Pressurizing device and chiller system using same

Abstract

A pressurizing device according to the present embodiment comprises: an inlet through which air is injected; a pressure adjusting member for adjusting the pressure of the air injected through the inlet; a first valve for adjusting the amount of injection of the air, the pressure of which is adjusted by the pressure adjusting member; a second valve for controlling the flow of the air, the amount of injection of which is adjusted by the first valve; and an outlet for discharging the air, the flow of which is controlled by the second valve. Channels may be disposed between the inlet, the first valve, the pressure adjusting member, the second valve, and the outlet, respectively, such that the air flows therethrough, thereby maintaining the pressure of a cooling cycle system of a chiller device constant.

Description

Pressurization device and chiller system using the same

[0001] The present invention relates to a pressurizing device and a chiller system using the same.

[0002] During the semiconductor manufacturing process, semiconductor processing equipment must always maintain a constant temperature inside the chamber, and the equipment that maintains this temperature is a semiconductor chiller.

[0003] A chiller may include a refrigeration cycle using a refrigerant and a cooling cycle using a coolant to maintain a constant temperature inside a chamber of a semiconductor process equipment. In this case, a compressor, a condenser, an expansion valve, and an evaporator are basically required to perform the refrigeration cycle, and the refrigerant cooled through the refrigeration cycle can exchange heat with the coolant of the cooling cycle through the evaporator.

[0004] Meanwhile, the coolant that has been heat-exchanged to a low temperature through the evaporator circulates through a cooling cycle that includes a pump and a heater, and is set to the temperature required for the chamber of the semiconductor processing equipment, so that the chamber temperature of the semiconductor processing equipment can be maintained constant. However, at this time, a pressure drop may occur on the suction side of the pump due to the rotational speed of the pump. At this time, the vapor pressure reduced by the pressure drop causes the coolant on the suction side of the pump to boil at a temperature lower than its original boiling point, causing cavitation in the pump. If the bubbles generated by this cavitation phenomenon are sucked into the pump, problems such as overheating or damage to the pump, failure of the device, and shortened lifespan may occur.

[0005] Embodiments of the present invention provide a chiller device having improved durability and increased temperature stability by preventing overheating and damage to a pump due to boiling of a coolant and cavitation effects caused by pressure drop that may occur in the cooling cycle of a chiller system.

[0006] In order to achieve the above-described object, one embodiment of the present invention discloses a pressurizing device including an inlet through which air is injected, a pressure regulating member for regulating the pressure of the air injected through the inlet, a first valve for regulating the injection amount of the air whose pressure is regulated by the pressure regulating member, a second valve for controlling the flow of the air whose injection amount is regulated by the first valve, and an outlet for discharging the air whose flow is controlled by the second valve, and a flow path through which the air flows is arranged between each of the inlet, the first valve, the pressure regulating member, the second valve, and the outlet.

[0007] The pressurizing device according to embodiments of the present invention prevents boiling of the coolant due to changes in vapor pressure by maintaining the pressure of the cooling cycle system of the chiller device constant, thereby preventing temperature changes and cavitation effects of the coolant resulting therefrom, enabling precise temperature control of the device and improving the lifespan of the device.

[0008] FIG. 1 is a perspective view schematically illustrating an example of a pressurizing device according to one embodiment of the present invention.

[0009] Figure 2 is a front view schematically illustrating another example of the pressurizing device of Figure 1.

[0010] FIG. 3 is a perspective view schematically illustrating an example of a pressurizing device according to another embodiment of the present invention.

[0011] Fig. 4 is a front view schematically illustrating another example of the pressurizing device of Fig. 3.

[0012] Fig. 5 is a schematic diagram showing an example of a chiller system to which the pressurizing device of the present invention is applied.

[0013] Fig. 6 is a perspective view schematically illustrating an example of an evaporator applied to the chiller system of Fig. 5.

[0014] Fig. 7 is a cross-sectional view schematically illustrating the evaporator of Fig. 6.

[0015] Fig. 8 is a cross-sectional view of the heat exchange member of Fig. 7 taken along line A-A'.

[0016] Fig. 9 is a front view schematically illustrating an example of the heat exchange member of Fig. 6.

[0017] Fig. 10 is a plan view showing the screen of the evaporator of Fig. 6.

[0018] Figure 11 is a temperature-pressure graph showing the vapor pressure of the coolant.

[0019] [Correction pursuant to Rule 91, June 16, 2025][Deleted]

[0020] One embodiment of the present invention for achieving the above-described object relates to a pressurizing device including an inlet through which air is injected, a pressure regulating member for regulating the pressure of the air injected through the inlet, a first valve for regulating the injection amount of the air whose pressure is regulated by the pressure regulating member, a second valve for controlling the flow of the air whose injection amount is regulated by the first valve, and an outlet for discharging the air whose flow is controlled by the second valve, wherein a flow path through which the air flows is arranged between each of the inlet, the first valve, the pressure regulating member, the second valve, and the outlet.

[0021] A third valve is arranged between the second valve and the outlet, and the opening of the third valve can be manually adjusted.

