Force-torque sensor and robot

Abstract

The first embodiment of the present invention relates to a force-torque sensor comprising: a fixed part; a moving part at least partially disposed in the fixed part; a sensing part for sensing the movement of the moving part with respect to the fixed part; and a ball and an elastic member disposed between the fixed part and the moving part, wherein the elastic member presses the ball toward the moving part.

Description

Force-torque sensors and robots

[0001] The present embodiment relates to a force-torque sensor.

[0002] Robots are used in a variety of fields, including industry, medicine, service, and other fields, and their scope of application is constantly expanding. To improve the performance and ensure safety of robotic systems, accurate monitoring and control of robot movements are essential. In particular, the forces and torques generated when a robot interacts with its environment or handles objects are crucial information.

[0003] Conventional robot sensor technology has primarily focused on detecting motion states such as position, velocity, and acceleration. However, forces and torques play a crucial role in providing information about robot interactions and the working environment. Force-torque sensors are essential for robots to safely grasp and manipulate objects and respond to their environment. Furthermore, these sensors can be utilized to improve robot efficiency and prevent malfunctions.

[0004] Conventional force-torque sensors incorporate strain gauges to detect the forces acting on the sensor. To minimize strain gauge measurement deviation due to external factors, metallic mechanical components are used. However, the high precision required for these metal components drives up component prices.

[0005] Furthermore, conventional force-torque sensors cannot separate the applied external force into the force of each axis, so they receive input simultaneously and decompose the force, which causes the detection values ​​for each axis to be mixed with noise due to crosstalk. In particular, there is a problem that the noise increases when the z-axis and torque forces are mixed.

[0006] (Patent Document 1) KR 10-2004-0098324 A

[0007] A first embodiment of the present invention aims to provide a force-torque sensor that detects external force through a magnet and a sensor.

[0008] In addition, it is intended to provide a force-torque sensor in which a moving part moves in the yaw direction, pitch direction, roll direction and z-axis direction with respect to a fixed part, and further moves in the x-axis direction and y-axis direction.

[0009] A second embodiment of the present invention seeks to provide a force-torque sensor capable of separately measuring z-axis force and torque force.

[0010] Through this, we aim to improve robot control and work processes.

[0011] Furthermore, a second embodiment of the present invention seeks to provide a force-torque sensor including a ball pressurizing structure so that a ball guiding the movement of a moving part is in close contact with the ball.

[0012] A force-torque sensor according to a first embodiment of the present invention comprises: a fixed part; a moving part at least partially disposed within the fixed part; a sensing part for detecting movement of the moving part with respect to the fixed part; and a ball and an elastic member disposed between the fixed part and the moving part, wherein the elastic member can press the ball toward the moving part.

[0013] The above moving part can move in the x-axis direction, the y-axis direction, the z-axis direction, the yaw direction which is a direction of rotation around the x-axis, the pitch direction which is a direction of rotation around the y-axis, and the roll direction which is a direction of rotation around the z-axis with respect to the fixed part.

[0014] One end of the elastic member may be placed on the fixed portion, and the ball may be placed on the other end of the elastic member.

[0015] The above fixed portion may include a first groove in which at least a portion of the elastic member is disposed.

[0016] The above fixed member may include a second groove in which at least a portion of the ball is placed when the elastic member is compressed.

[0017] The first groove of the above-mentioned fixed part may have a shape that is additionally sunken into the second groove of the above-mentioned fixed part with a diameter smaller than the second groove.

[0018] The above moving part may include a curved surface that contacts the ball.

[0019] Each of the above balls and the above elastic members can be arranged symmetrically along the z-axis in groups of four.

[0020] The above ball can rotate between the above elastic member and the above moving part.

[0021] The above ball can compress the elastic member and move toward the fixed member when pressed by the moving member.

[0022] The above elastic member may include a coil spring.

[0023] The above elastic member can be arranged in the fixed portion so that the central axis of the elastic member forms an acute angle with the z-axis.

[0024] The above elastic member can be arranged in the fixed portion such that the central axis of the elastic member is parallel to the z-axis.

[0025] The above elastic member can be arranged in the fixed portion such that the central axis of the elastic member is perpendicular to the z-axis.

[0026] A robot according to the first embodiment of the present invention may include the force-torque sensor.

[0027] A force-torque sensor according to a second embodiment of the present invention comprises: a fixed part; a moving part including an inner carrier disposed within the fixed part and an outer carrier disposed between the fixed part and the inner carrier; a sensing part detecting movement of the moving part with respect to the fixed part; a first ball disposed between the inner carrier and the outer carrier; and an elastic member coupled to the inner carrier and the outer carrier, wherein the inner carrier can press the first ball toward the outer carrier.

[0028] The above elastic member can press the inner carrier toward the outer carrier so that the first ball is in close contact with the inner carrier and the outer carrier.

[0029] The elastic member includes an inner portion coupled with the upper surface of the inner carrier, an outer portion coupled with the upper surface of the outer carrier, and a connecting portion connecting the inner portion and the outer portion, and the inner portion of the elastic member may be arranged higher than the outer portion of the elastic member.

[0030] The force-torque sensor includes a yoke disposed on the fixed portion, the detection portion includes a magnet disposed on the internal carrier, and a sensor that detects the magnet, and an attractive force can be applied between the magnet and the yoke.

[0031] As the inner carrier is pressed toward the yoke, the first ball can be brought into close contact with the inner carrier and the outer carrier.

[0032] The force-torque sensor includes a magnetic shaft disposed between the fixed part and the external carrier; and a magnet disposed on the fixed part, wherein an attractive force can be applied between the shaft and the magnet.

[0033] The above shaft can be pressed toward the magnet side and brought into close contact with the fixed part.

[0034] The force-torque sensor may include a second ball disposed between the fixed part and the external carrier; a magnet disposed on the fixed part; and a yoke disposed on the external carrier and having an attractive force with the magnet, wherein the second ball may be disposed between the magnet and the yoke.

[0035] The above yoke can be pressed toward the magnet side to bring the second ball into close contact with the fixed part.

[0036] The above force-torque sensor may include a lower elastic member coupled to the fixed part and the moving part.

[0037] A force-torque sensor according to a second embodiment of the present invention comprises: a fixed part; a moving part including an inner carrier disposed within the fixed part and an outer carrier disposed between the fixed part and the inner carrier; a sensing part detecting movement of the moving part with respect to the fixed part; a first ball disposed between the inner carrier and the outer carrier; and an elastic member coupled to the inner carrier and the outer carrier, wherein the elastic member can press the inner carrier toward the outer carrier so that the first ball is in close contact with the inner carrier and the outer carrier.

[0038] A force-torque sensor according to a first modified example of the present invention includes: a fixed part; an inner carrier disposed within the fixed part; an outer carrier disposed between the fixed part and the inner carrier; a first ball disposed between the inner carrier and the outer carrier; a magnet disposed on the inner carrier; a sensor detecting the magnet; and a yoke disposed on the fixed part and having an attractive force with the magnet, wherein the inner carrier can press the first ball toward the outer carrier by the attractive force between the magnet and the yoke.

[0039] A force-torque sensor according to a second modified example of the present invention comprises: a fixed part; a moving part at least partially disposed within the fixed part; a sensing part for detecting movement of the moving part with respect to the fixed part; a magnetic shaft disposed between the fixed part and the moving part; and a magnet disposed in the fixed part, wherein an attractive force can be applied between the shaft and the magnet.

[0040] A force-torque sensor according to a third modified example of the present invention includes: a fixed part; a moving part at least partially disposed within the fixed part; a sensing part that detects movement of the moving part with respect to the fixed part; a second ball disposed between the fixed part and the moving part; a yoke disposed on the moving part; and a magnet disposed on the fixed part and having an attractive force with the yoke, wherein the second ball can be disposed between the yoke and the magnet.

[0041] A robot according to a second embodiment of the present invention may include the force-torque sensor.

[0042] A first embodiment of the present invention provides a force-torque sensor that detects external force using a magnet and a sensor. This can reduce manufacturing costs.

[0043] In addition, in the first embodiment of the present invention, the moving part moves in the yaw direction, pitch direction, roll direction, and z-axis direction with respect to the fixed part, and can further move in the x-axis direction and y-axis direction. Therefore, the components of the external force applied to the force-torque sensor can be detected by separating them into six directions. Through this, the magnitude of the force in each direction of the external force applied to the force-torque sensor can be detected more accurately.

[0044] The force-torque sensor according to the second embodiment of the present invention can measure the Z-axis force and torque force separately. This minimizes the influence of noise due to crosstalk on the detection values ​​for each axis. In other words, the measurement accuracy of the force-torque sensor can be improved.

[0045] Furthermore, in the second embodiment of the present invention, as the balls are brought into close contact, the tilt of the moving part is minimized, thereby minimizing the occurrence of crosstalk. That is, the force for each component of the external force acting on the force-torque sensor can be measured more accurately through the force-torque sensor according to the second embodiment of the present invention.

[0046] FIG. 1 is a perspective view of a force-torque sensor according to a first embodiment of the present invention.

[0047] Figure 2 is a cross-sectional view taken along line AA of Figure 1.

[0048] Figure 3 is an enlarged view of a portion of Figure 2.

[0049] Figure 4 is a cross-sectional view viewed from BB in Figure 1.

[0050] FIG. 5 is a cross-sectional view of a force-torque sensor according to a first embodiment of the present invention, cut in a direction perpendicular to the z-axis and viewed from above.

[0051] Figure 6 is an exploded perspective view of a force-torque sensor according to a first embodiment of the present invention.

[0052] FIG. 7 is a perspective view of a force-torque sensor according to a first embodiment of the present invention, with components such as leads and substrates omitted.

[0053] Fig. 8 is a perspective view of Fig. 7 with the lead and other components omitted.

[0054] Fig. 9 is a perspective view of Fig. 8 with the upper cover and other components omitted.

[0055] Fig. 10 is a perspective view of Fig. 9 with the upper elastic member and other components omitted.

[0056] Fig. 11 is a perspective view of Fig. 10 with the carrier omitted.

[0057] Fig. 11 is a bottom perspective view of the state of Fig. 6.

[0058] Figure 12 (a) is a perspective view of Figure 11 with the ball and elastic member omitted, and (b) is an enlarged view of a portion of (a).

[0059] Fig. 13 is a bottom perspective view of the state of Fig. 7.

[0060] Fig. 14 is a bottom perspective view of Fig. 13 with the lower cover and other components omitted.

[0061] Fig. 15 is a bottom perspective view of Fig. 14 with the base and other components omitted.

[0062] Fig. 16 is a cross-sectional view of a force-torque sensor according to a modified example.

[0063] Figure 17 is a cross-sectional view of a force-torque sensor according to another modified example.

[0064] Fig. 18 is a perspective view for explaining the operating method of the force-torque sensor according to the first embodiment of the present invention.

