Humidity control equipment using single fan for performing dehumidification and regeneration

Abstract

Humidity control equipment using a treatment fan that performs dehumidification and regeneration controls humidity for a clean room or equipment in the clean room, the humidity control equipment comprising: a single fan that introduces treatment air; a desiccant rotor that adsorbs moisture of primary air which is a part of the treatment air introduced by the single fan through an adsorbent, and supplies dehumidified air to a transfer chamber; and a regeneration heater that generates regenerated air by heating secondary air which is the remainder of the treatment air introduced by the single fan, and allows moisture adsorbed by the adsorbent to be removed from the regenerated air.

Description

Humidity control equipment using a single fan to perform dehumidification and regeneration

[0001] The present invention relates to a humidity control device using a single fan for performing dehumidification and regeneration, and more particularly, to a humidity control device using a single fan for performing dehumidification and regeneration, wherein the single fan supplies both air to be dehumidified by a desiccant rotor and air to be used for regeneration of the desiccant rotor.

[0002] Typically, cluster equipment in semiconductor processes uses various chemical gases during the process, and at this time, gases and vapors remain on the wafers after the process is completed inside the chamber.

[0003] Therefore, when unloading, if the gas or fume remaining in the FOUP (Front Opening Unified Pod: semiconductor process storage container) reacts with moisture, particles or defects may occur on the wafer.

[0004] The environmental conditions inside the existing EFEM (Equipment Front End Module) are such that the air inside the FAB is supplied through the FFU (Fan Filter Unit) without humidity control, so the humidity in the air and the residual gas on the wafer can easily react, easily creating particles or defects. In addition, since the process time usually takes about an hour in certain processes, the wafer waits in the FFU for a long time, so the residual gas on the wafer reacts with the non-humidified air inside the EFEM, creating problems such as particle generation and a decrease in yield.

[0005] Considering these points, recently, dehumidifying equipment equipped with a desiccant rotor has been used to dehumidify air and then supply the dehumidified air to the return room of the EFEM (see Korean Patent Application No. 10-2022-0040397).

[0006] However, since these dehumidifying equipments include a dehumidifying fan that introduces air into the desiccant rotor (dehumidifying area) and a regeneration fan that directs regeneration air toward the desiccant rotor (regeneration area), the size of the dehumidifying equipments increases, which limits the installation space.

[0007] In addition, there is a problem that a lot of energy is consumed in the process of heating air in a regeneration heater to generate regeneration air having a relatively high temperature to be used for regeneration of the desiccant rotor.

[0008] To address these issues, there is a growing need for a humidity control device that uses a single fan to perform dehumidification and regeneration, which can supply dehumidified air and regeneration air to a desiccant rotor with a single fan and which brings about energy savings in the generation of regeneration air.

[0009] The problem to be solved by the present invention is to provide a humidity control device that uses a single fan to perform dehumidification and regeneration, in which a single fan supplies both air to be dehumidified by a desiccant rotor and air to be used for regeneration of the desiccant rotor, and the air is preheated as it passes through the desiccant rotor before being heated by a regeneration heater, thereby saving energy required for regeneration.

[0010] The problems to be solved by the present invention are not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below.

[0011] According to one embodiment of the present invention for solving the above problem, a humidity control device using a single fan for performing dehumidification and regeneration is a humidity control device that performs humidity control for a clean room or equipment within a clean room, the humidity control device including a single fan for introducing process air, a desiccant rotor for supplying dehumidified air into the interior of the clean room or equipment by adsorbing moisture in first air, which is a part of the process air introduced by the single fan, through an adsorbent, and a regeneration heater for heating second air, which is the remainder of the process air introduced by the process fan, to generate regeneration air, and causing the regeneration air to remove moisture adsorbed by the adsorbent.

[0012] According to the present invention, a humidity control device can be provided that can supply dehumidified air and regeneration air to a desiccant rotor with a single fan, thereby reducing the size of the dehumidification device.

[0013] Additionally, a humidity control device can be provided that saves energy in the regenerative heater because the air is preheated as it passes through the desiccant rotor before being heated by the regenerative heater.

[0014] FIG. 1 is a drawing of a state in which a plurality of humidity control devices according to one embodiment of the present invention are installed in an EFEM.

[0015] Figure 2 is a perspective view of a humidity control device according to one embodiment of the present invention.

[0016] Figure 3 is a cross-sectional view of a humidity control device according to one embodiment of the present invention.

[0017] Figure 4 is a drawing showing a process in which a portion of the air drawn in through a single fan is dehumidified and the remainder becomes regeneration air to perform regeneration.

