Pipe mount / dismount fixture

Abstract

The present application relates to the field of semiconductor manufacturing devices, and discloses a pipe mount / dismount fixture. The pipe mount / dismount fixture comprises: two arms, wherein the arms are provided with a rotating part, the two arms are in cross rotating connection by means of the rotating part, a handle area is formed on one side of the rotating part of the two arms, and a working area is formed on the other side of the rotating part of the two arms; at least one clamping assembly, wherein the clamping assembly comprises two clamping members respectively connected to the arms on the working area, the clamping members are respectively provided with clamping portions, the clamping portions and the corresponding arms are arranged at right angles, and in the state where a pipe is clamped, the pipe is parallel to the central axis of the two arms; detection portions provided at the tail ends of the clamping members, configured to be in contact with the inner wall of a process tube of a furnace tube device when the pipe is parallel to the process tube of the furnace tube device; and a base perpendicular to the central axis. The cooperation of the base and the detection portions is beneficial to improve the installation accuracy of the pipe, so as to ensure the perpendicularity and parallelism of pipe installation.

Description

Pipe dismounting tool TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor manufacturing equipment, in particular to a pipe dismounting tool. BACKGROUND

[0002] Furnace tube equipment is the main equipment for semiconductor diffusion, oxidation, annealing and other processes, and the precision and uniformity of the reaction gas flow control are key performance indicators of the equipment.

[0003] In the furnace tube equipment, the reaction gas enters the reaction cavity from the gas path system through the gas inlet pipe, and the reaction cavity is heated by the heating furnace outside the reaction cavity.

[0004] The gas inlet pipe is generally made of quartz, and the bottom of the gas inlet pipe is placed in an adapter made of metal. The furnace tube equipment usually selects different numbers and sizes of gas inlet pipes according to different process procedures, but since the gas inlet pipe is relatively long, it is difficult to install it in the adapter, and when multiple gas inlet pipes are installed at the same time, it is difficult to ensure the perpendicularity of each gas inlet pipe and the parallelism between them. Once there is an error in the installation operation, any one or more gas inlet pipes will be tilted, which will easily cause friction with the reaction cavity and generate particulate matter, affecting the process. Or the gas inlet pipe is tilted and hits the boat or wafer, causing it to break and affecting process safety.

[0005] Currently, the installation and dismounting of the gas inlet pipe is usually a manual operation. Since it is a manual operation, the heating furnace must be turned off during the operation, so that the reaction cavity is cooled to room temperature, and then personnel wearing professional gloves install and dismount the gas inlet pipe with their hands. This method has two major drawbacks: first, the heating furnace must be cooled in advance, which is very time-consuming, because the heating furnace needs time to cool down, and it also takes time to heat up again, and the time is very long, usually two hours; second, the installation and dismounting completely rely on manual operation, and the installation and dismounting precision is difficult to guarantee, and collision is easy to occur. SUMMARY

[0006] The present application provides a pipe dismounting tool, which is beneficial to the installation precision of the pipe.

[0007] The present application solves the above technical problems by the following technical scheme:

[0008] A pipe dismounting tool for dismounting or installing a pipe in a furnace tube equipment, comprising:

[0009] Two clamping arms, each of the clamping arms has a rotating part, the two clamping arms are cross-rotatably connected through the rotating parts, a handle area is formed on one side of the rotating parts of the two clamping arms, and a working area is formed on the other side;

[0010] At least one clamping assembly, the clamping assembly comprising two clamping pieces connected with the jaw arms on one side of the working area respectively, the clamping pieces being respectively provided with clamping parts, the clamping parts being arranged at right angles with the corresponding jaw arms, when the two clamping pieces are closed, the clamping parts form a clamping area matched with the pipeline to clamp the pipeline, and the central axes of the two jaw arms are parallel to the pipeline;

[0011] A detection part arranged at the end of the clamping piece, the detection part being configured to contact the inner wall of the process pipe of the furnace pipe equipment when the pipeline is parallel to the process pipe of the furnace pipe equipment;

[0012] A base configured to cooperate with the reference part of the furnace pipe equipment during installation of the pipeline, the base being perpendicular to the central axis to ensure the verticality of the pipeline installation.

