Shielded temperature sensor

Abstract

A mounting structure includes a connector with a central bore accommodating a sensor assembly, an adaptor fitting for system component connection, and a radio frequency (RF) shielding member affixed to the connector. The RF shielding member surrounds the sensor assembly, making contact with its outer surface at multiple discrete locations. This configuration effectively shields the sensor assembly from RF interference, providing more accurate and reliable sensor operation within an environment.

Description

SHIELDED TEMPERATURE SENSORCROSS-REFERENCE TO RELATED APPLICATION

[0001] This application claims priority to and the benefit of U.S. Patent Application No. 63 / 678,136, filed on August 1 , 2024. The disclosure of the above application is incorporated herein by reference.FIELD

[0002] The present disclosure relates to a mounting structure for mounting a sensor assembly to a system component, or within a harsh environment, and more particularly to a mounting structure with improved shielding effect against radio frequency (RF) interference.BACKGROUND

[0003] The statements in this section merely provide background information related to the present disclosure and may not constitute prior art.

[0004] A sensor assembly may be mounted to a system component by a typical connector with minimal additional features other than mechanical coupling features. The conventional connector often lacks specialized components or features for providing enhanced functionality or protection for the sensor assembly in certain environments. When the sensor assembly is used in a noise, vibration, and harshness (NVH) environment, a specially designed mounting structure may be needed to provide a strong locking mechanism for securing the sensor assembly in place over an extended period of time. When the sensor assembly is used in a high radio frequency (RF) energy environment, the measurements by the sensor assembly may be susceptible to errors due to RF interference in signal transmissions.

[0005] These issues relating to sensor assemblies mounted to a system component in harsh environments, or within an environment that is subjected to RF energy for example, are addressed in the present disclosure.SUMMARY

[0006] This section provides a general summary of the disclosure and is not a comprehensive disclosure of its full scope or all of its features.

[0007] In one form of the present disclosure, a mounting structureincludes: a connector configured to receive a sensor assembly; an adaptor fitting configured to couple the connector to a system component; and a radio frequency (RF) shielding member attached to the connector and configured to surround the sensor assembly to contact an outer surface of the sensor assembly at a plurality of discrete locations.

[0008] In some aspects, the techniques described herein relate to a mounting structure, wherein the plurality of discrete locations are disposed along an inner periphery of the RF shielding member.

[0009] In variations of this sensor assembly, which may be implemented individually or in combination: the RF shielding member is a multi-member contact; the multi-member contact includes a tubular body defining a plurality of slots along a longitudinal direction of the tubular body and a plurality of elongated strips each being disposed between adjacent two of the plurality of slots, the plurality of locations being at the plurality of elongated strips and separated by the plurality of slots; the RF shielding member is tapered from opposed ends to a middle portion; the plurality of discrete locations are in the middle portion and separated by elongated slots extending in a longitudinal direction of the RF shield member; the plurality of discrete locations are aligned along an inner periphery of the RF shielding member; the connector includes a female connector part and a male connector part, and the RF shielding member is attached to the male connector part; and the RF shielding member has a varied inside diameter along an axial direction of the RF shielding member, wherein the plurality of locations are disposed at a portion that has a smallest inside diameter.

[0010] In another form of the present disclosure, a sensing system includes: a sensor assembly; a connector defining a proximal end and a distal end; an adaptor fitting disposed at the distal end of the connector; and an radio frequency (RF) shielding member disposed at the proximal end of the connector, surrounding the sensor assembly and contacting the sensor assembly at a plurality of discrete locations.

[0011] In variations of this sensor assembly, which may be implemented individually or in combination: the plurality of discrete locations are disposed along an inner periphery of the RF shielding member; the RF shielding member is a multimember contact; the multi-member contact includes a tubular body having a varied inside diameter along an axial direction of the multi-member contact; the plurality of locations are at a portion of the tubular body that has a smallest inside diameter; themulti-member contact defines a plurality of slots along a longitudinal direction of the multi-member contact, the plurality of locations being located in elongated portions separated by the plurality of slots; the RF shielding member is tapered from opposed ends to a middle portion, the plurality of discrete locations being located in the middle portion; the connector includes a female connector part and a male connector part, the female connector part being connected to a system component, and the RF shielding member being connected to the male connector part; and further includes a spring protruding from the adaptor fitting; and the sensor assembly includes a sensor tip, an insertion portion, and a cable extending from the insertion portion, the insertion portion being extending through the adaptor fitting, the connector, the RF shielding member and into an aperture of a system component.

