Gate valve and substrate processing apparatus comprising same

Abstract

The present invention relates to a gate valve and a substrate processing apparatus comprising same, and, more specifically, to a gate valve having an inclined sealing surface, and a substrate processing apparatus comprising same. The present invention provides the gate valve (10) comprising: a valve housing (100) having an opening (O) that forms a flow path (P), and a valve seat (101); and a valve plate part (200), which is provided in the valve housing (100) to be movable between a closing position at which the valve plate part comes into contact with the valve seat (101) so as to close the flow path (P) and an opening position at which the flow path (P) is opened.

Description

Gate valve and substrate processing device including the same

[0001] The present invention relates to a gate valve and a substrate processing device including the same, and more particularly, to a gate valve having an inclined sealing surface and a substrate processing device including the same.

[0002] A semiconductor substrate processing device that performs semiconductor manufacturing processes, etc., generally includes a plurality of process chambers that perform substrate processing processes, a load lock chamber that creates an environment for substrates to enter the process chamber before the substrates enter the process chambers, and a transfer chamber that connects the process chambers and the load lock chamber and has a robot arm installed that transfers the substrates in the load lock chamber to the process chamber or transfers the substrates in the process chamber to the load lock chamber.

[0003] The process chamber may be equipped with a vacuum conduit for exhaust or a conduit for the flow of gas for the process, and a valve may be installed to block or open the flow of fluid in the conduit.

[0004] The above valve has a sealing member installed on one side of a wedge-shaped circular valve plate, and the sealing member slides to come into contact with or separate from the valve seat, thereby controlling the flow of fluid.

[0005] However, the conventional valve structure has a problem in that the sealing member installed on the valve plate wears out due to repeated operation, which reduces maintainability, or undesirable particles are generated due to excessive friction during the sliding operation.

[0006] The purpose of the present invention is to provide a gate valve and a substrate processing device including the same, which can improve maintainability by minimizing wear of valve parts and minimize the generation of particles due to friction during the valve opening and closing process, in recognition of the above-mentioned need.

[0007] The present invention was created to achieve the above-described object of the present invention, and discloses a gate valve (10) including a valve housing (100) having an opening (O) forming a flow path (P) and a valve seat (101); and a valve plate portion (200) movably installed between a closed position for sealing the flow path (P) and an open position for opening the flow path (P) by contacting the valve seat (101) within the valve housing (100).

[0008] The above valve plate portion (200) may include a plate member (210) having a sealing surface (212) facing the valve seat (101).

[0009] The above gate valve (10) may include a sealing member (220) installed on the sealing surface (212) or the valve seat (101), and a sliding member (240) installed on the valve plate portion (200) to guide the movement path of the valve plate (200).

[0010] The above sealing surface (212) may have an inclination angle (α) with respect to the movement direction (L) of the plate member (210).

[0011] The above sliding part (240) can be positioned to contact one side of the valve seat (101) of the valve housing (100) at the sealed position.

[0012] The above sliding part (240) may include a plurality of roller members (242, 244) installed on the valve plate part (200).

[0013] When the direction from the closed position to the open position is referred to as the forward direction, at least one of the plurality of roller members (242, 244) may be installed on the front side of the plate portion (200) based on the forward direction.

[0014] At least one of the plurality of roller members may be coupled to the rear side of the plate portion (200) in the forward direction.

[0015] The above gate valve (10) may further include a valve rod (300) coupled to the rear side of the plate member (210) with respect to the forward direction, and a driving unit (400) that drives the movement of the valve rod (300).

[0016] The above gate valve (10) may further include a position adjustment means for adjusting the position of the plate member (210) in the sealed position.

[0017] The above position adjustment means may include a fastening hole (218) provided on the rear side of the plate member (210), a rod end portion (302) provided at the end of the valve rod (300) and inserted into the fastening hole (218), and a fixing member (304) that fixes the fastening hole (218) and the rod end portion (302).

[0018] The fixing position of the fastener (218) can be adjusted within the above load end (302).

[0019] When the sealing surface (212) is referred to as the front surface of the plate member (210), the plate member (210) may include a sealing plate (219a) having the sealing surface (212) and a side wall portion (219b) around the edge of the sealing plate (219a).

[0020] The above side wall portion (219b) may have a height (H) along an axis (K) that passes vertically through the center of the opening (O) in the rear direction opposite to the front.

[0021] The above fastening hole (218) may be an opening penetrating the side wall portion (219b).

[0022] In another aspect, the present invention discloses a substrate processing device including a gate valve (10).

