Contact intermediate product and method for cutting contact intermediate product

Abstract

[Problem] To provide: a contact intermediate product which allows a contact to be detached easily from a substrate without damaging the contact; and a manufacturing method for said contact intermediate product. [Solution] A contact intermediate product according to the present invention is characterized by comprising a linear contact and a rectangular tab to which one end of the contact is connected. The contact intermediate product is also characterized in that the tab has a rectangular body to which the contact is connected, and a tongue piece which projects from the body. A manufacturing method for a contact intermediate product according to the present invention is characterized by involving: bringing a detaching stopper into contact with one end of the tab; moving the tab to a side where the detaching stopper is brought into contact; and rotating the tab with a contact point between the detaching stopper and the tab being set as the point of support, whereby a fixed tab that is fixed on a substrate is cut off by a force generated by the rotation of the tab, and the tab and the fixed tab are separated.

Description

Contact intermediate product and method for cutting contact intermediate product

[0001] The present invention relates to a contact intermediate product and a method for cutting the contact intermediate product.

[0002] The probe is manufactured on a substrate by using a Micro Electro Mechanical System (MEMS) technology. The probe manufactured by the MEMS technology is formed on the substrate and connected to a tab.

[0003] Patent Document 1 describes a vertical probe that is peeled off from a substrate. The probe is peeled off from the substrate either manually or mechanically by using a dedicated gripping device.

[0004] JP 2014-16205 A

[0005] However, as in the conventional method, when the probe is peeled off from the substrate, a relatively strong force is applied, which causes the probe to be damaged or broken.

[0006] Therefore, in view of the above-mentioned problems, the present invention aims to provide a contact intermediate product and a method for cutting the contact intermediate product that can easily peel the contact from the substrate without damaging the contact.

[0007] In order to solve such problems, the first contact intermediate product of the present invention comprises (1) a linear contact and (2) a rectangular tab to which one end of the contact is connected, and (3) the tab has a rectangular main body portion to which the contact is connected and a tongue portion protruding from the main body portion.

[0008] A second method for manufacturing a contact intermediate product according to the present invention is a method for manufacturing a contact intermediate product, which comprises a linear contact and a rectangular tab to which one end of the contact is connected, and which peels the contact intermediate product from a substrate, and is characterized in that a peel stopper is brought into contact with one end of the tab, the tab is moved toward the side where the peel stopper is brought into contact, the tab rotates around the contact point between the peel stopper and the tab as a fulcrum, and the fixing tab fixed to the substrate is cut by the force generated by the rotation of the tab, thereby separating the tab from the fixing tab.

[0009] According to the present invention, the contacts can be easily peeled off from the substrate without being damaged.

[0010] Fig. 1 is a diagram showing the configuration of a contact intermediate product on a substrate according to an embodiment; Fig. 2 is a diagram showing the configuration of a contact intermediate product according to an embodiment; Fig. 3 is an explanatory diagram explaining a method for peeling off a contact intermediate product according to an embodiment; Fig. 4 is an explanatory diagram explaining a method for peeling off a contact intermediate product according to an embodiment; Fig. 5 is an explanatory diagram explaining a method for peeling off a contact intermediate product according to an embodiment; Fig. 6 is a diagram showing the configuration of a contact intermediate product according to a modified embodiment; Fig. 7 is an explanatory diagram explaining a method for peeling off a contact intermediate product according to an embodiment; Fig. 8 is an explanatory diagram explaining a method for peeling off a contact intermediate product according to an embodiment; Fig. 9 is an explanatory diagram explaining a method for peeling off a contact intermediate product according to an embodiment; Fig. 10 is a diagram showing the configuration of a contact intermediate product according to a modified embodiment; Fig. 11 is an explanatory diagram explaining a method for peeling off a contact intermediate product according to an embodiment; Fig. 12 is an explanatory diagram explaining a method for peeling off a contact intermediate product according to an embodiment; Fig. 13 is an explanatory diagram explaining a method for peeling off a contact intermediate product according to an embodiment; Fig. 14 is a diagram showing the configuration of a contact intermediate product according to a modified embodiment; Fig. 15 is an explanatory diagram explaining a method for peeling off a contact intermediate product according to an embodiment; Fig. 16 is an explanatory diagram explaining a method for peeling off a contact intermediate product according to an embodiment; Fig. 17 is an explanatory diagram explaining a method for peeling off a contact intermediate product according to an embodiment; Fig. 18 is an explanatory diagram explaining a method for peeling off a contact intermediate product according to an embodiment; Fig. 19 is an explanatory diagram explaining a method for peeling off a contact intermediate product according to an embodiment; Fig. 20 is an explanatory diagram explaining a method for peeling off a contact intermediate product according to an embodiment; Fig. 21 is an explanatory diagram explaining a method for peeling off a contact intermediate product according to an embodiment; Fig. 22 is an explanatory diagram

[0011] (A) Main Embodiments Hereinafter, embodiments of the intermediate contact product and the method for cutting the intermediate contact product according to the present invention will be described in detail with reference to the drawings.

