Non-contact suction board

Abstract

Provided is a non-contact suction board capable of effectively inhibiting misalignment of a workpiece without providing a physical guide. A pickup collet 10 comprises a porous member 12 made of a porous body having air permeability. A single first suction passage 13 is formed linearly extending in the vertical direction from an opening at a suction surface 10A side of the pickup collet toward the rear surface 10C of the pickup collet. Second suction passages 15 are formed in a quantity of at least 2 raised to the power of N+1 and extend from the opening at the suction surface 10A side toward the rear surface 10C, where N represents a natural number. The second suction passages 15 have 2 raised to the power of N-fold rotational symmetry with respect to the center line O of the first suction passage 13.

Description

Non-contact suction cup

[0001] The present invention relates to a non-contact suction cup used in a non-contact suction device for suctioning a workpiece in a non-contact state.

[0002] The chips (workpieces) obtained by cutting a wafer on which semiconductor elements are formed are picked up by a pickup chuck (suction device) using a pickup collet (suction cup) and then transferred to a mounting device that mounts them on a substrate.

[0003] The chip has a fine circuit formed on one side, and direct contact with the pickup collet during suction can damage the circuit. Furthermore, when joining the connection terminals on the chip surface to the connection terminals on the substrate, the chip surface may be subjected to surface treatments such as plasma treatment and surface activation treatment to ensure and improve connectivity, and the surface treatment state must be maintained. For these reasons, it is preferable to avoid contact suction of the chip.

[0004] Therefore, chips are attracted to the pickup collet without contacting it. For example, Patent Documents 1 and 2 disclose a method of attracting chips without contacting it by ejecting gas through a porous member of the pickup collet and sucking the gas through a through-hole provided in the center, thereby generating an appropriate combination of positive and negative pressures. Patent Document 1 also discloses that through-holes for sucking gas may be provided at positions offset from the center.

[0005] JP 2022-157320 A JP 2022-157324 A

[0006] However, if the pickup collet, holding the chip without contact, operates at a large acceleration or deceleration, the chip will inevitably move parallel and / or rotate relative to the pickup collet, which may cause the chip to become misaligned.Furthermore, the chip may not be able to maintain its suction hold, causing it to fall off.

[0007] To prevent misalignment, a physical guide is sometimes provided on the pickup collet to surround the chip. However, in this case, interference between the guide and the chip is unavoidable, and this interference can cause problems such as scratches and contamination on the chip.

[0008] The present invention has been made in consideration of the above points, and aims to provide a non-contact suction cup that can effectively suppress positional deviation of a workpiece without providing a physical guide.

[0009] The non-contact suction cup of the present invention is a non-contact suction cup having a surface on an adsorption surface side that adsorbs a workpiece in a non-contact manner, and a back surface on the vertical opposite side of the surface, and is equipped with a porous member made of a porous body having air permeability, and a single first suction passage is formed so as to extend linearly in the vertical direction from an opening on the adsorption surface side toward the back surface side, and at least 2(N+1) second suction passages are formed so as to extend from the opening on the adsorption surface side toward the back surface side, where N is a natural number, and the second suction passages have 2N rotational symmetry based on the center line of the first suction passage.

[0010] In the non-contact suction cup of the present invention, when gas is supplied to the porous member from the opposite side, the gas is ejected toward the workpiece through the pores of the porous member, generating positive pressure between the suction surface and the workpiece. Furthermore, when gas is sucked through the first and second suction passages, the gas between the suction surface and the workpiece is sucked in, generating negative pressure between the suction surface and the workpiece. In this way, compared to the technologies disclosed in Patent Documents 1 and 2, negative pressure is applied by suction through the second suction passage, which is arranged with 2N-fold rotational symmetry, thereby suppressing translation and / or rotation of the workpiece relative to the suction surface.

[0011] The non-contact suction cup of the present invention preferably further comprises a first dense member made of a dense material and surrounding the entire side peripheral surface of the first suction passage.

