Diaphragm and MEMS microphone

Abstract

Embodiments of the present invention relate to the technical field of microphones. Disclosed are a diaphragm and an MEMS microphone. The diaphragm comprises a vibration portion and a connecting portion arranged around the vibration portion. The vibration portion comprises a first flat portion located at a central position, a corrugated portion arranged around the first flat portion, and a second flat portion arranged around the corrugated portion. The corrugated portion extends in a direction from the center to the edge of the first flat portion. The bending stiffness of the corrugated portion is greater than the bending stiffness of the first flat portion and the second flat portion, and the corrugated portion is made of a material at least comprising silicon nitride. The diaphragm and the MEMS microphone provided in the embodiments of the present invention can increase the structural strength of the diaphragm.

Description

Diaphragm and MEMS microphone

[0001] This application incorporates by reference in its entirety the U.S. Patent Application entitled “DIAPHRAGM AND MEMS MICROPHONE” filed on July 30, 2024, with application number “18 / 789,636”. TECHNICAL FIELD

[0002] Embodiments of the present application relate to the field of microphone technology, and in particular to a diaphragm and a MEMS microphone. BACKGROUND

[0003] With the continuous development of electronic technology, various electronic devices are becoming more and more functional, while the overall size is becoming smaller and thinner. This also means that the space left for various components in electronic devices is becoming smaller. As an important component in electronic devices, the microphone also needs to be designed to be small in size to occupy less space in the limited space of electronic devices. MEMS (Micro Electro Mechanical System) microphone is a small-sized microphone made of micro-machining technology, which has good frequency response characteristics and low noise. Currently, MEMS microphones are widely used in different electronic devices.

[0004] The MEMS microphone includes a substrate, a diaphragm, and a back plate. The diaphragm is an important component of the MEMS microphone, and the structural strength of the diaphragm affects the normal operation of the MEMS microphone. Therefore, how to improve the structural strength of the diaphragm is an important problem. SUMMARY

[0005] The purpose of the embodiments of the present application is to provide a diaphragm and a MEMS microphone that can improve the structural strength of the diaphragm.

[0006] To solve the above technical problems, the embodiments of the present application provide a diaphragm. The diaphragm includes a vibration part and a connecting part arranged around the vibration part. The vibration part includes a first flat part located at a middle position, a corrugated part arranged around the first flat part, and a second flat part arranged around the corrugated part. The corrugated part extends in a direction from the center to the edge of the first flat part. The bending stiffness of the corrugated part is greater than the bending stiffness of the first flat part and the second flat part, and the corrugated part is made of a material including at least silicon nitride.

[0007] The embodiments of the present application also provide a MEMS microphone. The MEMS microphone includes a substrate with a back cavity and a capacitive structure arranged on the substrate. The capacitive structure includes a diaphragm and a back plate arranged in a spaced manner with the diaphragm, and the diaphragm is the diaphragm described above.

[0008] The diaphragm and the MEMS microphone provided by the embodiments of the present application are made of materials including at least silicon nitride at the corrugated structure, so that the bending stiffness of the corrugated portion is greater than that of other portions. By using the material with higher bending stiffness at the corrugated structure than other portions, the corrugated portion has higher structural strength than other portions, thereby reducing the risk of diaphragm rupture failure.

[0009] In some embodiments, the first flat portion and the second flat portion are made of polysilicon material, and the corrugated portion is made of silicon nitride material. In this way, the corrugated portion can be made of silicon nitride with better bending stiffness than polysilicon, so as to effectively improve the structural strength of the corrugated portion.

[0010] In some embodiments, the corrugated portion includes a substrate layer connected to the first flat portion at one end and connected to the second flat portion at the other end, and a reinforcing layer covering the substrate layer, and the reinforcing layer is made of silicon nitride material. In this way, the reinforcing layer with higher bending stiffness is used at the corrugated structure to reinforce the corrugated structure, so that the corrugated portion has higher structural strength than other portions.

[0011] In some embodiments, the substrate layer is made of polysilicon or silicon nitride material. In this way, the material of the substrate layer of the corrugated portion can be selected according to actual needs.

[0012] In some embodiments, the reinforcing layer completely covers the substrate layer in the direction from the center to the edge of the first flat portion. In this way, by completely covering the substrate layer with the reinforcing layer, the structural strength of the substrate layer at any position can be improved.

