Dust removal device

Abstract

Provided is a dust removal device that is capable of pressing a workpiece with a uniform pressing force.　A dust removal device 10 comprises: dust removal rolls 41A, 41B that perform dust removal from an upper surface side or a lower surface side of a workpiece W; a pair of adhesive tape holders 50 that hold, on both end sides thereof, an adhesive tape roll T1 which transfers dust attached to the dust removal rolls 41A, 41B in a pressed state; and a uniform pressing mechanism 150 that is disposed inside a tape cylinder T3 of the adhesive tape roll T1 and is for suppressing fluctuation of pressing force in an axial direction of the adhesive tape roll T1 with respect to the dust removal rolls 41A, 41B. The uniform pressing mechanism 150 comprises: a holder shaft 151 that extends in the axial direction so as to connect the pair of adhesive tape holders 50, is eccentric with respect to rotation centers of the pair of adhesive tape holders 50, and is non-rotatable with respect to the adhesive tape roll T1; and a plurality of pressing holders 152 that are attached along the axial direction of the holder shaft 151 and press the tape cylinder T3 from an inner cylinder side.

Description

Dust removal equipment

[0001] The present invention relates to a dust removal device for removing dust adhering to a workpiece.

[0002] A dust removal device as shown in Patent Document 1 is used to remove dust adhering to various workpieces such as printed circuit boards and semiconductor substrates. In this dust removal device, an adhesive tape roll (630) is held by a rotary holder (631A), which is rotatably attached to a support slider (62A). An upper protrusion (62A3) of the support slider (62A) is pressed by an actuator (70A), causing the support slider (62A) to move along a guide groove (61A1).

[0003] This movement causes the adhesive tape roll (630) to push the adhesive roll bodies (52, 53), which then come into contact with the workpiece (W) while resisting the spring force of the return spring (95), thereby enabling dust removal from the workpiece (W).

[0004] JP 2016-203089 A

[0005] However, the configuration of Patent Document 1 has a problem in that the pressing force is not uniform when pressing the workpiece (W). Possible causes of the non-uniform pressing force on the workpiece (W) include, for example, (a) rattle between the support slider (62A) and the guide groove (61A1), (b) eccentricity or lack of roundness in either the adhesive tape roll (630) or the rotation holding portion (631A), (c) variations in the spring force of the return spring (95) or non-uniformity in the pressing force on the workpiece (W) in the axial direction of the adhesive roll body (52, 53) caused by the spring force, and (d) non-uniformity in the pressing force in the axial direction of the adhesive tape roll (630).

[0006] The present invention has been made in view of the above circumstances, and has as its object to provide a dust removal device capable of pressing a workpiece with a uniform pressing force.

[0007] In order to solve the above problems, according to a first aspect of the present invention, there is provided a dust removal device for removing dust from a workpiece, comprising: a dust removal roll that removes dust from the upper or lower side of the workpiece; a pair of adhesive tape holders that hold an adhesive tape roll at both ends and transfers dust adhering to the dust removal roll under pressure; and an equal pressure mechanism that is arranged inside the tape tube of the adhesive tape roll and that suppresses fluctuations in the pressing force of the adhesive tape roll in the axial direction against the dust removal roll, wherein the equal pressure mechanism extends in the axial direction to connect the pair of adhesive tape holders, is eccentric from the center of rotation of the pair of adhesive tape holders and does not rotate with respect to the adhesive tape roll, and a plurality of pressure holders that are attached along the axial direction of the holder shaft and press the tape tube from the inner tube side.

[0008] According to the present invention, it is possible to provide a dust removal device that can press a workpiece with a uniform pressing force.

[0009] FIG. 1 is a side view transparently showing a partial configuration of a dust remover according to a first embodiment of the present invention. FIG. 2 is a partial perspective view showing the configuration in the vicinity of a dust removal unit and a tape unit in the dust remover shown in FIG. 1. FIG. 3 is a side sectional view showing the configuration in the vicinity of a dust removal roll unit and a tape unit in the dust remover shown in FIG. 1. FIG. 4 is a partial perspective view showing the configuration in the vicinity of a dust removal roll unit in the dust remover shown in FIG. 1. FIG. 5 is a perspective view showing the configuration in the vicinity of a dust removal roll synchronization mechanism in the dust remover shown in FIG. 1. FIG. 6 is a perspective view showing the configuration in the vicinity of a dust removal roll upper and lower guides, a tape upper and lower guide, and a positioning mechanism in the dust remover shown in FIG. 1. FIG. 7 is a partial perspective view showing the configuration in the vicinity of an adhesive tape holder and an elastic support mechanism located on one end side of an adhesive tape roll in the dust remover shown in FIG. 1. FIG. 8 is a partial perspective view showing the configuration in the vicinity of an adhesive tape holder and a fixing support mechanism located on the other end side of the adhesive tape roll in the dust remover shown in FIG. 1. FIG. 9 is a sectional view showing the configuration of an adhesive tape roll and an equal pressing mechanism in the dust remover shown in FIG.

[0010] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A dust remover 10 according to a first embodiment of the present invention and a method for renewing adhesive tape in the dust remover 10 will be described below with reference to the drawings.

[0011] <Overall Configuration of Dust Removal Apparatus 10> Fig. 1 is a side view showing the main components of the configuration of a dust removal apparatus 10 according to a first embodiment of the present invention. The dust removal apparatus 10 according to this embodiment is an apparatus for removing dust adhering to the surface of a workpiece W. Examples of the workpiece W include a printed circuit board on which electronic components are mounted, a substrate such as a liquid crystal panel, or a sheet-like member that is the raw material for a substrate, but the workpiece W may also be a flat member other than these.

[0012] The dust removal device 10 of this embodiment removes dust adhering to the surface of the workpiece W while transporting the workpiece W, for example, from left to right in Fig. 1. However, conversely, dust adhering to the surface of the workpiece W may also be removed while transporting the workpiece W from right to left in Fig. 1.

[0013] The dust removal device 10 has as its main components a housing 20, a conveying mechanism 30, a dust removal roll unit 40, an adhesive tape holder 50, upper and lower dust removal roll guides 60 (see Figure 4, etc.), a cylinder connecting mechanism 70 (see Figure 2, etc.), a dust removal roll cylinder 80, a support block 90 (see Figure 2, etc.), a dust removal roll synchronization mechanism 100 (see Figure 5, etc.), upper and lower tape guides 110 (see Figure 2, etc.), an elastic support mechanism 120 (see Figure 2, etc.), a fixed support mechanism 130 (see Figure 8, etc.), a tape cylinder 140 (see Figure 2, etc.), an equal pressure mechanism 150 (see Figure 9, etc.), a positioning mechanism 160 (see Figure 3, etc.), and a control unit 200.

