Mask assembly and manufacturing method therefor
By setting filling elements and adjusting the slope angle at the mask connection point of the OLED display panel, the problems of mask sagging and film unevenness in large-size panels are solved, resulting in better film flatness and service life.
Patent Information
- Application Number
- PCT/CN2024/096313
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2024-05-30
- Publication Date
- 2026-02-19
AI Technical Summary
As the size of OLED display panels increases, the splicing process of photomasks is prone to problems such as excessive sagging, poor flatness and thickness uniformity of the film layer, leading to localized breakage of the film layer and affecting its service life.
By setting filler elements between the joints of adjacent masks and making the slope angle of the joint less than 90 degrees, the supporting force provided by the connecting elements is combined to reduce the amount of sagging, and the filler elements are set at the intervals to ensure the uniformity of the film thickness.
It effectively reduces the sagging of the mask, improves the flatness and thickness uniformity of the film layer, reduces the risk of local breakage, and extends the service life of the mask.
Smart Images
Figure CN2024096313_19022026_PF_FP_ABST
Abstract
Description
Mask assembly and manufacturing method thereof TECHNICAL FIELD
[0001] At least one embodiment of the present disclosure relates to a mask assembly and a manufacturing method thereof. BACKGROUND
[0002] An organic light-emitting diode (OLED) display screen is a new generation of display screen after liquid crystal display, which has the advantages of wide color gamut, fast response speed, foldable, etc. With the gradual expansion of the size of the display screen, the shipment of the display panel (Panel) can be effectively improved, thereby promoting the improvement of higher resolution, wider color gamut, faster response speed, etc. to bring better visual experience.
[0003] SUMMARY
[0004] At least one embodiment of the present disclosure provides a mask assembly and a manufacturing method.
[0005] At least one embodiment of the present disclosure provides a mask assembly, comprising a plurality of mask sheets and at least one connecting element, each of the mask sheets comprises a plurality of openings and a separation portion surrounding the openings; the at least one connecting element is configured to connect at least two of the plurality of mask sheets; wherein the plurality of mask sheets comprises adjacent first and second mask sheets, the separation portion of the first mask sheet comprises a first connecting portion, the separation portion of the second mask sheet comprises a second connecting portion, the first connecting portion is located outside the plurality of openings of the first mask sheet, the second connecting portion is located outside the plurality of openings of the second mask sheet, the first connecting portion and the second connecting portion are close to each other, and there is a gap between at least part of the surfaces of the first connecting portion and the second connecting portion facing each other, at least part of the first connecting portion and at least part of the second connecting portion are located on the same side of the connecting element and are connected to the connecting element respectively, the mask assembly further comprises a filling element located in at least part of the gap; or the first connecting portion comprises a first surface facing the gap, the second connecting portion comprises a second surface facing the gap, and the slope angle of at least one of the first surface and the second surface with respect to the connecting element is less than 90 degrees.
[0006] For example, according to at least one embodiment of the present disclosure, a mask assembly is provided, and the slope angle of at least one of the first surface and the second surface with respect to the connecting element is not greater than 80 degrees.
[0007] For example, according to at least one of the embodiments of the present disclosure, there is provided a mask assembly, at least one of the first surface and the second surface has a slope angle of 10-40 degrees with respect to the slope angle of the connection element.
[0008] For example, according to at least one of the embodiments of the present disclosure, there is provided a mask assembly, at least one of the first surface and the second surface has an arc-shaped cross section with respect to a cross section of a plane parallel to a thickness direction of the connection element and parallel to an arrangement direction of the first mask sheet and the second mask sheet.
[0009] For example, according to at least one of the embodiments of the present disclosure, there is provided a mask assembly, surfaces of the first connection portion and the second connection portion facing each other are in contact with the filling element.
[0010] For example, according to at least one of the embodiments of the present disclosure, there is provided a mask assembly, a material of the filling element includes one of a same material as the mask sheet and optical glue.
[0011] For example, according to at least one of the embodiments of the present disclosure, there is provided a mask assembly, a first thickness difference between the filling element and the first connection portion is 1 / 5-1 / 2 of a maximum thickness of the first connection portion, and a second thickness difference between the filling element and the second connection portion is 1 / 5-1 / 2 of a maximum thickness of the second connection portion.
[0012] For example, according to at least one of the embodiments of the present disclosure, there is provided a mask assembly, at least one of the first thickness difference and the second thickness difference is 10-50 microns.
[0013] For example, according to at least one of the embodiments of the present disclosure, there is provided a mask assembly, in an arrangement direction of the first connection portion and the second connection portion, a size of a portion of the first connection portion overlapping the connection element in a thickness direction thereof is not less than 1 / 4 of a maximum size of the first connection portion, and / or a size of a portion of the second connection portion overlapping the connection element in a thickness direction thereof is not less than 1 / 4 of a maximum size of the second connection portion.
[0014] For example, according to at least one of the embodiments of the present disclosure, there is provided a mask assembly, the mask assembly further includes a protective film layer overlapping the at least one connection element.
[0015] For example, according to at least one of the embodiments of the present disclosure, there is provided a mask assembly, the first connection portion and the second connection portion are located on the same side of the connection element.
[0016] For example, according to at least one embodiment of the present disclosure, a mask assembly is provided, the first connecting portion includes a first body portion and a first end portion, the first end portion is closer to the interval than the first body portion, the first end portion is recessed relative to the first body portion in the thickness direction of the first connecting portion, so that the first connecting portion has a first recess, the second connecting portion includes a second body portion and a second end portion, the second end portion is closer to the interval than the second body portion, the second end portion is recessed relative to the second body portion in the thickness direction of the second connecting portion, so that the second connecting portion has a second recess, the first part of the connecting element is located in the first recess, and the second part of the connecting element is located in the second recess.
[0017] For example, according to at least one embodiment of the present disclosure, a mask assembly is provided, the thickness of the first body portion and the thickness of the second body portion are both greater than the thickness of the connecting element, and the surface of the connecting element away from the interval is flush with the surface of at least one of the first body portion and the second body portion.
[0018] For example, according to at least one embodiment of the present disclosure, a mask assembly is provided, at least two of the plurality of mask sheets are connected into a mask sheet assembly by at least one connecting element, the mask sheet assembly is a one-piece structure, and the mask assembly further includes a mask frame, the mask frame includes a mask bezel, the mask sheet assembly is located on the mask bezel, and at least part of the edge of the mask sheet assembly is connected with the mask bezel.
[0019] For example, according to at least one embodiment of the present disclosure, a mask assembly is provided, the mask frame further includes an auxiliary structure, the auxiliary structure overlaps the area surrounded by the mask bezel, and the auxiliary structure is connected with the mask bezel, the at least one connecting element includes at least one auxiliary connecting element, and at least part of the auxiliary connecting element is located on the auxiliary structure.