[0022] It may further include a pressure sensor disposed between the second valve and the outlet.

[0023] A distribution member is disposed between the second valve and the outlet, and an air passage between the second valve and the outlet is branched by the distribution member, and the branched air passage can be connected to the pressure sensor.

[0024] The above outlet is connected to a pressure vessel, and the pressure vessel can store coolant or air pressure.

[0025] A fourth valve for controlling the pressure inside the pressure vessel may be arranged on one side of the pressure vessel.

[0026] Another embodiment of the present invention for achieving the above-described purpose relates to a chiller system including the pressurizing device of any one of claims 1 to 6.

[0027] The chiller system includes a refrigeration cycle composed of a compressor, a condenser, an expansion valve, and an evaporator, and a cooling cycle composed of a heater, an auxiliary heater, the pressurizing device, and a pump, wherein the cooling cycle includes a main line input / output to the evaporator and a bypass line branched from the main line, and the bypass line further includes an auxiliary line branched from the bypass line, and the heater, the pressurizing device, and the pump are sequentially arranged in the main line output from the evaporator, and the auxiliary heater is arranged in the auxiliary line, and a flow controller may be arranged at a position where the main line and the bypass line branch.

[0028] The above flow regulator includes a first flow valve and a second flow valve, wherein the first flow valve can be connected to the main line, and the second flow valve can be connected to the bypass line.

[0029] The flow rate of the main line and the flow rate of the bypass line can be controlled differently depending on the opening rate of the first flow valve and the second flow valve.

[0030] The present invention is capable of various modifications and embodiments. Specific embodiments are illustrated in the drawings and described in detail in the detailed description. The effects and features of the present invention, as well as the methods for achieving them, will become clearer with reference to the embodiments described in detail below, along with the drawings. However, the present invention is not limited to the embodiments disclosed below and can be implemented in various forms.

[0031] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings. When describing with reference to the drawings, identical or corresponding components are given the same reference numerals and redundant descriptions thereof will be omitted.

[0032] In the examples below, the terms first, second, etc. are not used in a limiting sense, but are used for the purpose of distinguishing one component from another.

[0033] In the examples below, singular expressions include plural expressions unless the context clearly indicates otherwise.

[0034] In the examples below, terms such as “include” or “have” mean that a feature or component described in the specification is present, and do not preclude the possibility that one or more other features or components may be added.

[0035] For convenience of explanation, the sizes of components in the drawings may be exaggerated or reduced. For example, the sizes and thicknesses of each component shown in the drawings are arbitrarily indicated for convenience of explanation, and thus the present invention is not necessarily limited to what is shown.

[0036] In the following examples, the x-axis, y-axis, and z-axis are not limited to three axes on an orthogonal coordinate system, and can be interpreted in a broad sense that includes them. For example, the x-axis, y-axis, and z-axis may be orthogonal to each other, but may also refer to different directions that are not orthogonal to each other.

[0037] In some embodiments, where implementations are otherwise feasible, specific process sequences may be performed in a different order than described. For example, two processes described in succession may be performed substantially simultaneously, or in a reverse order from the described order.

[0038] [Revised 16.06.2025 under Rule 91] One embodiment of the present invention relates to a pressurizing device, and another embodiment of the present invention relates to a chiller system including a pressurizing device, which will be described with reference to FIGS. 1 to 11, which schematically illustrate several examples of pressurizing devices and chiller systems.

[0039] According to the present embodiment, the pressurization device includes an inlet through which air is injected, a pressure regulating member for regulating the pressure of the air injected through the inlet, a first valve for regulating the injection amount of the air whose pressure is regulated by the pressure regulating member, a second valve for controlling the flow of the air whose injection amount is regulated by the first valve, and an outlet for discharging the air whose flow is controlled by the second valve, and a flow path through which the air flows is arranged between each of the inlet, the first valve, the pressure regulating member, the second valve, and the outlet, thereby allowing the pressure of the cooling cycle system of the chiller device to be maintained constant.

[0040] FIG. 1 is a perspective view schematically illustrating an example of a pressurizing device according to one embodiment of the present invention.

[0041] Referring to FIG. 1, the pressurization device (100) may include an inlet (110) through which air is injected, a pressure regulating member (120) for regulating the pressure of the air, a first valve (130) for regulating the amount of air injected, a second valve (140) for regulating the flow of air, an outlet (150) through which air is discharged, and a pressure sensor (160).

[0042] The injection port (110) may be defined in an area of ​​a pipe formed on one side of the pressure regulating member (120), and specifically, may be a cross-sectional portion formed on a side other than the side to which the pressure regulating member (120) of the pipe is connected. For example, the injection port (110) may be connected to an external compressor, and may serve as an inlet through which air compressed by the compressor may be injected into the pressurizing device (100).

[0043] The pressure regulating member (120) serves to regulate the pressure of compressed air injected through the injection port (110), and can convert the pressure of compressed air injected through the injection port (110) to a preset pressure, and can prevent excessive pressure that may be applied to the inside of the pressurizing device (100) by the compressed air.