[0014] In the following description, the housing side plate 21, dust removal roll unit 40, dust removal roll upper and lower guides 60, cylinder connecting mechanism 70, dust removal roll cylinder 80, support block 90, and dust removal roll synchronization mechanism 100, which will be described later, can be pulled out as a unit toward the side of the dust removal device 10 in order to replace the upper dust removal roll 41A and the lower dust removal roll 41B. Therefore, these components constitute a dust removal unit U1.

[0015] The dust removal unit U1, which can be pulled out as a unit, has dust removal roll units 40, each including an upper dust removal roll 41A and a lower dust removal roll 41B that can come into contact with each other, disposed on one side and the other side in the width direction of the housing side plate portion 21, and therefore has two sets of dust removal roll units 40. However, the dust removal unit U1 may have one set of dust removal roll units 40, or may have three or more sets of dust removal roll units 40.

[0016] Furthermore, the housing side plate portion 22, the upper and lower tape guides 110, the elastic support mechanism 120, the fixed support mechanism 130, the tape cylinder 140, and the uniform pressing mechanism 150, which will be described later, can be pulled out as a unit toward the side of the dust removal device 10 in order to replace the adhesive tape roll T1. Therefore, these components constitute the tape unit U2.

[0017] The tape units U2 that can be pulled out integrally are arranged above and below the dust removal unit U1. The upper tape unit U2 and the lower tape unit U2 have adhesive tape holders 50 arranged on one and the other widthwise sides of the housing side plate portion 22, and adhesive tape rolls T1 are attached to these adhesive tape holders 50. Therefore, the upper and lower tape units U2 each have two adhesive tape holders 50. However, each of the upper and lower tape units U2 may have only one adhesive tape holder 50, or may have three or more adhesive tape holders 50.

[0018] <Housing 20> The housing 20 is constructed by combining structural members such as metal supports, with outer walls attached between the supports as necessary. The housing 20 supports various components of the dust removal device 10. The housing 20 also includes a housing side plate 21 that is pulled out integrally with the dust removal unit U1, and a housing side plate 22 that is pulled out integrally with the tape unit U2.

[0019] <Transport mechanism 30> The transport mechanism 30 includes a motor (not shown), a transmission mechanism (not shown) that transmits the driving force from the motor to each part such as the transport rollers 32 and the lower dust removal roll 41B, and the transport rollers 32 that transport the workpiece W transported from the outside. The motor is a part that is driven to rotate by commands from the control unit 200. In this embodiment, the transmission mechanism includes a magnetic coupling unit, a magnetic gear, and a gear train. However, the transmission mechanism is not limited to these, and a wheel-type gear or a belt may be used instead of the magnetic coupling unit or the magnetic gear.

[0020] 1, a plurality of conveying rollers 32 are provided, but the motor may provide driving force to any of the conveying rollers 32. The motor may or may not transmit driving force to the lower dust removal roll 41B.

[0021] <Dust Removal Roll Unit 40> FIG. 2 is a partial perspective view showing the configuration in the vicinity of the dust removal unit U1 and the tape unit U2. FIG. 3 is a side cross-sectional view showing the configuration in the vicinity of the dust removal unit U1 and the tape unit U2. FIG. 4 is a partial perspective view showing the configuration in the vicinity of the dust removal unit U1. As shown in FIGS. 2 to 4, the dust removal roll unit 40 is a part that comes into contact with at least one of the upper and lower surfaces of the workpiece W to remove dust from the workpiece W. This dust removal roll unit 40 has an upper dust removal roll 41A and a lower dust removal roll 41B. Therefore, dust can be removed from both the upper and lower surfaces of the workpiece W by the upper dust removal roll 41A and the lower dust removal roll 41B. The upper dust removal roll 41A and the lower dust removal roll 41B correspond to dust removal rolls.

[0022] 2 to 4, one upper dust removal roll 41A and one lower dust removal roll 41B are provided for one tape roll. However, two or more upper dust removal rolls 41A and two or more lower dust removal rolls 41B may be provided for one tape roll.

[0023] As shown in Figures 2 to 4, the upper dust removal roll 41A and the lower dust removal roll 41B each have a rotating shaft 42 and an adhesive rubber layer 43. The adhesive rubber layer 43 is provided on the outside of the rotating shaft 42 over a predetermined length in the axial direction. This adhesive rubber layer 43 is made of an adhesive rubber capable of adsorbing dust. An adsorption layer (not shown) is provided on the surface of the adhesive rubber layer 43, and this adsorption layer is made of a material with excellent dust adsorption properties, such as silicone rubber. A conductive layer, such as nitrile rubber or carbon rubber, may be provided below the adsorption layer.

[0024] The end of the rotary shaft 42 is attached to a support block 71 (described later) via a bearing B1.

[0025] 2 and 3 , the adhesive tape holder 50 holds the adhesive tape roll T1. The adhesive tape holder 50 has an inner circumferential connecting portion 51 and a tape holding bearing 52. The inner circumferential connecting portion 51 is a disk-shaped portion, and the tip side of a connecting shaft 133 (described later) is fixed to its radial center by, for example, a screw. Furthermore, on the inner side of the adhesive tape roll T1 (i.e., the opposite side to the connecting shaft 133 (described later)), a holder shaft 151 and a reinforcing shaft 153 (described later) are connected to portions of the inner circumferential connecting portion 51 that are located a predetermined distance outside the center.

[0026] The tape retention bearing 52 is a bearing to which the inner peripheral connecting portion 51 is attached on its inner diameter side, and rotates relative to the inner peripheral connecting portion 51. The tape retention bearing 52 is the portion into which the tape tube T3 of the adhesive tape roll T1 fits, and a flange portion 52a is provided on the outer peripheral edge of the tape retention bearing 52. The flange portion 52a abuts against the end of the tape tube T3, thereby preventing the adhesive tape holder 50 from being completely inserted into the tape tube T3.

[0027] Incidentally, a holder shaft 151 and a reinforcing shaft 153, which will be described later, are connected to the surface of the inner peripheral connecting portion 51 that is positioned on the inner side of the adhesive tape roll T1.

[0028] The adhesive tape roll T1 is formed by winding the adhesive tape T2 around the tape tube T3. The surface of the adhesive tape T2 is an adhesive surface. The adhesive surface is capable of retaining dust adsorbed to the upper dust removal roll 41A and the lower dust removal roll 41B. Therefore, the adhesive strength of the adhesive surface of the adhesive tape T2 to dust is greater than the adhesive strength of the upper dust removal roll 41A and the lower dust removal roll 41B to dust. This allows dust to be efficiently transferred from the upper dust removal roll 41A and the lower dust removal roll 41B to the adhesive surface of the adhesive tape T2.