[0020] At least one embodiment of the present disclosure provides a method for manufacturing a mask assembly, comprising: connecting at least two mask sheets of a plurality of mask sheets by at least one connecting element, wherein each of the mask sheets comprises a plurality of openings and a separation portion surrounding the openings, the plurality of mask sheets comprises a first mask sheet and a second mask sheet, the separation portion of the first mask sheet comprises a first connecting portion, the separation portion of the second mask sheet comprises a second connecting portion, the first connecting portion is located outside the plurality of openings of the first mask sheet, the second connecting portion is located outside the plurality of openings of the second mask sheet, the first connecting portion and the second connecting portion are close to each other and at least part of surfaces of the first connecting portion and the second connecting portion facing each other have a gap, at least part of the first connecting portion and at least part of the second connecting portion are located on the same side of the connecting element and are connected to the connecting element respectively; and forming a filling element in at least part of the gap; or melting at least one of a part of an end portion of the first connecting portion close to the gap and a part of an end portion of the second connecting portion close to the gap, so that at least one of a first surface of the first connecting portion facing the gap and a second surface of the second connecting portion facing the gap has a slope angle less than 90 degrees with respect to the connecting element.
[0021] For example, according to at least one embodiment of the present disclosure, the method for manufacturing a mask assembly, the forming a filling element in at least part of the gap, comprises: forming a filling material in the gap; and melting the filling material by laser or electron beam to form the filling element.
[0022] For example, according to at least one embodiment of the present disclosure, the method for manufacturing a mask assembly, the filling element is made of the same material as the mask sheet.
[0023] For example, according to at least one embodiment of the present disclosure, the method for manufacturing a mask assembly, the forming a filling element in at least part of the gap, comprises: filling optical glue in the gap; and curing the optical glue to form the filling element.
[0024] For example, according to at least one embodiment of the present disclosure, the method for manufacturing a mask assembly, the first connecting portion comprises a first corner portion close to the gap, the second connecting portion comprises a second corner portion close to the gap, and the melting at least one of a part of an end portion of the first connecting portion close to the gap and a part of an end portion of the second connecting portion close to the gap comprises: melting at least one of the first corner portion of the first connecting portion and the second corner portion of the second connecting portion by laser or electron beam.
[0025] For example, the manufacturing method of the mask assembly provided by at least one embodiment of the present disclosure further comprises: forming a protective film layer on the plurality of mask pieces, wherein the protective film layer overlaps with the at least one connecting element. BRIEF DESCRIPTION OF DRAWINGS
[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings of the embodiments will be briefly introduced as follows. Obviously, the drawings in the following description are only related to some embodiments of the present disclosure, and not limit the present disclosure.
[0027] FIG. 1 is a partial structural schematic diagram of a mask assembly provided by at least one embodiment of the present disclosure.
[0028] FIG. 2 is a partial cross-sectional schematic diagram of a mask assembly provided by an embodiment of the present disclosure.
[0029] FIG. 3 is a partial cross-sectional schematic diagram of another mask assembly provided by an embodiment of the present disclosure.
[0030] FIG. 4 is a partial cross-sectional schematic diagram of still another mask assembly provided by an embodiment of the present disclosure.
[0031] FIG. 5 is a schematic diagram of a mask assembly provided with a protective film layer according to an embodiment of the present disclosure.
[0032] FIG. 6 is a partial structural schematic diagram of still another mask assembly provided by an embodiment of the present disclosure.
[0033] FIG. 7 is a structural schematic diagram of still another mask assembly provided by at least one embodiment of the present disclosure.
[0034] FIG. 8 is a structural schematic diagram of still another mask assembly provided by at least one embodiment of the present disclosure.
[0035] FIG. 9 is a structural schematic diagram of a mask frame provided by at least one embodiment of the present disclosure.
[0036] FIG. 10 is a schematic diagram of a mask piece assembly provided in the mask frame shown in FIG. 9 according to at least one embodiment of the present disclosure.
[0037] FIG. 11 is a structural schematic diagram of another mask frame provided by at least one embodiment of the present disclosure.
[0038] FIG. 12 is a schematic diagram of a mask piece assembly provided in the mask frame shown in FIG. 11 according to at least one embodiment of the present disclosure.
[0039] FIGS. 13-14 are structural schematic diagrams of a manufacturing process of a mask assembly provided by at least one embodiment of the present disclosure.
[0040] FIG. 15 is a schematic diagram of a structure after forming a protective film layer in the mask assembly shown in FIG. 3. DETAILED DESCRIPTION
[0041] In order to make the objects, technical solutions, and advantages of the embodiments of the present disclosure clearer, the technical solutions of the embodiments of the present disclosure will be described clearly and completely below with reference to the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are some, but not all, of the embodiments of the present disclosure. Based on the described embodiments of the present disclosure, all other embodiments obtained by a person of ordinary skill in the art without creative effort belong within the scope of the present disclosure.
[0042] Unless otherwise defined, technical terms or scientific terms used in the present disclosure shall have the ordinary meaning as understood by a person of ordinary skill in the art to which the present disclosure belongs. The terms "first", "second", and similar terms used in the present disclosure do not denote any order, quantity, or importance, but are used to distinguish different components. The terms "include", "contain", and similar terms mean that the elements or objects before the terms encompass the elements or objects listed after the terms and their equivalents, and do not exclude other elements or objects.
[0043] A back plane mask (BP Mask) generally refers to a mask used for an OLED device. The panel of the OLED device includes a pixel circuit and a driving circuit, and the pixel circuit is used to control the OLED device to emit light. The BP Mask plays a key role in the panel manufacturing process, and by precisely controlling the layout and connection of the circuit, it can ensure that the pixel circuit can work normally, thereby realizing high-quality image display.
[0044] In research, the inventors of the present application found that, as the size of the display panel of the OLED device continues to expand, the size of the corresponding Mask (for example, a metal Mask) is also correspondingly large, so that the Mask has a large amount of sagging in the use process. At the same time, when a scheme of splicing multiple mask pieces is adopted, since there is a gap between the two mask pieces being spliced, the flatness and thickness uniformity of the film layer provided on the mask piece can be damaged, and when the sizes of the gaps generated when multiple mask pieces are spliced are different, the thickness of the film layer provided on the mask piece at different positions will be thinned to varying degrees, or even the film layer will be locally broken, so that the mask piece cannot be completely covered. For example, when the film layer provided on the mask piece is a protective film layer, if the film layer is locally broken, etc., it is difficult to ensure that the surface properties of the mask piece are not damaged, thereby affecting the service life of the mask piece.
[0045] At least one embodiment of the present disclosure provides a mask assembly, which comprises a plurality of mask sheets and at least one connecting element, each mask sheet comprises a plurality of openings and a separation portion surrounding the openings; the at least one connecting element is configured to connect at least two mask sheets of the plurality of mask sheets; the plurality of mask sheets comprises a first mask sheet and a second mask sheet adjacent to each other, the separation portion of the first mask sheet comprises a first connecting portion, the separation portion of the second mask sheet comprises a second connecting portion, the first connecting portion is located outside the plurality of openings of the first mask sheet, the second connecting portion is located outside the plurality of openings of the second mask sheet, the first connecting portion and the second connecting portion are close to each other and have a gap between at least part of surfaces of the first connecting portion and the second connecting portion facing each other, at least part of the first connecting portion and at least part of the second connecting portion are located on the same side of the connecting element and are connected to the connecting element respectively, the mask assembly further comprises a filling element located in at least part of the gap; or, the first connecting portion comprises a first surface facing the gap, the second connecting portion comprises a second surface facing the gap, and the slope angle of at least one of the first surface and the second surface with respect to the connecting element is less than 90 degrees.