[0013] The positive progress effect of the present application is that the clamping parts of the clamping pieces are arranged at right angles with the jaw arms, which facilitates clamping of the pipeline extending in the vertical direction. The base cooperates with the reference part of the furnace pipe equipment to provide an installation reference for installation of the pipeline, thereby ensuring the verticality of the pipeline installation. After the pipeline is inserted into the adapter of the furnace pipe equipment, if the pipeline is parallel to the inner wall of the furnace pipe equipment, the detection part will contact the inner wall of the process pipe of the furnace pipe equipment. By clamping at multiple positions of the pipeline, it is checked whether the detection part contacts the inner wall of the process pipe, which can detect the parallelism of the pipeline, thereby facilitating adjustment of the parallelism of the pipeline. The parallelism of the pipeline can be adjusted by adjusting the bolts of the adapter. Under the cooperation of the base and the detection part, the installation accuracy of the pipeline is improved to ensure the verticality and parallelism of the pipeline installation, and the pipeline is not prone to collision during installation. In addition, the pipeline can be disassembled at high temperature (100-200℃) by the pipeline disassembly tool, the hand does not directly contact the pipeline, and there is no need to wait for the pipeline to cool to room temperature, which is beneficial to improve the work efficiency.

[0014] SUMMARY

[0015] The features and performances of the present application are further described by the following examples and drawings.

[0016] Fig. 1 is a structure schematic diagram of the closed state of the pipeline disassembly tool of the embodiment 1 of the present application;

[0017] Fig. 2 is a structure schematic diagram of the open state of the pipeline disassembly tool of the embodiment 1 of the present application;

[0018] Fig. 3 is a schematic diagram of the use state of the pipeline disassembly tool of the embodiment 1 of the present application in the furnace pipe equipment;

[0019] Fig. 4 is a schematic view of the base of the pipe dismounting tool of the embodiment 1 cooperating with the reference part of the furnace pipe equipment;

[0020] Fig. 5 is a schematic view of the structure of the clamping member of the pipe dismounting tool of the embodiment 1;

[0021] Fig. 6 is a schematic view of the structure of the arm of the pipe dismounting tool of the embodiment 1;

[0022] Fig. 7 is a schematic view of the structure of the base of the pipe dismounting tool of the embodiment 1;

[0023] Fig. 8 is a schematic view of the structure of the arm and the clamping assembly of the pipe dismounting tool of the embodiment 2.

[0024] Preferred embodiments of the present application

[0025] The present application will be further described in the following by way of examples, but the present application is not limited to the examples.

[0026] Embodiment 1

[0027] As shown in Figs. 1-4, the embodiment provides a pipe dismounting tool for dismounting or installing the pipe 410 in the furnace pipe equipment 400. The pipe dismounting tool comprises two arms 200, a clamping assembly, a detection part 130 and a base 300. The arm 200 has a rotating part 220, and the two arms 200 are connected by the rotating part 220 to rotate crosswise. A handle area 240 is formed on one side of the rotating part 220 of the arm 200, and a working area 230 is formed on the other side. The clamping assembly comprises two clamping members 100, each of which is connected to the arm 200 on one side of the working area 230. Each clamping member 100 is provided with a clamping part 110, and the clamping part 110 is arranged at a right angle with the corresponding arm 200. When the clamping member 100 is closed, the clamping part 110 forms a clamping area 120 matched with the pipe 410 to clamp the pipe 410. In the state of clamping the pipe 410, the pipe 410 is parallel to the central axis 250 of the two arms 200. The detection part 130 is arranged at the end of the clamping member 100, and the detection part 130 is configured to contact the inner wall of the process pipe 420 of the furnace pipe equipment 400 when the pipe 410 is installed to the furnace pipe equipment 400 and parallel to the process pipe 420 of the furnace pipe equipment 400. The base 300 is configured to cooperate with the reference part 430 of the furnace pipe equipment 400 during the installation of the pipe 410, and the base 300 is perpendicular to the central axis 250 to ensure the verticality of the installation of the pipe 410. The central axis 250 is the center line of the rotating part 220 in the vertical direction.

