Motor control device

Abstract

A motor control device (1) comprises: an FF control unit (2) that generates a model output simulating a response of a control target (40); an FB signal generation unit (4) that generates an FB signal on the basis of magnetic sensor signals output from two magnetic sensors (44) attached to a motor (42); and an FB control unit (3) that generates an operation amount for the control target (40) to follow an operation command and outputs the operation amount to a voltage applier (41). The FB signal generation unit (4) comprises: a first filter unit (8) that performs filter processing on the magnetic sensor signals; an angle calculation unit (7) that calculates an angle of a rotor (42a) on the basis of the output signals of the first filter unit (8); a phase delay compensation unit (6) that outputs, on the basis of the angle, the phase delay characteristics of the first filter unit (8), and the compensation speed, a post-compensation angle obtained by compensating for the phase delay of the angle; and a speed calculation unit (9) that calculates the speed of the motor (42) on the basis of the post-compensation angle.

Description

Motor control device

[0001] The present disclosure relates to a motor control device that controls the operation of a motor that drives a controlled object.

[0002] Motor control devices are generally required to respond to operational commands quickly and accurately and to operate efficiently. To achieve this, a control system equipped with a motor control device requires a sensor that accurately detects the rotor position, which indicates the rotation angle of the rotor of the motor. Sensors used to detect rotor position in control systems include magnetic sensors such as Hall elements and magnetoresistive (MR) elements, resolvers, and encoders. When the motor is a permanent magnet motor, rotor position is detected by acquiring two sinusoidal signals, the phases of which are shifted by 90° from each other, from the outputs of one or more sensors arranged around the rotor, depending on the rotor's magnet position. The rotor position is then detected by solving an inverse trigonometric function for the two sinusoidal signals.

[0003] If the noise superimposed on the signal obtained from the sensor becomes large, its effect will be directly reflected in the calculation results of rotor position detection, increasing the difference between the calculated rotor position and the actual rotor position, making it difficult to control the rotor position accurately. While installing a low-pass filter in the signal transmission path is one way to combat noise, as the motor's rotational speed increases, the signal phase delay caused by the filter becomes significant, resulting in a discrepancy between the rotor position generated based on the filtered signal and the actual rotor position. Therefore, even if a low-pass filter is installed, as the motor's rotational speed increases, it becomes difficult to control the rotor position accurately.

[0004] To address the above-mentioned issues, Patent Document 1 (Japanese Patent Laid-Open No. 2003-121666) discloses a control device for an AC motor that aims to improve the detection accuracy of the rotor position in a rotary magnet AC motor and reduce the effects of electrical disturbances. Specifically, the control device described in Patent Document 1 includes a rotor position detector having output characteristics with a discontinuity point where the output returns to zero after one electrical rotation, a stator coil current detector, and a control device that calculates a control output signal based on a required output, the rotor rotational position, and the coil current. The control device also includes a position corrector. The position corrector also includes a low-pass filter that removes high-frequency components from an original position signal from the position detector to generate a filtered output signal, a phase lag compensation unit that compensates for a phase lag caused by the low-pass filter, and a discontinuity switching unit that uses the filtered output signal as a final corrected position signal at points other than the discontinuity point of the position detector and uses the original position signal as the corrected position signal at the discontinuity point.

[0005] JP 2010-239698 A

[0006] In Patent Document 1, high-frequency noise components contained in a signal output from a sensor are removed using a low-pass filter, and the phase lag caused by the low-pass filter is addressed by feeding back the output signal of the low-pass filter so that it follows the input to the low-pass filter, and phase compensation is performed using a proportional-integral compensator. However, with the phase compensation method disclosed in Patent Document 1, if the gain of the proportional-integral compensator is increased in an attempt to enhance the phase compensation effect, the noise reduction effect achieved by filtering is reduced. Conversely, if the noise reduction effect is to be maintained, the gain of the proportional-integral compensator for phase compensation cannot be increased, and the phase compensation effect cannot be enhanced. In other words, the technology disclosed in Patent Document 1 has a problem in that it is not possible to achieve both an improved noise reduction effect achieved by filtering and an improved phase lag compensation effect achieved by phase compensation.

[0007] The present disclosure has been made in consideration of the above, and aims to provide a motor control device that can achieve both an improved noise reduction effect through filter processing and an improved phase lag compensation effect through phase compensation.

[0008] To solve the above-mentioned problems and achieve the object, a motor control device according to the present disclosure controls the operation of a motor that drives a controlled object, and includes a feedforward control unit, a feedback signal generation unit, and a feedback control unit. The feedforward control unit generates a model output simulating a response of the controlled object based on an operation command for operating the controlled object, and outputs the model output to the feedback control unit. The feedback signal generation unit generates a feedback signal based on magnetic sensor signals output from two magnetic sensors attached to the motor in accordance with the operation of the motor controlled by the operation command, and outputs the feedback signal to the feedback control unit. The feedback control unit generates a manipulated variable based on the model output and the feedback signal so that the controlled object follows the operation command, and outputs the manipulated variable to a drive unit of the controlled object. The feedback signal generation unit includes a first filter unit, an angle calculation unit, a phase lag compensation unit, and a speed calculation unit. The first filter unit performs filtering on each of the magnetic sensor signals. The angle calculation unit calculates the angle of a rotor provided in the motor based on the output signal of the first filter unit. The phase lag compensator outputs a compensated angle obtained by compensating for the phase lag of the angle based on the phase lag characteristics of the angle and the first filter, and the operation command and a compensation speed for compensating for the phase lag of the angle. The speed calculator calculates the motor speed based on the compensated angle.

[0009] The motor control device according to the present disclosure has the advantage of being able to achieve both an improved noise reduction effect through filtering and an improved phase lag compensation effect through phase compensation.

[0010] FIG. showing a first configuration example of a control system including a motor control device according to Embodiment 1. FIG. showing a configuration example of a phase delay compensation unit in the first configuration example shown in FIG. 1. FIG. showing a second configuration example of a control system including a motor control device according to Embodiment 1. FIG. showing a configuration example of a phase delay compensation unit in the second configuration example shown in FIG. 3. FIG. showing an example of a hardware configuration for realizing the functions of the motor control device according to Embodiment 1. FIG. showing another example of a hardware configuration for realizing the functions of the motor control device according to Embodiment 1. FIG. showing a third configuration example of a control system including a motor control device according to Embodiment 2. FIG. showing a configuration example of a compensation speed calculation unit in the third configuration example shown in FIG. 7. FIG. showing a fourth configuration example of a control system including a motor control device according to Embodiment 2. FIG. showing a configuration example of a compensation speed calculation unit in the fourth configuration example shown in FIG. 9. FIG. showing a fifth configuration example of a control system including a motor control device according to Embodiment 3. FIG. showing a configuration example of a compensation speed calculation unit in the fifth configuration example shown in FIG. 11. FIG. showing a sixth configuration example of a control system including a motor control device according to Embodiment 4. FIG. showing a configuration example of a phase delay compensation unit in the sixth configuration example shown in FIG. 13. FIG. showing a seventh configuration example of a control system including a motor control device according to Embodiment 5. FIG. showing a configuration example of a phase delay compensation unit in the seventh configuration example shown in FIG. 15. FIG. showing an eighth configuration example of a control system including a motor control device according to Embodiment 6. FIG. showing a configuration example of a phase delay compensation unit in the eighth configuration example shown in FIG. 17

[0011] Hereinafter, with reference to the accompanying drawings, the motor control device according to the embodiments of the present disclosure will be described in detail. In this document, a rotary motor is exemplified for explanation, but it is not intended to exclude the application to a linear motor. In the case of a linear motor, “rotor” may be read as “mover”, “angle” as “mover position”, and “rotation” as “linear motion” or simply “motion”. Also, in this document, a permanent magnet type motor is exemplified for explanation, but it is not intended to exclude the application to motors other than the permanent magnet type motor.