[0046] At least one embodiment of the present disclosure provides a mask assembly, which comprises a plurality of mask sheets and at least one connecting element, each mask sheet comprises a plurality of openings and a separation portion surrounding the openings; the at least one connecting element is configured to connect at least two mask sheets of the plurality of mask sheets; the plurality of mask sheets comprises a first mask sheet and a second mask sheet adjacent to each other, the separation portion of the first mask sheet comprises a first connecting portion, the separation portion of the second mask sheet comprises a second connecting portion, the first connecting portion is located outside the plurality of openings of the first mask sheet, the second connecting portion is located outside the plurality of openings of the second mask sheet, the first connecting portion and the second connecting portion are close to each other and have a gap between at least part of surfaces of the first connecting portion and the second connecting portion facing each other, at least part of the first connecting portion and at least part of the second connecting portion are located on the same side of the connecting element and are connected to the connecting element respectively, the mask assembly further comprises a filling element located in at least part of the gap; or, the first connecting portion comprises a first surface facing the gap, the second connecting portion comprises a second surface facing the gap, and the slope angle of at least one of the first surface and the second surface with respect to the connecting element is less than 90 degrees.
[0047] The mask assembly and the manufacturing method thereof provided by the embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings, so that the corresponding technical solutions can be made clearer and easier to understand.
[0048] FIG. 1 is a partial structural schematic diagram of a mask assembly provided by at least one embodiment of the present disclosure; FIG. 2 is a partial cross-sectional schematic diagram of a mask assembly provided by an embodiment of the present disclosure, for example, FIG. 2 can be a cross-sectional schematic diagram of the mask assembly in FIG. 7 along line A-A'; FIG. 3 is another partial cross-sectional schematic diagram of a mask assembly provided by an embodiment of the present disclosure, for example, FIG. 2 can be a cross-sectional schematic diagram of the mask assembly in FIG. 1 along line B-B'.
[0049] As shown in FIG. 1, the mask assembly 123 includes a plurality of mask sheets 100. Each mask sheet 100 includes a plurality of openings 101 and a separation portion 102 surrounding each opening 101. For example, a portion of the separation portion 102 is between two adjacent openings 101. For example, a portion of the separation portion 102 is outside the plurality of openings 101 of the mask sheet 100. For example, the display panel includes a display area and a peripheral area surrounding the display area, the display area includes a plurality of arrayed sub-pixels, such as red sub-pixels emitting red light, green sub-pixels emitting green light, and blue sub-pixels emitting blue light, and the display area is configured to display images. For example, each opening of the mask sheet 100 corresponds to a main display area, but embodiments of the present disclosure are not limited to the specific size of each opening. For example, each opening 101 of the mask sheet 100 can be used as a mask opening for forming an encapsulation layer in the display panel, and the encapsulation layer can include inorganic materials such as silicon nitride and silicon oxide, but embodiments of the present disclosure are not limited thereto. For example, each opening 101 of the mask sheet 100 can also be used as a mask opening for forming a common layer in the display panel, such as a whole layer film layer of a hole transport layer and an electron transport layer.
[0050] As shown in FIG. 1, the mask assembly 123 further includes at least one connecting element 200. The connecting element 200 is configured to connect at least two mask sheets 100 of the plurality of mask sheets 100. For example, the mask assembly can include a plurality of rows and a plurality of columns of mask sheets, each column of mask sheets and each row of mask sheets includes a plurality of mask sheets 100, for example, two adjacent rows of mask sheets can be connected by one connecting element 200, and two adjacent columns of mask sheets can also be connected by one connecting element 200, and embodiments of the present disclosure are not limited to the size of the connecting element 200.
[0051] As shown in FIG. 1, the plurality of mask sheets 100 in the mask assembly 123 includes an adjacent first mask sheet 110 and a second mask sheet 120. The separation portion 102 of the first mask sheet 110 includes a first connecting portion 1021, and the first connecting portion 1021 is outside the plurality of openings 101 of the first mask sheet 110. For example, the first connecting portion 1021 can be a portion of the separation portion 102 on one side of the plurality of openings 101. The separation portion 102 of the second mask sheet 120 includes a second connecting portion 1022, and the second connecting portion 1022 is outside the plurality of openings 101 of the second mask sheet 120. For example, the second connecting portion 1022 can be a portion of the separation portion 102 on one side of the plurality of openings 101.
[0052] As shown in FIG. 1, the first connecting part 1021 and the second connecting part 1022 are close to each other, at least part of the first connecting part 1021 and at least part of the second connecting part 1022 are located on the same side of the connecting element 200, and are connected with the connecting element 200 respectively. For example, as shown in FIG. 2, in the Z direction, at least part of the first connecting part 1021 and at least part of the second connecting part 1022 are located on one side of the connecting element 200. For example, at least part of the first connecting part 1021 and at least part of the second connecting part 1022 are overlapped on the connecting element 200. At least part of the surface of the first connecting part 1021 and at least part of the surface of the second connecting part 1022 are opposite to each other, and there is a gap 300 between them. For example, the first connecting part 1021 can be arranged apart from the second connecting part 1022, so that the gap 300 is located between the first connecting part 1021 and the second connecting part 1022. For example, a part of the first connecting part 1021 and a part of the second connecting part 1022 can be close to and arranged apart from each other; at the same time, another part of the first connecting part 1021 and another part of the second connecting part 1022 can be in contact with each other, for example, see the description of FIG. 4 in the following embodiment, the embodiments of the present disclosure do not limit the position of the gap 300 between at least part of the surface of the first connecting part 1021 and at least part of the surface of the second connecting part 1022.
[0053] As shown in FIG. 1 and FIG. 2, in some embodiments, the mask assembly further comprises a filling element 400, which is located in at least part of the gap 300 between the first connecting part 1021 and the second connecting part 1022. For example, the filling element 400 can completely fill the gap 300, or the filling element 400 can be located in part of the gap 300, and the embodiments of the present disclosure do not limit this. Therefore, the filling element 400 can provide support for the film layer (for example, the protective film layer 500 in the following embodiment) arranged on the first mask sheet 110 and the second mask sheet 120, so that the thickness of the film layer at the gap 300 is more uniform, and the risk of local thinning or breaking is reduced.
[0054] At least one embodiment of the present disclosure provides a mask assembly, the adjacent first mask sheet and the second mask sheet are connected by the connecting element, so that support force can be provided at the connection of the two to reduce the sagging amount, and by arranging the filling element in at least part of the gap between the first connecting part and the second connecting part, it is beneficial to make the thickness of the film layer arranged on the mask sheet uniform, good flatness, and not prone to local breaking and the like.
