Carrier

Abstract

The present application discloses a carrier, comprising a base, a first adjustment block, a second adjustment block, a first adjustment assembly connecting the base and the first adjustment block, a second adjustment assembly connecting the second adjustment block and the first adjustment block, a fixing block connected to the first adjustment block and used for fixing a sample, and a blocking plate connected to the second adjustment block and located at the front side of the fixing block. The first adjustment assembly is used for adjusting the position of the first adjustment block relative to the base in a transverse direction and an up-down direction, and the second adjustment assembly is used for adjusting the position of the second adjustment block relative to the first adjustment block in the up-down direction. The carrier of the present application enables an ion beam emitted by an ion beam emission device to accurately remove a failed part on a sample.

Description

Carrier

[0001] This application is based on and claims priority to Chinese Patent Application No. 202410954071.9, filed on July 16, 2024, the entire contents of which are incorporated herein by reference. TECHNICAL FIELD

[0002] The present application relates to the technical field of semiconductor technology, and in particular to a carrier. BACKGROUND

[0003] In the process of preparing semiconductor, ion beam is used to remove failed samples for analysis. When ion beam is used to remove failed samples, the sample and the ion beam emitting device need to be kept at a desired relative position. In the prior art, the sample is fixed on a carrier in a pasting manner, and the position of the sample cannot be accurately adjusted, so the ion beam cannot accurately remove the failed parts on the sample. SUMMARY

[0004] The present application aims to provide a carrier capable of accurately adjusting the position of a sample.

[0005] To achieve one of the above purposes, an embodiment of the present application provides a carrier, which comprises a base, a first adjusting block located at the front side of the base, a second adjusting block located at the front side of the first adjusting block, a first adjusting assembly connecting the base and the first adjusting block, a second adjusting assembly connecting the second adjusting block and the first adjusting block, a fixing block connected to the first adjusting block for fixing a sample, and a shielding plate connected to the second adjusting block and located at the front side of the fixing block. The first adjusting assembly is used to adjust the position of the first adjusting block relative to the base in the lateral direction and the vertical direction, and the second adjusting assembly is used to adjust the position of the second adjusting block relative to the first adjusting block in the vertical direction.

[0006] As an embodiment of the present application, the first adjusting assembly comprises a first intermediate block arranged between the base and the first adjusting block, a first lateral adjusting structure connecting the base and the first intermediate block and used to adjust the position of the first intermediate block relative to the base in the lateral direction, and a first vertical adjusting structure connecting the first adjusting block and the first intermediate block and used to adjust the position of the first adjusting block relative to the first intermediate block in the vertical direction.

[0007] As an embodiment of the present application, the second adjusting assembly is further configured to adjust the position of the second adjusting block relative to the first adjusting block in the lateral direction, and comprises a second intermediate block arranged between the first adjusting block and the second adjusting block, a second up-down adjusting structure connected to the first adjusting block and the second intermediate block and configured to adjust the position of the second adjusting block relative to the second intermediate block in the up-down direction, and a second lateral adjusting structure connected to the second adjusting block and the second intermediate block and configured to adjust the position of the second adjusting block relative to the second intermediate block in the lateral direction.

[0008] As an embodiment of the present application, the first lateral adjusting structure comprises a screw rod assembly connected to the base, and a first threaded hole formed in the first intermediate block and threadedly engaged with the screw rod assembly, wherein the position of the screw rod assembly is fixed relative to the base in the lateral direction, and the axis of the screw rod assembly extends in the lateral direction.

[0009] As an embodiment of the present application, the first up-down adjusting mechanism and the second up-down adjusting mechanism are respectively arranged on the two sides of the first adjusting block in the lateral direction, the front side of the first adjusting block is provided with a receiving groove, and the second intermediate block comprises a base portion arranged at least partially in the receiving groove, and a connecting portion extending from the base portion to the second up-down adjusting structure in the lateral direction to connect the second up-down adjusting structure.

[0010] As an embodiment of the present application, the first adjusting block is provided with a first receiving hole extending in the up-down direction, and the first up-down adjusting structure comprises:

[0011] a first connecting rod connected to the first adjusting block and extending at least partially into the first receiving hole;

[0012] a first elastic member elastically extending in the up-down direction, and the two ends of the first elastic member abut against the first adjusting block and the first connecting rod, respectively;

[0013] a first manual adjusting member connected to the first adjusting block and extending at least partially into the first receiving hole to contact the first connecting rod, and the first manual adjusting member is configured to drive the first connecting rod to move relative to the first adjusting block in a direction in which the first elastic member is contracted.