[0018] Figure 5 is a drawing showing a supply hood that can rotate to change the supply direction of dehumidified air.

[0019] Figure 6 is a front view of a humidity control device according to one embodiment of the present invention.

[0020] Figure 7 is a drawing showing a regeneration air outlet and an exhaust air volume control unit installed in the regeneration air outlet.

[0021] Figure 8 is a drawing showing a regeneration air filter unit installed in a regeneration air outlet and a dehumidifying air filter unit installed in a supply hood.

[0022] Figure 9 is a drawing showing a dustproof unit of a single fan.

[0023] Figure 10 is a drawing showing a cooling low-humidity medium supply equipment located around a supply hood.

[0024] Figure 11 is a drawing showing a cooling duct and an outside air intake unit installed around a supply hood.

[0025] Figure 12 is a drawing showing the interior of the humidity control equipment and facility connected through a recycling pipe.

[0026] According to one embodiment of the present invention for solving the above problem, a humidity control device using a single fan for performing dehumidification and regeneration is a humidity control device that performs humidity control for a clean room or equipment within a clean room, the humidity control device including a single fan for introducing process air, a desiccant rotor for supplying dehumidified air into the interior of the clean room or equipment by adsorbing moisture in first air, which is a part of the process air introduced by the single fan, through an adsorbent, and a regeneration heater for heating second air, which is the remainder of the process air introduced by the process fan, to generate regeneration air, and causing the regeneration air to remove moisture adsorbed by the adsorbent.

[0027] The present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms. These embodiments are provided only to ensure that the disclosure of the present invention is complete and to fully inform a person having ordinary skill in the art to which the present invention pertains of the scope of the invention.

[0028] In this specification, the singular includes the plural unless the context specifically dictates otherwise. As used herein, the terms "comprises" and / or "comprising" do not exclude the presence or addition of one or more other components, steps, or operations.

[0029] Referring to FIGS. 1 to 5, a humidity control device using a single fan for performing dehumidification and regeneration according to one embodiment of the present invention is described.

[0030] FIG. 1 is a drawing of a humidity control device according to one embodiment of the present invention, wherein a plurality of humidity control devices are installed in an EFEM. FIG. 2 is a perspective view of a humidity control device according to one embodiment of the present invention. FIG. 3 is a cross-sectional view of a humidity control device according to one embodiment of the present invention.

[0031] Figure 4 is a drawing showing a process in which a portion of the air drawn in through a single fan is dehumidified and the remainder becomes regeneration air to perform regeneration. Figure 5 is a drawing showing a rotational supply hood that changes the supply direction of the dehumidified air.

[0032] First, a humidity control device (10, 13, 15) using a single fan to perform dehumidification and regeneration according to one embodiment of the present invention is a humidity control device (10, 13, 15) that performs humidity control for a clean room or equipment within the clean room.

[0033] That is, the humidity control equipment (10, 13, 15) of the present invention can perform humidity control for a clean room, and can also perform humidity control for various equipment installed in the clean room.

[0034] For example, the humidity control equipment (10, 13, 15) of the present invention can be installed in a clean room or facility to replace an existing FFU (Fan Filter Unit) and simultaneously perform humidity control and filtering functions for the clean room or facility.

[0035] In one form, the equipment within the clean room may be an Equipment Front End Module (EFEM) (20) including a return room, which is a space where the object to be processed is returned to the process module, and accordingly, the humidity control equipment (10, 13, 15) using a single fan to perform dehumidification and regeneration according to one embodiment of the present invention may be the humidity control equipment (10, 13, 15) applied to the EFEM (20).

[0036] In addition, the humidity control equipment (10, 13, 15) can be detachably installed in the facility, thereby facilitating transportation, maintenance, and repair of the humidity control equipment (10, 13, 15).

[0037] In one form, the humidity control equipment (10, 13, 15) applied to the EFEM (20) is transported by a carrier (30) and is detachable from the EFEM (20), particularly from the upper part of the EFEM (20), and is thus mounted on the EFEM (20) to control the humidity in the return room.

[0038] Hereinafter, each configuration of the humidity control equipment (10, 13, 15) according to one embodiment of the present invention will be specifically examined.

[0039] Referring to FIGS. 1 to 5, a humidity control device (10, 13, 15) according to one embodiment of the present invention includes a housing (40), a single fan (50), a desiccant device (60), a regenerative heater (70), and a supply hood (110, 180).

[0040] The housing (40) can form the exterior of the humidity control device (10, 13, 15), and each of the components described below can be arranged inside.