[0065] FIG. 19 is a drawing for explaining a case where an external force having a component in the yaw direction or pitch direction is applied to a force-torque sensor according to the first embodiment of the present invention.

[0066] FIG. 20 is a drawing for explaining a case where an external force having a component in the x-axis direction or y-axis direction is applied to a force-torque sensor according to the first embodiment of the present invention.

[0067] FIG. 21 is a drawing for explaining changes when an external force having a roll direction component is applied to a force-torque sensor according to the first embodiment of the present invention.

[0068] FIG. 22 is a drawing for explaining a case where an external force having a component in the z-axis direction is applied to a force-torque sensor according to the first embodiment of the present invention.

[0069] Fig. 23 is a perspective view of a force-torque sensor according to a second embodiment of the present invention.

[0070] Figure 24 is a cross-sectional view taken along line AA of Figure 23.

[0071] Figure 25 is a cross-sectional view taken from BB of Figure 23.

[0072] Fig. 26 is a cross-sectional view of a force-torque sensor according to a second embodiment of the present invention, cut in a direction perpendicular to the z-axis and viewed from above.

[0073] Fig. 27 is an exploded perspective view of a force-torque sensor according to a second embodiment of the present invention.

[0074] Fig. 28 is a perspective view of a force-torque sensor according to a second embodiment of the present invention, with components such as leads and substrates omitted.

[0075] Fig. 29 is a perspective view of Fig. 28 with the lead and other components omitted.

[0076] Fig. 30 is a perspective view of Fig. 29 with the upper cover and other components omitted.

[0077] Fig. 31 is a perspective view of Fig. 30 with the upper elastic member and other components omitted.

[0078] Figure 32 is a perspective view of Figure 31 with the base omitted.

[0079] Fig. 33 is a bottom perspective view of the state of Fig. 28.

[0080] Figure 34 is a bottom perspective view of Figure 33 with the lower cover and other components omitted.

[0081] Figure 35 is a bottom perspective view of Figure 34 with the lower elastic member and base, etc., omitted.

[0082] Figure 36 is a bottom perspective view of Figure 35 with the external carrier and other components omitted.

[0083] Fig. 37 is a cross-sectional view of a force-torque sensor according to a first modified example of the present invention.

[0084] Figure 38 is a bottom exploded perspective view showing the configuration of the magnet and yoke, etc. of the first modified example of the present invention.

[0085] Figure 39 is a perspective view of a force-torque sensor according to a second modified example of the present invention.

[0086] Figure 40 is a cross-sectional view of a force-torque sensor according to a second modified example of the present invention.

[0087] Fig. 41 is a perspective view showing a shaft and related configuration of a force-torque sensor according to a second modified example of the present invention.

[0088] Figure 42 is a perspective view of a force-torque sensor according to a third modified example of the present invention.

[0089] Fig. 43 is a cross-sectional view of a force-torque sensor according to a third modified example of the present invention.

[0090] Fig. 44 is an exploded perspective view showing the configuration of a human magnet and a yoke, etc. of a force-torque sensor according to a third modified example of the present invention.

[0091] Fig. 45 is a perspective view for explaining the operating method of a force-torque sensor according to the second embodiment of the present invention.

[0092] FIG. 46 is a drawing for explaining a case where an external force having a component in the yaw direction or pitch direction is applied to a force-torque sensor according to a second embodiment of the present invention.

[0093] Figure 47 is a drawing for explaining changes when an external force having a roll direction component is applied to a force-torque sensor according to a second embodiment of the present invention.

[0094] FIG. 48 is a drawing for explaining a case where an external force having a component in the z-axis direction is applied to a force-torque sensor according to a second embodiment of the present invention.

[0095] Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the attached drawings.

[0096] However, the technical idea of ​​the present invention is not limited to some of the embodiments described, but can be implemented in various different forms, and within the scope of the technical idea of ​​the present invention, one or more of the components between the embodiments can be selectively combined or substituted for use.

[0097] In addition, terms (including technical and scientific terms) used in the embodiments of the present invention may be interpreted as having a meaning that can be generally understood by a person of ordinary skill in the technical field to which the present invention belongs, unless explicitly and specifically defined and described, and terms that are commonly used, such as terms defined in a dictionary, may be interpreted in consideration of the contextual meaning of the relevant technology.

[0098] Additionally, the terms used in the embodiments of the present invention are intended to describe the embodiments and are not intended to limit the present invention.

[0099] In this specification, the singular may also include the plural unless specifically stated otherwise in the phrase, and when it is described as “A and / or at least one (or more) of B, C”, it may include one or more of all combinations that can be combined with A, B, C.

[0100] Additionally, in describing components of embodiments of the present invention, terms such as first, second, A, B, (a), (b), etc. may be used. These terms are only intended to distinguish the components from other components, and are not intended to limit the nature, order, or sequence of the components.

[0101] And, when a component is described as being 'connected', 'coupled', or 'connected' to another component, it may include not only cases where the component is 'connected', 'coupled', or 'connected' directly to the other component, but also cases where the component is 'connected', 'coupled', or 'connected' by another component between the component and the other component.

[0102] Additionally, when described as being formed or arranged "above" or "below" each component, "above" or "below" includes not only cases where the two components are in direct contact with each other, but also cases where one or more other components are formed or arranged between the two components. Furthermore, when expressed as "above" or "below," the meaning may include not only the upward direction but also the downward direction based on one component.

[0103] Hereinafter, one of the “upper connecting member (710)”, the “lower connecting member (720)”, the “outer connecting member (730)”, and the “connecting member (740)” may be referred to as the “first connecting member”, the other may be referred to as the “second connecting member”, the other may be referred to as the “third connecting member”, and the other may be referred to as the “fourth connecting member”. In addition, each of the “upper connecting member (710)”, the “lower connecting member (720)”, the “outer connecting member (730)”, and the “connecting member (740)” may be referred to as a “connecting member”.

[0104] Hereinafter, one of “home (114)” and “home (115)” may be referred to as “first home” and the other may be referred to as “second home”.

[0105] Hereinafter, one of the “internal carrier (1210)” and the “external carrier (1220)” may be referred to as the “first carrier” and the other may be referred to as the “second carrier”.

[0106] Hereinafter, one of the “upper connecting member (1710)”, the “lower connecting member (1720)”, the “outer connecting member (1730)”, and the “connecting member (1740)” may be referred to as the “first connecting member”, the other may be referred to as the “second connecting member”, the other may be referred to as the “third connecting member”, and the other may be referred to as the “fourth connecting member”. In addition, each of the “upper connecting member (1710)”, the “lower connecting member (1720)”, the “outer connecting member (1730)”, and the “connecting member (1740)” may be referred to as a “connecting member”.

[0107] Hereinafter, one of the “upper elastic member (1400)” and the “lower elastic member (1500)” may be referred to as the “first elastic member” and the other may be referred to as the “second elastic member”. In addition, each of the “upper elastic member (1400)” and the “lower elastic member (1500)” may be referred to as an “elastic member”.

[0108] Hereinafter, “the first ball (1610)” and “the second ball (1620)” may each be referred to as “balls.”

[0109] Hereinafter, either the "human resource magnet (1170)" or the "human resource magnet (1180)" may be referred to as the "first magnet" and the other as the "second magnet." In addition, each of the "human resource magnet (1170)" and the "human resource magnet (1180)" may be referred to as a "magnet."

[0110] Hereinafter, one of the z-axis, x-axis, and y-axis may be referred to as the “first axis,” the other as the “second axis,” and the other as the “third axis.”

[0111] Hereinafter, one of the roll direction, yaw direction, and pitch direction may be referred to as a “first circumferential direction,” another may be referred to as a “second circumferential direction,” and another may be referred to as a “third circumferential direction.” Alternatively, the roll direction, yaw direction, and pitch direction may be referred to as “first to third directions.”

[0112]

[0113] Hereinafter, the configuration of a force-torque sensor according to a first embodiment of the present invention will be described with reference to the drawings.

[0114] FIG. 1 is a perspective view of a force-torque sensor according to a first embodiment of the present invention. FIG. 2 is a cross-sectional view taken along line AA of FIG. 1. FIG. 3 is an enlarged view of a portion of FIG. 2. FIG. 4 is a cross-sectional view taken along line BB of FIG. 1. FIG. 5 is a cross-sectional view taken along a direction perpendicular to the z-axis and viewed from above of the force-torque sensor according to the first embodiment of the present invention. FIG. 6 is an exploded perspective view of the force-torque sensor according to the first embodiment of the present invention. FIG. 7 is a perspective view of the force-torque sensor according to the first embodiment of the present invention in a state where components such as leads and substrates are omitted. FIG. 8 is a perspective view of FIG. 7 in a state where components such as leads are omitted. FIG. 9 is a perspective view of FIG. 8 in a state where components such as upper covers are omitted. FIG. 10 is a perspective view of FIG. 9 in a state where components such as upper elastic members are omitted. Fig. 11 is a perspective view of Fig. 10 with the carrier omitted. Fig. 11 is a bottom perspective view of the state of Fig. 6. Fig. 12 (a) is a perspective view of Fig. 11 with the ball and elastic member omitted, and (b) is an enlarged view of a portion of (a). Fig. 13 is a bottom perspective view of the state of Fig. 7. Fig. 14 is a bottom perspective view of Fig. 13 with the lower cover and other components omitted. Fig. 15 is a bottom perspective view of Fig. 14 with the base and other components omitted.

[0115] A force-torque sensor can be used to detect and measure forces and torques applied to a robot in real time. A force-torque sensor can detect a force applied to the force-torque sensor. A force-torque sensor can measure a force applied to the force-torque sensor. A force-torque sensor can detect a torque applied to the force-torque sensor. A force-torque sensor can measure a torque applied to the force-torque sensor. A force-torque sensor can be a six-axis force-torque sensor. A force-torque sensor can detect and measure forces in six directions, namely the x-axis, y-axis, z-axis, yaw, pitch, and roll directions. A force-torque sensor can be a finger sensor of a robot.

[0116] The force-torque sensor may include a fixed part (100). The fixed part (100) is a concept distinct from the moving part (200) and may be a part that is relatively fixed when the moving part (200) moves.

[0117] The force-torque sensor may include a base (110). The fixing member (100) may include the base (110). The base (110) may be disposed on the lower cover (130). The base (110) may be disposed on the lower cover (130). The base (110) may be disposed on the upper cover (120). The base (110) may be disposed under the upper cover (120). The base (110) may be disposed between the lower cover (130) and the upper cover (120).

[0118] The base (110) may include a groove (112). The groove (112) may be formed on the inner surface of the fixing member (100). The groove (112) may be formed on the inner surface of the base (110). The groove (112) may be formed concavely on the inner surface of the fixing member (100). The groove (112) may be formed concavely on the inner surface of the base (110). A protrusion (213) of the carrier (210) may be arranged in the groove (112) of the fixing member (100).