[0012] In another form of the present disclosure, a mounting structure for mounting a sensor assembly to a system component includes: an adaptor fitting attached to the system component; a female connector part attached to the adaptor fitting; a male connector part matingly engaging female connector and distal from the adaptor fitting, wherein the adaptor fitting, the female connector part, and the male connector part each define a central bore configured to allow the sensor assembly to extend through; and a radio frequency (RF) shielding member attached to the male connector and configured to surround the sensor assembly at a plurality of discrete locations along an inner periphery of the RF shielding member, wherein the RF shielding member has a varied inside diameter and define a plurality of elongated slots extending along a longitudinal direction of the RF shielding member, the plurality of locations being located at portions of the RF shielding member that has a smallest inside diameter and separated by the elongated slots. Further areas of applicability will become apparent from the description provided herein. It should be understood that the description and specific examples are intended for purposes of illustration only and are not intended to limit the scope of the present disclosure.DRAWINGS

[0013] In order that the disclosure may be well understood, there will now be described various forms thereof, given by way of example, reference being made to the accompanying drawings, in which:

[0014] FIG. 1 is a schematic view of a sensing system including a sensor assembly and a mounting structure constructed in accordance with the teachings of the present disclosure;

[0015] FIG. 2 is a cross-sectional view of the sensing system of FIG. 1, taken along line A-A of FIG. 1 , wherein the sensing system is shown to be installed to a system component;

[0016] FIG. 3 is a perspective view of a first adaptor fitting and a female connector part of the mounting system of the sensing system;

[0017] FIG. 4 is a perspective view of the mounting system in which the first adaptor fitting and the female connector part are removed for clarity;

[0018] FIG. 5 is a cross-sectional view of the mounting system without the first adaptor fitting and the female connector part, taken along line B-B of FIG. 4; and

[0019] FIG. 6 is a schematic view of a radio frequency (RF) shielding member disposed inside a second adaptor fitting of the mounting structure and constructed in accordance with the teachings of the present disclosure.

[0020] The drawings described herein are for illustration purposes only and are not intended to limit the scope of the present disclosure in any way.DETAILED DESCRIPTION

[0021] The following description is merely exemplary in nature and is not intended to limit the present disclosure, application, or uses. It should be understood that throughout the drawings, corresponding reference numerals indicate like or corresponding parts and features.

[0022] Referring to FIG. 1 , a sensing system 20 constructed in accordance with the teachings of the present disclosure includes a sensor assembly 22 and a mounting structure 24 for mounting the sensor assembly 22 to a system component 26 (shown only in FIG. 2) such that a sensing device 30 of the sensor assembly 22 can be fixed adjacent to a target (not shown), such as a showerhead of a semiconductor processing apparatus, for measuring or detecting a property or characteristics of the target and / or the surrounding environment.

[0023] The sensor assembly 22 includes an insertion portion 32 and a cable 34. The sensing device 30 is provided at a tip of the insertion portion 32. The insertion portion 32 is configured to be inserted through the mounting structure 24 andinto an aperture 28 of the system component 26 (shown only in FIG. 2) such that the sensor assembly 22 is installed to the system component 26 by the mounting structure 24. The insertion portion 32 protrudes from opposed ends of the mounting structure 24. The cable 34 extends from the insertion portion 32 to be connected to an external device (not shown), such as a measurement device or a controller, and transmits measurement signals from the sensing device 30 to the external device.

[0024] The cable 34 may further include a first quick connect 40 and a second quick connect 42 disposed at opposed ends of the cable 34 and configured to facilitate connection of the cable 34 to the insertion portion 32 and the external device (not shown), respectively. The cable 34 may include a braided shield. The sensing device 30 may be a temperature sensor, such as a thermocouple, or a resistance temperature detector (RTD), by way of example. It should be understood that other types of sensors (e.g. pressure, gas) may be employed while remaining within the scope of the present disclosure.

