Force-torque sensor and robot

Abstract

The present embodiment relates to a force-torque sensor comprising: a fixed unit; a movable unit, at least a part of which is arranged in the fixed unit; and a sensing unit for sensing movements of the movable unit with respect to the fixed unit. The fixed unit comprises a base and a sealing cover arranged on the base. The sealing cover comes in contact with the movable unit so as to seal the gap between the movable unit and the sealing cover.

Description

Force-torque sensors and robots

[0001] The present embodiment relates to a force-torque sensor.

[0002] Robots are used in a variety of fields, including industry, medicine, service, and other fields, and their scope of application is constantly expanding. To improve the performance and ensure safety of robotic systems, accurate monitoring and control of robot movements are essential. In particular, the forces and torques generated when a robot interacts with its environment or handles objects are crucial information.

[0003] Conventional robot sensor technology has primarily focused on detecting motion states such as position, velocity, and acceleration. However, forces and torques play a crucial role in providing information about robot interactions and the working environment. Force-torque sensors are essential for robots to safely grasp and manipulate objects and respond to their environment. Furthermore, these sensors can be utilized to improve robot efficiency and prevent malfunctions.

[0004] Conventional force-torque sensors cannot separate the applied external force into the forces of each axis. Instead, they receive input simultaneously and decompose the forces. This causes crosstalk noise to be mixed into the detection values ​​for each axis. In particular, noise increases when the Z-axis and torque forces are mixed.

[0005] (Patent Document 1) KR 10-2023-0123723 A

[0006] The present embodiment seeks to provide a force-torque sensor capable of measuring z-axis force and torque force separately.

[0007] Through this, we aim to improve robot control and work processes.

[0008] In addition, the first embodiment of the present invention seeks to provide a force-torque sensor including a structure that blocks the inflow of water into the interior of the sensor.

[0009] In addition, the second embodiment of the present invention seeks to provide a force-torque sensor that provides a reaction force to the movement of a moving part through a dome-shaped metal spring.

[0010] A force-torque sensor according to a first embodiment of the present invention comprises: a fixed part; a moving part at least partially disposed within the fixed part; and a sensing part for detecting movement of the moving part with respect to the fixed part, wherein the fixed part comprises a base and a sealing cover disposed on the base, and the sealing cover can contact the moving part to seal a space between the moving part and the sealing cover.

[0011] The sealing cover may include an outer portion coupled to the base, an inner portion contacting the moving portion, and a connecting portion connecting the outer portion and the inner portion, and the sealing cover may include a spring that presses the inner portion of the sealing cover toward the moving portion.

[0012] The above sealing cover may include a metal plate disposed within the outer portion of the above sealing cover.

[0013] The above sealing cover may include a first groove formed between the outer portion and the connecting portion in a direction perpendicular to the z-axis.

[0014] The above sealing cover may include a second groove formed between the inner portion and the connecting portion in the direction perpendicular to the z-axis.

[0015] The second groove may overlap the first groove in the direction perpendicular to the z-axis.

[0016] The above spring can be placed in the second groove of the above sealing cover.

[0017] The inner part of the above sealing cover surrounds the spring from the upper side, lower side and inner side, and the outer side of the spring can be opened.

[0018] The force-torque sensor includes a connecting member that secures the sealing cover to the base, the outer portion of the sealing cover includes a hole, and the connecting member can be screw-connected to the base through the hole of the sealing cover.

[0019] The moving part includes an inner carrier disposed within the base, an outer carrier disposed between the base and the inner carrier, and a lead coupled to the inner carrier and at least a portion of which is exposed outside the fixed part, and the sealing cover can be in contact with the lead.

[0020] The inner carrier and the outer carrier can move integrally in the z-axis direction with respect to the fixed portion, and the inner carrier can move in a yaw direction, which is a rotational direction centered on an x-axis perpendicular to the z-axis, a pitch direction, which is a rotational direction centered on a y-axis perpendicular to each of the z-axis and the x-axis, and a roll direction, which is a rotational direction centered on the z-axis, with respect to the outer carrier.

[0021] The sealing cover may include an outer portion coupled with the base, an inner portion in contact with the lead, and a connecting portion connecting the outer portion and the inner portion, and the force-torque sensor may include an upper elastic member including a first portion arranged on the outer portion of the sealing cover, a second portion coupled with the inner carrier, and a third portion connecting the first portion and the second portion and having elasticity.

[0022] The force-torque sensor may include a first ball disposed between the inner carrier and the outer carrier; and a second ball disposed between the outer carrier and the base.

[0023] The force-torque sensor may include a lower elastic member coupled to the external carrier and the fixed portion.

[0024] A robot according to the first embodiment of the present invention may include the force-torque sensor.

[0025] A force-torque sensor according to a second embodiment of the present invention comprises: a fixed part including a lower cover; a moving part disposed on the lower cover; an elastic body disposed between the fixed part and the moving part; and a sensing part for detecting movement of the moving part with respect to the fixed part, wherein the elastic body includes a first support part disposed on an upper surface of the lower cover, a second support part supporting a lower surface of the moving part, and a connecting part connecting the first support part and the second support part, and the connecting part of the elastic body can be disposed to be inclined with respect to the upper surface of the lower cover.

[0026] The above moving part includes an inner carrier and an outer carrier disposed between the inner carrier and the fixed part, and the second support part of the elastic body includes an inner support part that supports the inner carrier, an outer support part that supports the outer carrier, and a connecting support part that connects the inner support part and the outer support part, and at least a part of the connecting support part is disposed lower than the outer support part and the inner support part, so that a groove can be formed between the outer support part and the inner support part.

[0027] The groove of the above elastic body may have a circular ring shape when viewed from above.

[0028] The elastic body may include a protrusion that contacts the moving part.

[0029] The protrusions of the elastic body may include four protrusions that contact the inner carrier and three protrusions that contact the outer carrier.

[0030] The force-torque sensor may include a magnet disposed on the moving part; and a sensor disposed on the lower cover and detecting the magnet, and the elastic body may include a hole disposed between the magnet and the sensor.

[0031] The force-torque sensor may include a substrate on which the sensor is disposed, a portion of the substrate may be extended outwardly from the lower cover, and the elastic body may include a groove through which the substrate passes.

[0032] The above elastic body can be formed in the form of a bent metal plate.

[0033] When the moving part moves toward the lower cover, the elastic body can provide a repulsive force to the moving part.

[0034] The connecting portion of the elastic body can form an obtuse angle with the first support portion.

[0035] The force-torque sensor may include an elastic member coupled to the fixing member and the external carrier.

[0036] The above elastic member can overlap the above protrusion of the above elastic body in a direction perpendicular to the z-axis.

[0037] The above outer carrier may include a pad portion that is formed protrudingly on the lower surface of the outer carrier and comes into contact with the protrusion of the elastic body.

[0038] The moving part includes an inner carrier disposed within the fixed part, an outer carrier disposed between the fixed part and the inner carrier, and a lead coupled to the inner carrier and at least a portion of which is exposed outside the fixed part, a first ball is disposed between the inner carrier and the outer carrier, a second ball is disposed between the outer carrier and the fixed part, the inner carrier and the outer carrier move integrally in the z-axis direction with respect to the fixed part, and the inner carrier can move in a yaw direction, which is a rotational direction centered on an x-axis perpendicular to the z-axis, a pitch direction, which is a rotational direction centered on a y-axis perpendicular to each of the z-axis and the x-axis, and a roll direction, which is a rotational direction centered on the z-axis, with respect to the outer carrier.

[0039] A robot according to a second embodiment of the present invention may include the force-torque sensor.

[0040] The force-torque sensor according to this embodiment can measure Z-axis force and torque force separately. This minimizes the influence of noise due to crosstalk on the detection values ​​for each axis. In other words, the measurement accuracy of the force-torque sensor can be improved.

[0041] Furthermore, the first embodiment of the present invention can provide a force-torque sensor having a waterproof function.

[0042] Furthermore, in the force-torque sensor according to the second embodiment of the present invention, the number of parts can be minimized to improve assembly efficiency and reduce manufacturing costs.

[0043] FIG. 1 is a perspective view of a force-torque sensor according to a first embodiment of the present invention.

[0044] Figure 2 is a cross-sectional view taken along line AA of Figure 1.

[0045] Figure 3 is a cross-sectional view viewed from BB in Figure 1.

[0046] FIG. 4 is a drawing for explaining the effect of a sealing cover in a force-torque sensor according to the first embodiment of the present invention.

[0047] FIG. 5 is a cross-sectional view of a force-torque sensor according to a first embodiment of the present invention, cut in a direction perpendicular to the z-axis and viewed from above.

[0048] Figure 6 is an exploded perspective view of a force-torque sensor according to a first embodiment of the present invention.

[0049] Figure 7 is an exploded perspective view of a sealing cover of a force-torque sensor according to a first embodiment of the present invention.

[0050] Fig. 8 is an exploded perspective view of the bottom surface viewed from a different direction than Fig. 7.

[0051] Fig. 9 is a cross-sectional view of a sealing cover of a force-torque sensor according to a first embodiment of the present invention.

[0052] Figure 10 (a) is an exploded perspective view of the sealing cover and the connecting member, and (b) is a perspective view of the sealing cover and the connecting member when combined.

[0053] Fig. 11 is a perspective view of a force-torque sensor according to a first embodiment of the present invention, with components such as leads and substrates omitted.

[0054] Fig. 12 is a perspective view of Fig. 11 with the sealing cover and other components omitted.

[0055] Fig. 13 is a perspective view of Fig. 12 with the base omitted.

[0056] Fig. 14 is a bottom perspective view of the state of Fig. 11.

[0057] Fig. 15 is a bottom perspective view of Fig. 14 with the lower cover and other components omitted.

[0058] Fig. 16 is a bottom perspective view of Fig. 15 with the lower elastic member and base, etc., omitted.

[0059] Fig. 17 is a bottom perspective view of Fig. 16 with the external carrier and other components omitted.

[0060] Fig. 18 is a cross-sectional view of a force-torque sensor according to a modified example.

[0061] Figure 19 is an exploded perspective view of the sealing cover of the force-torque sensor according to a modified example.

[0062] FIG. 20 is a perspective view for explaining an operating method of a force-torque sensor according to a first embodiment of the present invention.

[0063] FIG. 21 is a drawing for explaining a case where an external force having a component in the yaw direction or pitch direction is applied to a force-torque sensor according to the first embodiment of the present invention.

[0064] FIG. 22 is a drawing for explaining changes when an external force having a roll direction component is applied to a force-torque sensor according to the first embodiment of the present invention.

