Flipping device and coating apparatus

Abstract

Disclosed in the present application are a flipping device and a coating apparatus. The flipping device comprises a clamping assembly, which comprises a first clamping member and a second clamping member; a first driving assembly, which is connected to the clamping assembly, the first driving assembly being used for driving the first clamping member and the second clamping member to be close to each other, so that the first clamping member and the second clamping member jointly clamp a substrate, or the first driving assembly being used for driving the first clamping member and the second clamping member to be away from each other, so that the first clamping member and the second clamping member release the substrate; and a second driving assembly, which is connected to the clamping assembly, the second driving assembly being used for driving the clamping assembly to rotate, so that the clamping assembly drives the substrate to rotate. The flipping device of the present application can help workers retrieve and place substrates.

Description

Turnover device and coating equipment TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing equipment, in particular to a turnover device and a coating equipment. BACKGROUND

[0002] In the related art, in the process of packaging a semiconductor wafer, the substrate needs to be turned over before it can proceed to the next process. The existing turnover device turns over the substrate by fixing the substrate on a turnover support and then driving the turnover support through a driving device, thereby realizing the turnover of the substrate. The way of fixing the substrate on the turnover support requires the staff to repeatedly disassemble and assemble the substrate, which is particularly inconvenient for the staff.

[0003] SUMMARY

[0004] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application provides a turnover device which can facilitate the staff to take and place the substrate.

[0005] The present application also provides a coating equipment.

[0006] The turnover device according to the first aspect of the present application comprises:

[0007] The clamping assembly comprises a first clamping member and a second clamping member;

[0008] The first driving assembly is connected to the clamping assembly, and is used to drive the first clamping member and the second clamping member to approach each other, so that the first clamping member and the second clamping member jointly clamp the substrate; or, the first driving assembly is used to drive the first clamping member and the second clamping member to move away from each other, so that the first clamping member and the second clamping member release the substrate;

[0009] The second driving assembly is connected to the clamping assembly, and is used to drive the clamping assembly to rotate, so that the clamping assembly drives the substrate to rotate.

[0010] According to the turnover device provided in the embodiments of the present application, the clamping assembly is used to clamp the base material, specifically, after the first driving assembly is connected to the clamping assembly, the first driving assembly can drive the first clamping piece and the second clamping piece to move close to each other, which can make the first clamping piece and the second clamping piece clamp the base material together, then the clamping assembly can be rotated by the second driving assembly, so as to turn over the base material, after the base material is turned over, the first driving assembly can drive the first clamping piece and the second clamping piece to move away from each other, so as to release the base material. In the prior art, the worker needs to repeatedly disassemble and assemble the base material when turning over the base material, which is inconvenient to use. In the present application, the clamping assembly can take and place the base material under the action of the first driving assembly, which can facilitate the worker to use. Specifically, the turnover device can facilitate the worker to take and place the base material.

[0011] According to the turnover device provided in some embodiments of the present application, the first driving assembly comprises a first driving piece and a first rotating piece, the clamping assembly further comprises a first moving piece and a first fixing piece, the first driving piece is connected to the first rotating piece, the first rotating piece is connected to the first moving piece, the first moving piece is slidingly connected to the first fixing piece, and the first moving piece is connected to the first clamping piece. The first driving piece can drive the first rotating piece to move, the first rotating piece drives the first moving piece to slide on the first fixing piece, so that the first moving piece drives the first clamping piece to move close to or away from the second clamping piece.

[0012] According to the turnover device provided in some embodiments of the present application, the clamping assembly further comprises a second moving piece and a second fixing piece, the second moving piece is slidingly connected to the second fixing piece, the second moving piece is connected to the second clamping piece, the first rotating piece has a gear, the gear is engaged with the first moving piece and the second moving piece, the first driving piece can drive the first rotating piece to rotate, the first rotating piece drives the first moving piece and the second moving piece to slide, so that the first clamping piece and the second clamping piece move close to or away from each other.

