Probe and probe card

Abstract

Embodiments of the present application provide a probe and a probe card comprising the probe, which are used for testing an object under test. The probe comprises: a first probe head section located at an end of the probe, the first probe head section being in contact with a contact pad of the object under test when testing said object; a second probe head section located at the other end of the probe, the second probe head section being in contact with a probe pad of a space transformer when testing the object under test, such that the probe establishes an electrical signal transmission channel between said object and the space transformer; and a bending beam section connected between the first probe head section and the second probe head section. The bending beam section is provided in the length direction with two or more recesses which are not connected to one another, and when the object under test is tested, the first probe head section abuts against the contact pad to deform and bend the bending beam section. According to the probe and the probe head provided by the present application, the magnitude of the contact force between the probe and the object under test / the space transformer can be adjusted, which is beneficial for the reliability of the design and the service life of the design of the probe.

Description

Probe and probe card TECHNICAL FIELD

[0001] The present invention relates to a probe and probe card, and more particularly to a probe and probe card capable of controlling the contact force of the contact end of the probe. BACKGROUND

[0002] A probe card is a medium between an electronic test system and a device under test (DUT), such as a wafer. The probe card has a plurality of probes. During testing, one end of the probe is in electrical and physical contact with a space transformer on the test system, and the other end of the probe is in electrical and physical contact with the DUT, thereby establishing a signal transmission path between the space transformer and the DUT. Using the probe card can screen the DUT for quality, avoid defective products from entering subsequent processes, reduce unnecessary waste, and reduce internal quality costs. At the same time, it can also avoid defective products from flowing into the market, leading to unnecessary complaints or returns, and reducing external quality costs.

[0003] In a vertical probe card, the probe is subjected to pressure from both sides between the space transformer and the DUT, deforms, and forms a curved beam structure. The curved beam structure provides contact force between the probe and the DUT / space transformer, thereby forming a physical connection. A probe card usually contains thousands or even tens of thousands of probes. Therefore, excessive contact force can damage the pads or bumps on the DUT, or even scratch the DUT, such as a wafer, affecting testing efficiency and accuracy. TECHNICAL PROBLEM

[0004] A probe card usually contains thousands or even tens of thousands of probes. Therefore, excessive contact force can damage the pads or bumps on the DUT, or even scratch the DUT, such as a wafer, affecting testing efficiency and accuracy. TECHNICAL SOLUTION

[0005] To improve at least some of the above disadvantages or deficiencies, the present invention provides a probe and probe card that controls the contact force of the contact end by changing the structure of the probe.

[0006] From one perspective, the present invention provides a probe for testing a device under test, the probe comprising: a first needle segment at an end of the probe to contact a contact pad of the device under test during testing of the device under test; a second needle segment at another end of the probe to contact a probe pad of a space transformer during testing of the device under test, such that the probe establishes an electrical signal transmission path between the device under test and the space transformer; and a curved beam segment connected between the first needle segment and the second needle segment, having two or more slots not connected to each other in the length direction. When testing the device under test, the first needle segment deforms and bends the curved beam segment against the contact pad.

[0007] In another aspect, the present application provides a probe for testing a device under test, the probe comprising: a first needle segment at an end of the probe for contacting a contact pad of the device under test during testing of the device under test; a second needle segment at another end of the probe for contacting a probe pad of a signal adapter during testing of the device under test, such that the probe establishes an electrical signal transmission path between the device under test and the signal adapter; and a flexure beam segment connecting the first needle segment and the second needle segment, the flexure beam segment having a first flexure location and a second flexure location, the first flexure location and the second flexure location having a lower stiffness than other locations of the flexure beam segment. During testing of the device under test, the first needle segment abuts the contact pad, such that the first flexure location and the second flexure location of the flexure beam segment are deformed.

[0008] In yet another aspect, the present application provides a probe card for testing a device under test, the probe card comprising: a plurality of the aforementioned probes; an upper guide plate having a plurality of upper through holes for the second guide segments of the plurality of probes to pass through, each of the second guide segments being slidable within a corresponding one of the upper through holes; and a lower guide plate having a plurality of lower through holes for the first guide segments of the plurality of probes to pass through, each of the second guide segments being slidable within a corresponding one of the lower through holes. During testing of the device under test, the flexure beam segments are deformed in the space between the upper guide plate and the lower guide plate. Advantages

[0009] By using the above-mentioned techniques, in the probe and the probe card provided by the present application, first, the special probe structure can provide a deformation space for bending deformation, which is helpful to the formation of the flexure beam structure; second, the deformation amount of the probe can be adjusted by different slotting arrangements, so as to adjust the contact force between the probe and the device under test / signal adapter; in addition, the reliability design and the life design of the probe can be facilitated by different slotting structures. BRIEF DESCRIPTION OF DRAWINGS

[0010] FIG. 1 is an appearance perspective view of a probe according to an embodiment of the present application.