[0065] FIG. 23 is a drawing for explaining a case where an external force having a component in the z-axis direction is applied to a force-torque sensor according to the first embodiment of the present invention.

[0066] Fig. 24 is a perspective view of a force-torque sensor according to a second embodiment of the present invention.

[0067] Figure 25 is a cross-sectional view taken along line AA of Figure 24.

[0068] Fig. 26 is a cross-sectional view viewed from BB of Fig. 24.

[0069] Figure 27 is a cross-sectional view of a force-torque sensor according to a second embodiment of the present invention, cut in a direction perpendicular to the z-axis and viewed from above.

[0070] Fig. 28 is an exploded perspective view of a force-torque sensor according to a second embodiment of the present invention.

[0071] Fig. 29 is a perspective view of an elastic body of a force-torque sensor according to a second embodiment of the present invention.

[0072] Fig. 30 is a bottom perspective view of an elastic body of a force-torque sensor according to a second embodiment of the present invention.

[0073] Fig. 31 is a cross-sectional view of an elastic body of a force-torque sensor according to a second embodiment of the present invention.

[0074] Fig. 32 is a perspective view of a force-torque sensor according to a second embodiment of the present invention, with components such as leads and substrates omitted.

[0075] Figure 33 is a perspective view of Figure 32 with the upper cover and other components omitted.

[0076] Figure 34 is a perspective view of Figure 33 with the base omitted.

[0077] Figure 35 is a perspective view of Figure 34 with the external carrier omitted.

[0078] Figure 36 is a bottom perspective view of the state of Figure 32.

[0079] Figure 37 is a bottom perspective view of Figure 36 with the lower cover and other components omitted.

[0080] Figure 38 is a bottom perspective view of Figure 37 with the elastic body omitted.

[0081] Figure 39 is a bottom perspective view of Figure 38 with the elastic member and base, etc., omitted.

[0082] Fig. 40 is a perspective view for explaining an operating method of a force-torque sensor according to a second embodiment of the present invention.

[0083] FIG. 41 is a drawing for explaining a case where an external force having a component in the yaw direction or pitch direction is applied to a force-torque sensor according to a second embodiment of the present invention.

[0084] Figure 42 is a drawing for explaining changes when an external force having a roll direction component is applied to a force-torque sensor according to a second embodiment of the present invention.

[0085] FIG. 43 is a drawing for explaining a case where an external force having a component in the z-axis direction is applied to a force-torque sensor according to a second embodiment of the present invention.

[0086] Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the attached drawings.

[0087] However, the technical idea of ​​the present invention is not limited to some of the embodiments described, but can be implemented in various different forms, and within the scope of the technical idea of ​​the present invention, one or more of the components between the embodiments can be selectively combined or substituted for use.

[0088] In addition, terms (including technical and scientific terms) used in the embodiments of the present invention may be interpreted as having a meaning that can be generally understood by a person of ordinary skill in the technical field to which the present invention belongs, unless explicitly and specifically defined and described, and terms that are commonly used, such as terms defined in a dictionary, may be interpreted in consideration of the contextual meaning of the relevant technology.

[0089] Additionally, the terms used in the embodiments of the present invention are intended to describe the embodiments and are not intended to limit the present invention.

[0090] In this specification, the singular may also include the plural unless specifically stated otherwise in the phrase, and when it is described as “A and / or at least one (or more) of B, C”, it may include one or more of all combinations that can be combined with A, B, C.

[0091] Additionally, in describing components of embodiments of the present invention, terms such as first, second, A, B, (a), (b), etc. may be used. These terms are only intended to distinguish the components from other components, and are not intended to limit the nature, order, or sequence of the components.

[0092] And, when a component is described as being 'connected', 'coupled', or 'connected' to another component, it may include not only cases where the component is 'connected', 'coupled', or 'connected' directly to the other component, but also cases where the component is 'connected', 'coupled', or 'connected' by another component between the component and the other component.

[0093] Additionally, when described as being formed or arranged "above" or "below" each component, "above" or "below" includes not only cases where the two components are in direct contact with each other, but also cases where one or more other components are formed or arranged between the two components. Furthermore, when expressed as "above" or "below," the meaning may include not only the upward direction but also the downward direction based on one component.

[0094] Hereinafter, one of the “internal carrier (210)” and the “external carrier (220)” may be referred to as the “first carrier” and the other may be referred to as the “second carrier”.

[0095] Hereinafter, one of the “upper elastic member (400)” and the “lower elastic member (500)” may be referred to as the “first elastic member” and the other may be referred to as the “second elastic member”.

[0096] Hereinafter, one of the “upper coupling member (710)”, the “lower coupling member (720)”, and the “outer coupling member (730)” may be referred to as the “first coupling member”, the other may be referred to as the “second coupling member”, and the other may be referred to as the “third coupling member”. Alternatively, each of the “upper coupling member (710)”, the “lower coupling member (720)”, and the “outer coupling member (730)” may be referred to as a “coupling member”.

[0097] Hereinafter, one of the “upper home (126)” and the “lower home (127)” may be referred to as the “first home” and the other may be referred to as the “second home”.

[0098] Hereinafter, one of the “inner part (410)”, “outer part (420)” and “connecting part (430)” of the upper elastic member (400) may be referred to as the “first part”, the other may be referred to as the “second part” and the other may be referred to as the “third part”.

[0099] Hereinafter, one of the “internal carrier (1210)” and the “external carrier (1220)” may be referred to as the “first carrier” and the other may be referred to as the “second carrier”.

[0100] Hereinafter, one of the “upper coupling member (1710)”, the “lower coupling member (1720)”, and the “outer coupling member (1730)” may be referred to as the “first coupling member”, the other may be referred to as the “second coupling member”, and the other may be referred to as the “third coupling member”. Alternatively, each of the “upper coupling member (1710)”, the “lower coupling member (1720)”, and the “outer coupling member (1730)” may be referred to as a “coupling member”.

[0101] Hereinafter, one of the z-axis, x-axis, and y-axis may be referred to as the “first axis,” the other as the “second axis,” and the other as the “third axis.”

[0102] Hereinafter, one of the roll direction, yaw direction, and pitch direction may be referred to as a “first circumferential direction,” another may be referred to as a “second circumferential direction,” and another may be referred to as a “third circumferential direction.” Alternatively, the roll direction, yaw direction, and pitch direction may be referred to as “first to third directions.”

[0103]

[0104] Hereinafter, the configuration of a force-torque sensor according to a first embodiment of the present invention will be described with reference to the drawings.

[0105] FIG. 1 is a perspective view of a force-torque sensor according to a first embodiment of the present invention. FIG. 2 is a cross-sectional view taken along line AA of FIG. 1. FIG. 3 is a cross-sectional view taken along line BB of FIG. 1. FIG. 4 is a drawing for explaining the effect of a sealing cover in a force-torque sensor according to a first embodiment of the present invention. FIG. 5 is a cross-sectional view of a force-torque sensor according to a first embodiment of the present invention when cut in a direction perpendicular to the z-axis and viewed from above. FIG. 6 is an exploded perspective view of a force-torque sensor according to a first embodiment of the present invention. FIG. 7 is an exploded perspective view of a sealing cover of a force-torque sensor according to a first embodiment of the present invention. FIG. 8 is a bottom exploded perspective view seen from a different direction from FIG. 7. FIG. 9 is a cross-sectional view of a sealing cover of a force-torque sensor according to a first embodiment of the present invention. Fig. 10 (a) is an exploded perspective view of the sealing cover and the connecting member, and (b) is a perspective view of the sealing cover and the connecting member combined. Fig. 11 is a perspective view of a force-torque sensor according to the first embodiment of the present invention, in which components such as a lead and a substrate are omitted. Fig. 12 is a perspective view of Fig. 11, in which components such as a sealing cover are omitted. Fig. 13 is a perspective view of Fig. 12, in which the base is omitted. Fig. 14 is a bottom perspective view of the state of Fig. 11. Fig. 15 is a bottom perspective view of Fig. 14, in which components such as a lower cover are omitted. Fig. 16 is a bottom perspective view of Fig. 15, in which components such as a lower elastic member and a base are omitted. Fig. 17 is a bottom perspective view of Fig. 16, in which components such as an external carrier are omitted.

[0106] A force-torque sensor can be used to detect and measure forces and torques applied to a robot in real time. A force-torque sensor can detect a force applied to the force-torque sensor. A force-torque sensor can measure a force applied to the force-torque sensor. A force-torque sensor can detect a torque applied to the force-torque sensor. A force-torque sensor can measure a torque applied to the force-torque sensor. A force-torque sensor can be a six-axis force-torque sensor. A force-torque sensor can detect and measure forces in six directions, namely the x-axis, y-axis, z-axis, yaw, pitch, and roll directions. A force-torque sensor can be a finger sensor of a robot.

[0107] The force-torque sensor may include a fixed part (100). The fixed part (100) is a concept distinct from the moving part (200) and may be a part that is relatively fixed when the moving part (200) moves.

[0108] The force-torque sensor may include a base (110). The fixing member (100) may include the base (110). The base (110) may be disposed on the lower cover (130). The base (110) may be disposed on the lower cover (130). The base (110) may be disposed on the sealing cover (120). The base (110) may be disposed under the sealing cover (120). The base (110) may be disposed between the lower cover (130) and the sealing cover (120).

[0109] The base (110) may include a groove (111). The groove (111) may be a ball rail. A second ball (620) may be placed in the groove (111). The groove (111) may extend in the z-axis direction. The second ball (620) may move along the groove (111) of the base (110).

[0110] The base (110) may include a groove (112). The groove (112) may be formed on the inner surface of the fixing portion (100). The groove (112) may be formed on the inner surface of the base (110). The groove (112) may be formed concavely on the inner surface of the fixing portion (100). The groove (112) may be formed concavely on the inner surface of the base (110). A protrusion (226) of an external carrier (220) may be arranged in the groove (112) of the fixing portion (100).

[0111] In the first embodiment of the present invention, the rotation of the external carrier (220) with respect to the base (110) can be prevented through the shape of the fit between the groove (112) of the base (110) and the protrusion (226) of the external carrier (220). When the external carrier (220) rotates around the z-axis with respect to the fixed part (100), the protrusion (226) of the external carrier (220) can come into contact with the groove (112) of the fixed part (100).

[0112] The base (110) may include a groove (113). An outer coupling member (730) may be coupled to the groove (113). Screw threads may be formed on the inner surface of the groove (113) for coupling with the outer coupling member (730).

[0113] The force-torque sensor may include a sealing cover (120). The fixing member (100) may include the sealing cover (120). The sealing cover (120) may be disposed on the base (110). The sealing cover (120) may be coupled to the base (110). The sealing cover (120) may be coupled to the upper surface of the base (110). The sealing cover (120) may be fixed to the base (110). The sealing cover (120) may be disposed between the base (110) and the lid (230).