[0023] The gate valve according to the present invention and the substrate processing device including the same have the advantage of improving maintainability by minimizing wear of valve parts and minimizing the generation of particles due to friction during the valve opening and closing process.

[0024] Figure 1 is a perspective view illustrating a gate valve according to one embodiment of the present invention.

[0025] Figure 2 is a cross-sectional view showing a gate valve in a Euro-closed position.

[0026] Figure 3 is a cross-sectional view showing the gate valve in the euro open position.

[0027] Fig. 4 is a perspective view of a gate valve with the valve housing omitted from Fig. 1.

[0028] Figures 5a and 5b are top and bottom views illustrating a part of the configuration of Figure 4.

[0029] Figure 6 is a cross-sectional view taken along the line Ⅰ-Ⅰ' of Figure 5a.

[0030] Figure 7 is an enlarged view of a portion of Figure 3.

[0031] Hereinafter, a gate valve according to the present invention and a substrate processing device including the same will be described with reference to the attached drawings.

[0032] The gate valve (10) according to the present invention may be a gate valve installed in a substrate processing device that performs substrate processing such as deposition or etching on the substrate.

[0033] The above substrate processing device includes a chamber forming a sealed processing space, a gate for introducing and discharging the substrate, a susceptor for supporting the substrate, etc., and can be connected to a gas introduction system, a power supply system, a pressure control system, and an exhaust system, etc.

[0034] The above gate valve (10) is a gate valve installed in a conduit through which a fluid for a substrate processing device flows to open and close a flow path (P) of the conduit, and may include a valve housing (100) having an opening (O) forming the flow path (P) and a valve seat (101), and a valve plate portion (200) installed so as to be movable between a closed position that closes the flow path (P) by contacting the valve seat (101) within the valve housing (100) and an open position that opens the flow path (P).

[0035] The above valve housing (100) is a housing that has an opening (O) forming a flow path (P) and a valve seat (101) and forms a receiving space for receiving the valve plate portion (200), and can be configured in various ways.

[0036] For example, the valve housing (100) may include a first flow path forming part (122) having an opening (O) formed therein and a valve seat (101) on one surface thereof, and a second flow path forming part (124) having an opening (O) formed therein and facing the valve seat (101) of the flow path forming part (124).

[0037] The first euro-forming portion (122) may have a length parallel to the axis (K) passing through the center of the opening (O) and may have a flange formed at one end extending outward in a direction perpendicular to the axis (K).

[0038] The above flange is a connecting portion that is joined to the end of a conduit forming a flow path (P), and may be configured in various shapes depending on the design. The valve seat (101) may be formed on one side opposite to the flange and may be an area that comes into contact with the valve plate portion (200) described below.

[0039] The second flow path forming portion (124) is structured to be installed with a gap in the direction of the axis (K) passing through the center of the opening (O) and facing the first flow path forming portion (122), and a flange extending in an outward direction perpendicular to the axis (K) may be formed. The flange is a connecting portion that is joined to the end of a conduit forming the flow path (P), and may be installed in the middle of the conduit flow path (P) through the first and second flow path forming portions (122, 124).

[0040] The above valve housing (100) may further include a plurality of partitions (112, 114, 116, 118) that divide the space in which the valve plate portion (200) is accommodated from the outside.

[0041] The above-mentioned partitions (112, 114, 116, 118) are housing members that surround the first and second flow-forming parts (122, 124) and form a receiving space, and may be composed of an upper plate (112), a lower plate (112), and side plates (114, 116, 118).

[0042] The upper plate (112) and lower plate (112) may be formed to extend a certain length or more along the movement direction (L) of the valve plate portion (200) to form a movement path of the valve plate portion (200).

[0043] The K-direction height of the above side plates (114, 116, 118) can be formed to a length corresponding to the gap between the flanges of the first and second euro-forming parts (122, 124).

[0044] The above valve plate portion (200) is configured to be movably installed between a closed position that seals the flow path (P) by contacting the valve seat (101) within the valve housing (100) and an open position that opens the flow path (P), and can be configured in various ways.

[0045] As an example, the valve plate portion (200) may include a plate member (210) having a sealing surface (212) facing the valve seat (101).

[0046] The above plate member (210) is a sealing plate having a sealing surface (212) facing the valve seat (101), and can be configured in various ways.

[0047] In the closed position of the valve plate portion (200), the sealing surface (212) is in close contact with the valve seat (101), and in the open position, the sealing surface (212) can be spaced apart from the valve seat (101).