[0014] As an embodiment of the present application, the first adjusting block is further provided with a second receiving hole extending in the up-down direction, and the second up-down adjusting structure comprises:

[0015] a connecting assembly connected to the second intermediate block and extending at least partially into the second receiving hole;

[0016] A second manual adjusting member is connected to the first adjusting block and extends into the second receiving hole to connect the connecting assembly, and the second manual adjusting member is used to drive the connecting assembly to move relative to the first adjusting block in the up-down direction.

[0017] As an embodiment of the present application, the second lateral adjusting structure comprises an adjusting knob, a second threaded hole formed in the second intermediate block and extending in the front-rear direction, and a slot formed in the second adjusting block and extending in the lateral direction. The adjusting knob comprises a bearing portion located at the front side of the second adjusting block, and a screw rod portion threadedly connected to the second threaded hole and connected to the bearing portion through the slot.

[0018] As an embodiment of the present application, the carrier further comprises an angle adjusting structure connected between the first adjusting block and the fixed block and used to adjust the deflection angle of the fixed block relative to the first adjusting block in the front-rear direction.

[0019] As an embodiment of the present application, the angle adjusting structure comprises a rotating block rotatably connected to the first adjusting block in the front-rear direction, a lever connected to the outer periphery of the rotating block, a first threaded member and an elastic assembly respectively arranged on the two sides of the lever in the radial direction, and a threaded member threadedly connected to the first adjusting block and used to abut against the outer periphery of the rotating block. The first threaded member is connected to the first adjusting block and used to abut against one side of the lever, and the two ends of the elastic assembly abut against the first adjusting block and the other side of the lever, respectively. The fixed block is connected to the rotating block.

[0020] The carrier provided by the present application has the advantages that the position of the fixed block relative to the base can be adjusted and changed, the position of the shutter relative to the fixed block can also be adjusted and changed, and when the sample is fixed on the fixed block, the carrier can be combined with the ion beam emitting device to enable the ion beam emitted by the ion beam emitting device to accurately remove the failure part on the sample. BRIEF DESCRIPTION OF DRAWINGS

[0021] Fig. 1 is a structural schematic view of a carrier provided by an embodiment of the present application;

[0022] Fig. 2 is a front view of the carrier in Fig. 1;

[0023] Fig. 3 is a top view of the carrier in Fig. 1;

[0024] Fig. 4 is a sectional view of the carrier in Fig. 3 along the direction of C-C;

[0025] Fig. 5 is an exploded schematic view of the carrier in Fig. 1;

[0026] Fig. 6 is a structural schematic view of the carrier in Fig. 1 with part of the structure removed;

[0027] Fig. 7 is a sectional view of the carrier in Fig. 2 along the direction of A-A;

[0028] Fig. 8 is a sectional view of the carrier in Fig. 2 along the direction of B-B;

[0029] Fig. 9 is another exploded schematic view of the carrier in Fig. 1 ;

[0030] Fig. 10 is a schematic view of the carrier in Fig. 3 along the direction of D-D. DETAILED DESCRIPTION

[0031] The present application will be described in detail below with reference to the embodiments shown in the drawings. However, the embodiments do not limit the present application, and the structural, method, or functional changes made by those skilled in the art based on the embodiments are included in the protection scope of the present application.

[0032] The terms for indicating spatial relative positions such as "upper", "lower", "left", "right", "front", "back", and the like used herein are for the purpose of facilitating the description to describe the relationship of one feature relative to another feature as shown in the drawings. It can be understood that the terms for indicating spatial relative positions can be intended to include different orientations other than the orientations shown in the drawings, and should not be construed as limiting the claims. In addition, the descriptive term "horizontal" used herein is not completely equivalent to along the direction perpendicular to the direction of gravity, and a certain angle of inclination is allowed.