[0012] In this case, since the first dense member is present around the opening on the adsorption surface side of the first suction passage, when gas is sucked through the first suction passage, the workpiece is sucked toward the center of this opening, thereby preventing the workpiece from moving parallel and / or rotating relative to the adsorption surface.

[0013] Preferably, the non-contact suction cup of the present invention further comprises a second dense member made of a dense material and surrounding the entire periphery of each of the side peripheral surfaces of the second suction passages.

[0014] In this case, since a second dense member is present around each of the openings on the adsorption surface side of the second suction passage, when gas is sucked through each second suction passage, the workpiece is sucked toward the center of each opening, thereby preventing the workpiece from moving parallel and / or rotating relative to the adsorption surface.

[0015] In the non-contact suction cup of the present invention, it is preferable that the second suction passage includes a portion that is inclined in a direction away from the first suction passage toward the opening of the second suction passage.

[0016] In this case, furthermore, the negative pressure is directed toward the center, so that translational and / or rotational movement of the workpiece can be effectively suppressed.

[0017] Furthermore, in the non-contact suction cup of the present invention, it is preferable that the non-contact suction cup further comprises a groove portion having an opening on the suction surface side, having 2N rotational symmetry about the center line, and formed so as to connect to the second suction passage, and that the outer periphery of the groove portion is surrounded by the second dense member.

[0018] In this case, a negative pressure is also generated between the suction surface and the workpiece in the groove, which can more effectively suppress translation and / or rotation of the workpiece.

[0019] Preferably, the non-contact suction cup of the present invention further comprises a connecting member that connects the porous member divided into an outer portion and an inner portion by the second dense member.

[0020] In this case, it becomes possible to supply gas to the divided porous members by a single gas supply mechanism.

[0021] 5 is a schematic perspective view of a pickup collet according to a first embodiment of the present invention. A schematic cross-sectional view taken along line II-II in FIG. 1. A schematic cross-sectional view taken along line III-III in FIG. 1. A schematic cross-sectional view of a pickup collet according to a modification of the first embodiment of the present invention. A schematic perspective view of a pickup collet according to a second embodiment of the present invention. A schematic cross-sectional view taken along line VI-VI in FIG. 5. A schematic cross-sectional view taken along line VII-VII in FIG. 5. A schematic perspective view of a pickup collet according to a third embodiment of the present invention. A schematic cross-sectional view taken along line IX-IX in FIG. 8. A schematic perspective view of a pickup collet according to a fourth embodiment of the present invention. A schematic cross-sectional view taken along line XI-XI in FIG.

[0022] An embodiment of the non-contact suction cup of the present invention is a pickup collet used in a pickup chuck, which is a non-contact suction device (non-contact chuck). The workpiece (component to be sucked) to the non-contact suction cup of the present invention is a chip obtained by cutting a semiconductor wafer into individual pieces. The pickup chuck is a device that sucks chips supplied from a supply device using the pickup collet and transfers the sucked chips to a mounting device that mounts them on a substrate.

[0023] The pickup collet is attached to a pickup head provided at the tip of an arm provided on the pickup chuck. For example, a magnet is provided inside the pickup head, and the pickup collet is held in the pickup head by the attractive force of this magnet while being positioned by the positioning mechanism. The positioning mechanism may be configured, for example, by providing a convex portion on either the pickup collet or the pickup head and a corresponding concave portion on the other.

[0024] First Embodiment A pickup collet 10 according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 3. FIG.

[0025] The pickup collet 10 has a front surface 10B, which is the surface on the suction surface 10A side that suctions the chip W in a non-contact manner, and a back surface 10C on the opposite side in the vertical direction from the front surface 10B. In this example, the front surface 10B is the bottom surface, and the back surface 10C is the top surface. The pickup collet 10 is generally shaped like a square plate overall, with a small square plate-shaped protrusion in the center on the front surface 10B side. The surface of this protrusion on the front surface 10B side serves as the suction surface 10A.

