Probe device for kelvin test

Abstract

A probe device for a Kelvin test of the present invention comprises: a first probe including a first-1 contact probe and a first-2 contact probe; a second probe including a second-1 contact probe and a second-2 contact probe; a probe connection unit to which a connection line extending from the first probe and a connection line extending from the second probe are bonded; and a noise filter which is arranged inside the probe connection unit, is electrically connected to the first-1 contact probe, the first-2 contact probe, the second-1 contact probe, and the second-2 contact probe, and removes noise generated from the first probe connection line and the second probe connection line.

Description

Probe device for Kelvin testing

[0001] The present invention relates to a probe device for Kelvin testing.

[0002] The Kelvin test is a technique for measuring electrical resistance using a four-point measurement method. Current is passed through two points, and a voltage drop is applied across the other two. The Kelvin test minimizes the influence of contact resistance, allowing for accurate resistance measurements.

[0003] While the Kelvin test itself is theoretically a very precise measurement technique, it can be susceptible to noise due to interference in signal lines or external electromagnetic interference. This noise can significantly impact the results, especially since the Kelvin test measures microscopic resistance.

[0004] The purpose of the present invention is to provide a probe device for Kelvin testing that is convenient to use while effectively removing signal noise.

[0005] According to one embodiment of the present invention, a probe device for a Kelvin test comprises: a first probe including a first-first contact probe and a first-second contact probe; a second probe including a second-first contact probe and a second-second contact probe; a probe connection portion for connecting a connection line (a first probe connection line) extending from the first probe to a connection line (a second probe connection line) extending from the second probe; a noise filter disposed inside the probe connection portion and electrically connected to the first-first contact probe, the first-second contact probe, the second-first contact probe, and the second-second contact probe, and removing noise generated from the first probe connection line and the second probe connection line; a main cable wrapping a plurality of post-filter signal lines connected to the noise filter; and an electrode connection portion connected to the main cable and wrapping an electrode electrically connected to the post-filter signal lines.

[0006] The above noise filter has a first connection point, a first connection point, a second connection point, and a second connection point, which are respectively connected to signal lines connected to the first-first contact probe, the first-second contact probe, the second-first contact probe, and the second-second contact probe.

[0007] According to one embodiment, the noise filter may include a first common mode noise filter that removes noise generated in the first probe connection line; and a second common mode noise filter that removes noise generated in the second probe connection line.

[0008] According to one embodiment, the first common mode noise filter and the second common mode noise filter may be arranged in parallel in a direction perpendicular to the direction in which the post filter signal line is connected.

[0009] According to one embodiment, the distance between the first-1 connection point and the first-2 connection point may be smaller than the distance between the first-2 connection point and the second-1 connection point.

[0010] According to one embodiment, the noise filter includes a first shielding portion surrounding the first-1 connection point and the first-2 connection point; a second shielding portion surrounding the second-1 connection point and the second-2 connection point; and the first shielding portion and the second shielding portion can be physically separated.

[0011] According to one embodiment, the noise filter may include a plate-shaped substrate having a first opening, a first opening, a second opening, and a second opening formed in a rectangular shape. The first shielding portion may pass through the first opening and the first opening in a pipe shape and surround the first connection point and the first connection point. The second shielding portion may pass through the second opening and the second opening in a pipe shape and surround the second connection point and the second connection point.

[0012] A probe device for a Kelvin test according to one embodiment of the present invention may further include a second noise filter disposed inside the electrode connection portion, electrically connected to the plurality of post-filter signal lines, and configured to remove noise generated from the main cable.

[0013] A probe device for Kelvin testing according to one embodiment of the present invention may further include a first control box connection line connected to the electrode connection part in an inverted Y shape; and a second control box connection line.

[0014] A Kelvin test probe device according to one embodiment of the present invention minimizes interference and noise generated while a signal is transmitted along a signal line through a noise filter. In particular, the noise filter is placed within the probe connection portion where the first and second probe connection lines are connected, thereby managing the probe device as a "single" line, thereby increasing usability and simultaneously blocking noise. Furthermore, the noise filter (NF) can be shielded in various ways to enhance the reliability of measurement results.

[0015] FIG. 1 is a conceptual diagram of a probe device for Kelvin testing according to one embodiment of the present invention.