[0012] (A-1) Overview For example, electrical testing is required for each of a plurality of semiconductor integrated circuits formed on a semiconductor wafer to confirm whether they each have the specified electrical characteristics.

[0013] For electrical testing, a probe card (also called an "electrical connection device") having multiple probes (also called "electrical contacts" or "contactors") is attached to the test head of a testing device (tester), and the tips of the corresponding probes are brought into electrical contact with the electrode terminals of each semiconductor integrated circuit.The testing device then supplies test signals to the electrode terminals of the semiconductor integrated circuit via the probes, and the semiconductor integrated circuit outputs electrical signals in response to the test signals, which are then supplied to the testing device via the probes.

[0014] In this way, the testing device can check whether the electrical characteristics of the semiconductor integrated circuit are as specified by determining the electrical signal output by the semiconductor integrated circuit in response to the test signal.

[0015] As semiconductor integrated circuits become increasingly miniaturized and highly integrated, the number of probes provided on a probe card increases, and the probe pitch must be narrowed, resulting in a demand for miniaturized probes.

[0016] There are various methods for manufacturing probes, and one method for achieving miniaturization of probes is to form a plurality of probes integrated on a substrate using MEMS technology.

[0017] When using the probes, it is necessary to peel each probe off the substrate one by one, but since the probes are ultra-miniature, they must be handled with care.

[0018] Conventionally, when a probe is formed on a substrate, a gripping portion (called a "tab") that is integrally connected to the probe is also formed, and the tab is manually or mechanically picked up using a special gripping device, making it easier to peel the probe that is integrally connected to the tab from the substrate.

[0019] However, the peeling operation using the dedicated gripping device requires precision, and when the dedicated gripping device grips the tab, a relatively strong force may be applied, which may damage the probe.

[0020] Furthermore, depending on the type of probe, the probe formed on the substrate has a front surface and a back surface, and when using the probe, it is necessary to set the probe while distinguishing between the front and back surfaces.

[0021] Furthermore, when setting the probe, the probe must be handled for the next process after being peeled off the board, so easy handling is required. For example, if a damaged probe is inserted into a micro-hole in the probe head and used, the probe may break at the damaged point and come into contact with adjacent pins, causing a short circuit, or fragments of the broken needle may remain inside the probe head, causing a short circuit. If burrs remain on the probe, they may come into contact with adjacent pins and cause a short circuit.

[0022] Therefore, in this embodiment, in order to solve the above-mentioned problems, an attempt is made to provide a simpler and more accurate peeling (cutting) method.

[0023] (A-2) Intermediate contact product on substrate Fig. 1 is a diagram showing the configuration of an intermediate contact product on a substrate according to an embodiment. In Fig. 1, the substrate on which a plurality of intermediate contact products are formed is referred to as an "intermediate contact product on substrate 100".

[0024] In FIG. 1, a substrate intermediate product 100 has a plurality of contact intermediate products 1 formed on a substrate 10 for manufacturing.

[0025] The substrate-mounted intermediate product 100 has a contact intermediate product 1 formed on a substrate 10 by, for example, a semiconductor integrated circuit manufacturing technique or a manufacturing technique specific to MEMS, such as deep etching.

[0026] In addition, for ease of explanation, Figure 1 illustrates an example in which one contact intermediate product 1 is formed on the substrate 10, but the number of contact intermediate products 1 is not limited, and multiple contact intermediate products 1 may be formed on the substrate 10.

[0027] The configuration of each contact intermediate product 1 on the substrate 10 will be described. The contact intermediate product 1 has a main tab 20 and a probe (contactor) 11, and the main tab 20 and the probe 11 are integrally connected. The main tab 20 and the probe 11 are formed by MEMS technology.

[0028] The probe 11 electrically contacts the electrode terminal of a device under test (semiconductor integrated circuit) during testing of the device. In this embodiment, the probe 11 is a vertical probe that extends linearly. One end of the linear probe 11 is connected to the main tab 20 at a connecting portion 40.

[0029] The probe 11 and a second tab 22 (described later) extend along the upper surface of the substrate 10 while being spaced apart from the substrate 10 .

[0030] (A-3) Configuration of the Contact Intermediate Product Fig. 2 is a diagram showing the configuration of the contact intermediate product 1 of the embodiment. Each of the plurality of contact intermediate products 1 has the same configuration.