[0013] According to the turnover device provided in some embodiments of the present application, the second driving assembly comprises a second driving piece, a second rotating piece and an intermediate piece, one end of the second rotating piece is connected to the second driving piece, the other end of the second rotating piece is fixedly connected to the intermediate piece, the intermediate piece is connected to the clamping assembly, the second driving piece can drive the second rotating piece to rotate, the second rotating piece drives the intermediate piece to rotate, so that the intermediate piece drives the clamping assembly to rotate.

[0014] According to the turnover device of some embodiments of the present application, the intermediate part is provided with a movement cavity, the first fixed part and the first movement part are arranged in the movement cavity, the first fixed part is fixedly connected to the cavity wall of the movement cavity, and the second rotating part is provided with a cavity, one end of the first rotating part passes through the cavity and is located in the movement cavity.

[0015] According to the turnover device of some embodiments of the present application, the second driving assembly further comprises a sealing part arranged in the cavity, and the sealing part separates the cavity and the movement cavity.

[0016] According to the coating equipment of the second aspect of the embodiments of the present application, the coating equipment comprises:

[0017] The housing has a processing cavity.

[0018] The turnover device according to any one of the first aspect of the embodiments of the present application is arranged in the processing cavity.

[0019] According to the coating equipment of the embodiments of the present application, at least the following beneficial effects are achieved: the clamping assembly is used to clamp the substrate, specifically, after the first driving assembly is connected to the clamping assembly, the first driving assembly can drive the first clamping part and the second clamping part to move close to each other, which can make the first clamping part and the second clamping part jointly clamp the substrate, then the clamping assembly can be rotated by the second driving assembly, so as to turn over the substrate, after the substrate is turned over, the first driving assembly can drive the first clamping part and the second clamping part to move away from each other, so as to release the substrate. In the prior art, the worker needs to repeatedly disassemble and assemble the substrate when turning over the substrate, which is inconvenient to use. In the present application, the clamping assembly can take and place the substrate under the action of the first driving assembly, which can facilitate the worker to use. Specifically, the turnover device can facilitate the worker to take and place the substrate. Further, the coating equipment with the turnover device also has the characteristics of convenient use.

[0020] According to the coating equipment of some embodiments of the present application, the coating equipment further comprises two deviation correcting devices arranged in the processing cavity, and the two deviation correcting devices are respectively located on the two sides of the first clamping part, and the deviation correcting devices are used to correct the deviation of the substrate.

[0021] According to the coating equipment of some embodiments of the present application, the deviation correcting device comprises a third driving part and a deviation correcting part, the third driving part is connected to the deviation correcting part, and the third driving part is used to drive the deviation correcting part to move close to or away from the clamping assembly.

[0022] According to the coating equipment of some embodiments of the present application, the deviation correcting device further comprises a bellows, and the two ends of the bellows are respectively connected to the deviation correcting part and the third driving part.

[0023] Additional aspects and advantages of the present application will be partially given in the following description, partially will become apparent from the following description, or will be learned by practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0024] The present application will be further described below in conjunction with the drawings and embodiments, in which:

[0025] Fig. 1 is a schematic view of a turnover device according to some embodiments of the present application;

[0026] Fig. 2 is a schematic view of a cross section of a turnover device according to some embodiments of the present application;

[0027] Fig. 3 is a schematic view of a partial cross section of a turnover device according to some embodiments of the present application;

[0028] Fig. 4 is a schematic view of a clamping assembly and an intermediate piece of a turnover device according to some embodiments of the present application;

[0029] Fig. 5 is a schematic view of a coating equipment according to some embodiments of the present application;

[0030] Fig. 6 is a schematic view of a top view of a coating equipment according to some embodiments of the present application;

[0031] Fig. 7 is a schematic view of a deviation rectifying device of a coating equipment according to some embodiments of the present application.