[0041] The housing (40) may be smaller in size than the equipment within the clean room, and a plurality of humidity control devices (10, 13, 15) may be installed on the upper part of the equipment, such as the EFEM (20). Therefore, the humidity control devices (10, 13, 15) according to the present invention may be convenient to transport and install.

[0042] A single fan (50) is a fan that introduces process air (P) to perform humidity control in a clean room or facility (e.g., a return room of an EFEM (20)).

[0043] As illustrated in FIG. 4, a single fan (50) can send the first air (P1), which is a portion of the introduced process air (P), to a desiccant rotor (61) to be described later so that dehumidification can be performed, and the dehumidified air (D) exiting the desiccant rotor (61) can be introduced into a clean room or facility.

[0044] At the same time, a single fan (50) can send the second air (P2), which is the remainder of the processed air (P), to a regeneration heater (70) described later to be used for regeneration of the desiccant rotor (61).

[0045] That is, in the case of the present invention, a single fan (50) can supply both air to become dehumidified air (D) and air to become regenerated air (R).

[0046] In the conventional case, there were separate dehumidifying fans that supplied air to the desiccant rotor (61) for dehumidification and regeneration fans that supplied air to the regeneration heater (70) for regeneration of the desiccant rotor (61).

[0047] In this case, multiple fans are used for desiccant dehumidification, which increases the size of the dehumidification device, making production and management difficult and increasing the constraints on installation space.

[0048] On the other hand, in the case of the present invention, since the desiccant dehumidification process can be performed with one fan, the desiccant dehumidification device can be miniaturized, so that there may be no restrictions on installation space.

[0049] In particular, the space where semiconductor manufacturing processes are performed is cramped due to various process facilities, making it difficult to transport and install conventional dehumidifying equipment. However, the present invention can solve this problem by reducing the size of the dehumidifying device.

[0050] In addition, the second air introduced by the single fan (50) can be heated by the regeneration heater (70) after passing through the desiccant rotor (61) to become regeneration air (R), and this regeneration air (R) can be discharged to the outside through the regeneration air outlet (100) located in front of the desiccant rotor (61) after removing moisture from the adsorbent while passing through the desiccant rotor (61).

[0051] That is, in the case of the present invention, the regenerative heater (70) can be positioned at the rear of the desiccant rotor (61), and the second air can be preheated by the adsorption heat of the desiccant rotor (61) while passing through the desiccant rotor (61) before being heated by the regenerative heater (70).

[0052] In this way, as the secondary air is preheated in the desiccant rotor (61) before being heated by the regeneration heater (70), the amount of heat that the regeneration heater (70) provides to the secondary air to make it into regeneration air (R) can be saved, thereby saving energy.

[0053] Meanwhile, the treatment air (P) introduced by the single fan (50) may be outside air, inside air of the return room, or a mixture of outside air and inside air, and the single fan (50) may introduce these airs according to the operating situation.

[0054] Desiccant equipment (60) is equipment that uses desiccant to control humidity in a clean room or inside a facility (e.g., a return room of EFEM (20)).

[0055] In this regard, in the case of EFEM (20), various chemical gases are used in the semiconductor process, and at this time, gases, vapors, etc. may remain on the wafers that have completed the process inside the return room.

[0056] That is, a problem of yield reduction may occur, such as the generation of particles by the reaction between the residual gas on the wafer and the non-humidified air inside the EFEM (20).

[0057] To solve these problems, it is necessary to control the humidity in the return room, and in the case of the present invention, a desiccant device (60) can be used to control the humidity.

[0058] Such desiccant equipment (60) may include a desiccant rotor (61), a front cassette (63), a rear cassette, and a drive motor (65).

[0059] The desiccant rotor (61) is a dehumidifying rotor that removes moisture from the first air (P1), which is a portion of the process air (P) introduced and provided by a single fan (50), so that the dehumidified air (D) is supplied to the return room.

[0060] For this purpose, the desiccant rotor (61) may include an adsorbent, and as the first air (P1) passes through the desiccant rotor (61), moisture contained in the first air (P1) is adsorbed to the adsorbent, so that the first air (P1) may become dehumidified air (D).

[0061] This adsorption phenomenon is caused by a force greater than the attractive force that occurs between molecules during condensation, which acts on the surface of the adsorbent, generating heat greater than the heat of condensation. This is called the heat of adsorption, and is approximately 1.5 to 2 times the heat of condensation.

[0062] Therefore, the dehumidified air (D) exiting the desiccant rotor (61) can be heated by the heat of adsorption and have a relatively high temperature.