[0013] In some embodiments, the substrate layer includes recesses and protrusions alternately arranged in the direction from the center to the edge of the first flat portion, and the reinforcing layer is multiple in the direction from the center to the edge of the first flat portion, each reinforcing layer completely covers a recess and part of the protrusions adjacent to the recess, and there is a gap between the edges of the adjacent reinforcing layers on the same protrusion. In this way, the reinforcing layer can be arranged at the weak position of the substrate layer to improve the structural strength of the weak position of the substrate layer.

[0014] In some embodiments, the first flat portion and the second flat portion extend with a protruding portion on one side near the end of the corrugated portion, and the protruding portion covers the edge of the corrugated portion. In this way, the connection reliability between the flat portion and the corrugated portion can be strengthened by the protruding portion.

[0015] In some embodiments, the thickness of the corrugated portion is less than the thickness of the flat portion. In this way, while the corrugated portion has sufficient bending stiffness, the mechanical sensitivity of the corrugated portion can be ensured by reducing the thickness of the corrugated portion.

[0016] In some embodiments, the reinforcing layer of the diaphragm is arranged on one side of the corrugated portion close to the back plate and / or on the other side of the corrugated portion away from the back plate. In this way, the bending stiffness of the corrugated portion can be improved by arranging the reinforcing layer on one side of the corrugated portion or on both sides of the corrugated portion. BRIEF DESCRIPTION OF DRAWINGS

[0017] One or more embodiments are illustrated by way of example in the figures that form a part of this disclosure and which do not limit the present application in which like reference numerals refer to similar elements in which: the drawings are not necessarily to scale, the specific

[0018] Fig. 1 is a schematic diagram of a partial structure of a diaphragm according to some embodiments of the present application;

[0019] Fig. 2 is a schematic diagram of a cross-sectional structure along A-A in Fig. 1;

[0020] Fig. 3 is a schematic diagram of a partial structure of a diaphragm according to some other embodiments of the present application;

[0021] Fig. 4 is a schematic diagram of a cross-sectional structure along B-B in Fig. 3;

[0022] Fig. 5 is a schematic diagram of a cross-sectional structure of a diaphragm according to some further embodiments of the present application;

[0023] Fig. 6 is a schematic diagram of a structure of a MEMS microphone according to some embodiments of the present application;

[0024] Fig. 7 is a schematic diagram of a partial structure of a diaphragm and a back plate in a MEMS microphone according to some embodiments of the present application. Embodiments of the present application

[0025] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the embodiments of the present application will be described in detail below with reference to the drawings. However, those skilled in the art can understand that, in the embodiments of the present application, many technical details are presented in order to make the readers better understand the present application. However, the technical solutions claimed by the present application can be implemented even without these technical details and based on various changes and modifications of the following embodiments. The division of the following embodiments is for the convenience of description and should not constitute any limitation on the specific implementation of the present application. The embodiments can be combined and referenced to each other without contradiction.

[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the present application; the description and drawings of the specification and the appended claims and the above-mentioned documents are to be construed as illustrative only and without prejudice. The use herein of the terms "including", "comprising", "having" and the like are meant to encompass the items listed thereafter, as well as more general claims to other items not specifically named. Such terms are inclusive.

[0027] In the description of the embodiments of the present application, unless otherwise explicitly specified and limited, the technical terms "mounting", "connection", "connecting" and the like should be understood in a broad sense, for example, can be fixed connection, can also be detachable connection, or can be integrated; can be mechanical connection, can also be electrical connection; can be direct connection, can also be indirect connection through an intermediate medium, can be internal communication of two elements or interaction relationship between two elements. For those skilled in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0028] The MEMS microphone includes a diaphragm and a back plate, which are processed on a silicon substrate by a micro-machining process. The back plate has a perforation, and the diaphragm has an air gap with the back plate, thereby forming a variable air gap capacitor. When the diaphragm vibrates in response to an external sound wave or sound pressure, the capacitor can convert sound energy into electrical energy for detection.

[0029] The MEMS microphone is easy to integrate in various electronic devices based on its small size characteristics. However, the microphone will sacrifice sensitivity while reducing the size. In actual situations, the sensitivity of the MEMS microphone can be improved by low stress control of the diaphragm in the MEMS microphone. And the power consumption can be greatly reduced.