[0033] As shown in Figs. 1-3, an embodiment of the present application provides a carrier 10 for cooperating with an ion beam emitting device in the production and testing process of a semiconductor, for example, to enable the ion beam to remove the failure part on a semiconductor sample 20 (hereinafter can be referred to as sample 20). In addition to this, the carrier 10 can also be applied to other occasions.

[0034] The carrier 10 includes a base 1, a first adjusting block 2 located at the front side of the base 1, a second adjusting block 3 located at the front side of the first adjusting block 2, a first adjusting assembly 4 connecting the base 1 and the first adjusting block 2, a second adjusting assembly 5 connecting the second adjusting block 3 and the first adjusting block 2, a fixing block 6 connected to the first adjusting block 2, and a shield 7 connected to the second adjusting block 3. The fixing block 6 is used to fix the sample 20, and the shield 7 is located at the front side of the fixing block 6. The first adjusting assembly 4 is used to adjust the position of the first adjusting block 2 relative to the base 1 in the lateral direction and the up-down direction, and the second adjusting assembly 5 is used to adjust the position of the second adjusting block 3 relative to the first adjusting block 2 in the up-down direction.

[0035] It should be noted that herein, the up-down direction is the up-down direction when the carrier 10 is in the state shown in Fig. 2, the lateral direction is the left-right direction when the carrier 10 is in the state shown in Fig. 2, and the front-back direction is the direction orthogonal to both the up-down direction and the left-right direction.

[0036] The sample 20 can be first fixed in a box 201 made of aluminite or other material, and then the box 201 can be fixed on the fixing block 6 by means of adhesion or the like. In order to remove the ineffective part of the sample 20, the carrier 10 needs to be used in cooperation with the ion beam emitting device. The base 1 of the carrier 10 can be fixed on a microscope or other equipment, and the ion beam emitting device is located in front of the carrier 10 and used to emit ion beams backward. By adjusting the first adjusting assembly 4, the position of the first adjusting block 2 relative to the base 1 can be adjusted in the lateral direction and the up-down direction. When the position of the first adjusting block 2 changes, the position of the sample 20 relative to the base 1 also changes. In this way, the sample 20 can be adjusted to a preset position, and the ion beams emitted from the ion beam emitting device can act on the sample 20.

[0037] By adjusting the second adjusting assembly 5, the position of the second adjusting block 3 relative to the first adjusting block 2 can be adjusted in the up-down direction. When the position of the second adjusting block 3 changes, the position of the shutter 7 relative to the fixing block 6 and the sample 20 also changes. The shutter 7 is used to shield the sample 20, that is, the ion beams emitted by the ion beam emitting device cannot penetrate the shutter 7. By changing the position of the shutter 7 relative to the sample 20, part of the area of the sample 20 can be exposed to the shutter 7. The ion beams emitted by the ion beam emitting device will only remove the area of the sample 20 exposed to the shutter 7. The area of the sample 20 exposed to the shutter 7 should be understood as the area of the sample 20 not covered by the shutter 7 when viewed from front to back.

[0038] As shown in FIGS. 4-10, the first adjusting assembly 4 comprises a first intermediate block 41 arranged between the base 1 and the first adjusting block 2, a first lateral adjusting structure 42 connecting the base 1 and the first intermediate block 41, and a first up-down adjusting structure 43 connecting the first adjusting block 2 and the first intermediate block 41.

[0039] The first intermediate block 41 is movably connected to the base 1 in the lateral direction, and the first lateral adjusting structure 42 is used to adjust the position of the first intermediate block 41 relative to the base 1 in the lateral direction. The second adjusting block 3 is movably connected to the first intermediate block 41 in the up-down direction, and the first up-down adjusting structure 43 is used to adjust the position of the first adjusting block 2 relative to the first intermediate block 41 in the up-down direction. By adjusting the first lateral adjusting structure 42 and the first up-down adjusting structure 43, the position of the first adjusting block 2 relative to the base 1 in the lateral direction and the up-down direction can be changed. The fixing block 6 is connected to the first adjusting block 2, and the sample 20 is fixed on the fixing block 6. Therefore, by adjusting the first lateral adjusting structure 42 and the first up-down adjusting structure 43, the position of the sample 20 relative to the base 1 in the lateral direction and the up-down direction can be changed.