[0025] Referring to FIG. 2, the mounting structure 24 includes a first adaptor fitting 50 attached to the system component 26, a connector 52 connected to the first adaptor fitting 50, a radio frequency (RF) shielding member 54, and a second adaptor fitting 56 for mounting the RF shielding member 54 to the mounting structure 24. The first adaptor fitting 50, the connector 52, the RF shielding member 54, and the second adaptor fitting 56 are aligned along an axial direction of the insertion portion 32 and each define a central bore or a central space to allow the insertion portion 32 to extend through.

[0026] The first adaptor fitting 50 is configured to install the mounting structure 24 to the system component 26. The system component 26 could be, by way of example, a wall of a semiconductor processing chamber or. The first adaptor fitting 50 has a central bore to allow the insertion portion 32 of the sensor assembly 22 to extend through. The first adaptor fitting 50 may have a variety of configurations depending on applications and needs. For example, the first adaptor fitting 50 may have a distal shaft portion 60, a proximal shaft portion 62, and a nut portion 64 disposed therebetween. The distal shaft portion 60 and the proximal shaft portion 62 each have external threads for engaging the internal threads of the aperture 28 of the system component 26 and the internal threads of a distal end of the connector 52, respectively. The nut portion 64 allows for the use of a tool to tighten the first adaptor fitting 50 into the aperture 28 of the system component 26 and into the connector 52.

[0027] The connector 52 includes a female connector part 66 (i.e., a socket) for engaging the first adaptor fitting 50, and a male connector part 68 (i.e., a plug) for matingly engaging the female connector part 66. In one form, the connector 52 may be a Bayonet Neill-Concelman (BNC) connector that is available off the shelf. The first adaptor fitting 50 is designed to connect the connector 52 to the system component 26 and the second adaptor fitting 56 is designed to mount the RF shielding member 54 inside the mounting structure 24 and around the sensor assembly 22.

[0028] Referring also to FIG. 3, the female connector part 66 includes a distal shaft portion 70 for engaging the first adaptor fitting 50 and a proximal shaft portion 72 for engaging the male connector part 68, and a flange 74 disposed therebetween. The proximal shaft portion 62 of the first adaptor fitting 50 is screwed into the distal shaft portion 70 of the female connector part 66. The proximal shaft portion 72 of the female connector part 66 include internal threads (not shown) for engaging external threads of the male connector part 68 and includes a pair of bayonets 76 on an outer surface.

[0029] Referring to FIGS. 4 and 5, the mounting structure 24 is shown to have the female connector part 66 and the first adaptor fitting 50 (FIG. 3) removed for clarity. The male connector part 68 is shown to include a distal end portion 77, a proximal end portion 78, and a flange 79 disposed therebetween. The distal end portion 77 defines a pair of grooves 80 corresponding to the pair of bayonets 76 of the female connector part 66 (FIG. 3). The grooves 80 define a locking position and an unlocking position. When the distal end portion 77 of the male connector part 68 is inserted into the proximal shaft portion 72 of the female connector part 66, the bayonets 76 are received in the grooves 80 and are located in the unlocking position. By rotating the male connector part 68 relative to the female connector part 66, the bayonets 76 are guided by the grooves 80 into the locking position. As such, the bayonets 76 in the locking position of the grooves 80 inhibit the male connector part 68 from disengaging from the female connector part 66.

[0030] To enhance the locking engagement between the bayonets 76 of the female connector part 66 and the grooves 80 of the male connector part 68, the mounting structure 24 may further include a bushing sleeve 84 disposed around the insertion portion 32, a spring 86 disposed around the bushing sleeve 84, and a first retaining ring 87 disposed at an end of the spring 86. The spring 86 may be, for example, a coil spring, however any elastic member that is configured to apply acompressive force (e.g., elastomeric body) between the male connector part 68 and the first retaining ring 87 may be employed while remaining within the scope of the present disclosure. The first retaining ring 87 is configured to support and maintain the bushing sleeve 84 and the spring 86 inside the female connector part 66 and between the first retaining ring 87 and the male connector part 68. The spring 86 provides a biasing force to the female connector part 66 against the male connector part 68, particularly, a biasing force to the bayonets 76 (FIG. 3) against the wall of the grooves 80 so as to maintain the bayonets 76 in the locking position of the grooves 80 and the engagement between the female connector part 66 and male connector part 68.