[0048] Referring to FIG. 6, when the sealing surface (212) is referred to as the front surface of the plate member (210), the plate member (210) may include a sealing plate (219a) having the sealing surface (212) and a side wall portion (219b) around the edge of the sealing plate (219a).

[0049] The above sealing plate (219a) is a plate having the sealing surface (212) on the front side, and can be configured in a rectangular shape on the entire plane as shown in Fig. 5b.

[0050] The above gate valve (10) may include a sealing member (220) installed on the sealing surface (202) or the valve seat (101), and a sliding member (240) installed on the valve plate portion (200) to guide the movement path of the valve plate (200).

[0051] The above sealing member (220) is installed on the sealing surface (212) or valve seat (101) which is the front surface of the sealing plate (219a), and may be configured as an O-ring as a type of sealing member.

[0052] When the sealing member (220) is installed on the sealing surface (212) of the sealing plate (219a), a groove for installing the sealing member (220) can be formed along the periphery of the sealing surface (212), and the sealing member (220) can be inserted into the groove so that a portion thereof protrudes above the sealing surface (212). The protruding sealing member (220) can be brought into close contact with the valve seat (101) as the sealing plate (219a) approaches the valve seat (101) to thereby implement sealing of the flow path (P).

[0053] In addition, referring to FIG. 2, the sealing surface (212) of the sealing plate (219a) may have an inclination angle (α) with respect to the movement direction (L) of the plate member (210).

[0054] The above movement direction (L) may be inclined with respect to an axis (K) that passes vertically through the center of the opening (O). For example, the movement direction (L) may be a direction perpendicular to the axis (K).

[0055] The sealing surface (212) may form an inclined surface having an angle of inclination (α) with respect to the moving direction (L). That is, the plate member (210) may be a wedge-shaped valve plate in which the sealing surface (212) forms an inclined surface. In the present invention, when the sealing surface (212) of the valve plate (210) is an inclined surface having an angle of inclination (α) with respect to the moving direction (L) and has a tapered shape in which the thickness of the plate member (210) decreases in the forward direction, the plate member (210) is defined as a wedge-shaped valve plate. At this time, it is obvious that the rear surface opposite to the sealing surface (212) may be parallel to the moving direction (L) or may form an inclined surface similar to the sealing surface (212).

[0056] As the sealing surface (212) has an inclination angle (α) with respect to the moving direction (L), the valve seat (101) that is in close contact with the sealing surface (212) can also form an inclined surface inclined at the same inclination angle (α) as the sealing surface (212).

[0057] As the sealing surface (212) has an inclination angle (α), the plate member (210) can be brought into close contact with the valve seat (101) in the process of moving toward the valve seat (101) along the movement direction (L). Meanwhile, in the drawing, the rear surface opposite to the sealing surface (212) of the plate member (210) is illustrated as being parallel to the movement direction (L), but the present invention is not limited thereto. That is, the rear surface of the sealing surface (212) may also form an inclined surface having an inclination angle with respect to the movement direction (L). At this time, it is obvious that the inclination angle of the rear surface of the sealing surface (212) may be the same as or different from the inclination angle (α) of the sealing surface (212).

[0058] Referring to Fig. 6, the side wall portion (219b) may be a side wall having a height (H) along an axis (K) that passes vertically through the center of the opening (O) in the direction of the rear surface opposite the front surface, i.e., the sealing surface (212). The side wall portion (219b) is distinguished from the sealing plate (219a) for convenience, and the side wall portion (219b) may be formed integrally with the sealing plate (219a).

[0059] Since the sealing surface (212) has an inclination angle (α), the height (H) of the side wall portion (219b) may vary depending on the position. That is, when the direction in which the plate member (210) moves from the closed position to the open position is referred to as the forward direction, the height (H) of the side wall portion (219b) may decrease from the rear side to the front side of the plate member (210) with respect to the forward direction.

[0060] The side wall portion (219b) is a side wall that surrounds the edge of the sealing plate (219a), and the plate member (210) may have an empty recessed space (219c) formed inside the side wall portion (219b). As the recessed space (219c) is formed, the self-weight of the plate member (210) may be reduced. Meanwhile, it is obvious that the recessed space (219c) is a configuration that can be applied selectively and is not an essential component.

[0061] The above sliding member (240) is a sliding member that is installed on the plate member (210) and guides the movement path of the plate member (210), and can be configured in various ways.

[0062] The above sliding part (240) can be positioned to contact one side of the valve seat (101) of the valve housing (100) at the sealed position.