[0114] The sealing cover (120) can seal the space between the moving part (200) and the sealing cover (120). The sealing cover (120) can be in contact with the moving part (200). The sealing cover (120) can be in contact with the lid (230). The sealing cover (120) can be formed of rubber. The sealing cover (120) can be a sealing member.

[0115] Water flowing between the lid (230) and the sealing cover (120) can be blocked by the sealing cover (120) (see a in FIG. 4). The sealing cover (120) is pressed toward the lid (230) by the spring (125), thereby blocking water flowing between the lid (230) and the sealing cover (120).

[0116] Water flowing between the sealing cover (120) and the base (110) can be blocked by the sealing cover (120) (see b in FIG. 4). Since the sealing cover (120) is pressed toward the base (110) by the outer connecting member (730), water flowing between the sealing cover (120) and the base (110) can be blocked.

[0117] The sealing cover (120) may include an inner portion (121). The inner portion (121) may be in contact with the moving portion (200). The inner portion (121) may be disposed on the moving portion (200). The inner portion (121) may be fixed to the moving portion (200). The inner portion (121) may be coupled to the moving portion (200). The inner portion (121) may be pressed toward the moving portion (200). The inner portion (121) may be in contact with the lead (230). The inner portion (121) may be disposed on the lead (230). The inner portion (121) may be fixed to the lead (230). The inner portion (121) may be coupled to the lead (230). The inner portion (121) may be pressed toward the lead (230).

[0118] The sealing cover (120) may include an outer portion (122). The outer portion (122) may be coupled to the base (110). The outer portion (122) may be placed on the base (110). The outer portion (122) may be fixed to the base (110). The outer portion (122) may be in contact with the base (110). The outer portion (122) may be pressed toward the base (110).

[0119] The sealing cover (120) may include a connecting portion (123). The connecting portion (123) may connect the outer portion (122) and the inner portion (121). The connecting portion (123) may be elastic. The connecting portion (123) may elastically connect the outer portion (122) and the inner portion (121). The connecting portion (123) may include a bent shape. The thickness of the connecting portion (123) may be smaller than the thickness of the outer portion (122).

[0120] The sealing cover (120) may include a plate (124). The plate (124) may be formed of metal. The plate (124) may be disposed within the outer portion (122) of the sealing cover (120). The plate (124) may be inserted into the outer portion (122) of the sealing cover (120) by an insert injection molding method. As a variation, the plate (124) may be attached to the lower surface of the sealing cover (120). The plate (124) may be disposed on the lower surface of the sealing cover (120). The plate (124) may be coupled to the lower surface of the sealing cover (120). The plate (124) may be fixed to the lower surface of the sealing cover (120) using a screw as a connecting member. The plate (124) may maintain the shape of the sealing cover (120). The plate (124) can reinforce the strength of the sealing cover (120). The sealing cover (120) can include a hole passing through the outer connecting member (730).

[0121] The sealing cover (120) may include a spring (125). The spring (125) may press the inner side (121) of the sealing cover (120) toward the moving part (200). The spring (125) may be placed in the lower groove (127) of the sealing cover (120). The spring (125) may have elasticity. The spring (125) may be an elastic member. The spring (125) may be a coil spring. The spring (125) may be formed in a circular shape. The spring (125) may have elasticity applied toward the center of the circle. The spring (125) may press the inner side (121) of the sealing cover (120) toward the center. The spring (125) may have a compressive force toward the center. The compressive force of the spring (125) may cause the sealing cover (120) to come into contact with the lid (230). Through this, even if the sealing cover (120) is worn due to the movement of the lead (230), the spring (125) can maintain the contact force between the lead (230) and the sealing cover (120).

[0122] The inner part (121) of the sealing cover (120) can wrap the spring (125) from the upper, lower, and inner sides. At this time, the outer side of the spring (125) can be opened.

[0123] The sealing cover (120) may include an upper groove (126). The upper groove (126) may be formed between the outer portion (122) and the connecting portion (123) in a direction perpendicular to the z-axis. The upper groove (126) may be formed on the upper surface of the sealing cover (120). The upper groove (126) may form a separation space between the outer portion (122) and the connecting portion (123). Through this, when the lead (230) moves, the connecting portion (123) may move toward the outer portion (122).

[0124] The sealing cover (120) may include a lower groove (127). The lower groove (127) may be formed between the inner portion (121) and the connecting portion (123) in a direction perpendicular to the z-axis. The lower groove (127) may be formed on the lower surface of the sealing cover (120). The lower groove (127) may form a separation space between the inner portion (121) and the connecting portion (123). Through this, when the lead (230) moves, the inner portion (121) may move toward the connecting portion (123). The lower groove (127) may overlap with the upper groove (126) in a direction perpendicular to the z-axis.

[0125] The sealing cover (120) may include a hole (128). The outer portion (122) of the sealing cover (120) may include a hole (128). The hole (128) may be a screw hole. An outer coupling member (730) may be coupled to the hole (128). The outer coupling member (730) may be arranged in the hole (128). The outer coupling member (730) may pass through the hole (128). The outer coupling member (730) may pass through the sealing cover (120) through the hole (128).

[0126] The force-torque sensor may include a lower cover (130). The fixing member (100) may include the lower cover (130). The lower cover (130) may form a bottom portion of the force-torque sensor. The lower cover (130) may be positioned opposite the lead (230). The lower cover (130) may be positioned below the base (110). The lower cover (130) may be coupled to a lower surface of the base (110). The lower cover (130) may be coupled to the base (110). The lower cover (130) may include a groove through which the substrate (140) passes.

[0127] The force-torque sensor may include a substrate (140). The fixing member (100) may include the substrate (140). Sensors may be arranged on the substrate (140). First to third sensors (340, 350, 360) may be arranged on the substrate (140). The substrate (140) may be electrically connected to the first to third sensors (340, 350, 360). The substrate (140) may output the electrical signals detected by the first to third sensors (340, 350, 360) to the outside of the force-torque sensor.

[0128] In the first embodiment of the present invention, a sealing member may be placed in the space of the substrate (140) extended between the base (110) and the lower cover (130). The sealing member may be placed between the substrate (140) and the base (110) and between the substrate (140) and the lower cover (130). Through this, the space between the substrate (140) and the base (110) and between the substrate (140) and the lower cover (130) may be sealed.

[0129] The force-torque sensor may include a plate (150). The fixing member (100) may include the plate (150). The plate (150) may be placed on the substrate (140). The plate (150) may be a reinforcing plate. The plate (150) may be placed on the lower surface of the substrate (140). The plate (150) may reinforce the strength of the substrate (140) so that the first to third sensors (340, 350, 360) are placed in the correct positions.

[0130] The force-torque sensor may include a moving part (200). The moving part (200) may be disposed within the fixed part (100). The moving part (200) may be disposed on the fixed part (100). The moving part (200) may move relative to the fixed part (100). When an external force is applied, the moving part (200) may move relative to the fixed part (100). At least a portion of the moving part (200) may be disposed within the fixed part (100). A portion of the moving part (200) may be exposed outside the fixed part (100).

[0131] The force-torque sensor may include an inner carrier (210). The moving part (200) may include the inner carrier (210). The inner carrier (210) may be disposed within the fixed part (100). The inner carrier (210) may be disposed within the outer carrier (220). The inner carrier (210) may be disposed on the fixed part (100). The inner carrier (210) may be disposed within the base (110). The inner carrier (210) may include a curved surface. A first ball (610) may be disposed on the curved surface of the inner carrier (210). The inner carrier (210) may be formed in a spherical shape at least partially. The inner carrier (210) may be formed in a spherical shape at least partially so that the center of rotation does not change and remains constant. Through this, the inner carrier (210) moves as intended by the designer, so that the occurrence of crosstalk can be minimized.

[0132] The inner carrier (210) may include a groove (212). The groove (212) may have a screw thread. The groove (212) may be formed on the upper surface of the inner carrier (210). The groove (212) may be formed on the outer peripheral surface of the inner carrier (210). An upper coupling member (710) may be coupled to the groove (212). Alternatively, the groove (212) may be formed alone.

[0133] The inner carrier (210) may include a protrusion (213). The protrusion (213) may be a stopper. The protrusion (213) may be formed on the outer surface of the inner carrier (210). The protrusion (213) may protrude outward from the inner carrier (210). The protrusion (213) may be arranged in a groove (225) of the outer carrier (220).

[0134] The force-torque sensor may include an outer carrier (220). The moving part (200) may include the outer carrier (220). The outer carrier (220) may be disposed between the inner carrier (210) and the fixed part (100). The outer carrier (220) may be disposed on the outside of the inner carrier (210). The outer carrier (220) may be disposed within the fixed part (100). The outer carrier (220) may be disposed on the fixed part (100). The outer carrier (220) may be disposed within the base (110).

[0135] The outer carrier (220) may include a first groove (221). The first groove (221) may be a ball rail. A first ball (610) may be placed in the first groove (221). The first ball (610) may move along the first groove (221). Alternatively, the first ball (610) may rotate while at least a portion of the first ball (610) is accommodated in the first groove (221).

[0136] The outer carrier (220) may include a second groove (222). The second groove (222) may be a ball rail. A second ball (620) may be placed in the second groove (222). The second ball (620) may move along the second groove (222). The second groove (222) may extend in the z-axis direction.

[0137] The outer carrier (220) may include a groove (225). The groove (225) may be formed on the inner surface of the outer carrier (220). The groove (225) may be formed concavely on the inner surface of the outer carrier (220). The protrusion (213) of the inner carrier (210) may be arranged in the groove (225) of the outer carrier (220).

[0138] The groove (225) can limit the movement of the inner carrier (210) within a preset range. When the inner carrier (210) rotates about the z-axis by a preset angle or more with respect to the outer carrier (220), the protrusion (213) of the inner carrier (210) can come into contact with the groove (225) of the outer carrier (220).

[0139] The outer carrier (220) may include a protrusion (226). The protrusion (226) may be a stopper. The protrusion (226) may be formed on an outer surface of the outer carrier (220). The protrusion (226) may protrude outward from the outer carrier (220). The protrusion (226) may be positioned in a groove (112) of the fixing member (100).