[0016] Figure 2 is a circuit diagram of a noise filter according to one embodiment.

[0017] Figure 3 is a conceptual diagram of a noise filter according to another embodiment.

[0018] Figure 4 is a top view and a cross-sectional view of a noise filter according to another embodiment.

[0019] FIG. 5 is a top view of a noise filter showing the appearance when the first shielding part and the second shielding part are absent in the embodiment of FIG. 4.

[0020] Figure 6 is a conceptual diagram of a probe device for Kelvin testing according to another embodiment of the present invention.

[0021] Fig. 7 is a photograph of a probe device for Kelvin testing that actually implements the embodiment of Fig. 6.

[0022] A probe device for a Kelvin test of the present disclosure comprises: a first probe including a first-first contact probe and a first-second contact probe; a second probe including a second-first contact probe and a second-second contact probe; a probe connection portion for connecting a connection line (a first probe connection line) extending from the first probe to a connection line (a second probe connection line) extending from the second probe; a noise filter disposed inside the probe connection portion and electrically connected to the first-first contact probe, the first-second contact probe, the second-first contact probe, and the second-second contact probe, and removing noise generated from the first probe connection line and the second probe connection line; a main cable wrapping a plurality of post-filter signal lines connected to the noise filter; And an electrode connecting portion that surrounds an electrode connected to the main cable and electrically connected to the post-filter signal line; wherein the noise filter has a first connection point, a first connection point, a second connection point, and a second connection point that are connected to the signal lines connected to the first-1 contact probe, the first-2 contact probe, the second-1 contact probe, and the second-2 contact probe, respectively.

[0023] Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the attached drawings. The advantages and features of the present disclosure, and methods for achieving them, will become clearer with reference to the embodiments described in detail below together with the attached drawings. However, the technical idea of ​​the present disclosure is not limited to the following embodiments and may be implemented in various different forms. The following embodiments are provided only to complete the technical idea of ​​the present disclosure and to fully inform those skilled in the art of the present disclosure of the scope of the present disclosure, and the technical idea of ​​the present disclosure is defined only by the scope of the claims.

[0024] When assigning reference numerals to components in each drawing, it should be noted that identical components are assigned the same numerals whenever possible, even if they appear on different drawings. Furthermore, when describing the present disclosure, if a detailed description of a related known configuration or function is deemed likely to obscure the gist of the present disclosure, such detailed description will be omitted.

[0025] Unless otherwise defined, all terms (including technical and scientific terms) used herein may be used in a meaning commonly understood by those of ordinary skill in the art to which this disclosure pertains. Furthermore, terms defined in commonly used dictionaries are not to be interpreted ideally or excessively unless explicitly and specifically defined otherwise. The terminology used herein is for the purpose of describing embodiments and is not intended to limit the present disclosure. In this specification, the singular also includes the plural unless specifically stated otherwise in the phrase. In this specification, "or" may mean and / or.

[0026] Additionally, terms such as first, second, A, B, (a), (b), etc. may be used to describe components of the present disclosure. These terms are only intended to distinguish the components from other components, and the nature, order, or sequence of the components are not limited by the terms. When a component is described as being "connected," "coupled," or "connected" to another component, it should be understood that the component may be directly connected or connected to the other component, but another component may also be "connected," "coupled," or "connected" between each component.

[0027] As used herein, the terms “comprises” and / or “comprising” do not exclude the presence or addition of one or more other components, steps, operations and / or elements.

[0028] Components included in one embodiment and components with common functions may be described using the same designations in other embodiments. Unless otherwise stated, the descriptions provided in one embodiment may also apply to other embodiments, and specific descriptions may be omitted to the extent that they overlap or would be readily apparent to those skilled in the art.

[0029] Hereinafter, the present invention will be described in detail with reference to preferred embodiments of the present invention and the attached drawings.

[0030] FIG. 1 is a conceptual diagram of a probe device (1) for a Kelvin test according to one embodiment of the present invention, and FIG. 2 is a circuit diagram of a noise filter (NF) according to one embodiment.