[0040] To enable the first intermediate block 41 to move in the lateral direction relative to the base 1, the two can be connected together by a micro cross-roller track. Similarly, to enable the first adjustment block 2 to move in the vertical direction relative to the first intermediate block 41, the two can also be connected together by a micro cross-roller track. The carrier 10 of the present embodiment is a small device, which is suitable for using a micro cross-roller track that occupies a small space.

[0041] The second adjustment assembly 5 is also used to adjust the position of the second adjustment block 3 relative to the first adjustment block 2 in the lateral direction. Adjusting the position of the second adjustment block 3 relative to the first adjustment block 2 in the lateral direction, the position of the shutter 7 will also follow the second adjustment block 3 to change, so that the shutter 7 can be used at multiple positions in the lateral direction.

[0042] The second adjustment assembly 5 includes a second intermediate block 51 provided between the first adjustment block 2 and the second adjustment block 3, a second vertical adjustment structure 52 connecting the first adjustment block 2 and the second intermediate block 51, and a second lateral adjustment structure 53 connecting the second adjustment block 3 and the second intermediate block 51. The second intermediate block 51 is movably connected to the first adjustment block 2 in the vertical direction, and the second vertical adjustment structure 52 is used to adjust the position of the second intermediate block 51 relative to the first adjustment block 2 in the vertical direction; the second adjustment block 3 is movably connected to the second intermediate block 51 in the lateral direction, and the second lateral adjustment structure 53 is used to adjust the position of the second adjustment block 3 relative to the second intermediate block 51 in the lateral direction. Since the shutter 7 is connected to the second adjustment block 3, by adjusting the second vertical adjustment structure 52, the position of the shutter 7 relative to the sample 20 in the vertical direction can be changed; by adjusting the second lateral adjustment structure 53, the position of the shutter 7 relative to the sample 20 in the lateral direction can be changed.

[0043] To enable the second intermediate block 51 to move in the vertical direction relative to the first adjustment block 2, the two can be connected together by a micro cross-roller track. To enable the second adjustment block 3 to move in the lateral direction relative to the second intermediate block 51, the two can be connected together by a micro slide rail and a slide block.

[0044] The first lateral adjustment structure 42 includes a screw assembly 421 rotatably connected to the base 1, and a first threaded hole 422 provided on the first intermediate block 41, the screw assembly 421 being threadedly connected with the first threaded hole 422, the position of the screw assembly 421 being fixed relative to the base 1 in the lateral direction, and the axis of the screw assembly 421 extending in the lateral direction.

[0045] When it is needed to adjust the position of the first intermediate block 41 relative to the base 1 in the lateral direction, the driving screw assembly 421 is rotated, and the screw assembly 421 is kept fixed relative to the base 1 in the lateral direction. When the screw assembly 421 is rotated, the screw assembly 421 drives the first intermediate block 41 to move relative to the base 1 in the lateral direction through the first threaded hole 422, so as to adjust the position of the first intermediate block 41 relative to the base 1 in the lateral direction.

[0046] The first lateral adjustment structure 42 further comprises an elastic abutting member 423, which is elastically extended and contracted in the lateral direction and abuts the base 1 and the first intermediate block 41 at two ends thereof in the lateral direction. When the screw assembly 421 and the first threaded hole 422 are threadedly connected, a gap exists between the two. By abutting the base 1 and the first intermediate block 41 with the elastic abutting member 423, the first intermediate block 41 can be prevented from shaking relative to the base 1. The elastic abutting member 423 can be a helical compression spring.

[0047] Specifically, the first intermediate block 41 comprises a first block body 411 and a protruding portion 412 protruding rearward from the first block body 411. The base 1 is provided with a groove 11 for accommodating the protruding portion 412. The first threaded hole 422 is formed on the protruding portion 412, and the two ends of the elastic abutting member 423 abut the protruding portion 412 and the side wall of the groove 11, respectively.

[0048] The screw assembly 421 comprises a screw 4211, a screw head 4212 connected to one end of the screw 4211, a first threaded sleeve 4213 and a second threaded sleeve 4214 threadedly connected to the screw 4211. The screw assembly 421 passes through the base 1 in the lateral direction, and the first threaded sleeve 4213 and the second threaded sleeve 4214 abut the two sides of the base 1 in the lateral direction, so that the screw assembly 421 cannot move relative to the base 1 in the lateral direction. The screw 4211 is threadedly connected to the first threaded hole 422, and the screw 4211 can be rotated by screwing the screw head 4212. The base 1 is provided with matching holes matched with the first threaded sleeve 4213 and the second threaded sleeve 4214, respectively. When the screw 4211 is rotated, the first threaded sleeve 4213 and the second threaded sleeve 4214 are simultaneously rotated and rub against the hole walls of the matching holes.