[0119] In the first embodiment of the present invention, rotation of the carrier (210) with respect to the base (110) can be prevented through the shape of the fit between the groove (112) of the base (110) and the protrusion (213) of the carrier (210). When the carrier (210) rotates around the z-axis with respect to the fixed part (100), the protrusion (213) of the carrier (210) can come into contact with the groove (112) of the fixed part (100).

[0120] The base (110) may include a groove (113). An outer coupling member (730) may be coupled to the groove (113). Screw threads may be formed on the inner surface of the groove (113) for coupling with the outer coupling member (730).

[0121] The base (110) may include a groove (114). The groove (114) may be an elastic member receiving groove. At least a portion of the elastic member (620) may be placed in the groove (114). The groove (114) may receive at least a portion of the elastic member (620). The groove (114) may be formed on an inner surface of the base (110). The groove (114) may be formed concavely on the inner surface of the base (110).

[0122] The base (110) may include a groove (115). The groove (115) may be a ball receiving groove. At least a portion of the ball (610) may be placed in the groove (115) when the elastic member (620) is compressed. The groove (115) may receive at least a portion of the ball (610).

[0123] The groove (114) of the fixed part (100) may have a shape that is additionally sunken into the groove (115) of the fixed part (100) with a diameter smaller than the groove (115). The groove (114) may be connected to the groove (115). The groove (114) may be formed continuously with the groove (115). The groove (114) may form a step with the groove (115). The groove (114) may be formed with a diameter smaller than the groove (115). The diameter of the elastic member (620) may be smaller than the diameter of the ball (610).

[0124] The base (110) may include a groove (116). Screw threads may be formed on the inner surface of the groove (116). A joining member (740) may be joined to the groove (116).

[0125] The force-torque sensor may include an upper cover (120). The fixing member (100) may include the upper cover (120). The upper cover (120) may be disposed on the base (110). The upper cover (120) may be disposed on the base (110). The upper cover (120) may be coupled to the base (110). The upper cover (120) may be coupled to an upper surface of the base (110). The upper cover (120) may be fixed to the base (110). The upper cover (120) may be disposed between the base (110) and the lid (230).

[0126] The force-torque sensor may include a lower cover (130). The fixing member (100) may include the lower cover (130). The lower cover (130) may form a bottom portion of the force-torque sensor. The lower cover (130) may be positioned opposite the lead (230). The lower cover (130) may be positioned below the base (110). The lower cover (130) may be coupled to a lower surface of the base (110). The lower cover (130) may be coupled to the base (110). The lower cover (130) may include a groove through which the substrate (140) passes.

[0127] The force-torque sensor may include a substrate (140). The fixing member (100) may include the substrate (140). A sensor may be disposed on the substrate (140). A sensor (320) may be disposed on the substrate (140). The substrate (140) may be electrically connected to the sensor (320). The substrate (140) may output an electrical signal detected by the sensor (320) to the outside of the force-torque sensor. A portion of the substrate (140) may be extended to the outside of the lower cover (130).

[0128] The force-torque sensor may include a plate (150). The fixing member (100) may include the plate (150). The plate (150) may be placed on the substrate (140). The plate (150) may be a reinforcing plate. The plate (150) may be placed on the lower surface of the substrate (140). The plate (150) may reinforce the strength of the substrate (140) so that the sensor (320) is placed in the correct position.

[0129] The force-torque sensor may include a moving part (200). The moving part (200) may be disposed within the fixed part (100). The moving part (200) may be disposed on the fixed part (100). The moving part (200) may move relative to the fixed part (100). When an external force is applied, the moving part (200) may move relative to the fixed part (100). At least a portion of the moving part (200) may be disposed within the fixed part (100). A portion of the moving part (200) may be exposed outside the fixed part (100). The moving part (200) may be disposed on the lower cover (130).

[0130] The moving part (200) can move in the x-axis direction, the y-axis direction, the z-axis direction, the yaw direction which is the direction of rotation around the x-axis, the pitch direction which is the direction of rotation around the y-axis, and the roll direction which is the direction of rotation around the z-axis with respect to the fixed part (100). That is, the moving part (200) can shift in the x-axis, y-axis, and z-axis, that is, in the three-axis directions. In addition, the moving part (200) can tilt in the yaw, pitch, and roll directions, that is, in the three directions.

[0131] A first separation space may be formed in the x-axis direction between the moving part (200) and the fixed part (100). The moving part (200) may move in the x-axis direction within the first separation space. A second separation space may be formed in the y-axis direction between the moving part (200) and the fixed part (100). The moving part (200) may move in the y-axis direction within the second separation space.

[0132] The force-torque sensor may include a carrier (210). The moving part (200) may include the carrier (210). The carrier (210) may be disposed within the fixed part (100). The carrier (210) may be disposed on the fixed part (100). The carrier (210) may be disposed within the base (110). The carrier (210) may include a curved surface. The moving part (200) may include a curved surface that contacts the ball (610). The ball (610) may be disposed on the curved surface of the carrier (210). The carrier (210) may be formed in a spherical shape at least partially. The carrier (210) may be formed in a spherical shape at least partially so that the center of rotation does not change and remains constant. Through this, the carrier (210) moves as intended by the designer, so that the occurrence of crosstalk may be minimized.

[0133] The carrier (210) may include a groove (212). The groove (212) may have a screw thread. The groove (212) may be formed on the upper surface of the carrier (210). An upper coupling member (710) may be coupled to the groove (212). Alternatively, the groove (212) may be formed alone.

[0134] The carrier (210) may include a protrusion (213). The protrusion (213) may be a stopper. The protrusion (213) may be formed on the outer surface of the carrier (210). The protrusion (213) may protrude outward from the carrier (210). The protrusion (213) may be placed in the groove (112) of the base (110).

[0135] The force-torque sensor may include a lead (230). The moving part (200) may include the lead (230). The lead (230) may be connected to a carrier (210). At least a portion of the lead (230) may be disposed on the base (110). At least a portion of the lead (230) may be disposed on the upper cover (120). At least a portion of the lead (230) may be disposed on the fixed part (100). At least a portion of the lead (230) may protrude beyond the fixed part (100). An external force may be applied to at least a portion of the lead (230) that protrudes beyond the fixed part (100). An external force may be applied to the lead (230). The lead (230) may be moved by the external force. The lead (230) may be coupled to the carrier (210). The lead (230) may be disposed on the carrier (210). The lead (230) may be placed on the carrier (210). The lead (230) may move integrally with the carrier (210). The lead (230) may be fixed to the carrier (210). At least a portion of the lead (230) may be exposed outside the fixing member (100).

[0136] The lead (230) can move in translation about each axis by an external force. The lead (230) can move in rotation about each axis by an external force. Based on the amount of movement of the moving part (200), the force and torque applied by the external force can be calculated.

[0137] The force-torque sensor may include a detection unit (300). The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100). The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the x-axis direction. The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the y-axis direction. The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the z-axis direction. The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the yaw direction. The detection unit (300) may detect movement of the moving unit (200) with respect to the fixed unit (100) in the pitch direction. The detection unit (300) can detect the roll direction movement of the moving unit (200) with respect to the fixed unit (100).

[0138] The force-torque sensor may include a magnet (310). The magnet (310) may be placed on a carrier (210). The magnet (310) may be placed on a lower surface of the carrier (210). The magnet (310) may be fixed to the carrier (210). The magnet (310) may be coupled to the carrier (210). The magnet (310) may be adhesively bonded to the carrier (210). The carrier (210) may include a groove in which the magnet (310) is placed.

[0139] The magnet (310) may include a plurality of magnets. The magnet (310) may include four magnets. The magnet (310) may include first to fourth magnets (311, 312, 313, 314).

[0140] The first magnet (311) may be placed on the carrier (210). The first magnet (311) may be placed on the lower surface of the carrier (210). The first magnet (311) may be placed on the lower portion of the carrier (210).

[0141] The second magnet (312) may be placed on the carrier (210). The second magnet (312) may be placed on the lower surface of the carrier (210). The second magnet (312) may be placed on the lower portion of the carrier (210).

[0142] The third magnet (313) may be placed on the carrier (210). The third magnet (313) may be placed on the lower surface of the carrier (210). The third magnet (313) may be placed on the lower portion of the carrier (210).

[0143] The fourth magnet (314) may be placed on the carrier (210). The fourth magnet (314) may be placed on the lower surface of the carrier (210). The fourth magnet (314) may be placed on the lower portion of the carrier (210).

[0144] The first magnet (311) and the third magnet (313) may be arranged opposite each other. The fourth magnet (314) may be arranged between the first magnet (311) and the third magnet (313). The third magnet (313) may be arranged on the opposite side of the first magnet (311) with respect to the fourth magnet (314). The fourth magnet (314) may be arranged in the central region on the lower surface of the carrier (210).

[0145] The force-torque sensor may include a sensor (320). The sensor (320) may detect a magnet (310). The sensor (320) may detect a magnetic field of the magnet (310). The sensor (320) may be a Hall sensor. The sensor (320) may include a Hall element. The sensor (320) may be a TMR sensor. The sensor (320) may detect the position of the magnet (310).

[0146] The sensor (320) may be placed on the fixed part (100). The sensor (320) may be placed on the substrate (140). The sensor (320) may be placed on the plate (150). The sensor (320) may be placed on the lower cover (130). The sensor (320) may be placed between the carrier (210) and the lower cover (130). The sensor (320) may be placed on the base (110).

[0147] The sensor (320) may include a plurality of sensors. The sensor (320) may include four sensors. The sensor (320) may include first to fourth sensors (321, 322, 323, 324).

[0148] The first sensor (321) may be placed on the fixed part (100). The first sensor (321) may be placed on the substrate (140). The first sensor (321) may be placed on the lower cover (130). The first sensor (321) may be placed on the base (110). The first sensor (321) may detect the first magnet (311). The first sensor (321) may detect the magnetic force of the first magnet (311).

[0149] The second sensor (322) may be placed on the fixed part (100). The second sensor (322) may be placed on the substrate (140). The second sensor (322) may be placed on the lower cover (130). The second sensor (322) may be placed on the base (110). The second sensor (322) may detect the second magnet (312). The second sensor (322) may detect the magnetic force of the second magnet (312).

[0150] The third sensor (323) may be placed on the fixed part (100). The third sensor (323) may be placed on the substrate (140). The third sensor (323) may be placed on the lower cover (130). The third sensor (323) may be placed on the base (110). The third sensor (323) may detect the third magnet (313). The third sensor (323) may detect the magnetic force of the third magnet (313).

[0151] The fourth sensor (324) may be placed on the fixed part (100). The fourth sensor (324) may be placed on the substrate (140). The fourth sensor (324) may be placed on the lower cover (130). The fourth sensor (324) may be placed on the base (110). The fourth sensor (324) may detect the third magnet (313). The fourth sensor (324) may detect the magnetic force of the third magnet (313).