[0012] Embodiment 1. Figure 1 is a diagram showing a first example configuration of a control system including a motor control device 1 according to embodiment 1. In Figure 1, the components of the control system are the motor control device 1, a controlled object 40, and an operation command generator 45. The controlled object 40 includes a voltage applicator 41, a motor 42 that operates by a drive voltage output from the voltage applicator 41, a mechanical load 43 that is driven by the motor 42, and a magnetic sensor 44 attached to the motor 42. Note that although there are two magnetic sensors, in Figure 1 the two magnetic sensors are collectively shown as magnetic sensor 44.

[0013] The motor 42 is connected to a mechanical load 43, which is a drive target, and the mechanical load 43 operates in conjunction with the rotation of the motor 42. The magnetic sensor 44 is a sensor that detects a rotor position indicating the rotation angle of a rotor 42a provided in the motor 42. Examples of the magnetic sensor 44 include a Hall element and an MR element. The motor 42 is controlled based on an operation command output from an operation command generator 45. The operation command is a command for operating the control target 40. The operation command can be defined by parameters set by the user. The operation command generator 45 may be provided in a control device higher than the motor control device 1, or may be an input device with a user interface. The operation command generator 45 may also be provided inside the motor control device 1. That is, the operation command generator 45 may be a component of the motor control device 1.

[0014] The motor control device 1 includes a feedforward (FF) control unit 2, a feedback (FB) control unit 3, and an FB signal generation unit 4. The FF control unit 2 generates and outputs a model output simulating the response of a controlled object 40 based on an operation command. The model output includes a model position, a model velocity, and a model torque. The FB signal generation unit 4 generates an FB signal based on magnetic sensor signals calculated from two magnetic sensors 44 attached to the motor 42 in response to the operation of the motor 42, and outputs the FB signal to the FB control unit 3. In this paper, the FB signal is exemplified by a speed and a compensated angle. The FB control unit 3 generates a manipulated variable based on the model output and the FB signal so that the controlled object 40 follows the operation command, and outputs the manipulated variable to a voltage applicator 41, which is a drive unit for the controlled object 40. The voltage applicator 41 operates as a drive unit for the controlled object 40.

[0015] The FF control unit 2 includes a reference model unit 21. The reference model unit 21 simulates the characteristics of the controlled object 40, such as the transfer function and frequency characteristics of the controlled object 40, and calculates and outputs a model position, model velocity, and model torque according to the simulated characteristics of the controlled object 40. The model velocity can be obtained by the first-order differentiation of the model position. The model torque can be obtained by obtaining a model acceleration by the second-order differentiation of the model position or the first-order differentiation of the model velocity, and multiplying the model acceleration by the inertia of the moving part of the controlled object 40.

[0016] The FB control unit 3 includes a position control unit 31, a speed control unit 32, and a torque control unit 33. The position control unit 31 receives the model position from the FF control unit 2 and the compensated angle from the phase lag compensation unit 6. The position control unit 31 generates a speed command based on the model position and the compensated angle. Specifically, the position control unit 31 receives the model position and the compensated angle as input, and outputs a speed command so that the compensated angle follows the model position. The compensated angle is a rotor angle signal after compensation calculation that is generated by the FB signal generation unit 4 from the magnetic sensor signals A and B. The position control unit 31 can be configured with a proportional compensator or the like.

[0017] The speed control unit 32 receives a speed command from the position control unit 31, a model speed from the FF control unit 2, and a speed from the speed calculation unit 9. The speed control unit 32 generates an error torque based on the model speed, the speed command, and the speed. Specifically, the speed control unit 32 receives the model speed, the speed command, and the speed, and outputs an error torque so that the speed output from the speed calculation unit 9 follows the sum of the model speed and the speed command. In other words, the speed control unit 32 generates an error torque that causes the speed output from the speed calculation unit 9 to follow the sum of the model speed and the speed command. The speed control unit 32 can be configured with a proportional-integral compensator or the like.

[0018] The torque control unit 33 receives the error torque from the speed control unit 32 and the model torque from the FF control unit 2. The torque control unit 33 generates a manipulated variable based on the error torque and the model torque. Specifically, the torque control unit 33 outputs the sum of the error torque and the model torque as the manipulated variable. The torque control unit 33 can be configured with an adder or a subtractor.

[0019] The manipulated variable generated by the torque control unit 33 is input to the voltage applicator 41. The voltage applicator 41 generates a drive voltage for driving the motor 42 based on the manipulated variable and applies the drive voltage to the motor 42. The motor 42 is driven to rotate by the drive voltage.

[0020] As mentioned above, the motor 42 is equipped with a magnetic sensor 44. The magnetic sensor 44 detects the magnetic field that changes with the rotation of the rotor 42a. The magnetic sensor 44 outputs two signals consisting of a sine wave and a cosine wave that convert the rotation angle into an electrical angle. In this document, one of the detection signals may be referred to as "magnetic sensor signal A" and the other detection signal may be referred to as "magnetic sensor signal B."

[0021] The FB signal generator 4 includes a phase lag compensator 6, an angle calculator 7, a first filter 8, and a speed calculator 9. The first filter 8 includes filters 8A and 8B. The magnetic sensor signal A is input to filter 8A, and the magnetic sensor signal B is input to filter 8B. The filters 8A and 8B are provided to reduce the influence of noise superimposed on the magnetic sensor signals A and B. The filter 8A filters the magnetic sensor signal A, and the filter 8B filters the magnetic sensor signal B. In this document, the signal output from filter 8A may be referred to as the "filtered magnetic sensor signal A," and the signal output from filter 8B may be referred to as the "filtered magnetic sensor signal B." One example of the configuration of the filters 8A and 8B is a low-pass filter, and their characteristics can be expressed by the following equation (1) using the Laplace variable s:

[0022]

[0023] In the above formula (1), f ＬＰＦ１ is the cutoff frequency of the low-pass filter.