[0055] As shown in FIG. 1 and FIG. 3, in some embodiments, the first connecting portion 1021 includes a first surface 104 facing the gap 300, the second connecting portion 1022 includes a second surface 106 facing the gap 300, the first surface 104 has an angle β1 with respect to the connecting element 200, and β1 is less than 90 degrees, and the second surface 106 has an angle β2 with respect to the connecting element 200, and β2 is also less than 90 degrees. For example, the first surface 104 is curved, and the tangent plane of the first surface 104 has an angle less than 90 degrees with respect to the surface of the connecting element 200 facing the first mask sheet 110, and the distance between the tangent plane and the connecting element 200 in the Z direction is 1 / 2 of the size of the first mask sheet 110 in the Z direction.
[0056] At least one embodiment of the present disclosure provides a mask assembly, by making the angle of at least one of the first surface of the first connecting portion and the second surface of the second connecting portion with respect to the connecting element less than 90 degrees, the step difference between the film layer on the first mask sheet and the second mask sheet and the connecting element at the gap can be reduced, so that the thickness of the film layer at the gap is more uniform, and the film layer is not thinned or broken, which is beneficial to ensure that the surface properties of the mask sheet are not damaged, thereby prolonging the service life of the mask sheet.
[0057] In some embodiments, as shown in FIG. 3, the angle of at least one of the first surface 104 of the first mask sheet 110 and the second surface 106 of the second mask sheet 120 with respect to the connecting element 200 is not greater than 80 degrees, for example, it can be at least one of 10-60 degrees, 20-50 degrees, 30-70 degrees, and 40-65 degrees. The present disclosure does not enumerate the specific angles of the above-mentioned angles, and the above-mentioned angles can also be other angles within 10-89 degrees. In this way, the step difference between the surface of the first mask sheet 110 and the second mask sheet 120 away from the connecting element 200 and the connecting element 200 can be reduced, so that the film layer on the first mask sheet 110 and the second mask sheet 120 smoothly transitions at the connecting element 200, which is beneficial to ensure the thickness uniformity of the film layer and reduce the risk of local breakage.
[0058] In some embodiments, as shown in FIG. 3, at least one of the first surface 104 of the first mask sheet 110 and the second surface 106 of the second mask sheet 120 has a slope angle of 10-40 degrees with respect to the connecting element 200, for example, the slope angle can be at least one of 10-30 degrees, 15-20 degrees, 25-30 degrees, and 35-40 degrees, and the disclosure embodiments do not enumerate all the specific angles of the above-mentioned slope angle, and the above-mentioned slope angle can also be other angles within 10-39 degrees. Thus, the step difference between the surface of the connecting element 200 and the first mask sheet 110 and the second mask sheet 120 away from the connecting element 200 can be further reduced, so as to reduce the risk of local fracture of the film layer arranged on the first mask sheet 110 and the second mask sheet 120.
[0059] In some embodiments, as shown in FIG. 3, at least one of the first surface 104 of the first mask sheet 110 and the second surface 106 of the second mask sheet 120 can be a curved surface, so that the intersection line of the curved surface and a plane is an arc. For example, the first surface 104 of the first mask sheet 110 and the second surface 106 of the second mask sheet 120 are both curved surfaces, and the curvatures of the first surface 104 and the second surface 106 can be the same or different, and the disclosure embodiments do not limit the same. The above-mentioned plane is parallel to the thickness direction of the connecting element 200, and the plane is parallel to the arrangement direction of the first mask sheet 110 and the second mask sheet 120. As shown in FIG. 3, the thickness direction of the connecting element 200 can be the Z direction, and the arrangement direction of the first mask sheet 110 and the second mask sheet 120 can be the X direction. For example, at least one of the first surface 104 and the second surface 106 can be a curved surface, and the other part can be an inclined surface, and the slope angle of the curved surface and the inclined surface with respect to the connecting element 200 can be the same or different, and the disclosure embodiments do not limit the same.
[0060] In this way, the thickness of the film layer arranged on the first mask sheet and the second mask sheet is uniform at the interval, and the film layer can be smoothly transitioned between the first surface and the connecting element, and smoothly transitioned between the second surface and the connecting element, thereby facilitating to ensure the thickness uniformity of the film layer.
[0061] FIG. 4 is a partial cross-sectional view of another mask assembly provided by the embodiments of the disclosure.
[0062] In some embodiments, as shown in FIG. 4, the edge of the first connecting portion 1021 of the first mask sheet 110 is in contact with the edge of the second connecting portion 1022 of the second mask sheet 120, and there is a gap 300 between a part of the first surface 104 of the first connecting portion 1021 and a part of the second surface 106. In the Z direction, the size of the gap 300 in the X direction gradually increases. For example, a filling element can be arranged in the gap 300 as shown in FIG. 4, so as to further facilitate the uniformity of the thickness and the flatness of the film layer arranged on the mask sheet. The embodiments of the present disclosure are not limited thereto, for example, the gap 300 shown in FIG. 4 can also not be provided with the filling element 400.
[0063] In some embodiments, as shown in FIG. 2, the mask assembly comprises a filling element 400, and the surfaces of the first connecting portion 1021 and the second connecting portion 1022 facing each other are both in contact with the filling element 400, so as to reduce the step between the surface of the first mask sheet 110 away from the connecting element 200 and the connecting element 200, and the step between the surface of the second mask sheet 120 away from the connecting element 200 and the connecting element 200. That is, the part of the film layer on the first connecting portion 1021 and the part of the film layer on the side of the filling element 400 away from the connecting element 200 can be smoothly transitioned, and the part of the film layer on the second connecting portion 1022 and the part of the film layer on the side of the filling element 400 away from the connecting element 200 can also be smoothly transitioned, so as to make the thickness of the film layer uniform and less likely to be locally broken.
[0064] For example, as shown in FIG. 2, the contact area of the filling element 400 with the first mask sheet 110 can be the same as or different from the contact area of the filling element 400 with the second mask sheet 120. For example, the filling element 400 can be in contact with only one of the first mask sheet 110 and the second mask sheet 120, and the filling element 400 has a smaller gap with the other one of the first mask sheet 110 and the second mask sheet 120, and the gap has less influence on the thickness of the film layer arranged on the first mask sheet 110 and the second mask sheet 120. For example, the shapes of the filling elements 400 arranged in the plurality of gaps of the plurality of mask sheets of the mask assembly can be different, so as to adapt to different sizes of the gaps, and the embodiments of the present disclosure are not limited to the shape of the filling element 400.
[0065] In some embodiments, as shown in FIG. 2, the first connecting portion 1021 and the second connecting portion 1022 are both located on the same side of the connecting element 200, and a part of the first connecting portion 1021 and a part of the second connecting portion 1022 are both overlapped on the connecting element 200 and connected with the connecting element 200.
[0066] In some embodiments, as shown in FIG. 2, the material of the filling element 400 can be the same as the material of the mask sheet 100, for example, a high molecular film material such as polyethylene, polypropylene, polyvinyl chloride, etc. For example, the material of the filling element 400 can include optical glue, for example, the filling element 400 can be formed after curing of optical glue, so that it can better adapt to intervals of different sizes. For example, in multiple intervals with different sizes, the filling element 400 can be in contact with the first connecting part 1021 and the second connecting part 1022 on both sides of each interval 300, so as to better ensure the thickness uniformity of the film layer arranged on the first mask sheet 110 and the second mask sheet 120.