[0152] In the first embodiment of the present invention, the sensor (320) can detect the x-axis direction movement amount, y-axis direction movement amount, z-axis direction movement amount, yaw direction movement amount, pitch direction movement amount, and roll direction movement amount of the moving part (200) with respect to the fixed part (100) through the first to fourth sensors (321, 322, 323, 324).

[0153] In another embodiment, the force-torque sensor may include a capacitive sensing sensor. That is, the force-torque sensor may include a capacitive sensor. The force-torque sensor may include a first electrode and a second electrode. The force-torque sensor may include a control unit that applies power to the first electrode, and a sensing unit that measures a change in capacitance between the first electrode and the second electrode. At this time, the second electrode may be grounded. The first electrode may be disposed on the fixing unit (100). The second electrode may be disposed on the carrier (210). When the carrier (210) moves, the change in capacitance between the first electrode and the second electrode may be measured to calculate the amount of movement of the carrier (210).

[0154] The force-torque sensor may include an upper elastic member (400). The upper elastic member (400) may be coupled to a base (110) and a carrier (210). The upper elastic member (400) may be coupled to the base (110). The upper elastic member (400) may be coupled to the carrier (210).

[0155] The upper elastic member (400) can press the carrier (210) toward the base (110) so that the ball (610) is in close contact with the carrier (210) and the base (110). When the upper elastic member (400) is assembled, the carrier (210) can be pressed toward the base (110) using the elasticity of the upper elastic member (400). At this time, the carrier (210) can press the ball (610) so that the ball (610) is in close contact with the carrier (210) and the base (110).

[0156] The upper elastic member (400) may be a spring. The upper elastic member (400) may be formed of metal. The upper elastic member (400) may have elasticity.

[0157] The upper elastic member (400) may include an inner portion (410). The inner portion (410) may be coupled to the carrier (210). The inner portion (410) may be disposed on the carrier (210). The inner portion (410) may be fixed to the carrier (210). The inner portion (410) may be coupled to the upper surface of the carrier (210). The inner portion (410) may be disposed on the upper surface of the carrier (210). The inner portion (410) may be fixed to the upper surface of the carrier (210).

[0158] The upper elastic member (400) may include an outer portion (420). The outer portion (420) may be coupled to the base (110). The outer portion (420) may be disposed on the base (110). The outer portion (420) may be fixed to the base (110). The outer portion (420) may be coupled to the upper surface of the base (110). The outer portion (420) may be disposed on the upper surface of the base (110). The outer portion (420) may be fixed to the upper surface of the base (110).

[0159] The upper elastic member (400) may include a connecting portion (430). The connecting portion (430) may connect the inner portion (410) and the outer portion (420). The connecting portion (430) may elastically connect the inner portion (410) and the outer portion (420). The connecting portion (430) may have elasticity. The connecting portion (430) may have restoring force. The connecting portion (430) may include a bent shape. The connecting portion (430) may be formed by being bent multiple times. The connecting portion (430) may include a bent portion.

[0160] The force-torque sensor may include a guide member. The guide member may guide the movement of the moving part (200). The guide member may guide the movement of the moving part (200) relative to the fixed part (100).

[0161] The force-torque sensor may include a ball (610). The ball (610) may be disposed between a fixed part (100) and a moving part (200). The ball (610) may be disposed between a base (110) and a carrier (210). The ball (610) may be disposed on the fixed part (100). The ball (610) may be disposed on the moving part (200). The ball (610) may be disposed on the fixed part (100). The ball (610) may be disposed on the moving part (200). The ball (610) may be in contact with the fixed part (100). The ball (610) may be in contact with the moving part (200).

[0162] The ball (610) can guide the movement of the moving part (200). The ball (610) can be formed in a spherical shape. The ball (610) can rotate.

[0163] The ball (610) can rotate between the elastic member (620) and the moving part (200). The ball (610) can rotate when the moving part (200) is tilted. The ball (610) can move when the moving part (200) is shifted. When the ball (610) is pressed by the moving part (200), it can compress the elastic member (620) and move toward the fixed part (100).

[0164] The ball (610) may include multiple balls. The ball (610) may include four balls. The four balls may be arranged symmetrically about the z-axis. All balls may be in contact with the carrier (210). All balls may be maintained in contact with the carrier (210).

[0165] The force-torque sensor may include an elastic member (620). The elastic member (620) may be disposed between the fixed member (100) and the movable member (200). The elastic member (620) may be disposed between the base (110) and the carrier (210). The elastic member (620) may be disposed on the fixed member (100). Alternatively, the elastic member (620) may be disposed on the movable member (200). The elastic member (620) may be disposed on the fixed member (100). The elastic member (620) may be in contact with the fixed member (100).

[0166] The elastic member (620) can press the ball (610) toward the moving part (200). One end of the elastic member (620) can be placed on the fixed part (100). The ball (610) can be placed on the other end of the elastic member (620).

[0167] The elastic member (620) may include a coil spring. The elastic member (620) may be a coil spring. The elastic member (620) may be a spring. The elastic member (620) may have elasticity. The elastic member (620) may have restoring force. The elastic member (620) may be formed of metal.

[0168] In the first embodiment of the present invention, the elastic member (620) may be arranged on the fixed part (100) such that the central axis of the elastic member (620) forms an acute angle with the z-axis. The elastic member (620) may be arranged diagonally. The elastic member (620) may be arranged diagonally with respect to the z-axis. The elastic member (620) may pressurize the ball (610) in the diagonal direction.

[0169] The elastic member (620) may include a plurality of elastic members. The elastic member (620) may include four elastic members. The four elastic members may be arranged symmetrically about the z-axis.

[0170] In the first embodiment of the present invention, the reaction force for yaw, pitch, and roll movements can be provided through the upper ball (610). In addition, the reaction force for minute movements about the x-axis, y-axis, and z-axis movements can be provided through the elastic member (620) at the bottom.

[0171] The force-torque sensor may include a coupling member. The coupling member may couple two or more different members together. For example, the coupling member may be a screw. The coupling member may be a bolt.

[0172] The force-torque sensor may include an upper coupling member (710). The upper coupling member (710) may be coupled to a lead (230) and a carrier (210). The upper coupling member (710) may secure the lead (230) to the carrier (210).

[0173] The force-torque sensor may include a lower coupling member (720). The lower coupling member (720) may secure the lower cover (130) to the base (110). The lower coupling member (720) may be coupled to the base (110) by passing through the lower cover (130). The lower cover (130) may include a hole through which the lower coupling member (720) passes.

[0174] The force-torque sensor may include an outer coupling member (730). The outer coupling member (730) may secure the upper cover (120) to the base (110). The outer coupling member (730) may include screw threads. The outer coupling member (730) may be screw-coupled to the base (110) through the upper cover (120). The outer coupling member (730) may be screw-coupled to the base (110) through a hole (128) of the upper cover (120).

[0175] The force-torque sensor may include a coupling member (740). The coupling member (740) may couple the upper elastic member (400) to the base (110). The coupling member (740) may secure the upper elastic member (400) to the base (110). The coupling member (740) may include screw threads. The coupling member (740) may be screw-coupled to the base (110) by passing through the upper elastic member (400). The upper elastic member (400) may include a hole through which the coupling member (740) passes.

[0176]

[0177] Below, the configuration of a force-torque sensor according to a modified example is described with reference to the drawings.

[0178] Fig. 16 is a cross-sectional view of a force-torque sensor according to a modified example.

[0179] Hereinafter, the modified examples only describe differences from the first embodiment of the present invention. Therefore, the configuration of the modified examples that are not described can be analogously applied to the description of the first embodiment of the present invention. In the modified example, the elastic member (630) can be arranged on the fixed part (100). The central axis of the elastic member (630) can be parallel to the z-axis. That is, the elastic member (630) can be arranged in the vertical direction. The elastic member (630) can press the ball (610) in the z-axis direction.

[0180]

[0181] Below, the configuration of a force-torque sensor according to another modified example is described with reference to the drawings.

[0182] Figure 17 is a cross-sectional view of a force-torque sensor according to another modified example.

[0183] Hereinafter, other modified examples will be described only in terms of differences from the first embodiment of the present invention. Therefore, the configuration of other modified examples that are not described can be analogously applied to the description of the first embodiment of the present invention. In other modified examples, the elastic member (640) can be arranged on the fixed part (100). The central axis of the elastic member (640) can be perpendicular to the z-axis. That is, the elastic member (640) can be arranged in the horizontal direction. The elastic member (640) can press the ball (610) in a direction perpendicular to the z-axis.

[0184]

[0185] Hereinafter, the operation of a force-torque sensor according to a first embodiment of the present invention will be described with reference to the drawings.

[0186] Fig. 18 is a perspective view for explaining an operating method of a force-torque sensor according to a first embodiment of the present invention. Fig. 19 is a diagram for explaining a case where an external force having a yaw or pitch direction component is applied to a force-torque sensor according to a first embodiment of the present invention. Fig. 20 is a diagram for explaining a case where an external force having an x-axis direction or y-axis direction component is applied to a force-torque sensor according to a first embodiment of the present invention. Fig. 21 is a diagram for explaining a change when an external force having a roll direction component is applied to a force-torque sensor according to a first embodiment of the present invention. Fig. 22 is a diagram for explaining a case where an external force having a z-axis direction component is applied to a force-torque sensor according to a first embodiment of the present invention.

[0187] When an external force having a yaw component is applied to the lead (230) of the force-torque sensor according to the first embodiment of the present invention, the lead (230) can rotate or tilt around the x-axis (see yaw in FIG. 18). At this time, the lead (230) can move integrally with the carrier (210) (see A, B in FIG. 19). Meanwhile, since the fixed part (100) is maintained in a fixed state, the sensor (320) arranged on the fixed part (100) detects the magnet (310) arranged on the carrier (210), so that the amount of movement of the lead (230) and the carrier (210) can be measured. Through this, the yaw component of the external force applied to the lead (230) can be measured.

[0188] When an external force having a pitch direction component is applied to the lead (230) of the force-torque sensor according to the first embodiment of the present invention, the lead (230) can rotate or tilt around the y-axis (see pitch in FIG. 18). At this time, the lead (230) can move integrally with the carrier (210). Meanwhile, since the fixed part (100) is maintained in a fixed state, the sensor (320) arranged on the fixed part (100) detects the magnet (310) arranged on the carrier (210), so that the amount of movement of the lead (230) and the carrier (210) can be measured. Through this, the pitch direction component of the external force applied to the lead (230) can be measured.