[0024] The angle calculation unit 7 receives the filtered magnetic sensor signal A and the filtered magnetic sensor signal B. The angle calculation unit 7 calculates the angle, which is the rotation angle of the rotor 42 a, based on the filtered magnetic sensor signal A and the filtered magnetic sensor signal B.

[0025] The filtered magnetic sensor signal A and the filtered magnetic sensor signal B can be expressed as a sine wave (sin) and a cosine wave (cos), and their amplitudes are expressed as "S Ａ " and "S Ｂ The angle of rotation of the rotor 42a is represented by "θ". Ａ ≒S Ｂ Therefore, it can be obtained by calculating the arctangent of each signal as in the following equation (2).

[0026]

[0027] 2 is a diagram showing an example of the configuration of the phase lag compensator 6 in the first example configuration shown in FIG. 1 . As shown in FIG. 2 , the phase lag compensator 6 includes a compensation execution unit 61. The compensation execution unit 61 receives the model velocity from the FF control unit 2 and the angle from the angle calculation unit 7. The compensation execution unit 61 generates a compensated angle that compensates for the phase lag caused by the filtering process in the first filter unit 8 based on the angle, the phase lag characteristics of the first filter unit 8, and the model velocity. In the compensation execution unit 61, the model velocity output from the FF control unit 2 is used as a compensation velocity for compensating for the phase lag caused by the filtering process in the first filter unit 8.

[0028] Here, when the filters 8A and 8B of the first filter unit 8 are first-order low-pass filters, the phase delay characteristic is expressed as follows: ＬＰＦ１ Using the above, it can be expressed by the following equation (3).

[0029]

[0030] In the above formula (3), ω ｃ is the compensation speed.

[0031] Therefore, the compensated angle θ ｘ is the angle θ and the compensation speed ω ｃ and cutoff frequency f ＬＰＦ１ can be calculated using the following equation (4).

[0032]

[0033] A supplementary explanation of the above process will be given. First, in general, the phase delay of a low-pass filter is determined by the cutoff frequency f ＬＰＦ１ Once the configuration of the filters 8A and 8B is determined, the cutoff frequency f ＬＰＦ１ is also determined, the cutoff frequency f ＬＰＦ１It is possible to know in advance the velocity information. On the other hand, the velocity information can be calculated by differentiating the angle θ. However, differentiating the angle θ re-excites the influence of noise that was reduced by the filters 8A and 8B of the first filter unit 8. If the velocity information calculated in this way is used to compensate for the phase delay caused by the filters 8A and 8B of the first filter unit 8, the influence of noise will appear again in the compensated angle. Therefore, the model velocity is calculated using the velocity information ω for compensation. ｃ The model speed is speed information that does not include the influence of noise and simulates the response of the controlled object 40 by excluding the influence of noise. Therefore, by adopting such a configuration, the compensated angle θ , which is obtained by compensating for the phase delay caused by the filters 8A and 8B of the first filter unit 8 while reducing the influence of noise, is used. ｘ The advantage is that it is possible to find

[0034] The compensated angle θ generated by the compensation execution unit 61 ｘ is input to the velocity calculation unit 9 and the position control unit 31 of the FB control unit 3. As described above, the position control unit 31 calculates the model position and the compensated angle θ ｘ The speed calculation unit 9 generates a speed command based on the compensated angle θ ｘ Specifically, the speed is calculated based on the compensated angle θ ｘ The compensated angle θ ｘ The signal after the differentiation process may be subjected to filtering using a low-pass filter, a moving average filter, or the like, and the filtered signal may be output as the velocity.

[0035] Although noise superimposed on the magnetic sensor 44 is reduced by filtering in the first filter unit 8, as the rotational speed of the motor 42 increases, this filtering causes a significant phase delay, resulting in a discrepancy between the rotor position generated based on the signal filtered by the first filter unit 8 and the actual rotor position. Therefore, the presence of the first filter unit 8 may make accurate position control difficult. To address this issue, in phase compensation using a simple proportional-integral compensator, increasing the gain of the proportional-integral compensator to enhance the phase compensation effect reduces the noise reduction effect achieved by the filter. Conversely, maintaining the noise reduction effect makes it impossible to increase the gain of the proportional-integral compensator used for phase compensation, thereby preventing the phase compensation effect from being enhanced.

[0036] To address the above-described conventional problems, the motor control device 1 according to the first configuration example uses a compensation speed ω ｃ Based on the compensated angle θ ｘ The compensated angle θ ｘ is output as an FB signal to the FB control unit 3. In addition, the motor control device 1 according to the first configuration example outputs a compensated angle θ ｘ The speed generated using the angle calculation unit 7 is output as an FB signal to the FB control unit 3. The angle calculation unit 7 calculates the angle using a compensation speed ω ｃ If compensation is performed based on the above, it is possible to improve both the noise reduction effect by the filter and the phase delay compensation effect by the phase compensation.

[0037] 1, the model speed input to the speed control section 32 of the FB control section 3 is used as the compensation speed ω ｃ However, it may be configured as shown in Fig. 3. Fig. 3 is a diagram showing a second configuration example of a control system including a motor control device 1A according to embodiment 1. The components of the control system according to the second configuration example are the motor control device 1A, a controlled object 40, and an operation command generation unit 45.

[0038] Comparing the configuration of the motor control device 1A shown in Figure 3 with the configuration of the motor control device 1 shown in Figure 1, the feedback signal generation unit 4 has been replaced with a feedback signal generation unit 4A. In the feedback signal generation unit 4A, the phase lag compensation unit 6 has been replaced with a phase lag compensation unit 6A. In the phase lag compensation unit 6A, an operation command is input instead of a model speed. The other configurations are the same as or equivalent to the configuration in Figure 1, and the same or equivalent components are denoted by the same reference numerals, and redundant explanations will be omitted.

[0039] FIG. 4 is a diagram showing an example of the configuration of the phase lag compensation unit 6A in the second example configuration shown in FIG. 3. As shown in FIG. 4, the phase lag compensation unit 6A includes a compensation execution unit 61 and a reference model unit 62. The reference model unit 62 generates a model velocity based on an operation command and outputs the model velocity to the compensation execution unit 61. The reference model unit 62 can be constructed using the functions of the reference model unit 21 included in the FF control unit 2, so no new design is required. Furthermore, while the reference model unit 21 of the FF control unit 2 generates a model position and a model torque in addition to the model velocity, the reference model unit 62 of the phase lag compensation unit 6A only needs to generate the model velocity. Therefore, the reference model unit 62 can be configured smaller than the reference model unit 21.

[0040] To address the above-described conventional problems, the motor control device 1A according to the second configuration example generates a compensation speed based on an operation command, and the generated compensation speed ω ｃ Based on the compensated angle θ ｘ The compensated angle θ ｘ is output as an FB signal to the FB control unit 3. In addition, the motor control device 1A according to the second configuration example outputs a compensated angle θ ｘ The speed generated using the filter is output as an FB signal to the FB control unit 3. Therefore, similar to the motor control device 1 according to the first configuration example, it is possible to improve both the noise reduction effect by the filter and the phase lag compensation effect by the phase compensation.