[0032] Reference Signs:

[0033] Turnover device 10, coating equipment 20, clamping assembly 100, first clamping piece 110, second clamping piece 120, first moving piece 130, first fixing piece 140, second moving piece 150, second fixing piece 160, first driving assembly 200, first driving piece 210, first rotating piece 220, second driving assembly 300, second driving piece 310, second rotating piece 320, cavity 321, intermediate piece 330, moving cavity 331, sealing piece 340, shell 400, processing cavity 410, deviation rectifying device 500, third driving piece 510, bellows 520, deviation rectifying piece 530. DETAILED DESCRIPTION

[0034] Embodiments of the present application are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference signs represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present application, and cannot be understood as a limitation of the present application.

[0035] In the description of the present application, it needs to be understood that the orientation description, such as the orientation or position relationship indicated by the upper, lower, front, rear, left, right and the like, is based on the orientation or position relationship shown in the drawings, and is only for the purpose of facilitating the description of the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0036] In the description of the present application, the meaning of several is more than one, the meaning of multiple is more than two, greater than, less than, more than and the like are understood as not including the number, above, below, within and the like are understood as including the number. If it is described that the first, second is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance of the indicated technical features or implying the number of the indicated technical features or implying the order of the indicated technical features.

[0037] In the description of the present application, unless otherwise explicitly limited, the words such as setting, installing, connecting and the like should be broadly understood, and the person skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution.

[0038] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "illustrative embodiment", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in combination with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0039] Please refer to FIG. 1 to FIG. 4, in some embodiments, the turnover device 10 is used to turn over a substrate, which can be a silicon wafer, a ceramic wafer, a glass wafer, etc. The turnover device 10 comprises a clamping assembly 100, a first driving assembly 200 and a second driving assembly 300. The clamping assembly 100 comprises a first clamping piece 110 and a second clamping piece 120. The clamping assembly 100 is used to clamp the substrate, after the clamping assembly 100 clamps the substrate, it can effectively ensure that the substrate will not fall and be damaged when turning over. The first clamping piece 110 has an abutting block, the material of the abutting block can be flexible material, so as to avoid damaging the substrate. The structure of the second clamping piece 120 can be consistent with the structure of the first clamping piece 110. The first clamping piece 110 and the second clamping piece 120 can have multiple, when the first clamping piece 110 and the second clamping piece 120 clamp the substrate together, multiple first clamping pieces 110 and second clamping pieces 120 can be clamped at the middle position and the edge position of the substrate. The first driving assembly 200 is connected to the clamping assembly 100. The first driving assembly 200 is used to drive the first clamping piece 110 and the second clamping piece 120 to move close to each other, so that the first clamping piece 110 and the second clamping piece 120 clamp the substrate together. Alternatively, the first driving assembly 200 is used to drive the first clamping piece 110 and the second clamping piece 120 to move away from each other, so that the first clamping piece 110 and the second clamping piece 120 release the substrate. Specifically, the specific way of the first driving assembly 200 driving the first clamping piece 110 and the second clamping piece 120 to move close to each other is that the first driving assembly 200 drives the first clamping piece 110 to move close to the second clamping piece 120, or the first driving assembly 200 drives the second clamping piece 120 to move close to the first clamping piece 110, or the first driving assembly 200 simultaneously drives the first clamping piece 110 and the second clamping piece 120 to move to move close to each other. The first clamping piece 110 and the second clamping piece 120 clamp the substrate together can be that the first clamping piece 110 and the second clamping piece 120 clamp on both sides of the substrate respectively, that is, the first clamping piece 110 and the second clamping piece 120 are located on the upper surface and the lower surface of the substrate respectively. The second driving assembly 300 is connected to the clamping assembly 100, and the second driving assembly 300 is used to drive the clamping assembly 100 to rotate, so that the clamping assembly 100 drives the substrate to rotate. After the second driving assembly 300 rotates the clamping assembly 100, the turnover of the substrate can be realized, such as turning over the substrate by 180 degrees.