[0189] When an external force having an x-axis component is applied to the lead (230) of the force-torque sensor according to the first embodiment of the present invention, the lead (230) can move along the x-axis (see Fx in FIG. 18). At this time, the lead (230) can move integrally with the carrier (210). Meanwhile, since the fixed part (100) is maintained in a fixed state, the sensor (320) arranged on the fixed part (100) detects the magnet (310) arranged on the carrier (210), so that the amount of movement of the lead (230) and the carrier (210) can be measured. Through this, the force of the x-axis component of the external force applied to the lead (230) can be measured.

[0190] When an external force having a y-axis component is applied to the lead (230) of the force-torque sensor according to the first embodiment of the present invention, the lead (230) can move along the y-axis (see Fy in FIG. 18). At this time, the lead (230) can move integrally with the carrier (210) (see A and B in FIG. 20). Meanwhile, since the fixed part (100) is maintained in a fixed state, the sensor (320) arranged on the fixed part (100) detects the magnet (310) arranged on the carrier (210), so that the amount of movement of the lead (230) and the carrier (210) can be measured. Through this, the y-axis component of the external force applied to the lead (230) can be measured.

[0191] As described, in the first embodiment of the present invention, the torque of the y-axis component of the external force and the force of the y-axis component can be distinguished. In addition, the torque of the pitch-axis component of the external force and the force of the x-axis component can be distinguished.

[0192] When an external force having a roll direction component is applied to the lead (230) of the force-torque sensor according to the first embodiment of the present invention, the lead (230) can rotate or tilt around the z-axis (see roll in FIG. 18). The lead (230) can move with respect to the fixed part (100) as an integral part with the carrier (210) (see a, b in FIG. 21). At this time, the sensor (320) arranged on the fixed part (100) detects the magnet (310) arranged on the carrier (210), so that the amount of movement of the lead (230) and the carrier (210) can be measured. Through this, the force of the roll direction component of the external force applied to the lead (230) can be measured.

[0193] When an external force having a z-axis component is applied to the lead (230) of the force-torque sensor according to the first embodiment of the present invention, the lead (230) can move along the z-axis (see Fz in FIG. 18). The lead (230) can move with respect to the fixed part (100) as an integral part with the carrier (210) (see A, B in FIG. 22). At this time, the sensor (320) arranged on the fixed part (100) detects the magnet (310) arranged on the carrier (210), so that the amount of movement of the lead (230) and the carrier (210) can be measured. Through this, the force of the z-axis component of the external force applied to the lead (230) can be measured.

[0194]

[0195] Below, the configuration of a robot according to the first embodiment of the present invention is described.

[0196] A robot may include a body. The robot may include an arm member connected to the body. The arm member of the robot may include a gripping portion. The gripping portion may include, for example, a finger shape. The force-torque sensor of the first embodiment of the present invention may be disposed on the gripping portion of the arm member. The arm member of the robot may include a joint. The force-torque sensor of the first embodiment of the present invention may be disposed on a joint of the arm member.

[0197]

[0198] Below, the configuration of a force-torque sensor according to a second embodiment of the present invention is described with reference to the drawings.

[0199] Fig. 23 is a perspective view of a force-torque sensor according to a second embodiment of the present invention. Fig. 24 is a cross-sectional view taken along line AA of Fig. 23. Fig. 25 is a cross-sectional view taken along line BB of Fig. 23. Fig. 26 is a cross-sectional view taken along line AA of Fig. 23. Fig. 27 is an exploded perspective view of a force-torque sensor according to a second embodiment of the present invention, taken in a direction perpendicular to the z-axis and viewed from above. Fig. 27 is an exploded perspective view of a force-torque sensor according to a second embodiment of the present invention. Fig. 28 is a perspective view of a force-torque sensor according to a second embodiment of the present invention, in which components such as leads and substrates are omitted. Fig. 29 is a perspective view of Fig. 28, in which components such as leads are omitted. Fig. 30 is a perspective view of Fig. 29, in which components such as upper covers are omitted. Fig. 31 is a perspective view of Fig. 30, in which components such as upper elastic members are omitted. Fig. 32 is a perspective view of Fig. 31 with the base omitted. Fig. 33 is a bottom perspective view of Fig. 28. Fig. 34 is a bottom perspective view of Fig. 33 with the lower cover and other components omitted. Fig. 35 is a bottom perspective view of Fig. 34 with the lower elastic member and base and other components omitted. Fig. 36 is a bottom perspective view of Fig. 35 with the external carrier and other components omitted.

[0200] A force-torque sensor can be used to detect and measure forces and torques applied to a robot in real time. A force-torque sensor can detect a force applied to the force-torque sensor. A force-torque sensor can measure a force applied to the force-torque sensor. A force-torque sensor can detect a torque applied to the force-torque sensor. A force-torque sensor can measure a torque applied to the force-torque sensor. A force-torque sensor can be a six-axis force-torque sensor. A force-torque sensor can detect and measure forces in six directions, namely the x-axis, y-axis, z-axis, yaw, pitch, and roll directions. A force-torque sensor can be a finger sensor of a robot.

[0201] The force-torque sensor may include a fixed part (1100). The fixed part (1100) is a concept distinct from the moving part (1200) and may be a part that is relatively fixed when the moving part (1200) moves.

[0202] The force-torque sensor may include a base (1110). The fixing member (1100) may include the base (1110). The base (1110) may be disposed on the lower cover (1130). The base (1110) may be disposed on the lower cover (1130). The base (1110) may be disposed on the upper cover (1120). The base (1110) may be disposed under the upper cover (1120). The base (1110) may be disposed between the lower cover (1130) and the upper cover (1120).

[0203] The base (1110) may include a groove (1111). The groove (1111) may be a ball rail. A second ball (1620) may be placed in the groove (1111). The groove (1111) may extend in the z-axis direction. The second ball (1620) may move along the groove (1111) of the base (1110).

[0204] The base (1110) may include a groove (1112). The groove (1112) may be formed on the inner surface of the fixing portion (1100). The groove (1112) may be formed on the inner surface of the base (1110). The groove (1112) may be formed concavely on the inner surface of the fixing portion (1100). The groove (1112) may be formed concavely on the inner surface of the base (1110). A protrusion (1226) of an external carrier (1220) may be arranged in the groove (1112) of the fixing portion (1100).

[0205] In the second embodiment of the present invention, the rotation of the external carrier (1220) with respect to the base (1110) can be prevented through the shape of the fit between the groove (1112) of the base (1110) and the protrusion (1226) of the external carrier (1220). When the external carrier (1220) rotates around the z-axis with respect to the fixed part (1100), the protrusion (1226) of the external carrier (1220) can come into contact with the groove (1112) of the fixed part (1100).

[0206] The base (1110) may include a groove (1113). An outer coupling member (1730) may be coupled to the groove (1113). Screw threads may be formed on the inner surface of the groove (1113) for coupling with the outer coupling member (1730).

[0207] The force-torque sensor may include an upper cover (1120). The fixing member (1100) may include the upper cover (1120). The upper cover (1120) may be disposed on the base (1110). The upper cover (1120) may be disposed on the base (1110). The upper cover (1120) may be coupled to the base (1110). The upper cover (1120) may be coupled to an upper surface of the base (1110). The upper cover (1120) may be fixed to the base (1110). The upper cover (1120) may be disposed between the base (1110) and the lid (1230).

[0208] The force-torque sensor may include a lower cover (1130). The fixing member (1100) may include the lower cover (1130). The lower cover (1130) may form a bottom portion of the force-torque sensor. The lower cover (1130) may be positioned opposite the lead (1230). The lower cover (1130) may be positioned below the base (1110). The lower cover (1130) may be coupled to a lower surface of the base (1110). The lower cover (1130) may be coupled to the base (1110). The lower cover (1130) may include a groove through which the substrate (1140) passes.

[0209] The force-torque sensor may include a substrate (1140). The fixing member (1100) may include the substrate (1140). A sensor may be disposed on the substrate (1140). First to third sensors (1340, 1350, 1360) may be disposed on the substrate (1140). The substrate (1140) may be electrically connected to the first to third sensors (1340, 1350, 1360). The substrate (1140) may output an electrical signal detected by the first to third sensors (1340, 1350, 1360) to the outside of the force-torque sensor. A portion of the substrate (1140) may be extended outside the lower cover (1130).

[0210] In the second embodiment of the present invention, a sealing member may be placed in the space of the substrate (1140) extended between the base (1110) and the lower cover (1130). The sealing member may be placed between the substrate (1140) and the base (1110) and between the substrate (1140) and the lower cover (1130). Through this, the space between the substrate (1140) and the base (1110) and between the substrate (1140) and the lower cover (1130) may be sealed.

[0211] The force-torque sensor may include a plate (1150). The fixing member (1100) may include the plate (1150). The plate (1150) may be placed on the substrate (1140). The plate (1150) may be a reinforcing plate. The plate (1150) may be placed on the lower surface of the substrate (1140). The plate (1150) may reinforce the strength of the substrate (1140) so that the first to third sensors (1340, 1350, 1360) are placed in the correct positions.

[0212] The force-torque sensor may include a moving part (1200). The moving part (1200) may be disposed within the fixed part (1100). The moving part (1200) may be disposed on the fixed part (1100). The moving part (1200) may move relative to the fixed part (1100). When an external force is applied, the moving part (1200) may move relative to the fixed part (1100). At least a portion of the moving part (1200) may be disposed within the fixed part (1100). A portion of the moving part (1200) may be exposed outside the fixed part (1100). The moving part (1200) may be disposed on the lower cover (1130).

[0213] The force-torque sensor may include an inner carrier (1210). The moving part (1200) may include the inner carrier (1210). The inner carrier (1210) may be disposed within the fixed part (1100). The inner carrier (1210) may be disposed within the outer carrier (1220). The inner carrier (1210) may be disposed on the fixed part (1100). The inner carrier (1210) may be disposed within the base (1110). The inner carrier (1210) may include a curved surface. A first ball (1610) may be disposed on the curved surface of the inner carrier (1210). The inner carrier (1210) may be formed in a spherical shape at least partially. The inner carrier (1210) may be formed in a spherical shape at least partially so that the center of rotation does not change and remains constant. Through this, the internal carrier (1210) moves as intended by the designer, so the occurrence of crosstalk can be minimized.

[0214] The inner carrier (1210) can move in a yaw direction, which is a rotational direction centered around the x-axis perpendicular to the z-axis with respect to the outer carrier (1220), a pitch direction, which is a rotational direction centered around the y-axis perpendicular to each of the z-axis and the x-axis, and a roll direction, which is a rotational direction centered around the z-axis.

[0215] The inner carrier (1210) and the outer carrier (1220) can move integrally in the z-axis direction with respect to the fixed part (1100).

[0216] The inner carrier (1210) may include a groove (1212). The groove (1212) may have a thread. The groove (1212) may be formed on the upper surface of the inner carrier (1210). The groove (1212) may be formed on the outer peripheral surface of the inner carrier (1210). An upper coupling member (1710) may be coupled to the groove (1212). Alternatively, the groove (1212) may be formed alone.