[0140] The force-torque sensor may include a lead (230). The moving part (200) may include the lead (230). The lead (230) may be connected to the internal carrier (210). At least a portion of the lead (230) may be disposed on the base (110). At least a portion of the lead (230) may be disposed on the sealing cover (120). At least a portion of the lead (230) may be disposed on the fixed part (100). At least a portion of the lead (230) may protrude beyond the fixed part (100). An external force may be applied to at least a portion of the lead (230) protruding beyond the fixed part (100). The external force may be applied to the lead (230). The lead (230) may be moved by the external force. The lead (230) may be coupled to the internal carrier (210). The lead (230) may be disposed on the internal carrier (210). The lead (230) may be placed on the inner carrier (210). The lead (230) may move integrally with the inner carrier (210). The lead (230) may be fixed to the inner carrier (210). At least a portion of the lead (230) may be exposed outside the fixing member (100).

[0141] When a force is applied to the lead (230) in the direction of the first axis, the direction of the second axis, the direction of rotation about the first axis, the direction of rotation about the second axis, and the direction of rotation about the third axis, the internal carrier (210) can move with respect to the external carrier (220). When a force is applied to the lead (230) in the direction of the third axis, the internal carrier (210) and the external carrier (220) can move together with respect to the fixed part (100). At this time, the first axis may be the x-axis, the second axis may be the y-axis, and the third axis may be the z-axis.

[0142] The force-torque sensor may include a detection unit (300). The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100). The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the x-axis direction. The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the y-axis direction. The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the yaw direction. The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the pitch direction. The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the roll direction. The detection unit (300) can detect the z-axis movement of the moving unit (200) with respect to the fixed unit (100).

[0143] The force-torque sensor may include a first magnet (310). The sensing unit (300) may include the first magnet (310). The first magnet (310) may be disposed on the inner carrier (210). The first magnet (310) may be disposed on the lower surface of the inner carrier (210). The first magnet (310) may be disposed on the lower surface of the inner carrier (210).

[0144] The force-torque sensor may include a second magnet (320). The sensing unit (300) may include the second magnet (320). The second magnet (320) may be disposed on the inner carrier (210). The second magnet (320) may be disposed on the lower surface of the inner carrier (210). The second magnet (320) may be disposed on the lower surface of the inner carrier (210).

[0145] The force-torque sensor may include a third magnet (330). The sensing unit (300) may include the third magnet (330). The third magnet (330) may be disposed on the external carrier (220). The third magnet (330) may be disposed on the lower surface of the external carrier (220). The third magnet (330) may be disposed on the lower surface of the external carrier (220).

[0146] The force-torque sensor may include a first sensor (340). The detection unit (300) may include the first sensor (340). The first sensor (340) may be disposed on the fixing unit (100). The first sensor (340) may be disposed on the substrate (140). The first sensor (340) may be disposed on the lower cover (130). The first sensor (340) may be disposed on the base (110). The first sensor (340) may detect the first magnet (310). The first sensor (340) may detect the magnetic force of the first magnet (310). The first sensor (340) may detect the x-axis direction movement of the lead (230). The first sensor (340) may detect the pitch direction tilt of the lead (230). The first sensor (340) may be a Hall sensor. The first sensor (340) may be a TMR sensor.

[0147] The force-torque sensor may include a second sensor (350). The detection unit (300) may include the second sensor (350). The second sensor (350) may be disposed on the fixing unit (100). The second sensor (350) may be disposed on the substrate (140). The second sensor (350) may be disposed on the lower cover (130). The second sensor (350) may be disposed on the base (110). The second sensor (350) may detect the second magnet (320). The second sensor (350) may detect the magnetic force of the second magnet (320). The second sensor (350) may detect the y-axis direction movement of the lead (230). The second sensor (350) may detect the yaw direction tilt of the lead (230). The second sensor (350) may be a Hall sensor. The second sensor (350) may be a TMR sensor.

[0148] However, conversely, the first sensor (340) can detect movement in the y-axis direction and tilt in the yaw direction, and the second sensor (350) can detect movement in the x-axis direction and tilt in the pitch direction.

[0149] In the above, it has been described that the first sensor (340) detects the x-axis movement and pitch-direction tilt of the lead (230), but more accurate sensing can be achieved together with the detection value of the second sensor (350). When the second sensor (350) detects the y-axis movement and yaw-direction tilt of the lead (230), more accurate sensing can be achieved together with the detection value of the first sensor (340).

[0150] The first sensor (340) and the second sensor (350) may together detect roll direction tilt or movement. Alternatively, at least one of the first sensor (340) and the second sensor (350) may detect roll direction tilt or movement.

[0151] The force-torque sensor may include a third sensor (360). The detection unit (300) may include the third sensor (360). The third sensor (360) may be disposed on the fixing unit (100). The third sensor (360) may be disposed on the substrate (140). The third sensor (360) may be disposed on the lower cover (130). The third sensor (360) may be disposed on the base (110). The third sensor (360) may detect the third magnet (330). The third sensor (360) may detect the magnetic force of the third magnet (330). The third sensor (360) may be a Hall sensor. The third sensor (360) may be a TMR sensor.

[0152] In another embodiment, the force-torque sensor may include a capacitive sensing sensor. That is, the force-torque sensor may include a capacitive sensor. The force-torque sensor may include a first electrode and a second electrode. The force-torque sensor may include a control unit that applies power to the first electrode, and a sensing unit that measures a change in capacitance between the first electrode and the second electrode. At this time, the second electrode may be grounded. The first electrode may be disposed on the fixing unit (100). The second electrode may be disposed on at least one of the internal carrier (210) and the external carrier (220). When the internal carrier (210) and / or the external carrier (220) moves, the change in capacitance between the first electrode and the second electrode may be measured to calculate the amount of movement of the internal carrier (210) and / or the external carrier (220).

[0153] The force-torque sensor may include an elastic member. The elastic member may restore the moving part (200) to its initial position when the external force is removed.

[0154] The force-torque sensor may include a lower elastic member (500). The lower elastic member (500) may provide a restoring force. The lower elastic member (500) may be coupled to the fixed member (100) and the movable member (200). The lower elastic member (500) may be coupled to a lower surface of the base (110) and a lower surface of the external carrier (220). The lower elastic member (500) may be coupled to a lower surface of the base (110) and a lower surface of the external carrier (220). The lower elastic member (500) may connect the base (110) and the external carrier (220). The lower elastic member (500) may elastically connect the base (110) and the external carrier (220). The lower elastic member (500) may movably support the external carrier (220) relative to the base (110). The lower elastic member (500) may be placed on the opposite side of the upper elastic member (400) of the modified example with respect to the moving member (200). The lower elastic member (500) may be coupled to the external carrier (220) and the fixed member (100).

[0155] The lower elastic member (500) may include an inner portion (510). The inner portion (510) may be coupled to an outer carrier (220). The inner portion (510) may be disposed on the outer carrier (220). The inner portion (510) may be disposed on a lower surface of the outer carrier (220). The inner portion (510) may be fixed to the outer carrier (220). The inner portion (510) may be bonded to the outer carrier (220) with an adhesive. The inner portion (510) may move integrally with the outer carrier (220).

[0156] The lower elastic member (500) may include an outer portion (520). The outer portion (520) may be coupled to the fixing portion (100). The outer portion (520) may be coupled to the base (110). The outer portion (520) may be coupled to the lower cover (130). The outer portion (520) may be disposed on the base (110). The outer portion (520) may be disposed on the lower surface of the base (110). The outer portion (520) may be disposed on the lower cover (130). The outer portion (520) may be fixed to the base (110). The outer portion (520) may be fixed to the base (110) via the lower coupling member (720).

[0157] The lower elastic member (500) may include a connecting portion (530). The connecting portion (530) may connect the inner portion (510) and the outer portion (520). The connecting portion (530) may have elasticity. The connecting portion (530) may include a bent portion. The connecting portion (530) may include a bent shape. The connecting portion (530) may include a shape that is bent multiple times. The connecting portion (530) may include a shape that is bent at least three times. The connecting portion (530) may be deformable. The connecting portion (530) may be restored to its original state after being deformed. The connecting portion (530) may include a zigzag shape.

[0158] The connecting portion (530) may include a plurality of connecting portions. The connecting portion (530) may include four connecting portions. The connecting portion (530) may include first to fourth connecting portions. The connecting portion (530) may include a first connecting portion and a second connecting portion which are positioned on opposite sides with respect to the inner portion (510), and a third connecting portion and a fourth connecting portion which are positioned on opposite sides with respect to the inner portion (510). The bent shape of the connecting portion (530) may be symmetrical in the rotational direction.

[0159] The force-torque sensor may include a guide member. The guide member may guide the movement of the moving part (200). The guide member may guide the movement of the moving part (200) relative to the fixed part (100). The guide member may guide the movement of the inner carrier (210) relative to the outer carrier (220).

[0160] The force-torque sensor may include a first ball (610). The guide member may include the first ball (610). The first ball (610) may be disposed between the inner carrier (210) and the outer carrier (220). The first ball (610) may guide movement of the inner carrier (210) with respect to the outer carrier (220). The inner carrier (210) may move in the yaw direction, the pitch direction, and the roll direction with respect to the outer carrier (220) by the first ball (610). However, when the inner carrier (210) is to move in the z-axis direction, the first ball (610) and the outer carrier (220) may move together.

[0161] The force-torque sensor may include a second ball (620). The guide member may include the second ball (620). The second ball (620) may be disposed between the outer carrier (220) and the fixing member (100). The second ball (620) may be disposed between the outer carrier (220) and the base (110). The second ball (620) may guide movement of the outer carrier (220) with respect to the base (110). The outer carrier (220) may move in the z-axis direction with respect to the base (110) by the second ball (620). At this time, the outer carrier (220) may move together with the inner carrier (210) and the lead (230).

[0162] The force-torque sensor may include a coupling member. The coupling member may couple two or more different members together. For example, the coupling member may be a screw. The coupling member may be a bolt.

[0163] The force-torque sensor may include an upper coupling member (710). The upper coupling member (710) may be coupled to a lead (230) and an inner carrier (210). The upper coupling member (710) may secure the lead (230) to the inner carrier (210).

[0164] The force-torque sensor may include a sealing member (715). The sealing member (715) may be disposed between the upper coupling member (710) and the lid (230). The sealing member (715) may seal between the upper coupling member (710) and the lid (230). The sealing member (715) may prevent water from flowing between the upper coupling member (710) and the lid (230). The sealing member (715) may be disposed to surround the outer circumferential surface of the upper coupling member (710).

[0165] The force-torque sensor may include a lower coupling member (720). The lower coupling member (720) may couple the fixing member (100) and the lower elastic member (500). The lower coupling member (720) may fix the lower cover (130) to the base (110). The lower coupling member (720) may fix the outer portion (520) of the lower elastic member (500) between the base (110) and the lower cover (130). The lower coupling member (720) may penetrate the outer portion (520) of the lower elastic member (500).