[0040] The clamping assembly 100 is used to clamp the substrate. Specifically, after the first driving assembly 200 is connected to the clamping assembly 100, the first driving assembly 200 can drive the first clamping piece 110 and the second clamping piece 120 to move close to each other, which can make the first clamping piece 110 and the second clamping piece 120 clamp the substrate together. Then, the clamping assembly 100 can be rotated by the second driving assembly 300, so as to turn over the substrate. After the substrate is turned over, the first driving assembly 200 can drive the first clamping piece 110 and the second clamping piece 120 to move away from each other, so as to release the substrate. In the prior art, the worker needs to repeatedly disassemble and assemble the substrate when turning over the substrate, which is inconvenient to use. In the present application, the clamping assembly 100 can take and place the substrate under the action of the first driving assembly 200, which can facilitate the worker to use. Specifically, the turnover device 10 can facilitate the worker to take and place the substrate. Further, the coating equipment 20 with the turnover device 10 also has the characteristics of convenient use. In addition, the clamping assembly 100 can be provided with a buffer piece, so as to reduce the probability of scratching and breaking the surface of the substrate, reduce the damage of the substrate, and thus improve the yield of the substrate product.

[0041] Further, how the first driving assembly 200 drives the clamping assembly 100 is introduced as follows. Referring to FIGS. 1-4, in some embodiments, the first driving assembly 200 comprises a first driving member 210 and a first rotating member 220. The clamping assembly 100 further comprises a first moving member 130 and a first fixing member 140. The first driving member 210 is connected to the first rotating member 220, the first rotating member 220 is connected to the first moving member 130, the first moving member 130 is slidingly connected to the first fixing member 140, and the first moving member 130 is fixedly connected to the first clamping member 110. The first driving member 210 can drive the first rotating member 220 to move, the first rotating member 220 drives the first moving member 130 to slide on the first fixing member 140, so that the first moving member 130 drives the first clamping member 110 to move close to or away from the second clamping member 120. Specifically, the first driving member 210 can be a motor, the motor is connected to the first rotating member 220, the first rotating member 220 can be a rotating shaft, and the rotating shaft can rotate under the drive of the motor. After the first rotating member 220 rotates, the first moving member 130 can slide on the first fixing member 140, so that the first fixing member 140 drives the first clamping member 110 to move linearly. It is conceivable that the movement of the first clamping member 110 close to or away from the second clamping member 120 is linear, so when the first rotating member 220 rotates, the rotation needs to be converted into linear motion. A gear can be arranged on the first rotating member 220, the gear meshes with the first moving member 130, so that when the first rotating member 220 rotates, the first moving member 130 slides on the first fixing member 140. The specific way in which the first moving member 130 slides on the first fixing member 140 can be that the first moving member 130 has a sliding block and the first fixing member 140 has a sliding rail, so that the first moving member 130 slides on the first fixing member 140. In addition, when the first driving member 210 is a pneumatic cylinder, the linear motion of the pneumatic cylinder can directly drive the first rotating member 220 to move linearly, so that the first moving member 130 slides.