[0217] The inner carrier (1210) may include a protrusion (1213). The protrusion (1213) may be a stopper. The protrusion (1213) may be formed on an outer surface of the inner carrier (1210). The protrusion (1213) may protrude outward from the inner carrier (1210). The protrusion (1213) may be positioned in a groove (1225) of the outer carrier (1220).

[0218] The force-torque sensor may include an outer carrier (1220). The moving part (1200) may include the outer carrier (1220). The outer carrier (1220) may be disposed between the inner carrier (1210) and the fixed part (1100). The outer carrier (1220) may be disposed on the outside of the inner carrier (1210). The outer carrier (1220) may be disposed within the fixed part (1100). The outer carrier (1220) may be disposed on the fixed part (1100). The outer carrier (1220) may be disposed within the base (1110).

[0219] The outer carrier (1220) may include a first groove (1221). The first groove (1221) may be a ball rail. A first ball (1610) may be placed in the first groove (1221). The first ball (1610) may move along the first groove (1221). Alternatively, the first ball (1610) may rotate while at least a portion of the first ball (1610) is accommodated in the first groove (1221).

[0220] The outer carrier (1220) may include a second groove (1222). The second groove (1222) may be a ball rail. A second ball (1620) may be placed in the second groove (1222). The second ball (1620) may move along the second groove (1222). The second groove (1222) may extend in the z-axis direction.

[0221] The outer carrier (1220) may include a groove (1225). The groove (1225) may be formed on the inner surface of the outer carrier (1220). The groove (1225) may be formed concavely on the inner surface of the outer carrier (1220). The protrusion (1213) of the inner carrier (1210) may be arranged in the groove (1225) of the outer carrier (1220).

[0222] The groove (1225) can limit the movement of the inner carrier (1210) within a preset range. When the inner carrier (1210) rotates about the z-axis by a preset angle or more with respect to the outer carrier (1220), the protrusion (1213) of the inner carrier (1210) can come into contact with the groove (1225) of the outer carrier (1220).

[0223] The outer carrier (1220) may include a protrusion (1226). The protrusion (1226) may be a stopper. The protrusion (1226) may be formed on an outer surface of the outer carrier (1220). The protrusion (1226) may protrude outwardly from the outer carrier (1220). The protrusion (1226) may be positioned in a groove (1112) of the fixing member (1100).

[0224] The force-torque sensor may include a lead (1230). The moving part (1200) may include the lead (1230). The lead (1230) may be connected to an internal carrier (1210). At least a portion of the lead (1230) may be disposed on a base (1110). At least a portion of the lead (1230) may be disposed on an upper cover (1120). At least a portion of the lead (1230) may be disposed on a fixed part (1100). At least a portion of the lead (1230) may protrude beyond the fixed part (1100). An external force may be applied to at least a portion of the lead (1230) that protrudes beyond the fixed part (1100). The external force may be applied to the lead (1230). The lead (1230) may be moved by the external force. The lead (1230) may be coupled to the internal carrier (1210). The lead (1230) may be placed on the inner carrier (1210). The lead (1230) may be placed on the inner carrier (1210). The lead (1230) may move integrally with the inner carrier (1210). The lead (1230) may be fixed to the inner carrier (1210). At least a portion of the lead (1230) may be exposed outside the fixing member (1100).

[0225] When a force is applied to the lead (1230) in the direction of the first axis, the direction of the second axis, the direction of rotation about the first axis, the direction of rotation about the second axis, and the direction of rotation about the third axis, the internal carrier (1210) can move with respect to the external carrier (1220). When a force is applied to the lead (1230) in the direction of the third axis, the internal carrier (1210) and the external carrier (1220) can move together with respect to the fixed part (1100). At this time, the first axis may be the x-axis, the second axis may be the y-axis, and the third axis may be the z-axis.

[0226] The force-torque sensor may include a detection unit (1300). The detection unit (1300) may detect movement of the moving unit (1200) with respect to the fixed unit (1100). The detection unit (1300) may detect movement of the moving unit (1200) with respect to the fixed unit (1100) in the x-axis direction. The detection unit (1300) may detect movement of the moving unit (1200) with respect to the fixed unit (1100) in the y-axis direction. The detection unit (1300) may detect movement of the moving unit (1200) with respect to the fixed unit (1100) in the yaw direction. The detection unit (1300) may detect movement of the moving unit (1200) with respect to the fixed unit (1100) in the pitch direction. The detection unit (1300) can detect the roll direction movement of the moving unit (1200) with respect to the fixed unit (1100). The detection unit (1300) can detect the z-axis direction movement of the moving unit (1200) with respect to the fixed unit (1100).

[0227] The force-torque sensor may include a first magnet (1310). The sensing unit (1300) may include the first magnet (1310). The first magnet (1310) may be disposed on the inner carrier (1210). The first magnet (1310) may be disposed on the lower surface of the inner carrier (1210). The first magnet (1310) may be disposed on the lower surface of the inner carrier (1210).

[0228] The force-torque sensor may include a second magnet (1320). The sensing unit (1300) may include the second magnet (1320). The second magnet (1320) may be disposed on the inner carrier (1210). The second magnet (1320) may be disposed on the lower surface of the inner carrier (1210). The second magnet (1320) may be disposed on the lower surface of the inner carrier (1210).

[0229] The force-torque sensor may include a third magnet (1330). The sensing unit (1300) may include the third magnet (1330). The third magnet (1330) may be disposed on the external carrier (1220). The third magnet (1330) may be disposed on the lower surface of the external carrier (1220). The third magnet (1330) may be disposed on the lower surface of the external carrier (1220).

[0230] The force-torque sensor may include a first sensor (1340). The detection unit (1300) may include the first sensor (1340). The first sensor (1340) may be disposed on the fixing unit (1100). The first sensor (1340) may be disposed on the substrate (1140). The first sensor (1340) may be disposed on the lower cover (1130). The first sensor (1340) may be disposed on the base (1110). The first sensor (1340) may detect the first magnet (1310). The first sensor (1340) may detect the magnetic force of the first magnet (1310). The first sensor (1340) may detect the movement of the lead (1230) in the x-axis direction. The first sensor (1340) can detect the pitch direction tilt of the lead (1230). The first sensor (1340) may be a Hall sensor. The first sensor (1340) may be a TMR sensor.

[0231] The force-torque sensor may include a second sensor (1350). The detection unit (1300) may include the second sensor (1350). The second sensor (1350) may be disposed on the fixing unit (1100). The second sensor (1350) may be disposed on the substrate (1140). The second sensor (1350) may be disposed on the lower cover (1130). The second sensor (1350) may be disposed on the base (1110). The second sensor (1350) may detect the second magnet (1320). The second sensor (1350) may detect the magnetic force of the second magnet (1320). The second sensor (1350) may detect the movement of the lead (1230) in the y-axis direction. The second sensor (1350) can detect the yaw tilt of the lead (1230). The second sensor (1350) may be a Hall sensor. The second sensor (1350) may be a TMR sensor.

[0232] However, conversely, the first sensor (1340) can detect movement in the y-axis direction and tilt in the yaw direction, and the second sensor (1350) can detect movement in the x-axis direction and tilt in the pitch direction.

[0233] In the above, it has been described that the first sensor (1340) detects the x-axis movement and pitch-direction tilt of the lead (1230), but more accurate sensing can be achieved together with the detection value of the second sensor (1350). When the second sensor (1350) detects the y-axis movement and yaw-direction tilt of the lead (1230), more accurate sensing can be achieved together with the detection value of the first sensor (1340).

[0234] The first sensor (1340) and the second sensor (1350) may together detect roll tilt or movement. Alternatively, at least one of the first sensor (1340) and the second sensor (1350) may detect roll tilt or movement.

[0235] The force-torque sensor may include a third sensor (1360). The detection unit (1300) may include the third sensor (1360). The third sensor (1360) may be disposed on the fixing unit (1100). The third sensor (1360) may be disposed on the substrate (1140). The third sensor (1360) may be disposed on the lower cover (1130). The third sensor (1360) may be disposed on the base (1110). The third sensor (1360) may detect the third magnet (1330). The third sensor (1360) may detect the magnetic force of the third magnet (1330). The third sensor (1360) may be a Hall sensor. The third sensor (1360) may be a TMR sensor.

[0236] In another embodiment, the force-torque sensor may include a capacitive sensing sensor. That is, the force-torque sensor may include a capacitive sensor. The force-torque sensor may include a first electrode and a second electrode. The force-torque sensor may include a control unit that applies power to the first electrode, and a sensing unit that measures a change in capacitance between the first electrode and the second electrode. At this time, the second electrode may be grounded. The first electrode may be disposed on the fixing unit (1100). The second electrode may be disposed on at least one of the internal carrier (1210) and the external carrier (1220). When the internal carrier (1210) and / or the external carrier (1220) moves, the change in capacitance between the first electrode and the second electrode may be measured to calculate the amount of movement of the internal carrier (1210) and / or the external carrier (1220).

[0237] The force-torque sensor may include an upper elastic member (1400). The upper elastic member (1400) may be coupled to an inner carrier (1210) and an outer carrier (1220). The upper elastic member (1400) may be coupled to the inner carrier (1210). The upper elastic member (1400) may be coupled to the outer carrier (1220).

[0238] The upper elastic member (1400) can press the inner carrier (1210) toward the outer carrier (1220) so that the first ball (1610) is in close contact with the inner carrier (1210) and the outer carrier (1220). When the upper elastic member (1400) is assembled, the elasticity of the upper elastic member (1400) can be used to press the inner carrier (1210) toward the outer carrier (1220). At this time, the inner carrier (1210) can press the first ball (1610) so that the first ball (1610) is in close contact with the inner carrier (1210) and the outer carrier (1220).

[0239] The upper elastic member (1400) may be a spring. The upper elastic member (1400) may be formed of metal. The upper elastic member (1400) may have elasticity.

[0240] The upper elastic member (1400) may include an inner portion (1410). The inner portion (1410) may be coupled to an inner carrier (1210). The inner portion (1410) may be disposed on the inner carrier (1210). The inner portion (1410) may be fixed to the inner carrier (1210). The inner portion (1410) may be coupled to an upper surface of the inner carrier (1210). The inner portion (1410) may be disposed on an upper surface of the inner carrier (1210). The inner portion (1410) may be fixed to an upper surface of the inner carrier (1210).

[0241] In the second embodiment of the present invention, the inner part (1410) of the upper elastic member (1400) may be arranged higher than the outer part (1420) of the upper elastic member (1400) (see a of FIGS. 24 and 25). The length of the inner carrier (1210) in the z-axis direction may be longer than the length of the outer carrier (1220) in the z-axis direction. As a variation, the upper surface of the inner carrier (1210) to which the upper elastic member (1400) is coupled and the upper surface of the outer carrier (1220) may be arranged at the same height. At this time, the first ball (1610) may be maintained in contact with the inner carrier (1210) and the outer carrier (1220).