[0166] The force-torque sensor may include an outer coupling member (730). The outer coupling member (730) may secure the sealing cover (120) to the base (110). The outer coupling member (730) may include screw threads. The outer coupling member (730) may be screw-coupled to the base (110) through the sealing cover (120). The outer coupling member (730) may be screw-coupled to the base (110) through a hole (128) of the sealing cover (120).

[0167]

[0168] Below, the configuration of a force-torque sensor according to a modified example is described with reference to the drawings.

[0169] Fig. 18 is a cross-sectional view of a force-torque sensor according to a modified example. Fig. 19 is an exploded perspective view of a sealing cover of a force-torque sensor according to a modified example.

[0170] A force-torque sensor according to an embodiment may include an upper elastic member (400). The upper elastic member (400) may provide a restoring force. The upper elastic member (400) may be coupled to a moving part (200). The upper elastic member (400) may be coupled to an inner carrier (210) and a sealing cover (120). The upper elastic member (400) may connect the inner carrier (210) and the sealing cover (120). The upper elastic member (400) may elastically connect the inner carrier (210) and the sealing cover (120). The upper elastic member (400) may movably support the inner carrier (210) relative to the sealing cover (120).

[0171] The upper elastic member (400) may include an inner portion (410). The inner portion (410) may be coupled with the inner carrier (210). The inner portion (410) may be disposed on the inner carrier (210). The inner portion (410) may be disposed on an upper surface of the inner carrier (210). The inner portion (410) may be fixed to the inner carrier (210). The inner portion (410) may be adhesively bonded to the inner carrier (210). The inner portion (410) may be movable as one piece with the inner carrier (210). At least a portion of the upper elastic member (400) may be disposed between the lead (230) and the inner carrier (210).

[0172] The upper elastic member (400) may include an outer portion (420). The outer portion (420) may be disposed on the sealing cover (120). The outer portion (420) may be disposed within the sealing cover (120). The outer portion (420) may be insert-molded within the sealing cover (120). The outer portion (420) may be disposed within the outer portion (122) of the sealing cover (120). The outer portion (420) may be coupled to the sealing cover (120). The outer portion (420) may be disposed on the sealing cover (120). The outer portion (420) may be fixed to the sealing cover (120). Alternatively, the outer portion (420) may be attached to the lower surface of the outer portion (122) of the sealing cover (120). The outer portion (420) may be placed on the lower surface of the outer portion (122) of the sealing cover (120). The outer portion (420) may be coupled to the lower surface of the outer portion (122) of the sealing cover (120). The outer portion (420) may be fixed to the lower surface of the outer portion (122) of the sealing cover (120).

[0173] The upper elastic member (400) may include a connecting portion (430). The connecting portion (430) may connect the inner portion (410) and the outer portion (420). The connecting portion (430) may have elasticity. The connecting portion (430) may include a bent portion. The connecting portion (430) may include a bent shape. The connecting portion (430) may include a shape that is bent multiple times. The connecting portion (430) may include a shape that is bent at least three times. The connecting portion (430) may be deformable. The connecting portion (430) may be restored to its original state after being deformed. The connecting portion (430) may include a zigzag shape.

[0174] The connecting portion (430) may include a plurality of connecting portions. The connecting portion (430) may include four connecting portions. The connecting portion (430) may include first to fourth connecting portions. The connecting portion (430) may include a first connecting portion and a second connecting portion which are positioned on opposite sides with respect to the inner portion (410), and a third connecting portion and a fourth connecting portion which are positioned on opposite sides with respect to the inner portion (410). The bent shape of the connecting portion (430) may be symmetrical in the rotational direction.

[0175] In a variation, the upper coupling member (710) can secure the inner portion (410) of the upper elastic member (400) to the inner carrier (210).

[0176]

[0177] Hereinafter, the operation of a force-torque sensor according to a first embodiment of the present invention will be described with reference to the drawings.

[0178] Fig. 20 is a perspective view for explaining an operating method of a force-torque sensor according to a first embodiment of the present invention. Fig. 21 is a diagram for explaining a case where an external force having a yaw or pitch direction component is applied to a force-torque sensor according to a first embodiment of the present invention. Fig. 22 is a diagram for explaining a change when an external force having a roll direction component is applied to a force-torque sensor according to a first embodiment of the present invention. Fig. 23 is a diagram for explaining a case where an external force having a z-axis direction component is applied to a force-torque sensor according to a first embodiment of the present invention.

[0179] When an external force having a component in at least one of the y-axis direction and the yaw direction is applied to the lead (230) of the force-torque sensor according to the first embodiment of the present invention, the lead (230) can rotate or tilt around the x-axis (see yaw in FIG. 20). At this time, the lead (230) can move integrally with the internal carrier (210) (see A, B in FIG. 21). Meanwhile, since the fixed part (100) is maintained in a fixed state, the second sensor (350) arranged on the fixed part (100) detects the second magnet (320) arranged on the internal carrier (210), so that the amount of movement of the lead (230) and the internal carrier (210) can be measured. Through this, the y-axis direction component and the yaw direction component of the external force applied to the lead (230) can be measured.

[0180] When an external force having a component in at least one of the x-axis direction and the pitch direction is applied to the lead (230) of the force-torque sensor according to the first embodiment of the present invention, the lead (230) can rotate or tilt around the y-axis (see pitch in FIG. 20). At this time, the lead (230) can move integrally with the internal carrier (210). Meanwhile, since the fixed part (100) is maintained in a fixed state, the first sensor (340) arranged on the fixed part (100) detects the first magnet (310) arranged on the internal carrier (210), so that the amount of movement of the lead (230) and the internal carrier (210) can be measured. Through this, the x-axis direction component and the pitch direction component of the external force applied to the lead (230) can be measured.

[0181] When an external force having a roll direction component is applied to the lead (230) of the force-torque sensor according to the first embodiment of the present invention, the lead (230) can rotate or tilt around the z-axis (see roll in FIG. 20). The lead (230) can move with respect to the fixed part (100) as an integral part with the internal carrier (210) (see a, b in FIG. 22). At this time, the first sensor (340) arranged on the fixed part (100) detects the first magnet (310) arranged on the internal carrier (210), and the second sensor (250) detects the second magnet (320), so that the amount of movement of the lead (230) and the internal carrier (210) can be measured. Through this, the force of the roll direction component of the external force applied to the lead (230) can be measured.

[0182] When an external force having a z-axis component is applied to the lead (230) of the force-torque sensor according to the first embodiment of the present invention, the lead (230) can move along the z-axis (see Fz in FIG. 20). The lead (230) can move with respect to the fixed part (100) together with the internal carrier (210) and the external carrier (220) (see A and B in FIG. 23). At this time, the third sensor (360) arranged on the fixed part (100) detects the third magnet (330) arranged on the external carrier (220), so that the amount of movement of the lead (230), the internal carrier (210), and the external carrier (220) can be measured. Through this, the force of the z-axis component of the external force applied to the lead (230) can be measured.

[0183]

[0184] Below, the configuration of a robot according to the first embodiment of the present invention is described.

[0185] A robot may include a body. The robot may include an arm member connected to the body. The arm member of the robot may include a gripping portion. The gripping portion may include, for example, a finger shape. The force-torque sensor of the first embodiment of the present invention may be disposed on the gripping portion of the arm member. The arm member of the robot may include a joint. The force-torque sensor of the first embodiment of the present invention may be disposed on a joint of the arm member.

[0186]

[0187] Below, the configuration of a force-torque sensor according to a second embodiment of the present invention is described with reference to the drawings.

[0188] FIG. 24 is a perspective view of a force-torque sensor according to a second embodiment of the present invention. FIG. 25 is a cross-sectional view taken along line AA of FIG. 24. FIG. 26 is a cross-sectional view taken along line BB of FIG. 24. FIG. 27 is a cross-sectional view taken along line AA of FIG. 24 and viewed from above of a force-torque sensor according to a second embodiment of the present invention. FIG. 28 is an exploded perspective view of a force-torque sensor according to a second embodiment of the present invention. FIG. 29 is a perspective view of an elastic body of a force-torque sensor according to a second embodiment of the present invention. FIG. 30 is a bottom perspective view of an elastic body of a force-torque sensor according to a second embodiment of the present invention. FIG. 31 is a cross-sectional view of an elastic body of a force-torque sensor according to a second embodiment of the present invention. FIG. 32 is a perspective view of a force-torque sensor according to a second embodiment of the present invention in which components such as leads and a substrate are omitted. Fig. 33 is a perspective view of Fig. 32 with the upper cover and other components omitted. Fig. 34 is a perspective view of Fig. 33 with the base omitted. Fig. 35 is a perspective view of Fig. 34 with the external carrier omitted. Fig. 36 is a bottom perspective view of Fig. 32. Fig. 37 is a bottom perspective view of Fig. 36 with the lower cover and other components omitted. Fig. 38 is a bottom perspective view of Fig. 37 with the elastic body omitted. Fig. 39 is a bottom perspective view of Fig. 38 with the elastic member and base and other components omitted.

[0189] A force-torque sensor can be used to detect and measure forces and torques applied to a robot in real time. A force-torque sensor can detect a force applied to the force-torque sensor. A force-torque sensor can measure a force applied to the force-torque sensor. A force-torque sensor can detect a torque applied to the force-torque sensor. A force-torque sensor can measure a torque applied to the force-torque sensor. A force-torque sensor can be a six-axis force-torque sensor. A force-torque sensor can detect and measure forces in six directions, namely the x-axis, y-axis, z-axis, yaw, pitch, and roll directions. A force-torque sensor can be a finger sensor of a robot.

[0190] The force-torque sensor may include a fixed part (1100). The fixed part (1100) is a concept distinct from the moving part (1200) and may be a part that is relatively fixed when the moving part (1200) moves.

[0191] The force-torque sensor may include a base (1110). The fixing member (1100) may include the base (1110). The base (1110) may be disposed on the lower cover (1130). The base (1110) may be disposed on the lower cover (1130). The base (1110) may be disposed on the upper cover (1120). The base (1110) may be disposed under the upper cover (1120). The base (1110) may be disposed between the lower cover (1130) and the upper cover (1120).

[0192] The base (1110) may include a groove (1111). The groove (1111) may be a ball rail. A second ball (1620) may be placed in the groove (1111). The groove (1111) may extend in the z-axis direction. The second ball (1620) may move along the groove (1111) of the base (1110).

[0193] The base (1110) may include a groove (1112). The groove (1112) may be formed on the inner surface of the fixing portion (1100). The groove (1112) may be formed on the inner surface of the base (1110). The groove (1112) may be formed concavely on the inner surface of the fixing portion (1100). The groove (1112) may be formed concavely on the inner surface of the base (1110). A protrusion (1226) of an external carrier (1220) may be arranged in the groove (1112) of the fixing portion (1100).