[0067] For example, as shown in FIG. 2, the maximum thickness of the first connecting part 1021 is L1, the maximum thickness of the second connecting part 1022 is L2, and the maximum thickness of the filling element 400 is L0. The first thickness difference between the filling element 400 and the first connecting part 1021 is |L1-L0|, and |L1-L0| is 1 / 5-1 / 2 of L1. For example, the maximum thickness L0 of the filling element 400 can be greater than or less than L1, and |L1-L0| can be 1 / 5-1 / 4, 1 / 4-1 / 3, or 1 / 3-1 / 2 of L1, which is not limited in the embodiments of the present disclosure.
[0068] For example, as shown in FIG. 2, the second thickness difference between the filling element 400 and the second connecting part 1022 is |L2-L0|, and |L2-L0| is 1 / 5-1 / 2 of L2. For example, the maximum thickness of the filling element 400 can be greater than or less than the maximum thickness of the second connecting part 1022, and |L2-L0| can be 1 / 5-1 / 4, 1 / 4-1 / 3, or 1 / 3-1 / 2 of L2, which is not limited in the embodiments of the present disclosure.
[0069] For example, as shown in FIG. 2, at least one of the first thickness difference |L1-L0| and the second thickness difference |L2-L0| is 10-50 microns, such as 10-20 microns, 20-30 microns, 30-40 microns, or 40-50 microns, which is not limited in the embodiments of the present disclosure.
[0070] By setting the first thickness difference between the filling element and the first connecting part and the second thickness difference between the filling element and the second connecting part within the above range, the step difference between the first connecting part and the filling element and the step difference between the second connecting part and the filling element are both small, which is beneficial to ensure that the film layer located on the first mask sheet and the second mask sheet has a small thickness change at the filling element, thereby reducing the risk of local fracture of the film layer.
[0071] For example, as shown in FIG. 2, in the X direction, the size of the portion of the first connecting portion 1021 overlapping the connecting element 200 in the thickness direction thereof is H1, and the size of the portion of the second connecting portion 1022 overlapping the connecting element 200 in the thickness direction thereof is H2. In some embodiments, H1 is not less than 1 / 4 of the maximum size of the first connecting portion 1021 in the X direction, for example, H1 can be 1 / 3, 1 / 2 or 3 / 4 of the maximum size of the first connecting portion 1021. For example, H2 is not less than 1 / 4 of the maximum size of the second connecting portion 1022, for example, H2 can be 1 / 3, 1 / 2 or 3 / 4 of the maximum size of the second connecting portion 1022.
[0072] In this way, the reliability of the connection of the connecting element with the first connecting portion and the second connecting portion respectively can be ensured, thereby facilitating the enhancement of the support force between the first mask sheet and the second mask sheet by the connecting element.
[0073] In the embodiments of the present disclosure, in the arrangement direction of the first connecting portion and the second connecting portion, the size of the portion of the first connecting portion overlapping the connecting element in the thickness direction thereof is less than the maximum size of the first connecting portion, so that the opening of the first mask sheet and the opening of the second mask sheet are both free of overlapping with the connecting element, so as to reduce the influence of the connecting element on the opening area of the first mask sheet and the opening area of the second mask sheet.
[0074] FIG. 5 is a schematic view of a mask assembly provided with a protective film layer according to an embodiment of the present disclosure.
[0075] In some embodiments, as shown in FIG. 5, the mask assembly can include a protective film layer 500 located on the plurality of mask sheets. For example, a portion of the protective film layer 500 is located on the first connecting portion 1021 of the first mask sheet 110 and the second connecting portion 1022 of the second mask sheet 120. For example, the protective film layer 500 can cover the surfaces of the first connecting portion 1021 and the second connecting portion 1022 and overlap the connecting element 200. For example, the protective film layer 500 can be the film layer located on the first mask sheet 110 and the second mask sheet 120 as described in the above embodiments. By providing the protective film layer 500, the erosion of the first connecting portion 1021 and the second connecting portion 1022 by water, oxygen and the like can be reduced, thereby improving the service life of the first mask sheet 110 and the second mask sheet 120.
[0076] For example, as shown in FIG. 5, the protective film layer 500 can include aluminum oxide, but is not limited thereto. For example, the protective film layer 500 can be made by a process such as chemical vapor deposition (CVD), so that the protective film layer 500 has good compactness and uniform thickness.
[0077] For example, according to different use requirements, the mask assembly can also not include the protective film layer 500, but directly form other film layers, and embodiments of the present disclosure do not make any limitation in this regard.
[0078] FIG. 6 is a partial structural schematic view of another mask assembly provided by embodiments of the present disclosure.
[0079] In some embodiments, as shown in FIG. 6, the first connecting portion 1021 includes a first body portion 1101 and a first end portion 1102. The first end portion 1102 is closer to the gap 300 than the first body portion 1101, and in the thickness direction of the first connecting portion 1021, the first end portion 1102 is recessed relative to the first body portion 1101, so that the first connecting portion 1021 has a first recess 0110. For example, in the Z direction, the size of the first end portion 1102 is smaller than the size of the first body portion 1101, so that the first recess 0110 can serve as a receiving cavity of the first connecting portion 1021.
[0080] For example, as shown in FIG. 6, similar to the structure of the first connecting portion 1021, the second connecting portion 1022 includes a second body portion 1201 and a second end portion 1202. The second end portion 1202 is closer to the gap 300 than the second body portion 1201, and in the thickness direction of the second connecting portion 1022, the second end portion 1202 is recessed relative to the second body portion 1201, so that the second connecting portion 1022 has a second recess 0120. For example, in the Z direction, the size of the second end portion 1202 is smaller than the size of the second body portion 1201, so that the second recess 0120 can serve as a receiving cavity of the second connecting portion 1022. For example, the first portion 210 of the connecting element 200 is located in the first recess 0110, and the second portion 220 of the connecting element 200 is located in the second recess 0120.
[0081] In this way, the overall size of the mask assembly in the Z direction (as shown in FIG. 6) can be reduced, facilitating light and thin design; at the same time, the connection firmness of the first connecting portion and the second connecting portion with the connecting element respectively can be enhanced, so as to facilitate the connecting element to provide support force for the first mask sheet and the second mask sheet.
[0082] In some embodiments, as shown in FIG. 6, the thickness of the first body portion 1101 and the thickness of the second body portion 1201 can both be greater than the thickness of the connecting element 200, and the surface of the connecting element 200 away from the gap 300 is flush with the surface of at least one of the first body portion 1101 and the second body portion 1201.
[0083] For example, as shown in FIG. 6, the connecting element 200 includes a first portion 210 close to the first body part 1101, and a second portion 220 close to the second body part 1201, and the connecting element 200 further includes a middle part between the first portion 210 and the second portion 220, and the middle part overlaps with the filling element 400. For example, the first portion 210 of the connecting element 200 can be embedded into the first recess 0110, and the second portion 220 of the connecting element 200 can be embedded into the second recess 0120, and the surface of the connecting element 200 away from the interval 300 is flush with the surface of the first body part 1101 and the second body part 1201. Thus, it is beneficial to make the surface of the connecting element 200 away from the interval 300 well connected with the surface of at least one of the first body part 1101 and the second body part 1201, so as to make the overall structure of the mask assembly more flat.