[0063] Meanwhile, adsorbents include, but are not limited to, silica gel or zeolite.

[0064] In addition, the desiccant rotor (61) can be rotated by a driving motor (65), and by this rotation, the adsorption portion of the desiccant rotor (61) that has adsorbed moisture in the first air (P1) can move from the dehumidification area (S1) to the purge area (S2) and then to the regeneration area (S3) to have moisture removed by the regeneration air (R), and the adsorption portion that has been regenerated through the rotation can move to the dehumidification area (S1).

[0065] In this regard, as described above, the second air (P2), which is the remainder of the processed air (P), can be preheated by the heat of adsorption while passing through the purge area (S2), and additionally heated by the regeneration heater (70) to become regeneration air (R), and moisture can be removed in the desiccant rotor (61) while passing through the regeneration area (S3).

[0066] The front cassette (63) is a rotor cover located in front of the desiccant rotor (61), and one or more air inlet spaces can be formed by a partition wall.

[0067] The rear cassette is a rotor cover located at the rear of the desiccant rotor (61), and one or more air outlet spaces can be formed by a partition wall.

[0068] That is, the front cassette (63) and the rear cassette are spaced apart, and a desiccant rotor (61) can be positioned between them.

[0069] The regeneration heater (70) is a heater that heats the second air (P2), which is the remainder of the processed air (P) introduced by the single fan (50), to generate regeneration air (R), thereby allowing the regeneration air (R) to remove moisture adsorbed by the adsorbent.

[0070] That is, the regeneration heater (70) can heat the secondary air (P2) provided by the single fan (50) to generate regeneration air (R) having a predetermined temperature to enable moisture removal from the adsorbent.

[0071] The regeneration air (R) generated in this way can pass through the desiccant rotor (61) through the regeneration area (S3) of the desiccant rotor (61), and at this time, the regeneration air (R) can rotate to remove moisture from the adsorbent that has come to the regeneration area (S3).

[0072] In particular, in the case of the present invention, the regeneration heater (70) may be positioned at the rear of the desiccant rotor (61), and the second air may be preheated while passing through the purge area (S2) of the desiccant rotor (61), and the preheated second air may be heated once again by the regeneration heater (70) to become regeneration air.

[0073] The regeneration air (R) formed in this way can remove moisture from the adsorbent while passing through the regeneration area (S3) of the desiccant rotor (61) again, and can be discharged to the outside through the regeneration air discharge port (100) located in front of the desiccant rotor (61).

[0074] That is, the present invention can save energy by preheating the second air (P2) in the desiccant rotor (61) before heating it by the regeneration heater (70), thereby saving the amount of heat provided to the second air (P2) by the regeneration heater (70) to make the second air (P2) into regeneration air (R).

[0075] The supply hood (110, 180) is an air supply unit that supplies dehumidified air (D) to the inside of a clean room or facility (e.g., the return room of EFEM (20)).

[0076] As described above, the first air can be dehumidified by the desiccant rotor (61) to become dehumidified air (D), and this dehumidified air (D) can be supplied into the clean room or the interior of the facility through the supply hood (110, 180).

[0077] In addition, as illustrated in FIG. 5, the supply hood (110) is rotatable so that the supply direction of the dehumidified air (D) can be controlled. Therefore, the humidity control equipment (10, 13, 15) according to the present invention can be installed in various locations without having to consider the supply direction of the dehumidified air (D).

[0078] In addition, dehumidified air (D) can also be supplied in the downward direction of the supply hood (180) (see FIG. 11), and in some cases, the supply hood (110, 180) is detachable, so that when the supply hood (110, 180) is removed, dehumidified air (D) can be supplied in the downward direction of the housing (40).

[0079] Next, referring to FIGS. 2 and 6, a configuration for guiding the second air (P2) to the regeneration heater (70) will be examined. FIG. 6 is a front view of a humidity control device according to one embodiment of the present invention.

[0080] Referring to FIGS. 2 and 6, the humidity control equipment (10, 13, 15) using a single fan for performing dehumidification and regeneration according to the present invention may further include an air guide (80) and an auxiliary fan (90).

[0081] The air guide (80) is a guide unit that guides the second air (P2) to the desiccant rotor (61).

[0082] The second air (P2) introduced by the single fan (50) may spread within the housing (40), and accordingly, a sufficient amount of the second air (P2) may not move to the regeneration heater (70), so that the regeneration action on the desiccant rotor (61) may not be sufficiently performed.

[0083] Taking these points into consideration, an air guide (80) can be installed in front of the purge area (S2) of the desiccant rotor (61), so that the second air (P2) can pass through the purge area (S2) through the air guide (80) and then toward the regeneration heater (70).