[0030] Generally, the diaphragm can form stress residues during manufacturing or operation. The residual stress of the diaphragm is an important factor leading to the decrease of sensitivity, and too high residual stress will cause the decrease of diaphragm flexibility, affecting the vibration characteristics of the diaphragm. In order to reduce the residual stress of the diaphragm and improve the compliance of the diaphragm, a corrugated diaphragm appears, that is, the diaphragm is provided with a corrugated structure. The corrugated structure can improve the mechanical sensitivity of the diaphragm. The number and depth of the corrugations can be set according to actual conditions. When the diaphragm is actually processed, with the increase of the corrugation depth, the diaphragm will be damaged in the process.

[0031] When the corrugated structure is arranged on the diaphragm, high stress is concentrated on the edge of the corrugated structure, which causes insufficient strength at the corrugated structure, so that the diaphragm is prone to rupture and failure. In order to improve the strength of the diaphragm, some embodiments of the present application provide a diaphragm. The corrugated structure of the diaphragm is replaced by a material with higher bending stiffness than the bending stiffness of the diaphragm body, or a reinforcing layer with higher bending stiffness than the bending stiffness of the diaphragm body is attached to the corrugated structure of the diaphragm. In this way, the strength of the corrugated structure of the diaphragm can be improved, and the ability of the corrugated structure to resist deformation can be improved. The phenomenon of easy bending and rupture of the corrugated structure of the diaphragm is avoided, thereby improving the structural strength of the diaphragm.

[0032] The diaphragm provided by some embodiments of the present application is described below in combination with FIGS. 1-5.

[0033] As shown in FIGS. 1-5, the diaphragm 11 provided by some embodiments of the present application includes a vibrating portion 111 and a connecting portion 112 arranged around the vibrating portion 111. The vibrating portion 111 includes a first flat portion 1111 located at the middle position, a corrugated portion 1112 arranged around the first flat portion 1111, and a second flat portion 1113 arranged around the corrugated portion. The corrugated portion 1112 extends in the direction from the center to the edge of the first flat portion 1111. The bending stiffness of the corrugated portion 1112 is greater than the bending stiffness of the first flat portion 1111 and the second flat portion 1113, and the corrugated portion 1112 is made of a material including at least silicon nitride.

[0034] The vibrating portion 111 is the part of the diaphragm 11 that vibrates in response to sound waves, and the connecting portion 112 is the part of the diaphragm 11 that is connected to the substrate and fixed on the substrate. The vibrating portion 111 of the diaphragm 11 is opposite to the back plate, one side of the vibrating portion 111 faces the back plate, and the other side of the vibrating portion 111 faces the back cavity of the substrate. Generally, the back plate does not deform, so the size of the vibration displacement of the diaphragm 11 affects the capacitance value, thereby affecting the sensitivity of the microphone. The corrugated structure formed by the corrugated portion 1112 improves the sensitivity of the diaphragm 11.

[0035] The corrugated portion 1112 is arranged around the first flat portion 1111, and the first flat portion 1111 occupies the center position of the vibrating portion 111 and can respond in time under the action of sound pressure. The corrugated portion 1112 can be located near the edge of the vibrating portion 111. On the side of the corrugated portion 1112 away from the flat portion 1111, a relatively flat portion can also be arranged, i.e., the corrugated portion 1112 is arranged at the edge of the vibrating portion 111 and has a certain interval with the connecting portion 112, and the connecting portion 112 is connected with the second flat portion 1113. In order to balance the air pressure on both sides of the diaphragm 11, a through hole is arranged on the vibrating portion 111, which allows air flow to flow relatively on both sides of the diaphragm 11, so that the air pressure on both sides of the diaphragm 11 is balanced to a certain extent.

[0036] The corrugated structure formed by the corrugated portion 1112 makes the corrugated portion 1112 have a shape different from the first flat portion 1111 and the second flat portion 1113, which is conducive to reducing the stress across the diaphragm 11. By providing the corrugated structure, the compliance can be improved. At the same time, the corrugated portion 1112 is also prone to cracking failure due to the presence of corrugations, or folds. The deeper the folds, the sharper the shape, and the higher the risk of cracking failure of the diaphragm 11.