[0194] In the second embodiment of the present invention, the rotation of the external carrier (1220) with respect to the base (1110) can be prevented through the shape of the fit between the groove (1112) of the base (1110) and the protrusion (1226) of the external carrier (1220). When the external carrier (1220) rotates around the z-axis with respect to the fixed part (1100), the protrusion (1226) of the external carrier (1220) can come into contact with the groove (1112) of the fixed part (1100).

[0195] The base (1110) may include a groove (1113). An outer coupling member (1730) may be coupled to the groove (1113). Screw threads may be formed on the inner surface of the groove (1113) for coupling with the outer coupling member (1730).

[0196] The force-torque sensor may include an upper cover (1120). The fixing member (1100) may include the upper cover (1120). The upper cover (1120) may be disposed on the base (1110). The upper cover (1120) may be disposed on the base (1110). The upper cover (1120) may be coupled to the base (1110). The upper cover (1120) may be coupled to an upper surface of the base (1110). The upper cover (1120) may be fixed to the base (1110). The upper cover (1120) may be disposed between the base (1110) and the lid (1230).

[0197] The force-torque sensor may include a lower cover (1130). The fixing member (1100) may include the lower cover (1130). The lower cover (1130) may form a bottom portion of the force-torque sensor. The lower cover (1130) may be positioned opposite the lead (1230). The lower cover (1130) may be positioned below the base (1110). The lower cover (1130) may be coupled to a lower surface of the base (1110). The lower cover (1130) may be coupled to the base (1110). The lower cover (1130) may include a groove through which the substrate (1140) passes.

[0198] The force-torque sensor may include a substrate (1140). The fixing member (1100) may include the substrate (1140). A sensor may be disposed on the substrate (1140). First to third sensors (1340, 1350, 1360) may be disposed on the substrate (1140). The substrate (1140) may be electrically connected to the first to third sensors (1340, 1350, 1360). The substrate (1140) may output an electrical signal detected by the first to third sensors (1340, 1350, 1360) to the outside of the force-torque sensor. A portion of the substrate (1140) may be extended outside the lower cover (1130).

[0199] In the second embodiment of the present invention, a sealing member may be placed in the space of the substrate (1140) extended between the base (1110) and the lower cover (1130). The sealing member may be placed between the substrate (1140) and the base (1110) and between the substrate (1140) and the lower cover (1130). Through this, the space between the substrate (1140) and the base (1110) and between the substrate (1140) and the lower cover (1130) may be sealed.

[0200] The force-torque sensor may include a plate (1150). The fixing member (1100) may include the plate (1150). The plate (1150) may be placed on the substrate (1140). The plate (1150) may be a reinforcing plate. The plate (1150) may be placed on the lower surface of the substrate (1140). The plate (1150) may reinforce the strength of the substrate (1140) so that the first to third sensors (1340, 1350, 1360) are placed in the correct positions.

[0201] The force-torque sensor may include a moving part (1200). The moving part (1200) may be disposed within the fixed part (1100). The moving part (1200) may be disposed on the fixed part (1100). The moving part (1200) may move relative to the fixed part (1100). When an external force is applied, the moving part (1200) may move relative to the fixed part (1100). At least a portion of the moving part (1200) may be disposed within the fixed part (1100). A portion of the moving part (1200) may be exposed outside the fixed part (1100). The moving part (1200) may be disposed on the lower cover (1130).

[0202] The force-torque sensor may include an inner carrier (1210). The moving part (1200) may include the inner carrier (1210). The inner carrier (1210) may be disposed within the fixed part (1100). The inner carrier (1210) may be disposed within the outer carrier (1220). The inner carrier (1210) may be disposed on the fixed part (1100). The inner carrier (1210) may be disposed within the base (1110). The inner carrier (1210) may include a curved surface. A first ball (1610) may be disposed on the curved surface of the inner carrier (1210). The inner carrier (1210) may be formed in a spherical shape at least partially. The inner carrier (1210) may be formed in a spherical shape at least partially so that the center of rotation does not change and remains constant. Through this, the internal carrier (1210) moves as intended by the designer, so the occurrence of crosstalk can be minimized.

[0203] The inner carrier (1210) may include a groove (1212). The groove (1212) may have a thread. The groove (1212) may be formed on the upper surface of the inner carrier (1210). The groove (1212) may be formed on the outer peripheral surface of the inner carrier (1210). An upper coupling member (1710) may be coupled to the groove (1212). Alternatively, the groove (1212) may be formed alone.

[0204] The inner carrier (1210) may include a protrusion (1213). The protrusion (1213) may be a stopper. The protrusion (1213) may be formed on an outer surface of the inner carrier (1210). The protrusion (1213) may protrude outward from the inner carrier (1210). The protrusion (1213) may be positioned in a groove (1225) of the outer carrier (1220).

[0205] The force-torque sensor may include an outer carrier (1220). The moving part (1200) may include the outer carrier (1220). The outer carrier (1220) may be disposed between the inner carrier (1210) and the fixed part (1100). The outer carrier (1220) may be disposed on the outside of the inner carrier (1210). The outer carrier (1220) may be disposed within the fixed part (1100). The outer carrier (1220) may be disposed on the fixed part (1100). The outer carrier (1220) may be disposed within the base (1110).

[0206] The outer carrier (1220) may include a first groove (1221). The first groove (1221) may be a ball rail. A first ball (1610) may be placed in the first groove (1221). The first ball (1610) may move along the first groove (1221). Alternatively, the first ball (1610) may rotate while at least a portion of the first ball (1610) is accommodated in the first groove (1221).

[0207] The outer carrier (1220) may include a second groove (1222). The second groove (1222) may be a ball rail. A second ball (1620) may be placed in the second groove (1222). The second ball (1620) may move along the second groove (1222). The second groove (1222) may extend in the z-axis direction.

[0208] The outer carrier (1220) may include a groove (1225). The groove (1225) may be formed on the inner surface of the outer carrier (1220). The groove (1225) may be formed concavely on the inner surface of the outer carrier (1220). The protrusion (1213) of the inner carrier (1210) may be arranged in the groove (1225) of the outer carrier (1220).

[0209] The groove (1225) can limit the movement of the inner carrier (1210) within a preset range. When the inner carrier (1210) rotates about the z-axis by a preset angle or more with respect to the outer carrier (1220), the protrusion (1213) of the inner carrier (1210) can come into contact with the groove (1225) of the outer carrier (1220).

[0210] The outer carrier (1220) may include a protrusion (1226). The protrusion (1226) may be a stopper. The protrusion (1226) may be formed on an outer surface of the outer carrier (1220). The protrusion (1226) may protrude outwardly from the outer carrier (1220). The protrusion (1226) may be positioned in a groove (1112) of the fixing member (1100).

[0211] The external carrier (1220) may include a pad portion (1227). The pad portion (1227) may be formed on the lower surface of the external carrier (1220). The pad portion (1227) may be formed to protrude from the lower surface of the external carrier (1220). The pad portion (1227) may be in contact with the elastic body (1400). The pad portion (1227) may be in contact with the outer support portion (1422) of the elastic body (1400). The pad portion (1227) may be in contact with the protrusion (1422a) of the outer support portion (1422) of the elastic body (1400). The pad portion (1227) may be formed integrally with the external carrier (1220).

[0212] The force-torque sensor may include a lead (1230). The moving part (1200) may include the lead (1230). The lead (1230) may be connected to an internal carrier (1210). At least a portion of the lead (1230) may be disposed on a base (1110). At least a portion of the lead (1230) may be disposed on an upper cover (1120). At least a portion of the lead (1230) may be disposed on a fixed part (1100). At least a portion of the lead (1230) may protrude beyond the fixed part (1100). An external force may be applied to at least a portion of the lead (1230) that protrudes beyond the fixed part (1100). The external force may be applied to the lead (1230). The lead (1230) may be moved by the external force. The lead (1230) may be coupled to the internal carrier (1210). The lead (1230) may be placed on the inner carrier (1210). The lead (1230) may be placed on the inner carrier (1210). The lead (1230) may move integrally with the inner carrier (1210). The lead (1230) may be fixed to the inner carrier (1210). At least a portion of the lead (1230) may be exposed outside the fixing member (1100).

[0213] When a force is applied to the lead (1230) in the direction of the first axis, the direction of the second axis, the direction of rotation about the first axis, the direction of rotation about the second axis, and the direction of rotation about the third axis, the internal carrier (1210) can move with respect to the external carrier (1220). When a force is applied to the lead (1230) in the direction of the third axis, the internal carrier (1210) and the external carrier (1220) can move together with respect to the fixed part (1100). At this time, the first axis may be the x-axis, the second axis may be the y-axis, and the third axis may be the z-axis.

[0214] The force-torque sensor may include a detection unit (1300). The detection unit (1300) may detect movement of the moving unit (1200) with respect to the fixed unit (1100). The detection unit (1300) may detect movement of the moving unit (1200) with respect to the fixed unit (1100) in the x-axis direction. The detection unit (1300) may detect movement of the moving unit (1200) with respect to the fixed unit (1100) in the y-axis direction. The detection unit (1300) may detect movement of the moving unit (1200) with respect to the fixed unit (1100) in the yaw direction. The detection unit (1300) may detect movement of the moving unit (1200) with respect to the fixed unit (1100) in the pitch direction. The detection unit (1300) can detect the roll direction movement of the moving unit (1200) with respect to the fixed unit (1100). The detection unit (1300) can detect the z-axis direction movement of the moving unit (1200) with respect to the fixed unit (1100).

[0215] The force-torque sensor may include a first magnet (1310). The sensing unit (1300) may include the first magnet (1310). The first magnet (1310) may be disposed on the inner carrier (1210). The first magnet (1310) may be disposed on the lower surface of the inner carrier (1210). The first magnet (1310) may be disposed on the lower surface of the inner carrier (1210).

[0216] The force-torque sensor may include a second magnet (1320). The sensing unit (1300) may include the second magnet (1320). The second magnet (1320) may be disposed on the inner carrier (1210). The second magnet (1320) may be disposed on the lower surface of the inner carrier (1210). The second magnet (1320) may be disposed on the lower surface of the inner carrier (1210).

[0217] The force-torque sensor may include a third magnet (1330). The sensing unit (1300) may include the third magnet (1330). The third magnet (1330) may be disposed on the external carrier (1220). The third magnet (1330) may be disposed on the lower surface of the external carrier (1220). The third magnet (1330) may be disposed on the lower surface of the external carrier (1220).