[0041] As described above, the motor control device according to the first embodiment is a motor control device that controls the operation of a motor that drives a controlled object, and includes an FF control unit, an FB signal generation unit, and an FB control unit. The FF control unit generates a model output that simulates the response of the controlled object based on an operation command for operating the controlled object, and outputs the model output to the FB control unit. The FB signal generation unit generates an FB signal based on magnetic sensor signals calculated from two magnetic sensors attached to the motor in accordance with the operation of the motor controlled by the operation command, and outputs the FB signal to the FB control unit. The FB control unit generates a manipulated variable that causes the controlled object to follow the operation command based on the model output and the FB signal, and outputs the manipulated variable to a drive unit of the controlled object. The FB signal generation unit includes a first filter unit, an angle calculation unit, a phase lag compensation unit, and a speed calculation unit. The first filter unit performs filtering on each of the magnetic sensor signals. The angle calculation unit calculates the angle of a rotor provided in the motor based on the output signal of the first filter unit. The phase lag compensator outputs a compensated angle in which the phase lag of the angle has been compensated for, based on either the angle and the phase lag characteristics of the first filter unit, or a compensation speed for compensating for the phase lag of the operation command and the angle. The speed calculator calculates the motor speed based on the compensated angle. According to the motor control device of embodiment 1, the speed generated using the compensated angle is output to the FB controller as an FB signal. Compensating the angle generated by the angle calculator based on the compensation speed that does not include noise provides the effect of achieving both an improved noise reduction effect achieved by filtering and an improved phase lag compensation effect achieved by phase compensation.

[0042] In the motor control device according to the first embodiment, the phase lag compensator may generate the compensated angle using a model speed included in the model output generated by the FF controller, or may generate the compensating speed based on the motion command. The model speed and the motion command do not contain noise. Therefore, phase lag compensation can be performed using a noise-free signal, and the compensated angle thus generated has the advantage of being able to compensate for the phase lag caused by the first filter while maintaining the noise reduction effect of the first filter.

[0043] At the end of the first embodiment, the hardware configuration for realizing the functions of the motor control devices 1 and 1A described above will be described with reference to Fig. 5 and Fig. 6. Fig. 5 is a diagram showing an example of a hardware configuration for realizing the functions of the motor control devices 1 and 1A according to the first embodiment. Fig. 6 is a diagram showing another example of a hardware configuration for realizing the functions of the motor control devices 1 and 1A according to the first embodiment.

[0044] When realizing some or all of the functions of the motor control device 1, 1A according to embodiment 1, the configuration can include a processor 201 that performs calculations, a memory 202 that stores programs read by the processor 201, and an interface 204 that transmits and receives signals, as shown in FIG. 5.

[0045] The processor 201 is an example of a computing unit. The processor 201 may be a computing unit called a microprocessor, a microcomputer, a central processing unit (CPU), or a digital signal processor (DSP). Examples of the memory 202 include non-volatile or volatile semiconductor memory such as random access memory (RAM), read-only memory (ROM), flash memory, erasable programmable read-only memory (EPROM), and electrically programmable read-only memory (EEPROM), a magnetic disk, a flexible disk, an optical disk, a compact disk, a minidisk, and a digital versatile disk (DVD).

[0046] Memory 202 stores a program that executes the functions of motor control devices 1, 1A according to embodiment 1. Processor 201 exchanges necessary information via interface 204, executes the program stored in memory 202, and refers to the table stored in memory 202, thereby performing the above-described processing. The results of calculations by processor 201 can be stored in memory 202. Information regarding the filter characteristics of filters 8A, 8B can also be stored in memory 202.

[0047] 6 can be used to realize part of the functions of the motor control device 1, 1A according to the first embodiment. The processing circuit 203 can be a single circuit, a composite circuit, an ASIC (Application Specific Integrated Circuit), an FPGA (Field-Programmable Gate Array), or a combination thereof. Information input to and output from the processing circuit 203 can be exchanged via an interface 204.

[0048] It is also possible that some of the processing in the motor control devices 1 and 1A is performed by the processing circuit 203, and the processing that is not performed by the processing circuit 203 is performed by the processor 201 and the memory 202.

[0049] 7 is a diagram showing a third example configuration of a control system including a motor control device 1B according to embodiment 2. The components of the control system according to the third example configuration are the motor control device 1B, a controlled object 40, and an operation command generation unit 45.

[0050] Comparing the configuration of motor control device 1B shown in FIG. 7 with the configuration of motor control device 1 shown in FIG. 1, the FB signal generation unit 4 has been replaced with an FB signal generation unit 4B. A compensating speed calculation unit 5 has been added to FB signal generation unit 4B. An angle is input to compensation speed calculation unit 5 from angle calculation unit 7. Compensating speed calculation unit 5 generates a compensating speed based on the angle and outputs it to a phase lag compensation unit 6. The other configuration is the same as or equivalent to the configuration in FIG. 1, and the same or equivalent components are denoted by the same reference numerals, and redundant explanations will be omitted.

[0051] Fig. 8 is a diagram showing an example of the configuration of the compensating speed calculation unit 5 in the third example configuration shown in Fig. 7. As shown in Fig. 8, the compensating speed calculation unit 5 includes a differentiator 51 and a second filter 52. The differentiator 51 generates an angle differential signal by differentiating the angle. The second filter 52 performs filtering to reduce the influence of noise components amplified by the differentiation, and outputs the filtered signal as the compensating speed.

[0052] An example of the configuration of the second filter 52 is a low-pass filter, and its characteristics can be expressed by the following equation (5) using a Laplace variable s.

[0053]

[0054] In the above formula (5), f ＬＰＦ２ is the cutoff frequency of the low-pass filter.

[0055] The compensation speed generated by the compensation speed calculation unit 5 is input to the phase lag compensation unit 6. The operation of the phase lag compensation unit 6 is the same as in the first embodiment, and therefore a description thereof will be omitted here.

[0056] While Fig. 7 shows a configuration in which a compensating speed is generated and output using the angle output from angle calculation unit 7, a configuration as shown in Fig. 9 may also be used. Fig. 9 is a diagram showing a fourth example configuration of a control system including motor control device 1B according to embodiment 2. The components of the control system according to the fourth example configuration are motor control device 1C, controlled object 40, and operation command generation unit 45.

[0057] Comparing the configuration of motor control device 1C shown in Figure 9 with the configuration of motor control device 1B shown in Figure 7, FB signal generation unit 4B has been replaced with FB signal generation unit 4C. In FB signal generation unit 4C, compensation speed calculation unit 5 has been replaced with compensation speed calculation unit 5A. In compensation speed calculation unit 5A, an operation command is input instead of an angle. The other configuration is the same as or equivalent to the configuration in Figure 7, and the same or equivalent components are designated by the same reference numerals, and redundant explanations will be omitted.