[0049] The first threaded sleeve 4213 abuts the screw head 4212, and the second threaded sleeve 4214 is located at the tail of the screw 4211 away from the screw head 4212. The screw assembly 421 further comprises a jackscrew 4215 threadedly connected to the second threaded sleeve 4214 and abutting one end of the screw 4211 away from the screw head 4212, so as to prevent the screw 4211 and the second threaded sleeve 4214 from rotating relative to each other.

[0050] In other embodiments, the screw assembly 421 can also be connected to the first intermediate block 41, and a first threaded hole 422 is formed in the base 1. In this way, when the screw assembly 421 is rotated, the first intermediate block 41 can also move in the transverse direction relative to the base 1.

[0051] In the present embodiment, the first up-down adjusting structure 43 and the second up-down adjusting structure 52 are respectively located on the two sides of the first adjusting block 2 in the transverse direction. The front side of the first adjusting block 2 is provided with a receiving groove 21, and the second intermediate block 51 includes a base portion 511 arranged at least partially in the receiving groove 21, and a connecting portion 512 extending from the base portion 511 to the second up-down adjusting structure 52 in the transverse direction to connect the second up-down adjusting structure 52. The size of the base portion 511 is smaller than the size of the first adjusting block 2. With the above arrangement, the structure of the carrier 10 is more compact and more symmetrical.

[0052] Specifically, the first adjusting block 2 is provided with a first receiving hole 22 extending in the up-down direction, and the first up-down adjusting structure 43 includes a first connecting rod 431, a first elastic member 432, and a first manual adjusting member 433.

[0053] The first connecting rod 431 is connected to the first intermediate block 41 and at least partially extends into the first receiving hole 22. The first elastic member 432 is elastically arranged in the up-down direction, and the upper and lower ends thereof abut against the first adjusting block 2 and the first connecting rod 431, respectively. The first manual adjusting member 433 is connected to the first adjusting block 2 and at least partially extends into the first receiving hole 22 to contact the first connecting rod 431. The first manual adjusting member 433 is used to drive the first connecting rod 431 to move relative to the first adjusting block 2 in a direction in which the first elastic member 432 is contracted.

[0054] As shown in FIG. 7, the first manual adjusting member 433 is located below the first connecting rod 431. When the output end of the first manual adjusting member 433 moves upward, the first adjusting block 2 moves downward relative to the first intermediate block 41, and the first elastic member 432 is contracted. If the output end of the first manual adjusting member 433 moves downward, the first adjusting block 2 moves upward relative to the first intermediate block 41 under the action of the first elastic member 432. It can be seen that the position of the first adjusting block 2 relative to the first intermediate block 41 in the up-down direction can be adjusted by adjusting the first manual adjusting member 433.

[0055] The first adjusting block 2 is also provided with a second receiving hole 23 extending in the up-down direction, and the second up-down adjusting structure 52 includes a connecting assembly 521 and a second manual adjusting member 522.

[0056] The connecting assembly 521 connects the second intermediate block 51 and extends at least partially into the second receiving hole 23, the second manual adjusting member 522 is connected to the first adjusting block 2 and extends at least partially into the second receiving hole 23 to connect the connecting assembly 521, and the second manual adjusting member 522 is used to drive the connecting assembly 521 to move relative to the first adjusting block 2 in the up-down direction. When the second manual adjusting member 522 drives the connecting assembly 521 to move relative to the first adjusting block 2 in the up-down direction, the second intermediate block 51 can move up and down relative to the first adjusting block 2. It can be seen that by adjusting the second manual adjusting member 522, the position of the second intermediate block 51 relative to the first adjusting block 2 in the up-down direction can be adjusted. The connecting assembly 521 specifically connects the connecting portion 512 of the second intermediate block 51, and the connecting assembly 521 includes a second connecting rod 5211 connected to the connecting portion 512 and a connecting sleeve 5212 connecting the second connecting rod 5211 and the second manual adjusting member 522. The first manual adjusting member and the second manual adjusting member are preferably selected from micrometer knobs.