[0028] The clamping part 110 of the clamping member 100 is arranged at a right angle with the clamp arm 200, facilitating clamping of the pipe 410 extending in the vertical direction. The base 300 cooperates with the reference part 430 of the furnace pipe device 400, and can provide an installation reference for installation of the pipe 410. The pipe 410 is parallel to the central axis 250, the base 300 is perpendicular to the central axis 250, that is, the pipe 410 is perpendicular to the base 300, thereby ensuring the verticality of the pipe 410 installation. After the pipe 410 is inserted into the adapter 440 of the furnace pipe device 400, if the pipe 410 is parallel to the inner wall of the process pipe 420 of the furnace pipe device 400, the detection part 130 will be in contact with the inner wall of the process pipe 420 of the furnace pipe device 400. By clamping at multiple positions of the pipe 410, it can be checked whether the detection part 130 is in contact with the inner wall of the process pipe 420, thereby facilitating adjustment of the parallelism of the pipe 410. The parallelism of the pipe 410 can be adjusted by adjusting the bolts of the adapter 440. With the cooperation of the base 300 and the detection part 130, the installation accuracy of the pipe 410 can be improved, thereby ensuring the verticality and parallelism of the pipe 410 installation, and the pipe 410 is not easy to collide during installation. In addition, the pipe 410 can be disassembled by the pipe disassembly tool at high temperature (for example, 100-200°C), and the hand does not directly contact the pipe 410, so it is not necessary to wait for the pipe 410 to completely cool to room temperature, thereby improving the work efficiency.

[0029] In the embodiment, the clamping member 100 further comprises an adapter part 140. The adapter part 140 is perpendicular to the clamping part 110, and the clamping part 110 is connected to the clamp arm 200 through the adapter part 140.

[0030] In some embodiments, the adapter part 140 can not be provided, and the clamping part 110 is directly connected to the clamp arm 200.

[0031] Regarding the structure of the clamping member 100, as shown in FIG. 1 and FIG. 5, in the embodiment, the clamping member 100 is detachably connected to the clamp arm 200. Specifically, the clamping member 100 and the clamp arm 200 can be connected by screws or other detachable ways, and the clamping member 100 is convenient to replace to adapt to different types of pipes.

[0032] In other embodiments, the clamping member 100 and the clamp arm 200 can also be designed in an integrated manner.

[0033] In the embodiment, the shape of the clamping area 120 formed when the two clamping members 100 are closed is any one of a circle, an ellipse or a square, thereby being able to adapt to a circular pipe, an elliptical pipe or a square pipe.

[0034] In the embodiment, the hardness of the clamping portion 110 is lower than that of the pipe 410. During clamping, the clamping portion 110 is less likely to cause damage to the pipe 410. Specifically, the clamping portion 110 can be made of PTFE material.

[0035] In the embodiment, the hardness of the detecting portion 130 is lower than that of the process pipe 420. During dismounting of the pipe 410, the detecting portion 130 is less likely to damage the inner wall of the process pipe 420.

[0036] Further, the end of the detecting portion 130 that is in contact with the inner wall of the process pipe 420 is arc-shaped. When the arc-shaped structure is in contact with the inner wall of the process pipe 420, it is less likely to cause scratches on the inner wall of the process pipe 420.

[0037] The structure of the clamping arm 200 is shown in FIGS. 1 and 6. In the embodiment, the handle area 240 of the clamping arm 200 is provided with an anti-skid portion 210. Specifically, the anti-skid portion 210 is designed with anti-skid grooves, so that it is less likely to slip when gripped by hand.

[0038] In the embodiment, the structure of the rotating portion 220 of the clamping arm 200 is circular. The rotating portion 220 is further provided with an opening 222 for connecting a pin shaft 221. The structure of the rotating connection is not limited to this, and other structures that can achieve rotating connection, such as a hinge structure, can also be used in some embodiments.

[0039] The structure of the base 300 is shown in FIG. 1, FIG. 2, FIG. 3 and FIG. 7. In this embodiment, the base 300 is designed separately from the tongs 200. The base 300 includes two slots 310 for accommodating the tongs 200. When the tongs 200 are closed, the two tongs 200 are respectively located in the corresponding slots 310, and the tongs 200 are perpendicular to the base 300. During the pipe installation process, the base 300 is matched with the reference part 430 of the furnace pipe equipment 400 to ensure that the base 300 is in a horizontal state. The base 300 remains stationary, the two tongs 200 are closed to clamp the pipe 410, the handle area of the tongs 200 is placed in the slot 310, and the pipe 410 is inserted into the adapter 440. Under the limiting action of the slot 310, the central axis 250 of the two tongs 200 and the base 300 always remain perpendicular. Since the pipe 410 is parallel to the central axis 250, at this time, the pipe 410 is perpendicular to the base 300, thereby ensuring the perpendicularity of the pipe installation. During the parallelism detection process of the pipe 410 and the inner wall of the process pipe 420 of the furnace pipe equipment 400, the base 300 remains stationary, the tongs 200 are moved in the vertical direction to clamp the pipe 410 at different positions by the clamping member 100, and when the pipe 410 is clamped, the tongs 200 are located in the slot 310 of the base 300, which ensures that the tongs 200 do not rotate and the central axis 250 of the tongs 200 remains perpendicular to the base 300, thereby ensuring the accuracy of the parallelism detection.