[0031] A probe device (1) for a Kelvin test according to one embodiment of the present invention comprises: a first probe (11) including a first-first contact probe (TP1-1) and a first-second contact probe (TP1-2), a second probe (12) including a second-first contact probe (TP2-1) and a second-second contact probe (TP2-2), a probe connection portion (20) in which a connection line (L1) extending from the first probe (11) and a connection line (L2) extending from the second probe (12) are joined, a noise filter (NF) disposed inside the probe connection portion (20) and electrically connected to the first-first contact probe (TP1-1), the first-second contact probe (TP1-2), the second-first contact probe (TP2-1), and the second-second contact probe (TP2-2), and removing noise generated from the first probe connection line (L1) and the second probe connection line (L2), and a plurality of post filters connected to the noise filter (NF). It includes a main cable (C) that wraps around a signal line (POST-SL) and an electrode connecting portion (30) that wraps around an electrode connected to the main cable (C) and electrically connected to the post-filter signal line (POST-SL).

[0032] For the Kelvin test, the probe device (1) has a total of four contact probes. The probe device (1) includes a first probe (11) and a second probe (12), each having two terminals or probes. The first probe (11) includes a first-first contact probe (TP1-1) and a first-second contact probe (TP1-2). The second probe (12) includes a second-first contact probe (TP2-1) and a second-second contact probe (TP2-2). Since the first probe (11) and the second probe (12) are structurally the same, the following description will be based on the first probe (11).

[0033] The first probe (11) may have various shapes, such as a cylindrical shape or an alligator clip shape. The outer surface of the first probe (11) may be covered with an insulator, such as rubber or plastic. Two conductive contact probes (TP1-1, TP1-2) may protrude from one end of the first probe (11). The contact probes (TP1-1, TP1-2) may come into contact with a sample (R) whose resistance is to be measured.

[0034] Inside the first probe (11), two signal lines (PRE-SL1-1, PRE-SL1-2) connected to two contact probes (TP1-1, TP1-2) can pass. The two signal lines will be referred to as the first-first pre-filter signal line (PRE-SL1-1) and the first-second pre-filter signal line (PRE-SL1-2), respectively. 'Pre' means that, from the perspective of the transmitted signal, the signal lines (PRE-SL1-1, PRE-SL1-2) are arranged before (pre) a noise filter (NF) to be described later. The contact probes (TP) and the pre-filter signal lines (PRE-SL) can be physically or electrically connected. The pre-filter signal lines (PRE-SL) can function as conductors.

[0035] A first probe connection line (L1) is connected to the other end of the first probe (11). Two pre-filter signal lines (PRE-SL1-1, PRE-SL1-2) pass through the inside of the first probe connection line (L1).

[0036] The first probe connection line (L1) may be a flexible line. Similarly, the second probe connection line (L2) may also be a flexible line. The outer covering of the probe connection lines (L1, L2) may be made of an insulating material such as rubber, polyethylene (PE), or polyvinyl chloride (PVC).

[0037] A user of the probe device can freely position the two probes within the length limits of the first probe connection line (L1) and the second probe connection line (L2) to measure the resistance of the sample (R).

[0038] However, if the first probe connection line (L1) and the second probe connection line (L2) are completely separated, the user ends up using 'two' lines. In this case, due to the nature of the Kelvin test, which necessarily uses two probes (4 terminals), the user has the burden of having to store and manage the two lines that form a pair at once. Therefore, for convenience of use and management, a joint that connects the two probe connection lines (L1, L2) may be required.

[0039] The first probe connection line (L1) and the second probe connection line (L2) are connected through a probe connection part (20). The probe connection part (20) is a junction of the first probe connection line (L1) and the second probe connection line (L2). Here, being connected may mean not only that the probe connection lines (L1, L2) are physically connected, but also that the probe connection part (20) is coupled to the probe connection line (L1, L2) through a plug-in or other method. The probe connection part (20) may have, for example, a Y shape. The pre-filter signal lines (PRE-SL1-1, PRE-SL1-2) that pass through the inside of the probe connection lines (L1, L2) also reach the inside of the probe connection part (20). A noise filter (NF) connected to the pre-filter signal line (PRE-SL) is provided inside the probe connection part (20), which will be described later.

[0040] Through the probe connection part (20), the first probe connection line (L1) and the second probe connection line (L2) can be connected as a single line (C) when viewed from the outside. Hereinafter, the line in which the two probe connection lines (L1, L2) are connected as one is referred to as the main cable (C).