[0042] Further, the first driving assembly 200 can drive the first clamping member 110 to move towards or away from the second clamping member 120, and the first driving assembly 200 can also drive the first clamping member 110 and the second clamping member 120 to move towards or away from each other. Specifically, referring to FIGS. 1-4, in some embodiments, the clamping assembly 100 further comprises a second moving member 150 and a second fixed member 160. The second moving member 150 is slidingly connected to the second fixed member 160. The second moving member 150 can slide on the second fixed member 160 in the following manner: the second moving member 150 has a sliding block, and the second fixed member 160 has a sliding rail, so that the second moving member 150 can slide on the second fixed member 160. The second moving member 150 is connected to the second clamping member 120. The first rotating member 220 has a gear, and the gear is engaged with the first moving member 130 and the second moving member 150. The gear can be engaged with the first moving member 130 and the second moving member 150 in the following manner: the first moving member 130 is provided with a rack, the rack is engaged with the gear, and when the gear rotates, the rack moves linearly; the second moving member 150 is provided with a rack, the rack is engaged with the gear, and when the gear rotates, the rack moves linearly. The first driving member 210 can drive the first rotating member 220 to rotate, and the first rotating member 220 drives the first moving member 130 and the second moving member 150 to slide, so that the first clamping member 110 and the second clamping member 120 move towards or away from each other. Specifically, the first driving member 210 can be a motor, and when the motor rotates, the motor drives the first rotating member 220 to rotate, and when the first rotating member 220 rotates, the gear also rotates, and the gear can drive the first moving member 130 and the second moving member 150 to move, so that the first clamping member 110 and the second clamping member 120 move towards or away from each other.

[0043] Further, the specific structure of the second driving assembly 300 will be described below. Referring to FIGS. 1-4, in some embodiments, the second driving assembly 300 comprises a second driving member 310, a second rotating member 320, and an intermediate member 330. One end of the second rotating member 320 is connected to the second driving member 310, and the other end of the second rotating member 320 is fixedly connected to the intermediate member 330. The intermediate member 330 is connected to the clamping assembly 100. The second driving member 310 can drive the second rotating member 320 to rotate, and the second rotating member 320 drives the intermediate member 330 to rotate, so that the intermediate member 330 drives the clamping assembly 100 to rotate. Specifically, the second driving member 310 can be a motor, and after the motor rotates, the motor can drive the second rotating member 320 to rotate, so that the intermediate member 330 rotates. After the clamping assembly 100 clamps the substrate, the clamping assembly 100 is driven by the intermediate member 330 to rotate, which can make the substrate flip. The angle of the substrate flipping is not specifically limited, which can be 30 degrees, 60 degrees, 90 degrees, 180 degrees, 270 degrees, or 360 degrees.

[0044] Further, please refer to FIG. 1 to FIG. 4, in some embodiments, the intermediate component 330 is provided with a moving cavity 331, the first fixed component 140 and the first moving component 130 are both arranged in the moving cavity 331, the first fixed component 140 is fixedly connected to the cavity wall of the moving cavity 331, and after the first fixed component 140 is fixed, the first moving component 130 can be conveniently slid. The second rotating component 320 is provided with a cavity 321, one end of the first rotating component 220 penetrates through the cavity 321 and is located in the moving cavity 331. Specifically, the design of arranging the first rotating component 220 in the cavity 321 of the second rotating component 320 can realize the effect of optimizing space, thereby saving space. The design of arranging the moving cavity 331 can make the first fixed component 140, the first moving component 130, the second moving component 150 and the second fixed component 160 located therein, which can avoid the contact of these components with the outside world, thereby reducing the possibility of mechanical failure. The other end of the first rotating component 220 can protrude out of the cavity 321, thereby being connected with the first driving component 210. One end of the second rotating component 320 can also be connected with the second driving component 310, so that the second rotating component 320 is driven to rotate. In addition, the first driving component 210 can be connected with the first rotating component 220 through a shaft coupling, and the second driving component 310 can be connected with the second rotating component 320 through a synchronous pulley, so that the first driving component 210 and the second driving component 310 can be arranged side by side.

[0045] Further, please refer to FIG. 1 to FIG. 4, in some embodiments, the second driving assembly 300 further comprises a sealing component 340, the sealing component 340 is arranged in the cavity 321, and the sealing component 340 separates the cavity 321 and the moving cavity 331. Specifically, when the turnover device 10 is arranged in the coating equipment 20, the coating equipment 20 needs to be processed in a vacuum environment, therefore, in order to avoid air entering from the cavity 321 into the moving cavity 331, and air entering from the moving cavity 331 into the processing cavity 410, the sealing component 340 can be arranged to separate the cavity 321 and the moving cavity 331. The sealing component 340 can be provided with two, and the two sealing components 340 are respectively located at both ends of the cavity 321. In addition, the arrangement of the sealing component 340 can also effectively reduce the pollution to the substrate.