[0029] The sheet-like adhesive tape T2 has slits that allow it to be separated into sheets. Therefore, by pulling out the adhesive tape T2 from the adhesive tape roll T1 and cutting it at the slits, the soiled adhesive tape T2 can be easily replaced with a clean adhesive tape T2. The slits in the adhesive tape T2 are not parallel to the axial direction but are inclined. Therefore, the end (step) of the adhesive tape T2 located at the outermost periphery of the adhesive tape roll T1 is also inclined with respect to the axial direction. However, the slits in the adhesive tape T2 may be parallel to the axial direction.

[0030] <Dust removal roll upper and lower guides 60, cylinder connecting mechanism 70, dust removal roll cylinder 80, and support block 90> Next, we will explain the dust removal roll upper and lower guides 60, cylinder connecting mechanism 70, and dust removal roll cylinder 80. As shown in Figure 4, the upper dust removal roll 41A has its vertical movement guided by the dust removal roll upper and lower guides 60. This dust removal roll upper and lower guide 60 is arranged at the side end of the housing side plate portion 21 that constitutes the housing 20.

[0031] The housing side plate portion 21 can be pulled out to the side of the dust removal device 10 in order to replace the upper dust removal roll 41A and the lower dust removal roll 41B. Therefore, the housing side plate portion 21 constitutes a part of the dust removal roll unit 40.

[0032] The dust removal roll upper and lower guide 60 is a linear guide including a rail 61, a sliding block 62, and balls (not shown), and the sliding block 62 is able to slide smoothly (with little frictional resistance) on the rail 61 without any rattle. Of these, the rail 61 is fixed to the side end of the housing side plate 21 so as to extend in the vertical direction. This rail 61 is a typical linear guide rail, for example, having a cross-sectional shape with constricted portions on both sides. The dust removal roll upper and lower guide 60 corresponds to the first linear guide.

[0033] Furthermore, the sliding block 62 has a hook portion that fits into the narrowed portion, for example, so that it does not come off the rail 61 and does not rattle.

[0034] A driving force from a dust removal roll cylinder 80 can be transmitted to this sliding block 62 via a cylinder connecting mechanism 70. The cylinder connecting mechanism 70 has a support block 71, a protruding shaft 73, and a loosely fitted holding member 74.

[0035] The support block 71 is a member that supports the end of the rotation shaft 42 of the upper dust removal roll 41A. The support block 71 is attached to the sliding block 62 via, for example, screws. Furthermore, a rotating arm 102 of a dust removal roll synchronization mechanism 100 (described later) is also connected to the support block 71.

[0036] The support block 71 has an upper piece 71a and a lower piece 71b located below the upper piece 71a. A U-shaped recess 71c is provided between the upper piece 71a and the lower piece 71b, and a bearing B1 is disposed in the recess 71c to support the rotating shaft 42 via the bearing B1. A fixing piece 72 is attached to the opening of the recess 71c of the support block 71 to prevent the bearing B1 disposed in the recess 71c from coming off.

[0037] 4, a protruding shaft 73 is attached to the side of the support block 71 opposite to the side on which the dust removal roll upper and lower guides 60 are arranged. The protruding shaft 73 is a shaft-shaped (pin-shaped) member that protrudes from the side of the support block 71. The protruding shaft 73 is located in a loose-fitting portion 74c of the loose-fitting holding member 74.

[0038] The loose-fit holding member 74 is a member connected to the lower end of the piston rod 81 of the dust removal roll cylinder 80. The loose-fit holding member 74 has an upper piece 74a and a lower piece 74b provided below the upper piece 74a, and a loose-fit portion 74c where the protruding shaft 73 is located is present between the upper piece 74a and the lower piece 74b.

[0039] The lower end of a piston rod 81 of a dust removal roll cylinder 80 is connected to the loosely fitted holding member 74. The dust removal roll cylinder 80 is, for example, an air cylinder, and is operated based on control by the control unit 200. In this embodiment, the dust removal roll cylinder 80 is provided with a piston rod 81 that can be moved up and down. When the dust removal roll cylinder 80 operates in a direction to raise the piston rod 81, the upper dust removal roll 41A is moved upward, i.e., in a direction away from the lower dust removal roll 41B.

[0040] The support block 90 is a member that supports the end of the rotating shaft 42 of the lower dust removal roll 41B, and like the support block 71, has an upper piece 90a and a lower piece 90b located below the upper piece 90a. A U-shaped recess 90c is provided between the upper piece 90a and the lower piece 90b, and a bearing B2 is disposed in the recess 90c, supporting the rotating shaft 42 via the bearing B2. A fixing piece 91 is attached to the opening of the recess 71c of the support block 90 to prevent the bearing B2 disposed in the recess 90c from coming off.

[0041] The support block 90 is fixed to the housing side plate portion 21, for example, via screws. Therefore, unlike the support block 71, the support block 90 does not slide in the vertical direction. For this reason, the position of the lower dust removal roll 41B is fixed in the vertical direction. The upper surfaces (transport surfaces) of the transport rollers 32 of the transport mechanism 30 and the upper surfaces (transport surfaces) of the lower dust removal roll 41B are set to be at the same height. Therefore, dust removal from the workpiece W can be performed well by the upper dust removal roll 41A and the lower dust removal roll 41B.

[0042] <Regarding the Dust Removal Roll Synchronization Mechanism 100> Next, the dust removal roll synchronization mechanism 100 will be described. Fig. 5 is a perspective view showing the configuration near the dust removal roll synchronization mechanism 100. As shown in Fig. 5, the dust removal roll synchronization mechanism 100 includes a rotating shaft 101 and a rotating arm 102.

[0043] The rotating shaft 101 is a shaft-shaped member extending in the width direction of the dust removal device 10 (a direction perpendicular to the conveying direction of the workpieces W) and rotates around a central axis. The rotating shaft 101 is rotatably supported on the housing side plate portion 21 via, for example, a bearing (not shown). In addition, the rotating shaft 101 is provided so as to be close to the upper dust removal roll 41A, although it does not interfere with the upper dust removal roll 41A.

[0044] The base ends of the pivot arms 102 are fixed to both ends of the pivot shaft 101 via screws or the like. That is, when the pivot shaft 101 rotates, the pair of pivot arms 102 move in an arc. The tip ends of the pivot arms 102 are connected to the support block 71 via mounting shafts 103. That is, an oval hole 102a is provided at the tip end of the pivot arm 102, and the mounting shaft 103 is inserted into the oval hole 102a. Therefore, even when the pivot arms 102 move in an arc, the mounting shaft 103 can move up and down in conjunction with the vertical movement of the support block 71.