[0058] Fig. 10 is a diagram showing an example of the configuration of the compensation speed calculation unit 5A in the fourth example configuration shown in Fig. 9. As shown in Fig. 10, the compensation speed calculation unit 5A includes a reference model unit 53. The reference model unit 53 generates a model speed based on an operation command and outputs the generated model speed to the phase lag compensation unit 6 as a compensation speed. The subsequent operation is the same as in Fig. 7. Note that the reference model unit 53 only needs to be able to generate a model speed, and therefore may have a configuration equivalent to that of the reference model unit 62 of the phase lag compensation unit 6A.

[0059] As described above, the motor control device according to the second embodiment differs from the configuration of the motor control device according to the first embodiment in that the feedback signal generation unit further includes a compensation speed calculation unit that calculates a compensation speed based on the angle calculated by the angle calculation unit. The compensation speed calculation unit may include a differentiator that performs angle differentiation and outputs an angle differentiation signal, and a second filter that performs filtering on the angle differentiation signal, with the output of the second filter being the compensation speed. Alternatively, the compensation speed calculation unit may include a reference model unit that simulates the characteristics of the controlled object, and the reference model unit may be configured to output a model speed that simulates the response of the controlled object while removing the effects of noise based on the operation command, and the model speed is used as the compensation speed. The motor control device according to the second embodiment, like the motor control device according to the first embodiment, has the advantage of being able to achieve both improved noise reduction through filtering and improved phase lag compensation through phase compensation.

[0060] 11 is a diagram showing a fifth example configuration of a control system including a motor control device 1D according to embodiment 3. The components of the control system according to the fifth example configuration are the motor control device 1D, a controlled object 40, and an operation command generation unit 45.

[0061] Comparing the configuration of motor control device 1D shown in FIG. 11 with the configuration of motor control device 1B shown in FIG. 7 , the FB signal generation unit 4B has been replaced with an FB signal generation unit 4D. In FB signal generation unit 4D, the compensation speed calculation unit 5 has been replaced with a compensation speed calculation unit 5B. The input signals to and output signals from compensation speed calculation unit 5B are the same as those in FIG. 7 , but the internal configuration is different. The other configuration is the same as or equivalent to the configuration in FIG. 7 , and the same or equivalent components are designated by the same reference numerals, and redundant explanations will be omitted.

[0062] Fig. 12 is a diagram showing an example of the configuration of the compensation speed calculation unit 5B in the fifth example configuration shown in Fig. 11. As shown in Fig. 12, the compensation speed calculation unit 5B includes a differentiator 54, a phase synchronization compensator 55, a third filter 56, and an integrator 57.

[0063] In the compensation speed calculation unit 5B, the filtered speed output from the third filter 56 is treated as a compensation speed and output to the outside of the compensation speed calculation unit 5B. That is, the third filter 56 generates a compensation speed to be used in the phase lag compensation unit 6 for compensating for the phase lag of the angle. The output of the third filter 56 is also input to the integrator 57. The integrator 57 performs integration on the filtered speed and outputs the resulting signal to the differentiator 54 as a filtered angle. The differentiator 54 generates a difference between the angle and the filtered angle as a deviation and outputs it to the phase synchronization compensator 55. The phase synchronization compensator 55 outputs a phase synchronization compensator output signal to the third filter 56, in which phase synchronization compensation has been performed on the deviation so that the filtered angle follows the angle. As described above, the output of the third filter 56 is output to the outside of the compensation speed calculation unit 5B as a compensation speed. In this way, a compensation speed with reduced noise effects can be obtained. Furthermore, the phase delay caused by the third filter 56 used in the process of calculating the compensation speed is compensated for by the phase synchronization compensator 55. The subsequent operations are the same as those in FIG.

[0064] The following provides additional information regarding the configuration and operation of the compensation speed calculation unit 5B. An example of the configuration of the phase synchronization compensator 55 is a proportional integral compensator. The phase synchronization compensator 55, which is a proportional integral compensator, performs proportional integral compensation on the deviation output from the differentiator 54, causing the deviation to converge to zero. The third filter 56 then outputs a filtered speed in which the influence of noise has been reduced for the phase synchronization compensator output signal output from the phase synchronization compensator 55. An example of the configuration of the third filter 56 is a notch filter, and its characteristics can be expressed by the following equation (6) using the Laplace variable s.

[0065]

[0066] In the above formula (6), ζ is a parameter that determines the width of the notch, d is a parameter that determines the depth of the notch, and ω ｎ is a parameter that determines the center frequency of the notch.

[0067] The motor 42 may generate noise that depends on the rotation speed. This noise may be caused by misalignment of the installation position of the magnetic sensor 44, variations in magnetization of the magnet in the rotor 42a, harmonic noise superimposed on the rotating magnetic field of the rotor 42a, etc., and may generate noise with frequency components that are integer multiples of the rotation speed frequency (= speed [r / min] / 60 [Hz]). For this type of noise, the center frequency ω of the notch filter ｎ is changed sequentially in accordance with the rotational speed of the motor 42, it is possible to remove noise components whose frequency varies depending on the rotational speed from the calculated compensation speed. Note that the rotational speed of the motor 42 varies in accordance with the operation command, and if the operation command is changed, the model output output from the FF control unit 2 also varies, and the speed calculated by the speed calculation unit 9 also varies. Therefore, the center frequency ω of the notch filter ｎ The change in the rotational speed can be performed based on the operation command, the model output, or the speed calculated by the speed calculation unit 9. By performing such control, it is possible to reduce the influence of noise whose frequency varies depending on the rotational speed of the motor 42.

[0068] As described above, the motor control device according to the third embodiment differs from the configuration of the motor control device according to the first embodiment in that the FB signal generation unit further includes a compensation speed calculation unit that calculates a compensation speed based on the angle calculated by the angle calculation unit. The compensation speed calculation unit includes a third filter, an integrator, a differentiator, and a phase synchronization compensator. The third filter generates a compensation speed to be used in the phase lag compensation unit. The integrator performs integration processing on the output of the third filter and generates a post-integration signal as a filtered angle. The differentiator generates a deviation that is the difference between the angle and the filtered angle. The phase synchronization compensator performs phase synchronization compensation on the deviation so that the filtered angle follows the angle and outputs the post-compensation signal to the third filter. According to the motor control device according to the third embodiment, the compensation speed calculation unit includes a differentiator, a phase synchronization compensator, the third filter, and an integrator. The action of the phase synchronization compensator and the third filter generates a filtered speed that further reduces the effect of noise that depends on the motor rotation speed, and the generated filtered speed is used as a compensation speed. By using the compensation speed thus generated to compensate for the phase delay caused by filters 8A and 8B of first filter unit 8, it is possible to achieve both a further improvement in the noise reduction effect achieved by filtering and an improvement in the phase delay compensation effect achieved by phase compensation, compared to the motor control devices of Embodiments 1 and 2.