[0031] As further shown, the second adaptor fitting 56 is connected to the proximal end portion 78 of the male connector part 68 to provide a receiving space 82 (shown in FIG. 6) for receiving the RF shielding member 54 therein. The second adaptor fitting 56 includes an outer tubular member 88 screwed into the proximal end portion 78 of the male connector part 68, and an inner tubular member 89 screwed into the outer tubular member 88 and defining the inner receiving space 82. A second retaining ring 91 may be provided at an end of the second adaptor fitting 56 to further fix the second adaptor fitting 56 to the mounting structure 24.

[0032] Referring to FIG. 6, the outer tubular member 88 (FIG. 5) of the second adaptor fitting 56 is removed to more clearly show the inner tubular member 89 and the receiving space 82 defined in the inner tubular member 89. The inner tubular member 89 incudes external threads such that the inner tubular member 89 can be threaded into the outer tubular member 88 (not shown in FIG. 6). The inner tubular member 89 includes an inner surface defining the receiving space 82. The RF shielding member 54 is disposed inside the receiving space 82 and around the insertion portion 32 to contact the inner surface of the inner tubular member 89 and the outer surface of the insertion portion 32 of the sensor assembly 22.

[0033] The RF shielding member 54 has a tubular body 90 defining opposed ends 92 connected to the second retaining ring 91 and the male connector part 68, respectively. The tubular body 90 is electrically conductive and has a varied inside diameter along an axial direction of the tubular body 90. In one form, the tubular body 90 may be tapered from the opposed ends 92 toward a middle portion 94 of the tubular body 90 in the axial direction of the tubular body 90 such that the middle portion 94 has the smallest inside diameter of the tubular body 90. The tubular body 90 defines a plurality of slots 96 along the axial direction of the tubular body 90 such that a pluralityof elongated strips 95 extend along a longitudinal direction of the tubular body 90 and are separated by the slots 96. The plurality of elongated strips 95 are deflectable to facilitate contact between the RF shielding member 54 and the insertion portion 32 (shown in FIG. 5). The plurality of elongated strips 95 define a plurality of discrete contact points 98 along an inner surface of tubular body 90 for contacting the insertion portion 32 of the sensor assembly 22 along an outer peripheral surface of the insertion portion 32 at a plurality of discrete locations. The plurality of discrete contact points 98 between the RF shielding member 54 and the insertion portion 32 of the sensor assembly 22 establish a plurality of grounding paths, thereby shielding an RF interference. In this form, the RF shielding member 54 is also referred to as a multimember contact with the plurality of elongated strips 95 (i.e., a “multilam” contact).

[0034] In the sensing system 20 constructed in accordance with the teachings of the present disclosure, the sensing system 20 includes a number of shields that help inhibit RF noise interference with measurement signals. In one form, the number of shields are formed in one single integral component, i.e., the RF shielding member 54, with a plurality of elongated portions extending along a longitudinal axis of the RF shielding member 54 and separated by a plurality of slots 96 to establish a plurality of discrete contact points with the sensor assembly 22. Therefore, the sensor assembly 22 is properly grounded by the RF shielding member 54, thereby reducing the effect of self-heating that would otherwise be generated due to the sensor sheath absorbing RF energy and converting it to heat. With improved shields against RF noise interference with measurement signals, the sensing system 20 can be used in high RF energy environment while providing accurate measurements by the sensing device 30.

[0035] Unless otherwise expressly indicated herein, all numerical values indicating mechanical / thermal properties, compositional percentages, dimensions and / or tolerances, or other characteristics are to be understood as modified by the word “about” or "approximately" in describing the scope of the present disclosure. This modification is desired for various reasons including industrial practice, material, manufacturing, and assembly tolerances, and testing capability.

[0036] As used herein, the phrase at least one of A, B, and C should be construed to mean a logical (A OR B OR C), using a non-exclusive logical OR, and should not be construed to mean “at least one of A, at least one of B, and at least one of C.”