[0011] FIGS. 2A and 2B are front views of the probe according to the embodiment of the present application, respectively showing the part close to the first needle segment and the part close to the second needle segment.

[0012] FIGS. 3A, 3B, 3C and 3D are schematic views of various types of the needle contact surface of the first needle segment according to the embodiment of the present application.

[0013] FIG. 4 is a schematic view of the probe in a bending state in a working state.

[0014] FIGS. 5A, 5B, 5C and 5D are schematic views of various types of the needle contact surface of the second needle segment according to the embodiment of the present application.

[0015] Fig. 6A and Fig. 6B are perspective views of a probe card in initial and working states, respectively, according to an embodiment of the present application.

[0016] Fig. 7A, Fig. 7B, Fig. 7C, Fig. 7D and Fig. 7E are plan views illustrating the relationship between the slotting structure and the rigidity in a curved beam segment.

[0017] Fig. 8A, Fig. 8B, Fig. 8C, Fig. 8D, Fig. 8E, Fig. 8F, Fig. 8G and Fig. 8H are plan views of a probe card using different slotting structures according to an embodiment of the present application.

[0018] Fig. 9A and 9B are plan views of a probe card in initial and working states, respectively, according to another embodiment of the present application.

[0019] Main component numbers: 1: probe card;

[0020] 10: probe; 100: first needle segment; 101: first needle face; 102: second needle face; 103: first needle side face; 104: second needle side face; 105: needle contact face; 106: needle segment length; 107: needle contact face width;

[0021] 200: first guide segment; 201: first guide segment face; 202: second guide segment face; 203: first guide segment side face; 204: second guide segment side face; 205: guide segment length; 206: guide segment width;

[0022] 300: curved beam segment; 300A: upper curved beam segment; 300B: middle curved beam segment; 300C: lower curved beam segment; 301: first curved beam face; 302: second curved beam face; 303: first curved beam side face; 304: second curved beam side face; 305: slotting structure; 306: connecting rod;

[0023] 400: second guide segment; 401: first guide segment face; 402: second guide segment face; 403: first guide segment side face; 404: second guide segment side face; 405: guide segment length; 406: guide segment width;

[0024] 500: second needle segment; 501: first needle face; 502: second needle face; 503: first needle side face; 504: second needle side face; 505: needle contact face; 506: needle segment length; 507: needle contact face width;

[0025] 601: upper guide plate; 602: lower guide plate; 603: middle guide plate;

[0026] 700A: upper width; 700C: lower width; 700D, 700E: slotting distance; 701, 702, 70(N-1), 70N: slotting;

[0027] 800: object to be detected; 801: contact pad

[0028] 6011: upper through hole; 6021: lower through hole; 6031: middle through hole

[0029] 7011, 7021, 70N1: length of slot; 7012, 7022, 70N2: width of slot; 7013, 7014, 7023, 7024, 70N3, 70N4: side edge distance; 7015, 70(N-1)5: slot distance

[0030] A, B: bending area Embodiments of the present application

[0031] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application. Any structural modification, change of proportional relationship or adjustment of size, which does not affect the effects and purposes of the present application, should still fall within the scope of the technical content disclosed by the present application. Meanwhile, the terms such as "upper", "lower", "left", "right", "middle" and "one" in the specification are only for the convenience of clear description, and are not used to limit the scope of the present application. The change or adjustment of relative relationship, without substantial change of technical content, is also considered as the scope of the present application.

[0032] Please refer to FIG. 1, which is an appearance perspective view of a probe according to an embodiment of the present application. As shown in FIG. 1, the probe 10 is mainly a metal structure or conductive structure with elasticity, which comprises a first needle segment 100, a first guide segment 200, a curved beam segment 300, a second guide segment 400 and a second needle segment 500 in sequence from one end to the other end, wherein the first needle segment 100, the first guide segment 200, the curved beam segment 300, the second guide segment 400 and the second needle segment 500 are not necessarily separated by obvious boundaries, but are only used to distinguish the parts with different performances.