[0218] The force-torque sensor may include a first sensor (1340). The detection unit (1300) may include the first sensor (1340). The first sensor (1340) may be disposed on the fixing unit (1100). The first sensor (1340) may be disposed on the substrate (1140). The first sensor (1340) may be disposed on the lower cover (1130). The first sensor (1340) may be disposed on the base (1110). The first sensor (1340) may detect the first magnet (1310). The first sensor (1340) may detect the magnetic force of the first magnet (1310). The first sensor (1340) may detect the movement of the lead (1230) in the x-axis direction. The first sensor (1340) can detect the pitch direction tilt of the lead (1230). The first sensor (1340) may be a Hall sensor. The first sensor (1340) may be a TMR sensor.

[0219] The force-torque sensor may include a second sensor (1350). The detection unit (1300) may include the second sensor (1350). The second sensor (1350) may be disposed on the fixing unit (1100). The second sensor (1350) may be disposed on the substrate (1140). The second sensor (1350) may be disposed on the lower cover (1130). The second sensor (1350) may be disposed on the base (1110). The second sensor (1350) may detect the second magnet (1320). The second sensor (1350) may detect the magnetic force of the second magnet (1320). The second sensor (1350) may detect the movement of the lead (1230) in the y-axis direction. The second sensor (1350) can detect the yaw tilt of the lead (1230). The second sensor (1350) may be a Hall sensor. The second sensor (1350) may be a TMR sensor.

[0220] However, conversely, the first sensor (1340) can detect movement in the y-axis direction and tilt in the yaw direction, and the second sensor (1350) can detect movement in the x-axis direction and tilt in the pitch direction.

[0221] In the above, it has been described that the first sensor (1340) detects the x-axis movement and pitch-direction tilt of the lead (1230), but more accurate sensing can be achieved together with the detection value of the second sensor (1350). When the second sensor (1350) detects the y-axis movement and yaw-direction tilt of the lead (1230), more accurate sensing can be achieved together with the detection value of the first sensor (1340).

[0222] The first sensor (1340) and the second sensor (1350) may together detect roll tilt or movement. Alternatively, at least one of the first sensor (1340) and the second sensor (1350) may detect roll tilt or movement.

[0223] The force-torque sensor may include a third sensor (1360). The detection unit (1300) may include the third sensor (1360). The third sensor (1360) may be disposed on the fixing unit (1100). The third sensor (1360) may be disposed on the substrate (1140). The third sensor (1360) may be disposed on the lower cover (1130). The third sensor (1360) may be disposed on the base (1110). The third sensor (1360) may detect the third magnet (1330). The third sensor (1360) may detect the magnetic force of the third magnet (1330). The third sensor (1360) may be a Hall sensor. The third sensor (1360) may be a TMR sensor.

[0224] In another embodiment, the force-torque sensor may include a capacitive sensing sensor. That is, the force-torque sensor may include a capacitive sensor. The force-torque sensor may include a first electrode and a second electrode. The force-torque sensor may include a control unit that applies power to the first electrode, and a sensing unit that measures a change in capacitance between the first electrode and the second electrode. At this time, the second electrode may be grounded. The first electrode may be disposed on the fixing unit (1100). The second electrode may be disposed on at least one of the internal carrier (1210) and the external carrier (1220). When the internal carrier (1210) and / or the external carrier (1220) moves, the change in capacitance between the first electrode and the second electrode may be measured to calculate the amount of movement of the internal carrier (1210) and / or the external carrier (1220).

[0225] The force-torque sensor may include an elastic body (1400). The elastic body (1400) may be disposed on the fixed part (1100). The elastic body (1400) may be disposed on the moving part (1200). The elastic body (1400) may be disposed on the lower cover (1130). The elastic body (1400) may be disposed on the lower cover (1130). The elastic body (1400) may be disposed between the fixed part (1100) and the moving part (1200). The elastic body (1400) may be disposed between the lower cover (1130) and the moving part (1200).

[0226] The elastic body (1400) may be formed in the form of a bent metal plate. The elastic body (1400) may be dome-shaped. The elastic body (1400) may be a metal spring. The elastic body (1400) may be a dome-shaped metal spring. The elastic body (1400) may be formed of metal. The elastic body (1400) may be formed with a constant thickness.

[0227] The elastic body (1400) can provide a repulsive force to the moving part (1200) when the moving part (1200) moves toward the lower cover (1130). The elastic body (1400) can have elasticity. The elastic body (1400) can have a restoring force. The elastic body (1400) can provide a repulsive force to the moving part (1200) in the z-axis direction. The elastic body (1400) can provide a repulsive force to the moving part (1200) in the yaw and pitch directions.

[0228] The elastic body (1400) may include a first support portion (1410). The first support portion (1410) may be disposed on an upper surface of the lower cover (1130). The first support portion (1410) may be disposed on the lower cover (1130). The first support portion (1410) may be disposed on the lower cover (1130). The first support portion (1410) may be fixed to the lower cover (1130). The first support portion (1410) may be coupled to the lower cover (1130). The first support portion (1410) may be adhered to the lower cover (1130).

[0229] The elastic body (1400) may include a second support member (1420). The second support member (1420) may support the lower surface of the moving member (1200). The second support member (1420) may support the lower surface of the moving member (1200) from below. The second support member (1420) may be arranged on the lower surface of the moving member (1200). The second support member (1420) may be fixed to the lower surface of the moving member (1200). The second support member (1420) may be coupled to the lower surface of the moving member (1200). The second support member (1420) may be adhered to the lower surface of the moving member (1200).

[0230] The second support member (1420) may include an inner support member (1421). The inner support member (1421) may support the inner carrier (1210). The inner support member (1421) may support the inner carrier (1210) from the lower side. The inner support member (1421) may movably support the inner carrier (1210). The inner support member (1421) may elastically support the inner carrier (1210). The inner support member (1421) may be in contact with the inner carrier (1210). The inner support member (1421) may be disposed on the inner carrier (1210). The inner support member (1421) may be disposed on the lower surface of the inner carrier (1210).

[0231] The inner support member (1421) may include a protrusion (1421a). The protrusion (1421a) may contact the moving member (1200). The protrusion (1421a) may contact the inner carrier (1210). The protrusion (1421a) may be formed to protrude upward. The protrusion (1421a) may include a plurality of protrusions. The protrusion (1421a) may include four protrusions that contact the inner carrier (1210).

[0232] The inner support (1421) may include a hole (1421b). The hole (1421b) may be positioned between the first magnet (1310) and the first sensor (1340). The hole (1421b) may be positioned between the second magnet (1320) and the second sensor (1350). The first magnet (1310) and the first sensor (1340) may be directly facing each other through the hole (1421b). The second magnet (1320) and the second sensor (1350) may be directly facing each other through the hole (1421b).

[0233] The second support member (1420) may include an outer support member (1422). The outer support member (1422) may support the outer carrier (1220). The outer support member (1422) may support the outer carrier (1220) from the lower side. The outer support member (1422) may movably support the outer carrier (1220). The outer support member (1422) may elastically support the outer carrier (1220). The outer support member (1422) may be in contact with the outer carrier (1220). The outer support member (1422) may be disposed on the outer carrier (1220). The outer support member (1422) may be disposed on the lower surface of the outer carrier (1220).

[0234] The outer support member (1422) may include a protrusion (1422a). The protrusion (1422a) may contact the moving member (1200). The protrusion (1422a) may contact the outer carrier (1220). The protrusion (1422a) may be formed to protrude upward. The protrusion (1422a) may include a plurality of protrusions. The protrusion (1422a) may include three protrusions that contact the outer carrier (1220).

[0235] The outer support (1422) may include a hole (1422b). The hole (1422b) may be positioned between the third magnet (1330) and the third sensor (1360). The third magnet (1330) and the third sensor (1360) may face each other directly through the hole (1422b).

[0236] The second support member (1420) may include a connecting support member (1423). The connecting support member (1423) may connect the inner support member (1421) and the outer support member (1422). The connecting support member (1423) may elastically connect the inner support member (1421) and the outer support member (1422). The connecting support member (1423) may be elastic.

[0237] The second support member (1420) may include a groove (1424). At least a portion of the connecting support member (1423) may be positioned lower than the outer support member (1422) and the inner support member (1421). At least a portion of the connecting support member (1423) may be positioned lower than the outer support member (1422) and the inner support member (1421), such that the groove (1424) may be formed between the outer support member (1422) and the inner support member (1421). That is, the groove (1424) may be formed by a step between the connecting support member (1423) and the inner support member (1421) and a step between the connecting support member (1423) and the outer support member (1422). The groove (1424) may have a circular ring shape when viewed from above.

[0238] The elastic body (1400) may include a connecting portion (1430). The connecting portion (1430) may connect the first support portion (1410) and the second support portion (1420). The connecting portion (1430) may be arranged to be inclined with respect to the upper surface of the lower cover (1130). The connecting portion (1430) may be arranged to be inclined with respect to the first support portion (1410). The connecting portion (1430) may be arranged to be inclined with respect to the second support portion (1420). The connecting portion (1430) may form an obtuse angle with the first support portion (1410). The connecting portion (1430) may form an obtuse angle with the second support portion (1420).

[0239] The elastic body (1400) may include a groove (1440). A substrate (1140) may be placed in the groove (1440). The substrate (1140) may pass through the groove (1440). As the substrate (1140) passes through the groove (1440), a portion of the substrate (1140) may be drawn outwardly of the lower cover (1130). That is, a portion of the substrate (1140) may be placed on the inside of the groove (1440) of the elastic body (1400), and another portion of the substrate (1140) may be placed on the outside of the groove (1440) of the elastic body (1400).

[0240] The force-torque sensor may include an elastic member (1500). The elastic member (1500) may restore the moving part (1200) to its initial position when an external force is removed. The elastic member (1500) may provide a restoring force. The elastic member (1500) may be coupled to the fixed part (1100) and the moving part (1200). The elastic member (1500) may be coupled to a lower surface of the base (1110) and a lower surface of the external carrier (1220). The elastic member (1500) may be coupled to a lower surface of the base (1110) and a lower surface of the external carrier (1220). The elastic member (1500) may connect the base (1110) and the external carrier (1220). The elastic member (1500) may elastically connect the base (1110) and the external carrier (1220). The elastic member (1500) can movably support the external carrier (1220) relative to the base (1110). The elastic member (1500) can be coupled to the external carrier (1220) and the fixed member (1100).

[0241] The elastic member (1500) can overlap with the elastic body (1400) in a direction perpendicular to the z-axis. The elastic member (1500) can overlap with the protrusions (1421a, 1422a) of the elastic body (1400) in a direction perpendicular to the z-axis.