[0026] The pickup collet 10 comprises a base 11, a porous member 12, a first dense member 14 surrounding a first suction passage 13 formed in the porous member 12, and a second dense member 16 surrounding a second suction passage 15 formed in the porous member 12. The porous member 12, the first dense member 14, and the second dense member 16 are provided in locations including the portions of the base 11 that form the small square plate-shaped protrusions.

[0027] The base 11, the first dense member 14, and the second dense member 16 are made of a dense material that does not have gas permeability. A dense material does not allow gas to pass through the interior of the dense material. In this example, the dense material is made of metal, but it may also be made of ceramic, resin, or the like.

[0028] The porous member 12 is made of a porous body having air permeability. The pores inside the porous body are interconnected, allowing gas to pass through the pores. In this example, the porous body is made of sintered metal, but it may also be made of ceramic, resin, carbon, or the like.

[0029] A first supply passage 17 is formed inside the base 11 and is formed in an annular shape so as to surround the entire lower periphery of the porous member 12. A second supply passage 18 is also formed inside the base 11, one end of which is connected to the first supply passage 17. The other end of the second supply passage 18 opens at the side surface 10D of the pickup collet 10.

[0030] Through this opening, the second supply passage 18 communicates with a supply passage formed in the pickup head, which is connected to a supply mechanism such as a supply pump that supplies gas, although this is not shown.

[0031] The first suction passage 13 is formed so as to extend linearly in the vertical direction from an opening formed on the suction surface 10A side toward the back surface 10C side. The center line O of the first suction passage 13 is located at the center when viewed from below the pickup collet 10. The first dense member 14 is formed in a cylindrical shape so as to surround the entire side peripheral surface of the first suction passage 13.

[0032] Four second suction passages 15 are formed so as to extend linearly and inclined from openings formed on the suction surface 10A side toward the center on the rear surface 10C side.

[0033] In this example, the openings of the second suction passages 15 are located at the four corners of the porous member 12. However, this is not limiting, and the porous member 12 may also be located outside the openings of the second suction passages 15. Furthermore, the openings of the second suction passages 15 may be located, for example, in the middle of each of the four outer edges of the porous member 12 when viewed from below.

[0034] The second dense member 16 is formed in an inclined cylindrical shape so as to completely surround the side peripheral surfaces of the four second suction passages 15. The four second suction passages 15 have four-fold rotational symmetry (symmetry about a 90° rotation) based on the center line O of the first suction passage 13. The number of second suction passages 15 is not limited to four and may be at least 2(N+1), where N is a natural number. The second suction passages 15 may be provided so as to have 2N rotational symmetry based on the center line of the first suction passage 13.

[0035] A third suction passage 19 is formed inside the base 11 and communicates with the first suction passage 13 and the second suction passage 15. One end of the third suction passage 19 opens at the side surface 10D of the pickup collet 10.

[0036] Although not shown, through this opening, the third suction passage 19 communicates with a suction passage formed in the pickup head, which is connected to a suction mechanism such as a suction pump that sucks in gas.

[0037] In the pickup collet 10 configured as described above, when gas is supplied by the supply mechanism, the gas is supplied through the pores of the porous member 12 via the first and second supply passages 17, 18, and is evenly ejected toward the chip W through the numerous pores on the surface 10B, generating positive pressure between the suction surface 10A and the chip W.

[0038] Furthermore, in the pickup collet 10, when gas is sucked by the suction mechanism, the gas is sucked through the first and second suction passages 13 and 15 via the third suction passage 19. As a result, the gas between the suction surface 10A and the tip W is sucked through these openings, generating a negative pressure between the suction surface 10A and the tip W.