[0031] The main tab 20 is formed as a plate-like member and has a first tab (hereinafter also referred to as a "fixed tab") 21 that is roughly cylindrical and fixed on the substrate 10, a second tab (hereinafter also referred to simply as a "tab") 22 that is roughly L-shaped, and a connecting portion 30 that connects the first tab 21 and the second tab 22.

[0032] The first tab 21 is a portion that serves as a fixed end when the probe 11 is peeled off from the substrate 10. The first tab 21 is also called a round tab.

[0033] Although the first tab 21 has a substantially cylindrical shape, the shape of the first tab 21 is not limited to this. The shape of the first tab 21 may be square or rectangular when viewed from above (in a plan view) the substrate 10.

[0034] However, as will be described later, when the probe 11 is peeled off, the L-shaped second tab 22 is rotated to break the thin-diameter connecting portion 30, so it is desirable that the first tab 21 has a shape that does not interfere with the rotating second tab 22.

[0035] The second tab 22 has a relatively wide rectangular main body 26 and a rectangular tongue portion 24 formed to protrude from the main body 26 in the opposite direction to the extension direction of the probe, and has an overall shape that is approximately L-shaped.

[0036] In other words, the second tab 22 has a rectangular cutout 27 formed by cutting out one corner of a rectangular member. When viewed from above, the rectangular cutout 27 is formed so that the first tab 21, which is fixed to the substrate 10, can be placed therein.

[0037] The shape of the cutout 27 is not limited to the rectangular shape shown in the figure, and it may be a generally fan-shaped or generally triangular shape as long as the first tab 21 can be arranged in the space of the cutout 27. By arranging the first tab 21 in the space of the cutout 27, it is possible to prevent the second tab 22 and the first tab 21 from interfering with each other when the second tab 22 is moved by an external force. Furthermore, for example, when a plurality of contact intermediate products 1 are arranged vertically in the X-axis direction on the substrate 10, it is possible to prevent contact between adjacent first tabs 21.

[0038] The second tab 22 is cut at the small diameter connecting portion 30 while still connected to the probe 11, and the second tab 22 and the probe 11 are peeled off from the substrate 10 while still connected to each other.

[0039] Here, the positional relationship between the first tab 21 and the probe 11 will be described. As illustrated in Fig. 2, a center line P passing through the axis of the probe 11 passes through the center C of the first tab, which has a substantially cylindrical shape. In other words, the first tab 21 and the probe 11 are arranged coaxially. By arranging the probe 11 and the first tab 21 coaxially, deformation of the probe 11 due to the influence of heat can be suppressed.

[0040] The probe 11 and the first tab 21 are not limited to being arranged coaxially.

[0041] (A-4) Peeling Method of Intermediate Contact Product FIGS. 3 to 5 are explanatory diagrams for explaining a peeling method (cutting method) of the intermediate contact product 1 according to the embodiment.

[0042] When peeling off the probe 11, while the probe 11 and the second tab 22 are connected, the connection portion 30 between the first tab 21 and the second tab 22 is cut, and the probe 11 and the second tab 22 are peeled off.

[0043] 3, a peeling stopper 50 is used when peeling off the probe 11. A method for peeling off the probe 11 using the peeling stopper 50 will be described.

[0044] First, the peeling stopper 50 is brought into contact with the tip corner 25 of the tongue portion 24 of the L-shaped second tab 22. The peeling stopper 50 is brought into contact with the tip corner 25 of the tongue portion 24 while being slightly tilted.

[0045] Next, the second tab 22 is slid in the direction of the arrow F (X direction).

[0046] For example, the second tab 22 can be handled with even less force by manually or mechanically grasping the surface (either one side or both sides) of the second tab 22 with a grasping member 55 using a dedicated grasping device and sliding it.

[0047] As a result, the contact point between the tip corner 25 of the tongue portion 24 and the peeling stopper 50 becomes a fulcrum, causing the second tab 22 to rotate, cutting the thin-diameter connecting portion 30, and peeling off the probe 11 and the second tab 22 while they remain connected (see Figures 4 and 5).

[0048] In other words, by bringing the peeling stopper 50 into contact with the tip corner 25 of the tongue portion 24 and moving the part away from the contact point (the probe side) in the F direction, i.e., in a direction intersecting the P axis, the contact point becomes a fulcrum, and by utilizing the principle of leverage, the probe 11 and the second tab 22 can be peeled off from the first tab 21.

[0049] As a result, the probe 11 can be peeled off with a weaker force than before, and damage to the probe 11 can be prevented.

[0050] Furthermore, the probe 11 is peeled off while still connected to the second tab 22. Therefore, when handling the probe 11, the second tab 22 functions as a part to be gripped, allowing for reliable handling. In other words, damage to the probe 11 can be prevented.