[0033] The probe 10 is substantially long strip-shaped, with the length direction being the longest direction of the probe 10 (e.g. the Z-axis direction in FIG. 1). Along the length direction, there are a first needle segment 100, a first guide segment 200, a curved beam segment 300, a second guide segment 400, and a second needle segment 500. That is, the first needle segment 100 and the second needle segment 500 are respectively located at two ends of the probe 10, the first guide segment 200 is located between the first needle segment 100 and the curved beam segment 300, and the second guide segment 400 is located between the second needle segment 500 and the curved beam segment 300. The first needle segment 100 of the probe 10 is used to contact a contact pad (solder pad, bump, solder ball, etc.) on a to-be-detected object (e.g. a wafer, a chip, a circuit, etc.), and the second needle segment 500 of the probe 10 is electrically and physically connected to a contact position (e.g. a probe pad) of a signal transfer board (not shown) to establish an electrical signal transmission channel between the to-be-detected object and the signal transfer board via the probe 10. The structures of the first needle segment 100, the first guide segment 200, the curved beam segment 300, the second guide segment 400, and the second needle segment 500 will be described in detail below. The following description is made with reference to FIGS. 1, 2A, and 2B, which are front views of the probe according to embodiments of the present application, and respectively show a portion close to the first needle segment 100 and a portion close to the second needle segment 500.

[0034] The first needle segment 100 includes a needle first face 101, a needle second face 102, a needle first side face 103, a needle second side face 104, and a needle contact face 105. The opposite needle first face 101 and the needle second face 102 are parallel to each other and have the same shape, extend along the Z-axis direction, and have a specific distance therebetween. The specific distance is the thickness of the needle first side face 103 and the needle second side face 104. The needle first side face 103 and the needle second side face 104 form an included angle. The needle contact face 105 is located between the end portions of the needle first side face 103 and the needle second side face 104. In other embodiments, the needle first face 101 and the needle second face 102 do not have to be parallel, but can form a specific angle, e.g. a specific acute angle.

[0035] The needle contact surface 105 can have various shapes, as shown in FIGS. 3A, 3B, 3C and 3D. FIG. 3A shows that the needle contact surface 105 is a flat surface parallel to the X axis (width direction), and can also be changed to a certain angle with the X axis. FIG. 3B shows that the needle contact surface 105 is a sharp corner, which is a point in the plan view, and is actually formed by the direct intersection of the first needle side surface 103 and the second needle side surface 104 to form the needle contact surface 105, which is a straight line in space, and can also be changed to a rounded corner tangent to the first needle side surface 103 and the second needle side surface 104, or to a sharp point. FIG. 3C shows that the first needle segment 100 includes a plurality of needle contact surfaces 105, which facilitate reliable physical contact between the needle contact surface 105 and the contact pad (solder pad, bump, solder ball, etc.). FIG. 3D shows that the needle contact surface 105 is located between the first needle side surface 103 and the second needle side surface 104, and the needle contact surface 105 is a flat surface forming a certain angle with the first needle side surface 103 and the second needle side surface 104, respectively, and the needle contact surface 105 is parallel to the X axis, and can also be changed to a certain angle with the X axis.

[0036] The design parameters related to the first needle segment 100 include the needle segment length 106 (length in the Z axis direction) and the needle contact surface width 107.

[0037] There can be a clear boundary between the first needle segment 100 and the first guide segment 200, such as a sharp corner transition or a stepped transition (not shown), or there can be no clear boundary, such as a rounded corner transition.

[0038] The first needle segment 100 is shown as a solid structure, and can be modified to have a slotted structure (not shown, for example, similar to the slotted structure 305 on the curved beam segment 300) that transversely penetrates or does not penetrate the first needle segment 100 from the first needle surface 101 and / or the second needle surface 102.

[0039] Next, the first guide segment 200 is described. The first guide segment 200 has two main surfaces, namely the guide segment first surface 201 and the guide segment second surface 202, which are substantially parallel to each other. The guide segment first surface 201 and the guide segment second surface 202 have a certain distance between them. The first guide segment 200 further has two side surfaces, namely the guide segment first side surface 203 and the guide segment second side surface 204, which are shown as substantially parallel to each other, and can also be arranged at a certain angle (e.g. a certain acute angle) according to requirements.

[0040] The design parameters related to the first guide segment 200 include the guide segment length 205 and the guide segment width 206 of the first guide segment 200. The guide segment length 205 can be zero (i.e. the first needle segment 100 is directly connected to the curved beam segment 300) or not. The guide segment width 206 can be completely uniform along the Z-axis direction or have a specific variation, such as a step, an increment, or a decrement, etc. The guide segment width 206 can be the same as or different from the lower width 700C of the curved beam segment 300.

[0041] There can be a clear boundary between the first guide segment 200 and the curved beam segment 300, such as a sharp corner transition or a stepped transition (not shown), or there can be no clear boundary, such as a rounded corner transition.

[0042] The first guide segment 200 is shown as a solid structure in the figure, but can be modified to have a slotted structure (not shown, e.g. similar to the slotted structure 305 on the curved beam segment 300) that can or can not extend transversely through the first guide segment 200 from the first guide segment first face 201 and / or the first guide segment second face 202.