[0037] In the face of the relatively fragile problem of the corrugated portion 1112 due to the presence of folds, the diaphragm 11 provided by some embodiments of the present application is made of a material including at least silicon nitride at the corrugated structure, so that the bending stiffness of the corrugated portion is greater than that of other parts. By using a material with higher bending stiffness than other parts at the corrugated structure, the corrugated portion 1112 has higher structural strength at the corrugated structure than other parts, thereby reducing the risk of cracking failure of the diaphragm 11.

[0038] In actual situations, other parts of the diaphragm 11 can be made of polysilicon, and the corrugated structure can be made of silicon nitride, that is, the first flat portion 1111 and the second flat portion 1113 can be made of polysilicon material, and the corrugated portion 1112 can be made of silicon nitride material. Or graphene can be used as a reinforcing material to improve the bending stiffness of the corrugated structure of the diaphragm 11. Or other materials with higher bending stiffness can be used as the material for making the corrugated portion 1112. In addition, during the manufacturing process of the diaphragm 11, deposition and etching processes can be used for various materials, so as to integrate materials with different bending stiffnesses in different parts.

[0039] As shown in FIGS. 1 and 2, the corrugated portion 1112 of the diaphragm 11 can be made of a material with higher bending stiffness to replace the material with the same bending stiffness as other parts in the prior art.

[0040] Referring to FIGS. 1 and 2, the first flat portion 1111 and the second flat portion 1113 can extend a protruding portion 1114 on one side of the end portion close to the corrugated portion 1112, and the protruding portion 1114 covers the edge of the corrugated portion 1112.

[0041] The protruding portion 1114 formed at the edge of the first flat portion 1111 and the second flat portion 1113 can be integrally formed with the first flat portion 1111 and the second flat portion 1113, and constitutes a part of the first flat portion 1111 and the second flat portion 1113. Meanwhile, the protruding portion 1114 covers the edge of the corrugated portion 1112. The connection between the edge of the first flat portion 1111 and the edge of the corrugated portion 1112, and the connection between the edge of the second flat portion 1113 and the edge of the corrugated portion 1112 are formed as additional connection portions by the covering of the corrugated portion 1112 by the protruding portion 1114. That is, the protruding portion 1114 establishes a new connection form between the first flat portion 1111 and the corrugated portion 1112, and between the second flat portion 1113 and the corrugated portion 1112, so that the protruding portion 1114 is attached to the corrugated portion 1112. In this way, when the first flat portion 1111 and the second flat portion 1113 are made of different materials from the corrugated portion 1112, the connection between the first flat portion 1111 and the corrugated portion 1112, and the connection between the second flat portion 1113 and the corrugated portion 1112 can be strengthened by forming the edges of the first flat portion 1111 and the second flat portion 1113 as relatively protruding portions.

[0042] In actual situations, the protruding portion 1114 can be formed on both sides of the end of the first flat portion 1111 close to the corrugated portion 1112, or on both sides of the end of the second flat portion 1113 close to the corrugated portion 1112, so as to wrap the edge of the corrugated portion 1112. In this way, the edge of the corrugated portion 1112 is clamped into the first flat portion 1111 or the second flat portion 1113. The connection between the corrugated portion 1112 and the first flat portion 1111, or the connection between the corrugated portion 1112 and the second flat portion 1113 can also be formed in a top-and-bottom overlapping state, so as to increase the connection and fitting area between the corrugated portion 1112 and the first flat portion 1111, or between the corrugated portion 1112 and the second flat portion 1113.

[0043] In some embodiments, the thickness of the corrugated portion 1112 is less than the thickness of the first flat portion 1111.

[0044] When the corrugated portion 1112 is made of a material with higher bending stiffness, the thickness of the corrugated portion 1112 can be thinned to improve the mechanical sensitivity.

[0045] As shown in FIGS. 3-5, when reinforcing the corrugated structure of the diaphragm 11, a reinforcing layer 102 can also be provided in the corrugated portion 1112, and the bending stiffness of the corrugated portion 1112 is reinforced by providing the reinforcing layer 102 having higher bending stiffness. The reinforcing layer 102 can be provided on the top of the corrugated portion 1112. In actual cases, the reinforcing layer 102 can also be provided on the bottom of the corrugated portion 1112, or provided on both the top and the bottom of the corrugated portion 1112. That is, the reinforcing layer 102 can be provided on one side of the corrugated portion 1112 close to the back plate and / or on the other side of the corrugated portion 1112 away from the back plate.