[0084] The auxiliary fan (90) is a fan that guides the secondary air (P2) to the air guide (80).

[0085] By installing the auxiliary fan (90), a sufficient amount of secondary air (P2) can be guided to the air guide (80) and directed to the regenerative heater (70).

[0086] That is, the present invention can generate a sufficient amount of regeneration air (R) through the air guide (80) and the auxiliary fan (90) so that the regeneration operation can be effectively performed.

[0087] Meanwhile, the auxiliary fan (90) may be detachable, and accordingly, the auxiliary fan (90) may be removed when regeneration air (R) is sufficiently supplied to the regeneration heater (70).

[0088] Next, referring to FIGS. 7 and 8, a configuration for controlling and filtering airflow for dehumidified air or regeneration air will be examined. FIG. 7 is a drawing showing a regeneration air outlet and an exhaust airflow control unit installed at the regeneration air outlet. FIG. 8 is a drawing showing a regeneration air filter unit installed at the regeneration air outlet and a dehumidified air filter unit installed at the supply hood.

[0089] Referring to FIGS. 7 and 8, a humidity control device (10, 13, 15) using a single fan for performing dehumidification and regeneration according to the present invention may further include an exhaust air volume control unit (120), a supply air volume control unit, a regeneration air filter unit (140), and a dehumidification air filter unit (150).

[0090] The exhaust air volume control unit (120) is a unit that controls the air volume of regeneration air discharged to the outside through the regeneration air outlet (100).

[0091] This exhaust air volume control unit (120) may be a damper unit, and the damper of the damper unit may be of various types, such as a tilt type or a slide type.

[0092] The supply air volume control unit is a unit that controls the air volume of dehumidified air supplied through the supply hood (110, 180).

[0093] Such a supply air volume control unit may be a damper unit, and the damper of the damper unit may be of various types, such as a tilt type or a slide type.

[0094] The regeneration air filter unit (140) is a unit that filters the regeneration air (R) before the regeneration air (R) is discharged to the outside through the regeneration air outlet (100).

[0095] In this way, the phenomenon of the air cleanliness of the clean room being lowered by the regeneration air (R) can be prevented as the regeneration air filter unit (140) filters the regeneration air (R) and then discharges it to the outside.

[0096] The dehumidifying air filter unit (150) is a unit that filters dehumidified air before it is supplied into the clean room or facility through the supply hood (110, 180).

[0097] In this way, as the dehumidifying air filter unit (150) filters the dehumidified air, cleaner dehumidified air can be provided to the inside of the clean room or facility.

[0098] Dehumidifying air filter units (150) include, but are not limited to, chemical filters and ULPA (Ultra Low Penetration Air) filters.

[0099] Next, referring to Fig. 9, a configuration for suppressing vibration of a single fan (50) to prevent it from being transmitted will be examined. Fig. 9 is a drawing showing a vibration isolation unit of a single fan.

[0100] Referring to FIG. 9, the humidity control equipment (10, 13, 15) using a single fan to perform dehumidification and regeneration according to the present invention may further include a dustproof unit.

[0101] The vibration-proof unit is a unit that prevents vibration generated from a single fan (50) from being transmitted.

[0102] These dustproof units may include a lower dustproof unit (135) installed at the bottom of a single fan (50) and a side dustproof unit (130) installed at the side of the single fan (50).

[0103] The present invention can block noise caused by vibration through such a vibration-proof unit and prevent damage to various components exposed to vibration.

[0104] Next, referring to Figures 10 and 11, a configuration for cooling and dehumidifying dehumidified air will be examined. Figure 10 is a drawing showing a cooling dehumidifying medium supply device located around a supply hood. Figure 11 is a drawing showing a cooling duct and an outside air intake unit installed around a supply hood.

[0105] Referring to FIGS. 10 and 11, the humidity control equipment (10, 13, 15) using a single fan for performing dehumidification and regeneration according to the present invention may further include a cooling low-humidity medium supply equipment (160) and a cooling duct (170).

[0106] The cooling low-humidity medium supply equipment (160) is equipment that supplies a cooling low-humidity medium to the dehumidified air (D) flowing from the desiccant equipment (60) to the supply hood (110, 180).

[0107] The cooling low-humidity medium supply equipment (160) can supply the cooling low-humidity medium to the dehumidified air (D) before the dehumidified air (D) is supplied into the interior of the clean room or facility through the supply hood (110, 180).