[0242] The upper elastic member (1400) can press the inner carrier (1210) toward the outer carrier (1220) so that the first ball (1610) is in close contact with the inner carrier (1210) and the outer carrier (1220). The upper elastic member (1400) can be coupled with the inner carrier (1210) so that a preload is applied toward the outer carrier (1220).

[0243] The upper elastic member (1400) may include an outer portion (1420). The outer portion (1420) may be coupled to an outer carrier (1220). The outer portion (1420) may be disposed on the outer carrier (1220). The outer portion (1420) may be fixed to the outer carrier (1220). The outer portion (1420) may be coupled to an upper surface of the outer carrier (1220). The outer portion (1420) may be disposed on an upper surface of the outer carrier (1220). The outer portion (1420) may be fixed to an upper surface of the outer carrier (1220).

[0244] The upper elastic member (1400) may include a connecting portion (1430). The connecting portion (1430) may connect the inner portion (1410) and the outer portion (1420). The connecting portion (1430) may elastically connect the inner portion (1410) and the outer portion (1420). The connecting portion (1430) may have elasticity. The connecting portion (1430) may have restoring force. The connecting portion (1430) may include a bent shape. The connecting portion (1430) may be formed by being bent multiple times. The connecting portion (1430) may include a bent portion.

[0245] The force-torque sensor may include a lower elastic member (1500). The lower elastic member (1500) may restore the moving part (1200) to its initial position when an external force is removed. The lower elastic member (1500) may provide a restoring force. The lower elastic member (1500) may be coupled to the fixed part (1100) and the moving part (1200). The lower elastic member (1500) may be coupled to a lower surface of the base (1110) and a lower surface of the external carrier (1220). The lower elastic member (1500) may be coupled to a lower surface of the base (1110) and a lower surface of the external carrier (1220). The lower elastic member (1500) may connect the base (1110) and the external carrier (1220). The lower elastic member (1500) can elastically connect the base (1110) and the external carrier (1220). The lower elastic member (1500) can movably support the external carrier (1220) relative to the base (1110). The lower elastic member (1500) can be coupled to the external carrier (1220) and the fixing member (1100).

[0246] The lower elastic member (1500) may include an inner portion (1510). The inner portion (1510) may be coupled to an outer carrier (1220). The inner portion (1510) may be disposed on the outer carrier (1220). The inner portion (1510) may be disposed on a lower surface of the outer carrier (1220). The inner portion (1510) may be fixed to the outer carrier (1220). The inner portion (1510) may be adhesively bonded to the outer carrier (1220). The inner portion (1510) may be movable as one piece with the outer carrier (1220).

[0247] The lower elastic member (1500) may include an outer portion (1520). The outer portion (1520) may be coupled to the fixing portion (1100). The outer portion (1520) may be coupled to the base (1110). The outer portion (1520) may be coupled to the lower cover (1130). The outer portion (1520) may be disposed on the base (1110). The outer portion (1520) may be disposed on the lower surface of the base (1110). The outer portion (1520) may be disposed on the lower cover (1130). The outer portion (1520) may be fixed to the base (1110). The outer portion (1520) may be fixed to the base (1110) via the lower coupling member (1720).

[0248] The lower elastic member (1500) may include a connecting portion (1530). The connecting portion (1530) may connect the inner portion (1510) and the outer portion (1520). The connecting portion (1530) may have elasticity. The connecting portion (1530) may include a bent portion. The connecting portion (1530) may include a bent shape. The connecting portion (1530) may include a shape that is bent multiple times. The connecting portion (1530) may include a shape that is bent at least three times. The connecting portion (1530) may be deformable. The connecting portion (1530) may be restored to its original state after being deformed. The connecting portion (1530) may include a zigzag shape.

[0249] The connecting portion (1530) may include a plurality of connecting portions. The connecting portion (1530) may include four connecting portions. The connecting portion (1530) may include first to fourth connecting portions. The connecting portion (1530) may include a first connecting portion and a second connecting portion which are positioned on opposite sides with respect to the inner portion (1510), and a third connecting portion and a fourth connecting portion which are positioned on opposite sides with respect to the inner portion (1510). The bent shape of the connecting portion (1530) may be symmetrical in the rotational direction.

[0250] The force-torque sensor may include a guide member. The guide member may guide the movement of the moving part (1200). The guide member may guide the movement of the moving part (1200) relative to the fixed part (1100). The guide member may guide the movement of the inner carrier (1210) relative to the outer carrier (1220).

[0251] The force-torque sensor may include a first ball (1610). The guide member may include the first ball (1610). The first ball (1610) may be disposed between the inner carrier (1210) and the outer carrier (1220). The first ball (1610) may guide movement of the inner carrier (1210) with respect to the outer carrier (1220). The inner carrier (1210) may move in the yaw direction, the pitch direction, and the roll direction with respect to the outer carrier (1220) by the first ball (1610). However, when the inner carrier (1210) is to move in the z-axis direction, the first ball (1610) and the outer carrier (1220) may move together.

[0252] The force-torque sensor may include a second ball (1620). The guide member may include the second ball (1620). The second ball (1620) may be disposed between the outer carrier (1220) and the fixing member (1100). The second ball (1620) may be disposed between the outer carrier (1220) and the base (1110). The second ball (1620) may guide movement of the outer carrier (1220) with respect to the base (1110). The outer carrier (1220) may move in the z-axis direction with respect to the base (1110) by the second ball (1620). At this time, the outer carrier (1220) may move together with the inner carrier (1210) and the lead (1230).

[0253] The second ball (1620) may include multiple balls. The second ball (1620) may include at least two balls that overlap in the z-axis direction. Even when the external carrier (1220) moves by at least two balls that overlap in the z-axis direction, tilt can be prevented.

[0254] The force-torque sensor may include a coupling member. The coupling member may couple two or more different members together. For example, the coupling member may be a screw. The coupling member may be a bolt.

[0255] The force-torque sensor may include an upper coupling member (1710). The upper coupling member (1710) may be coupled to a lead (1230) and an inner carrier (1210). The upper coupling member (1710) may secure the lead (1230) to the inner carrier (1210).

[0256] The force-torque sensor may include a lower coupling member (1720). The lower coupling member (1720) may couple the fixing member (1100) and the lower elastic member (1500). The lower coupling member (1720) may fix the lower cover (1130) to the base (1110). The lower coupling member (1720) may fix the outer portion (1520) of the lower elastic member (1500) between the base (1110) and the lower cover (1130). The lower coupling member (1720) may penetrate the outer portion (1520) of the lower elastic member (1500).

[0257] The force-torque sensor may include an outer coupling member (1730). The outer coupling member (1730) may secure the upper cover (1120) to the base (1110). The outer coupling member (1730) may include screw threads. The outer coupling member (1730) may be screw-coupled to the base (1110) through the upper cover (1120). The outer coupling member (1730) may be screw-coupled to the base (1110) through a hole (1128) of the upper cover (1120).

[0258]

[0259] Hereinafter, the configuration of a force-torque sensor according to a first modified example of the present invention will be described with reference to the drawings.

[0260] Fig. 37 is a cross-sectional view of a force-torque sensor according to a first modified example of the present invention. Fig. 38 is a bottom exploded perspective view showing the configuration of a magnet, a yoke, etc., of the first modified example of the present invention.

[0261] Hereinafter, the configuration of the force-torque sensor according to the first modified example of the present invention will be described, focusing on the configurations that are different from those of the second embodiment. That is, the description of the configuration of the force-torque sensor according to the first modified example, which is the same as that of the second embodiment, will be omitted, and the description of the second embodiment can be applied analogously to the configurations for which the description is omitted.

[0262] The force-torque sensor may include a yoke (1160). The yoke (1160) may be a back yoke. The yoke (1160) may be disposed on the fixed portion (1100). An attractive force may be applied between the first magnet (1310) and the yoke (1160). An attractive force may be applied between the second magnet (1320) and the yoke (1160). However, an attractive force may not be applied between the third magnet (1330) and the yoke (1160). If an attractive force is applied between the third magnet (1330) and the yoke (1160), the movement of the external carrier (1220) in the z-axis direction may be hindered. Accordingly, the yoke (1160) may include a hole formed at a position corresponding to the third magnet (1330). However, as a variation, an attractive force may be applied between the third magnet (1330) and the yoke (1160).

[0263] The internal carrier (1210) can be pressed toward the yoke (1160) by the attractive force between the magnets (1310, 1320) and the yoke (1160). The internal carrier (1210) can be pressed downward by the attractive force between the magnets (1310, 1320) and the yoke (1160). The internal carrier (1210) can be pressed toward the fixing part (1100) by the attractive force between the magnets (1310, 1320) and the yoke (1160). The internal carrier (1210) can be pressed toward the lower cover (1130) by the attractive force between the magnets (1310, 1320) and the yoke (1160).

[0264] Accordingly, the first ball (1610) can be brought into close contact with the inner carrier (1210) and the outer carrier (1220). The first ball (1610) can be pressed toward the outer carrier (1220) by the inner carrier (1210). The inner carrier (1210) can be pressed toward the outer carrier (1220) with the first ball (1610) therebetween. The first ball (1610) can be maintained in close contact with the inner carrier (1210) and the outer carrier (1220) even when the inner carrier (1210) moves.

[0265] The inner carrier (1210) can press the first ball (1610) toward the outer carrier (1220) by the attractive force between the magnet (1310, 1320) and the yoke (1160).

[0266]

[0267] Hereinafter, the configuration of a force-torque sensor according to a second modified example of the present invention will be described with reference to the drawings.

[0268] Fig. 39 is a perspective view of a force-torque sensor according to a second modified example of the present invention. Fig. 40 is a cross-sectional view of a force-torque sensor according to a second modified example of the present invention. Fig. 41 is a perspective view illustrating a shaft and related components of a force-torque sensor according to a second modified example of the present invention.

[0269] Hereinafter, the configuration of the force-torque sensor according to the second modified example of the present invention will be described with a focus on the configurations that are different from the second embodiment. That is, the description of the configuration of the force-torque sensor according to the second modified example, which is the same as the second embodiment, will be omitted, and the description of the second embodiment can be applied analogously to the configurations for which the description is omitted.

[0270] The force-torque sensor may include a shaft (1630). The shaft (1630) may be magnetic. The shaft (1630) may be a magnetic material. The shaft (1630) may include a cylindrical shape. The shaft (1630) may have a cylindrical shape. The shaft (1630) may be disposed between the fixed part (1100) and the external carrier (1220). The shaft (1630) may be disposed in the fixed part (1100). The shaft (1630) may be disposed in the external carrier (1220). The shaft (1630) may be in contact with the fixed part (1100). The shaft (1630) may be in contact with the external carrier (1220). The shaft (1630) may connect the fixed part (1100) and the external carrier (1220). The shaft (1630) can be placed on the base (1110).