[0043] Next, the curved beam segment 300 is described. The curved beam segment 300 has two main faces, namely the curved beam first face 301 and the curved beam second face 302, which are substantially parallel to each other. For ease of description, the curved beam segment 300 is defined as having an upper curved beam segment 300A, a middle curved beam segment 300B, and a lower curved beam segment 300C (Fig. 4) in the active state according to the curved region A and the curved region B, which correspond to the upper width 700A, the middle width (not shown), and the lower width 700C, respectively. The three widths can be completely the same, partially the same, or completely different, and there can or can not be a clear boundary between the three parts. The curved beam segment 300 has two side faces, namely the curved beam first side face 303 and the curved beam second side face 304, which are shown as being substantially parallel to each other, but can be set at a specific angle (e.g. a specific acute angle) as needed.

[0044] The curved beam segment 300 is provided with a slotted structure 305, which serves to provide space for the bending deformation of the probe 10, adjust the deformation amount of the probe 10 by different slotting settings, adjust the contact force of the probe 10 with the signal conversion board, and adjust the deformation amount of the probe 10 at different positions by adjusting the size, spacing, and shape of the slots, etc. Different slotted structures 305 are provided at different positions of the probe 10 to achieve precise control of the bending strength at each position of the probe 10, which is helpful for the reliability design and life design of the probe.

[0045] The curved beam segment 300 comprises at least one slot structure 305, which is specifically described as having two or more slots not connected to each other in the length direction of the curved beam segment 300. The slots can be transversely formed through the curved beam first surface 301 and the curved beam second surface 302, or respectively formed on the curved beam first surface 301 and the curved beam second surface 302, and the individual slots are not simultaneously formed through the curved beam first surface 301 and the curved beam second surface 302 (not shown), or only formed on the curved beam first surface 301 or only formed on the curved beam second surface 302, and the individual slots are not simultaneously formed through the curved beam first surface 301 and the curved beam second surface 302 (not shown). The shape of the slots includes but is not limited to strip-shaped, rectangular, parallelogram-shaped, circular, oval, cross-shaped, pentagonal, hexagonal, polygonal, even irregular pattern, or combination of two or more. The plurality of slots can use the same size and the same shape of the slot, different sizes but the same shape of the slot, or different shapes of the slot combination. The slot structure 305 can be formed by five-axis laser, dry etching, wet etching, etc.

[0046] In FIGS. 2A and 2B, from the Z-direction to the Z+ direction, the plurality of slots of the slot structure 305 are the first slot 701, the second slot 702, …, the penultimate slot 70(N-1), and the last slot 70N.

[0047] The parameters of the first slot 701 include: the slot length 7011, the slot width 7012, the slot depth (not shown), the first side edge distance 7013 (the distance between the first slot 701 and the curved beam first side surface 303), the second side edge distance 7014 (the distance between the first slot 701 and the curved beam second side surface 304), the slot distance 7015 (the distance between the first slot 701 and the second slot 702), and the slot distance 700D (the distance between the first slot 701 and the first guide segment 200). The slot distance 700D can be zero (i.e. the short side of the first slot 701 is located at the junction of the first guide segment 200 and the curved beam segment 300) or other distances.

[0048] The parameters of the second slot 702 include: the slot length 7021, the slot width 7022, the slot depth (not shown), the first side edge distance 7023 (the distance between the second slot 702 and the curved beam first side surface 303), the second side edge distance 7024 (the distance between the second slot 702 and the curved beam second side surface 304), and the slot distance (the distance between the second slot 702 and the third slot 703, not shown).

[0049] Similarly, the Nth slot 70N has parameters including a slot length 70N1, a slot width 70N2, a slot depth (not shown), a first side edge distance 70N3 (the distance between the Nth slot 70N and the first side surface 303 of the curved beam segment 300), a second side edge distance 70N4 (the distance between the Nth slot 70N and the second side surface 304 of the curved beam segment 300), and a slot distance 700E (the distance between the Nth slot 70N and the second guide segment 400). The slot distance 700E can be zero (i.e., a short edge of the Nth slot 70N is located at the junction of the curved beam segment 300 and the second guide segment 400) or any other distance.