[0046] Please refer to FIG. 5 and FIG. 6, in some embodiments, the coating equipment 20 comprises a housing 400 and the turnover device 10 in the above embodiments. The housing 400 in FIG. 6 has no upper cover, so the turnover device 10 in the processing cavity 410 can be directly seen. The housing 400 has a processing cavity 410. The turnover device 10 is arranged in the processing cavity 410. Among them, the clamping assembly 100 is used to clamp the substrate. Specifically, after the first driving assembly 200 is connected with the clamping assembly 100, the first driving assembly 200 can drive the first clamping piece 110 and the second clamping piece 120 to move close to each other, which can make the first clamping piece 110 and the second clamping piece 120 clamp the substrate together. Then, the clamping assembly 100 can be rotated by the second driving assembly 300, so as to turn over the substrate. After the substrate is turned over, the first driving assembly 200 can make the first clamping piece 110 and the second clamping piece 120 move away from each other, so as to release the substrate. In the prior art, the worker needs to repeatedly disassemble and assemble the substrate when turning over the substrate, which will cause inconvenience in use. In the present application, the clamping assembly 100 can take and place the substrate under the action of the first driving assembly 200, which can facilitate the worker to use. Specifically, the turnover device 10 can facilitate the worker to take and place the substrate. Further, the coating equipment 20 with the turnover device 10 also has the characteristics of convenient use.

[0047] Further, please refer to FIG. 5 and FIG. 6, in some embodiments, the coating equipment 20 further comprises two deviation correcting devices 500, which are arranged in the processing cavity 410, and the two deviation correcting devices 500 are respectively located on the two sides of the first clamping piece 110. The deviation correcting device 500 is used to correct the deviation of the substrate. Specifically, when the position of the substrate in the processing cavity 410 deviates from the set processing position, the substrate can be corrected by the deviation correcting device 500. After the two deviation correcting devices 500 are respectively located on the two sides of the first clamping piece 110, when the clamping assembly 100 clamps the substrate, the two deviation correcting devices 500 can be respectively located on the two sides of the substrate, so as to abut against the substrate for correction, which can effectively ensure that the position of the substrate is in a reasonable processing position.

[0048] Further, the specific structure of the deviation correcting device 500 will be introduced below. Please refer to FIG. 6 and FIG. 7, in some embodiments, the deviation correcting device 500 comprises a third driving piece 510 and a deviation correcting piece 530. The third driving piece 510 is connected to the deviation correcting piece 530, and the third driving piece 510 is used to drive the deviation correcting piece 530 to move close to or away from the clamping assembly 100. Specifically, when the third driving piece 510 drives the deviation correcting piece 530 to move close to the clamping assembly 100, the deviation correcting piece 530 will abut against the substrate, so as to push the substrate to move and make the substrate reach the correct position. For example, when the substrate deviates to the left position, the deviation correcting piece 530 can abut against the left side of the substrate, so as to make the substrate move to the right.

[0049] Further, the specific structure of the deviation rectifying device 500 will be introduced as follows, please refer to FIG. 6 and FIG. 7. In some embodiments, the deviation rectifying device 500 further comprises a bellows 520, two ends of the bellows 520 are connected to the deviation rectifying member 530 and the third driving member 510 respectively. Specifically, the bellows 520 can facilitate the sealing structure with the housing 400, so as to ensure the processing cavity 410 inside the housing 400 is separated from the outside. In this way, through the design of the bellows 520, on the one hand, the third driving member 510 can drive the deviation rectifying member 530 to move, and the third driving member 510 can be a cylinder; on the other hand, the bellows 520 can be sealed conveniently, which can effectively avoid the pollution of the substrate in the processing cavity 410. The material of the bellows 520 can be metal.