[0044] As an optional embodiment, the pressure regulating member (120) may include a regulator.

[0045] The first valve (130) is connected to the pressure control member (120) through a pipe and can serve to control the amount of air injected, the pressure of which is set by the pressure control member (120). For example, the first valve (130) can control the amount of air injected using a Meter In method that controls the amount of air supplied or a Meter Out method that controls the amount of air discharged. Meanwhile, since the amount of air injected is controlled by the first valve (130), the pressure of the air can be finely controlled, and by preventing pressure load inside the pressurization device (100), the device can be prevented from being damaged.

[0046] As an optional embodiment, the first valve (130) may include a speed control valve.

[0047] The second valve (140) is connected to the first valve (120) through a conduit and can control the flow of air whose injection amount is controlled by the first valve (120). For example, the second valve (140) can be opened and closed by an electric signal, thereby maintaining or blocking the flow of air supplied from the first valve (120).

[0048] As an optional embodiment, the second valve (140) is electrically connected to a pressure sensor (160) described below, so that the opening and closing of the valve is controlled by an electric signal generated from the pressure sensor (160), thereby maintaining or blocking the flow of air.

[0049] As an optional embodiment, the second valve (140) may include a solenoid valve.

[0050] The outlet (150) may be defined in a region of a conduit formed on one side of the second valve (140), and specifically, may be a cross-sectional section formed on a side of the conduit other than the side to which the second valve (140) is connected. The air whose flow is maintained by the second valve (140) may ultimately be discharged to the outside of the pressurization device (100) through the outlet.

[0051] As an optional embodiment, the pressurizing device (100) may further include a pressure sensor (160). In this case, the pressure sensor (160) may be disposed between the second valve (140) and the outlet (150). Specifically, the pressure sensor (160) may be connected through a separate conduit branched from the conduit formed between the second valve (140) and the outlet (150) by a distributor (D) disposed between the second valve (140) and the outlet (150), and may be disposed between the second valve (140) and the outlet (150). Meanwhile, the outlet (150) can be connected to a pressure vessel (PV) described later to supply air whose pressure is set by the pressurizing device (100) to the pressure vessel (PV). At this time, by connecting the pressure sensor (160) through a separate pipe (P) branched by the distributor (D) as described above, the pressure of the air supplied from the pressurizing device (100) and the pressure of the air supplied and stored inside the pressure vessel (PV) through the outlet (150) can be balanced, and by balancing the air in this way, the pressure of the air supplied to the coolant line via the pressure vessel (PV) described later can be measured more accurately. As a result, by the pressure sensor (160) accurately measuring the pressure of the air supplied to the coolant line, the pressurizing device (100) can control the pressure of the air supplied to the coolant line more precisely.

[0052] Fig. 2 is a front view schematically illustrating another example of the pressurizing device of Fig. 1.

[0053] Referring to FIG. 2, the pressurization device (100) can be connected to a pressure vessel (PV), and the pressure vessel (PV) can include a pressure inlet (10), a fourth valve (20), and a pressure outlet (30).

[0054] The pressure vessel (PV) is connected to the outlet (150) of the pressurizing device (100) and may be a storage tank that stores the pressure of coolant or air.

[0055] A pressure vessel (PV) may include any vessel capable of holding a gas or liquid capable of withstanding an internal pressure exceeding atmospheric pressure, and may include a pressure inlet (10) disposed on one side thereof, a fourth valve (20) disposed on one side and spaced apart from the pressure inlet (10), and a pressure discharge port (30) disposed on the other side of the pressure vessel (PV).

[0056] The pressure inlet (10) is arranged on one side of the pressure vessel (PV) and is connected to the outlet (110) of the pressurizing device (100) so that it can serve as an inlet to allow air whose pressure is set by the pressurizing device (100) to be injected into the inside of the pressure vessel (PV).

[0057] The fourth valve (20) may be placed on one side of the pressure vessel (PV) apart from the pressure inlet (10) and may be a relief valve that serves to lower the pressure inside the pressure vessel (PV).

[0058] The pressure exhaust port (20) may be placed on the other side of the pressure vessel (PV) and may be connected to a coolant line described later to supply coolant or air stored inside the pressure vessel (PV) to the coolant line.

[0059] FIG. 3 is a perspective view schematically illustrating an example of a pressurizing device according to another embodiment of the present invention.

[0060] Referring to FIG. 3, the pressurization device (200) may include an inlet (210) through which air is injected, a pressure regulating member (220) for regulating the pressure of the air, a first valve (230) for regulating the amount of air injected, a second valve (240) for regulating the flow of air, an outlet (250) through which air is discharged, a pressure sensor (260), and a third valve (270) whose opening is manually controlled.

[0061] The injection port (210) may be defined in an area of ​​a pipe formed on one side of the pressure regulating member (220), and specifically, may be a cross-sectional portion formed on a side other than the side to which the pressure regulating member (220) of the pipe is connected. For example, the injection port (210) may be connected to an external compressor, and may serve as an inlet through which air compressed by the compressor may be injected into the pressurizing device (200).