[0050] In FIGS. 1, 2A, and 2B, the slot lengths 7011-70N1 of the first slot 701 to the Nth slot 70N are the same, but in other embodiments, the slot lengths 7011-70N1 of the first slot 701 to the Nth slot 70N can not be the same. The slot widths 7012-70N2 of the first slot 701 to the Nth slot 70N are the same, but in other embodiments, the slot widths 7012-70N2 of the first slot 701 to the Nth slot 70N can not be the same. The first side edge distances 7013-70N3 of the first slot 701 to the Nth slot 70N are the same, but in other embodiments, the first side edge distances 7013-70N3 of the first slot 701 to the Nth slot 70N can not be the same. The second side edge distances 7014-70N4 of the first slot 701 to the Nth slot 70N are the same, but in other embodiments, the second side edge distances 7014-70N4 of the first slot 701 to the Nth slot 70N can not be the same. The slot distances 7015-70(N-1)5 between the first slot 701 to the Nth slot 70N are the same, but in other embodiments, the slot distances 7015-70(N-1)5 between the first slot 701 to the Nth slot 70N can not be the same. The slot distance 700D (the distance between the first slot 701 and the first guide segment 200) and the slot distance 700E (the distance between the Nth slot 70N and the second guide segment 400) can be the same or different. In other embodiments, if the slots are formed on the first side surface 301 and the second side surface 302 of the curved beam segment 300 or only on one of the first side surface 301 and the second side surface 302 of the curved beam segment 300 without penetrating the curved beam segment 300, the slot depths (not shown) can be the same or different.

[0051] When the slots (e.g., 701 and 702) are long strip-shaped or rectangular slots that traverse the curved beam segment 300 in a transverse direction, the portions between the slots form links 306. Adjusting the number, positions, and widths (i.e., the slot distances (e.g., 7015)) of the links 306 can change the contact force, the deformation position, and / or the deformation amount of the probe 10.

[0052] In the X-axis direction, the center line of each of the first slot 701 to the Nth slot 70N of the slotted structure 305 coincides with the center line of the curved beam segment 300, and the distance from the center of each of the first slot 701 to the Nth slot 70N to the curved beam first side 303 and the curved beam second side 304 is the same; or the position of any of the first slot 701 to the Nth slot 70N can be closer to the curved beam first side 303 or the curved beam second side 304, or even extend to the curved beam first side 303 or the curved beam second side 304, that is, form a notch (not shown) on the curved beam first side 303 or the curved beam second side 304.

[0053] Next, the second guide segment 400 is described. The second guide segment 400 has two main surfaces, namely the guide segment first surface 401 and the guide segment second surface 402, which are substantially parallel to each other. The guide segment first surface 401 and the guide segment second surface 402 have a specific distance therebetween. The second guide segment 400 further has two side surfaces, namely the guide segment first side 403 and the guide segment second side 404, which are shown in the figure to be substantially parallel, or can be arranged at a specific angle (e.g. a specific acute angle) according to requirements.

[0054] The design parameters related to the second guide segment 400 include the guide segment length 405 and the guide segment width 406 of the second guide segment 400. The size of the guide segment length 405 can be zero (i.e. the second needle segment 500 is directly connected to the curved beam segment 300), or can not be zero. The size of the guide segment width 406 can be completely the same in the Z-axis direction, or have a specific variation, such as a step, an increment or a decrement, etc.

[0055] There can be a clear boundary line between the second guide segment 400 and the curved beam segment 300, such as a sharp corner transition or a step transition (not marked in the figure), or there can be no clear boundary line, such as a round corner transition.

[0056] The second guide segment 400 is shown in the figure to be a solid structure, and can be modified to have a slotted structure (not shown, e.g. similar to the slotted structure 305 on the curved beam segment 300) transversely through or not through the second guide segment 400 on the guide segment first surface 401 and / or the guide segment second surface 402.

[0057] Next, the second needle segment 500 is described. The second needle segment 500 includes a needle first face 501, a needle second face 502, a needle first side face 503, a needle second side face 504, and a needle contact face 505. The opposite needle first face 501 and needle second face 502 are parallel to each other and have the same shape, extending along the Z-axis direction, and have a certain distance between them, which is the thickness of the needle first side face 503 and the needle second side face 504. The needle first side face 503 and the needle second side face 504 form an angle, and the needle contact face 505 is located between the end of the needle first side face 503 and the needle second side face 504. In other embodiments, the needle first face 501 and the needle second face 502 do not have to be parallel, but can form a certain angle, such as a certain acute angle.

[0058] The needle contact face 505 can have various shapes, as shown in Figures 5A-5D. Figure 5A shows that the needle contact face 505 is a flat surface parallel to the X-axis (width direction), and can also be changed to form a certain angle with the X-axis; Figure 5B shows that the needle contact face 505 is a straight line, which is a point in the plan view, and is actually formed by the direct intersection of the needle first side face 503 and the needle second side face 504, and in space the needle contact face 505 is a straight line, and can also be changed to a rounded corner tangent to the needle first side face 503 and the needle second side face 504, or to a sharp point; Figure 5C shows that the second needle segment 500 includes multiple needle contact faces 505, which facilitate reliable physical contact between the needle contact face 505 and the contact position (such as a probe pad) of the signal adapter plate; Figure 5D shows that the needle contact face 505 is located between the needle first side face 503 and the needle second side face 504, and the needle contact face 505 is a flat surface forming a certain angle with the needle first side face 503 and the needle second side face 504, and the needle contact face 505 is parallel to the X-axis, and can also be changed to form a certain angle with the X-axis.