[0108] As a cooling low-humidity medium is supplied to the dehumidified air (D) before it enters the interior of the clean room or facility, the dehumidified air (D) having a relatively high temperature can be cooled by mixing with the cooling medium, thereby lowering its temperature and also lowering its humidity.

[0109] Through this cooling process, the dehumidified air (D) can be supplied to the cleanroom or equipment at an appropriate temperature. Furthermore, the dehumidified air (D) has a lower humidity, thereby resolving potential process-related issues arising from the presence of humidity.

[0110] A cooling low-humidity medium supply line can be used as the cooling low-humidity medium supply equipment (160), and a heat exchanger such as a sensible heat exchanger can also be applied.

[0111] Meanwhile, cooling media may include natural ventilation (or outside air), CDA (Clean Dry Air), nitrogen gas, and cooling water.

[0112] Additionally, a plurality of cooling low-humidity medium supply devices (160) may be used together. For example, a sensible heat exchanger may be installed at the front, and a cooling low-humidity medium supply line supplying CDA or nitrogen gas may be installed at the rear.

[0113] In this way, by applying different types of cooling and low-humidity medium supply equipment (160) together, the dehumidified air (D) can be additionally cooled and low-humidified.

[0114] The cooling duct (170) is a unit that cools and dehumidifies dehumidified air (D) through a heat exchanger provided inside.

[0115] The cooling duct (170) can cool and dehumidify the dehumidified air (D) by exchanging heat with the outside air in a heat exchanger before the dehumidified air (D) is supplied into the interior of the clean room or facility through the supply hood (110, 180).

[0116] That is, the present invention can cool and dehumidify dehumidified air (D) through a cooling low-humidity medium supply device (160) and a cooling duct (170) and supply it into the interior of a clean room or facility.

[0117] Additionally, referring to Fig. 11, a configuration for introducing outside air into the interior of the facility (particularly, the return room of the EFEM (20)) in an emergency will be examined. Fig. 11 is a drawing showing a cooling duct and an outside air introduction unit installed around a supply hood.

[0118] Referring to FIG. 11, a humidity control device (10, 13, 15) using a single fan to perform dehumidification and regeneration according to the present invention may additionally include an outside air intake unit (190).

[0119] For example, the facility may be an EFEM (20), and the outside air intake unit (190) may be a bypass structure that introduces outside air and supplies it to the return room according to the operating conditions of the EFEM (20), thereby forming a positive pressure in the return room.

[0120] If the humidity control device (10, 13, 15) according to the present invention operates normally, the dehumidified air (D) provided by the humidity control device (10, 13, 15) is supplied to the return room, so that the return room can maintain a positive pressure.

[0121] However, depending on the operating conditions of EFEM (20), dehumidified air (D) is not supplied to the return room or is supplied insufficiently compared to the standard value, so the return room cannot maintain positive pressure, and as a result, various processes cannot be performed.

[0122] In this case, in order to maintain positive pressure in the return room, it is necessary to introduce outside air instead of dehumidified air (D) into the return room to maintain positive pressure.

[0123] Here, the outside air may refer to the air inside a clean room where various semiconductor process-related equipment such as EFEM (20) are installed.

[0124] The present invention can make the return room positively pressurized by introducing outside air through an outside air introduction unit (190) and supplying it to the return room according to the operating conditions of the EFEM (20).

[0125] That is, the process can continue by ensuring that the return room is under positive pressure even if some degree of humidity control is sacrificed.

[0126] The operating situation of this EFEM (20) may be a situation where the operation of the humidity control equipment (10, 13, 15) is stopped due to a power outage or breakdown.

[0127] In this case, the dehumidified air (D) cannot flow into the return room, and accordingly, the return room cannot maintain positive pressure.

[0128] Alternatively, it may be a situation where the speed of the introduced air (P) measured by the wind speed sensor installed in the humidity control equipment (10, 13, 15) is less than the reference value (e.g., less than 1 m / s).

[0129] In this case, even if dehumidified air (D) is supplied to the return room, a small amount is supplied to the return room, making it difficult for the return room to maintain positive pressure.

[0130] Looking at one form of this external air intake unit (190), the external air intake unit (190) may be plate-shaped, and one side of the external air intake unit (190) may be hinge-connected to the housing (40) or the supply hood (110, 180).

[0131] Under this combined structure, when the operating situation of the aforementioned EFEM (20) occurs, the outside air intake unit (190) can open the inside of the housing (40) or the supply hood (110, 180) by rotating outward around one hinged side, thereby allowing outside air to be introduced into the return room.