[0062] The pressure regulating member (220) serves to regulate the pressure of compressed air injected through the injection port (210), and can convert the pressure of compressed air injected through the injection port (210) to a preset pressure, and can prevent excessive pressure that may be applied to the inside of the pressurizing device (200) by the compressed air.

[0063] As an optional embodiment, the pressure regulating member (220) may include a regulator.

[0064] The first valve (230) is connected to the pressure control member (220) through a pipe and can serve to control the amount of air injected, the pressure of which is set by the pressure control member (220). For example, the first valve (230) can control the amount of air injected using a Meter In method that controls the amount of air supplied or a Meter Out method that controls the amount of air discharged. Meanwhile, since the amount of air injected is controlled by the first valve (230), the pressure of the air can be finely controlled, and by preventing pressure load inside the pressurizing device (200), the device can be prevented from being damaged.

[0065] As an optional embodiment, the first valve (230) may include a speed control valve.

[0066] The second valve (240) is connected to the first valve (220) through a conduit and can control the flow of air whose injection amount is controlled by the first valve (220). For example, the second valve (240) can be opened and closed by an electric signal, thereby maintaining or blocking the flow of air supplied from the first valve (220).

[0067] As an optional embodiment, the second valve (240) is electrically connected to a pressure sensor (260) described below, so that the opening and closing of the valve is controlled by an electric signal generated from the pressure sensor (260), thereby maintaining or blocking the flow of air.

[0068] As an optional embodiment, the second valve (240) may include a solenoid valve.

[0069] The third valve (270) is connected to the second valve (240) through a pipe, and can finely control the pressure of the air by adjusting the flow rate of the air supplied when the second valve (240) is opened. For example, the opening of the third valve (270) can be manually adjusted, so that the pressure can be set automatically by the system, and the pressure of the supplied air can be immediately and finely adjusted as needed.

[0070] As an optional embodiment, the third valve (270) may comprise a manually controlled valve or a manually controlled micro-flow valve.

[0071] The outlet (250) may be defined in a region of a conduit formed on one side of the third valve (270), and specifically, may be a cross-sectional section formed on a side of the conduit other than the side to which the third valve (270) is connected. Air whose pressure is finely controlled by the third valve (270) may ultimately be discharged to the outside of the pressurization device (200) through the outlet.

[0072] As an optional embodiment, the pressurizing device (200) may further include a pressure sensor (260). In this case, the pressure sensor (260) may be disposed between the second valve (240) and the outlet (250). Specifically, the pressure sensor (260) may be connected through a separate conduit branched from the conduit formed between the second valve (240) and the outlet (250) by a distributor (D) disposed between the second valve (240) and the outlet (250), and may be disposed between the second valve (240) and the outlet (250). Meanwhile, the outlet (250) can be connected to a pressure vessel (PV) described later to supply air whose pressure is set by the pressurizing device (200) to the pressure vessel (PV). At this time, by connecting the pressure sensor (260) through a separate pipe (P) branched by the distributor (D) as described above, the pressure of the air supplied from the pressurizing device (200) and the pressure of the air supplied and stored inside the pressure vessel (PV) through the outlet (250) can be balanced, and by balancing the air in this way, the pressure of the air supplied to the coolant line via the pressure vessel (PV) described later can be measured more accurately. As a result, by the pressure sensor (260) accurately measuring the pressure of the air supplied to the coolant line, the pressurizing device (200) can control the pressure of the air supplied to the coolant line more precisely.

[0073] Fig. 4 is a front view schematically illustrating another example of the pressurizing device of Fig. 3.

[0074] Referring to FIG. 4, the pressurization device (200) can be connected to a pressure vessel (PV), and the pressure vessel (PV) can include a pressure inlet (10), a fourth valve (20), and a pressure outlet (30).

[0075] The pressure vessel (PV) is connected to the outlet (250) of the pressurizing device (200) and may be a storage tank that stores the pressure of coolant or air.

[0076] A pressure vessel (PV) may include any vessel capable of holding a gas or liquid capable of withstanding an internal pressure exceeding atmospheric pressure, and may include a pressure inlet (10) disposed on one side thereof, a fourth valve (20) disposed on one side and spaced apart from the pressure inlet (10), and a pressure discharge port (30) disposed on the other side of the pressure vessel (PV).

[0077] The pressure inlet (10) is arranged on one side of the pressure vessel (PV) and is connected to the outlet (210) of the pressurizing device (200) so that it can serve as an inlet to allow air whose pressure is set by the pressurizing device (200) to be injected into the inside of the pressure vessel (PV).

[0078] The fourth valve (20) may be placed on one side of the pressure vessel (PV) apart from the pressure inlet (10) and may be a relief valve that serves to lower the pressure inside the pressure vessel (PV).

[0079] The pressure exhaust port (20) may be placed on the other side of the pressure vessel (PV) and may be connected to a coolant line described later to supply coolant or air stored inside the pressure vessel (PV) to the coolant line.