[0046] When the reinforcing layer 102 is attached, the corrugated portion 1112 can include a substrate layer 101 connected at one end to the first flat portion 1111 and at the other end to the second flat portion 1113, and a reinforcing layer 102 covering the substrate layer 101, and the reinforcing layer 102 is made of a silicon nitride material.

[0047] The substrate layer 101 can be made of a polysilicon material, and when the substrate layer 101 of the corrugated structure has the same bending stiffness as other parts, the reinforcing layer 102 having higher bending stiffness is attached to the corrugated structure. Thus, the corrugated portion 1112 has higher structural strength than other parts.

[0048] When the corrugated portion 1112 forms a multi-layer structure, the adverse effects of the substrate layer 101 having lower bending stiffness due to high stress concentration can be offset or partially eliminated by the reinforcing layer 102 having higher bending stiffness. By attaching the reinforcing layer 102 having higher bending stiffness, the deformation resistance of the corrugated portion 1112 is improved, and the risk of rupture failure is reduced.

[0049] In actual cases, the substrate layer 101 can also be made of a silicon nitride material, thereby forming a multi-layer silicon nitride structure including the substrate layer 101 and the reinforcing layer 102, effectively ensuring the structural strength at the corrugated structure.

[0050] As shown in FIG. 4, in some embodiments, the reinforcing layer 102 can completely cover the substrate layer 101 in a direction from the center to the edge of the first flat portion 1111.

[0051] That is, the reinforcing layer 102 can completely cover the substrate layer 101, which can facilitate the molding and manufacturing of the reinforcing layer 102, and also ensure the structural strength of the reinforcing layer 102 as a whole. When the reinforcing layer 102 is attached, the reinforcing layer 102 can only cover one side of the substrate layer 101, or cover both sides of the substrate layer 101.

[0052] In addition, the reinforcing layer 102 can also only cover part of the substrate layer 101. As shown in FIG. 5, in some embodiments, the substrate layer 101 can include concave portions 1011 and convex portions 1012 arranged alternately along a direction from the center to the edge of the first flat portion 1111, and the reinforcing layer 102 has multiple layers along the direction from the center to the edge of the first flat portion 1111, each reinforcing layer 102 completely covers a concave portion 1011 and part of a convex portion 1012 adjacent to the concave portion 1011, and the edges of adjacent reinforcing layers 102 on the same convex portion 1012 are spaced apart.

[0053] That is, the reinforcing layer 102 is attached to the substrate layer 101 in a dispersed manner, and each reinforcing layer 102 is arranged corresponding to a concave portion 1011 and part of a convex portion 1012 of the substrate layer 101. The use of the reinforcing layer 102 can be saved, and at the same time, the mechanical sensitivity of the substrate layer 101 where the reinforcing layer 102 is not attached can be ensured.

[0054] In some embodiments, each concave portion 1011 and each convex portion 1012 can have a certain straight extension length, so that the curved portion will not form a wrinkle in a sharp shape due to being directly connected together. By forming a corrugated structure with smooth edges without sharp corners, stress concentration in the corrugated structure can be avoided. The use of smooth edges reduces the failure rate of the diaphragm 11 during operation, which is beneficial to improve the product life.

[0055] In addition, the thickness of the reinforcing layer 102 can be less than the thickness of the substrate layer 101.

[0056] The reinforcing layer 102 can be attached to the substrate layer 101 in a small thickness form, which can reinforce the bending stiffness of the corrugated structure without adversely affecting the properties of the corrugated portion 1112 itself.

[0057] In some embodiments, the connection between the corrugated portion 1112 and the first flat portion 1111, and the connection between the corrugated portion 1112 and the second flat portion 1113 can be flush.