[0037] The description of the disclosure is merely exemplary in nature and, thus, variations that do not depart from the substance of the disclosure are intended to be within the scope of the disclosure. Such variations are not to be regarded as a departure from the spirit and scope of the disclosure.

Claims

CLAIMSWhat is claimed is:1 . A mounting structure comprising: a connector configured to receive a sensor assembly; an adaptor fitting configured to couple the connector to a system component; and a radio frequency (RF) shielding member attached to the connector and configured to surround the sensor assembly to contact an outer surface of the sensor assembly at a plurality of discrete locations.

2. The mounting structure according to Claim 1 , wherein the plurality of discrete locations are disposed along an inner periphery of the RF shielding member.

3. The mounting structure according to Claim 1 , wherein the RF shielding member is a multi-member contact.

4. The mounting structure according to Claim 3, wherein the multi-member contact includes a tubular body defining a plurality of slots along a longitudinal direction of the tubular body and a plurality of elongated strips each being disposed between adjacent two of the plurality of slots, the plurality of discrete locations being at the plurality of elongated strips and separated by the plurality of slots.

5. The mounting structure according to Claim 1 , wherein the RF shielding member is tapered from opposed ends to a middle portion.

6. The mounting structure according to Claim 5, wherein the plurality of discrete locations are in the middle portion and separated by elongated slots extending in a longitudinal direction of the RF shielding member.

7. The mounting structure according to Claim 1 , wherein the plurality of discrete locations are aligned along an inner periphery of the RF shielding member.

8. The mounting structure according to Claim 1, wherein the connectorincludes a female connector part and a male connector part, and the RF shielding member is attached to the male connector part.

9. The mounting structure according to Claim 1 , wherein the RF shielding member has a varied inside diameter along an axial direction of the RF shielding member, wherein the plurality of discrete locations are disposed at a portion that has a smallest inside diameter.

10. A sensing system comprising: a sensor assembly; a connector defining a proximal end and a distal end; an adaptor fitting disposed at the distal end of the connector; and an radio frequency (RF) shielding member disposed at the proximal end of the connector, surrounding the sensor assembly and contacting the sensor assembly at a plurality of discrete locations.

11. The sensing system according to Claim 10, wherein the plurality of discrete locations are disposed along an inner periphery of the RF shielding member.

12. The sensing system according to Claim 10, wherein the RF shielding member is a multi-member contact.

13. The sensing system according to Claim 12, wherein the multi-member contact includes a tubular body having a varied inside diameter along an axial direction of the multi-member contact.

14. The sensing system according to Claim 13, wherein the plurality of discrete locations are at a portion of the tubular body that has a smallest inside diameter.

15. The sensing system according to Claim 13, wherein the multi-member contact defines a plurality of slots along a longitudinal direction of the multi-member contact, the plurality of discrete locations being located in elongated portions separated by the plurality of slots.

16. The sensing system according to Claim 10, wherein the RF shielding member is tapered from opposed ends to a middle portion, the plurality of discrete locations being located in the middle portion.

17. The sensing system according to Claim 10, wherein the connector includes a female connector part and a male connector part, the female connector part being connected to a system component, and the RF shielding member being connected to the male connector part.

18. The sensing system according to Claim 10, further comprising a spring protruding from the adaptor fitting.

19. The sensing system according to Claim 10, wherein the sensor assembly includes a sensor tip, an insertion portion, and a cable extending from the insertion portion, the insertion portion being extending through the adaptor fitting, the connector, the RF shielding member and into an aperture of a system component.

20. A mounting structure for mounting a sensor assembly to a system component, the mounting structure comprising: an adaptor fitting attached to the system component; a female connector part attached to the adaptor fitting; a male connector part matingly engaging female connector and distal from the adaptor fitting, wherein the adaptor fitting, the female connector part, and the male connector part each define a central bore configured to allow the sensor assembly to extend through; and a radio frequency (RF) shielding member attached to the male connector and configured to surround the sensor assembly at a plurality of discrete locations along an inner periphery of the RF shielding member, wherein the RF shielding member has a varied inside diameter and define a plurality of elongated slots extending along a longitudinal direction of the RF shielding member, the plurality of locations being located at portions of the RF shielding member that has a smallest inside diameter and separated by the elongated slots.

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