[0059] The design parameters of the second needle segment 500 include the needle segment length 506 (the length in the Z-axis direction) and the needle contact face width 507.

[0060] There can be a clear boundary between the second needle segment 500 and the second guide segment 400, such as a sharp corner transition or a stepped transition (not shown), or there can be no clear boundary, such as a rounded corner transition.

[0061] The second needle segment 500 is shown as a solid structure, and can be modified to have a slotted structure (not shown, such as the slotted structure 305 on the curved beam segment 300) as needed, with or without transverse through holes in the needle first face 501 and / or the needle second face 502.

[0062] The application also provides a probe card 1, as shown in FIGS. 6A and 6B, which are perspective views of the probe card 1 in initial and working states, respectively, according to an embodiment of the application. The probe card 1 includes an upper guide plate 601, a lower guide plate 602, and a plurality of probes 10 as described above. The upper guide plate 601 is disposed near a signal adapter plate, and the lower guide plate is disposed near a device under test 800. The upper guide plate 601 and the lower guide plate 602 form a needle arrangement space therebetween. The upper guide plate 601 has a plurality of upper through holes 6011, which are slightly larger than the cross section of the second guide section 400 of the probe 10. The second guide section 400 (or the curved beam section 300 if there is no second guide section 400) of the probe 10 passes through the corresponding upper through hole 6011 one by one and can slide up and down (in the Z-axis direction) in the upper through hole 6011, so that the needle contact surface 505 of the second needle section 500 of the probe 10 can complete electrical and physical contact with the corresponding probe pad (not shown) on the signal adapter plate. The lower guide plate 602 has a plurality of lower through holes 6021, which are slightly larger than the cross section of the first guide section 200 of the probe 10. The first guide section 200 (or the curved beam section 300 if there is no first guide section 200) of the probe 10 passes through the corresponding lower through hole 6021 one by one and can slide up and down (in the Z-axis direction) in the lower through hole 6021, so that the needle contact surface 105 of the first needle section 100 of the probe 10 can complete electrical and physical contact with the contact pad 801 of the device under test 800. The relative positions of the upper guide plate 601 and the lower guide plate 602 fix the positions of the second needle section 500 and the first needle section 100 in the X-axis direction. The misalignment between the two in the X-axis direction causes the curved beam section 300 with the slotted structure 305 to deform and bend. The needle contact surface 105 of the first needle section 100 can receive appropriate downward pressure to abut against the contact pad 801 of the device under test 800 (particularly a wafer-shaped device under test). The probes 10 that complete contact at both ends establish an electrical signal transmission channel between the device under test 800 and the signal adapter plate. For simplicity, only one probe 10 is shown in the subsequent plan view, but the application does not limit the number of probes 10 used in the probe card 1.

[0063] Referring back to FIG. 4, in the working state, when the probe 10 is forced, the bending occurs in the bending regions A and B of the bending beam section 300. By designing the parameters of the slits in the bending regions A and B (such as the length, width, shape, position, depth, etc.), the stiffness of the bending regions A and B can be adjusted to increase or decrease the contact force of the probe 10. According to the concept of the present application, in addition to making the stiffness of the bending beam section 300 less than that of the first guide section 200 and the second guide section 400, the stiffness of the bending regions A and B can be further designed to be less than that of other parts of the bending beam section 300, so that the bending beam section 300 has a specific bending shape, which helps to achieve a more precise testing process.

[0064] Referring to FIGS. 7A, 7B, 7C, 7D, and 7E, which are plan views illustrating the relationship between the slit structure 305 in the bending beam section and the stiffness. The probe 10 in FIG. 7A has no slit structure, so it has the maximum stiffness; in the slit structure 305 of FIG. 7B, the probe 10 has slits in both the bending regions A and B, so the stiffness of the probe 10 is reduced, and the contact force is also reduced, compared with FIG. 7A; in the slit structure 305 of FIG. 7C, the probe 10 has slits in both the bending regions A and B, and the length of the slits is longer, so the stiffness of the probe 10 is further reduced, and the contact force is also reduced, compared with FIG. 7B; in the slit structure 305 of FIG. 7D, the probe 10 has slits in both the bending regions A and B, and the length of the slits is shorter than that of the probe 10 in FIG. 7C, so the stiffness of the probe 10 is increased, and the contact force is also increased, compared with FIG. 7C; in the slit structure 305 of FIG. 7E, the probe 10 has slits in both the bending regions A and B, and the width of the slits is narrower than that of the probe 10 in FIG. 7C, so the stiffness of the probe 10 is increased, and the contact force is also increased, compared with FIG. 7C. It should be noted that if the slit is too long and spans the entire probe 10, it will affect the strength of the material in the non-bending region, so two or more slits are designed in the length direction. Through the above description, according to the material of the probe 10 and the contact pad 801 of the device under test 800, the number of probes, etc., the distribution, position, length, width, shape, number, etc. of the slits can be designed to achieve the expected stiffness of the probe 10 in the bending regions A and B, so as to provide appropriate contact force.