[0045] In the dust removal roll synchronization mechanism 100, for example, when the upper dust removal roll 41A is pushed down as the adhesive tape roll T1 is lowered, the rotating shaft 101 rotates, and the pair of rotating arms 102 rotate synchronously with the rotation of the rotating shaft 101. Therefore, unlike when the pair of rotating arms 102 rotate independently, the support block 71 arranged on one end side and the support block 71 arranged on the other end side can be pushed down simultaneously.

[0046] Therefore, the upper dust removal roll 41A can be prevented from coming into contact with the lower dust removal roll 41B in an uneven manner, such as when one end or the other end comes into contact with the lower dust removal roll 41B first.

[0047] <Regarding the tape vertical guide 110> Next, the tape vertical guide 110 and the tape cylinder 140 will be described. Fig. 6 is a perspective view showing the configuration in the vicinity of the dust removal roll vertical guide 60, the tape vertical guide 110, and the positioning mechanism 160. As shown in Figs. 2 and 6, the adhesive tape holder 50 supporting the adhesive tape roll T1 has its vertical movement guided by the tape vertical guide 110. This tape vertical guide 110 is disposed at a side end of the housing side plate 22 that constitutes the housing 20. Note that the housing side plate 22 is located above the housing side plate 21.

[0048] This tape vertical guide 110 has a similar configuration to the above-mentioned dust removal roll vertical guide 60. That is, the tape vertical guide 110 is a linear guide including a rail 111, a sliding block 112, and a ball (not shown) or the like, and the sliding block 112 is able to slide smoothly (with little frictional resistance) relative to the rail 111 without any rattle. Note that the rail 111 has the same configuration as the rail 61, and the sliding block 112 has the same configuration as the sliding block 62, so a description of the configurations of the rail 111 and the sliding block 112 will be omitted. Note that the tape vertical guide 110 corresponds to the second linear guide.

[0049] <Regarding the elastic support mechanism 120 and the fixed support mechanism 130> Fig. 7 is a partial perspective view showing the configuration in the vicinity of the adhesive tape holder 50 and the elastic support mechanism 120 located on one end side of the adhesive tape roll T1. Fig. 8 is a partial perspective view showing the configuration in the vicinity of the adhesive tape holder 50 and the fixed support mechanism 130 located on the other end side of the adhesive tape roll T1.

[0050] As shown in Fig. 7, the adhesive tape holder 50 located on one end side of the adhesive tape roll T1 is supported by an elastic support mechanism 120. Furthermore, as shown in Fig. 8, the adhesive tape holder 50 located on the other end side of the adhesive tape roll T1 is supported by a fixed support mechanism 130.

[0051] The elastic support mechanism 120 has a cylindrical portion 121 and a pressing shaft 122. The cylindrical portion 121 is attached to the sliding block 112 at one end in the axial direction via, for example, a screw. A spring (not shown) is built into the cylindrical portion 121, and the spring pushes the pressing shaft 122 toward the other end in the axial direction.

[0052] One end of the pressing shaft 122 penetrates the cylindrical portion 121 and protrudes to one side in the axial direction, and a handle 122 a is attached to the one end. The other end of the pressing shaft 122 is fixed to the adhesive tape holder 50.

[0053] The fixed support mechanism 130 also has a connecting block 131, a joint 132, and a connecting shaft 133 with a rectangular cross section. The connecting block 131 is attached to the sliding block 112 at the other axial end thereof via, for example, a screw. One end of the connecting shaft 133 is rotatably connected to the connecting block 131 via the joint 132, which has a rotation axis in the vertical direction. Therefore, the connecting shaft 133 can rotate horizontally but cannot rotate in the rotation direction of the adhesive tape roll T1. The connecting shaft 133 is provided so that its cross section is rectangular, and the other end of the connecting shaft 133 with a rectangular cross section is inserted into a fitting hole in the inner peripheral connecting portion 51 of the adhesive tape holder 50.

[0054] <Regarding the Tape Cylinder 140> Next, the tape cylinder 140 will be described. The tape cylinder 140 is, for example, an air cylinder, similar to the dust removal roll cylinder 80 described above, and operates based on the control of the control unit 200. The tape cylinder 140 has a piston rod 141, and the piston rod 141 can be moved up and down.

[0055] The piston rod 141 is connected to the cylindrical portion 121 or the connecting block 131 via a connecting piece 142 .

[0056] Here, when the tape cylinder 140 operates in a direction that causes the upper piston rod 141 to descend, the adhesive tape roll T1 is pressed against the upper dust removal roll 41A, and at that time, the upper dust removal roll 41A is pressed down and comes into contact with the upper surface side of the workpiece W. As a result, when the upper dust removal roll 41A removes dust from the upper surface side of the workpiece W, the adhesive tape roll T1 can remove the dust that has been adsorbed by the upper dust removal roll 41A.

[0057] Furthermore, when the tape cylinder 140 operates in a direction lifting the lower piston rod 141, it presses the adhesive tape roll T1 against the lower dust removal roll 41B. Here, the lower dust removal roll 41B has a fixed vertical position and contacts the underside of the workpiece W when the workpiece W is transported. Therefore, when the lower dust removal roll 41B removes dust from the underside of the workpiece W, the adhesive tape roll T1 can remove the dust adsorbed by the lower dust removal roll 41B. <Regarding the Uniform Pressing Mechanism 150> Next, the uniform pressing mechanism 150 will be described. FIG. 9 is a cross-sectional view showing the configuration of the adhesive tape roll T1 and the uniform pressing mechanism 150. As shown in FIG. 9, the uniform pressing mechanism 150 is a mechanism for uniformly distributing the pressing force in the axial direction of the adhesive tape roll T1. The uniform pressing mechanism 150 includes a holder shaft 151, a pressing holder 152, and a reinforcing shaft 153.

[0058] The holder shaft 151 is a shaft-shaped member, one end of which is fixed to the inner circumferential connecting portion 51 of the adhesive tape holder 50 located on one side in the axial direction, and the other end of which is fixed to the inner circumferential connecting portion 51 of the adhesive tape holder 50 located on the other side in the axial direction. However, the holder shaft 151 is fixed not to the radial center of the inner circumferential connecting portion 51, but to a portion located a predetermined distance outside the radial center, for example, via a screw or the like. Therefore, there is no interference with the pressing shaft 122 or connecting shaft 133 described above.

[0059] For the upper adhesive tape holder 50, the holder shaft 151 is located below the radial center of the inner circumferential connecting portion 51. For the lower adhesive tape holder 50, the holder shaft 151 is located above the radial center of the inner circumferential connecting portion 51.