[0041] Inside the main cable (C), there are four post-filter signal lines (POST-SL), which will be described later. The main cable (C) may be a flexible cable. The outer jacket of the main cable (C) may be made of insulating materials such as rubber, polyethylene (PE), or polyvinyl chloride (PVC).

[0042] The main cable (C) is connected to an electrode connector (30). The electrode connector (30) can surround a plurality of electrodes (E) to be inserted into a terminal (CB-T) of a control box (CB). The electrodes (E) are connected to a post-filter signal line (POST-SL). Consequently, the signal from the contact probe (TP) is transmitted to the electrodes (E).

[0043] The electrode (E) can be inserted into the terminal (CB-T) of the control box (CB). When the electrode (E) is inserted into the control box (CB) and the contact probe (TP) is in contact with the sample (R), the sample (R), the contact probe (TP), the signal line, etc. form a closed loop together with the circuit inside the control box (CB). When the control box (CB) provides power supply, voltage / current signals can flow in the circuit. The user can check the voltage, current, resistance signals, etc. through a display equipped in the control box (CB).

[0044] At this time, while the electrical signal travels along the wire to the control box (CB), noise is generated in the signal due to various interferences. In one embodiment of the present invention, a noise filter (NF) is provided inside the probe connection part (20) to initially remove such noise.

[0045] Referring to FIG. 2, 1-1, 1-2, 2-1, 2-2 pre-filter signal lines (PRE-SL1-1, PRE-SL1-2, PRE-SL2-1, PRE-SL2-2) can be connected to one side of the noise filter (NF). The noise filter (NF) is electrically connected to the 1-1 contact probe (TP1-1), the 1-2 contact probe (TP1-2), the 2-1 contact probe (TP2-1), and the 2-2 contact probe (TP2-2) by the 1-1, 1-2, 2-1, 2-2 pre-filter signal lines (PRE-SL1-1, PRE-SL1-2, PRE-SL2-1, PRE-SL2-2), respectively.

[0046] The noise filter (NF) may have a first connection point (P1-1), a first connection point (P1-2), a second connection point (P2-1), and a second connection point (P2-2) that are connected to a pre-filter signal line (PRE-SL). The connection points (P1-1, P1-2, P2-1, P2-2) of the pre-filter signal line (PRE-SL) and the noise filter (NF) may be electrically connected, respectively. For example, the pre-filter signal line (PRE-SL) and the connection points (P1-1, P1-2, P2-1, P2-2) may be physically or electrically connected by soldering or through wire connectors.

[0047] On the other side of the noise filter (NF), the 1-1, 1-2, 2-1, 2-2 post-filter signal lines (POST-SL1-1, POST-SL1-2, POST-SL2-1, POST-SL2-2) can be connected.

[0048] As with the pre-filter signal lines (PRE-SL), the four post-filter signal lines (POST-SL) and the noise filter (NF) can be electrically connected at different connection points. For example, the post-filter signal lines (POST-SL) and the connection points can be soldered or physically or electrically connected via wire connectors.

[0049] In summary, a noise filter (NF) is arranged between the pre-filter signal line (PRE-SL) and the post-filter signal line (POST-SL). A signal passing through the pre-filter signal line (PRE-SL) passes through the noise filter (NF) and is transmitted to the post-filter signal line (POST-SL). The noise filter (NF) may be a filter that removes common mode noise in particular. The noise filter (NF) may be a filter electrically equivalent to two inductors combined as shown in Fig. 2. The noise filter (NF) may include two common mode noise filters (F1, F2). The first common mode noise filter (F1) may remove noise generated in the first probe connection line (L1). The second common mode noise filter (F2) may remove noise generated in the second probe connection line (L2).

[0050] According to one embodiment, the first common mode noise filter (F1) and the second common mode noise filter (F2) can be arranged in parallel in a direction perpendicular to the direction in which the post filter signal line (POST-SL) is connected.

[0051] Based on Fig. 2, the common mode noise filter (F1) at the top can be connected to the pre-filter signal lines (PRE-SL1-1, PRE-SL1-2) coming from the first probe (11). In addition, the common mode noise filter (F2) at the bottom can be connected to the pre-filter signal lines (PRE-SL2-1, PRE-SL2-2) coming from the second probe (12).