[0063] For example, the sliding portion (240) may include a plurality of roller members (242, 244) installed on the valve plate portion (200).

[0064] For example, when the direction in which the plate member (210) moves from the closed position to the open position is referred to as the forward direction, at least one of the plurality of roller members (242, 244) may be installed on the front side of the valve plate member (200) based on the forward direction.

[0065] As another example, at least one of the plurality of roller members (242, 244) may be installed on the rear side of the valve plate portion (200) with respect to the forward direction.

[0066] As another example, at least one of the plurality of roller members (242, 244) may be installed at the center of the valve plate portion (200) with respect to the forward direction.

[0067] The above roller members (242, 244) may be rollers that guide the movement of the plate member (210).

[0068] The above roller members (242, 244) may be configured in various numbers at various locations, but as an example, may be configured with four roller members (242, 244) installed at each of the front right corner and the front left corner of the front and rear sides of the plate member (210).

[0069] The above roller members (242, 244) can be installed on the plate member (210) in various ways.

[0070] For example, the roller members (242, 244) can be mounted to the plate member (210) via the roller coupling shaft (214, 216).

[0071] Although FIGS. 5A and 5B illustrate that the roller coupling shaft (214, 216) protrudes outward from the plate member (210), the present invention is not limited thereto. As another example, the roller coupling shaft (214, 216) may be provided on the roller member (242, 244), and various methods may be applied as long as the roller member (242, 244) can be coupled to the plate member (210).

[0072] The protrusion direction of the above roller coupling shaft (214, 216) may be perpendicular to both the movement direction (L) and the axis line (K).

[0073] Meanwhile, despite the combination of the roller members (242, 244), in order to minimize the area occupied by the plate member (210) and the roller members (242, 244), that is, in order to minimize the roller members (242, 244) protruding outward from the plate member (210), an inner recessed step (215) may be formed in the plate member (210) to secure a space in which the roller members (242, 244) are installed.

[0074] Since the roller member (242, 244) is mounted in the empty space formed by the inner depression step (215), it is possible to prevent the roller member (242, 244) from excessively protruding outward from the plate member (210) and thereby increasing the size of the entire valve, and to implement a valve with an overall compact structure.

[0075] The diameters of the plurality of roller members (242, 244) may all be the same. When the diameters of the roller members (242, 244) are all the same, all roller members (242, 244) come into contact with the inner surface (112a) of the valve housing (100) during the movement of the plate member (210), thereby enabling more stable support of the plate member (210). In addition, even when differential pressure is applied in both directions, there is an advantage in that the plate member is supported more stably during the movement and during the euro sealing, and the sealing performance is improved.

[0076] However, the present invention is not limited thereto, and the diameter of at least one of the plurality of roller members (242, 244) may be different from the diameter of the other roller members (242, 244).

[0077] For example, the diameter (D2) of the roller member (244) installed on the rear side of the plate member (210) may be larger than the diameter (D1) of the roller member (242) installed on the front side of the plate member (210). Accordingly, the rear side roller member (244) may be configured so as not to interfere with the valve housing (100) during the movement process.

[0078] The above roller members (242, 244) may be positioned so as to protrude beyond the side wall portion (219b) of the plate member (210) and contact the inner surface (112a) of the valve housing (100) within the valve housing (100).

[0079] That is, the roller members (242, 244) can be installed in a state of contacting the inner surface (112a) of one of the upper and lower plates (112) of the valve housing (100), more specifically, the upper and lower plates (112) of the valve housing (100). The roller members (242, 244) can guide the forward and backward movement of the plate member (210) by rolling in a state of contacting the inner surface (112a) when the plate member (210) moves.

[0080] For example, the sliding part (240) may be installed in contact with the inner surface (112a) of the lower surface plate (112) of the valve housing (100), and may be somewhat spaced apart from the upper surface plate (112) facing the lower surface plate (112). By contacting the inner surface (112a) of the valve housing (100), the sliding part (240) can be stably supported during movement and sealing of the flow path, and the sealing performance can be improved.

[0081] As another example, it is also possible for the roller member (242, 244) to move in a state separated from the inner surface (112a) during the movement process and then come into contact with one side of the valve seat (101) at the sealed position.

[0082] When the direction in which the plate member (210) moves from the closed position to the open position is referred to as the forward direction, the gate valve (10) may further include a valve rod (300) coupled to the rear side of the plate member (210) with respect to the forward direction, and a driving unit (400) that drives the movement of the valve rod (300).