[0039] In this way, compared to the techniques disclosed in Patent Documents 1 and 2, negative pressure is applied by suction from four directions via the second suction passages 15 arranged with rotational symmetry, so that the tip W can be prevented from moving parallel and / or rotating in any direction relative to the suction surface 10 A. Furthermore, because this negative pressure is directed toward the center, the tip W can be effectively prevented from moving parallel and / or rotating.

[0040] As shown in Figure 4, the second suction passage 15A may be formed so as to extend in a linear incline from an opening formed on the adsorption surface 10A side toward the back surface 10C side and outward (the side opposite the center side).

[0041] Second Embodiment Next, a pickup collet 20 according to a second embodiment of the present invention will be described with reference to Figures 5 to 7. Note that a description of the configuration that is the same as that of the pickup collet 10 according to the first embodiment of the present invention will be omitted.

[0042] The pickup collet 20 comprises a base 21, a porous member 22, a first dense member 24 surrounding a first suction passage 23 formed in the porous member 22, and a second dense member 26 surrounding a second suction passage 25 and a groove 31 formed in the porous member 22. The porous member 22, the first dense member 24, and the second dense member 26 are provided in a location including the portion of the base 21 that constitutes the small square plate shape.

[0043] The first suction passage 23 is formed so as to extend linearly from an opening formed on the suction surface 20A side toward the back surface 20C side. The center line O of the first suction passage 23 is located at the center when viewed from below the pickup collet 20. The first dense member 24 is formed in a cylindrical shape so as to surround the entire side peripheral surface of the first suction passage 23.

[0044] Four second suction passages 25 are formed so as to extend linearly and inclined from openings formed on the suction surface 20A side toward the back surface 20C side and toward the center.

[0045] In this example, the openings of the four second suction passages 25 are located at the four corners of the porous member 22. However, this is not limiting, and the porous member 22 may also be located outside the openings of the second suction passages 25. Furthermore, the openings of the second suction passages 25 may be located in the middle of each of the four outer edges of the porous member 22 when viewed from below.

[0046] Four grooves 31 are formed to connect adjacent second suction passages 25, each extending linearly and having an opening on the suction surface 20A side. The cross section of each groove 31 is semicircular.

[0047] The second dense member 26 is integrally formed as a whole, with four inclined cylindrical portions surrounding the entire side surfaces of the four second suction passages 25 and four semi-cylindrical portions connecting adjacent portions and surrounding the outer peripheries of the grooves 31. The second suction passages 25 and the grooves 31 have four-fold rotational symmetry with respect to the center line O of the first suction passage 23. With this configuration, the porous member 22 is exposed on the adsorption surface 20A in the portions between the first suction passages 23 and the grooves 31, and in the four linear portions outside the grooves 31 and between the second suction passages 25.

[0048] The number of second suction passages 25 may be at least 2(N+1), where N is a natural number, and is not limited to 4. Furthermore, the second suction passages 25 and the grooves 31 are not limited to those having four-fold rotational symmetry with respect to the center line O of the first suction passage 23, as long as they have 2N-fold rotational symmetry.

[0049] In the pickup collet 20 configured as described above, in addition to the effects of the pickup collet 10 according to the first embodiment described above, a negative pressure is also generated between the suction surface 20A and the chip W in the annular groove 31 as a whole. This annularly generated negative pressure can more effectively suppress translational and / or rotational movement of the chip W. Although not shown, the second suction passage 25 may be formed to extend at an angle from an opening formed on the suction surface 20A side toward the back surface 20C side (the side opposite the center).

[0050] Third Embodiment Next, a pickup collet 40 according to a third embodiment of the present invention will be described with reference to Figures 8 and 9. Note that a description of the configuration that is the same as that of the pickup collet 10, 20 according to the first or second embodiment of the present invention will be omitted.

[0051] The pickup collet 40 comprises a base 41, a porous member 42, a first dense member 44 surrounding a first suction passage 43 formed in the porous member 42, and a second dense member 46 surrounding a second suction passage 45 formed in the porous member 42. The porous member 42, the first dense member 44, and the second dense member 46 are provided in a location including the portion of the base 41 that constitutes the small square plate shape.