[0060] Wheel-shaped pressure holders 152 are attached to the holder shaft 151 at predetermined intervals via bearings B3. Therefore, the pressure holders 152 are rotatable relative to the holder shaft 151. The pressure holders 152 are members that press the tape tube T3 from the inner tube side. That is, the lower peaks of the pressure holders 152 are arranged at approximately the same height so that the adhesive tape roll T1 can press the upper dust removal roll 41A or the lower dust removal roll 41B uniformly. However, the diameters of the pressure holders 152 may be slightly different to ensure a uniform pressing force.

[0061] The reinforcing shaft 153 is a shaft-shaped member, similar to the holder shaft 151. Similar to the holder shaft 151, the reinforcing shaft 153 is fixed, for example, via a screw or the like, not to the radial center of the inner circumferential connecting portion 51 but to a portion that is a predetermined distance outside the radial center. Therefore, the reinforcing shaft 153 does not interfere with the pressing shaft 122 or connecting shaft 133 described above.

[0062] The presence of the reinforcing shaft 153 makes it possible to prevent the even pressing mechanism 150 from twisting when pressing the adhesive tape roll T1 by the pressing holder 152. In other words, the reinforcing shaft 153 functions as a reinforcing member in the axial direction of the even pressing mechanism 150.

[0063] <Regarding the Positioning Mechanism 160> Next, the positioning mechanism 160 will be described. The dust removal device 10 is equipped with a positioning mechanism 160 as shown in Fig. 3. This positioning mechanism 160 is a mechanism for suppressing misalignment between the dust removal roll unit 40 and the adhesive tape roll T1 and rattles at the respective sliding parts, in order to achieve uniform pressing of the workpiece W, and for realizing parallel contact of the adhesive tape roll T1 with the dust removal roll unit 40 without one-sided contact.

[0064] The positioning mechanism 160 includes a rod pressing cylinder 170 , a tape-side positioning member 180 , and a roller-side positioning member 190 .

[0065] The rod pressing cylinder 170 is, for example, an air cylinder, and is operated based on the control of the control unit 200. A pressing rod 172 is connected to the tip side of a piston rod 171 of this rod pressing cylinder 170. Therefore, by operating the rod pressing cylinder 170, the pressing rod 172 can press the positioning rod 184.

[0066] The tape-side positioning member 180 also includes a shaft sliding guide 181 , a positioning rod 184 , a biasing spring 185 , and a shaft adjusting member 186 .

[0067] The shaft sliding guide 181 is fixed to the housing side plate 22 via, for example, screws. The shaft sliding guide 181 is provided with a tape side bottom 182 and a roller side bottom 183, and a space S1 is provided between the tape side bottom 182 and the roller side bottom 183. Note that the shaft sliding guide 181 corresponds to the first fixed portion, but the housing side plate 22 may also correspond to the first fixed portion together with the shaft sliding guide 181.

[0068] An axial hole 182a is provided in the tape-side bottom 182, and this axial hole 182a passes through the tape-side bottom 182. Furthermore, an axial hole 183a is provided in the roller-side bottom 183, and this axial hole 183a passes through the roller-side bottom 183. A positioning rod 184 passes through the axial holes 182a and 183a. Furthermore, at least one of the axial holes 182a and 183a corresponds to the first axial hole.

[0069] The positioning rod 184 is a member for positioning by being pushed in by the pressing rod 172 when the rod pressing cylinder 170 is actuated, protruding from the roller-side bottom portion 183 and entering the positioning hole 191 of the roller-side positioning member 190. Therefore, as shown in Fig. 3, the positioning rod 184 is provided longer than the vertical length of the shaft sliding guide 181.

[0070] Additionally, a biasing spring 185 (see FIG. 3 ), which is a coil spring, is disposed in the space S1, and the positioning rod 184 is disposed so as to pass through the center hole of the biasing spring 185. The biasing spring 185 is a member that applies a biasing force to the positioning rod 184 in a direction away from the roller-side positioning member 190.

[0071] Therefore, when the rod pressing cylinder 170 operates in the pressing direction, the positioning rod 184 is pressed into the roller-side positioning member 190 against the biasing force of the biasing spring 185. However, when the rod pressing cylinder 170 does not press the positioning rod 184, the biasing force of the biasing spring 185 causes the positioning rod 184 to be in its initial position, i.e., a position where it does not enter the positioning hole 191 of the roller-side positioning member 190.

[0072] Furthermore, the axial adjustment member 186 is a member that adjusts the radial position of the positioning rod 184 in the upper tape-side positioning member 180. This axial adjustment member 186 is provided with an axial hole 186a through which the positioning rod 184 is inserted. Here, as described above, 1849 is inserted into the axial holes 182a and 183a, and therefore, by adjusting the position of the axial adjustment member 186 in a direction perpendicular to the axial direction, any play in the positioning rod 184 is eliminated.

[0073] Unlike the upper dust removal roll 41A, the lower dust removal roll 41B does not move in the vertical direction, but is fixed in its vertical position. Therefore, the lower dust removal roll 41B has less rattle compared to the upper dust removal roll 41A. Therefore, the shaft adjusting member 186 is omitted from the lower tape side positioning member 180. However, the shaft adjusting member 186 may also be provided in the lower tape side positioning member 180.

[0074] Furthermore, the roller-side positioning members 190 are fixed to the housing side plate 21 via, for example, screws, and the roller-side positioning members 190 are provided on the upper and lower sides of the housing side plate 21. That is, a pair of roller-side positioning members 190 are provided. Note that the roller-side positioning members 190 correspond to the second fixed portion, but the housing side plate 21 may also correspond to the second fixed portion together with the roller-side positioning members 190.

[0075] This roller-side positioning member 190 is provided in a block shape, and is provided with a positioning hole 191 that passes through the roller-side positioning member 190. The positioning rod 184 fits into the positioning hole 191, thereby positioning the tape-side positioning member 180 and the roller-side positioning member 190 and eliminating any rattle between them. The positioning rod 184 of the upper tape-side positioning member 180 fits into the positioning hole 191 of the upper roller-side positioning member 190, and the positioning rod 184 of the lower tape-side positioning member 180 fits into the positioning hole 191 of the lower roller-side positioning member 190. The positioning holes 191 also correspond to the second shaft holes.

[0076] <Regarding the control unit 200> The control unit 200 is a part that controls the operation of the motor (not shown), the dust removal roll cylinder 80, the tape cylinder 140, and the rod pressing cylinder 170. This control unit 200 can be, for example, a computer equipped with a CPU and memory (RAM, ROM, non-volatile memory, etc.). In addition, a motor driver for driving the motor, an actuator driver for operating the tape actuators 70A, 70B, etc. can also be included in the concept of the control unit 200.

[0077] <Operation of Dust Removal Apparatus 10 When Removing Dust from Workpieces W> The operation of the dust removal apparatus 10 configured as above when removing dust from the workpieces W will be described below.