[0051] In this embodiment, an example is given of using the peeling stopper 50 to peel the probe 11 and the second tab 22 from the first tab 21 using the principle of leverage, but the connecting portion between the second tab 22 and the first tab 21 (e.g., connecting portion 30) may also be cut by irradiating it with a laser beam or the like.

[0052] (A-5) Advantages of the Embodiment As described above, according to this embodiment, when the first tab and the second tab are connected, the peel stopper is brought into contact with the tip corner of the second tab, and the second tab is moved in a predetermined direction relative to the first tab, causing the second tab to rotate and be separated from the first tab. This makes it possible to easily peel the second tab from the first tab to produce a semi-finished contactor (semi-finished probe).

[0053] Furthermore, according to the embodiment, the second tab can be stably peeled off from the first tab, so that the intermediate contact product (semi-finished probe product) and ultimately the probe can be manufactured inexpensively.

[0054] Furthermore, since the second tab is L-shaped and asymmetrical, it is easy to determine whether the probe is upside down. As a result, the probe can be correctly attached to the probe head by determining whether it is upside down, thereby preventing short circuits.

[0055] Furthermore, since the second tab after peeling can function as a gripping portion, safe handling is possible, and as a result, damage to the probe can be prevented.

[0056] (B) Other Embodiments Although various modified embodiments have been mentioned in the above-described embodiment, the present invention can also be applied to the following modified embodiments.

[0057] (B-1) FIGS. 6A to 6F are diagrams showing the configuration of a contact intermediate product according to a modified embodiment.

[0058] 6(A) to 6(F) show modified examples in which the first tab 21 and the probe 11 are not positioned on the same straight line. In this way, even when the first tab 21 and the probe 11 are not positioned on the same straight line, the same effect as in the above-described embodiment can be obtained.

[0059] Fig. 6(A) shows a modified example in which the connecting portion 30 between the first tab 21 and the second tab 22A is located inside the tongue portion 24 of the second tab 22A. Fig. 6(B) shows a modified example in which the connecting portion 30 is located further outward (on the left side in the figure). Fig. 6(C) shows a modified example in which the connecting portion 30 is connected at two points.

[0060] 6(D) to 6(F), the second tab 22B has a shape including a first tongue portion 24A and a second tongue portion 24B on the opposite side. Even in this case, the second tab 22B has an asymmetric shape, and therefore the same effect as in the above-described embodiment can be obtained.

[0061] Fig. 6(D) shows a modified example in which the connecting portion 30 between the first tab 21 and the second tab 22A is located inside the tongue portion 24 of the second tab 22A. Fig. 6(E) shows a modified example in which the connecting portion 30 is located further outward (on the left side in the figure). Fig. 6(F) shows a modified example in which the connecting portion 30 is connected at two points.

[0062] 1: contact intermediate product, 10: substrate, 11: probe, 12: fixing portion, 20: main tab, 21: first tab, 22: second tab, 23: through hole, 24: tongue portion, 25: tip corner portion, 26: main body portion, 27: cutout portion, 30: connecting portion, 40: connecting portion, 42a and 42b: claw portion, 50: peeling stopper, 100: intermediate product on substrate.

Claims

1. A contact intermediate product comprising: a linear contact; and a rectangular tab to which one end of the contact is connected, the tab having a rectangular main body to which the contact is connected and a tongue portion protruding from the main body.

2. The intermediate contact product according to claim 1, wherein the tab is formed in an L-shape by the main body and the tongue portion.

3. The intermediate contact product according to claim 2, wherein a fixing tab to be fixed onto a substrate is connected to the inner side of the L-shaped tab.

4. The contact intermediate product according to claim 1, characterized in that the tab has a cutout portion formed by cutting out one corner, and the cutout portion is formed in such a way that a fixing tab to be fixed onto a substrate can be placed in the cutout portion when viewed in a plan view.

5. The intermediate contact product according to claim 3 or 4, characterized in that the tab is cut off from the fixing tab when an external force is applied to the tab in a direction intersecting the axial direction of the contact.

6. The intermediate contact product according to claim 5, wherein the tab and the fixing tab are positioned so as not to interfere with each other when the tab is moved by the external force.

7. A contact intermediate product according to claim 3 or 4, characterized in that the tab is a plate-like member that is asymmetrical from left to right, and the fixing tab is disposed near the outside of the asymmetrical tab.

8. A method for cutting a contact intermediate product, which comprises a linear contact and a rectangular tab to which one end of the contact is connected, from a fixed tab formed on a substrate, the method comprising: bringing a peeling stopper into contact with a corner of the tab; moving the tab in a direction in which the tab rotates around the corner as a fulcrum; and cutting the tab and the fixed tab by the rotational force generated in the tab.

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