[0052] Each common mode noise filter (F1, F2) removes noise from the signal from the first probe (11) and the signal transmitted from the second probe (12). In particular, the noise filter (NF) removes various noises generated while the signal passes through the pre-filter signal line (PRE-SL) in the probe connection line (L1, L2).

[0053] Meanwhile, the interior of the probe connection part (20) is filled with an insulator such as rubber, so that the noise filter (NF) can be shielded from external electromagnetic signals / interference / noise.

[0054] According to one embodiment, the distance (a) between the first-first connection point (P1-1) and the first-second connection point (P1-2) may be smaller than the distance between the first-second connection point (P1-2) and the second-first connection point (P2-1).

[0055] Among the pre-filter signal lines (PRE-SL), the upper two signal lines (PRE-SL1-1, PRE-SL1-2) are signal lines connected from the first probe (11). Meanwhile, the lower two signal lines (PRE-SL2-1, PRE-SL2-2) are signal lines connected from the second probe (12). That is, the distance (a) between the 1-1st connection point (P1-1) and the 1-2nd connection point (P1-2) is the distance between signal lines from the same probe, and the distance (b) between the 1-2nd connection point (P1-2) and the 2-1st connection point (P2-1) is the distance between signal lines from different probes. As in one embodiment of the present invention, if the distance b is made greater than a within the noise filter (NF), interference between signals from different probes can be minimized.

[0056] Figure 3 is a conceptual diagram of a noise filter (NF) according to another embodiment.

[0057] According to one embodiment, the noise filter (NF) may include a first shielding portion (ES1) surrounding the first-first connection point (P1-1) and the first-second connection point (P1-2), and a second shielding portion (ES2) surrounding the second-first connection point (P2-1) and the second-second connection point (P2-2). The first shielding portion (ES1) and the second shielding portion (ES2) may be physically separated. In Fig. 3, the connection points are covered by the shielding portions (ES1, ES2) and are not visible in the drawing.

[0058] Referring to Fig. 3, compared to Fig. 2, a first shielding portion (ES1) and a second shielding portion (ES2) are provided on the upper surface of the filter (NF) circuit. The first shielding portion (ES1) and the second shielding portion (ES2) can cover the common mode noise filters (F1, F2), respectively. Accordingly, the shielding portions (ES1, ES2) can electrically shield each filter (F1, F2) from external signals or interference. Accordingly, when a signal transmitted from the probes (11, 12) passes through the filter (F), external interference can be minimized. The first shielding portion (ES1) and the second shielding portion (ES2) may be, for example, a conductive adhesive tape having conductivity and adhesiveness, but the present invention is not limited thereto.

[0059] FIG. 4 is a top view and a cross-sectional view of a noise filter (NF) according to another embodiment, and FIG. 5 is a top view of the noise filter (NF) showing the appearance when the first shielding part (ES1) and the second shielding part (ES2) are absent in the embodiment of FIG. 4.

[0060] According to one embodiment, the noise filter (NF) may include a plate-shaped substrate having a first-first opening (H1-1), a first-second opening (H1-2), a second-first opening (H2-1), and a second-second opening (H2-2) formed in a rectangular shape. The first shielding portion (ES1) may pass through the first-first opening (H1-1) and the first-second opening (H1-2) in a pipe shape and surround the first-first connection point (P1-1) and the first-second connection point (P1-2). The second shielding portion (ES2) may pass through the second-first opening (H2-1) and the second-second opening (H2-2) in a pipe shape and surround the second-first connection point (P2-1) and the second-second connection point (P2-2).

[0061] Referring to FIGS. 4 and 5, the noise filter (NF) includes a substrate (P). The substrate (P) may be in the shape of a wide and thin plate. The substrate (P) may have four openings (holes). The substrate (P) may have a first-first opening (H1-1), a first-second opening (H1-2), a second-first opening (H2-1), and a second-second opening (H2-2) that are formed thinly and long in a rectangular shape along the direction of the signal line (the x direction in FIG. 4). That is, the substrate (P) may have a slit-shaped hole.