[0084] FIG. 7 is a structural schematic diagram of another mask assembly provided by at least one embodiment of the present disclosure; and FIG. 8 is a structural schematic diagram of another mask assembly provided by at least one embodiment of the present disclosure.
[0085] In some embodiments, as shown in FIGS. 7 and 8, at least two mask sheets 100 in the plurality of mask sheets 100 are connected into a mask sheet assembly by at least one connecting element 200, and the mask sheet assembly 212 is a one-piece structure. For example, the plurality of mask sheets 100 can be arranged in an array. For example, as shown in FIG. 7, in the X direction, every two adjacent mask sheets 100 are connected by the connecting element 200. For example, the size of every two adjacent mask sheets in the X direction can be the same or different. For example, as shown in FIG. 8, in the Y direction, every two adjacent mask sheets 100 are connected by the connecting element 200. For example, the size of every two adjacent mask sheets in the Y direction can be the same or different. For example, in the X direction, two adjacent columns of mask sheets 100 can be connected by the same connecting element 200. For example, in the Y direction, two adjacent rows of mask sheets 100 can also be connected by the same connecting element 200, thereby simplifying the structure of the connecting element. For example, part of the plurality of mask sheets 100 can also be independently provided, that is, each mask sheet in the part of the mask sheets 100 is not connected with an adjacent mask sheet by a connecting element, and the embodiments of the present disclosure do not limit the connection form of the plurality of mask sheets 100 in the mask assembly, and the specific connection form can be flexibly set according to different design requirements.
[0086] FIG. 9 is a structural schematic diagram of a mask frame provided by at least one embodiment of the present disclosure; and FIG. 10 is a schematic diagram of a mask sheet assembly provided by at least one embodiment of the present disclosure when the mask sheet assembly is arranged on the mask frame shown in FIG. 9.
[0087] For example, as shown in FIG. 9, the mask assembly provided by at least one embodiment of the present disclosure further comprises a mask frame 600, and the mask frame 600 comprises a mask frame border 160. For example, the mask frame border 160 surrounds an open area. For example, the open area surrounded by the mask frame border 160 has an open area larger than the open area of each opening in the mask sheet. For example, as shown in FIG. 10, the mask sheet assembly 212 is located on the mask frame border 160, and at least part of the edge of the mask sheet assembly 212 is connected with the mask frame border 160. For example, the mask frame 600 comprises an inner contour 601 and an outer contour 602, and the mask frame border 160 can be the part surrounded by the inner contour 601 and the outer contour 602. For example, the mask frame 600 can be made of a metal material. For example, a part of the edge of the mask sheet assembly 212 can be overlapped on the mask frame border 160 and connected with the mask frame border 160, for example, welded, but not limited thereto, and the embodiments of the present disclosure do not limit the connection mode between the mask sheet assembly 212 and the mask frame border 160.
[0088] FIG. 11 is a structural schematic diagram of another mask frame provided by at least one embodiment of the present disclosure; and FIG. 12 is a schematic diagram of a mask sheet assembly provided by at least one embodiment of the present disclosure when arranged on the mask frame shown in FIG. 11.
[0089] In some embodiments, FIG. 11 shows another mask frame 600 provided by at least one embodiment of the present disclosure, which comprises a mask frame border 160 and an auxiliary structure 165, the auxiliary structure 165 overlaps with an open area surrounded by the mask frame border 160, and the auxiliary structure 165 is connected with the mask frame border 160. For example, the auxiliary structure 165 divides the open area surrounded by the mask frame border 160 into a plurality of open sub-areas. The plurality of open sub-areas can correspond to the plurality of mask sheets in the mask assembly one by one. For example, the auxiliary structure 165 can be an integral structure with the mask frame border 160. For example, the auxiliary structure 165 can be an independent structure and connected with the mask frame border 160, and the embodiments of the present disclosure do not limit the form of the auxiliary structure.
[0090] In some embodiments, as shown in FIG. 12, at least one connecting element 200 in the mask assembly includes at least one auxiliary connecting element 260, at least part of the auxiliary connecting element 260 is located on the auxiliary structure 165. For example, the mask assembly can include a plurality of connecting elements 200, each connecting element 200 can be provided on the auxiliary structure 165 or not provided on the auxiliary structure 165, the connecting element 200 provided on the auxiliary structure 165 can be used as the auxiliary connecting element 260. For example, the connecting elements in the plurality of connecting elements 200 except the auxiliary connecting element 260 are substantially the same in structure as the auxiliary connecting element 260. For example, the number of auxiliary structures 165 is not greater than the number of auxiliary connecting elements 260. For example, in the X direction, the size of the auxiliary structure 165 is greater than the size of the auxiliary connecting element 260, thereby providing stable support for the auxiliary connecting element 260, thereby effectively reducing the amount of sagging of the mask sheet assembly 212.
[0091] At least one embodiment of the present disclosure also provides a method for manufacturing a mask assembly. FIGS. 13-14 are structural schematic diagrams of a manufacturing process of a mask assembly provided by at least one embodiment of the present disclosure. The following describes a method for manufacturing a mask assembly in combination with FIGS. 1-2, 4-5, and 13-14.
[0092] For example, as shown in FIG. 13, at least two mask sheets 100 are provided, and the at least two mask sheets 100 are connected by at least one connecting element 200. Referring to FIG. 1, each mask sheet 100 includes a plurality of openings 101 and a separation portion 102 surrounding each opening 101. The at least two mask sheets 100 include an adjacent first mask sheet 110 and a second mask sheet 120, the separation portion 102 of the first mask sheet 110 includes a first connecting portion 1021, the separation portion 102 of the second mask sheet 120 includes a second connecting portion 1022, and the first connecting portion 1021 is located outside the plurality of openings 101 of the first mask sheet 110, and the second connecting portion 1022 is located outside the plurality of openings 101 of the second mask sheet 120. The structure of the first mask sheet 110 and the second mask sheet 120 is described in the above embodiments, which is not repeated here.
[0093] For example, as shown in FIG. 13, the first connecting portion 1021 and the second connecting portion 1022 are close to each other and have a gap 300, at least part of the first connecting portion 1021 and at least part of the second connecting portion 1022 are located on the same side of the connecting element 200 and are connected with the connecting element 200, respectively. For example, a part of the first connecting portion 1021 can be welded with the connecting element 200, and a part of the second connecting portion 1022 can also be welded with the connecting element 200, thereby forming a mask sheet assembly.