[0132] Alternatively, looking at another form of the external air intake unit (190), the external air intake unit (190) may be plate-shaped, and the external air intake unit (190) may close or open the interior of the housing (40) or the supply hood (110, 180) by sliding up and down or left and right.

[0133] Under this combined structure, when the operating situation of the aforementioned EFEM (20) occurs, the outside air intake unit (190) can slide to open the inside of the housing (40) or the supply hood (110, 180) to allow outside air to be introduced into the return room.

[0134] Alternatively, looking at another form of the outside air intake unit (190), the outside air intake unit (190) may include an outside air intake window, a plurality of openings formed in the outside air intake window to introduce outside air, and an opening ratio adjustment plate positioned in front or behind the outside air intake window to adjust the number of openings to be opened among the plurality of openings or the opening area of ​​the openings to be opened.

[0135] At this time, the opening ratio adjustment plate can adjust the number of openings to be opened among a plurality of openings or the opening area of ​​the openings to be opened through any one of a sliding method, a detachable method, or a rotating method.

[0136] Specifically, in the outside air intake unit (190), the opening ratio adjustment plate can slide to adjust the number of openings to be opened among a plurality of openings or the opening area of ​​the openings to be opened.

[0137] Alternatively, in the outside air intake unit (190), the opening rate adjustment plate located at the rear of the outside air intake window rotates to close a plurality of openings, thereby controlling the number of openings to be opened among the plurality of openings or the open area of ​​the openings to be opened.

[0138] Under this combined structure, when the operating situation of the aforementioned EFEM (20) occurs, the aperture ratio adjustment plate can open the aperture by sliding or rotating to allow outside air to flow into the return room.

[0139] Additionally, referring to Fig. 12, a configuration for further lowering the humidity inside the facility, particularly in the return room of the EFEM (20), through piping will be examined. Fig. 12 is a drawing showing the humidity control equipment and the inside of the facility being connected through a recycling piping.

[0140] Referring to FIG. 12, a humidity control device (10, 13, 15) using a single fan to perform dehumidification and regeneration according to the present invention may additionally include a recycling pipe (200).

[0141] The recycling pipe (200) is a pipe that connects the humidity control equipment (10, 13, 15) according to the present invention with the interior of the facility, particularly the return room of the EFEM (20), and allows the internal air of the return room to flow to the humidity control equipment (10, 13, 15) to achieve dehumidification.

[0142] Through this recycling pipe (200), the effect of further lowering the humidity within the return room can be achieved.

[0143] Additionally, as shown in FIGS. 1 and 12, the humidity control equipment (10, 13, 15) according to the present invention can be installed in multiple units horizontally or vertically in a detachable manner in the facility.

[0144] That is, any humidity control device (10, 13, 15) installed in the facility can be positioned parallel to or above or below other humidity control devices (10, 13, 15). Just as Lego blocks can be joined horizontally or vertically, the humidity control devices (10, 13, 15) can also be positioned horizontally or vertically with respect to one another.

[0145] In addition, the dehumidified air (D) supplied from each of the plurality of humidity control devices (10, 13, 15) installed in the facility can be combined into one and supplied into the interior of the facility. In this case, even if the amount of dehumidified air provided from one humidity control device (10, 13, 15) is small, the combined amount of dehumidified air can be a sufficient amount.

[0146] Therefore, the humidity control equipment (10, 13, 15) of the present invention can achieve both the purposes of convenience in installation and transportation and securing a sufficient amount of dehumidified air.

[0147] Of course, each of the multiple humidity control devices (10, 13, 15) can individually supply dehumidified air (D) into the interior of the facility.

[0148] In addition, multiple humidity control devices (10, 13, 15) can be controlled integratedly or individually, making control and management convenient.

[0149] Although the embodiments of the present invention have been described with reference to the attached drawings, those skilled in the art will appreciate that the present invention can be implemented in other specific forms without altering the technical concept or essential characteristics thereof. Therefore, the embodiments described above should be understood to be illustrative in all respects and not restrictive.

[0150] The present invention has industrial applicability as a humidity control device using a single fan to perform dehumidification and regeneration.

Claims

1. Humidity control equipment that performs humidity control for a clean room or equipment within the clean room. The above humidity control equipment, A single fan that draws in process air; A desiccant rotor that adsorbs moisture in the first air, which is a part of the process air introduced by the single fan, through an adsorbent and supplies dehumidified air into the interior of the clean room or the facility; and Humidity control equipment using a single fan for performing dehumidification and regeneration, including a regeneration heater that heats the second air, which is the remainder of the processed air introduced by the single fan, to generate regeneration air, and causes the regeneration air to remove the moisture adsorbed by the adsorbent.