[0242] The elastic member (1500) may include an inner portion (1510). The inner portion (1510) may be coupled to an outer carrier (1220). The inner portion (1510) may be disposed on the outer carrier (1220). The inner portion (1510) may be disposed on a lower surface of the outer carrier (1220). The inner portion (1510) may be fixed to the outer carrier (1220). The inner portion (1510) may be adhesively bonded to the outer carrier (1220). The inner portion (1510) may be movable as one piece with the outer carrier (1220).

[0243] The elastic member (1500) may include an outer portion (1520). The outer portion (1520) may be coupled to the fixing portion (1100). The outer portion (1520) may be coupled to the base (1110). The outer portion (1520) may be coupled to the lower cover (1130). The outer portion (1520) may be disposed on the base (1110). The outer portion (1520) may be disposed on the lower surface of the base (1110). The outer portion (1520) may be disposed on the lower cover (1130). The outer portion (1520) may be fixed to the base (1110). The outer portion (1520) may be fixed to the base (1110) via the lower coupling member (1720).

[0244] The elastic member (1500) may include a connecting portion (1530). The connecting portion (1530) may connect the inner portion (1510) and the outer portion (1520). The connecting portion (1530) may have elasticity. The connecting portion (1530) may include a bent portion. The connecting portion (1530) may include a bent shape. The connecting portion (1530) may include a shape that is bent multiple times. The connecting portion (1530) may include a shape that is bent at least three times. The connecting portion (1530) may be deformable. The connecting portion (1530) may be restored to its original state after being deformed. The connecting portion (1530) may include a zigzag shape.

[0245] The connecting portion (1530) may include a plurality of connecting portions. The connecting portion (1530) may include four connecting portions. The connecting portion (1530) may include first to fourth connecting portions. The connecting portion (1530) may include a first connecting portion and a second connecting portion which are positioned on opposite sides with respect to the inner portion (1510), and a third connecting portion and a fourth connecting portion which are positioned on opposite sides with respect to the inner portion (1510). The bent shape of the connecting portion (1530) may be symmetrical in the rotational direction.

[0246] As a variation, the elastic member (1500) may be omitted. That is, the elastic member (1500) may be omitted and only the elastic body (1400) may provide restoring force to the moving part (1200).

[0247] The force-torque sensor may include a guide member. The guide member may guide the movement of the moving part (1200). The guide member may guide the movement of the moving part (1200) relative to the fixed part (1100). The guide member may guide the movement of the inner carrier (1210) relative to the outer carrier (1220).

[0248] The force-torque sensor may include a first ball (1610). The guide member may include the first ball (1610). The first ball (1610) may be disposed between the inner carrier (1210) and the outer carrier (1220). The first ball (1610) may guide movement of the inner carrier (1210) with respect to the outer carrier (1220). The inner carrier (1210) may move in the yaw direction, the pitch direction, and the roll direction with respect to the outer carrier (1220) by the first ball (1610). However, when the inner carrier (1210) is to move in the z-axis direction, the first ball (1610) and the outer carrier (1220) may move together.

[0249] The force-torque sensor may include a second ball (1620). The guide member may include the second ball (1620). The second ball (1620) may be disposed between the outer carrier (1220) and the fixing member (1100). The second ball (1620) may be disposed between the outer carrier (1220) and the base (1110). The second ball (1620) may guide movement of the outer carrier (1220) with respect to the base (1110). The outer carrier (1220) may move in the z-axis direction with respect to the base (1110) by the second ball (1620). At this time, the outer carrier (1220) may move together with the inner carrier (1210) and the lead (1230).

[0250] The force-torque sensor may include a coupling member. The coupling member may couple two or more different members together. For example, the coupling member may be a screw. The coupling member may be a bolt.

[0251] The force-torque sensor may include an upper coupling member (1710). The upper coupling member (1710) may be coupled to a lead (1230) and an inner carrier (1210). The upper coupling member (1710) may secure the lead (1230) to the inner carrier (1210).

[0252] The force-torque sensor may include a lower coupling member (1720). The lower coupling member (1720) may couple the fixing member (1100) and the elastic member (1500). The lower coupling member (1720) may fix the lower cover (1130) to the base (1110). The lower coupling member (1720) may fix the outer portion (1520) of the elastic member (1500) between the base (1110) and the lower cover (1130). The lower coupling member (1720) may penetrate the outer portion (1520) of the elastic member (1500).

[0253] The force-torque sensor may include an outer coupling member (1730). The outer coupling member (1730) may secure the upper cover (1120) to the base (1110). The outer coupling member (1730) may include screw threads. The outer coupling member (1730) may be screw-coupled to the base (1110) through the upper cover (1120). The outer coupling member (1730) may be screw-coupled to the base (1110) through a hole (1128) of the upper cover (1120).

[0254]

[0255] Hereinafter, the operation of a force-torque sensor according to a second embodiment of the present invention will be described with reference to the drawings.

[0256] Fig. 40 is a perspective view for explaining an operating method of a force-torque sensor according to a second embodiment of the present invention. Fig. 41 is a diagram for explaining a case where an external force having a yaw or pitch direction component is applied to a force-torque sensor according to a second embodiment of the present invention. Fig. 42 is a diagram for explaining a change when an external force having a roll direction component is applied to a force-torque sensor according to a second embodiment of the present invention. Fig. 43 is a diagram for explaining a case where an external force having a z-axis direction component is applied to a force-torque sensor according to a second embodiment of the present invention.

[0257] When an external force having a component in at least one of the y-axis direction and the yaw direction is applied to the lead (1230) of the force-torque sensor according to the second embodiment of the present invention, the lead (1230) can rotate or tilt around the x-axis (see yaw in FIG. 40). At this time, the lead (1230) can move integrally with the internal carrier (1210) (see A, B in FIG. 41). Meanwhile, since the fixed part (1100) is maintained in a fixed state, the second sensor (1350) disposed on the fixed part (1100) detects the second magnet (1320) disposed on the internal carrier (1210), so that the amount of movement of the lead (1230) and the internal carrier (1210) can be measured. Through this, the y-axis direction component and the yaw direction component of the external force applied to the lead (1230) can be measured.

[0258] When an external force having a component in at least one of the x-axis direction and the pitch direction is applied to the lead (1230) of the force-torque sensor according to the second embodiment of the present invention, the lead (1230) can rotate or tilt around the y-axis (see pitch in FIG. 40). At this time, the lead (1230) can move integrally with the internal carrier (1210). Meanwhile, since the fixed part (1100) is maintained in a fixed state, the first sensor (1340) disposed on the fixed part (1100) detects the first magnet (1310) disposed on the internal carrier (1210), so that the amount of movement of the lead (1230) and the internal carrier (1210) can be measured. Through this, the x-axis direction component and the pitch direction component of the external force applied to the lead (1230) can be measured.

[0259] When an external force having a roll direction component is applied to the lead (1230) of the force-torque sensor according to the second embodiment of the present invention, the lead (1230) can rotate or tilt around the z-axis (see roll in FIG. 40). The lead (1230) can move with respect to the fixed part (1100) as an integral part with the internal carrier (1210) (see a, b in FIG. 42). At this time, the first sensor (1340) arranged on the fixed part (1100) detects the first magnet (1310) arranged on the internal carrier (1210), and the second sensor (1250) detects the second magnet (1320), so that the amount of movement of the lead (1230) and the internal carrier (1210) can be measured. Through this, the force of the roll direction component of the external force applied to the lead (1230) can be measured.

[0260] When an external force having a z-axis component is applied to the lead (1230) of the force-torque sensor according to the second embodiment of the present invention, the lead (1230) can move along the z-axis (see Fz in FIG. 40). The lead (1230) can move with respect to the fixed part (1100) together with the internal carrier (1210) and the external carrier (1220) (see A and B in FIG. 43). At this time, the third sensor (1360) arranged on the fixed part (1100) detects the third magnet (1330) arranged on the external carrier (1220), so that the amount of movement of the lead (1230), the internal carrier (1210), and the external carrier (1220) can be measured. Through this, the force of the z-axis component of the external force applied to the lead (1230) can be measured.

[0261]

[0262] Below, the configuration of a robot according to a second embodiment of the present invention is described.

[0263] A robot may include a body. The robot may include an arm member connected to the body. The arm member of the robot may include a gripping portion. The gripping portion may include, for example, a finger shape. A force-torque sensor according to a second embodiment of the present invention may be disposed on the gripping portion of the arm member. The arm member of the robot may include a joint. The force-torque sensor according to a second embodiment of the present invention may be disposed on a joint of the arm member.

[0264]

[0265] Although the embodiments of the present invention have been described with reference to the attached drawings, those skilled in the art will appreciate that the present invention can be implemented in other specific forms without altering the technical concept or essential features thereof. Therefore, the embodiments described above should be understood to be illustrative in all respects and not restrictive.

Claims

1. Fixed government; a moving part, at least a portion of which is disposed within said fixed part; and Including a detection unit that detects movement of the movable unit with respect to the fixed unit, The above fixed part includes a base and a sealing cover disposed on the base, The sealing cover is a force-torque sensor that comes into contact with the moving part to seal between the moving part and the sealing cover.

2. In paragraph 1, The sealing cover includes an outer portion that is coupled to the base, an inner portion that contacts the moving portion, and a connecting portion that connects the outer portion and the inner portion. The above sealing cover is a force-torque sensor including a spring that presses the inner part of the sealing cover toward the moving part.

3. In paragraph 2, The sealing cover is a force-torque sensor including a metal plate disposed within the outer portion of the sealing cover.

4. In paragraph 2, A force-torque sensor wherein the sealing cover includes a first groove formed between the outer portion and the connecting portion in a direction perpendicular to the z-axis.

5. In paragraph 4, A force-torque sensor in which the sealing cover includes a second groove formed between the inner portion and the connecting portion in the direction perpendicular to the z-axis.

6. In paragraph 5, The second groove is a force-torque sensor that overlaps the first groove in the direction perpendicular to the z-axis.

7. In paragraph 5, The above spring is a force-torque sensor arranged in the second groove of the above sealing cover.

8. In paragraph 2, The inner part of the above sealing cover wraps the spring from the upper, lower and inner sides, The outer side of the above spring is an open force-torque sensor.

9. In paragraph 2, Including a joining member that secures the sealing cover to the base, The outer part of the above sealing cover includes a hole, The above-mentioned connecting member is a force-torque sensor that is screw-connected to the base through the hole of the sealing cover.

10. In paragraph 1, The moving part includes an inner carrier disposed within the base, an outer carrier disposed between the base and the inner carrier, and a lead coupled to the inner carrier and at least a portion of which is exposed outside the fixed part. The above sealing cover is a force-torque sensor in contact with the above lead.

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