[0080] Figure 5 is a schematic diagram showing an example of a cooling line to which the pressurizing device of the present invention is applied.

[0081] Referring to FIG. 5, the chiller system may include a refrigeration cycle including a compressor (1100), a separator (1200), a condenser (1300), a refrigerant dryer (1400), an expansion valve (1500), and an evaporator (1600), and a cooling cycle including an evaporator (1600), a heater (300), and a pump (400). At this time, a pressurization device (100, 200) and a pressure vessel (PV) (hereinafter, referred to as a pressurization device for convenience) may be applied to a cooling line through which a coolant circulates to provide air pressure to the cooling line so that the pressure inside the cooling line is maintained equally in all areas.

[0082] As an example, the refrigeration cycle of a chiller system may include a compressor (1100), a separator (1200), a condenser (1300), a refrigerant dryer (1400), an expansion valve (1500), and an evaporator (1600).

[0083] The compressor (1100) may serve to suck in refrigerant gas, compress it at high temperature and high pressure, and discharge it. The compressor (1100) may include, for example, a reciprocating type, a crank type, a swash plate type, a wobble plate type, a rotary type, a scroll type, etc.

[0084] The oil separator (1200) is connected to the discharge line of the compressor (1100) and can serve to separate oil contained in the refrigerant gas discharged from the compressor (1100) and prevent the oil from entering the condenser (1300).

[0085] The condenser (1300) can condense the refrigerant gas from which oil has been separated through the oil separator (1200) into a high-temperature, high-pressure liquid refrigerant by dissipating heat.

[0086] The refrigerant dryer (1400) can act as a tank to remove moisture from the liquid refrigerant coming from the condenser (1300) and store it.

[0087] The expansion valve (1500) can control the amount of refrigerant entering the evaporator (1600) by controlling the liquid refrigerant stored in the refrigerant dryer (1400). At this time, the expansion valve (1500) can be linked to a temperature sensor (TS1) arranged at the outlet side of the evaporator (1600) to automatically control the amount of refrigerant entering the evaporator (1600) according to the temperature of the coolant measured by the temperature sensor (TS1).

[0088] As an optional embodiment, the expansion valve (1500) may include an electronic expansion valve such as an EEV or LEV with adjustable opening.

[0089] The evaporator (1600) can control the temperature of the coolant through the introduced refrigerant by being controlled by the expansion valve (1500). Specifically, the evaporator (1600) can have a heat exchange member therein so that heat exchange between the refrigerant and the coolant can be indirectly performed through the heat exchange member. At this time, the refrigerant can take away the heat amount (temperature) of the coolant and evaporate to become a gas, and this refrigerant gas can be sucked back into the compressor (1100) by the suction pressure of the compressor (1100). At this time, a hot gas bypass valve (HG) can be arranged between the evaporator (1600) and the compressor (1100). The hot gas bypass valve (HG) can control the amount of refrigerant gas sucked into the compressor (1100), thereby preventing a load on the compressor (1100) that may be caused by excessive refrigerant gas inflow, and can allow the refrigerant gas to bypass the compressor (1100) and flow into the oil separator (1200).

[0090] As an optional embodiment, the hot gas bypass valve (HG) may include an electronic expansion valve such as an EEV or LEV with adjustable opening and may be controlled by a digital controller.

[0091] As an optional embodiment, the evaporator (1600) can perform the functions of an evaporator, a liquid receiver, a cold storage, and a vapor-liquid separator.

[0092] Fig. 6 is a perspective view schematically illustrating an example of an evaporator applied to the chiller system of Fig. 5, Fig. 7 is a cross-sectional view schematically illustrating the evaporator of Fig. 6, and Fig. 8 is a cross-sectional view of the heat exchange member of Fig. 7 taken along line A-A'.

[0093] Referring to FIGS. 6 to 8, the evaporator (1600) may include a case (610) including a pair of inlets (611, 621) and a pair of outlets (612, 622), a plurality of heat exchange members (630) arranged along the axial direction of the case (610) inside the case (610), and a screen (640) positioned spaced apart from the heat exchange members (1630) and dividing the interior of the case (610) into a first space (s1) and a second space (s2).

[0094] The case (610) forms the exterior of the evaporator (1600) and may include a pair of inlets (611, 621) and a pair of outlets (612, 622) connecting the interior and exterior of the case (610).

[0095] As an optional embodiment, the exterior of the case (610) may include a cylindrical shape, and may include a first inlet (611) at a lower side of the case (610), and a first outlet (612) at an upper side of the case (610). In addition, the case (610) may include a second outlet (622) at at least one area between the first inlet (611) and the first outlet (612) at the side of the case (610), and may include a second inlet (621) at the bottom of the case (610).

[0096] The first inlet (611) can be located at the lower side of the case (610), and refrigerant supplied from the outside of the case (610) can be injected into the inside of the case (610).

[0097] The first exhaust port (612) can be located at the upper side of the case (610) and can discharge refrigerant vapor formed inside the case (610) to the outside of the case (610).