2. In paragraph 1, Humidity control equipment using a single fan for performing dehumidification and regeneration, further comprising an air guide for guiding the second air to the desiccant rotor.

3. In paragraph 2, Humidity control equipment using a single fan for performing dehumidification and regeneration, further comprising an auxiliary fan for introducing the second air into the air guide.

4. In paragraph 1, A humidity control device using a single fan to perform dehumidification and regeneration, wherein the second air is heated by the regeneration heater after passing through the desiccant rotor to become the regeneration air.

5. In paragraph 4, A humidity control device that uses a single fan to perform dehumidification and regeneration, wherein the regeneration air passes through the desiccant rotor again to remove the moisture and is then discharged to the outside through the regeneration air outlet located in front of the desiccant rotor.

6. In paragraph 5, Humidity control equipment using a single fan for performing dehumidification and regeneration, further comprising a regeneration air filter unit for filtering the regeneration air before the regeneration air is discharged to the outside through the regeneration air outlet.

7. In paragraph 5, Humidity control equipment using a single fan for performing dehumidification and regeneration, further comprising an exhaust air volume control unit for controlling the air volume of regeneration air discharged to the outside.

8. In paragraph 1, Humidity control equipment using a single fan for performing dehumidification and regeneration, further comprising a supply hood for supplying the dehumidified air into the interior of the clean room or the facility.

9. In paragraph 8, Humidity control equipment using a single fan for performing dehumidification and regeneration, further comprising a dehumidifying air filter unit for filtering the dehumidified air before the dehumidified air is supplied into the interior of the clean room or the facility through the supply hood.

10. In paragraph 8, A humidity control device using a single fan for performing dehumidification and regeneration, comprising a sensible heat exchanger and further including a cooling duct for cooling and dehumidifying the dehumidified air by heat exchange in the sensible heat exchanger before the dehumidified air is supplied into the interior of the clean room or the facility through the supply hood.

11. In paragraph 8, Further comprising a cooling low-humidity medium supply device for supplying a cooling low-humidity medium with the dehumidified air before the dehumidified air is supplied into the interior of the clean room or the facility through the supply hood, Humidity control equipment using a single fan for performing dehumidification and regeneration, wherein the above cooling low-humidity medium is CDA (Clean Dry Air) or nitrogen gas.

12. In paragraph 8, Humidity control equipment using a single fan for performing dehumidification and regeneration, further comprising a supply air volume control unit for controlling the air volume of dehumidified air supplied into the clean room or the interior of the facility.

13. In paragraph 8, A humidity control device using a single fan to perform dehumidification and regeneration, wherein the supply hood is rotatable so that the supply direction of the dehumidified air can be controlled.

14. In paragraph 8, The above supply hood is a humidity control equipment that uses a single fan to perform dehumidification and regeneration by supplying the dehumidified air in a downward direction.

15. In paragraph 8, The above supply hood is a humidity control device that uses a single fan to perform dehumidification and regeneration and is detachable.

16. In paragraph 1, The above equipment is an EFEM (Equipment Front End Module) that includes a return room, which is a space where the object to be processed is returned to the process module. Humidity control equipment using a single fan for performing dehumidification and regeneration, further including an outside air intake unit that introduces outside air and supplies it to the return room to form a positive pressure in the return room, depending on the operating conditions of the above EFEM.

17. In paragraph 1, It further includes a vibration-proof unit that prevents vibration generated from the single fan from being transmitted, The above dustproof unit, A lower dustproof unit installed at the bottom of the above single fan; and Humidity control equipment using a single fan for performing dehumidification and regeneration, comprising a side dustproof unit installed on the side of the single fan.

18. In paragraph 1, The above humidity control equipment is installed in multiple units horizontally or vertically in a detachable manner in the above facility, The dehumidified air supplied from each of the multiple humidity control devices is combined into one and supplied into the interior of the equipment. The above multiple humidity control devices are humidity control devices that use a single fan to perform dehumidification and regeneration, and can be controlled integratedly or individually.

19. In paragraph 1, The above humidity control equipment is installed in multiple units horizontally or vertically in a detachable manner in the above facility, Each of the multiple humidity control devices individually supplies dehumidified air into the interior of the facility, The above multiple humidity control devices are humidity control devices that use a single fan to perform dehumidification and regeneration, and can be controlled integratedly or individually.

20. In paragraph 1, A humidity control device using a single fan for performing dehumidification and regeneration, further comprising a recycling pipe that connects the humidity control device and the interior of the device to allow the internal air of the device to flow to the humidity control device to perform dehumidification.

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