[0052] The first suction passage 43 is formed so as to extend linearly from an opening formed on the suction surface 40A side toward the back surface 40C side. The center line O of the first suction passage 43 is located at the center when viewed from below the pickup collet 40. The first dense member 44 is formed in the shape of a regular square prism so as to surround the entire side surface of the first suction passage 43. However, the first dense member 44 may be formed in a shape such as a cylinder.

[0053] A second suction passage 45 having a square annular opening on the suction surface 40A side is formed to surround the first suction passage 43. Each of the four sides of the second suction passage 45 is formed to extend linearly at an incline from the opening formed on the suction surface 40A side toward the center on the back surface 40C side. The second suction passage 45 has four-fold rotational symmetry with respect to the center line O of the first suction passage 43.

[0054] The number of second suction passages 45 may be at least 2(N+1), where N is a natural number, and is not limited to 4. The second suction passages 45 are not limited to those having four-fold rotational symmetry with respect to the center line O of the first suction passage 43, but may be any passages having 2N-fold rotational symmetry, where N is a natural number.

[0055] The second dense member 46 is formed by integrating the entire portion formed in a shape that surrounds both the inner and outer side surfaces of the second suction passage 45. With this configuration, the porous member 42 is exposed on the adsorption surface 40A in the portion of the first porous member 42A that is a square ring-shaped member in bottom view between the first suction passage 43 and the second suction passage 45, and in the portion of the second porous member 42B that is a square ring-shaped member in bottom view outside the second suction passage 45.

[0056] The first porous member 42A and the second porous member 42B are connected by a third porous member 42C. The first to third porous members 42A to 42C are integrally configured. Here, the third porous member 42C is composed of four cylindrical members that connect the middle portions of the opposing surfaces of the first porous member 42A and the second porous member 42B. The third porous member 42C corresponds to the connecting member of the present invention, and its number and installation location are not limited to this. Furthermore, the exposed portion of the third porous member 42C is covered by a covering member 46A made of a dense material. However, the connecting member of the present invention that connects the first porous member 42A and the second porous member 42B is not limited to a porous material and may be made of a dense material. In this case, the covering member 46A may not be present.

[0057] In the pickup collet 40 configured as described above, in addition to the effects of the pickup collet 10 according to the first embodiment, the second suction passage 45 is annular, so that a uniform negative pressure is generated in the horizontal direction between the suction surface 10A and the chip W. This annularly generated negative pressure can more effectively suppress translational and / or rotational movement of the chip W. Although not shown, the second suction passage 45 may be formed so as to extend at an angle from an opening formed on the suction surface 40A side toward the back surface 40C side (the side opposite the center) and outward.

[0058] (Fourth embodiment) Next, a pickup collet 50 according to a fourth embodiment of the present invention will be described with reference to Figures 10 and 11. Note that a description of the configuration that is the same as that of the pickup collet 10, 20, 40 according to any one of the first to third embodiments of the present invention will be omitted.

[0059] The pickup collet 50 includes a base 51, a porous member 52, a first dense member 54 surrounding a first suction passage 53 formed in the porous member 52, and a second dense member 56 surrounding a second suction passage 55 formed in the porous member 52. The porous member 52, the first dense member 54, and the second dense member 56 are provided in a location including the portion of the base 51 that constitutes the small square plate shape.

[0060] The first suction passage 53 is formed so as to extend linearly from an opening formed on the suction surface 50A side toward the back surface 50C side. The center line O of the first suction passage 53 is located at the center when viewed from below the pickup collet 50. The first dense member 54 is formed so as to surround the entire side surface of the first suction passage 53 and has an outer shape of a regular square prism in this case. However, the first dense member 54 may be formed in a shape such as a cylinder.