[0098] Meanwhile, the refrigerant vapor discharged through the first discharge port (612) can be condensed into refrigerant through a refrigeration cycle including a compressor (1100), a condenser (1300), and an expansion valve (1500) and then injected again into the first inlet port (611).

[0099] The second inlet (621) may be located in at least one area of ​​the bottom surface of the case (610), and may inject coolant supplied from the outside of the case (610) into the inside of the heat exchange member (630) described later. At this time, the coolant may include, for example, a secondary refrigerant (indirect refrigerant) or fluorine.

[0100] The second discharge port (622) can be located in an area between the first inlet port (611) and the first discharge port (612) on the side of the case (610), and can discharge the coolant inside the heat exchange member (630) described later to the outside.

[0101] The heat exchange member (630) is located inside the case (610), and a plurality of heat exchange members (630) can be arranged in a tube shape along the axial direction of the case (610), and the upper and lower parts of the heat exchange member (630) can be covered by heads (631, 632).

[0102] For example, a plurality of heat exchange members (630) are connected to a lower head (632) through a single flow path, and the lower head (632) is connected to a second inlet (621) through a single flow path, so that coolant supplied from the outside through the second inlet (621) can be supplied to the inside of each of the plurality of heat exchange members (630) to fill the inside of the heat exchange members (630). In addition, a plurality of heat exchange members (630) are connected to an upper head (631) through a single flow path, and the upper head (631) is connected to a second discharge port (622) through a single flow path, so that coolant filled in the inside of the heat exchange members (630) can be discharged to the outside through the second discharge port (622).

[0103] As an optional embodiment, the length of the heat exchange member (630) along the axial direction of the case (610) may be 50% to 70% of the axial length of the case (610).

[0104] When the length of the heat exchange member (630) is less than 50% of the axial length of the case (610), the surface area where the heat exchange member (630) and the refrigerant come into contact is reduced, so that the heat exchange efficiency of the evaporator (1600) may decrease, and when the length of the heat exchange member (630) is greater than 70% of the axial length of the case (610), the gas-liquid separation described later may be difficult.

[0105] Meanwhile, the inside of the case (610) can be filled with refrigerant supplied through the first inlet (611). For example, the refrigerant can be filled inside the case (610) until all of the heat exchange members (630) are submerged, and the filled refrigerant remains inside the case (610), so that the evaporator (1600) can serve as a liquid receiver that performs the function of storing the refrigerant.

[0106] Meanwhile, when the evaporator (1600) is in standby mode, the coolant filled in the heat exchange member (630) exchanges heat with the refrigerant existing in the case (610), so that the temperature can always be maintained below -35°C. Since the coolant at -35°C or below exists in the heat exchange member (630), the evaporator (1600) can serve as a cold storage that stores the coolant at -35°C or below.

[0107] As an optional embodiment, the heat exchange member (630) may include 280 to 300 copper tubes. The number of heat exchange members (630) may vary depending on the amount of coolant to be cooled. Specifically, as the number of heat exchange members (630) increases, a larger amount of coolant can be filled within the heat exchange member (630), and since the surface area in which the heat exchange member (630) and the refrigerant come into contact with each other increases, the heat exchange efficiency between the refrigerant and the coolant can increase. In addition, since the heat exchange member (630) is formed of copper tubes with good thermal conductivity, the heat exchange efficiency between the refrigerant and the coolant can increase.

[0108] Meanwhile, by using 200 to 300 heat exchange members (630) in this way and connecting the heat exchange members (630) with an increased surface area in contact with the refrigerant to the second inlet (621), the lower head (632), the upper head (631), and the second outlet (622) through a single flow path, a large amount of coolant can be cooled efficiently and quickly at the same time, and further, by increasing the number of heat exchange members (630) to 200 to 300, the amount of coolant that can be stored and waited for in the heat exchange members (630) can be maximized. That is, the use of 200 to 300 heat exchange members (630) may be intended to increase the surface area of ​​the heat exchange members (630) to enable rapid heat exchange and, at the same time, increase the volume of the internal space of the heat exchange members (630) to increase the amount of coolant that can be stored in the heat exchange members (630).

[0109] Fig. 9 is a front view schematically illustrating an example of the heat exchange member of Fig. 6.

[0110] Referring to FIG. 9, as an optional embodiment, the heat exchange member (630) may include a circular helicoil shape.

[0111] Since the heat exchange member (630) includes a circular helicoil shape, the surface area where the heat exchange member (630) and the refrigerant come into contact increases, so that the heat exchange efficiency between the refrigerant and the coolant can be increased.

[0112] The screen (640) can be positioned inside the case (610) apart from the heat exchange member (630) and can divide the case (610) into a first space (s1) and a second space (s2). For example, the screen (640) can be in the form of a plate including stainless steel.

[0113] Fig. 10 is a plan view showing the screen of the evaporator of Fig. 6.

[0114] Referring to FIG. 10, as an optional embodiment, the screen (640) may include a plurality of micro-holes (h) penetrating the screen (640).