[0069] In the motor control device according to the third embodiment, a notch filter can be used as the third filter. In this case, it is desirable to change the center frequency of the notch filter sequentially based on the operation command, the model output generated based on the operation command, or the speed calculated by the speed calculation unit. By implementing such control, it is possible to reduce the effects of noise whose frequency varies depending on the rotational speed of the motor.

[0070] 13 is a diagram showing a sixth example configuration of a control system including a motor control device 1E according to embodiment 4. The components of the control system according to the sixth example configuration are the motor control device 1E, a controlled object 40, and an operation command generation unit 45.

[0071] Comparing the configuration of the motor control device 1E shown in Figure 13 with the configuration of the motor control device 1B shown in Figure 7, the FB signal generation unit 4B has been replaced with a FB signal generation unit 4E. In the FB signal generation unit 4E, the phase lag compensation unit 6 has been replaced with a phase lag compensation unit 6B. The input signal to the phase lag compensation unit 6B and the output signal from the phase lag compensation unit 6B are the same as in Figure 7, but the internal configuration is different. The other configurations are the same as or equivalent to the configuration in Figure 7, and the same or equivalent components are denoted by the same reference numerals, and redundant explanations will be omitted.

[0072] Fig. 14 is a diagram showing an example of the configuration of the phase lag compensation unit 6B in the sixth example configuration shown in Fig. 13. As shown in Fig. 14, the phase lag compensation unit 6B includes a differentiator 64, a phase synchronization compensator 65, a third filter 66, an integrator 67, and a compensation execution unit 61A.

[0073] In the phase lag compensation unit 6B, the integrator 67 integrates the filtered velocity output from the third filter 66 to generate a filtered angle. The differentiator 64 generates a deviation, which is the difference between the angle calculated by the angle calculation unit 7 and the filtered angle output from the integrator 67. The phase synchronization compensator 65 performs phase synchronization compensation on the deviation so that the filtered angle follows the angle. The third filter 66 performs filtering on the phase synchronization compensator output signal output from the phase synchronization compensator 65, and outputs the filtered signal to the integrator 67 as the filtered velocity. The compensation execution unit 61A receives the filtered angle from the integrator 67 and the compensation velocity from the compensation velocity calculation unit 5. The compensation execution unit 61A generates a compensated angle that compensates for the phase delay caused by the filtering process in the first filter unit 8 and the phase delay caused by the filtering process in the third filter 66, based on the phase delay characteristic of the first filter unit 8, the compensation speed output from the compensation speed calculation unit 5, and the filtered angle. The subsequent operations are the same as those in Fig. 7 .

[0074] The following provides additional information regarding the configuration and operation of the phase lag compensation unit 6B. An example of the configuration of the phase lag compensator 65 is a proportional-integral compensator. The phase lag compensator 65, which is a proportional-integral compensator, performs proportional-integral compensation on the deviation output from the difference calculator 64, converging the deviation to zero. The third filter 66 then outputs a filtered speed that reduces the influence of noise on the phase lag compensator output signal output from the phase lag compensator 65. An example of the configuration of the third filter 66 can be a notch filter, similar to the third filter 56 described in embodiment 3, and its characteristics can be expressed by the above equation (6). The difference calculator 64, phase lag compensator 65, third filter 66, and integrator 67 in the phase lag compensation unit 6B may have the same configuration as the difference calculator 54, phase lag compensator 55, third filter 56, and integrator 57 in the compensation speed calculation unit 5B described in embodiment 3.

[0075] As described above, the motor control device according to embodiment 4 has the same configuration as the motor control device according to embodiment 1, except that the phase lag compensator includes an integrator, a differentiator, a phase synchronization compensator, a third filter, and a compensation execution unit. The integrator integrates the filtered speed to generate a filtered angle. The differentiator generates a deviation, which is the difference between the angle calculated by the angle calculation unit and the filtered angle. The phase synchronization compensator performs phase synchronization compensation on the deviation so that the filtered angle tracks the angle. The third filter filters the output signal of the phase synchronization compensator and outputs the filtered signal to the integrator as the filtered speed. The compensation execution unit generates a compensated angle based on the phase lag characteristic of the first filter unit, the compensation speed output from the compensation speed calculation unit, and the filtered angle. According to the motor control device according to embodiment 4, the phase lag compensator includes a differentiator, a phase synchronization compensator, a third filter, an integrator, and a compensation execution unit. The functions of the differentiator, phase synchronization compensator, third filter, integrator, and compensation execution unit generate a filtered angle and a filtered speed in which the effects of noise are further reduced, thereby making it possible to achieve both a further improvement in the noise reduction effect achieved by filtering and an improvement in the phase lag compensation effect achieved by phase compensation, compared to the motor control devices according to the first and second embodiments.

[0076] 15 is a diagram showing a seventh example configuration of a control system including a motor control device 1F according to embodiment 5. The components of the control system according to the seventh example configuration are the motor control device 1F, a controlled object 40, and an operation command generation unit 45.

[0077] Comparing the configuration of the motor control device 1F shown in Figure 15 with the configuration of the motor control device 1 shown in Figure 1, the FB signal generation unit 4 has been replaced with a FB signal generation unit 4F. In the FB signal generation unit 4F, the phase lag compensation unit 6 has been replaced with a phase lag compensation unit 6C. As in Figure 1, the input signal to the phase lag compensation unit 6C is an angle, and the output signal from the phase lag compensation unit 6C is a compensated angle. The differences are that the compensation speed is not input from an external source but is generated internally, and in the internal configuration. The other configurations are the same or equivalent to the configuration of Figure 1, and the same or equivalent components are designated by the same reference numerals, and redundant explanations will be omitted.

[0078] Fig. 16 is a diagram showing an example of the configuration of the phase lag compensation unit 6C in the seventh example configuration shown in Fig. 15. As shown in Fig. 16, the phase lag compensation unit 6C includes a differentiator 64, a phase synchronization compensator 65, a third filter 66, an integrator 67, and a compensation execution unit 61A, similar to the phase lag compensation unit 6B shown in Fig. 14.

[0079] The difference between the compensation execution unit 61A shown in Fig. 14 and the compensation execution unit 61A shown in Fig. 16 is that the compensation speed is input from the compensation speed calculation unit 5 in the former, whereas the compensation speed generated inside the phase lag compensation unit 6C is input in the latter. Note that other operations in the phase lag compensation unit 6C are the same as those in the phase lag compensation unit 6B, and therefore description thereof will be omitted here.