[0061] Eight second suction passages 55 are formed so as to extend linearly from openings formed on the suction surface 50A toward the back surface 50C. The second suction passages 55 have four-fold rotational symmetry with respect to the center line O of the first suction passage 53. The number of second suction passages 55 is not limited to eight, as long as it is at least 2(N+1), where N is a natural number. The number of second suction passages 55 is not particularly limited as long as it has 2N-fold rotational symmetry with respect to the center line O of the first suction passage 53.

[0062] The second dense member 56 surrounds the entire side surfaces of the eight second suction passages 55 and is integrally formed so as to be continuous with each other. In this example, the second dense member 56 is formed in the shape of a square ring in bottom view, surrounding the first suction passage 53.

[0063] With this configuration, the porous member 52 is exposed on the suction surface 50A in a square annular portion between the first dense member 54 and the second dense member 56 in bottom view, and in a square annular portion located outside the second dense member 56. The square annular portion located outside the second dense member 56 is located so as to surround the outer periphery of the workpiece W that is sucked by the pickup collet 50 in bottom view.

[0064] The second dense member 56 separates the two parts of the porous member 52 around the entire circumference on the surface 50B side, but the two parts of the porous member 52 are partially continuous in the portion closer to the back surface 50C than the surface 50B.

[0065] In the pickup collet 50 configured as described above, negative pressure is generated between the suction surface 50A and the chip W at the openings of the multiple second suction passages 55. This negative pressure generated at multiple locations can effectively suppress translational and / or rotational movement of the chip W. Although not shown, the second suction passages 55 may be formed so as to extend obliquely from openings formed on the front surface 50B toward the back surface 50C.

[0066] Furthermore, by ejecting gas from the porous member 52 exposed in the square annular portion located outside the second dense member 56 so as to surround the outer periphery of the workpiece W, the airflow functions as a guide, making it possible to suppress parallel and / or rotational movement of the workpiece W.

[0067] Although several embodiments of the present invention have been described above, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims.

[0068] For example, the suction surfaces 10A, 20A, 40A, and 50A have been described as being located on the underside of the pickup collets 10, 20, 40, and 50. However, this is not a limitation, and the suction surfaces of the non-contact suction cups of the present invention may be located on the upper side of the non-contact suction device. Also, the suction surfaces 10A, 20A, 40A, and 50A have been described as being provided for each pickup collet 10, 20, 40, and 50. However, this is not a limitation, and multiple suction surfaces 10A, 20A, 40A, and 50A may be provided for each pickup collet 10, 20, 40, and 50.

[0069] In addition, the suction surfaces 10A, 20A, 40A, and 50A have been described as being square-shaped. However, this is not limited to this, and the surfaces may be rectangular, polygonal, circular, elliptical, or other shapes. Furthermore, the pickup collets 10, 20, 40, and 50 are not limited to a shape having a small square plate-shaped protrusion in the center of the surface 10B of a generally square plate-shaped surface. The general shape may be a rectangular plate-shaped, polygonal plate-shaped, circular plate-shaped, elliptical plate-shaped, or other shape. Similarly, or regardless of this shape, the shape of the protrusion may also be a rectangular plate-shaped, polygonal plate-shaped, circular plate-shaped, elliptical plate-shaped, or other shape.

[0070] For example, when the suction surfaces 10A, 20A, 40A, 50A are shaped like rectangular plates, four, eight, twelve, etc. of the second suction passages 15, 25, 45, 55 may be formed so as to have two-fold rotational symmetry about the center line O of the first suction passages 13, 33, 43, 53. When the suction surfaces 10A, 20A, 40A, 50A are shaped like regular octagonal plates, eight, 16, 24, etc. of the second suction passages 15, 25, 45, 55 may be formed so as to have eight-fold rotational symmetry about the center line O of the first suction passages 13, 33, 43, 53.