[0040] As shown in FIG. 4 and FIG. 7, the base 300 includes a stepped part 320 matched with the reference part 430. The stepped part 320 is matched with the reference part 430 to ensure the levelness of the base 300.

[0041] In this embodiment, the reference part 430 is a ferromagnetic material, and the base 300 is a magnet. The base 300 can be adsorbed on the reference part 430, and the installation process is more convenient, which can be completed by a single person.

[0042] Embodiment 2

[0043] As shown in FIG. 8, the scheme in this embodiment is basically the same as that in Embodiment 1. The difference is that the pipe dismounting tool includes a plurality of clamping assemblies, each clamping assembly includes two clamping members 100, the plurality of clamping assemblies are distributed in the vertical direction, the clamping assembly at the bottom is connected with the tongs 200 at one side of the working area, and the adapter of the clamping assembly at the upper part is connected with the clamping assembly at the lower part.

[0044] In some embodiments, the adapter can not be provided, and the plurality of clamping assemblies are directly provided on the tongs in the vertical direction.

[0045] By setting multiple clamping components, the parallelism of the pipeline is more stable when clamping it. On the other hand, during the parallelism test, there is no need to move the clamp arm 200. As long as the detection parts of the two clamping components are in contact with the inner wall of the process tube, the parallelism of the pipeline can be guaranteed, making the parallelism test more convenient.

[0046] While specific embodiments of this application have been described above, those skilled in the art should understand that these are merely illustrative examples, and the scope of protection of this application is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principles and essence of this application, but all such changes and modifications fall within the scope of protection of this application.

Claims

1. A pipe disassembly and assembly tool for disassembling or installing pipes in furnace tube equipment, characterized in that, include: Two clamp arms, each clamp arm having a rotating part, the two clamp arms being rotatably connected by the rotating parts, a handle area being formed on one side of the rotating part of the two clamp arms, and a working area being formed on the other side; At least one clamping assembly, the clamping assembly including two clamping members connected to a clamping arm on one side of the working area respectively, each clamping member being provided with a clamping part, the clamping part being arranged at a right angle to the corresponding clamping arm, when the two clamping members are closed, the clamping part forming a clamping area matching the pipeline to clamp the pipeline, and the central axis of the two clamping arms being parallel to the pipeline; A detection unit is disposed at the end of the clamping member, and the detection unit is configured to contact the inner wall of the process tube of the furnace tube equipment when the pipeline is parallel to the process tube of the furnace tube equipment. The base is configured such that, during the installation of the pipeline, the base mates with the reference part of the furnace tube equipment, and the base is perpendicular to the central axis to ensure the verticality of the pipeline installation.

2. The pipeline disassembly and assembly tooling as described in claim 1, characterized in that, The clamping member is detachably connected to the clamp arm.

3. The pipeline disassembly and assembly fixture as described in claim 1, characterized in that, The shape of the clamping area can be any one of a circle, an ellipse, or a square.

4. The pipeline disassembly and assembly tooling as described in claim 1, characterized in that, The hardness of the clamping part is lower than the hardness of the pipeline.

5. The pipeline disassembly and assembly tooling as described in claim 1, characterized in that, The base includes two slots for accommodating the clamp arms. When closed, the two clamp arms are located in the corresponding slots and clamp the base.

6. The pipeline disassembly and assembly tooling as described in claim 1 or 5, characterized in that, The base includes a stepped portion that matches the reference portion, and the base engages with the reference portion through the stepped portion.

7. The pipeline disassembly and assembly fixture as described in claim 1, characterized in that, The handle area of ​​the clamp arm is provided with an anti-slip part.

8. The pipe assembly / disassembly fixture as described in claim 1, characterized in that, The reference part is made of ferromagnetic material, and the base is a magnet.

9. The pipeline disassembly and assembly tooling as described in claim 1, characterized in that, The hardness of the detection section is lower than that of the process tube.

10. The pipeline disassembly and assembly fixture as described in claim 1, characterized in that, The end of the detection unit that contacts the inner wall of the process tube is arc-shaped.

11. The pipe assembly / disassembly fixture as described in claim 1, characterized in that, The pipeline assembly / disassembly fixture includes multiple clamping components, which are distributed along the vertical direction.

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