[0083] The above valve rod (300) can be configured in various ways as a valve shaft coupled to the plate member (210). The valve rod (300) is driven by a driving unit (400), and accordingly, the plate member (210) coupled to the valve rod (300) can move forward and backward in the direction of movement (L).

[0084] At this time, the plate member (210) may be provided with a fastening hole (218) for connection with the valve rod (300) on the rear side wall portion (219b).

[0085] The above fastening hole (218) may be an opening provided in the side wall portion (219b) into which one end of the valve rod (300) is inserted and fixed.

[0086] The above driving unit (400) can be configured in various ways, such as hydraulic, pneumatic, actuator, or motor, as a driving source that drives the movement of the valve rod (300).

[0087] For example, the driving unit (400) may include a piston (420) installed at an end of the valve rod (300) and a cylinder (410) that accommodates the piston (420). The cylinder (410) may be coupled to a valve housing (100).

[0088] The internal space of the cylinder (410) can be divided into a first space (412) on the rear side of the piston (420) and a second space (414) on the front side based on the piston (420).

[0089] FIG. 2 illustrates a sealed position in which the euro (P) is sealed by the plate member (210). As illustrated in FIG. 2, when pressure is applied to the first space (412), the piston (420) moves forward, and accordingly, the plate member (210) moves forward along the movement direction (L) to move to the sealed position and can be brought into close contact with the valve seat (101).

[0090] Conversely, FIG. 3 illustrates an open position in which the euro (P) is open. As shown in FIG. 3, when the plate member (210) is in a closed position and pressure is applied to the second space (414), the piston (420) moves backward, and accordingly, the plate member (210) moves backward along the movement direction (L) to the open position and can be separated from the valve seat (101).

[0091] Meanwhile, since the internal space (112b) of the valve housing (100) is a space that is connected to the flow path (P), a bellows (B) can be installed on the outer surface of the valve rod (300) so that the internal space (112b) of the valve housing (100) can be distinguished from the driving unit (400) despite the forward and backward movement of the valve rod (300).

[0092] In addition, the driving unit (400) may further include an elastic member (S) installed in the second space (414) of the cylinder (410) to alleviate the impact caused by the piston (420) when the valve rod (300) moves forward.

[0093] In addition, the piston (420) forms a protruding structure on the front side and a sunken area that matches the protruding structure on the second space (414) side, thereby forming an air cushion between the protruding structure and the sunken area when the piston (420) moves forward, and this can be utilized as a buffer structure.

[0094] Meanwhile, the conventional gate valve (10) may experience wear of valve components with repeated use, and particles may be generated due to friction during the valve opening and closing process. In particular, the sealing member (220) may be worn due to friction or particles may be generated during the movement of the plate member (210), and the sealing member (220) may be in excessive contact with the valve seat (101), which may reduce the lifespan of the sealing member (220) and shorten the maintenance cycle.

[0095] However, the present invention guides the movement path of the plate member (210) along the movement path between the closed position and the open position of the plate member (210) by installing a sliding part (240) on the plate member (210) and comes into close contact with the valve housing (110) at the closed position, so that problems such as wear of other parts including the sealing member (220) due to unnecessary friction or excessive friction can be effectively prevented.

[0096] Furthermore, the present invention can prevent the sealing member (220) from being damaged due to the plate member (210) moving excessively forward when sealing by adjusting the distance that the plate member (210) moves forward when moving to the sealing position.

[0097] For example, the gate valve (10) according to the present invention can adjust the maximum forward position of the plate member (210) through a control unit that adjusts the forward and backward stroke of the driving unit (400). That is, the control unit can adjust the position when the plate member (210) is at the maximum forward position to close the flow path (P) by controlling the forward movement distance of the piston (420) of the driving unit (400).

[0098] As another example, the gate valve (10) according to the present invention may further include a position adjustment means for adjusting the position of the plate member (210) in the sealed position.

[0099] The above position adjustment means may include a fastening hole (218) provided on the rear side of the plate member (210), a rod end portion (302) provided at the end of the valve rod (300) and inserted into the fastening hole (218), and a fixing means (304) for fixing the fastening hole (218) and the rod end portion (302). At this time, the fixing position of the fastening hole (218) within the rod end portion (302) can be adjusted.

[0100] The above load end (302) may be an insertion hole inserted into a fastening hole (218). The fixing position of the fastening hole (218) within the load end (302) may be adjusted, and the load end (302) and the fastening hole (218) may be fixedly connected at the adjusted position through a fixing means (304).