[0115] Since the screen (640) includes a plurality of micro-holes (h), the refrigerant can be prevented from moving to the second space (s2) when the refrigerant boils. Accordingly, the refrigerant and refrigerant vapor can be located in the first space (s1), and only the refrigerant vapor can exist in the second space (s2).

[0116] Meanwhile, a first discharge port (612) may be located in the second space (s2). The first discharge port (612) is connected to a compressor (not shown) outside the evaporator (1600), and refrigerant vapor may be discharged to the compressor by the suction pressure of the compressor (not shown).

[0117] As a specific example, when the refrigerant inside the case (610) exchanges heat with the coolant inside the heat exchange member (630), boiling may occur in the refrigerant due to the heat amount of the coolant. At this time, the refrigerant oil (oil) mixed in the refrigerant may boil together and become vapor. At this time, the refrigerant oil, which has a relatively high viscosity compared to the refrigerant, blocks the plurality of micro-holes (h) penetrating the screen (640) due to surface tension, thereby preventing the refrigerant from moving to the second space (s2).

[0118] In addition, the refrigerant oil, which is located outside the evaporator (1600) and blocks a plurality of micro-holes (h) by the suction pressure of the compressor (not shown) connected to the first discharge port (612), can pass through the screen (640) and move to the second space (s2) and be sucked into the compressor (not shown) through the first discharge port (612).

[0119] Accordingly, the evaporator (1600) can function as a vapor-liquid separator by separating the refrigerant and refrigerant vapor from each other and discharging only the refrigerant vapor (refrigerant oil) to the compressor (not shown).

[0120] As the compressor (1100), oil separator (1200), condenser (1300), refrigerant dryer (1400), expansion valve (1500), and evaporator (1600) described above constitute a refrigeration cycle, the refrigerant can be maintained at a sub-zero temperature while circulating through the refrigeration cycle.

[0121] The chiller system may include a cooling cycle in which a refrigerant that maintains a sub-zero temperature by circulating a refrigeration cycle and a coolant that exchanges heat through a heat exchange member (630) in an evaporator circulate.

[0122] As an example, the cooling cycle of a chiller system may include a cooling line consisting of a pressurizer (100, 200), a heater (300), and a pump (400).

[0123] A pressurizing device (100, 200) is placed on the inlet side of the pump (400) of the cooling line and can inject pressure into the inside of the cooling line.

[0124] The heater (300) may serve to heat the coolant to a set temperature when the temperature of the coolant circulating in the cooling cycle falls below a set temperature. For example, the heater (300) may include an aluminum nitride filler, which is a super heat conductor, thereby improving energy efficiency.

[0125] The pump (400) may serve to provide pressure to the cooling line so that the coolant can circulate through the cooling cycle.

[0126] As an optional embodiment, the pump (400) can be controlled by a digital controller (DC).

[0127] Meanwhile, when the pump (400) of the closed cooling line is driven, the amount of coolant sucked into the suction side of the pump (400) may momentarily increase, causing a local pressure drop. This pressure drop momentarily lowers the vapor pressure, and the coolant on the suction side of the pump boils at a temperature lower than its original boiling point due to the lowered vapor pressure caused by the pressure drop, thereby reducing the temperature range of the usable coolant, making temperature control difficult, and at the same time, cavitation may occur in the pump. At this time, bubbles generated due to the cavitation phenomenon may be sucked into the pump (400), which may cause damage or malfunction of the pump (400).

[0128] Figure 11 is a temperature-pressure graph showing the vapor pressure of the coolant.

[0129] Referring to Figure 11, it can be seen that as the vapor pressure of the coolant decreases, the boiling point also decreases. The boiling point of the coolant is over 120 degrees at atmospheric pressure (101.325 kPa), but as the atmospheric pressure decreases, the boiling point temperature gradually decreases. For example, if the temperature of the coolant required for a chiller is 120 degrees, if the pressure in the cooling line drops below atmospheric pressure due to the pressure drop caused by the pump, the coolant will boil and cannot be used at the required temperature of 120 degrees.

[0130] Meanwhile, by pressurizing the inside of the cooling line to a pressure higher than atmospheric pressure, the boiling point temperature of the coolant can be increased, so that the usable temperature range of the coolant can be further increased.

[0131] That is, by using the pressurizing device (100, 200), the unique boiling point of the coolant can be controlled.

[0132] Therefore, in order to solve the problem of lowering the boiling point of the coolant caused by the pressure drop in the cooling line by the pump (400), a pressurizing device (100, 200) may be placed on the inlet side of the pump (400).

[0133] The pressure of the pressurizing device (100, 200) is set to correspond to the pressure reduced by the operating method described above, so that the required pressure can be supplied to the cooling line.