[0065] The following are several variations of the slotted structure 305 according to the concept of the present application, but are not intended to limit the embodiments of the present application. Please refer to FIG. 8A, FIG. 8B, FIG. 8C, FIG. 8D, FIG. 8E, FIG. 8F, FIG. 8G and FIG. 8H, which are plan views of probe cards using different slotted structures 305 according to embodiments of the present application. In FIG. 8A, the slots are rectangular and have a large slot pitch; in FIG. 8B, the slot centers are not on the center line in the X-axis direction of the probe 10, the first side pitch is smaller than the second side pitch, so that the slots are located on the other side (the left side in the drawing) of the bending direction of the probe 10, and in another embodiment, the slots can be located on the same side of the bending direction of the probe 10; in FIG. 8C, the slots have different sizes, from the Z- direction to the Z+ direction, the slot length and the slot width of the odd-numbered slots are larger than those of the even-numbered slots, and in another embodiment, the slot length and the slot width of the odd-numbered slots can be smaller than those of the even-numbered slots; in FIG. 8D, the slot length and the slot width of each slot are not fixed, and the center thereof does not necessarily coincide with the center line in the X-axis direction of the probe 10; in FIG. 8E, the short side of the slot is fully rounded, the slot length and the slot width of each slot are not fixed, and the center thereof does not necessarily coincide with the center line in the X-axis direction of the probe 10, and in another embodiment, the short side can be composed of a rounded corner and a straight line; in FIG. 8F, the slot is circular; in FIG. 8G, the slot is elliptical, the major axis of the ellipse is parallel to the Z-axis direction, and the minor axis is parallel to the X-axis direction, and in another embodiment, the directions of the major axis and the minor axis of the ellipse can be changed, or the directions of the slots can not be fixed, and in another embodiment, the slots can be cross-shaped, square-shaped, regular pentagon-shaped, regular hexagon-shaped, polygon-shaped, and can have the same or different rotation directions; in FIG. 8H, the number of slots is large and the slots are densely distributed. The combinations of slot parameters are numerous and are not listed one by one, and the variations thereof belong to the scope of the present application. The probe 10 and the probe card 1 can be manufactured according to the process of the probe card or the test flow, and the appropriate contact surface of the needle can be used. The first needle segment 100 and the second needle segment 500 can use the same or different contact surfaces 105 and 505.

[0066] According to the concept of the present application, the stiffness of the curved beam segment 300 is changed from a structural point of view, so that the probe 10 reaches the expected stiffness at the curved beam segment 300 or the bending positions A and B, to provide appropriate contact force and bending mode. The present application does not limit the use of the slotted structure 305, for example, a specific pattern of grooves (not shown) can be used at the curved beam segment 300 or the bending positions A and B. The grooves can be distributed on one or any combination of the curved beam first surface 301, the curved beam second surface 302, the curved beam first side surface 303, and the curved beam second side surface 304. The grooves can be formed by five-axis laser, dry etching, wet etching, etc. The above-mentioned slotted structure 305 and groove structure, etc. can also be applied to the curved needle.

[0067] Please refer to FIG. 9A and 9B, which are plan views of a probe card in initial state and working state respectively according to another embodiment of the present application. Similar to the probe card 1 described above, it comprises an upper guide plate 601, a lower guide plate 602 and a plurality of probes 10, the functions and structures of which are described above and will not be repeated here. In this embodiment, a middle guide plate 603 is additionally arranged in the needle arrangement space. The middle guide plate 603 has a plurality of middle through holes 6031, the size of which is slightly larger than the cross section of the curved beam section 300 of the probe 10. The curved beam section 300 of the probe 10 passes through the corresponding middle through hole 6031 one by one and can slide up and down (Z-axis direction) in the middle through hole 6031. By means of the misalignment between the middle guide plate 603 and the upper / lower guide plates 601 / 612, the deformation position and direction of the probe 10 can be guided and the curved beam section 300 can be controlled to form a specific deformation shape.