[0101] As an example, referring to FIG. 7, the fastening member (218) and the rod end (302) may be fastened with a screw-joint structure. That is, screw threads may be formed on the inner surface of the fastening member (218) and the outer surface of the rod end (302). At this time, the rod end (302) may be a type of fastening screw and may be screw-joined to the fastening member (218). Various fixing means may be applied to the fixing member (304) as long as the coupling position of the rod end (302) and the fastening member (218) can be fixed. For example, the fixing member (304) may be a nut member coupled to the rod end (302), but is not limited thereto.

[0102] By relatively rotating the above fastener (218) and the rod end (302), the joining position of the fastener (218) and the rod end (302) can be adjusted, and by fixing the joining position through the fixing means (304), the sealing position in contact with the valve seat (101) when the valve plate member (210) reaches the maximum forward position can be adjusted.

[0103] The present invention can effectively prevent the sealing member (220) from excessively rubbing against the valve seat (101) at the Euro (P) sealing position by adjusting the fixing position of the fastener (218) within the rod end (302) through the position adjusting means, and can improve maintainability.

[0104] In addition, by appropriately adjusting the joining position of the plate member (210) to the valve rod (300), when the plate member (210) reaches the maximum forward position, the sealing surface (212) can be firmly brought into close contact with the valve seat (101), and sealing performance can be guaranteed even without differential pressure of the flow path (P).

[0105]

[0106] The above is only a description of some of the preferred embodiments that can be implemented by the present invention, and as is well known, the scope of the present invention should not be construed as being limited to the above embodiments, and the technical ideas of the present invention described above and the technical ideas underlying them are all included in the scope of the present invention.

Claims

1. A gate valve (10) comprising a valve housing (100) having an opening (O) forming a flow path (P) and a valve seat (101); and a valve plate portion (200) movably installed between a closed position for sealing the flow path (P) and an open position for opening the flow path (P) by contacting the valve seat (101) within the valve housing (100); The above valve plate portion (200) includes a plate member (210) having a sealing surface (212) facing the valve seat (101), It includes a sealing member (220) installed on the sealing surface (212) or the valve seat (101), and a sliding member (240) installed on the valve plate part (200) to guide the movement path of the valve plate part (200). A gate valve (10) characterized in that the sealing surface (212) has an inclination angle (α) with respect to the movement direction (L) of the plate member (210).

2. In claim 1, A gate valve (10), characterized in that the sliding part (240) is arranged to contact one side of the valve seat (101) of the valve housing (100) at the sealed position.

3. In claim 1, A gate valve (10) characterized in that the sliding part (240) includes a plurality of roller members (242, 244) installed on the valve plate part (200).

4. In claim 3, When the direction from the above closed position to the above open position is called the forward direction, A gate valve (100), characterized in that at least one of the plurality of roller members (242, 244) is installed on the front side of the plate member (200) with respect to the forward direction.

5. In claim 3, When the direction from the above closed position to the above open position is called the forward direction, A gate valve (100), characterized in that at least one of the plurality of roller members is coupled to the rear side of the plate member (200) in the forward direction.

6. In claim 1, When the direction from the above closed position to the above open position is called the forward direction, The gate valve (10) is characterized in that it further includes a valve rod (300) coupled to the rear side of the plate member (210) with respect to the forward direction, and a driving unit (400) that drives the movement of the valve rod (300).

7. In claim 6, The gate valve (10) is characterized in that it further includes a position adjustment means for adjusting the position of the plate member (210) in the sealed position.

8. In claim 7, The above position adjustment means includes a fastening hole (218) provided on the rear side of the plate member (210), a rod end (302) provided at the end of the valve rod (300) and inserted into the fastening hole (218), and a fixing member (304) that fixes the fastening hole (218) and the rod end (302). A gate valve (10) characterized in that the fixed position of the fastener (218) is adjusted within the above load end (302).

9. In claim 8, When the above sealing surface (212) is referred to as the front surface of the plate member (210), The above plate member (210) includes a sealing plate (219a) having the sealing surface (212) and a side wall portion (219b) around the edge of the sealing plate (219a). A gate valve (10) characterized in that the side wall portion (219b) has a height (H) along an axis (K) that passes vertically through the center of the opening (O) in the rear direction opposite to the front.

10. In claim 9, A gate valve (10) characterized in that the above fastening member (218) is an opening penetrating the side wall portion (219b).

11. A substrate processing device including a gate valve (10) according to any one of claims 1 to 10.

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