[0071] In addition, the case where the outer peripheries of the first suction passages 13, 23, 43, 53 are surrounded by the first dense members 14, 24, 44, 54 has been described. However, this is not limited thereto, and the outer peripheries of the first suction passages 13, 23, 43, 53 may be surrounded by the porous members 12, 22, 42, 52. Furthermore, the case where the outer peripheries of the second suction passages 15, 25, 45, 55 are surrounded by the second dense members 16, 26, 46, 56 has been described. However, this is not limited thereto, and the outer peripheries of the second suction passages 15, 25, 45, 55 may be surrounded by the porous members 12, 22, 42, 52.

[0072] In addition, the first suction passages 13, 23, 43, 53 and the second suction passages 15, 25, 45, 55 have been described as being supplied with gas by a single suction mechanism via a single third suction passage 19, 29, 49, 59. However, this is not limiting, and gas may be sucked by a single or multiple suction mechanisms via multiple third suction passages.

[0073] In addition, the case where only one second supply passage 18, 28, 48, 58 is provided has been described. However, a plurality of these passages may be provided. In this case, it is preferable that the second supply passages 18, 28, 48, 58 be provided so as to have 2N rotational symmetry with respect to the center line O of the first suction passages 13, 23, 43, 53, where N is a natural number. Furthermore, the case where only one third suction passage 19, 29, 49, 59 is provided has been described. However, a plurality of these passages may be provided.

[0074] In addition, the other ends of the second supply passages 18, 28, 38, 48 and one ends of the third suction passages 19, 29, 49, 59 have been described as opening on the side surfaces 10D, 20D, 40D, 50D of the pickup collets 10, 20, 40, 50. However, they may also open on the back surfaces 10C, 20C, 40C, 50C of the pickup collets 10, 20, 40, 50.

[0075] REFERENCE SIGNS LIST 10, 20, 40, 50... Pickup collet (non-contact suction disc), 10A, 20A, 40A, 50A... Suction surface, 10B, 20B, 40B, 50B... Front surface, 10C, 20C, 40C, 50C... Back surface, 10D, 20D, 40D, 50D... Side surface, 11, 21, 41, 51... Base, 12, 22, 42, 52... Porous member, 13, 23, 43, 53... First suction passage, 14, 24, 44, 54... First dense member, 15, 25, 45, 55... Second suction passage, 16, 26, 46, 56... Second dense member, 17, 27, 47, 57... First supply passage, 18, 28, 48, 58...second supply passage, 19, 29, 49, 59...third suction passage, 31...groove portion, 42A...first porous member, 42B...second porous member, 42C...third porous member (connecting member), 46A...covering member, O...center line, W...chip (workpiece).

Claims

1. A non-contact suction cup having a surface on an adsorption surface side that adsorbs a workpiece in a non-contact manner and a back surface on the vertical opposite side of the surface, the non-contact suction cup being equipped with a porous member made of a porous body having air permeability, a single first suction passage formed so as to extend linearly in the vertical direction from an opening on the adsorption surface side towards the back surface side, at least 2(N+1) second suction passages formed so as to extend from the opening on the adsorption surface side towards the back surface side, where N is a natural number, and the second suction passages have 2N rotational symmetry based on the center line of the first suction passage.

2. The non-contact suction cup according to claim 1, further comprising a first dense member made of a dense material surrounding the entire side surface of the first suction passage.

3. A non-contact suction cup as described in claim 1 or 2, further comprising a second dense member made of a dense material surrounding the entire side surface of each of the second suction passages.

4. A non-contact suction cup as described in claim 1, characterized in that the second suction passage includes a portion that is inclined in a direction away from the first suction passage toward the opening of the second suction passage.

5. A non-contact suction cup as described in claim 3, characterized in that it further comprises a groove portion having an opening on the suction surface side, having 2N rotational symmetry about the center line, and formed so as to connect to the second suction passage, the outer periphery of the groove portion being surrounded by the second dense member.

6. A non-contact suction cup according to claim 3, further comprising a connecting member for connecting the porous member divided into an outer and an inner part by the second dense member.

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