[0068] In the above-mentioned upper / lower guide plate or upper / middle / lower guide plate combination, any guide plate can be a double-layer structure (not shown) with a gap formed in the middle. This structure can reduce the friction between the probe 10 and the guide plate and make the sliding of the probe 10 in the through hole smoother and more smooth.

[0069] In summary, by adopting the above-mentioned technology, the probe and probe card provided by the present application have a special probe structure, which can provide a deformation space for bending deformation and help the formation of the curved beam structure. In addition, by adjusting the deformation amount of the probe through different slotting arrangements, the contact force between the probe and the signal conversion board can be adjusted. Furthermore, through different slotting structures, the reliability design and life design of the probe can be facilitated.

Claims

1. A probe for testing a device under test, the probe comprising: a first needle segment at an end of the probe for contacting a contact pad of the device under test during testing of the device under test; a second needle segment at another end of the probe for contacting a probe pad of a signal adapter during testing of the device under test, so as to establish an electrical signal transmission path between the probe, the device under test and the signal adapter; and a curved beam segment connected between the first needle segment and the second needle segment, the curved beam segment having two or more slots not connected to each other in a length direction of the curved beam segment, wherein the first needle segment is configured to deform and bend the curved beam segment by abutting against the contact pad during testing of the device under test. a first guide segment connected between the first needle segment and the curved beam segment; and / or a second guide segment connected between the second needle segment and the curved beam segment.

2. The probe of claim 1, further comprising: the first needle segment comprises at least one first needle contact surface, and the second needle segment comprises at least one second needle contact surface, the first needle contact surface and the second needle contact surface being:

3. The probe of claim 1, wherein, a point; or a flat surface parallel to a width direction of the probe or at a specific angle; or a sharp corner formed by intersection of two flat surfaces; or a rounded corner. the curved beam segment has a first curved beam surface and a second curved beam surface opposite to each other, and the two or more slots are formed through the first curved beam surface and the second curved beam surface or formed on the first curved beam surface and the second curved beam surface respectively.

4. The probe of claim 1, wherein, the two or more slots are one or more combinations of a long strip shape, a rectangle shape, a parallelogram shape, a circle shape, an ellipse shape, a cross shape, a polygon shape, and an irregular shape.

5. The probe of claim 1, wherein, design parameters of the two or more slots include a slot length, a slot width, a slot interval, a slot side interval, a slot distance, and a slot depth.

6. The probe of claim 1, wherein, the probe comprising:

7. A probe for testing an object to be tested, wherein, a first needle segment at an end of the probe for contacting a contact pad of the device under test during testing of the device under test; a second needle segment at another end of the probe for contacting a probe pad of a signal adapter during testing of the device under test, so as to establish an electrical signal transmission path between the probe, the device under test and the signal adapter; and a curved beam segment connected between the first needle segment and the second needle segment, the curved beam segment having a first curved position and a second curved position, the first curved position and the second curved position having a smaller rigidity than other positions of the curved beam segment except the first curved position and the second curved position, wherein the first needle segment is configured to deform and bend the first curved position and the second curved position of the curved beam segment by abutting against the contact pad during testing of the device under test.

8. The probe of claim 7, further comprising: a first guide segment connected between the first needle segment and the curved beam segment; and / or a second guide segment connected between the second needle segment and the curved beam segment, the curved beam segment having a smaller rigidity than the first guide segment and the second guide segment. the curved beam segment having two or more slots not connected to each other in a length direction of the curved beam segment. the curved beam segment having at least one groove on a surface thereof.

9. The probe of claim 8, wherein, ​ 10. The probe of claim 8, wherein, ​ 11. A probe card for testing a device under test, the probe card comprising: a plurality of probes as claimed in any one of claims 1 to 10; an upper guide plate having a plurality of upper through holes for the second guide sections of the plurality of probes to pass through, the second guide section of each of the probes being slidable within a corresponding one of the upper through holes; and a lower guide plate having a plurality of lower through holes for the first guide sections of the plurality of probes to pass through, the first guide section of each of the probes being slidable within a corresponding one of the lower through holes, wherein the flexure beam sections are deformed to bend in a space between the upper guide plate and the lower guide plate when the device under test is being tested.

12. The probe card of claim 11, further comprising a middle guide plate located between the upper guide plate and the lower guide plate, the middle guide plate having a plurality of middle through holes for the flexure beam sections of the plurality of probes to pass through, the flexure beam section of each of the probes being slidable within a corresponding one of the middle through holes. any one of the upper guide plate, the middle guide plate and the lower guide plate is a double-layer structure with a gap formed in between.

13. The probe card of claim 11 or 12, wherein, ​

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