[0057] The second transverse adjusting structure 53 includes an adjusting knob 531, a second threaded hole 532 formed in the second intermediate block 51 and extending in the front-rear direction, and a slot 533 formed in the second adjusting block 3 and extending in the transverse direction. The adjusting knob 531 includes an abutting portion 5311 located at the front side of the second adjusting block 3, and a screw rod portion 5312 threadedly connected to the second threaded hole 532 and passing through the slot 533 to connect the abutting portion 5311.

[0058] Under normal circumstances, the screw rod portion 5312 extends most into the second threaded hole 532, so that the abutting portion 5311 abuts against the front side of the second adjusting block 3. At this time, under the action of the friction between the abutting portion 5311 and the second adjusting block 3, the second adjusting block 3 cannot move relative to the second intermediate block 51 in the transverse direction. When it is necessary to adjust the position of the second adjusting block 3 relative to the second intermediate block 51 in the transverse direction, the abutting portion 5311 is screwed to move the entire adjusting knob 531 forward, so that the abutting portion 5311 no longer abuts against the second adjusting block 3. At this time, the second adjusting block 3 can move relative to the second intermediate block 51 in the transverse direction. When the second adjusting block 3 moves to the appropriate position, the abutting portion 5311 is screwed to abut against the second adjusting block 3, and the position of the second adjusting block 3 is fixed.

[0059] The carrier 10 further includes an angle adjusting structure 8 connecting the first adjusting block 2 and the fixing block 6 and used to adjust the deflection angle of the fixing block 6 relative to the first adjusting block 2 in the front-rear direction. By adjusting the angle adjusting structure 8, the sample 10 can be placed at a preset angle relative to the base 1.

[0060] Specifically, the angle adjusting mechanism 8 comprises a rotating block 81 rotatably connected to the first adjusting block 2 in the front-rear direction, a lever 82 connected to the outer periphery of the rotating block 81, a first threaded member 83 and an elastic assembly 84 respectively arranged on the two sides of the lever 82 in the radial direction, and a second threaded member 85 threadedly connected to the first adjusting block 2 for clamping the rotating block 81. The first threaded member 83 is connected to the first adjusting block 2 for abutting one side of the lever 82, and the two ends of the elastic assembly 84 respectively abut the first adjusting block 2 and the other side of the lever 82. The fixed block 6 is connected to the rotating block 81 and can rotate with the rotating block 81.

[0061] When the angle of the rotating block 81 needs to be adjusted, the second threaded member 85 is loosened first so that the second threaded member 85 is out of contact with the rotating block 81, and then the first threaded member 83 is rotated. Under the cooperation of the first threaded member 83 and the elastic assembly 84, the lever 82 can be driven to rotate by the first threaded member 83 or the elastic assembly 84, thereby driving the rotating block 81 to rotate. When the rotating block 81 is rotated to the appropriate angle, the second threaded member 85 is tightened to clamp the rotating block 81, so that the rotating block 81 cannot rotate. The elastic assembly 84 specifically comprises an abutting block 841 for abutting the lever 82 and a second elastic member 842 arranged between the abutting block 841 and the first adjusting block 2. The second elastic member 842 can be a helical compression spring.

[0062] In summary, in the carrier 10, the position of the fixed block 6 relative to the base 1 can be adjusted and changed, and the position of the shutter 7 relative to the fixed block 6 can also be adjusted and changed. When the sample 20 is fixed on the fixed block 6, the carrier 10 can cooperate with the ion beam emitting device to enable the ion beam emitted by the ion beam emitting device to accurately remove the failure part on the sample 20.

[0063] It should be understood that although the present specification is described in terms of embodiments, each embodiment does not necessarily contain only one independent technical solution. The description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0064] The series of detailed descriptions listed above are only specific descriptions of the feasible embodiments of the present application, and are not intended to limit the protection scope of the present application. Any equivalent embodiments or modifications made without departing from the spirit of the present application should be included in the protection scope of the present application.