[0094] For example, referring to FIG. 2 and FIG. 14, the filling element 400 is formed in at least part of the interval 300. For example, as shown in FIG. 14, the filling material 0400 is formed in the interval 300, and the filling material 0400 can adopt the same material as the first mask sheet 110 or the second mask sheet 120, for example, can adopt a high molecular film material such as polyethylene, polypropylene, polyvinyl chloride, etc., and embodiments of the present disclosure are not limited thereto. For example, the size of the filling material 0400 in the X direction is less than the size of the interval 300 in the X direction, and the size of the filling material 0400 in the Z direction is greater than or equal to the size of the interval 300 in the Z direction, for example, the filling material 0400 has a gap with at least one of the first mask sheet 110 and the second mask sheet 120 in the X direction, so that the filling material 0400 can be formed in the interval 300, and the filling range of the interval 300 is satisfied. For example, the size of the filling material 0400 in different intervals 300 can not be the same, for example, for the interval 300 with a larger size in the X direction, the volume of the filling material 0400 can be made larger, for example, at least one of the size of the filling material 0400 in the X direction and the size of the filling material 0400 in the Z direction can be increased, so that the interval 300 has sufficient filling capacity.
[0095] Then, referring to FIG. 2 and FIG. 14, the filling material 0400 is processed by laser or electron beam, so that the filling material 0400 is melted to form the filling element 400 filled in the interval 300. For example, the filling material 0400 after melting can be in contact with at least one of the surfaces of the first connecting portion 110 and the second connecting portion 120 opposite to each other, so as to facilitate ensuring the thickness uniformity of the film layer subsequently formed on the first connecting portion 110 and the second connecting portion 120.
[0096] For example, referring to FIG. 2 and FIG. 14, the filling material 0400 formed in at least part of the interval 300 can be optical glue, and then by curing the optical glue, the filling element 400 can be formed. For example, the optical glue can be ultraviolet curing glue, but is not limited thereto. For example, by using the curing glue, the filling element 400 can be in contact with at least one of the first connecting portion 1021 and the second connecting portion 1022 on both sides in the interval with different sizes, so as to better ensure the thickness uniformity of the film layer formed on the first mask sheet 110 and the second mask sheet 120.
[0097] For example, referring to FIG. 5, a protective film layer 500 is formed on the plurality of mask sheets (e.g., the first mask sheet 110 and the second mask sheet 120). For example, the protective film layer 500 is formed on a side of the filling element 400 away from the connecting element 200 and overlaps the connecting element 200. For example, the protective film layer 500 can be formed by a chemical vapor deposition (CVD) process so that the protective film layer 500 has good compactness and a uniform thickness. For example, the protective film layer 500 can include aluminum oxide, so that the erosion of the first mask sheet 110 and the second mask sheet 120 by water, oxygen, and the like can be reduced, thereby improving the service life of the first mask sheet 110 and the second mask sheet 120.
[0098] At least one embodiment of the present disclosure also provides another manufacturing process of a mask assembly. FIG. 15 is a schematic view of a structure after a protective film layer is formed in the mask assembly shown in FIG. 3. The manufacturing method of another mask assembly is described below in combination with FIGS. 1, 3, 13, and 15.
[0099] As shown in FIG. 13, at least two mask sheets 100 are provided and connected by at least one connecting element 200. Referring to FIG. 1, each mask sheet 100 includes a plurality of openings 101 and a separation portion 102 surrounding the openings 101. The at least two mask sheets 100 include an adjacent first mask sheet 110 and a second mask sheet 120, the separation portion 102 of the first mask sheet 110 includes a first connecting portion 1021, the separation portion 102 of the second mask sheet 120 includes a second connecting portion 1022, the first connecting portion 1021 is located outside the plurality of openings 101 of the first mask sheet 110, and the second connecting portion 1022 is located outside the plurality of openings 101 of the second mask sheet 120. The structure of the first mask sheet 110 and the second mask sheet 120 is described above in the related description of the embodiments, and is not repeated here.
[0100] As shown in FIG. 13, the first connecting portion 1021 and the second connecting portion 1022 are close to each other and have a spacing 300, at least part of the first connecting portion 1021 and at least part of the second connecting portion 1022 are located on the same side of the connecting element 200 and are connected to the connecting element 200, respectively. For example, a portion of the first connecting portion 1021 can be welded to the connecting element 200, and a portion of the second connecting portion 1022 can also be welded to the connecting element 200, thereby forming a mask assembly.
[0101] Referring to FIG. 3, at least one of a portion of the first connecting portion 1021 near an end portion of the interval 300 and a portion of the second connecting portion 1022 near an end portion of the interval 300 is melted to make at least one of the first surface 104 of the first connecting portion 1021 facing the interval 300 and the second surface 106 of the second connecting portion 1022 facing the interval 300 have an angle of inclination relative to the connecting element 200 of less than 90 degrees. For example, referring to FIGS. 1 and 3, a portion of the first connecting portion 1021 near an end portion of the interval 300 is melted to make the first surface 104 curved. A portion of the second connecting portion 1022 near an end portion of the interval 300 is melted to make the second surface 106 be inclined relative to the connecting element 200, but embodiments of the present disclosure are not limited to the shape of the first surface 104 and the second surface 106.
[0102] By melting at least one of a portion of the first connecting portion near an end portion of the interval and a portion of the second connecting portion near an end portion of the interval, the size of the interval in the arrangement direction of the first connecting portion and the second connecting portion can be reduced, and the thickness uniformity of the film layer formed on the first mask and the second mask can be ensured.
[0103] For example, referring to FIG. 13, the first connecting portion 1021 includes a first corner portion 1031 near the interval 300, and the second connecting portion 1022 includes a second corner portion 1032 near the interval 300, for example, the first corner portion 1031 is a portion of the first connecting portion 1021 near an end portion of the interval 300, and the second corner portion 1032 is a portion of the second connecting portion 1022 near an end portion of the interval 300. The above-mentioned melting at least one of a portion of the first connecting portion 1021 near an end portion of the interval 300 and a portion of the second connecting portion 1022 near an end portion of the interval 300 can include melting at least one of the first corner portion 1031 of the first connecting portion 1021 and the second corner portion 1032 of the second connecting portion 1022 by laser or electron beam.
[0104] For example, referring to FIG. 3 and FIG. 13, the first surface 104 can be a surface formed by melting the first corner 1031 by a laser or an electron beam, and the second surface 106 can be a surface formed by melting the second corner 1032 by a laser or an electron beam. For example, the degree of melting the first corner 1031 and the second corner 1032 by a laser or an electron beam can be different. For example, the volume of the first corner 1031 and the second corner 1032 melted can be different, so that the first surface 104 and the second surface 106 have different shapes, and thus the slope angle of the first surface 104 relative to the connecting element 200 and the slope angle of the second surface 106 relative to the connecting element 200 can be different. The embodiments of the present disclosure do not limit the degree of melting the first corner 1031 and the second corner 1032.
[0105] For example, referring to FIG. 15, after the first surface 104 and the second surface 106 are formed, a protective film layer 500 can be formed on the first connecting portion 1021 and the second connecting portion 1022. For example, the protective film layer 500 is formed on the side of the filling element 400 away from the connecting element 200 and overlaps the connecting element 200. For example, the protective film layer 500 can be formed by a chemical vapor deposition (CVD) process, so that the protective film layer 500 has good compactness and uniform thickness. For example, the protective film layer 500 can include aluminum oxide, so that the erosion of water, oxygen and the like to the first connecting portion 1021 and the second connecting portion 1022 can be reduced, and the service life of the first mask 110 and the second mask 120 can be improved.