[0134] Looking at the mutual operation principle of the pressurization device (100, 200) and the cooling line, first, the coolant can be charged into the cooling line. At this time, the coolant can be charged into a pressure vessel (PV) and supplied to the cooling line. The cooling line charged with the coolant can form a closed system that is isolated from the outside by removing the air inside and sealing the coolant inlet (not shown) of the pressure vessel (PV). Next, the pressure required to maintain the boiling point of the coolant is set by the pressure control member (110, 210) of the pressurization device (100, 200), so that the pressure can be injected into the cooling line and maintained. At this time, if the injected pressure becomes higher than the pressure required to maintain the boiling point of the coolant, the pressure can be discharged by the fourth valve (20) formed in the pressure vessel (PV) so that the pressure can be maintained at the pressure required to maintain the boiling point of the coolant, and if the injected pressure is lower than the pressure required to maintain the boiling point of the coolant, the pressure setting of the pressurizing device (100, 200) can be increased to inject more pressure into the cooling line so that the pressure can be maintained at the pressure required to maintain the boiling point of the coolant.

[0135] As a result, since a pressurization device is applied to the cooling line to provide a stable circulation pressure, the temperature stability of the chiller system can be increased, so that the inherent boiling point of the coolant can be controlled, thereby preventing the phenomenon of the boiling point of the coolant being lowered due to the pressure drop in the cooling line, which is a closed system, so that the coolant can be used in a wider temperature range, and by suppressing the occurrence of the cavitation phenomenon, damage and failure of the pump can be prevented.

[0136] While the present invention has been described with reference to the embodiments illustrated in the drawings, these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent alternative embodiments are possible. Therefore, the true scope of technical protection of the present invention should be determined by the technical spirit of the appended claims.

[0137] The specific implementations described in the embodiments are exemplary embodiments and do not limit the scope of the embodiments in any way. For the sake of brevity of the specification, descriptions of conventional electronic components, control provision methods, software, and other functional aspects of the above provision methods may be omitted. In addition, the lines connecting or connecting members between components illustrated in the drawings are merely representative of functional connections and / or physical or circuit connections, and may be replaced or represented as various additional functional connections, physical connections, or circuit connections in an actual device. In addition, if there is no specific mention such as “essential,” “important,” etc., the component may not be absolutely necessary for the application of the present invention.

[0138] The use of the term "above" and similar referential terms in the specification of embodiments (especially in the claims) may refer to both singular and plural. Furthermore, if a range is described in the embodiments, the invention encompasses individual values ​​within the range (unless otherwise stated), and is equivalent to describing each individual value constituting the range in the detailed description. Finally, unless the order of steps constituting a method according to an embodiment is explicitly stated or otherwise stated to the contrary, the steps may be performed in any suitable order. The embodiments are not necessarily limited by the order in which the steps are described. The use of all examples or exemplary terms (e.g., "for example," etc.) in the embodiments is merely intended to describe the embodiments in detail, and the scope of the embodiments is not limited by the examples or exemplary terms, unless otherwise defined by the claims. Furthermore, those skilled in the art will recognize that various modifications, combinations, and variations may be made within the scope of the appended claims or their equivalents, depending on design conditions and factors.

Claims

1. Inlet where air is injected; A pressure regulating member for regulating the pressure of the air injected through the injection port; A first valve for controlling the amount of air injected, the pressure of which is controlled by the pressure control member; A second valve that controls the flow of the air whose injection amount is controlled by the first valve; and an outlet for discharging the air whose flow is controlled by the second valve; A flow path through which the air flows is arranged between each of the inlet, the first valve, the pressure regulating member, the second valve, and the outlet. Pressurization device.

2. In paragraph 1, A third valve is arranged between the second valve and the outlet, The third valve above is manually opened and controlled, Pressurization device.

3. In paragraph 1, Further comprising a pressure sensor disposed between the second valve and the outlet, Pressurization device.

4. In paragraph 3, A distribution member is arranged between the second valve and the outlet, The air passage between the second valve and the outlet is branched by the above distribution member, The branched air passage is connected to the pressure sensor, Pressurization device.

5. In paragraph 1, The above outlet is connected to the pressure vessel, The above pressure vessel stores coolant or air pressure, Pressurization device.

6. In paragraph 5, A fourth valve for controlling the pressure inside the pressure vessel is arranged on one side of the pressure vessel. Pressurization device.

7. Including the pressurizing device of any one of clauses 1 to 6, Chiller system.

8. In paragraph 7, The above chiller system includes a refrigeration cycle consisting of a compressor, a condenser, an expansion valve and an evaporator, and a cooling cycle consisting of a heater, an auxiliary heater, the pressurizing device and a pump. The above cooling cycle includes a main line input / output to the evaporator and a bypass line branched from the main line, The above bypass line further includes an auxiliary line branched from the above bypass line, The heater, the pressurizing device and the pump are sequentially arranged in the main line output from the evaporator, the auxiliary heater is arranged in the auxiliary line, and a flow controller is arranged at a location where the main line and the bypass line branch off. Chiller system.

9. In paragraph 8, The above flow regulator includes a first flow valve and a second flow valve, The first flow valve is connected to the main line, and the second flow valve is connected to the bypass line. Chiller system.

10. In paragraph 9, The flow rate of the main line and the flow rate of the bypass line are controlled differently according to the opening rates of the first flow valve and the second flow valve. Chiller system.

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