[0080] As described above, the motor control device according to embodiment 5 has the same configuration as the motor control device according to embodiment 1, except that the phase lag compensation unit includes a third filter, an integrator, a differentiator, a phase synchronization compensator, and a compensation execution unit. The third filter generates a compensation speed. The integrator performs integration processing on the output of the third filter and outputs the resulting signal as a filtered angle. The differentiator generates a deviation, which is the difference between the angle and the filtered angle. The phase synchronization compensator performs phase synchronization compensation on the deviation so that the filtered angle follows the angle and outputs the resulting signal to the third filter. The compensation execution unit uses the output of the third filter as a compensation speed and generates a compensated angle based on the phase lag characteristic of the first filter unit, the compensation speed, and the filtered angle. According to the motor control device according to embodiment 5, the phase lag compensation unit includes a third filter, an integrator, a differentiator, a phase synchronization compensator, and a compensation execution unit. The actions of the third filter, integrator, differentiator, phase synchronization compensator, and compensation execution unit generate a filtered angle and a filtered speed in which the effects of noise are further reduced. This makes it possible to achieve both a further improvement in the noise reduction effect achieved by filtering and an improvement in the phase lag compensation effect achieved by phase compensation, compared to the motor control devices of embodiments 1 and 2. Furthermore, the motor control device of embodiment 5 has the advantage of being able to omit the compensation speed calculation unit and therefore be more compact than the motor control device of embodiment 4.

[0081] 17 is a diagram showing an eighth example configuration of a control system including a motor control device 1G according to embodiment 6. The components of the control system according to the eighth example configuration are the motor control device 1G, a controlled object 40, and an operation command generation unit 45.

[0082] Comparing the configuration of the motor control device 1G shown in Figure 17 with the configuration of the motor control device 1F shown in Figure 15, the FB signal generation unit 4F has been replaced with a FB signal generation unit 4G. In the FB signal generation unit 4G, the phase lag compensation unit 6C has been replaced with a phase lag compensation unit 6D. An operation command is input to the phase lag compensation unit 6D. The other configurations are the same as or equivalent to the configuration in Figure 15, and the same or equivalent components are denoted by the same reference numerals, and redundant explanations will be omitted.

[0083] Fig. 18 is a diagram showing an example of the configuration of a phase lag compensation unit 6D in the eighth example configuration shown in Fig. 17. As shown in Fig. 18, the phase lag compensation unit 6D includes a differentiator 64, a phase synchronization compensator 65, a third filter 66, and an integrator 67, similar to the phase lag compensation unit 6C shown in Fig. 16. In addition, in the phase lag compensation unit 6D, the compensation execution unit 61A is replaced with a compensation execution unit 61B. In addition, the phase lag compensation unit 6D further includes a reference model unit 68.

[0084] In the phase lag compensation unit 6D shown in Figure 18, the operations of the differentiator 64, phase synchronization compensator 65, third filter 66 and integrator 67 are the same as the operations of the corresponding parts in the phase lag compensation unit 6C shown in Figure 16, and so explanations thereof will be omitted here.

[0085] The reference model unit 68 generates a model torque based on the operation command and outputs it to the compensation execution unit 61B. The reference model unit 68 can be constructed using the functions of the reference model unit 21 provided in the FF control unit 2, so no new design is required. Furthermore, the reference model unit 21 of the FF control unit 2 generates a model position and velocity in addition to the model torque, but the reference model unit 68 of the phase-lag compensation unit 6D only needs to generate a model torque. For this reason, the reference model unit 68 can be configured smaller than the reference model unit 21. Note that a model position or a model velocity may be input to the compensation execution unit 61B instead of the model torque.

[0086] The compensation execution unit 61A of the phase lag compensation unit 6C according to the fifth embodiment shown in Fig. 16 generates the compensated angle based on the phase lag characteristic, compensation speed, and filtered angle of the first filter unit 8. In contrast, the compensation execution unit 61B of the phase lag compensation unit 6D according to the sixth embodiment shown in Fig. 18 generates the compensated angle using the transfer characteristic from the angle of the phase lag compensation unit 6D to the filtered angle and the model torque, in addition to the phase lag characteristic, compensation speed, and filtered angle of the first filter unit 8. The reason for this is as follows.

[0087] In the compensation execution unit 61B of the phase lag compensation unit 6D according to the sixth embodiment, the phase lag caused by the filtering process in the first filter unit 8 and the phase lag caused by the filtering process in the third filter 66 are compensated for. However, the phase lag caused by the filtering process in the third filter 66 may cause a deviation depending on the shape of the operation command. For example, when a proportional-plus-integral compensator is used for the phase synchronization compensator 65, if the shape of the operation command is a ramp shape in the dimension of the speed of the operation command, the deviation does not become zero, and the steady-state deviation a / K ｉ where a is the acceleration of the motion command, and K ｉ is the integral gain of the proportional-integral compensator. In such a case, compensation can be performed using information on the operation command. Specifically, the compensation formula shown in the following formula (7) is used.

[0088]

[0089] In the above formula (7), θ ｘ is the compensated angle output by the compensation execution unit 61B, θ ｆ２ is the filtered angle, which is the output of the integrator 67; ｃ is the compensation speed, which is the output of the third filter 66, f ＬＰＦ１ is the cutoff frequency when the first filter unit 8 is a low-pass filter. ｉ can be known in advance if the set value of the proportional-integral compensator is determined in advance. The acceleration a of the operation command can be obtained by dividing the inertia of the moving part of the controlled object 40 from the model torque.

[0090] As described above, the motor control device according to the sixth embodiment has the same configuration as the motor control device according to the first embodiment, except that the phase lag compensation unit includes a third filter, an integrator, a differentiator, a phase synchronization compensator, a reference model unit, and a compensation execution unit. The third filter generates a compensation speed. The integrator performs integration processing on the output of the third filter and outputs the resulting signal as a filtered angle. The differentiator generates a deviation, which is the difference between the angle and the filtered angle. The phase synchronization compensator performs phase synchronization compensation on the deviation so that the filtered angle follows the angle and outputs the resulting signal to the third filter. The reference model unit generates a model torque based on the operation command. The compensation execution unit uses the output of the third filter as a compensation speed and generates a compensated angle based on the phase lag characteristic of the first filter unit, the compensation speed, the filtered angle, and the model torque. According to the motor control device according to the sixth embodiment, the phase lag compensation unit includes a third filter, an integrator, a differentiator, a phase synchronization compensator, and a compensation execution unit. The actions of the third filter, integrator, differentiator, phase synchronization compensator, and compensation execution unit generate a filtered angle and a filtered speed in which the effects of noise are further reduced. This makes it possible to achieve both a further improvement in the noise reduction effect achieved by filtering and an improvement in the phase lag compensation effect achieved by phase compensation, compared to the motor control devices of Embodiments 1 and 2. Furthermore, the motor control device of Embodiment 6 has the advantage of being able to omit the compensation speed calculation unit and thus be more compact than the motor control device of Embodiment 4. Furthermore, the motor control device of Embodiment 6 includes a reference model unit, and the compensation execution unit further generates a compensated angle using the model torque generated by the reference model unit, thereby achieving the effect of suppressing steady-state deviation that may occur due to the shape of the motion command.