[0106] The following points need to be explained:
[0107] (1) The embodiments of the present disclosure only involve the structures involved in the embodiments of the present disclosure, and other structures can refer to the general design.
[0108] (2) In the case of no conflict, the features in the same embodiment and different embodiments of the present disclosure can be combined with each other.
[0109] The above description is only an exemplary embodiment of the present disclosure, and is not intended to limit the protection scope of the present disclosure, and the protection scope of the present disclosure is determined by the appended claims.
Claims
1. A mask assembly, comprising: a plurality of mask sheets, each of the mask sheets comprising a plurality of openings and a separation portion surrounding the openings; at least one connecting element configured to connect at least two of the plurality of mask sheets; wherein the plurality of mask sheets comprises a first mask sheet and a second mask sheet adjacent to each other, the separation portion of the first mask sheet comprises a first connecting portion, the separation portion of the second mask sheet comprises a second connecting portion, the first connecting portion is located outside the plurality of openings of the first mask sheet, the second connecting portion is located outside the plurality of openings of the second mask sheet, the first connecting portion and the second connecting portion are close to each other, and at least part of surfaces of the first connecting portion and the second connecting portion facing each other have a gap, at least part of the first connecting portion and at least part of the second connecting portion are located on the same side of the connecting element and are connected to the connecting element respectively, the mask assembly further comprises a filling element located in at least part of the gap; or the first connecting portion comprises a first surface facing the gap, the second connecting portion comprises a second surface facing the gap, and an angle of slope of at least one of the first surface and the second surface with respect to the connecting element is less than 90 degrees.
2. The masking assembly of claim 1, wherein, The angle of slope of at least one of the first surface and the second surface with respect to the connecting element is not greater than 80 degrees.
3. The masking assembly of claim 1, wherein, The angle of slope of at least one of the first surface and the second surface with respect to the connecting element is 10-40 degrees.
4. The masking assembly of any of claims 1-3, wherein, At least one of the first surface and the second surface is arc-shaped when intersected by a straight line of a plane, the plane is parallel to a thickness direction of the connecting element, and the plane is parallel to an arrangement direction of the first mask sheet and the second mask sheet.
5. The masking assembly of claim 1, wherein, The surfaces of the first connecting portion and the second connecting portion facing each other are both in contact with the filling element.
6. The masking assembly of claim 1 or 5, wherein, A material of the filling element comprises one of a same material as the mask sheets and optical glue.
7. The masking assembly of any one of claims 1, 5 and 6, wherein, The filling element and the first connecting portion have a first thickness difference, the first thickness difference is 1 / 5-1 / 2 of a maximum thickness of the first connecting portion, the filling element and the second connecting portion have a second thickness difference, the second thickness difference is 1 / 5-1 / 2 of a maximum thickness of the second connecting portion.
8. The masking assembly of claim 7, wherein, At least one of the first thickness difference and the second thickness difference is 10-50 microns.
9. The masking assembly of any of claims 1-8, wherein, In the arrangement direction of the first connecting portion and the second connecting portion, a size of a portion of the first connecting portion in a thickness direction of the first connecting portion overlapping the connecting element is not less than 1 / 4 of a maximum size of the first connecting portion; and / or a size of a portion of the second connecting portion in a thickness direction of the second connecting portion overlapping the connecting element is not less than 1 / 4 of a maximum size of the second connecting portion.
10. The masking assembly of any of claims 1-9, further comprising: A protective film layer is located on the plurality of mask sheets and overlaps the at least one connecting element.
11. The masking assembly of any one of claims 1-10, wherein, The first connecting portion and the second connecting portion are both located on the same side of the connecting element.
12. The masking assembly of any one of claims 1-11, wherein, The first connecting portion includes a first body portion and a first end portion, the first end portion is closer to the gap than the first body portion, the first end portion is recessed relative to the first body portion in the thickness direction of the first connecting portion, so that the first connecting portion has a first recess, The second connecting portion includes a second body portion and a second end portion, the second end portion is closer to the gap than the second body portion, the second end portion is recessed relative to the second body portion in the thickness direction of the second connecting portion, so that the second connecting portion has a second recess, The first part of the connecting element is located in the first recess, and the second part of the connecting element is located in the second recess.
13. The masking assembly of claim 12, wherein, The thickness of the first body portion and the thickness of the second body portion are both greater than the thickness of the connecting element, and the surface of the connecting element away from the gap is flush with the surface of at least one of the first body portion and the second body portion.
14. The masking assembly of any one of claims 1-13, wherein, At least two of the plurality of mask pieces are connected into a mask piece assembly by at least one connecting element, the mask piece assembly is a one-piece structure, The mask assembly further comprises a mask frame, the mask frame comprises a mask frame, the mask piece assembly is located on the mask frame, and at least part of the edge of the mask piece assembly is connected with the mask frame.
15. The masking assembly of claim 14, wherein, The mask frame further comprises an auxiliary structure, the auxiliary structure overlaps the area surrounded by the mask frame, and the auxiliary structure is connected with the mask frame, The at least one connecting element comprises at least one auxiliary connecting element, at least part of the auxiliary connecting element is located on the auxiliary structure.
16. A manufacturing method of a mask assembly, comprising: connecting at least two of a plurality of mask pieces by at least one connecting element, wherein each of the mask pieces comprises a plurality of openings and a separation portion surrounding the openings, the plurality of mask pieces comprises adjacent first and second mask pieces, the separation portion of the first mask piece comprises a first connecting portion, the separation portion of the second mask piece comprises a second connecting portion, the first connecting portion is located outside the plurality of openings of the first mask piece, the second connecting portion is located outside the plurality of openings of the second mask piece, the first connecting portion and the second connecting portion are close to each other and have a gap between at least part of the surfaces facing each other, at least part of the first connecting portion and at least part of the second connecting portion are located on the same side of the connecting element and are connected with the connecting element respectively; and forming a filling element in at least part of the gap, or melting at least one of a part of the end portion of the first connecting portion close to the gap and a part of the end portion of the second connecting portion close to the gap, so that at least one of a first surface of the first connecting portion facing the gap and a second surface of the second connecting portion facing the gap has a slope angle relative to the connecting element less than 90 degrees.
17. The method of claim 16, wherein, The forming of the filling element in at least part of the gap comprises: forming a filling material in the gap; and The filling material is melted by a laser or an electron beam to form the filling element.
18. The method of claim 16 or 17, wherein, The material of the filling element is the same as the material of the mask.
19. The method of claim 16, wherein, The forming of the filling element in at least part of the interval comprises: filling optical glue in the interval; and solidifying the optical glue to form the filling element.
20. The method of claim 16, wherein, The first connecting part comprises a first corner part close to the interval, the second connecting part comprises a second corner part close to the interval, and the melting of at least one of a part of the end of the first connecting part close to the interval and a part of the end of the second connecting part close to the interval comprises: melting at least one of the first corner part of the first connecting part and the second corner part of the second connecting part by a laser or an electron beam.
21. The method of claim 16-20, further comprising: A protective film layer is formed on the plurality of mask sheets, and the protective film layer overlaps the at least one connecting element.