[0058] That is, the corrugated portion 1112 has the same thickness as the first flat portion 1111 and the second flat portion 1113 at the edges, and the corrugated portion 1112 is in an aligned state (same horizontal state) when connected to the first flat portion 1111 and the second flat portion 1113. In this way, the corrugated portion 1112 is in the same plane as the first flat portion 1111 and the second flat portion 1113 at the connection, and the positioning is simple. The manufacturing and forming process of the diaphragm 11 can be simplified, which is beneficial to form the diaphragm 11 integrated with different materials through deposition and etching processes.

[0059] Some embodiments of the present application also provide a MEMS microphone. As shown in FIG. 6 and FIG. 7, the MEMS microphone comprises a substrate 10 having a back cavity, and a capacitor structure disposed on the substrate 10. The capacitor structure comprises a diaphragm 11 and a back plate 12 spaced apart from the diaphragm 11, and the diaphragm 11 is the diaphragm 11 described above.

[0060] A vibration gap is formed between the vibration part 111 of the diaphragm 11 and the back plate 12, and a capacitor structure is formed. When the vibration part 111 of the diaphragm 11 is affected by a sound wave signal, the diaphragm 11 vibrates, the distance between the diaphragm 11 and the back plate 12 changes, and the capacitance changes. Thus, the sound wave signal is converted into an electrical signal. Since the corrugated part 1112 with higher bending stiffness is used, or the reinforcing layer 102 is used to improve the bending stiffness of the corrugated part 1112, the impact resistance of the diaphragm 11 is improved, and the probability of the diaphragm 11 breaking down is reduced. The reinforcing layer 102 can be disposed on the side of the corrugated part 1112 close to the back plate 12 and / or the side of the corrugated part 1112 away from the back plate 12.

[0061] It can be understood by those skilled in the art that the above-mentioned embodiments are specific embodiments for implementing the present application, and in actual application, various changes can be made in form and details without departing from the spirit and scope of the present application.

Claims

1.A diaphragm, comprising a vibrating portion and a connecting portion surrounding the vibrating portion, the vibrating portion comprising a first flat portion at a middle position, a corrugated portion surrounding the first flat portion, and a second flat portion surrounding the corrugated portion, the corrugated portion extending in a direction from a center to an edge of the first flat portion, the corrugated portion having a bending stiffness greater than that of the first flat portion and the second flat portion, the corrugated portion being made of a material comprising at least silicon nitride. 2.The diaphragm of claim 1, wherein: the first flat portion and the second flat portion are made of a polysilicon material, and the corrugated portion is made of a silicon nitride material. 3.The diaphragm of claim 1, wherein: the corrugated portion comprises a base layer connected to the first flat portion at one end and to the second flat portion at the other end, and a reinforcing layer covering the base layer, the reinforcing layer being made of a silicon nitride material. 4.The diaphragm of claim 3, wherein: the base layer is made of a polysilicon or silicon nitride material. 5.The diaphragm of claim 3, wherein: the reinforcing layer completely covers the base layer in a direction from the center to the edge of the first flat portion. 6.The diaphragm of claim 3, wherein: the base layer comprises concave portions and convex portions alternately arranged in a direction from the center to the edge of the first flat portion, the reinforcing layer is a plurality of layers in the direction from the center to the edge of the first flat portion, each of the reinforcing layers completely covers one of the concave portions and a part of the convex portions adjacent to the concave portion, and adjacent two of the reinforcing layers have a spacing between edges on the same convex portion. 7.The diaphragm of claim 1, wherein: the first flat portion and the second flat portion extend with a protrusion at a side close to an end of the corrugated portion, the protrusion covering an edge of the corrugated portion. 8.The diaphragm of claim 7, wherein: a thickness of the corrugated portion is less than a thickness of the first flat portion. 9.A MEMS microphone, comprising a substrate having a back cavity and a capacitive structure disposed on the substrate, the capacitive structure comprising a diaphragm and a back plate spaced apart from the diaphragm, the diaphragm being the diaphragm of any one of claims 1 to 8. 10.The MEMS microphone of claim 9, wherein: the corrugated portion of the diaphragm comprises a base layer connected to the first flat portion at one end and to the second flat portion at the other end, and a reinforcing layer covering the base layer, the reinforcing layer being made of a silicon nitride material, the reinforcing layer being disposed on a side of the corrugated portion close to the back plate and / or on a side of the corrugated portion away from the back plate. ​ ​ ​ ​ ​ ​ ​ ​

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