[0062] Referring to Fig. 5, a first-first opening (H1-1) and a first-second opening (H1-2) are formed above and below the common mode noise filter (F1) at the top, respectively. In addition, a second-first opening (H2-1) and a second-second opening (H2-2) are formed above and below the common mode noise filter (F2) at the bottom, respectively.

[0063] Referring to (b) of FIG. 4, the first shielding portion (ES1) and the second shielding portion (ES2) can each pass through openings. The first shielding portion (ES1) can pass through the first-first opening (H1-1) and the first-second opening (H1-2). The first shielding portion (ES1) can surround the first-first connection point (P1-1) and the first-second connection point (P1-2). At this time, the first shielding portion (ES1) surrounds the common mode noise filter (F1) at the top. Accordingly, the first shielding portion (ES1) electrically shields the filter (F1) from external signals or interference. Meanwhile, the second shielding portion (ES2) can pass through the second-first opening (H2-1) and the second-second opening (H2-2). The second shielding section (ES2) can surround the second-first connection point (P2-1) and the second-second connection point (P2-2). The second shielding section (ES2) surrounds the common mode noise filter (F2) at the bottom. Accordingly, the second shielding section (ES2) electrically shields the filter (F2) from external signals or interference.

[0064] The first shielding portion (ES1) and the second shielding portion (ES2) may have a pipe shape. The "pipe" shape does not necessarily mean a cylindrical shape, but may mean that the shielding portions (ES1, ES2) wrap around the inside of the substrate along the opening more than once.

[0065] In this way, in one embodiment of the present invention, interference and noise occurring while a signal is transmitted along a signal line are minimized through a noise filter (NF). In particular, the noise filter (NF) is placed inside the probe connection portion (20) where the first probe connection line (L1) and the second probe connection line (L2) are connected, thereby managing the probe device as a 'single' line, thereby increasing usability and simultaneously blocking noise. In addition, the noise filter (NF) can be shielded in various ways to improve the reliability of the measurement results.

[0066] FIG. 6 is a conceptual diagram of a probe device (2) for a Kelvin test according to another embodiment of the present invention, and FIG. 7 is a photograph of a probe device (2) for a Kelvin test that actually implements the embodiment of FIG. 6.

[0067] According to one embodiment, the main cable (C) may pass through the electrode connection portion (30) and be divided into a first control box connection line (41) and a second control box connection line (42). The electrode connection portion (30) may be a junction of the first control box connection line (41) and the second control box connection line (42). The electrode connection portion (30) may have, for example, an inverted Y shape. That is, the electrode connection portion (30), the first control box connection line (41), and the second control box connection line (42) may be connected in an inverted Y shape.

[0068] At the end of the first control box connection line (41), a first-first electrode (E1-1) and a first-second electrode (E1-2) are connected. At the end of the second control box connection line (42), a second-first electrode (E2-1) and a second-second electrode (E2-2) are connected. Each electrode (E) receives a signal transmitted from a contact probe (TP) corresponding to a symbol. Each electrode (E) can be inserted / connected to a control box (CB).

[0069] When the first control box connection line (41) and the second control box connection line (42) are separated in this way, the user can identify which probe (11, 12) each electrode is connected to. Referring to Fig. 7, each electrode and its corresponding probe (11, 12) are distinguished by the same color. For example, the first probe (11) and the 1-1 electrode (E1-1) / 1-2 electrode (E1-2) electrically connected thereto may be indicated in red, and the second probe (12) and the 2-1 electrode (E2-1) / 2-2 electrode (E2-2) electrically connected thereto may be indicated in black. Accordingly, the user can clearly recognize which electrode is connected to which probe.

[0070] In this case, when the electrode connection part (30) has an inverted Y shape and functions as a joint of the first control box connection line (41) and the second control box connection line (42), space can be secured to additionally place a noise filter inside the electrode connection part (30).

[0071] A probe device (2) for a Kelvin test according to one embodiment may further include a second noise filter (NF2) disposed inside an electrode connection portion (30), electrically connected to a plurality of post-filter signal lines (POST-SL), and removing noise generated from a main cable (C).

[0072] Referring to Fig. 6, a second noise filter (NF2) is placed inside the electrode connection portion (30).