[0078] When the dust removal device 10 is operated to remove dust from the workpiece W, the control unit 200 first operates the rod pressing cylinder 170 to cause the pressing rod 172 to press the positioning rod 184 .

[0079] At this time, the positioning rod 184 is inserted into the positioning hole 191 of the roller-side positioning member 190 while resisting the biasing force of the biasing spring 185. This positions the tape-side positioning member 180 and the roller-side positioning member 190, and eliminates any play between them. This ensures that the dust removal roll unit 40 and the adhesive tape holder 50 (adhesive tape roll T1) are reliably positioned, and also eliminates any play between the dust removal roll unit 40 and the adhesive tape holder 50 (adhesive tape roll T1).

[0080] In this state, the control unit 200 activates the tape cylinder 140 to move the elastic support mechanism 120 and the fixed support mechanism 130 toward the upper dust removal roll 41A and the lower dust removal roll 41B. At this time, the tape upper and lower guides 110 cause the sliding block 112 to slide with very little frictional resistance and with high precision and without rattle against the rails 111 attached to the housing side plate 22. Therefore, the elastic support mechanism 120 and the fixed support mechanism 130 attached to the sliding block 112 also move without rattle.

[0081] Then, the adhesive tape roll T1 moves toward the upper dust removal roll 41A and the lower dust removal roll 41B via the adhesive tape holders 50 on one end side and the other end side, thereby bringing the adhesive tape roll T1 into contact with the upper dust removal roll 41A and the lower dust removal roll 41B.

[0082] Here, the dust removal device 10 of the present embodiment is equipped with an even pressing mechanism 150. Therefore, in the axial direction of the adhesive tape roll T1, each of the multiple pressing holders 152 presses the adhesive tape roll T1 toward the upper dust removal roll 41A and the lower dust removal roll 41B from the inside of the tape cylinder T3. Therefore, the adhesive tape roll T1 can apply even pressure to the upper dust removal roll 41A and the lower dust removal roll 41B in the axial direction.

[0083] When the tape cylinder 140 maintains a predetermined pressure, not only the adhesive tape holders 50 on both ends of the adhesive tape roll T1 but also the multiple pressure holders 152 arranged inside the tape tube T3 press the adhesive tape roll T1 against the upper dust removal roll 41A and the lower dust removal roll 41B. Therefore, the pressing force of the adhesive tape roll T1 against the upper dust removal roll 41A and the lower dust removal roll 41B does not become weaker at the center of the adhesive tape roll T1 in the axial direction than at both ends of the adhesive tape roll T1. In other words, compared to current dust removal devices, the pressing force at the center of the adhesive tape roll T1 in the axial direction does not become weaker.

[0084] Then, as the upper tape cylinder 140 operates to continue pressing the upper dust removal roll 41A with the adhesive tape roll T1, the upper dust removal roll 41A is pressed down toward the lower dust removal roll 41B. At this time, the rotating shaft 101 of the dust removal roll synchronization mechanism 100 rotates, causing the pair of rotating arms 102 to simultaneously rotate in the downward direction.

[0085] As a result, dust can be removed from the upper surface of the workpiece W without one-sided contact occurring, such as when one side or the other of the upper dust removal roll 41A comes into contact with the upper surface of the workpiece W first. The upper dust removal roll 41A can remove dust from the upper surface of the workpiece W with relatively little variation in the pressing force against the workpiece W at both ends and the center in the axial direction, thereby achieving uniformity. In addition, a reaction force to the pressing force of the upper dust removal roll 41A is generated in the lower dust removal roll 41B, sandwiching the workpiece W. Therefore, the lower dust removal roll 41B can remove dust from the lower surface of the workpiece W with relatively little variation in the pressing force against the workpiece W at both ends and the center in the axial direction, thereby achieving uniformity.

[0086] It is assumed that the pressing force exerted by the upper tape cylinder 140 is the same in the dust remover 10 of this embodiment as in the current dust remover. In this case, in the current dust remover, the pressing force at both ends of the upper and lower dust remover rolls in the axial direction is weaker than the pressing force at the center in the axial direction. This is because, in the current dust remover, the upper dust remover roll is supported by a biasing spring, and a bending stress similar to that of a cantilever beam acts on the upper and lower dust remover rolls.

[0087] In contrast to this, in this embodiment, there are no biasing springs for supporting both ends of the upper dust removal roll 41A, and both ends of the upper dust removal roll 41A are supported via the dust removal roll cylinder 80 and the cylinder connecting mechanism 70. This also makes it possible to reduce variations in the pressing force on the workpiece W between both ends and the center in the axial direction of the upper dust removal roll 41A and the lower dust removal roll 41B, and to equalize the pressing force. Dust removal from the workpiece W is performed in this manner.

[0088] When dust removal from the workpiece W is no longer required, for example because dust removal from the workpiece W has been completed, the upper tape cylinder 140 and the lower tape cylinder 140 are each activated to move the adhesive tape roll T1 in a direction away from the upper dust removal roll 41A and the lower dust removal roll 41B. At this time, unlike current dust removal devices, the upper dust removal roll 41A is not supported by a biasing spring, so the upper dust removal roll 41A is in contact with the lower dust removal roll 41B. At this time, the control unit 200 activates the dust removal roll cylinder 80 to move the upper dust removal roll 41A upward.

[0089] <Additional Notes> The contents described in the above-described embodiment can be understood, for example, as follows. [1] That is, the dust removal device 10 includes an upper dust removal roll 41A and a lower dust removal roll 41B (dust removal rolls) that remove dust from the upper or lower surface side of the workpiece W, a pair of adhesive tape holders 50 that hold an adhesive tape roll T1 at both ends and that transfers dust adhering to the upper dust removal roll 41A and the lower dust removal roll 41B (dust removal rolls) in a pressed state, and a tape cylinder T3 that is disposed inside the adhesive tape roll T1 and that transfers dust adhering to the upper dust removal roll 41A and the lower dust removal roll 41B (dust removal rolls). and an equal pressing mechanism 150 for suppressing fluctuations in the pressing force in the axial direction of the adhesive tape roll T1 against the tape tube T3. The equal pressing mechanism 150 extends in the axial direction to connect the pair of adhesive tape holders 50, is eccentric from the center of rotation of the pair of adhesive tape holders 50, and is equipped with a holder shaft 151 that does not rotate with respect to the adhesive tape roll T1, and a plurality of pressing holders 152 attached along the axial direction of the holder shaft 151 and press the tape tube T3 from the inner tube side.

[0090] In this configuration, each of the multiple pressing holders 152 presses the adhesive tape roll T1 toward the upper dust removal roll 41A and the lower dust removal roll 41B (dust removal rolls) from the inside of the tape cylinder T3 in the axial direction of the adhesive tape roll T1. Therefore, the adhesive tape roll T1 can apply uniform pressure to the upper dust removal roll 41A and the lower dust removal roll 41B (dust removal rolls) in the axial direction. In other words, by providing the uniform pressing mechanism 150, the dust removal device 10 can press the workpiece W with a uniform pressing force.