[0271] The force-torque sensor may include a man-power magnet (1170). The man-power magnet (1170) may be disposed on the fixing member (1100). The man-power magnet (1170) may be disposed on the fixing member (1100). The man-power magnet (1170) may be disposed on the outer surface of the fixing member (1100). The man-power magnet (1170) may be coupled to the fixing member (1100). The man-power magnet (1170) may be fixed to the fixing member (1100). The man-power magnet (1170) may be disposed on the base (1110). The man-power magnet (1170) may be disposed on the base (1110). The man-power magnet (1170) may be disposed on the outer surface of the base (1110). The human magnet (1170) can be coupled to the base (1110). The human magnet (1170) can be fixed to the base (1110). The base (1110) can include a groove in which the human magnet (1170) is placed. The groove of the base (1110) can be formed in a shape corresponding to the human magnet (1170).

[0272] An attractive force may be applied between the manpower magnet (1170) and the shaft (1630). The shaft (1630) may be pressed toward the manpower magnet (1170). The shaft (1630) may move toward the manpower magnet (1170). A portion of the fixed part (1100) may be placed between the shaft (1630) and the manpower magnet (1170). A portion of the base (1110) may be placed between the shaft (1630) and the manpower magnet (1170). Through this, the shaft (1630) may be brought into close contact with the fixed part (1100). The shaft (1630) may be brought into close contact with the base (1110). Even when the external carrier (1220) moves, contact between the shaft (1630) and the fixed part (1100) may be maintained. Even when the external carrier (1220) moves, contact between the shaft (1630) and the base (1110) can be maintained. The shaft (1630) can be pressed toward the human magnet (1170) to be brought into close contact with the fixed part (1100).

[0273] The human magnet (1170) can be positioned corresponding to the shaft (1630). The human magnet (117) can overlap the shaft (1630) in a direction perpendicular to the z-axis.

[0274]

[0275] Below, the configuration of a force-torque sensor according to a third modified example of the present invention is described with reference to the drawings.

[0276] Fig. 42 is a perspective view of a force-torque sensor according to a third modified example of the present invention. Fig. 43 is a cross-sectional view of a force-torque sensor according to a third modified example of the present invention. Fig. 44 is an exploded perspective view showing the configuration of the attractive magnet and yoke, etc. of the force-torque sensor according to the third modified example of the present invention.

[0277] Hereinafter, a description will be given of the configuration of a force-torque sensor according to a third modified example of the present invention, focusing on configurations that are different from those of the second embodiment. That is, the description of the configuration of the force-torque sensor according to the third modified example, which is similar to those of the second embodiment, will be omitted, and the description of the second embodiment can be applied analogously to the configurations for which the description is omitted.

[0278] The force-torque sensor may include a man-power magnet (1180). The man-power magnet (1180) may be disposed on the fixed part (1100). The man-power magnet (1180) may be disposed on the fixed part (1100). The man-power magnet (1180) may be disposed on the outer surface of the fixed part (1100). The man-power magnet (1180) may be coupled to the fixed part (1100). The man-power magnet (1180) may be fixed to the fixed part (1100). The man-power magnet (1180) may be disposed on the base (1110). The man-power magnet (1180) may be disposed on the base (1110). The man-power magnet (1180) may be disposed on the outer surface of the base (1110). The human magnet (1180) can be coupled to the base (1110). The human magnet (1180) can be fixed to the base (1110). The base (1110) can include a groove in which the human magnet (1180) is placed. The groove of the base (1110) can be formed in a shape corresponding to the human magnet (1180).

[0279] The force-torque sensor may include a yoke (1640). The yoke (1640) may be disposed on the outer carrier (1220). The yoke (1640) may be disposed on the outer carrier (1220). The yoke (1640) may be disposed on a side of the outer carrier (1220). The yoke (1640) may be disposed on an outer surface of the outer carrier (1220). The yoke (1640) may be coupled to the outer carrier (1220). The yoke (1640) may be fixed to the outer carrier (1220).

[0280] The yoke (1640) can interact with the human magnet (1180). The yoke (1640) can be positioned corresponding to the human magnet (1180). The yoke (1640) can overlap the human magnet (1180) in a direction perpendicular to the z-axis.

[0281] The second ball (1620) may be disposed between the magnet (1180) and the yoke (1640). The second ball (1620) may be disposed between the magnet (1180) and the yoke (1640) in a direction perpendicular to the z-axis. The second ball (1620) may overlap the magnet (1180) in a direction perpendicular to the z-axis. The second ball (1620) may overlap the yoke (1640) in a direction perpendicular to the z-axis. The second ball (1620) may be disposed on the yoke (1640). The second ball (1620) may be in contact with the yoke (1640).

[0282] The yoke (1640) can be pressed toward the magnet (1180). The yoke (1640) can press the second ball (1620) against the fixed portion (1100). The yoke (1640) can pressurize the second ball (1620) so that it remains in contact with the fixed portion (1100).

[0283]

[0284] Hereinafter, the operation of a force-torque sensor according to a second embodiment of the present invention will be described with reference to the drawings.

[0285] Fig. 45 is a perspective view for explaining an operating method of a force-torque sensor according to a second embodiment of the present invention. Fig. 46 is a diagram for explaining a case where an external force having a yaw or pitch direction component is applied to a force-torque sensor according to a second embodiment of the present invention. Fig. 47 is a diagram for explaining a change when an external force having a roll direction component is applied to a force-torque sensor according to a second embodiment of the present invention. Fig. 48 is a diagram for explaining a case where an external force having a z-axis direction component is applied to a force-torque sensor according to a second embodiment of the present invention.

[0286] However, the description below can also be applied analogically to the force-torque sensor according to the first to third variant examples.

[0287] When an external force having a component in at least one of the y-axis direction and the yaw direction is applied to the lead (1230) of the force-torque sensor according to the second embodiment of the present invention, the lead (1230) can rotate or tilt around the x-axis (see yaw in FIG. 45). At this time, the lead (1230) can move integrally with the internal carrier (1210) (see A, B in FIG. 46). Meanwhile, since the fixed part (1100) is maintained in a fixed state, the second sensor (1350) disposed on the fixed part (1100) detects the second magnet (1320) disposed on the internal carrier (1210), so that the amount of movement of the lead (1230) and the internal carrier (1210) can be measured. Through this, the y-axis direction component and the yaw direction component of the external force applied to the lead (1230) can be measured.

[0288] When an external force having a component in at least one of the x-axis direction and the pitch direction is applied to the lead (1230) of the force-torque sensor according to the second embodiment of the present invention, the lead (1230) can rotate or tilt around the y-axis (see pitch in FIG. 45). At this time, the lead (1230) can move integrally with the internal carrier (1210). Meanwhile, since the fixed part (1100) is maintained in a fixed state, the first sensor (1340) disposed on the fixed part (1100) detects the first magnet (1310) disposed on the internal carrier (1210), so that the amount of movement of the lead (1230) and the internal carrier (1210) can be measured. Through this, the x-axis direction component and the pitch direction component of the external force applied to the lead (1230) can be measured.

[0289] When an external force having a roll direction component is applied to the lead (1230) of the force-torque sensor according to the second embodiment of the present invention, the lead (1230) can rotate or tilt around the z-axis (see roll in FIG. 45). The lead (1230) can move with respect to the fixed part (1100) as an integral part with the internal carrier (1210) (see a, b in FIG. 47). At this time, the first sensor (1340) arranged on the fixed part (1100) detects the first magnet (1310) arranged on the internal carrier (1210), and the second sensor (1250) detects the second magnet (1320), so that the amount of movement of the lead (1230) and the internal carrier (1210) can be measured. Through this, the force of the roll direction component of the external force applied to the lead (1230) can be measured.

[0290] When an external force having a z-axis component is applied to the lead (1230) of the force-torque sensor according to the second embodiment of the present invention, the lead (1230) can move along the z-axis (see Fz in FIG. 45). The lead (1230) can move with respect to the fixed part (1100) together with the internal carrier (1210) and the external carrier (1220) (see A and B in FIG. 48). At this time, the third sensor (1360) arranged on the fixed part (1100) detects the third magnet (1330) arranged on the external carrier (1220), so that the amount of movement of the lead (1230), the internal carrier (1210), and the external carrier (1220) can be measured. Through this, the force of the z-axis component of the external force applied to the lead (1230) can be measured.

[0291]

[0292] Below, the configuration of a robot according to a second embodiment of the present invention is described.

[0293] A robot may include a body. The robot may include an arm connected to the body. The arm of the robot may include a gripping portion. The gripping portion may include, for example, a finger shape. A force-torque sensor according to a second embodiment of the present invention may be disposed on the gripping portion of the arm. The arm of the robot may include a joint. The force-torque sensor according to a second embodiment of the present invention may be disposed on a joint of the arm.

[0294]

[0295] Although the embodiments of the present invention have been described with reference to the attached drawings, those skilled in the art will appreciate that the present invention can be implemented in other specific forms without altering the technical concept or essential features thereof. Therefore, the embodiments described above should be understood to be illustrative in all respects and not restrictive.

Claims

1. Fixed government; A movable part, at least part of which is disposed within a fixed part; A sensing unit that detects movement of the movable unit with respect to the fixed unit; and It includes a ball and an elastic member arranged between the fixed part and the moving part, The above elastic member is a force-torque sensor that presses the ball toward the moving part.

2. In paragraph 1, The above moving part is a force-torque sensor that moves in the x-axis direction, the y-axis direction, the z-axis direction, the yaw direction which is a direction of rotation around the x-axis, the pitch direction which is a direction of rotation around the y-axis, and the roll direction which is a direction of rotation around the z-axis with respect to the fixed part.

3. In paragraph 1, One end of the above elastic member is placed on the above fixed part, The above ball is a force-torque sensor placed at the other end of the elastic member.

4. In paragraph 1, A force-torque sensor wherein the fixed portion includes a first groove in which at least a portion of the elastic member is disposed.

5. In paragraph 4, A force-torque sensor wherein the fixed portion includes a second groove in which at least a portion of the ball is placed when the elastic member is compressed.

6. In paragraph 5, A force-torque sensor in which the first groove of the above-mentioned fixed part is additionally recessed into the second groove of the above-mentioned fixed part with a smaller diameter than the second groove.

7. In paragraph 1, The above moving part is a force-torque sensor including a curved surface that comes into contact with the ball.

8. In paragraph 1, A force-torque sensor in which each of the above balls and the above elastic members are arranged symmetrically along the z-axis in four units.

9. In paragraph 1, The above ball is a force-torque sensor that rotates between the elastic member and the moving part.

10. In paragraph 1, The above ball is a force-torque sensor that compresses the elastic member and moves toward the fixed member when pressed by the moving member.

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