Claims

1. A carrier, characterized by, The device comprises a base, a first adjusting block located at the front side of the base, a second adjusting block located at the front side of the first adjusting block, a first adjusting assembly connecting the base and the first adjusting block, a second adjusting assembly connecting the second adjusting block and the first adjusting block, a fixing block connected to the first adjusting block for fixing a sample, and a cover connected to the second adjusting block and located at the front side of the fixing block.

2. The carrier of claim 1, wherein, The first adjusting assembly comprises a first intermediate block arranged between the base and the first adjusting block, a first lateral adjusting structure connecting the base and the first intermediate block and used for adjusting the position of the first intermediate block relative to the base in the lateral direction, and a first vertical adjusting structure connecting the first adjusting block and the first intermediate block and used for adjusting the position of the first adjusting block relative to the first intermediate block in the vertical direction.

3. The carrier of claim 2, wherein, The second adjusting assembly is also used for adjusting the position of the second adjusting block relative to the first adjusting block in the lateral direction, and comprises a second intermediate block arranged between the first adjusting block and the second adjusting block, a second vertical adjusting structure connecting the first adjusting block and the second intermediate block and used for adjusting the position of the second adjusting block relative to the second intermediate block in the vertical direction, and a second lateral adjusting structure connecting the second adjusting block and the second intermediate block and used for adjusting the position of the second adjusting block relative to the second intermediate block in the lateral direction.

4. The carrier of claim 2, wherein, The first lateral adjusting structure comprises a screw assembly connected to the base, and a first threaded hole provided on the first intermediate block and threadedly matched with the screw assembly, the position of the screw assembly being fixed relative to the base in the lateral direction, and the axis of the screw assembly extending in the lateral direction.

5. The carrier of claim 3, wherein, The first vertical adjusting mechanism and the second vertical adjusting mechanism are respectively located at two sides of the first adjusting block in the lateral direction, the front side of the first adjusting block is provided with a receiving groove, and the second intermediate block comprises a base portion arranged at least partially in the receiving groove, and a connecting portion extending from the base portion to the second vertical adjusting structure in the lateral direction to connect the second vertical adjusting structure.

6. The carrier of claim 5, wherein, The first adjusting block is provided with a first receiving hole extending in the vertical direction, and the first vertical adjusting structure comprises: a first connecting rod connected to the first adjusting block and extending at least partially into the first receiving hole; a first elastic member elastically extending in the vertical direction, and the upper and lower ends of the first elastic member abutting against the first adjusting block and the first connecting rod, respectively; a first manual adjusting member connected to the first adjusting block and extending at least partially into the first receiving hole to contact the first connecting rod, the first manual adjusting member being used for driving the first connecting rod to move relative to the first adjusting block in a direction in which the first elastic member is contracted.

7. The carrier of claim 5 or 6, wherein, The first adjusting block is further provided with a second receiving hole extending in the up-down direction, and the second up-down adjusting structure comprises: a connecting assembly connected to the second intermediate block and extending at least partially into the second receiving hole; a second manual adjusting member connected to the first adjusting block and extending at least partially into the second receiving hole to connect the connecting assembly, the second manual adjusting member being used to drive the connecting assembly to move relative to the first adjusting block in the up-down direction.

8. The carrier of claim 3, wherein, The second lateral adjusting structure comprises an adjusting knob, a second threaded hole provided on the second intermediate block and extending in the front-rear direction, and a slot provided on the second adjusting block and extending in the lateral direction, the adjusting knob comprising a resisting portion on the front side of the second adjusting block, a screw rod portion threadedly connected to the second threaded hole and connected to the resisting portion through the slot.

9. The carrier of claim 1, wherein, The carrier further comprises an angle adjusting structure connected between the first adjusting block and the fixed block and used to adjust the deflection angle of the fixed block relative to the first adjusting block in the front-rear direction.

10. The carrier of claim 9, wherein, The angle adjusting structure comprises a rotating block rotatably connected to the first adjusting block in the front-rear direction, a lever connected to the outer periphery of the rotating block, a first threaded member and an elastic assembly respectively arranged on the two sides of the lever in the radial direction, a threaded member threadedly connected to the first adjusting block and used to abut against the outer periphery of the rotating block, the first threaded member being connected to the first adjusting block and used to abut against one side of the lever, the two ends of the elastic assembly respectively abutting against the first adjusting block and the other side of the lever, and the fixed block being connected to the rotating block.

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