[0091] [2] Furthermore, in the above embodiment, in addition to the contents described in [1] above, the pair of adhesive tape holders 50 can be configured to include a pair of inner connecting portions 51 that do not rotate relative to the adhesive tape roll, and a pair of tape holding bearings 52 that rotate relative to the pair of inner connecting portions 51 and are inserted into one end and the other end of the tape tube T3, and the holder shaft 151 extends in the axial direction while connecting the pair of inner connecting portions 51, and connects the pair of inner connecting portions 51 in a state parallel to the holder shaft 151, thereby preventing twisting between the pair of adhesive tape holders 50.

[0092] In this configuration, the reinforcing shaft 153 connects the pair of inner peripheral connecting portions 51 in a state parallel to the holder shaft 151, thereby preventing twisting between the pair of adhesive tape holders 50. Therefore, in the uniform pressing mechanism 150, by pressing the adhesive tape T2 from inside the tape cylinder T3 using the multiple pressing holders 152, uniform pressure can be applied to the upper dust removal roll 41A and the lower dust removal roll 41B (dust removal rolls), and thereby the workpiece W can be pressed with a uniform pressing force.

[0093] [3] Furthermore, in the above embodiment, in addition to the contents described in the above [1] and [2] or a combination thereof, both axial ends of the upper dust removal roll 41A and the lower dust removal roll 41B (dust removal rolls) are rotatably supported by support blocks 71. Furthermore, the upper dust removal roll 41A and the lower dust removal roll 41B (dust removal rolls) are provided with the upper dust removal roll 41A that removes dust from the upper surface of the workpiece W and the lower dust removal roll 41B that removes dust from the lower surface of the workpiece W, and a dust removal roll synchronization mechanism 100 is provided that synchronizes the descent of one end side and the other end side of the upper dust removal roll 41A when pressing the upper adhesive tape roll T1. It is preferable that this dust removal roll synchronization mechanism 100 comprises a pivot shaft 101 that is arranged parallel to and spaced a predetermined distance from the upper dust removal roll 41A and that is rotatable around a central axis, and a pair of pivot arms 102 that have base ends attached to one and the other axial ends of the pivot shaft 101, rotate around the central axis as the pivot shaft 101 rotates, and have their tip ends attached to the support block 71.

[0094] In this configuration, when the upper dust removal roll 41A is pushed down as the adhesive tape roll T1 is lowered, it rotates about the rotation shaft 101 as a central axis, and the pair of rotation arms 102 rotate synchronously with the rotation of the rotation shaft 101. Therefore, unlike when the pair of rotation arms 102 rotate independently, the support block 71 arranged on one end side and the support block 71 arranged on the other end side can be pushed down simultaneously.

[0095] This prevents the upper dust removal roll 41A from hitting the lower dust removal roll 41B on one side, for example, by hitting one end first or the other end first. This allows the upper dust removal roll 41A (dust removal roll) to apply uniform pressure to the lower dust removal roll 41B (dust removal roll), thereby enabling the workpiece W to be pressed with a uniform pressing force.

[0096] [4] Furthermore, in the above embodiment, in addition to the contents described in any one of [1] to [3] above or a combination thereof, a pair of dust removal roll cylinders 80 are provided which move a pair of upper dust removal rolls 41A up and down via a pair of support blocks 71, and a control unit 200 is provided which controls the operation of the pair of dust removal roll cylinders 80, so that when the pressure on the workpiece W is released, the pair of dust removal roll cylinders 80 can be operated by control of the control unit 200.

[0097] In this configuration, the upper dust removal roll 41A can be moved up and down by operating the pair of dust removal roll cylinders 80. Therefore, the biasing springs for supporting both ends of the upper dust removal roll 41A can be omitted. However, when biasing springs are used, there is variation in the spring characteristics of each biasing spring. Due to this variation in spring characteristics, it is difficult to uniform the pressing force in the axial direction when the upper tape cylinder 140 presses the upper dust removal roll 41A to remove dust from the workpiece W.

[0098] However, by configuring the upper dust removal roll 41A to be lifted by operating a pair of dust removal roll cylinders 80 and omitting the springs for supporting both ends of the upper dust removal roll 41A, it is possible to make the pressing force when removing dust from the workpiece W uniform in the axial direction.

[0099] [5] Furthermore, in the above embodiment, in addition to the contents described in any one of [1] to [4] above or a combination thereof, the pair of support blocks 71 can be configured such that their vertical movement is guided by a pair of dust removal roll upper and lower guides 60 (first linear guides), and the pair of adhesive tape holders 50 can be configured such that their vertical movement is guided by a pair of tape upper and lower guides 110 (second linear guides).

[0100] In this configuration, the pair of support blocks 71 can slide smoothly (with little frictional resistance) due to the pair of dust removal roll upper and lower guides 60 (first linear guides). This allows the upper dust removal roll 41A to abut against the lower dust removal roll 41B with high precision, and this high precision abutment makes it possible to make the pressing force when removing dust from the workpiece W uniform in the axial direction.

[0101] Furthermore, the pair of adhesive tape holders 50 can slide smoothly (with little frictional resistance) due to the pair of upper and lower tape guides 110 (second linear guides). This allows the adhesive tape roll T1 held by the pair of adhesive tape holders 50 to abut against the upper dust removal roll 41A with high precision, and this high precision abutment also makes it possible to make the pressing force when removing dust from the workpiece W uniform in the axial direction.

[0102] [6] In the above embodiment, in addition to any one of the above items [1] to [5] or a combination thereof, the upper dust removal roll 41A and the lower dust removal roll 41B (dust removal rolls) constitute a dust removal unit U1, and the adhesive tape holder 50 and the uniform pressing mechanism 150 constitute a tape unit U2. Also, a positioning mechanism 160 is provided to position the dust removal unit U1 and the tape unit U2. The positioning mechanism 160 can also be configured to include a long positioning rod 184, an axial sliding guide 181 (first fixed portion) provided in the tape unit U2 and having axial holes 182a and 183a (first axial holes) through which the positioning rod 184 is inserted, a rod pressing cylinder 170 that operates to push the positioning rod 184, and a roller side positioning member 190 (second fixed portion) provided in the dust removal unit U1 and having a positioning hole 191 (second axial hole) through which the positioning rod 184 is inserted while remaining inserted in the axial holes 182a and 183a (first axial holes) when the positioning rod 184 is pushed in by operation of the rod pressing cylinder 170.