[0073] The second noise filter (NF2) also removes noise generated while the electric signal passes through the signal line. In particular, the second noise filter (NF2) removes noise generated while the signal passes through the main cable (C). The second noise filter (NF2) may have the same configuration as the (first) noise filter (NF). Meanwhile, the interior of the electrode connection portion (30) may be filled with an insulator such as rubber to shield the second noise filter (NF2) from external electromagnetic signals / interference / noise.

[0074] When the probe device (2) has a Y / inverted Y-shaped probe connection part (20) and an electrode connection part (30) as shown in FIGS. 6 and 7, the user can manage the probe device (2) with 'one' line. In addition, the electrodes (E) corresponding to the probes (11, 12) can be clearly distinguished, thereby increasing usability. At this time, noise filters (NF1, NF2) can be placed through the space secured by the probe connection part (20) and the electrode connection part (30) to remove signal noise. In particular, the (first) noise filter (F1) inside the probe connection part (20) removes noise generated while the signal passes through the probe connection lines (L1, L2). The second noise filter (NF2) inside the electrode connection part (30) removes noise generated while the signal passes through the main cable (C). As a result, noise from the probe connections (L1, L2) and the main cable (C) is all eliminated, improving the accuracy when measuring micro-unit resistance using the Kelvin test.

[0075] As described above, exemplary embodiments have been disclosed in the drawings and specifications. While specific terminology has been used to describe embodiments herein, it is intended solely to illustrate the technical concept of the present disclosure and is not intended to limit the scope of the present disclosure as defined in the claims. Therefore, those skilled in the art will appreciate that various modifications and equivalent embodiments are possible. Therefore, the true technical protection scope of the present disclosure should be determined by the technical concept of the appended claims.

Claims

1. A first probe including a first-1 contact probe and a first-2 contact probe; A second probe comprising a second-1 contact probe and a second-2 contact probe; A probe connection portion in which a connection line (first probe connection line) extending from the first probe and a connection line (second probe connection line) extending from the second probe are connected; A noise filter disposed inside the probe connection portion and electrically connected to the first-first contact probe, the first-second contact probe, the second-first contact probe, and the second-second contact probe, and removing noise generated from the first probe connection line and the second probe connection line; A main cable wrapping a plurality of post-filter signal lines connected to the above noise filter; and An electrode connecting portion that surrounds an electrode connected to the main cable and electrically connected to the post-filter signal line; The above noise filter is, A probe device for a Kelvin test, having a first connection point, a first connection point, a second connection point, and a second connection point, which are respectively connected to signal lines connected to the first-first contact probe, the first-second contact probe, the second-first contact probe, and the second-second contact probe.

2. In paragraph 1, The above noise filter is, A first common mode noise filter for removing noise generated in the first probe connection line; and A probe device for Kelvin testing, comprising a second common mode noise filter for removing noise generated in the second probe connection line.

3. In paragraph 2, A probe device for Kelvin testing, wherein the first common mode noise filter and the second common mode noise filter are arranged in parallel in a direction perpendicular to the direction in which the post-filter signal line is connected.

4. In paragraph 1, The distance between the above 1-1 connection point and the above 1-2 connection point is A probe device for Kelvin testing, the distance between the first and second connection points being smaller than the distance between the second and first connection points.

5. In paragraph 1, The above noise filter is, A first shielding portion surrounding the first-1 connection point and the first-2 connection point; and A probe device for a Kelvin test, comprising a second shielding portion surrounding the second-1 connection point and the second-2 connection point, wherein the first shielding portion and the second shielding portion are physically separated.

6. In paragraph 5, The above noise filter is, A plate-shaped substrate having a first opening, a first opening, a second opening, and a second opening formed in a rectangular shape; The above first shielding portion passes through the 1-1 opening and the 1-2 opening in the form of a pipe and surrounds the 1-1 connection point and the 1-2 connection point, A probe device for a Kelvin test, wherein the second shielding portion passes through the 2-1 opening and the 2-2 opening in the form of a pipe and surrounds the 2-1 connection point and the 2-2 connection point.

7. In paragraph 1, A probe device for Kelvin testing, further comprising a second noise filter disposed inside the electrode connection portion, electrically connected to the plurality of post-filter signal lines, and removing noise generated from the main cable.

8. In paragraph 7, A probe device for Kelvin testing, further comprising: a first control box connection line connected to the electrode connection part in an inverted Y shape; and a second control box connection line.

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