranging the melting tank 1 and evaporation tank 2 of each evaporation boat 100 along a second direction, with at least two evaporation boats 100 having their melting tank 1 and evaporation tank 2 arranged in opposite directions, the vapor deposition material can be fed along both sides of the second direction. This is beneficial for increasing the evaporation area of ​​the evaporation boat assembly 200 along the second direction, thereby increasing the film formation space of the evaporation boat assembly 200 and improving its working efficiency. It also increases the space between two adjacent melting tanks 1 and evaporation tanks 2, improving the heat dissipation effect between adjacent evaporation boats 100. Multiple feeding mechanisms are respectively arranged on both sides of the evaporation boat assembly 200 along the second direction. When it is necessary to adjust the vapor deposition material or perform maintenance and inspection on the evaporation boat 100, the operating space for personnel can be increased, facilitating the maintenance and inspection of the evaporation boat assembly 200, thus extending its service life.

[0081] As some embodiments of this application, the evaporation boat assembly 200 may further include two support beams 201. Both support beams 201 extend along the arrangement direction of the evaporation boats 100, that is, along the first direction. The two support beams 201 are arranged opposite to each other and spaced apart to form an assembly space between the two support beams 201. This facilitates the assembly of multiple evaporation boats 100 into the assembly space between the two support beams 201. Both support beams 201 support multiple evaporation boats 100, which helps the evaporation boats 100 to reliably perform the vapor deposition function between the two support beams 201, improves the stability of the vapor deposition process, and thus improves the film quality of vapor deposition.

[0082] As some embodiments of this application, the two support beams 201 can be configured as electrodes. Specifically, one of the two support beams 201 can be configured as a positive electrode, and the other of the two support beams 201 can be configured as a negative electrode. When the evaporation boat 100 is required to perform the vapor deposition function, the two support beams 201 are energized respectively. After the two support beams 201 are energized, their temperature rises, thereby raising the temperature of the evaporation boat 100, which facilitates the evaporation boat 100 to perform the vapor deposition function.

[0083] According to some embodiments of this application, the evaporation boat 100 of this application forms a melting tank 1 and an evaporation tank 2, which are located on the same side of the evaporation boat 100 and are connected, allowing liquid in the melting tank 1 to flow into the evaporation tank 2. The evaporation boat 100 includes an evaporation boat body 3 and an annular limiting wall 4. The evaporation tank 2 is formed on the upper surface of the evaporation boat body 3, and the annular limiting wall 4 is disposed on the upper surface of the evaporation boat body 3 to define the melting tank 1. The annular limiting wall 4 has a flow hole 41, through which liquid in the melting tank 1 is adapted to flow into the evaporation tank 2. Along the arrangement direction of the melting tank 1 and the evaporation tank 2, the wall portion of the annular limiting wall 4 facing the evaporation tank 2 has the flow hole 41. The evaporation boat 100 also includes a guide portion 5, which is disposed on the upper surface of the evaporation boat body 3 and located between the melting tank 1 and the evaporation tank 2. The guide portion 5 has a guide channel 51, which connects the flow hole 41 and the evaporation tank 2. Along the arrangement direction of the melting tank 1 and the evaporation tank 2, the guide channel 51 has a first open end 511 and a second open end 512. The first open end 511 corresponds to the flow hole 41, and the second open end 512 communicates with the evaporation tank 2. The bottom wall of the guide channel 51 is constructed as a guide slope 513, which is suitable for guiding liquid to the evaporation tank 2. The angle between the guide slope 513 and the upper surface of the evaporation boat body 3 is greater than or equal to 1° and less than or equal to 3°. Along the arrangement direction of the melting tank 1 and the evaporation tank 2, the guide slope 513 has a first end 5131 and a second end 5132. The first end 5131 is connected to the annular limiting wall 4 and is located between the upper edge of the flow hole 41 and the upper surface of the evaporation boat body 3. The second end 5132 is adjacent to the evaporation tank 2. The sidewall of the evaporation boat body 3 has a notch structure 31.