[0050] Further, in some embodiments, the coating equipment 20 further comprises a vacuum pump set, a vacuum pipeline, a valve and a vacuum gauge. The vacuum gauge can be used to measure the vacuum degree inside the housing 400, and the vacuum pump set can pump out the air to create a vacuum environment.

[0051] The above embodiments of the present application are described in detail in combination with the drawings, but the present application is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the purpose of the present application. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

Claims

1. A turnover device for overturning a substrate, comprising: a clamping assembly comprising a first clamping member and a second clamping member; a first driving assembly connected to the clamping assembly, the first driving assembly being configured to drive the first clamping member and the second clamping member to move towards each other so that the first clamping member and the second clamping member jointly clamp the substrate; alternatively, the first driving assembly being configured to drive the first clamping member and the second clamping member to move away from each other so that the first clamping member and the second clamping member release the substrate; a second driving assembly connected to the clamping assembly, the second driving assembly being configured to drive the clamping assembly to rotate so that the clamping assembly rotates the substrate.

2. The turnover device according to claim 1, wherein, The first driving assembly comprises a first driving member and a first rotating member, the clamping assembly further comprises a first moving member and a first fixed member, the first driving member is connected to the first rotating member, the first rotating member is connected to the first moving member, the first moving member is slidingly connected to the first fixed member, and the first moving member is connected to the first clamping member, wherein the first driving member is configured to drive the first rotating member to move, the first rotating member drives the first moving member to slide on the first fixed member, so that the first moving member drives the first clamping member to move towards or away from the second clamping member.

3. The turnover device according to claim 2, wherein, The clamping assembly further comprises a second moving member and a second fixed member, the second moving member is slidingly connected to the second fixed member, and the second moving member is connected to the second clamping member, the first rotating member has a gear, the gear is engaged with the first moving member and the second moving member, the first driving member is configured to drive the first rotating member to rotate, the first rotating member drives the first moving member and the second moving member to slide, so that the first clamping member and the second clamping member move towards or away from each other.

4. The turnover device according to claim 2, wherein, The second driving assembly comprises a second driving member, a second rotating member and an intermediate member, one end of the second rotating member is connected to the second driving member, the other end of the second rotating member is fixedly connected to the intermediate member, the intermediate member is connected to the clamping assembly, and the second driving member is configured to drive the second rotating member to rotate, the second rotating member drives the intermediate member to rotate, so that the intermediate member drives the clamping assembly to rotate.

5. The turnover device according to claim 4, wherein, The intermediate member is provided with a moving cavity, the first fixed member and the first moving member are arranged in the moving cavity, the first fixed member is fixedly connected to a cavity wall of the moving cavity, and the second rotating member is provided with a cavity, one end of the first rotating member passes through the cavity and is located in the moving cavity.

6. The turnover device according to claim 5, wherein, The second driving assembly further comprises a sealing member, the sealing member is arranged in the cavity, and the sealing member separates the cavity and the moving cavity.

7. A coating device, comprising: a housing having a processing cavity; the turnover device according to any one of claims 1 to 6, arranged in the processing cavity.

8. The coating apparatus of claim 7, wherein, The coating device further comprises two deviation rectifying devices, the deviation rectifying devices are arranged in the processing cavity, the two deviation rectifying devices are respectively located on two sides of the first clamping member, and the deviation rectifying devices are configured to rectify the substrate.

9. The coating apparatus of claim 8, wherein, The deviation correcting device comprises a third driving member and a deviation correcting member, the third driving member is connected to the deviation correcting member, and the third driving member is used to drive the deviation correcting member to approach or move away from the clamping assembly.

10. The coating apparatus of claim 9, wherein, The deviation correcting device further comprises a bellows, two ends of the bellows are respectively connected to the deviation correcting member and the third driving member.

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