[0103] In this configuration, the dust removal device 10 includes a positioning mechanism 160. By inserting the positioning rod 184 of the positioning mechanism 160 through the axial holes 182a and 183a (first axial holes) and the positioning hole 191 (second axial hole), the dust removal unit U1 and the tape unit U2 can be positioned with high precision. Also, rattle between the dust removal unit U1 and the tape unit U2 can be eliminated.

[0104] Such highly accurate positioning and elimination of backlash make it possible to make the pressing force uniform in the axial direction when removing dust from the workpiece W.

[0105] <Modifications> Although the embodiments of the present invention have been described above, the present invention can be modified in various other ways, which will be described below.

[0106] In the above-described embodiment, one tape unit U2 is provided above and one tape unit U2 is provided below the dust removal unit U1. However, a configuration in which a tape unit U2 is provided only above or only below the dust removal unit U1 may be adopted. Also, a configuration in which a plurality of dust removal units U1 and tape units U2 are lined up in the transport direction may be adopted.

[0107] DESCRIPTION OF SYMBOLS 10...dust removal device, 20...housing, 21...housing side plate portion, 22...housing side plate portion, 30...conveyance mechanism, 32...conveyance roller, 40...dust removal roll unit, 41A...upper dust removal roll (corresponding to the dust removal roll), 41B...lower dust removal roll (corresponding to the dust removal roll), 42...rotating shaft, 43...adhesive rubber layer, 50...adhesive tape holder, 51...inner peripheral connecting portion, 52...tape holding bearing, 52a...flange portion, 60...dust removal roll upper and lower guides (corresponding to the first linear guide), 61...rail, 62...sliding block, 70...cylinder connecting mechanism, 70A...tape actuator, 70 B...tape actuator, 71...support block, 71a...upper piece portion, 71b...lower piece portion, 71c...recessed portion, 72...fixed piece, 73...protruding shaft, 74...loose-fit holding member, 74a...upper piece portion, 74b...lower piece portion, 74c...loose-fitting portion, 80...dust removal roll cylinder, 81...piston rod, 90...support block, 90a...upper piece portion, 90b...lower piece portion, 90c...recessed portion, 91...fixed piece, 100...dust removal roll synchronization mechanism, 101...rotating shaft, 102...rotating arm, 102a...hole portion, 103...mounting shaft, 110...tape upper and lower guides (corresponding to second linear guide), 111 ...rail, 112...sliding block, 120...elastic support mechanism, 121...cylindrical body portion, 122...pressing shaft, 122a...handle, 130...fixed support mechanism, 131...connecting block, 132...joint, 133...connecting shaft, 140...tape cylinder, 141...piston rod, 142...connecting piece, 150...equal pressure mechanism, 151...holder shaft, 152...pressing holder, 153...reinforcing shaft, 160...positioning mechanism, 170...rod pressing cylinder, 171...piston rod, 172...pressing rod, 180...tape side positioning member, 181...shaft sliding guide (first fixed a first fixed portion), 182...tape side bottom portion, 182a...shaft hole (corresponding to the first shaft hole), 183...roller side bottom portion, 183a...shaft hole (corresponding to the first shaft hole), 184...positioning rod, 185...biasing spring, 186...shaft adjustment member, 186a...shaft hole, 190...roller side positioning member (corresponding to the second fixed portion), 191...positioning hole, 200...control portion, B1...bearing, B2...bearing, B3...bearing, S1...space portion, T1...adhesive tape roll, T2...adhesive tape, T3...tape cylinder, U1...dust removal unit, U2...tape unit, W...work

Claims

1. A dust removal device for removing dust from workpieces, comprising: a dust removal roll that removes dust from the top or bottom side of the workpiece; a pair of adhesive tape holders that hold an adhesive tape roll at both ends and that transfers dust adhering to the dust removal roll under pressure; and an equal pressing mechanism that is arranged inside the tape tube of the adhesive tape roll and that suppresses fluctuations in the pressing force in the axial direction of the adhesive tape roll against the dust removal roll, wherein the equal pressing mechanism comprises: a holder shaft that extends in the axial direction so as to connect the pair of adhesive tape holders, and is eccentric from the center of rotation of the pair of adhesive tape holders and does not rotate with respect to the adhesive tape roll; and pressing holders that are attached in plurality along the axial direction of the holder shaft and press the tape tube from the inner tube side.

2. A dust removal device according to claim 1, wherein the pair of adhesive tape holders comprise a pair of inner peripheral connecting parts that do not rotate relative to the adhesive tape roll, and a pair of tape holding bearings that rotate relative to the pair of inner peripheral connecting parts and are inserted into one end and the other end of the tape cylinder, respectively; the holder shaft extends in the axial direction while connecting the pair of inner peripheral connecting parts, and a reinforcing shaft that connects the pair of inner peripheral connecting parts while being parallel to the holder shaft, thereby preventing twisting between the pair of adhesive tape holders.

3. A dust removal device according to claim 1, wherein the dust removal roll is rotatably supported at both axial ends by support blocks, and the dust removal roll is provided with an upper dust removal roll that removes dust from the upper surface of the workpiece, and a lower dust removal roll that removes dust from the lower surface of the workpiece, and a dust removal roll synchronization mechanism is provided that synchronizes the descent of one end and the other end of the upper dust removal roll when pressing the upper adhesive tape roll, and the dust removal roll synchronization mechanism comprises: a rotating shaft that is arranged parallel to and spaced a predetermined distance from the upper dust removal roll and is rotatable about a central axis, and a pair of rotating arms whose base ends are attached to one and the other axial end sides of the rotating shaft, which rotate about the central axis as the rotating shaft rotates, and whose tip ends are attached to the support blocks.

4. A dust removal device according to claim 3, comprising a pair of dust removal roll cylinders that move the pair of upper dust removal rolls up and down via the pair of support blocks, and a control unit that controls the operation of the pair of dust removal roll cylinders, and when the pressure on the workpiece is released, the pair of dust removal roll cylinders are operated under the control of the control unit.

5. A dust removal device according to claim 3, wherein the pair of support blocks are guided in their vertical movement by a pair of first linear guides, and the pair of adhesive tape holders are guided in their vertical movement by a pair of second linear guides.

6. A dust removal device according to claim 1, wherein the dust removal roll constitutes a dust removal unit, the adhesive tape holder and the uniform pressing mechanism constitute a tape unit, and a positioning mechanism is provided for positioning the dust removal unit and the tape unit, the positioning mechanism comprising: a long positioning rod, a first fixed part provided on the tape unit and having a first axial hole through which the positioning rod is inserted, a rod pressing cylinder that operates to press in the positioning rod, and a second fixed part provided on the dust removal unit and having a second axial hole through which the positioning rod is inserted while remaining inserted in the first axial hole when the positioning rod is pressed in by operation of the rod pressing cylinder.

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