[0084] The vapor deposition material used for vapor deposition can be uniformly fed through a wire spool. After being pressed and melted by the active and passive wheels of the feeding mechanism above the evaporation boat 100, the vapor deposition material is transported to the melting tank 1 of the evaporation boat 100. The high-temperature molten vapor deposition material in the melting tank 1 can flow out of the melting tank 1 through the flow hole 41 and flow into the guide groove 51 through the first open end 511. Under the guiding action of the guide slope 513, the high-temperature molten vapor deposition material can flow into the evaporation tank 2 relatively stably along the guide slope 513. This allows the high-temperature molten vapor deposition material to be uniformly spread in the evaporation tank 2 and evaporate into a film in the evaporation tank 2. This reduces the risk of disturbance to the liquid surface in the evaporation tank 2 caused by the high-temperature molten vapor deposition material, which is beneficial to improving the continuity and stability of the process of the high-temperature molten vapor deposition material flowing from the melting tank 1 into the evaporation tank 2, thereby improving the working efficiency and film formation effect of the evaporation boat 100.

[0085] The evaporation boat 100 also includes a protective plate 6, which is installed inside the melting tank 1 and located on the bottom wall of the melting tank 1. This reduces the risk of the high-temperature molten vapor deposition material continuously eroding and corroding the bottom wall of the melting tank 1, thereby improving the service life of the evaporation boat 100. The evaporation boat 100 is constructed of ceramic components.

[0086] According to some embodiments of this application, the evaporation boat assembly 200 includes a plurality of evaporation boats 100, which are the evaporation boats 100 for vapor deposition in the above embodiments. The plurality of evaporation boats 100 are arranged sequentially along a first direction, and the melting tank 1 and evaporation tank 2 of each evaporation boat 100 are arranged along a second direction, and the melting tank 1 and evaporation tank 2 of at least two evaporation boats 100 are arranged in opposite directions.

[0087] During the vapor deposition process, the object to be coated is located above the evaporation boat 100 and moves along the first direction.

[0088] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other.

[0089] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An evaporation boat for vapor deposition, wherein, include: The evaporation boat has a melting tank and an evaporation tank, which are located on the same side of the evaporation boat and are connected. The liquid in the melting tank is suitable for flowing into the evaporation tank.

2. The evaporation boat for vapor deposition according to claim 1, wherein, The evaporation boat includes: an evaporation boat body and an annular limiting wall. The evaporation groove is formed on the upper surface of the evaporation boat body, and the annular limiting wall is disposed on the upper surface of the evaporation boat body to define the melting groove.

3. The evaporation boat for vapor deposition according to claim 2, wherein, The annular limiting wall has a flow hole, through which the liquid in the melting tank flows into the evaporation tank.

4. The evaporation boat for vapor deposition according to claim 3, wherein, Along the arrangement direction of the melting tank and the evaporation tank, the annular limiting wall faces the wall portion of the evaporation tank and forms the flow hole.

5. The evaporation boat for vapor deposition according to claim 3 or 4, wherein, Also includes: A flow guide is provided on the upper surface of the evaporation boat body and located between the melting tank and the evaporation tank. The flow guide is formed with a flow guide groove, which connects the flow hole and the evaporation tank.

6. The evaporation boat for vapor deposition according to claim 5, wherein, Along the arrangement direction of the melting tank and the evaporation tank, the guide channel has a first open end and a second open end, the first open end corresponds to the flow hole, and the second open end communicates with the evaporation tank.

7. The evaporation boat for vapor deposition according to claim 5 or 6, wherein, The bottom wall of the guide channel is constructed as a guide slope, which is suitable for guiding liquid to the evaporation tank.

8. The evaporation boat for vapor deposition according to claim 7, wherein, The angle between the guide slope and the upper surface of the evaporation boat body is greater than or equal to 1° and less than or equal to 3°.

9. The evaporation boat for vapor deposition according to any one of claims 2-8, wherein, The sidewalls of the main body of the evaporation boat have notched structures.

10. The evaporation boat for vapor deposition according to any one of claims 1-9, wherein, Also includes: A protective sheet is assembled inside the melting tank and disposed on the bottom wall of the melting tank.

11. The evaporation boat for vapor deposition according to any one of claims 1-9, wherein, The evaporation boat is constructed of ceramic.

12. An evaporation boat assembly, wherein, include: A plurality of evaporation boats, wherein the evaporation boats are evaporation boats for vapor deposition according to any one of claims 1-11, the plurality of evaporation boats are arranged sequentially along a first direction, the melting tank and the evaporation tank of each evaporation boat are arranged along a second direction, and the melting tank and the evaporation tank of at least two evaporation boats are arranged in opposite directions.

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