[0091] The configurations shown in the above embodiments are merely examples, and may be combined with other known technologies, or different embodiments may be combined with each other. It is also possible to omit or modify parts of the configurations as long as they do not deviate from the gist of the invention.

[0092] 1, 1A, 1B, 1C, 1D, 1E, 1F, 1G Motor control device, 2 FF control unit, 3 FB control unit, 4, 4A, 4B, 4C, 4D, 4E, 4F, 4G FB signal generation unit, 5, 5A, 5B Compensation speed calculation unit, 6, 6A, 6B, 6C, 6D Phase delay compensation unit, 7 Angle calculation unit, 8 First filter unit, 8A, 8B Filter, 9 Speed ​​calculation unit, 21, 53, 62, 68 Reference model unit, 31 Position control unit, 32 Speed ​​control unit, 33 Torque control unit, 40 Controlled object, 41 Voltage applicator, 42 Motor, 42a Rotor, 43 Mechanical load, 44 Magnetic sensor, 45 Operation command generation unit, 51 Differentiator, 52 Second filter, 54, 64 Differentiator, 55, 65 Phase synchronization compensator, 56, 66 Third filter, 57, 67 Integrator, 61, 61A, 61B Compensation execution unit, 201 Processor, 202 Memory, 203 Processing circuit, 204 Interface.

Claims

1. A motor control device that controls the operation of a motor that drives a controlled object, comprising: a feedforward control unit that generates and outputs a model output that simulates the response of the controlled object based on an operation command for operating the controlled object; a feedback signal generation unit that generates a feedback signal based on magnetic sensor signals output from two magnetic sensors attached to the motor in accordance with the operation of the motor controlled by the operation command; and a feedback control unit that generates an operation variable that causes the controlled object to follow the operation command based on the model output and the feedback signal, and outputs the operation variable to a drive unit of the controlled object, wherein the feedback signal generation unit comprises: a first filter unit that performs filtering on each of the magnetic sensor signals; an angle calculation unit that calculates the angle of a rotor provided in the motor based on the output signal of the first filter unit; a phase lag compensation unit that outputs a compensated angle in which a phase lag of the angle is compensated based on the angle and the phase lag characteristic of the first filter unit, and any one of the operation command and a compensation speed for compensating for the phase lag of the angle; and a speed calculation unit that calculates the speed of the motor based on the compensated angle.

2. The motor control device according to claim 1, characterized in that the phase lag compensation unit generates the compensated angle based on the angle, the phase lag characteristics of the first filter unit, and the model speed included in the model output generated by the feedforward control unit, and outputs the compensated angle to the speed calculation unit and the feedback control unit.

3. The motor control device according to claim 1, characterized in that the phase lag compensation unit generates the compensation speed internally, generates the compensated angle based on the generated compensation speed, the angle and the phase lag characteristic of the first filter unit, and outputs the compensated angle to the speed calculation unit and the feedback control unit.

4. The motor control device described in claim 3, characterized in that the phase lag compensation unit comprises: a third filter that generates the compensation speed; an integrator that performs integration processing on the output of the third filter and outputs the resulting signal as a filtered angle; a differentiator that generates a deviation as a difference between the angle and the filtered angle; a phase synchronous compensator that performs phase synchronous compensation on the deviation so that the filtered angle follows the angle and outputs the resulting signal to the third filter; and a compensation execution unit that uses the output of the third filter as the compensation speed and generates the compensated angle based on the phase lag characteristic of the first filter unit, the compensation speed, and the filtered angle.

5. The motor control device described in claim 3, characterized in that the phase lag compensation unit generates the compensation speed based on the operation command, generates the compensated angle based on the generated compensation speed, the angle, and the phase lag characteristic of the first filter unit, and outputs it to the speed calculation unit and the feedback control unit.

6. The motor control device described in claim 5, characterized in that the phase lag compensation unit comprises: a reference model unit that generates a model speed based on the operation command; and a compensation execution unit that uses the model speed as the compensation speed and generates the compensated angle based on the angle, the phase lag characteristic of the first filter unit, and the compensation speed.

7. The motor control device according to claim 4, wherein the phase lag compensation unit comprises: a third filter that generates the compensation speed; an integrator that performs integration on the output of the third filter and outputs the resulting signal as a filtered angle; a differentiator that generates a deviation as a difference between the angle and the filtered angle; a phase lag compensator that performs phase synchronous compensation on the deviation so that the filtered angle follows the angle and outputs the resulting signal to the third filter; a reference model unit that generates a model torque based on the operation command; and a compensation execution unit that uses the output of the third filter as the compensation speed and generates the compensated angle based on the phase lag characteristic of the first filter unit, the compensation speed, the filtered angle, the model torque, and the transfer characteristic from the angle to the filtered angle.

8. The motor control device according to claim 1, wherein the feedback signal generating section further comprises a compensating speed calculating section that calculates the compensating speed based on the angle calculated by the angle calculating section.

9. The motor control device according to claim 8, wherein the compensation speed calculation unit comprises: a differentiator that performs differentiation processing on the angle and outputs an angle differentiation signal; and a second filter that performs filtering processing on the angle differentiation signal, and the output of the second filter is used as the compensation speed.

10. The motor control device described in claim 8, characterized in that the compensation speed calculation unit comprises: a third filter that generates the compensation speed used in the phase lag compensation unit; an integrator that performs integration processing on the output of the third filter and generates the resulting signal as a filtered angle; a differentiator that generates a deviation that is the difference between the angle and the filtered angle; and a phase synchronization compensator that performs phase synchronization compensation on the deviation so that the filtered angle follows the angle and outputs the resulting signal to the third filter.

11. The motor control device according to claim 8, characterized in that the phase lag compensation unit comprises: an integrator that integrates the filtered speed to generate a filtered angle; a differentiator that generates a deviation as a difference between the angle calculated by the angle calculation unit and the filtered angle; a phase synchronization compensator that performs phase synchronization compensation on the deviation so that the filtered angle follows the angle; a third filter that performs filtering on the output signal of the phase synchronization compensator and outputs the filtered signal to the integrator as the filtered speed; and a compensation execution unit that generates the compensated angle based on the phase lag characteristic of the first filter unit and the compensation speed and filtered angle output from the compensation speed calculation unit.

12. The motor control device according to claim 1, wherein the feedback signal generating section further comprises a compensating speed calculating section that calculates the compensating speed based on the operation command.

13. The motor control device described in claim 12, characterized in that the compensation speed calculation unit includes a reference model unit that simulates the characteristics of the controlled object, and the reference model unit outputs a model output that simulates the response of the controlled object while excluding the effects of noise based on the operation command, and the model output is used as the compensation speed.

14. A motor control device as described in claim 4, 7, 10 or 11, characterized in that the third filter is a notch filter, and the center frequency of the notch filter is changed sequentially based on the operation command, a model output generated based on the operation command, or the speed calculated by the speed calculation unit.

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